Flange Mechanism

Abstract

To provide a flange mechanism capable of easily attaching / detaching a cutting blade.SOLUTION: A flange mechanism 1 includes: a boss part 31 inserted in a central hole 126 of a cutting blade 121; a flange part 32 protruding radially outside from the boss part 31; and a fixing mechanism 4 positioned at a pressing position in which a pressing part 52 on a tip side of the boss part 31 moves to the radially outside and the cutting blade 121 is pressed to the flange part 32 side, and a retreat position in which the pressing part 52 moves to the radially inside of the boss part 31. The fixing mechanism 4 includes: a blade pressing member 5 which has the pressing part 52 at a tip and is rotatable at a rotary shaft 51 orthogonal to an axial direction of a spindle 122, and in which a rear end side is energized by a spring member 54 facing the center in a radial direction of the boss part 31; and a shaft member 6 arranged so as to move in the axial direction at the center of the boss part 31, and energized in a tip direction of the boss part 31.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a flange mechanism. [Background technology]

[0002] In the device manufacturing process, a cutting machine is used to cut and divide a plate-shaped workpiece such as a semiconductor wafer with a cutting blade. The cutting blade is attached to a spindle by using a flange mechanism having a boss portion (for example, see Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 4913346 Summary of the Invention [Problem to be solved by the invention]

[0004] The flange mechanism has a boss portion fixed to the spindle, a flange portion that expands in diameter at the rear end of the boss portion, and a nut portion that screws into the female thread at the tip of the boss portion and clamps the cutting blade inserted into the central hole of the boss portion with the flange portion.

[0005] When attaching or detaching the cutting blade to or from the flange mechanism, it is necessary to screw in a nut, which requires a lot of man-hours. In addition, when forming a blade replacement mechanism that automatically attaches or detaches the cutting blade to or from the flange mechanism, a unit that performs the screwing of the nut is required, which causes the problem that the machine becomes complicated and large.

[0006] The present invention has been made in consideration of the above-mentioned points, and has an object to provide a flange mechanism that allows a cutting blade to be easily attached and detached. [Means for solving the problem]

[0007] In order to solve the above problems and achieve the object, the flange mechanism of the present invention is a flange mechanism that is detachably attached to the tip of a spindle and supports and fixes an annular cutting blade, the flange mechanism comprising: a boss portion that is inserted into a central hole of the cutting blade and supports an inner peripheral surface of the cutting blade; a flange portion that protrudes radially outward from the axial rear end of the boss portion and supports the cutting blade; and a pressing portion that extends radially outward from the axial tip of the boss portion is selectively positioned at a pressing position where it moves radially outward of the boss portion to press the attached cutting blade toward the flange portion side, and a retracted position where the pressing portion moves radially inward of the boss portion to retract from the cutting blade, and a fixing portion that fixes the cutting blade. and a fixing mechanism for fixing the boss portion, the fixing mechanism being a long member having the pressing portion at a tip thereof and extending in the axial direction of the boss portion, the blade holding member being rotatable about a rotation axis perpendicular to the axial direction of the spindle, the rear end side of the blade holding member being biased by a spring member toward the radial center of the boss portion so that the pressing portion is positioned at the pressing position, and a shaft portion being disposed in the center of the boss portion so as to be movable in the axial direction of the boss portion and biased toward the tip of the boss portion, and when the shaft portion is pressed toward the flange portion, the rear end side of the shaft portion moves the rear end of the blade holding member radially outward against the spring member, thereby rotating the blade holding member and the pressing portion moving to the retracted position.

[0008] In the flange mechanism, the tip portion of the blade pressing member positioned at the pressing position may be further urged radially outwardly of the boss portion by rotation of the spindle. Effect of the Invention

[0009] The present invention has an advantage that the cutting blade can be easily attached and detached. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a perspective view showing a configuration example of a cutting device including a flange mechanism according to the first embodiment. [Diagram 2]FIG. 2 is a perspective view of a main part of a cutting unit of the cutting device shown in FIG. [Diagram 3] FIG. 3 is a front view of the cutting unit shown in FIG. [Figure 4] FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. [Diagram 5] FIG. 5 is a cross-sectional view showing a state in which a cutting blade is attached to and detached from the cutting unit shown in FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] The embodiments for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. The components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0012] [Embodiment 1] The flange mechanism according to the first embodiment will be described with reference to the drawings. Fig. 1 is a perspective view showing a configuration example of a cutting device including the flange mechanism according to the first embodiment. Fig. 2 is a perspective view of a main part of a cutting unit of the cutting device shown in Fig. 1. Fig. 3 is a front view of the cutting unit shown in Fig. 2. Fig. 4 is a cross-sectional view taken along line IV-IV in Fig. 3. Fig. 5 is a cross-sectional view showing a state in which a cutting blade is attached to and detached from the cutting unit shown in Fig. 4.

[0013] The flange mechanism 1 according to the first embodiment constitutes a cutting device 100 shown in Fig. 1. The cutting device 100 is a processing device that cuts a workpiece 200. In the first embodiment, the workpiece 200 to be cut by the cutting device 100 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, whose base material is silicon, gallium arsenide, SiC (silicon carbide), sapphire, or the like. The workpiece 200 has devices formed in areas partitioned in a lattice pattern by a plurality of planned division lines formed in a lattice pattern on the surface.

[0014] The device is, for example, an integrated circuit such as an IC (Integrated Circuit) or an LSI (Large Scale Integration), an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor), a MEMS (Micro Electro Mechanical Systems), or various types of memories (semiconductor memory devices).

[0015] The workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer in which the central part is thinned and a thick part is formed on the outer periphery, or may be a resin package substrate such as a rectangular QFN (Quad Flat No leaded) package substrate having a plurality of devices sealed with resin, a ceramic substrate, a ferrite substrate, a substrate containing at least one of nickel and iron, a glass substrate, etc. In the first embodiment, the workpiece 200 has an adhesive tape attached to the outer periphery of the back side of the front surface, and is supported by the annular frame.

[0016] (cutting equipment) 1 is a processing device that holds a workpiece 200 on a chuck table 110 and cuts it along a planned division line with a cutting blade 121. As shown in FIG. 1, the cutting device 100 includes a chuck table 110 that holds the workpiece 200 by suction on a holding surface 111, a cutting unit 120 that cuts the workpiece 200 held on the chuck table 110 by the cutting blade 121 while supplying cutting water, an imaging unit 150 that takes an image of the workpiece 200 held on the chuck table 110, and a control unit 190.

[0017] 1, the cutting device 100 includes a moving unit 140 that moves the chuck table 110 and the cutting unit 120 relative to each other. The moving unit 140 includes at least an X-axis moving unit 141 that is a processing feed unit that processes and feeds the chuck table 110 in the X-axis direction, which is a cutting direction parallel to the horizontal direction, a Y-axis moving unit 142 that is an indexing feed unit that indexes and feeds the cutting unit 120 in the Y-axis direction that is parallel to the horizontal direction and perpendicular to the X-axis direction, a Z-axis moving unit 143 that is a cutting feed unit that cuts and feeds the cutting unit 120 in the Z-axis direction that is parallel to the vertical direction and perpendicular to both the X-axis and Y-axis directions, and a rotational moving unit 144 that rotates the chuck table 110 around an axis parallel to the Z-axis direction.

[0018] The X-axis moving unit 141 moves the moving plate 103 supporting the chuck table 110 and the rotational moving unit 144 in the X-axis direction, which is the processing feed direction, to relatively feed the chuck table 110 and the cutting unit 120 along the X-axis direction. The X-axis moving unit 141 is also a cutting feed unit that is installed on the device body 101 and reciprocates the chuck table 110 in the X-axis direction, which is the cutting direction.

[0019] The Y-axis moving unit 142 is installed on a gate-shaped support frame 102 standing upright from the apparatus body 101, and moves the cutting unit 120 in the Y-axis direction, which is the indexing feed direction, to index and feed the chuck table 110 and the cutting unit 120 relatively along the Y-axis direction. The Z-axis moving unit 143 is installed on the support frame 102 standing upright from the apparatus body 101, and moves the cutting unit 120 in the Z-axis direction, which is the cutting feed direction, to feed the chuck table 110 and the cutting unit 120 relatively along the Z-axis direction. The rotation moving unit 144 is disposed on the moving plate 103 that is reciprocated in the X-axis direction by the X-axis moving unit 141, and supports the chuck table 110.

[0020] The X-axis moving unit 141, the Y-axis moving unit 142, and the Z-axis moving unit 143 each include a well-known ball screw rotatably provided about its axis, a well-known motor for rotating the ball screw about its axis, and a well-known guide rail for supporting the chuck table 110 or the cutting unit 120 movably in the X-axis, Y-axis, or Z-axis direction. The rotation moving unit 144 includes a motor for rotating the chuck table 110 about its axis.

[0021] The chuck table 110 is disk-shaped, and a holding surface 111 for holding the workpiece 200 is formed of porous ceramics or the like. The chuck table 110 is provided so as to be movable in the X-axis direction by an X-axis moving unit 141, with the moving plate 103 being movable between a processing area below the cutting unit 120 and a carry-in / out area away from the cutting unit 120 where the workpiece 200 is carried in and out. The chuck table 110 is provided so as to be rotatable about an axis parallel to the Z-axis direction by a rotary moving unit 144.

[0022] The chuck table 110 is connected to a vacuum suction source (not shown), and is sucked by the vacuum suction source to suck and hold the workpiece 200 placed on the holding surface 111. In the first embodiment, the chuck table 110 sucks and holds the back side of the workpiece 200 via an adhesive tape. Also, as shown in FIG. 1, a plurality of clamp units 112 for clamping an annular frame are provided around the periphery of the chuck table 110. Note that in the present invention, the adhesive tape is not attached to the workpiece 200, and the workpiece 200 may be held directly by the chuck table 110, and the chuck table 110 does not have to be disk-shaped.

[0023] The cutting unit 120 is a cutting means in which a cutting blade 121 is attached to a spindle 122 and cuts a workpiece 200 held on the chuck table 110. As shown in Fig. 1, the cutting device 100 is equipped with two cutting units 120, that is, a two-spindle dicer, a so-called facing dual type cutting device.

[0024] As shown in FIG. 2, the cutting unit 120 includes a spindle housing 123 formed in a cylindrical shape and movable in the Y-axis and Z-axis directions by a Y-axis moving unit 142 and a Z-axis moving unit 143, a spindle 122 mounted within the spindle housing 123 so as to be rotatable about an axis parallel to the Y-axis direction, a cutting blade 121 fixed to a tip 124 of the spindle 122, and a flange mechanism 1 for fixing the cutting blade 121 to the tip 124 of the spindle 122.

[0025] The spindle 122 is rotatably supported by the spindle housing 123. A tip 124 of the spindle 122 protrudes from one end of the spindle housing 123 to the outside. A motor (not shown) for rotating the spindle 122 is connected to the base end of the spindle 122. The tip 124 of the spindle 122 is formed in a tapered shape such that the outer diameter gradually decreases toward the tip. The spindle 122 is accommodated in the spindle housing 123 so as to be rotatable about its axis with the tip 124 exposed.

[0026] The cutting blade 121 is fixed to a tip 124 of a spindle 122 via a flange mechanism 1, and is rotated by the spindle 122 to cut a workpiece 200. The cutting blade 121 has an annular base 125 made of a metal such as an aluminum alloy and having a central hole 126 and formed in an annular shape, and an annular cutting edge 127 protruding from the outer periphery of the annular base 125.

[0027] The central hole 126 is a hole for fixing the cutting blade 121 to the flange mechanism 1. The cutting blade 127 is made of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bonding material such as metal or resin, and is formed to a predetermined thickness. As shown in FIG. 4, the cutting blade 127 is fixed to the outer periphery of one flat side surface 125-1 of the annular base 125 and protrudes from the outer edge of the annular base 125 in the outer periphery direction.

[0028] Further, the cutting blade 121 has an inclined surface 128 formed around the entire circumference between the central hole 126 and the other side surface 125-2 of the annular base 125, the inclined surface 128 inclining toward the axis of the annular base 125 of the cutting blade 121. The inclined surface 128 is inclined in a direction that gradually increases the inner diameter of the central hole 126 from the depth of the central hole 126 toward the other side surface 125-2.

[0029] The cutting unit 120 also includes a cutting water supply nozzle 129 (shown in FIG. 1) that supplies cutting water to the cutting edge 127 of the cutting blade 121 .

[0030] The flange mechanism 1 is detachably attached to the tip 124 of the spindle 122, and supports and fixes the annular cutting blade 121. As shown in Figures 2, 3 and 4, the flange mechanism 1 includes a first flange member 2 (shown in Figures 2 and 4), a second flange member 3 (shown in Figures 2 and 4), and a fixing mechanism 4.

[0031] The first flange member 2 is fixed to the tip 124 of the spindle 122 and is made of metal. The first flange member 2 integrally comprises a thick, annular flange portion 21 whose outer diameter is smaller than the outer diameter of the annular base 125 of the cutting blade 121, and a cylindrical portion 22 that protrudes from the flange portion 21 to the spindle housing 123 side and is arranged coaxially with the flange portion 21. The cylindrical portion 22 has inner and outer diameters smaller than the outer diameter of the flange portion 21. The first flange member 2 has a step portion 23 formed on the inner circumference of the flange portion 21. The step portion 23 has an inner diameter smaller on the cylindrical portion 22 side than on the flange portion 21 side. The inner diameter of the cylindrical portion 22 is gradually increased toward the spindle housing 123 side.

[0032] The first flange member 2 is fixed to the tip 124 of the spindle 122 by fitting the tip 124 of the spindle 122 into the cylindrical portion 22 and screwing the bolt 25, which has passed through the washer 24 placed on the stepped portion 23, into the screw hole 130 provided in the tip 124 of the spindle 122. The first flange member 2 is disposed coaxially with the spindle 122.

[0033] The second flange member 3 is fixed to the first flange member 2 and supports the cutting blade 121, and is made of metal. The second flange member 3 integrally includes a cylindrical boss portion 31 and an annular flange portion 32. The boss portion 31 and the flange portion 32 are coaxially arranged.

[0034] The boss portion 31 has an outer diameter approximately equal to the inner diameter of the central hole 126 of the cutting blade 121. The boss portion 31 is inserted into the central hole 126 of the cutting blade 121 and supports the inner peripheral surface of the annular base 125 of the cutting blade 121.

[0035] The flange portion 32 has an outer diameter smaller than that of the cutting blade 121. The flange portion 32 protrudes radially outward from the axial rear end of the boss portion 31 near the spindle housing 123, and supports an annular base 125 of the cutting blade 121 with an annular end face (not shown) formed along the outer periphery on the surface 33 of the outer edge portion.

[0036] The second flange member 3 is placed on the flange portion 21 of the first flange member 2, the flange portion 32 of which is fixed to the tip 124 of the spindle 122, and is fixed to the first flange member 2 by bolts 34 that screw into screw holes 26 provided in the first flange member 2. The second flange member 3 is disposed coaxially with the first flange member 2 and the spindle 122. The cutting blade 121 is attached to the second flange member 3 by inserting the boss portion 31 into the central hole 126 and placing the annular base 125 on the flange portion 32.

[0037] The fixing mechanism 4 fixes the cutting blade 121 to the second flange member 3 and also makes the cutting blade 121 detachable from the second flange member 3. The fixing mechanism 4 includes a blade pressing member 5, a shaft member 6 which is a shaft portion, and a pressing member 7.

[0038] The blade holding member 5 is an elongated member whose longitudinal direction extends in the axial direction of the boss portion 31. The blade holding member 5 is rotatably attached to the boss portion 31 of the second flange member 3 by a rotating shaft 51. The rotating shaft 51 is perpendicular to the axial direction of the spindle 122. The blade holding member 5 has a pressing portion 52 at its axial tip away from the spindle housing 123, which presses the inclined surface 128 of the annular base 125 of the cutting blade 121 in the outer circumferential direction.

[0039] The pressing portion 52 extends from the axial tip of the boss portion 31 remote from the spindle housing 123 toward the radial outside of the boss portion 31. The pressing portion 52 has an inclined surface 53 that gradually inclines toward the radial outside of the boss portion 31 as it approaches the axial tip of the boss portion 31 remote from the spindle housing 123. The inclined surface 53 is inclined with respect to the axial direction of the boss portion 31, gradually inclining toward the radial outside of the boss portion 31 as it approaches the tip of the boss portion 31 remote from the spindle housing 123.

[0040] The blade pressing member 5 is attached to the second flange member 3 so as to be rotatable about the rotation shaft 51, and is selectively positioned at a pressing position shown in FIG. 4 where the pressing portion 52 moves radially outward from the boss portion 31 to press the attached cutting blade 121 toward the flange portion 32 along the axial direction, and at a retracted position shown in FIG. 5 where the pressing portion 52 moves radially inward from the boss portion 31 to retract from the cutting blade 121. At the pressing position, the inclined surface 53 of the pressing portion 52 closely overlaps with the inclined surface 128 of the cutting blade 121. At the retracted position, the pressing portion 52 is located on the inner circumferential side of the central hole 126 of the cutting blade 121, allowing the cutting blade 121 to be attached to and detached from the boss portion 31.

[0041] The blade pressing member 5 has a rear end side near the spindle housing 123 biased by the spring member 54 toward the radial center of the boss portion 31. The blade pressing member 5 is biased by the spring member 54, so that the pressing portion 52 is positioned at the pressing position. At the pressing position, the blade pressing member 5 is biased by the spring member 54 so that the inclined surface 53 closely overlaps the inclined surface 128, and the pressing portion 52 presses the inclined surface 128. At this time, since the inclined surfaces 53 and 128 are inclined with respect to the axial direction in the above-mentioned direction, at the pressing position, the pressing portion 52 of the blade pressing member 5 presses the cutting blade 121 toward the flange portion 32 along the axial direction, thereby fixing the cutting blade 121 to the boss portion 31. The mass of the blade pressing member 5 is greater on the front end side where the pressing portion 52 is provided than on the rear end side from the rotating shaft 51.

[0042] The shaft member 6 is disposed in the center of the boss portion 31 so as to be movable in the axial direction of the boss portion 31. The shaft member 6 is formed in a cylindrical shape, disposed on the inner circumference of the boss portion 31, and disposed so as to be movable in the axial direction of the boss portion 31. The shaft member 6 is integrally provided with a cylindrical large diameter portion 61 whose outer diameter is equal to the inner diameter of the boss portion 31, and an annular small diameter portion 62 which is connected to the large diameter portion 61 closer to the spindle housing 123 and whose outer diameter is smaller than the inner diameter of the boss portion 31. The large diameter portion 61 and the small diameter portion 62 are disposed coaxially. In addition, a spring member 63 is provided between the shaft member 6 and the flange portion 32, and the spring member 63 biases the shaft member 6 toward the tip side of the boss portion 31.

[0043] The holding member 7 is formed in a flat plate shape with a circular outer edge, is placed on the tip surface 35 of the boss portion 31, and is fixed to the tip surface 35 of the boss portion 31 by a bolt 71 that screws into a screw hole 36 provided in the tip surface 35 of the boss portion 31. The holding member 7 is formed so that its outer diameter is smaller than that of the boss portion 31, and is disposed coaxially with the boss portion 31. The holding member 7 prevents the shaft member 6 and the blade holding member 5 from falling off the second flange member 3. The holding member 7 is also provided with exposure holes 72, 73 that expose the pressing portion 52 of the blade holding member 5 and the center of the large diameter portion 61 of the shaft member 6.

[0044] In addition, when the pressing portion 52 of the blade holding member 5 is positioned at the pressing position by the biasing force of the spring member 54, the inclined surface 53 of the pressing portion 52 closely overlaps with the inclined surface 128 of the cutting blade 121 attached to the boss portion 31 of the second flange member 3, and the small diameter portion 62 of the shaft member 6 is spaced apart from the rear end portion of the blade holding member 5.

[0045] In the flange mechanism 1 according to the first embodiment, when the shaft member 6 is pressed towards the spindle housing 123, the rear end side of the shaft member 6 presses the rear end of the blade holding member 5 radially outward against the biasing force of the spring member 54, causing the blade holding member 5 to rotate and the pressing portion 52 to move to the retracted position as shown in Fig. 4. The flange mechanism 1 allows the cutting blade 121 to be freely attached and detached to the boss portion 31 by positioning the pressing portion 52 of the blade holding member 5 at the retracted position.

[0046] In addition, when the cutting blade 121 is rotated around the axis together with the spindle 122, the small diameter portion 62 of the shaft member 6 is spaced from the rear end of the blade holding member 5, and the mass of the tip side of the blade holding member 5 is greater than the mass of the rear end side of the rotation axis 51 of the blade holding member 5, so that the pressing portion 52 is further urged radially outward around the rotation axis 51 by the centrifugal force caused by the rotation of the spindle 122. In the flange mechanism 1, the inclined surface 53 of the pressing portion 52 positioned at the pressing position applies the urging force of the spring member 54 to the inclined surface 128 of the cutting blade 121 and presses it radially outward by the centrifugal force, pressing the cutting blade 121 toward the flange portion 32 along the axis.

[0047] The axes of the cutting blade 121, the spindle 122 and the flange mechanism 1 of the cutting unit 120 are set parallel to the Y-axis direction.

[0048] The imaging unit 150 is fixed to one of the cutting units 120 so as to move integrally with the one of the cutting units 120. The imaging unit 150 includes an imaging element that captures an image of a region to be divided of the workpiece 200 before cutting held on the chuck table 110. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. The imaging unit 150 captures an image of the workpiece 200 held on the chuck table 110 to obtain an image for performing alignment between the workpiece 200 and the cutting blade 121, and outputs the obtained image to the control unit 190.

[0049] The cutting device 100 also includes an X-axis position detection unit (not shown) for detecting the position of the chuck table 110 in the X-axis direction, a Y-axis position detection unit (not shown) for detecting the position of the cutting unit 120 in the Y-axis direction, and a Z-axis position detection unit for detecting the position of the cutting unit 120 in the Z-axis direction. The X-axis position detection unit and the Y-axis position detection unit can be configured with a linear scale parallel to the X-axis direction or the Y-axis direction, and a reading head. The Z-axis position detection unit detects the position of the cutting unit 120 in the Z-axis direction by a motor pulse. The X-axis position detection unit, the Y-axis position detection unit, and the Z-axis position detection unit output the X-axis position of the chuck table 110 and the Y-axis or Z-axis position of the lower end of the cutting blade of the cutting unit 120 to the control unit 190.

[0050] In the first embodiment, the positions of the chuck table 110 and the cutting unit 120 of the cutting device 100 in the X-axis direction, the Y-axis direction, and the Z-axis direction are determined based on a predetermined reference position (not shown). In the first embodiment, the reference position of the cutting unit 120 in the Z-axis direction is a position where the holding surface 111 of the chuck table 110 and the lower end of the cutting edge of the cutting blade 121 are located on the same plane.

[0051] The control unit 190 controls each component of the cutting device 100 to cause the cutting device 100 to perform a machining operation on the workpiece 200. The control unit 190 is a computer having an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and an input / output interface device. The arithmetic processing device of the control unit 190 performs arithmetic processing according to a computer program stored in the storage device, and outputs control signals for controlling the cutting device 100 to each component of the cutting device 100 via the input / output interface device.

[0052] The control unit 190 is connected to a display unit (not shown) configured with a liquid crystal display device or the like for displaying the status and images of the machining operation, and an input unit (not shown) used by the operator to register machining content information, etc. The input unit is configured with at least one of a touch panel provided on the display unit and an external input device such as a keyboard.

[0053] As described above, the flange mechanism 1 of embodiment 1 does not use the conventionally used screwing of a nut, but instead presses the shaft member 6 provided on the boss portion 31, causing the pressing portion 52 provided at the tip of the blade holding member 5 attached to the boss portion 31 to retract toward the center of the boss portion 31, allowing the boss portion to be inserted into the central hole 126 of the cutting blade 121. Conversely, when the pressure on the shaft member 6 is released, the pressing portion 52 of the blade holding member 5 is positioned radially outward, and the boss portion 31 presses the cutting blade 121 inserted into the central hole 126 toward the flange portion 32.

[0054] In this way, the flange mechanism 1 according to the first embodiment allows the cutting blade 121 to be attached and detached by axially moving the shaft member 6. As a result, the flange mechanism 1 according to the first embodiment has the effect of allowing the cutting blade 121 to be easily attached and detached.

[0055] In addition, the flange mechanism 1 of embodiment 1 has the effect of more firmly fixing the cutting blade 121 while the spindle 122 is rotating, i.e., during cutting, by the pressing portion 52 of the blade holding member 5 being further urged radially outward by centrifugal force due to the rotation of the spindle 122.

[0056] The present invention is not limited to the above embodiment. In other words, various modifications can be made without departing from the gist of the present invention. For example, the cutting device 100 may be provided with a cutting blade replacement mechanism including a pressing part for pressing the shaft member 6 of the flange mechanism 1 and a cutting blade gripping part for gripping the cutting blade 121 fixed to the flange mechanism 1 and removing it from the flange mechanism 1, and gripping the new cutting blade 121 to be attached and attaching it to the flange mechanism 1. [Explanation of symbols]

[0057] 1 Flange mechanism 4 Fixing mechanism 5 Blade holding member 6 Shaft component (shaft part) 31 Boss section 32 Flange section 51 Rotation axis 52 Pressing section 54 Spring parts 121 Cutting blade 122 Spindle 126 Central hole

Claims

1. A flange mechanism that is removably attached to the tip of the spindle and supports and fixes the annular cutting blade, a boss portion that is inserted into a central hole of the cutting blade and supports an inner peripheral surface of the cutting blade; a flange portion protruding radially outward from an axial rear end of the boss portion and supporting the cutting blade; a fixing mechanism for fixing the cutting blade, the fixing mechanism being selectively positioned at a pressing position where a pressing portion extending radially outward from an axial tip of the boss portion moves radially outward of the boss portion to press the attached cutting blade toward the flange portion and a retracted position where the pressing portion moves radially inward of the boss portion to retract from the cutting blade, The fixing mechanism includes: a blade pressing member which is an elongated member having a pressing portion at a tip end thereof and extending in an axial direction of the boss portion, the blade pressing member being rotatable about a rotation axis perpendicular to the axial direction of the spindle, and the pressing portion being positioned at the pressing position by a spring member biasing the rear end side toward the radial center of the boss portion; a shaft portion disposed in the center of the boss portion so as to be movable in an axial direction of the boss portion and biased toward a tip end of the boss portion, The shaft portion is When pressed toward the flange portion, the rear end side of the shaft portion moves the rear end of the blade holding member radially outward against the spring member, thereby rotating the blade holding member and moving the pressing portion to the retracted position.

2. 2. The flange mechanism according to claim 1, wherein the tip of the blade pressing member positioned at the pressing position is further urged radially outwardly of the boss portion by rotation of the spindle.

Images