Axisymmetric heating assembly layout using double-ended lamps

Abstract

An apparatus for heating a substrate in a substrate processing chamber is described herein. More specifically, a lamp module that can be used in the substrate processing chamber is described. The lamp module includes a reflector body. The reflector body is a reflective material. The reflector body includes grooves disposed in a surface and configured to direct radiant energy to a substrate. Each ring includes multiple grooves having different cross sections that allow radiant energy to be directed from the same ring to different radial positions of the substrate. The grooves can be either curved or straight grooves.

Description

[Technical field]

[0001] FIELD OF THE DISCLOSURE Embodiments of the present disclosure relate generally to an apparatus and method for making semiconductor devices. More particularly, the apparatus disclosed herein relates to a lamphead and reflector assembly in a semiconductor processing chamber. [Background technology]

[0002] Semiconductor substrates are processed for a wide variety of applications, including the creation of integrated and microdevices. During processing, the substrate is placed on a susceptor within a process chamber. The susceptor is supported by a support shaft that is rotatable about a central axis. The heat source is preferably precisely controlled to uniformly heat the substrate within close tolerances. The temperature of the substrate can affect the uniformity of materials deposited on the substrate.

[0003] The ability to precisely control the substrate temperature in a process chamber has a significant impact on throughput and manufacturing yield. Conventional process chambers have difficulty meeting the ever-increasing demands for improved manufacturing yields and faster throughput while meeting the temperature control standards necessary to create next-generation devices. Conventional process chambers have also utilized non-uniform power distribution across the substrate. Temperature cycling of the substrate caused by non-uniform power distribution can damage or distort the substrate and also increases the likelihood of different lamps burning out over a wider range of times.

[0004] Therefore, there is a need for an improved process chamber and lamp module apparatus that can provide even heating of the substrate, reduce temperature cycling, and increase lamp life. Summary of the Invention

[0005] The present disclosure generally relates to an apparatus for substrate processing, such as a lamp assembly for heating a substrate during a deposition process. In one embodiment, a lamp module for substrate processing is described. The lamp module includes a reflector body, one or more first grooves disposed in a first surface of the reflector body, and one or more second grooves disposed in the first surface of the reflector body. Each of the first grooves is configured to receive a lamp. Each of the second grooves is also configured to receive a lamp. The one or more first grooves and the one or more second grooves form a first ring of grooves. A cross-sectional shape of the one or more first grooves is different from a cross-sectional shape of the one or more second grooves.

[0006] In another embodiment, another lamp module for substrate processing is described. The lamp module includes a reflector body, one or more first grooves arranged in a first surface of the reflector body, one or more second grooves arranged in the first surface of the reflector body, one or more third grooves arranged in the first surface of the reflector body, and one or more fourth grooves arranged in the first surface of the reflector body. Each of the first grooves is configured to receive one or more linear lamps. Each of the second grooves is configured to receive one or more linear lamps. The one or more first grooves and the one or more second grooves are oriented to form at least a portion of a first ring, and the one or more third grooves and the one or more fourth grooves are oriented to form at least a portion of a second ring circumscribing the first ring.

[0007] In another embodiment, another lamp module for substrate processing is described. The lamp module includes a reflector body, one or more first grooves disposed in a first surface of the reflector body, one or more second grooves disposed in the first surface of the reflector body, one or more third grooves disposed in the first surface of the reflector body, and one or more fourth grooves disposed in the first surface of the reflector body. The one or more first grooves and the one or more second grooves are oriented to form at least a portion of a first ring. The one or more third grooves and the one or more fourth grooves are oriented to form at least a portion of a second ring circumscribing the first ring. The one or more first grooves have a different cross-sectional shape than the one or more second grooves.

[0008] In order that the above-listed features of the present disclosure may be understood in detail, the present disclosure as outlined above may be further described in detail with reference to embodiments, some of which are illustrated in the accompanying drawings. It should be noted, however, that the accompanying drawings only illustrate exemplary embodiments of the present disclosure and therefore should not be considered as limiting its scope, since other equally effective implementations may be permitted. [Brief description of the drawings]

[0009] [Figure 1] FIG. 2 is a schematic diagram of a deposition chamber according to an embodiment of the present disclosure. [Figure 2A] 1 is a bottom view of a first embodiment of an upper lamp module, according to an embodiment of the present disclosure. FIG. [Figure 2B] 1 is a cross-sectional view illustrating a first embodiment of an upper lamp module according to an embodiment of the present disclosure. [Figure 3A] FIG. 2 is a top view of a first embodiment of a lower lamp module, according to an embodiment of the present disclosure. [Figure 3B] FIG. 2 is a cross-sectional view of a first embodiment of a lower lamp module according to an embodiment of the present disclosure. [Figure 4A]FIG. 13 is a bottom view of a second embodiment of an upper lamp module, according to an embodiment of the present disclosure. [Figure 4B] FIG. 11 is a cross-sectional view illustrating a second embodiment of an upper lamp module according to an embodiment of the present disclosure. [Figure 5A] FIG. 13 is a top view of a second embodiment of a lower lamp module, according to an embodiment of the present disclosure. [Figure 5B] FIG. 11 is a cross-sectional view illustrating a second embodiment of a lower lamp module according to an embodiment of the present disclosure. [Figure 6A] FIG. 13 is a bottom view of a third embodiment of an upper lamp module, according to an embodiment of the present disclosure. [Figure 6B] FIG. 13 is a cross-sectional view illustrating a third embodiment of an upper lamp module according to an embodiment of the present disclosure. [Figure 7A] FIG. 13 is a plan view of a third embodiment of a lower lamp module, according to an embodiment of the present disclosure. [Figure 7B] FIG. 13 is a cross-sectional view illustrating a third embodiment of a lower lamp module according to an embodiment of the present disclosure. [Figure 8A] FIG. 2 illustrates a linear lamp used in the deposition chamber of FIG. 1 according to an embodiment of the present disclosure. [Figure 8B] FIG. 2 illustrates a curved lamp used in the deposition chamber of FIG. 1 according to an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] To facilitate understanding, the same reference numbers have been used, where possible, to designate identical elements that are common to the figures. It is contemplated that elements and features of one embodiment may be beneficially utilized on other embodiments without additional recitation.

[0011] The present disclosure relates to a lamphead and reflector assembly in a semiconductor processing chamber. More specifically, the semiconductor processing chamber is a deposition chamber or an epitaxial deposition chamber. The lamphead and reflector assembly as described herein includes either linear or curved lamps arranged in an axially symmetric layout. Different lamp layouts and reflector configurations are described herein that beneficially reduce temperature cycling in a substrate processed in the processing chamber, are more adjustable, improve temperature uniformity in stationary chamber components, and allow better window cooling. By arranging linear lamps in a circular pattern, heating can be performed nearly continuously at similar radial positions of the substrate, thereby reducing temperature cycling of the substrate. In arrangements where heating along the same radial position is not continuous, the lamps and reflectors are arranged to reduce the number of heating zones that each position on the substrate passes through.

[0012] 1 is a schematic diagram of a deposition chamber 100 according to an embodiment of the present disclosure. The deposition chamber 100 is an epitaxial deposition chamber. The deposition chamber 100 is utilized to grow an epitaxial film on a substrate, such as a substrate 102. The deposition chamber 100 creates a cross-flow of precursors across a top surface 150 of the substrate 102.

[0013] The deposition chamber 100 includes an upper body 156, a lower body 148 disposed below the upper body 156, and a flow module 112 disposed between the upper body 156 and the lower body 148. The upper body 156, the flow module 112, and the lower body 148 form a chamber body. Disposed within the chamber body are a substrate support 106, an upper window 108, a lower window 110, a plurality of upper lamps 141, and a plurality of lower lamps 143. As shown, a controller 120 is in communication with the deposition chamber 100 and is used to control the process as described herein. The substrate support 106 is disposed between the upper window 108 and the lower window 110. The plurality of upper lamps 141 are disposed between the upper window 108 and the lid 154. The plurality of upper lamps 141 form a portion of an upper lamp module 155. The lid 154 may include a number of sensors (not shown) disposed therein for measuring the temperature within the deposition chamber 100. A number of lower lamps 143 are disposed between the lower window 110 and the floor 152. The number of lower lamps 143 form a portion of a lower lamp module 145. The upper window 108 is an upper dome and is formed of an energy transparent material such as quartz. The lower window 110 is a lower dome and is formed of an energy transparent material such as quartz.

[0014] A processing volume 136 is formed between the upper window 108 and the lower window 110. The processing volume 136 has a substrate support 106 disposed therein. The substrate support 106 includes an upper surface on which the substrate 102 is disposed. The substrate support 106 is attached to a shaft 118. The shaft is connected to a motion assembly 121. The motion assembly 121 includes one or more actuators and / or adjustment devices that effect movement and / or adjustment of the shaft 118 and / or the substrate support 106 within the processing volume 136. The motion assembly 121 includes a rotational actuator 122 that rotates the shaft 118 and / or the substrate support 106 about a longitudinal axis A of the deposition chamber 100. The motion assembly 121 further includes a vertical actuator 124 that raises and lowers the substrate support 106 in the z-direction. The motion assembly includes a tilt adjustment device 126 used to adjust the planar orientation of the substrate support 106 and a lateral adjustment device 128 used to adjust the position of the adjacent shaft 118 and substrate support 106 within the processing volume 136.

[0015] The substrate support 106 may include lift pin holes 107 disposed therein. The lift pin holes 107 are sized to accommodate lift pins 132 for lifting the substrate 102 off the substrate support 106 either before or after a deposition process is performed. The lift pins 132 may rest on lift pin stops 134 when the substrate support 106 is lowered from the processing position to the transfer position.

[0016] The flow module 112 includes a plurality of process gas inlets 114, a plurality of purge gas inlets 164, and one or more exhaust pump outlets 116. The plurality of process gas inlets 114 and the plurality of purge gas inlets 164 are disposed on an opposite side of the flow module 112 from the one or more exhaust pump outlets 116. The one or more flow guides 146 are disposed below the plurality of process gas inlets 114 and the one or more exhaust pump outlets 116. The flow guide 146 is disposed above the purge gas inlet 164. A liner 163 is disposed on an inner surface of the flow module 112 to protect the flow module 112 from reactive gases used during the deposition process. The process gas inlets 114 and the purge gas inlets 164 are positioned to flow gases parallel to an upper surface 150 of a substrate 102 disposed in the processing volume 136. The process gas inlets 114 are fluidly connected to a process gas source 151. The purge gas inlet 164 is fluidly connected to a purge gas source 162. The one or more exhaust pump outlets 116 are fluidly connected to an exhaust pump 157.

[0017] FIG. 2A shows a bottom view of a first embodiment of the upper lamp module 155a. The upper lamp module 155a includes a reflector body 200 and a plurality of upper lamps 141 (FIG. 1). The reflector body 200 includes a plurality of grooves formed on a lower surface 202. The lower surface 202 may be described as a first surface of the reflector body 200. The upper surface 203 (FIG. 2B) is disposed opposite the lower surface 202 and may be described as a second surface. The upper surface 203 is parallel to the lower surface 202. The lower surface 202 includes a plurality of grooves 206a-206h.

[0018] Each of the plurality of grooves 206a-206h is configured to hold a horizontal lamp extending along the direction of each of the grooves 206a-206h. The walls 216 of each of the plurality of grooves 206a-206h have a generally elliptical, circular, parabolic, or oval cross-section and are configured to direct energy emitted by the lamp toward a substrate within the deposition chamber 100.

[0019] In some embodiments, the reflector body 200 is formed of a reflective material, such as aluminum or steel. In some embodiments, the reflector body 200 is formed of a first material, such as aluminum or steel, and plated with a second material. The second material may be any one of copper, nickel, brass, bronze, silver, gold, aluminum, or an alloy of the above materials. The second material may be polished to increase reflectivity. In some embodiments, the entire reflector body 200 is formed of the second material. The lower surface 202 may have a reflectivity of greater than about 90%, such as greater than about 98%, for wavelengths from about 700 nm to about 15000 nm, such as from about 700 nm to about 1000 nm or from about 1000 nm to about 15000 nm. The lower surface 202 is made of or coated with the second material.

[0020] The plurality of grooves 206a-206h are arranged to form portions of concentric rings along the lower surface 202. In the embodiment of FIG. 2A, the first groove 206a and the second groove 206b form a first ring. The third groove 206c and the fourth groove 206d form a second ring. The fifth groove 206e and the sixth groove 206f form a third ring. The seventh groove 206g and the eighth groove 206h form a fourth ring. The second ring is circumscribing and concentric with the first ring. The third ring is circumscribing and concentric with the second ring. The fourth ring is circumscribing and concentric with the third ring. As shown herein, each of the plurality of grooves 206a-206h forms a semicircle, whereby the first groove 206a forms a first semicircle, the second groove 206b forms a second semicircle, the third groove 206c forms a third semicircle, the fourth groove 206d forms a fourth semicircle, and so on. In alternative embodiments, the plurality of grooves 206a-206h do not form a complete semicircle, but instead form less than 50% of a circle, such as an arc that extends less than 180 degrees about a central axis. Also, each of the plurality of grooves 206a-206h may form less than 40% of a circle, such as an arc that extends less than about 145 degrees about a central axis. Also, each of the plurality of grooves 206a-206h may form about 30% to about 35% of a circle, such as an arc that extends about 105 degrees to about 130 degrees about a central axis. Each of the plurality of grooves 206a-206h may form less than about 30% of a circle, such as an arc that extends less than 105 degrees about a central axis. Each of the plurality of grooves 206a-206h may form between about 20% and about 29% of a circle, such as an arc that extends between about 70 degrees and about 100 degrees about a central axis. Each of the plurality of grooves 206a-206h is a curved groove and extends along a curved length.

[0021] Each of the grooves 206a-206h has at least one hole 208 formed therethrough. The hole 208 extends from the bottom of one of the grooves 206a-206h to the top surface 203 to allow electrical connections for a lamp to be disposed therethrough. As shown herein, each of the grooves 206a-206h includes at least two holes 208, such as two holes 208. Each of the holes 208 is located proximate to a distal end of the groove 206a-206h such that one hole 208 is located at a distal end of one of the grooves 206a-206h and a second hole 208 is located at an opposite distal end of the same groove 206a-206h. In addition to providing electrical support, the holes 208 may serve to allow mechanical support of a lamp disposed within each of the grooves 206a-206h. Each of the lamps in the grooves 206a-h includes a filament 205 (four are shown in phantom for clarity). The filaments 205 are shown in some of the grooves 206a-h herein to indicate the position of the linear lamp filament relative to each of the grooves 206a-h. The filaments 205 are disposed between two holes 208 formed in the grooves 206a-h.

[0022] The grooves 206a-206h are divided into at least two portions. As shown in FIG. 2A, the grooves 206a-206h are divided into two halves across the first cross section S1. Dividing the grooves 206a-206h allows the grooves on either side of the first cross section S1 to have different cross-sectional shapes and be configured to direct energy from the lamps towards different radial positions on the substrate. A divider 210 is disposed between the first and second halves. The first half is formed by the first groove 206a, the third groove 206c, the fifth groove 206e, and the seventh groove 206g. The second half is formed by the second groove 206b, the fourth groove 206d, the sixth groove 206f, and the eighth groove 206h. The divider 210 is a flat surface between the two halves. The divider 210 may protrude from or along the lower surface 202. The divider 210 may have one or more holes or openings disposed therethrough for one or more of a pyrometer, a spot heating device, a cooling gas channel, or a heating gas channel. Additionally, the length of the divider 210 across the lower surface 202 allows the pyrometer openings to be used to measure temperature at multiple locations along the substrate or substrate support 106.

[0023] Additional cross sections S2, S3, and S4 are disposed through the reflector body 200. The additional cross sections S2, S3, and S4 are shown to illustrate additional locations where a divider similar to the divider 210 can be disposed to divide the grooves 206a-206h to form smaller grooves. The second cross section S2 is disposed at an angle of about 30 degrees to about 70 degrees from the first cross section S1. The third cross section S3 is disposed at an angle of about 90 degrees from the first cross section S1. The fourth cross section S4 is disposed at an angle of about -30 degrees to about -70 degrees from the first cross section S1. If the grooves 206a-206h are divided through the third cross section S3 in addition to through the first cross section S1, the grooves 206a-206h form a quadrant or a curve less than a quadrant. The grooves 206a-206h may be further divided through a second cross section S2 and a fourth cross section S4. Thus, the grooves 206a-206h may be divided to form less than 13% of a circle, such as an octant. Thus, the cross sections S1, S2, S3, and S4 divide the reflector body 200 into sections 212, each section 212 being sector or pie shaped.

[0024] In some embodiments, each of the grooves 206a-206h comprises a further subsection groove, such that one or more of the grooves 206a-206h each comprises a plurality of subsections, such as one groove subsection, two groove subsections, three groove subsections, four groove subsections, or five groove subsections. The number of separate grooves or groove subsections, each of the first groove 206a, the second groove 206b, the third groove 206c, the fourth groove 206d, the fifth groove 206e, the sixth groove 206f, the seventh groove 206g, or the eighth groove 206h, varies depending on the desired radiation distribution on the substrate. In some embodiments, the individual grooves forming the grooves 206a-206h are connected to form a single groove, but the cross-section of the groove varies at a cross-sectional line, such as one of the first cross-section S1, the second cross-section S2, the third cross-section S3, or the fourth cross-section S4. In this embodiment, the plurality of individual grooves forming grooves 206a-206h, although also referred to as individual grooves, are actually a single continuous groove of varying cross-section.

[0025] FIG. 2B shows a cross-sectional view of a first embodiment of the upper lamp module 155a. The cross-section is taken along the plane 2B-2B, dividing the reflector body 200 in half. Each of the grooves 206a-206h is centered on the axis A. Each of the grooves 206a-206h is configured to direct radiant energy to a different portion of the substrate 102. The first groove 206a and the second groove 206b form a first ring, but the first groove 206a and the second groove 206b have different cross-sectional shapes so that the lamps disposed in the first groove 206a and the second groove 206b, respectively, can be directed toward different radial positions on the substrate 102. The walls 216 of each of the grooves 206a-206h form the cross-sectional shape of the grooves 206a-206h. The walls 216 of each of the grooves 206a-206h define a cross-sectional shape that is at least a portion of an ellipse, a circle, an oval, a parabola, an oval, a hyperbola, or other suitable curvilinear shape.

[0026] The walls 216 of the first groove 206a have a different cross-sectional shape than the walls 216 of the second groove 206b, such that the first groove 206a and the second groove 206b direct radiant energy in different directions and / or directions that are not mirror images of each other. The walls 216 of the third groove 206c have a different cross-sectional shape than the walls 216 of the fourth groove 206d. The walls 216 of the fifth groove 206e have a different cross-sectional shape than the walls 216 of the sixth groove 206f. The walls 216 of the seventh groove 206g have a different cross-sectional shape than the walls 216 of the eighth groove 206h.

[0027] The cross section of the first groove 206a concentrates light in a first direction, the first direction having a first angle θ1 with respect to the vertical plane, the vertical plane being parallel to the axis A. The cross section of the second groove 206b concentrates light in a second direction, the second direction having a second angle θ2 with respect to the vertical plane. The cross section of the third groove 206c concentrates light in a third direction, the third direction having a third angle θ3 with respect to the vertical plane. The cross section of the fourth groove 206d concentrates light in a fourth direction, the fourth direction having a fourth angle θ4 with respect to the vertical plane. The cross section of the fifth groove 206e concentrates light in a fifth direction, the fifth direction having a fifth angle θ5 with respect to the vertical plane. The cross section of the sixth groove 206f concentrates light in a sixth direction, the sixth direction having a sixth angle θ6 with respect to the vertical plane. The cross section of the seventh groove 206g focuses light in a seventh direction, the seventh direction having a seventh angle θ with respect to the vertical. The cross section of the eighth groove 206h focuses light in an eighth direction, the eighth direction having an eighth angle θ with respect to the vertical.

[0028] The first angle θ1 is different from the second angle θ2. The third angle θ3 is different from the fourth angle θ4. The fifth angle θ5 is different from the sixth angle θ6. The seventh angle θ7 is different from the eighth angle θ8.

[0029] Each set of grooves 206a-206h in each ring is shaped to direct energy to a different radial location along the wafer, allowing for advanced thermal control. The grooves 206a-206h may be grouped such that a controller controls several of the grooves 206a-206h simultaneously. Each of the individual grooves in the first grooves 206a are controlled together. Each of the individual grooves in the second grooves 206b are controlled together. Each of the individual grooves in the third grooves 206c are controlled together. Each of the individual grooves in the fourth grooves 206d are controlled together. Each of the individual grooves in the fifth grooves 206e are controlled together. Each of the individual grooves in the sixth grooves 206f are controlled together. Each of the individual grooves in the seventh grooves 206g are controlled together. Each of the individual grooves in the eighth grooves 206h are controlled together.

[0030] FIG. 3A shows a plan view of a first embodiment of the lower lamp module 145a. The lower lamp module 145a includes a reflector body 300 and a plurality of lower lamps 143 (FIG. 1). The reflector body 300 includes a plurality of grooves formed on an upper surface 302. The upper surface 302 may be described as a first surface of the reflector body 300. The lower surface 303 (FIG. 3B) is disposed opposite the upper surface 302 and may be described as a second surface. The lower surface 303 is parallel to the upper surface 302. The upper surface 302 includes a plurality of grooves 306a-306h.

[0031] Each of the plurality of grooves 306a-306h is configured to hold a horizontal lamp extending along the direction of each of the grooves 306a-306h. The walls 316 of each of the plurality of grooves 306a-306h have a generally elliptical, circular, parabolic, or oval cross-section and are configured to direct energy emitted by the lamp towards a substrate in the deposition chamber 100.

[0032] In some embodiments, the reflector body 300 is formed of a reflective material, such as aluminum or steel. In some embodiments, the reflector body 300 is formed of a first material, such as aluminum or steel, and plated with a second material. The second material may be any one of copper, nickel, brass, bronze, silver, gold, aluminum, or an alloy of the above materials. The second material may be polished to increase reflectivity. In some embodiments, the entire reflector body 300 is formed of the second material. The top surface 302 may have a reflectivity of greater than about 90%, such as greater than about 98%, for wavelengths from about 700 nm to about 15000 nm, such as from about 700 nm to about 1000 nm or from about 1000 nm to about 15000 nm. The top surface 302 is made of or coated with the second material.

[0033] The plurality of grooves 306a-306h are arranged to form portions of concentric rings along the top surface 302. In the embodiment of FIG. 2A, the first groove 306a and the second groove 306b form a first ring. The third groove 306c and the fourth groove 306d form a second ring. The fifth groove 306e and the sixth groove 306f form a third ring. The seventh groove 306g and the eighth groove 306h form a fourth ring. The second ring is circumscribing and concentric with the first ring. The third ring is circumscribing and concentric with the second ring. The fourth ring is circumscribing and concentric with the third ring. As shown herein, each of the plurality of grooves 306a-306h forms a semicircle, whereby the first groove 306a forms a first semicircle, the second groove 306b forms a second semicircle, the third groove 306c forms a third semicircle, the fourth groove 306d forms a fourth semicircle, and so on. In alternative embodiments, the plurality of grooves 306a-306h do not form a complete semicircle, but instead form less than 50% of a circle, such as an arc that extends less than 180 degrees about a central axis. Also, each of the plurality of grooves 306a-306h may form less than 40% of a circle, such as an arc that extends less than about 145 degrees about a central axis. Also, each of the plurality of grooves 306a-306h may form about 30% to about 35% of a circle, such as an arc that extends about 105 degrees to about 130 degrees about a central axis. Additionally, each of the plurality of grooves 306a-306h may form less than about 30% of a circle, such as an arc that extends less than 105 degrees about a central axis. Additionally, each of the plurality of grooves 306a-306h may form between about 20% and about 29% of a circle, such as an arc that extends between about 70 degrees and about 100 degrees about a central axis. Each of the plurality of grooves 306a-306h is a curved groove and extends along a curved length.

[0034] Each of the grooves 306a-306h has at least one hole 308 formed therethrough. Each hole 308 extends from the top of one of the grooves 306a-306h to the lower surface 303 to allow electrical connections of a lamp to be disposed therethrough. As shown herein, each of the grooves 306a-306h includes at least two holes 308, such as two holes 308. Each of the holes 308 is located proximate to a distal end of the groove 306a-306h such that one hole 308 is located at a distal end of one of the grooves 306a-306h and a second hole 308 is located at an opposite distal end of the same groove 306a-306h. In addition to providing electrical support, the holes 308 may serve to allow mechanical support of a lamp disposed within each of the grooves 306a-306h. Each of the lamps in grooves 306a-306h includes a filament 305 (four shown in phantom for clarity). Filaments 305 are shown in some of grooves 306a-306h herein to indicate the position of a linear lamp filament relative to each of grooves 306a-306h. Filament 305 is disposed between two holes 308 formed in grooves 306a-306h.

[0035] The grooves 306a-306h are divided into at least two parts. As shown in FIG. 2A, the grooves 306a-306h are divided into two halves across the first cross section S5. The first half is formed by the first groove 306a, the third groove 306c, the fifth groove 306e, and the seventh groove 306g. The second half is formed by the second groove 306b, the fourth groove 306d, the sixth groove 306f, and the eighth groove 306h.

[0036] An opening 310 is formed through the reflector body 300. The opening 310 is a passageway that extends from the top surface 302 to the bottom surface 303 of the reflector body 300. The opening 310 allows the shaft 118 of the substrate support 106 to pass through. The opening is disposed within a first ring of grooves, such as between the first groove 306a and the second groove 306b. The opening 310 is disposed through the center of the reflector body 300 and about an axis A.

[0037] Additional cross sections S6, S7, and S8 are disposed through the reflector body 300. The additional cross sections S6, S7, and S8 are used to illustrate additional locations where the grooves 306a-306h can be divided to form smaller grooves. The second cross section S6 is disposed at an angle of about 90 degrees from the first cross section S1. The third cross section S7 is disposed at an angle of about -30 degrees to about -70 degrees from the first cross section S5. The fourth cross section S8 is disposed at an angle of about 30 degrees to about 70 degrees from the first cross section S5. If the grooves 306a-306h are divided through the third cross section S7 in addition to through the first cross section S5, the grooves 306a-306h form a quadrant or a curve less than a quadrant. The grooves 306a-306h may be further divided through the second cross section S6 and the fourth cross section S8. Thus, the grooves 306a-306h may be divided to form less than 13% of a circle, such as an octant. The cross sections S5, S6, S7, and S8 thus divide the reflector body 300 into sections 312, each section 312 being sector or pie shaped.

[0038] In some embodiments, each of the grooves 306a-306h comprises a further subsection groove, such that one or more of the grooves 306a-306h each comprises a plurality of subsections, such as one groove subsection, two groove subsections, three groove subsections, four groove subsections, or five groove subsections. The number of separate grooves or groove subsections comprising each of the first groove 306a, the second groove 306b, the third groove 306c, the fourth groove 306d, the fifth groove 306e, the sixth groove 306f, the seventh groove 306g, or the eighth groove 306h varies depending on the desired radiation distribution on the substrate. In some embodiments, the individual grooves forming the grooves 306a-306h are connected to form a single groove, but the cross-section of the groove varies at a cross-section line, such as one of the fifth cross-section S5, the sixth cross-section S6, the seventh cross-section S7, or the eighth cross-section S8. In this embodiment, the multiple individual grooves forming grooves 306a-306h, although still referred to as individual grooves, are in fact a single continuous groove of varying cross-section.

[0039] FIG. 3B shows a cross-sectional view of a first embodiment of the lower lamp module 145a. The cross-section is taken along the plane 3B-3B, dividing the reflector body 300 in half. Each of the grooves 306a-306h is centered on the axis A. Each of the grooves 306a-306h is configured to direct radiant energy to a different portion of the substrate 102 or the substrate support 106. The first groove 306a and the second groove 306b form a first ring, but the first groove 306a and the second groove 306b have different cross-sectional shapes so that the lamps disposed in the first groove 306a and the second groove 306b, respectively, can be directed toward different radial positions on the substrate 102. The walls 316 of each of the grooves 306a-306h form the cross-sectional shape of the grooves 306a-306h. The walls 316 of each of the grooves 306a-306h define a cross-sectional shape that is at least a portion of an ellipse, a circle, an oval, a parabola, an oval, a hyperbola, or other suitable curvilinear shape.

[0040] The walls 316 of the first groove 306g have a different cross-sectional shape than the walls 316 of the second groove 306b. The walls 316 of the third groove 306c have a different cross-sectional shape than the walls 316 of the fourth groove 306d. The walls 316 of the fifth groove 306e have a different cross-sectional shape than the walls 316 of the sixth groove 306f. The walls 316 of the seventh groove 306g have a different cross-sectional shape than the walls 316 of the eighth groove 306h.

[0041] The cross section of the first groove 306a concentrates light in a first direction, the first direction having a first angle θ9 with respect to the vertical plane, the vertical plane being parallel to the axis A. The cross section of the second groove 306b concentrates light in a second direction, the second direction having a second angle θ9 with respect to the vertical plane. 10 The cross section of the third groove 306c concentrates light in a third direction, the third direction being at a third angle θ with respect to the vertical. 11 The cross section of the fourth groove 306d concentrates light in a fourth direction, the fourth direction being at a fourth angle θ 12 The cross section of the fifth groove 306e concentrates light in a fifth direction, and the fifth direction is at a fifth angle θ 13The cross section of the sixth groove 306f concentrates light in a sixth direction, and the sixth direction is at a sixth angle θ 14 The cross section of the seventh groove 306g concentrates light in a seventh direction, and the seventh direction is at a seventh angle θ with respect to the vertical plane. 15 The cross section of the eighth groove 306h concentrates light in an eighth direction, and the eighth direction is at an eighth angle θ with respect to the vertical plane. 16 has.

[0042] The first angle θ9 is the second angle θ 10 The third angle θ 11 is the fourth angle θ 12 The fifth angle θ 13 is the sixth angle θ 14 The seventh angle θ 15 is the eighth angle θ 16 is different.

[0043] Each set of grooves 306a-306h in each ring is shaped to direct energy to a different radial location along the wafer, allowing for advanced thermal control. The grooves 306a-306h may be grouped such that a controller controls several of the grooves 306a-306h simultaneously. Each of the individual grooves in the first grooves 306a are controlled together. Each of the individual grooves in the second grooves 306b are controlled together. Each of the individual grooves in the third grooves 306c are controlled together. Each of the individual grooves in the fourth grooves 306d are controlled together. Each of the individual grooves in the fifth grooves 306e are controlled together. Each of the individual grooves in the sixth grooves 306f are controlled together. Each of the individual grooves in the seventh grooves 306g are controlled together. Each of the individual grooves in the eighth grooves 306h are controlled together.

[0044] FIG. 4A shows a bottom view of a second embodiment of the upper lamp module 155b. The upper lamp module 155b includes a reflector body 400 and a plurality of upper lamps 141 (FIG. 1). The reflector body 400 includes a plurality of grooves formed on a lower surface 402. The lower surface 402 may be described as a first surface of the reflector body 400. The upper surface 403 (FIG. 4B) is disposed opposite the lower surface 402 and may be described as a second surface. The upper surface 403 is parallel to the lower surface 402. The lower surface 402 includes a plurality of grooves 406a-406h.

[0045] Each of the plurality of grooves 406a-406h is configured to hold a horizontal lamp extending along the direction of each of the plurality of grooves 406a-406h. The walls 416 of each of the plurality of grooves 406a-406h have a generally elliptical, circular, parabolic, or oval cross-section and are configured to direct energy emitted by the lamp toward a substrate within the deposition chamber 100.

[0046] In some embodiments, the reflector body 400 is formed of a reflective material, such as aluminum or steel. In some embodiments, the reflector body 400 is formed of a first material, such as aluminum or steel, and plated with a second material. The second material may be any one of copper, nickel, brass, bronze, silver, gold, aluminum, or an alloy of the above materials. The second material may be polished to increase reflectivity. In some embodiments, the entirety of the reflector body 400 is formed of the second material. The lower surface 402 may have a reflectivity of greater than about 90%, such as greater than about 98%, for wavelengths from about 700 nm to about 15000 nm, such as from about 700 nm to about 1000 nm or from about 1000 nm to about 15000 nm. The lower surface 402 is made of or coated with the second material.

[0047] The plurality of grooves 406a-406h are arranged to form portions of concentric rings along the lower surface 402. In the embodiment of FIG. 2A, the one or more first grooves 406a and the one or more second grooves 406b form a first ring. The one or more third grooves 406c and the one or more fourth grooves 406d form a second ring. The one or more fifth grooves 406e and the one or more sixth grooves 406f form a third ring. The one or more seventh grooves 406g and the one or more eighth grooves 406h form a fourth ring. The second ring is circumscribing and concentric with the first ring. The third ring is circumscribing and concentric with the second ring. The fourth ring is circumscribing and concentric with the third ring. As shown herein, each of the plurality of grooves 406a-406h forms a semicircle, whereby the one or more first grooves 406a form a first semicircle, the one or more second grooves 406b form a second semicircle, the one or more third grooves 406c form a third semicircle, the one or more fourth grooves 406d form a fourth semicircle, and so on. In alternative embodiments, the plurality of grooves 406a-406h do not form a complete semicircle, but instead form less than 50% of a circle, such as an arc that extends less than 180 degrees about a central axis. Also, each of the plurality of grooves 406a-406h may form less than 40% of a circle, such as an arc that extends less than about 145 degrees about a central axis. Also, each of the plurality of grooves 406a-406h may form about 30% to about 35% of a circle, such as an arc that extends about 105 degrees to about 130 degrees about a central axis. Additionally, each of the plurality of grooves 406a-406h may form less than about 30% of a circle, such as an arc extending less than 105 degrees about a central axis, or each of the plurality of grooves 406a-406h may form about 20% to about 29% of a circle, such as an arc extending about 70 degrees to about 100 degrees about a central axis.

[0048] Each of the plurality of grooves 406a-406h is formed from a plurality of individual grooves 420. Each of the individual grooves 420 is a linear groove and configured to receive a linear lamp therein. The linear length of each of the individual grooves 420 is between about 35 mm and about 175 mm, such as between about 50 mm and about 150 mm. The linear length of each of the individual grooves 420 is selected to provide uniform heating within a given annulus of the substrate and also to reduce the number of lamps in the upper lamp module 155b. Reducing the number of lamps in the upper lamp module 155b reduces costs, simplifies maintenance, and reduces the number of holes 408 formed through the reflector body 400.

[0049] Each of the individual grooves 420 in the plurality of grooves 406a-406h has at least one hole 408 formed therethrough. The hole 408 extends from a bottom of one of the grooves 406a-406h to the top surface 403 to allow for electrical connections of a lamp to be disposed therethrough. As shown herein, each of the individual grooves 420 of the grooves 406a-406h includes at least two holes 408, such as two holes 408. Each of the holes 408 is located proximate to a distal end of the groove 406a-406h such that one hole 408 is located at a distal end of one of the individual grooves 420 and a second hole 408 is located at an opposite distal end of the same individual groove 420. In addition to providing electrical support, the holes 408 may serve to allow for mechanical support of a lamp disposed within each of the grooves 406a-406h. Each linear lamp in each groove 420 includes a filament 405 (seven are shown in phantom for clarity). Filaments 405 are shown in some of the individual grooves 420 herein to indicate the position of the linear lamp filament relative to each individual groove 420. Filament 405 is disposed between two holes 408 formed in grooves 406a-406i.

[0050] The grooves 406a-406h are divided into at least two parts. As shown in FIG. 4A, the grooves 406a-406h are divided into two halves across the first cross section S1. The first half is formed by the first groove 406a, the third groove 406c, the fifth groove 406e, and the seventh groove 406g. The second half is formed by the second groove 406b, the fourth groove 406d, the sixth groove 406f, and the eighth groove 406h. The flat surface 410 is disposed intermediate the grooves 406a-406h and through the central axis A of the reflector body 400. The flat surface 410 may protrude from or be along the lower surface 402.

[0051] There may be between 2 and 10 individual grooves 420 forming each of the first groove 406a, the second groove 406b, the third groove 406c, the fourth groove 406d, the fifth groove 406e, the sixth groove 406f, the seventh groove 406g, and the eighth groove 406h. There may be between 2 and 5 individual grooves 420 forming each of the first groove 406a, the second groove 406b, the third groove 406c, the fourth groove 406d, the fifth groove 406e, the sixth groove 406f, the seventh groove 406g, and the eighth groove 406h. The number of individual grooves 420, each of which comprises a first groove 406a, a second groove 406b, a third groove 406c, a fourth groove 406d, a fifth groove 406e, a sixth groove 406f, a seventh groove 406g, or an eighth groove 406h, varies depending on the desired radiation distribution on the substrate. In some embodiments, the individual grooves forming grooves 406a-406h are connected to form a single groove, but the cross-section of the groove varies at a cross-sectional line, such as a first cross-section S1 or another cross-section (not shown). In this embodiment, the multiple individual grooves forming grooves 406a-406h, although also referred to as individual grooves, are in fact a single continuous groove with a varying cross-section.

[0052] FIG. 4B shows a cross-sectional view of a second embodiment of the upper lamp module 155b. The cross-section is taken along the plane 4B-4B, dividing the reflector body 400 in half. Each of the grooves 406a-406h is centered on the axis A. Each of the grooves 406a-406h is configured to direct radiant energy to a different portion of the substrate 102. The one or more first grooves 406a and the one or more second grooves 406b form a first ring, but the one or more first grooves 406a and the one or more second grooves 406b have different cross-sectional shapes to allow lamps disposed in the one or more first grooves 406a and the one or more second grooves 406b, respectively, to be directed toward different radial positions on the substrate 102. The walls 416 of each of the grooves 406a-406h form the cross-sectional shape of the grooves 406a-406h. The walls 416 of each of the grooves 406a-406h define a cross-sectional shape that is at least a portion of an ellipse, a circle, an oval, a parabola, an oval, a hyperbola, or other suitable curvilinear shape.

[0053] The walls 416 of the one or more first grooves 406a have a different cross-sectional shape than the walls 416 of the one or more second grooves 406b. The walls 416 of the one or more third grooves 406c have a different cross-sectional shape than the walls 416 of the fourth grooves 406d. The walls 416 of the one or more fifth grooves 406e have a different cross-sectional shape than the walls 416 of the one or more sixth grooves 406f. The walls 216 of the one or more seventh grooves 406g have a different cross-sectional shape than the walls 416 of the one or more eighth grooves 406h.

[0054] A cross section of the one or more first grooves 406a concentrates light in a first direction, the first direction having a first angle θ1 with respect to a vertical plane, the vertical plane being parallel to the axis A. A cross section of the one or more second grooves 406b concentrates light in a second direction, the second direction having a second angle θ2 with respect to the vertical plane. A cross section of the one or more third grooves 406c concentrates light in a third direction, the third direction having a third angle θ3 with respect to the vertical plane. A cross section of the one or more fourth grooves 406d concentrates light in a fourth direction, the fourth direction having a fourth angle θ4 with respect to the vertical plane. A cross section of the one or more fifth grooves 406e concentrates light in a fifth direction, the fifth direction having a fifth angle θ5 with respect to the vertical plane. A cross-section of the one or more sixth grooves 406f concentrates light in a sixth direction, the sixth direction having a sixth angle θ6 with respect to the vertical. A cross-section of the one or more seventh grooves 406g concentrates light in a seventh direction, the seventh direction having a seventh angle θ7 with respect to the vertical. A cross-section of the one or more eighth grooves 406h concentrates light in an eighth direction, the eighth direction having an eighth angle θ8 with respect to the vertical.

[0055] The first angle θ1 is different from the second angle θ2. The third angle θ3 is different from the fourth angle θ4. The fifth angle θ5 is different from the sixth angle θ6. The seventh angle θ7 is different from the eighth angle θ8. In some embodiments, individual grooves in the plurality of grooves 406a-406h can be oriented in a different direction and have different cross-sectional shapes than adjacent grooves in the same groove 406a-406h.

[0056] Each set of grooves 406a-406h in each ring is shaped to direct energy to a different radial location along the wafer, allowing for advanced thermal control. The grooves 406a-406h may be grouped such that a controller controls several of the grooves 406a-406h simultaneously. The individual grooves 420 in the first grooves 406a are each controlled together. The individual grooves 420 in the second grooves 406b are each controlled together. The individual grooves 420 in the third grooves 406c are each controlled together. The individual grooves 420 in the fourth grooves 406d are each controlled together. The individual grooves 420 in the fifth grooves 406e are each controlled together. The individual grooves 420 in the sixth grooves 406f are each controlled together. The individual grooves 420 in the seventh grooves 406g are each controlled together. The individual grooves 420 in the eighth grooves 406h are each controlled together.

[0057] FIG. 5A shows a plan view of a second embodiment of the lower lamp module 145b. The lower lamp module 145b includes a reflector body 500 and a plurality of lower lamps 143 (FIG. 1). The reflector body 500 includes a plurality of grooves formed on an upper surface 502. The upper surface 502 may be described as a first surface of the reflector body 500. The lower surface 503 (FIG. 5B) is disposed opposite the upper surface 502 and may be described as a second surface. The lower surface 503 is parallel to the upper surface 502. The upper surface 502 includes a plurality of grooves 506a-506h.

[0058] Each of the plurality of grooves 506a-506h is configured to hold a horizontal lamp extending along the direction of each of the plurality of grooves 506a-506h. The walls 516 of each of the plurality of grooves 506a-506h have a generally elliptical, circular, parabolic, or oval cross-section and are configured to direct energy emitted by the lamp toward a substrate in the deposition chamber 100.

[0059] In some embodiments, the reflector body 500 is formed of a reflective material, such as aluminum or steel. In some embodiments, the reflector body 500 is formed of a first material, such as aluminum or steel, and plated with a second material. The second material may be any one of copper, nickel, brass, bronze, silver, gold, aluminum, or an alloy of the above materials. The second material may be polished to increase reflectivity. In some embodiments, the entirety of the reflector body 500 is formed of the second material. The top surface 502 may have a reflectivity of greater than about 90%, such as greater than about 98%, for wavelengths from about 700 nm to about 15000 nm, such as from about 700 nm to about 1000 nm or from about 1000 nm to about 15000 nm. The top surface 502 is made of or coated with the second material.

[0060] The plurality of grooves 506a-506h are arranged to form portions of concentric rings along the upper surface 502. In the embodiment of FIG. 5A, the one or more first grooves 506a and the one or more second grooves 506b form a first ring. The one or more third grooves 506c and the one or more fourth grooves 506d form a second ring. The one or more fifth grooves 506e and the one or more sixth grooves 506f form a third ring. The one or more seventh grooves 506g and the one or more eighth grooves 506h form a fourth ring. The second ring is circumscribing and concentric with the first ring. The third ring is circumscribing and concentric with the second ring. The fourth ring is circumscribing and concentric with the third ring. As shown herein, each of the plurality of grooves 506a-506h forms a semicircle, whereby the one or more first grooves 506a form a first semicircle, the one or more second grooves 506b form a second semicircle, the one or more third grooves 506c form a third semicircle, the one or more fourth grooves 506d form a fourth semicircle, and so on. In alternative embodiments, each of the plurality of grooves 506a-506h does not form a complete semicircle, but instead forms less than 50% of a circle, such as an arc extending less than 180 degrees about a central axis. Also, each of the plurality of grooves 506a-506h may form less than 40% of a circle, such as an arc extending less than about 145 degrees about a central axis. Each of the plurality of grooves 506a-506h may form about 30% to about 35% of a circle, such as an arc extending about 105 degrees to about 130 degrees about a central axis. Each of the plurality of grooves 506a-506h may form less than about 30% of a circle, such as an arc extending less than 105 degrees about a central axis. Each of the plurality of grooves 506a-506h may form about 20% to about 29% of a circle, such as an arc extending about 70 degrees to about 100 degrees about a central axis. Each of the plurality of grooves 506a-506h is formed from a plurality of individual grooves 520.

[0061] Each individual groove 520 is a linear groove and is configured to receive a linear lamp therein. The linear length of each individual groove 520 is between about 35 mm and about 175 mm, such as between about 50 mm and about 150 mm. The linear length of each individual groove 520 is selected to provide uniform heating within a given annulus of the substrate and also to reduce the number of lamps in the lower lamp module 145b. Reducing the number of lamps in the lower lamp module 145b reduces costs, simplifies maintenance, and reduces the number of holes 508 formed through the reflector body 500.

[0062] Each of the individual grooves 520 in the plurality of grooves 506a-506h has at least one hole 508 formed therethrough. The hole 508 extends from a bottom of one of the grooves 506a-506h to the lower surface 503 to allow for electrical connections of a lamp to be disposed therethrough. As shown herein, each of the individual grooves 520 of the grooves 506a-506h includes at least two holes 508, such as two holes 508. Each of the holes 508 is located proximate to a distal end of the groove 506a-506h such that one hole 508 is located at a distal end of one of the individual grooves 520 and a second hole 508 is located at an opposite distal end of the same individual groove 520. In addition to providing electrical support, the holes 508 may serve to allow for mechanical support of a lamp disposed within each of the grooves 506a-506h. Each linear lamp in each groove 520 includes a filament 505 (seven are shown in phantom for clarity). Filaments 505 are shown in some of the individual grooves 520 herein to indicate the position of the linear lamp filament relative to each individual groove 520. Filament 505 is disposed between two holes 508 formed in grooves 506a-506i.

[0063] The grooves 506a-506h are divided into at least two parts. As shown in FIG. 5A, the grooves 506a-506h are divided into two halves across the first cross section S5. The first half is formed by the first groove 506a, the third groove 506c, the fifth groove 506e, and the seventh groove 506g. The second half is formed by the second groove 506b, the fourth groove 506d, the sixth groove 506f, and the eighth groove 506h.

[0064] The opening 510 is disposed intermediate the grooves 506a-506h and the reflector body 500. The opening 510 is a passageway that extends from the top surface 502 to the bottom surface 503 of the reflector body 500. The opening 510 allows the shaft 118 of the substrate support 106 to pass through. The opening 510 is disposed within a first ring of grooves, such as between the first groove 506a and the second groove 506b. The opening 510 is disposed through the center of the reflector body 500 and centered about the axis A.

[0065] There may be between 2 and 10 individual grooves 520 forming each of the first groove 506a, the second groove 506b, the third groove 506c, the fourth groove 506d, the tenth groove 506e, the sixth groove 506f, the seventh groove 506g, and the eighth groove 506h. There may be between 2 and 5 individual grooves 520 forming each of the first groove 506a, the second groove 506b, the third groove 506c, the fourth groove 506d, the fifth groove 506e, the sixth groove 506f, the seventh groove 506g, and the eighth groove 506h. The number of individual grooves 520, each of which comprises the first groove 506a, the second groove 506b, the third groove 506vc, the fourth groove 506d, the fifth groove 506e, the sixth groove 506f, the seventh groove 506g, or the eighth groove 506h, varies depending on the desired radiation distribution on the substrate. In some embodiments, the individual grooves 520 forming grooves 506a-506h are connected to form a single groove, but the cross-section of the groove changes at a cross-sectional line, such as the fifth cross-section S5 or another cross-section (not shown). In this embodiment, the multiple individual grooves 520 forming grooves 506a-506h, although still referred to as individual grooves 520, are in fact a single continuous groove of varying cross-section.

[0066] FIG. 5B shows a cross-sectional view of a second embodiment of the lower lamp module 145b. The cross-section is taken along the plane 5B-5B, dividing the reflector body 500 in half. Each of the grooves 506a-506h is centered on the axis A. Each of the grooves 506a-506h is configured to direct radiant energy to a different portion of the substrate 102 or substrate support 106. The one or more first grooves 506a and the one or more second grooves 506b form a first ring, but the one or more first grooves 506a and the one or more second grooves 506b have different cross-sectional shapes to allow the lamps disposed in each of the one or more first grooves 506a and the one or more second grooves 506b to be directed toward different radial positions on the substrate 102. The walls 516 of each of the grooves 506a-506h form the cross-sectional shape of the grooves 506a-506h. The walls 516 of each of the grooves 506a-506h form a cross-sectional shape that is at least a portion of an ellipse, a circle, an oval, a parabola, an oval, a hyperbola, or other suitable curvilinear shape.

[0067] The walls 516 of the one or more first grooves 506a have a different cross-sectional shape than the walls 516 of the one or more second grooves 506b. The walls 516 of the one or more third grooves 506c have a different cross-sectional shape than the walls 516 of the fourth grooves 506d. The walls 516 of the one or more fifth grooves 506e have a different cross-sectional shape than the walls 516 of the one or more sixth grooves 506f. The walls 516 of the one or more seventh grooves 506g have a different cross-sectional shape than the walls 516 of the one or more eighth grooves 506h.

[0068] A cross-section of the one or more first grooves 506a concentrates light in a first direction, the first direction having a first angle θ9 with respect to a vertical plane, the vertical plane being parallel to the axis A. A cross-section of the one or more second grooves 506b concentrates light in a second direction, the second direction having a second angle θ9 with respect to the vertical plane. 10 A cross section of the one or more third grooves 506c concentrates light in a third direction, the third direction being at a third angle θ with respect to the vertical. 11A cross section of the one or more fourth grooves 506d concentrates light in a fourth direction, the fourth direction being at a fourth angle θ with respect to the vertical. 12 The cross section of the one or more fifth grooves 506e concentrates light in a fifth direction, the fifth direction being at a fifth angle θ with respect to the vertical. 13 The cross section of the one or more sixth grooves 506f concentrates light in a sixth direction, the sixth direction being at a sixth angle θ with respect to the vertical plane. 14 The cross section of the one or more seventh grooves 506g concentrates light in a seventh direction, the seventh direction being at a seventh angle θ with respect to the vertical. 15 The cross section of the one or more eighth grooves 506h concentrates light in an eighth direction, the eighth direction being at an eighth angle θ with respect to the vertical plane. 16 has.

[0069] The first angle θ9 is the second angle θ 10 The third angle θ 11 is the fourth angle θ 12 The fifth angle θ 13 is the sixth angle θ 14 The seventh angle θ 15 is the eighth angle θ 16 In some embodiments, individual grooves within the plurality of grooves 506a-506h can be oriented in a different direction and have a different cross-sectional shape than adjacent grooves within the same groove 506a-506h.

[0070] Each set of grooves 506a-506h in each ring is shaped to direct energy to a different radial location along the wafer, allowing for advanced thermal control. The grooves 506a-506h may be grouped such that a controller controls several of the grooves 506a-506h simultaneously. Each of the individual grooves 520 in the first grooves 506a are controlled together. Each of the individual grooves 520 in the second grooves 506b are controlled together. Each of the individual grooves 520 in the third grooves 506c are controlled together. Each of the individual grooves 520 in the fourth grooves 506d are controlled together. Each of the individual grooves 520 in the fifth grooves 406e are controlled together. Each of the individual grooves 520 in the sixth grooves 506f are controlled together. Each of the individual grooves 520 in the seventh grooves 506g are controlled together. Each of the individual grooves 520 in the eighth grooves 506h are controlled together.

[0071] FIG. 6A shows a bottom view of a third embodiment of the upper lamp module 155c. The upper lamp module 155c includes a reflector body 600 and a plurality of upper lamps 141 (FIG. 1). The reflector body 600 includes a plurality of grooves 606a-606i formed in a lower surface 602. The lower surface 602 may be described as a first surface of the reflector body 600. The upper surface 603 (FIG. 6B) is disposed opposite the lower surface 602 and may be described as a second surface. The upper surface 603 is parallel to the lower surface 602. The lower surface 602 includes a plurality of grooves 606a-606i.

[0072] Each of the plurality of grooves 606a-606i is configured to hold a horizontal lamp extending along the direction of each of the plurality of grooves 606a-606i. The walls 616 of each of the plurality of grooves 606a-606i have a generally elliptical, circular, parabolic, or oval cross-section and are configured to direct energy emitted by the lamp towards a substrate in the deposition chamber 100.

[0073] In some embodiments, the reflector body 600 is formed of a reflective material, such as aluminum or steel. In some embodiments, the reflector body 600 is formed of a first material, such as aluminum or steel, and plated with a second material. The second material may be any one of copper, nickel, brass, bronze, silver, gold, aluminum, or an alloy of the above materials. The second material may be polished to increase reflectivity. In some embodiments, the entirety of the reflector body 600 is formed of the second material. The lower surface 602 may have a reflectivity of greater than about 90%, such as greater than about 98%, for wavelengths from about 700 nm to about 15000 nm, such as from about 700 nm to about 1000 nm or from about 1000 nm to about 15000 nm. The lower surface 602 is made of or coated with the second material.

[0074] The plurality of grooves 606a-606i are arranged to form portions of concentric rings along the lower surface 602. The first ring is formed by the plurality of first grooves 606a and the plurality of second grooves 606b. The second ring is formed by the plurality of third grooves 606c and the plurality of fourth grooves 606d. The third ring is formed by the plurality of fifth grooves 606e and the plurality of sixth grooves 606f. The fourth ring is formed by the plurality of seventh grooves 606g, the plurality of eighth grooves 606h, and the plurality of ninth grooves 606i. Each of the plurality of grooves 606a-606i is formed from a plurality of individual grooves 620. Each of the individual grooves 620 is a linear groove and configured to have a linear ramp disposed therein. The linear length of each of the individual grooves 620 is about 35 mm to about 175 mm, such as about 50 mm to about 150 mm. The linear length of each individual groove 620 is selected to provide uniform heating within a given annulus of the substrate while also reducing the number of lamps in the upper lamp module 155c, which reduces cost, simplifies maintenance, and reduces the number of holes 608 drilled through the reflector body 600.

[0075] Each of the individual grooves 620 in the plurality of grooves 606a-606i has at least one hole 608 formed therethrough. The hole 608 extends from the top of one of the grooves 606a-606i to the top surface 603 to allow for electrical connections of a lamp to be disposed therethrough. As shown herein, each of the individual grooves 620 of the grooves 606a-606i includes at least two holes 608, such as two holes 608. Each of the holes 608 is located proximate to a distal end of the groove 606a-606i such that one hole 608 is located at a distal end of one of the individual grooves 620 and a second hole 608 is located at an opposite distal end of the same individual groove 620. In addition to providing electrical support, the holes 608 may serve to allow for mechanical support of a lamp disposed within each of the grooves 606a-606i.

[0076] Each linear lamp in each groove 620 includes a filament 605 (six are shown in phantom for clarity). Filaments 605 are shown in some of the individual grooves 620 herein to indicate the position of the linear lamp filament relative to each individual groove 620. Filament 605 is disposed between two holes 608 formed in grooves 606a-606i.

[0077] The flat surface 610 is disposed intermediate the grooves 606a-606i and through the central axis A of the reflector body 600. The flat surface 610 may protrude from or be along the lower surface 602. The flat surface 610 is disposed in the center of the grooves 606a-606i, such as between the plurality of first grooves 606a and the plurality of second grooves 606b.

[0078] There may be 2 to 10 individual grooves 620 forming each of the plurality of first grooves 606a, the plurality of second grooves 606b, the plurality of third grooves 606c, the plurality of fourth grooves 606d, the plurality of fifth grooves 606e, the plurality of sixth grooves 606f, the plurality of seventh grooves 606g, the plurality of eighth grooves 606h, and the plurality of ninth grooves 606i. There may be 2 to 5 individual grooves 620 forming each of the plurality of first grooves 606a, the plurality of second grooves 606b, the plurality of third grooves 606c, the plurality of fourth grooves 606d, the plurality of fifth grooves 606e, the plurality of sixth grooves 606f, the plurality of seventh grooves 606g, the plurality of eighth grooves 606h, and the plurality of ninth grooves 606i. The number of individual grooves 620, each of which comprises the first groove 606a, the second groove 606b, the third groove 606c, the fourth groove 606d, the fifth groove 606e, the sixth groove 606f, the seventh groove 606g, the eighth groove 606h, or the ninth groove 606i, varies depending on the desired radiation distribution on the substrate.

[0079] The pattern / location of each individual one of the grooves 606a-606i allows for good thermal control within the deposition chamber 100. The grooves 606a-606i are distributed to be symmetric across a plane, such as the first cross-section S1. The grooves 606a-606i may also be symmetric across other planes through the reflector body 600.

[0080] The first groove 606a and the second groove 606b are positioned such that the first groove 606a forms an approximately semicircular shape and the second groove 606b forms a second approximately semicircular shape. The ends of the two semicircular shapes are aligned to form a first ring. Although the first groove 606a is shown to include two individual grooves 620 and the second groove 606b is shown to include two individual grooves 620, respectively, other numbers of first grooves 606a and second grooves 606b are contemplated.

[0081] In some embodiments, the plurality of third grooves 606c and the plurality of ninth grooves 606i are aligned along the same axis such that a straight plane passes through each of the third grooves 606c and the ninth grooves 606i. The deposition chamber 100 may be oriented such that the third grooves 606c and the ninth grooves 606i are aligned along a direction of gas flow through the process volume 136.

[0082] The fourth grooves 606d are disposed between the aligned third grooves 606c such that one or more individual grooves 620 are disposed on either side of the third grooves 606c to form a second ring. In the embodiment shown in FIG. 6A, two individual grooves 620 of the fourth grooves 606d are disposed between each of the third grooves 606c such that a total of four fourth grooves 606d are disposed in two individual grooves 620.

[0083] The fifth grooves 606e and sixth grooves 606f are staggered to form a third ring, with an individual groove 620 of the sixth grooves 606f between each individual groove 620 of the fifth grooves 606e. There are an equal number of fifth grooves 606e and sixth grooves 606f, such as four fifth grooves 606e and four sixth grooves 606f.

[0084] The seventh grooves 606g and eighth grooves 606h are also staggered within the fourth ring. The seventh grooves 606g and eighth grooves 606h are disposed on either side of the ninth groove 606i. There are four seventh grooves 606g and four eighth grooves 606h.

[0085] In some embodiments, there may be more or fewer sets of grooves 606a-606i, or other arrangements of grooves 606a-606i, such that the number of individual grooves 620 within each set of grooves 606a-606i is varied.

[0086] FIG. 6B shows a cross-sectional view of a third embodiment of the upper lamp module 155c. The cross-section is taken along the plane 6B-6B, dividing the reflector body 600 in half. Each of the grooves 606a-606i is centered on the axis A. Each of the grooves 606a-606i is configured to direct radiant energy to a different portion of the substrate 102. The one or more first grooves 606a and the one or more second grooves 606b form a first ring, but the one or more first grooves 606a and the one or more second grooves 606b have different cross-sectional shapes to allow lamps disposed in the one or more first grooves 606a and the one or more second grooves 606b, respectively, to be directed toward different radial positions on the substrate 102. The walls 616 of each of the grooves 606a-606i form the cross-sectional shape of the grooves 606a-606i. The walls 616 of each of the grooves 606a-606i form a cross-sectional shape that is at least a portion of an ellipse, a circle, an oval, a parabola, an oval, a hyperbola, or other suitable curvilinear shape.

[0087] The walls 616 of the one or more first grooves 606a have a different cross-sectional shape than the walls 616 of the one or more second grooves 606b. The walls 616 of the one or more third grooves 606c have a different cross-sectional shape than the walls 616 of the fourth grooves 606d. The walls 616 of the one or more fifth grooves 606e have a different cross-sectional shape than the walls 616 of the one or more sixth grooves 606f. The walls 616 of the one or more seventh grooves 606g have a different cross-sectional shape than the walls 616 of the one or more eighth grooves 606h. Similarly, the walls 616 of the one or more ninth grooves 606i have a different cross-sectional shape than either the walls 616 of the seventh grooves 606g or the eighth grooves 606h.

[0088] A cross section of the one or more first grooves 606a concentrates light in a first direction, the first direction being at a first angle θ with respect to the vertical. 17 , with the vertical plane being parallel to the axis A. The cross-section of the one or more second grooves 606b concentrates light in a second direction, with the second direction being at a second angle θ 18A cross section of the one or more third grooves 606c concentrates light in a third direction, the third direction being at a third angle θ with respect to the vertical. 19 A cross-section of the one or more fourth grooves 606d focuses light in a fourth direction, the fourth direction having a fourth angle (not shown) with respect to the vertical. A cross-section of the one or more fifth grooves 606e focuses light in a fifth direction, the fifth direction having a fifth angle θ with respect to the vertical. 20 The cross section of the one or more sixth grooves 606f concentrates light in a sixth direction, the sixth direction being at a sixth angle θ with respect to the vertical plane. 21 A cross-section of the one or more seventh grooves 606g focuses light in a seventh direction, the seventh direction having a seventh angle (not shown) with respect to the vertical. A cross-section of the one or more eighth grooves 606h focuses light in an eighth direction, the eighth direction having an eighth angle (not shown) with respect to the vertical. A cross-section of the one or more ninth grooves 606i focuses light in a ninth direction, the ninth direction having a ninth angle θ with respect to the vertical. 22 has.

[0089] First angle θ 17 is the second angle θ 18 The third angle θ 19 is different from the fourth angle (not shown). 20 is the sixth angle θ 21 The seventh angle (not shown) is different from the eighth angle (not shown) and the ninth angle θ 22 In some embodiments, each groove in the plurality of grooves 606a-606i is oriented in a different direction and has a different cross-sectional shape than adjacent grooves 606a-606i.

[0090] Each set of grooves 606a-606i in each ring is shaped to direct energy to a different radial location along the wafer, allowing for advanced thermal control. The grooves 606a-606i may be grouped such that a controller controls several of the grooves 606a-606i simultaneously. The individual grooves 620 in the first grooves 606a are each controlled together. The individual grooves 620 in the second grooves 606b are each controlled together. The individual grooves 620 in the third grooves 606c are each controlled together. The individual grooves 620 in the fourth grooves 606d are each controlled together. The individual grooves 620 in the fifth grooves 606e are each controlled together. The individual grooves 620 in the sixth grooves 606f are each controlled together. The individual grooves 620 in the seventh grooves 606g are each controlled together. The individual grooves 620 in the eighth grooves 606h are each controlled together. Each of the individual grooves 620 within the ninth groove 606i are controlled together. The third groove 606c and the ninth groove 606i are controlled together and shaped to direct radiant energy to a similar radial location on the substrate 102.

[0091] 7A shows a plan view of a third embodiment of the lower lamp module 145c. The lower lamp module 145c includes a reflector body 700 and a plurality of lower lamps 143 (FIG. 1). The reflector body 700 includes a plurality of grooves 706a-706i formed in an upper surface 702. The upper surface 702 may be described as a first surface of the reflector body 700. The lower surface 703 (FIG. 7B) is disposed opposite the upper surface 702 and may be described as a second surface. The lower surface 703 is parallel to the upper surface 702. The upper surface 702 includes a plurality of grooves 706a-706i.

[0092] Each of the plurality of grooves 706a-706i is configured to hold a horizontal lamp extending along the direction of each of the plurality of grooves 706a-706i. The walls 716 of each of the plurality of grooves 706a-706i have a generally elliptical, circular, parabolic, or oval cross-section and are configured to direct energy emitted by the lamp towards a substrate in the deposition chamber 100.

[0093] In some embodiments, the reflector body 700 is formed of a reflective material, such as aluminum or steel. In some embodiments, the reflector body 700 is formed of a first material, such as aluminum or steel, and plated with a second material. The second material may be any one of copper, nickel, brass, bronze, silver, gold, aluminum, or an alloy of the above materials. The second material may be polished to increase reflectivity. In some embodiments, the entirety of the reflector body 700 is formed of the second material. The top surface 702 may have a reflectivity of greater than about 90%, such as greater than about 98%, for wavelengths from about 700 nm to about 15000 nm, such as from about 700 nm to about 1000 nm or from about 1000 nm to about 15000 nm. The top surface 702 is made of or coated with the second material.

[0094] The plurality of grooves 706a-706i are arranged to form portions of concentric rings along the top surface 702. The first ring is formed by the plurality of first grooves 706a and the plurality of second grooves 706b. The second ring is formed by the plurality of third grooves 706c and the plurality of fourth grooves 706d. The third ring is formed by the plurality of fifth grooves 706e and the plurality of sixth grooves 706f. The fourth ring is formed by the plurality of seventh grooves 706g, the plurality of eighth grooves 706h, and the plurality of ninth grooves 706i. Each of the plurality of grooves 706a-706i is formed from a plurality of individual grooves 720. Each of the individual grooves 720 is a linear groove and configured to have a linear ramp disposed therein. The linear length of each of the individual grooves 720 is about 35 mm to about 175 mm, such as about 50 mm to about 150 mm. The linear length of each individual groove 720 is selected to provide uniform heating within a given annulus of the substrate while also reducing the number of lamps in the lower lamp module 145c, which reduces cost, simplifies maintenance, and reduces the number of holes 708 drilled through the reflector body 700.

[0095] Each of the individual grooves 720 in the plurality of grooves 706a-706i has at least one hole 708 formed therethrough. The hole 708 extends from a bottom of one of the grooves 706a-706i to the top surface 703 to allow for electrical connections of a lamp to be disposed therethrough. As shown herein, each of the individual grooves 720 of the grooves 706a-706i includes at least two holes 708, such as two holes 708. Each of the holes 708 is located proximate to a distal end of the individual groove 720 of the grooves 706a-706i such that one hole 708 is located at a distal end of one of the individual grooves 720 and a second hole 708 is located at an opposite distal end of the same individual groove 720. In addition to providing electrical support, the holes 708 may serve to allow for mechanical support of a lamp disposed within each of the grooves 706a-706i.

[0096] Each linear lamp in each groove 720 includes a filament 705 (eight are shown in phantom for clarity). Filaments 705 are shown in some of the individual grooves 720 herein to indicate the position of the linear lamp filament relative to each individual groove 720. Filament 705 is disposed between two holes 708 formed in grooves 706a-i.

[0097] The opening 710 is disposed intermediate the grooves 706a-706i and the reflector body 700. The opening 710 is a passageway that extends from the top surface 702 to the bottom surface 703 of the reflector body 700. The opening 710 allows the shaft 118 of the substrate support 106 to pass through. The opening 710 is disposed within a first ring of grooves, such as between the first groove 706a and the second groove 706b. The opening 710 is disposed through the center of the reflector body 700 and centered about the axis A.

[0098] There may be 2 to 5 individual grooves 720 forming each of the plurality of first grooves 706a, the plurality of second grooves 706b, the plurality of third grooves 706c, the plurality of fourth grooves 706d, the plurality of fifth grooves 706e, the plurality of sixth grooves 706f, the plurality of seventh grooves 706g, the plurality of eighth grooves 706h, and the plurality of ninth grooves 706i. There may be 2 to 5 individual grooves 720 forming each of the plurality of first grooves 706a, the plurality of second grooves 706b, the plurality of third grooves 706c, the plurality of fourth grooves 706d, the plurality of fifth grooves 706e, the plurality of sixth grooves 706f, the plurality of seventh grooves 706g, the plurality of eighth grooves 706h, and the plurality of ninth grooves 706i. The number of individual grooves 720, comprising the first groove 706a, the second groove 706b, the third groove 706c, the fourth groove 706d, the fifth groove 706e, the sixth groove 706f, the seventh groove 706g, the eighth groove 706h, or the ninth groove 706i, respectively, varies depending on the desired radiation distribution on the substrate.

[0099] The pattern / location of each individual one of the grooves 706a-706i allows for good thermal control within the deposition chamber 100. The grooves 706a-706i are distributed to be symmetric across a plane, such as the first cross section S5. The grooves 706a-706i may also be symmetric across other planes through the reflector body 700.

[0100] The first groove 706a and the second groove 706b are positioned such that the first groove 706a forms an approximately semicircular shape and the second groove 706b forms a second approximately semicircular shape. The ends of the two semicircular shapes are aligned to form a first ring. Although the first groove 706a is shown to include two individual grooves 720 and the second groove 706b is shown to include two individual grooves 720, respectively, other numbers of first grooves 706a and second grooves 706b are also envisioned.

[0101] In some embodiments, the plurality of third grooves 706c and the plurality of ninth grooves 706i are aligned along the same axis such that a straight plane passes through each of the third grooves 706c and the ninth grooves 706i. The deposition chamber 100 may be oriented such that the third grooves 706c and the ninth grooves 706i are aligned along a direction of gas flow through the process volume 136.

[0102] The fourth grooves 706d are disposed between the aligned third grooves 706c such that one or more individual grooves 720 are disposed on either side of the third grooves 706c to form a second ring. In the embodiment shown in Figure 7A, two individual grooves 720 of the fourth grooves 706d are disposed between each of the third grooves 706c such that a total of four fourth grooves 706d are arranged in groups of two individual grooves 720.

[0103] The fifth grooves 706e and sixth grooves 706f are staggered to form a third ring, with an individual groove 720 of the sixth grooves 706f between each individual groove 720 of the fifth grooves 706e. There are an equal number of fifth grooves 706e and sixth grooves 706f, such as four fifth grooves 706e and four sixth grooves 706f.

[0104] The seventh grooves 706g and eighth grooves 706h are also staggered within the fourth ring. The seventh grooves 706g and eighth grooves 706h are disposed on either side of the ninth groove 706i. There are four seventh grooves 706g and four eighth grooves 706h.

[0105] In some embodiments, there may be more or fewer sets of grooves 706a-706i, or other arrangements of grooves 706a-706i, such that the number of individual grooves 720 within each set of grooves 706a-706i is varied.

[0106] FIG. 7B shows a cross-sectional view of a third embodiment of the lower lamp module 145c. The cross-section is taken along the plane 7B-7B, dividing the reflector body 700 in half. Each of the grooves 706a-706i is centered on the axis A. Each of the grooves 706a-706i is configured to direct radiant energy to a different portion of the substrate 102. The one or more first grooves 706a and the one or more second grooves 706b form a first ring, but the one or more first grooves 706a and the one or more second grooves 706b have different cross-sectional shapes to allow lamps disposed in the one or more first grooves 706a and the one or more second grooves 706b, respectively, to be directed toward different radial positions on the substrate 102. The walls 716 of each of the grooves 706a-706i form the cross-sectional shape of the grooves 706a-706i. The walls 716 of each of the grooves 706a-706i form a cross-sectional shape that is at least a portion of an ellipse, a circle, an oval, a parabola, an oval, a hyperbola, or other suitable curvilinear shape.

[0107] The walls 716 of the one or more first grooves 706a have a different cross-sectional shape than the walls 716 of the one or more second grooves 706b. The walls 706 of the one or more third grooves 706c have a different cross-sectional shape than the walls 716 of the fourth grooves 706d. The walls 716 of the one or more fifth grooves 706e have a different cross-sectional shape than the walls 716 of the one or more sixth grooves 706f. The walls 716 of the one or more seventh grooves 706g have a different cross-sectional shape than the walls 716 of the one or more eighth grooves 706h. Similarly, the walls 716 of the one or more ninth grooves 706i have a different cross-sectional shape than either the walls 716 of the seventh grooves 706g or the eighth grooves 706h.

[0108] A cross section of the one or more first grooves 706a concentrates light in a first direction, the first direction being at a first angle θ with respect to the vertical. 23 , with the vertical plane being parallel to the axis A. The cross-section of the one or more second grooves 706b concentrates light in a second direction, with the second direction being at a second angle θ 24A cross section of the one or more third grooves 706c concentrates light in a third direction, the third direction being at a third angle θ with respect to the vertical. 25 A cross-section of the one or more fourth grooves 706d focuses light in a fourth direction, the fourth direction having a fourth angle (not shown) with respect to the vertical. A cross-section of the one or more fifth grooves 706e focuses light in a fifth direction, the fifth direction having a fifth angle θ with respect to the vertical. 26 The cross section of the one or more sixth grooves 706f concentrates light in a sixth direction, the sixth direction being at a sixth angle θ with respect to the vertical plane. 27 A cross-section of the one or more seventh grooves 706g focuses light in a seventh direction, the seventh direction having a seventh angle (not shown) with respect to the vertical. A cross-section of the one or more eighth grooves 706h focuses light in an eighth direction, the eighth direction having an eighth angle (not shown) with respect to the vertical. A cross-section of the one or more ninth grooves 706i focuses light in a ninth direction, the ninth direction having a ninth angle θ with respect to the vertical. 28 has.

[0109] First angle θ 23 is the second angle θ 24 The third angle θ 25 is different from the fourth angle (not shown). 26 is the sixth angle θ 27 The seventh angle (not shown) is different from the eighth angle (not shown) and the ninth angle θ 28 In some embodiments, each groove in the plurality of grooves 706a-706i is oriented in a different direction and has a different cross-sectional shape than adjacent grooves 706a-706i.

[0110] Each set of grooves 706a-i in each ring is shaped to direct energy to a different radial location along the wafer, allowing for advanced thermal control. The grooves 706a-i may be grouped such that a controller controls several of the grooves 706a-i simultaneously. The individual grooves 720 in the first grooves 706a are each controlled together. The individual grooves 720 in the second grooves 706b are each controlled together. The individual grooves 720 in the third grooves 706c are each controlled together. The individual grooves 720 in the fourth grooves 706d are each controlled together. The individual grooves 720 in the fifth grooves 706e are each controlled together. The individual grooves 720 in the sixth grooves 706f are each controlled together. The individual grooves 720 in the seventh grooves 706g are each controlled together. The individual grooves 720 in the eighth grooves 706h are each controlled together. Each of the individual grooves 720 within the ninth groove 706i are controlled together. The third groove 706c and the ninth groove 706i are controlled together and shaped to direct radiant energy to a similar radial location on the substrate 102.

[0111] Each of the upper lamp modules 155a-c and lower lamp modules 145a-c described herein has four rings of grooves, although other numbers of rings are contemplated. In some embodiments, only three rings are utilized, five rings are utilized, or six rings are utilized. Additionally, the radial position of each ring can be adjusted to provide good heat distribution on the substrate.

[0112] FIG. 8A illustrates a linear lamp 800a for use in the deposition chamber 100 of FIG. 1. The linear lamp 800a may be used in any of the embodiments of FIGS. 4A-7B. The linear lamp 800a includes a linear bulb 802, one or more arms 804, and one or more electrical connections 806. The linear lamp 800a is an infrared (IR) halogen lamp. The linear bulb 802 is a cylindrical bulb with a filament (not shown) disposed therein. The linear bulb 802 is configured to emit radiant energy, such as IR light, toward the substrate 102 when positioned in the deposition chamber 100.

[0113] One or more arms 804 extend from the linear bulb 802. As shown in FIG. 8A, there are two arms 804, one extending from each distal end of the linear bulb 802. The two arms 804 extend in a direction perpendicular to the direction that the linear bulb 802 extends. The two arms 804 extend in the same direction and are configured to pass through holes 408, 508, 608, 708. At the end of each arm 804 is an electrical connection 806. The electrical connection 806 is configured to be plugged or coupled to a socket or other power source. The electrical connection 806 is electrically coupled to a filament in the linear bulb 802, allowing power to be provided to the linear lamp 800a.

[0114] FIG. 8B illustrates a curved lamp 800b for use in the deposition chamber of FIG. 1. The curved lamp 800b may be used in any of the embodiments of FIGS. 2A-3B. The curved lamp 800b includes a curved bulb 808, one or more arms 810, and one or more electrical connections 812. The curved bulb 808 is a tubular bulb shaped to form at least a portion of a ring, e.g., an arc. The curved bulb 808 includes a filament (not shown) disposed therein. The curved bulb 808 is configured to emit radiant energy toward the substrate 102 when positioned in the deposition chamber 100.

[0115] One or more arms 810 extend from the curved bulb 808. As shown in FIG. 8B, there are two arms 810, one extending from each distal end of the curved bulb 808 perpendicular to the plane of the curved bulb 808. The two arms 810 extend in a direction perpendicular to the direction that the curved bulb 808 extends. The two arms 810 extend in the same direction and are configured to pass through the holes 208, 308. At the end of each arm 810 is an electrical connection 812. The electrical connection 812 is configured to be plugged or coupled to a socket or other power source. The electrical connection 812 is electrically coupled to a filament within the curved bulb 808, allowing power to be provided to the curved lamp 800b.

[0116] The embodiments described herein allow for more controlled heating of the substrate, reducing thermal cycling and extending lamp life. Each groove ring with multiple sections allows for better control of irradiance peaks across different radial positions of the substrate. The grooves, and thus the distribution of lamps disposed therein, are further configured to reduce thermal cycling of positions on the substrate. By reducing thermal cycling, both the frequency and intensity of hot / cold spots on the substrate are reduced compared to other linear lamp arrangements.

[0117] While the above is directed to embodiments of the present disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, the scope of which is determined by the following claims.

Claims

1. A reflector body; one or more first grooves disposed in a first surface of the reflector body, each configured to receive a linear lamp; one or more second grooves disposed within the first surface of the reflector body, each configured to receive a linear lamp, the one or more first grooves and the one or more second grooves forming a first ring of grooves, and a cross-sectional shape of the one or more first grooves differing from a cross-sectional shape of the one or more second grooves; 1. A lamp module suitable for semiconductor substrate processing, comprising:

2. 2. The lamp module of claim 1, further comprising one or more third grooves disposed radially outward of the one or more first grooves and the one or more second grooves and forming at least a portion of a second ring.

3. 2. The lamp module of claim 1, wherein the first groove and the second groove are each a linear groove.

4. 2. The lamp module of claim 1, wherein there are between 2 and 10 first grooves.

5. 10. The lamp module of claim 1, wherein the reflector body comprises one or a combination of copper, nickel, brass, bronze, silver, gold, or aluminum.

6. 2. The lamp module of claim 1, wherein each of said first grooves has a linear groove length of between 35 mm and 175 mm.

7. 2. The lamp module of claim 1, wherein the first groove and the second groove each include at least one hole therein, each of the holes passing from a groove wall to a second surface of the reflector body opposite the first surface.

8. 10. The lamp module of claim 1, further comprising an opening through said reflector body, said opening extending from said first surface to said second surface and disposed within a first ring of said grooves.

9. A reflector body; one or more first grooves disposed in a first surface of the reflector body, each configured to receive one or more linear lamps; one or more second grooves disposed in the first surface of the reflector body, each configured to receive one or more linear lamps; one or more third grooves disposed in the first surface of the reflector body; one or more fourth grooves disposed in the first surface of the reflector body; the one or more first grooves and the one or more second grooves are oriented to form at least a portion of a first ring, and the one or more third grooves and the one or more fourth grooves are oriented to form at least a portion of a second ring circumscribing the first ring; the one or more first grooves have a different cross-sectional shape than the one or more second grooves; Lamp module suitable for semiconductor substrate processing.

10. A lamp module as described in claim 9, wherein the one or more third grooves have a cross-sectional shape different from the one or more fourth grooves.

11. 10. The lamp module of claim 9, wherein the first groove and the second groove each include at least one hole therein, each of the holes passing from a groove wall to a second surface of the reflector body opposite the first surface.

12. 10. The lamp module of claim 9, wherein the one or more first grooves form a first semicircle and the one or more second grooves form a second semicircle.

13. 10. The lamp module of claim 9, wherein the first surface of the reflector body has a reflectivity of greater than 90%.

14. 10. The lamp module of claim 9, wherein a portion of the one or more first grooves and the one or more second grooves have a linear length.

15. 10. The lamp module of claim 9, wherein the one or more first grooves and the one or more second grooves of the first ring are each disposed within an area having an annular radius of less than 30 mm.

16. A reflector body; one or more first grooves disposed in a first surface of the reflector body; one or more second grooves disposed in the first surface of the reflector body; one or more third grooves disposed in the first surface of the reflector body; one or more fourth grooves disposed in the first surface of the reflector body; the one or more first grooves and the one or more second grooves are oriented to form at least a portion of a first ring, the one or more third grooves and the one or more fourth grooves are oriented to form at least a portion of a second ring circumscribing the first ring, and the one or more first grooves have a different cross-sectional shape than the one or more second grooves. A reflector for mounting lamps suitable for semiconductor substrate processing.

17. 17. The reflector of claim 16, wherein the one or more first grooves, the one or more second grooves, the one or more third grooves, and the one or more fourth grooves are each curvilinear grooves.

18. 17. The reflector of claim 16, wherein the one or more first grooves are connected to the one or more second grooves.

19. 17. The reflector of claim 16, wherein the first groove and the second groove each include at least one hole therein, each of the holes passing from a groove wall to a second surface of the reflector body opposite the first surface.

20. 17. The reflector of claim 16, wherein the first surface of the reflector body has a reflectivity of greater than 90%.

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