Test circuit, test device, and test method

Abstract

Provided is a test circuit including: a measurement circuit that generates an output voltage and performs a voltage application current measurement test on a device under test using the output voltage; a pulse generation circuit that generates a pulse signal using the output voltage of the measurement circuit in a functional test of the device under test, supplies the pulse signal to a terminal of the device under test, passes the output voltage of the measurement circuit in a voltage application current measurement test, and supplies the output voltage as a test voltage to the terminal of the device under test; and an output terminal feedback line connected to an output terminal side of the pulse generation circuit and feeding back the voltage of the output terminal side to the measurement circuit.

Description

Technical Field

[0001] The present invention relates to a test circuit, a test device, and a test method.

Background Art

[0002] Patent Document 1 describes "a test device including a determination unit that determines the quality of a device under test based on a load voltage or load current applied to the device under test when a test signal of a constant current or constant voltage is supplied from a driver circuit to the device under test, the driver circuit including a driver unit that outputs a test signal, a power supply current detection unit that detects a power supply current supplied to the driver unit, and an output control unit that controls the voltage or current of the test signal output by the driver unit to a predetermined value based on the power supply current detected by the power supply current detection unit" (paragraph 0008 of Patent Document 1).

[0003] Patent Document 2 describes that DCL302 supplies a control output to an output stage 310 via a DAC304, feedback from the output stage 310 is supplied to a current ADC306 and a voltage ADC output terminal 320 via a current sense element 312 and a voltage sense element 314, respectively, the current feedback is obtained from the current flowing through a current shunt resistor 316, the voltage feedback is obtained between output terminals 320 and 322, etc. (paragraph 0034 of Patent Document 2).

[0004] Patent Document 3 describes a power supply device including "a voltage A / D converter that receives an analog voltage observation value corresponding to the power supply voltage supplied to the power supply terminal of the device via a feedback line, performs analog / digital conversion on the analog voltage observation value to generate a digital voltage observation value; a digital arithmetic unit that generates a main control value adjusted so that the digital voltage observation value matches the voltage target value by digital arithmetic processing; a main D / A converter that performs digital / analog conversion on the main control value and supplies the resulting analog power supply signal to the power supply terminal of the device via the power supply line; a main detection resistor provided on the path of the power supply line and having a switchable resistance value; a main sense amplifier that generates an analog main current observation value indicating the amount of the power supply current flowing through the power supply line based on the voltage between both ends of the main detection resistor; and a main current A / D converter that performs analog / digital conversion on the analog main current observation value to generate a digital main current observation value" (Claim 1 of Patent Document 3). [Prior Art Documents] [Patent Documents] [Patent Document 1] International Publication No. 2009 / 157126 [Patent Document 2] U.S. Patent Application Publication No. 2009 / 0121908 [Patent Document 3] Japanese Patent Application Laid-Open No. 2014-10010 [Summary of the Invention]

[0005] In a first aspect of the present invention, there is provided a test circuit including a measurement circuit that generates an output voltage and performs a voltage application current measurement test on a device under test using the output voltage; a pulse generation circuit that generates a pulse signal using the output voltage of the measurement circuit in a functional test of the device under test, supplies the pulse signal to a terminal of the device under test, and passes the output voltage of the measurement circuit in the voltage application current measurement test and supplies the output voltage as a test voltage to a terminal of the device under test; and an output terminal feedback line connected to an output terminal side of the pulse generation circuit and feeding back the voltage of the output terminal side to the measurement circuit.

[0006] In the above test circuit, in the voltage application current measurement test, the measurement circuit may adjust the output voltage using the test voltage fed back from the output terminal feedback line.

[0007] Any of the above test circuits may be connected to the input terminal side of the pulse generation circuit and include an input terminal feedback line for feeding back the voltage on the input terminal side to the measurement circuit.

[0008] In any of the above test circuits, in the function test, the measurement circuit may adjust the output voltage using the voltage fed back from the input terminal feedback line.

[0009] In any of the above test circuits, the pulse generation circuit has a resistor connected between the input terminal and the output terminal. In the voltage application current measurement test, the measurement circuit may measure the current flowing through the terminals of the device under test using the potential difference between the input terminal feedback line and the output terminal feedback line.

[0010] In any of the above test circuits, the measurement circuit generates an output current and performs a current application voltage measurement test on the device under test using the output current. In the current application voltage measurement test, the pulse generation circuit may pass the output current of the measurement circuit and supply the output current as a test current to the terminals of the device under test.

[0011] In any of the above test circuits, in the current application voltage measurement test, the measurement circuit may measure the voltage fed back from the output terminal feedback line.

[0012] In a second aspect of the present invention, a test apparatus including any of the above test circuits is provided.

[0013] In a third aspect of the present invention, a measurement circuit generates an output voltage and performs a voltage application current measurement test on a device under test using the output voltage, and a pulse generation circuit generates a pulse signal using the output voltage of the measurement circuit in a functional test of the device under test, supplies the pulse signal to terminals of the device under test, passes the output voltage of the measurement circuit in the voltage application current measurement test, and supplies the output voltage as a test voltage to terminals of the device under test, and an output terminal feedback line connected to an output terminal side of the pulse generation circuit feeds back the voltage on the output terminal side to the measurement circuit, thereby providing a test method.

[0014] Note that the above summary of the invention does not list all the features of the present invention. Also, sub-combinations of these feature groups can also be inventions.

Brief Description of the Drawings

[0015]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Embodiments for Carrying Out the Invention

[0016] Hereinafter, the present invention will be described through embodiments of the invention. However, the following embodiments do not limit the invention according to the claims. Also, not all combinations of features described in the embodiments are essential for the solution means of the invention.

[0017] FIG. 1 shows the configuration of the test apparatus 1 according to the present embodiment together with the device under test (DUT) 10. The device under test 10 is a device in which a circuit to be tested by the test apparatus 1 is formed. The device under test 10 may be a wafer on which a circuit is formed, an IC / LSI chip obtained by singulating the wafer, or an IC / LSI package in which the IC / LSI chip is packaged. In the example of this figure, the test apparatus 1 mounts one device under test 10. Instead of this, the test apparatus 1 may mount a plurality of devices under test 10 and perform tests simultaneously.

[0018] The test apparatus 1 performs an electrical test on the device under test 10. Instead of this, or in addition to this, the test apparatus 1 may perform an optical input / output test on the device under test 10. In the present embodiment, the case where the test apparatus 1 performs an electrical test on the device under test 10 will be described as an example. When the test apparatus 1 performs an optical input / output test on the device under test 10, the test apparatus 1 and the device under test 10 may be connected by an optical connection in addition to an electrical connection.

[0019] The test apparatus 1 includes a test head 100, a plurality of pin electronics devices 110, a connection device 120, and a main frame 150. The test head 100 is a housing capable of mounting a plurality of pin electronics devices 110. In the example of this figure, the test head 100 has a plurality of slots for inserting a plurality of pin electronics devices 110.

[0020] Each of the plurality of pin electronics devices 110 is inserted into a slot of the test head 100 and detachably connected to the backplane of the test head 100. The pin electronics device 110 may also be referred to as a "pin electronics card", a "test board", or a "test module", etc. Each pin electronics device 110 is electrically connected to the device under test 10 via a connection device 120. Each pin electronics device 110 inputs and outputs signals to and from the device under test 10, and tests the device under test 10 by inspecting the signals input from the device under test 10.

[0021] The connection device 120 is mounted on the test head 100 and electrically connected to the plurality of pin electronics devices 110. The connection device 120 mounts the device under test 10 and is electrically connected to a plurality of terminals of the device under test 10. The connection device 120 has a role of interfacing between the terminals of the plurality of pin electronics devices 110 and the device under test 10, and electrically connects between each terminal of one or more devices under test 10 and the corresponding terminal of the plurality of pin electronics devices 110 by a signal cable, a printed circuit board wiring, or the like.

[0022] The main frame 150 controls each part in the test apparatus 1 in order to test the device under test 10. In the present embodiment, the main frame 150 is a separate housing from the housing in which the test head 100 and the like are provided. Alternatively, each component in the main frame 150 may be provided in the same housing as the test head 100. The main frame 150 has a main power supply device 160 and a control device 170.

[0023] The main power supply device 160 receives power supply from a commercial power supply or the like and supplies power to each device and circuit in the test device 1. The control device 170 is connected to the main power supply device 160 and receives power supply from the main power supply device 160. The control device 170 controls the test of the device under test 10. When the control device 170 is realized by a computer, it may control the test of the device under test 10 by executing a test control program. The control device 170 supplies a test program to each pin electronics device 110, causes the supplied test program to be executed by each pin electronics device 110, and tests the device under test 10. The control device 170 collects and records the test results of the device under test 10 from each pin electronics device 110.

[0024] Figure 2 shows the configuration of the pin electronics device 200 according to the comparative example of the present embodiment. The pin electronics device 200 according to the comparative example may be used as the pin electronics device 110 in the test device 1. The pin electronics device 200 includes a power supply unit 205, a test circuit 220, and a test control circuit 210.

[0025] The power supply unit 205 receives power supply from the main power supply device 160, generates power to be supplied to each circuit in the pin electronics device 200, and supplies power to each circuit in the pin electronics device 200. The power supply unit 205 may have a plurality of power supplies and output a plurality of types of power with different rated voltages or rated currents, etc.

[0026] The test circuit 220 is connected to the device under test 10 via the connection device 120, receives power supply from the power supply unit 205, and tests the device under test 10. This figure typically shows the circuit portion corresponding to one terminal of the device under test 10 in the test circuit 220. The test circuit 220 may be connected to a plurality of terminals and have circuit portions corresponding to the respective terminals.

[0027] The test circuit 220 has a test signal generator 230 for performing an operation test (also referred to as a "function test") of the device under test 10. The test signal generator 230 receives power supply from the power supply unit 205 and control by the test control circuit 210, generates a test signal to be supplied to the device under test 10 in the function test of the device under test 10, and supplies the test signal to the terminals of the device under test 10. Here, the test signal generated by the device under test 10 may be a pulse signal having a desired signal pattern such as a digital signal or a multi-valued signal to be supplied to the device under test 10.

[0028] The test signal generator 230 includes a voltage generation circuit 240, a pattern generator 245, a timing generator 250, and a pulse generation circuit 255. The voltage generation circuit 240 receives power supply from the power supply unit 205 and control by the test control circuit 210, and generates, as an output voltage, the power supply voltage required by the pulse generation circuit 255 in the function test. The voltage generation circuit 240 may supply, as an output voltage, the power supply voltage corresponding to the high-level voltage in the pulse signal to be supplied to the terminals of the device under test 10 to the pulse generation circuit 255.

[0029] The pattern generator 245 receives power supply from the power supply unit 205 and control by the test control circuit 210, and generates a test pattern that specifies the waveform of the pulse signal to be supplied to the terminals of the device under test 10 in the function test. The pattern generator 245 may execute a test command for each test cycle having a predetermined period and output the test pattern associated with the test command. The test pattern for each test cycle specifies the change pattern of the test signal within the test cycle. Although it varies depending on the model, the pattern generator 245 may be able to specify, as such a change pattern of the test signal, for example, a pattern identifier representing a waveform shape such as RZ (Return to Zero) or NRZ (Non Return to Zero), and the polarity of the waveform shape.

[0030] The timing generator 250 receives power supply from the power supply unit 205 and control by the test control circuit 210, and generates the change timing of the pulse signal to be supplied to the terminals of the device under test 10 in the functional test. The timing generator 250 generates the waveform of the pulse signal to be supplied to the device under test 10 by imparting the change timing in real time to the change pattern of the test signal for each test cycle. Note that depending on the model of the test apparatus 1, the pattern generator 245 may generate the test pattern for each test cycle, the timing generator 250 may generate the timing for each test cycle, and the waveform shaper may shape the waveform of the pulse signal to be supplied to the device under test 10 using the timing by the timing generator 250.

[0031] The pulse generation circuit 255 receives the output voltage from the voltage generation circuit 240, generates a pulse signal using the output voltage from the voltage generation circuit 240 in the functional test, and supplies it to the terminals of the device under test 10. The pulse generation circuit 255 drives the output to a high level or a low level (in the case of binary) or to each of the multi-value levels according to the waveform of the test signal with the change timing in real time given for each test cycle, and outputs a pulse signal in which the test pattern created by the pattern generator 245 is changed at the timing created by the timing generator 250.

[0032] The test signal generator 230 shown above may be realized by a combination of discrete ICs, LSIs, or ASICs, or may be realized by a single test signal generation ASIC. The test signal generator 230 may further have a function of receiving the response signal output by the device under test 10 according to the test signal and determining the pass / fail, etc. of the device under test 10. In this case, the test signal generator 230 may have a comparator that compares the response signal from the device under test 10 with a target value, and a determiner that determines the pass / fail of the device under test 10 using the comparison result by the comparator.

[0033] Relay 260 is provided between terminal Py of test circuit 220 connected to the terminals of DUT 10 and test signal generator 230. Relay 260 may be a mechanical relay or may be a semiconductor relay using a semiconductor switch or the like. Relay 260 is turned on by test control circuit 210 or the like when performing a functional test of DUT 10, and connects between test signal generator 230 and the terminals of DUT 10. Also, relay 260 is turned off by test control circuit 210 or the like when performing a parametric test (such as a voltage application current measurement test or a current application voltage measurement test) of DUT 10 by measurement circuit 270, and cuts off the connection between test signal generator 230 and the terminals of DUT 10.

[0034] Measurement circuit 270 is connected to the wiring between the terminal at which test signal generator 230 outputs a pulse signal and the terminals of DUT 10. In the example of this figure, measurement circuit 270 is connected to a force line for applying voltage or current to the terminals of DUT 10 via relay 280 and a sense line for sensing the voltage of the terminals of DUT 10 via resistor 290. The force line and the sense line are connected to the wiring between relay 260 and terminal Py of test circuit 220 connected to the terminals of DUT 10.

[0035] Measurement circuit 270 performs a parametric test of DUT 10 under the power supply from power unit 205 and the control by test control circuit 210. Depending on the model, measurement circuit 270 may include various circuits including at least one of, for example, a voltage generator that generates a voltage to be supplied to the terminals of DUT 10, a current generator that generates a current to be supplied to DUT 10, a voltage measuring device that measures the voltage output by DUT 10, a current measuring device that measures the current output by DUT 10, a frequency measuring device that measures the frequency of the signal output by DUT 10, and the like. In the example of this figure, measurement circuit 270 is provided within pin electronics device 200. Alternatively, measurement circuit 270 may be realized by another pin electronics device 110 within test device 1.

[0036] When performing a voltage application current measurement test, the measurement circuit 270 outputs a desired test voltage via the force line and measures the current flowing through the terminals of the device under test 10 that receives the test voltage. When performing a current application voltage measurement test, the measurement circuit 270 passes a desired test current between the terminals of the device under test 10 via the force line and measures the voltage of the terminals of the device under test 10 via the sense line.

[0037] The relay 280 is provided on the force line between the connection point on the terminal Py side of the relay 260 and the measurement circuit 270 in the wiring between the terminal Py of the test circuit 220 and the test signal generator 230. The relay 280 may be a mechanical relay or may be a semiconductor relay using a semiconductor switch or the like. The relay 280 is turned off by the test control circuit 210 or the like when performing a functional test of the device under test 10, and cuts off the connection between the measurement circuit 270 and the terminals of the device under test 10. The relay 280 is turned on by the test control circuit 210 or the like when performing a parametric test of the device under test 10, and connects the measurement circuit 270 and the terminals of the device under test 10.

[0038] The resistor 290 is provided on the sense line between the connection point on the terminal Py side of the relay 260 and the measurement circuit 270 in the wiring between the terminal Py of the test circuit 220 and the test signal generator 230. The resistor 290 may be a relatively large resistor such as 10 KΩ, etc., and while substantially isolating the terminals of the device under test 10 from the measurement circuit 270, enables the voltage of the terminals of the device under test 10 to be input to the measurement circuit 270.

[0039] The test control circuit 210 controls the test of the device under test 10 by the test circuit 220. The test control circuit 210 may also be referred to as a "site controller". The test control circuit 210 executes the test program supplied from the control device 170 and controls each part in the test circuit 220, thereby causing the test circuit 220 to execute tests such as an operation test or a parametric test of the device under test 10.

[0040] In the pin electronics device 200 shown above, a measurement circuit 270 is connected to the wiring between the terminal Px from which the test signal generator 230 outputs a pulse signal and the terminal of the device under test 10. In the functional test of the device under test 10, the wiring between the terminal Px of the test signal generator 230 and the terminal of the device under test 10 will transmit a high-speed pulse signal. Here, in the functional test of the device under test 10, the relay 260 is turned on and the relay 280 is turned off. However, even when the relay 260 is on, it has a parasitic capacitance, and even when the relay 280 is off, it has a parasitic capacitance. For this reason, the wiring between the terminal Px of the test signal generator 230 and the terminal of the device under test 10 causes an RC delay due to the parasitic capacitances of the relay 260 and the relay 280, and the transmission of the high-speed pulse signal is inhibited.

[0041] FIG. 3 shows the configuration of a pin electronics device 300 according to the present embodiment. The pin electronics device 300 is a modified example of the pin electronics device 200. In this figure, components denoted by the same reference numerals as those in FIG. 2 have the same functions and configurations as those in FIG. 2, and thus the description will be omitted except for the following differences.

[0042] The test circuit 320 is connected to the device under test 10 via the connection device 120, receives power supply from the power supply unit 205, and tests the device under test 10. This figure typically shows a circuit portion corresponding to one terminal of the device under test 10 in the test circuit 320. The test circuit 320 may be connected to a plurality of terminals and have circuit portions corresponding to the respective terminals.

[0043] The test circuit 320 includes a test signal generator 330. The test signal generator 330 according to the present embodiment performs both a functional test and a parametric test on the device under test 10 under the power supply from the power supply unit 205 and the control by the test control circuit 310. The test circuit 320 may perform both a functional test and a parametric test on the same device under test 10 according to the usage method by the user. The test circuit 320 may perform a functional test on one device under test 10 and a parametric test on another device under test 10. Also, depending on the usage method of the user, the test circuit 320 may perform only one of the functional test or the parametric test, and the function of performing the other test may not be used. The test signal generator 330 includes a measurement circuit 370, a pattern generator 245, a timing generator 250, a pulse generation circuit 255, and a resistor 290.

[0044] The measurement circuit 370 receives the power supply from the power supply unit 205 and the control by the test control circuit 310. The measurement circuit 370 performs a parametric test on the device under test 10. Although it may vary depending on the type of parametric test supported, the measurement circuit 370 includes various circuits including at least one of a voltage generator that generates a voltage supplied to the terminals of the device under test 10, a current generator that generates a current supplied to the device under test 10, a voltage measuring device that measures the voltage output by the device under test 10, a current measuring device that measures the current output by the device under test 10, a frequency measuring device that measures the frequency of the signal output by the device under test 10, and the like.

[0045] The measurement circuit 370 according to this embodiment may be capable of performing at least one of a voltage application current measurement test or a current application voltage measurement test as a parametric test. In the voltage application current measurement test, the measurement circuit 370 generates an output voltage and uses the output voltage to perform a voltage application current measurement test on the device under test 10. The output voltage of the measurement circuit 370 is supplied as a test voltage to the terminals of the device under test 10 via the pulse generation circuit 255. In the current application voltage measurement test, the measurement circuit 370 generates an output current and uses this output current to perform a current application voltage measurement test on the device under test 10. The output current of the measurement circuit 370 is supplied as a test current to the terminals of the device under test 10 via the pulse generation circuit 255. Here, the output current of the measurement circuit 370 may be a positive current, that is, a current flowing in the direction from the measurement circuit 370 to the terminals of the device under test 10 (output current, source current), or a negative current, that is, a current flowing in the direction from the terminals of the device under test 10 to the measurement circuit 370 (input current, sink current).

[0046] In the function test, the measurement circuit 370 generates, as an output voltage, the power supply voltage required by the pulse generation circuit 255 in the function test, similar to the voltage generation circuit 240 shown in FIG. 2. The voltage generation circuit 240 may supply, as an output voltage, the power supply voltage corresponding to the high-level voltage in the pulse signal to be supplied to the terminals of the device under test 10 to the pulse generation circuit 255.

[0047] The pattern generator 245, the timing generator 250, and the pulse generation circuit 255 have the same functions and configurations as the pattern generator 245, the timing generator 250, and the pulse generation circuit 255 shown in FIG. 2. In the functional test of the device under test 10, the pulse generation circuit 255 generates a pulse signal using the output voltage of the measurement circuit 370 and supplies the generated pulse signal to the terminals of the device under test 10. In the voltage application current measurement test, the pulse generation circuit 255 passes the output voltage of the measurement circuit 370 and supplies the passed output voltage to the terminals of the device under test 10 as a test voltage. In the current application voltage measurement test, the pulse generation circuit 255 passes the output current of the measurement circuit 370 and supplies the passed output current to the terminals of the device under test 10 as a test current. Note that the test circuit 320 may use any circuit other than the pattern generator 245 and the timing generator 250 to generate a pulse signal by the pulse generation circuit 255.

[0048] Since the pulse generation circuit 255 has a function of outputting a digital signal or a multi-valued signal in the functional test, at least one signal value (for example, the high level in the digital signal, the maximum value in the multi-valued signal), the output voltage supplied from the measurement circuit 370 is passed through at least one of the resistors or switching elements in the pulse generation circuit 255, and the passed output voltage is output to the terminals of the device under test 10. The control device 170, the test control circuit 210, or the pattern generator 245 and the timing generator 250, etc. control the pulse generation circuit 255 to always output such a signal value during the parametric test, so that the input and output terminals of the pulse generation circuit 255 are connected through at least one of the resistors or switching elements, and the output voltage or output current of the measurement circuit 370 can be supplied to the device under test 10 as a test voltage or test current through the pulse generation circuit 255.

[0049] The test signal generator 330 may be connected to the output terminal side of the pulse generation circuit 255 and may include an output terminal feedback line FBo that feeds back the voltage on the output terminal side to the measurement circuit 370. The output terminal feedback line FBo may have the same function as the voltage sense line shown in FIG. 2, and is connected to a connection point on the wiring between the output terminal of the pulse generation circuit 255 and the terminal of the device under test 10, and feeds back the voltage of this connection point to the measurement circuit 370. In the pin electronics device 300 according to this embodiment, this connection point is provided near the output terminal of the pulse generation circuit 255 within the test signal generator 330. Alternatively, this connection point may be provided outside the test signal generator 330 within the test circuit 320, for example, outside the test circuit 320 such as near the terminal of the device under test 10. The resistor 290 may be provided on the output terminal feedback line FBo. The resistor 290 has the same function and configuration as the resistor 290 shown in FIG. 2.

[0050] The test signal generator 330 may be connected to the input terminal side of the pulse generation circuit 255 and may include an input terminal feedback line FBi that feeds back the voltage on the input terminal side to the measurement circuit 370. In an embodiment including the input terminal feedback line FBi, the measurement circuit 370 may adjust the output voltage using the voltage fed back from the input terminal feedback line in a functional test. Note that a resistor may be provided on the input terminal feedback line FBi in the same manner as the resistor 290 of the output terminal feedback line FBo.

[0051] According to the pin electronics device 300 shown above, the functions of both the measurement circuit 270 and the voltage generation circuit 240 shown in FIG. 2 are realized by the measurement circuit 370. As a result, the voltage generation circuit 240 that generates the output voltage for the pulse generation circuit 255 in the functional test in the configuration shown in FIG. 2 and the voltage generation circuit in the measurement circuit 270 that generates the test voltage in the voltage application current measurement test can be replaced with the voltage generation circuit in the measurement circuit 370 and shared in the functional test and the voltage application current measurement test, and the circuit scale of the pin electronics device 110 can be suppressed.

[0052] Also, according to the pin electronics device 300 described above, it is not necessary to connect the force line of the measurement circuit 270 to the wiring from the pulse generation circuit 255 to the terminals of the device under test 10, and the relays 260 and 280 become unnecessary. As a result, the circuit scale of the pin electronics device 300 can be reduced, and the parasitic capacitances of the relays 260 and 280 can be eliminated to prevent deterioration of the high-speed pulse signal. In the pin electronics device 300 according to the present embodiment as well, an output terminal feedback line FBo (corresponding to the sense line in FIG. 2) is connected to the wiring from the pulse generation circuit 255 to the terminals of the device under test 10. Here, the output terminal feedback line FBo has a relatively high resistance value resistor 290, and while substantially isolating the wiring from the pulse generation circuit 255 to the terminals of the device under test 10 and the measurement circuit 370, feeds back the voltage of the terminals of the device under test 10 to the measurement circuit 370. Therefore, the deterioration of the high-speed pulse signal due to the output terminal feedback line FBo is negligible.

[0053] FIG. 4 shows the operation flow of the functional test of the device under test 10 by the test device 1 according to the present embodiment, focusing on the operation of the pin electronics device 300 in FIG. 3. Before the start of this operation flow, the test device 1 electrically connects one or a plurality of pin electronics devices 300 to the device under test 10 via the connection device 120.

[0054] In step S400, the measurement circuit 370 generates, under the control of the test control circuit 310, a power supply voltage for pulse generation required by the pulse generation circuit 255 in the functional test as an output voltage. In the functional test, the measurement circuit 370 may adjust the output voltage using the voltage fed back from the input terminal feedback line FBi. For example, the measurement circuit 370 compares the feedback voltage fed back from the input terminal feedback line FBi with the target output voltage, increases the output voltage when the feedback voltage is lower than the target output voltage, and decreases the output voltage when the feedback voltage is higher than the target output voltage. Thereby, the measurement circuit 370 can adjust the output voltage to approach the target output voltage. Note that the measurement circuit 370 may perform feedback and adjustment of the output voltage inside the measurement circuit 370.

[0055] In S410, the pattern generator 245 generates a test pattern for each test cycle under the control of the test control circuit 310. In S420, the timing generator 250 generates, under the control of the test control circuit 310, the timing of a pulse signal corresponding to the test pattern for each test cycle. In S260, the pulse generation circuit 255 uses the output voltage of the measurement circuit 370 to generate a pulse signal corresponding to the timing from the timing generator 250 for each test cycle, and supplies the generated pulse signal to the terminals of the device under test 10. The pin electronics device 300 may receive a response signal output by the device under test 10 in response to the test signal and determine the pass / fail of the device under test 10.

[0056] According to the pin electronics device 300 shown above, the voltage generator in the measurement circuit 370 used for the parametric test of the device under test 10 can be used to supply the power supply voltage required by the pulse generation circuit 255 in the functional test. Also, the measurement circuit 370 can adjust the output voltage using the feedback voltage from the input terminal feedback line FBi and reduce the error from the target output voltage.

[0057] FIG. 5 shows the operation flow of the voltage application current measurement test of the device under test 10 by the test device 1 according to the present embodiment, focusing on the operation of the pin electronics device 300 in FIG. 3. Before the start of this operation flow, the test device 1 electrically connects one or more pin electronics devices 300 to the device under test 10 via the connection device 120.

[0058] In S500, the measurement circuit 370 generates an output voltage for the voltage application current measurement test. In S510, the pulse generation circuit 255 passes the output voltage of the measurement circuit 370 input from the measurement circuit 370 and supplies the passed output voltage as a test voltage to the terminals of the device under test 10.

[0059] In S520, the measurement circuit 370 adjusts the output voltage using the test voltage fed back from the output terminal feedback line. For example, the measurement circuit 370 compares the test voltage fed back from the output terminal feedback line FBo with the target test voltage, and if the fed-back test voltage is lower than the target test voltage, it increases the output voltage, and if the fed-back test voltage is higher than the target test voltage, it decreases the output voltage. Thereby, even when there is a resistance between the input terminal and the output terminal of the pulse generation circuit 255 in the configuration where the measurement circuit 370 supplies a test voltage to the terminals of the device under test 10 via the pulse generation circuit 255, the measurement circuit 370 can adjust the test voltage on the output terminal side of the pulse generation circuit 255 to approach the target value.

[0060] In S530, the measurement circuit 370 measures the current flowing through the terminals of the device under test 10 while supplying a test voltage to the terminals of the device under test 10. The measurement circuit 370 according to the present embodiment measures the current flowing through the terminals of the device under test 10 by using a resistor connected between the input terminal and the output terminal of the pulse generation circuit 255 as a sense resistor. In this case, the measurement circuit 370 measures the current flowing through the terminals of the device under test 10 by using the potential difference between the input terminal feedback line FBi and the output terminal feedback line FBo. For example, assuming that the internal resistance of the pulse generation circuit 255 when the output voltage of the measurement circuit 370 passes from the input terminal to the output terminal is R, the voltage at the input terminal of the pulse generation circuit 255 measured using the input terminal feedback line FBi is Vi, and the voltage at the output terminal of the pulse generation circuit 255 measured using the output terminal feedback line FBo is Vo. The current flowing through the terminals of the device under test 10 is substantially the same as the current flowing through the pulse generation circuit 255, and is a value obtained by dividing the potential difference (Vi - Vo) between the input terminal feedback line FBi and the output terminal feedback line FBo by the internal resistance R.

[0061] According to the pin electronics device 300 described above, it is possible to perform a voltage application current measurement test on the device under test 10 via the pulse generation circuit 255 used for the functional test of the device under test 10. The measurement circuit 370 can measure the test voltage on the output terminal side of the pulse generation circuit 255 and adjust the output voltage. Further, the measurement circuit 370 can calculate the current flowing through the terminals of the device under test 10 by using the internal resistance of the pulse generation circuit 255.

[0062] FIG. 6 shows the operation flow of the current application voltage measurement test of the device under test 10 by the test apparatus 1 according to the present embodiment, focusing on the operation of the pin electronics device 300. Before the start of this operation flow, the test apparatus 1 electrically connects one or more pin electronics devices 300 to the device under test 10 via the connection device 120.

[0063] In S600, the measurement circuit 370 generates an output current for a current application voltage measurement test. This output current may be either a positive current or a negative current depending on the test content. In S610, the pulse generation circuit 255 passes the output current of the measurement circuit 370 input from the measurement circuit 370, and supplies this passed output current as a test current to the terminals of the device under test 10.

[0064] In S620, the measurement circuit 370 measures the voltage fed back from the output terminal feedback line FBo. The measurement circuit 370 may measure or calculate the voltage of the terminals of the device under test 10 using the measured voltage. For example, when the wiring resistance from the connection point of the output terminal feedback line FBo to the terminals of the device under test 10 in the wiring from the output terminal of the pulse generation circuit 255 to the terminals of the device under test 10 can be ignored, the measurement circuit 370 may measure the voltage fed back from the output terminal feedback line FBo as the voltage of the terminals of the device under test 10. When considering the wiring resistance from the connection point of the output terminal feedback line FBo to the terminals of the device under test 10 in the wiring from the output terminal of the pulse generation circuit 255 to the terminals of the device under test 10, the measurement circuit 370 may calculate the voltage of the terminals of the device under test 10 by adding the voltage drop (in the case of a positive current) or voltage rise (in the case of a negative current) generated by the test current flowing through the known wiring resistance to the measured voltage.

[0065] According to the pin electronics device 300 shown above, a current application voltage measurement test of the device under test 10 can be performed via the pulse generation circuit 255 used for the function test of the device under test 10. The measurement circuit 370 can measure the voltage of the terminals of the device under test 10 on the output terminal side of the pulse generation circuit 255.

[0066] Note that in S600 and S610, as shown in relation to S530 in FIG. 5, the measurement circuit 370 may measure the current flowing through the terminals of the device under test 10 using the potential difference between the input terminal feedback line FBi and the output terminal feedback line FBo, and adjust the test current using the measured current. For example, the measurement circuit 370 compares the measured current with the target test current, increases the output current when the measured current is smaller than the target test current, and decreases the output current when the measured current is larger than the target test current. Thereby, the measurement circuit 370 can adjust the test current to approach the target value in the configuration where the test current is supplied to the terminals of the device under test 10 via the pulse generation circuit 255.

[0067] As described above, the present invention has been described using embodiments, but the technical scope of the present invention is not limited to the scope described in the above embodiments. It is obvious to those skilled in the art that various changes or improvements can be made to the above embodiments. It is clear from the description of the claims that forms with such changes or improvements can also be included in the technical scope of the present invention.

[0068] It should be noted that the execution order of each process such as operations, procedures, steps, and stages in the devices, systems, programs, and methods shown in the claims, the specification, and the drawings is not explicitly indicated as "earlier" or "preceding" etc., and can be realized in any order unless the output of the previous process is used in the subsequent process. Regarding the operation flows in the claims, the specification, and the drawings, even if "first," "next," etc. are used for convenience of explanation, it does not mean that it is essential to implement in this order.

Description of Reference Numerals

[0069] 1 Test device, 10 Device under test, 100 Test head, 110 Pin electronics device, 120 Connection device, 150 Main frame, 160 Main power supply device, 170 Control device, 200 Pin electronics device, 205 Power supply unit, 210 Test control circuit, 220 Test circuit, 230 Test signal generator, 240 Voltage generation circuit, 245 Pattern generator, 250 Timing generator, 255 Pulse generation circuit, 260 Relay, 270 Measurement circuit, 280 Relay, 290 Resistor, 300 Pin electronics device, 310 Test control circuit, 320 Test circuit, 330 Test signal generator, 370 Measurement circuit, FBi Input terminal feedback line, FBo Output terminal feedback line

Claims

1. a measurement circuit that generates an output voltage and performs a voltage application current measurement test on a device under test using the output voltage; a pulse generating circuit that generates a pulse signal using the output voltage of the measurement circuit in a function test of the device under test and supplies the pulse signal to a terminal of the device under test, and that passes the output voltage of the measurement circuit and supplies the output voltage as a test voltage to the terminal of the device under test in the voltage application current measurement test; an output end feedback line that is connected to a first wiring between an output end of the pulse generating circuit and a terminal of a device under test and feeds back a voltage of the first wiring to the measurement circuit; A test circuit comprising:

2. The pulse generating circuit includes: In the functional test, a pulse signal having a plurality of signal values ​​is generated using the output voltage of the measurement circuit, and the pulse signal is supplied to a terminal of the device under test; In the voltage application current measurement test, a signal value among the plurality of signal values ​​that passes the output voltage is constantly output to pass the output voltage of the measurement circuit, and the output voltage is supplied as a test voltage to a terminal of the device under test.

2. The test circuit of claim 1.

3. 3. The test circuit according to claim 1, wherein in the voltage application current measurement test, the measurement circuit adjusts the output voltage using the test voltage fed back from the output end feedback line.

4. A test circuit as described in claim 1 or 2, comprising an input terminal feedback line connected to a second wiring between the measurement circuit and the input terminal of the pulse generating circuit, for feeding back the voltage of the second wiring to the measurement circuit.

5. 5. The test circuit according to claim 4, wherein, during the functional test, the measurement circuit adjusts the output voltage using a voltage fed back from the input end feedback line.

6. the pulse generating circuit has a resistor connected between the input terminal and the output terminal; In the voltage application current measurement test, the measurement circuit measures a current flowing through a terminal of the device under test using a potential difference between the input end feedback line and the output end feedback line.

5. The test circuit of claim 4.

7. the measurement circuit generates an output current, and performs a current application voltage measurement test on a device under test using the output current; In the current application voltage measurement test, the pulse generation circuit passes the output current of the measurement circuit and supplies the output current as a test current to the terminal of the device under test.

3. A test circuit according to claim 1 or 2.

8. 8. The test circuit according to claim 7, wherein in the current application voltage measurement test, the measurement circuit measures a voltage fed back from the output end feedback line.

9. A test device comprising the test circuit according to claim 1 or 2.

10. a measurement circuit generating an output voltage and performing a voltage application current measurement test on a device under test using the output voltage; a pulse generation circuit, in a function test of a device under test, generating a pulse signal using the output voltage of the measurement circuit and supplying the pulse signal to a terminal of the device under test, and in the voltage application current measurement test, passing the output voltage of the measurement circuit and supplying the output voltage as a test voltage to the terminal of the device under test; an output end feedback line connected to a first wiring between an output end of the pulse generating circuit and a terminal of a device under test feeds back a voltage of the first wiring to the measuring circuit; A test method comprising:

11. The pulse generating circuit, In the functional test, a pulse signal having a plurality of signal values ​​is generated using the output voltage of the measurement circuit, and the pulse signal is supplied to a terminal of the device under test; In the voltage application current measurement test, a signal value among the plurality of signal values ​​that passes the output voltage is constantly output to pass the output voltage of the measurement circuit, and the output voltage is supplied as a test voltage to a terminal of the device under test. The test method according to claim 10.

Images