How to manufacture IGBTs with dV / dt controllability

Abstract

To provide a method for producing an IGBT with dV / dt controllability.SOLUTION: A method includes: a step of providing a semiconductor body 10 with a drift region 100 of a first conductivity type; a step of forming a plurality of trenches 14-16; a step of providing, at the semiconductor body, a mask arrangement 30 having a protection layer 300 that exposes some of the trenches and covers at least one of the trenches by a mask material 302; a step of subjecting the semiconductor body and the mask arrangement to a dopant material providing step, thereby forming, below bottoms of the exposed trenches, a plurality of doping regions 1059 of a second conductivity type complementary to the first conductivity type; a step of removing the mask arrangement; and a temperature annealing step of subjecting the semiconductor to temperature annealing, thereby causing the plurality of doping regions to extend in parallel to the first lateral direction X so as to overlap and to form a barrier region 105 of the second conductivity type adjacent to the bottoms of the exposed trenches.SELECTED DRAWING: Figure 21

Description

[Technical field]

[0001] This specification refers to embodiments of power semiconductor devices, such as IGBTs, and embodiments of processing of power semiconductor devices. In particular, this specification refers to embodiments of methods of processing an IGBT having a micro-patterned trench (MPT) including dummy trenches, where a plurality of trenches extend into an electrically floating barrier region. [Background technology]

[0002] Many functions of modern devices in automotive, consumer, and industrial applications, such as converting electrical energy and driving electric motors or machines, depend on power semiconductor devices. For example, insulated gate bipolar transistors (IGBTs), metal oxide semiconductor field effect transistors (MOSFETs), and diodes, to name a few, have been used in a variety of applications including, but not limited to, switches in power supplies and power converters.

[0003] An IGBT typically has a semiconductor body configured to conduct a load current along a load current path between two load terminals of the IGBT. Furthermore, the load current path can be controlled using an insulated electrode, sometimes referred to as a gate electrode. For example, the control electrode can set the IGBT in one of a conducting state and a blocking state upon receiving a corresponding control signal, for example from a driver unit.

[0004] In some cases, the gate electrode may be included in a trench of the IGBT, which trench may, for example, exhibit a stripe or needle configuration.

[0005] Furthermore, the trenches of the IGBT may integrate different types of electrodes, some of which may be connected to the IGBT gate terminals and other electrodes may be connected to the IGBT load terminals (e.g., source / emitter terminals).

[0006] It is usually desirable to keep losses (e.g., switching losses) low in IGBTs, which can be achieved, for example, by ensuring short switching periods (e.g., short turn-on periods and / or short turn-off periods).

[0007] On the other hand, in a given application there may also be requirements regarding the maximum slope of the voltage (dV / dt) and / or the maximum slope of the load current (dl / dt).

[0008] Furthermore, the switching behavior of an IGBT may depend on its operating temperature, and it may be desirable to meet the above specifications regarding power dissipation and voltage / current slopes within a wide range of possible operating temperatures. Summary of the Invention [Means for solving the problem]

[0009] In accordance with one embodiment, a power semiconductor device includes an active cell region having a drift region of a first conductivity type; a plurality of IGBT cells disposed at least partially within the active cell region, each IGBT cell including at least one trench extending along a vertical direction into the drift region; an edge termination region surrounding the active cell region; a transition region disposed between the active cell region and the edge termination region, the transition region having a width along a lateral direction from the active cell region toward the edge termination region, at least a portion of the IGBT cells being disposed within or extending into the transition region; and an electrically floating barrier region of a second conductivity type disposed within the active cell region and in contact with at least a portion of the trenches of the IGBT cells, the electrically floating barrier region not extending into the transition region.

[0010] According to another embodiment, a power semiconductor device includes a first load terminal and a second load terminal, the power semiconductor device being configured to conduct a load current along a vertical direction between the terminals, an active cell region with a drift region of a first conductivity type, an edge termination region with a well region of a second conductivity type, and a plurality of IGBT cells disposed within the active cell region, each of the IGBT cells including a plurality of trenches extending along the vertical direction into the drift region and laterally confining a plurality of mesas. The plurality of trenches includes at least one control trench having a control electrode, at least one dummy trench having a dummy electrode electrically coupled to the control electrode, and at least one source trench having a source electrode electrically connected to the first load terminal. The plurality of mesas includes at least one active mesa disposed between the at least one control trench and the at least one source trench, and at least one inactive mesa disposed adjacent to the at least one dummy trench. The power semiconductor device further includes an electrically floating barrier region of a second conductivity type, wherein at least a bottom of the dummy trench and a bottom of the source trench both extend at least partially into the electrically floating barrier region, and a portion of the drift region located laterally between the electrically floating barrier region and the well region has a lateral extension of at least 1 μm in said lateral direction.

[0011] According to yet another embodiment, a method of processing a power semiconductor device is presented, the power semiconductor device including an active cell region with a drift region of a first conductivity type, a plurality of IGBT cells disposed at least partially within the active cell region, each IGBT cell including at least one trench extending along a vertical direction into the drift region, an edge termination region surrounding the active cell region, and a transition region disposed between the active cell region and the edge termination region, the transition region having a width along a lateral direction from the active cell region toward the edge termination region, at least a portion of the IGBT cells being disposed or extending into the transition region. The method includes providing an electrically floating barrier region of a second conductivity type, the electrically floating barrier region disposed within the active cell region and in contact with at least a portion of the trenches of the IGBT cells, the electrically floating barrier region not extending into the transition region.

[0012] According to another embodiment, another method of processing a power semiconductor device is presented. The power semiconductor device includes a first load terminal and a second load terminal, the power semiconductor device being configured to conduct a load current along a vertical direction between the terminals, and includes an active cell region with a drift region of a first conductivity type, an edge termination region having a well region of a second conductivity type, and a plurality of IGBT cells disposed within the active cell region, each of the IGBT cells including a plurality of trenches extending into the drift region along the vertical direction and laterally confining a plurality of mesas. The plurality of trenches includes at least one control trench having a control electrode, at least one dummy trench having a dummy electrode electrically coupled to the control electrode, and at least one source trench having a source electrode electrically connected to the first load terminal. The plurality of mesas includes at least one active mesa disposed between the at least one control trench and the at least one source trench, and at least one inactive mesa disposed adjacent to the at least one dummy trench. The alternative method includes providing an electrically floating barrier region of a second conductivity type, wherein at least a bottom of the dummy trench and a bottom of the source trench both extend at least partially into the electrically floating barrier region, and wherein a portion of the drift region located laterally between the electrically floating barrier region and the well region has a lateral extension of at least 1 μm in the lateral direction.

[0013] According to another embodiment, a method for processing a power semiconductor device comprises the steps of: providing a semiconductor body with a drift region of a first conductivity type; generating a plurality of trenches, the trenches extending into the semiconductor body along a vertical direction and arranged adjacent to one another along a first lateral direction; providing a mask arrangement on the semiconductor body, the mask arrangement having a lateral structure according to which parts of the trenches are exposed and at least one of the trenches is covered by the mask arrangement; subjecting the semiconductor body and the mask arrangement to a dopant material supply step, thereby generating a plurality of doped regions of a second conductivity type complementary to the first conductivity type below bottoms of the exposed trenches; removing the mask arrangement; and subjecting the semiconductor body to a temperature annealing step, thereby causing the plurality of doped regions to extend parallel to the first lateral direction to overlap and form barrier regions of the second conductivity type adjacent bottoms of the exposed trenches.

[0014] According to yet another embodiment, a power semiconductor device includes a first load terminal and a second load terminal, the power semiconductor device being configured to conduct a load current along a vertical direction between the terminals, the power semiconductor device including a drift region of a first conductivity type, a plurality of IGBT cells, each of the IGBT cells including a plurality of trenches extending along the vertical direction into the drift region and laterally confining at least one active mesa, the at least one active mesa including an upper section of the drift region, and an electrically floating barrier region of a second conductivity type vertically and spatially confined with respect to the vertical direction by the drift region. The total amount of all active mesas is divided into a first portion and a second portion, the first portion not overlapping laterally with the barrier region, and the second portion overlapping laterally with the barrier region. The first portion is configured to carry at least a load current within a range of 0% to 100% of a nominal load current for which the power semiconductor device is designed. The second component is configured to carry the load current when the load current exceeds at least 0.5% of the nominal load current.

[0015] Those skilled in the art will recognize additional features and advantages upon reading the following detailed description, and upon viewing the accompanying drawings.

[0016] The parts in the drawings are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the present invention. Moreover, in the drawings, like reference characters refer to corresponding parts. [Brief description of the drawings]

[0017] [Figure 1] 1 illustrates, in a schematic and exemplary manner, a section of a horizontal projection of a power semiconductor device according to one or more embodiments. [Diagram 2] 1 illustrates, in a schematic and exemplary manner, a section of a vertical cross section of a power semiconductor device according to one or more embodiments. [Figure 3A] 1 illustrates, in a schematic and exemplary manner, a section of a vertical cross section of a power semiconductor device according to one or more embodiments. [Figure 3B] 1 illustrates, in a schematic and exemplary manner, a section of a vertical cross section of a power semiconductor device according to one or more embodiments. [Figure 4A] 1 illustrates, in a schematic and exemplary manner, a section of a vertical cross section of a power semiconductor device according to one or more embodiments. [Figure 4B] 1 illustrates, in a schematic and exemplary manner, a section of a vertical cross section of a power semiconductor device according to one or more embodiments. [Diagram 5] 1 illustrates, in a schematic and exemplary manner, the course of dopant concentration in a power semiconductor device according to one or more embodiments. [Figure 6A] 1 illustrates, in a schematic and exemplary manner, a section of a vertical cross section of a power semiconductor device according to one or more embodiments. [Figure 6B] 1 illustrates, in a schematic and exemplary manner, a section of a vertical cross section of a power semiconductor device according to one or more embodiments. [Figure 6C] 1 illustrates, in a schematic and exemplary manner, a section of a vertical cross section of a power semiconductor device according to one or more embodiments. [Figure 7] 1 illustrates, in a schematic and exemplary manner, a section of a horizontal projection of a power semiconductor device according to one or more embodiments. [Figure 8A] 1 illustrates, in a schematic and exemplary manner, a section of a horizontal projection of a power semiconductor device according to one or more embodiments. [Figure 8B] 1 illustrates, in a schematic and exemplary manner, a section of a horizontal projection of a power semiconductor device according to one or more embodiments. [Figure 8C] 1 illustrates, in a schematic and exemplary manner, a section of a horizontal projection of a power semiconductor device according to one or more embodiments. [Figure 8D] 1 illustrates, in a schematic and exemplary manner, a section of a horizontal projection of a power semiconductor device according to one or more embodiments. [Figure 9] 1 illustrates, in a schematic and exemplary manner, a perspective view of a power semiconductor device according to one or more embodiments. [Figure 10]1 illustrates, in a schematic and exemplary manner, a section of a vertical cross section of a power semiconductor device according to one or more embodiments. [Figure 11] 1 illustrates, in a schematic and exemplary manner, a section of a vertical cross section of a power semiconductor device according to one or more embodiments. [Figure 12] 1 illustrates, in a schematic and exemplary manner, a section of a horizontal projection of a power semiconductor device according to one or more embodiments. [Figure 13] 1 illustrates, in a schematic and exemplary manner, a section of a horizontal projection of a power semiconductor device according to one or more embodiments. [Figure 14] 1 illustrates, in a schematic and exemplary manner, a section of a horizontal projection of a power semiconductor device according to one or more embodiments. [Figure 15] 1 illustrates, in a schematic and exemplary manner, a section of a horizontal projection of a power semiconductor device according to one or more embodiments. [Figure 16] 1 illustrates, in a schematic and exemplary manner, a section of a horizontal projection of a power semiconductor device according to one or more embodiments. [Figure 17] 1 illustrates, in a schematic and exemplary manner, a section of a horizontal projection of a power semiconductor device according to one or more embodiments. [Figure 18] 1 illustrates, in a schematic and exemplary manner, a section of a horizontal projection of a power semiconductor device according to one or more embodiments. [Figure 19] 1 illustrates, in a schematic and exemplary manner, a section of a horizontal projection of a power semiconductor device according to one or more embodiments. [Figure 20] 1 illustrates, in a schematic and exemplary manner, steps of a method for processing a power semiconductor device according to one or more embodiments. [Figure 21] 1 illustrates, in a schematic and exemplary manner, one or more sections of a vertical cross section, steps of a method for processing a power semiconductor device according to one or more embodiments. [Figure 22] 1 illustrates, in a schematic and exemplary manner, one or more sections of a vertical cross section, steps of a method for processing a power semiconductor device according to one or more embodiments. [Diagram 23] 1 illustrates, in a schematic and exemplary manner, one or more sections of a vertical cross section, steps of a method for processing a power semiconductor device according to one or more embodiments. [Figure 24] 1 illustrates, in a schematic and exemplary manner, one or more sections of a vertical cross section, steps of a method for processing a power semiconductor device according to one or more embodiments. [Diagram 25] 1 illustrates, in a schematic and exemplary manner, one or more sections of a vertical cross section, steps of a method for processing a power semiconductor device according to one or more embodiments. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0018] In the following detailed description, reference is made to the accompanying drawings that form a part hereof, and which show, by way of illustration, specific embodiments in which the invention may be practiced.

[0019] In this regard, directional terms such as "top," "bottom," "lower," "front," "rear," "back," "rising," "falling," "down," "upper," and the like, may be used in conjunction with the orientation of the figures being described. Because some of the embodiments can be arranged in a number of different orientations, the directional terminology is used for purposes of illustration and is in no way limiting. It is to be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. Therefore, the following detailed description is not to be taken in a limiting sense, and the scope of the present invention is defined by the appended claims.

[0020] Reference will now be made in detail to various embodiments, one or more examples of which are illustrated in the drawings. Each example is provided by way of explanation, not by way of limitation of the invention. For example, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet further embodiments. The invention is intended to include such modifications and variations. These examples are described using specific language that is not to be construed as limiting the scope of the appended claims. The drawings are not to scale and are for illustrative purposes only. For clarity, the same elements or manufacturing steps are designated by the same reference numerals in different drawings unless otherwise stated.

[0021] The term "horizontal" as used herein is intended to refer to an orientation that is substantially parallel to a horizontal plane of a semiconductor substrate or structure, which may be, for example, a plane of a semiconductor wafer, die, or chip. For example, the first lateral direction X and the second lateral direction Y described below may be horizontal, and the first lateral direction X and the second lateral direction Y may be perpendicular to each other.

[0022] The term "vertical" as used herein is intended to denote an orientation substantially perpendicular to a horizontal plane, i.e. parallel to the normal direction of the face of the semiconductor wafer / chip / die. For example, the vertical direction Z described below may be an extension direction perpendicular to both the first lateral direction X and the second lateral direction Y.

[0023] Herein, n-doping is referred to as the “first conductivity type,” while p-doping is referred to as the “second conductivity type.” Alternatively, the opposite doping relationship can be used such that the first conductivity type can be p-doped and the second conductivity type can be n-doped.

[0024] In the context of this specification, the terms "in ohmic contact," "in electrical contact," "ohmically connected," and "electrically connected" are intended to denote that there is a low ohmic electrical connection or low ohmic current path between two regions, sections, zones, portions, or parts of a semiconductor device, or between different terminals of one or more devices, or between a terminal, metallization, or electrode and a portion or part of a semiconductor device. Furthermore, in the context of this specification, the term "in contact" is intended to denote that there is a direct physical connection between two elements of a respective semiconductor device, e.g., the transition between two elements that are in contact with each other may not include another intermediate element, etc.

[0025] Furthermore, in the context of this specification, unless otherwise stated, the term "electrically isolated" is used in accordance with its general reasonable interpretation and is therefore intended to denote that two or more components are disposed separately from one another and that there is no ohmic connection connecting these components. However, components that are electrically isolated from one another may still be coupled to one another (e.g., mechanically and / or capacitively and / or inductively coupled). To give an example, two electrodes of a capacitor may be electrically isolated from one another and at the same time mechanically and capacitively coupled to one another, for example by an insulation (e.g., a dielectric).

[0026] Particular embodiments described herein relate to semiconductor devices such as IGBTs, e.g., but not limited to, IGBTs that exhibit striped or cellular cell configurations, e.g., IGBTs that can be used in power converters or power supplies. Thus, in some embodiments, such IGBTs can be configured to carry a load current supplied to a load and / or supplied by a power source. For example, an IGBT may have one or more active power semiconductor cells, such as monolithically integrated IGBT cells and / or monolithically integrated RC-IGBT cells. Such transistor cells may be incorporated into a power semiconductor module. A plurality of such cells may constitute a cell field that is arranged with the active cell area of ​​the IGBT.

[0027] The term "power semiconductor device" as used herein is intended to refer to a semiconductor device on a single chip with high voltage blocking capability and / or high current carrying capability, i.e., such power semiconductor devices (e.g., IGBTs) are intended for high currents, typically in the ampere range (e.g., up to tens or hundreds of amperes), and / or high voltages, typically above 15V, and more typically 100V or higher (e.g., up to at least 1200V).

[0028] For example, the power semiconductor devices described below may be IGBTs exhibiting a striped trench cell configuration or a cellular trench cell configuration and may be configured for use as power components in low-voltage, medium-voltage, and / or high-voltage applications.

[0029] For example, the term "power semiconductor device" as used herein does not cover logic semiconductor devices used, for example, for storing data, computing data, and / or other types of semiconductor-based data processing.

[0030] Fig. 1 shows, in a schematic and exemplary manner, a section in a horizontal projection of a power semiconductor device 1 according to one or more embodiments. Fig. 2 shows, in a schematic and exemplary manner, a section in a vertical cross section of a power semiconductor device 1 according to one or more embodiments. In the following, reference is made to Fig. 1 and Fig. 2, respectively.

[0031] The power semiconductor device 1 may be an IGBT or a power semiconductor device with a configuration based on an IGBT configuration, such as a reverse conduction (RC) IGBT.

[0032] For example, the power semiconductor device 1 has a semiconductor body 10 coupled to a first load terminal 11 and a second load terminal 12. For example, the first load terminal 11 can be an emitter terminal and the second load terminal 12 can be a collector terminal.

[0033] The semiconductor body 10 may have a drift region 100 of a first conductivity type. The drift region 100 may be n-doped. In one embodiment, the drift region 100 has a dopant density of 2e12 cm -3 ~4e14cm -3 For example, the extent of the drift region 100 along the vertical direction Z and its dopant concentration are selected based on the blocking voltage rating for which the power semiconductor device 1 is designed, as known to those skilled in the art. Within this specification, the term "drift region" is intended to refer to those regions of a power semiconductor device (e.g., an IGBT) that those skilled in the art would generally designate as drift regions or drift zones.

[0034] Furthermore, the first load terminal 11 may be disposed on a front side of the power semiconductor device 1 and may include a front side metallization. The second load terminal 12 may be disposed on a side opposite the front side (e.g., on a back side of the power semiconductor device 1) and may include, for example, a back side metallization. Thus, the power semiconductor device 1 may exhibit a vertical configuration and the load current may be conducted along a vertical direction Z. In another embodiment, each of the first load terminal 11 and the second load terminal 12 may be disposed on a common side of the power semiconductor device 1 (e.g., both on the front side).

[0035] 1 in more detail, the power semiconductor device 1 may further include an active cell region 1-2, an edge termination region 1-3, and a chip edge 1-4. The edge termination region 1-3 may surround the active cell region 1-2. A transition region 1-5 may be disposed between the active cell region 1-2 and the edge termination region 1-3. For example, the transition region 1-5 surrounds the active cell region 1-2. The transition region 1-5 may be surrounded by the edge termination region 1-3.

[0036] In one embodiment, semiconductor body 10 consists essentially of edge termination region 1-3, transition region 1-5, and active cell region 1-2.

[0037] For example, each of edge termination region 1-3, transition region 1-5, and active cell region 1-2 extends along a vertical direction Z from the front side of power semiconductor device 1 through semiconductor body 10 to the back side of power semiconductor device 1. Each of edge termination region 1-3, transition region 1-5, and active cell region 1-2 may include components of semiconductor body 10 as well as components external thereto (e.g., components of first load terminal 11 and / or second load terminal 12).

[0038] Further, in one example, along a lateral direction, there is no overlap between edge termination region 1-3, transition region 1-5, and active cell region 1-2 within semiconductor body 10. Thus, active cell region 1-2 may be completely surrounded by transition region 1-5, and there is no lateral overlap between transition region 1-5 and active cell region 1-2 within semiconductor body 10, e.g., along a first lateral direction X, a second lateral direction Y, and linear combinations thereof. Similarly, transition region 1-5 may be completely surrounded by edge termination region 1-3, and there is no lateral overlap between transition region 1-5 and edge termination region 1-3 within semiconductor body 10, e.g., along a first lateral direction X, a second lateral direction Y, and linear combinations thereof.

[0039] In some embodiments, the transition region 1-5 has a width W of at least 1 μm along a lateral direction (e.g., in / with respect to a first lateral direction X and in / with respect to a second lateral direction Y, and / or in a linear combination of these lateral directions) from the active cell region 1-2 to the edge termination region 1-3. The width W of the transition region 1-5 may thus be the distance between the active cell region 1-2 and the edge termination region 1-3. This (minimum) width W may be along the entire perimeter of the transition region 1-5. The width of the transition region 1-5 may be greater than 1 μm, for example greater than 3 μm, greater than 5 μm, or even greater than 10 μm. Further exemplary features of the transition region 1-5 and edge termination region 1-3 are described below. A portion of the drift region 100 may be along the width W.

[0040] The chip edge 1-4 may laterally terminate the semiconductor body 10, e.g., the chip edge 1-4 may result from, e.g., wafer dicing, and may extend along a vertical direction Z. The edge termination region 1-3 may be disposed between the active cell region 1-2 and the chip edge 1-4, as shown in FIG.

[0041] As used herein, the terms "active cell area" and "edge termination area" are used generically, i.e., active cell areas 1-2 and edge termination areas 1-3 can be configured to provide the principal technical functionality that one skilled in the art would typically associate with them.

[0042] For example, in one embodiment, active cell region 1-2 of power semiconductor device 1 is configured to conduct a majority of the load current between terminals 11 and 12, while edge termination region 1-3 does not conduct the load current but serves a function related to the course of the electric field to ensure blocking capability and safely terminate active cell region 1-2 and transition region 1-5, etc.

[0043] The power semiconductor device 1 has a plurality of IGBT cells 1-1, which are mainly arranged in the active cell region 1-2. For example, most of the plurality of IGBT cells 1-1 of the power semiconductor device 1 are arranged in the active cell region 1-2. The number of the IGBT cells 1-1 may be more than 100, more than 1000, or even more than 10,000. For example, at least 85%, at least 95%, or at least 98% of the total number of the IGBT cells 1-1 are arranged in the active cell region 1-2. In an embodiment, the remaining IGBT cells 1-1 are arranged in the transition region 1-5. As shown in FIG. 1, some of the IGBT cells 1-1 may be arranged completely in the transition region 1-5, and others may be arranged in the active cell region 1-2 and extend into the transition region by their respective lateral ends.

[0044] In one embodiment, as shown diagrammatically and exemplarily in FIG. 1, each IGBT cell 1-1 extends at least partially into a transition region 1-5.

[0045] Thus, for example, some of the IGBT cells 1-1 are arranged or extend into the transition region 1-5, as shown diagrammatically and exemplarily in Fig. 1. In this respect, the transition region 1-5 can also be understood as a form of an active region of the power semiconductor device 1. For example, depending on said composition of the total number of IGBT cells 1-1 arranged or extend into the transition region 1-5, the transition region 1-5 can also be configured to conduct a portion of the load current.

[0046] According to one embodiment, the IGBT cells 1-1 are not disposed within the edge termination region 1-3, but specially configured charge carrier draining cells (not shown in FIG. 1, see FIGS. 6A-6B) may be included within the edge termination region 1-3 to assist in draining charge carriers, for example, immediately prior to and / or during a turn-off operation.

[0047] Each IGBT cell 1-1 may exhibit a striped configuration, as shown diagrammatically in FIG. 1, and the total lateral extent of each IGBT cell 1-1 and its components in one lateral direction, for example along a second lateral direction Y, may substantially coincide with or slightly exceed the total extent of the active cell area 1-2 along this lateral direction.

[0048] In another embodiment, each IGBT cell 1-1 may exhibit a cellular configuration, and the lateral extent of each IGBT cell 1-1 may be substantially smaller than the total lateral extent of the active cell area 1-2.

[0049] However, the embodiments described herein relate to IGBT cells 1-1 with a stripe configuration in the second lateral direction Y, as exemplarily and diagrammatically shown in most of the drawings.

[0050] In one embodiment, each of the multiple IGBT cells 1-1 included in the active cell area 1-2 exhibits the same layout. A section of an exemplary IGBT cell layout will now be described with reference to FIG.

[0051] The configuration of the IGBT cells 1-1 that may be included in the transition region 1-5 may be the same as the configuration of the IGBT cells 1-1 included in the active cell region 1-2. Additionally or alternatively, the transition region 1-5 includes IGBT cells with a different configuration, e.g., in terms of MPT contact technique / neighborhood relationship (see more detailed description below), compared to the IGBT cells 1-1 in the active cell region 1-2.

[0052] Each IGBT cell 1-1 has at least one trench extending into the drift region along a vertical direction Z. Each IGBT cell 1-1 may extend at least partially into the semiconductor body 10 and may have at least a section of the drift region 100. Furthermore, each IGBT cell 1-1 may be electrically connected to a first load terminal 11. Each IGBT cell 1-1 may be configured to conduct a portion of a load current between the terminals 11 and 12 and to block a blocking voltage applied between the terminals 11 and 12.

[0053] To control the power semiconductor device 1, each IGBT cell 1-1 may be provided with a control electrode 141 contained within the control trench 14 and configured to selectively set each IGBT cell 1-1 to one of a conductive state and a blocking state.

[0054] 2, a source region 101 of a first conductivity type may be electrically connected to a first load terminal 11. The source region 101 may be, for example, n-doped with a dopant concentration that is significantly greater than that of the drift region 100.

[0055] Additionally, a channel region 102 of a second conductivity type may separate the source region 101 from the drift region 100, for example, the channel region 102 may separate the source region 101 from the drift region 100, as known to those skilled in the art familiar with the general principles of IGBT construction. The channel region 102 may have a thickness of, for example, 1e15 cm. -3 ~5e18cm -3The transition between the channel region 102 and the drift region 100 may form a first pn junction 1021.

[0056] To connect the source region 101 to the first load terminal 11, a first contact plug 113 can extend along a vertical direction Z from the first load terminal 11 to contact each of the source region 101 and the channel region 102.

[0057] The drift region 100 may extend along the vertical direction Z until it interfaces with a doped contact region 108 that is disposed in electrical contact with the second load terminal 12. The section of the drift region 100 disposed between region 105 (described in more detail below) and the doped contact region 108 may form a major portion of the drift region 100. In an embodiment, the dopant concentration of the drift region 100 is increased in a lower section of the drift region 100 that interfaces with the doped contact region 108, e.g., to form a field stop region of the first conductivity type, as known to those skilled in the art.

[0058] The doped contact region 108 may be formed according to the configuration of the power semiconductor device 1, for example, the doped contact region 108 may be an emitter region of a second conductivity type (e.g., a p-type emitter). To form an RC-IGBT, the doped contact region 108 may be configured with an emitter region of the second conductivity type that is also electrically connected to the second load terminal 12 and interrupted by a small section of the first conductivity type, commonly referred to as an "n-short."

[0059] For example, each IGBT cell 1-1 may include at least one control trench 14 with the control trench electrode 141 and at least one dummy trench 15 with a dummy trench electrode 151, each of the trenches 14 and 15 may extend into the semiconductor body 10 along the vertical direction Z and may include insulators 142 and 152 that insulate each trench electrode 141 and 151 from the semiconductor body 10.

[0060] According to an embodiment, the trench electrodes 141 and 151 of the at least one control trench 14 and the at least one dummy trench 15 may be electrically coupled to the control terminal 13 of the power semiconductor device 1, respectively.

[0061] 2 exemplarily shows that the dummy trench 15 is disposed adjacent to the control trench 14, it is understood that the IGBT cell 1-1 may have one or more other trenches of a type different from the control trench type and the dummy trench type, and the at least one other trench may be disposed adjacent to the control trench 14. For example, the at least one other trench may be a source trench (reference number 16 in other drawings) whose trench electrode (reference number 161 in other drawings) is electrically connected to the first load terminal 11. This will be described in more detail below.

[0062] For example, the control terminal 13 is a gate terminal. Furthermore, the control terminal 13 may be electrically connected to the control trench electrode 141 and may be electrically isolated from the first load terminal 11, the second load terminal 12, and the semiconductor body 10, for example by at least an insulating structure 132.

[0063] In one embodiment, the power semiconductor device 1 can be controlled, for example, by applying a voltage between the first load terminal 11 and the control terminal 13 to selectively set the power semiconductor device 1 to one of a conductive state and a blocking state.

[0064] For example, the power semiconductor device 1 may be connected to a gate-emitter voltage V GE The control is configured to be based on the

[0065] In one embodiment, the dummy trench electrode 151 may also be electrically connected to the control terminal 13 and therefore may receive the same control signal as the control trench electrode 141. In another embodiment, the dummy trench electrode 151 may be -3The dummy trench electrode 151 may be electrically coupled to the control terminal 13 by a resistor having a resistance in the range of 1 ohm to 1 ohm, in the range of 1 ohm to 10 ohms, or in the range of 10 ohms to 100 ohms. In another embodiment, the dummy trench electrode 151 is electrically connected to a second control terminal (not shown) and therefore receives a different control signal than the control trench electrode 141.

[0066] Further, each IGBT cell 1-1 of the power semiconductor device 1 may include at least one active mesa 18 electrically connected to the first load terminal 11, as exemplarily shown in Fig. 2, the active mesa 18 having a source region 101, a channel region 102, and a portion of the drift region 100, and in the active mesa 18, each section of these regions 101, 102, and 100 may be disposed adjacent to a sidewall 144 of the control trench 14. For example, each of the source region 101 and the channel region 102 may be electrically connected to the first load terminal 11, for example, by a first contact plug 113.

[0067] In one embodiment of the power semiconductor device 1, the doped contact region 108 is a p-type emitter, and the active mesa 18 may generally laterally overlap the p-type emitter 108.

[0068] Additionally, the control trench electrode 141 (also referred to herein as control electrode 141) can be configured to receive a control signal from the control terminal 13 and control the load current in the active mesa 18, for example, by inducing an inversion channel in the channel region 102 to set the power semiconductor device 1 in a conductive state. Thus, the transition 181 between the first load terminal 11 and the active mesa 18 can provide an interface through which the load current can pass from the first load terminal 11 into the semiconductor body 10 and / or vice versa.

[0069] In one embodiment, induction of an inversion channel in the active mesas 18 is possible, for example, when an inversion channel threshold voltage is exceeded within each active mesa 18. For example, the inversion channel threshold voltage depends on at least one of the work function of the control electrode 141, the dopant concentration of the source region 101, the dopant concentration of the channel region 102, the associated thickness of the trench insulator 142, and the dielectric constant of the trench insulator 142.

[0070] In one embodiment, all of the active mesas 18 of the power semiconductor device 1 are configured with the same inversion channel threshold voltage.

[0071] For example, the control electrodes 141 of all the IGBT cells 1 - 1 included in the active cell region 1 - 2 may be electrically connected to the control terminal 13 .

[0072] In addition to the active mesa 18, each IGBT cell 1-1 of the power semiconductor device 1 may comprise at least one inactive mesa 19, for example arranged adjacent to at least one dummy trench 15, and a transition 191 between the first load terminal 11 and the inactive mesa 19 provides electrical insulation at least for charge carriers of the first conductivity type.

[0073] In an embodiment, the IGBT cell 1-1 may be configured to prevent the load current from crossing the transition 191 between the inactive mesa 19 and the first load terminal 11. For example, the inactive mesa 19 does not allow the induction of an inversion channel. In contrast to the active mesa 18, according to an embodiment, the inactive mesa 19 does not conduct the load current during the conductive state of the power semiconductor device 1. For example, the inactive mesa 19 may be considered as an obsolete mesa that is not used for the purpose of carrying the load current.

[0074] In a first embodiment of the inactive mesa 19, the inactive mesa 19 is not electrically connected to the first load terminal 11 but is electrically isolated therefrom, for example by an insulating layer 112. In this embodiment, the transition 191 between the first load terminal 11 and the inactive mesa 19 provides electrical isolation not only for charge carriers of the first conductivity type but also for charge carriers of the second conductivity type. To this end, in a variant, the inactive mesa 19 does not have any section of the source region 101 and any section of the channel region 102, as shown in FIG. 2, and the inactive mesa 19 is not contacted by a contact plug (see reference number 111). In another variation, the passive mesa 19 may be configured similarly to the active mesa 18, for example by also having a section of the source region 101 and / or a section of the channel region 102, the difference from the active mesa 18 including that neither the section of the source region 101 (if present) nor the section of the channel region 102 of the passive mesa 19 is electrically connected to the first load terminal 11. According to the first embodiment of the passive mesa 19, the current never crosses the transition 191.

[0075] In a second embodiment of the inactive mesa 19, the inactive mesa 19 may be electrically connected to the first load terminal 11, and a transition 191 between the first load terminal 11 and the inactive mesa 19 provides electrical isolation only for charge carriers of the first conductivity type, but not for charge carriers of the second conductivity type. That is, in this second embodiment, the inactive mesa 19 may be configured to allow a current of charge carriers of the second conductivity type (e.g., hole current) to pass through said transition 191. For example, depending on the potential of the dummy trench electrode 151, such a hole current may only occur temporarily, for example, to reduce the total charge carrier concentration present in the semiconductor body 10, for example, just before performing a turn-off operation. In an embodiment, this may also occur with respect to passive mesas 19 that have electrical insulation only for charge carriers of the first conductivity type in a reverse-conducting IGBT configuration, in which the load current is temporarily transmitted through these passive mesas 19 in diode mode operation, and the backside (see doped contact region 108) is structured to have both an emitter of the second conductivity type and an emitter of the first conductivity type (referred to above as "n-short"). As mentioned above, in this second embodiment, the passive mesas 19 may be electrically connected to the first load terminal 11. For example, a doped contact region (not shown) of the second conductivity type (different from the electrically floating barrier region 105 described below) of the passive mesa 19 may be electrically connected to the first load terminal 11, for example by one of the first contact plugs 113, as shown diagrammatically and exemplarily in FIG. 3B. A doped contact region of the second conductivity type (not shown) may separate the section of drift region 100 present in passive mesa 19 from first load terminal 11. For example, according to a second embodiment of passive mesa 19, there is no region doped with a dopant of the first conductivity type in passive mesa 19 that is electrically connected to first load terminal 11.

[0076] The above-exemplified first and second embodiments of the inactive mesa 19 may make it possible to provide a configuration of the IGBT cell 1-1 that prevents the load current from crossing the transition 191 between the inactive mesa 19 and the first load terminal 11.

[0077] Inactive mesa 19 may be laterally confined by control trench 14 and dummy trench 15, or by dummy trench 15 and another trench type (described further below). Another optional aspect of inactive mesa 19 is described below. For example, in one example, dummy trench electrode 151 may be electrically connected to control terminal 13, but according to an embodiment, dummy trench electrode 151 is not configured to control the load current in inactive mesa 19 because inactive mesa 19 does not allow an inversion channel to be induced within inactive mesa 19.

[0078] The power semiconductor device 1 may further comprise an electrically floating barrier region 105 of a second conductivity type (hereinafter also simply referred to as a "barrier region") as shown in a schematic and exemplary manner in Fig. 2. Exemplary features of this barrier region 105 will be further described in more detail below. Before a more detailed description of the barrier region 105, an exemplary embodiment of a micropatterned trench structure (MPT) of the power semiconductor device 1 will be described.

[0079] With reference to the embodiment shown in FIGS. 3A-3B, each IGBT cell 1-1 in the active cell region 1-2 may further have at least one source trench 16 extending into the semiconductor body 10 along the vertical direction Z and including an insulator 162 insulating the source trench electrode 161 from the semiconductor body 10, the source trench electrode 161 being electrically connected to the first load terminal 11. For example, the at least one source trench 16 is disposed between the control trench 14 and the dummy trench 15 as shown in FIGS. 3A-3B. In an embodiment, each IGBT cell 1-1 may have two or more source trenches 16, for example two source trenches 16 (see FIG. 4A) or four source trenches 16 (see FIG. 6A), and each trench electrode 161 of these source trenches may be electrically connected to the first load terminal 11. For example, the two or more source trenches 16 are disposed between the control trench 14 on one side and the dummy trench 15 on the other side.

[0080] In some embodiments, the active mesa 18 may be laterally confined by the control trench 14 and the source trench 16. For example, the sidewall 144 of the control trench 14 and the sidewall 164 of the source trench 16 constrain the active mesa 18 along a first lateral direction X. The active mesa 18 may be configured as exemplarily described with respect to FIG. 2 , for example, the first contact plug 113 may electrically connect each of the sections of the channel region 102 and the source region 101 to the first load terminal 11.

[0081] Further, according to the embodiment shown in FIGS. 3A-3B and 4A-4B, each IGBT cell 1-1 in the active cell region 1-2 may have two or more inactive mesas 19, where at least one of the inactive mesas 19 may be laterally bounded by a source trench 16 and a dummy trench 15. Another inactive mesa 19 may be laterally bounded by two source trenches 16. Another inactive mesa 19 may be laterally bounded by two dummy trenches 15. Yet another inactive mesa 19 may be laterally bounded by one of the dummy trenches 15 and a control trench 14. As shown, each inactive mesa 19 may have a respective section of the channel region 102, where in some embodiments, these sections are not electrically connected to the first load terminal 11 but are electrically isolated from the first load terminal 11, for example by an insulating layer 112, as described above.

[0082] 3A-3B, each IGBT cell 1-1 of the active cell area may further comprise, in addition to or instead of the at least one source trench 16, at least one floating trench 17 extending into the semiconductor body 10 along the vertical direction Z and including an insulator 172 insulating the trench electrode 171 from the semiconductor body 10, the trench electrode 171 of the floating trench 17 being electrically floating. In an embodiment, the trench electrode 171 of the floating trench 17 is not electrically connected to any of the first load terminal 11, the second load terminal 12, the control terminal 13 and the section of the semiconductor body 10.

[0083] In an embodiment, the electrically floating trench electrode 171 is connected to a predefined potential (e.g., the potential of a contact or the potential of another semiconductor region) by a high ohmic resistance connection. For example, the high ohmic connection temporarily decouples the potential of the electrically floating trench electrode 171 from a predefined potential during a switching operation. The decoupling may occur on the time scale of the switching operation (e.g., for at least 10 ns, or at least 100 ns, or at least 10 μs). For example, the resistance of the high ohmic connection is greater than 1e2Ω or greater than 1e6Ω. In an embodiment, the ohmic resistance between the first load terminal 11 and the electrically floating trench electrode 171, measured, for example, in a quiescent state, is greater than 1e2Ω or greater than 1e6Ω.

[0084] For example, at least one floating trench 17, if present, may be disposed between the control trench 14 and the dummy trench 15. Further, as shown in FIGS. 3A-3B, the IGBT cell 1-1 may additionally have the at least one source trench 16, and the source trench 16 and the floating trench 17 may be disposed between the control trench 14 on one side and the dummy trench 15 on the other side. In an embodiment, the active mesa 18 is laterally bounded by the sidewall 144 of the control trench 14 and the sidewall 164 of the source trench 16. The inactive mesa 19 may be laterally bounded by at least two of the group: the sidewall 164 of the source trench 16, the sidewall 174 of the floating trench 17, and the sidewall 154 of the dummy trench 15.

[0085] Thus, according to one embodiment, each IGBT cell 1-1 in the active area has at least one control trench 14, at least one dummy trench 15, at least one source trench 16, and optionally at least one floating trench 17, where at least one source trench 16 (if present) and at least one floating trench 17 (if present) may be located between the control trench 14 and the dummy trench 15.

[0086] In an embodiment, the power semiconductor device 1 may be an IGBT, and each IGBT cell 1-1 of its active area 1-2 may exhibit a micro-patterned trench (MPT) structure.

[0087] For example, each or at least a majority of the trenches 14, 15, 16, 17 that may be included in the IGBT cell 1-1 may exhibit equal spatial dimensions and may be arranged according to a regular pattern. For example, each of the trenches 14, 15, 16, 17 may exhibit a depth along a vertical direction Z in the range of 3 μm to 8 μm and a width along a first lateral direction X in the range of 0.4 μm to 1.6 μm. The trenches 14, 15, 16, 17 may be formed according to a first layout having a first pitch, the first layout defining each of the trench widths and mesa widths.

[0088] Furthermore, each or at least the majority of the trench electrodes 141, 151, 161, 171 of all trenches 14, 15, 16, 17 that may be included in the IGBT cell 1-1 may exhibit equal spatial dimensions, for example, regarding their total extension along the vertical direction (terminated by the respective trench bottoms 145, 155, 165, 175) and in the first lateral direction (i.e. the trench width terminated by the respective sidewalls 144, 154, 164, 174) and / or regarding the dimensions of the insulators 142, 152, 162, 172. Furthermore, each of the trenches 14, 15, 16, 17 that may be included in the IGBT cell 1-1 may be equally spaced along the first lateral direction X. For example, each of the mesas 18 and 19 of the IGBT cell 1-1 may exhibit the same width, which may be in the range of 0.1 μm to 0.3 μm, in the range of 0.3 μm to 0.8 μm, or in the range of 0.8 μm to 1.4 μm.

[0089] Furthermore, portions of the trenches 14, 15, 16, 17 that may be included in the IGBT cell 1-1 may extend into the barrier region 105 by, for example, at least 100 nm, at least 500 nm, or at least 1000 nm. This aspect is also described in more detail below.

[0090] For the following description, these abbreviations may apply. G=Control trench 14 D = Dummy trench 15 S=Source trench 16 F=Floating trench 17 k=active mesa 18 o=Inactive Mesa 19

[0091] As described above, the power semiconductor device 1 may have multiple identically configured IGBT cells 1-1 within the active cell area 1-2. In one embodiment, using the abbreviations introduced above, an exemplary neighborhood relationship within each IGBT cell 1-1 of the active cell area 1-2 can be expressed as follows: oDoSoSkGkSoSoD

[0092] Without being limited to this example proximal relationship (also referred to herein as a contact scheme), embodiments according to many of the remaining figures are based on the example proximal relationship identified above. Thus, it is to be understood that the IGBT cell 1-1 does not necessarily have to have a floating trench 17 according to some embodiments.

[0093] For example, in another embodiment, each IGBT cell 1-1 has only one or more control trenches 14 and one or more source trenches 16. Moreover, in such an embodiment, each IGBT cell 1-1 has only one or more active mesas 18 and no passive mesas 19. For example, in this case, the contact scheme can be "kGkS" or the like. In this case, any trench electrode connected to the control terminal 13 actually controls the active mesas, for example by controlling the respective inversion channel, and therefore there are no dummy trenches. In yet another embodiment, the IGBT cell 1-1 has only one or more control trenches 14 and one or more active mesas, and no passive mesas, dummy trenches, source trenches, or floating trenches.

[0094] As indicated above, regardless of the contact scheme, the power semiconductor device 1 may further comprise an electrically floating barrier region 105 (hereinafter also simply referred to as the "barrier region") of the second conductivity type.

[0095] In one embodiment, the barrier region 105 is configured to provide a conductive path between a section of the active mesa 18 and the bottom 155 of the dummy trench 15. Thus, the barrier region 105 may be configured to direct the electrical potential of the section of the active mesa 18 to the bottom 155 of the dummy trench 15. For example, the barrier region 105 extends into the active mesa 18 to interface with the bottom 155 of the dummy trench 15, extends therefrom below the bottom 165 of the source trench 16, and extends across the inactive mesa 19.

[0096] As described above, the power semiconductor device 1 may have a plurality of IGBT cells 1-1, for example, most of which are included in the active cell region 1-2. For example, the barrier region 105 connects the inactive mesas 19 included in the plurality of IGBT cells 1-1 in the active region 1-2 to each other. For example, for this purpose, the barrier region 105 may extend partially into each inactive mesa 19. The barrier region 105 may further extend at least partially into a part of the active mesa 18. Each dummy trench bottom 155 may extend into the barrier region 105. Thereby, the barrier region 105 may guide the potential present in the active mesa toward the dummy trench electrode 151.

[0097] As described in more detail below, the barrier region 105 may laterally overlap some portions of the active mesas 18 and may not laterally overlap other portions of the active mesas 18. For example, to this end, the barrier region 105 may exhibit a lateral structure formed by one or more passages 1053, as described in more detail below, and / or the barrier region 105 may be laterally displaced from the edge termination region 1-3 by a transition region 1-5 (as described above), which may comprise one or more active mesas 18.

[0098] Thus, in more general terms, according to an embodiment, a power semiconductor device 1 is presented having a first load terminal 11 and a second load terminal 12. The power semiconductor device 1 is configured to conduct a load current along a vertical direction Z between said terminals 11 and 12 and includes a drift region 100 of a first conductivity type, a plurality of IGBT cells 1-1, each IGBT cell 1-1 extending into the drift region 100 along the vertical direction Z and including a plurality of trenches (e.g. 14, 15, 16) that laterally limit at least one active mesa 18, the at least one active mesa 18 including an upper section 100-1 of the drift region 100, and an electrically floating barrier region 105 of a second conductivity type that is spatially limited in and with respect to the vertical direction Z by the drift region 100.

[0099] The total amount of all active mesas 18 can be divided into a first component and a second component, where the first component does not laterally overlap the barrier region 105, and the second component laterally overlaps the barrier region 105. For example, the first component of the active mesas 18 laterally overlaps at least one passage 1053 of the barrier region 105 (see further below), or another section of the drift region 100 where no barrier region 105 is present (e.g., in transition regions 1-5). In contrast, the second component of the active mesas 18 laterally overlaps the barrier region 105. For example, the load current conducted by the second component traverses the barrier region 105.

[0100] In an embodiment, the first component is configured to carry a load current at least in the range of 0% to 100% of a nominal load current for which the power semiconductor device is designed, and the second component may be configured to carry the load current when the load current exceeds at least 0.5% of the nominal load current.

[0101] Thus, a first portion of active mesa 18 may be considered, for example, as an "ignition quantity" that begins conducting load current during turn-on of power semiconductor device 1, while the second portion initially remains inactive. Then, if, for example, only if the load current exceeds a threshold value (e.g., at least 0.5%) of the nominal load current (this threshold may be higher than 0.5%, e.g., higher than 1%, e.g., at least 5% or at least 10%), barrier region 105 may become more conductive such that the second portion can also carry the load current.

[0102] For example, for small load currents, less than 10%, or less than 1%, or less than 0.5% of the nominal load current of the power semiconductor device 1, the active mesas 18 (i.e., the first component of the total amount) that do not laterally overlap with the barrier region 105 can function as emitters of charge carriers of the first conductivity type, for example, thereby avoiding snapback of the transfer or output characteristics of the power semiconductor device 1. For larger load currents (greater than 0.5%, 1%, 5%, or 10% of the nominal load current), the upper pn junction 1051 is in a forward bias mode with respect to charge carriers of the first conductivity type. In this case, this can also allow charge carriers of the first conductivity type to be emitted by the active mesas 18 (i.e., the second component of the total amount) that laterally overlap with the barrier region 105.

[0103] As already explained above, each active mesa 18 can be configured to induce an inversion channel in the respective active mesa 18. For example, all active mesas 18 are configured with the same inversion channel threshold voltage. Thus, the delay between the start of load current conduction in the second portion and the start of load current conduction in the first portion, as exemplarily explained above (whereby, for example, during turn-on, the second portion of the active mesa 18 that laterally overlaps the barrier region 105 transmits a load current only if the load current exceeds said threshold by, for example, at least 0.5%), is not caused by, for example, providing a control signal to the control electrode controlling the first portion that is different from the control signal provided to the control electrode controlling the second portion, nor by a difference between the inversion channel threshold voltages. More precisely, according to an embodiment, the first portion and the second portion are provided with the same control signal and configured with the same inversion channel threshold voltage, and said delay is achieved only by appropriately positioning and laterally structuring the barrier region 105.

[0104] Thus, in one embodiment, the only differentiating feature between a first portion of active mesa 18 and a second portion of active mesa 18 is that the first portion does not laterally overlap barrier region 105, and the second portion laterally overlaps barrier region 105. For example, this may achieve the delay between the onset of load current conduction described in the exemplary manner above.

[0105] For example, when the load current is conducted by both components, the load current may be distributed between the components according to the ratio between the components. In an embodiment, when the load current exceeds 50% of the nominal load current, the ratio between the first load current component conducted by the first component of active mesas 18 and the second load current component conducted by the second component of active mesas 18 may be within at least 10% of the ratio between the first and second components, or the ratio between the first load current component conducted by the first component of active mesas 18 and the second load current component conducted by the second component of active mesas 18 may be (at least substantially) the same as the ratio between the first and second components.

[0106] The electrically floating barrier region 105 may be spatially limited in and with respect to the vertical direction Z by the drift region 100. The barrier region 105 may thus form an upper pn junction 1051 and a lower pn junction 1052 together with the drift region 100, the lower pn junction 1052 being located below the bottom 155 of the dummy trench 15. For example, the upper pn junction 1051 is located in the inactive mesa 19 and thus above the bottom 155 of the dummy trench 15. The distance between the first pn junction 1021 and the upper pn junction 1051 along the vertical direction Z may be at least 0.5 μm. Thus, according to an embodiment, the two pn junctions 1021 and 1051 are not identical to each other and are separated from each other by the drift region 100.

[0107] That is, the barrier region 105 may be separated from the channel region 102 by at least a portion of the drift region 100. For example, the barrier region 105 may be bounded along the vertical direction Z by an upper section 100-1 of the drift region 100 on one side and a lower section 100-2 of the drift region 100 on the other side, said upper section 100-1 forming the transition to the channel region 102 of the IGBT cell 1-1. The lower section 100-2 may extend along the vertical direction Z until it interfaces with a doped contact region 108 (which may be a p-type emitter as indicated above).

[0108] In an embodiment, the barrier region 105 does not contact other semiconductor regions of the second conductivity type, but is separated from them by, for example, a section of the drift region 100. For example, the distance from the barrier region 105 to the nearest other semiconductor region of the second conductivity type is at least 1 μm, or at least 2 μm. Thus, for example, there is no p-type connection between the channel region 102 and the barrier region 105, and there is also no p-type connection between the barrier region 105 and well regions 109 (discussed further below) of the edge termination regions 1-3. There may be a portion of the drift region 100 along the distance.

[0109] For all the above-mentioned embodiments, according to one variant, the sections of the drift region 100 contained within the mesas 18 and 19, such as the upper section 100-1 (see description below) forming the first pn junction 1021 with the channel region 102 and the upper pn junction 1051 with the barrier region 105, may exhibit a dopant concentration that is at least twice as large as the dopant concentration of the sections of the drift region 100 arranged below the barrier region 105 (such as the lower section 100-2 of the drift region 100 forming the lower pn junction 1052 with the barrier region 105).

[0110] The sections of drift region 100 contained within mesas 18 and 19 (upper section 100-1) are each 1e14 cm -3 ~4e17cm -3Maximum dopant concentration in the range (e.g., at least 1e16 cm -3 For example, the section of drift region 100 contained within mesas 18 and 19 and which may exhibit the increased dopant concentration may also be referred to as an "n-barrier region." For example, the dopant concentration of the section of drift region 100 contained within mesas 18 and 19 is selected such that upper pn junction 1051 remains at a level slightly above trench bottoms 145 and 155.

[0111] Now, referring to FIG. 4B, according to a variant, the increased dopant concentration in the upper section (section 100-1) of the drift region 100 is only provided locally. For example, only one of the active mesas 18, or only a few of the active mesas 18, or all of the active mesas 18 have a local n-barrier region 100-3. For example, each of the local n-barrier regions 100-3 is arranged above the barrier region 105 or the barrier region passage 1053 and below the respective channel region 102. For example, each n-barrier region 100-3 is arranged in contact with the respective channel region 102 and extends therefrom down along the vertical direction Z until it interfaces with the (p)barrier region 105 or, if the (p)barrier region 105 is not present, until it terminates at a corresponding Z-direction level / shows the passage 1053 at the respective location. Along the first lateral direction X, each n-barrier region 100-3 may fill the respective active mesa 18. Each n-barrier region 100-3 may exhibit a maximum dopant concentration at least twice as large as the dopant concentration of the lower section 100-2 of the drift region 100. For example, each n-barrier region 100-3 may exhibit a maximum dopant concentration of at least 1e14 cm -3 ~4e17cm -3 Maximum dopant concentration in the range (e.g., at least 1e16 cm -3In contrast, according to this variant, the upper section 100-1 of the drift region contained within the passive mesa 19 may exhibit a maximum dopant concentration substantially equal to the maximum dopant concentration of the lower section 100-2 of the drift region 100, e.g., there is no n-barrier region 100-3 provided within the passive mesa 19.

[0112] According to a variant (not shown), the upper pn junction 1051 may be arranged below the bottom 155 of the dummy trench 15 and below said bottom 145 of the control trench 14 (this example is not shown). In this case, the distance along the vertical direction Z between the bottom 155 of the dummy trench 15 and the upper pn junction 1051 may be less than 3 μm, less than 2 μm, or less than 1 μm.

[0113] For example, the barrier region 105 exhibits a thickness along the vertical direction Z in the range of 0.1 μm to 0.5 μm, in the range of 0.5 μm to 1 μm, or in the range of 1 μm to 5 μm.

[0114] The common vertical extension along the vertical direction Z between the barrier region 105 and the trenches extending into the barrier region 105 can be, for example, in the range of 50 nm to 3000 nm. In some embodiments, the barrier region 105 extends further along the vertical direction Z (i.e., down to a deeper level within the semiconductor body 10) than all of the trenches or at least a majority of the trenches.

[0115] Barrier region 105, according to some embodiments, may exhibit a resistivity greater than 10 Ωcm and less than 1000 Ωcm (eg, greater than 100 Ωcm and less than 500 Ωcm).

[0116] The barrier region 105 is made of boron (B), aluminum (Al), difluoroboryl (BF 2 ), boron trifluoride (BF 3), or combinations thereof. Each of these exemplary materials may function as a dopant material, according to certain embodiments. Furthermore, each of these exemplary materials may be implanted into semiconductor body 10 to form barrier region 105.

[0117] For example, the barrier region 105 is 1e14 cm -3 Larger and 4e14cm -3 It shows a smaller electrically active dopant concentration, e.g., about 1e16 cm -3 may be present with an extension along the vertical direction Z of at least 0.5 μm or at least 1 μm. Furthermore, the barrier region 105 may exhibit a maximum dopant concentration in the region where the bottom 155 of the dummy trench 15 extends into the barrier region 105.

[0118] In one embodiment, the dopant concentration in the barrier region 105 is less than the dopant concentration present in the channel region 102. For example, the maximum dopant concentration in the barrier region 105 is within the range of 1% to 80% of the dopant concentration present in the channel region 102.

[0119] An exemplary course of the dopant concentration (CC) of the second conductivity type dopant along the vertical direction Z is shown in FIG. 5, where the solid line indicates the dopant concentration of the second conductivity type (N A ), and the dotted line indicates the first conductivity type dopant concentration (N D ) is shown. Thus, in the upper section, for example, close to the first load terminal 11, the dopant concentration N A may be relatively high to provide a dopant concentration N Adecreases rapidly in the section of the mesa where the drift region 100 (the upper section 100-1) is present. The transition between the channel region 102 and the upper section 100-1 of the drift region 100 may form the first pn junction 1021 in each mesa. If the inactive mesa 19 does not have a section of the channel region 102, the value of the dopant concentration CC between the beginning of the first load terminal 11 and the beginning of the barrier region 105 will accordingly be a value corresponding to less than or equal to the local minimum value LM shown in FIG. 5. In this case, for example in front of each trench bottom 155, the dopant concentration N A increases (again) to form the barrier region 105. The transition between the upper section 100-1 of the drift region 100 and the barrier region 105 forms the upper pn junction 1051. As shown, the barrier region 105 may exhibit a dopant concentration maximum CCM at a depth level substantially equal to the level at which each trench terminates (e.g., at the level of the bottom 155 of the dummy trench 15). The dopant concentration N A decreases again to form a lower pn junction 1052 with the lower section 100-2 of the drift region 100.

[0120] For example, the electrically floating barrier region 105 is not electrically connected to a predefined potential (e.g., to neither the first load terminal 11, the second load terminal 12, nor the control terminal 13). In an embodiment, the electrically floating barrier region 105 is connected to a predefined potential (e.g., to the potential of a contact or to the potential of another semiconductor region) by a high ohmic resistance connection. For example, the high ohmic connection temporarily decouples the potential of the barrier region 105 from a predefined potential during a switching operation. The decoupling may occur on the time scale of the switching operation (e.g., over at least 10 ns, or at least 100 ns, or at least 10 μs). For example, the resistance of the high ohmic connection is greater than 1e2Ω or greater than 1e6Ω.

[0121] In an embodiment, the ohmic resistance between the first load terminal 11 and the barrier region 105, for example measured under quiescent conditions, is greater than 1e2Ω or greater than 1e6Ω.

[0122] For example, to ensure that barrier region 105 is electrically floating, barrier region 105 does not extend into transition region 1-5; for example, barrier region 105 may be located only in active cell region 1-2 as shown in FIG.

[0123] For example, barrier region 105 does not extend into transition region 1-5. As explained above, transition region 1-5 may comprise some of the IGBT cells 1-1 and therefore may be considered an active region of power semiconductor device 1 (i.e., the part of the power semiconductor device that also conducts some of the load current).

[0124] In some embodiments, transition regions 1-5 do not include either an electrically floating section of barrier region 105 or another electrically floating semiconductor region of the second conductivity type, for example, there are no floating p-doped semiconductor regions included within transition regions 1-5.

[0125] As explained above, the barrier region 105 is electrically floating, and at the same time, the barrier region 105 can be arranged in contact with at least a portion of the trench of the IGBT cell 1-1. The barrier region 105 can thus interface with the trench insulators 142, 152, and 162. For example, at least the source trench bottom 165 and / or at least the dummy trench bottom 155 extend into the barrier region 105 such that, for example, the source trench electrode 161, the dummy trench electrode 151, and the barrier region 105 have a common vertical extension of at least 100 nm, at least 50 nm, or at least 1000 nm along the vertical direction Z (the barrier region 105 can extend further along the vertical direction Z compared to the trench bottom).

[0126] This aspect is explained in more detail with respect to Figures 6A-6C, which exemplarily and diagrammatically show a section of a vertical cross section of a power semiconductor device 1 according to one or more embodiments, where Figure 6B shows a continuation of the section of Figure 6A along a first lateral direction X, and Figure 6C shows a continuation of the section of Figure 6B along the first lateral direction X.

[0127] Starting from Fig. 6A, the first load terminal 11 may be partially covered by an insulating structure 80 (e.g., encapsulation). A plurality of said IGBT cells 1-1 are arranged within the active cell area 1-2, each IGBT cell 1-1 exhibiting said exemplary contact scheme / neighborhood relationship, i.e. "oDoSoSkGkSoSoD". In another embodiment, a different contact scheme is used.

[0128] The active mesa 18 is electrically connected to the first load terminal 11 by the first contact plug 113, and the source electrode 161 of the source trench 16 is electrically connected to the first load terminal 11 by a second contact plug 115. The control electrode 141 of the control trench 14 and the dummy electrode 151 of the dummy trench 15 are electrically connected to the control terminal 13, for example, by a gate runner 135 (see FIG. 6B).

[0129] In the transition region 1-5, another IGBT cell 1-1, which may also exhibit the contact scheme "oDoSoSkGkSoSoD" or a different contact scheme, is arranged. Further, along the first lateral direction X, another dummy trench 15, another plurality of source trenches 16 and a control trench 14 are arranged, and adjacent to the control trench 14, two active mesas 18 are arranged. Thus, a part of the load current can be conducted in the transition region 1-5.

[0130] The trench pattern may continue along the first lateral direction X in the edge termination regions 1-3, and such trenches in the edge termination regions 1-3 may be source trenches 16. The mesas between the source trenches 16 may be electrically connected to the first load terminal 11 by first contact plugs 113. Thus, the source trenches 16 and the mesas between these trenches that are electrically connected to the first load terminal 11 may form charge carrier drainage cells.

[0131] Within edge termination region 1-3, a semiconductor well region 109 of a second conductivity type may further be disposed. For example, well region 109 is p-doped and extends from insulating layer 112 further along vertical direction Z compared to the total extent of trenches 14, 15, 16, and 16. For example, well region 109 extends to approximately the same depth into the semiconductor body as barrier region 105.

[0132] 6A, the barrier region 105 may terminate at the transition between the active cell region 1-2 and the transition region 1-5. For example, the barrier region 105 is disposed only in the active cell region 1-2 and does not extend into either the transition region 1-5 or the edge termination region 1-3.

[0133] Meanwhile, the well region 109 is disposed only in the edge termination region 1-3 and does not extend into either the transition region 1-5 or the active cell region 1-2. As explained above, the transition region 1-5 may completely surround the active cell region 1-2 and may be completely surrounded by the edge termination region 1-3. The minimum width W of the transition region 1-5, i.e., the minimum distance between the barrier region 105 and the well region 109, is 1 μm, and the minimum width may be greater than 1 μm (e.g., 3 μm, 5 μm, or even greater than 10 μm or 20 μm). A portion of the drift region 100 may be present along the width W.

[0134] As exemplarily shown, the well region 109 is electrically connected to the first load terminal 11, for example, by the first contact plug 113, so that the potential within the well region 109 may be substantially the same as the potential of the first load terminal 11. Thus, the transition region 1-5 and its minimum width W can provide a better assurance that the barrier region 105 is in fact electrically floating.

[0135] In one embodiment, the well region 109 is between 1e15 and 5e18 cm -3 The well region 109 may extend along the vertical direction Z, for example further than the trenches 14, 15, 16, for example down to a level that substantially corresponds to a lower pn junction 1052 formed between the barrier region 105 and the drift region 100.

[0136] 6B, the well region 109 may extend along a first lateral direction X until it interfaces with a semiconductor VLD (lateral doping variation) or JTE (junction termination extension structure) region 107. The VLD / JTE region 107 may also be of a second conductivity type and have a lower dopant concentration than the well region 109. In general, the concept of such a VLD or JTE region in a termination structure of a power semiconductor device is known to those skilled in the art, and therefore a more detailed description of the function of the VLD or JTE region 107 is not provided herein. For safety reasons, the VLD / JTE region 107 may be isolated from the potential of the gate runner 135 by a thick oxide layer 85, which may be a LOCOS layer or a buried field oxide. Alternatively, other termination concepts known to those skilled in the art may be used.

[0137] For example, gate runner 135 laterally overlaps well region 109 and VLD region 107, respectively.

[0138] Referring now to FIG. 6C, the VLD region 107 may terminate at a position in the edge termination region 1-3 well before the chip edge 1-4. The region between the chip edge 1-4 and the termination of the VLD region 107 may essentially be constituted by an unstructured section of the drift region 100, where a channel stop arrangement may be provided close to the chip edge 1-4. In general, the concept of a channel stop arrangement close to the chip edge of a power semiconductor device is also known to those skilled in the art. For example, according to the embodiment exemplarily shown in FIGS. 6A-6C, a collector contact 121 is provided to indicate the potential of the second load terminal 12 to form the channel stop arrangement. Connected to this is an electrode of a trench 125. For example, the trench 125 follows the course of the termination region 1-3 to also completely surround the transition region 1-5. Further trenches 1251 and 1252 may be provided to form the channel stop arrangement. On either side of the trenches 125, 1251, and 1252 may be semiconductor regions 127 of a second conductivity type.

[0139] In some embodiments, the barrier region 105 comprises a laterally structured structure. For example, the barrier region 105 is formed as a laterally structured layer that extends through the entire active cell region 1-2 until it interfaces with the transition region 1-5. Thus, the barrier region 105 may be disposed only within the active cell region 1-2 and does not extend into the transition region 1-5. Within the active cell region 1-2, the barrier region 105 is laterally structured.

[0140] For example, IGBT cell 1-1 may be configured with a lateral structure according to a first layout having a first pitch, and the lateral structure of barrier region 105 may be configured according to a second layout having a second pitch that is at least twice as large as the first pitch. Thus, the lateral structure of barrier region 105 may be coarser than a trench pattern.

[0141] The lateral structure of the barrier region 105 may be formed by a plurality of pass-through passages 1053 (hereinafter also simply referred to as "passages"). Such a concept is generally and exemplarily illustrated in Figure 7. For example, according to the second layout, each pass-through passage 1053 may exhibit a maximum lateral extent at least twice as large as the minimum trench width and / or minimum mesa width formed according to the first layout.

[0142] In an embodiment, the one or more passages 1053 provide a load current path for currents less than 10% or less than 1% of the nominal load current of the power semiconductor device 1. For larger load currents, the entire active cell area 1-2 carries the load current, regardless of whether portions overlap the barrier region 105 on both sides. Thus, according to an embodiment, a load current less than 10% or less than 1% of the nominal load current does not need to cross the barrier region 105, but may pass through the one or more passages 1053. For example, the passages 1053 are shown in a vertical projection (along the vertical direction Z) of an inversion channel that may be induced in the active mesa 18 (e.g., in a vertical projection of the source region 101) in the absence of the barrier region 105.

[0143] The possible effects described in the previous paragraph are also described in more detail above with respect to a first component of the total amount of active mesas 18 that do not laterally overlap barrier regions 105, and a second component of the total amount of active mesas 18 that do laterally overlap barrier regions 105.

[0144] In one embodiment, one or more passages 1053 are positioned and / or dimensioned to laterally overlap at least a subset of the source regions 101 .

[0145] For example, the barrier regions 105 may form a "carpet" within the active cell region 1-2 and disposed, for example, substantially parallel to each of the first and second load terminals 11, 12 and separated from each of these terminals 11, 12 by at least the drift region 100. Such a carpet-like configuration of the barrier regions 105 may be positioned within the semiconductor body 10 such that the trench bottoms 145 and 155 and / or 165 may extend into the barrier regions 105.

[0146] The passages 1053 may laterally overlap one or more of the active mesas 18. Thus, following the visual vocabulary introduced above, the barrier region 105 may be realized as a "patchwork carpet", with one or more passages 1053 completely filling a section of the drift region 100. The dimensions, location and number of the passages 1053 may be selected according to, for example, the cell configuration.

[0147] The barrier region 105 may be realized as a continuous barrier layer (e.g., as the "carpet") within the active cell region 1-2 of the power semiconductor device 1. As indicated above, each of the dummy trench bottom 155 and / or the control trench bottom 145 and / or the source trench bottom 165 may extend into the barrier region 105, e.g., the dummy trench 15 and / or the control trench 14 and / or the source trench 16 may extend into the barrier region 105 by at least 100 nm, at least 500 nm, or at least 1000 nm.

[0148] 7, for example, according to variant A, the passages may comprise a stripe arrangement arranged substantially perpendicular to the stripe arrangement of the IGBT cells 1-1. In another embodiment, a central pass-through passage 1053 of large extension is provided (variant C). According to variants B and D, a number of smaller passages 1053 are provided, which may be distributed according to various patterns.

[0149] Each of the plurality of passages 1053 may be filled by a section of the drift region 100. Thus, within the passages 1053 there may be an n-doped semiconductor region exhibiting a dopant concentration that corresponds to the dopant concentration of the drift region. In another embodiment, described in more detail further below, some or all of the passages 1053 may be filled by (deeper) trenches.

[0150] Some embodiments include a barrier region 105 where the pass-through passage 1053 is positioned and dimensioned according to a predetermined design rule. For example, the second layout may be configured according to this design rule. The position and dimension of the passage 1053 may have a large effect on the dynamic behavior of the power semiconductor device 1, for example with respect to the voltage gradient (dV / dt) during a turn-on operation.

[0151] For example, according to a first provision of such design rules, the distance between any two of the pass-through passages 1053 that are located adjacent to one another is less than 1 mm.

[0152] A second provision of such design rule is that the barrier region 105 is arranged in a semiconductor layer of the semiconductor body 10, the semiconductor layer extending completely and exclusively in the active cell region 1-2 and exhibiting a certain total volume, the pass-through passage 1053 forming at least 1% and at most 50% of said total volume. The remaining volume of the semiconductor layer, i.e. the p-doped part of the barrier region 105, can be formed by a semiconductor region of a second conductivity type. As already indicated above, i.e. the remaining volume is 1e14 cm -3 Larger and 4e17cm -3 It may have a smaller dopant concentration (see concentration CC in FIG. 5), said dopant concentration being present within an extension along the vertical direction Z of at least 0.1 μm or at least 0.5 μm.

[0153] A third provision of the above design rules may be that the barrier region 105, despite its vias 1053, connects together the inactive mesas 19 contained within the multiple IGBT cells 1-1 of the active cell region 1-2.

[0154] A fourth provision of the above design rules may be that the vias 1053 laterally overlap at least a subset of the active mesas 18 of the active cell regions 1-2. For example, one or more of the vias 1053 are positioned and / or dimensioned to laterally overlap at least a subset of the source regions 101.

[0155] A fifth provision of the above design rules may be that the vias 1053 laterally overlap at least a subset of the control trenches 14 in the active cell regions 1-2.

[0156] Another provision of the design rule may be that the barrier region 105 extends at least partially into a subset of the active mesas 18, for example, without establishing contact with the respective control trench 14 in which the respective active mesas 18 are laterally located. For example, the barrier region 105 may be configured to provide a conductive path between a section of each active mesa 18 in the subset of active mesas 18 and the bottom 155 of the dummy trench 15. Thus, it may be a provision of the design rule that the pass-through passage 1053 laterally overlaps one or more of the active mesas 18 of the IGBT cell 1-1. For example, the design rule may specify that the pass-through passage 1053 laterally overlaps at least 1% and at most 50% of the active mesas 18 with respect to the total number of active mesas 18 present in the active cell region 1-2. As explained above, the lateral overlap between the barrier region 105 and each of the active mesas 18 may occur partially, i.e., the barrier region 105 does not necessarily have to completely overlap each active mesa 18, but may be, for example, up to 10%, up to 30%, or up to 70% of the mesa width of each active mesa 18.

[0157] With respect to FIGS. 8A-8D, which respectively show, in a schematic and exemplary manner, a section in horizontal projection of a power semiconductor device 1 according to some embodiments, an exemplary lateral structure of the barrier region 105 is presented.

[0158] With reference to each of Figures 8A-8D, the barrier region 105 may extend completely and exclusively within the active cell region 1-2. Within the active cell region 1-2, the plurality of IGBT cells 1-1 may be provided, each having at least one of the control trenches 14 on either side of which may be laterally located a respective active mesa 18, each active mesa 18 having a source region 101 electrically connected to the first load terminal 11. The IGBT cells 1-1 contained within the active region 1-2 may exhibit a configuration as described with respect to Figures 6A-6C. The IGBT cells 1-1, as also described above, exhibit a stripe configuration substantially oriented along a second lateral direction Y. For example, each IGBT cell 1-1 extends along the second lateral direction throughout the entire active cell region 1-2.

[0159] 8A-8D, a plurality of source regions 101 are illustrated, with only some having their respective reference numerals. For example, as shown in FIG. 6A, each of the illustrated source regions 101 forms part of two active mesas 18, and each control trench 14 is disposed between the two active mesas 18.

[0160] The active cell region 1-2 may be completely surrounded by the transition region 1-5, which in turn may be completely surrounded by the edge termination region 1-3. The transition region 1-5 and the edge termination region 1-3 may be configured in a manner as illustratively described with respect to Figures 6A-6C.

[0161] As shown in Figures 8A-8D, the lateral structure of the barrier region 105 (which lateral structure is formed or defined by the number, dimensions, and positions of the passages 1053) may exhibit a pitch that is significantly larger than the pitch according to which the layout of the trench pattern is formed.

[0162] For example, referring to FIG. 8A, the passages 1053 may exhibit an orientation substantially parallel to the orientation of the stripe configuration of the IGBT cells 1-1. Each of the passages 1053 may laterally overlap a number of adjacent trenches and mesas. It has been pointed out above that it may be appropriate to position the passages 1053 such that they laterally overlap at least a subset of the active mesas 18 (this is the case according to the embodiment shown in FIG. 8A, where the position of the passages 1053 is selected such that the passages 1053 overlap a subset of the source regions 101). Thus, the load current of said subset of the active mesas 18 flows through the passages 1053 without crossing the barrier region 105. As further shown in FIG. 8A, according to an embodiment, the passages 1053 may also terminate at the transition between the active cell region 1-2 and the transition region 1-5.

[0163] The embodiment shown in FIG. 8B essentially corresponds to the embodiment shown in FIG. 8A, with passageway 1053 dimensioned and positioned so as to be entirely embedded within barrier region 105 and so as not to intersect transition regions 1-5.

[0164] According to the embodiment shown diagrammatically and exemplarily in Fig. 8C, the passage 1053 exhibits an orientation substantially perpendicular to the orientation of the stripe configuration of the IGBT cells 1-1. Such an orientation (which is also shown diagrammatically and exemplarily in perspective projection in Fig. 9) can help to attenuate or avoid voltage swings during switching operations of the power semiconductor device 1. The embodiment shown in Fig. 8D essentially corresponds to the embodiment shown in Fig. 8C, with the passage 1053 being dimensioned and positioned so as to be fully embedded within the barrier region 105 and not to cross the transition region 1-5.

[0165] Now, with reference to the embodiment shown in Fig. 10 and Fig. 11, which is shown in a schematic and exemplary manner, some or all of the passages 1053 may be filled in the lower section of the trench of the IGBT cell 1-1 in addition to or instead of the drift region 100. For example, some or all of the passages 1053 are filled in the lower section of the control trench 14. According to the embodiment shown in Fig. 10, this may be achieved by designing the control trench 14 to have a larger total extension along the vertical direction Z compared to a trench not filled with the passages 1053. According to the embodiment shown in Fig. 11, this may be achieved by providing the barrier region 105 such that the passages 1053 are located within their respective local elevations (relative to the vertical direction Z). Further below, an exemplary method of manufacturing a structure as shown in Fig. 10 and Fig. 11 is presented.

[0166] As further shown in Figures 10 and 11, in one embodiment, the contact scheme is different from the exemplary contact schemes described above, for example, the contact scheme for each IGBT cell 1-1 in active cell region 1-2 is "oSkGkSoDoD", but with this contact scheme, the active mesas 18 are still laterally constrained by their respective source trenches 16.

[0167] 12-19, another exemplary lateral structure of the barrier region 105 is presented. According to the embodiments shown diagrammatically and exemplarily in Figures 12-19, the contact scheme of each IGBT cell 1-1 in the active region 1-2 is "oDoSoSkGkSoSoD", however, as mentioned above, in other embodiments different contact schemes are used, examples of which are given further above.

[0168] For example, referring to FIG. 12, the passages 1053 extend parallel to the stripe configuration of the control trenches 14. The barrier regions 105 extend partially into the portions of the active mesas 18 arranged adjacent to both sides of each control trench 14. As shown, the passages 1053 may occur every five IGBT cells 1-1 along the first lateral direction X. Thus, the distance D between two adjacent passages 1053 along the first lateral direction X may be greater than 500 μm, for example about 700 μm. Thus, for example, the barrier regions 105 completely laterally overlap at least exactly 80% of the total number of IGBT cells 1-1 in the active area 1-2. The remaining 20% ​​of the total number of IGBT cells 1-1 in the active area 1-2 may laterally overlap the passages 1053, for example by the respective control trenches 14 and the respective active mesas 18, as shown in FIG. 12. 12, well region 109 does not extend into transition region 1-5, nor does barrier region 105 extend into transition region 1-5. Rather, transition region 1-5 separates barrier region 105 from well region 109.

[0169] 13, the passages 1053 may each have a smaller rectangular cross-section and may be positioned according to an island pattern within the active cell region 1-2. Each passage 1053 may have a width along a first lateral direction X in the range of 5 μm to 20 μm and a length along a second lateral direction Y in the range of 5 μm to 20 μm.

[0170] In an embodiment, for each passage 1053, the width along the first lateral direction X is greater than the length along the second lateral direction Y of each passage 1053, e.g., the width-to-length ratio of each passage is greater than 2 or 3. Thus, the passages may be geometrically configured to extend perpendicular to the stripe configuration of the IGBT cells 1-1, rather than parallel to the stripe configuration of the IGBT cells 1-1. Such a configuration may be effective to avoid / reduce undesired voltage swings / oscillations on the control electrode 141.

[0171] Along the first lateral direction X, each IGBT cell 1-1 (of each IGBT cell 1-1, in FIG. 13, only the source region 101 and the control trench 14 are shown, and each of the illustrated source regions 101 is electrically connected to two respective active mesas 18 separated from each other by a respective control trench 14) may laterally overlap one of the passages 1053. Along the second lateral direction Y, each IGBT cell 1-1 may laterally overlap a plurality of passages 1053. For example, the distance Dx between two adjacent passages 1053 along the first lateral direction X is within a range of several micrometers (e.g., 3 μm to 5 μm). Furthermore, the distance Dy between two adjacent passages 1053 along the second lateral direction Y may be within a range of several micrometers, for example, 5 μm to 20 μm (e.g., about 15 μm).

[0172] Along the second lateral direction Y, the source regions 101 can be positioned with a distance Ds in the range of 0.1 μm to 20 μm. For example, each passage 1053 laterally overlaps at least three of the source regions 101 along the second lateral direction Y.

[0173] A similar configuration is shown, in a schematic and exemplarily manner, in Fig. 14. Along a first transverse direction X, each IGBT cell 1-1 may laterally overlap one of the vias 1053. Along a second transverse direction Y, each IGBT cell 1-1 may laterally overlap a number of the vias 1053, the distance Dy along the second transverse direction being increased compared to the embodiment shown in Fig. 13.

[0174] For example, the passages 1053 do not laterally overlap the dummy trenches 15. Rather, each dummy trench 15 extends into the barrier region 105. For example, the passages 1053 partially overlap the control trenches 14 and the source trenches 16.

[0175] The lateral structure of the barrier region 105, which is shown in a schematic and exemplarily manner in Fig. 15, basically corresponds to the structure as shown in Fig. 13 and Fig. 14, respectively. Thus, along a first lateral direction X, each IGBT cell 1-1 may laterally overlap one of the vias 1053. Along a second lateral direction Y, each IGBT cell 1-1 may laterally overlap a number of vias 1053, the distance Dy along the second lateral direction being increased compared to the embodiment shown in Fig. 14. For example, the distance Dy between two adjacent vias 1053 along the second lateral direction is within the range of a few micrometers (for example, 1 μm to 2000 μm).

[0176] According to a variant which is shown diagrammatically and exemplarily in Fig. 16, the lateral structure of the barrier region 105 has a checkerboard pattern. According to this embodiment, about 50% of the total volume of the barrier region 105 is constituted by the passages 1053 (for example filled in the respective sections of the drift region 100), while the remaining 50% of the barrier region 105 is a p-doped region. For example, each passage 1053 may present a rectangular cross section. Each passage 1053 may have a width along a first lateral direction X so as to overlap three adjacent IGBT cells 1-1, and a length along a second lateral direction Y so as to overlap three adjacent source regions 101. Along the second lateral direction Y, the source regions 101 may be positioned within a distance Ds within the above range. As shown, according to the embodiment of Fig. 16 and in contrast to the embodiment shown in Fig. 14, the passages 1053 may laterally overlap the dummy trenches 15.

[0177] According to another variant, shown diagrammatically and exemplarily in FIG. 17, the component volume of the passages 1053 may be reduced by 50% to less than 20% compared to the lateral structure shown in FIG. 16. Each passage 1053 may have a width along the first lateral direction X so as to overlap three adjacent IGBT cells 1-1 and a length along the second lateral direction Y so as to overlap three adjacent source regions 101. Along the second lateral direction Y, the source regions 101 may be positioned within a distance Ds within the above range. Again, as shown, also according to the embodiment of FIG. 17 and in contrast to the embodiment shown in FIG. 14, the passages 1053 may laterally overlap the dummy trenches 15. Furthermore, the distance Dx between two adjacent passages 1053 along the first lateral direction X may be the full width of the three adjacent IGBT cells 1-1. The distance Dy along the second lateral direction Y may be greater than the distance Dx. For example, the distance Dy between two adjacent passages along the second lateral direction Y may be at least eight times the distance Ds.

[0178] Without changing the dimensions of the passages 1053 with respect to the embodiment shown in Fig. 17, the density of the passages 1053 may be increased and therefore the distances Dx and Dy may be decreased according to the embodiment shown diagrammatically and exemplarily in Fig. 18. As further shown in Fig. 17 and Fig. 18, the passages 1053 may be positioned such that two adjacent passages 1053 at a distance Dy along the second transverse direction Y do not exhibit a transverse overlap along the first transverse direction X (as shown in Fig. 17) or such that two adjacent passages 1053 at a distance Dx along the first transverse direction X do not exhibit a transverse overlap along the second transverse direction Y (as shown in Fig. 18).

[0179] Without changing the dimensions of the passages 1053 with respect to the embodiment shown in FIG. 17, the density of the passages 1053 may be reduced and therefore the distances Dx and Dy may be increased according to the embodiment shown diagrammatically and exemplarily in FIG.

[0180] Other variations in the lateral structure of the barrier region 105 are possible, for example, each variation in the lateral structure of the barrier region 105 (e.g., as exemplarily and diagrammatically shown in Figures 7-19) follows one or more of the following provisions of the design rules: (i) The distance between any two of the pass-through passages 1053 that are disposed adjacent to one another (eg, the distances Dx and Dy) is less than 1 mm. (ii) a barrier region 105 is disposed in said semiconductor layer of semiconductor body 10, the semiconductor layer extending completely and exclusively within active cell region 1-2 and presenting a total volume, the pass-through passage 1053 forming at least 1% and at most 50% of said total volume, the remaining volume of the semiconductor layer, i.e. the p-doped portion of barrier region 105, being formed by a semiconductor region of a second conductivity type; (iii) The barrier region 105, despite its vias 1053, connects together the inactive mesas 19 contained within the multiple IGBT cells 1-1 of the active cell region 1-2. (iv) The passages 1053 laterally overlap at least a subset of the active mesas 18 of the active cell region 1-2 (e.g., one or more passages 1053 are positioned and / or dimensioned to laterally overlap at least a subset of the source regions 101). (v) The vias 1053 laterally overlap at least a subset of the control trenches 14 in the active cell region 1-2. (vi) Barrier region 105 extends completely and exclusively within active cell region 1-2 (and does not extend into transition region 1-5). (vii) The barrier regions 105 extend at least partially into a subset of the active mesas 18 (e.g., without establishing contact with a respective control trench 14 within which the respective active mesa 18 lies laterally). For example, the barrier regions 105 may be configured to thereby provide a conductive path between a section of each active mesa 18 in the subset of active mesas 18 and a bottom 155 of a dummy trench 15. (viii) the lateral structure of the barrier region 105 is configured according to a second layout having a second pitch that is at least twice as large as the first pitch (IGBT cell 1-1 is configured with a lateral structure according to the first layout having the first pitch, as described above). (ix) If present (eg, when the power semiconductor device 1 is configured as an RC-IGBT), the via 1053 may laterally overlap the n-type emitter that is electrically connected to the second load terminal 12.

[0181] As explained above, the location and / or lateral structure of the barrier region 105 (e.g., formed by one or more passages as shown in Figures 7-19) can allow the total amount of active mesas 18 to be divided into a first portion and a second portion, where the first portion does not laterally overlap the barrier region 105, and the second portion laterally overlaps the barrier region 105. As explained above, the first portion of the active mesas 18 laterally overlaps at least one passage 1053 of the barrier region 105, or another section of the drift region 100 where the barrier region 105 is not present (e.g., in the transition regions 1-5). In contrast, the second portion of the active mesas 18 laterally overlaps the barrier region 105. For example, the load current conducted by the second portion traverses the barrier region 105. As further explained above, in an embodiment, the first portion is configured to carry at least a load current in the range of 0% to 100% of the nominal load current (for which the power semiconductor device is designed). The second portion may be configured to carry the load current only if the load current exceeds at least 0.5% of the nominal load current. Thus, the first portion of the active mesa 18 may be considered as an "ignition amount" that starts to conduct the load current, for example, during turn-on of the power semiconductor device 1, while the second portion remains initially inactive. Then, when the load current exceeds a threshold of at least 0.5% of the nominal load current (which may be higher than 0.5%, e.g., higher than 1%, e.g., at least 5% or at least 10%), the barrier region 105 may become more conductive so that the second portion can also carry the load current.

[0182] Also presented herein is a method for processing a power semiconductor device. A flow chart of an exemplary method 2 is shown generally in Figure 20. For example, in a first step 2100, a semiconductor body is provided.

[0183] Method 2 can be performed to provide a power semiconductor device having an active cell region with a drift region of a first conductivity type, a plurality of IGBT cells disposed at least partially within the active cell region, each IGBT cell including at least one trench extending along a vertical direction into the drift region, an edge termination region surrounding the active cell region, and a transition region disposed between the active cell region and the edge termination region, the transition region having a width along a lateral direction from the active cell region toward the edge termination region, at least a portion of the IGBT cells being disposed or extending into the transition region.

[0184] For example, method 2 may further include step 2200, in which an electrically floating barrier region of a second conductivity type is provided, the electrically floating barrier region being disposed within the active cell region and in contact with at least a portion of the trench of the IGBT cell, and the electrically floating barrier region does not extend into the transition region.

[0185] According to another embodiment, method 2 is performed to provide a power semiconductor device including a first load terminal and a second load terminal, the power semiconductor device having an active cell region configured to conduct a load current along a vertical direction between the terminals and including a drift region of a first conductivity type, an edge termination region having a well region of a second conductivity type, and a plurality of IGBT cells disposed within the active cell region, each IGBT cell extending along the vertical direction into the drift region and including a plurality of trenches laterally confining a plurality of mesas. The plurality of trenches includes at least one control trench having a control electrode, at least one dummy trench having a dummy electrode electrically coupled to the control trench, and at least one source trench having a source electrode electrically connected to the first load terminal. The plurality of mesas includes at least one active mesa disposed between the at least one control trench and the at least one source trench, and at least one inactive mesa disposed adjacent to the at least one dummy trench. Step 2200 may be performed by providing an electrically floating barrier region of a second conductivity type, at least a bottom of the dummy trench and a bottom of the source trench both extending at least partially into the electrically floating barrier region, and a portion of the drift region located laterally between the electrically floating barrier region and the well region having a lateral extension of at least 1 μm in said lateral direction.

[0186] For example, for both embodiments of Method 2 above, the barrier region can be formed prior to forming the IGBT cell trench. In another embodiment, the barrier region is formed after forming the IGBT cell trench. In yet another embodiment, the barrier region is formed during the formation of the IGBT cell, for example after etching the trench and before the trench is filled with the trench electrode.

[0187] An exemplary embodiment of the method 2 may correspond to the above-described exemplary embodiment of the power semiconductor device 1. In particular, the method 2 may be performed to form a barrier region with a lateral structure, examples of which are presented above with respect to Figures 7-19.

[0188] In one embodiment of method 2, the lateral structure of the barrier region 105 is formed by creating a uniformly doped p-layer and locally applying n-type counterdoping to form vias 1053 .

[0189] In another embodiment of method 2, the lateral structure of the barrier region 105 is formed by creating a uniformly doped p-layer and pinching through the layer to a depth that, for example, at least partially exceeds the maximum dopant concentration (see CCM in FIG. 5) due to a trench depth differential (see FIG. 10).

[0190] In yet another embodiment, the lateral structure of the barrier region 105 is formed using a mask arrangement.

[0191] For example, the barrier region 105 is produced by providing, for example, trench insulators 142, 152, 162, 172 and by deep implantation after the formation of the trenches by polysilicon filling to form the trench electrodes 141, 151, 161, 171. The achievement of a protruding range of the barrier region 105 (for example 5 μm depending on the trench depth as explained above) may then require high implantation energies (for example in the range of 4 MeV if the implant material is boron). For example, the masking of the implantation can be simplified by the presence of a flat surface following the polysilicon filling of the trenches. The implantation can occur at high energy, but the dose can be low. Thus, the trench insulators 142, 152, 162, 172 are not damaged. The variants described in this paragraph can be combined with trench bottom implants, which are further described below with respect to Figures 21 to 25.

[0192] In an alternative embodiment, the barrier region 105 is generated before the trench fabrication process. For example, this can be done by performing a local shallow p-type implant followed by an epitaxial growth with a target thickness substantially equal to the trench depth. In this case, a gradually diffusing p-type species can be used as the implant material. For example, such a variant can be used to form an embodiment according to FIG. 10. The deeper control trench 14 can be formed, for example, by adjusting the trench layout width and / or by providing separate trench etch blocks for the shallow and deeper trenches. The deeper control trench 14 then extends beyond the barrier region 105 along the vertical direction Z, as shown in FIG. 10, into the drift region 100, i.e. its lower section 100-2. With respect to the embodiment shown in FIG. 11, a local elevation of the barrier region 105 can be achieved, for example, by providing a local counterdoping, for example by performing a local n-type implant. Alternatively, only p-type implantation is performed, in which case implantation attenuation elements may be provided at selected locations on the surface of the semiconductor body 10 (e.g., at locations where one or more of the designated control trenches 14 are to be formed). The attenuation elements reduce the penetration depth of the implanted ions, which results in a local elevation of the barrier region 105. All trenches 14, 15, 16, 17 may then exhibit the same depth, but the trenches that laterally overlap the local elevation of the barrier region 105 may extend beyond the barrier region 105 along the vertical direction Z and into the drift region 100, i.e. its lower section 100-2, as shown in FIG. 11. This allows the pass-through passage 1053 to be formed according to an embodiment. For example, the attenuation elements may be formed by creating a local step on the semiconductor body surface (e.g., by plasma etching or sacrificial implant LOCOS), followed by a p-type implantation and silicon epitaxial regrowth of appropriate thickness so that the trenches are properly aligned with the p-type implantation profile.

[0193] According to another embodiment, a method for processing a power semiconductor device includes the steps of: providing a semiconductor body with a drift region of a first conductivity type; generating a plurality of trenches, the trenches extending into the semiconductor body along a vertical direction and arranged adjacent to one another along a first lateral direction; providing a mask arrangement on the semiconductor body, the mask arrangement having a lateral structure according to which a portion of the trenches is exposed and at least one of the trenches is covered by the mask arrangement; subjecting the semiconductor body and the mask arrangement to a dopant material supply step (e.g., an implantation processing step), thereby generating a plurality of doped regions (e.g., implanted regions) of a second conductivity type complementary to the first conductivity type below bottoms of the exposed trenches; removing the mask arrangement; and subjecting the semiconductor body to a temperature annealing step, thereby causing the plurality of doped regions to extend parallel to the first lateral direction to overlap and to form barrier regions of the second conductivity type adjacent bottoms of the exposed trenches.

[0194] Exemplary aspects of the method will now be described in more detail below with respect to Figures 21-25, each of which illustrates, in a schematic and illustrative manner, one or more steps of a method for processing a power semiconductor device according to one or more embodiments, based on one or more sections of a vertical cross section.

[0195] It is to be understood that the exemplary embodiments of the methods described below with respect to Figures 21-25 may be used to form one or more of the embodiments of the power semiconductor device described with respect to Figures 1-19 (e.g., each barrier region 105).

[0196] 21, a semiconductor body 10 is provided with a drift region 100 of a first conductivity type. For example, the semiconductor body 10 is provided as part of a semiconductor wafer. For example aspects of the drift region 100 (e.g. its overall extent along the vertical direction Z and / or its dopant concentration), see above.

[0197] In step 20, a plurality of trenches 14, 15, 16 are created, the trenches 14, 15, 16 extending into the semiconductor body 10 along a vertical direction Z and arranged adjacent to one another along a first lateral direction X.

[0198] For example, creating the trenches 14, 15, 16 may include performing an etching process step (e.g., a plasma etching process step). In general, multiple trench formation techniques are available, and the embodiments described herein are not limited to any particular one of such techniques.

[0199] In an embodiment, the semiconductor body 10 may be covered with a hard mask during the (plasma) etching, which may be removed after formation of the trenches or may be retained as a masking layer for another processing step.

[0200] For example, the trenches 14, 15, 16 are equally spaced along the first lateral direction X. See above for example dimensions of the trenches 14, 15, 16, such as their respective widths along the first lateral direction X, their respective depths (or total extents) along the vertical direction Z, and / or the distance between the trenches 14, 15, 16 (i.e., mesa widths).

[0201] In one variation, as shown in Figure 24, some of the trenches may be formed with a greater total extent along the vertical direction Z than other trenches. For example, a portion of a trench that is designated a source trench 16 and that is laterally adjacent to a designated control trench 14 is formed with a greater depth. For example, the greater depth of the trench may be at least 110%, at least 120%, or at least 130% of the depth of the remaining trenches.

[0202] After the creation of the trenches 14, 15, 16, in a subsequent step 21 a protective layer 300 is provided at least on the trench sidewalls. In an embodiment, the surfaces of the trenches 14, 15, 16 are completely covered by the protective layer 300, as shown in Figure 21. For example, the surface section 10-1 of the semiconductor body 10 and the trench bottom may also be covered by the protective layer 300.

[0203] For example, the protective layer 300 is a sacrificial oxide film. Providing the protective layer 300 may include at least one of a deposition process step and a thermal growth process step. The thickness of the protective layer 300 may be, for example, in the range of 5 nm to 150 nm or more.

[0204] In step 22 a mask arrangement 30 is applied to the semiconductor body 10 , the mask arrangement 30 comprising a lateral structure according to which parts of the trenches 14 , 15 , 16 are exposed and at least one of the trenches 14 , 15 , 16 is covered by the mask arrangement 30 .

[0205] For example, after providing the protective layer 300, the trenches 14, 15, 16 are filled with a mask material 302, for example a photoresist material or part of a photoresist compound system, i.e. an anti-reflective coating material or a combination thereof, which may initially cover / fill all the trenches 14, 15, 16 and the surface section 10-1. The mask material 302 is then laterally structured to generate one or more openings 301. Thus, after such lateral structuring, parts of the trenches 14, 15, 16 are exposed and at least parts of the trenches 14, 15, 16 are covered by the mask arrangement 30, as shown diagrammatically and exemplarily in FIG. 21 for step 22. For example, as shown in FIG. 24, the deeper trenches and the trenches between the deeper trenches are covered by the mask material 302, while the other trenches are exposed.

[0206] As will become clear in more detail from the following description, the barrier region 105 produced may exhibit a lateral structure that essentially corresponds to the lateral structure of the mask arrangement 30. For example, the trenches 14, 15, 16 may be formed according to a first layout having a first pitch, and the lateral structure of the mask arrangement 30 may be configured according to said second layout, the second layout having a second pitch or feature size that is at least twice as large as the first pitch.

[0207] Lateral structuring of the mask material 302 may comprise a lithographic processing step, for example by using a negative tone resist material as the mask material 302. For example, such a lithographic processing step may be performed based on a second pitch or feature size that is at least twice as large as the first pitch (according to which the trenches 14, 15, 16 have been generated). Thus, the lateral structure of the mask arrangement 30 may be coarser scaled compared to the trench pattern.

[0208] In a variant, before carrying out the next step 24 and before or after providing the mask arrangement 30, an etch-back processing step may be carried out so as to at least partially remove the protective layer 300 at the surface sections 10-1 between the trenches 14, 15, 16 and at the trench bottoms 145, 155, 165, while preserving the protective layer 300 on the trench sidewalls 144, 154, 164. This will be explained in more detail with respect to step 211 of FIG. 23.

[0209] In another variant, the mask arrangement 30 is provided as a stencil mask, in which case no resist material is used and it is possible to omit the step of carrying out a lithographic processing step on a resist material, for example such a stencil mask can be aligned to the trench layout during implantation.

[0210] In step 24, the semiconductor body 10 and mask arrangement 30 are subjected to a dopant material supply step, e.g., an implantation processing step, whereby a plurality of doped regions (e.g., implanted regions) 1059 of a second conductivity type (complementary to the first conductivity type) are produced below the bottom of the exposed trenches 14, 15, 16.

[0211] The following description is directed to an example in which the dopant material supply step includes an implantation process step, and thus the region 1059 created below the trench bottom is an implanted region, although in other examples, processes other than implantation may be used to create the doped region 1059.

[0212] The implantation may be an ion implantation. For example, boron may be implanted during step 24. The implantation may be a low energy implantation, for example, the implantation is performed at an energy in the range of 5 keV to 1000 keV. Further, the implantation may be performed at an energy of 1e11 cm -2 ~1e13cm -2 The implantation dose can be in the range of 100 μm to 100 μm.

[0213] In an embodiment, the implantation direction and the orientation of the trenches 14, 15, 16 can be adapted to each other so that the trench sidewalls of the exposed trenches are not or at least only slightly implanted. For this purpose, in an embodiment, the creation of the trenches 14, 15, 16 (see step 20) is performed such that the trench width along the first lateral direction remains within at least 95% of the trench width present at the trench opening of each trench for at least the first 80% of the total extension of each trench along the vertical direction Z. For example, in the upper 80% of each trench, the trench width is not reduced or is reduced by 5%. Of course, an increase in the trench width in the upper 80% of each trench may also be possible in order to avoid that the trench sidewalls in said upper 80% are not implanted.

[0214] In one embodiment, the generated trenches 14, 15, 16 exhibit trench sidewalls that are essentially parallel to the vertical direction Z, and the implant (see step 24) is performed along the vertical direction Z and, for example, without any angle or tilt with respect to the vertical direction Z. The implant can thus be a 0° implant. Alternatively, an angled implant can be performed aligned along the direction of the trenches 14, 15, 16 to minimize sidewall implantation.

[0215] Additionally, as explained above, during implantation, the exposed trench sidewalls may be covered with protective layer 300. In one example, because the implant ions are accelerated along the vertical direction Z, and because the exposed trench sidewalls are covered with protective layer 300, no or only a small proportion of the implant ions penetrate the trench sidewalls within at least the top 80% of each exposed trench.

[0216] However, the surface sections 10-1 between the exposed trenches may also be subject to implantation, and thus implanted regions 1029 below such surface sections 10-1 may occur. However, such implanted regions 1029 do not necessarily have to be removed, since in these zones of the semiconductor body 10 a channel region 102 of the second conductivity type may be created.

[0217] Further, the implantation can be performed such that the average penetration depth of the implanted ions (e.g., the average distance ions traverse after entering the semiconductor body 10 at the trench bottom of the exposed trench) can be in the range of 10 nm to 2000 nm.

[0218] In step 26, the mask arrangement 30 and the protective layer 300 may be removed. This may involve performing one or more etching process steps, for example a first etching process step to remove the mask material 302 and a second etching process step to remove the protective layer 300.

[0219] In step 28, the semiconductor body 10 is subjected to a temperature annealing step, whereby a plurality of implanted regions 1059 are caused to extend parallel to the first lateral direction X to overlap and form barrier regions 105 of the second conductivity type adjacent the bottoms of the exposed trenches 14, 15, 16, as shown in Figures 21 and 24. For example, the implanted regions 1059 may diffuse to combine and form the barrier regions 105 as a continuous barrier region 105.

[0220] According to an embodiment, the formation of the barrier region 105 is performed as a self-aligned process with respect to the depth of the previously formed trenches. For example, a difference similar to the final difference of the depth of the exposed trenches among the trenches 14, 15, 16 may be present in the barrier region 105 as well. The position of the barrier region 105 with respect to the vertical direction Z may essentially be defined by the trenches 14, 15, 16. The above process may be considered as a self-aligned process, since a correct relative position (in terms of the vertical direction Z) of the barrier region 105 with respect to the trenches 14, 15, 16 may be desired so that the barrier region 105 can perform its designated function. Thus, according to an embodiment, the lateral structure of the barrier region 105 may be adjusted according to the lateral structure of the mask arrangement 30, and the position and extension of the barrier region 105 with respect to the vertical direction may be defined by the previously formed trenches 14, 15, 16.

[0221] The temperature annealing step 28 increases the barrier region 105 to 1e14 cm -3 ~4e17cm -3 and the electrically activated dopant concentration may be present within an extension range along the vertical direction Z of at least 0.1 μm or at least 0.5 μm. For other aspects of the dopant concentration (e.g., variation along the vertical direction Z as discussed with respect to FIG. 5) and / or spatial dimensions, see above.

[0222] For example, the barrier region 105 is formed in the vertical direction Z and spatially confined with respect to the vertical direction Z by the drift region 100. For example, this forms both the upper pn junction 1051 and the lower pn junction 1052, as described above.

[0223] 21 and 24, in one embodiment, the temperature annealing step 28 can be performed such that the barrier region 105 extends laterally at least until it reaches the bottom and / or sidewalls of the trench that were covered by the mask arrangement 30 during implantation (see step 24).

[0224] For example, according to the embodiment shown in FIG. 21, the temperature annealing step 28 can be performed such that the barrier region 105 still extends laterally beyond the bottom of the trench, as shown in FIG. 21 for step 28. The barrier region 105 thus created can completely overlap laterally with the trench covered by the mask arrangement 30 during implantation, i.e., the trench that was not implanted (during this implantation, the implanted region 1059 was created). The barrier region 105 can extend beyond this trench and slightly into the mesa region formed by the two adjacent trenches that were not implanted due to the mask coverage. For example, to achieve such a controlled diffusion, the overall process thermal budget can be adjusted accordingly after implantation 24, or, if the thermal budget is constrained by other requirements, the trench layout can be modified to align the position of the last exposed trench with the adjacent trench such that the diffusion results in providing the barrier region 105 with the desired profile.

[0225] 24, lateral diffusion of the implanted regions 1059 may be blocked by the deeper trenches, so that the barrier regions 105 extend "only" to the sidewalls 164 of the deeper trenches. In this case, the barrier regions 105 do not reach either the trenches between the deeper trenches or the mesas 18 formed between the deeper trenches and the trenches between the deeper trenches; more precisely, in this area the barrier regions 105 exhibit pass-through passages 1053.

[0226] With respect to FIG. 22, other exemplary and optional steps of method 2 are presented. As introductory, method 2 can be used to form one or more of the embodiments of the power semiconductor device 1 presented above with respect to FIGS. 1-19. For example, method 2 is performed to form a power semiconductor device 1 with a plurality of IGBT cells 1-1, a section of which in a vertical cross section is shown diagrammatically and exemplarily in FIG. 22. Thus, method 2 includes, in one embodiment, forming trenches 14, 15, 16 in at least one control trench 14 with a control electrode 141, in at least one dummy trench 15 with a dummy electrode 151, and in at least one source trench 16 with a source electrode 161. Method 2 may further include forming at least one active mesa 18 in the semiconductor body 10 and between the trenches 14, 15, 16, adjacent to the at least one control trench 14, where the control electrode 141 is configured to receive a control signal and control the load current in the active mesa 18, and at least one inactive mesa 19 adjacent to the at least one dummy trench 15.

[0227] The illustrated IGBT cell 1-1 shows the contact scheme "oDoSoSkGkSoSoD" described above. In other embodiments, different contact schemes may be used.

[0228] For example, after producing the barrier region 105, the trenches 14, 15, 16 can be provided with respective trench insulators (see references 142, 152, 162 in the other figures) and respective trench electrodes 141, 151, 161. Furthermore, the channel region 102 can be produced in the mesas 18 and 19, and in the first mesa 18, the source region 101 can be produced, electrically connected to the first load terminal 11 by the first contact plug 113. According to an embodiment, before the trenches 14, 15, 16 are provided with the trench insulators 142, 152, 162 and the trench electrodes 141, 151, 161, an additional sacrificial thermal oxidation step can be performed, for example for the purpose of rounding the corners of the trenches.

[0229] In FIG. 22, the dotted areas 402 indicate areas where the mask material 302 was present during implantation, and the hatched areas indicate implanted regions 1059 created during implantation step 24. In one example, at least one trench designated as a control trench 14 and an adjacent trench 16 are covered by mask arrangement 30. The barrier region 105 is created such that it extends laterally until it nearly reaches the bottom 165 and / or sidewall 164 of the adjacent trench 16 that was covered by mask arrangement 30 during implantation 24. This adjacent trench may be designated as a source trench 16. Although not shown in FIG. 22 (but shown in FIG. 21), a temperature annealing step 28 may be performed such that the barrier region 105 extends laterally beyond the trench bottom 165 and into at least one active mesa 18.

[0230] Depending on the lateral structure of the mask arrangement 30, the barrier region 105 may exhibit a number of pass-through passages 1053 as already described above. For example, the barrier region 105 extends into the active mesa 18 but is separated from the control trench 14 by the drift region 100. In an embodiment, the pass-through passages 1053 are designed by the mask arrangement 30 such that at least a portion of the control trench 14 is separated from the barrier region 105 by the drift region 100.

[0231] In general, the creation of the barrier region 105 may occur according to one or more of the design rule prescriptions discussed above, which may be met by laterally structuring the mask material 302 accordingly, forming the trenches 14, 15, 16 accordingly, and / or performing an implantation step accordingly, and / or performing a temperature annealing step accordingly.

[0232] For example, the provided semiconductor body 10 may have the active cell region 1-2 with a drift region 100, and trenches 14, 15, 16 formed in at least the active cell region 1-2. The provided semiconductor body 10 may further have the edge termination region 1-3 with a well region 109 of a second conductivity type extending along a vertical direction Z to at least the same depth as the barrier region 105. The provided semiconductor body 10 may further have the transition region 1-5 disposed between the active cell region 1-2 and the edge termination region 1-3. As explained above, the transition region 1-5 may have a width W of at least 1 μm along a lateral direction from the active cell region 1-2 towards the edge termination region 1-3.

[0233] In one embodiment of method 2, the trenches or sections thereof formed in the transition regions 1-5 are covered by mask arrangement 30. That is, barrier regions 105 do not extend into the transition regions 1-5 according to an embodiment. For example, laterally structured barrier regions 105 are only created in the active cell regions 1-2.

[0234] This is merely one example of how one or more of the provisions of the design rules may be met. Other examples are possible that take into account alternative or additional provisions of one or more of the design rules.

[0235] The embodiment shown diagrammatically and exemplarily in Fig. 23 is based on the method exemplarily shown in Fig. 21, therefore the same reference numbers refer to the same method steps. According to the variant shown in Fig. 23, step 21 (step of providing a protective layer 300) is performed such that the protective layer 300 exhibits a relatively large thickness (for example a thickness of about 100 nm). For example, the protective layer 300 is provided in all trenches 14, 15, 16. The protective layer 300 can be a thick sacrificial oxide. In step 211, an etch-back processing step is performed so as to at least partially remove the protective layer 300 in the surface section 10-1 and in the trench bottoms 145, 155, 165. Then, in steps 22 and 24, a mask arrangement 30 is provided and an implantation is performed, for example in the manner described above with respect to Fig. 21. However, this implantation can be performed with a lower implantation energy compared to the variant of Fig. 21 due to the etch-back processing step 211. The etch-back process can be an anisotropic reactive ion etching (RIE) process. Furthermore, the relatively thick protective layer 300 still present on the trench sidewalls during implantation can ensure that the implanted ions / particles do not cross the trench sidewalls. For example, in this way it can be ensured that the barrier region 105 remains separated from the channel region 102 by a part of the drift region 100, e.g. that there is no p-type connection between the channel region 102 and the barrier region 105. In one variant, the provision of the mask arrangement 30 in step 22 is performed before the etch-back processing step 211 occurs. For example, after the mask arrangement 30 is provided (i.e. with the relatively thick protective layer 300 still present on the surface section 10-1 and the trench bottoms 145, 155, 165), the etch-back processing step 211 is performed to at least partially remove the protective layer 300 on the surface section 10-1 and the trench bottoms 145, 155, 165 in the areas exposed (not covered) by the mask arrangement 30. The thicker protective layer 300 below the mask material 302 can facilitate the removal of the mask arrangement 30.In a variant, the mask arrangement 30 can be removed prior to the dopant material supply step 24 (e.g. said implantation step) if the thickness of the protective layer 300 is sufficient to act as a mask during the dopant material supply step 24 of the trenches masked during the etch-back processing step 211. Regardless of the choice of sequence, for example the mask arrangement 30 is removed in step 261 and then the remaining parts of the protective layer 300 are removed in step 262. A temperature annealing step 28 can then be performed, followed by a trench formation step.

[0236] 25, in one variation, instead of or in addition to providing the protective layer 300, the method 2 may include, in step 212, forming a sacrificial planarization structure 309 in and over the trenches 14, 15, 16, and the mask arrangement 30 is provided over the sacrificial planarization structure 309. For example, to form the sacrificial planarization structure 309, an oxide (e.g., SiO 2 ) or materials such as amorphous carbon can be used. The formation of the sacrificial planarization structure 309 can be performed such that the lower parts of the trenches 14, 15, 16 remain empty and only the trench openings are closed. For example, this can be achieved by maximizing the deposition rate at the upper trench corners so that the trench openings are closed. For example, the deposition is performed as a highly non-conformal and / or line-of-sight process. In an embodiment, the deposition of the material forming the sacrificial planarization structure 309 is performed in two directions, which can generate the crevice 3091 shown. For example, the mask arrangement 30 is formed on the sacrificial planarization structure 309 and then structured. The exposed part of the sacrificial planarization structure 309 can then be removed at least in the top part. Since the lower parts of the trenches 14, 15, 16 remain empty, the removal of the material of the sacrificial planarization structure 309 can be easily performed. Thereafter, for example, implant 24 may be performed without prior provision of another trench sidewall protection, after which mask arrangement 30 and remaining portions of sacrificial planarization structure 309 may be removed.

[0237] Referring again now to FIG. 21, in an alternative embodiment, after the trenches 14, 15, 16 are formed in step 20 and, optionally, a protective layer 300 is provided at least on the sidewalls of the trenches, a polysilicon or doped oxide source (e.g., boron doped SiO 2 or aluminum-doped SiO 2 ), or another dopant source of the second conductivity type, can be deposited in the trenches 14, 15, 16 (e.g. at the trench bottom 145, 155, 165). For example, the deposition of the dopant source (e.g. doped oxide) can comprise a spin-on process or a CVD process (e.g. a superconformal CVD process). The deposited dopant source can then be structured, for example by lithography and etching (e.g. wet etching, dry etching or a combination of wet etching and dry etching) processing steps, for example, whereby the dopant source is removed from one or more of the trenches 14, 15, 16. Alternatively, a corresponding mask can be provided before the deposition of the dopant source or during the deposition of the dopant source. Once the deposited dopant source is present only in selected trenches 14, 15, 16 (which may be considered to correspond to the exposed trenches that undergo implantation during step 24), a diffusion processing step (e.g., a high temperature furnace processing step) may be performed to cause the deposited dopant source to diffuse out of the trenches into semiconductor body 10, thereby forming doped regions that may eventually combine to form barrier region 105. Thereafter, according to an embodiment, the remaining dopant source (e.g., polysilicon or doped oxide) may be removed from all trenches, and a conventional trench formation process may be performed to form, for example, control trench 14, source trench 16, and dummy trench 15.

[0238] According to one or more embodiments described herein, an IGBT is presented with a plurality of IGBT cells configured according to an MPT structure, each IGBT cell comprising a control trench for controlling a load current in at least one active mesa and at least one dummy trench with a trench electrode also electrically connected to a control terminal and disposed adjacent to at least one inactive mesa, the bottoms of the active mesa and the dummy trench being connected to each other by a laterally structured and electrically floating p-doped barrier region. According to an embodiment, such a connection can reduce the voltage swing on the control terminal during switching operation of the IGBT. This can, for example, allow for improved control of dV / dt by the gate signal during switching of the IGBT. Furthermore, in an embodiment, the lateral structuring of the p-barrier region can avoid snap-back of the transfer and output characteristics of the IGBT. For example, for currents less than 10% or less than 1% of the nominal current, the load current is carried by the active mesas that are not covered by the p-barrier region (e.g., where the barrier passage is present). For larger currents, the upper pn junction formed by the transition between the barrier region and the drift region above the barrier region is in a forward bias mode for electron flow, and all active mesas in the active cell area carry the load current regardless of whether they are covered by a p-barrier region or not.

[0239] Above, embodiments related to power semiconductor devices and corresponding processing methods have been described. For example, these power semiconductor devices are based on silicon (Si). Thus, the monocrystalline semiconductor regions or layers (e.g., the semiconductor body 10 and its regions / zones 100, 101, 102, 105, 107, 108, 109) can be monocrystalline Si regions or Si layers. In other embodiments, polycrystalline or amorphous silicon can be used.

[0240] However, it is to be understood that the semiconductor body 10 and its doped regions / zones may be made of any semiconductor material suitable for the manufacture of semiconductor devices. Examples of such materials include, but are not limited to, elemental semiconductor materials such as silicon (Si) or germanium (Ge), Group IV compound semiconductor materials such as silicon carbide (SiC) or silicon germanium (SiGe), binary, ternary, or quaternary III-V semiconductor materials such as gallium nitride (GaN), gallium arsenide (GaAs), gallium phosphide (GaP), indium phosphide (InP), indium gallium phosphide (InGaP), aluminum gallium nitride (AlGaN), aluminum indium nitride (AlInN), indium gallium nitride (InGaN), aluminum gallium indium nitride (AlGaInN), or indium gallium arsenide phosphide (InGaAsP), and binary or ternary II-VI semiconductor materials such as cadmium telluride (CdTe) and mercury cadmium telluride (HgCdTe), to name a few. The above-mentioned semiconductor materials are also referred to as "homojunction semiconductor materials". When two different semiconductor materials are combined, a heterojunction semiconductor material is formed. Examples of heterojunction semiconductor materials include, but are not limited to, aluminum gallium nitride (AlGaN)-aluminum gallium indium nitride (AlGaInN), indium gallium nitride (InGaN)-aluminum gallium indium nitride (AlGaInN), indium gallium nitride (InGaN)-gallium nitride (GaN), aluminum gallium nitride (AlGaN)-gallium nitride (GaN), indium gallium nitride (InGaN)-aluminum gallium nitride (AlGaN), silicon-silicon carbide (SixC1-x), and silicon-SiGe heterojunction semiconductor materials. For power semiconductor device applications, Si, SiC, GaAs, and GaN materials are mainly used at present.

[0241] Spatial relative terms such as "lower", "below", "lower side", "upper", "upper" and the like are used for ease of description to describe the positioning of one element relative to a second element. These terms are intended to encompass different orientations of each device, as well as different orientations than those depicted in the drawings. Additionally, terms such as "first", "second", and the like are used to describe various elements, regions, sections, and the like, and are similarly not intended to be limiting. Similar terms refer to similar elements throughout this specification.

[0242] As used herein, terms such as "having," "containing," "including," "including," "indicating," and the like are open-ended terms that indicate the presence of stated elements or features, but do not exclude additional elements or features.

[0243] With the above scope of variations and applications in mind, it should be understood that the present invention is not limited by any of the foregoing descriptions and accompanying drawings, but instead is limited only by the following claims and their legal equivalents. [Explanation of symbols]

[0244] 1. Power Semiconductor Devices 1-1 IGBT cell 1-2 Active cell area 1-3 Edge termination area 1-5 Transition region 2. Method for processing power semiconductor devices 10 Semiconductor body 10-1 Surface section 11 First load terminal 12 Second Load Terminal 14 Control Trench 15 Dummy Trench 16 Source Trench 18 Active Mesa 19 Inactive Mesa 20. Creating Multiple Trench 22. Providing a mask arrangement 24 Dopant material supply step 26. Removing the mask arrangement 28 Temperature Annealing Step 30 Mask placement 100 Drift Region 100-1 Upper section 105 Barrier Region 109 well area 141 Control electrode 151 Dummy Electrode 161 Source electrode 144, 154, 164 Trench sidewall 145, 155, 165 Trench bottom 212 Step of forming a sacrificial planarization structure 300 protective layer 301 Lateral structure 309 Sacrificial Planarization Structure 1059 Doping Area 2200 Providing an electrically floating barrier region of a second conductivity type W width X First horizontal Y Second horizontal Z vertical direction

Claims

1. a first load terminal and a second load terminal, wherein a power semiconductor device is configured to conduct a load current along a vertical direction between the first load terminal and the second load terminal; a drift region of a first conductivity type; a first pair of trenches extending along the vertical direction into the drift region and laterally confining an active mesa; a channel region of a second conductivity type within the active mesa; a first barrier region of the second conductivity type extending in the vertical direction from the drift region into the active mesa; a second barrier region of the first conductivity type within the active mesa and sandwiched between the channel region and the first barrier region; A power semiconductor device, wherein a pn junction formed between the first barrier region and the second barrier region is disposed below a bottom of the first pair of trenches.

2. A first load terminal and a second load terminal, wherein a power semiconductor device is configured to conduct a load current along a vertical direction between the first load terminal and the second load terminal; a drift region of a first conductivity type; a first pair of trenches extending along the vertical direction into the drift region and laterally confining an active mesa; a channel region of a second conductivity type within the active mesa; a first barrier region of the second conductivity type extending in the vertical direction from the drift region into the active mesa; a second barrier region of the first conductivity type within the active mesa and sandwiched between the channel region and the first barrier region; a second pair of trenches laterally confining an additional active mesa including an additional channel region of the second conductivity type; The additional active mesa laterally overlaps a barrier region passage where the first barrier region is absent.

3. 3. The power semiconductor device of claim 1, further comprising a source region of the first conductivity type within the active mesa, the channel region separating the source region from the second barrier region in the vertical direction.

4. 4. The power semiconductor device of claim 1, wherein the second barrier region is disposed in contact with the channel region and extends downwardly from the channel region along the vertical direction until the second barrier region interfaces with the first barrier region.

5. The power semiconductor device of any preceding claim, wherein the second barrier region fills the active mesa in a first lateral direction intersecting the first pair of trenches.

6. The power semiconductor device of any preceding claim, wherein the second barrier region has a maximum dopant concentration at least twice as large as a dopant concentration in the lower section of the drift region.

7. The power semiconductor device of claim 2 , wherein a pn junction formed between said first barrier region and said second barrier region is disposed within said active mesa.

8. The power semiconductor device of any preceding claim, wherein the first barrier region laterally overlaps some but not all of the active mesa.

9. The power semiconductor device of claim 8 , wherein said first barrier region laterally overlaps up to 70% of a mesa width of said active mesa.

10. 3. The power semiconductor device of claim 2 further comprising an additional second barrier region of said first conductivity type within said additional active mesa and sandwiched between said additional channel region and said barrier region passage.

11. 11. The power semiconductor device of claim 10, wherein the additional second barrier region is disposed in contact with the additional channel region and extends downwardly from the additional channel region along the vertical direction until the additional second barrier region interfaces with an upper section of the drift region.

12. 11. The power semiconductor device of claim 10, further comprising an additional source region of the first conductivity type in the additional active mesa, the additional channel region separating the additional source region from the additional second barrier region in the vertical direction.

13. The power semiconductor device of claim 12 , wherein the barrier region passage laterally overlaps at least a portion of the additional source region.

14. 3. The power semiconductor device of claim 2, wherein the barrier region path provides a load current path for a current that is less than 10% of a nominal load current of the power semiconductor device.

15. The power semiconductor device of claim 2 , wherein the barrier region passage is filled with a section of the drift region.

16. The power semiconductor device of claim 2 , wherein said barrier region passage is filled in a lower section of an additional trench that extends deeper in said vertical direction than said first pair of trenches.

17. 17. The power semiconductor device of claim 1, further comprising a pair of source trenches extending along the vertical direction into the drift region and laterally confining a passive mesa, the first barrier region extending partially into the passive mesa.

18. a dummy trench having a dummy trench electrode; the dummy trench includes an insulator extending along the vertical direction and insulating the dummy trench electrode; 20. The power semiconductor device of claim 17, wherein the first barrier region is configured to provide a conductive path between a section of the active mesa and a bottom of the dummy trench.

19. 20. The power semiconductor device of claim 18, wherein the first barrier region extends from the active mesa below the bottoms of the pair of source trenches and across the passive mesa to interface with the bottoms of the dummy trenches.

20. The power semiconductor device according to any one of the preceding claims, wherein the second barrier region is laterally structured.

21. 21. The power semiconductor device of claim 1, wherein the second barrier region is laterally structured such that some mesas in an active area of ​​the power semiconductor device include a portion of the second barrier region and some mesas in an active area of ​​the power semiconductor device do not include the second barrier region.

22. A power semiconductor device as described in any one of claims 1 to 21, wherein a first trench of the first pair of trenches is connected to a gate terminal and a second trench of the first pair of trenches is connected to a first load terminal.

23. A semiconductor device comprising: a first load terminal and a second load terminal, wherein a power semiconductor device is configured to conduct a load current along a vertical direction between the first load terminal and the second load terminal; a drift region of a first conductivity type; a plurality of trenches extending along the vertical direction into the drift region, each trench including a trench electrode, a first subset of the trench electrodes connected to a gate terminal and a second subset of the trench electrodes connected to a first load terminal; a first pair of trenches of the plurality of trenches laterally confining an active mesa; a channel region of a second conductivity type within the active mesa; a first barrier region of the second conductivity type extending in the vertical direction from the drift region into the active mesa; a second barrier region of the first conductivity type within the active mesa and sandwiched between the channel region and the first barrier region; a second pair of trenches of the plurality of trenches laterally confining an additional active mesa including an additional channel region of the second conductivity type; The additional active mesa laterally overlaps a barrier region passage where the first barrier region is absent.

24. The power semiconductor device of claim 23, wherein some of the trench electrodes of the first subset are dummy trench electrodes not configured to control the load current.

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