Work Processing System

Abstract

To provide a work-piece processing system capable of correctly positioning a rotational center of a rotational table of a spinner device and a work unit.SOLUTION: A work-piece processing system comprises: a work-piece housing cassette that houses a work-piece unit having a work-piece; a spinner device; and a transport device that transports the work-piece unit between the work-piece housing cassette and the spinner device. The spinner device includes: a rotational table that has a holding surface receiving and holding the work-piece unit transported by the transport device; and a plurality of positioning members that is provided at an outer peripheral part of the rotational table, and can come into contact with a plurality of positions of the outer peripheral part of the work-piece unit received from the transport device, from an outer side of a radial direction, and performs relative positioning between the rotational center of the rotational table and the work-piece unit.SELECTED DRAWING: Figure 6

Description

Technical Field

[0001] The present invention relates to a workpiece processing system.

Background Art

[0002] In a processing apparatus that processes a workpiece, an apparatus configuration having a function of transporting the workpiece to a coating apparatus or a cleaning apparatus is known.

[0003] For example, in the processing apparatus of Patent Document 1, a cassette in which a workpiece unit (for example, a wafer) fixed to a ring-shaped frame via a dicing sheet is stored is prepared. The workpiece unit is taken out from the cassette, positioned by a pair of guide rails, and transferred onto a rotating table of a spinner apparatus used in a coating apparatus or a cleaning apparatus.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] By the way, the rotating table rotates at a high speed such as 3000 rpm in the coating and cleaning processes. The rotation centers of the rotating table and the frame need to be accurately aligned. That is, it is necessary to balance the center of gravity of the rotation.

[0006] In addition, in the coating process, since it is necessary to accurately position the nozzle with respect to the workpiece, it is necessary to minimize the positional deviation between the rotating table and the workpiece unit due to transportation.

[0007] However, since the positions of the guide rail and the rotary table are affected by the assembly accuracy of the device, it is difficult to accurately position the rotation center of the rotary table and the work unit only with the guide rail.

[0008] Also, even when the frame is clamped by a pair of guide rails, the gap between the guide rail and the frame cannot be eliminated, so error components are included. In addition, affected by the vibration of adjacent processing devices, the positional relationship between the guide rail and the rotary table becomes indeterminate depending on the situation.

[0009] In particular, when a plurality of spinner devices are mounted on the processing device, it is necessary to arrange the spinner devices linearly below a pair of guide rails. The required assembly accuracy of the processing device is higher compared to the case of a single spinner device. In reality, it is difficult to accurately arrange a plurality of spinner devices linearly, so the center deviation of the rotary table occurs for each spinner device, making it difficult to accurately position the rotation center of the rotary table and the work unit.

[0010] The present invention has been made in view of such circumstances, and an object thereof is to provide a work processing system capable of accurately positioning the rotation center of the rotary table of the spinner device and the work unit.

Means for Solving the Problems

[0011] To achieve the above object, the following invention aspects are provided.

[0012] The work processing system of the first aspect includes a work storage cassette that stores a work unit in which a work is fixed to a ring-shaped frame via a dicing sheet, a plurality of spinner devices arranged in parallel in the conveyance direction from the work storage cassette, and a conveyance device that conveys the work unit between the work storage cassette and the plurality of spinner devices. The conveyance device has a pair of guide rails extending in the conveyance direction from the work storage cassette, and a clamp member that conveys the work unit in the conveyance direction while being guided by the pair of guide rails. The spinner device is a rotary table configured to be movable up and down in the lifting direction orthogonal to the conveyance direction, and has a holding surface that receives and holds the work cassette conveyed by the conveyance device, and a plurality of positioning pins provided on the outer peripheral portion of the rotary table, which can contact a plurality of positions on the outer peripheral portion of the work unit delivered from the conveyance device from the radially outer side, and performs relative positioning between the rotation center of the rotary table and the work unit.

[0013] In the work processing system of the second aspect, each of the plurality of positioning pins has a tapered surface at the position where the work unit contacts, and the tapered surface is inclined so as to approach the rotation center of the rotary table as it approaches the holding surface from the tip of the positioning pin.

[0014] In the work processing system of the third aspect, the plurality of positioning pins are provided at positions equidistant from the rotation center of the rotary table in the radial direction.

[0015] In the work processing system of the fourth aspect, the plurality of positioning pins are evenly arranged in the circumferential direction centered on the rotation center of the rotary table.

[0016] In the work processing system of the fifth aspect, a frame clamper that rotates when the rotary table rotates and clamps the frame is provided on the outer periphery of the rotary table, and the plurality of positioning pins support the frame clamper.

[0017] In the work processing system according to the sixth aspect, the plurality of positioning pins have a columnar shape with a constant cross-section, are arranged on the side of the work storage cassette on the rotary table, and the conveying member brings the work unit into contact with the plurality of positioning pins.

Advantages of the Invention

[0018] According to the present invention, the rotation center of the rotary table of the spinner device and the work unit can be relatively accurately positioned.

Brief Description of the Drawings

[0019]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Embodiments for Carrying Out the Invention

[0020] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In this specification, the same reference numerals are assigned to the same components, and overlapping descriptions are omitted as appropriate.

[0021] 〔Overall Configuration〕 FIG. 1 is an overall configuration diagram of a system including a work processing system according to an embodiment. FIG. 2 is a plan view of a work unit. FIG. 3 is a perspective view of the work processing system, FIG. 4 is a side view of the work processing system, and FIG. 5 is a top view of the work processing system. The work processing system 10 shown in the figure is a system that conveys a work unit by a conveying device between a work storage cassette and a plurality of spinner devices arranged in parallel.

[0022] As shown in FIG. 1, the work processing system 10 includes a work storage cassette 20, a spinner device 30, and a conveying device 50. In the embodiment, a processing stage 80 is provided adjacent to the work processing system 10. In FIG. 1, the conveying direction of the work unit WU between the spinner device 30 and the processing stage 80 is indicated by the X-axis direction, the conveying direction of the work unit WU between the work storage cassette 20 and the spinner device 30 is indicated by the Y-axis direction, and the vertical direction is indicated by the Z-axis direction. The X-axis direction, the Y-axis direction, and the Z-axis direction are orthogonal to each other. The work unit WU includes a work W to be processed (see FIG. 2).

[0023] The processing stage 80 includes a table 82, an X-Y drive mechanism 84 disposed on the table 82, and a laser irradiation device 86. The X-Y drive mechanism 84 includes a mounting table 88 for mounting the work unit WU. In the processing stage 80, the work unit WU mounted on the mounting table 88 is moved by the X-Y drive mechanism 84 to a processing position below the laser irradiation device 86. The laser irradiation device 86 irradiates the work W placed on the mounting table 88 with laser light LD. The laser irradiation device 86 can be applied to both processing the surface of the work W such as ablation and forming a laser processing region inside the work W.

[0024] The work unit WU is moved between the work processing system 10 and the processing stage 80 by a conveying arm (not shown).

[0025] As shown in FIG. 2, the work unit WU includes a work W, a dicing sheet S, and a ring-shaped frame F, and the work W is fixed to the ring-shaped frame F via the dicing sheet S. The work W is, for example, a semiconductor wafer. Various devices are formed on the semiconductor wafer. The semiconductor wafer is divided into a plurality of chips along a dividing line through various processes. The work W is not limited to a semiconductor wafer.

[0026] The work W is attached to a dicing sheet S (also referred to as a dicing tape, an adhesive tape, or an adhesive sheet, etc.) to which a film-like adhesive D for die bonding, which is called a (Die Attach Film die attach film) for example, is attached.

[0027] The peripheral portion of the dicing sheet S is mounted on a rigid ring-shaped frame F (also referred to as a dicing frame, a ring frame, etc.). The work W is disposed at the position of the opening of the frame F via the dicing sheet S.

[0028] In FIG. 2, the frame F has four straight portions formed along the circumferential direction and arc portions formed between the straight portions. Among the four straight portions, two opposing straight portions are parallel to each other and are evenly arranged in the circumferential direction with respect to the center of the frame F. However, the shape of the frame F is not limited to the above shape and can be changed as appropriate.

[0029] As shown in FIGS. 1 and 3, a work storage cassette 20 containing the work unit WU is prepared. The work storage cassette 20 is placed on a cassette stage (not shown). The cassette stage is configured to be movable up and down in the Z-axis direction by an elevating mechanism.

[0030] As shown in FIG. 3, the work storage cassette 20 is formed in a substantially rectangular parallelepiped box shape. The work storage cassette 20 has an opening 22 on at least one side excluding the upper surface and the bottom surface. Inside the work storage cassette 20, a plurality of horizontally extending grooves 24 are formed, and a plurality of shelves are formed. One work unit WU is horizontally stored on each shelf one by one. The work unit WU is taken out from and stored in the work storage cassette 20 through the opening 22 of the work storage cassette 20.

[0031] As shown in FIG. 1, a plurality of spinner devices 30 are arranged in parallel, for example, linearly along the conveyance direction (Y-axis direction). The spinner device 30 includes a rotary table 32 and a base 34 that supports the rotary table 32. The rotary table 32 has a holding surface 32A on the upper surface for receiving and holding the work unit WU. The holding surface 32A can function as a suction surface by suctioning from below, for example. The holding surface 32A of the rotary table 32 can hold the work unit WU directly or indirectly. Direct holding is the case where the work unit WU is directly held on the holding surface 32A. Indirect holding is the case where the work unit WU is held on another member placed on the holding surface 32A.

[0032] The base 34 includes a rotation mechanism (not shown) for rotationally driving the rotary table 32 and a lifting mechanism (not shown) for driving the rotary table 32 to be liftable in the lifting direction (Z-axis direction) orthogonal to the conveyance direction (Y-axis direction).

[0033] The spinner device 30 is configured to be able to apply and clean the work W of the work unit WU. The spinner device 30 includes, for example, a nozzle (not shown). A coating liquid, a cleaning liquid, etc. are ejected from the nozzle onto the work W of the work unit WU held by the rotary table 32. When ejecting the coating liquid, the cleaning liquid, etc., the rotary table 32 rotates with the work unit WU held, for example, with a maximum of 3000 rpm.

[0034] As shown in FIG. 3, the work storage cassette 20 is placed on the cassette stage with its opening 22 facing the spinner device 30. The transfer device 50 transfers the work unit WU between the work storage cassette 20 and the plurality of spinner devices 30.

[0035] As shown in FIGS. 1 and 3, the transfer device 50 includes a pair of guide rails 52 extending in the transfer direction (Y-axis direction) from the work storage cassette 20, and a clamp member 54 as a transfer member movable along the transfer direction (Y-axis direction). The clamp member 54 grips the frame F of the work unit WU and transfers the work unit WU along the transfer direction (Y-axis direction) while being guided by the pair of guide rails 52. In FIG. 3, only the frame F of the work unit WU is shown. Although the clamp member 54 is exemplified as the transfer member, the structure is not limited as long as the work unit WU can be transferred. For example, the work unit WU may be transferred by adsorbing it with a suction pad or hooking it with claws or the like.

[0036] The guide rail 52 has a substantially L-shaped cross section when cut by a plane orthogonal to the Y-axis direction. The pair of guide rails 52 are arranged at a predetermined distance apart facing each other such that one is L-shaped and the other is reverse L-shaped. The work unit WU transferred by the clamp member 54 is supported by the pair of L-shaped guide rails 52 on its lower surface, and its movement in the X-axis direction is restricted.

[0037] The clamp member 54 is provided with a gripping portion on the side facing the work storage cassette 20 and grips the frame F. The clamp member 54 is controlled by a drive device (not shown) for movement in the transfer direction (Y-axis direction) and gripping and releasing of the frame F.

[0038] As shown in FIGS. 4 and 5, the positional relationship between the spinner device 30 and the pair of guide rails 52 is such that the spinner device 30 is arranged to be positioned between the pair of guide rails 52 and is disposed below the pair of guide rails 52 as shown in FIG. 5. FIG. 4 is a side view seen from the Y-axis direction, and FIG. 5 is a top view seen from above along the Z-axis direction.

[0039] As shown in FIGS. 3 and 4, around the rotating table 32 of the spinner device 30, there are provided an L-shaped holding member 36 that holds the lower surface of the frame F of the work unit WU, and a frame clamp 38 pivotally supported at the corner of the holding member 36. As shown in FIG. 3, the four holding members 36 and the frame clamp 38 are evenly arranged in the circumferential direction centered on the rotation center of the rotating table 32.

[0040] As shown in FIG. 4, the holding member 36 has a horizontal portion 36A extending in the outer diameter direction from the rotating table 32 and a standing portion 36B extending upward in the Z-axis direction from the horizontal portion 36A. The frame clamp 38 is composed of a clamp portion 38A at one end and a weight portion 38B at the other end, and is pivotally supported at the corner of the holding member 36 via a shaft 38C. When the rotating table 32 is not rotating, the weight portion 38B hangs down in the direction of gravity. When the rotating table 32 rotates, the weight portion 38B swings to the outer peripheral side due to centrifugal force, and the clamp portion 38A can clamp the frame F.

[0041] Next, the operations of the work storage cassette 20, the spinner device 30, and the transfer device 50 in the work processing system 10 will be briefly described with reference to FIG. 3.

[0042] The work storage cassette 20 can move up and down in the vertical direction (Z-axis direction) as indicated by the arrow by a cassette stage having a lifting mechanism (not shown).

[0043] The plurality of spinner devices 30 can move up and down individually in the vertical direction (Z-axis direction) as indicated by the arrow by a lifting mechanism (not shown).

[0044] A pair of guide rails 52 are configured to be movable away from each other and approaching each other along the X-axis direction as indicated by the arrows. The clamp member 54 is configured to be movable in the conveyance direction (Y-axis direction) of the work unit WU as indicated by the arrows.

[0045] First, the clamp member 54 moves in the direction approaching the work storage cassette 20 along the Y-axis direction and grips the frame F of the work unit WU. The clamp member 54 guides and conveys the work unit WU by the pair of guide rails 52 to the position of the spinner device 30 (also referred to as the first spinner device) on the side far from the work storage cassette 20, for example. The pair of guide rails 52 basically do not move in the Z-axis direction and maintain the same height.

[0046] Next, the rotary table 32 of the first spinner device (spinner device 30) rises, and the holding surface 32A holds the lower surface of the work unit WU. The pair of guide rails 52 move away from each other to a position where they do not support the lower surface of the work unit WU. The clamp member 54 releases the work unit WU and moves to the standby position.

[0047] With the work unit WU held by the holding surface 32A of the first spinner device, the rotary table 32 descends. The rotary table 32 rotates, and application or cleaning is performed on the work W (not shown).

[0048] While application or cleaning is being performed by the first spinner device, the clamp member 54 moves in the direction approaching the work storage cassette 20 along the Y-axis direction and grips the frame F of the next work unit WU. The pair of guide rails 52 move closer to each other to a position where they can support the lower surface of the work unit WU. Note that the work storage cassette 20 rises or descends to move the next work unit WU to the position of the pair of guide rails 52.

[0049] The clamp member 54 guides and conveys the work unit WU to the position of the spinner device 30 (referred to as the second spinner device) closer to the work storage cassette 20 along a pair of guide rails 52.

[0050] Next, the rotary table 32 of the second spinner device (spinner device 30) rises, and the holding surface 32A holds the lower surface of the work unit WU. The pair of guide rails 52 move away from each other to a position where they do not support the lower surface of the work unit WU. With the work unit WU held by the holding surface 32A of the second spinner device, the rotary table 32 descends. The rotary table 32 rotates, and coating or cleaning is performed on the work W (not shown).

[0051] By applying a plurality of spinner devices 30, the throughput of coating or cleaning for a plurality of work units WU can be significantly improved. While one spinner device 30 is operating, the work unit WU can be conveyed to another spinner device 30. The waiting time for processing the work unit WU can be reduced.

[0052] In the embodiment, when a plurality of spinner devices 30 are arranged linearly side by side below a pair of guide rails 52, a plurality of positioning pins are provided on the outer peripheral portion of the rotary table 32 of the spinner device 30 to accurately position the rotation center of the rotary table 32 and the work unit WU. Hereinafter, a preferred form will be described.

[0053] <First Embodiment> FIG. 6 is an explanatory view of the spinner device 30 of the first embodiment included in the work processing system 10. FIG. 6(A) is an overall view, and FIG. 6(B) is an enlarged view.

[0054] As shown in FIG. 6(A), four positioning pins 40 are provided on the outer peripheral portion of the rotary table 32. The positioning pins 40 are supported on the tip side of a support member 42 extending horizontally from the rotary table 32 and extend upward in the Z-axis direction.

[0055] An example of the arrangement positions of the four positioning pins 40 will be described. In FIG. 6(A), the four frame clamps 38 are arranged such that two sets of straight lines connecting two opposing frame clamps 38 are orthogonal, one being parallel to the Y-axis direction (conveying direction) and the other being parallel to the X-axis direction. Therefore, the positions of the four positioning pins 40 are arranged at positions where the straight lines connecting each positioning pin 40 and the rotation center of the rotary table 32 are not parallel to the X-axis direction and the Y-axis direction.

[0056] As shown in FIG. 6(B), the positioning pin 40 is configured to be able to contact from the radially outer side of the outer peripheral portion of the work unit WU delivered from a conveying device 50 (not shown). The positioning pin 40 has a tapered surface 40A at the position where the work unit WU contacts. The tapered surface 40A is inclined so as to approach the rotation center of the rotary table 32 as it approaches the holding surface 32A from the tip of the positioning pin 40. The tapered surface 40A can be composed of a flat surface, a curved surface, or a combination thereof. The angle of the tapered surface 40A may be less than 90°. The angle of the tapered surface 40A is more preferably 60° or more and 80° or less if it is in a conical shape. Note that this is not the case when the tapered surface 40A has a curved surface instead of a conical shape. Also, the angle of the tapered surface 40A is determined by the angle formed by the tapered surface 40A and a horizontal plane intersecting the tapered surface 40A.

[0057] As shown in FIG. 6(A), since a plurality of positioning pins 40 are provided, contact can be made from the radially outer side at a plurality of positions on the outer peripheral portion of the work unit WU.

[0058] As shown in FIG. 6(B), when the work unit WU is transferred from the transfer device 50, the rotary table 32 rises in the direction of the arrow. The positioning pin 40 comes into contact with the outer peripheral portion of the work unit WU. The work unit WU moves toward the rotation center of the rotary table 32 as shown by the dashed arrow so as to follow the tapered surface 40A of the plurality of positioning pins 40. As a result, relative positioning between the rotation center of the rotary table 32 and the work unit WU is executed. In the first embodiment, self-alignment enables positioning between the rotation center of the rotary table 32 and the work unit WU. As shown in FIG. 6(A), it is preferable that a plurality (for example, about 3 or 4) of positioning pins 40 are provided and arranged so that the center position is determined uniquely.

[0059] In order to improve the accuracy of positioning between the rotation center of the rotary table 32 and the work unit WU, it is preferable that the plurality of positioning pins 40 are provided at positions equidistant from the rotation center of the rotary table in the radial direction.

[0060] The plurality of positioning pins 40 arranged at equal distances can come into contact with the arc portion of the frame F. When each positioning pin 40 comes into contact with the arc portion of the frame F, relative positioning between the rotation center of the rotary table 32 and the rotation center of the work unit WU becomes possible.

[0061] Further, it is preferable that the plurality of positioning pins 40 are arranged evenly in the circumferential direction centered on the rotation center of the rotary table 32. In the first embodiment, the four positioning pins 40 are arranged such that the central angle formed by two adjacent positioning pins 40 in the circumferential direction with respect to the rotation center of the rotary table 32 is 90°.

[0062] The plurality of positioning pins 40 arranged evenly in the circumferential direction can contact the work unit WU evenly from the radially outer side, and relative positioning between the rotation center of the rotary table 32 and the rotation center of the work unit WU is executed.

[0063] The arrangement and shape of the positioning pins 40 can be appropriately changed in consideration of the shape of the frame F of the work unit WU. The positioning pins 40 are preferably made of, for example, stainless steel that has been surface-hardened or subjected to a friction reduction treatment (such as Teflon coating or Tuffram treatment).

[0064] <Second Embodiment> FIG. 7 is an explanatory view of a work processing system 10 including a spinner device 30 according to the second embodiment. FIG. 7(A) is an overall view, and FIG. 7(B) is an enlarged view. Components having the same configuration as those in the first embodiment may be denoted by the same reference numerals and description thereof may be omitted.

[0065] As shown in FIG. 7(A), four frame clamps 38 are pivotally supported on the outer peripheral portion of the rotary table 32 by four holding members 36, respectively. The four frame clamps 38 are arranged such that two sets of straight lines connecting two opposing frame clamps 38 are orthogonal to each other, one being parallel to the Y-axis direction (conveying direction) and the other being parallel to the X-axis direction.

[0066] As shown in FIG. 7(B), the holding member 36 has a horizontal portion 36A extending in the outer diameter direction and a standing portion 36B extending upward in the Z-axis direction from the horizontal portion 36A. The standing portion 36B has a tapered surface 36C at a position where the work unit WU contacts. The tapered surface 36C is inclined so as to approach the rotation center of the rotary table 32 as it approaches the holding surface 32A from the tip of the standing portion 36B. In the second embodiment, the holding member 36 has a standing portion 36B provided with the tapered surface 36C and performs the same function as the positioning pin 40 in the first embodiment.

[0067] As shown in FIG. 7(A), since a plurality of holding members 36 are provided, the standing portions 36B can contact from the radially outer side at a plurality of positions on the outer peripheral portion of the work unit WU.

[0068] As shown in FIG. 7(B), when the work unit WU is transferred from the guide rail 52 of the transfer device 50, the rotary table 32 rises in the direction of the arrow. The standing portion 36B comes into contact with the work unit WU. The work unit WU moves toward the rotation center of the rotary table 32 as indicated by the dashed arrow so as to follow the tapered surfaces 36C of the plurality of standing portions 36B. As a result, relative positioning between the rotation center of the rotary table 32 and the work unit WU is executed. In the second embodiment, self-alignment enables positioning between the rotation center of the rotary table 32 and the work unit WU. As shown in FIG. 7(A), it is preferable that a plurality (for example, about 3 or 4) of holding members 36 are installed and arranged so that the center positions are determined uniquely.

[0069] <Third Embodiment> FIG. 8 is an explanatory view of a work processing system 10 including the spinner device 30 of the third embodiment. Components having the same configuration as those in the first or second embodiment may be denoted by the same reference numerals and the description thereof may be omitted.

[0070] As shown in FIG. 8, two positioning pins 40 are provided on the outer peripheral portion of the rotary table 32. The positioning pins 40 are supported on the tip side of a support member 42 extending horizontally from the rotary table 32 and extend upward in the Z-axis direction.

[0071] In the third embodiment, the plurality of positioning pins 40 have a column shape with a constant cross section and are arranged on the side of the work storage cassette 20 (not shown) in the rotary table 32. The side of the work storage cassette 20 means an arc-shaped portion of the rotary table 32 facing the work storage cassette 20 with reference to a straight line parallel to the X-axis direction passing through the rotation center of the rotary table 32. The column shape with a constant cross section includes a cylinder and a polygonal column. The cross section is a cross section cut by a plane orthogonal to the Z-axis direction.

[0072] In the third mode, the clamp member 54 grips the work unit WU from the work storage cassette 20, guides it along the pair of guide rails 52, and conveys it to a position beyond the spinner device 30. The position beyond means that the center of the work unit WU is at a position away from the rotation center of the rotary table 32 on the side opposite to the work storage cassette 20.

[0073] Next, the rotary table 32 of the spinner device 30 rises, and the holding surface 32A holds the lower surface of the work unit WU. With the clamp member 54 gripping the frame F of the work unit WU, the work unit WU is conveyed toward the work storage cassette 20. The frame F of the work unit WU is pressed against a plurality of positioning pins 40. As a result, the work unit WU comes into contact with the positioning pins 40, and relative positioning between the rotation center of the rotary table 32 and the work unit WU is executed.

[0074] Since the positioning pins 40 have a columnar shape with a constant cross-section, when the work unit WU is pressed against the positioning pins 40, it is possible to suppress the work unit WU from escaping in the upward direction.

[0075] A plurality of (for example, about 2 or 3) positioning pins 40 are provided and arranged so that the center position is determined uniquely when the work unit WU is pressed. The positioning pins 40 are arranged on the side of the work storage cassette 20. Therefore, in consideration of the weight balance of the rotary table 32, it is preferable to provide a counterweight on the side opposite to the positioning pins 40 with the X-axis direction as a reference.

[0076] As described above, in the first mode, the second mode, and the third mode, the pair of guide rails 52 provided in the transfer device 50 functions as a guide for guiding the work unit WU. On the other hand, the positioning between the spinner device 30 and the work unit WU is executed by the positioning pins 40 (or the holding member 36) provided in the spinner device 30. That is, the center of the rotary table 32 can be directly referred to by the positioning pins 40 (or the holding member 36).

[0077] In the first, second, and third embodiments, a work processing system including a plurality of spinner devices has been described. However, the positioning pins of the first, second, and third embodiments can also be applied to a work processing system including one spinner device. Further, by applying the positioning pins, even when the vibration damping member installed in the spinner device deteriorates over time, the relative positioning between the rotation center of the rotary table and the work unit can be executed.

Description of Reference Numerals

[0078] 10... Work processing system, 20... Work storage cassette, 22... Opening, 24... Groove, 30... Spinner device, 32... Rotary table, 32A... Holding surface, 34... Base, 36... Holding member, 36A... Horizontal portion, 36B... Upright portion, 36C... Tapered surface, 38... Frame clamp, 38A... Clamping portion, 38B... Hammer portion, 38C... Shaft, 40... Positioning pin, 40A... Tapered surface, 42... Support member, 50... Conveying device, 52... Guide rail, 54... Clamping member, 80... Processing stage, 82... Table, 84... X-Y drive mechanism, 86... Laser irradiation device, 88... Mounting table, D... Film-like adhesive, F... Frame, LD... Laser beam, S... Dicing sheet, W... Work, WU... Work unit

Claims

1. A work storage cassette for storing a work unit having a work; A plurality of spinner devices arranged in a conveying direction from the work storage cassette; a transport device that transports the work unit between the work storage cassette and the plurality of spinner devices; Equipped with the transport device includes a guide rail extending from the work storage cassette in the transport direction, and a transport member that transports the work unit in the transport direction while being guided by the guide rail, The spinner device is a rotary table having a holding surface that receives and holds the work unit transported by the transport device; a plurality of positioning members provided on an outer periphery of the rotary table, capable of contacting from the radially outer side at a plurality of positions on the outer periphery of the work unit transferred from the transport device, and performing relative positioning between the center of rotation of the rotary table and the work unit; having Work processing system.

2. Each of the positioning members has a tapered surface at a position where the work unit comes into contact, and the tapered surface is inclined so as to approach the rotation center of the rotary table as it approaches the holding surface from the tip of the positioning member. The workpiece processing system according to claim 1 .

Images