Nozzle of plasma irradiation device and plasma irradiation device

Abstract

The present invention provides a nozzle for a plasma irradiation device having a structure in which plasma is emitted from a nozzle, capable of performing more uniform plasma treatment on a long treatment object, and a plasma irradiation device using the nozzle. The nozzle 2 is provided with a cylindrical jig part 23 having an opening at at least one end in the axial direction for inserting and removing an object to be processed. A through hole 23a is formed in the jig part 23 for introducing plasma into the jig part 23, and the plasma flow is swirled within the jig part 23.

Description

[Technical field]

[0001] The present invention relates to a nozzle for a plasma irradiation device and a plasma irradiation device including the nozzle. [Background technology]

[0002] A long object to be treated is irradiated with plasma to modify the surface of the object. For example, a fishing line is irradiated with plasma to clean the surface or to make the surface hydrophilic to improve the adhesion of paint. Regarding an apparatus for irradiating such a long object to be treated with plasma, there is an apparatus that has a plurality of ring-shaped electrodes on the outer periphery of a cylindrical treatment vessel, and supplies gas into the treatment vessel while applying power from the ring-shaped electrodes to generate plasma in the treatment vessel, while passing the long object to be treated from one end to the other end in the longitudinal direction of the treatment vessel, thereby performing plasma treatment on the long object to be treated (Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2013-97904 A Summary of the Invention [Problem to be solved by the invention]

[0004] When plasma processing the surface of a long object to be processed such as a fishing line, it is required to perform plasma processing more uniformly on the surface of the object to be processed. For this purpose, in the plasma processing apparatus described in Patent Document 1, since there is a difference in plasma density between the center and the vicinity of the inner wall in a cylindrical processing vessel where plasma is generated, a plurality of disk-shaped guide members are provided in the processing vessel, and the guide members guide the long object to be processed only near the inner wall, thereby achieving uniform plasma processing on the surface of the long object to be processed.

[0005] In recent years, in particular with regard to plasma irradiation devices based on non-thermal equilibrium plasma, known as low-temperature plasma or atmospheric pressure plasma, plasma irradiation devices with a structure for emitting plasma from a nozzle have become known in addition to the plasma treatment device described in Patent Document 1. Such plasma irradiation devices with a structure for emitting plasma from a nozzle have the advantages of being smaller in size, consuming less power, and being versatile in use, compared to the plasma treatment device described in Patent Document 1.

[0006] There is a need to irradiate plasma to long objects to be treated with a plasma irradiation device with a structure that emits plasma from a nozzle. For example, since the plasma device with this structure does not become hot during plasma treatment, it is preferable to use it for long objects made of resin such as fishing lines, because melting or deterioration of the resin can be avoided. In addition, plasma can be irradiated to objects to be treated that have a curved or tapered shape. However, because a conventional nozzle emits plasma from an opening at the tip, it is unavoidable that the treatment is performed at a "point," making it difficult to perform uniform plasma treatment on a long object to be treated.

[0007] The present invention aims to provide a nozzle for a plasma irradiation device that has a structure in which plasma is emitted from a nozzle, and that can perform more uniform plasma treatment on a long-shaped treatment object, and a plasma irradiation device using the nozzle. [Means for solving the problem]

[0008] The present invention relates to the following [1] to

[15] . [1] A nozzle for emitting plasma in a plasma irradiation device, A nozzle of a plasma irradiation device comprising a cylindrical jig portion having an opening at at least one end in the axial direction for inserting and removing an object to be treated, the jig portion having a through hole formed therein for directing plasma into the jig portion, and causing the flow of plasma to swirl within the jig portion. [2] A nozzle of a plasma irradiation device according to [1], wherein the penetration direction of the through hole is inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig portion. [3] A nozzle of a plasma irradiation device according to [1], wherein the penetration direction of the through hole is inclined with respect to the direction perpendicular to the axis in a cross section parallel to the axis of the jig part. [4] A nozzle for emitting plasma in a plasma irradiation device, A nozzle for a plasma irradiation device comprising a cylindrical jig part having an opening at at least one end in the axial direction for inserting and removing an object to be treated, the jig part being formed with a through hole for directing plasma into the jig part, and the penetration direction of the through hole being inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig part. [5] A nozzle for emitting plasma in a plasma irradiation device, A nozzle for a plasma irradiation device comprising a cylindrical jig part having an opening at at least one end in the axial direction for inserting and removing an object to be treated, the jig part having a through hole formed therein for directing plasma into the jig part, the penetration direction of the through hole being inclined with respect to a direction perpendicular to the axis in a cross section parallel to the axis of the jig part. [6] A nozzle of the plasma irradiation device of [1], [4] or [5], in which a hole is formed in the jig portion for sucking in and discharging gas within the jig portion. [7] A nozzle of the plasma irradiation device of [1], [4] or [5], in which a plurality of the through holes are formed in the axial direction of the jig part. [8] A nozzle of a plasma irradiation device according to [1], [4] or [5], wherein the jig portion has a tapered shape in a cross section parallel to the axis of the jig portion, the inner diameter of which gradually widens toward an opening for extracting the object to be treated. [9] A nozzle of a plasma irradiation device according to [1], [4] or [5], wherein the jig portion has an opening or a plurality of protrusions or grooves formed on an inner peripheral surface for guiding an object to be treated.

[10] A nozzle of the plasma irradiation device of [1], [4] or [5], wherein at least a portion of the jig part is transparent or translucent, and the jig part is equipped with a spectrometer or a photodetector.

[11] A nozzle of a plasma irradiation device according to [1], [4] or [5], wherein the nozzle comprises a nozzle body portion that generates plasma, a connection portion connected to the nozzle body portion, and the jig portion connected to the connection portion, and the connection portion and the jig portion are detachable from the nozzle body portion.

[12] A plasma irradiation device equipped with a nozzle as described in [1], [4] or [5].

[13] A jig that is detachably attached to a nozzle from which plasma is emitted in a plasma irradiation device, A nozzle fixture for a plasma irradiation device, characterized in that it is cylindrical and has an opening at at least one end in the axial direction for inserting and removing the object to be treated, and a through hole is formed to guide plasma into the fixture portion.

[14] A nozzle fixture for a plasma irradiation device according to

[13] , in which the plasma flow swirls within the cylindrical body.

[15] A jig for a nozzle of a plasma irradiation device as set forth in

[13] , wherein the penetration direction of the through hole is inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig, or is inclined with respect to the direction perpendicular to the axis in a cross section parallel to the axis of the jig. Effect of the Invention

[0009] According to the nozzle of the plasma irradiation device and the plasma irradiation device of the present invention, it is possible to perform plasma treatment on a long object to be treated more uniformly or efficiently. [Brief description of the drawings]

[0010] [Figure 1] 1 is a configuration diagram of a plasma irradiation device according to an embodiment of the present invention. [Diagram 2] FIG. [Diagram 3] 3A and 3B are schematic cross-sectional views of the jig portion 23, with FIG. 3A showing a cross section perpendicular to the axis of the jig portion 23 and FIG. 3B showing a cross section parallel to the axis of the jig portion 23. [Figure 4]These are cross-sectional views showing modified examples of jig portion 23, where FIG. 4(a) is a schematic cross-sectional view perpendicular to the axis of jig portion 23(I), FIG. 4(b) is a schematic cross-sectional view perpendicular to the axis of jig portion 23(II), and FIG. 4(c) is a schematic cross-sectional view parallel to the axis of jig portion 23(III). [Diagram 5] 5(a) and 5(c) are cross-sectional views showing another modified example of jig portion 23, where FIG. 5(a) is a schematic cross-sectional view perpendicular to the axis of jig portion 23(IV), FIG. 5(b) is a schematic cross-sectional view parallel to the axis of jig portion 23(IV), and FIG. 5(c) is a schematic cross-sectional view parallel to the axis of jig portion 23(V). [Figure 6] 13 is a schematic cross-sectional view parallel to the axis of a jig portion 23(VI) which is another modified example of the jig portion 23. FIG. [Figure 7] 13 is a schematic cross-sectional view parallel to the axis of a jig portion 23(VII) which is another modified example of the jig portion 23. FIG. [Figure 8] These are cross-sectional views showing another modified example of the jig portion 23, where FIG. 8(a) is a schematic cross-sectional view parallel to the axis of the jig portion 23(VIII), and FIG. 8(b) is a schematic cross-sectional view parallel to the axis of the jig portion 23(IX). [Figure 9] These are cross-sectional views showing another modified example of jig portion 23, where FIG. 9(a) is a schematic cross-sectional view parallel to the axis of jig portion 23(X), and FIG. 9(b) is a schematic cross-sectional view parallel to the axis of jig portion 23(XI). DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Hereinafter, an embodiment of a nozzle of a plasma irradiation device and a plasma irradiation device will be described in more detail with reference to the drawings.

[0012] The irradiation device of this embodiment is preferably based on the principle of non-thermal equilibrium plasma, which is called low-temperature plasma or atmospheric pressure plasma. In the plasma irradiation device of this embodiment, a voltage is applied to a gas continuously supplied into the device to generate plasma. The gas species is not particularly limited, and for example, one selected from the group consisting of argon gas, nitrogen gas, oxygen gas, carbon dioxide gas, helium gas, and air can be used. These gases may be used alone, or a gas containing a mixture of multiple gases may be used. In addition, a gas containing the above gas and water vapor can be used. An example of a plasma irradiation device based on the principle of non-thermal equilibrium plasma is the atmospheric low-temperature plasma device SPR-DFMJ from Sunline Co., Ltd., but the device is not limited to this.

[0013] FIG. 1 shows an example of a configuration diagram of the plasma irradiation device of this embodiment. The plasma irradiation device 1 shown in FIG. 1 uses a device manufactured by Plasma Concept Tokyo Co., Ltd. The plasma irradiation device 1 includes a nozzle 2 that generates and irradiates plasma, and irradiates plasma from this nozzle 2. The nozzle 2 will be described in detail later. In addition, a gas cylinder 3 containing one or more types of gas is provided as a gas supply unit that supplies gas to the nozzle 2. The gas cylinder 3 and the nozzle are connected by a gas flow path, and a gas flow meter 4 is provided in the gas flow path. The gas flow rate is measured by this gas flow meter 4, and the gas flow rate is appropriately adjusted by manual or automatic control. The illustrated gas flow meter 4 includes a means for controlling such a gas flow rate.

[0014] In order to generate plasma, an electrode is provided inside the nozzle 2, and plasma (preferably atmospheric pressure plasma) is generated by supplying an appropriate power to the gas introduced into the nozzle 2, and the plasma is released from the nozzle opening. A known structure can be used for generating plasma. A plasma generation power supply 5 is provided which is connected to the electrode of the nozzle 2 and supplies power. In order to generate plasma appropriately, a control unit 6 is connected to the plasma generation power supply 5. This control unit 6 controls the power conditions of the plasma generation power supply 5. Note that the control unit 6 shown in FIG. 1 controls the power conditions, but in another embodiment, the control unit 6 may be configured to control the power conditions and the gas flow rate, and the control unit 6 may be connected to the plasma generation power supply 5 and the gas flow meter 4 to control the gas flow rate.

[0015] 2 shows a front view of the nozzle 2. The nozzle 2 has a nozzle body 21 having a generally cylindrical shape. The nozzle body 21 is provided with a gas inlet 21a and a power terminal 21b, and an electrode electrically connected to the terminal 21b is provided in the internal space of the nozzle body 21. An opening (not shown in the figure) is formed at one end in the axial direction of the nozzle body 21, and plasma generated in the internal space of the nozzle body 21 is emitted from this opening. The number of openings is not limited to one, and there may be multiple openings.

[0016] The nozzle 2 is provided with a connection part 22 at the end of the nozzle body 21 where the opening is located. The connection part 22 is a part that connects the nozzle body 21 to the jig part 23 described next. The connection part 22 has a recess that accommodates the end of the nozzle body 21, and the tip part of the nozzle body 21, including the opening, fits into the recess of the connection part 22. An opening 22a is formed on the bottom surface of the recess of the connection part 22, which is positioned coaxially with the opening of the end of the nozzle body 21 when the nozzle body 21 is fitted, and the plasma generated in the nozzle body 21 is guided to the jig part 23 described next.

[0017] The jig portion 23 has an opening at both ends in the axial direction, and is generally cylindrical with a hollow interior, preferably a cylinder. The outer shape may be a square tube, but it is preferable that at least the hollow interior is approximately cylindrical. The inner diameter is large enough to insert at least a long object to be treated m. The outer diameter of the long object to be treated can be, for example, about 0.5 to 50 mm, and appropriate plasma treatment can be performed by appropriately selecting and adjusting the inner diameter of the jig portion 23 and the gas flow rate of the plasma introduced into the jig portion 23 according to the outer diameter of such an object to be treated. The length L of the jig portion 23 is not particularly limited. The length L of the jig portion 23 is related to the length that can be plasma-treated on the object to be treated m. Therefore, by adjusting the length L, the length that can be plasma-treated on the object to be treated m can be adjusted. Examples of materials for the jig portion 23 include metals such as stainless steel and aluminum, resins, glass, and ceramics.

[0018] The jig portion 23 has a through hole 23a that is positioned coaxially with the opening formed in the bottom surface of the recess of the connection portion 22, and the plasma generated in the nozzle main body portion 21 is introduced into the internal space of the jig portion 23 through this through hole 23a.

[0019] With the plasma introduced into the internal space of the jig part 23, the surface of the object m to be treated can be subjected to plasma treatment by inserting the object m into the internal space of the jig part 23 from an opening at one axial end of the jig part 23. Furthermore, when the object m to be treated is long, the object m to be treated can be inserted into the internal space of the jig part 23 from an opening at one axial end of the jig part 23, moved in the axial direction of the jig part 23 within the internal space, and removed from the opening at the other axial end of the jig part 23, thereby continuously subjecting the entire surface of the long object m to plasma treatment.

[0020] The nozzle 2 of this embodiment swirls the plasma flow in the internal space of the jig part 23. The swirl refers to the movement of all or a part of the plasma (gas) in the internal space with directionality, preferably the formation of a flow that rotates around the axis along the circumferential direction of the wall surface of the internal space, and may include turbulence. According to the research of the inventors, it was found that in order to uniformly plasma-treat the surface of a long-sized processing object in the jig part 23, it is essential to swirl the plasma flow in the jig part 23. And, if the penetration direction of the through hole 23a of the jig part 23 is inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig part 23, or is inclined with respect to the direction perpendicular to the axis in a cross section parallel to the axis of the jig part 23, it is presumed that the plasma flow swirls in the internal space of the jig part 23.

[0021] In order to rotate the plasma flow within the jig part 23, in this embodiment, the penetrating direction of the through hole 23a of the jig part 23 is inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig part 23. This structure will be described with reference to FIG.

[0022] Fig. 3 is a schematic cross-sectional view of the jig part 23, Fig. 3(a) shows a cross section perpendicular to the axis of the jig part 23, and Fig. 3(b) shows a cross section parallel to the axis of the jig part 23. As shown in Fig. 3(a), the penetration direction of the through hole 23a is inclined with respect to the diameter direction, and the angle α between the penetration direction and the diameter direction has a positive value. Here, the penetration direction refers to the axial direction of the through hole 23a, and when the through hole 23a is bent or curved, it refers to the axial direction at the portion where the through hole 23a contacts the inner surface of the jig part 23.

[0023] Since the penetration direction of the through hole 23a is inclined with respect to the diameter direction, the plasma P swirls along the inner surface of the jig part 23 within the jig part 23, as shown by the arrow in Fig. 3(a) showing the direction of flow of the plasma P. In a cross section parallel to the axis of the jig part 23 in Fig. 3(b), the plasma P swirls along the inner surface of the jig part 23 so as to spread from the through hole 23a to both ends within the jig part 23. The same is true when the processing object m is inserted into the jig part 23, and the plasma P swirls along the inner surface of the jig part 23. Therefore, the plasma can be more uniformly contacted over the entire circumference of the surface of the processing object m inserted into the jig part 23, and thus the surface of the processing object m can be more uniformly plasma-treated.

[0024] In addition, since the penetration direction of the through hole 23a is inclined with respect to the diameter direction, the flow pressure of the plasma and the gas associated with the plasma received by the object to be treated m is reduced, thereby reducing the vibration of the object to be treated m and enabling the long object to be treated m to be moved stably within the jig section 23.

[0025] If the penetration direction of the through hole 23a is the diameter direction, i.e., if the angle α between the penetration direction and the diameter direction is 0°, the plasma P hardly swirls along the inner surface of the jig part 23, and therefore the plasma density of the plasma that comes into contact with the part of the treatment object m inserted into the jig part 23 facing the through hole 23a differs from that of the other part, making it difficult to uniformly plasma treat the surface of the treatment object m.

[0026] The angle α between the penetration direction and the diameter direction is preferably from 5 to 60°, more preferably from 10 to 40°, and even more preferably from 15 to 30°.

[0027] The shape of the through hole 23 is not particularly limited. It may be a round hole, a polygonal hole, or a slit-shaped hole. The number of through holes 23 is not limited to one, and may be multiple depending on the number of openings of the nozzle body 21 that emit plasma.

[0028] Means for rotating the plasma flow within the jig part 23 are possible other than those described above with reference to Fig. 3, for example, a straightening member for changing the plasma flow may be provided within the jig part 23. However, the present embodiment shown in Fig. 3 is advantageous because it can reliably rotate the plasma flow within the jig part 23 with a simple structure.

[0029] The object m to be treated with plasma in the jig part 23 of the nozzle 2 of this embodiment is not particularly limited, and is preferably long. For example, a thread (fishing line, etc.), a filament, a fiber, a string, a wire, a tube, a rod, etc. can be exemplified, and the outer diameter of the object m to be treated is assumed to be, for example, about 0.5 to 50 mm. However, the outer diameter of the object m to be treated is not limited to the range of about 0.5 to 50 mm. The material of the object m to be treated can be, but is not limited to, resin, rubber, metal, glass, ceramics, etc. In the case of low-temperature plasma, the plasma discharged from the nozzle 2 is at a low temperature, and melting or alteration of the resin, as occurs with high-temperature plasma, can be avoided, so that the nozzle 2 of this embodiment is suitable for use with a resin object to be treated. The shape of the object m to be treated is not limited to a straight one, and may be a bent shape, a curvature shape, or a tapered shape.

[0030] When the object m to be treated is long, the nozzle 2 of this embodiment inserts the object m into the jig part 23 through one of the openings at both ends in the axial direction of the jig part 23, irradiates the object m with plasma while continuously moving it inside the jig part 23, and removes it from the other opening, thereby enabling more uniform plasma treatment over the entire circumference and length of the object m. For plasma treatment of such a long object m to be treated, known devices as a feeding device and a winding device for long objects can be provided near the openings at both ends of the jig part 23.

[0031] When it is desired to perform plasma treatment only on the tip portion of the object to be treated m, this can be achieved by inserting the object to be treated m into the jig portion 23 through one of the openings at both axial ends of the jig portion 23, irradiating it with plasma within the jig portion 23, and then removing it from the same opening.

[0032] Fig. 4 shows modified examples of the jig part 23. Fig. 4(a) is a schematic cross-sectional view perpendicular to the axis of the jig part 23(I), Fig. 4(b) is a schematic cross-sectional view perpendicular to the axis of the jig part 23(II), and Fig. 4(c) is a schematic cross-sectional view parallel to the axis of the jig part 23(III).

[0033] The jig part 23(I) in FIG. 4(a) is an example in which a plurality of through holes 23a are formed. A plurality of through holes 23a are formed in the jig part 23(I), and the through holes 23a are aligned in a direction in which the swirl of the plasma flow is in the same direction. With this configuration, in addition to the effect of the jig part 23 shown in FIG. 3, the surface of the object m to be treated can be plasma-treated more uniformly. Also, the flow rate of the swirling flow of the plasma P can be increased, and in this respect, the surface of the object m to be treated can be plasma-treated more uniformly. The angle α (see FIG. 3(a)) between the through direction and the diameter direction of each of the plurality of through holes 23a may be the same or different. Also, in FIG. 4(a), the two through holes 23a are formed at positions opposite to each other when viewed from the center of the jig part 23, but the through holes 23a can be formed at any position. In addition, in FIG. 4(a), the multiple through holes 23a are formed on the same plane in a cross section perpendicular to the axis of the jig portion 23(I), but the multiple through holes 23a may be formed at different positions from each other in the axial direction of the jig portion 23(I).

[0034] The jig portion 23(I) in FIG. 4(a) can be realized by forming a plurality of plasma flow paths in the connection portion 22 and the jig portion 23(I) that are connected to the openings of the nozzle main body portion 21, and connecting the ends of each plasma flow path to the through holes 23a.

[0035] The jig part 23(II) in FIG. 4(b) is an example in which the jig part 23(II) and the connection part 22 are integrally formed, so that the plasma flow path of the connection part 22 and the through hole 23b are formed without any clear distinction. If the through hole 23b is defined as including the plasma flow path of the connection part 22, the illustrated through hole 23b has a flow path that is bent on the way. And, the direction of the axis at the part where the through hole 23b contacts the inner surface of the jig part 23(II), that is, the penetrating direction of the through hole 23b, is inclined with respect to the diameter direction of the jig part 23(II). As a result, the plasma P revolves along the inner surface of the jig part 23(II) within the jig part 23(II). Therefore, similar to the effect of the jig part 23 shown in FIG. 3, the plasma can be uniformly contacted over the entire circumference of the surface of the processing object m inserted into the jig part 23(II), so that the surface of the processing object m can be uniformly plasma-processed. In addition, since the plasma and the gas flow pressure associated with the plasma received by the object to be treated m are reduced, the vibration of the object to be treated m can be reduced, and the movement of the long object to be treated m within the jig portion 23 can be carried out stably.

[0036] The jig part 23(III) in Fig. 4(c) is an example in which the penetration direction of the through hole 23c is inclined with respect to the direction perpendicular to the axis in a cross section parallel to the axis of the jig part 23(III). In Fig. 4(c), the angle β between the penetration direction and the direction perpendicular to the axis has a positive value. Here, the penetration direction refers to the axial direction of the through hole 23c, and when the through hole 23c is bent or curved, it refers to the axial direction at the portion where the through hole 23c is in contact with the inner surface of the jig part 23.

[0037] The through hole 23c may not be inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig part 23(III), but is preferably inclined with respect to the diameter direction similar to the jig part 23 shown in Fig. 3(a). Therefore, the plasma P swirls along the inner surface of the jig part 23(III) in the jig part 23(III) similar to the case of the jig part 23 shown in Fig. 3(a). Since the penetrating direction of the through hole 23c of the jig part 23(III) is inclined with respect to the direction perpendicular to the axis in a cross section parallel to the axis of the jig part 23(III), the plasma P moves mainly from the through hole 23c to the opening of one end in the jig part 23 while swirling along the inner surface of the jig part 23(III). Here, if the object m to be treated is inserted from the opening at the end toward which the plasma P faces, or inserted and removed from the opening at the other end, the direction in which the plasma P moves toward the end while swirling and the direction of the airflow from the end of the jig part 23(III) toward the inside caused by the movement of the object to be treated are opposed to each other, so that the residence time of the plasma in the system can be extended. Therefore, in addition to the effect of the jig part 23 shown in FIG. 3, the plasma can be more uniformly contacted over the entire circumference of the surface of the object m to be treated inserted into the jig part 23(III), and thus the surface of the object to be treated can be more uniformly plasma-treated. Also, the plasma treatment efficiency is improved.

[0038] The angle β between the penetration direction and the direction perpendicular to the axis is preferably from 0 to 50°, more preferably from 5 to 30°, and even more preferably from 5 to 20°.

[0039] Fig. 5 shows another modified example of the jig part 23. Fig. 5(a) is a schematic cross-sectional view perpendicular to the axis of the jig part 23(IV), Fig. 5(b) is a schematic cross-sectional view parallel to the axis of the jig part 23(IV), and Fig. 5(c) is a schematic cross-sectional view parallel to the axis of the jig part 23(V).

[0040] 5(a) and (b) is an example in which a hole 23d is formed to suck and exhaust gas inside the jig part 23(IV). The hole 23d to suck and exhaust gas is connected to a known suction and exhaust device.

[0041] The jig portion 23(IV) is formed with a through hole 23c for guiding plasma, similar to the jig portion (III) in Fig. 4(c). The through hole 23c has a penetration direction inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig portion 23(IV) (Fig. 5(a)), and is inclined with respect to a direction perpendicular to the axis in a cross section parallel to the axis of the jig portion 23(IV) (Fig. 5(b)).

[0042] The jig part 23(IV) has the same effect as the jig part 23(IV) shown in FIG. 4(c) because the through hole 23c is formed. In addition, the flow speed of the swirling flow of the plasma P is increased by forming the hole 23d that draws in and exhausts the gas. Therefore, in addition to the effect of the jig part 23(III) shown in FIG. 4(c), the plasma processing can be performed over a longer range in the longitudinal direction of the processing object. Also, the gas drawn in from the hole 23d can be collected and reused.

[0043] The penetration direction of the hole 23d for sucking and exhausting the gas is preferably inclined with respect to the diameter direction as shown in Fig. 5(a) because the gas can be smoothly sucked and exhausted. However, it may be the same as the diameter direction, and the number of the holes 23d is not limited to one, and there may be multiple holes. Furthermore, it is preferable that the holes 23d are formed downstream of the swirling flow of the plasma P from the through holes 23c as shown in Fig. 5(b).

[0044] The jig part 23(V) in Fig. 5(c) is an example in which holes 23d for sucking and discharging gas are formed, similar to the jig part 23(IV) in Fig. 5(a) and (b). Therefore, the jig part 23(V) has the same effect as the jig part 23(IV) in Fig. 5(a) and (b). The difference between jig portion 23(V) and jig portion 23(IV) is that a wall 23e that seals an opening is provided at each of both axial ends of jig portion 23(V), and an opening with a small gap to the object to be processed is formed in this wall 23e.

[0045] Walls 23e that seal the openings are provided at both axial ends of the jig part 23(V), and the small gaps of the openings formed in the walls 23e allow the pressure inside the jig part 23(V) to be reduced by differential exhaust. This increases the mean free path of the plasma inside the jig part 23(V), allowing more uniform plasma processing to be performed over the entire circumference and length of the processing object inserted or passing through the jig part 23(V).

[0046] Fig. 6 shows another modified example of the jig part 23. Fig. 6 is a schematic cross-sectional view parallel to the axis of the jig part 23(VI). The jig part 23(VI) in Fig. 6 is an example in which the nozzle includes a plurality of nozzle main bodies 21, and a plurality of through holes 23a are formed in the axial direction of the jig part 23(VI), and each of the through holes 23a is connected to a plurality of plasma flow paths that guide plasma from the plurality of nozzle main bodies 21.

[0047] Since the jig part 23 (VI) has a through hole 23a formed therein, it has the same effect as the jig part 23 shown in FIG. 3. In addition, the jig part 23 (VI) has a plurality of through holes 23a formed in the axial direction of the jig part 23 (VI), and each of the through holes 23a is connected to each of a plurality of plasma flow paths that guide plasma from the plurality of nozzle main bodies 21. By each of the plurality of nozzle main bodies 21 emitting a different plasma, a different plasma can be introduced into the jig part 23 (VI) from each of the plurality of through holes 23a. Therefore, different plasmas can be irradiated at once in the longitudinal direction of the processing object. Examples of differences in plasma include gas species, plasma generation conditions, temperature, and gas flow rate. Note that the plurality of nozzle main bodies 21 can also emit the same plasma. In this case, plasma processing can be performed over a long range in the longitudinal direction of the processing object, improving the plasma processing efficiency.

[0048] Fig. 7 shows another modified example of the jig part 23. Fig. 7 is a schematic cross-sectional view parallel to the axis of the jig part 23(VII). The jig part 23(VII) in Fig. 7 is an example having a tapered shape in which the inner diameter gradually widens toward the opening for extracting the processing object in the cross-section parallel to the axis of the jig part 23(VII).

[0049] Since the jig part 23 (VII) has a through hole 23a, it has the same effect as the jig part 23 shown in FIG. 3. In addition, the jig part 23 (VII) has a tapered shape in which the inner diameter gradually increases toward the opening for extracting the object to be treated in a cross section parallel to the axis of the jig part 23 (VII), so that in the swirling flow of the plasma P in the jig part 23 (VII), a flow moving toward the opening at one end, specifically, a flow moving toward the opening for extracting the object to be treated, occurs. Due to the occurrence of such a swirling flow of the plasma P, a negative pressure is generated in the opening at the other end, specifically, the opening for inserting the object to be treated, and a force is generated that sucks the object to be treated from the opening into the jig part 23 (VII). Therefore, the object to be treated, such as gas, mist, powder, particles, etc., can be supplied from one opening into the jig part 23 (VII) without the need for a special feeding device, and plasma treatment can be performed, and the plasma can be collected from another opening along with the swirling flow of the plasma P. That is, the jig portion 23(VII) is intended to expand the object to be treated m to include not only long objects such as threads but also gas, mist, powder, particles, and the like.

[0050] Fig. 8 shows another modified example of the jig part 23. Fig. 8(a) is a schematic cross-sectional view parallel to the axis of the jig part 23(VIII), and Fig. 8(b) is a schematic cross-sectional view parallel to the axis of the jig part 23(IX).

[0051] The jig portion 23(VIII) in FIG. 8(a) is an example having a protrusion 23f on the inner circumferential surface of the jig portion 23(VIII).

[0052] The jig part 23(VIII) has the same effect as the jig part 23 shown in FIG. 3 because the through hole 23a is formed. In addition, the jig part 23(VIII) has a plurality of protrusions 23f in the axial direction of the inner peripheral surface, so that the processing object m is guided by the protrusions and the occurrence of biased movement in the jig part 23 can be suppressed. Therefore, processing unevenness can be reduced. In addition, because the jig part 23(VIII) has a plurality of protrusions f, even if the processing object m comes into contact with the inner peripheral surface in the jig part 23(VIII) when the diameter of the processing object m is slightly smaller than the inner diameter of the jig part 23(VIII) or when the moving direction of the processing object m in the jig part 23(VIII) is unstable, the contact is with the tip of the protrusion 23f on the inner peripheral surface, so the processing object m does not adhere closely to the inner peripheral surface. The plasma P can swirl through the gaps between the plurality of protrusions 23f. Therefore, the swirling flow of the plasma P is not impeded, so that the plasma processing can be performed uniformly all around the object to be processed.

[0053] The protrusions 23f can be formed, for example, by forming grooves in a spiral shape on the inner circumferential surface. Therefore, the same effect can be expected even when grooves are provided on the inner circumferential surface instead of the protrusions 23f. The protrusions 23f are not limited to being spirally shaped, and may be formed, for example, in a dot shape on the inner circumferential surface. By circulating the plasma along the protrusions or spiral grooves arranged in a spiral shape, processing unevenness can be reduced.

[0054] The height of the protrusions, i.e., the length from the base to the tip of the protrusions, can be, for example, about 0.1 to 5 mm. It is preferably about 0.5 to 3 mm, and more preferably about 0.7 to 2 mm. If the height of the protrusions is too low, the swirling flow of the plasma P may be hindered. If the height of the protrusions is too high, the irradiation distance between the plasma and the object to be treated increases, which is thought to work in the direction of decreasing the processing efficiency of the plasma.

[0055] The jig part 23(IX) in Figure 8(b) is an example in which a wall 23g that seals an opening is provided at each of both axial ends of the jig part 23(IX), and an opening with a small gap to the object to be treated is formed in this wall 23g.

[0056] The jig part 23(IX) has the same effect as the jig part 23 shown in FIG. 3, since the through hole 23a is formed. In addition, the jig part 23(IX) has a wall 23g for sealing the opening at each of both ends in the axial direction of the jig part 23(IX), and since the wall 23g has an opening with a small gap between the processing object and the processing object, the processing object m is guided by the opening, and the occurrence of uneven movement in the jig part 23 can be suppressed. Therefore, processing unevenness can be reduced. In addition, the residence time of the plasma in the jig part 23(IX) can be extended. Therefore, the surface of the processing object m can be more uniformly plasma-treated, and the plasma processing efficiency is improved.

[0057] Fig. 9 shows another modified example of the jig part 23. Fig. 9(a) is a schematic cross-sectional view parallel to the axis of the jig part 23(X). Fig. 9(b) is a schematic cross-sectional view parallel to the axis of the jig part 23(XI).

[0058] The jig portion 23(X) in FIG. 9(a) is transparent or translucent, and is an example in which the jig portion 23(X) is provided with a spectroscope or a photodetector 24.

[0059] Since the jig part 23(X) has a through hole 23c formed therein, it has the same effect as the jig part 23(III) shown in FIG. 4(c). In addition, at least a part of the cylindrical body constituting the jig part 23(X) is transparent or translucent, and the jig part 23(X) is provided with a spectroscope or photodetector 24 so as to be connected to the transparent or translucent part. This allows the state of plasma during plasma processing to be monitored by the spectroscope or photodetector 24. When at least a part of the cylindrical body is transparent, the excitation light of the plasma itself can be monitored. When at least a part of the cylindrical body is translucent, it can be monitored by detecting the diffused light of the plasma.

[0060] Examples of materials for the cylinder, at least a part of which is transparent or translucent, include glass, resin, and ceramics. Glass is a preferred material from the viewpoint of availability. The cylinder may be transparent, such as transparent glass or transparent plastic, or translucent, such as frosted glass or milky white plastic. "Transparent" refers to a property of a material through which light passes, in which the transmittance is extremely high and the other side can be seen through the material. "Translucent" refers to a property of a material that transmits light, but unlike transparency, the shape of the other side cannot be clearly recognized through the material, or cannot be recognized at all, because the transmitted light is diffused or the transmittance is low. At least a part of the cylinder may be transparent or translucent, and the entire cylinder may be transparent or translucent. In the case where a part of the cylinder is transparent, for example, a transparent glass window for a spectroscope or a photodetector 24 may be provided in the cylinder.

[0061] 9(a), a spectrometer or a photodetector monitors the state of plasma in the jig part 23(X) from outside the cylinder through the cylinder that is transparent or translucent. The spectrometer or the photodetector may be attached directly to the cylinder, or indirectly via an optical fiber attached to the cylinder. The spectrometer or photodetector 24 may be a known one.

[0062] The jig portion 23(XI) in FIG. 9(b) is an example in which the jig portion 23(XI) is translucent and is provided with a spectroscope or a photodetector 24. Since the jig part 23(XI) has the through hole 23c formed therein, it has the same effect as the jig part 23(III) shown in Fig. 4(c).In addition, since at least a part of the cylinder constituting the jig part 23(XI) is transparent or translucent and the jig part 23(XI) is provided with a spectroscope or photodetector 24 connected to the transparent or translucent part, it has the same effect as the jig part 23(X) shown in Fig. 9(a).

[0063] The jig part 23(XI) in Figure 9(b) differs from the jig part 23(X) in Figure 9(a) in that in the jig part 23(X) in Figure 9(a), the cylinder is transparent or translucent, and a spectrometer or photodetector 24 is provided from the outside of the cylinder toward the inside to monitor the excitation light or scattered light within the jig part 23(X) through the transparent or translucent cylinder, whereas in the jig part 23(XI), the cylinder is translucent, and a spectrometer or photodetector 24 is provided facing the cylinder itself to monitor the diffuse light from the cylinder.

[0064] The translucent cylindrical body of the jig part 23 (XI) is, for example, ground glass. The light receiving portion of a spectroscope or photodetector 24 is embedded in the translucent cylindrical body, and the diffused light from the cylindrical body is directly monitored by the spectroscope or photodetector 24. This makes it possible to prevent degradation of monitoring performance due to contamination of the optical fiber or the lens, and makes it possible to accurately monitor the state of the plasma in the jig part 23 (XI).

[0065] In the nozzles of the embodiments described above, the connection part 22 and the jig part 23 (23(I)-23(XI)) can be configured to be detachably attached to the nozzle body part 21. With this configuration, when the connection part 22 and the jig part 23 (23(I)-23(XI)) are removed from the nozzle body part 21, the object to be treated can be irradiated with plasma from the nozzle body part 21, and the nozzle body part 21 can be used for the same multipurpose purposes as before. When the connection part 22 and the jig part 23 (23(I)-23(XI)) are attached from the nozzle body part 21, the plasma can be irradiated uniformly around the entire circumference of the long object to be treated, as described in this specification.

[0066] Moreover, the jig portion 23 (23(I) to 23(XI)) can be a jig serving as an adapter that can be detachably attached to a nozzle used for multiple purposes up to now. It is preferable that the jig includes the structure of the connection portion 22.

[0067] The nozzle and plasma irradiation device of the plasma irradiation device of the present invention have been described above based on the embodiments. However, it goes without saying that the nozzle and plasma irradiation device of the plasma irradiation device of the present invention are not limited to those of the embodiments, and many modifications are possible within the scope that does not deviate from the spirit of the invention.

Claims

1. A nozzle for emitting plasma in a plasma irradiation device, A nozzle for a plasma irradiation device comprising a cylindrical jig part having an opening at at least one end in the axial direction for inserting and removing an object to be treated, the jig part having a through hole formed therein for directing plasma into the jig part, the penetration direction of the through hole being inclined with respect to a direction perpendicular to the axis in a cross section parallel to the axis of the jig part, and causing a plasma flow to swirl within the jig part.

2. 2. The nozzle of the plasma irradiation device according to claim 1, wherein the penetration direction of the through hole is inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig part.

3. A nozzle for emitting plasma in a plasma irradiation device, A nozzle for a plasma irradiation device comprising a cylindrical jig part having an opening at at least one end in the axial direction for inserting and removing an object to be treated, the jig part being formed with a through hole for directing plasma into the jig part, the through hole having a penetration direction inclined with respect to a direction perpendicular to the axis in a cross section parallel to the axis of the jig part, and the through hole having a penetration direction inclined with respect to a diameter direction in a cross section perpendicular to the axis of the jig part.

4. A nozzle for emitting plasma in a plasma irradiation device, A nozzle for a plasma irradiation device comprising a cylindrical jig part having an opening at at least one end in the axial direction for inserting and removing an object to be treated, the jig part having a through hole formed therein for directing plasma into the jig part, the penetration direction of the through hole being inclined with respect to a direction perpendicular to the axis in a cross section parallel to the axis of the jig part.

5. 5. The nozzle of the plasma irradiation device according to claim 1, 3 or 4, wherein the jig portion is formed with a hole for sucking in and discharging gas within the jig portion.

6. 5. The nozzle of the plasma irradiation device according to claim 1, 3 or 4, wherein a plurality of the through holes are formed in the axial direction of the jig part.

7. 5. The nozzle of the plasma irradiation device according to claim 1, 3 or 4, wherein the jig portion has a tapered shape in a cross section parallel to an axis of the jig portion, the inner diameter of which gradually increases toward an opening for extracting the object to be treated.

8. 5. The nozzle of the plasma irradiation device according to claim 1, 3 or 4, wherein the jig portion has an opening for guiding the object to be treated or a plurality of projections or grooves formed on the inner peripheral surface.

9. 5. The nozzle of the plasma irradiation device according to claim 1, 3 or 4, wherein at least a part of the jig portion is transparent or translucent, and the jig portion is provided with a spectroscope or a photodetector.

10. 5. The nozzle of the plasma irradiation device according to claim 1, 3 or 4, wherein the nozzle comprises a nozzle body portion that generates plasma, a connection portion connected to the nozzle body portion, and the jig portion connected to the connection portion, and the connection portion and the jig portion are detachable from the nozzle body portion.

11. A plasma irradiation device comprising the nozzle of the plasma irradiation device according to claim 1, 3 or 4.

12. A jig that is detachably attached to a nozzle from which plasma is emitted in a plasma irradiation device, A nozzle jig for a plasma irradiation device, characterized in that it is cylindrical and has an opening at at least one end in the axial direction for inserting and removing the object to be treated, a through hole is formed to guide plasma into the jig portion, and the penetration direction of the through hole is inclined with respect to the direction perpendicular to the axis in a cross section parallel to the axis of the jig.

13. 13. The nozzle jig for a plasma irradiation device according to claim 12, wherein a plasma flow swirls within said cylindrical body.

14. 13. The nozzle jig for a plasma irradiation device according to claim 12, wherein the penetration direction of the through hole is inclined with respect to the diameter direction in a cross section perpendicular to the axis of the jig.

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