Tape sticking device and tape magazine

Abstract

To provide a tape sticking device capable of executing switching and replacement of dicing tapes automatically, and to provide a tape magazine.SOLUTION: A sticking device 3 includes: a base part 31 installed so that a tape magazine 4 for storing a dicing tape DT can be freely replaced in a state where part of the dicing tape DT wound in a roll shape is drawn out; and movable guide rollers 32a, 32b, fixed guide rollers 33a, 33b and a knife plate 35 capable of moving so as to restrict a draw-out region R in which part of the dicing tape DT is drawn out to a predetermined trajectory.SELECTED DRAWING: Figure 6

Description

Technical Field

[0001] The present invention relates to a tape sticking device for a dicing tape and a tape magazine used in this tape sticking device.

Background Art

[0002] In the field of semiconductor manufacturing, there is a process of dicing a semiconductor substrate such as a silicon wafer (hereinafter referred to as "workpiece") into chips. In this process, the dicing tape attached to the workpiece restrains the positions of individual chips, enabling efficient dicing of the chips.

[0003] Patent Document 1 describes that an expand tape E is attached to a wafer W adsorbed and fixed to a table 211 by the pressing force of an attaching roller. The reference numerals are those of Patent Document 1.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in the device described in Patent Document 1, when switching the tape according to the type of the wafer W or replacing the tape due to tape consumption, after removing the used expand tape E wound around various rollers and set to pass through a predetermined track, a new expand tape E has to be manually set again to pass through the predetermined track.

[0006] Therefore, a technical problem to be solved arises in order to automatically perform the switching and replacement of the dicing tape, and the present invention aims to solve this problem.

Means for Solving the Problems

[0007] In order to achieve the above object, a tape sticking device according to the present invention is a tape sticking device for sticking a dicing tape to a dicing frame and a workpiece, and a part of the dicing tape wound in a roll is Folded into a U shape a base on which a tape magazine for storing the dicing tape in a state where a part of the dicing tape is drawn out is detachably installed, From the standby position located inside the standby orbit of the dicing tape within the lead-out area where a part of the dicing tape is folded and pulled out in a U shape to the regulation position located outside the standby orbit moving away from each other to Citation pay out the dicing tape in the pay-out area and The from the standby orbit Projecting outside the standby orbit a pair of movable regulating parts for shifting the orbit of the dicing tape in the pay-out area to the sticking orbit.

[0008] According to this configuration, a tape magazine in which the dicing tape is stored in a state where a part of it is drawn out is replaced on the tape sticking device, and the regulating part regulates the pay-out area of the dicing tape to a predetermined orbit, so that the switching and replacement of the dicing tape can be automatically performed.

[0009] In order to achieve the above object, a tape magazine according to the present invention is a tape magazine that can be replaced on a tape sticking device for sticking a dicing tape to a dicing frame and a workpiece, and includes a base that can be detachably attached to the tape sticking device, a pay-out shaft provided on the base for supporting the dicing tape wound in a roll, a winding shaft provided on the base for winding up the separator of the dicing tape, and a part of the dicing tape supported by the pay-out shaft and the winding shaft provided on the base Folded back into a U shape a fixed regulating part for regulating the orbit of the dicing tape so as to draw it out, and the base is From the standby position located inside the standby orbit of the dicing tape within the lead-out area where a part of the dicing tape is folded and pulled out in a U shape by the fixed regulation part to the regulation position located outside the standby orbit formed with notches capable of accommodating a pair of movable regulating parts of the tape sticking device that move away from each other when viewed from the side to Citation pay out the dicing tape in the pay-out area and The from the standby orbit Projecting outside the standby orbit shift the orbit of the dicing tape in the pay-out area to the sticking orbit.

[0010] According to this configuration, a tape magazine in which a dicing tape is accommodated with a part of it pulled out is replaced in a tape sticking device, and the regulating unit can automatically perform switching and replacement of the dicing tape by regulating the pulling-out area of the dicing tape to a predetermined trajectory.

Effects of the Invention

[0011] The present invention can automatically perform switching and replacement of a dicing tape.

Brief Description of the Drawings

[0012]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Modes for Carrying Out the Invention

[0013] An embodiment of the present invention will be described with reference to the drawings. In the following, when referring to the number of components, numerical values, amounts, ranges, etc., unless otherwise specified and except for cases where it is clearly limited to a specific number in principle, it is not limited to that specific number, and it may be more or less than the specific number.

[0014] When referring to the shape, positional relationship, etc. of components, etc., unless otherwise explicitly stated or it is considered not to be so in principle, it includes those that are substantially approximated or similar to the shape, etc.

[0015] In addition, the drawings may be exaggerated, such as by enlarging characteristic parts for easier understanding of the features, and the dimensional ratios of components are not necessarily the same as the actual ones.

[0016] As shown in FIGS. 1 and 2, the tape attachment system 1 attaches a dicing tape DT to a work W and a dicing frame DF. The work W is, for example, a semiconductor substrate such as a silicon wafer, but is not limited thereto. The dicing tape DT is an ultraviolet curable tape or the like.

[0017] The tape attachment system 1 includes a transfer device 2 and an attachment device 3 as a tape attachment device.

[0018] The transfer device 2 includes an inner peripheral table 21 that holds the work W and an outer peripheral table 22 on which the dicing frame DF is placed.

[0019] On the surface of the inner peripheral table 21, an adsorbent (not shown) made of a porous material having innumerable pores is embedded. The roughness of the pores of the adsorbent is, for example, #400 or #800, etc.

[0020] The inner peripheral table 21 is switchably connected to a vacuum source (not shown) and a compressed air source. When the vacuum source is activated, a negative pressure is supplied between the work W placed on the inner peripheral table 21 and the upper surface (adsorbing surface) of the adsorbent, and the work W is adsorbed and held on the adsorbing surface. Also, when the compressed air source is activated, compressed air (release air) is supplied between the work W and the adsorbing surface, and the adsorption between the work W and the adsorbing surface is released.

[0021] The inner peripheral table 21 and the outer peripheral table 22 are placed on a slider 23 and are configured to be slidable in the transport direction D1.

[0022] As shown in FIG. 3, the sticking device 3 includes a base 31 on which a tape magazine 4 is detachably installed, movable guide rollers 32a and 32b erected from the side surface of the base 31 to regulate the trajectory of the dicing tape DT, fixed guide rollers 33a and 33b erected from the side surface of the base 31 to regulate the trajectory of the dicing tape DT, a pressing roller 34 that moves up and down to stick the tape body B to the workpiece W, and a knife plate 35 that regulates the trajectory of the separator S.

[0023] As shown in FIG. 4, the tape magazine 4 is a device that accommodates the dicing tape DT in a state where a part of the dicing tape DT wound in a roll shape is pulled out, and is modularized so as to be transportable by a first transport robot 6 and a second transport robot 7 described later. The dicing tapes DT accommodated in each tape magazine 4 may be of the same type or different types. Hereinafter, the range where a part of the dicing tape DT is pulled out is referred to as a "pull-out area R".

[0024] The tape magazine 4 includes a pay-out shaft 41 that supports the roll-shaped dicing tape DT so as to be pay-outable, a take-up shaft 42 that winds up the separator S of the dicing tape DT to impart a pay-out force to the dicing tape DT, and fixed guide rollers 43a to 43b that regulate the trajectory of the dicing tape DT while applying tension to the dicing tape DT and pulling out a part of the dicing tape DT.

[0025] The pay-out shaft 41 is provided with a rotation speed sensor that calculates the remaining amount of the dicing tape DT from the rotation speed of the pay-out shaft 41, a metal detection sensor that detects the pay-out shaft 41 when the dicing tape DT runs out, etc., so that it is possible to detect that the remaining amount of the dicing tape DT has decreased.

[0026] The pay-out shaft 41 and the take-up shaft 42 are erected from the side surface of the base 44, and the fixed guide rollers 43a and 43b are supported at both ends by the base 44 and the support plate 45. Further, at the upper end of the base 44, an adsorbed portion 46 that can be adsorbed by the first transfer robot 6 and the second transfer robot 7 described later is provided. The base 44 and the base portion 31 are configured to be detachable by a locking mechanism (not shown) or the like.

[0027] Also, a notch portion 47 is provided in a part of the base 44, specifically, between the pay-out shaft 41, the take-up shaft 42 and the fixed guide roller 43a as viewed from the side surface. The notch portion 47 is set to a size that can accommodate the movable guide rollers 32a and 32b, the fixed guide rollers 33a and 33b, and the knife plate 35.

[0028] As shown in FIG. 2, the tape sticking system 1 includes a stocker 5 that stores a plurality of tape magazines 4, and a first transfer robot 6 as a transfer device that transfers the tape magazine 4 between the sticking device 3 and the stocker 5. The first transfer robot 6 includes a suction portion 61 that can suction and hold the adsorbed portion 46 of the tape magazine 4. Hereinafter, when distinguishing between the tape magazine 4A attached to the sticking device 3 and the tape magazine 4B stored in the stocker 5, the former is denoted by the reference numeral 4A and the latter is denoted by the reference numeral 4B for distinction.

[0029] In FIGS. 1 and 2, the stocker 5 mounts a plurality of tape magazines 4B on the pallet 51 shown in FIG. 5, the pallet 51 is configured to be movable within the stocker 5, and the first transfer robot 6 holds the tape magazine 4B transported to a predetermined take-out position 52 of the stocker 5 and transports it to the sticking device 3.

[0030] In addition, the tape application system 1 includes a second transfer robot 7 as a replacement device. The second transfer robot 7 is provided with a suction unit 71 that can suction and hold the suction parts 46 of the tape magazine 4B in the stocker 5 and the external tape magazine 4. Hereinafter, when distinguishing the external tape magazine 4 from the tape magazine 4B stored in the stocker 5, the external tape magazine is designated with the symbol 4C for distinction.

[0031] In FIG. 2, the stocker 5 mounts a plurality of tape magazines 4B on a pallet 51 configured to be movable within the stocker 5, and after the second transfer robot 7 holds and discharges the tape magazine 4B conveyed to a predetermined replacement position 53 of the stocker 5, it illustrates a configuration in which the external tape magazine 4C is conveyed to the replacement position 53.

[0032] The external tape magazine 4C may be stored in an external rack or the like, or may be of any type such as being conveyed as needed by a conveying device or the like. Also, the stocker 5 stores a tape magazine 4B containing a dicing tape DT with a high usage frequency, and the external rack or the like stores a tape magazine 4C containing a dicing tape DT with a low usage frequency, thereby suppressing the frequency of tape replacement. Also, the external tape magazine 4C may be shared by a plurality of tape application systems 1.

[0033] The operation of the tape application system 1 is controlled via a controller 8 as a control device. The controller 8 controls each of the components constituting the tape application system 1. The controller 8 is, for example, a computer and is composed of a CPU, a memory, etc. Note that the function of the controller 8 may be realized by controlling using software or may be realized by an operation using hardware.

[0034] The controller 8 includes an input device 81 and a storage device 82.

[0035] The input device 81 is a device for calling a desired dicing tape DT by inputting the processing conditions of the work W, etc., and is, for example, a touch panel or the like.

[0036] The storage device 82 stores the processing conditions of a plurality of works W and the type information of the dicing tape DT corresponding to each processing condition in association with each other. Further, the storage device 82 stores, for each tape magazine 4, the type information of the dicing tape DT accommodated in the tape magazine 4, the position information of the tape magazine 4B in the stocker 5 (such as a number capable of identifying each pallet 51), and the position information of the external tape magazine 4C stored in an external rack or the like. Note that the position information of the tape magazine 4 is updated each time the tape magazine 4 is replaced or exchanged.

[0037] Next, the operation of the tape sticking system 1 will be described with reference to the drawings.

[0038] <Work conveyance> First, the dicing frame DF is transferred onto the outer peripheral table 22 by a conveyance hand or the like (not shown).

[0039] Next, the work W is transferred onto the inner peripheral table 21 by a conveyance hand or the like (not shown). Thereafter, when negative pressure is supplied between the work W and the adsorption surface from a compressed air source, the work W is adsorbed to the inner peripheral table 21. The upper surface of the work W and the upper surface of the dicing frame DF are set to be substantially flush.

[0040] <Tape magazine mounting> In parallel with or before and after the work conveyance, the tape magazine 4A is mounted on the sticking device 3.

[0041] Specifically, first, based on the processing conditions of the work W input through the input device 81 by an operator or the like, the controller 8 calls the type information of the dicing tape DT suitable for the processing conditions of the work W from the storage device 82.

[0042] Next, the controller 8 determines whether or not to switch the dicing tape DT based on whether the type information of the dicing tape DT suitable for the processing conditions of the called work W matches the type information of the dicing tape DT of the tape magazine 4A mounted on the base 31. Further, the controller 8 determines whether or not to replace the dicing tape DT based on the remaining amount of the dicing tape DT in the tape magazine 4A.

[0043] Next, when the controller 8 determines that it is necessary to switch or replace the dicing tape DT, the controller 8 calls the position information in the stocker 5 for the tape magazine 4B in which the dicing tape DT is stored from the storage device 82, and controls the operation to move the pallet 51 storing the called tape magazine 4B to the take-out position 52.

[0044] The first transfer robot 6 extends and retracts the arm to the vicinity of the tape magazine 4B transported to the take-out position 52, and the suction portion 61 sucks and holds the adsorbed portion 46.

[0045] Thereafter, the first transfer robot 6 extends and retracts the tape magazine 4B to the vicinity of the base 31, and the base 44 is attached to the base 31. At this time, as shown in FIG. 6(a), the movable guide rollers 32a, 32b, the fixed guide rollers 33a, 33b, and the knife plate 35 are arranged in the notch portion 47. Further, the movable guide roller 32a and the fixed guide roller 33a are arranged on opposite sides of each other with the dicing tape DT interposed therebetween, and the movable guide roller 32b and the fixed guide roller 33b are arranged on opposite sides of each other with the dicing tape DT interposed therebetween.

[0046] Next, as shown in FIG. 6(b), the movable guide roller 32a moves so as to approach the fixed guide roller 33a to pay out the dicing tape DT upward, and the movable guide roller 32a and the fixed guide roller 33a regulate the trajectory of the dicing tape DT in the drawing area R with the dicing tape DT interposed therebetween.

[0047] Similarly, as shown in FIG. 6(c), the movable guide roller 32b moves closer to the fixed guide roller 33b to pay out the dicing tape DT downward, and the movable guide roller 32b and the fixed guide roller 33b regulate the trajectory of the dicing tape DT in the drawing area R by sandwiching the dicing tape DT.

[0048] Then, as shown in FIG. 6(d), the knife plate 35 moves closer to the pressing roller 34 to pay out the dicing tape DT downward, and regulates the trajectory of the dicing tape DT in the drawing area R to reach the vicinity of the pressing roller 34.

[0049] Thereafter, the adsorption between the adsorption part 61 and the adsorbed part 46 is released, and the first transfer robot 6 delivers the tape magazine 4B to the pasting device 3.

[0050] In this way, the tape magazine 4 that accommodates an appropriate type of dicing tape DT according to the processing conditions of the input workpiece W can be delivered to the pasting device 3.

[0051] In addition, when removing the tape magazine 4A mounted on the base 31 prior to the mounting of the tape magazine 4B, first, the movable guide rollers 32a, 32b, the fixed guide rollers 33a, 33b, and the knife plate 35 are separated from the dicing tape DT, and the trajectory of the dicing tape DT is shifted to a state where it is regulated by the pay-out shaft 41, the take-up shaft 42, and the fixed guide roller 43a.

[0052] Next, the first transfer robot 6 bends and extends the arm to the vicinity of the tape magazine 4A mounted on the pasting device 3, and the adsorption part 61 adsorbs and holds the adsorbed part 46. Thereafter, the base 44 is removed from the base 31.

[0053] Thereafter, the first transfer robot 6 bends and extends the tape magazine 4A to the vicinity of the take-out position 52 of the stocker 5, places the tape magazine 4A on the pallet 51, and delivers the tape magazine 4A to the stocker 5.

[0054] In addition, the stocker 5 and the first transfer robot 6 may have any configuration as long as they cooperate to supply the taping device 3 with the tape magazine 4B containing the dicing tape DT selected according to the type of the workpiece W or the like.

[0055] For example, a plurality of tape magazines 4B may be respectively arranged at predetermined positions in the stocker 5, and the first transfer robot 6 may bend and extend its arm to the vicinity of a desired tape magazine 4B in the stocker 5, hold the tape magazine 4B, and transfer it to the taping device 3.

[0056] In such a configuration, first, the controller 8 calls from the storage device 82 the position information in the stocker 5 regarding the tape magazine 4B containing the dicing tape DT of a type suitable for the processing conditions of the workpiece W, sends the position information of this tape magazine 4B to the first transfer robot 6, and the first transfer robot 6 bends and extends its arm to the vicinity of the tape magazine 4B in the stocker 5, and the suction portion 61 sucks and holds the adsorbed portion 46.

[0057] Thereafter, the first transfer robot 6 bends and extends to the vicinity of the base portion 31 of the tape magazine 4, and the base 44 is attached to the base portion 31.

[0058] If there is no dicing tape DT of a type suitable for the processing conditions of the workpiece W or the like in the stocker 5, an external tape magazine 4C is carried into the stocker 5, and then the external tape magazine 4C is attached to the taping device 3.

[0059] Specifically, the controller 8 calls from the storage device 82 the position information of the external tape magazine 4C containing the dicing tape DT of a type suitable for the processing conditions of the workpiece W or the like, sends it to the second transfer robot 7, and the second transfer robot 7 sucks and holds this external tape magazine 4C and delivers it to the pallet 51 located at the replacement position 53 of the stocker 5.

[0060] After that, the controller 8 controls the operation so as to move the pallet 51 for storing the loaded tape magazine 4C to the take-out position 52 with respect to the stocker 5. Then, the first transfer robot 6 bends and extends the arm to the vicinity of the tape magazine 4C conveyed to the take-out position 52, and the suction portion 61 sucks and holds the adsorbed portion 46.

[0061] After that, the first transfer robot 6 bends and extends the tape magazine 4C to the vicinity of the base 31, and the base 44 is attached to the base 31.

[0062] In this way, since the capacity of the tape magazine 4 stored in the stocker 5 can be substantially expanded, it is possible to cope with various types of dicing tapes DT. Furthermore, since a plurality of tape sticking systems 1 can share an external tape magazine 4', the dicing tape DT can be used effectively.

[0063] Note that the stocker 5 and the second transfer robot 7 may have any configuration as long as they cooperate to replace the tape magazine 4B in the stocker 5 with the external tape magazine 4C.

[0064] For example, the stocker 5 may be arranged with a plurality of tape magazines 4C at predetermined positions, and the second transfer robot 7 may move inside the stocker 5 to the position of the tape magazine 4B, hold the tape magazine 4B, discharge it from the stocker 5, and then carry an external tape magazine 4C into the stocker 5.

[0065] In such a configuration, when an external tape magazine 4C is carried into the stocker 5, first, the controller 8 calls the position information of the external tape magazine 4C containing the type of dicing tape DT suitable for the processing conditions of the workpiece W and sends it to the second transfer robot 7. The second transfer robot 7 sucks and holds this external tape magazine 4C and carries it into a predetermined position in the stocker 5.

[0066] After that, the controller 8 sends the position information of the newly-introduced tape magazine 4B carried in from the outside to the stocker 5 to the first transfer robot 6, and the first transfer robot 6 flexes and extends its arm to the vicinity of the tape magazine 4B carried in from the outside, and the suction portion 61 sucks and holds the portion to be sucked 46.

[0067] After that, the first transfer robot 6 flexes and extends the tape magazine 4B carried in from the outside to the vicinity of the base 31, and the base 44 is attached to the base 31.

[0068] <Tape Attachment> Next, the slider 23 is driven to move the inner peripheral table 21 and the outer peripheral table 22 so that one end (attachment start position) of the tape body B is disposed below the pressing roller 34 as shown in FIG. 7(a).

[0069] Next, the take-up shaft 42 rotates to pay out the dicing tape DT, and the pressing roller 34 presses the tape body B against the dicing frame DF and attaches the tape body B with a predetermined pressing force.

[0070] After that, when the inner peripheral table 21 and the outer peripheral table 22 move along the conveyance direction D1, as shown in FIG. 7(b), the tape body B is gradually attached to the dicing frame DF and the workpiece W.

[0071] Then, as shown in FIG. 7(c), when the tape body B reaches the other end (attachment end position) of the dicing frame DF, the workpiece W and the dicing frame DF are integrally attached via the tape body B.

[0072] In this way, the pasting device 3 according to the present embodiment is a pasting device 3 that pastes the dicing tape DT onto the dicing frame DF and the workpiece W. A base 31 is provided with a tape magazine 4 that stores the dicing tape DT in a state where a part of the dicing tape DT wound in a roll is pulled out, and the base 31 is installed so that it can be replaced. The movable guide rollers 32a, 32b, the fixed guide rollers 33a, 33b, and the knife plate 35 are movable so as to regulate a lead-out area R where a part of the dicing tape DT is pulled out along a predetermined track. It is configured to include.

[0073] According to this configuration, when the tape magazine 4 that stores the dicing tape DT with a part of it pulled out is replaced on the base 31, the movable guide rollers 32a, 32b, the fixed guide rollers 33a, 33b, and the knife plate 35 regulate the lead-out area R of the dicing tape DT along a predetermined track, so that the switching and replacement of the dicing tape DT can be automatically performed.

[0074] Further, the tape magazine 4 according to the present embodiment is a tape magazine 4 that can be replaced in a pasting device 3 that pastes the dicing tape DT onto the dicing frame DF and the workpiece W. The tape magazine 4 includes a base 44 that can be replaced in the pasting device 3, a pay-out shaft 41 provided on the base 44 and supporting the dicing tape DT wound in a roll, and a take-up shaft 42 provided on the base 44 and winding up the separator S of the dicing tape DT. The dicing tape DT is supported by the pay-out shaft 41 and the take-up shaft 42 in a state where a part of it is pulled out, and a lead-out area R where a part of the dicing tape DT is pulled out can be regulated along a predetermined track by the movable guide rollers 32a, 32b, the fixed guide rollers 33a, 33b, and the knife plate 35 of the pasting device 3.

[0075] According to this configuration, when the tape magazine 4 that houses the dicing tape DT with a part of it being drawn out is replaced on the base 31, the movable guide rollers 32a and 32b, the fixed guide rollers 33a and 33b, and the knife plate 35 regulate the drawing area R of the dicing tape DT along a predetermined trajectory, thereby enabling automatic switching and replacement of the dicing tape DT.

[0076] In addition, the present invention can be variously modified other than the above as long as it does not depart from the spirit of the present invention, and it is natural that the present invention extends to those modified ones.

[0077] In the above-described embodiment, the movable guide rollers 32a and 32b, the fixed guide rollers 33a and 33b, and the knife plate 35 are exemplified and described as the regulating portions that regulate the trajectory of the drawing area R of the dicing tape DT. However, the number and types of the regulating portions are not limited to these.

Explanation of Reference Numerals

[0078] 1: Tape sticking system 2: Conveying device 21: Inner peripheral side table 22: Outer peripheral side table 23: Slider 3: Sticking device (tape sticking device) 31: Base 32a, 32b: Movable guide rollers (regulating portions) 33a, 33b: Fixed guide rollers (regulating portions) 34: Pressing roller 35: Knife plate (regulating portion) 4, 4A, 4B, 4C: Tape magazines 41: Pay-out shaft 42: Take-up shaft 43a, 43b: Fixed guide rollers 44: Base 45: Support plate 46: Adsorbed portion 47: Notch portion 5: Stocking device 51: Pallet 6: First transfer robot (delivery device) 61: Suction part 7: Second transfer robot (replacement device) 71: Suction part 8: Controller (control device) 81: Input device 82: Storage device B: Tape body D1: Conveying direction DF: Dicing frame DT: Dicing tape R: Pull-out area S: Separator W: Workpiece

Claims

1. A tape sticking device for sticking a dicing tape to a dicing frame and a workpiece, a base on which a tape magazine for storing the dicing tape is removably installed in a state where a part of the dicing tape wound in a roll is folded back and drawn out in a U shape, a pair of movable restricting portions that move away from each other from a standby position located inside the standby orbit of the dicing tape in a lead-out region where a part of the dicing tape is folded back and drawn out in a U shape to a restricting position located outside the standby orbit, pay out the dicing tape in the lead-out region, and shift the orbit of the dicing tape in the lead-out region from the standby orbit to a sticking orbit that projects outside the standby orbit, A tape sticking device, characterized by comprising the above.

2. A tape magazine that is replaceable with a tape sticking device for sticking a dicing tape to a dicing frame and a workpiece, a base that is removably attached to the tape sticking device, a pay-out shaft provided on the base for supporting the dicing tape wound in a roll, a winding shaft provided on the base for winding up the separator of the dicing tape, a fixed restricting portion provided on the base for restricting the orbit of the dicing tape so as to fold back a part of the dicing tape supported by the pay-out shaft and the winding shaft and draw it out in a U shape, comprising a notch portion capable of accommodating a pair of movable restricting portions of the tape sticking device is formed on the base, the pair of movable restricting portions move away from each other when viewed from the side from a standby position located inside the standby orbit of the dicing tape in a lead-out region where a part of the dicing tape is folded back and drawn out in a U shape to a restricting position located outside the standby orbit, pay out the dicing tape in the lead-out region, and shift the orbit of the dicing tape in the lead-out region from the standby orbit to a sticking orbit that projects outside the standby orbit. A tape magazine characterized by this.

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