X-ray measuring device and program

Abstract

To acquire the diffraction ring image data of a larger area than the area that a detection unit can acquire, without changing the size of the detection unit.SOLUTION: Provided is an X-ray measurement device 1 having a bulb 10 for irradiating an X-ray toward a measurement object and a detection sensor 14 for acquiring the image data of the X-ray diffracted by the measurement object. The X-ray measurement device 1 comprises: a movement control unit 36 for moving the bulb 10 and / or the detection sensor 14 in a movement direction M that intersects an irradiation direction I of the bulb 10, so that the relative position of the detection sensor 14 to the bulb 10 changes; a detection control unit 38 for causing the detection sensor 14 to acquire image data at two or more relative positions among the relative positions that change in accordance with movement; and a generation unit 40 for combining the image data at two or more relative positions that were acquired by the detection sensor 14 and generating the diffraction ring image data of the X-ray.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to an X-ray measurement device and a program. [Background technology]

[0002] Conventionally, there is known an X-ray measurement device that includes an irradiation unit that irradiates an object to be measured with X-rays and a detection unit that detects X-rays diffracted by the object to be measured (see, for example, Patent Document 1 below). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2013-113734 A Summary of the Invention [Problem to be solved by the invention]

[0004] In conventional X-ray measuring devices, the tolerance of the positional accuracy of the measurement distance from the detection unit to the measurement object is about ±1 mm, making alignment difficult. In addition, since the measurement distance is short, there are safety issues such as contact between the device and the measurement object. If the measurement distance is changed to solve these issues, the area of ​​the X-ray diffraction ring changes depending on the measurement distance. For this reason, it becomes necessary to change the size of the detection unit in order to obtain image data of the diffraction ring. However, there is a problem in that the manufacturing cost of the detection unit is high.

[0005] Therefore, an object of the present invention is to provide an X-ray measurement device and a program that can acquire diffraction ring image data of an area larger than the area that can be acquired by a detection unit, without changing the size of the detection unit. [Means for solving the problem]

[0006] An X-ray measuring device according to a first aspect of the present invention is an X-ray measuring device comprising an irradiation unit which irradiates X-rays towards a measurement object, and a detection unit which acquires image data of the X-rays diffracted by the measurement object, and further comprising: a movement control unit which moves at least one of the irradiation unit and the detection unit in a direction intersecting the irradiation direction of the irradiation unit so that the relative position of the detection unit with respect to the irradiation unit changes; a detection control unit which causes the detection unit to acquire the image data at at least two or more of the relative positions which change in response to the movement; and a generation unit which combines the image data at the two or more relative positions acquired by the detection unit to generate diffraction ring image data of the X-rays.

[0007] In the X-ray measurement device according to a second aspect of the present invention, the detection control unit causes the detection unit to obtain the image data at the relative positions, the number of which corresponds to a measurement distance from the detection unit to the measurement object.

[0008] An X-ray measuring device according to a third aspect of the present invention includes a judgment unit which judges whether the measurement distance is equal to or greater than a predetermined value, and when the judgment unit judges a positive result, the detection control unit causes the detection unit to acquire the image data at the two or more relative positions corresponding to the measurement distance, and when the judgment unit judges a negative result, the detection control unit causes the detection unit to acquire the image data at one of the relative positions.

[0009] In the X-ray measurement device according to a fourth aspect of the present invention, the detection control unit causes the detection unit to obtain the image data at a greater number of the relative positions as the measurement distance becomes longer.

[0010] An X-ray measurement device according to a fifth aspect of the present invention includes a distance measurement unit that is connected to one end of the irradiation unit in a direction in which the movement control unit moves at least one of the irradiation unit and the detection unit, and that measures the measurement distance.

[0011] A program according to a sixth aspect of the present invention causes a computer capable of communicating with an irradiation unit that irradiates X-rays toward a measurement object, a detection unit that acquires image data of the X-rays diffracted by the measurement object, and the computer to function as: an irradiation control unit that moves at least one of the irradiation unit and the detection unit in a direction intersecting the irradiation direction of the irradiation unit so that the relative position of the detection unit with respect to the irradiation unit changes; a detection control unit that causes the detection unit to acquire the image data at at least two or more of the relative positions that change in response to the movement; and a generation unit that combines the image data at the two or more relative positions acquired by the detection unit to generate diffraction ring image data of the X-rays. Effect of the Invention

[0012] According to the present invention, it is possible to acquire diffraction ring image data having an area larger than the area that can be acquired by the detection unit, without changing the size of the detection unit. [Brief description of the drawings]

[0013] [Figure 1] 1 is a side view showing an example of an overall configuration of an X-ray measurement device according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a bottom view of the X-ray measuring device of FIG. [Diagram 3] 2 is a block diagram showing an example of a functional configuration of the computer shown in FIG. 1. [Figure 4] 4 is a diagram showing an example of a data table stored in a storage unit in FIG. 3; FIG. [Diagram 5] 11 is a flowchart showing an example of a processing flow by a computer. [Figure 6] 11A and 11B are diagrams showing changes in the relative position of the detection sensor with respect to the bulb. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] Hereinafter, an embodiment of the present invention (hereinafter, appropriately referred to as "the present embodiment") will be described with reference to the attached drawings. In order to facilitate understanding of the description, the same elements or elements having the same functions are denoted by the same reference numerals as much as possible in each drawing, and duplicated description will be omitted.

[0015] <Overall composition> Fig. 1 is a side view showing an example of the overall configuration of the X-ray measurement device according to this embodiment. Fig. 2 is a bottom view of the X-ray measurement device of Fig. 1. As shown in Figs. 1 and 2, the X-ray measurement device 1 includes, for example, a tube 10 as an irradiation unit, a substrate 12, a detection sensor 14 as a detection unit, a position sensor 16 as a distance measurement unit, movement mechanisms 18 and 20, and a computer 22. Note that the computer 22 is not shown in Fig. 2.

[0016] Tube 10 is an X-ray irradiator that generates X-rays and irradiates the generated X-rays toward an object to be measured. Tube 10 is disposed on substrate 12. Tube 10 has collimator 11 that has a function of adjusting the irradiation range of X-rays by tube 10, and irradiates X-rays from collimator 11 in, for example, irradiation direction I. Tube 10 can be moved in movement direction M intersecting irradiation direction I by movement mechanism 18.

[0017] Substrate 12 is disposed below bulb 10. Substrate 12 has slits 24 for passing collimator 11 of bulb 10 and infrared optical axis 17 of position sensor 16. In addition, on the surface of substrate 12 opposite to bulb 10, detection sensor 14 and a connector for transmitting an electrical signal converted by detection sensor 14 to computer 22 are provided. Substrate 12 can be moved in movement direction M by movement mechanism 20.

[0018] The detection sensor 14 is an image sensor that obtains image data of a diffraction ring of X-rays diffracted by the object to be measured. Two detection sensors 14 are provided on the surface of the substrate 12 opposite to the tube 10, facing each other with a slit 24 therebetween. By providing two detection sensors 14, a pair of image data is obtained at one measurement position. The detection sensor 14 is movable in a moving direction M in accordance with the movement of the substrate 12. The detection sensor 14 is a sensor that integrates a sensor unit that detects X-rays diffracted by the object to be measured and a circuit unit that converts the detected X-rays into an electric signal (image data), and is, for example, an SOI (Silicon on Insulator) sensor.

[0019] Position sensor 16 measures the measurement distance from detection sensor 14 to the object to be measured (hereinafter also simply referred to as the "measurement distance"). Position sensor 16 is connected to one end of tube 10 in the movement direction M. Position sensor 16 is movable in movement direction M as tube 10 moves. Position sensor 16 irradiates the object to be measured with infrared light from slit 24 in substrate 12, for example, with infrared optical axis 17 positioned between two detection sensors 14 (see FIG. 6(a)). Position sensor 16 then receives reflected light from the object to be measured, thereby measuring the distance along a perpendicular line from position sensor 16 to the object to be measured, and measures the measured distance as the measurement distance.

[0020] Each of the moving mechanisms 18, 20 is composed of, for example, a linear guide, a ball screw, a motor, etc. The moving mechanism 18 is attached to the upper part of the bulb 10 and moves the bulb 10 in the moving direction M. On the other hand, the moving mechanism 20 is attached to the upper part of the substrate 12 and moves the substrate 12 and the detection sensor 14 provided on the substrate 12 in the moving direction M.

[0021] The computer 22 is communicatively connected to each of the tube 10, the substrate 12, the detection sensor 14, the position sensor 16, and the movement mechanisms 18 and 20. The computer 22 is configured as a general-purpose computer equipped with a CPU (Central Processing Unit), a memory, etc.

[0022] <Functional configuration> Fig. 3 is a block diagram showing an example of a functional configuration of the computer 22 in Fig. 1. As shown in Fig. 3, the computer 22 functionally has a storage unit 30, an acquisition unit 32, a determination unit 34, a movement control unit 36, a detection control unit 38, a generation unit 40, and a calculation unit 42. These functions are realized by executing a program stored in a memory under the control of a CPU of the computer 22 and operating each component of the X-ray measurement device 1.

[0023] Fig. 4 is a diagram showing an example of a data table 30A stored in the storage unit 30 of Fig. 3. As shown in Fig. 4, the data table 30A stores measured distances and information related to the movement of the detection sensor 14 corresponding to the measured distances, which are linked to each other. The information related to the movement of the detection sensor 14 indicates whether or not the detection sensor 14 is to be moved, and if the detection sensor 14 is to be moved, the number of times the detection sensor 14 is to be moved.

[0024] 3, the acquisition unit 32 acquires the measured distance by receiving the measurement result by the position sensor 16. The acquisition unit 32 outputs information indicating the acquired measured distance to the determination unit .

[0025] The determination unit 34 determines whether or not the measured distance acquired by the acquisition unit 32 is equal to or greater than a preset predetermined value, for example, 15 mm. The determination unit 34 outputs the determination result to the movement control unit 36.

[0026] Movement control unit 36 ​​moves at least one of tube 10 and detection sensor 14 in movement direction M so as to change the relative position of detection sensor 14 with respect to tube 10. The relative position of detection sensor 14 with respect to tube 10 is, for example, the central position of detection sensor 14 with respect to the central position of tube 10 in movement direction M. Movement control unit 36 ​​moves tube 10 by controlling the movement of movement mechanism 18. Meanwhile, movement control unit 36 ​​moves detection sensor 14 together with substrate 12 by controlling the movement of movement mechanism 20.

[0027] Furthermore, when the determination unit 34 determines that the measured distance is equal to or greater than a predetermined value, the movement control unit 36 ​​moves the detection sensor 14 two or more times according to the measured distance. For example, the movement control unit 36 ​​refers to the data table 30A to identify the number of times the detection sensor 14 has been moved, which is associated with the measured distance, and moves the detection sensor 14 by the number of times. At this time, for example, the movement control unit 36 ​​moves the detection sensor 14 so that the detection sensors 14 before and after the movement are adjacent to each other without having any overlapping portions. That is, the movement control unit 36 ​​moves the detection sensor 14 by the length of the width in the movement direction M of the detection sensor 14 in one movement. Furthermore, the movement control unit 36 ​​moves the detection sensor 14 more times as the measured distance becomes longer.

[0028] Furthermore, when determination unit 34 determines that the measured distance is not equal to or greater than the predetermined value, movement control unit 36 ​​controls the movement so as not to change the relative position of detection sensor 14 with respect to tube 10. For example, movement control unit 36 ​​stops movement mechanism 20 so as not to move detection sensor 14.

[0029] Hereinafter, the relative position of detection sensor 14 with respect to tube 10 will be simply referred to as the "relative position." Of the relative positions that change in response to the movement of tube 10 and detection sensor 14 by movement control unit 36, detection control unit 38 causes detection sensor 14 to acquire image data at two or more relative positions corresponding to the measurement distance. In other words, the two or more relative positions are set as measurement positions at which detection sensor 14 acquires image data. Detection control unit 38 causes detection sensor 14 to acquire a pair of image data at each relative position, thereby causing detection sensor 14 to acquire at least four or more pieces of image data in total. Furthermore, detection control unit 38 causes detection sensor 14 to acquire image data at a greater number of relative positions as the measurement distance becomes longer.

[0030] Furthermore, the detection control unit 38 causes the detection sensor 14 to acquire image data based on the determination result by the determination unit 34. For example, when the determination unit 34 determines that the measured distance is equal to or greater than a predetermined value, the detection control unit 38 causes the detection sensor 14 to acquire image data at two or more relative positions according to the measured distance. Furthermore, when the determination unit 34 determines that the measured distance is not equal to or greater than the predetermined value, the detection control unit 38 causes the detection sensor 14 to acquire image data at one relative position. The detection control unit 38 outputs the acquired image data to the generation unit 40.

[0031] When image data at two or more relative positions are acquired by the detection sensor 14, the generation unit 40 combines the image data at the two or more relative positions to generate X-ray diffraction ring image data. In this case, the generation unit 40 combines at least four or more image data pairs acquired by the detection sensor 14 at each relative position. The generation unit 40 combines a pair of image data acquired at the same relative position, and also combines image data adjacent in the moving direction M acquired at different relative positions. Furthermore, when image data at one relative position is acquired by the detection sensor 14, the generation unit 40 combines the pair of image data acquired at the one relative position to generate X-ray diffraction ring image data. The generation unit 40 outputs the generated diffraction ring image data to the calculation unit 42.

[0032] The calculation unit 42 calculates a residual stress value of the measurement object based on the diffraction ring image data generated by the generation unit 40.

[0033] <Control flow by computer 22> Next, the control flow by computer 22 will be described with reference to Fig. 5 and Fig. 6. Fig. 5 is a flowchart showing an example of the control flow by computer 22. Fig. 6 is a diagram showing changes in the relative position of detection sensor 14 with respect to tube 10. Note that the order of the following steps can be changed as appropriate.

[0034] (Step SP10) Movement control unit 36 ​​moves bulb 10 in movement direction M so that infrared optical axis 17 of position sensor 16 is located between two opposing detection sensors 14, as shown in Fig. 6(a). Position sensor 16 measures the measurement distance at that position and transmits the measurement result to acquisition unit 32. Acquisition unit 32 acquires the measurement distance transmitted from position sensor 16. Then, the process proceeds to step SP12.

[0035] (Step SP12) The determination unit 34 determines whether the measured distance acquired in step SP10 is equal to or greater than a predetermined value, for example, 15 mm. If the determination unit 34 determines the determination as positive, the process proceeds to step SP14. If the determination unit 34 determines the determination as negative, the process proceeds to step SP28.

[0036] (Step SP14) The movement control unit 36 ​​determines the number of movements i of the detection sensor 14 based on the measured distance acquired in step SP10. The movement control unit 36 ​​refers to the data table 30A, and determines the number of movements of the detection sensor 14 to be two when the measured distance is, for example, 25 to 35 mm. Then, the process proceeds to step SP16.

[0037] (Step SP16) The movement control unit 36 ​​moves the tube 10 in the movement direction M to the first measurement position. For example, if the number of movements of the detection sensor 14 is determined to be two in step SP14, the movement control unit 36 ​​moves the tube 10 in the movement direction M to the first measurement position as shown in FIG. 6(b). The first measurement position is a position where the detection sensor 14 is shifted by the length of the width of the detection sensor 14 to one side away from the position sensor 16 in the movement direction M with respect to the second measurement position shown in FIG. 6(c). Then, the processing proceeds to the processing of step SP18.

[0038] (Step SP18) The detection control unit 38 causes the detection sensor 14 to acquire a pair of image data at the first measurement position to which it has been moved in the process of step SP16. Then, the process proceeds to the process of step SP20.

[0039] (Step SP20) The movement control unit 36 ​​increments the actual movement count m of the detection sensor 14 from an initial value of 0. Then, the process proceeds to step SP22.

[0040] (Step SP22) The movement control unit 36 ​​moves the detection sensor 14 together with the substrate 12 in the movement direction M. The movement control unit 36 ​​moves the detection sensor 14 to a position adjacent to, but not overlapping with, the detection sensor 14 at the time of image acquisition in the processing of step SP18. The movement control unit 36 ​​repeats the processing of step SP22 the number of times specified in the processing of step SP14.

[0041] For example, if the number of movements of the detection sensor 14 is determined to be two in the process of step SP14, the movement control unit 36 ​​moves the detection sensor 14 to the second measurement position, and after performing the processes of the following steps SP24 and SP26, returns to the process of steps SP20 and SP22 and moves the detection sensor 14 to the third measurement position again. The second measurement position is a relative position where the collimator 11 is located between the two opposing detection sensors 14, as shown in FIG. 6(c). The third measurement position is a position where the detection sensor 14 is shifted by the length of the width of the detection sensor 14 toward the other side approaching the movement direction M toward the position sensor 16, with respect to the second measurement position shown in FIG. 6(c), as shown in FIG. 6(d). Then, the process proceeds to the process of step SP24.

[0042] (Step SP24) The detection control unit 38 causes the detection sensor 14 to acquire a pair of image data at the measurement position to which it has been moved in the process of step SP22. Then, the process proceeds to the process of step SP26.

[0043] (Step SP26) The movement control unit 36 ​​judges whether the actual movement count m of the detection sensor 14 is the movement count i specified in step SP14. If the judgment is affirmative, the process proceeds to step SP32, and if the judgment is negative, the process proceeds to step SP20.

[0044] (Step SP28) 6(c), the movement control unit 36 ​​moves the bulb 10 in the movement direction M so that the collimator 11 is positioned between the two opposing detection sensors 14. Then, the process proceeds to the process of step SP30.

[0045] (Step SP30) The detection control unit 38 causes the detection sensor 14 to acquire the pair of image data at the relative position to which it has been moved in the process of step SP28. Then, the process proceeds to the process of step SP32.

[0046] (Step SP32) If the process of step SP12 is judged to be positive, the generation unit 40 combines the image data acquired in pairs in each of the processes of step SP18 and step SP24 to generate diffraction ring image data. For example, if the process of step SP14 specifies that the detection sensor 14 has moved twice, the generation unit 40 combines a total of six image data, including the pair of image data acquired in the process of step SP18 and the image data acquired in pairs by repeating step SP24 twice, to generate diffraction ring image data. If the process of step SP12 is judged to be negative, the generation unit 40 combines the pair of image data acquired in the process of step SP30 to generate diffraction ring image data. Then, the process proceeds to step SP34.

[0047] (Step SP34) The calculation unit 42 calculates the residual stress value of the measurement object based on the diffraction ring image data generated in the process of step SP32, and then ends the series of processes shown in FIG.

[0048] <Effects> The X-ray measuring device 1 according to the above embodiment is an X-ray measuring device 1 comprising a tube 10 which irradiates X-rays towards an object to be measured, and a detection sensor 14 which acquires image data of the X-rays diffracted by the object to be measured, and further comprising a movement control unit 36 ​​which moves at least one of the tube 10 and the detection sensor 14 in a movement direction M which intersects with the irradiation direction I of the tube 10 so that the relative position of the detection sensor 14 with respect to the tube 10 changes, a detection control unit 38 which causes the detection sensor 14 to acquire image data at at least two or more of the relative positions which change in accordance with the movement, and a generation unit 40 which combines the image data at the two or more relative positions acquired by the detection sensor 14 to generate X-ray diffraction ring image data. According to this configuration, the diffraction ring image data is generated by combining the image data acquired by the detection sensor 14 at two or more relative positions. This makes it possible to acquire, as the measurement result, diffraction ring image data with an area larger than the area that the detection sensor 14 can acquire, without changing the size of the detection sensor 14.

[0049] Moreover, in the X-ray measurement apparatus 1 according to the above embodiment, the detection control unit 38 causes the detection sensor 14 to acquire image data at relative positions, the number of which corresponds to the measurement distance from the detection sensor 14 to the measurement object. According to this configuration, image data is acquired by the detection sensor 14 at a number of relative positions corresponding to the measurement distance. Therefore, the area of ​​the diffraction ring image data obtained by combining the image data can be made variable according to the measurement distance.

[0050] Furthermore, the X-ray measuring device 1 according to the above embodiment is provided with a judgment unit 34 which judges whether the measurement distance is equal to or greater than a predetermined value, and when the judgment unit 34 judges a positive result, the detection control unit 38 causes the detection sensor 14 to acquire image data at two or more relative positions according to the measurement distance, and when the judgment unit 34 judges a negative result, the detection control unit 38 causes the detection sensor 14 to acquire image data at one relative position. According to this configuration, the detection sensor 14 acquires image data at two or more relative positions only when the measured distance is equal to or greater than a predetermined value, thereby making it possible to reduce processing time.

[0051] Moreover, in the X-ray measurement apparatus 1 according to the above embodiment, the detection control unit 38 causes the detection sensor 14 to obtain image data at a greater number of relative positions as the measurement distance becomes longer. According to this configuration, the longer the measurement distance, the greater the number of image data at relative positions acquired by the detection sensor 14, so that the area of ​​the diffraction ring image data generated by combining the image data can be made larger as the measurement distance becomes longer.

[0052] Moreover, the X-ray measurement device 1 according to the above embodiment includes a position sensor 16 that is connected to one end side of the tube 10 in the moving direction M and measures the measurement distance. According to this configuration, as movement control unit 36 ​​moves tube 10, position sensor 16 can be easily moved to a position appropriate for measuring the measurement distance.

[0053] <Modification> The present invention is not limited to the above-mentioned embodiment. In other words, the above-mentioned embodiment may be modified by a person skilled in the art as appropriate, and the modifications may be included within the scope of the present invention as long as they include the features of the present invention. In addition, the elements of the above-mentioned embodiment and the modifications described below may be combined to the extent technically possible, and the combinations of these may be included within the scope of the present invention as long as they include the features of the present invention.

[0054] For example, in the above embodiment, image data is acquired by detection sensor 14 at two or more relative positions that change by moving detection sensor 14, but tube 10 may be moved instead of or together with detection sensor 14. For example, image data may be acquired by detection sensor 14 at two or more relative positions that change by moving tube 10 and the object to be measured, without moving detection sensor 14.

[0055] Furthermore, in the above embodiment, the detection sensor 14 is caused to acquire image data at a position where the detection sensor 14 has moved to be adjacent with no overlapping portion, but the detection sensor 14 may also be caused to acquire image data at a position where the detection sensor 14 has moved to have an overlapping portion. Furthermore, in the above embodiment, the detection sensor 14 is caused to acquire image data every time the detection sensor 14 is moved once, but the detection sensor 14 may also be caused to acquire image data by continuously capturing images while moving the detection sensor 14.

[0056] In the above embodiment, the X-ray measuring device 1 includes the position sensor 16, but the X-ray measuring device 1 does not necessarily have to include the position sensor 16. The acquiring unit 32 may acquire a measurement distance measured by an external position sensor or a measurement distance previously set or input by an operator. In addition, the number of image data that the detection control unit 38 causes the detection sensor 14 to acquire does not necessarily have to correspond to the measurement distance.

[0057] Furthermore, each functional unit of the computer 22 may be realized by a microchip or the like provided in the detection sensor 14. Furthermore, the computer 22 does not need to include the memory unit 30 or the calculation unit 42. For example, each piece of information stored in the memory unit 30 may be stored in an external storage means, or the measurement results may be output to an external information processing device or the like, and the residual stress value of the measurement object may be calculated in the information processing device or the like.

[0058] The present invention may also be a program for causing an information processing device such as the computer 22 or a server to function as the movement control unit 36, the detection control unit 38, the generation unit 40, or the like. The program also provides the same effects as those of the above-described embodiment. The program may be stored in a storage means disposed inside the computer 22, or may be stored in a storage means connected to each component of the X-ray measurement device 1 via a network. The program may be provided by recording it on a computer-readable recording medium, or may be provided in a format in which it is installed via a network such as the Internet. [Explanation of symbols]

[0059] 1: X-ray measuring device, 10: tube (irradiation unit), 14: detection sensor (detection unit), 16: position sensor (distance measurement unit), 36: movement control unit, 38: detection control unit, 40: generation unit

Claims

1. An X-ray measurement device including an irradiation unit that irradiates an X-ray toward a measurement object, and a detection unit that acquires image data of the X-ray diffracted by the measurement object, a movement control unit that moves at least one of the irradiation unit and the detection unit in a direction intersecting an irradiation direction of the irradiation unit so that a relative position of the detection unit with respect to the irradiation unit changes; a detection control unit that causes the detection unit to acquire the image data at at least two or more of the relative positions that change in accordance with the movement; a generation unit that combines the image data at the two or more relative positions acquired by the detection unit to generate the X-ray diffraction ring image data; An X-ray measuring device comprising:

2. The detection control unit causes the detection unit to acquire the image data at the number of the relative positions corresponding to a measurement distance from the detection unit to the measurement object.

2. The X-ray measurement device according to claim 1.

3. a determination unit that determines whether the measured distance is equal to or greater than a predetermined value, When the determination unit makes a positive determination, the detection control unit causes the detection unit to acquire the image data at the two or more relative positions according to the measured distance, and when the determination unit makes a negative determination, the detection control unit causes the detection unit to acquire the image data at one of the relative positions.

3. The X-ray measurement device according to claim 2.

4. the detection control unit causes the detection unit to acquire the image data at a greater number of the relative positions as the measurement distance becomes longer.

4. The X-ray measuring device according to claim 2 or 3.

5. a distance measurement unit that is connected to one end side of the irradiation unit in a direction in which at least one of the irradiation unit and the detection unit is moved by the movement control unit and that measures the measurement distance; The X-ray measuring device according to any one of claims 2 to 4.

6. An irradiation unit that irradiates an X-ray toward a measurement object, a detection unit that acquires image data of the X-ray diffracted by the measurement object, and a computer that can communicate with the irradiation unit, a movement control unit that moves at least one of the irradiation unit and the detection unit in a direction intersecting an irradiation direction of the irradiation unit so that a relative position of the detection unit with respect to the irradiation unit changes; a detection control unit that causes the detection unit to acquire the image data at at least two or more of the relative positions that change in accordance with the movement; a generation unit that combines the image data at the two or more relative positions acquired by the detection unit to generate the X-ray diffraction ring image data; A program to function as a

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