Tool shape measuring device and machine tool

Abstract

To provide a tool shape measuring device which can inhibit deterioration of measuring accuracy from being caused by dirt adhering to a translucent plate, and to provide a machine tool.SOLUTION: A tool shape measuring device 10 includes: housings 20, 40 respectively having openings 21, 41 directed to the tool T side; a floodlight part 30 or a light receiving part 50 disposed in the housing 20, 40; and translucent plates 25, 45 respectively provided at the openings 21, 41 of the housings 20, 40. Liquid repellent layers 26, 46 are provided at tool T side surfaces of the translucent plates 25, 45. Air A is blown onto the liquid repellent layers 26, 46 of the translucent plates 25, 45.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to a tool shape measuring device and a machine tool.

Background Art

[0002] Conventionally, for example, a tool shape measuring device that images a tool of a precision machine and detects the state of the tool based on the shape of the imaged tool is known (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In a conventional tool shape measuring device, when measuring a tool repeatedly, dirt such as oil may adhere to the optical system. In this case, the measurement accuracy by the tool shape measuring device may decrease.

[0005] The present disclosure provides a tool shape measuring device and a machine tool capable of suppressing a decrease in measurement accuracy as dirt adheres to a light-transmitting plate.

Means for Solving the Problems

[0006] The tool shape measuring device according to the present embodiment includes a housing having an opening facing the tool side, a light projecting unit or a light receiving unit disposed in the housing, and a light-transmitting plate provided at the opening of the housing. A liquid-repellent layer is provided on the surface of the light-transmitting plate on the tool side, and air is blown onto the liquid-repellent layer of the light-transmitting plate.

[0007] In the tool shape measuring device according to the present embodiment, an air outlet is located on the tool-side surface of the housing, and the air from the air outlet may flow along the surface of the liquid repellent layer.

[0008] In the tool shape measuring device according to the present embodiment, a heat dissipation plate is attached to the light projecting unit or the light receiving unit, and the air may pass around the heat dissipation plate in the housing.

[0009] In the tool shape measuring device according to the present embodiment, a cap is provided around the light transmissive plate, and the cap may have a cap opening for blowing out the air toward the tool side.

[0010] In the tool shape measuring device according to the present embodiment, the cap may have a tapered shape from the light transmissive plate side toward the tool side.

[0011] The tool shape measuring device according to the present embodiment is provided on one side of a tool and includes a first housing having a first opening facing the tool side, a light projecting unit disposed in the first housing, a second housing provided on the other side of the tool and having a second opening facing the tool side, a light receiving unit disposed in the second housing, a first light transmissive plate provided at the first opening of the first housing, and a second light transmissive plate provided at the second opening of the second housing. A first liquid repellent layer is provided on the tool-side surface of the first light transmissive plate, a second liquid repellent layer is provided on the tool-side surface of the second light transmissive plate, and air is blown onto the first liquid repellent layer of the first light transmissive plate and the second liquid repellent layer of the second light transmissive plate, respectively.

[0012] The machine tool according to the present embodiment includes the tool shape measuring device according to the present embodiment.

Advantages of the Invention

[0013] According to the present embodiment, it is possible to suppress a decrease in measurement accuracy as dirt adheres to the light transmissive plate.

Brief Description of the Drawings

[0014]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

[0015] Hereinafter, each embodiment will be specifically described with reference to the drawings. Each of the drawings shown below is schematically illustrated. Therefore, the size and shape of each part are appropriately exaggerated for easy understanding. Also, it is possible to make appropriate changes and implement within the scope not departing from the technical idea. In each of the drawings shown below, the same parts are denoted by the same reference numerals, and some detailed descriptions may be omitted. Also, the numerical values and material names of the dimensions of each member described in this specification are examples as embodiments, and are not limited thereto, and can be appropriately selected and used. In this specification, terms specifying shapes and geometric conditions, such as terms like parallel, orthogonal, and perpendicular, include not only the strictly meant meaning but also substantially the same state. Also, for convenience of explanation, the terms "above" or "below" may be used for explanation, but the up and down directions may be reversed.

[0016] (First Embodiment) Hereinafter, the tool shape measuring device according to the first embodiment will be described with reference to the drawings. First, the configuration of the tool shape measuring device according to the present embodiment will be described. FIG. 1 is a view showing a tool shape measuring device according to an embodiment.

[0017] As shown in Fig. 1, the tool shape measuring device 10 according to the present embodiment is a device that detects the shape of the tool T by imaging the tool T. The tool shape measuring device 10 is provided, for example, inside a machine tool 60 (see Fig. 2) such as an ultra-precision machine tool, and measures the shape of the tool T inside the machine tool 60.

[0018] The tool shape measuring device 10 includes a first housing 20, a light projecting unit 30, a second housing 40, a light receiving unit 50, a first light-transmitting plate 25, and a second light-transmitting plate 45. The first housing 20 is provided on one side (the minus X direction side) of the tool T. The light projecting unit 30 is disposed inside the first housing 20. The first housing 20 has a first opening 21 facing the tool T side. The second housing 40 is provided on the other side (the plus X direction side) of the tool T. The second housing 40 has a second opening 41 facing the tool T side. The light receiving unit 50 is disposed inside the second housing 40. The first light-transmitting plate 25 is provided at the first opening 21 of the first housing 20. The second light-transmitting plate 45 is provided at the second opening 41 of the second housing 40. A first liquid-repellent layer 26 is provided on the surface of the first light-transmitting plate 25 on the tool T side. Also, a second liquid-repellent layer 46 is provided on the surface of the second light-transmitting plate 45 on the tool T side. Air A is blown onto the first liquid-repellent layer 26 of the first light-transmitting plate 25 and the second liquid-repellent layer 46 of the second light-transmitting plate 45, respectively.

[0019] Next, the detailed configuration of the tool shape measuring device 10 will be further described.

[0020] The first housing 20 is fixed on the base 11 on one side (the minus X-direction side) of the tool T during measurement. The base 11 may be fixed inside the machine tool 60. The first housing 20 may be, for example, in the shape of a substantially rectangular parallelepiped box as a whole. The light projecting unit 30 is housed inside the first housing 20. The first housing 20 protects the light projecting unit 30 and suppresses the adhesion of foreign matters such as chips, water, and oil to the light projecting unit 30. The first housing 20 is provided with a first air inlet 22 through which air A flows in. The first air inlet 22 is located on the surface of the light projecting unit 30 on the side opposite to the tool T (the minus X-direction side). The first housing 20 is also provided with a first air outlet 23 through which the air A is blown out. The first air outlet 23 is located on the surface of the first housing 20 on the tool T side (the plus X-direction side). The first air outlet 23 is directed toward the first light-transmitting plate 25 side (downward). The first air outlet 23 preferably extends over the entire width direction (Y direction) of the first light-transmitting plate 25. Thereby, the entire first liquid-repellent layer 26 can be cleaned using the air A. The flow of the air A inside the first housing 20 will be described later.

[0021] The first opening 21 is located on the surface of the first housing 20 on the tool T side (the plus X-direction side). The first opening 21 is located below the first air outlet 23 of the first housing 20. The light from the light projecting unit 30 is irradiated toward the tool T side from the first opening 21. For this reason, the first opening 21 is provided at least at a position through which the optical axis Oa of the light receiving unit 50 passes.

[0022] The light projecting unit 30 is located inside the first housing 20. The light projecting unit 30 irradiates light toward the light receiving unit 50. The optical axis Oa of the light receiving unit 50 may be perpendicular to the central axis CL of the tool T. The light projecting unit 30 has a light source. The light projecting unit 30 emits light at least during the imaging of the tool T. The light irradiated from the light projecting unit 30 may be, for example, of a single wavelength or a synthesized light of a plurality of wavelengths (such as white). As the light source of the light projecting unit 30, for example, a light emitting diode (LED) element can be used.

[0023] A first heat dissipation plate 31 is attached to the light projecting unit 30. The first heat dissipation plate 31 dissipates heat generated from the light projecting unit 30. The first heat dissipation plate 31 may be a metal plate such as copper, for example. In this case, the first heat dissipation plate 31 is located on the surface of the light projecting unit 30 on the opposite side (minus side in the X direction) of the tool T, but is not limited thereto. The first heat dissipation plate 31 may be located on the upper surface (plus side in the Z direction) or the side surface (plus or minus side in the Y direction) of the light projecting unit 30.

[0024] The second housing 40 is fixed on the base 11 on the other side (plus side in the X direction) of the tool T. The second housing 40 may be, for example, in the shape of a substantially rectangular parallelepiped box as a whole. A light receiving unit 50 is housed inside the second housing 40. The second housing 40 protects the light receiving unit 50 and suppresses foreign matters such as chips, water, and oil from adhering to the light receiving unit 50. The second housing 40 is provided with a second air inlet 42 through which air A flows in. The second air inlet 42 is located on the surface of the light receiving unit 50 on the opposite side (plus side in the X direction) of the tool T. The second housing 40 is also provided with a second air outlet 43 that blows out the air A. The second air outlet 43 is located on the surface of the second housing 40 on the tool T side (minus side in the X direction). The second air outlet 43 is directed toward the second light transmitting plate 45 side (downward). The second air outlet 43 preferably extends over the entire width direction (Y direction) of the second light transmitting plate 45. Thereby, the entire second liquid repellent layer 46 can be cleaned using the air A. The flow of the air A in the second housing 40 will be described later.

[0025] The second opening 41 is located on the surface of the second housing 40 on the tool T side (plus side in the X direction). The second opening 41 is located below the second air outlet 43 of the second housing 40. The light from the light projecting unit 30 passes through the second opening 41 and enters the light receiving unit 50 side. Therefore, the second opening 41 is provided at least at a position through which the optical axis Oa of the light receiving unit 50 passes.

[0026] The light-receiving unit 50 is located inside the second housing 40. The light-receiving unit 50 receives the light from the light-projecting unit 30. Also, the light-receiving unit 50 measures the shape of the tool T and transmits the measurement result to the control unit 65 (see FIG. 2). The light-receiving unit 50 images the tool T through the second light-transmitting plate 45 from the second housing 40 side. The light-receiving unit 50 obtains an image of the tool T by receiving the light emitted from the light-projecting unit 30 toward the tool T. That is, when imaging the tool T, while irradiating the tool T with light from the light-projecting unit 30, the light-receiving unit 50 images the tool T. Thereby, an image of the tool T is obtained as digital data. The light-receiving unit 50 also includes a camera 52 and a lens 53 attached to the camera 52. The imaging range of the light-receiving unit 50 is preferably set so that the entire width direction (Y-axis direction) of the tool T is included. Thereby, the width direction region of the tool T can be observed without excess or deficiency.

[0027] The camera 52 has an imaging element such as a CCD or a CMOS. The camera 52 may have a plurality of imaging elements arranged in a columnar shape. The camera 52 may have, for example, imaging elements arranged one-dimensionally or imaging elements arranged in a two-dimensional matrix. As the lens 53, for example, a telecentric lens or the like may be used. By attaching the lens 53 to the camera 52, the imaging range and the depth of field can be adjusted. An optical jig such as a mirror may be appropriately arranged between the camera 52 and the lens 53 according to the intended use. Note that the light-receiving unit 50 is not limited to an imaging type. The light-receiving unit 50 may be, for example, a line sensor or a laser measuring instrument.

[0028] A second heat dissipation plate 51 is attached to the light-receiving unit 50. The second heat dissipation plate 51 releases the heat generated from the light-receiving unit 50. The second heat dissipation plate 51 may be, for example, a metal plate such as copper. In this case, the second heat dissipation plate 51 is located on the upper surface (Z-direction plus side) of the light-receiving unit 50, but is not limited thereto. The second heat dissipation plate 51 may be located on the surface of the light-receiving unit 50 on the opposite side (X-direction plus side) of the tool T, or on the side surface (Y-direction plus side or minus side) of the light-receiving unit 50.

[0029] The first light-transmitting plate 25 is arranged to close the first opening 21 of the first housing 20. The first light-transmitting plate 25 is preferably larger than the first opening 21. Also, the first light-transmitting plate 25 is preferably in close contact with the periphery of the first opening 21 without any gaps. The first light-transmitting plate 25 may have, for example, a circular or rectangular planar shape. The first light-transmitting plate 25 is preferably detachable from the first opening 21. The first light-transmitting plate 25 is a plate-like member having transparency. Thereby, the light from the light-projecting unit 30 reaches the tool T side. The transmittance of visible light of the first light-transmitting plate 25 may be 85% or more, and preferably 90% or more. Note that there is no particular upper limit to the transmittance of visible light of the first light-transmitting plate 25, but it may be, for example, 100% or less. Note that visible light refers to light having a wavelength of 380 nm or more and 780 nm or less. Examples of the material of the first light-transmitting plate 25 include glass, plastics (polystyrene resin, polyester resin, polyethylene resin, polypropylene resin, acrylic resin, polycarbonate resin, fluororesin, methylpentene resin, vinyl chloride resin, etc.).

[0030] The first liquid-repellent layer 26 is located on the surface of the first light-transmitting plate 25 on the tool T side (the surface on the +X direction side). The first liquid-repellent layer 26 may be a layer subjected to a liquid-repellent treatment, for example, a water-repellent or oil-repellent treatment. By providing the first liquid-repellent layer 26, it is possible to suppress the adhesion of foreign substances such as chips, water, and oil to the first light-transmitting plate 25. Thereby, it is possible to suppress a decrease in the measurement accuracy of the tool shape measuring device 10 after the tool shape measuring device 10 is repeatedly used. The first liquid-repellent layer 26 may be integrally formed with the first light-transmitting plate 25, or may be formed separately from the first light-transmitting plate 25 and attached to the first light-transmitting plate 25. The first liquid-repellent layer 26 is preferably provided over the entire surface of the first light-transmitting plate 25 on the tool T side.

[0031] The liquid repellency of the first liquid repellent layer 26 may be such that the contact angle with respect to a liquid such as water or oil is, for example, 20° or more, preferably 40° or more, more preferably 70° or more, and particularly preferably 80° or more. The method for imparting a predetermined liquid repellency to the first liquid repellent layer 26 is not particularly limited and can be appropriately selected according to the material constituting the first liquid repellent layer 26. For example, liquid repellency may be imparted by irradiating the first liquid repellent layer 26 with an energy ray such as a gamma ray. Also, a material imparting liquid repellency may be added to the material constituting the first liquid repellent layer 26. Further, the first liquid repellent layer 26 may be formed by surface coating with a material imparting liquid repellency. Also, the first liquid repellent layer 26 may have a large number of fine irregularities formed thereon.

[0032] The second light-transmitting plate 45 is disposed so as to close the second opening 41 of the second housing 40. The second light-transmitting plate 45 is preferably larger than the second opening 41. Also, the second light-transmitting plate 45 is preferably in close contact with the periphery of the second opening 41 without any gap. The second light-transmitting plate 45 may have, for example, a circular or rectangular planar shape. The second light-transmitting plate 45 is preferably detachable with respect to the second opening 41. The second light-transmitting plate 45 is a plate-like member having transparency. Thereby, the tool T can be observed using the light receiving portion 50. Note that the material of the second light-transmitting plate 45 may be the same as the material of the first light-transmitting plate 25 described above.

[0033] The second liquid-repellent layer 46 is located on the surface of the second light-transmitting plate 45 on the tool T side (the surface on the minus X direction side). The second liquid-repellent layer 46 may be a layer subjected to a liquid-repellent treatment, such as a water-repellent or oil-repellent treatment. By providing the second liquid-repellent layer 46, it is possible to suppress the adhesion of foreign substances such as chips, water, and oil to the second light-transmitting plate 45. Thereby, after repeatedly using the tool shape measuring device 10, it is possible to suppress a decrease in the measurement accuracy of the tool shape measuring device 10. The second liquid-repellent layer 46 may be integrally formed with the second light-transmitting plate 45, or may be separately formed from the second light-transmitting plate 45 and attached to the second light-transmitting plate 45. The second liquid-repellent layer 46 is preferably provided on the entire surface of the second light-transmitting plate 45 on the tool T side. Note that the configuration of the second liquid-repellent layer 46 may be the same as the configuration of the first liquid-repellent layer 26 described above.

[0034] The first housing 20 and the second housing 40 are arranged to be spaced apart from each other in the X direction. A measurement space S for measuring the tool T is formed between the first housing 20 and the second housing 40. When measuring with the tool shape measuring device 10, the tool T moves into the measurement space S, and the shape of the tool T is measured. Further, an opening / closing lid 12 for closing the measurement space S is provided around the first housing 20 and the second housing 40. The opening / closing lid 12 is moved by, for example, a cylinder (not shown) to open and close the measurement space S. The opening / closing lid 12 closes the measurement space S except when measuring with the tool shape measuring device 10. Thereby, it is possible to suppress the intrusion of foreign substances such as chips, water, and oil into the measurement space S. The opening / closing lid 12 opens the measurement space S when measuring with the tool shape measuring device 10. Thereby, the tool T to be measured can enter the measurement space S. Note that the opening / closing lid 12 may be retracted to either the first housing 20 or the second housing 40 when measuring with the tool shape measuring device 10.

[0035] The tool shape measuring device 10 shown in FIG. 1 is provided, for example, inside a machine tool 60 such as an ultra-precision machine tool. FIG. 2 is a schematic view showing such a machine tool 60. As shown in FIG. 2, the machine tool 60 has a rotating tool T. The tool T cuts a workpiece W located on a mounting table 61. The tool shape measuring device 10 is arranged at a position away from the mounting table 61. The tool T is movable between a machining position on the mounting table 61 and a measuring position inside the tool shape measuring device 10. The machine tool 60 is controlled by a control unit 65.

[0036] Next, the operation of the present embodiment having such a configuration will be described.

[0037] In the machine tool 60 shown in FIG. 2, the workpiece W is cut by the rotating tool T. After the cutting process is completed, the tool T moves to the tool shape measuring device 10 shown in FIG. 1, and the shape of the tool T is measured.

[0038] During this period, first, the opening / closing lid 12 moves from the closed position to the open position. As a result, the tool T can access the measurement space S between the first housing 20 and the second housing 40. Subsequently, the tool T moves toward the measurement space S and reaches a position crossing the optical axis Oa of the light receiving unit 50. Next, light is irradiated from the light projecting unit 30 toward the tool T. The light receiving unit 50 acquires an image of the tool T by receiving the light emitted from the light projecting unit 30 toward the tool T. Next, the light receiving unit 50 measures the shape of the tool T and transmits the measurement result to the control unit 65. Thereafter, the control unit 65 determines whether the shape of the tool T is normal.

[0039] Incidentally, while the shape of the tool T is being measured using the tool shape measuring device 10 in this manner, air A is blown onto the first liquid-repellent layer 26 of the first light-transmitting plate 25 and the second liquid-repellent layer 46 of the second light-transmitting plate 45, respectively. Specifically, as shown in FIG. 3, the air A from the first air outlet 23 of the first housing 20 blows downward. As a result, the air A flows downward from above along the surface of the first liquid-repellent layer 26 and cleans the surface of the first liquid-repellent layer 26. Similarly, the air A from the second air outlet 43 of the second housing 40 blows downward. As a result, the air A flows downward from above along the surface of the second liquid-repellent layer 46 and cleans the surface of the second liquid-repellent layer 46. In this way, the surfaces of the first liquid-repellent layer 26 and the second liquid-repellent layer 46 are each cleaned by the air A. As a result, due to the synergistic effect with the liquid-repellent properties of the first liquid-repellent layer 26 and the second liquid-repellent layer 46, it is possible to effectively suppress the adhesion of foreign substances such as chips, water, and oil to the first liquid-repellent layer 26 and the second liquid-repellent layer 46.

[0040] Next, the flow of the air A in the first housing 20 will be described with reference to FIG. 1. First, the air A flows into the first air inlet 22 of the first housing 20 from the outside. The inflowing air A passes through the inside of the first housing 20 and jets out from the first air outlet 23. During this time, the air A passes around the first heat dissipation plate 31 in the first housing 20 and is sent to the first air outlet 23 via above the light projection unit 30. Since the first heat dissipation plate 31 is located on the flow path of the air A in the first housing 20, the heat dissipation from the light projection unit 30 is promoted. Then, the air A blows out from the first air outlet 23. The air A from the first air outlet 23 flows downward along the surface of the first liquid-repellent layer 26.

[0041] Next, the flow of air A within the second housing 40 will be described. First, air A flows in from the outside into the second air inlet 42 of the second housing 40. The inflowing air A passes through the interior of the second housing 40 and is ejected from the second air outlet 43. During this process, air A passes around the second heat dissipation plate 51 within the second housing 40, and is sent to the second air outlet 43 via the light receiving portion 50. Since the second heat dissipation plate 51 is positioned on the air A flow path within the second housing 40, heat dissipation from the light receiving portion 50 is promoted. Thereafter, air A is blown out from the second air outlet 43. The air A from the second air outlet 43 flows downward along the surface of the second liquid repellent layer 46. In FIG. 1, the flow of air A within the first housing 20 and the second housing 40 is indicated by arrows.

[0042] As described above, according to the present embodiment, the first liquid repellent layer 26 is provided on the surface of the first light-transmitting plate 25 on the tool T side, and the second liquid repellent layer 46 is provided on the surface of the second light-transmitting plate 45 on the tool T side. Further, air A is blown onto the first liquid repellent layer 26 of the first light-transmitting plate 25 and the second liquid repellent layer 46 of the second light-transmitting plate 45, respectively. Thereby, it is possible to suppress the adhesion of foreign substances such as chips, water, and oil to the surfaces of the first light-transmitting plate 25 and the second light-transmitting plate 45. Alternatively, the foreign substances adhering to the surfaces of the first light-transmitting plate 25 and the second light-transmitting plate 45 can be removed. As a result, even after repeatedly measuring the tool T with the tool shape measuring device 10, dirt does not adhere to the first light-transmitting plate 25 and the second light-transmitting plate 45, and it is possible to suppress a decrease in the measurement accuracy of the tool shape measuring device 10.

[0043] Also, according to the present embodiment, the first air outlet 23 and the second air outlet 43 are respectively positioned on the surfaces of the first housing 20 and the second housing 40 on the tool T side. The air A from the first air outlet 23 and the second air outlet 43 flows along the surfaces of the first liquid repellent layer 26 and the second liquid repellent layer 46, respectively. Thereby, it is possible to more effectively suppress the adhesion of foreign substances such as chips, water, and oil to the surfaces of the first liquid repellent layer 26 and the second liquid repellent layer 46. Further, since the flow rate of the air A from the first air outlet 23 and the second air outlet 43 can be suppressed, there is no risk of the flow rate of the air A becoming excessive.

[0044] Also according to the present embodiment, the first heat dissipation plate 31 is attached to the light projecting unit 30, and the air A passes around the first heat dissipation plate 31 within the first housing 20. Similarly, the second heat dissipation plate 51 is attached to the light receiving unit 50, and the air A passes around the second heat dissipation plate 51 within the second housing 40. Thereby, the heat generated from the light projecting unit 30 and the light receiving unit 50 can be efficiently dissipated.

[0045] (Second Embodiment) Next, a second embodiment will be described with reference to FIGS. 4 and 5. FIGS. 4 and 5 are diagrams showing the second embodiment. The second embodiment shown in FIGS. 4 and 5 is mainly different in that a first cap 70 is provided around the first light-transmitting plate 25 and a second cap 80 is provided around the second light-transmitting plate 45, and other configurations are substantially the same as those of the first embodiment described above. In FIGS. 4 and 5, the same parts as those in the first embodiment shown in FIGS. 1 to 3 are denoted by the same reference numerals, and detailed description thereof is omitted.

[0046] As shown in FIGS. 4 and 5, the first cap 70 is provided on the surface of the first housing 20 on the tool T side (X-direction positive side). The first cap 70 is provided so as to surround the periphery of the first light-transmitting plate 25. The first cap 70 protects the first light-transmitting plate 25 and the first liquid-repellent layer 26, and suppresses the adhesion of foreign matters such as chips, water, and oil to the first liquid-repellent layer 26. The first cap 70 has a shape that tapers from the first light-transmitting plate 25 side toward the tool T side. The first cap 70 has a first cap opening 71 at its tip (tool T side). The first cap opening 71 has a planar shape smaller than that of the first light-transmitting plate 25. The optical axis Oa of the light receiving unit 50 passes through the inside of the first cap opening 71.

[0047] The first cap 70 is provided with a first cap air inlet 72 through which air A flows in. The first cap air inlet 72 is located on the lower side surface of the first cap 70. A first air pipe 73 for supplying air A is connected to the first cap air inlet 72. Also, the first cap opening 71 also serves as an air outlet for blowing out air A. The first cap opening 71 is directed toward the tool T side (the +X direction side).

[0048] Also, a second cap 80 is provided on the surface of the second housing 40 on the tool T side (the -X direction side). The second cap 80 is provided so as to surround the periphery of the second light-transmitting plate 45. The second cap 80 protects the second light-transmitting plate 45 and the second liquid-repellent layer 46, and suppresses the adhesion of foreign substances such as chips, water, and oil to the second liquid-repellent layer 46. The second cap 80 has a tapered shape from the second light-transmitting plate 45 side toward the tool T side. The second cap 80 has a second cap opening 81 at its tip (the tool T side). The second cap opening 81 has a planar shape smaller than that of the second light-transmitting plate 45. The optical axis Oa of the light receiving part 50 passes through the inside of the second cap opening 81. Note that the second cap 80 may have a configuration different from that of the first cap 70 or may have the same configuration.

[0049] The second cap 80 is provided with a second cap air inlet 82 through which air A flows in. The second cap air inlet 82 is located on the lower side surface of the second cap 80. A second air pipe 83 for supplying air A is connected to the second cap air inlet 82. Also, the second cap opening 81 also serves as an air outlet for blowing out air A. The second cap opening 81 is directed toward the tool T side (the -X direction side).

[0050] Next, the flow of air A within the first cap 70 will be described. First, air A flows into the first cap air inlet 72 of the first cap 70 from the first air pipe 73. Subsequently, air A passes through the interior of the first cap 70 and flows out from the first cap opening 71. During this time, air A is blown onto the first liquid-repellent layer 26 inside the first cap 70, passes through the surface of the first liquid-repellent layer 26, and flows toward the first cap opening 71 side. Thereafter, air A blows out from the first cap opening 71. The air A from the first cap opening 71 is blown toward the tool T side.

[0051] Next, the flow of air A within the second cap 80 will be described. First, air A flows into the second cap air inlet 82 of the second cap 80 from the second air pipe 83. Subsequently, air A passes through the interior of the second cap 80 and flows out from the second cap opening 81. During this time, air A is blown onto the second liquid-repellent layer 46 inside the second cap 80, passes through the surface of the second liquid-repellent layer 46, and flows toward the second cap opening 81 side. Thereafter, air A blows out from the second cap opening 81. The air A from the second cap opening 81 is blown toward the tool T side.

[0052] According to this embodiment, the first liquid-repellent layer 26 is provided on the surface of the first transparent plate 25 on the tool T side, and the second liquid-repellent layer 46 is provided on the surface of the second transparent plate 45 on the tool T side. Further, air A is blown onto the first liquid-repellent layer 26 of the first transparent plate 25 and the second liquid-repellent layer 46 of the second transparent plate 45, respectively. Thereby, it is possible to suppress the adhesion of foreign substances such as cutting powder, water, and oil to the surfaces of the first transparent plate 25 and the second transparent plate 45. Alternatively, the foreign substances adhering to the surfaces of the first transparent plate 25 and the second transparent plate 45 can be removed. As a result, even after repeatedly measuring the tool T with the tool shape measuring device 10, dirt does not adhere to the first transparent plate 25 and the second transparent plate 45, and it is possible to suppress a decrease in the measurement accuracy of the tool shape measuring device 10.

[0053] Further, according to the present embodiment, a first cap 70 is provided around the first light-transmitting plate 25, and a second cap 80 is provided around the second light-transmitting plate 45. Thereby, the first light-transmitting plate 25 and the second light-transmitting plate 45 are protected, and it is possible to more reliably prevent dirt from adhering to the first light-transmitting plate 25 and the second light-transmitting plate 45.

[0054] Further, according to the present embodiment, the first cap 70 and the second cap 80 each have a tapered shape from the side of the first light-transmitting plate 25 and the second light-transmitting plate 45 toward the tool T side. Thereby, the flow velocity of the air A from the first cap opening 71 and the second cap opening 81 can be increased. Therefore, the flow rate of the air A supplied to the first cap 70 and the second cap 80 can be suppressed.

[0055] In addition, in the present embodiment, the case where the first cap 70 is provided around the first light-transmitting plate 25 and the second cap 80 is provided around the second light-transmitting plate 45 has been described as an example. However, the present invention is not limited to this, and a cap may be provided around only one of the first light-transmitting plate 25 and the second light-transmitting plate 45.

[0056] Further, in each of the above-described embodiments, the case where the first liquid-repellent layer 26 is provided on the first light-transmitting plate 25 and the second liquid-repellent layer 46 is provided on the second light-transmitting plate 45 has been described as an example. However, the present invention is not limited to this, and a liquid-repellent layer may be provided on only one of the first light-transmitting plate 25 and the second light-transmitting plate 45. Further, in each of the above-described embodiments, the case where the air A is blown onto the first liquid-repellent layer 26 and the air A is blown onto the second liquid-repellent layer 46 has been described as an example. However, the present invention is not limited to this, and the air A may be blown onto only one of the first liquid-repellent layer 26 and the second liquid-repellent layer 46.

[0057] It is also possible to appropriately combine a plurality of components disclosed in the above-described embodiments and modification examples as necessary. Alternatively, some components may be deleted from all the components shown in the above-described embodiments and modification examples.

Description of Reference Numerals

[0058] 10 Tool shape measuring device 20 First housing 21 First opening 22 First air inlet 23 First air outlet 25 First light-transmitting plate 26 First liquid-repellent layer 30 Light projecting unit 31 First heat dissipation plate 40 Second housing 41 Second opening 42 Second air inlet 43 Second air outlet 45 Second light-transmitting plate 46 Second liquid-repellent layer 50 Light receiving unit 51 Second heat dissipation plate 60 Machine tool

Claims

1. A housing having an opening facing the tool side, A light projecting part or a light receiving part arranged inside the housing, A light transmissive plate provided at the opening of the housing, and comprising: A liquid repellent layer is provided on the surface of the light transmissive plate on the tool side, Air is blown onto the liquid repellent layer of the light transmissive plate, An air outlet is located on the surface of the housing on the tool side, The housing is provided with an air inlet through which the air flows in, The air inlet is located on the surface of the housing on the side opposite to the tool with respect to the light projecting part or the light receiving part, The air flows in from the outside through the air inlet, passes over the light projecting part or the light receiving part inside the housing, and jets out from the air outlet, and the air from the air outlet flows along the surface of the liquid repellent layer. A tool shape measuring device.

2. A heat dissipation plate is attached to the light projecting part or the light receiving part, and the air passes around the heat dissipation plate inside the housing. The tool shape measuring device according to Claim 1.

3. A cap is provided around the light transmissive plate, and the cap has a cap opening for blowing out the air toward the tool side. The tool shape measuring device according to Claim 1.

4. The cap has a shape that tapers from the light transmissive plate side toward the tool side. The tool shape measuring device according to Claim 3.

5. A first housing provided on one side of the tool and having a first opening facing the tool side, A light projecting part arranged inside the first housing, A second housing provided on the other side of the tool and having a second opening facing the tool side, A light receiving part arranged inside the second housing, A first light transmissive plate provided at the first opening of the first housing, A second light transmissive plate provided at the second opening of the second housing, and comprising: A first liquid repellent layer is provided on the surface of the first light transmissive plate on the tool side, A second liquid repellent layer is provided on the surface of the second light transmissive plate on the tool side, Air is blown onto the first liquid repellent layer of the first light transmissive plate and the second liquid repellent layer of the second light transmissive plate respectively, A first air outlet is located on the surface of the first housing on the tool side, The first housing is provided with a first air inlet through which the air flows in, The first air inlet is located on the surface of the housing on the side opposite to the tool with respect to the light projecting part, The air flows in from the outside through the first air inlet, passes over the light projecting part inside the first housing, and jets out from the first air outlet, and the air from the first air outlet flows along the surface of the first liquid repellent layer. A second air outlet is located on the tool-side surface of the second housing, the second housing is provided with a second air inlet through which the air flows in, the second air inlet is located on the surface of the second housing opposite to the tool with respect to the light receiving portion, the air flows in from the outside into the second air inlet, passes over the light receiving portion inside the second housing, and is ejected from the second air outlet, and the air from the second air outlet flows along the surface of the second liquid-repellent layer, a tool shape measuring device.

6. A machine tool comprising the tool shape measuring device according to any one of Claims 1 to 5.

Images