Pipe temperature control device and pipe temperature control method

Abstract

This application discloses a pipe temperature control device and a pipe temperature control method, which are applicable to a semiconductor device, and the pipe temperature control device includes a processing device and a plurality of heating assemblies distributed in an extending direction of a temperature-controlled pipe, each heating assembly includes a heating device, a first temperature measuring device, a second temperature measuring device and a control device, the first temperature measuring device and the second temperature measuring device of each heating assembly are both used for measuring the real-time temperature of the temperature-controlled pipe and are connected to the control device of the heating assembly, and the plurality of control devices are all connected to the processing device, and the processing device can control the operation of the plurality of heating devices by the plurality of control devices respectively based on the measurement value of the first temperature measuring device or the second temperature measuring device of each heating assembly until the plurality of heated parts respectively meet the respective target temperatures.

Description

[Technical field]

[0001] The present application relates to the technical field of semiconductor processing, and more particularly to a pipe temperature control device and a pipe temperature control method. [Background technology]

[0002] In the semiconductor processing process, it is usually necessary to carry out multiple processes on the wafer, and some processes require the injection of a certain process gas through a pipe, and the temperature of the process gas needs to be controlled during the injection of the process gas to ensure a good process effect. At present, a heating device is usually set in the pipe to heat the process gas transported into the process chamber, and the heating device is equipped with a temperature control thermocouple, and the heating situation of the heating device is adjusted according to the temperature feedback measured by the temperature control thermocouple, so that the pipe and the process gas transported by it can meet their target temperature. However, in the operation process of the above technical solution, if the temperature control thermocouple breaks down, the heating will be out of control, which will cause the process to be stopped and the wafer to be scrapped, which will have a great negative impact on the continuity of the process. Summary of the Invention [Problem to be solved by the invention]

[0003] The present application discloses a piping temperature control device and a piping temperature control method that can solve the current problem that, when a temperature control thermocouple breaks down, the process is stopped or the wafer is discarded, which has a significant adverse effect on the continuity of the process. [Means for solving the problem]

[0004] In order to solve the above problems, the embodiment of the present application is realized as follows.

[0005] In a first aspect, an embodiment of the present application is applied to a semiconductor device, comprising: a processing device; and a plurality of heating assemblies, the plurality of heating assemblies being distributed in an extension direction of a temperature-controlled pipe, thereby correspondingly controlling temperatures of a plurality of heated portions of the temperature-controlled pipe, each of the heating assemblies comprising a heating device, a first temperature measuring device, a second temperature measuring device, and a control device; The first temperature measuring device and the second temperature measuring device of each of the heating assemblies are both used for measuring a real-time temperature of the heated portion of the temperature-controlled piping corresponding to the heating device of the heating assembly, the first temperature measuring device and the second temperature measuring device of each of the heating assemblies are both connected to the control device of the heating assembly, and the plurality of control devices are all connected to the processing device; the processing device is used to control, by the control devices, the operation of the heating devices, respectively, according to target temperatures of the heated portions of the temperature-controlled pipes and measurements of first temperature measuring devices of the heating assemblies, until the temperatures of the heated portions meet the target temperatures, respectively; The processing device is further used for controlling, when the measurement value of the first temperature measuring device within a predetermined period is abnormal, the corresponding heating device to heat the heated portion by the corresponding control device according to the measurement value of the corresponding second temperature measuring device and the target temperature of the corresponding heated portion; The processing device further provides a piping temperature control device, which is used to control, by the corresponding control device, the corresponding heating device to heat the heated part in accordance with the heating state of the heating device of the adjacent heated part when the measurement values ​​of both the first temperature measuring device and the second temperature measuring device of any of the heating assemblies within a predetermined period are abnormal.

[0006] In a second aspect, the present embodiment is applied to the above-mentioned pipe temperature control device, Step S1 of receiving a temperature control command; Step S2 of controlling, by the control devices, the operation of the heating devices, respectively, according to the target temperatures of the heated portions of the temperature-controlled pipes and the measurements of the first temperature measuring devices of the heating assemblies, until the heated portions meet the target temperatures, respectively; Step S3: when the measured value of the first temperature measuring device within a predetermined period is abnormal, the corresponding heating device is controlled by the corresponding control device according to the measured value of the corresponding second temperature measuring device and the target temperature of the corresponding heated portion so as to heat the heated portion; and if the measured values ​​of both the first temperature measuring device and the second temperature measuring device of any of the heating assemblies within a predetermined period are abnormal, a step S4 of controlling the corresponding heating device by the corresponding control device to heat the heated part in accordance with the heating state of the heating device of the adjacent heated part.

[0007] The embodiments of the present application disclose a pipe temperature control device and a pipe temperature control method, the pipe temperature control device includes a processing device and a plurality of heating assemblies, the plurality of heating assemblies are distributed in the extending direction of the temperature-controlled pipe, so that the pipe temperature control device can simultaneously perform heating temperature control operations on the temperature-controlled pipe from a plurality of positions of the temperature-controlled pipe, and each of the plurality of heating assemblies includes a control device, a first temperature measuring device, a second temperature measuring device, and a heating device, the first temperature measuring device and the second temperature measuring device of each heating assembly can each detect the temperature of the corresponding position of the temperature-controlled pipe, and each of the first temperature measuring device and each of the second temperature measuring devices can transmit the detection data to a processing device via the control device, so that the processing device can determine the accuracy of the respective measured values ​​of the first temperature measuring device and the second temperature measuring device of each heating assembly.

[0008] Then, when the measurement value of the first temperature measuring device of each heating assembly is normal, the measurement value of the first temperature measuring device is used as the real-time temperature of the heated portion of the temperature-controlled piping corresponding to the first temperature measuring device, and when the measurement value of the first temperature measuring device of any heating assembly is abnormal and the measurement value of the second temperature measuring device of the heating assembly is normal, the measurement value of the second temperature measuring device of the heating assembly is used as the real-time temperature of the heated portion of the temperature-controlled piping corresponding to the first temperature measuring device. Based on the target temperature of the heated portion of the temperature-controlled piping corresponding to the heating assembly and the measurement value of the real-time temperature of the heated portion measured by the first temperature measuring device or the second temperature measuring device, the processing device can control the operation of the corresponding heating device by the control device corresponding to the heated portion to heat the temperature of the heated portion to the target temperature.

[0009] In addition, if the measurement values ​​of the first temperature measuring device and the second temperature measuring device of any heating assembly are both abnormal, the heating state of the heating device of another heating assembly adjacent to the heating assembly may be utilized, whereby the processing device can control, via the control device, the heating device corresponding to the heated portion of the temperature-controlled piping whose temperature measurement is abnormal to heat the heated portion to make the temperature of the heated portion as close as possible to or equal to its target temperature.

[0010] According to the above technical solution, even if any of the first temperature measuring devices and / or any of the second temperature measuring devices of the piping temperature control device fails, it is possible to ensure that the heating operation of the temperature-controlled piping can continue almost normally, thereby avoiding the interruption of the process, further improving the wafer yield, and ensuring good continuity of the process.

[0011] As described above, the multiple heating assemblies are distributed in the extension direction of the temperature-controlled pipe, and the multiple heating assemblies can work together to perform heating operations at multiple positions on the temperature-controlled pipe, respectively. By pre-heating the process gas and increasing the length of the heated portion in the process gas transport path, the temperature of the process gas transported through the temperature-controlled pipe can be ensured to be close to a predetermined temperature when it is transported into the process chamber, thereby improving the process effect.

[0012] The drawings described herein are for further understanding of the present application and are incorporated as part of the present application, and the exemplary embodiments and the description thereof are used to interpret the present application and do not constitute undue limitations on the present application. [Brief description of the drawings]

[0013] [Figure 1] 1 is a schematic diagram of a pipe temperature control device according to an embodiment of the present application. [Diagram 2] 2 is a flowchart of a pipe temperature control method according to an embodiment of the present application. [Diagram 3] 3 is a schematic diagram showing the distribution of measured values ​​from a first temperature measuring device and a second temperature measuring device of a pipe temperature control device according to an embodiment of the present application. FIG. [Figure 4] 3 is a schematic diagram showing the distribution of measured values ​​from a first temperature measuring device and a second temperature measuring device of a pipe temperature control device according to an embodiment of the present application. FIG. [Diagram 5] 1 is a schematic diagram showing the distribution of measured values ​​when an open circuit occurs in a temperature measuring device of a pipe temperature control device according to an embodiment of the present application. FIG. [Figure 6] 1 is a schematic diagram showing the distribution of measured values ​​when a jump occurs in a temperature measuring device of a pipe temperature control device according to an embodiment of the present application. FIG. [Figure 7] 2 is a flowchart of a pipe temperature control method according to an embodiment of the present application. [Figure 8] FIG. 2 is a schematic diagram showing a part of a flow of a pipe temperature control method according to an embodiment of the present application. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] In order to make the objectives, technical solutions and advantages of the present application clearer, the technical solutions of the present application will be described below clearly and completely with reference to the specific embodiments of the present application and the corresponding drawings. It is obvious that the described embodiments are only some embodiments of the present application, but not all embodiments. Based on the embodiments of the present application, all other embodiments that a person skilled in the art can obtain without creative labor belong to the protection scope of the present application.

[0015] Hereinafter, the technical solutions according to the embodiments of the present application will be described in detail with reference to the drawings.

[0016] As shown in Fig. 1, an embodiment of the present application discloses a piping temperature control device, which is used to control the temperature of a temperature-controlled piping for transporting a process gas, and further to control the temperature of the process gas transported in the temperature-controlled piping. The piping temperature control device includes a processing device 100 and a plurality of heating assemblies 200.

[0017] The processing device 100 is a device for providing data processing and overall control in the piping temperature control device, and by inputting relevant algorithms, temperature control data, etc. into the processing device 100 in advance, the processing device 100 itself can control the operation of each of the multiple heating assemblies 200 using the above-mentioned relevant algorithms and temperature control data, together with the actual temperatures at different positions of the temperature-controlled piping, so that the temperatures of the corresponding parts of the temperature-controlled piping each meet their corresponding target temperatures.

[0018] The multiple heating assemblies 200 are distributed in the extending direction of the temperature-controlled piping, and the temperatures of the multiple heated parts of the temperature-controlled piping are correspondingly controlled by the action of the multiple heating assemblies 200. In other words, the multiple heating assemblies 200 are used to perform temperature control operations on the multiple heated parts of the temperature-controlled piping, respectively, so that the temperatures of the multiple heated parts of the temperature-controlled piping can respectively meet the respective target temperatures.

[0019] Each heating assembly 200 includes a heating device 210, a first temperature measuring device 220, a second temperature measuring device 230 and a control device 240. The heating device 210 is a device for providing a heating effect in the heating assembly 200, and may specifically be an electric heating device such as a resistance wire. The first temperature measuring device 220 and the second temperature measuring device 230 of each heating assembly 200 are provided in a group, and each can measure the real-time temperature of the heated portion of the temperature-controlled piping corresponding to the heating device 210 of the heating assembly 200. That is, for each heating assembly 200, the positions of the temperature-controlled piping corresponding to its heating device 210, first temperature measuring device 220 and second temperature measuring device 230 are the same, ensuring that the heating assembly 200 can correspondingly control parameters such as heating power and heating time of the heating device 210 according to the actual temperature of the position of the temperature-controlled piping.

[0020] Specifically, the first temperature measuring device 220 and the second temperature measuring device 230 may be an infrared temperature measuring device, a laser temperature measuring device, a thermocouple, etc., the control device 240 may be a device having a control function, such as a switch, and the control device 240 may further include a variable resistor to ensure that the control device 240 can change the heating power of the heating device 210, etc.

[0021] In the heating assembly 200, the first temperature measuring device 220 and the second temperature measuring device 230 of each heating assembly 200 are both connected to the control device 240 of the heating assembly 200, thereby ensuring that the measurements of the first temperature measuring device 220 and the second temperature measuring device 230 can both be transmitted to the control device 240. The measurements of the first temperature measuring device 220 and the second temperature measuring device 230 may be denoted as TCn-C and TCn-M, respectively, and since both are temperature measuring devices, the measurements of both may be collectively referred to as TCn-*.

[0022] Furthermore, all of the multiple control devices 240 are connected to the processing device 100, so that the measurement values ​​of the first temperature measuring device 220 and the second temperature measuring device 230 of each of the multiple heating assemblies 200 can be transmitted to the processing device 100 via the control device 240, thereby enabling the processing device 100 to obtain real-time temperatures of multiple portions of the temperature-controlled piping corresponding to the multiple first temperature measuring devices 220 and the multiple second temperature measuring devices 230, respectively.

[0023] As described above, parameters such as relevant algorithms and target temperatures of the multiple heated portions of the temperature-controlled piping may be pre-entered into the processing device 100, whereby the processing device 100 controls, via the multiple control devices 240, the operation of the multiple heating devices 210, respectively, according to the target temperatures of the multiple heated portions of the temperature-controlled piping and the measured values ​​obtained by the first temperature measuring devices 220 of each of the multiple heating assemblies 200 measuring the temperatures of the above multiple portions of the temperature-controlled piping, until the temperatures of the multiple heated portions of the multiple temperature-controlled piping each meet their respective target temperatures.

[0024] Of course, the processing device 100 may determine the accuracy of the measurement values ​​of each of the first temperature measuring devices 220 of the multiple heating assemblies 200, and if the measurement value of any of the first temperature measuring devices 220 within a specified period is abnormal, the control device 240 corresponding to the first temperature measuring device 220 with the abnormal data can control the heating device 210 corresponding to the first temperature measuring device 220 with the abnormal data to heat the heated portion so that the temperature of the heated portion of the temperature-controlled piping meets its target temperature, depending on the measurement value of the second temperature measuring device 230 corresponding to the first temperature measuring device 220 with the abnormal data and the target temperature of the heated portion of the temperature-controlled piping corresponding to the first temperature measuring device 220 with the abnormal data.

[0025] The processing device 100 may then determine the accuracy of the measurement values ​​of the second temperature measuring devices 230 of each of the multiple heating assemblies 200. If the measurement values ​​of both the first temperature measuring device 220 and the second temperature measuring device 230 of any of the heating assemblies 200 within a predetermined period are abnormal, the control device 240 corresponding to the (first temperature measuring device 220 and) second temperature measuring device 230 with the abnormal measurement data may determine that the heating device 210 corresponding to the (first temperature measuring device 220 and) second temperature measuring device 230 with the abnormal measurement data is in charge of the measurement of the temperature-controlled piping. The temperature-controlled piping can be controlled to heat the heated portion corresponding to the (first temperature measuring device 220 and) second temperature measuring device 230 whose measurement data is abnormal, in accordance with the heating state of the heating device 210 corresponding to another heated portion adjacent to the heated portion corresponding to the (first temperature measuring device 220 and) second temperature measuring device 230 whose measurement data is abnormal, so that the temperature of the heated portion of the temperature-controlled piping corresponding to the (first temperature measuring device 220 and) second temperature measuring device 230 whose measurement data is abnormal can be close to or meet the target temperature of the heated portion.

[0026] In addition, the target temperature of each heated part of the temperature-controlled pipe may be flexibly determined according to parameters such as the material of the temperature-controlled pipe and the specific type and flow rate of the transported medium, and is not limited here. Correspondingly, the above algorithm may be determined according to parameters such as the heating power of each heating device 210 of the multiple heating assemblies 200, the material and size of the temperature-controlled pipe, and the specific heat capacity and flow rate of the transported medium. That is, the required heat amount is obtained according to the real-time temperature and the target temperature of the transported medium, and the output power and heating time of the heating device 210 are obtained, and the transported medium can be heated from the real-time temperature to the target temperature simply by ensuring that the heating device 210 operates at the output power for the heating time.

[0027] In addition, during the operation of the piping temperature control device, a feedback adjustment method may be used to intermittently measure the real-time temperature of the temperature-measured piping, and then correspondingly adjust the heating parameters of each heating assembly 200 based on the above-mentioned related algorithm, thereby maximally ensuring that the temperature of the temperature-controlled piping better meets its target temperature, and improving the process results.

[0028] The embodiments of the present application disclose a pipe temperature control device and a pipe temperature control method, the pipe temperature control device includes a processing device 100 and a plurality of heating assemblies 200, the plurality of heating assemblies 200 are distributed in the extending direction of the temperature-controlled pipe, so that the pipe temperature control device can simultaneously perform heating temperature control operations on the temperature-controlled pipe from a plurality of positions of the temperature-controlled pipe. Each of the plurality of heating assemblies 200 includes a control device 240, a first temperature measuring device 220, a second temperature measuring device 230, and a heating device 210, the first temperature measuring device 220 and the second temperature measuring device 230 of each heating assembly 200 can detect the temperature of the corresponding position of the temperature-controlled pipe, and each of the first temperature measuring device 220 and each of the second temperature measuring devices 230 can transmit the detection data to the processing device 100 via the control device 240, so that the processing device 100 can determine the accuracy of the respective measurement values ​​of the first temperature measuring device 220 and the second temperature measuring device 230 of each heating assembly 200.

[0029] Then, when the measurement value of the first temperature measuring device 220 of each heating assembly 200 is normal, the measurement value of the first temperature measuring device 220 is used as the real-time temperature of the heated portion of the temperature-controlled piping corresponding to the first temperature measuring device 220, and when the measurement value of the first temperature measuring device 220 of any heating assembly 200 is abnormal and the measurement value of the second temperature measuring device 230 of the heating assembly 200 is normal, the measurement value of the second temperature measuring device 230 of the heating assembly 200 is used as the real-time temperature of the heated portion of the temperature-controlled piping corresponding to the first temperature measuring device 220. Based on the target temperature of the heated portion of the temperature-controlled piping corresponding to the heating assembly 200 and the measurement value of the real-time temperature of the heated portion measured by the first temperature measuring device 220 or the second temperature measuring device 230, the processing device 100 can control the operation of the corresponding heating device 210 by the control device 240 corresponding to the heated portion so as to heat the temperature of the heated portion to the target temperature.

[0030] In addition, if the measurement values ​​of both the first temperature measuring device 220 and the second temperature measuring device 230 of any heating assembly 200 within a specified period of time are abnormal, the heating state of the heating device 210 of another heating assembly 200 adjacent to the heating assembly 200 may be utilized, so that the processing device 100 can control, via the control device 240, the heating device 210 corresponding to the heated portion of the temperature-controlled piping whose temperature measurement is abnormal to heat the heated portion so as to make the temperature of the heated portion as close as possible to or equal to its target temperature.

[0031] According to the above technical solution, even if any of the first temperature measuring devices 220 and / or any of the second temperature measuring devices 230 of the piping temperature control device fails, it is possible to ensure that the heating operation of the temperature-controlled piping can continue almost normally, thereby avoiding the interruption of the process, and further improving the wafer yield and ensuring good continuity of the process.

[0032] As described above, the multiple heating assemblies 200 are distributed in the extension direction of the temperature-controlled pipe, and the multiple heating assemblies 200 work together to perform heating operations at multiple positions on the temperature-controlled pipe, respectively. By pre-heating the process gas and increasing the length of the heated portion in the process gas transport path, the temperature of the process gas transported through the temperature-controlled pipe can be ensured to be close to a predetermined temperature when it is transported into the process chamber, thereby improving the process effect.

[0033] As shown in FIG. 2, an embodiment of the present application further discloses a pipe temperature control method, which is applied to the pipe temperature control device according to the above embodiment, and the pipe temperature control method includes the following steps:

[0034] S1: Receive a temperature control command.

[0035] The temperature control command may be specifically sent by a processing device, which may send the temperature control command to a plurality of control devices, which in turn send the temperature control command to corresponding heating devices, and the temperature control command is used to instruct heating of the corresponding heated portions of the temperature-controlled piping so that the temperatures of the corresponding heated portions of the temperature-controlled piping respectively meet the respective target temperatures.

[0036] S2: In response to target temperatures of the multiple heated portions of the temperature-controlled piping and measurements of the first temperature measuring devices of the multiple heating assemblies, the multiple control devices respectively control the operation of the multiple heating devices until the multiple heated portions each meet their respective target temperatures.

[0037] Specifically, a first temperature measuring device of each of the plurality of heating assemblies may be used to measure a temperature of a corresponding portion of the temperature-controlled piping, and the measurements of the plurality of first temperature measuring devices may be used as actual temperatures of the corresponding heated portions of the temperature-controlled piping. Further, after receiving a temperature control command, the operation of the plurality of heating devices may be controlled by the plurality of control devices, respectively, according to target temperatures of each of the plurality of heated portions of the temperature-controlled piping and the measurements of the respective first temperature measuring devices of the plurality of heating assemblies until each of the plurality of heated portions meets its respective target temperature.

[0038] Of course, the measurement value of the first temperature measuring device may be inaccurate, and based on this, the pipe temperature control method according to the embodiment of the present application further includes step S3.

[0039] S3: If the measurement value of the first temperature measuring device within a specified period is abnormal, the corresponding control device controls the corresponding heating device to heat the heated part according to the measurement value of the corresponding second temperature measuring device and the target temperature of the corresponding heated part.

[0040] That is, if the measurement value of the first temperature measuring device of any heating assembly within a predetermined period is abnormal, the measurement value of the first temperature measuring device cannot be continued to be used as the actual temperature of the heated part of the temperature-controlled pipe corresponding to the first temperature measuring device, so other methods must be adopted to obtain the actual temperature of the heated part of the temperature-controlled pipe corresponding to the first measuring device. Furthermore, as mentioned above, in the pipe temperature control device, the second temperature measuring device of each heating assembly can also measure the temperature of the corresponding heated part of the temperature-controlled pipe, and based on this, if the measurement value of any first temperature measuring device is abnormal, the corresponding heating device can be controlled to heat the heated part by the control device corresponding to the second temperature measuring device according to the measurement value of the second temperature measuring device corresponding to the first temperature measuring device and the target temperature of the heated part of the temperature-controlled pipe corresponding to the second temperature measuring device, so that even if the first temperature measuring device fails, the purpose of performing temperature control on the corresponding heated part of the temperature-controlled pipe using the measurement value of the second temperature measuring device corresponding to the first temperature measuring device can be realized.

[0041] Similarly, since the measurement value of the second temperature measuring device may be inaccurate, based on this, if the measurement value of the second temperature measuring device within a specified period of time is abnormal, the piping temperature control method of an embodiment of the present application further includes step S4.

[0042] S4: If the measurement values ​​of both the first temperature measuring device and the second temperature measuring device of any heating assembly within a predetermined period are abnormal, the corresponding control device controls the corresponding heating device to heat the heated part in accordance with the heating state of the heating device of the adjacent heated part.

[0043] That is, when the measurement values ​​of the first temperature measuring device and the second temperature measuring device of any heating assembly are both abnormal, the heating status of the heating device corresponding to the heated portion adjacent to the heated portion of the temperature-controlled piping corresponding to the above heating assembly may be used as the heating parameter of the heated portion of the temperature-controlled piping where the measurement values ​​of the first temperature measuring device and the second temperature measuring device are both abnormal, thereby ensuring that the heating device corresponding to the heated portion can still continue the heating operation and make the temperature of the heated portion close to or equal to its target temperature.

[0044] As shown in FIG. 3, step S2 is specifically as follows: If the measurement value of the first temperature measuring device within a predetermined period of time increases over time, the step of controlling heating of the corresponding heating device by a corresponding control device in accordance with the measurement value of the first temperature measuring device and a target temperature of the heated portion corresponding to the first temperature measuring device so that the temperature of the heated portion meets the target temperature.

[0045] In this embodiment, when the measurement value of the first temperature measuring device within a specified period of time increases over time, it can be determined that there is no abnormality in the measurement value of the first temperature measuring device, i.e., the measurement value of the first temperature measuring device can be taken as the actual temperature of the heated portion of the temperature-controlled piping corresponding to the first temperature measuring device, and thereby, based on the measurement value of the first temperature measuring device and the target temperature of the heated portion of the temperature-controlled piping corresponding to the first temperature measuring device, the control device controls the heating device corresponding to the heated portion to operate and heat the heated portion so that the temperature of the heated portion meets the target temperature.

[0046] Correspondingly, based on this embodiment, as long as the measurement value of the first temperature measuring device of any of the multiple heating assemblies satisfies the above condition, the measurement value of the first temperature measuring device can be used as the actual temperature of the heated portion of the temperature-controlled piping corresponding to the first temperature measuring device.

[0047] Furthermore, the above step S2 specifically includes the following steps: The method may include a step in which the measurement values ​​of the first temperature measuring device and the second temperature measuring device both increase over time within a predetermined period of time, and in this case, it is basically possible to determine that no open circuit, short circuit or poor contact has occurred in the first temperature measuring device and the second temperature measuring device.

[0048] If the above condition is satisfied, when the absolute value of the difference between the measurement values ​​of the first and second temperature measuring devices is equal to or smaller than the first predetermined difference, or when the measurement value of the first temperature measuring device is greater than the measurement value of the second temperature measuring device and the absolute value of the difference between the measurement values ​​of the first and second temperature measuring devices is greater than the first predetermined difference, it can be determined that the measurement value of the first temperature measuring device can be the actual temperature of the heated portion corresponding to the first temperature measuring device. The actual value of the first predetermined difference may be determined according to the types of the first and second temperature measuring devices, the temperature control parameters of the temperature-controlled pipe, etc., and is not limited here.

[0049] In detail, when the absolute value of the difference between the measurement values ​​of the first temperature measuring device and the second temperature measuring device is less than or equal to a first predetermined difference, it indicates that the first temperature measuring device and the second temperature measuring device are both in normal operating state, and the first predetermined difference is an error range between the two measurement values, and when the absolute value of the difference between the two meets the above error range, it indicates that the two measurement values ​​are both relatively accurate, and in this case, the measurement value of the first temperature measuring device can be used as the actual temperature of the heated part.

[0050] On the other hand, if the measurement value of the first temperature measuring device is greater than the measurement value of the second temperature measuring device and the absolute value of the difference between the two is greater than the first predetermined difference, it indicates that there may be a problem such as the distance between the second temperature measuring device and the heated part being relatively large or the contact relationship between the second temperature measuring device and the heated part being poor. However, since the measurement value of the second temperature measuring device also increases over time, it can be determined that the second temperature measuring device still has a normal function, but the accuracy of its measurement value is relatively low. Therefore, in this case, the measurement value of the first temperature measuring device can also be used as the actual temperature of the heated part.

[0051] As described above, based on the condition that the measurement values ​​of the first temperature measuring device and the second temperature measuring device within a specified period of time both increase over time, if the absolute value of the difference between the two is less than or equal to a first specified difference, or if the measurement value of the first temperature measuring device is greater than the measurement value of the second temperature measuring device and the absolute value of the difference between the two is greater than the first specified difference, the measurement value of the first temperature measuring device and the target temperature of the heated part corresponding to the first temperature measuring device can be used by the corresponding control device to control the heating of the corresponding heating device so that the temperature of the heated part meets the target temperature.

[0052] Optionally, as shown in FIG. 3, the above step S2 specifically includes: If the measurement value of the first temperature measuring device within a specified period of time increases over time and the measurement value of the second temperature measuring device within a specified period of time does not change, the method further includes a step of controlling, by a corresponding control device, heating of a corresponding heating device according to the measurement value of the first temperature measuring device and a target temperature of the heated portion corresponding to the first temperature measuring device so that the temperature of the heated portion meets the target temperature.

[0053] In this embodiment, if the measurement value of the second temperature measuring device does not change within a specified period of time, it is determined that a short-circuit failure has occurred in the second temperature measuring device, and based on this, if the measurement value of the first temperature measuring device within a specified period of time increases over time, it is determined that the measurement value of the first temperature measuring device meets the normal condition, and further, the measurement value of the first temperature measuring device can be used as the actual temperature of the heated portion of the temperature-controlled piping corresponding to the first temperature measuring device.

[0054] Optionally, step S3 may specifically include: The method includes a step in which the measurement values ​​of the first temperature measuring device and the second temperature measuring device both increase over time within a predetermined period of time, in which case it can be determined that neither the first temperature measuring device nor the second temperature measuring device has an open circuit, short circuit or poor contact.

[0055] If the above conditions are met, when the measurement value of the first temperature measuring device is smaller than the measurement value of the second temperature measuring device and the absolute value of the difference between the measurement values ​​of the first temperature measuring device and the second temperature measuring device is greater than a first predetermined difference, it can be determined that the measurement value of the second temperature measuring device can be the actual temperature of the heated portion corresponding to the second temperature measuring device.

[0056] In detail, when the measurement value of the first temperature measuring device is smaller than that of the second temperature measuring device and the absolute value of the difference between the two is greater than a first predetermined difference, it indicates that there may be a problem such as the distance between the first temperature measuring device and the heated part being relatively large or the contact relationship between the first temperature measuring device and the heated part being poor; however, since the measurement value of the first temperature measuring device also increases over time, it can be determined that the first temperature measuring device still has a normal function, but the accuracy of its measurement value is relatively low; therefore, in this case, the measurement value of the second temperature measuring device can also be used as the actual temperature of the heated part.

[0057] As described above, based on the condition that the measurement values ​​of the first temperature measuring device and the second temperature measuring device within a specified period of time both increase over time, if the measurement value of the first temperature measuring device is smaller than the measurement value of the second temperature measuring device and the absolute value of the difference between the two is greater than a first specified difference, the measurement value of the second temperature measuring device and the target temperature of the heated part corresponding to the second temperature measuring device can be used by the corresponding control device to control the heating of the corresponding heating device so that the temperature of the heated part meets the target temperature.

[0058] Optionally, as shown in FIG. 4, the above step S3 specifically includes: If the measurement value of the second temperature measuring device within a specified period increases over time and the measurement value of the first temperature measuring device within a specified period does not change, the method further includes a step of controlling, by a corresponding control device, heating of a corresponding heating device according to the measurement value of the second temperature measuring device and a target temperature of the heated portion corresponding to the second temperature measuring device so that the temperature of the heated portion meets the target temperature.

[0059] In this embodiment, if the measurement value of the first temperature measuring device does not change within a specified period of time, it is determined that a short-circuit failure has occurred in the first temperature measuring device, and based on this, if the measurement value of the second temperature measuring device within a specified period of time increases over time, it is determined that the measurement value of the second temperature measuring device meets the normal condition, and further, the measurement value of the second temperature measuring device can be used as the actual temperature of the heated portion of the temperature-controlled piping corresponding to the second temperature measuring device.

[0060] Optionally, as shown in FIG. 5 and FIG. 6, the above step S3 specifically includes: The method further includes a step of determining that the measurement value of the first temperature measuring device is abnormal if the measurement value of the first temperature measuring device continues to exceed a first predetermined value for a predetermined period of time, or if the number of times that the jump amplitude of the measurement value of the first temperature measuring device within a predetermined period of time exceeds a second predetermined value reaches a predetermined number.

[0061] Specifically, if the measured value of the first temperature measuring device continues to exceed a first predetermined value within a predetermined period of time, it indicates that an open circuit fault has occurred in the first temperature measuring device, and in this case, the measured value of the first temperature measuring device is usually displayed as a numerical value of its maximum range. Furthermore, specifically, the first predetermined value may be a value higher than the maximum temperature controlled temperature of the temperature controlled pipe, so that if the measured value of the first temperature measuring device exceeds the first predetermined value, it can be determined that the first temperature measuring device is abnormal and there is a high probability that an open circuit fault has occurred, and the measured value of the first temperature measuring device cannot be regarded as the actual temperature of the heated part corresponding to the first temperature measuring device.

[0062] When the jump amplitude of the measurement value of the first temperature measuring device in a predetermined period exceeds the second predetermined value and the number of times of exceeding the second predetermined value reaches a predetermined number, it indicates that the first temperature measuring device is in a poor contact state, and the measurement value of the first temperature measuring device cannot be the actual temperature of the heated part corresponding to the first temperature measuring device. The jump is a large difference between the measurements of the first temperature measuring device at two adjacent time points, and when the amplitude of the difference exceeds the second predetermined value and the number of occurrences of the difference in a predetermined period is large, that is, exceeds the second predetermined value, it can be determined that the difference is not due to the performance of the first temperature measuring device, and the first temperature measuring device is faulty.

[0063] Based on the above case, when the measured value of the second temperature measuring device within a predetermined period of time increases over time, the measured value of the second temperature measuring device can be taken as the actual temperature of the heated part corresponding to the second temperature measuring device. Using the measured value and the target temperature of the heated part corresponding to the second temperature measuring device, the heating of the corresponding heating device can be controlled by the corresponding control device, so that the temperature of the heated part can meet the target temperature as well.

[0064] In addition, in the above embodiment, if the data used by the control device to control the operation of the heating device originates from a second temperature measuring device of the heating assembly, it may indicate that the first temperature measuring device of the heating assembly is abnormal, in which case an alarm signal may be sent, the alarm signal including information that the first temperature measuring device of the heating assembly is abnormal.

[0065] Optionally, as shown in FIG. 4, step S4 specifically includes: The method includes a step of controlling, by a corresponding control device, a corresponding heating device to heat the heated part in accordance with the heating state of the heating device of an adjacent heated part when the measurement value of the first temperature measuring device within a predetermined period is abnormal and the measurement value of the second temperature measuring device continues to exceed a first predetermined value within a predetermined period or the number of times the jump amplitude exceeds the second predetermined value reaches a predetermined number.

[0066] In this embodiment, if the measurement value of the second temperature measuring device does not change for a predetermined period of time, it is determined that a short-circuit failure has occurred in the second temperature measuring device, that is, the measurement value of the second temperature measuring device cannot be regarded as the actual temperature of the heated part corresponding to the second temperature measuring device.

[0067] Based on this, this embodiment utilizes the heating state of the heating device corresponding to the heated part adjacent to the heated part to provide heating parameters to the heating device corresponding to the failed second temperature measuring device, so as to ensure that the heating device corresponding to the failed second temperature measuring device can still continue heating operation, and can continue to heat the heated part corresponding to the failed second temperature measuring device until its target temperature is close to or equal to that of the failed second temperature measuring device. Of course, in this embodiment, the first temperature measuring device corresponding to the failed second temperature measuring device is also abnormal.

[0068] More specifically, the heated portion corresponding to the failed second temperature measuring device may be specifically the first heated portion, and the heated portion adjacent to the first heated portion may be specifically the second heated portion. The second heated portion may be located downstream of the first heated portion or upstream of the first heated portion, and this specification is not limited thereto. However, when actually selecting the second heated portion, the heated portion downstream of the first heated portion is preferentially selected as the second heated portion, so that the probability of overheating occurring in the temperature of the temperature-controlled pipe in the fluid transport direction is relatively small.

[0069] Optionally, as shown in FIG. 5 and FIG. 6, the above step S4 specifically includes: The method further includes a step of controlling, by a corresponding control device, the corresponding heating device to heat the heated portion in accordance with the heating state of the heating device of the adjacent heated portion when the measurement value of the second temperature measuring device continues to exceed the first predetermined value for a predetermined period of time or the number of times the jump amplitude exceeds the second predetermined value reaches a predetermined number.

[0070] Specifically, if the measurement value of the second temperature measuring device continues to exceed a first predetermined value within a predetermined period of time, it indicates that an open circuit fault has occurred in the second temperature measuring device, and in this case, the measurement value of the second temperature measuring device is usually displayed as a numerical value of its maximum range. Furthermore, specifically, the first predetermined value may be a value higher than the maximum temperature controlled temperature of the temperature controlled pipe, so that if the measurement value of the second temperature measuring device exceeds the first predetermined value, it can be determined that the second temperature measuring device is abnormal and there is a high probability that an open circuit fault has occurred, and the measurement value of the second temperature measuring device cannot be regarded as the actual temperature of the heated part corresponding to the second temperature measuring device.

[0071] When the jump amplitude of the measurement value of the second temperature measuring device in a predetermined period exceeds a second predetermined value and the number of times of exceeding the second predetermined value reaches a predetermined number, it indicates that the second temperature measuring device is in a poor contact state, and the measurement value of the second temperature measuring device cannot be the actual temperature of the heated part corresponding to the second temperature measuring device. The jump is a large difference between the measurements of the second temperature measuring device at two adjacent time points, and when the amplitude of the difference exceeds the second predetermined value and the number of occurrences of the difference in a predetermined period is large, that is, it exceeds the second predetermined value, it can be determined that the difference is not due to the performance of the second temperature measuring device, and the second temperature measuring device is faulty.

[0072] Based on this, as shown in FIG. 7, the pipe temperature control method according to this embodiment obtains and analyzes temperature data of the heated part to determine whether the measurement value of the first temperature measuring device of the corresponding heated part is abnormal; if it is normal, the measurement value of the first temperature measuring device is taken as the actual temperature, and the corresponding control device sets corresponding parameters to perform PID temperature control heating so that the heated part meets the target temperature; if the measurement value of the first temperature measuring device is abnormal, the processing device sends an alarm to notify the abnormality of the first temperature measuring device, and determines whether the measurement value of the second temperature measuring device is abnormal; if it is normal, the measurement value of the second temperature measuring device is taken as the actual temperature. Then, the corresponding control device sets the corresponding parameters to perform PID temperature control heating so that the heated part meets the target temperature; when the measurement value of the second temperature measuring device is also abnormal, the processing device sends an alarm to notify the abnormality of the second temperature measuring device; and uses the heating state of the heating device corresponding to the heated part adjacent to the heated part to provide heating parameters to the heating device corresponding to the failed second temperature measuring device, so as to ensure that the heating device corresponding to the failed second temperature measuring device can continue heating operation, and the heated part corresponding to the failed second temperature measuring device can continue to heat until the temperature is close to or equal to its target temperature. Of course, in this embodiment, the heating device of the adjacent heated part is in a heating state, otherwise, the temperature control program is directly terminated and heating is stopped.

[0073] More specifically, the heated portion corresponding to the failed second temperature measuring device may be specifically the first heated portion, and the heated portion adjacent to the first heated portion may be specifically the second heated portion. The second heated portion may be located downstream of the first heated portion or upstream of the first heated portion, and this specification is not limited thereto.

[0074] As shown in the table below, in the extension direction of the temperature-controlled pipe, the heated parts Z1, Z2...Z are arranged in the direction of the fluid flow in the pipe. (n-1) and Zn are distributed adjacent to each other in sequence, Z1 is located on the most upstream side of the temperature-controlled pipe, and Z n is located on the most downstream side of the temperature-controlled pipe. When actually selecting the second heated portion, the heated portion Z n-1 (n ≤ m) downstream of n is preferentially selected as the second heated portion, thereby improving the accuracy of the temperature of the temperature-controlled pipe. Of course, if the first heated portion is one heated portion on the most downstream side of the temperature-controlled pipe, that is, Z n in the case of, the heated portion Z n adjacent to the upstream side of n-1 can be selected as the second heated portion.

[0075] FIG. 8 is a specific schematic diagram showing a part of the flow of the pipe temperature control method. In FIG. 8, P is the reference value of the temperature control range, and T ZnS -T ZnA ≥ P indicates that there is still a large difference between the current temperature and the target temperature of the heated portion, and it is necessary to continue heating the heated portion. On the other hand, |T ZnS -T ZnA | < P indicates that the current temperature of the heated portion is close to the target temperature and meets the temperature control requirements. It is possible to enter the heat preservation heating state, and it is necessary to judge whether the current temperature is greater than the target temperature. If YES, it indicates a heating abnormality and abnormal processing is required. In the temperature control process, the temperature control parameters of each heated portion are shown in the following table.

[0076]

Table 1

[0077] Among the multiple heating assemblies, the heating assembly corresponding to the first heated portion is a first heating assembly, and the heating assembly corresponding to the second heated portion is a second heating assembly, and the first heating assembly and the second heating assembly are adjacent to each other. Based on the above, if the measured values ​​of the first temperature measuring device and the second temperature measuring device of the first heating assembly are both abnormal in a predetermined period of time,

[0078] The step of controlling the corresponding heating device to heat the heated portion by following the heating state of the heating device of the adjacent heated portion through the corresponding control device specifically includes: The method may include controlling, by a control device of the first heating assembly, the heating device of the first heating assembly to heat the heated portion corresponding to the first heating assembly of the temperature-controlled piping, so that the temperature of the heated portion corresponding to the first heating assembly meets the target temperature of the heated portion corresponding to the second heating assembly, in response to a measurement value of the first temperature measuring device of the second heating assembly and a target temperature of the heated portion corresponding to the second heating assembly of the temperature-controlled piping.

[0079] That is, when either the first temperature measuring device or the second temperature measuring device of the first heating assembly has a malfunction, it is necessary to use the heating parameters of the second heating assembly adjacent to the first heating assembly to heat the heated portion corresponding to the first heating assembly. In the heating process, the parameters used are the temperature parameters measured by the first temperature measuring device of the second heating assembly, and based on the target temperature of the heated portion corresponding to the second heating assembly, the control device of the first heating assembly is used to control the heating device of the first heating assembly to operate to heat the heated portion corresponding to the first heating assembly, so that the temperature of the heated portion corresponding to the first heating assembly meets the target temperature of the heated portion corresponding to the second heating assembly, thereby ensuring the continuation of the process, preventing the scrapping of the wafer due to the interruption of the process, and reducing losses and costs.

[0080] In addition, in the above embodiment, if the data used by the control device to control the operation of the heating device originates from a heating device of another heating assembly adjacent to the heating assembly, it may indicate that both the first temperature measuring device and the second temperature measuring device of the heating assembly are abnormal, in which case an alarm signal may be sent, the alarm signal including information that both the first temperature measuring device and the second temperature measuring device of the heating assembly are abnormal.

[0081] Based on the pipe temperature control method according to the above embodiment, as shown in Fig. 7 and Fig. 8, the embodiment of the present application further discloses the following contents. In the pipe temperature control device, the plurality of heating assemblies may specifically be two heating assemblies, which are the first heating assembly and the second heating assembly. Of course, the number of heating assemblies may be three, four, five or more, and the heating assemblies may be the first heating assembly, the second heating assembly, the third heating assembly, ... the nth heating assembly, respectively. Correspondingly, the heated parts of the temperature-controlled pipe corresponding to the first heating assembly, the second heating assembly, the third heating assembly ... the nth heating assembly are the first heated part, the second heated part, the third heated part ... the nth heated part, respectively, and the above parts are adjacent to each other in the extending direction of the temperature-controlled pipe.

[0082] Based on the above, the above step S2 may specifically include the following steps.

[0083] S21: If the measurement value of the first temperature measuring device of the first heating assembly within a predetermined period of time increases over time, control the heating device of the first heating assembly to operate at a first power for a first predetermined time so that the temperature of the first heated portion meets the first target temperature, according to the measurement value of the first temperature measuring device and a first target temperature of the first heated portion corresponding to the first heating assembly of the temperature-controlled piping.

[0084] That is, when the first temperature measuring device of the first heating assembly is in normal operating condition, the measurement value of the first temperature measuring device and the first target temperature of the first heated portion are used to control the operation of the heating device of the first heating assembly so that the temperature of the first heated portion meets the first target temperature, i.e., the temperature specified by the temperature control command.

[0085] The first target temperature may be a preset temperature, specifically, it may be determined according to the material of the first heated portion and the type and flow rate of the transported medium, etc., specifically, the temperature set in the actual application is used as the standard, and is not particularly limited in this embodiment. In addition, when the measurement value of the first temperature measuring device of the first heating assembly within a predetermined period increases over time, it is determined that the first temperature measuring device can provide normal temperature measurement data and meets the condition of being in a normal operating state, but the above normal operating state is a relative result, and the operating state of the first temperature measuring device is not normal in an absolute sense.

[0086] S22: If the measurement value of the first temperature measuring device of the first heating assembly within a predetermined period of time does not increase over time and the measurement value of the second temperature measuring device of the first heating assembly within a predetermined period of time increases over time, control the heating device of the first heating assembly to operate at a first power for a first predetermined time according to the measurement value of the second temperature measuring device and a first target temperature of the first heated portion corresponding to the first heating assembly of the temperature-controlled piping, so that the temperature of the first heated portion meets the first target temperature.

[0087] In this embodiment, when the first temperature measuring device of the first heating assembly is in a non-operational state, i.e., in an abnormal state, and the second temperature measuring device is in a normal operating state, the measurement value of the second temperature measuring device and the first target temperature of the first heated portion are used to control the operation of the heating device of the first heating assembly so that the temperature of the first heated portion meets the first target temperature, i.e., the temperature indicated by the temperature control command.

[0088] In other words, if the measurement value of the first temperature measuring device within a specified period of time does not increase over time and the measurement value of the second temperature measuring device increases over time during the same period, there is a high possibility that a malfunction has occurred in the first temperature measuring device, and furthermore, the temperature data measured by the first temperature measuring device cannot be used as temperature control data.

[0089] In an embodiment of the present application, a temperature control command is first received, and when a measurement value of a first temperature measuring device of a first heating assembly within a predetermined period increases over time, the first temperature measuring device is determined to be in a normal operating state, and the measurement value of the first temperature measuring device and a first target temperature of the heated portion are used to control the heating device of the first heating assembly to operate at a first power for a first predetermined time such that the temperature of the first heated portion meets the first target temperature. When a measurement value of the first temperature measuring device within a predetermined period does not increase over time and a measurement value of a second temperature measuring device of the first heating assembly within a predetermined period increases over time, the first temperature measuring device is determined to be in an abnormal operating state and the second temperature measuring device is in a normal operating state, and the measurement value of the second temperature measuring device and the first target temperature of the heated portion are used to control the heating device of the first heating assembly to operate at a first power for a first predetermined time such that the temperature of the first heated portion meets the first target temperature.

[0090] In the embodiment of the present application, when the first temperature measuring device of the first heating assembly operates normally, the temperature measured by the first temperature measuring device is used to control the heating device of the first heating assembly to heat the first heated portion; when the first temperature measuring device does not operate normally and the second temperature measuring device of the first heating assembly operates normally, the temperature measured by the second temperature measuring device is used to control the heating device to heat the first heated portion, so that when one of the first temperature measuring device and the second temperature measuring device is abnormal, the other is used to measure the temperature of the corresponding first heated portion of the temperature-controlled pipe, thereby preventing the pipe temperature control device from operating normally due to an abnormality (such as damage or poor contact) of one temperature measuring device, which requires the machine to be stopped for maintenance, resulting in the interruption of the wafer processing process, a significant increase in production costs, and a delay in the process. The adoption of the above technical solution can solve the above problem to a certain extent and ensure the continuity of the process within a certain range.

[0091] Furthermore, in another specific embodiment of the present application, step S21 may include step S211.

[0092] S211: When the measurement values ​​of the first temperature measuring device and the second temperature measuring device of the first heating assembly both increase over time within a predetermined period of time, and the absolute value of the difference between the measurement values ​​of the first temperature measuring device and the second temperature measuring device is less than or equal to a first predetermined difference, control the heating device of the first heating assembly to operate at a first power for a first predetermined time, according to the measurement value of the first temperature measuring device and a first target temperature of the first heated portion corresponding to the first heating assembly of the temperature-controlled piping, so that the temperature of the first heated portion meets the first target temperature.

[0093] In this embodiment, when the measurements of the first and second temperature measuring devices of the first heating assembly both increase over time, it can be determined that they are both in the above-mentioned normal operating state, and in order to further improve the accuracy of the temperature control of the first heated portion of the temperature-controlled pipe, the relationship between the absolute value of the difference between the measurements of the first and second temperature measuring devices and a first predetermined difference is further determined, and when the difference between the absolute values ​​of the differences is equal to or less than the first predetermined difference, it can be determined that the accuracy of the measurements of the first and second temperature measuring devices is relatively high, that is, the measurements of the first and second temperature measuring devices are both essentially the actual temperature of the first heated portion. Based on this, the measurements of the first temperature measuring device and the first target temperature of the first heated portion can be used to control the heating device to operate at a first power for a first predetermined time, so that the temperature of the first heated portion meets the first target temperature.

[0094] In this embodiment, by comparing the temperatures measured by the first temperature measuring device and the second temperature measuring device, it is possible to more accurately determine whether the first temperature measuring device is in a normal operating state, and further make the temperature control degree of the first heated part closer to the first target temperature, make the heating result more accurate, and further improve the process effect.

[0095] As described above, the heating assemblies of the pipe temperature control device may include a first heating assembly, and the first heating assembly is used to perform temperature control on a first heated portion of the temperature-controlled pipe. Optionally, in this embodiment, the heating assemblies of the pipe temperature control device may include a second heating assembly, and similarly, the second heating assembly is used to perform temperature control on a second heated portion of the temperature-controlled pipe corresponding to the second heating assembly, and the first heating assembly and the second heating assembly are distributed in the extending direction of the temperature-controlled pipe. Based on the above pipe temperature control device, in the pipe temperature control method according to this embodiment, after the above step S1, the pipe temperature control method may further include step S23.

[0096] S23: When the measurement values ​​of the first temperature measuring device and the second temperature measuring device of the first heating assembly both increase over time within a specified period, and the absolute value of the difference between the measurement values ​​of the first temperature measuring device and the second temperature measuring device is greater than the first specified difference, and the heating device of the second heating assembly is operating, control the heating device of the first heating assembly to operate at a second power for a second specified time, according to the measurement value of the first temperature measuring device of the second heating assembly and a second target temperature of the second heated portion corresponding to the second heating assembly of the temperature-controlled piping, so that the temperature of the first heated portion meets the second target temperature.

[0097] In this embodiment, similar to the previous embodiment, when the measured values ​​of the first and second temperature measuring devices of the first heating assembly both increase over time, it can be determined that both are in the above-mentioned normal operating state, and the accuracy of the judgment result of whether the first and second temperature measuring devices are in the normal operating state can be further improved by comparing the absolute value of the difference between the measured values ​​of the first and second temperature measuring devices with the above-mentioned first predetermined difference. Correspondingly, when the absolute value of the difference between the measured values ​​of the first and second temperature measuring devices is greater than the first predetermined difference, it indicates that at least one of the first and second temperature measuring devices is abnormal. Based on this, it is not possible to directly determine which of the first and second temperature measuring devices is abnormal, so that the measured value of either the first or second temperature measuring device cannot be taken as the actual temperature of the first heated portion of the temperature-controlled pipe, so as to ensure the reliability of the temperature control operation.

[0098] In the temperature-controlled pipe, the first heated portion and the second heated portion are spatially adjacent to each other, and the medium transported in the temperature-controlled pipe flows through the first heated portion and the second heated portion, respectively, and based on this, in this embodiment, the temperature of the second heated portion adjacent to the first heated portion of the temperature-controlled pipe can be used as the real-time temperature of the first heated portion. Of course, the premise of the above case is that the second heating assembly is in an operating state, so that when the heating device of the second heating assembly is in an operating state, the heating device of the first heating assembly can be controlled to operate at a second power for a second predetermined time according to the measurement value of the first temperature measuring device of the second heating assembly and the second target temperature of the second heated portion corresponding to the second heating assembly of the temperature-controlled pipe, so that the temperature of the first heated portion meets the second target temperature.

[0099] By adopting the above technical solution, even if the measurement results of the first temperature measuring device and the second temperature measuring device of the first heating assembly may both be inaccurate, the relevant data of the second heating assembly can be used to control the first heating assembly to continue operating, further ensuring the continuity of the process, preventing wafers from being scrapped due to the interruption of the process, and reducing losses and costs.

[0100] Preferably, the second heating assembly may be the heating assembly among the multiple heating assemblies that is closest to the first heating assembly in the extension direction of the temperature-controlled piping, thereby making the second target temperature reached by the first heated part closer to the first target temperature to which it was originally heated when the corresponding data of the second heating assembly is used to control the operation of the first heating assembly, thereby further improving the accuracy of the temperature when the medium transported in the temperature-controlled piping is transported to the process chamber.

[0101] As described above, the heating assemblies in the pipe temperature control device according to the present application may include a first heating assembly and a second heating assembly. Based on this, in the pipe temperature control method according to the embodiment of the present application, after the above step S1, the pipe temperature control method may further include step S24.

[0102] S24: If neither the measurement values ​​of the first temperature measuring device and the second temperature measuring device of the first heating assembly within a predetermined period of time increase over time and both the heating devices of the first heating assembly and the second heating assembly are operating, control the heating device of the first heating assembly to operate at a second power for a second predetermined time, according to the measurement value of the first temperature measuring device of the second heating assembly and a second target temperature of the second heated portion corresponding to the second heating assembly of the temperature-controlled piping, so that the temperature of the first heated portion meets the second target temperature.

[0103] In this embodiment, if the measured values ​​of the two temperature measuring devices of the first heating assembly within a predetermined period of time do not increase over time, and the heating device of the first heating assembly operates, it indicates that the heating device of the first heating assembly has an output current, but the first temperature measuring device and the second temperature measuring device of the first heating assembly cannot feed back the heating result of the heating device correspondingly, in this case, it is determined that the first temperature measuring device and the second temperature measuring device are both in an abnormal state. In this case, the measured values ​​of the first heating assembly cannot be used to control the heating operation of the first heating assembly.

[0104] The relevant data of the second heating assembly can still be used as the data of the first heated part to control the first heating assembly, so as to ensure the continuation of the process. Of course, the above technical solution also needs to judge whether the second heating device is in an operating state, and if the heating device of the second heating assembly is in an operating state, the second target temperature of the second heated part corresponding to the second heating assembly is used to control the heating device of the first heating assembly to operate at the second power for a second predetermined time, so that the temperature of the first heated part meets the second target temperature.

[0105] By adopting the above technical solution, the relevant data of the second heating assembly can also be used to control the operation of the first heating assembly, ensuring that the first heating assembly can still heat the temperature of the first heated portion of the temperature control piping to a second target temperature that is relatively close to the first target temperature, ensuring the continuity of the process, and preventing the scrapping of wafers due to the interruption of the process.

[0106] As described above, when the first temperature measuring device and the second temperature measuring device of the first heating assembly are abnormal, the temperature control can be performed on the first heated part using the related data of the second heating assembly. Based on this, the above pipe temperature control method includes: The method may further include a step of transmitting a first alarm signal when the heating device of the first heating assembly is controlled to operate at the second power, the first alarm signal including an abnormal operation of the first temperature measuring device and / or the second temperature measuring device of the first heating assembly.

[0107] That is, when the first heating assembly operates at the second power, it indicates that at least one of the first temperature measuring device and the second temperature measuring device of the first heating assembly is in an abnormal state, and therefore a first alarm signal is sent to notify operators or processing devices that at least one of the first temperature measuring device and the second temperature measuring device of the first heating assembly is abnormal, so that operators can find the problem or replace the device in a timely manner, and ensure that the subsequent process results can better meet the requirements.

[0108] During the process, the medium transported through the temperature-controlled piping may be intermittently supplied to the process chamber. Based on this, in this embodiment, the piping temperature control method may further include step S3, optionally, to ensure that the temperature of the transported medium when it is supplied into the process chamber can still be maintained at the required temperature.

[0109] S3: After the heating device of the first heating assembly operates at the second power for a second predetermined time, control the heating device of the first heating assembly to operate at a third power so that the temperature of the first heated portion continues to satisfy the first target temperature.

[0110] That is, after the temperature of the first heated part of the first heating assembly reaches the second target temperature, the heating device of the first heating assembly is continuously operated to keep the first heated part warm, and the first heating assembly keeps the first heated part warm with a third power that can make the temperature of the first heated part meet the first target temperature, so that the temperature of the first heated part, which was originally heated to the second target temperature, can further meet the originally set first target temperature by keeping it warm, and further enhance the temperature control effect of the medium transported through the temperature-controlled pipe, thereby improving the process result.

[0111] In addition, the amount of heat released by the medium contained in the first heated portion per unit time may be determined depending on parameters such as the material of the first heated portion and the type and flow rate of the medium being transported, and based on this, the amount of heat required to maintain the temperature of the first heated portion at the first target temperature per unit time can be obtained, and further specific parameters of the third power can be obtained.

[0112] As described above, by controlling the heating device of the first heating assembly to operate at a first power for a first predetermined time, the temperature of the first heated assembly can meet the first target temperature, and optionally, meeting the first target temperature can be specifically equal to the first target temperature, and in another embodiment of the present application, meeting the first target temperature can be that the absolute value of the difference between the value of the first target temperature and the value of the real-time temperature of the first heated part is smaller than a second predetermined difference. In other words, by expanding the condition for meeting the first target temperature, the strictness of the judgment process is reduced, and as long as the temperature of the first heated part is within one range section, it is determined that the first target temperature is met, and the application range of the pipe temperature control method is expanded.

[0113] As described above, when the heating device of the first heating assembly operates at a second power for a second predetermined time, such that the temperature of the first heated portion meets a second target temperature, the first heated portion can be kept warm, thereby ensuring that the temperature when the medium is transported into the process chamber still meets the required temperature, and the process effect is not adversely affected by heat loss.

[0114] Similarly, when the heating device of the first heating assembly operates at a first power for a first predetermined time, heating and insulation can also ensure that the temperature of the medium in the first heated portion meets the first target temperature for a long time, and based on this, in this embodiment, the pipe temperature control method may further include step S4.

[0115] S4: After the heating device of the first heating assembly operates at the first power for a first predetermined time, control the first heating assembly to operate at a third power, so as to maintain the absolute value of the difference between the temperature of the first heated part and the first target temperature equal to or less than a third predetermined difference. When the technical solution of this embodiment is adopted, the temperature of the medium in the first heated part can meet the first target temperature for a long time by continuing to keep warm, and the temperature of the medium when it is transported into the process chamber can meet the required temperature, and the temperature will not decrease due to the heat dissipation of the medium over time, which will adversely affect the process effect.

[0116] In the above step S4, by continuing to heat, the medium in the first heated portion can reach the first target temperature; however, in practical applications, unexpected circumstances may cause heat preservation failure. Based on this, in this embodiment, the pipe temperature control method may further include step S51.

[0117] S51: Send a temperature control command when the first heating assembly operates at a third power for a third predetermined time and the difference between the first target temperature and the temperature of the first heated portion is less than a third predetermined difference.

[0118] In this embodiment, after the first heating assembly operates at the third power for a third predetermined time, if the difference between the first target temperature and the temperature of the first heated portion is smaller than the third predetermined difference, it indicates that the current temperature of the first heated portion is lower than the first target temperature and does not meet the first target temperature, and therefore it is necessary to reheat the medium in the first heated portion so that the temperature of the medium meets the first target temperature again. Based on this, send a temperature control command to re-execute the above S1 and the subsequent steps corresponding to S1, and the above means have been described in detail in the above embodiments, and for the sake of brevity, detailed description will be omitted in this embodiment.

[0119] Correspondingly, the pipe temperature control method may further include step S52.

[0120] S52: When the first heating assembly operates at a third power for a third predetermined time, and the difference between the temperature of the first heated part and the first target temperature is greater than a third predetermined difference, control the heating device of the first heating assembly to stop operating, and send a second alarm signal, where the second alarm signal includes insulation heating abnormality information.

[0121] In this embodiment, after the first heating assembly operates at the third power for a third predetermined time, if the difference between the temperature of the first heated portion and the first target temperature is greater than the third predetermined difference, it indicates that the current temperature of the first heated portion is higher than the first target temperature and the temperature of the first heated portion does not meet the first target temperature, reflecting that the heating device of the first heating assembly may not be heating at the third power, or that the first temperature measuring device and / or the second temperature measuring device of the first heating assembly have a measurement abnormality. In this case, it indicates that the heating device of the first heating assembly is in an abnormal operating state. Correspondingly, the heating device of the first heating assembly needs to be controlled to stop operating, so as to prevent safety issues caused by overheating of the medium and to prevent damage to the device. In addition, a second alarm signal is further sent to notify the operator and / or the processing device that the first heating assembly currently has a heating abnormality, so as to timely find the problem or replace the device.

[0122] The above embodiments of the present application have been described with a focus on the differences between each embodiment, and the different optimized features of each embodiment can be combined to form a more preferred embodiment, unless inconsistent, and detailed descriptions are omitted here for the sake of brevity of the text.

[0123] The above is merely an embodiment of the present application, and is not intended to limit the present application. Those skilled in the art may make various modifications and variations to the present application. All modifications, equivalent replacements, improvements, etc. made without departing from the spirit and principles of the present application shall be included in the scope of the claims of the present application. [Explanation of symbols]

[0124] 100 Processing Devices 200 Heating Assembly 210 Heating Devices 220 First temperature measuring device 230 Second temperature measuring device 240 Control Device

Claims

1. A piping temperature control device applied to a semiconductor device, comprising: a processing device; and a plurality of heating assemblies, the plurality of heating assemblies being distributed in an extension direction of the temperature-controlled pipe to correspondingly control temperatures of a plurality of heated portions of the temperature-controlled pipe, each of the heating assemblies including a heating device, a first temperature measuring device, a second temperature measuring device, and a control device; The first temperature measuring device and the second temperature measuring device of each of the heating assemblies are both used for measuring a real-time temperature of the heated portion of the temperature-controlled piping corresponding to the heating device of the heating assembly, the first temperature measuring device and the second temperature measuring device of each of the heating assemblies are both connected to the control device of the heating assembly, and the plurality of control devices are all connected to the processing device; the processing device is used to control, by the control devices, the operation of the heating devices, respectively, according to target temperatures of the heated portions of the temperature-controlled pipes and measurements of the first temperature measuring devices of the heating assemblies, until the temperatures of the heated portions meet the target temperatures, respectively; The processing device is further used for controlling, when the measurement value of the first temperature measuring device within a predetermined period is abnormal, the corresponding heating device to heat the heated portion by the corresponding control device according to the measurement value of the corresponding second temperature measuring device and the target temperature of the corresponding heated portion; The processing device is further characterized in that when the measurement values ​​of both the first temperature measuring device and the second temperature measuring device of any of the heating assemblies within a predetermined period are abnormal, the corresponding control device is used to control the corresponding heating device to heat the heated part in accordance with the heating state of the heating device of the adjacent heated part.

2. A pipe temperature control method applied to the pipe temperature control device according to claim 1, Step S1 of receiving a temperature control command; Step S2: controlling, by the control devices, the operation of the heating devices, respectively, according to the target temperatures of the heated portions of the temperature-controlled pipes and the measurements of the first temperature measuring devices of the heating assemblies, until the heated portions meet the target temperatures, respectively; Step S3: when the measured value of the first temperature measuring device within a predetermined period is abnormal, controlling the corresponding heating device to heat the heated portion by the corresponding control device according to the measured value of the corresponding second temperature measuring device and the target temperature of the corresponding heated portion; and if the measured values ​​of both the first temperature measuring device and the second temperature measuring device of any of the heating assemblies within a predetermined period are abnormal, a step S4 is performed in which the corresponding control device controls the corresponding heating device to heat the heated part in accordance with the heating state of the heating device of the adjacent heated part.

3. Specifically, step S2 is 3. The pipe temperature control method according to claim 2, further comprising a step of controlling heating of the corresponding heating device by the corresponding control device in accordance with the measurement value of the first temperature measuring device and a target temperature of the heated part corresponding to the first temperature measuring device when the measurement value of the first temperature measuring device within a predetermined period of time increases over time, so that the temperature of the heated part satisfies the target temperature.

4. Specifically, step S2 is 4. The pipe temperature control method of claim 3, further comprising a step of controlling heating of the corresponding heating device by the corresponding control device in accordance with the measurement value of the first temperature measuring device and a target temperature of the heated portion corresponding to the first temperature measuring device, when the measurement values ​​of the first temperature measuring device and the second temperature measuring device both increase over time and the absolute value of the difference between the measurement values ​​of the first temperature measuring device and the second temperature measuring device is equal to or less than a first predetermined difference, or when the measurement value of the first temperature measuring device is greater than the measurement value of the second temperature measuring device and the absolute value of the difference between the measurement values ​​of the first temperature measuring device and the second temperature measuring device is greater than the first predetermined difference.

5. Specifically, step S2 is 4. The pipe temperature control method according to claim 3, further comprising a step of controlling heating of the corresponding heating device by the corresponding control device in accordance with the measurement value of the first temperature measuring device and a target temperature of the heated part corresponding to the first temperature measuring device, when the measurement value of the first temperature measuring device within a specified period increases over time and the measurement value of the second temperature measuring device does not change during the specified period, so that the temperature of the heated part satisfies the target temperature.

6. Specifically, step S3 is 3. The pipe temperature control method of claim 2, further comprising a step of controlling heating of the corresponding heating device by the corresponding control device in accordance with the measurement value of the second temperature measuring device and a target temperature of the heated portion corresponding to the second temperature measuring device, when the measurement values ​​of the first temperature measuring device and the second temperature measuring device both increase over time, the measurement value of the first temperature measuring device is smaller than the measurement value of the second temperature measuring device, and the absolute value of the difference between the measurement values ​​of the first temperature measuring device and the second temperature measuring device is greater than a first predetermined difference.

7. Specifically, step S3 is 3. The pipe temperature control method according to claim 2, further comprising a step of controlling heating of the corresponding heating device by the corresponding control device in accordance with the measurement value of the second temperature measuring device and a target temperature of the heated part corresponding to the second temperature measuring device, when the measurement value of the second temperature measuring device within a specified period increases over time and the measurement value of the first temperature measuring device within a specified period does not change, so that the temperature of the heated part satisfies the target temperature.

8. Specifically, step S3 is 3. The pipe temperature control method of claim 2, further comprising a step of controlling heating of the corresponding heating device by the corresponding control device in accordance with the measurement value of the second temperature measuring device and a target temperature of the heated part corresponding to the second temperature measuring device, when the measurement value of the first temperature measuring device continues to exceed a first predetermined value for a predetermined period of time, or the number of times the jump amplitude exceeds a second predetermined value reaches a predetermined number, and the measurement value of the second temperature measuring device within the predetermined period of time increases over time, so that the temperature of the heated part satisfies the target temperature.

9. Specifically, step S4 is The pipe temperature control method according to claim 2, further comprising a step of controlling, by the corresponding control device, the corresponding heating device to heat the heated part in accordance with the heating state of the heating device of the adjacent heated part when the measurement value of the second temperature measuring device does not change during the specified period.

10. Specifically, step S4 is The piping temperature control method according to claim 2, further comprising a step of controlling, by the corresponding control device, the corresponding heating device to heat the heated part in accordance with the heating state of the heating device of the adjacent heated part when the measurement value of the first temperature measuring device over a predetermined period of time is abnormal and the measurement value of the second temperature measuring device continues to exceed a first predetermined value over a predetermined period of time or the number of times the jump amplitude exceeds a second predetermined value reaches a predetermined number.

11. After step S4, The pipe temperature control method according to claim 2, further comprising a step of acquiring a current temperature of the heated part after heating the heated part for a predetermined time, and if it is determined that the absolute value of the difference between the target temperature of the heated part and the current temperature is smaller than a predetermined value, controlling the corresponding heating device of the heated part to heat the heated part by a control device of the corresponding heated part.

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