Vacuum processing apparatus

Abstract

To provide a vacuum processing apparatus in which a transfer tray can be inserted into a transfer section or the transfer tray can be pulled out of the transfer section even when guiding movement in a non-contact pulled state with upper and lower parts of the transfer tray.SOLUTION: Each of a first chamber Pc and a second chamber Lc, which are connected with each other, comprises transfer means Tm for transferring a transfer tray Tr in an X-axis direction, and a freely tiltable tilt section 2 is provided in the first chamber, such that a posture of the transfer tray can be changed between a horizontal posture and a vertical posture. The transfer means comprises: a first guide section 4 for guiding movement in the X-axis direction in a state where an upper part of the transfer tray is pulled upward in a Z-axis direction with no contact; a second guide section 6 for guiding movement in the X-axis direction in a state where a lower part of the transfer tray is pulled upward in the Z-axis direction with no contact; and a transfer section 5 for transferring the transfer tray while supporting the transfer tray in contact therewith. Drive sections 72a and 72b are provided for moving a portion of the second guide section existing in the first chamber at least in a Y-axis direction.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a vacuum processing apparatus that performs a predetermined vacuum process on a processing surface of a substrate to be processed while transporting a transport tray on which the substrate to be processed is disposed on one surface. More specifically, the present invention relates to an apparatus including a first chamber capable of changing the posture of the transport tray and a second chamber connected to the first chamber.

Background Art

[0002] This type of vacuum processing apparatus is known, for example, from Patent Document 1. Hereinafter, the moving direction of the transport tray is defined as the X-axis direction, the direction of gravitational acceleration orthogonal to the X-axis direction is defined as the Z-axis direction, and the direction orthogonal to the X-axis direction and the Z-axis direction is defined as the Y-axis direction. Also, the posture of the transport tray (and the substrate) in which the processing surface of the substrate to be processed (hereinafter referred to as the "substrate") faces upward in the Z-axis direction is defined as the horizontal posture, and the posture in which the processing surface faces one side in the Y-axis direction is defined as the upright posture. The apparatus described in Patent Document 1, for example, transports a substrate before processing existing in an atmospheric atmosphere in a horizontal posture and places it on the transport tray. After changing the posture to the upright posture (including a posture in which the transport tray is inclined at a predetermined angle with respect to the Z-axis), the transport tray in the upright posture is transported to each vacuum (processing) chamber in a vacuum atmosphere. Therefore, the apparatus includes a first chamber and a second chamber. The first chamber is, for example, a so-called position chamber where the attachment and detachment of the substrate to the transport tray are performed. Inside the first chamber, for example, a tilting part that can tilt while holding the transport tray from the other surface side and a moving part that can move the tilting part left and right in the Y-axis direction are provided.

[0003] When a substrate is placed on the transfer tray in a horizontal posture in the first chamber, the tilting unit rotates while lifting the transfer tray to set the transfer tray in an upright posture, and after moving it in one direction in the Y-axis direction to a position above the Z-axis direction of the transfer unit described later by the moving unit, it is delivered to the transfer unit so as to insert the transfer tray. When receiving a transfer tray Tr with a processed substrate Sw from the transfer unit, the tilting unit holds the transfer tray from the other surface side, lifts the transfer tray in the upright posture so as to pull it out upward in the Z-axis direction, and then rotates the transfer tray while lowering the transfer tray to change it to a horizontal posture and moves it to a predetermined position in the other direction in the Y-axis direction, enabling the recovery of the processed substrate from the transfer tray.

[0004] A second chamber connected in series via a gate valve in the X-axis direction is a so-called load lock chamber, and a vacuum pump, an atmosphere release valve, etc. are provided so that the inside thereof can be switched between an atmospheric atmosphere and a vacuum atmosphere. For example, it enables the transfer of the transfer tray to each vacuum chamber in a vacuum atmosphere. A transfer means for transferring the transfer tray in the upright posture along the X-axis direction is provided between the first chamber and the second chamber. The transfer means includes a guide part (hereinafter referred to as the "first guide part") that guides the movement in the X-axis direction while pulling the upper part of the transfer tray upward in the Z-axis direction in a non-contact state, and a transfer part that contacts and supports the transfer tray for transfer (see, for example, Patent Document 2). As the first guide part, generally, one magnet (hereinafter referred to as the "first magnet") provided on the upper surface of the transfer tray in the Z-axis direction, and the other magnet (hereinafter referred to as the "second magnet") arranged along the X-axis direction in the upper part of the first chamber and the second chamber at an interval upward in the Z-axis direction from this first magnet and attracting the first magnet are used.

[0005] As the conveying unit, generally, a conveying roller provided with a concave groove curved with a predetermined curvature that engages with a cylindrical rail member provided so as to extend in the X-axis direction on the lower surface of the conveying tray in the Z-axis direction is used. Then, by the rotation of each conveying roller, while guiding in the X-axis direction by the first guiding unit, the conveying tray is conveyed back and forth in the X-axis direction between the first chamber and the second chamber. Usually, in order to increase the so-called throughput, two lanes (forward conveying path and return conveying path) provided with the first guiding unit and the conveying unit respectively are provided in the first chamber and the second chamber at intervals in the Y-axis direction so that the conveying trays can be conveyed simultaneously between the first chamber and the second chamber.

[0006] In the conveying unit of the above conveying means, usually, for the purpose of suppressing wear powder (dust generation), by causing a part of the weight of the conveying tray (including the substrate weight when a substrate is arranged) to be pulled by the first guiding unit, the surface pressure and load applied to the conveying roller that contact-supports the remaining weight of the conveying tray are reduced. At the same time, it is configured to limit the degree of freedom in the Y-axis direction and the like together with the conveying roller of the conveying unit. That is, when conveying the conveying tray by the above conveying means, with respect to the conveying tray, the first guiding unit restricts the movement within a certain range (restricts the degree of freedom of movement) for rotation (yaw) about the up and down in the Z-axis direction, rotation (roll) about the front and back in the X-axis direction, and movement in the Y-axis direction at the upper part of the conveying tray. Similarly, the conveying roller also restricts the movement within a certain range for rotation (yaw) about the up and down in the Z-axis direction, rotation (roll) about the front and back in the X-axis direction, and movement in the Y-axis direction at the lower part of the conveying tray. Regarding the degree of freedom of movement in the Z-axis direction and rotation (pitching) about the front and back in the Y-axis direction, the conveying roller is configured to restrict the movement, and the guiding unit only has the effect of reducing the surface pressure and load applied to the conveying roller.

[0007] In the configuration of the above-described conveying unit, certain restrictions can be imposed on the degrees of freedom of rotation of the conveying tray about the front and rear in the X-axis or Z-axis directions and the left and right movement in the Y-axis direction (i.e., deviation from the conveying rollers at the lower part of the conveying tray can be prevented). However, the restriction on the degree of freedom of movement at the lower part of the conveying tray is a configuration that uses mechanical engagement elements such as rail members and concave grooves of the conveying rollers. For this reason, in the concave groove of the conveying roller, the engaging member may slide left and right in the Y-axis direction as the conveying tray moves. In this case, there is a problem that wear powder is generated in the concave groove as the engaging member and the conveying roller rotate due to the sliding friction at this time. Particularly, this becomes more prominent when the conveying tray is always inclined at a predetermined angle with respect to the Z-axis direction for conveying.

[0008] In order to solve such problems, the part of the conveying unit that contacts and supports the conveying tray is configured with rolling elements such as spheres to limit only the degree of freedom in the Z-axis direction. At the same time, another guiding part (hereinafter referred to as the "second guiding part") that guides the movement in the X-axis direction in a non-contact state and pulls upward in the Z-axis direction at the lower part of the conveying tray in the Z-axis direction is proposed. As the second guiding part, similar to the first guiding part, it is considered to be composed of one magnet (hereinafter referred to as the "third magnet") provided at the lower part of the conveying tray in the Z-axis direction and the other magnet (hereinafter referred to as the "fourth magnet") provided in the first chamber and the second chamber at an interval upward in the Z-axis direction and attracting the third magnet. In such a case, for example, the third magnet is provided on the upper surface in the Z-axis direction by forming a support plate portion that extends outward in the Y-axis direction at its lower end on the other surface side of the conveying tray. The fourth magnet is provided with a support wall having a horizontal wall portion that faces the support plate portion of the conveying tray at an interval in the Z-axis direction along the conveying path and the return conveying path in the first chamber and the second chamber. It may be provided on the lower surface in the Z-axis direction of this horizontal wall portion.

[0009] According to the above, when transporting the transport tray while guiding it with the first guide part above the transport tray, even if the transport tray has degrees of freedom of rotation (roll) of the transport tray around the front-rear direction of the X-axis and movement left and right in the Y-axis direction, only rolling friction occurs in the transport part. Therefore, generation of wear powder due to sliding friction as in the above conventional example can be suppressed as much as possible. In addition to this, since a part of the remaining weight of the transport tray that is contact-supported by the transport part is also pulled by the second guide part, the load of the transport tray applied to the part of the transport part that contact-supports the transport tray can be reduced. Moreover, by restricting the degrees of freedom of rotation (roll) of the transport tray around the front-rear direction of the X-axis and movement left and right in the Y-axis direction at the lower part of the transport tray, generation of wear powder due to friction can be further suppressed. In the present invention, the "lower part in the Z-axis direction" of the transport tray does not refer only to the lower end part in the Z-axis direction, but refers to a part located below the center of gravity of the transport tray contact-supported by the transport part in the Z-axis direction. However, when providing the second guide part as described above, there arises a problem that the insertion operation of the transport tray into the transport part and the extraction operation of the transport tray from the transport part are hindered due to interference between the third magnet and the fourth magnet that are close to each other.

Prior Art Documents

Patent Documents

[0010]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0011] In view of the above points, an object of the present invention is to provide a vacuum processing apparatus that enables insertion of a transport tray into a transport part and extraction of the transport tray from the transport part even when a configuration is adopted in which movement in the X-axis direction is guided in a state of being pulled upward in the Z-axis direction without contact at the upper and lower parts in the Z-axis direction of the transport tray in order to suppress generation of wear powder due to sliding friction as much as possible.

Means for Solving the Problem

[0012] In order to solve the above problems, while transporting a transport tray on which a substrate to be processed is placed on one surface, a vacuum processing apparatus of the present invention that performs a predetermined vacuum process on the processing surface of the substrate to be processed has two directions orthogonal to each other in the horizontal plane as the X-axis direction and the Y-axis direction, a direction orthogonal to the X-axis direction and the Y-axis direction as the Z-axis direction, the posture of the transport tray with the processing surface of the substrate to be processed facing upward in the Z-axis direction being the horizontal posture, and the posture with the processing surface facing one direction in the Y-axis direction being the upright posture. The vacuum processing apparatus includes a first chamber and a second chamber connected to each other in the X-axis direction, and a transport means for transporting the transport tray in the upright posture along the X-axis direction is provided in the first chamber and the second chamber. In the first chamber, a tilting part that can be tilted while holding the transport tray is provided to enable the posture of the transport tray to be changed between the horizontal posture and the upright posture. The transport means includes a first guiding part provided inside the first chamber and the second chamber, which guides the movement in the X-axis direction while pulling the upper part of the transport tray upward in the Z-axis direction in a non-contact manner, a second guiding part that guides the movement in the X-axis direction while pulling the lower part of the transport tray upward in the Z-axis direction in a non-contact manner, and a transport part that contacts and supports the transport tray and transports the transport tray back and forth in the X-axis direction. It is characterized in that a driving part for moving at least a part of the second guiding part existing in the first chamber in the Y-axis direction is provided. Stand up In the present invention, when first and second transport paths are provided in the first chamber and the second chamber with a space in the Y-axis direction, and the first guiding part, the transport part, and the second guiding part are respectively provided, the second guiding part includes one magnet provided on the upper surface in the Z-axis direction of a support plate part formed on the lower part of the transport tray on the other surface side, and the other magnet provided on the lower surface in the Z-axis direction of a support wall arranged along each transport path in the first chamber and the second chamber so as to attract the one magnet from above in the Z-axis direction. A configuration can be adopted in which each part of the second guiding part is a movable part of the support wall including the other magnet, and each movable part is integrally moved in the Y-axis direction by the driving part.

[0013]

[0014] ​According to the above, when inserting the transfer tray into the transfer unit or pulling out the transfer tray from the transfer unit, if the drive unit retracts the portion of the second guide part including other magnets (the movable part of the support wall including the other magnet) in one direction along the Y-axis, there will be no problem that the insertion or extraction of the transfer tray is inhibited due to interference between one magnet and the other magnet as the second guide part. In this case, if another drive unit for moving the above-mentioned portion in the Z-axis direction is further provided, for example, if the above-mentioned portion is moved and retracted upward in the Z-axis direction prior to holding the transfer tray in the upright posture by the tilting part when pulling out the transfer tray, there will be no problem that the two magnets approaching each other due to vibration when holding the transfer tray by the tilting part come into contact with each other. Moreover, since only the above-mentioned portion is independently moved, there will be no problem of causing a decrease in throughput.

[0015] In addition, when there is a possibility that the retraction of the movable part of the second guide part in the Y-axis direction interferes with the transfer unit, it is preferable that the transfer unit is provided with another drive unit for integrally moving each rolling element arranged along the first and second transfer paths in the first and second chambers and in point contact with the lower surface of the transfer tray in at least one of the Y-axis direction and the Z-axis direction.

Brief Description of the Drawings

[0016]

Figure 1

Figure 2

Figure 3

Figure 4

Embodiments for Carrying Out the Invention

[0017] Hereinafter, with reference to the drawings, the substrate to be processed is a large-area glass substrate (hereinafter referred to as "substrate Sw") used in the manufacture of flat panel displays. While the transfer tray Tr on which the substrate Sw is placed is being transferred along the transfer paths Tp1 and Tp2 described below in a vacuum chamber, an embodiment of the vacuum processing apparatus of the present invention will be described by taking an in-line type in which various vacuum processes such as film formation processing, heat treatment, and etching processing are performed on one surface (processing surface) of the substrate Sw as an example. In the following, the moving direction of the transfer tray Tr along the transfer paths Tp1 and Tp2 is defined as the X-axis direction, the direction of gravitational acceleration orthogonal to the X-axis direction is defined as the Z-axis direction, and the direction orthogonal to the X-axis direction and the Z-axis direction is defined as the Y-axis direction. Further, the posture of the transfer tray (and the substrate Sw) in which the processing surface of the substrate Sw disposed on the transfer tray Tr faces upward in the Z-axis direction is defined as the horizontal posture, and the posture of the transfer tray Tr (and the substrate Sw) in which the processing surface of the substrate Sw faces one side in the Y-axis direction is defined as the upright posture (including the posture in which the transfer tray Tr is inclined at a predetermined angle with respect to the Z-axis).

[0018] Referring to FIGS. 1 to 3, the vacuum processing apparatus VM includes a position chamber (first chamber) Pc for disposing the substrate Sw before processing on one surface of the transfer tray Tr in a horizontal posture or taking out the processed substrate Sw from the transfer tray Tr in a horizontal posture by a transfer robot (not shown). The transfer tray Tr is composed of a plate-like body 11 having a contour slightly larger than that of the substrate Sw. The plate-like body 11 is provided with a substrate receiving portion 12 against which the lower side of the substrate Sw abuts when in the upright posture, and a pressing portion (not shown) such as a clamp for locally pressing the edge portion of the substrate Sw against the plate-like body 11, and the substrate Sw in the upright posture can be held on the transfer tray Tr during the vacuum processing. Depending on the vacuum processing on the substrate Sw, a mask plate may be attached together with the substrate Sw. Since a known transfer tray Tr of this kind can be used, further description thereof will be omitted.

[0019] The position chamber Pc maintained in the atmospheric atmosphere is provided with a tilting portion 2 that can be tilted while holding the transfer tray Tr from the other surface side, and the posture of the transfer tray Tr can be changed between a horizontal posture and an upright posture. The tilting portion 2 includes a holding plate 21, and a holding mechanism such as a vacuum chuck (not particularly illustrated) is provided at a predetermined position of the holding plate 21 so that the substrate Sw does not detach from the holding plate 21 even when the transfer tray Tr is in the upright posture. On the holding plate 21, two frames 22 that are erected at intervals in the X-axis direction and are telescopically extendable and retractable synchronously in the Z-axis direction by a mechanism (not illustrated) such as a single-axis robot are connected to a rotating shaft 23 provided thereon. When the rotating shaft 23 is rotationally driven in one direction by a motor Mt, the holding plate 21 rotates around the rotating shaft 23 to tilt the transfer tray Tr. The lower ends of the respective frames 22 are connected to a moving mechanism 24 of a single-axis robot provided in the position chamber Pc so as to extend in the Y-axis direction, and are reciprocally movable left and right in the Y-axis direction.

[0020] When the substrate Sw is placed on the transfer tray Tr in the horizontal posture in the position chamber Pc, the tilting portion 2 rotates while lifting the transfer tray Tr to make the transfer tray Tr in the upright posture, and after moving in one direction in the Y-axis direction to a position above the Z-axis direction of the transfer portion described later by the moving mechanism 24, it is delivered to the transfer portion so as to insert the transfer tray Tr. On the other hand, when receiving the transfer tray Tr with the processed substrate Sw from the transfer portion described later, the tilting portion 2 holds the transfer tray Tr from the other surface side, then lifts the transfer tray Tr in the upright posture so as to pull it out upward in the Z-axis direction, and then rotates the transfer tray Tr while lowering the transfer tray Tr to change it to the horizontal posture and moves it to a predetermined position in the other direction in the Y-axis direction, enabling the recovery of the processed substrate Sw from the transfer tray Tr.

[0021] A load lock chamber (second chamber) Lc is connected in series in front of the position chamber Pc in the X-axis direction via a gate valve Gv1. Although not particularly shown and described, an exhaust pipe from a vacuum pump and a vent gas line for introducing vent gas are respectively connected to the load lock chamber Lc, and the load lock chamber Lc can be appropriately switched between a vacuum atmosphere and an atmospheric atmosphere. In front of the load lock chamber Lc in the X-axis direction, a number of processing chambers Vc1 to Vcn corresponding to various vacuum processes to be performed on the processing surface of the substrate Sw are sequentially connected in series via gate valves Gv2 and Gvn. Each of the processing chambers Vc1 and Vcn is partitioned into two left and right chambers in the Y-axis direction by a partition wall 31 extending in the X-axis direction, and each chamber 31a and 31b is provided with devices 32 necessary for performing various vacuum processes, such as a sputtering cathode. Then, while the transfer tray Tr passes through each of the chambers 31a and 31b of the vacuum processing chambers Vc1 and Vcn in an upright posture with the processing surface of the substrate Sw facing left in the Y-axis direction (downward in FIG. 2), various vacuum processes are performed on the processing surface of the substrate Sw. A turn-back chamber Bc is connected in series to the processing chamber Vcn located on the most downstream side in the front in the X-axis direction.

[0022] In the turn-back chamber Bc, a movable stage 4 is provided which can move left and right in the Y-axis direction and has a conveying roller 41 on its upper surface. The conveying tray Tr received from the chamber 31a on the left side in the Y-axis direction of the processing chamber Vcn can be returned to the chamber 31b on the right side in the Y-axis direction of the processing chamber Pcn again. And a conveying means Tm is provided so that the conveying tray Tr can be conveyed in an upright posture along two conveying paths extending in the X-axis direction between the position chamber Pc and the turn-back chamber Bc. Hereinafter, the conveying tray Tr that is conveyed forward in the X-axis direction (from the left side to the right side in FIGS. 1 and 2) and passes through the load lock chamber Lc from the position chamber Pc connected in series in the X-axis direction, the chamber 31a on the left side in the Y-axis direction of each processing chamber Vc1, Vcn, and then to the turn-back chamber Bc is defined as the forward conveying path Tp1. Conversely, the conveying tray Tr that is conveyed backward in the X-axis direction (from the right side to the left side in FIG. 1) and passes through the chamber 31b on the right side in the Y-axis direction, the load lock chamber Lc, and then to the position chamber Pc from the turn-back chamber Tc is defined as the return conveying path Tp2.

[0023] The conveying means Tm includes a first guiding part 4 that guides the movement of the conveying tray Tr in the standing posture in the forward or backward direction in the X-axis direction while pulling it upward in the Z-axis direction in a non-contact manner, a conveying part 5 that contacts and supports the remaining weight of the conveying tray Tr whose part of the weight is pulled by the first guiding part 4 and conveys the conveying tray Tr in the forward or backward direction in the X-axis direction, and a second guiding part 6 that guides the movement of the conveying tray Tr in the forward or backward direction in the X-axis direction while pulling it upward in the Z-axis direction in a non-contact manner at the lower part of the conveying tray Tr in the Z-axis direction. The first guiding part 4 includes a first magnet 41 that is longitudinally arranged in the X-axis direction and is attached along the upper side on the upper surface in the Z-axis direction of the plate-like body 11 of the conveying tray Tr, and second magnets 42 that are respectively arranged at the upper parts in the Z-axis direction in the position chamber Pc, the load lock chamber Lc, and each processing chamber Vc1, Vcn along the forward conveying path Tp1 and the return conveying path Tp2. The first magnet 41 and the second magnets 42 are magnetized so that the polarities of their opposing surfaces are different, whereby the movement of the conveying tray Tr in the forward and backward directions in the X-axis direction is respectively guided while pulling the conveying tray Tr upward in the Z-axis direction in a non-contact manner. Note that the first magnet 41 and the second magnets 42 can also be provided in a plurality of examples with a space in the Y-axis direction. In this case, it is preferable to alternately change the polarities of the first magnet 41 and the second magnets 42 that face each other.

[0024] The transfer unit 5 includes transfer rollers 51 as rolling elements that are provided at intervals in the X-axis direction below the position chamber Pc, the load lock chamber Lc, and each processing chamber Vc1, Vcn along the forward transfer path Tp1 and the return transfer path Tp2. Each transfer roller 51 includes a shaft body 51a that is pivotally supported at predetermined positions in the position chamber Pc, the load lock chamber Lc, and each processing chamber Vc1, Vcn, and a wheel portion 51b that is externally fitted to each shaft body 51a and contacts the lower surface of the transfer tray Tr in the Z-axis direction. In this case, at least two wheel portions 51b are attached to a single shaft body 51a at intervals in the Y-axis direction, and the tip of the wheel portion 51b is also formed in an elliptical shape that tapers outward in the radial direction so that the wheel portion 51b makes point contact with the lower surface of the transfer tray Tr in the Z-axis direction. In the present embodiment, each transfer roller 51 constitutes a portion of the transfer unit 5 that contact-supports the transfer tray Tr in a state where only the degree of freedom in the Z-axis direction is restricted. Although not particularly illustrated and described, a known power transmission mechanism such as a pulley, a gear, a drive belt, or a motor is connected to the shaft body 51a of each transfer roller 51, and each transfer roller 51 is rotationally driven in the same direction synchronously for each of the forward transfer path Tp1 and the return transfer path Tp2.

[0025] In the second case interior 6, there are provided a third magnet (one magnet) 61 provided at the lower part in the Z-axis direction of the transfer tray Tr, and fourth magnets 62 respectively arranged at the lower parts in the position chamber Pc, load lock chamber Lc, and each processing chamber Vc1, Vcn along the forward transfer path Tp1 and the return transfer path Tp2. On the plate-like body 11 of the transfer tray Tr, a support plate portion 13 is formed to extend outward at the lower end on the other surface side (the left side in FIG. 3) facing away from the one surface on which the substrate Sw is arranged, and the third magnet 61 is provided on the upper surface in the Z-axis direction of the support plate portion 13. On the other hand, along the forward transfer path Tp1 and the return transfer path Tp2, support walls 63 having horizontal wall portions 63a facing the support plate portion 13 of the transfer tray Tr at intervals in the Z-axis direction are respectively provided to extend along the X-axis direction in the Z-axis direction lower parts in the position chamber Pc, load lock chamber Lc, and each processing chamber Vc1, Vcn, and the fourth magnets 62 are provided on the lower surfaces of the horizontal wall portions 63a. The third magnet 61 and the fourth magnet 62 are magnetized such that the polarities of their opposing surfaces are different, whereby the movement back and forth in the X-axis direction is respectively guided in a state where the lower part in the Z-axis direction of the transfer tray Tr is pulled upward in the Z-axis direction without contact. Note that the third magnet 61 and the fourth magnet 62 can also be provided in a plurality of rows at intervals in the Y-axis direction as described above. In this case, it is preferable to alternately change the polarities of the third magnet 61 and the fourth magnet 62 that face each other.

[0026] If the above configuration is adopted, when the transport tray Tr is transported back and forth in the X-axis direction, as the lower surface of the transport tray Tr and the portion of the transport unit 5, since the transport rollers 51 that are point contacts as rolling elements are used, sliding friction between the raceway surface on the transport tray Tr side and the rolling elements does not occur. Therefore, it is possible to suppress the generation of wear powder due to sliding friction as in the above conventional example as much as possible. Moreover, in addition to a part of the weight of the transport tray Tr being pulled by the first guide portion 4, a part of the remaining weight of the transport tray Tr that is contact-supported by the transport rollers 51 is also pulled by the second guide portion 6, so that the load of the transport tray Tr applied to each transport roller 51 can be further reduced. Furthermore, since the second guide portion 6 restricts the freedom of rotation (roll) of the transport tray Tr about the front and rear in the X-axis direction and the movement left and right in the Y-axis direction at the lower part of the transport tray Tr, it is possible to further suppress the generation of wear powder due to friction. However, at the position chamber Pc, it is necessary to configure so that the insertion operation of the transport tray Tr into the transport roller 51 and the extraction operation of the transport tray Tr from the transport roller 51 are not hindered by the interference between the third magnet 61 and the fourth magnet 62 that are close to each other when the transport tray Tr is delivered or received with respect to the transport unit 5.

[0027] In this embodiment, the portions of both support walls 63 existing in the position chamber Pc are respectively configured as movable portions 63L and 63R that are movable left and right in the Y-axis direction and up and down in the Z-axis direction. Each of the movable portions 63L and 63R is respectively erected on a common first movable base 71 provided in the position chamber Pc. A (first) drive unit 72a, 72b capable of moving this in the left and right directions of the Y-axis and up and down in the Z-axis direction with a predetermined stroke length is connected to the first movable base 71. As the drive units 72a and 72b, known ones such as air cylinders and linear motors can be used. In addition, support rods 52a and 52b provided with bearings (not shown) are connected to the shaft bodies 51a of the respective transfer rollers 51 existing in the position chamber Pc, and the lower ends of the respective support rods 52a and 52b in the Z-axis direction are respectively attached to a common second movable base 73 provided in the position chamber Pc. A (second) drive unit 74a, 74b capable of independently moving this in the left and right directions of the Y-axis and up and down in the Z-axis direction with a predetermined stroke length is connected to the second movable base 73. As the second drive units 74a and 74b, known ones such as air cylinders and linear motors can be used as described above. When delivering the next transfer tray Tr to the forward transfer path Tp1, if the movable portion 63R on the return transfer path Tp2 side interferes with the transfer roller 51 on the forward transfer path Tp1 side when the first movable base 71 is moved to the left side in the Y-axis direction, in order to avoid this, a (third) drive unit 75 may be further provided, and only the movable portion 63L on the forward transfer path Tp1 side may be configured to be further movable left and right in the Y-axis direction. Hereinafter, with reference to FIG. 4, an operation of receiving the transfer tray Tr from the return transfer path Tp2 and delivering the transfer tray Tr to the forward transfer path Tp1 in the position chamber Pc will be described.

[0028] When the transfer tray Tr is conveyed to the receiving position of the return conveyance path Tp2 within the position chamber Pc (see Fig. 4(a)), after the tilting part 2 holds the transfer tray Tr from the other surface side (hereinafter, the position of the transfer tray Tr in the Z-axis direction is referred to as the "holding position"), the first movable base 71, and thus both support walls 63L and 63R, are raised in the Z-axis direction by one first drive part 72a, and the second movable base 73, and thus each transfer roller 51, is lowered in the Z-axis direction by one second drive part 74a (see Fig. 4(b)). Next, the first movable base 71 is moved to the left side in the Y-axis direction by the other first drive part 72b, and the second movable base 73 is synchronously moved to the left side in the Y-axis direction by the other second drive part 74b (see Fig. 4(c)). Note that when the first movable base 71 is moved to the left side in the Y-axis direction, if the movable part 63R on the return conveyance path Tp2 side and the transfer roller 51 on the forward conveyance path Tp1 side do not interfere with each other, the movement of the second movable base 73 can be made unnecessary. Then, the transfer tray Tr having the processed substrate Sw is lifted from the holding position so as to be pulled out upward in the Z-axis direction and removed from above the return conveyance path Tp2. Thereafter, although not particularly illustrated and described, the holding plate 21 is rotated to be returned to the horizontal posture, and the processed substrate Sw and the unprocessed substrate Sw with respect to the transfer tray Tr in the horizontal posture are exchanged in the position chamber Pc.

[0029] Next, each of the first and second movable bases 71 and 73 is moved to the original position to the right in the Y-axis direction by the other first and second drive units 72b and 74b, and the movable portion 63L is moved to the left in the Y-axis direction by the third drive unit 75. In this state, the tilting unit 2 moves the transport tray Tr in the upright posture to the holding position of the transport unit 5 in the forward transport path Tp1 and waits (see Fig. 4(d)). Then, the second movable base 73 is raised in the Z-axis direction to the original position by one of the second drive units 74a, and the transport tray Tr is brought into contact and supported by each transport roller 51 (see Fig. 4(e)). Finally, the movable portion 63L is moved to the right in the Y-axis direction to the original position by the third drive unit 75, and after the first movable base 71 is lowered in the Z-axis direction to the original position by one of the first drive units 72a, the tilting unit 2 is disengaged (see Fig. 4(f)). As a result, the transport tray Tr can be simultaneously transported between the position chamber Pc and the load lock chamber Lc.

[0030] According to the above embodiments, when inserting the transport tray Tr into the transport unit 5 or pulling out the transport tray Tr from the transport unit 5, there is no problem that the third magnet 61 and the fourth magnet 62 as the second guide part 6 interfere with each other and the insertion operation or the pulling-out operation of the transport tray Tr is inhibited. Moreover, since the movable portions 63L and 63R are moved and retracted upward in the Z-axis direction in advance, there is no problem that the third and fourth magnets 61 and 62 that are close to each other due to the vibration when the tilting unit 2 holds the transport tray Tr come into contact with each other. In addition, since only the movable portions 63L and 63R and the transport rollers 51 in the position chamber Pc are moved, there is no problem of causing a decrease in throughput.

[0031] The embodiments of the present invention have been described above. However, various modifications are possible without departing from the scope of the technical idea of the present invention. In the above embodiment, an example was described in which the transfer tray Tr is held from the other surface side by the tilting portion 2. However, any form may be adopted as long as the transfer tray Tr can be held so that the substrate Sw does not separate from the holding plate 21 even when the transfer tray Tr is in an upright position. Further, in the above embodiment, as the transfer unit 5, an example was described in which the transfer unit 5 includes the transfer roller 51 that supports the lower surface of the transfer tray Tr in point contact in the Z-axis direction. However, the present invention is not limited to this as long as the transfer tray Tr can be contact-supported while only restricting the degree of freedom in the Z-axis direction. For example, it may be contact-supported by a sphere (not shown).

[0032] Also, in the above embodiment, as the first guide portion 4 and the second guide portion 6, an example was described in which a pair of magnets 41, 42, 61, 62 arranged to attract each other are provided. However, as the first guide portion 4, as long as it can pull most of the weight of the transfer tray Tr (including the weight of the substrate Sw) and can limit the degree of freedom in at least the X-axis direction, the up-and-down movement in the Z-axis direction, and the rotation (pitching) about the left and right in the Y-axis direction to a certain extent, the present invention is not limited to this. Although not particularly illustrated and described, for example, rail members may be provided in the position chamber Pc, the load lock chamber Lc, and the upper portions inside the respective processing chambers Vc1, Vcn, and provided on a slider slidably engaged with this rail member, and the transfer tray Tr may be guided in a state of being pulled by a plurality of wires suspended at intervals in the X-axis direction on the slider. On the other hand, as long as the second guide portion 6 can also limit the degree of freedom of rotation (roll) of the transfer tray Tr about the front and back in the X-axis direction and the left and right movement in the Y-axis direction to a certain extent, the present invention is not limited to this, and the same configuration as the above first guide portion may be adopted.

[0033] Furthermore, in the above embodiment, the conveying roller 51 provided with at least two wheel portions 51b on a single shaft body 51a as the rolling elements provided in the conveying unit 5 has been described as an example. However, the present invention is not limited to this, and there is no problem even with a configuration having one wheel portion. Also, there is no problem as long as the degree of freedom in the Z-axis direction of the conveying tray Tr is restricted and the driving force in the X-axis direction to the conveying tray Tr is transmitted by the frictional force due to rolling contact. That is, a normal force for enabling driving by rolling contact rather than sliding contact is secured as the remaining weight of the conveying tray Tr whose part of the weight is pulled by the first guide portion 4, and an ideal embodiment can be achieved by providing a safety factor necessary for this. Furthermore, in the above embodiment, the tip of the wheel portion 51b is in point contact with the lower surface in the Z-axis direction of the conveying tray Tr, and the point contact portion is configured as a mechanism through which the rotational driving force is transmitted via the shaft body 51a. However, if a constant velocity joint is used, for example, at the fitting portion between the wheel portion and the shaft body, the driving force can be surely transmitted to the conveying tray Tr by rolling contact.

[0034] Also, in the above embodiment, the case where the first chamber is the position chamber Pc and the second chamber is the load lock chamber has been described as an example. However, the present invention is not limited to this. For example, in a case where a substrate in a horizontal posture is conveyed to a load lock chamber, and when the inside of the load lock chamber is evacuated to a predetermined pressure, the substrate in the horizontal posture is conveyed to a position chamber connected to the load lock chamber and placed on a conveying tray, and then changed to an upright posture, and in this state, for example, when it is conveyed to a processing chamber, the present invention can also be applied to a case where the conveying tray is conveyed between the position chamber as the first chamber and the processing chamber as the second chamber.

Description of Reference Numerals

[0035] VM... Vacuum processing apparatus, Sw... Substrate (substrate to be processed), Tr... Transfer tray, 13... Support plate section, Pc... Position chamber (first chamber), Lc... Load lock chamber (second chamber), Vc1, Vcn... Processing chamber (second chamber), Tm... Transfer means, 2... Tilt section, 4... First guide section, 5... Transfer section, 51... Transfer roller (rolling element), 6... Second guide section, Tp1... Forward transfer path (first transfer path), Tp2... Return transfer path (second transfer path), 61... Third magnet (one magnet), 62... Fourth magnet (the other magnet), 63... Support wall, 63L, 63R... Movable parts of the support wall, 72a, 72b... Driving section, 74a, 74b... Second driving section (other driving section).

Claims

1. A vacuum processing apparatus that performs a predetermined vacuum process on the processing surface of a substrate to be processed while transporting a transport tray on which the substrate to be processed is placed on one surface, Two directions orthogonal to each other in the horizontal plane are defined as the X-axis direction and the Y-axis direction, the direction orthogonal to the X-axis direction and the Y-axis direction is defined as the Z-axis direction, the posture of the transport tray with the processing surface of the substrate to be processed facing upward in the Z-axis direction is defined as the horizontal posture, and the posture with the processing surface facing one side in the Y-axis direction is defined as the upright posture. The apparatus includes a first chamber and a second chamber connected to each other in the X-axis direction, and a transport means for transporting the transport tray in the upright posture along the X-axis direction between the first chamber and the second chamber is provided. In the first chamber, a tilting portion that can be tilted while holding the transport tray is provided to enable the posture of the transport tray to be changed between the horizontal posture and the upright posture. The transport means includes a first guiding portion provided inside the first chamber and the second chamber for guiding the movement of the upper part of the transport tray in the X-axis direction while being pulled upward in the Z-axis direction in a non-contact manner, a second guiding portion for guiding the movement of the lower part of the transport tray in the X-axis direction while being pulled upward in the Z-axis direction in a non-contact manner, and a transport portion for supporting the transport tray in contact and transporting the transport tray back and forth in the X-axis direction. A driving portion for moving at least the portion of the second guiding portion existing in the first chamber in the Y-axis direction is provided. The vacuum processing apparatus is characterized by this.

2. The vacuum processing apparatus according to claim 1, wherein a first transport path and a second transport path are provided in the first chamber and the second chamber with a space in the Y-axis direction, and the first guiding portion, the transport portion, and the second guiding portion are provided respectively. The second guiding portion includes one magnet provided on the upper surface in the Z-axis direction of a support plate portion formed at the lower part of the transport tray on the other surface side with respect to the processing surface, and the other magnet provided on the lower surface in the Z-axis direction of a support wall arranged along the first transport path and the second transport path in the first chamber and the second chamber so as to attract the one magnet from above in the Z-axis direction. Each portion of the second guiding portion is configured as a movable portion of the support wall including the other magnet, and each movable portion is configured to be integrally moved in the Y-axis direction by the driving portion. The vacuum processing apparatus is characterized by this.

3. The conveying unit has rolling elements arranged along the first and second conveying paths in the first chamber and the second chamber and in point contact with the lower surface of the conveying tray, and is provided with another driving unit for integrally moving each of the rolling elements existing in the first chamber in at least one of the Y-axis direction and the Z-axis direction. The vacuum processing apparatus according to claim 2, characterized in that.

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