Circuit Board Cassette

Abstract

To provide a substrate cassette capable of storing curved substrates by stacking to be as parallel to each other as possible.SOLUTION: A substrate cassette (10) for accommodating many substrates (32) stacked on top of each other, such as wafers, has a housing including a first side surface (14) and a second side surface (16) parallel to the first side surface (14). At least an elongated first support (20) is provided for the substrate in the housing between both side surfaces (14, 16). The support (20) is separated from the first side surface (14) at least in part. The first side surface (14) is closest to at least one first support (20).SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a substrate cassette for storing a stack of many substrates, particularly wafers. [Background technology]

[0002] Substrate cassettes for storing substrates stacked on top of one another are known. Such substrate cassettes usually have a number of slots, one substrate being able to be stored in each slot. Known substrate cassettes are particularly suitable for storing flat substrates. However, if the substrates are curved, in some instances they cannot be stably positioned at a defined position in the slots of the substrate cassette. In the case of multiple curvatures, it is particularly difficult to stably support them. The shape of a multiple curved substrate resembles the shape of a potato chip. In the case of a substrate having a curvature similar to the shape of a potato chip, the distance between two substrates changes depending on the rotational position of the substrates in the substrate cassette, which makes it difficult to remove the substrates, especially when they need to be removed randomly from the slots.

[0003] However, it is necessary to store the substrates in position in the substrate cassette as parallel as possible to each other, as this is the only way to avoid collisions between the end effector and the substrate, which could potentially damage the substrate when it is removed by means of the end effector.

[0004] SUMMARY OF THE PRESENT EMBODIMENTS It is therefore an object of the present invention to provide a substrate cassette capable of storing curved substrates in a stacked manner that is as parallel to one another as possible. Summary of the Invention

[0005] This object is achieved according to the invention by means of a substrate cassette for storing a number of substrates, in particular wafers, stacked on one another, comprising a housing with a first side and a second side parallel to the first side, where at least a first elongated support is provided for the substrate in the housing between both sides, the support being at least partially spaced apart from the first side, the first side being closest to at least one of the first supports, in particular the first support being arranged closer to the first side than to the second side.

[0006] The first support is therefore not adjacent to the first side and the substrate is not supported by the first support on its outer edge but in an area at a predetermined distance from the outer edge of the substrate. This means that the area of ​​the substrate arranged between the first support and the first side of the housing is exposed and not in contact with the first support. In this way, a multiply curved substrate can be supported by a total of at least three support points. In this way, it is possible to stack many substrates parallel to one another even with curvatures and multiple curvatures, with minimal deviations from the ideal position. Furthermore, the substrates arranged in the substrate cassette can thus be detected by means of a light barrier.

[0007] The side surfaces are designed as side panels with a continuous panel area. However, it is also conceivable that at least one side surface does not have a continuous panel area and / or is designed, for example, as a frame. This allows for material savings in the production of the substrate cassette.

[0008] The housing may be made as one piece or may be assembled using a number of separate components. Thus, the housing may include a middle cross bar as well as a top surface and / or sides in the form of a housing cover. In particular, the housing may be an injection molded part.

[0009] Instead of a middle cross bar, the housing may also include a connecting panel connecting both side surfaces.

[0010] The substrate is preferably a wafer having a diameter of, for example, up to 450 mm, in particular up to 300 mm, preferably between 50 mm and 200 mm. The curvature of the substrate, in particular in the region of the substrate having the greatest curvature, may be up to an amount of 10 mm, i.e. the axial distance of the substrate between the highest point of the substrate and the lowest point of the substrate may be up to an amount of 10 mm. The maximum curvature may be even greater for substrates having a diameter of 450 mm or more.

[0011] On the second side, at least a second support is arranged at the height of the at least one first support, and in each case a slot is defined by the at least one first support and the at least one second support. In this way, when a substrate is placed in the substrate cassette, the substrate is stably supported by means of the first support and the second support.

[0012] The at least one second support is, for example, a support rail arranged away from the second side or in direct contact with the second side, in particular molded directly on the second side. In the first case, the second support is designed mirror-inverted with respect to the first support. In this case, if there is a multiply curved substrate in the substrate cassette, there are four support points between the substrate and the slot. In the second case, if the support is a support rail arranged directly on the second side, there are three support points for a multiply curved substrate, which allows a particularly stable support of the substrate to be supported. The presence of exactly three support points has the advantage that the substrate does not tilt or become fixed in the substrate cassette. The support points are preferably arranged at the same height.

[0013] According to a specific embodiment, a number of slots arranged one above the other are provided, in particular the supports of the slots arranged one above the other are spaced at a maximum distance of 50 mm, in particular at a distance of 5 mm to 30 mm. As a result, as many substrates as possible can be accommodated in the substrate cassette. Choosing such a distance between the slots allows substrates to be loaded or unloaded from the substrate cassette by means of an end effector without many difficulties.

[0014] The distance between the first and / or second supports of the slot and their respective nearest sides is, for example, between 25 mm and 40 mm and / or at most half the diameter of the substrate. In this way, a very small distance between the first and second supports can be avoided, which would result in a less stable support of the substrate.

[0015] The at least one first support and / or the at least one second support comprise a support line or a support area, in particular the support line or the support area forms the entire support. The support line or the support area refers to the line / area along which the substrate contacts the support. For this purpose, for example, the support line is designed as a straight line or the support area is designed on a plane. By forming the support line or the support area, the substrate can be held on the support at different locations along the direction of the slot.

[0016] In a specific example, at least one first support and / or at least one second support extend parallel or at an acute angle to the side surface. This is understood to mean that the edge of at least one support, or the support line, extends parallel or at an acute angle to the side surface, in particular at an angle of up to 10°. This allows the end effector to move parallel or substantially parallel to the supports in the substrate cassette. In this way, the handling or transport of substrates is simplified using the end effector.

[0017] The at least one first support and / or the at least one second support are provided, for example, on a support arm that extends from the support to the first side or the second side, as appropriate. In particular, the support is supported only by the support arm. The use of the support arm makes it possible to position the support at a predetermined position in the substrate cassette. The support is stably supported by the support arm so that it does not bend downwards under the weight of the substrate. In particular, the support is designed to be rigid.

[0018] When viewed from above, the base area of ​​the support arm may be larger than the area of ​​the support. Since the support has a relatively small area, particularly a narrow area, it is advantageous if the base area of ​​the support arm is larger in order to keep the support in a stable position. By having the base area of ​​the support arm larger than the area of ​​the support, the area of ​​the support is thereby kept particularly small, thus allowing the placement of the substrate in a predetermined position in the substrate cassette.

[0019] The support arm is attached to the first or second side as appropriate, in particular by screwing, which allows for distribution in the substrate cassette with a rear panel and / or a front panel, in particular the rear side and / or the front side of the substrate cassette can be fully opened.

[0020] At least a portion of the support arm can extend in a top view area in the direction of the slot between the first support and the rear or front side of the substrate cassette. For example, the support abuts the support arm with its front end, particularly on the front end facing the rear side of the substrate cassette. This can eliminate interference with the operation of an end effector to remove or place a substrate from the substrate cassette.

[0021] A free space is preferably provided between the support and the side closest to the support, so that the substrate can extend downwards over the side of the support in the case of a curved substrate, especially in the region between the support and the side closest to the support.

[0022] In a specific embodiment, the support arm has a triangular base region, in particular the base region narrows towards the free end of the support arm, which allows the support arm to have the necessary stability and at the same time a light weight, in particular such a shape of the support arm prevents the support arm, or the support only, from tilting downwards towards the free end of the support arm as a result of the weight of the support arm.

[0023] The support is preferably the highest area of ​​the support arm at its mounted position in the substrate cassette, this ensures that the substrate is actually held on the support and not on other areas of the support arm.

[0024] If multiple support arms are provided, the support arms may be combined in one piece, in particular in the form of a support comb, which simplifies handling during assembly and significantly reduces the effort required for assembly.

[0025] To allow flexible use of the substrate cassette for a variety of formed substrates, the support is preferably height adjustable relative to the sides and / or support arms.

[0026] Additional advantages and features of the present invention will become apparent from the following description and referenced series of drawings. [Brief description of the drawings]

[0027] [Figure 1] 1 shows an isometric view of a substrate cassette according to the present invention; [Diagram 2] 2 shows a cross-sectional view of the substrate cassette of FIG. 1; [Diagram 3] FIG. 2 shows another isometric view of the substrate cassette of FIG. 1; [Figure 4] A cross-sectional view perpendicular to the cross-sectional view of FIG. 2 is shown. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0028] FIG. 1 shows a substrate cassette 10 for storing a number of substrates, particularly wafers, stacked on top of one another.

[0029] The substrate cassette 10 has a housing 12 including a first side 14 and a second side 16 parallel to the first side 14, each of which is formed by a continuous side panel. The side panels are screwed to a top surface 17 of the substrate cassette 10. However, it is envisioned that the housing 12 of the substrate cassette 10 could be made in one piece by injection molding.

[0030] To stably support the sides 14, 16 relative to one another, an intermediate rung 19 is provided which connects the sides 14, 16 and extends over the bottom ends of the sides 14, 16 from the first side 14 to the second side 16. The intermediate rung 19 may also be used for mounting or operating a sensor which detects the presence of the substrate cassette 10 in the system.

[0031] The intermediate crosspiece 19 may be made as an independent piece or may be designed as an integral part of the housing 12 .

[0032] The substrate cassette 10 further includes a number of slots 18 each defined by at least one first support 20 and at least one second support 22 of the same height. The supports 20, 22 are thereby disposed within the housing 12. One substrate is stored within the substrate cassette 10 per slot 18, and the substrates are introduced into the slots 18 from the front side of the substrate cassette 10.

[0033] Support 20 is understood to mean simply a support area or support line, regardless of its mechanical attachment.

[0034] As can be seen in Figure 1, but better seen in Figure 2, in the illustrated embodiment, the first support 20 is elongated and extends parallel to the first side 14. To this end, the support 20 is designed to be relatively narrow, for example having a width of at most 2 mm.

[0035] Further, the first support 20 is at least partially spaced from the first side 14 , which is closest to the first support 10 , ie, the first support 20 is closer to the first side 14 than the second side 16 .

[0036] In each case, the second support 22 is formed by a support rail 24 that is directly connected to the second side 16. In particular, the support rail 24 may be molded onto the second side 16. Alternatively, the second support 22 may be designed as a mirror image with respect to the first support 20.

[0037] To form a number of slots 18, a number of first supports 20 and a number of second supports 22 are arranged in the housing 12 so as to be aligned one on top of the other, and in particular spaced apart by a maximum distance of 50 mm, for example spaced apart by 5 mm to 30 mm.

[0038] It is also contemplated that the support arms 28 are not designed to be separately attached, but rather that many or all of the support arms 28 are formed from one piece, and in particular in the form of a support comb.

[0039] The support arms 28 in this case form support teeth, the number of which will thereby be the same as the number of second supports 22 moulded on the opposing side surface 16.

[0040] FIG. 2 is a cross-sectional view across the substrate cassette 10 and shows the shape and position of the first support 20 more clearly than in FIG.

[0041] As can be seen from FIG. 2, the first support 20 is realized by a support region 26 that extends parallel to the first side 14 in the illustrated embodiment.

[0042] As shown, the outline of substrate 32 is shown in dashed lines in FIG.

[0043] The distance from the first support 20 to the first side surface 14 is, for example, 25 mm to 40 mm. The distance from the first support 20 to the first side surface 14 is up to half the diameter of the substrate 32 at most.

[0044] To place the first support 20 in place, the first support 20 is designed on a support arm 28 that extends from the first support 20 to the first side 14 .

[0045] The support arm 28 is in turn attached, in particular by means of a screw fastening, onto the first side 14. Thereby, the support arm 28 is designed to be larger in the region of the attachment, in particular in the region of the support arm 28 adjacent to the first side 14, than in the remaining region.

[0046] The support arm 28 is, for example, an injection molded part, in particular made from plastic.

[0047] If inserted into the substrate cassette 10, the support 20 itself is at the top of the support arm 28. This ensures that the substrate 32 always rests on top of the support in the substrate cassette 10. This also creates a free space between the support 20 and the nearest side 14.

[0048] As can be seen in FIG. 2, the base area 30 of the support arm 28 is larger than the area of ​​the support 20 .

[0049] In particular, the support arm 28 has a triangular base region 30, which in this case tapers to a point in the direction towards the free end of the support arm 28 or the support 20. As a result, the support arm 28 as a whole is particularly stable, in particular the own weight of the support arm 28 is advantageously distributed. The aim of this weight distribution is to arrange the support 20 as horizontally as possible in the substrate cassette 10 and to prevent the support arm 28 from sagging towards the free end due to its own weight.

[0050] The illustrated embodiment shows only one of many possible possibilities for designing the support arm 28. It is also conceivable to design the support arm like a rail having an almost constantly extending L shape with a short leg towards the first side 14, with the support 20 formed on the upper tip of the long leg.

[0051] FIG. 3 shows the substrate cassette 10 in another isometric view, where the back side of the substrate cassette 10 is visible.

[0052] From this figure it becomes clear that in order to form a number of slots 18, a number of supports 28 are arranged directly stacked in the housing 12, in particular so as to be directly connected to one another.

[0053] If both the first support 20 and the second support 22 are formed on the support arm 28, it is also conceivable that the supports 20, 22 are adjustable in height relative to the sides 14, 16 and / or relative to the support arm 28. The same is true if the support arm 28 is molded onto a single support comb.

[0054] FIG. 4 shows a cross section perpendicular to that of FIG. 2, and in particular perpendicular to the direction of the slots.

[0055] In this depiction, the slot 18 is occupied by a substrate resting on supports 20,22.

[0056] The substrate 32 is supported by the first support 20 at a predetermined distance to the outer edge 34 of the substrate 32 .

[0057] In contrast, the substrate 32 has Outer edge 34 3, the flat substrate 32 and the curved substrate 32 are placed on the second support 22. In this way, the flat substrate 32 and the curved substrate 32 are reliably supported parallel to each other.

[0058] The depiction of the substrates 32 in Fig. 4 need not be photorealistic and is provided merely as an example. Moreover, many differently shaped substrates 32 are depicted respectively in the slots 18 in Fig. 4. However, in practice, one slot 18 will always be occupied by one substrate 32.

Claims

1. A substrate cassette (10) for storing a number of substrates (32), particularly wafers, stacked on top of one another, comprising a housing including a first side (14) and a second side (16) parallel to the first side (14), at least a first elongated support (20) being provided for the substrates within the housing (12) between the sides (14, 16), the first support (20) being at least partially spaced from the first side (14) and the first side (14) being closest to the at least one first support (20); On the second side (16), at least a second support (22) is arranged at the height of the at least one first support (20), in each case a slot (18) is defined by one of the at least one first support (20) and the at least one second support (22); the distance between the first side (14) and the first support (20) is different from the distance between the second side (16) and the second support (22); A substrate cassette (10) in which an area of ​​the substrate (32) located between the first support (20) and the first side (14) is free from anything contacting the lower surface.

2. 2. The substrate cassette (10) of claim 1, wherein the at least one second support (22) is a support rail (24) that is spaced a distance from the second side (16) or in direct contact with the second side (16), particularly molded directly onto the second side (16).

3. A substrate cassette (10) as claimed in claim 1 or 2, in which a number of slots (18) are provided, arranged stacked on top of one another, in particular the supports (20, 22) of the number of slots (18) arranged stacked on top of one another are spaced at a maximum distance of 50 mm, in particular between 5 mm and 30 mm.

4. A substrate cassette (10) according to any one of claims 1 to 3, wherein the distance between the first support (20) and / or the second support (22) of the slot (18) and their respective nearest sides (14, 16) is between 25 mm and 40 mm and / or up to half the diameter of the substrate (32).

5. The substrate cassette (10) of any one of claims 1 to 4, wherein the at least one first support (20) and / or the at least one second support (22) comprises a support line or support area (26).

6. The substrate cassette (10) of any one of claims 1 to 5, wherein the at least one first support (20) and / or the at least one second support (22) extend parallel to the side surfaces (14, 16) or at an acute angle thereto.

7. A substrate cassette (10) as described in any one of claims 1 to 6, wherein the at least one first support (20) and / or the at least one second support (22) are suitably provided on a support arm (28) extending from the support (20) to the first side (14) or to the second side (16).

8. 8. The substrate cassette (10) of claim 7, wherein the support arm (28) is suitably attached to the first side (14) or the second side (16), in particular by screwing.

9. A substrate cassette (10) as described in claim 7 or 8, wherein at least a portion of the support arm (28) extends in a plan view in a region in the insertion direction between the first support (20) and a front or rear surface of the substrate cassette (10).

10. A substrate cassette (10) according to any one of claims 7 to 9, wherein the support arm (28) has a triangular base region (30).

11. The substrate cassette (10) according to any one of claims 7 to 10, wherein the support (20) is the highest region of the support arm (28) at a mounting position of the support arm (28) of the substrate cassette (10).

12. A substrate cassette (10) according to any of claims 7 to 11, in which a number of support arms (28) are provided, the support arm (28) being designed as one piece, in particular in the form of a support comb.

13. The substrate cassette (10) of any one of claims 1 to 12, wherein the first support (20) is height adjustable relative to the side surface (14) and / or the support arm (28).

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