Laser-induced breakdown spectroscopy apparatus

Abstract

To easily estimate a change in a substance in a depth direction of an analyte.SOLUTION: An analysis observation device includes: a library holding section that holds a substance library in which a substance is associated with a type of an element constituting the substance and a content of the element; and a component analysis section that estimates a type of an element constituting a substance and a content of the element on the basis of a spectrum, and estimates the substance on the basis of estimated characteristics and the substance library. The component analysis section estimates a type of an element constituting a substance, a content of the element, and the substance at each of a plurality of positions having different analysis depths.SELECTED DRAWING: Figure 16C

Description

Technical Field

[0001] The technology disclosed herein relates to a laser-induced breakdown spectroscopy apparatus.

Background Art

[0002] For example, Patent Document 1 discloses an analyzer (spectroscopic apparatus) for performing component analysis of a sample. Specifically, the spectroscopic apparatus disclosed in Patent Document 1 includes a condenser lens for condensing a primary electromagnetic wave (ultraviolet laser light) and a collection head for collecting a secondary electromagnetic wave (plasma) generated on the sample surface corresponding to the primary electromagnetic wave, in order to perform component analysis using laser-induced breakdown spectroscopy (LIBS). According to Patent Document 1, by measuring the peak of the spectrum of the sample from the signal of the secondary electromagnetic wave, chemical analysis of the sample based on the measured peak can be performed. In a general laser-induced breakdown spectroscopy apparatus, laser light is irradiated onto an object to be analyzed, and the plasma light generated in the object to be analyzed is detected by a detector, and a spectrum for each wavelength of the plasma light is generated. Then, based on the generated spectrum, the elements contained in the object to be analyzed and their contents are estimated.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Since it is common for the spectra obtained by component analysis of a sample to have numerous peaks, it is difficult for users not well-versed in analysis to interpret the meaning of such spectra solely from the spectra. Also, even when the elements contained in the sample and their content ratios are estimated based on the spectra, it is difficult to grasp what kind of substance has such a composition. In particular, when using a laser-induced breakdown spectroscopy apparatus, it is possible to drill (progress) in the depth direction of the sample. Therefore, users performing component analysis may not only perform component analysis on the sample surface but also want to drill and analyze the sample in the depth direction to confirm how the substance is changing. However, it is difficult for users not well-versed in analysis to understand the change in the substance in the depth direction based on the spectra obtained at each position in the depth direction of the sample and the elements contained in the sample and their content ratios.

[0005] The technology disclosed herein has been made in view of such points, and its object is to easily estimate the change in the substance in the depth direction of the sample and thereby improve the usability of the analysis apparatus.

Means for Solving the Problem

[0006] To achieve the above object, the first disclosure of the present invention can be premised on a laser-induced breakdown spectroscopy apparatus that performs component analysis of an object to be analyzed by using laser-induced breakdown spectroscopy.

[0007] A laser-induced breakdown spectroscopy apparatus includes: an emitting unit that emits laser light to an object to be analyzed; a collection head that collects plasma light generated in the object to be analyzed when the laser light emitted from the emitting unit irradiates the object to be analyzed; a detector that receives the plasma light generated in the object to be analyzed and collected by the collection head, and generates a spectrum that is an intensity distribution for each wavelength of the plasma light; a library holding unit that holds a substance library including constituent elements of a substance and a content rate of the constituent elements as information for specifying the substance; a component analysis unit that estimates constituent elements constituting the object to be analyzed and a content rate of the constituent elements based on the spectrum generated by the detector, and estimates a substance contained in the object to be analyzed based on the estimated constituent elements and the content rate of the constituent elements and the substance library held by the library holding unit; and a display control unit that causes a display unit to display the constituent elements and the content rate of the constituent elements estimated by the component analysis unit at a plurality of positions having different analysis depths and information for specifying the substance contained in the object to be analyzed.

[0008] Then, the emitting unit irradiates the object to be analyzed with laser light at a plurality of positions having different analysis depths by emitting the laser light to the object to be analyzed a plurality of times. The component analysis unit executes estimation of constituent elements constituting the object to be analyzed and a content rate of the constituent elements and estimation of a substance contained in the object to be analyzed at each of the plurality of positions having different analysis depths. The display control unit causes the display unit to display a depth analysis screen showing, along the analysis depth, the constituent elements and the content rate of the constituent elements at the plurality of positions having different analysis depths estimated by the component analysis unit and information for specifying the substance contained in the object to be analyzed.

[0009] According to this configuration, the component analysis unit can estimate a substance based on the types of constituent elements and their content rates. Here, examples of substances include stainless steel, SUS-304, etc. Also, since the emission unit emits laser light multiple times to the object to be analyzed, the object to be analyzed can be dug deeper in the depth direction. Therefore, since laser light is emitted to different positions in the depth direction, the component analysis unit can calculate the constituent elements that make up the object to be analyzed and their content rates at a plurality of positions with different analysis depths. As a result, secondary information in which the interpretation by the component analysis unit is added to the primary information, rather than the primary information such as spectra, types of elements, and element content rates that require user interpretation, can be obtained at a plurality of positions with different analysis depths. Therefore, even for users who are not proficient in component analysis, the component analysis results at each analysis depth can be easily understood.

[0010] Furthermore, the display control unit can cause the display unit to display a depth display screen. Since the depth display screen shows information for specifying a substance along the depth direction, it becomes possible to easily grasp how the substance changes in the depth direction of the object to be analyzed.

[0011] In another disclosure of the present invention, when the content rate of a certain constituent element at a first analysis depth and the content rate of the same constituent element at a second analysis depth deeper than the first analysis depth differ by a predetermined threshold or more, the component analysis unit can estimate that the substance at the second analysis depth is an intermediate substance that is changing from the substance at the first analysis depth to a different substance. Then, when the component analysis unit estimates that the substance at the second analysis depth is an intermediate substance, the display control unit causes the display unit to display that the substance at the second analysis depth is an intermediate substance.

[0012] According to this configuration, it is possible to grasp whether the substance is a so-called pure substance such as nichrome wire or brass, or whether it is changing from the pure substance Cr to the pure substance nichrome wire. Therefore, the user can easily grasp whether the substance contained in the object to be analyzed has changed and whether the change has been completed.

[0013] In another disclosure of the present invention, the laser-induced breakdown spectroscopy apparatus includes an analysis setting unit and an emission control unit. When the substances estimated at a plurality of analysis depths deeper than the second analysis depth are continuously the same, the component analysis unit can estimate that the change from the substance at the first analysis depth to a different substance is completed. Then, when the number of emissions of the laser beam after the start of analysis based on the settings set by the analysis setting unit is less than the number of emissions set by the analysis setting unit at the time of estimation, the component analysis unit generates a stop signal for stopping the emission of the laser beam to the emission control unit.

[0014] According to this configuration, the component analysis unit can detect that the change from one substance to another substance is completed. In particular, when the same substance is continuously estimated a predetermined number of times or more, by estimating that the change to another substance is completed, even if it accidentally coincides with the composition of a third substance during the change from one substance to another substance, if the third substance is transient, it is estimated as an intermediate substance. Therefore, it is possible to more accurately estimate the completion of the change to another substance.

[0015] In another disclosure of the present invention, the library holding unit can hold a composite substance library in which the name of the composite substance is associated with the configuration information of a plurality of substances constituting the composite substance. Further, the laser-induced breakdown spectroscopy apparatus further includes a composite substance estimation unit that estimates the name of the composite substance of the analysis target object based on the substances estimated at each of a plurality of positions with different analysis depths and the composite substance library held in the library holding unit.

[0016] According to this configuration, based on substances estimated at a plurality of positions with different analysis depths by the component analysis unit, the composite substance estimation unit can estimate the name of the composite substance of the object to be analyzed. Just estimating substances in the order of analysis depth makes it difficult for a user not proficient in analysis to estimate what the object to be analyzed itself is. By also estimating the name of the composite substance of the object to be analyzed, it becomes easy to identify whether the object to be analyzed is the desired composite substance and what impurities are mixed in, etc.

Effect of the Invention

[0017] As described above, it is possible to easily estimate the change in substances in the depth direction of the sample, and thus improve the usability of the analyzer.

Brief Description of the Drawings

[0018]

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Mode for Carrying Out the Invention

[0019] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. Note that the following description is an example.

[0020] <Overall Configuration of Analysis Observation Apparatus A> FIG. 1 is a schematic diagram exemplifying the overall configuration of an analysis observation apparatus A as an analysis apparatus according to an embodiment of the present disclosure. The analysis observation apparatus A illustrated in FIG. 1 can perform magnified observation of a sample SP as an object to be observed and an object to be analyzed, and can perform component analysis of the sample SP.

[0021] Specifically, the analysis observation apparatus A according to the present embodiment can search for a site where component analysis is to be performed in the sample SP, or perform inspection, measurement, etc. of the appearance thereof, by magnifying and imaging a sample SP composed of, for example, a sample such as a minute object, an electronic component, a workpiece, etc. When focusing on the observation function of the analysis observation apparatus A, it can be referred to as a magnifying observation apparatus, simply as a microscope, or as a digital microscope.

[0022] When performing component analysis of the sample SP, the analysis and observation device A can also implement methods such as Laser Induced Breakdown Spectroscopy (LIBS) and Laser Induced Plasma Spectroscopy (LIPS). When focusing on its analysis function, the analysis and observation device A can also be referred to as a component analysis device, simply as an analysis device, or as a spectroscopic device.

[0023] As shown in FIG. 1, the analysis and observation device A according to this embodiment includes, as main components, an optical system assembly (optical system main body) 1, a controller main body 2, and an operation unit 3.

[0024] Among these, the optical system assembly 1 can image and analyze the sample SP and output an electrical signal corresponding to the imaging result and the analysis result to the outside.

[0025] The controller main body 2 has a control unit 21 for controlling various components that make up the optical system assembly 1, such as the first camera 81. The controller main body 2 can cause the optical system assembly 1 to observe and analyze the sample SP via the control unit 21. The controller main body 2 also has a display unit 22 capable of displaying various information. Images captured by the optical system assembly 1, data indicating the analysis results of the sample SP, etc. can be displayed on this display unit 22.

[0026] The operation unit 3 includes a mouse 31, a console 32, etc. for receiving operation inputs from the user. By operating buttons, adjustment knobs, etc. on the console 32, the controller main body 2 can be instructed to capture image data, adjust brightness, focus the first camera 81, etc.

[0027] <Details of the optical system assembly 1> As shown in FIG. 1, the optical system assembly 1 includes a stage 4 that supports various devices and on which a sample SP is placed, and a head unit 6 attached to the stage 4. Here, the head unit 6 is formed by attaching an observation housing 90 in which an observation optical system 9 is housed to an analysis housing 70 in which an analysis optical system 7 is housed. Here, the analysis optical system 7 is an optical system for performing component analysis of the sample SP. The observation optical system 9 is an optical system for performing enlarged observation of the sample SP. The head unit 6 is configured as a group of devices having both the analysis function and the enlarged observation function of the sample SP.

[0028] In the following description, as shown in FIG. 1, the front-rear direction and the left-right direction of the optical system assembly 1 are defined. That is, the side facing the user is the front side of the optical system assembly 1, the opposite side is the rear side of the optical system assembly 1, and when the user and the optical system assembly 1 face each other, the right side as seen from the user is the right side of the optical system assembly 1, and the left side as seen from the user is the left side of the optical system assembly 1. The definitions of the front-rear direction and the left-right direction are for assisting the understanding of the description and do not limit the actual usage state. It may be used with any direction as the front.

[0029] Although details will be described later, the head unit 6 can move along the central axis Ac shown in FIG. 1 or swing around this central axis Ac. This central axis Ac is configured to extend along the aforementioned front-rear direction as shown in FIG. 1 and the like.

[0030] (Stage 4) The stage 4 has a base 41 installed on a workbench or the like, a stand 42 connected to the base 41, and a mounting table 5 supported by the base 41 or the stand 42. This stage 4 is a member for defining the relative positional relationship between the mounting table 5 and the head unit 6, and is configured to be able to attach at least the observation optical system 9 and the analysis optical system 7 of the head unit 6.

[0031] As shown in FIG. 2, a first support portion 41a and a second support portion 41b are provided in the rear portion of the base 41 in an arranged order from the front side. Both the first and second support portions 41a and 41b are provided so as to project upward from the base 41. Circular bearing holes (not shown) that are arranged concentrically with the central axis Ac are formed in the first and second support portions 41a and 41b.

[0032] Also, as shown in FIG. 2, a first attachment portion 42a and a second attachment portion 42b are provided in the lower portion of the stand 42 in an arranged order from the front side. The first and second attachment portions 42a and 42b have a configuration corresponding to the aforementioned first and second support portions 41a and 41b. Specifically, the first and second support portions 41a and 41b and the first and second attachment portions 42a and 42b are laid out such that the first support portion 41a is sandwiched between the first attachment portion 42a and the second attachment portion 42b, and the second attachment portion 42b is sandwiched between the first support portion 41a and the second support portion 41b.

[0033] Also, circular bearing holes (not shown) that are concentric and have the same diameter as the bearing holes formed in the first and second support portions 41a and 41b are formed in the first and second attachment portions 42a and 42b. A shaft member 44 is inserted into these bearing holes via a bearing (not shown) such as a cross roller bearing. The shaft center of this shaft member 44 is arranged concentrically with the aforementioned central axis Ac. By inserting the shaft member 44, the base 41 and the stand 42 are connected so as to be relatively swingable. The shaft member 44, together with the first and second support portions 41a and 41b and the first and second attachment portions 42a and 42b, constitutes the tilting mechanism 45 in the present embodiment.

[0034] Also, as shown in FIG. 2, an overhead camera 48 is built into the shaft member 44 that constitutes the tilting mechanism 45. This overhead camera 48 receives visible light reflected by the sample SP through a through hole 44a provided on the front surface of the shaft member 44. The overhead camera 48 images the sample SP by detecting the amount of received light of the received reflected light.

[0035] The imaging field of view of the overhead camera 48 is wider than those of the first camera 81 and the second camera 93 described later. In other words, the magnification of the overhead camera 48 is smaller than those of the first camera 81 and the second camera 93. Therefore, the overhead camera 48 can image the sample SP over a wider range than the first camera 81 and the second camera 93.

[0036] Specifically, the overhead camera 48 according to the present embodiment photoelectrically converts the light incident through the through-hole 44a by a plurality of pixels arranged on its light-receiving surface, and converts it into an electrical signal corresponding to the optical image of the subject (sample SP).

[0037] The overhead camera 48 may be configured by arranging a plurality of light-receiving elements along the light-receiving surface. In this case, each light-receiving element corresponds to a pixel, and an electrical signal based on the amount of light received by each light-receiving element can be generated. Specifically, the overhead camera 48 according to the present embodiment is configured by an image sensor made of CMOS (Complementary Metal Oxide Semiconductor), but is not limited to this configuration. As the overhead camera 48, for example, an image sensor made of CCD (Charged-Coupled Device) can also be used.

[0038] Then, the overhead camera 48 inputs an electrical signal generated by detecting the amount of light received by each light-receiving element to the control unit 21 of the controller main body 2. The control unit 21 generates image data corresponding to the optical image of the subject based on the input electrical signal. The control unit 21 can display the image data thus generated on the display unit 22 or the like as an image obtained by imaging the subject.

[0039] Note that the configuration of the above-described overhead camera 48 is merely an example. The overhead camera 48 should simply have a wider imaging field of view than at least the first camera 81 and the second camera 93, and the layout of the overhead camera 48, the direction of its imaging optical axis, etc. can be freely changed. For example, the overhead camera 48 may be configured by a USB camera that is wired or wirelessly connected to the optical system assembly 1 or the controller main body 2.

[0040] (Head unit 6) The head unit 6 includes a head mounting member 61, an analysis unit in which the analysis optical system 7 is housed in the analysis housing 70, an observation unit in which the observation optical system 9 is housed in the observation housing 90, a housing connector 64, and a slide mechanism (horizontal drive mechanism) 65. The head mounting member 61 is a member for connecting the analysis housing 70 to the stand 42. The analysis unit is a device for performing component analysis of the sample SP by the analysis optical system 7. The observation unit 63 is a device for observing the sample SP by the observation optical system 9. The housing connector 64 is a member for connecting the observation housing 90 to the analysis housing 70. The slide mechanism 65 is a mechanism for sliding the analysis housing 70 relative to the stand 42.

[0041] Hereinafter, the configurations of the analysis unit, the observation unit, and the slide mechanism 65 will be described in order.

[0042] -Analysis unit- FIG. 3 is a schematic diagram illustrating the configuration of the analysis optical system 7.

[0043] The analysis unit includes the analysis optical system 7 and the analysis housing 70 in which the analysis optical system 7 is housed. The analysis optical system 7 is a set of components for analyzing the sample SP as the analysis object, and each component is housed in the analysis housing 70. The analysis housing 70 houses the first camera 81 as an imaging unit and the first and second detectors 77A, 77B as detectors. Also included in the elements for analyzing the sample SP is the control unit 21 of the controller main body 2.

[0044] The analysis optical system 7 can perform analysis using, for example, the LIBS method. A communication cable C1 for transmitting and receiving electrical signals to and from the controller main body 2 is connected to the analysis optical system 7. This communication cable C1 is not essential, and the analysis optical system 7 and the controller main body 2 may be connected by wireless communication.

[0045] Note that the term "optical system" as used here is used in a broad sense. That is, the analysis optical system 7 is defined as a system that includes a light source, an imaging element, etc. in addition to optical elements such as lenses. The same applies to the observation optical system 9.

[0046] As shown in FIG. 3, the analysis optical system 7 according to the present embodiment includes an emission unit 71, an output adjustment means 72, a deflection element 73, a reflective objective lens 74 as a collection head, a spectroscopic element 75, a first parabolic mirror 76A, a first detector 77A, a first beam splitter 78A, a second parabolic mirror 76B, a second detector 77B, a second beam splitter 78B, a coaxial illumination 79, an imaging lens 80, a first camera 81, and a side illumination 84. Some of the components of the analysis optical system 7 are also shown in FIG. 2. The side illumination 84 is shown only in FIG. 5.

[0047] The emission unit 71 emits a primary electromagnetic wave to the sample SP. In particular, the emission unit 71 according to the present embodiment is composed of a laser light source that emits laser light as the primary electromagnetic wave to the sample SP. Note that the emission unit 71 according to the present embodiment can output laser light composed of ultraviolet rays as the primary electromagnetic wave.

[0048] The output adjustment means 72 is arranged on the optical path connecting the emission unit 71 and the deflection element 73, and can adjust the output of the laser light (primary electromagnetic wave).

[0049] The laser light (primary electromagnetic wave) whose output is adjusted by the output adjustment means 72 is reflected by a mirror (not shown) and enters the deflection element 73.

[0050] Specifically, the deflection element 73 reflects the laser light output from the output unit 71 and passing through the output adjustment means 72, and guides it to the sample SP via the reflective objective lens 74. On the other hand, the light generated in the sample SP corresponding to this laser light (the light emitted along with the plasma generation on the surface of the sample SP, hereinafter referred to as "plasma light") is passed through, and is laid out to be guided to the first detector 77A and the second detector 77B. The deflection element 73 is also laid out to pass the visible light condensed for imaging and guide most of it to the first camera 81.

[0051] The ultraviolet laser light reflected by the deflection element 73 propagates along the analysis optical axis Aa as parallel light and reaches the reflective objective lens 74.

[0052] The reflective objective lens 74 as a collection head is configured to collect the secondary electromagnetic wave generated in the sample SP when the primary electromagnetic wave emitted from the output unit 71 irradiates the sample SP. In particular, the reflective objective lens 74 according to the present embodiment is configured to condense the laser light as the primary electromagnetic wave and irradiate the sample SP, and collect the plasma light (secondary electromagnetic wave) generated in the sample SP corresponding to the laser light (primary electromagnetic wave) irradiated on the sample SP. In this case, the secondary electromagnetic wave corresponds to the plasma light emitted along with the plasma generation on the surface of the sample SP.

[0053] The reflective objective lens 74 has an analysis optical axis Aa extending along the substantially vertical direction described above. The analysis optical axis Aa is provided to be parallel to the observation optical axis Ao of the objective lens 92 of the observation optical system 9.

[0054] Specifically, the reflective objective lens 74 according to the present embodiment is a Schwarzschild-type objective lens composed of two mirrors. As shown in FIG. 3, this reflective objective lens 74 has a semi-annular and relatively large-diameter primary mirror 74a and a disk-shaped and relatively small-diameter secondary mirror 74b.

[0055] The primary mirror 74a allows the laser light (primary electromagnetic wave) to pass through an opening provided in its central portion, while reflecting the plasma light (secondary electromagnetic wave) generated at the sample SP by a mirror surface provided around it. The latter plasma light is reflected again by the mirror surface of the secondary mirror 74b and passes through the opening of the primary mirror 74a in a state coaxial with the laser light.

[0056] The secondary mirror 74b is configured to transmit the laser light that has passed through the opening of the primary mirror 74a, while condensing and reflecting the plasma light reflected by the primary mirror 74a. The former laser light irradiates the sample SP, while the latter plasma light passes through the opening of the primary mirror 74a and reaches the deflection element 73 as described above.

[0057] The spectroscopic element 75 is disposed between the deflection element 73 and the first beam splitter 78A in the optical axis direction of the reflective objective lens 74 (the direction along the analysis optical axis Aa), and guides a part of the plasma light generated at the sample SP to the first detector 77A, while guiding the other part to the second detector 77B and the like. Most of the latter plasma light is guided to the second detector 77B, and the rest reaches the first camera 81.

[0058] The first parabolic mirror 76A is a so-called parabolic mirror and is disposed between the spectroscopic element 75 and the first detector 77A. The first parabolic mirror 76A condenses the secondary electromagnetic wave reflected by the spectroscopic element 75 and makes the condensed secondary electromagnetic wave incident on the first detector 77A.

[0059] The first detector 77A receives the plasma light (secondary electromagnetic wave) generated at the sample SP and collected by the reflective objective lens 74, and generates a spectrum that is the intensity distribution for each wavelength of the plasma light.

[0060] In particular, when the emitting unit 71 is constituted by a laser light source and the reflective objective lens 74 is configured to collect the plasma light as the secondary electromagnetic wave generated in response to the irradiation of the laser light as the primary electromagnetic wave, the first detector 77A separates the light by reflecting the light at different angles for each wavelength, and makes each of the separated lights incident on an image sensor having a plurality of pixels. Thereby, the wavelength of the light received by each pixel can be made different, and the received light intensity can be acquired for each wavelength. In this case, the spectrum corresponds to the intensity distribution for each wavelength of the light.

[0061] Note that the spectrum may be constituted by the received light intensity acquired for each wave number. Since the wavelength and the wave number uniquely correspond to each other, even when the received light intensity acquired for each wave number is used, the spectrum can be regarded as the intensity distribution for each wavelength. The same applies to the second detector 77B described later.

[0062] The first beam splitter 78A reflects a part of the light transmitted through the spectroscopic element 75 (infrared secondary electromagnetic wave including the visible light band) and guides it to the second detector 77B, while transmitting the other part (a part of the visible light band) and guiding it to the second beam splitter 78B. Among the plasma light belonging to the visible light band, a relatively large amount of plasma light is guided to the second detector 77B, and a relatively small amount of plasma light is guided to the first camera 81 via the second beam splitter 78B.

[0063] The second parabolic mirror 76B is a so-called parabolic mirror similar to the first parabolic mirror 76A, and is disposed between the first beam splitter 78A and the second detector 77B. The second parabolic mirror 76B collects the secondary electromagnetic wave reflected by the first beam splitter 78A, and makes the collected secondary electromagnetic wave incident on the second detector 77B.

[0064] Similar to the first detector 77A, the second detector 77B receives the secondary electromagnetic wave generated in the sample SP when the primary electromagnetic wave emitted from the emitting unit 71 irradiates the sample SP, and generates a spectrum that is the intensity distribution for each wavelength of the secondary electromagnetic wave.

[0065] The control unit 21 receives the ultraviolet spectrum generated by the first detector 77A and the infrared spectrum generated by the second detector 77B. Based on these spectra, the control unit 21 performs component analysis of the sample SP using the basic principle described below. By combining and using the ultraviolet spectrum and the infrared spectrum, the control unit 21 can perform component analysis utilizing a wider frequency range.

[0066] The second beam splitter 78B reflects the illumination light (visible light) emitted from the LED light source 79a and passing through the optical element 79b, and irradiates the sample SP through the first beam splitter 78A, the spectroscopic element 75, the deflecting element 73, and the reflective objective lens 74. The reflected light (visible light) reflected by the sample SP returns to the analysis optical system 7 through the reflective objective lens 74.

[0067] The coaxial illumination 79 includes an LED light source 79a that emits illumination light and an optical element 79b through which the illumination light emitted from the LED light source 79a passes. The coaxial illumination 79 functions as so-called "coaxial epi-illumination". The illumination light irradiated from the LED light source 79a propagates coaxially with the laser light (primary electromagnetic wave) output from the output unit 71 and irradiated onto the sample SP, and the light (secondary electromagnetic wave) returning from the sample SP.

[0068] The second beam splitter 78B also further transmits the reflected light that has passed through the first beam splitter 78A and the plasma light that has passed through the first beam splitter 78A without reaching the first and second detectors 77A and 77B among the reflected light that has returned to the analysis optical system 7, and makes it incident on the first camera 81 through the imaging lens 80.

[0069] In the example shown in FIG. 3, the coaxial illumination 79 is built into the analysis housing 70, but the present disclosure is not limited to such a configuration. For example, a light source may be laid out outside the analysis housing 70, and the light source and the analysis optical system 7 may be optically coupled to the optical system via an optical fiber cable.

[0070] The side illumination 84 is arranged so as to surround the reflective objective lens 74. Although illustration is omitted, the side illumination 84 irradiates illumination light from the side of the sample SP (in other words, in a direction inclined with respect to the analysis optical axis Aa).

[0071] The first camera 81 receives the reflected light reflected by the sample SP via the reflective objective lens 74. The first camera 81 images the sample SP by detecting the amount of received light of the received reflected light. The first camera 81 is an example of the “imaging unit” in the present embodiment.

[0072] Specifically, the first camera 81 according to the present embodiment photoelectrically converts the light incident through the imaging lens 80 by a plurality of pixels arranged on its light receiving surface, and converts it into an electrical signal corresponding to the optical image of the subject (sample SP).

[0073] The first camera 81 may be formed by arranging a plurality of light receiving elements along the light receiving surface. In this case, each light receiving element corresponds to a pixel, and an electrical signal based on the amount of received light at each light receiving element can be generated. Specifically, the first camera 81 according to the present embodiment is composed of an image sensor made of CMOS (Complementary Metal Oxide Semiconductor), but is not limited to this configuration. As the first camera 81, for example, an image sensor made of CCD (Charged-Coupled Device) can also be used.

[0074] Then, the first camera 81 inputs an electrical signal generated by detecting the amount of received light at each light receiving element to the control unit 21 of the controller main body 2. The control unit 21 generates image data corresponding to the optical image of the subject based on the input electrical signal. The control unit 21 can display the image data thus generated on the display unit 22 or the like as an image obtained by imaging the subject.

[0075] The optical components described so far are housed in the aforementioned analysis housing 70. A through-hole 70a is provided on the lower surface of the analysis housing 70. The reflection objective lens 74 faces the placement surface 51a through this through-hole 70a.

[0076] -Basic principle of analysis by the analysis optical system 7- The control unit 21 performs component analysis of the sample SP based on the spectra input from the first detector 77A and the second detector 77B as detectors. As a specific analysis method, the LIBS method can be used as described above. The LIBS method is a method for analyzing the components contained in the sample SP at the elemental level (so-called elemental analysis method).

[0077] According to the LIBS method, evacuation is not required, and component analysis can be performed in an open-air state. Also, although it is a destructive test of the sample SP, processes such as dissolving the entire sample SP are not required, and the position information of the sample SP remains (it is only a local destructive test).

[0078] -Observation unit- The observation unit includes an observation optical system 9 and an observation housing 90 that houses the observation optical system 9. The observation optical system 9 is a set of components for observing the sample SP as an observation object, and each component is housed in the observation housing 90. The observation housing 90 is configured separately from the aforementioned analysis housing 70 and houses the second camera 93 as the second imaging unit. Also, the control unit 21 of the controller main body 2 is included in the elements for observing the sample SP.

[0079] The observation optical system 9 includes a lens unit 9a having an objective lens 92. This lens unit 9a corresponds to a cylindrical lens barrel disposed on the lower end side of the observation housing 90. The lens unit 9a is held by the analysis housing 70.

[0080] A communication cable C2 for transmitting and receiving electrical signals to and from the controller main body 2 and an optical fiber cable C3 for guiding illumination light from the outside are connected to the observation housing 90. Note that the communication cable C2 is not essential, and the observation optical system 9 and the controller main body 2 may be connected by wireless communication.

[0081] Specifically, as shown in FIG. 2, the observation optical system 9 includes a mirror group 91, an objective lens 92, a second camera 93 as a second imaging unit, a second coaxial illumination 94, a second side illumination 95, and a magnifying optical system 96.

[0082] The objective lens 92 has an observation optical axis Ao extending substantially in the vertical direction, condenses illumination light and irradiates a sample SP placed on the mounting table main body 51, and also condenses light (reflected light) from the sample SP. The observation optical axis Ao is provided to be parallel to the analysis optical axis Aa of the reflective objective lens 74 of the analysis optical system 7. The reflected light collected by the objective lens 92 is received by the second camera 93.

[0083] The mirror group 91 transmits the reflected light collected by the objective lens 92 and guides it to the second camera 93. The mirror group 91 according to the present embodiment can be configured using a total reflection mirror, a beam splitter, etc. as exemplified in FIG. 2. The mirror group 91 also reflects the illumination light irradiated from the second coaxial illumination 94 and guides it to the objective lens 92.

[0084] The second camera 93 receives the reflected light reflected by the sample SP via the objective lens 92. The second camera 93 images the sample SP by detecting the amount of received light of the received reflected light. The second camera 93 is an example of the "second imaging unit" in the present embodiment.

[0085] On the one hand, as described above, the first camera 81 is an example of the "imaging unit" in the present embodiment. In this specification, the configuration will be mainly described with the second camera 93 regarded as the second imaging unit and the first camera 81 regarded as the imaging unit. However, as will be described later, the first camera 81 may be regarded as the second imaging unit and the second camera 93 may be regarded as the imaging unit.

[0086] The second camera 93 according to the present embodiment is composed of an image sensor made of CMOS, similar to the first camera 81. However, an image sensor made of CCD may also be used.

[0087] Then, the second camera 93 inputs an electrical signal generated by detecting the amount of received light at each light-receiving element to the control unit 21 of the controller main body 2. Based on the input electrical signal, the control unit 21 generates image data corresponding to the optical image of the subject. The control unit 21 can display the thus-generated image data on the display unit 22 or the like as an image obtained by imaging the subject.

[0088] The second coaxial illumination 94 emits illumination light guided from the optical fiber cable C3. The second coaxial illumination 94 irradiates the illumination light through the same optical path as the reflected light condensed through the objective lens 92. That is, the second coaxial illumination 94 functions as "coaxial epi-illumination" coaxial with the observation optical axis Ao of the objective lens 92. Instead of guiding illumination light from the outside through the optical fiber cable C3, a light source may be built into the lens unit 9a. In that case, the optical fiber cable C3 becomes unnecessary.

[0089] As schematically illustrated in FIG. 2, the second side illumination 95 is composed of a ring illumination arranged to surround the objective lens 92. Similar to the side illumination 84 in the analysis optical system 7, the second side illumination 95 irradiates illumination light from obliquely above the sample SP.

[0090] The magnifying optical system 96 is disposed between the mirror group 91 and the second camera 93, and is configured to be able to change the magnification of the sample SP by the second camera 93. The magnifying optical system 96 according to the present embodiment includes a zoom lens and an actuator configured to move the zoom lens along the optical axis of the second camera 93. The actuator can change the magnification of the sample SP by moving the zoom lens based on a control signal input from the control unit 21.

[0091] - Slide mechanism 65- FIG. 4 is a diagram for explaining the horizontal movement of the head unit 6 by the slide mechanism 65.

[0092] The slide mechanism 65 is configured to move the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting table main body 51 in the horizontal direction so that imaging of the sample SP by the observation optical system 9 and irradiation of electromagnetic waves (laser light) in the case of generating a spectrum by the analysis optical system 7 (in other words, irradiation of electromagnetic waves by the emission unit 71 of the analysis optical system 7) can be performed on the same location of the sample SP as the observation object.

[0093] The moving direction of the relative position by the slide mechanism 65 can be the arrangement direction of the observation optical axis Ao and the analysis optical axis Aa. As shown in FIG. 4, the slide mechanism 65 according to the present embodiment moves the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting table main body 51 in the front-rear direction.

[0094] The slide mechanism 65 according to the present embodiment relatively displaces the analysis housing 70 with respect to the stand 42 and the head attachment member 61. Since the analysis housing 70 and the lens unit 9a are connected by the housing connector 64, the lens unit 9a is also displaced integrally by displacing the analysis housing 70.

[0095] Specifically, the slide mechanism 65 according to the present embodiment includes a guide rail 65a and an actuator 65b. Among these, the guide rail 65a is configured to protrude forward from the front surface of the head attachment member 61.

[0096] As shown in FIG. 4, when the slide mechanism 65 operates, the head unit 6 slides along the horizontal direction, and the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting table 5 move (horizontal movement). Due to this horizontal movement, the head unit 6 switches between a first mode in which the reflective objective lens 74 faces the sample SP and a second mode in which the objective lens 92 faces the sample SP. The slide mechanism 65 can slide the analysis housing 70 and the observation housing 90 between the first mode and the second mode.

[0097] By configuring as described above, before and after switching between the first mode and the second mode, image generation of the sample SP by the observation optical system 9 and generation of a spectrum by the analysis optical system 7 (specifically, irradiation of primary electromagnetic waves by the analysis optical system 7 when the spectrum is generated by the analysis optical system 7) can be executed from the same direction with respect to the same location in the sample SP.

[0098] <Details of the Controller Main Body> FIG. 5 is a block diagram illustrating the configuration of the control unit 21 of the controller main body 2. In the present embodiment, the controller main body 2 and the optical system assembly 1 are configured separately, but the present disclosure is not limited to such a configuration. At least a part of the controller main body 2 may be provided in the optical system assembly 1. For example, at least a part of the processing unit 21a constituting the control unit 21 can be incorporated in the optical system assembly 1.

[0099] As described above, the controller main body 2 according to the present embodiment includes a control unit 21 that performs various processes and a display unit 22 that displays information related to the processes performed by the control unit 21.

[0100] The control unit 21 electrically controls the actuator 65b, the coaxial illumination 79, the side illumination 84, the second coaxial illumination 94, the second side illumination 95, the first camera 81, the second camera 93, the overhead camera 48, the emission unit 71, the first detector 77A, and the second detector 77B.

[0101] Also, the output signals of the first camera 81, the second camera 93, the overhead camera 48, the first detector 77A, and the second detector 77B are input to the control unit 21. The control unit 21 executes operations and the like based on the input output signals, and executes processing based on the operation results. As hardware for performing such processing, the control unit 21 according to the present embodiment includes a processing unit 21a that executes various processes, a primary storage unit 21b and a secondary storage unit 21c that store data related to the processes performed by the processing unit 21a, and an input / output bus 21d.

[0102] The processing unit 21a includes a CPU, a system LSI, a DSP, etc. By executing various programs, the processing unit 21a analyzes the sample SP or controls each part of the analysis observation device A such as the display unit 22. In particular, the processing unit 21a according to the present embodiment can control the display screen on the display unit 22 based on information indicating the analysis result of the sample SP and image data input from the first camera 81, the second camera 93, and the overhead camera 48.

[0103] Note that the display unit as a control target by the processing unit 21a is not limited to the display unit 22 included in the controller main body 2. The "display unit" according to the present disclosure includes a display unit not provided in the analysis observation device A. For example, a display of a computer, a tablet terminal, etc. connected to the analysis observation device A by wire or wirelessly may be regarded as the display unit, and information indicating the analysis result of the sample SP and various image data may be displayed on the display unit. Thus, the present disclosure can also be applied to an analysis system including the analysis observation device A and a display unit connected to the analysis observation device A by wire or wirelessly.

[0104] As shown in FIG. 5, the processing unit 21a according to the present embodiment includes, as functional elements, a mode switching unit 211, an illumination control unit 212, an imaging processing unit 213, an emission control unit 214, a spectrum acquisition unit 215, a component analysis unit 216, a composite substance estimation unit 217, a composite substance registration unit 218, a user interface control unit (hereinafter simply referred to as "UI control unit") 221, a library reading unit 225, and a setting unit 226. These elements may be realized by a logic circuit or by executing software. Further, at least a part of these elements can be provided in the optical system assembly 1 such as the head unit 6.

[0105] Note that the classification such as the spectrum acquisition unit 215 and the component analysis unit 216 is only for convenience and can be freely changed. For example, the component analysis unit 216 may also serve as the spectrum acquisition unit 215, or the spectrum acquisition unit 215 may also serve as the component analysis unit 216.

[0106] The UI control unit 221 includes a display control unit 221a and an input reception unit 221b. The display control unit 221a causes the display unit 22 to display the component analysis result by the component analysis unit 216 and the image generated by the imaging processing unit 213 on the display unit 22. The input reception unit 221b receives an operation input by the user through the operation unit 3.

[0107] The library reading unit 225 reads out the substance library LiS held in the library holding unit 232 in order to estimate the substance by the substance estimation unit 216b. Further, the library reading unit 225 reads out the composite substance library LiM held in the library holding unit 232 in order to estimate the composite substance by the composite substance estimation unit 217.

[0108] The primary storage unit 21b is composed of a volatile memory or a non-volatile memory. The primary storage unit 21b according to the present embodiment can store various settings set by the setting unit 226. Further, the primary storage unit 21b can also hold an analysis program for causing the analysis observation apparatus A to execute each step constituting the analysis method according to the present embodiment.

[0109] The secondary storage unit 21c is composed of a non-volatile memory such as a hard disk drive or a solid state drive. The secondary storage unit 21c includes a library holding unit 232 that holds the substance library LiS and the composite substance library LiM. Note that a data holding unit for storing various data may be further included. The secondary storage unit 21c can continuously store the substance library LiS and the composite substance library LiM. Note that the substance library LiS and the composite substance library LiM may be stored in a storage medium such as an optical disk instead of being stored in the secondary storage unit 21c, or various data may be stored in a computer, a tablet terminal, etc. that is connected to the analysis observation apparatus A by wire or wirelessly.

[0110] 1. Component analysis of sample SP -Spectrum acquisition unit 215- The spectrum acquisition unit 215 shown in FIG. 5 acquires the spectra generated by the first and second detectors 77A and 77B as detectors. Here, the spectrum acquired by the spectrum acquisition unit 215 is an example of "analysis data".

[0111] Specifically, in the first mode, when a primary electromagnetic wave (for example, laser light) is emitted from the emission unit 71, a secondary electromagnetic wave (for example, plasma light) is generated. This secondary electromagnetic wave reaches the first detector 77A and the second detector 77B.

[0112] The first and second detectors 77A and 77B as detectors generate spectra based on the secondary electromagnetic waves that reach each of them. The spectra thus generated are acquired by the spectrum acquisition unit 215. The spectra acquired by the spectrum acquisition unit 215 show the relationship between wavelength and intensity, and there are a plurality of peaks corresponding to the characteristics contained in the sample SP. The spectra acquired by the spectrum acquisition unit 215 are output to the component analysis unit 216 in order to perform component analysis of the sample SP.

[0113] -Component Analysis Unit 216- The component analysis unit 216 shown in FIG. 5 identifies the peak positions of the spectra for performing component analysis of the sample SP based on the spectra acquired by the spectrum acquisition unit 215, and can thus determine that the element corresponding to that peak position is a component contained in the sample SP. Also, by comparing the magnitudes (peak heights) of the peaks with each other, the component ratios of the respective elements can be determined, and based on the determined component ratios, the composition of the sample SP can also be estimated.

[0114] The component analysis unit 216 includes a feature estimation unit 216a and a substance estimation unit 216b. The feature estimation unit 216a estimates the characteristics Ch of the substances contained in the sample SP based on the spectra acquired by the spectrum acquisition unit 215. For example, when the LIBS method is used as the analysis method, the feature estimation unit 216a extracts the peak positions and the heights of those peaks in the acquired spectra. Then, based on the extracted peak positions and peak heights, the feature estimation unit 216a estimates, as the characteristics Ch of the substance, the constituent elements of the sample SP and the contents of those constituent elements.

[0115] The substance estimation unit 216b shown in FIG. 5 estimates the substance based on the characteristics Ch of the substance estimated by the feature estimation unit 216a and the substance library LiS held in the secondary storage unit 21b. Here, the characteristics Ch of the substance estimated by the feature estimation unit 216a and the substance estimated by the substance estimation unit 216b are an example of "analysis data".

[0116] Here, the substance library LiS will be described with reference to FIG. 6. The substance library LiS is constituted by storing hierarchical information including a higher-level classification C1 representing a general term for substances considered to be contained in the sample SP, and a lower-level classification C3 representing substances belonging to this higher-level classification C1. The higher-level classification C1 may be configured such that at least one or more of the lower-level classifications C3 belong to it. Here, the higher-level classification C1 is an example of information for specifying a substance.

[0117] For example, when the sample SP is a steel material, the higher-level classification C1, which is information for specifying a substance, may be classifications such as alloy steel, carbon steel, and cast iron, or may be classifications such as stainless steel, cemented carbide, and high-tensile steel obtained by subdividing these classifications.

[0118] Also, when the sample SP is a steel material, the lower-level classification C3 may be classifications such as austenitic, precipitation hardening type, and ferritic, or may be classifications such as SUS301 and SUS302 obtained by subdividing these classifications based on, for example, Japanese Industrial Standards (JIS). The lower-level classification C3 may be any classification that at least subdivides the higher-level classification C1. In other words, the higher-level classification C1 may be any classification to which at least a part of the lower-level classification C3 belongs.

[0119] One or more middle-level classifications C2 may be provided between the higher-level classification C1 and the lower-level classification C3. In this case, the substance library LiS is constituted by storing the hierarchical information of the middle-level classification C2 together with the hierarchical information of the higher-level classification C1 and the lower-level classification C3. This middle-level classification C2 represents a plurality of lineages belonging to the higher-level classification C1. Here, the middle-level classification C2 is an example of information for specifying a substance.

[0120] For example, when the sample SP is a steel material, classifications such as stainless steel, cemented carbide, and high-tensile steel are used as the upper classification C1, which is information for specifying the substance. When classifications such as SUS301, SUS302, and A2017 are used as the lower classification C3, the middle classification C2, which is information for specifying the substance, may be a classification such as austenitic or precipitation hardening type, or may be a classification that collectively refers to a part of the lower classification C3, such as "SUS300 series".

[0121] Further, the lower classification C3 that constitutes the substance library LiS is configured to be associated with the characteristics Ch of the substance considered to be included in the sample SP. For example, when the LIBS method is used as the analysis method, the characteristics Ch of the substance include information that combines the constituent elements of the sample SP and the content (or content ratio) of the constituent elements as a set.

[0122] In this case, for each substance that constitutes the lower classification C3, by incorporating the combination of constituent elements and the upper and lower limit values of the content (or content ratio) of each constituent element into the substance library Li, as will be described later, the lower classification C3 can be estimated from the characteristics Ch of the substance.

[0123] The secondary storage unit 21c shown in FIG. 5 is composed of a non-volatile memory such as a hard disk drive or a solid state drive. The secondary storage unit 21c can continuously store the substance library LiS. Instead of storing the substance library LiS in the secondary storage unit 21c, the substance library LiS may be read from an external source such as the storage medium 1000.

[0124] In addition, the controller main body 2 can read a storage medium 1000 that stores a program (see FIG. 5). In particular, the storage medium 1000 according to the present embodiment stores an analysis program for causing the analysis observation device A to execute each step constituting the analysis method according to the present embodiment. This analysis program is read and executed by the controller main body 2 which is a computer. By the controller main body 2 executing the analysis program, the analysis observation device A functions as an analysis device that executes each step constituting the analysis method according to the present embodiment.

[0125] As described above, the sub-classification C3 constituting the substance library LiS is configured to be associated with the characteristics Ch of the substances considered to be included in the sample SP. Therefore, the substance estimation unit 216b collates the characteristics Ch of the substance estimated by the characteristic estimation unit 216a with the substance library LiS held in the secondary storage unit 21b, and estimates the substance for which the characteristics Ch were estimated from the sub-classification C3. The collation here refers not only to calculating the similarity with the representative data registered in the substance library LiS, but also to the entire act of obtaining an index indicating the accuracy of the substance using the parameter group registered in the substance library Li.

[0126] Here, in addition to the case where the sub-classification C3 and the characteristics Ch are uniquely associated as shown in FIG. 6, such as "substance α" and "characteristics α", it is also conceivable that there are a plurality of candidates for the sub-classification C3 corresponding to the "characteristics α". In that case, the characteristic estimation unit 216a estimates a plurality of substances with relatively high accuracy among the substances that may be included in the sample SP from among the sub-classifications C3, and outputs the estimated sub-classifications C3 in descending order of accuracy. Here, as the accuracy, an index based on the parameters obtained during the analysis of the spectrum can be used.

[0127] The substance estimation unit 216b also collates the estimated sub-classification C3 with the substance library LiS to estimate the middle classification C2 to which the sub-classification C3 belongs, and thus the upper classification C1.

[0128] The characteristics Ch of the substance estimated by the characteristic estimation unit 216a and the characteristics estimated by the substance estimation unit 216b are output to the analysis history holding unit 231 as one piece of data constituting the analysis record AR. Also, the characteristics Ch of the substance and the characteristics are output to the UI control unit 221 and displayed on the display unit 22.

[0129] -Analysis setting unit 226a- The analysis setting unit 226a shown in FIG. 5 accepts various settings related to the analysis of the sample SP. In particular, here, in order to estimate the characteristics constituting the sample SP, it is possible to accept the setting of weighting specific elements.

[0130] When the analysis setting unit 226a receives a request for analysis settings by the input reception unit 221b, it generates an analysis setting screen. The analysis setting screen generated by the analysis setting unit 226a is output to the display control unit 221a. Then, the display control unit 221a displays the analysis setting screen on the display unit 22. An example of the analysis setting screen displayed on the display unit 22 is shown on the left side of FIG. 7. As in the example of FIG. 7, this analysis setting screen can display the periodic table (in the illustration, only a part of the periodic table is shown), a first icon Ic1 labeled "Select from list", and a second icon Ic2 labeled "Recalculate".

[0131] Here, the input reception unit 221b is configured to receive operation inputs for each element in the periodic table displayed on the display unit. As illustrated in FIG. 7, based on the operation inputs made for each element, each element can be classified into three detection levels: a standard item with the element name displayed in black, an essential item with the element name displayed in white, and an exclusion item with a polka dot pattern superimposed on the element name. When an operation input is applied to the second icon Ic2 in a state where the detection level for each element is set, the input reception unit 221b that has received the operation input gives an instruction for reanalysis to the component analysis unit 216. The component analysis unit 216 that has received the reanalysis instruction re-extracts the peak position and peak height from the spectrum and performs re-estimation of the feature Ch and the substance. In response to the peak position and peak height being re-extracted by the component analysis unit 216, the display control unit 221a may update the peak position superimposed on the spectrum and display it on the display unit 22.

[0132] The detection level, which is the classification of elements, will be described. An element classified as a standard item is detected as a detected element when a peak is found in the spectrum. The peak position of the element detected as a detected element may be visibly displayed on the spectrum displayed on the display unit 22 by the display control unit 221a.

[0133] Also, an element classified as an essential item is detected as a detected element that constitutes the feature Ch regardless of whether a peak exists in the spectrum. In the example shown in FIG. 7, manganese is classified as an essential item. In this case, the feature estimation unit 216a estimates the feature assuming that there is a peak at the position of the wavelength λ5 corresponding to manganese. Further, the display control unit 221a can superimpose and display the position of the wavelength λ5 corresponding to manganese on the spectrum. For example, when the sample SP does not contain manganese, as shown in FIG. 7, a dashed line indicating the wavelength λ5 is superimposed and displayed at a position where no peak appears in the spectrum.

[0134] In addition, the elements classified as excluded items will be excluded from the detection elements that constitute the feature Ch regardless of whether there are peaks in the spectrum. In the example shown in FIG. 7, nickel is classified as an excluded item. In this case, the feature estimation unit 216a assumes that the elements classified as excluded items are not included, and estimates the feature from the detection elements other than the excluded items. Further, unlike the spectrum illustrated in FIG. 7, a chain line indicating the wavelength corresponding to nickel will not be displayed at the peak position corresponding to nickel regardless of the magnitude of the peak height.

[0135] That is, when there are elements classified as essential items, the feature estimation unit 216a re-estimates the feature Ch so that the elements classified as essential items become detection targets as the detection elements that constitute the feature regardless of whether there are peaks corresponding to the essential items in the spectrum. Also, when there are elements classified as excluded items, the feature estimation unit 216a re-estimates the feature Ch so that the elements classified as excluded items are excluded from the detection targets as the detection elements that constitute the feature Ch regardless of whether there are peaks corresponding to the excluded items in the spectrum.

[0136] Furthermore, when an operation input for the first icon Ic1 shown in FIG. 7 is received, the display control unit 221a displays a list of each element in a list form on the display unit 22 (not shown). Then, the input reception unit 221b can receive classifications such as the aforementioned standard items, essential items, and excluded items for each element in the list individually.

[0137] The analysis settings configured on the analysis settings screen are output to the primary storage unit 21b. Further, the component analysis unit 216 acquires the analysis settings stored in the primary storage unit 21b and executes the estimation of the feature Ch based on the analysis settings and the spectrum. In this way, in the analysis settings unit 226a, it is possible to set to extract essential items that are features that the user has previously recognized as being included in the object to be analyzed. On the spectrum, a plurality of peaks are displayed. Therefore, when there is a peak at a position slightly shifted from the peak corresponding to the essential item, it may be difficult to accurately extract the essential item from the spectrum. Even in such a case, by setting the essential item in advance, it is possible to extract the features that the user has previously recognized as being included in the object to be analyzed, and it is possible to obtain a component analysis result closer to the user's expectations.

[0138] Also, in the analysis settings unit 226a, it is possible to set so that exclusion items, which are features that the user has previously recognized as not being included in the object to be analyzed, are excluded from the extraction targets. On the spectrum, a plurality of peaks are displayed. Therefore, if the peak position is shifted even slightly from the ideal position, there is a risk that a different feature rather than the feature that should originally be extracted will be extracted. Regarding features that the user has previously recognized as not being included in the object to be analyzed, by setting them as exclusion items in advance, it is possible to exclude the exclusion items from the extraction targets by the component analysis unit. As a result, it is possible to extract features other than those that the user has previously recognized as not being included in the object to be analyzed, and it is possible to obtain a component analysis result closer to the user's expectations.

[0139] The analysis settings unit 226a can further set the conditions for component analysis by the component analysis unit 216. For example, it is possible to accept as analysis settings the intensity of the electromagnetic wave or primary ray emitted from the emission unit 71, or the integration time when acquiring the spectrum by the spectrum acquisition unit 215.

[0140] <Component Analysis Flow> FIG. 8 is a flowchart illustrating the analysis procedure of the sample SP by the processing unit 21a.

[0141] First, in step S801, the component analysis unit 216 acquires the analysis settings stored in the primary storage unit. If the analysis settings are not set in advance, this step can be skipped.

[0142] Next, in step S802, based on the analysis settings set by the analysis setting unit 226a, the emission control unit 214 controls the emission unit 71, and laser light is emitted as electromagnetic waves to the sample SP.

[0143] Next, in step S803, the spectrum acquisition unit 215 acquires the spectra generated by the first and second detectors 77A and 77B. That is, the plasma light caused by the emission of electromagnetic waves from the emission unit 71 is received by the first and second detectors 77A and 77B. The first and second detectors 77A and 77B generate a spectrum that is the intensity distribution for each wavelength of the plasma light based on the analysis settings set by the analysis setting unit 226a. The spectrum acquisition unit 215 acquires the spectrum, which is the analysis data generated by the first and second detectors 77A and 77B.

[0144] In the subsequent step S804, the feature estimation unit 216a estimates the feature Ch of the substance contained in the sample SP based on the analysis settings and the spectrum acquired by the spectrum acquisition unit 215. In this example, the feature estimation unit 216a estimates the constituent elements of the sample SP and the content rate of the constituent elements as the feature Ch of the substance, which is the analysis data. This estimation may be performed based on various physical models, through a calibration graph, or using a statistical method such as multiple regression analysis.

[0145] In the subsequent step S805, based on the characteristics Ch of the substance estimated by the characteristic estimator 216a, the substance estimator 216b estimates the substance contained in the sample SP (particularly, the substance at the position irradiated with the laser beam) as analysis data. This estimation can be performed by the substance estimator 216b collating the characteristics Ch of the substance with the substance library LiS. At this time, based on the accuracy (similarity) between the substance classified into the lower classification C3 in the substance library LiS and the content ratio of the constituent elements estimated by the characteristic estimator 216a, two or more of the lower classifications C3 may be estimated in descending order of accuracy. Steps S803 to S805 are examples of the "analysis step" in the present embodiment.

[0146] In the subsequent step S806, the characteristic estimator 216a determines whether the analysis settings have been changed. If this determination is YES, that is, if the analysis settings have been changed, the process proceeds to step S807. If this determination is NO, that is, if the analysis settings have not been changed, the process proceeds to step S808.

[0147] In step S807, the characteristic estimator 216a acquires the changed analysis settings from the analysis setting unit 226a or the primary storage unit 21b. Then, upon acquiring the changed analysis settings, the process returns to step S804, and the characteristic estimator 216a re-estimates the characteristics Ch based on the changed analysis settings.

[0148] In step S808, it is determined whether to end the analysis. If this determination is YES, the analysis is ended. If this determination is NO, the process proceeds to step S806.

[0149] 2. Generation of an image of the sample SP - Illumination setting unit 226b - The illumination setting unit 226b shown in FIG. 5 accepts the setting of illumination conditions. The illumination conditions refer to the control parameters related to the first camera 81, the coaxial illumination 79, and the side illumination 84, and the control parameters related to the second camera 93, the second coaxial illumination 94, and the second side illumination 95. The illumination conditions include the light amount of each illumination, the lighting state of each illumination, and the like.

[0150] - Lighting control unit 212 - The lighting control unit 212 shown in FIG. 5 reads the lighting conditions set by the lighting setting unit 226b from the primary storage unit 21b or the secondary storage unit 21c, and controls at least one of the coaxial lighting 79, the side illumination 84, the second coaxial lighting 94, and the second side illumination 95 so as to reflect the read lighting conditions. By this control, the lighting control unit 212 can turn on at least one of the coaxial lighting 79 and the side illumination 84, or turn on at least one of the second coaxial lighting 94 and the second side illumination 95.

[0151] - Imaging processing unit 213 - The imaging processing unit 213 shown in FIG. 5 receives an electrical signal generated by at least one of the first camera 81, the second camera 93, and the overhead camera 48, and generates an image P of the sample SP. The image P generated by the imaging processing unit 213 is output to the analysis history holding unit 231 as one piece of analysis data constituting the analysis record AR.

[0152] An example of the image P generated by the first camera 81 is shown in FIG. 9A of FIG. 9. The first camera 81 can observe the sample SP at a higher magnification compared to the second camera 93 described later in order to observe the analysis location of the sample SP in detail. When observing the sample SP at a high magnification, paying attention to the magnification of the first camera 81, the image P generated by the imaging processing unit 213 can be referred to as a high-magnification image. Also in this case, the field of view range (imaging field of view) of the first camera 81 is narrower than that of the second camera 93. Therefore, paying attention to the field of view range (imaging field of view) of the first camera 81, the image generated by the imaging processing unit 213 can be referred to as a narrow-field image. Here, the names such as high-magnification image and narrow-field image are for the purpose of explanation and do not limit the present embodiment thereto.

[0153] Note that the image captured by the first camera 81 may also be referred to as a pre-irradiation image Pb or a post-irradiation image Pa according to the imaging timing. The pre-irradiation image Pb refers to the image P before the sample SP is irradiated with laser light, and the post-irradiation image Pa refers to the image P after the sample SP is irradiated with laser light.

[0154] An example of the image P generated by the second camera 93 is shown in FIG. 9B of FIG. 9. The imaging unit for imaging the sample SP is switched between the first camera 81 and the second camera 93 by a mode switching unit 211 described later. The second camera 93 can observe the sample SP at a lower magnification than the first camera 81 in order to observe the entire sample SP. When observing the sample SP at a lower magnification, the image P generated by the imaging processing unit 213 can be referred to as a low-magnification image by paying attention to the magnification of the second camera 93. Also in this case, the field of view range (imaging field of view) of the second camera 93 is wider than that of the first camera 81. Therefore, by paying attention to the field of view range (imaging field of view) of the second camera 93, the image generated by the imaging processing unit 213 can be referred to as a wide-area image.

[0155] Note that the wide-area image can also be generated based on the electrical signal generated by the first camera 81. As an example, based on the electrical signal generated by the first camera 81, the imaging processing unit 213 generates a high-magnification image. Then, while changing the relative position between the first camera 81 and the sample SP, the imaging processing unit 213 generates a plurality of high-magnification images. Then, the imaging processing unit 213 stitches together the plurality of high-magnification images based on the relative positional relationship between the first camera 81 and the sample SP when generating one high-magnification image. Thereby, the imaging processing unit 213 can also generate a wide-area image having a wider field of view range than the individual high-magnification images.

[0156] An example of the image generated by the overhead camera 48 is shown in FIG. 9C of FIG. 9. The overhead image Pf in the present embodiment corresponds to the image P of the sample SP viewed from the side. The overhead camera 48 is an example of the "second imaging unit" in the present embodiment. Further, since the overhead image Pf is an image with a wider field of view (imaging field of view) than the high-magnification image generated based on the electrical signal generated by the first camera 81, it can be classified as a kind of the above-mentioned wide-area image.

[0157] That is, when referring to a wide-area image in this specification, it refers to at least one of the image P generated by stitching together a plurality of high-magnification images, the image P generated based on the light reception signal generated by the second camera 93, and the overhead image Pf generated by the overhead camera 48.

[0158] In addition, the imaging processing unit 213 can calculate the distance to the analysis location of the sample SP based on a plurality of images P obtained by changing the relative distance between the mounting table 5 and the first camera 81 or the second camera 93. The distance measured here is the distance to the irradiation position of the laser light and corresponds to the analysis depth described later. When performing analysis using the LIBS method, the analysis location of the sample SP is dug deeper by the irradiation of the laser light. Therefore, since the depth of the analysis location can be calculated every time the laser light is irradiated, the user can grasp which depth of the sample SP is being analyzed.

[0159] -Mode switching unit 211- The mode switching unit 211 shown in FIG. 5 switches from the first mode to the second mode or from the second mode to the first mode by moving the analysis optical system 7 and the observation optical system 9 forward and backward along the horizontal direction (the front-rear direction in the present embodiment). For example, the mode switching unit 211 according to the present embodiment can switch to one of the second camera 93 and the first camera 81 by relatively moving the observation housing 90 and the analysis housing 70 with respect to the mounting table 5.

[0160] The mode switching unit 211 can be switched to one of the first camera 81 and the second camera 93 as an imaging unit for imaging the sample SP. For example, in the present embodiment, the mode switching unit 211 is set to the first camera 81 as the imaging unit in the first mode, and is set to the second camera 93 as the imaging unit in the second mode.

[0161] Specifically, the mode switching unit 211 according to the present embodiment reads in advance the distance between the observation optical axis Ao and the analysis optical axis Aa stored in the secondary storage unit 21c in advance. Next, the mode switching unit 211 advances and retracts the analysis optical system 7 and the observation optical system 9 by operating the actuator 65b of the slide mechanism 65.

[0162] <Flowchart for generating an image of the sample SP and performing component analysis> The process of imaging the sample SP to generate an image P and the process in the case of performing component analysis of the sample SP will be described according to the flowchart of FIG. 10.

[0163] First, in step S1201, the input reception unit 221b determines whether an operation to execute analysis has been performed. If this determination is YES, the control process proceeds to step S1202, while if NO, the determination in step S1201 is repeated.

[0164] Subsequently, in step S1202, the imaging processing unit 213 generates a wide-area image. The wide-area image may be generated by stitching together a plurality of high-magnification images based on the light reception signals generated by the first camera 81, or may be generated based on the light reception signals generated by the second camera 93.

[0165] Subsequently, in step S1203, the imaging processing unit 213 generates a pre-irradiation image Pb of the sample SP. The pre-irradiation image Pb is generated based on the electrical signals generated by the first camera 81 or the second camera 93.

[0166] Subsequently, in step S1204, component analysis of the sample SP is performed. The component analysis procedure of the sample SP is the same as that in FIG. 8.

[0167] Subsequently, in step S1205, the imaging processing unit 213 generates an irradiated image Pa of the sample SP. The irradiated image is generated based on the electrical signal generated by the first camera 81. Subsequently, in step S1206, the input reception unit 221b determines whether an operation of taking an aerial view image Pf has been performed. If this determination is YES, the control process proceeds to step S1207, while if NO, the process proceeds to step S1212.

[0168] In step S1207, the imaging processing unit 213 generates an aerial view image Pf. The aerial view image Pf is generated based on the electrical signal generated by the aerial view camera 48.

[0169] Subsequently, in step S1208, the input reception unit 221b determines whether an operation of updating the image P has been performed. If this determination is YES, the control process proceeds to step S1209, while if NO, the process proceeds to step S1212.

[0170] In step S1208, when an operation of updating the image P is performed, in step S1209, the display control unit 221a causes the display unit 22 to display an output image selection screen as shown in FIG. 11. Then, the input reception unit 221b receives a selection of one image from the images P displayed on the output image selection screen.

[0171] In the subsequent step S1210, the input reception unit 221b detects whether an operation of executing the update of the image P has been performed. If this determination is YES, the control process proceeds to step S1211, while if NO, the process proceeds to step S1212.

[0172] In step S1211, the imaging processing unit 213 updates the image selected on the output image selection screen.

[0173] Next, in step S1212, it is determined whether to end the analysis. If this determination is YES, the analysis ends, while if it is NO, the process returns to step S1208.

[0174] 3. Depth - direction analysis of sample SP In the above description, a method of emitting laser light, which is an electromagnetic wave, to the sample SP and estimating the substance at the position of the sample SP irradiated with the electromagnetic wave has been described. In the present embodiment, it is also possible to emit laser light, which is an electromagnetic wave, to substantially the same location of the sample SP multiple times and analyze the sample SP in the depth direction. Since the sample SP is analyzed in the depth direction by advancing into substantially the same location of the sample SP, the depth - direction analysis of the sample SP is referred to as drilling.

[0175] FIG. 12 shows a drilling setting screen 2000 for a user to perform various settings when analyzing the sample SP in the depth direction. The drilling setting screen 2000 includes a laser irradiation button 2001, a check box CB31 for selecting whether to enable the burst mode, a burst count input field 2002, a change start threshold setting field 2003 for setting a threshold for detecting the start of a change in the substance, a change completion threshold setting field 2004 for setting a threshold for detecting the completion of a change in the substance, a check box CB32 for selecting whether to stop the analysis when the change in the substance is completed, radio buttons RB33 and RB34 for setting the analysis stop condition, a check box CB35 for selecting whether to save the image before analysis, and a check box CB36 for selecting whether to save an image for each irradiation of the laser light, which is an electromagnetic wave. The parameters set on the drilling setting screen 2000 are set in the above - mentioned analysis setting unit 226a. That is, the analysis setting unit 226a accepts the setting of various parameters related to drilling, such as the number of emissions of the laser light, the change start threshold, and the change completion threshold.

[0176] The laser irradiation button 2001 is a button for executing laser irradiation in order to perform component analysis of the sample SP. A trigger signal for executing the laser irradiation is input to the emission control unit 214.

[0177] The check box CB31 is a check box for selecting whether to enable the continuous shooting mode. Also, the continuous shooting count input field 2002 is an input field for inputting the number of emissions of laser light, which is an electromagnetic wave. When the continuous shooting mode is enabled, the emission control unit 214 controls the emission unit 71 to emit laser light until the number of emissions input in the continuous shooting count input field 2002 is satisfied. That is, as a laser stop condition, which is a condition for stopping the emission of laser light, the number of emissions input in the continuous shooting count input field 2002 is set, and until the laser stop condition is satisfied, the emission control unit 214 generates an emission permission signal for the laser light so as to emit the laser light.

[0178] The change start threshold setting field 2003 is a setting field for setting a threshold for detecting the start of a change in a substance. Also, the change completion threshold setting field 2004 is a setting field for setting a threshold for detecting the completion of a change in a substance. Although details will be described later, the component analysis unit 216 can detect whether there is a change in the substance estimated by the emission of laser light. The setting fields for setting the conditions for detecting this change are the change start threshold setting field 2003 and the change completion threshold setting field 2004.

[0179] In the example shown in FIG. 12, when there is a change of 10 or more set in the change start threshold setting field 2003 in the content rate of any element that is a constituent element of the substance, the component analysis unit 216 detects that the change from one substance to another substance has started. Then, the component analysis unit 216 estimates an "intermediate substance" indicating that the substance is changing from one substance to another substance. Further, when the substance estimated by the emission of the laser beam is the same two or more times, which is the number of times set in the change completion threshold setting field 2004, the component analysis unit 216 determines that the change from one substance to another substance has been completed, and identifies the substance after the change as the substance. Here, the estimation of the intermediate substance can also be automatically performed in consideration of the degree of mismatch with the substances in the substance library LiS and the degree of match with the composite substances having a multilayer structure in the composite substance library LiM. That is, the component analysis unit 216 collates the constituent elements constituting the analysis object and the content rate of the constituent elements with the substance library LiS. Then, for each substance included in the substance library, when the degree of match between the constituent elements of one substance and the content rate of the constituent elements and the constituent elements constituting the analysis object and the content rate of the constituent elements is equal to or less than a predetermined threshold (when there is no substance having a degree of match equal to or greater than the threshold), the component analysis unit 216 can estimate an intermediate substance that is changing from one substance to another substance. In addition, when there is a substance whose degree of match between the constituent elements constituting the analysis object and the content rate of the constituent elements and the substance included in the substance library exceeds a predetermined threshold, the substance can be estimated according to the magnitude of the degree of match.

[0180] The check box CB32 is a check box for selecting whether to stop the analysis when the change of the substance is completed. When the burst mode is effective, the component analysis results obtained by irradiating the sample SP with the laser light multiple times may change. In such a case, the analysis can be stopped when the change from one substance to another starts or when the change from one substance to another is completed. That is, when the component analysis unit 216 detects that a predetermined analysis stop condition such as the start of the change of the substance or the completion of the change of the substance is satisfied, it outputs a stop signal to the emission control unit 214 to stop the emission of the laser light. Here, even if the number of emissions of the laser light is less than the number of emissions set on the drilling setting screen, when a predetermined analysis stop condition is satisfied, such as when the change from one substance to another starts or when the change from one substance to another is completed, a stop signal is generated.

[0181] The radio buttons RB33 and RB34 are radio buttons for selecting under what conditions to stop the analysis. The analysis stop condition can be changed according to the switching between the radio button RB33 and the radio button RB34. The radio button RB33 is a radio button for setting to stop the analysis when a change of a certain amount or more occurs in the content rate of an element. That is, as the analysis stop condition, a change in the content rate can be set. In this case, when a change equal to or greater than the threshold value set in the change start threshold setting column 2003 occurs in the content rate of at least one element constituting the substance, the component analysis unit 216 determines that a change of a certain amount or more has occurred in the content rate, and generates a stop signal to stop the emission of the laser light, which is an electromagnetic wave, to the emission control unit 214. The radio button RB34 is a radio button for setting to stop the analysis when a change to another substance is detected. That is, as the analysis stop condition, a change of the substance can be set. In this case, when the same substance is estimated continuously for the number of times set in the change completion threshold setting column 2004, the component analysis unit 216 determines that the change to another substance is completed, and generates a stop signal to stop the emission of the laser light, which is an electromagnetic wave, to the emission control unit 214.

[0182] In addition, when the analysis stop condition is set by selecting the check box CB32, the emission control unit 214 can determine whether the laser stop condition is satisfied based on the number of emissions input in the burst emission count input field 2003 and the analysis stop condition. That is, when the number of electromagnetic wave emissions after the start of analysis based on the settings set on the drilling setting screen is less than the number entered in the burst emission count input field 2003 and the analysis stop condition is not satisfied, the emission control unit 214 generates an emission signal for the laser light so as to emit the laser light to the emission unit 71. Further, when the analysis stop condition is satisfied, that is, when it is estimated that the change to another substance is completed, at the time of such estimation, even if the number of emissions of the laser light after the start of analysis based on the settings set on the drilling setting screen is less than the number of emissions entered in the burst emission count input field 2002, the emission control unit 214 generates a stop signal to stop the emission of the laser light to the emission unit 71. Thereby, until the number of emissions of the laser light after the start of analysis based on the settings set on the drilling setting screen is less than the number of emissions entered in the burst emission count input field 2002 and it is estimated by the component analysis unit 216 that the change from one substance to another substance is completed, the emission of the laser light, which is an electromagnetic wave, from the emission unit 71 can be permitted. In other words, when the number of emissions of the laser light after the start of analysis becomes equal to or more than the number entered in the burst emission count input field 2002 or when it is estimated that the change from one substance to another substance is completed, the emission control unit 214 determines that the laser stop condition is satisfied for the emission unit 71 and generates a stop signal for stopping the emission of the laser light, which is an electromagnetic wave, from the emission unit 71.

[0183] Thereby, when the number of emissions of the laser light is less than the number of emissions set on the drilling setting screen, that is, even when the laser light can be emitted and the analysis stop condition is satisfied, a stop signal can be generated. The analysis method using the LIBS method is a destructive analysis, but by the unintended emission of the laser light, the analysis can be completed with the minimum necessary number of times without destroying anything other than the sample SP.

[0184] The check box CB35 is a check box for selecting whether to acquire the pre-analysis image P. When the check box CB35 is selected and the input reception unit 221b detects that an instruction to start analysis has been received from the user, before generating an emission signal of the laser light to the emission control unit 214, the imaging processing unit 213 is driven to generate the pre-analysis image P (pre-irradiation image Pb) of the sample SP. The image of the sample SP generated here may be an image captured by the first camera 81 as the imaging unit, or an image captured by the second camera 93 as the second imaging unit. When the sample SP is captured by the first camera 81, the sample SP can be observed at a higher magnification. Furthermore, since the first camera 81 is arranged in the same housing as the analysis optical system related to the component analysis of the sample, image generation and analysis can be executed seamlessly. When the sample SP is captured by the second camera 93, since a wide range of the sample SP can be captured, a wide-area image of the sample SP can be left.

[0185] The analysis method using LIBS irradiates the sample SP with laser light, which is an electromagnetic wave, and detects the plasma light generated by the irradiation, and is classified as a destructive analysis. In destructive analysis, when analyzing the sample SP, scratches or holes like craters may occur. Therefore, by automatically capturing the pre-irradiation image Pb, which is the pre-analysis image P of the sample SP, the state before analysis can be recorded.

[0186] The check box CB36 is a check box for selecting whether to acquire an image every time a laser beam is irradiated. When the check box CB36 is selected, the input reception unit 221b generates an emission signal of the laser beam, which is an electromagnetic wave, for the emission control unit 214. Then, every time the emission unit 71 irradiates the sample SP with the laser beam, the imaging processing unit 213 is driven, and a plurality of images P of the sample SP are generated. As described above, since the analysis using LIBS is a destructive analysis, it may be configured such that by acquiring the image P every time the sample SP is irradiated with the laser beam, changes in the sample SP corresponding to the emission of the laser beam can be observed. By doing so, it is possible to obtain the color information of the analysis location at each analysis depth, which is advantageous for confirming and considering the component analysis results. Also, since it becomes difficult for the illumination light to reach deep portions, image processing such as HDR or optimization of the illumination can be performed each time based on the luminance of the analysis location. Further, it is also possible to obtain the focus position at the bottom of the analysis location from the blur information of the image for each irradiation and measure the analysis depth at which the actual analysis was performed.

[0187] <Detection of substance change> As described above, the component analysis unit 216 can detect whether there is a change in the substance estimated by the emission of the laser beam, which is an electromagnetic wave. The method for detecting this change will be described with reference to FIG. 13.

[0188] FIG. 13 is a diagram showing a list of component analysis results at a plurality of different positions in the depth direction of the sample SP obtained by irradiating the substantially same location of the sample SP with the laser beam, which is an electromagnetic wave, a plurality of times.

[0189] The leftmost column represents the number of times the laser beam is irradiated. When the sample SP is irradiated with the laser beam, holes are formed in the crater on the sample SP. When the sample SP is irradiated with the laser beam multiple times at substantially the same location, the sample SP is dug deeper in the depth direction. Therefore, the emission unit 71 irradiates the laser beam to a plurality of positions having different analysis depths, which are the depths at which the sample SP is irradiated with the laser beam. In the table shown in FIG. 13, the vertical direction of the table coincides with the depth direction of the sample. That is, the first component analysis result corresponds to the component analysis result of the surface of the sample SP. As the number of irradiations increases, the component analysis of a location with a deeper analysis depth is performed from the surface of the sample SP. Therefore, the component analysis results below the table correspond to the component analysis results of locations with a deeper analysis depth from the surface of the sample SP. Here, for the sake of explanation, the depth of the sample SP irradiated with the laser beam (which is an electromagnetic wave) for the first time is referred to as the first analysis depth, and the depth of the sample SP irradiated with the laser beam for the second time is referred to as the second analysis depth. Similarly, hereinafter, the depth of the sample SP irradiated with the laser beam for the Nth time is referred to as the Nth analysis depth. Note that this nomenclature is for the sake of explanation, and the depth of the sample SP irradiated with the laser beam for the third time may be referred to as the first analysis depth, and the depth of the sample SP irradiated with the laser beam for the tenth time may be referred to as the second analysis depth. That is, the nomenclature of the first, second, ···, Nth analysis depths represents the relative relationship of the analysis depths, and it is sufficient that the analysis depth becomes deeper in this order.

[0190] The component analysis result at the first analysis depth is estimated to be Cr: 100% by the feature estimation unit 216a. Therefore, the substance estimation unit 216b estimates the substance at the first analysis depth as Cr. The substance at the second analysis depth is the same as the substance at the first analysis depth.

[0191] The component analysis results at the third analysis depth are estimated by the feature estimation unit 216a to be Cr: 97% and Ni: 3%. From the component analysis results at the second depth, which are the previous component analysis results, the Cr content has decreased by 3%, and the Ni content has increased by 3%. That is, the content of any constituent element included in at least one of the component analysis results at the second analysis depth and the component analysis results at the third analysis depth has not changed by 10 or more, which is the threshold set in the change start threshold setting column 2003. Therefore, the substance estimation unit 216b estimates the substance at the third analysis depth to be the same Cr as the previous substance.

[0192] The component analysis results at the fourth analysis depth are estimated by the feature estimation unit 216a to be Cr: 70% and Ni: 30%. From the component analysis results at the third depth, which are the previous component analysis results, the Cr content has decreased by 27%, and the Ni content has increased by 27%. That is, a change of 10 or more, which is the threshold set in the change start threshold setting column 2003, has occurred in the content of the constituent elements included in at least one of the component analysis results at the fourth analysis depth and the component analysis results at the third analysis depth. Therefore, the substance estimation unit 216b estimates the substance at the fourth analysis depth to be an intermediate substance that is in the process of changing from one substance to another. Here, the case of estimating as an intermediate substance has been described, but the substance at the fourth analysis depth may be estimated to be Cr, which is the substance at the third analysis depth. That is, the substance at the previous analysis depth can be estimated as the substance at the fourth analysis depth. Also, when the radio button RB33 is selected and the analysis is stopped when a change of a certain amount or more occurs in the content, the component analysis is stopped based on the component analysis at the fourth analysis depth.

[0193] The component analysis results at the fifth analysis depth are estimated by the feature estimation unit 216a to be Cr: 20% and Ni: 80%. Therefore, the substance estimation unit 216b can estimate the substance at the fifth analysis depth to be nichrome wire. Also, the substance estimation unit 216b can estimate the substance at the fifth analysis depth based on the component analysis results at the sixth analysis depth.

[0194] The component analysis result at the sixth analysis depth is estimated by the feature estimation unit 216a to be Cr: 5% and Ni: 95%. In the change completion threshold setting column 2004, when 2 is set as the threshold for detecting that the change from one substance to another has been completed, it is detected that the change has been completed when the substance estimation unit 216b estimates the same substance two or more times. The substance at the sixth analysis depth is estimated to be Ni based on the component analysis result, but the substance at the fifth analysis depth is different from the substance at the sixth analysis depth. Therefore, the threshold of two or more times of the same substance set in the change completion threshold setting column 2005 has not been estimated. In this case, as the substances at the fifth and sixth analysis depths, the substance estimation unit 216b can estimate that it is an intermediate substance during the change from one substance, Cr, to another substance. That is, the substance estimation unit 216b can consider the component analysis result at a position deeper than the fifth analysis depth in order to estimate the substance at the fifth analysis depth.

[0195] The component analysis result at the seventh analysis depth is estimated by the feature estimation unit 216a to be Ni: 100%. Therefore, the substance estimation unit 216b estimates the substance at the seventh analysis depth to be Ni. In this case, the substance at the sixth analysis depth is the same as the substance at the seventh analysis depth, and the threshold of two or more times of the same substance set in the change completion threshold setting column 2004 has been estimated. Therefore, the substance estimation unit 216b estimates the substance at the seventh analysis depth to be Ni. Note that since the substance at the sixth analysis depth is the same as the substance at the seventh analysis depth, the substance estimation unit 216b may re-estimate the substance at the sixth analysis depth as Ni.

[0196] Details are omitted, but the component analysis results and substances after the eighth analysis depth are as shown in FIG. 13. Furthermore, as described above, the analysis depth can also be obtained for each component analysis. In this case, the analysis depth calculated by the imaging processing unit 213 can also be displayed in the list display of the component analysis results shown in FIG. 13.

[0197] As described above, when the content rate of the constituent elements of the substance at the first analysis depth and the content rate of the constituent elements of the substance at the second analysis depth deeper than the first analysis depth differ by a predetermined threshold or more set in the change start threshold setting column 2003, it is estimated that the change from one substance to another substance has started at the first analysis depth, and it can be estimated that the substance at the second analysis depth is an intermediate substance indicating that it is a "substance in the process of change". In this case, instead of the "intermediate substance", it is also possible to estimate that the substance at the second analysis depth is the same substance as the substance at the first analysis depth.

[0198] Further, the component analysis unit 216 can estimate the substance at the third analysis depth deeper than the second analysis depth based on the substance at the fourth analysis depth deeper than the third analysis depth and a predetermined threshold set in the change completion threshold setting column 2004. That is, when a value of 2 or more is set as the threshold in the change completion threshold setting column 2004, if the substance at the third analysis depth and the substance at the fourth analysis depth are different, the component analysis unit 216 estimates that the substance at the third analysis depth is an intermediate substance.

[0199] Thereby, even when the component analysis result coincides with the component analysis result of a third substance different from the one substance and the other substance during the change from one substance to another substance, it can be determined whether the third substance actually exists or is temporarily detected as the third substance, and the substance can be estimated more appropriately.

[0200] Furthermore, the component analysis unit 216 can estimate the substance at the fourth analysis depth based on the substance at the third analysis depth shallower than the fourth analysis depth and a predetermined threshold set in the change completion threshold setting field 2004. That is, when the threshold value is set to 2 in the change completion threshold setting field 2004, if the substance at the third depth matches the substance at the fourth analysis depth, the component analysis unit 216 estimates that the change from one substance to another substance is completed. Then, as the substance at the fourth analysis depth, the substance corresponding to the component analysis result obtained at the fourth analysis depth is estimated. When a value greater than 2 is set as the threshold value in the change completion threshold setting field 2004, if the same substance is continuously estimated more than the threshold number of times, it is estimated that the change from one substance to another substance is completed.

[0201] Thereby, by estimating the substance at a predetermined analysis depth based on the substances estimated at the previous and subsequent analysis depths, even when the component analysis result matches the component analysis result of a third substance different from the one substance and the other substance during the change from one substance to another substance, it can be determined whether the third substance actually exists or was temporarily detected as the third substance, and it is possible to more appropriately estimate that the change from one substance to another substance is completed.

[0202] -Composite substance estimation unit 217- The composite substance estimation unit 217 shown in FIG. 5 estimates the composite substance of the sample SP based on the substance estimated by the component analysis unit 216 and the composite substance library LiM held in the library holding unit 232. When the sample SP is a composite substance such as a substrate coated with a predetermined metal, it may not be possible to accurately grasp the properties of the sample SP by simply estimating the substance. Therefore, the substance estimation unit 216b estimates the substance of the sample SP multiple times. Then, the composite substance estimation unit 217 estimates the composite substance name of the sample SP based on the substances estimated multiple times. Thereby, the user can grasp the name of the composite substance of the sample SP and can evaluate the sample SP more appropriately. The composite substance library LiM will be described with reference to FIG. 14.

[0203] The composite material library LiM is a library that stores the names of composite materials in association with the composition information of a plurality of materials that make up the composite material. Here, as an example of the composition information, the order of a plurality of materials that make up a single composite material in the depth direction can be mentioned. Further, for each of the plurality of materials, depth information in the composite material may be included. Also, instead of or in addition to the materials, the composition information may be constructed by higher-level classifications or middle-level classifications, which are information for specifying the materials. That is, in the example shown in FIG. 14, for the materials of the composite material classified as a steel plate and brass, the name of the composite material and the plurality of materials that make up the composite material are associated with each other. This composite material library LiM is read out by the library reading unit 225 shown in FIG. 5.

[0204] For example, the composite material library LiM includes a galvanized steel plate classified as a steel plate. The composition information of the galvanized steel plate includes Zn plating and steel, and this composition information is associated with the name of the composite material, which is the galvanized steel plate. The composition information of a single composite material may include a plurality of materials that make up the single composite material from the surface to the lower layer of the single composite material. That is, in the case of a galvanized steel plate, since Zn plating is applied on steel, zinc is detected from the surface of the sample, and steel is detected as the analysis depth increases. In such a case, Zn plating and steel may be associated with each other in this order. In FIG. 14, in order to associate Zn plating and steel with each other in this order as materials or information for specifying materials that make up a single composite material, Zn plating is associated with constituent material 1, and steel is associated with constituent material 2.

[0205] Also, the composite material library LiM includes a nickel-plated steel plate classified as a steel plate. The composition information of the nickel-plated steel plate includes Ni plating and steel, and this composition information is associated with the name of the composite material, which is the nickel-plated steel plate. Similar to the above galvanized steel plate, in order to associate a plurality of materials in the order of their existence from the surface to the lower layer of the composite material, Ni plating is associated with constituent material 1, and steel is associated with constituent material 2.

[0206] Furthermore, the composite material library LiM includes nickel-chromium plated brass classified as brass. The composition information of nickel-chromium plated brass includes Cr plating, Ni plating, and brass, and this composition information is associated with the name of the composite material, nickel-chromium plated brass. Similar to the above zinc-plated steel sheet, in order to associate a plurality of substances in the order from the surface to the lower layer of the composite material, Cr plating is associated with constituent material 1, Ni plating is associated with constituent material 2, and brass is associated with constituent material 3.

[0207] In this way, the composite material library LiM holds data in which the name of one composite material with different substances in the depth direction from the surface to the lower layer of the composite material is associated with the composition information of a plurality of substances constituting the one composite material. Then, the composite material estimation unit 217 irradiates laser light at a plurality of positions with different analysis depths by the emission unit 71, and based on the substances at the respective analysis depths estimated by the substance estimation unit 216b and the composite material library LiM, the composite material name of the sample SP can be estimated. That is, the composite material estimation unit 217 can estimate the name of the composite material of the sample SP based not only on the substance at a specific analysis depth irradiated with the laser light but also on the information specifying the substances at a plurality of positions with different analysis depths. In the case of FIG. 13, Cr, Ni, and brass exist from the surface to the lower layer of the sample SP. Therefore, the composite material estimation unit 217 estimates that the composite material of the sample SP is nickel-chromium plated brass based on the composite material library LiM. In the case of nickel-chromium plated brass, since Cr and Ni are each plated, in the result display area 3020 shown in FIG. 16C described later, they are estimated as Cr plating and Ni plating.

[0208] Further, in the composite material library LiM, the name of the composite material, the composition information of the plurality of substances constituting the composite material, and the depth information of the substance in the composite material may be associated with each other. In this case, based on the substance estimated at each of a plurality of positions with different analysis depths, the analysis depth which is the irradiation position of the laser beam calculated by the imaging processing unit 213, and the composite material library held in the library holding unit, the composite material can be more accurately specified by specifying the name of the composite material.

[0209] By estimating the composite material name of the sample SP based on the information specifying the substances at a plurality of analysis depths, even a user who is not proficient in analysis can easily grasp the properties of the sample SP, leading to an improvement in usability.

[0210] -Composite Material Registration Unit 218- When the composite material registration unit 218 cannot estimate the name of the composite material in the sample SP based on the substances or information identifying the substances at each analysis depth estimated by the substance estimation unit 216b, that is, when the name of the composite material corresponding to the distribution of substances in the depth direction of the sample SP or the distribution of information identifying the substances in the depth direction of the sample SP is not registered in the composite material library LiM, a new composite material can be registered in the composite material library LiM. For example, when the composite material name of the sample SP cannot be estimated by the composite material estimation unit 217, the display control unit 221a can display an error screen on the display unit 22 notifying that the composite material cannot be identified. On this error screen, the input reception unit 221b receives a selection as to whether to register a new composite material. When the input reception unit 221b receives a registration as a new composite material, the composite material registration unit 218 associates the name of the composite material input by the user with the configuration information based on the substances at each analysis depth estimated by the substance estimation unit 216b and registers it in the substance library LiM. By registering a new composite material in the composite material library LiM, the composite material registration unit 218 can identify the composite material that has been analyzed at least once. Thereby, an appropriate composite material library LiM can be constructed according to the user environment.

[0211] <Drilling flowchart> A method of performing drilling, which is an analysis in the depth direction of the sample SP, will be described according to the flowchart of FIG. 15.

[0212] First, in step S2501, the analysis setting unit 226a receives a drilling setting. The drilling setting is set, for example, when the display control unit 221a displays a drilling setting screen 2000 as shown in FIG. 12 on the display unit 22 and the input reception unit 221b receives an input from the user on the drilling setting screen 2000.

[0213] Next, in step S2502, the analysis setting unit 226a determines whether to acquire the pre-irradiation image Pb. This determination can be made, for example, based on whether the check box CB15 for acquiring the pre-irradiation image is selected on the drilling setting screen 2000. If this determination is YES, the control process proceeds to step S2503, while if it is NO, step S2503 is skipped and the control process proceeds to step S2504.

[0214] In step S2503, the imaging processing unit 213 generates a pre-irradiation image of the sample SP. The pre-irradiation image of the sample SP may be an image obtained by photographing the sample SP with the first camera 81 or may be an image obtained by photographing the sample SP with the second camera 93.

[0215] Subsequently, in step S2504, component analysis of the sample SP is performed. This step is the same as the flowchart of FIG. 8.

[0216] Next, in step S2505, the analysis setting unit 226a determines whether to acquire the image P each time the sample SP is irradiated with laser light by the emitting unit 71. This determination can be made, for example, based on whether the check box CB36 for acquiring the image P for each irradiation is selected on the drilling setting screen 2000. If this determination is YES, the control process proceeds to step S2506, while if it is NO, step S2506 is skipped and the control process proceeds to step S2507.

[0217] In step S2506, the imaging processing unit 213 generates an image of the sample SP. The image of the sample SP may be an image obtained by photographing the sample SP with the first camera 81 included in the analysis housing that houses the analysis optical system, which is an optical system for performing component analysis. Also, in step S2506, by searching for the point where the focus is achieved, the imaging processing unit 213 can also obtain the depth of the bottom of the analysis location.

[0218] Next, in step S2507, the emission control unit 214 determines whether the number of emissions of the laser beam, which is an electromagnetic wave from the emission unit 71, is less than the number of times input in the continuous emission number input field 2002. If this determination is YES, the control process proceeds to step S2508, while if it is NO, the control process proceeds to step S2509.

[0219] In step S2508, the component analysis unit 216 determines whether the analysis stop conditions, such as the start or completion of the change in the substance, are satisfied. This determination may be made only when the checkbox CB32 for stopping the analysis when the change in the substance is completed is selected on the drilling setting screen 2000 and the analysis stop conditions are set as the drilling settings. If this determination is YES, the control process proceeds to step S2509, and if it is NO, the control process returns to step S2504 to perform the component analysis again.

[0220] Next, in step S2509, the composite substance estimation unit 217 determines whether it has been possible to estimate the composite substance name of the sample SP based on the plurality of substances estimated by the substance estimation unit 216b, at least one of the order in which the plurality of substances were estimated and the analysis depth, and the composite substance library LiM read by the library reading unit 225. If this determination is YES, the control process proceeds to step S2510, and if it is NO, the control process proceeds to step S2511. In step S2510, the composite substance name estimated in step S2509 is displayed on the display unit 22.

[0221] In step S2511, the input reception unit 221b determines whether an operation to perform additional analysis has been performed. When there is insufficient information in the depth direction, the possibility of estimating the composite substance can be increased by additional analysis. If this determination is YES, the process returns to step S2504 to re-execute the component analysis, and if it is NO, the control process proceeds to step S2512.

[0222] In step S2512, the input reception unit 221b determines whether an operation to register a new composite substance name in the composite substance library LiM has been performed. If this determination is YES, the control process proceeds to step S2513, while if it is NO, the analysis is terminated.

[0223] In step S2513, the input reception unit 221b receives an input of the composite substance name to be registered in the composite substance library LiM. Then, the composite substance registration unit 218 registers the composite substance name received by the input reception unit 221b in the composite substance library LiM in association with the substances at a plurality of analysis depths estimated by the substance estimation unit 216b. In step S2514, the display control unit 221a causes the display unit 22 to display the composite substance name registered in step S2512.

[0224] The above steps S2501 to S2514 perform an analysis in the depth direction of the sample SP.

[0225] <Drilling analysis user interface> FIGS. 16A to 16C are diagrams showing an example of a drilling screen 3000 for displaying the results of drilling analysis.

[0226] FIG. 16A is a diagram showing the drilling screen 3000 before irradiating the sample SP with a laser beam. The drilling screen 3000 has an image display area 3010, a result display area 3020, and a related image display area 3030.

[0227] The image display area 3010 is an area for displaying the image P of the sample SP. In the image display area 3010, the image P of the sample SP photographed by the first camera 81 provided in the analysis housing that houses the analysis optical system can be displayed. Also, in this case, in the image display area 3010, a live image obtained by updating the image P of the sample SP photographed by the first camera 81 in real time can be displayed. When displaying the live image of the sample SP, the user can easily grasp which position of the sample is being analyzed.

[0228] In addition, position information representing the center of the field of view can be superimposed on the live image of the sample SP displayed in the image display area 3010. The superimposed display of the position information may be realized by superimposing a crosshair on the image of the sample SP such that the center of the field of view is the intersection point, or may be realized by superimposing an arbitrary mark at the position corresponding to the center of the field of view.

[0229] The result display area 3020 is an area for displaying the component analysis result by the component analysis unit 216 and the composite substance estimation result by the composite substance estimation unit 217, and includes an estimated composite substance display area 3021 for displaying the composite substance estimation result by the composite substance estimation unit 217 and a component analysis result display area 3022 for displaying the component analysis result by the component analysis unit 216.

[0230] FIG. 16A is a diagram showing the drilling screen 3000 before analysis. Therefore, in the example shown in FIG. 16A, the estimated composite substance display area 3021 is displayed with "unanalyzed" indicating that it is before analysis. Also, there is no component analysis result displayed in the component analysis result display area 3022.

[0231] The related image display area 3030 is an area for displaying the image P stored in association with one component analysis result. As described above, images P such as a wide-area image, a pre-irradiation image Pb, a post-irradiation image Pa, and an aerial view image Pf can be associated with one component analysis result. The display control unit 221a can display these associated images P in the related image display area 3030. In the example shown in FIG. 16A, since it is the state before analysis, there is no related image displayed in the related image display area 3030.

[0232] FIG. 16B is a diagram showing the drilling screen 3000 after irradiating the sample SP with laser light three times.

[0233] In the image display area 3010, the pre-irradiation image Pb of the sample SP and the post-irradiation images Pa1, Pa2, and Pa3 after the first, second, and third laser lights are irradiated are displayed superimposed on the live image of the sample SP. Here, as the pre-irradiation image Pb and the post-irradiation image Pa to be displayed, those obtained by magnifying and displaying the periphery of the analysis location may be used. Thereby, the color tone, shape, etc. around the analysis location can be confirmed in more detail.

[0234] In the drilling setting, it is possible to select whether to acquire the pre-irradiation image by selecting the checkbox CB35. When the checkbox CB15 is selected and the setting is made to acquire the pre-irradiation image, the imaging processing unit 213 generates an image P of the sample SP prior to the emission of the laser light from the emission unit 71. The pre-irradiation image Pb thus obtained is displayed superimposed on the image display area 3010.

[0235] Also, when the checkbox CB36 is selected and the setting is made to acquire an image for each irradiation, the imaging processing unit 213 generates an image of the sample SP each time the laser light is emitted from the emission unit 71, and the post-irradiation image Pa thus obtained can be displayed superimposed on the image display area 3010.

[0236] The depth analysis screen 3040 is a screen that shows in the depth direction of the sample SP which elements are present in what proportions. Details of the depth analysis screen 3040 will be described later.

[0237] In the example shown in FIG. 16B, the sample SP is in a state where it has been irradiated with laser light, which is an electromagnetic wave, three times, and the component analysis of the sample SP has not been completed. Therefore, the display control unit 221a causes the display indicating "analysis in progress", which is in the middle of the component analysis, to be displayed in the estimated composite substance display area 3021. Further, in the component analysis result display area 3022, the component analysis results obtained by the component analysis unit 216 and the substances estimated by the substance estimation unit 216b are displayed due to the irradiation of the sample SP with laser light. Note that, instead of or in addition to the substances estimated by the substance estimation unit 216b, information for specifying the substances may be displayed in the component analysis result display area 3022. Here, the information for specifying the substances includes, for example, the upper classification and middle classification of the substances. That is, it includes the common name and general term of the substances estimated by the substance estimation unit 216b. That is, when the substance is estimated as SUS300 series by the substance estimation unit 216b, information such as austenitic, stainless steel, and alloy corresponds to the information for specifying the substances.

[0238] FIG. 16C is a diagram showing a state where laser light is irradiated to a plurality of positions with different analysis depths of the sample SP and the analysis is completed. This example is an example when the number of consecutive shots is input as 15 in the number-of-consecutive-shots input field 2003. Also, the change start threshold and the change completion threshold are as described in FIG. 22, and it is assumed that the checkbox CB32 for selecting whether to stop the analysis when the change of the substance is completed is not selected.

[0239] In the image display area 3010, the pre-irradiation image Pb of the sample SP and the post-irradiation images Pa1, Pb2,... are displayed. Due to space limitations, only nine post-irradiation images Pa1 to 9 are shown in FIG. 16C, but all the post-irradiation images Pa may be displayed by moving the cursor in the vertical or horizontal direction, reducing the display of the images, or the like.

[0240] Further, on the depth analysis screen 3040, the feature Ch estimated by the feature estimation unit 216a is displayed in the depth direction of the sample SP. Thereby, as we proceed from the surface of the sample SP to the lower layer, it is possible to grasp how the types of elements constituting the feature and the content rate of the element are distributed.

[0241] In the estimated composite material display area 3021, the composite material estimated by the composite material estimation unit 217 based on the 15 component analysis results and the composite material library LiM is displayed. As we proceed from the surface of the sample SP to the lower layer, the substances change in order to Cr, Ni, and brass. Therefore, the composite material estimation unit 217 estimates that the composite material name of the sample SP is a nickel-chromium plated brass material, and the display control unit 221a displays "nickel-chromium plated brass material" in the estimated composite material display area 301.

[0242] In the component analysis result display area 3022, each time the sample SP is irradiated with laser light, the component analysis results obtained by the component analysis unit 216 are displayed. Each component analysis result includes the constituent elements constituting the feature Ch estimated by the feature estimation unit 216a, the content rate of the element, and the substance estimated by the substance estimation unit 216b. Thereby, it is possible to grasp how the feature Ch constituting the sample SP changes at a plurality of positions with different analysis depths.

[0243] Here, depth information indicating the analysis depth calculated by the imaging processing unit 213 may be displayed in at least one of the depth analysis screen 3040 and the component analysis result display area 3022. Thereby, it is possible to more accurately grasp which depth of the sample the result is of the analysis.

[0244] In the related image display area 3030, an image associated with one component analysis result can be displayed. In the example shown in FIG. 16C, as one component analysis result, the No. 2 component analysis result is selected by the user. When the input reception unit 221b receives the selection of one component analysis result, the display control unit 221a causes the display unit 22 to display an image associated with the one component analysis result. In this example, the post-irradiation image Pa2, which is a high-magnification image of the sample SP stored in association with the No. 2 component analysis result, and the bird's-eye view image Pf are displayed.

[0245] <Depth analysis screen 3040> The depth analysis screen 3040 will be described based on FIG. 16C.

[0246] In drilling, which is an analysis of the depth direction of the sample SP, every time the sample SP is irradiated with laser light, which is an electromagnetic wave, crater-shaped holes are formed at the analysis locations. As a result, the sample SP can be dug deeper in the depth direction, and substances at different analysis depths can be estimated.

[0247] The depth analysis screen 3040 is a screen that displays the types of elements existing at different analysis depths and the content rates of the elements in the order of increasing depth of the analysis depth.

[0248] When the sample SP is irradiated with laser light, the sample SP is dug deeper in order from the surface irradiated with the laser light. Therefore, when the same analysis location is repeatedly irradiated with laser light, as the number of laser light emissions increases, the laser light is irradiated to a deeper location from the surface of the sample SP. Therefore, there is a positive correlation between the number of laser light emissions and the analysis depth.

[0249] Therefore, by arranging the plurality of component analysis results obtained by irradiating the sample SP with laser light from top to bottom on the display unit 22 in the order in which the component analysis results are obtained, the vertical direction of the display unit corresponds to the depth direction of the analysis. By doing so, as we move from the surface of the sample SP to the lower layer, we can intuitively grasp the types of elements that make up the features and how the content rate of the elements is distributed.

[0250] The component analysis result obtained by irradiating the sample SP with the first laser light is Cr: 100%. This is displayed in tabular and graph formats at a predetermined position on the depth analysis screen 3040.

[0251] Next, the component analysis result obtained by irradiating the sample SP with the second laser light is also Cr: 100% as in the first time. This is displayed below the first component analysis result on the depth analysis screen 3040. Similarly, the component analysis results after the third time are also displayed below the second, third,... component analysis results, which are the previous component analysis results.

[0252] As a result, the component analysis results are displayed in tabular and graph formats from top to bottom. As described above, the first component analysis result corresponds to the component analysis result of the surface of the sample SP, and as the number of laser light irradiations increases, it corresponds to the component analysis result of the lower layer of the sample SP. Therefore, displaying the component analysis results from top to bottom in the order of laser light irradiation is equivalent to displaying them in the order of the analysis depth of the sample SP.

[0253] In addition, the depth analysis screen 3040 can also display the composite substance name of the sample SP estimated by the composite substance estimation unit 217. This makes it possible to easily grasp what kind of composite substance the sample SP is.

[0254] In this way, by displaying the component analysis results in the vertical direction of the display unit 22 in the order of analysis depth, the component analysis results can be displayed in a form as if the sample SP were viewed from a cross-section. By making the depth direction of the sample SP correspond to the vertical direction of the display unit 22, it is possible to intuitively grasp how the substance changes from the surface to the lower layer of the sample SP, thereby improving usability.

[0255] Furthermore, on the depth analysis screen 3040, an analysis depth drawing screen 3041 that intuitively shows which depth of the sample SP is being analyzed can be displayed.

[0256] By repeatedly irradiating the sample SP with laser light, the sample SP is dug deeper in the depth direction. In addition to arranging a plurality of component analysis results obtained by irradiating the sample SP with laser light in order from the top to the bottom of the display unit 22 in the order in which the component analysis results were obtained, an analysis depth drawing screen 3041 indicating which depth of the sample SP is being analyzed is displayed in association therewith, so that it is easier to intuitively grasp the types of elements constituting the characteristics and how the content rate of the element is distributed as going from the surface to the lower layer of the sample SP.

[0257] <Depth analysis measurement> In this embodiment, autofocus can be executed before or after irradiating the sample SP with laser light to measure the analysis depth. Although the details are omitted, by changing the relative distance between the sample SP and the head unit 6 and executing the generation of the image P by the first camera 81, the distance from the head unit to the laser irradiation position of the sample SP can be measured. Based on the distance measured here, the analysis depth can be displayed on the analysis depth drawing screen 3041. Thereby, since the types of elements constituting the characteristics and the distribution of the content rate of the element can be displayed based on the actual depth, the analysis results of the sample SP can be evaluated more accurately.

[0258] Furthermore, by measuring the analysis depth before or after irradiating the sample SP with the laser beam, it is also possible to estimate the thickness (width in the depth direction) in which a single substance is distributed. Based on this thickness, the composite substance estimation unit 217 can also estimate a highly probable composite substance name of the sample SP.

Industrial Applicability

[0259] As described above, the laser-induced breakdown spectroscopic apparatus according to the present invention can be used when analyzing various samples.

Explanation of Signs

[0260] A Analysis observation apparatus SP Sample (object to be analyzed) 1 Optical system assembly 5 Mounting table 6 Head unit 7 Analysis optical system 71 Emission unit 74 Reflective objective lens (collection head) 77A First detection unit (detection unit) 77B Second detection unit (detection unit) 81 First camera (imaging unit) 9 Observation optical system 93 Second camera (imaging unit) 96 Magnification optical system 2 Controller main body 21a Processing unit 211 Mode switching unit 212 Lighting control unit 213 Imaging processing unit 214 Emission control unit 215 Spectrum acquisition unit 216 Component analysis unit 217 Composite substance estimation unit 221 UI control unit 225 Library reading unit 226 Setting unit 21b Primary storage unit 21c Secondary storage unit 22 Display unit P Image Pre-Pb irradiation image Post-Pa irradiation image Pf overhead view image

Claims

1. A laser-induced breakdown spectroscopy apparatus for performing component analysis of an object to be analyzed in the depth direction of the object to be analyzed by using laser-induced breakdown spectroscopy, an emission unit that emits laser light to the object to be analyzed, a collection head that collects plasma light generated in the object to be analyzed when the laser light emitted from the emission unit irradiates the object to be analyzed, a detector that receives the plasma light generated in the object to be analyzed and collected by the collection head, and generates a spectrum that is an intensity distribution for each wavelength of the plasma light, a library holding unit that holds a substance library including constituent elements constituting a substance and a content rate of the constituent elements as information for specifying the substance, based on the spectrum generated by the detector, estimating constituent elements constituting the object to be analyzed and a content rate of the constituent elements, and based on the estimated constituent elements and the content rate of the constituent elements and the substance library held in the library holding unit, a component analysis unit that estimates a substance contained in the object to be analyzed, a display control unit that causes a display unit to display the constituent elements and the content rate of the constituent elements estimated by the component analysis unit in at least one of a table format or a graph format in which the constituent elements and the content rate of the constituent elements at a plurality of positions having different analysis depths are arranged vertically in the order of depth of the analysis depth, and also causes the display unit to display information for specifying the substance estimated by the component analysis unit at a plurality of positions having different analysis depths vertically in the order of depth of the analysis depth, the emission unit irradiates the laser light to a plurality of positions having different analysis depths by emitting the laser light a plurality of times to the same analysis location of the object to be analyzed, the component analysis unit executes estimation of constituent elements constituting the object to be analyzed and a content rate of the constituent elements and estimation of a substance contained in the object to be analyzed at each of a plurality of positions having different analysis depths, the display control unit causes the display unit to display the constituent elements and the content rate of the constituent elements at a plurality of positions having different analysis depths estimated by the component analysis unit in at least one of a table format or a graph format in which the constituent elements and the content rate of the constituent elements are arranged vertically in the order of depth of the analysis depth, and also causes the display unit to display information for specifying the substance estimated by the component analysis unit at a plurality of positions having different analysis depths vertically in the order of depth of the analysis depth, In at least one of the display modes in the form of a table or a graph, the constituent elements and the content ratios of the constituent elements are arranged horizontally in the order in which the constituent elements newly detected as the analysis depth increases. A laser-induced breakdown spectrometer characterized by this.

2. The laser-induced breakdown spectrometer according to claim 1, The component analysis unit, At each of a plurality of positions with different analysis depths, the constituent elements and the content ratios of the constituent elements that make up the object to be analyzed, which is a composite material having a multilayer structure, are collated with the substance library held in the library holding unit. For each substance included in the substance library, when the degree of coincidence between the constituent elements of one substance and the content ratio of the constituent elements and the constituent elements and the content ratio of the constituent elements that make up the object to be analyzed, which is a composite material having a multilayer structure, is equal to or less than a predetermined threshold value, it is presumed to be an intermediate substance that is changing from one substance in the upper layer to another substance in the lower layer. A laser-induced breakdown spectrometer characterized by this.

3. In the laser-induced breakdown spectrometer according to claim 1, The component analysis unit, When the content ratio of one constituent element at the first analysis depth and the content ratio of the one constituent element at the second analysis depth deeper than the first analysis depth differ by a predetermined threshold value or more, it is presumed that the substance at the second analysis depth is an intermediate substance that is changing from the substance at the first analysis depth to a different substance. When the substance at the second analysis depth is presumed to be an intermediate substance by the component analysis unit, the display control unit causes the display unit to display that the substance at the second analysis depth is the intermediate substance. A laser-induced breakdown spectrometer characterized by this.

4. The laser-induced breakdown spectrometer according to claim 1, The component analysis unit, When the content ratio of one constituent element at the first analysis depth differs from the content ratio of the one constituent element at the second analysis depth deeper than the first analysis depth by a predetermined threshold value or more, it is presumed that the change from the substance at the first analysis depth to a different substance has started. When it is presumed by the component analysis unit that the change to a different substance has started, the display control unit causes the display unit to display the substance at the first analysis depth as the substance at the second analysis depth. A laser-induced breakdown spectrometer characterized by the above.

5. In the laser-induced breakdown spectrometer according to claim 3 or 4, further, an analysis setting unit that receives a setting of the number of times the laser beam is emitted; an emission control unit that controls the emission of the laser beam by the emission unit, and when the number of times the laser beam is emitted after the start of analysis based on the setting set by the analysis setting unit is less than the number of times the laser beam is emitted set by the analysis setting unit, the emission control unit generates an emission permission signal that permits the emission of the laser beam. An analyzer characterized by the above.

6. In the laser-induced breakdown spectrometer according to claim 5, the component analysis unit when the substances estimated at a plurality of analysis depths deeper than the second analysis depth are continuously the same, it is presumed that the change from the substance at the first analysis depth to a different substance is complete, at the time of the presumption, when the number of times the laser beam is emitted after the start of analysis based on the setting set by the analysis setting unit is less than the number of times the laser beam is emitted set by the analysis setting unit based on the setting set by the analysis setting unit after the start of analysis, the emission control unit generates a stop signal that stops the emission of the laser beam. An analyzer characterized by the above.

7. In the laser-induced breakdown spectrometer according to any one of claims 1 to 6, further, The library holding unit holds a composite substance library in which the name of a composite substance is associated with the composition information of a plurality of substances constituting the composite substance. A laser-induced breakdown spectrometer, comprising: a composite substance estimation unit that estimates the name of the composite substance of the analysis target based on the substances estimated at each of a plurality of positions having different analysis depths and the composite substance library held in the library holding unit.

8. The laser-induced breakdown spectrometer according to claim 7, further comprising: A mounting table for mounting the analysis target; An imaging unit that receives reflected light reflected by the analysis target mounted on the mounting table; An imaging processing unit that generates an image of the analysis target based on the reflected light received by the imaging unit. The library holding unit holds the composite substance library while further associating depth information in the composite substance of the plurality of substances. The imaging processing unit calculates the analysis depth based on a plurality of images having different relative distances between the imaging unit and the analysis target. The composite substance estimation unit estimates the name of the composite substance of the analysis target based on the substances estimated at each of a plurality of positions having different analysis depths, the analysis depth calculated by the imaging processing unit, and the composite substance library held in the library holding unit.

9. In the laser-induced breakdown spectrometer according to claim 7 or 8, The display control unit causes the display unit to display the name of the composite substance of the analysis target estimated by the composite substance estimation unit.

10. In the laser-induced breakdown spectrometer according to any one of claims 1 to 7, further comprising: ​An imaging unit that receives the reflected light reflected by the object to be analyzed and generates an electrical signal based on the amount of received light of the received reflected light; An imaging processing unit that generates an image of the object to be analyzed based on the electrical signal generated by the imaging unit, and is provided with: The imaging processing unit sequentially generates an image of the object to be analyzed for each component analysis of the object to be analyzed; The display control unit causes the display unit to display a plurality of images sequentially generated for each component analysis of the object to be analyzed. A laser-induced breakdown spectroscopy apparatus characterized by this.

11. In the laser-induced breakdown spectroscopy apparatus according to any one of Claims 1 to 7, An imaging unit that receives the reflected light reflected by the object to be analyzed and generates an electrical signal based on the amount of received light of the received reflected light; An imaging processing unit that changes the relative distance between the object to be analyzed and the imaging unit and generates a plurality of images of the object to be analyzed based on the electrical signal generated by the imaging unit, and is provided with: The imaging processing unit measures the distance from the imaging unit to the analysis location of the object to be analyzed by performing autofocus based on a plurality of images of the object to be analyzed; The display control unit causes the display unit to display a depth analysis screen including the analysis depth, the constituent elements of the object to be analyzed at the analysis depth, the content rate of the constituent elements, and information for specifying the substance, based on the distance from the imaging unit to the analysis location of the object to be analyzed obtained by the imaging processing unit. A laser-induced breakdown spectroscopy apparatus characterized by this.

Images