Expansion Unit

Abstract

To provide an extension device capable of reducing the risk of device failure due to gas generated by heating an expanded sheet.SOLUTION: An extension device 1 includes a frame fixing portion 10 that fixes an annular frame 106 of a frame unit 110, a seat expansion unit 20 that expands an annular region 108 of an expanded seat 105, a heating unit 40 that heats and shrinks the annular region 108 of the expanded expanded sheet 105, a lid body 50 having a recessed space 51 inside which covers a workpiece 100 after expansion of the expanded sheet 105, and an advance / retreat portion 30 that advances / retreats the lid body 50 to / from a shielding position where the edge 52 of the lid body 50 covering the workpiece 100 is brought into contact with the annular region 108 of the expanded sheet 105 to shield the workpiece 100 from the external space, and to / from an open position where the workpiece 100 is exposed from the lid body 50.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an expansion device.

Background Art

[0002] Generally, a processing method is known in which a device irradiates a workpiece (wafer) formed on a surface with a laser beam to form a modified layer inside along a planned dividing line, and the workpiece is expanded by expanding an expand sheet (dicing tape) to which the workpiece is adhered, and then the modified layer is used as a fracture base point to divide the workpiece into individual chips.

[0003] In this type of processing method, in order to expand the expand sheet on the outer periphery of the wafer, the expand sheet becomes loose after expansion, and the expanded chip interval gradually becomes narrow. During conveyance, the expand sheet sways and causes chipping due to rubbing between the chips. Therefore, a processing technique and a dividing device for heating and shrinking the expanded and loosened expand sheet have been developed (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] By the method of heating and shrinking the expanded and loosened expand sheet, the looseness of the expand sheet is eliminated. However, when heated at a high temperature enough to cause shrinkage, depending on the type of expand sheet, gas may be generated. If the generated gas adheres to the device, it may become a foreign substance and cause defects in the device.

[0006] The present invention has been made in view of such problems, and an object thereof is to provide an expansion device capable of reducing the risk of device failure due to gas generated by heating an expandable sheet.

Means for Solving the Problems

[0007] In order to solve the above-described problems and achieve the object, an expansion device of the present invention is an expansion device that expands an expandable sheet of a frame unit in which a workpiece having a planned division line is supported by the expandable sheet at an opening of an annular frame, and includes a frame fixing portion that fixes the annular frame of the frame unit, and a sheet expansion unit that presses an annular region of the expandable sheet between an outer periphery of the workpiece and an inner periphery of the annular frame in a direction orthogonal to the workpiece to expand the expandable sheet, a heating unit that heats and contracts the annular region of the expanded expandable sheet, a lid body that has a concave space covering the workpiece after expansion on the inside, and an advancing / retreating portion that advances and retreats the lid body to a shielding position where an edge of the lid body covering the workpiece contacts the annular region of the expandable sheet to shield the workpiece from the external space and an open position where the workpiece is exposed from the lid body, and the lid body positioned at the shielding position shields the workpiece from gas generated by heating the expandable sheet. and further includes a sensor for detecting the type of the lid, a processing condition storage unit for registering the size of the workpiece or the type of the lid, a determination unit for determining whether the size of the workpiece or the type of the lid stored in the processing condition storage unit corresponds to the type of the lid detected by the sensor, and a notification unit for notifying the determination result of the determination unit 。

[0008] The heating unit may be fixed to the advancing / retreating portion, the advancing / retreating portion may rotate so that the heating unit rotates along the circumferential direction of the annular region, and the lid body fixed to the advancing / retreating portion may be set to be stoppable independently of the rotating advancing / retreating portion.

[0009] An exhaust unit for exhausting gas generated from the expandable sheet may be provided.

Effects of the Invention

[0011] The present invention can reduce the risk of device failure due to gas generated by heating an expandable sheet.

Brief Description of the Drawings

[0012]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Embodiments for Carrying Out the Invention

[0013] Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the content described in the following embodiments. Also, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[0014] 〔Embodiment 1〕 An expansion device 1 according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of the expansion device 1 according to Embodiment 1. FIG. 2 is a cross-sectional view showing a state before expansion of an expandable sheet 105 of a main part of the expansion device 1 according to Embodiment 1. FIG. 3 is a cross-sectional view showing a state during expansion of the expandable sheet 105 of the main part of the expansion device 1 according to Embodiment 1. FIG. 4 is a cross-sectional view showing a state during heating of the expandable sheet 105 of the main part of the expansion device 1 according to Embodiment 1. As shown in FIG. 1, the expansion device 1 according to Embodiment 1 includes a frame fixing part 10, a sheet expansion unit 20, a reciprocating part 30, a heating unit 40, a lid body 50, an exhaust unit 60, a frame unit conveyance part 70, and a control unit 80.

[0015] In Embodiment 1, a workpiece (wafer) 100 to be divided by the expansion device 1 expanding the expandable sheet 105 is, for example, a disk-shaped semiconductor wafer or an optical device wafer having a base material such as silicon, sapphire, silicon carbide (SiC), gallium arsenide, or glass. As shown in FIG. 1, device chips 103 of chip size are formed in regions of the workpiece 100 partitioned by a plurality of division planned lines 102 formed in a grid pattern on the surface 101. An expandable sheet (dicing tape) 105 is adhered to the back surface 104 on the back side of the surface 101 of the workpiece 100, and an annular frame 106 is attached to the outer edge of the expandable sheet 105, whereby the workpiece 100 constitutes a frame unit 110 supported by the expandable sheet 105 in the opening 107 of the annular frame 106.

[0016] The workpiece 100 is irradiated with a laser beam along the planned division line 102, and a modified layer 120 (shown by a dashed line in Fig. 2), which is the starting point of division inside, is formed along the planned division line 102. The modified layer 120 means a region where the density, refractive index, mechanical strength, and other physical properties are different from those of the surroundings, and examples thereof include a melting treatment region, a crack region, an insulation breakdown region, a refractive index change region, and a region where these regions are mixed. In Embodiment 1, the modified layer 120 has a lower mechanical strength than other parts of the workpiece 100.

[0017] As shown in Fig. 1, the frame fixing portion 10 includes a frame placing portion 11 on which the annular frame 106 of the frame unit 110 is placed, and a frame pressing portion 12 that presses the annular frame 106 from above. The frame placing portion 11 has a square shape, and a circular opening 13 having a diameter approximately equal to the inner diameter of the annular frame 106 is formed at the center. An air cylinder 15 is connected to the lower side of the frame placing portion 11, and the frame placing portion 11 can move up and down in the Z-axis direction parallel to the vertical direction shown in Fig. 1 by the expansion and contraction of the air cylinder 15. Similar to the frame placing portion 11, the frame pressing portion 12 has a square shape, and a circular opening 14 having a diameter approximately equal to the inner diameter of the annular frame 106 is formed at the center. The frame pressing portion 12 can move in the Y-axis direction parallel to the horizontal direction shown in Fig. 1 by a horizontal movement unit (not shown).

[0018] After placing the annular frame 106 of the frame unit 110 on the frame placing portion 11 such that the opening 13 of the frame placing portion 11 and the opening 107 of the annular frame 106 of the frame unit 110 overlap in the vertical direction, the frame pressing portion 12 is moved directly above the frame placing portion 11 by a horizontal movement unit (not shown) such that the opening 14 of the frame pressing portion 12 overlaps the opening 13 of the frame placing portion 11 and the opening 107 of the annular frame 106 in the vertical direction. Then, the frame placing portion 11 is raised by the air cylinder 15 to sandwich the annular frame 106 of the frame unit 110 between the frame placing portion 11 and the frame pressing portion 12, thereby fixing the annular frame 106 of the frame unit 110 as shown in Fig. 2.

[0019] As shown in FIG. 1, the sheet expansion unit 20 includes a chuck table 21, a pushing member 22, a roller member 23, and a lifting mechanism 24. The chuck table 21 is circular and is provided coaxially inside the inner circumference of the pushing member 22. The chuck table 21 is also provided coaxially inside the inner circumference of the opening 13 of the frame mounting portion 11. The chuck table 21 includes a disk-shaped frame body in which a concave portion is formed, and a disk-shaped suction portion fitted into the concave portion. The suction portion of the chuck table 21 is formed of a porous ceramic or the like having a large number of porous holes, and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the suction portion of the chuck table 21 is a holding surface 25 that sucks and holds the workpiece 100 of the frame unit 110 in which the annular frame 106 is fixed to the frame fixing portion 10 from the back surface 104 side through the expandable sheet 105. The holding surface 25 and the upper surface of the frame body of the chuck table 21 are arranged on the same plane and are formed along the XY plane parallel to the horizontal plane.

[0020] The pushing member 22 is cylindrical and is provided coaxially outside the outer circumference of the chuck table 21. The pushing member 22 is also provided coaxially inside the inner circumference of the opening 13 of the frame mounting portion 11. The roller member 23 is rotatably provided on the same plane as or slightly above the holding surface 25 of the chuck table 21 and at the upper end of the pushing member 22. The lifting mechanism 24 is connected and provided below the chuck table 21 and the pushing member 22, and integrally raises the chuck table 21 and the pushing member 22.

[0021] With the annular frame 106 of the frame unit 110 fixed to the frame fixing portion 10, as shown in FIG. 3, the sheet expansion unit 20 raises the chuck table 21 and the pushing member 22 relative to the frame fixing portion 10 by the elevating mechanism 24, thereby pressing the annular region 108 of the expand sheet 105 between the outer periphery of the workpiece 100 and the inner periphery of the annular frame 106 in the thickness direction orthogonal to the front surface 101 and the back surface 104 of the workpiece 100, and expanding the expand sheet 105 in the plane direction. The workpiece 100 is divided into the devices 103 along the modified layer 120 when the expand sheet 105 is expanded by the sheet expansion unit 20.

[0022] As shown in FIG. 1, the advancing / retreating unit 30 is a disk-shaped base, which is arranged above the chuck table 21 and coaxially with the chuck table 21. The advancing / retreating unit 30 has a driving unit 31 connected thereto above, and is provided to be vertically movable along the vertical direction by the driving unit 31 and rotatable around a rotation axis 32 parallel to the vertical direction. The rotation axis 32 is formed in a columnar shape and is arranged coaxially with the advancing / retreating unit 30.

[0023] As shown in FIG. 1, the heating units 40 are arranged at equal intervals in the circumferential direction on the outer edge of the advancing / retreating unit 30 and are arranged in a region corresponding to the annular region 108 of the expand sheet 105. The heating units 40 are arranged at positions facing the annular region 108 of the expand sheet 105 of the frame unit 110 held by the frame fixing portion 10 and the chuck table 21 in the vertical direction. The heating units 40 are attached to the advancing / retreating unit 30 such that their radial positions can be adjusted. In the example shown in FIG. 1, four heating units 40 are provided at equal intervals in the circumferential direction of the advancing / retreating unit 30, but the present invention is not limited to four. For this purpose, as shown in FIG. 4, the driving unit 31 rotates the advancing / retreating unit 30 so as to rotate the plurality of heating units 40 along the circumferential direction of the annular region 108 of the expand sheet 105.

[0024] As shown in FIG. 4, the heating unit 40 heats and contracts the annular region 108 of the expanded expandable sheet 105. The heating unit 40 is of a type that irradiates infrared rays downward to heat the annular region 108 of the expandable sheet 105. For example, it is an infrared ceramic heater that is heated when a voltage is applied and emits infrared rays.

[0025] As shown in FIG. 1, the lid 50 is in a bowl shape and has an inner concave space 51 that covers the workpiece 100 of the frame unit 110 of the expandable sheet 105 after expansion. The concave space 51 has a depth greater than the thickness of the workpiece 100 and is 5 mm or less. The edge 52 of the lid 50 that forms the opening edge of the concave space 51 is circular, and the radial length is greater than the outer diameter of the workpiece 100 of the frame unit 110 of the expandable sheet 105 after expansion and smaller than the inner diameter of the rotation orbit of the heating unit 40. Note that the outer diameter of the workpiece 100 of the frame unit 110 of the expandable sheet 105 after expansion is larger than the outer diameter of the workpiece 100 of the frame unit 110 of the expandable sheet 105 before expansion (before division), and changes according to the degree of expansion of the expandable sheet 105 by the sheet expansion unit 20.

[0026] The lid 50 is preferably formed of a material that shields the gas generated by the heating of the expandable sheet 105 and further formed of a material that shields the heating by the heating unit 40. In Embodiment 1, the lid 50 is made of aluminum, for example, which reflects the infrared rays emitted by the heating unit 40.

[0027] As shown in FIGS. 1 to 4, the lid 50 is mounted on the lower surface side of the advancing / retreating portion 30 by the mounting member 33 in a substantially coaxial manner with the advancing / retreating portion 30. A circular mounting through-hole 53 is formed in the central top portion of the lid 50, that is, the bottommost portion in the center of the concave space 51, by the mounting member 33. The mounting member 33 is formed in a columnar shape with a diameter of the central portion smaller than that of the through-hole 53, and in a disk shape with both ends protruding in the radial direction from the central portion and having a diameter larger than that of the through-hole 53. Both ends are separable. Therefore, the mounting member 33 is inserted into the through-hole 53 with the columnar central portion in a disassembled state and assembled integrally, and then mounted and fixed to the advancing / retreating portion 30, thereby detachably mounting the lid 50. Since the lid 50 is mounted by such a mounting member 33, it is rotatable with respect to the advancing / retreating portion 30 and the mounting member 33, and is suspended so as to be movable in the Z-axis direction within the range of the axial length of the columnar central portion of the mounting member 33 with respect to the advancing / retreating portion 30 and the mounting member 33. Note that the mounting member 33 is not limited to the above-described form, and any form may be used as long as it is rotatable with respect to the advancing / retreating portion 30 and is suspended so as to be movable in the Z-axis direction with respect to the advancing / retreating portion 30.

[0028] The advancing / retreating part 30 with the lid body 50 attached moves up and down along the vertical direction by the driving part 31, thereby advancing and retreating the lid body 50 between the shielding position 58 and the open position 59. Here, as shown in FIG. 4, the shielding position 58 is the position of the lid body 50 when the edge 52 of the lid body 50 contacts a portion inside the rotation orbit of the heating unit 40 on the annular region 108 of the expandable sheet 105 of the frame unit 110. When the lid body 50 is positioned at such a shielding position 58, as shown in FIG. 4, the workpiece 100 of the frame unit 110 is sealed within the concave space 51, shielding the workpiece 100 from the external space including the portion of the annular region 108 of the expandable sheet 105 heated by the heating unit 40, and shielding the workpiece 100 from the gas generated by the heating of the expandable sheet 105. The open position 59 is the position of the lid body 50 when the edge 52 of the lid body 50 is spaced upward from above the annular region 108 of the expandable sheet 105 of the frame unit 110 and the workpiece 100 is exposed from the lid body 50 to the external space, as shown in FIGS. 2 and 3.

[0029] When the lid body 50 is positioned at the shielding position 58, it is supported by the annular region 108 of the expandable sheet 105 of the frame unit 110 at the edge 52, and the portion of the through hole 53 is lifted slightly upward with respect to the lower end of the mounting member 33, so that it can stop on the annular region 108 of the expandable sheet 105 of the frame unit 110 independently of the advancing / retreating part 30 that rotates with the heating unit 40.

[0030] As shown in FIG. 4, the exhaust unit 60 is installed such that the exhaust port faces a portion of the annular region 108 of the expandable sheet 105 heated by the heating unit 40, and exhausts the gas generated from the portion of the annular region 108 of the expandable sheet 105 heated by the heating unit 40. In the example shown in FIGS. 1 and 4, the exhaust unit 60 is installed at two locations, but the present invention is not limited to this, and it may be installed at any number of locations. Further, the exhaust unit 60 may be used by moving the exhaust port closer to the portion of the annular region 108 of the expandable sheet 105 heated by the heating unit 40 when the heating unit 40 heats the portion of the annular region 108 of the expandable sheet 105.

[0031] As shown in FIG. 1, the frame unit conveyance unit 70 includes a unit main body 71, a suction holding unit 72, and a sensor 73. The unit main body 71 is connected to a drive unit (not shown), is provided so as to be movable up and down along the vertical direction by the drive unit, and is provided so as to be rotatable around a rotation axis 74 parallel to the vertical direction. The unit main body 71 is moved by this drive unit directly above the holding surface 25 of the chuck table 21 or retracted from directly above the holding surface 25 of the chuck table 21.

[0032] The suction holding unit 72 is attached downward on the lower surface side of the unit main body 71, and suction-holds the annular frame 106 of the frame unit 110 from above. The frame unit conveyance unit 70 conveys the frame unit 110 onto the holding surface 25 of the chuck table 21 by moving the unit main body 71 directly above the holding surface 25 of the chuck table 21 by the drive unit while holding the annular frame 106 of the frame unit 110 by the suction holding unit 72. The sensor 73 is attached upward on the upper surface side of the unit main body 71. Although the sensor 73 is shown in FIG. 1, it is not involved in the operation processing of the expansion device 1 according to Embodiment 1 described below, and its function and operation will be described in Embodiment 2 described later.

[0033] The control unit 80 controls the operations of various components of the expansion device 1, and causes the expansion device 1 to perform a series of processes for dividing the workpiece 100 by expanding the expandable sheet 105 of the frame unit 110. In Embodiment 1, the control unit 80 includes a computer system. The computer system included in the control unit 80 has an arithmetic processing unit having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. In Embodiment 1, the functions of the control unit 80 are realized by the arithmetic processing unit of the computer system included in the control unit 80 executing a computer program stored in the storage device of the computer system included in the control unit 80. The arithmetic processing unit of the control unit 80 performs arithmetic processing according to the computer program stored in the storage device of the control unit 80, and outputs a control signal for controlling the expansion device 1 to each component of the expansion device 1 via the input / output interface device of the control unit 80.

[0034] As shown in FIG. 1, the control unit 80 includes a processing condition storage unit 81, a determination unit 82, and a notification unit 83. Although the processing condition storage unit 81, the determination unit 82, and the notification unit 83 are shown in FIG. 1, they are not involved in the operation processing of the expansion device 1 according to Embodiment 1 described below, and thus their functions and operations will be described in Embodiment 2 described later.

[0035] Next, this specification will describe the operation of the expansion device 1 according to Embodiment 1 with reference to the drawings. First, the control unit 80 of the expansion device 1 conveys the frame unit 110 onto the holding surface 25 of the chuck table 21 by the frame unit conveyance unit 70. Next, as shown in FIG. 2, the control unit 80 sandwiches and fixes the annular frame 106 of the frame unit 110 placed on the holding surface 25 of the chuck table 21 by the frame placement unit 11 and the frame pressing unit 12 of the frame fixing unit 10.

[0036] After the control unit 80 sandwiches and fixes the annular frame 106 of the frame unit 110 with the frame fixing part 10, as shown in FIG. 3, the lifting mechanism 24 of the sheet expanding unit 20 raises the chuck table 21 and the pushing-up member 22 relative to the frame fixing part 10, and presses the annular region 108 of the expand sheet 105 in the thickness direction of the workpiece 100, thereby expanding the expand sheet 105 in the plane direction and dividing the workpiece 100 along the modified layer 120 to the device 103.

[0037] After the control unit 80 expands the expand sheet 105, it introduces the negative pressure from the vacuum suction source to the holding surface 25 of the chuck table 21, and sucks and holds the workpiece 100 through the expand sheet 105 after expansion on the holding surface 25. Thus, after holding the expanded state of the expand sheet 105 in the region of the workpiece 100, the lifting mechanism 24 relatively lowers the chuck table 21 and the pushing-up member 22 with respect to the frame fixing part 10. As a result, the portion of the annular region 108 of the expand sheet 105 on the outer peripheral side of the holding surface 25 of the chuck table 21 loosens.

[0038] After that, as shown in FIG. 4, the control unit 80 lowers the advancing / retreating part 30 by the driving part 31, positions the lid body 50 at the shielding position 58, and at the same time brings the heating unit 40 close to the portion of the annular region 108 of the expand sheet 105 on the outer peripheral side of the holding surface 25. Thereby, the lid body 50 seals the workpiece 100 of the frame unit 110 in the concave space 51, and shields the workpiece 100 from the external space including the portion of the annular region 108 of the expand sheet 105 heated by the heating unit 40. Further, the lid body 50 is supported by the annular region 108 of the expand sheet 105 at the edge 52, and the portion of the through hole 53 is lifted slightly upward with respect to the lower end portion of the mounting member 33.

[0039] After positioning the lid 50 at the shielding position 58, the control unit 80 starts heating by the heating unit 40 and exhaust by the exhaust unit 60, and rotates the advancing / retreating unit 30 by the drive unit 31. As a result, while the heating unit 40 rotates along the circumferential direction of the annular region 108 of the expandable sheet 105, it heats and contracts the portion of the annular region 108 of the expanded and slackened expandable sheet 105. On the other hand, the lid 50 stops on the annular region 108 of the expandable sheet 105 independently of the advancing / retreating unit 30 that rotates with the heating unit 40, and shields the workpiece 100 from the gas generated by the heating of the expandable sheet 105. The exhaust unit 60 exhausts the gas generated by the heating of the annular region 108 of the expandable sheet 105.

[0040] After heating and contracting the annular region 108 of the expandable sheet 105, the control unit 80 ends the rotation of the advancing / retreating unit 30 by the drive unit 31, heating by the heating unit 40, and exhaust by the exhaust unit 60, and positions the lid 50 at the open position 59 by raising the advancing / retreating unit 30 by the drive unit 31, and the frame unit conveying unit 70 takes out the frame unit 110 after dividing the workpiece 100.

[0041] The expansion device 1 according to Embodiment 1 having the above configuration covers and seals the workpiece 100 with the lid 50, and shields the workpiece 100 from the gas generated by the heating of the annular region 108 of the expandable sheet 105, so that it has the effect of reducing the risk of defects in the device 103 due to the gas generated by the heating of the expandable sheet 105.

[0042] Further, in the expansion device 1 according to Embodiment 1, a heating unit 40 is fixed to the advancing / retreating unit 30. The advancing / retreating unit 30 rotates so that the heating unit 40 rotates along the circumferential direction of the annular region 108 of the expandable sheet 105. The lid 50 fixed to the advancing / retreating unit 30 is set to be stoppable independently of the rotating advancing / retreating unit 30. Therefore, when the heating unit 40 evenly heats the annular region 108 of the expandable sheet 105, the expansion device 1 according to Embodiment 1 stabilizes the state of covering and sealing the workpiece 100 with the lid 50, so that the risk of defects in the device 103 due to the gas generated by the heating of the expandable sheet 105 can be further reduced.

[0043] Further, the expansion device 1 according to Embodiment 1 includes an exhaust unit 60 for exhausting the gas generated from the expandable sheet 105. Therefore, the expansion device 1 according to Embodiment 1 can more quickly and surely remove the gas generated by the heating of the annular region 108 of the expandable sheet 105 from above the expandable sheet 105, so that the risk of defects in the device 103 due to the gas generated by the heating of the expandable sheet 105 can be further reduced.

[0044] 〔Embodiment 2〕 The expansion device 1 according to Embodiment 2 of the present invention will be described with reference to the drawings. FIG. 5 is a cross-sectional view showing a state during detection of the type of the lid 50 of the main part of the expansion device 1 according to Embodiment 2. In FIG. 5, the same reference numerals are given to the same parts as those in Embodiment 1, and the description thereof will be omitted.

[0045] The sensor 73 detects the type of the lid 50 from below the lid 50. In Embodiment 2, as shown in FIG. 5, the frame unit transport unit 70 moves the unit body 71 horizontally along the lower side of the advancing / retreating unit 30 and the lid 50 by a driving unit, and emits light by the sensor 73 to detect the reflected light from the edge 52 of the lid 50, thereby detecting the position of the edge 52 of the lid 50, detecting the radial length (size of the lid 50) of the lid 50 representing the type of the lid 50, and outputting the detected information to the control unit 80.

[0046] The processing condition storage unit 81 registers the size of the workpiece 100 to be divided by the expansion device 1 or the type of the lid body 50 corresponding to the size of the workpiece 100. Here, in the second embodiment, the size of the workpiece 100 is the radial length, and the type of the lid body 50 is the radial length of the edge 52 of the lid body 50 (the size of the lid body 50). Further, the type of the lid body 50 corresponding to the size of the workpiece 100 refers to the type of the lid body 50 that can preferably seal the workpiece 100 of the size. Specifically, it is the type of the lid body 50 that satisfies the condition that the size of the lid body 50 is larger than the outer peripheral diameter of the workpiece 100 of the frame unit 110 after the expansion of the expandable sheet 105 and smaller than the inner peripheral diameter of the rotation orbit of the heating unit 40. Note that these pieces of information registered by the processing condition storage unit 81 are registered by being input by an operator in advance via an input unit (not shown).

[0047] The determination unit 82 refers to the processing condition storage unit 81 and determines whether the size of the workpiece 100 or the type of the lid body 50 stored in the processing condition storage unit 81 corresponds to the type of the lid body 50 detected by the sensor 73. That is, the determination unit 82 determines whether the type of the lid body 50 detected by the sensor 73 is the type of the lid body 50 corresponding to the size of the workpiece 100 stored in the processing condition storage unit 81, or whether it is the type of the lid body 50 stored in the processing condition storage unit 81. The determination unit 82 outputs the determination result obtained by this determination to the notification unit 83.

[0048] The notification unit 83 notifies the determination result of the determination unit 82. For example, when the expansion device 1 includes a display unit (not shown) configured by a liquid crystal display device or the like, the notification unit 83 visually notifies the operator by displaying the determination result of the determination unit 82 on the display unit. When the expansion device 1 includes a light emitting unit (not shown) configured by a light emitting diode or the like, the notification unit 83 may notify the operator of the determination result of the determination unit 82 in a recognizable manner by lighting, blinking, or changing the color of the light of the light emitting unit. When the expansion device 1 includes an audio unit (not shown) configured by a speaker or the like and transmits sound, the notification unit 83 may notify the operator of the determination result of the determination unit 82 in a recognizable manner by the sound of the audio unit. When the expansion device 1 is connected to an information device such as a smartphone, a tablet, a wearable device, or a computer, either wired or wirelessly, the notification unit 83 may display the determination result of the determination unit 82 on the display unit of the information device to notify the operator in a recognizable manner, or may notify the operator of the determination result of the determination unit 82 in a recognizable manner by the light emitting unit or the audio generation unit of the information device.

[0049] The function of the processing condition storage unit 81 is realized by the storage device of the control unit 80. The function of the determination unit 82 is realized by the arithmetic processing unit of the computer system included in the control unit 80 performing arithmetic processing according to a computer program stored in the storage device. The function of the notification unit 83 is realized by the input / output interface device of the control unit 80.

[0050] Next, this specification will describe the operation of the expansion device 1 according to Embodiment 2 with reference to the drawings. In Embodiment 2, the control unit 80 of the expansion device 1 places the frame unit 110 on the holding surface 25 of the chuck table 21, sandwiches and fixes the annular frame 106 with the frame fixing portion 10, and then, as shown in FIG. 5, while moving the unit main body 71 horizontally along the lower sides of the advancing / retreating unit 30 and the lid body 50 by the driving unit of the frame unit conveyance unit 70, the sensor 73 detects the type of the lid body 50. In Embodiment 2, after the control unit 80 detects the type of the lid body 50 by the sensor 73, the determination unit 82 determines whether the size of the workpiece 100 or the type of the lid body 50 stored in the processing condition storage unit 81 corresponds to the type of the lid body 50 detected by the sensor 73, and the notification unit 83 notifies the determination result of the determination unit 82.

[0051] In Embodiment 2, when the determination unit 82 of the control unit 80 determines that the type of the lid body 50 detected by the sensor 73 corresponds to the size of the workpiece 100 or the type of the lid body 50 stored in the processing condition storage unit 81, the control unit 80 performs the processing after the expansion of the expand sheet 105 by the sheet expansion unit 20 in the same manner as in Embodiment 1. On the other hand, in Embodiment 2, when the determination unit 82 of the control unit 80 determines that the type of the lid body 50 detected by the sensor 73 does not correspond to the size of the workpiece 100 or the type of the lid body 50 stored in the processing condition storage unit 81, the control unit 80 aborts the processing after the expansion of the expand sheet 105 by the sheet expansion unit 20, and the notification unit 83 prompts the operator to change the type of the lid body 50 attached to the advancing / retreating unit 30 to one corresponding to the size of the workpiece 100 or the type of the lid body 50 stored in the processing condition storage unit 81.

[0052] The expansion device 1 according to Embodiment 2 having the configuration as described above further detects the type of the lid body 50 by the sensor 73 in Embodiment 1. The determination unit 82 determines whether the size of the workpiece 100 stored in the processing condition storage unit 81 or the type of the lid body 50 corresponds to the type of the lid body 50 detected by the sensor 73, and the notification unit 83 notifies the determination result by the determination unit 82. For this reason, the expansion device 1 according to Embodiment 2 encourages the workpiece 100 to be divided by the expansion device 1 to be sealed with a lid body 50 of a type corresponding to the size of the workpiece 100, so that the risk of defects in the device 103 due to the gas generated by the heating of the expandable sheet 105 can be further reduced.

[0053] Note that the present invention is not limited to the above-described embodiments. That is, various modifications can be made and implemented without departing from the gist of the present invention.

Explanation of Reference Numerals

[0054] 1 Expansion device 10 Frame fixing part 20 Sheet expansion unit 30 Forward and backward movement part 40 Heating unit 50 Lid body 51 Concave space 52 Edge 58 Shielding position 59 Open position 60 Exhaust unit 73 Sensor 81 Processing condition storage unit 82 Determination unit 83 Notification unit 100 Workpiece 102 Division planned line 105 Expandable sheet 106 Annular frame 107 Opening 108 Annular region 110 Frame unit

Claims

1. An expansion device for expanding an expandable sheet of a frame unit in which a workpiece having a planned dividing line is supported by an expandable sheet at an opening of an annular frame, a frame fixing portion that fixes the annular frame of the frame unit; A sheet expansion unit that expands the expand sheet by pressing the annular region of the expand sheet between the outer periphery of the workpiece and the inner periphery of the annular frame in a direction perpendicular to the workpiece; A heating unit for heating and shrinking the annular region of the expanded sheet; A cover body having a concave space therein for covering the workpiece after expansion; a moving part for moving the lid body between a shielding position where the edge of the lid body covering the workpiece is brought into contact with the annular region of the expand sheet to shield the workpiece from an external space and an open position where the workpiece is exposed from the lid body; The cover positioned at the shielding position shields the workpiece from gas generated by heating the expand sheet, A sensor for detecting the type of the lid; A processing condition storage unit for registering the size of the workpiece or the type of the lid body; a determination unit that determines whether or not the size of the workpiece or the type of the lid body stored in the processing condition storage unit corresponds to the type of the lid body detected by the sensor; a notification unit that notifies the determination result of the determination unit; The expansion device further comprises:

2. The expansion device described in claim 1, characterized in that the heating unit is fixed to the advance / retract part, the advance / retract part rotates to rotate the heating unit along the circumferential direction of the annular region, and the lid body fixed to the advance / retract part is set to be able to be stopped independently of the rotating advance / retract part.

3. The expansion device according to claim 1 or 2, further comprising an exhaust unit for exhausting gas generated from the expandable sheet.

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