Pump device and system

Abstract

The present invention discloses a pumping arrangement (3) having a first pump (9) and at least one controller (17). The at least one controller (17) is suitable for generating a first control signal (SOUT1) for controlling the first pump (9). The at least one controller (17) is suitable for generating a second control signal (SOUT2) for controlling the operation of a second pump (27). The second pump (27) is external to the pumping arrangement (3). One or more pump connection ports (39) are provided in the pumping arrangement (3) for outputting the second control signal (SOUT2) to the second pump (27). The present disclosure also relates to a vacuum system (1) including a pumping arrangement (3) of the type described herein.

Description

Technical Field

[0001] The present disclosure relates to a pump device and a system. More particularly, but not limited to, the present disclosure relates to a vacuum pump device for a vacuum system and a vacuum system.

Background Art

[0002] Certain vacuum systems, such as mass spectrometry systems, may include multiple vacuum chambers. The pressure is reduced stepwise through successive chambers. Each chamber communicates with an adjacent chamber via a constriction and requires an individual pump to provide the necessary vacuum. Conventionally, pumping of such systems has been performed using multiple pumps (one or more pumps per chamber). There may be high-vacuum pumps, such as turbopumps or turbo-molecular pumps, for pumping high-vacuum chambers, while low-vacuum chamber(s) are pumped by other low-vacuum pumps, such as scroll pumps or roots pumps. A turbopump or turbo-molecular pump can be a secondary pump and can be assisted by another pump (referred to herein as a backing pump). The backing pump is, for example, a scroll pump.

[0003] Pump control devices typically focus only on the control and / or monitoring of the pumps housing the control devices. Generally, a primary vacuum pump and a secondary vacuum pump are installed along with one or more vacuum gauges, vacuum valves, and other accessories, which are incorporated into the vacuum system. As a result, the user may have to deal with the integration of various components within the vacuum system. The vacuum pumps disposed within the vacuum system may have individual control devices. Often, the user has to develop their own vacuum system control device and / or incorporate additional control devices, such as a turbo instrument control device (TIC). The system control device may function as a hub control unit for controlling and monitoring each vacuum pump. The vacuum system may require a complex control system to properly control each vacuum pump. Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE DISCLOSURE In at least certain embodiments, the present invention seeks to address or ameliorate at least some of the problems associated with the prior art. [Means for solving the problem]

[0005] Aspects of the present invention relate to pumping apparatus and vacuum systems as set out in the accompanying claims.

[0006] According to one aspect of the present invention there is provided a pump apparatus comprising: A first pump; At least one control device, a first control signal for controlling the first pump; a second control signal for controlling the second pump; At least one control device for generating Equipped with The second pump is external to the pump device, and the pump device comprises one or more pump connection ports for outputting a second control signal to the second pump. The pump device can be a self-contained device. The pump device can comprise, for example, a housing in which the first pump and at least one control device are accommodated. The one or more pump connection ports are configured to provide a hardware interface between the pump device and the second pump. The second pump is arranged, for example, as a separate device, outside the pump device. The at least one control device arranged in the pump device can function as a master control device operable to control the first pump and the second pump. Optionally, the second pump can comprise a separate control device, for example, for processing the second control signal and controlling the operation of the second pump. In this configuration, the second control device can function as a slave control device.

[0007] The second control signal can be output to configure the second pump, for example, during the setting of the vacuum system or during the reconfiguration of the vacuum system. Alternatively or additionally, the second control signal can be output to control the second pump during the operation of the vacuum system.

[0008] At least one control device is incorporated in the pump device. The at least one control device functions as a hub control device or a system control device, enabling connection to and control of the second pump.

[0009] The at least one control device can support direct connection to one or more of a pressure sensor (such as a vacuum sensor or a vacuum gauge), a vacuum accessory such as a vacuum valve or a cooling fan, and an interface. The interface can provide improved connectivity, for example, to execute a control process and / or a monitoring process. The improved connectivity enables these processes to be executed locally and / or remotely.

[0010] The at least one control device can monitor and / or control each of the first pump and the second pump.

[0011] In at least certain embodiments, one or more pump connection ports are configured to connect to complementary connectors. Each pump connection port can comprise or be constituted by a male or female electrical connector. One or more pump connection ports can be incorporated into the pump device. One or more pump connection ports can be fixed to the housing.

[0012] In use, the electrical connector can be provided between the pump device and the second pump. The electrical connector can comprise, for example, a cable or a wire. The cable or wire can have connectors for establishing a communication path in cooperation with one or more pump connection ports. The communication path can provide unidirectional communication, for example, to enable communication from the pump device to the second pump. Alternatively, the communication path can provide bidirectional communication, for example, to enable communication to and from the second pump.

[0013] One or more pump connection ports can be configured to output a second control signal to the second pump. One or more pump connection ports can be configured to receive one or more operating signals from the second pump. One or more pump connection ports can enable communication between at least one control device and a control device associated with the second pump. For example, the second pump can have a second pump control device. This at least one control device can receive at least one operating parameter from the second pump control device. The at least one operating parameter can include one or more of the operating speed of the second pump, the inlet pressure of the second pump, the outlet pressure of the second pump, the operating load of the second pump, fault data, and diagnostic information. Transmission of the one or more operating signals to the first control device can facilitate monitoring of the second pump.

[0014] The pump device can be a vacuum pump device. The first pump can be a vacuum pump and / or the second pump can be a vacuum pump. The first pump can be a primary vacuum pump and the second pump can be a secondary vacuum pump. Alternatively, the first pump can be a secondary vacuum pump and the second pump can be a primary vacuum pump.

[0015] In at least certain embodiments, at least one control device is incorporated into the pump device and configured to control and monitor a first pump and to control and monitor a second pump. The second pump can be a separate unit that is directly connected to the first pump within the vacuum system. Also, at least one control device can be connected to one or more vacuum sensors / actuators provided within the vacuum system. In at least certain embodiments, at least one control device can facilitate system-level integration and reduce or eliminate the need for additional system-level control devices.

[0016] At least one control device can comprise at least one electronic processor and a storage device. The at least one electronic processor can have at least one electrical input for receiving input signals and at least one electrical output for outputting a first control signal to the first pump and / or a control signal to the second pump.

[0017] At least one control device can be configured to receive an operation signal indicating one or more operation parameters of the second pump. Based on the operation signal, at least one control device can be configured to control the operation of the first pump and / or the second pump.

[0018] At least one control device can be configured to receive a pressure demand signal indicating a target operating pressure of the process chamber. The operating pressure demand signal can be directly input by a user. Alternatively, the operating pressure demand signal can be generated by a user selection, such as selecting one of a plurality of operating processes to be executed. The operating pressure demand signal can indicate the target operating pressure. The target operating pressure can be preset. For example, the target operating pressure can be preset for a given operating process.

[0019] At least one control device can be configured to control the operations of the first pump and the second pump based on a pressure demand signal.

[0020] The pump device can include at least one input device configured to generate a pressure demand signal based on a user input. The user input can identify one of a plurality of operation processes. At least one control device can be configured to generate a pressure demand signal based on the identified one of the plurality of operation processes. The operation processes can be preset.

[0021] The pump device can include an inlet pressure sensor for measuring the inlet pressure of the first pump and / or an outlet pressure sensor for measuring the outlet pressure of the first pump.

[0022] At least one control device can be configured to control the operation of the second pump based on the measured inlet pressure of the first pump and / or the measured outlet pressure of the first pump.

[0023] At least one control device can include an input for receiving an operation pressure signal indicating the operation pressure within the (working) process chamber. At least one control device can be configured to control the operations of the first pump and / or the second pump based on the operation pressure signal. The operation pressure can be measured, for example, by a vacuum sensor or a vacuum gauge associated with the process chamber.

[0024] At least one control device can be configured to receive an operation signal indicating one or more operation parameters of the first pump. At least one control device can be configured to output one or more operation parameters, for example, to enable remote monitoring of the first pump. At least one control device can be configured to control the operations of the first pump and / or the second pump based on the operation signal.

[0025] At least one control device can be configured to receive an operation signal indicating one or more operation parameters of the second pump. At least one control device can be configured to output one or more operation parameters, for example, to enable remote monitoring of the second pump. At least one control device can be configured to control the operation of the first pump and / or the second pump based on the operation signal from the second pump.

[0026] In at least certain embodiments, at least one control device is configured to selectively control the operation of the first pump and / or the second pump. For example, at least one control device can be configured to control a first switch and a second switch for energizing and de-energizing the first pump and the second pump, respectively. Each of the first switch and the second switch can include an electromechanical switch such as a relay. The second switch can be provided on the second pump. A second control signal can be output to control the operation of the second switch.

[0027] The pump device can include a first power source for supplying power to the first pump. The first power source can also be configured to supply power to the second pump. The first pump can include a power output section for supplying power to the second pump. The power output section can include an electrical connector such as an electrical socket. The electrical connector and the pump connection port can be integrated or separate from each other.

[0028] Alternatively or additionally, the pump device can include a second power source for supplying power to the second pump. At least one control device can be configured to control the operation of the first power source and / or the second power source. The pump device can include a power output section for supplying power from the second power source to the second pump.

[0029] The first pump can include a primary pump for a vacuum system. The primary pump can include a backing pump. The primary pump can be, for example, a scroll pump. The second pump is a secondary pump for the vacuum system. The secondary pump can include, for example, a turbo pump or a turbomolecular pump. In a variant, the configurations of the first pump and the second pump can be reversed. The first pump can include a secondary pump, and the second pump can include a primary pump.

[0030] At least one control device can be configured to control the first pump and the second pump during a startup procedure. The startup procedure can include one of the processes of simultaneous operation, continuous operation, sequential operation, and scheduled operation. Alternatively, at least one control device can be configured to perform a dynamic startup procedure based on a measured pressure. The pressure can be measured at the inlet and / or outlet of one or both of the first pump and the second pump. Alternatively or additionally, the pressure can be measured within the process chamber. Alternatively or additionally, at least one control device can be configured to determine a first power consumption by the first pump. The first power consumption can be measured or modeled. At least one control device can activate the second pump when the first power consumption decreases.

[0031] At least one control device can be configured to control the first pump and the second pump during a shutdown procedure. The shutdown procedure can include one of the processes of simultaneous shutdown, continuous shutdown, sequential shutdown, and scheduled shutdown. Alternatively, at least one control device can be configured to implement a dynamic shutdown procedure based on the measured pressure. The pressure can be measured at the inlet and / or outlet of one or both of the first pump and the second pump. Alternatively or additionally, the pressure can be measured within the process chamber. Alternatively or additionally, at least one control device can be configured to implement a dynamic shutdown procedure based on the first operating speed of the first pump and / or the second operating speed of the second pump. For example, the shutdown of the first and second pumps can be started in a time-difference sequence (i.e., sequentially). At least one control device can control one of the first and second pumps to reduce the operating speed of that pump to, for example, a predetermined level (such as 30%, 50%, or 70% of the operating speed). Next, at least one control device can control the other of the first and second pumps to reduce the operating speed of that pump. The shutdown of the first and second pumps can then be started simultaneously.

[0032] Two or more pump devices having a similar configuration can be connected to each other. The second pump can be arranged in a second one of the pump devices having a similar configuration. At least one control device can be configured to output a second control signal to control the second pump arranged in a second one of the pump devices having a similar configuration. Conversely, at least one control device can be configured to control the first pump based on one or more control signals received from another pump device having a similar configuration.

[0033] At least one control device may be suitable for controlling one or more additional pumps arranged outside the pump device. At least one control device can, for example, control at least a third pump. At least one control device can be configured to output a third control signal for controlling the operation of the third pump. The third pump can be arranged outside the pump device.

[0034] At least one control device can be configured to connect to a network such as the Internet. The pump device can, for example, comprise a wireless communication module for establishing a wireless connection to a network device such as a hub or a router. Alternatively or additionally, the pump device can comprise a network port for establishing a wired connection to a network device such as a hub or a router. An Internet Protocol (IP) address can be assigned to the control unit. At least one control device can be configured to output the operating parameters of the first pump and / or the second pump. The operating parameters can be accessed from a remote terminal, for example via an Internet browser application. This configuration can facilitate the remote control, configuration, and monitoring of the first pump and / or the second pump.

[0035] According to a further aspect of the invention, a vacuum system is provided. The vacuum system is a pump device as described herein, comprising a pump device having a first pump and at least one control device, a second pump arranged outside the pump device, and At least one control device is disposed within the pump device and configured to control the operation of the first pump and the second pump. The at least one control device disposed within the pump device can function as a master control device operable to control the first pump and the second pump. Optionally, the second pump can include a separate control device that can function as a slave control device. The vacuum system can include two or more of the pump devices described herein. For example, two or three or more pump devices can be provided. The control device(s) of each of the plurality of pump devices can be connected to each other, for example, in a network configuration.

[0036] The first pump can include a primary pump for the vacuum system. The primary pump can include a backing pump. The primary pump can be, for example, a scroll pump. The second pump can be a secondary pump for the vacuum system. The secondary pump can include, for example, a turbopump or a turbo molecular pump. In a variant, the configurations of the first pump and the second pump can be reversed. The first pump can include a secondary pump and the second pump can include a primary pump.

[0037] In use, the electrical connection can be provided between the pump device and the second pump. The electrical connection can include, for example, a cable or a wire. The cable or wire can have a connector for establishing a communication path in cooperation with one or two or more pump connection ports. The communication path can provide, for example, one-way communication to enable communication from the pump device to the second pump. Alternatively, the communication path can provide, for example, two-way communication to enable communication to or from the second pump.

[0038] One or more pump connection ports can be configured to output a second control signal to the second pump and optionally can also be configured to receive one or more operation signals from the second pump. One or more pump connection ports can enable communication between at least one control device and a control device associated with the second pump. For example, the second pump can have a second pump control device. At least one control device can receive at least one operation parameter from the second pump control device. The at least one operation parameter can include one or more of the operating speed of the second pump, the inlet pressure of the second pump, the outlet pressure of the second pump, the operating load of the second pump, fault data, and diagnostic information.

[0039] According to a further aspect of the present invention, a vacuum system is provided. The vacuum system includes a pump device including a first pump and at least one control device, a second pump disposed outside the pump device, and is provided with The at least one control device disposed within the pump device is configured to control the operation of the first pump and the second pump.

[0040] The at least one control device can be configured to output one or more control signals to control the operation of the second pump.

[0041] The at least one control device can be configured to receive one or more operation signals from the second pump. The operation signals can indicate one or more operation parameters of the second pump.

[0042] The pump device can be provided with an interface for communicating with a second pump. The interface can be configured to perform unidirectional communication or bidirectional communication. The pump device can be provided with one or more pump connection ports for outputting one or more control signals to control the operation of the second pump. The pump connection port can include one or more communication lines. The pump connection port can be suitable for receiving one or more operation signals from the second pump.

[0043] According to a further aspect of the present invention, there is provided a control device for controlling a first pump and a second pump, the control device being configured to receive a first pressure signal indicating the operating pressure of the first pump and a second pressure signal indicating the operating pressure of the second pump, and the control device a first control signal for controlling the first pump, and a second control signal for controlling the second pump, and is configured to generate, wherein the first and second control signals are generated based on the first and second pressure signals.

[0044] The control device can include at least one electronic processor and a storage device. The at least one electronic processor can have at least one electrical input for receiving the first pressure signal and the second pressure signal. The at least one electronic processor can have at least one electrical output for outputting the first control signal to the first pump and the second control signal to the second pump.

[0045] The at least one electrical input can be configured to receive the first pressure signal from a first pressure sensor for measuring the inlet pressure or the outlet pressure of the first pump.

[0046] The at least one electrical input can be configured to receive the second pressure signal from a second pressure sensor for measuring the inlet pressure or the outlet pressure of the second pump.

[0047] At least one control device can be configured to receive an operating pressure signal indicative of the operating pressure within the process chamber. The first and second control signals can be generated based on the operating pressure signal.

[0048] At least one control device can be configured to control the operation of the first pump and the second pump based on a pressure demand signal.

[0049] According to a further aspect of the present invention, a pump device including the control device described herein is provided. The first pump can be disposed within the pump device. The pump device can include one or more pump connection ports for electrically connecting to a second pump external to the pump device.

[0050] The control unit or control device described in this specification can preferably comprise a computing device having one or more electronic processors. The system can comprise a single control unit or electronic control device, or different functions of the control device can be embodied or hosted by different control units or control devices. As used herein, the terms "control device" or "control unit" are to be understood to include both a single control unit or control device and a plurality of control units or control devices operating collectively to provide any control function. To configure a control device or control unit, an appropriate set of instructions can be provided that, when executed, causes the control unit or computing device to execute the control techniques defined herein. The set of instructions can preferably be incorporated into one or more electronic processors. Alternatively, the set of instructions can be provided as software stored on one or more memories associated with the control device so as to be executed on the computing device. The control unit or control device can be implemented in software executed on one or more processors. One or more other control units or control devices can be implemented in software executed on one or more processors, optionally the same one or more processors as the first control device. Other suitable configurations can also be used.

[0051] Within the scope of this application, it is expressly intended that the various aspects, embodiments, examples, and alternatives described in the above paragraphs, claims, and / or the following description and drawings, and in particular their individual features, can be obtained independently or in any combination. That is, all embodiments and / or features of any embodiments can be combined in any way and / or combination, except where such features are incompatible. The applicant reserves the right to amend the originally filed claims or to file new claims accordingly, which includes the right to amend any originally filed claim so as to depend on and / or incorporate features of any other claim that were not originally so claimed.

[0052] Hereinafter, one or more embodiments of the present invention will be exemplarily described with reference to the accompanying drawings.

Brief Description of the Drawings

[0053]

Figure 1

Figure 2

Figure 3

Mode for Carrying Out the Invention

[0054] Hereinafter, a vacuum system 1 including a pump device 3 according to an embodiment of the present invention will be described with reference to the accompanying drawings. The vacuum system 1 according to the present embodiment is a vacuum system. Specifically, the vacuum system 1 is operable to generate a high vacuum in a process chamber 5 for executing an industrial process.

[0055] The pump device 3 includes a first housing 7, a first pump 9, a first control unit 11, a first power source 13, and a second power source 15. The pump device 3 is an independent pump unit. The first housing 7 forms an enclosure of the pump device 3. The first pump 9, the first control unit 11, and the first and second power sources 13, 15 are arranged within the first housing 7. The first housing 7 can be disassembled, for example, to perform maintenance on the first pump 9. However, during normal operation, the first housing 7 surrounds the first pump 9 and the first control unit 11. The first control unit 11 includes at least one first control device 17 and can function as a master control unit as described herein. The said or each control device has at least one first electronic processor 19 and a storage device 21. A set of calculation instructions is stored in the storage device 21. When executed, the instructions cause the first electronic processor 19 to execute the method(s) described herein. The first electronic processor 19 includes at least one input 23 and at least one output 25. As described herein, the first electronic processor 19 is configured to control the operation of the first pump 9 arranged within the pump device 3 and a second pump 27 outside the pump device 3.

[0056] The first control unit 11 is connected to input means for receiving one or more user inputs. The input means comprises one or more input devices 29. The input device 29 is configured to output a user request signal SIN1 to at least one input 23 of the first electronic processor 19. The first control unit 11 is configured to control the operation of the pump device 3 depending on the user input. The input device 29 in the embodiment comprises a touch screen 31 for displaying a graphical user interface. The touch screen 31 can be incorporated, for example, in the front panel of the first housing 7. The touch panel 31 detects a user input and outputs a user request signal SIN1. The touch screen 31 can include, for example, a capacitive screen or a resistive film screen. Alternatively or additionally, the input device 29 can include one or more buttons or switches. In the present embodiment, the input device 29 is incorporated in the pump device 3. Specifically, the input device 29 is attached to the first housing 7 and connected to the first control unit 11 via a wired (physical) connection. In a variant, the input device 29 can be connected to the first control unit 11 via a wireless connection including, for example, radio frequency (RF) communication. Some suitable communication protocol can be used to establish communication between the first control unit 11 and the input device 29.

[0057] The first pump 9 is a primary pump and is configured to evacuate the low-vacuum chamber. The first pump 9 can include, for example, a scroll pump. The vacuum system 1 includes a second pump 27 that is separate from the pump device 3. The second pump 27 is a secondary pump and is configured to evacuate the high-vacuum chamber. The second pump 27 can include, for example, a turbo molecular pump. The first pump 9 is configured to operate as a backing pump for the second pump 27. The second pump 27 is separate from the pump device 3, that is, independent of the pump device 3. The second pump 27 in the present embodiment includes a second housing 32 that is different from the first housing 7. The second pump 27 includes a second control unit 33. The second control unit 33 can include one or more electronic processors (not shown) and a storage device. The second control unit 33 is configured to control the second pump 27 based on a control signal received from the first control unit 11. The second control unit 33 can be considered to function as a slave control unit directly under the control of the first control unit 11. The first pump 9 and the second pump 27 are configured to operate together within the vacuum system 1 to establish a desired operating pressure in the process chamber 5.

[0058] The first control unit 11 is incorporated in the pump device 3 and is configured to control the operations of the first pump 9 and the second pump 27. The first control unit 11 of the pump device 3 is configured to implement a first pump control device 35 for controlling the first pump 9 and a second pump control device 37 for controlling the second pump 27. The first pump control device 35 outputs a first control signal SOUT1 for controlling the operation of the first pump 9, and the second pump control device 37 outputs a second control signal SOUT2 for controlling the operation of the second pump 27. The first one of the outputs 25 provided in the first electronic processor 19 is configured to output the first control signal SOUT1 to control the first pump 9. The first pump 9 can be selectively operated based on the first control signal SOUT1. The operating speed of the first pump 9 can be controlled based on the first control signal SOUT1. The first control signal SOUT1 can, for example, set the target operating speed of the first pump 9. The second one of the outputs 25 provided in the first electronic processor 19 is configured to output the second control signal SOUT2 to control the second pump 27. The second pump 27 can be selectively operated based on the second control signal SOUT2. The operating speed of the second pump 27 can be controlled based on the second control signal SOUT2. The second control signal SOUT2 can, for example, set the target operating speed of the second pump 27.

[0059] The pump device 3 includes a first pump connection port 39 for connecting to the second pump 27. The first control unit 11 is configured to output a second control signal SOUT2 to the second pump 27 via the first pump connection port 39. The pump connection port 39 provides a hardware interface between the pump device 3 and the second pump 27. A communication protocol is implemented to control the communication between the pump device 3 and the second pump 27. The first pump connection port 39 can be configured as, for example, a serial port or a parallel port. The first pump connection port 39 is attached to the housing 7 of the pump device 3, for example, the rear panel (not shown). The connection lead wire C1 is provided to establish an electrical connection between the pump connection port 39 and the second pump 27. The connection lead wire C1 includes or is composed of, for example, a cable or an electric wire having one or more communication paths. The connection lead wire C1 has a first connector for connecting to the pump connection port 39. The connection lead wire C1 can have a second connector for connecting to the second pump 27.

[0060] In this embodiment, the first control unit 11 provides bidirectional communication with the second pump 27. The first control unit 11 can output one or more signals to the second pump 27 and receive one or more signals from the second pump 27. The second pump 27 is connected to the first pump connection port 39 and receives the second control signal SOUT2 generated by the first electronic processor 19 during use. The second pump 27 is controlled based on the second control signal SOUT2. Optionally, the second pump 27 can send an operation signal including, for example, one or more operation parameters of the second pump 27 to the first electronic processor 19. The operation parameter(s) of the second pump 27 can include one or more of the operation speed, power consumption, and operation load. The operation signal can be transmitted to the first control unit 11 via the first pump connection port 39.

[0061] As described above, the first power supply 13 and the second power supply 15 are provided in the pump device 3. The control unit 11 is configured to control the operations of the first pump 9 and the second pump 27. Specifically, the control unit 11 can selectively operate and stop the first pump 9 and / or the second pump 27. The pump device 3 includes a power output port 41 for supplying power to the second pump 27. The power output port 41 can be provided with a suitable power connector. The power output port 41 is attached to the housing 7 of the pump device 3, for example, the rear panel (not shown). In a modified example, the second power supply 15 can be omitted from the pump device 3. The first power supply 13 can be configured to supply power to the first pump 9 and the second pump 27. The first power supply 13 can have a power specification suitable for supplying power to the first pump 9 and the second pump 27. In a further modified example, the second power supply 15 can be an independent unit separate from the pump device 3 and the second pump 27.

[0062] At least one input 23 of the first electronic processor 19 is configured to receive one or more input signals SIN2-n. The one or more input signals SIN2-n include sensor input signals SIN2-n. In this embodiment, the first electronic processor 19 is configured to receive a first and a second sensor input signal SIN2-1, SIN2-2 from first and second pressure sensors 43, 45 respectively. The first and second pressure sensors 43, 45 are in the form of first and second vacuum gauges. The first and second pressure sensors 43, 45 output analog signals indicating the vacuum generated by the first and second pumps 9, 27. Alternatively, the first and second pressure sensors 43, 45 can be digital gauges for transmitting pressure signals via a communication interface such as RS485. The first pressure sensor 43 in this embodiment is provided in the pump device 3 and is configured to measure the inlet pressure of the first pump 9. In a variant, the pressure sensor 43 can be an external sensor provided, for example, to measure the inlet pressure of the second pump 27. The first pressure sensor 43 outputs the first sensor input signal SIN2-1 to the first electronic processor 19. The second pressure sensor 45 is configured to measure the inlet pressure of the second pump 27. In a variant, the second pressure sensor 45 can be configured to measure the chamber pressure of the second pump 27. The second pressure sensor 45 outputs the second sensor input signal SIN2-2 to the first electronic processor 19 (via the first pump connection port 39). The pump device 3 includes a sensor communication port 47 for a wired connection to the second pressure sensor 45. The sensor communication port 47 is attached to the housing 7 of the pump device 3, for example, to a rear panel (not shown).

[0063] The pump device 3 includes a network port 49 for communicating via a network, such as a local area network (LAN) or a wide area network (WAN). The network port 49 in this embodiment enables communication between the pump device 3 and the base station BS1. Also, the network port 49 can enable communication between a plurality of pump devices 3 described in this specification. The first control unit 11 can output, for example, one or more operation signals SOUT3-n to the base station BS1. The first operation signal SOUT3-1 can indicate one or more operation parameters of the first pump 9, and / or the second operation signal SOUT3-2 can indicate one or more operation parameters of the second pump 27. One or more operation parameters (relating to the first pump 9 and / or the second pump 27) can include one or more of power consumption, operation speed, inlet pressure, outlet pressure, and operation temperature. One or more operation parameters can also be output to the touch screen 31, for example, to enable an operator to monitor the operation of the first pump 9 and / or the second pump 27. In a particular embodiment, the first control unit 11 can receive a control command from the base station BS1. The first control unit 11 can control the first pump 9 and / or the second pump 27 based on the control command received from the base station BS1. Alternatively or additionally, the pump device 3 can include a wireless transceiver for transmitting and receiving communication information.

[0064] The first control unit 11 is configured to control the operations of the first pump 9 and the second pump 27. During use, a target operating pressure is set for the process chamber 5. The first control unit 11 controls the first pump 9 and the second pump 27 to achieve the target operating pressure. The first control unit 11 can control the first pump 9 and the second pump 27 during the startup procedure. For example, the first pump 9 and the second pump 27 can be started in a predetermined order or at predetermined intervals. The first control unit 11 can operate the first pump 9 and then operate the second pump 27 when an appropriate vacuum pressure is achieved at the inlet of the first pump 9 or the inlet of the second pump 27. The target operating pressure of the process chamber 5 can be specified by the user. Alternatively, the target operating pressure can be obtained from a predetermined operating process that defines, for example, the operating parameters of the process chamber 5.

[0065] The first control unit 11 can be configured to implement a startup procedure that, for example, shifts or sequences the startups of the first pump 9 and the second pump 27. The first and second control signals SOUT1, SOUT2 can, for example, operate the first and second pumps 9, 27 simultaneously, continuously, in a predetermined order, or at predetermined intervals. Alternatively, the startup procedure can be dynamically controlled based on the measured operating pressures of the first pump 9 and / or the second pump 27. The first control unit 11 can be configured to implement a shutdown procedure to control the stopping of the first pump 9 and the second pump 27. The first and second control signals SOUT1, SOUT2 can, for example, stop the first and second pumps 9, 27 simultaneously, continuously, in a predetermined order, or at predetermined intervals.

[0066] As described in this specification, the vacuum system 1 includes a first pump 9 disposed inside the pump device 3 and a second pump 27 disposed outside the pump device 3. Next, the operation of the vacuum system 1 will be described with reference to the first block diagram 100. The pump device 3 is started (block 105). The input device 29 detects a user input (block 110). The input device 29 outputs a user request signal SIN1 to the first control unit 11 (block 115). The first control unit 11 determines the target operation parameters of the first pump 9 and the second pump 27 (block 120). The first control unit 11 executes a startup procedure (BLOCK125). The first control unit 11 generates a first control signal SOUT1 sent to the first pump 9 disposed in the pump device 3 (block 130). The first pump 9 operates based on the first control signal SOUT1. The first control unit 11 generates a second control signal SOUT2 output to the second pump 27 disposed outside the pump device 3 (block 135). The second pump 27 operates based on the second control signal SOUT2. Optionally, the first control unit 11 can receive a first sensor input signal SIN2-1 indicating an operating pressure related to the first pump 9, such as the inlet pressure or outlet pressure of the first pump 9 (block 140). Optionally, the first control unit 11 can receive a second sensor input signal SIN2-2 indicating an operating pressure related to the second pump 27, such as the inlet pressure or outlet pressure of the second pump 27 (block 145). Optionally, the first control unit 11 can dynamically control the operation of the first pump 9 based on the first sensor input signal SIN2-1 (block 150). Optionally, the first control unit 11 can dynamically control the operation of the second pump 27 based on the second sensor input signal SIN2-2 (block 155). The first control unit 11 controls the first pump 9 and the second pump 27 to achieve the target operating pressure in the process chamber 5 (block 160). The first control unit 11 continues to control the operation of the first pump 9 and the second pump 27 to maintain the target operating pressure (block 165). The first control unit 11 executes a shutdown procedure (block 170).Optionally, the first control unit 11 can output a stop signal to the second pump 27. The pump device 3 is stopped and the process ends.

[0067] The pump device 3 is described herein as including an input device 29 for providing a human-machine interface. The main components of the vacuum system 1, such as the first pump 7 and the second pump 9, can be configured, controlled, and monitored using the input device 29. It should be understood that the pump device 3 can include one or more input devices 29. In at least certain embodiments, the pump device 3 can support one or more interfaces that are locally located (optionally integrated into the pump device 3) or remotely located and connectable, for example, via a network. The first control unit 11 can be configured to enable access via the Internet, for example, to enable one or more remote (cloud-based) functions including one or more of the configuration, control, and monitoring of the pump device 3. Other input devices 29 can provide one or more of the functions provided by the input device 29, for example, to enable monitoring and / or control of the pump system 1.

[0068] Optionally, the pump device 3 can be provided with a wireless communication module such as Bluetooth (registered trademark). The wireless communication module can, for example, enable an external computing device (not shown) to communicate with the first control unit 11 via a wireless connection. The computing device can comprise, for example, one or more of a mobile phone, a tablet computer, a personal computer, or a laptop computer. A compatible application can be pre-installed on the computing device. Alternatively or additionally, the communication can be carried out via a web browser, for example, to establish communication with a web server associated with the first control unit 11. The computing device can communicate with the first control unit 11 using appropriate software to communicate with the first pump 9 and / or the second pump 27 via a protocol such as Modbus / TCP or MQTT.

[0069] Optionally, the pump device 3 can be provided with a network port for establishing a wired connection with one or more other computing devices. For example, the network port can comprise an Ethernet port. The external computing device can be connected to the pump device 3 to communicate with the first control unit 11 using a protocol such as Modbus / TCP, MQTT, OPCUA, or a proprietary protocol. The first control unit 11 can be configured to be connected to an external fieldbus connection device. The fieldbus device can communicate with the first control unit 11 via a protocol such as EtherCAT, Ethernet / IP, Profinet, etc. Other protocols are also contemplated. Optionally, the first control unit 11 can be configured to connect to an external RS232 / 485 connection device for communication with the first control unit 11. The communication can be established using any suitable protocol such as Modbus / RTU or a proprietary protocol. Optionally, the pump device 3 can be provided with a universal serial bus (USB) port for connecting to an external USB connection device.

[0070] It should be understood that various changes can be made to the embodiments (s) described herein without departing from the scope of the claims.

[0071] (Block Diagram 100) 105 Start 110 Detect user input 115 Receive user input signal 120 Determine the operating parameter(s) of the first and second pumps 125 Pump startup procedure 130 Output the first control signal to the first (internal) pump 135 Output the second control signal to the second (external) pump 140 Monitor the operating pressure of the first pump 145 Monitor the operating pressure of the second pump 150 Control the operation of the first pump based on the operating pressure 155 Control the operation of the second pump based on the operating pressure 160 Achieve the target operating pressure in the process chamber 165 Maintain the target operating pressure 170 Pump shutdown procedure 175 End

Description of Reference Numerals

[0072] 1 Vacuum system 3 Pump device 5 Process chamber 7 First housing 9 First pump 11 First control unit 13 First power supply 15 Second power supply 17 First control device 19 First electronic processor 21 Storage device 23 Input 25 Output 27 Second pump 29 Input device 31 Touch screen 33 Second control unit 35 First pump control device 37 Second pump control device 39 First pump connection port 41 Power output port 43 First pressure sensor 45 Second pressure sensor 47 Sensor communication port 49 Network port BS1 Base station SOUT1 First (pump) control signal SOUT2 Second (pump) control signal SOUT3-n Pump operation signal SIN1 User request signal SIN2-n Sensor input signal

Claims

1. A pump device (3), comprising: a first pump (9); at least one control device (17) configured to generate: a first control signal (SOUT1) for controlling the first pump (9); and a second control signal (SOUT2) for controlling a second pump (27); a first pressure sensor (43) for measuring an inlet pressure or an outlet pressure of the first pump (9); wherein the second pump (27) is external to the pump device (3), and the pump device (3) comprises one or more pump connection ports (39) for outputting the second control signal (SOUT2) to the second pump (27), and the at least one control device (17) is configured to control the operation of the second pump (27) based on the measured inlet pressure or the measured outlet pressure of the first pump (9).

2. The pump device (3) according to claim 1, wherein the at least one control device (17) comprises at least one electronic processor (19) and a storage device (21), and the at least one electronic processor (19) has: at least one electrical input (23) for receiving input signals (SIN1, SIN2); and at least one electrical output (25) for outputting the first control signal (SOUT1) to the first pump (9) and / or for outputting the second control signal (SOUT2) to the second pump (27).

3. The pump device (3) according to claim 1 or 2, wherein the at least one control device (17) is configured to receive an operation signal (SIN2-n) indicating one or more operation parameters of the second pump (27).

4. The pump device (3) according to claim 3, wherein the at least one control device (17) is configured to control the operation of the first pump (9) and / or the second pump (27) based on the operation signal (SIN2-n).

5. The pump device (3) according to any one of claims 1 to 4, wherein the at least one control device (17) is configured to receive a pressure demand signal (SIN1) indicating a target operation pressure of a process chamber (5).

6. ​ ​ ​ Comprising at least one input device (29) configured to generate the pressure demand signal (SIN1) based on a user input, the user input specifying one of a plurality of operating processes, and the at least one control device (17) being configured to generate the pressure demand signal (SIN1) based on the specified one of the plurality of operating processes, the pump device (3) according to claim 5.

7. The at least one control device (17) comprises an input for receiving an operating pressure signal indicative of an operating pressure within the process chamber (5), and the at least one control device (17) is configured to control the operation of the first pump (9) and / or the second pump (27) based on the operating pressure signal, the pump device (3) according to any one of claims 1 to 6.

8. A first power source (13) for supplying power to the first pump (9), A second power source (15) for supplying power to the second pump (27), Comprising, the pump device (3) according to any one of claims 1 to 7.

9. Comprising a power output section (41) for supplying power to the second pump (27), the pump device (3) according to any one of claims 1 to 8.

10. The first pump (9) includes a primary pump for a vacuum system, the pump device (3) according to any one of claims 1 to 9.

11. A vacuum system (1), The pump device (3) according to any one of claims 1 to 10, the pump device (3) comprising a first pump (9) and at least one control device (17), a pump device (3), A second pump (27) disposed outside the pump device (3), Comprising, The at least one control device (17) is disposed within the pump device (3) and is configured to control the operation of the first pump (9) and the second pump (27), a vacuum system.

12. The second pump (27) is a secondary pump for a vacuum system, the vacuum system according to claim 11.

13. A control device (17) for controlling a first pump (9) and a second pump (27), wherein the control device (17) is configured to receive a first pressure signal indicating the operating pressure of the first pump (9) and a second pressure signal indicating the operating pressure of the second pump (27), and the control device a first control signal (SOUT1) for controlling the first pump (9), a second control signal (SOUT2) for controlling the second pump (27), is configured to generate, The first and second control signals (SOUT1, SOUT2) are generated based on the first and second pressure signals (SIN1, SIN2), a control device (17).

14. The control device (17) comprises at least one electronic processor (19) and a storage device (21), and the at least one electronic processor (19) at least one electrical input (23) for receiving the first pressure signal (SIN1) and the second pressure signal (SIN2), at least one electrical pump connection port (39) for outputting the first control signal (SOUT1) to the first pump (9) and outputting the second control signal (SOUT2) to the second pump (27), The control device (17) according to claim 13, having.

15. A pump device (3) comprising the control device (17) according to claim 13 or 14.

16. The first pump (9) is arranged within the pump device (3), and the pump device (3) comprises one or more pump connection ports for electrical connection to the second pump (27) external to the pump device (3), the pump device (3) according to claim 15.

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