Component mounting machine

Abstract

This component mounting device is provided with: a suction nozzle which performs a suctioning operation in which negative pressure air is supplied and a component is suctioned, and which performs a mounting operation in which the negative pressure air is cut off and the component is mounted on a board; a first negative pressure supply unit which can supply negative pressure air to the suction nozzle during the time period from when the suction nozzle starts the suctioning operation until the suction nozzle starts the mounting operation; a second negative pressure supply unit which can supply negative pressure air to the suction nozzle; a negative pressure detection unit which directly or indirectly detects the pressure value of the negative pressure air supplied to the suction nozzle; and a negative pressure supply control unit which actuates the second negative pressure supply unit in the case that the detected pressure value of the negative pressure air is closer to the atmospheric pressure value than a prescribed value set between the atmospheric pressure value and a vacuum value.

Description

Technical Field

[0001] This specification relates to a component mounter including a suction nozzle that is supplied with negative-pressure air to suck a component.

Background Art

[0002] Techniques for mass-producing substrate products by performing substrate work on a substrate with printed wiring are widespread. As a typical example of a substrate working machine that performs substrate work, there is a component mounter that performs component mounting work. Many component mounters include a suction nozzle that is supplied with negative-pressure air to suck a component, a negative-pressure supply unit that supplies negative-pressure air to the suction nozzle, and a drive mechanism that moves the suction nozzle up and down and horizontally. The suction nozzle that has sucked a component is driven by the drive mechanism to move onto the substrate, and the negative-pressure air is blocked to mount the component on the substrate. One technical example related to this type of component mounter is disclosed in Patent Document 1.

[0003] The head for a component mounting device disclosed in Patent Document 1 includes a vacuum pressure supply unit that supplies a vacuum pressure to an airtight chamber to which a plurality of suction nozzles are attached, and an ejector that supplies negative pressure to any of the determined suction nozzles via a hollow shaft. According to this, it is said that even if the number of suction nozzles increases, it is possible to suppress an increase in the number of ejectors for generating a vacuum pressure and the amount of compressed air to be supplied.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] By the way, many component mounting machines are equipped with a mounting head having a plurality of suction nozzles, and the air flow path communicating from the negative pressure supply unit to the plurality of suction nozzles has a branched structure. When a suction failure occurs where a component cannot be suctioned by a certain suction nozzle during the component suction operation, a large amount of negative pressure air leaks and the negative pressure inside the nozzle decreases. The decrease in negative pressure spreads to other suction nozzles via the air flow path.

[0006] In this specification, "negative pressure air" refers to air whose pressure value is smaller than the atmospheric pressure value and whose gauge pressure is a negative pressure value (negative pressure). Also, "leakage of negative pressure air" refers to the phenomenon where air flows into the suction nozzle with negative pressure from the atmosphere side. And "decrease in negative pressure" refers to the change in the pressure value from the vacuum value side to the atmospheric pressure value side (increase in absolute pressure) due to the leakage of negative pressure air. When the decrease in negative pressure inside the suction nozzle becomes significant, the holding force for holding the component decreases and there is a risk that the component will fall.

[0007] Also, when the suction nozzle sucks the component in a tilted posture or when there are irregularities on the suction surface of the component, similarly, leakage of negative pressure air occurs and the negative pressure in all the suction nozzles decreases. As a countermeasure for this, the configuration of Patent Document 1 cannot be adopted because it does not have a branched structure of the air flow path. In the conventional countermeasure technology, when the pressure value of the negative pressure air drops below the threshold pressure value, the subsequent suction operation is terminated and the mounting operation of the already suctioned component is performed. According to this, the mounting operation can be completed before the decrease in negative pressure becomes significant, and the fall of the component can be avoided. However, with this countermeasure technology, the number of components to be mounted decreases and the work efficiency of the mounting operation decreases.

[0008] Furthermore, in recent years, there has been a tendency to increase the moving speed of the suction nozzle in order to further improve efficiency. In this case, it is important to maintain the negative pressure inside the suction nozzle well to ensure a large component holding force and not to drop the component due to the inertial force generated by the change in the moving speed. In addition, if the component holding force of the suction nozzle can be increased, it becomes possible to suck, convey, and mount heavier components than before.

[0009] Therefore, an object of the present specification is to provide a component mounting machine capable of suppressing a decrease in negative pressure in a suction nozzle that sucks a component.

Means for Solving the Problem

[0010] The present specification includes a suction nozzle that performs a suction operation of sucking a component by supplying negative pressure air, and performs a mounting operation of mounting the component on a substrate by blocking the negative pressure air, and a time period from when the suction nozzle starts the suction operation until the mounting operation starts. A first negative pressure supply unit capable of supplying the negative pressure air to the suction nozzle, a second negative pressure supply unit capable of supplying the negative pressure air to the suction nozzle, and a negative pressure detection unit that directly or indirectly detects a pressure value of the negative pressure air supplied to the suction nozzle. When the detected pressure value of the negative pressure air is closer to the atmospheric pressure value than a predetermined value set between the atmospheric pressure value and the vacuum value, a component mounting machine including a negative pressure supply control unit that operates the second negative pressure supply unit is disclosed.

Effect of the Invention

[0011] In the component mounting machine disclosed in the present specification, at least the first negative pressure supply unit operates through a time period from when the suction nozzle starts the suction operation until the mounting operation starts, and maintains a negative pressure inside the suction nozzle. Here, when the suction nozzle fails to suck the component, or when the component can be sucked but the posture of the component or the state of the adsorbed surface is not good, the negative pressure air leaks, causing a decrease in negative pressure inside the suction nozzle. Also, in a configuration including a plurality of suction nozzles, when a decrease in negative pressure occurs in one suction nozzle, the decrease in negative pressure spreads to other communicating suction nozzles. When such a decrease in negative pressure occurs, the negative pressure detection unit detects the decrease in negative pressure, and the negative pressure supply control unit operates the second negative pressure supply unit. Therefore, by the parallel operation of the first negative pressure supply unit and the second negative pressure supply unit, a decrease in negative pressure inside the suction nozzle can be suppressed.

Brief Description of the Drawings

[0012]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

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Figure 8

Figure 9

Mode for Carrying Out the Invention

[0013] 1. Overall Configuration of Component Mounter 1 of the First Embodiment The overall configuration of the component mounter 1 of the first embodiment will be described with reference to FIG. 1. The component mounter 1 performs a mounting operation of mounting components on a substrate K. The direction from the left side to the right side of the paper surface in FIG. 1 is the X-axis direction for conveying the substrate K, and the direction from the lower side (front side) to the upper side (rear side) of the paper surface is the Y-axis direction. The component mounter 1 is configured by assembling a substrate conveying device 2, a component supply device 3, a component transfer device 4, and a mounting control unit 9 (see FIG. 2) and the like on a base 10.

[0014] The substrate transfer device 2 is composed of a pair of guide rails 21, a pair of transfer belts (not shown), a clamp mechanism 23, etc. The pair of guide rails 21 traverse the center of the upper surface of the base 10 and extend in the transfer direction (X-axis direction), and are assembled to the base 10 in parallel with each other. The pair of transfer belts rotate along the guide rails 21 with two parallel sides of the substrate K placed thereon, and transfer the substrate K to the work execution position near the center of the base 10. The clamp mechanism 23 pushes up the transferred substrate K and clamps and positions it between the pressing portion 22 (see FIG. 5) of the guide rail 21. After the component mounting operation by the component transfer device 4 is completed, the clamp mechanism 23 releases the substrate K, and the transfer belt carries out the substrate K out of the machine.

[0015] The component supply device 3 is composed of a plurality of tape feeders 31 arranged side by side in the X-axis direction. Each tape feeder 31 feeds out a carrier tape in which a large number of components are stored in a row toward the supply position 32 on the front end side. The carrier tape supplies the components in a manner that allows them to be picked up at the supply position 32.

[0016] The component transfer device 4 is composed of a Y-axis moving body 41, an X-axis moving body 42, a mounting head 43, a rotary tool 44, a plurality of suction nozzles 45, a substrate recognition camera 46, a component recognition camera 49, etc. The Y-axis moving body 41 is formed of a member long in the X-axis direction and is driven by a Y-direction drive mechanism to move in the Y-axis direction. The X-axis moving body 42 is mounted on the Y-axis moving body 41 and is driven by an X-direction drive mechanism to move in the X-axis direction. The mounting head 43 is attached to a clamp mechanism (not shown) provided on the front surface of the X-axis moving body 42 and moves in two horizontal directions together with the X-axis moving body 42.

[0017] A rotary tool 44 is rotatably provided below the mounting head 43. The rotary tool 44 is driven by an R-axis drive mechanism (not shown) and rotates about a vertical central axis. The rotary tool 44 has a plurality (12 in the example of FIG. 1) of suction nozzles 45 equidistant from the vertical central axis. The suction nozzles 45 are driven by a lifting drive mechanism (not shown) to move up and down, and are driven by a θ-axis drive mechanism (not shown) to rotate about a vertical axis. Further, when the rotary tool 44 rotates, the suction nozzles 45 revolve around the vertical central axis of the rotary tool 44. The suction nozzles 45 are selectively supplied with negative-pressure air and positive-pressure air from an air supply system 5 described later. Thereby, the suction nozzles 45 perform a suction operation of sucking components from the component supply device 3 and a mounting operation of mounting the components on the substrate K.

[0018] Note that the mounting head 43 may be in a form that holds the suction nozzles 45 so as to be movable up and down, and various modifications are possible. For example, the rotary tool 44 may be omitted, and a plurality of suction nozzles 45 may be directly provided below the mounting head 43. Further, the plurality of suction nozzles 45 provided below the mounting head 43 may be arranged in a row or in a grid pattern.

[0019] A substrate recognition camera 46 is provided on the X-axis moving body 42 beside the mounting head 43. The substrate recognition camera 46 is disposed such that the optical axis faces downward, and images a position reference mark attached to the substrate K from above. The acquired image data is subjected to image processing, and the working position of the substrate K is accurately determined. As the substrate recognition camera 46, a digital imaging device having an imaging element such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor) can be exemplified.

[0020] The component recognition camera 49 is provided on the base 10 between the substrate transfer device 2 and the component supply device 3. The component recognition camera 49 is arranged such that its optical axis faces upward. The component recognition camera 49 captures and recognizes, from below, the components held by the suction nozzles 45 while the mounting head 43 is moving from the component supply device 3 to the substrate K. Thereby, the correctness of the component type is determined, and the position and orientation of the component with respect to the suction nozzle 45 are detected and reflected in the mounting operation. As the component recognition camera 49, a digital imaging device having an imaging element such as a CCD or a CMOS can be exemplified.

[0021] The component transfer device 4 can repeat a plurality of suction and mounting cycles for the positioned substrate K. In the suction and mounting cycle, first, the mounting head 43 moves above the component supply device 3, and each suction nozzle 45 performs a suction operation. Next, the mounting head 43 moves above the component recognition camera 49, and the component recognition camera 49 performs imaging. Then, the mounting head 43 moves above the substrate K, and each suction nozzle 45 performs a mounting operation. And the mounting head 43 moves toward the component supply device 3 again. The suction and mounting cycle is a general term for the above-described series of operations.

[0022] The mounting control unit 9 is assembled to the base 10, and its installation position is not particularly limited. The mounting control unit 9 is composed of a computer device having a CPU and operating with software. Note that the mounting control unit 9 may be configured such that a plurality of CPUs are distributed and communicatively connected within the machine. The mounting control unit 9 controls the substrate transfer device 2, the component supply device 3, and the component transfer device 4 based on the mounting operation data created for each type of substrate K. The mounting operation data is data that describes the detailed procedures and implementation methods of the mounting operation. Further, the mounting control unit 9 controls the operations of the plurality of suction nozzles 45 and the mounting head 43 to proceed with the component suction operation and the mounting operation.

[0023] 2. Air supply system 5 Next, the air supply system 5 will be described with reference to FIG. 2. The air supply system 5 selectively supplies negative-pressure air and positive-pressure air to each of the suction nozzles 45, and can open the inside of the suction nozzle 45 to the atmosphere. Each component of the air supply system 5 is assembled separately into the base 10 and the component transfer device 4. The air supply system 5 includes a negative-pressure air flow path 51, a positive-pressure air flow path 52, a plurality of sets of valve devices 53 corresponding to each of the suction nozzles 45 and a nozzle-side air flow path 54, a first negative-pressure supply unit 61, an ejector 62 corresponding to a second negative-pressure supply unit, a negative-pressure detection unit 71, a negative-pressure supply control unit 72, and a positive-pressure supply unit 81, etc.

[0024] The negative-pressure air flow path 51 extends from the base 10 through the mounting head 43 to the rotary tool 44. One end side of the negative-pressure air flow path 51 branches into two systems at the branch position 6D and is connected in parallel to the first negative-pressure supply unit 61 and the ejector 62. The branch position 6D is provided at a position close to the mounting head 43 even outside the mounting head 43 or inside the mounting head 43. According to this, compared with the configuration in which the branch position 6D is provided in the vicinity of the first negative-pressure supply unit 61 and the ejector 62, the flow path cross-sectional area when the first negative-pressure supply unit 61 and the ejector 62 operate in parallel becomes equivalently large. As a result, the supply efficiency of supplying negative-pressure air to the suction nozzle 45 is improved.

[0025] The other end side of the negative-pressure air flow path 51 branches into the same number of systems as the number of the suction nozzles 45 and is respectively connected to the valve devices 53. Negative-pressure air is supplied to the negative-pressure air flow path 51 from the first negative-pressure supply unit 61 and the ejector 62. Actually, in the negative-pressure air flow path 51, the internal air is sucked by the first negative-pressure supply unit 61 and the ejector 62, and the internal pressure value becomes a negative pressure smaller than the atmospheric pressure value.

[0026] The first negative pressure supply unit 61 is provided on the base 10. The first negative pressure supply unit 61 operates throughout the time period from when at least a plurality of suction nozzles 45 start the suction operation until the mounting operation starts. In the first embodiment, the first negative pressure supply unit 61 is automatically powered on when the component mounter 1 is in operation and operates continuously. Therefore, the first negative pressure supply unit 61 continuously supplies negative pressure air to the negative pressure air flow path 51. Note that the first negative pressure supply unit 61 may be controlled by the negative pressure supply control unit 72 and may operate intermittently only during the above-described time period.

[0027] In the negative pressure air flow path 51 to which negative pressure air is supplied, the internal pressure value becomes a value close to the vacuum value, and it becomes possible to supply negative pressure air to the suction nozzle 45. Further, the suction nozzle 45 performs a suction operation when the internal pressure value becomes a value close to the vacuum value. The first negative pressure supply unit 61 is a main component for supplying negative pressure air to the suction nozzle 45 and can be referred to as the main negative pressure supply unit. As the first negative pressure supply unit 61, for example, an air pump (vacuum pump) can be used. Note that the first negative pressure supply unit 61 may have a configuration including a negative pressure air supply path that supplies negative pressure air from a negative pressure source disposed outside the machine to the inside of the machine.

[0028] In the first embodiment, an ejector 62 is used as the second negative pressure supply unit. The ejector 62 is provided on the base 10 and is controlled by the negative pressure supply control unit 72. The ejector 62 supplies negative pressure air to the negative pressure air flow path 51. Therefore, the ejector 62 can supply negative pressure air to the suction nozzle 45. The ejector 62 is a component that operates auxiliary when the negative pressure air supplied from the first negative pressure supply unit 61 is insufficient and can be referred to as an auxiliary negative pressure supply unit.

[0029] The ejector 62 is attached with an on-off valve 63 and a check valve 64. The ejector 62 has a positive-pressure introduction section 621, a positive-pressure discharge section 622, and a negative-pressure generation section 623. The positive-pressure introduction section 621 communicates with a positive-pressure supply section 81 via the on-off valve 63. The opening / closing operation of the on-off valve 63 is controlled by a negative-pressure supply control section 72. The positive-pressure discharge section 622 is open to the atmosphere. The negative-pressure generation section 623 communicates with a negative-pressure air flow path 51 via the check valve 64. The check valve 64 (non-return valve) allows air to flow from the negative-pressure air flow path 51 toward the ejector 62 and blocks the reverse flow of air.

[0030] When positive-pressure air is introduced into the positive-pressure introduction section 621 of the ejector 62, the ejector 62 discharges the positive-pressure air to the positive-pressure discharge section 622 while generating negative-pressure air in the negative-pressure generation section 623. The ejector 62 has a response delay time DT (see FIG. 5). More specifically, based on the time when the negative-pressure supply control section 72 commands the on-off valve 63 to open, the time when the positive-pressure air is introduced into the positive-pressure introduction section 621 is delayed. Further, the time when the negative-pressure air generated in the negative-pressure generation section 623 is supplied to the suction nozzle 45 via the negative-pressure air flow path 51 is even more delayed. As the ejector 62, a known configuration, for example, the configuration disclosed in Patent Document 1 can be used.

[0031] The positive-pressure air flow path 52 extends from the base 10 through the mounting head 43 to the rotary tool 44. One end side of the positive-pressure air flow path 52 communicates with the positive-pressure supply section 81 via a positive-pressure valve 85. The positive-pressure valve 85 is a solenoid valve, which is excited to be in an open state and de-excited to be in a closed state. The other end side of the positive-pressure air flow path 52 branches into the same number of lines as the number of suction nozzles 45 and communicates with valve devices 53 respectively. Positive-pressure air supplied from the positive-pressure supply section 81 flows through the positive-pressure air flow path 52.

[0032] The positive pressure supply unit 81 is composed of a positive pressure air supply path 82, a regulator valve 84, and the like. The positive pressure air supply path 82 supplies positive pressure air from a positive pressure source 83 arranged outside the component mounter 1 to the regulator valve 84. The positive pressure source 83 is provided commonly for a plurality of component mounters 1, or is provided commonly for a number of devices in the factory. As the positive pressure source 83, for example, a compressor (compression pump) or a pressure accumulator tank in which positive pressure air is accumulated by a compressor can be used.

[0033] The regulator valve 84 is provided on the base 10. The regulator valve 84 reduces the positive pressure air to a specified positive pressure value and discharges and supplies the positive pressure air with a stable positive pressure value. One of the branched sides on the discharge side of the regulator valve 84 in the positive pressure supply unit 81 is communicated with the opening and closing valve 63 of the ejector 62. The positive pressure supply unit 81 contributes to the generation of negative pressure air and plays a part of the role of the second negative pressure supply unit. Also, the other of the branched sides on the discharge side of the regulator valve 84 in the positive pressure supply unit 81 is communicated with a positive pressure valve 85, and positive pressure air is supplied to the suction nozzle 45 via the positive pressure air path 52. Note that the positive pressure supply unit 81 may be a positive pressure source provided inside the component mounter 1.

[0034] The valve device 53 is provided on the rotary tool 44 so as to correspond to each of the suction nozzles 45. In the valve device 53, a negative pressure air path 51, a positive pressure air path 52, a nozzle-side air path 54, and an atmospheric air path 55 are communicated. The nozzle-side air path 54 communicates the valve device 53 and the suction nozzle 45. The atmospheric air path 55 opens the valve device 53 to the atmosphere.

[0035] The valve device 53 is automatically operated in conjunction with the lifting operation of the suction nozzle 45. Alternatively, the valve device 53 may be controlled by the negative pressure supply control unit 72. The valve device 53 selectively communicates any one of the negative pressure air passage 51, the positive pressure air passage 52, and the atmospheric air passage 55 with the nozzle-side air passage 54. As the valve device 53, for example, a switching valve 56 capable of switching among three types of communication states can be used. The valve device 53 can be configured by a plurality of valves as long as it has the above-described switching function. Further, as the valves constituting the valve device 53, fluid valves having various structures can be adopted. The applicant of the present application discloses a detailed configuration example of the valve device 53 in International Publication No. 2019 / 026160.

[0036] As shown in FIG. 2, when the nozzle-side air passage 54 communicates with the negative pressure air passage 51, the suction nozzle 45 is supplied with negative pressure air inside and becomes a negative pressure state, enabling the suction operation. When the nozzle-side air passage 54 communicates with the positive pressure air passage 52, the suction nozzle 45 becomes a positive pressure state in which the negative pressure air is blocked and the positive pressure air is supplied, enabling the mounting operation. When the nozzle-side air passage 54 communicates with the atmospheric air passage 55, the suction nozzle 45 becomes an atmospheric release state in which the negative pressure air and the positive pressure air are blocked and it is opened to the atmosphere. Thereby, the negative pressure air and the positive pressure air are prevented from leaking from the suction nozzle 45 and being wasted.

[0037] The negative pressure detection unit 71 is provided on the mounting head 43. The negative pressure detection unit 71 directly or indirectly detects the pressure value of the negative pressure air supplied to the suction nozzle 45. As the negative pressure detection unit 71, a pressure sensor communicated with the negative pressure air passage 51 can be used. The negative pressure detection unit 71 outputs the detected pressure value of the negative pressure air to the negative pressure supply control unit 72.

[0038] The negative pressure detection unit 71 is not limited to a pressure sensor. For example, the negative pressure detection unit 71 may include one or more pressure relays that output an on signal at a set pressure value. According to this, the determination process of the negative pressure supply control unit 72 can be simplified. Further, the negative pressure detection unit 71 may be configured to detect the flow rate of the negative pressure air using a flow rate sensor and estimate the pressure value based on the amount of the flow rate.

[0039] The negative pressure supply control unit 72 is provided on the base 10, but its position is not limited. The negative pressure supply control unit 72 is configured using the same computer device as the attachment control unit 9 or a separate computer device. The negative pressure supply control unit 72 controls the ejector 62 based on the pressure value of the negative pressure air detected by the negative pressure detection unit 71. The negative pressure supply control unit 72 may control not only the ejector 62 but also the overall supply of the negative pressure air and the positive pressure air. That is, the negative pressure supply control unit 72 may control the first negative pressure supply unit 61, the positive pressure valve 85, and the plurality of valve devices 53 in addition to the ejector 62 and the on-off valve 63.

[0040] 3. Control of the negative pressure supply control unit 72 based on the pressure value of the negative pressure air Here, the control performed by the negative pressure supply control unit 72 based on the pressure value of the negative pressure air will be described with reference to FIG. 3. The negative pressure air in the negative pressure air passage 51 has a pressure value between the atmospheric pressure value and the vacuum value, and has a pressure value within the range of 0 to -101 kPa in gauge pressure notation and within the range of 101 to 0 kPa in absolute pressure notation. When each of the plurality of suction nozzles 45 can satisfactorily adsorb the component, the negative pressure air hardly leaks. At this time, the negative pressure air in the negative pressure air passage 51 and in each suction nozzle 45 maintains a pressure value close to the vacuum value. In this case, it is sufficient if the first negative pressure supply unit 61 is operating, and the operation of the ejector 62 is not necessary.

[0041] However, when one or more suction nozzles 45 are unable to suck a component, or when there is a gap between the component and the suction nozzle even if it can be sucked, a negative pressure air leak occurs. As a result, a decrease in negative pressure (increase in absolute pressure) occurs in the suction nozzle 45, and further, the decrease in negative pressure spreads to the negative pressure air passage 51 and other suction nozzles 45. As a countermeasure against the decrease in negative pressure, in the first embodiment, an ejector 62 and a negative pressure supply control unit 72 are provided to enable the parallel operation of the first negative pressure supply unit 61 and the ejector 62. Further, a predetermined value and a threshold pressure value are set for determination when the negative pressure supply control unit 72 performs control. The predetermined value and the threshold pressure value are set based on the limit value at which the suction nozzle 45 can stably suck and convey the component.

[0042] The limit value represents the pressure value of the minimum condition for not dropping the component when the suction nozzle 45 moves while sucking the component. More specifically, when the pressure value of the negative pressure air approaches the atmospheric pressure value exceeding the limit value, the component holding force for the suction nozzle 45 to hold the component decreases significantly. As a result, due to the inertial force acting on the component during the lifting and lowering operation of the suction nozzle 45, the rotational operation of the rotary tool 44, the horizontal movement of the mounting head 43, etc., the possibility that the adsorbed component falls from the suction nozzle 45 increases. On the other hand, when the pressure value of the negative pressure air is on the vacuum value side rather than the limit value, the possibility of the component dropping is almost nil.

[0043] Based on this limit value, considering a further decrease in negative pressure that may occur before the suction nozzle finishes the mounting operation, a predetermined safety factor, etc., a predetermined value and a threshold pressure value are set. The predetermined value is a determination value for determining to operate the ejector 62 in parallel with the first negative pressure supply unit 61. The threshold pressure value is a determination value for determining that it is not sufficient to operate the ejector 62 in parallel. The threshold pressure value is set between the limit value and the predetermined value. The case where the pressure value of the negative pressure air is between the limit value and the threshold pressure value is called a negative pressure decrease state. The suction nozzle 45 in the negative pressure decrease state is required to finish the component mounting operation in a short time before the pressure value changes to the limit value (increase in absolute pressure).

[0044] When the pressure value of the negative-pressure air is between the threshold pressure value and a predetermined value, it is called the decreasing tendency state. The suction nozzle 45 in the decreasing tendency state may cause the negative pressure to continue to decrease as it is. Therefore, the negative-pressure supply control unit 72 controls the ejector 62 to operate in parallel during the operation of the first negative-pressure supply unit 61. As a result, the suction nozzle 45 is improved from the decreasing tendency state to the normal state (described later) in most cases, and in other cases, the decreasing tendency state is maintained to prevent the transition to the negative-pressure decreasing state.

[0045] When the pressure value of the negative-pressure air is between the predetermined value and the vacuum value, it is called the normal state. The suction nozzle 45 in the normal state has a low risk of negative-pressure decrease. Therefore, the negative-pressure supply control unit 72 determines that the parallel operation of the ejector 62 is unnecessary.

[0046] As the predetermined value, for example, -75 kPa (gauge pressure) can be used. Also, as the threshold pressure value, for example, -55 kPa (gauge pressure) can be used. However, the limit value varies depending on the shape and opening area of the opening of the suction nozzle 45, the mass of the component to be adsorbed and the state of the adsorbed surface, and the acceleration and deceleration during the movement of the suction nozzle 45. Therefore, the predetermined value and the threshold pressure value are preferably set based on the limit value.

[0047] The description of the control of the negative-pressure supply control unit 72 continues. When the pressure value of the negative-pressure air detected by the negative-pressure detection unit 71 is closer to the atmospheric pressure value than the predetermined value (decreasing tendency state), the negative-pressure supply control unit 72 operates the ejector 62. However, as described above, in the ejector 62, a response delay time DT elapses from the start of the operation until the negative-pressure air is supplied to the suction nozzle 45. Therefore, if the negative-pressure supply control unit 72 receives the detection result of the negative-pressure detection unit 71 and determines the decreasing tendency state, and then operates the ejector 62, the negative pressure may continue to decrease due to the response delay time DT, and it may be too late in terms of time.

[0048] As a countermeasure, the negative pressure supply control unit 72 performs control in consideration of the response delay time DT of the ejector 62. Specifically, the negative pressure supply control unit 72 operates the ejector 62 in advance before or at the start of the suction operation of the suction nozzle 45, and stops the ejector 62 when the pressure value of the negative pressure air is the same as the predetermined value or closer to the vacuum value than the predetermined value (normal state) at or after the end of the suction operation. Further, the negative pressure supply control unit 72 continues the operation of the ejector 62 until the mounting operation of the suction nozzle 45 when the pressure value of the negative pressure air is closer to the atmospheric pressure value than the predetermined value (decreasing tendency state) at or after the end of the suction operation.

[0049] That is, since the negative pressure supply control unit 72 cannot determine in advance whether the operation of the ejector 62 is necessary before or at the start of the suction operation of the suction nozzle 45, it operates the ejector 62 in advance in case it is necessary. Then, the negative pressure supply control unit 72 stops the ejector 62 in the normal state and continues the operation of the ejector 62 in the decreasing tendency state at or after the end of the suction operation. Thereby, the influence of the response delay time DT of the ejector 62 can be avoided. However, even when it is determined to be in the normal state as a result, the ejector 62 will be operated for a short time.

[0050] Further, the negative pressure detection unit 71 may detect a negative pressure decrease state in which the pressure value of the negative pressure air approaches the atmospheric pressure value exceeding the threshold pressure value during the suction operations of the plurality of suction nozzles 45 in sequence. In this case, the negative pressure supply control unit 72 notifies the mounting control unit 9 that it has entered the negative pressure decrease state. The mounting control unit 9 that has received the notification of the negative pressure decrease state interrupts the suction operation and shifts to the mounting operation. According to this, the suction operations of some of the suction nozzles 45 are omitted, the mounting head 43 immediately moves above the substrate K, and a smaller number of suction nozzles 45 than normal perform the mounting operation. The control of the negative pressure supply control unit 72 will also be described in the following operation explanation.

[0051] 4. Operation of the suction and mounting cycle using the suction nozzle 45 Next, the operation when the component mounting machine 1 performs a suction and mounting cycle using the suction nozzle 45 will be described with reference to FIGS. 4 to 6. The operation flow shown in FIG. 4 is mainly advanced by the combined control of the negative pressure supply control unit 72 and the mounting control unit 9. In the initial state before the suction and mounting cycle is started, the nozzle-side air flow path 54 of the valve device 53 communicates with the atmospheric air flow path 55, and the suction nozzle 45 is in the open state to the atmosphere. Also, due to the operation of the first negative pressure supply unit 61, the negative pressure air in the negative pressure air flow path 51 has a pressure value close to the vacuum value. Further, the positive pressure valve 85 is in the open state, and the positive pressure air in the positive pressure air flow path 52 has a specified positive pressure value.

[0052] In the operation flow shown in FIG. 4, a first case where each of the plurality of suction nozzles 45 can successfully suck a component, a second case where a leak of negative pressure air occurs and the component cannot be successfully sucked, and a third case where there is a large leak of negative pressure air may occur. Generally, the occurrence frequency of the first case is the highest, the occurrence frequency of the second case is small, and the third case is extremely rare. First, the first case will be described with reference to the time chart of FIG. 5. In FIG. 5, the band graph of the operation section of the suction nozzle represents the distinction between the suction time zone TW1, the movement time zone TW2, and the mounting time zone TW3.

[0053] The suction time zone TW1 is the time zone from time t1 when a plurality of suction nozzles 45 perform suction operations at the supply position 32 in sequence to time t4. Time t1 is the time when the first suction nozzle 45 among the plurality of suction nozzles 45 starts the suction operation at the supply position 32, and time t4 is the time when the last suction nozzle 45 among the plurality of suction nozzles 45 finishes the suction operation. The movement time zone TW2 is the time zone from time t4 when the mounting head 43 holding the plurality of suction nozzles 45 moves from the component supply device 3 above the substrate K via the component recognition camera 49 to time t7. The mounting time zone TW3 is the time zone from time t7 when the plurality of suction nozzles 45 perform mounting operations at the mounting positions on the substrate K in sequence to time t11. Time t7 is the time when the first suction nozzle 45 among the plurality of suction nozzles 45 starts the mounting operation at the mounting position, and time t11 is the time when the last suction nozzle 45 among the plurality of suction nozzles 45 finishes the suction operation.

[0054] Also, the band graph of the required time zone represents the time zone when the negative pressure air supplied from the ejector 62 may be required. The start time t3 of the required time zone is set later than the start time t1 of the suction time zone TW1. The reason for this is that even if a negative pressure air leak occurs in all the suction nozzles 45 that have performed the suction operation from time t1 to time t3, there is no problem without the ejector 62. Furthermore, if a negative pressure air leak also occurs in the suction nozzles 45 that perform the suction operation after time t3, there is a risk of a negative pressure drop state, so the operation of the ejector 62 is required. That is, if the supply of negative pressure air by the operation of the ejector 62 starts at time t3, the subsequent pressure values will recover to the normal state, and at worst, the decreasing tendency state will be maintained and the negative pressure drop state will not occur.

[0055] On the other hand, the end time t9 of the required time zone is set earlier than the end time t11 of the wearing time zone TW3. The reason for this is that for the suction nozzle 45 that has completed the wearing operation by time t9, the negative pressure air flow path 51 is closed by the valve device 53, eliminating the risk of leakage. Even if negative pressure leakage occurs in the remaining suction nozzles 45 that will perform the wearing operation from now on, it is not a problem without the ejector 62. That is, even if the supply of negative pressure air from the ejector 62 ends at time t9, the wearing operation of the remaining suction nozzles 45 will end without problems before the pressure value changes to the threshold pressure value.

[0056] The operation time zone graph represents the time zone from time t1 to time t5 when the ejector 62 is operating. The positive pressure consumption zone graph represents the time zone from time t2 to time t6 when positive pressure air is discharged (consumed) from the positive pressure discharge part 622 of the ejector 62. The positive pressure consumption time zone has a slight response delay time with respect to the operation time. The negative pressure effect zone graph represents the net time zone when negative pressure air is supplied to the suction nozzle 45, that is, the time zone from time t3 to time t8. The time zone of the negative pressure effect has a response delay time DT (= t3 - t1 ≒ t8 - t5) with respect to the operation time.

[0057] Returning to the operation flow of FIG. 4, the first case will be described. In step S1, the negative pressure supply control unit 72 opens the on-off valve 63 and starts the operation of the ejector 62 (time t1 in FIG. 5). Step S1 is a process of operating the ejector 62 in advance in case the operation of the ejector 62 is necessary. Thereby, the first negative pressure supply unit 61 and the ejector 62 supply negative pressure air in parallel. The operation start time of the ejector 62 is preferably set at a time retrogressed by the response delay time DT from the start time t3 of the required time zone. In the example of FIG. 5, the operation start time of the ejector 62 happens to coincide with the start time t1 of the suction time zone TW1, but it may be set before or after time t1.

[0058] In the next step S2, the mounting control unit 9 moves the suction nozzle 45 above the supply position 32 of the component supply device 3. In the next step S3, the mounting control unit 9 lowers the suction nozzle 45 toward the supply position 32. As a result, the valve device 53 is automatically operated. Then, the suction nozzle 45 shifts from the air-open state to the negative-pressure state and performs a suction operation.

[0059] In the next step S4, the negative-pressure supply control unit 72 compares the pressure value detected by the negative-pressure detection unit 71 with a threshold pressure value. In the first case, there is almost no leak of negative-pressure air, and the detected pressure value is on the vacuum value side rather than the threshold value. Therefore, the execution of the operation flow proceeds to step S5. In step S5, the mounting control unit 9 determines whether or not the suction operation of all the suction nozzles 45 has ended. If not, the execution of the operation flow returns to step S2 while paying attention to the next suction nozzle 45. Then, the repetition loop from step S2 to step S5 is repeated the number of times corresponding to the number of suction nozzles 45.

[0060] When the suction operations of all the suction nozzles 45 are completed by repetition (time t4), the execution of the operation flow proceeds from step S5 to step S6. In step S6, the negative-pressure supply control unit 72 compares the pressure value detected by the negative-pressure detection unit 71 with a predetermined value. In the first case, there is almost no leak of negative-pressure air, and the detected pressure value is on the vacuum value side rather than the predetermined value (normal state). Therefore, the execution of the operation flow proceeds to step S7. In step S7, the negative-pressure supply control unit 72 stops the ejector 62 (time t5).

[0061] In the next step S8, the mounting control unit 9 moves the suction nozzle 45 above the mounting position of the substrate K (time t7). In the next step S9, the mounting control unit 9 lowers the suction nozzle 45 toward the mounting position. As a result, the valve device 53 is automatically operated. Then, the suction nozzle 45 shifts from the negative pressure state to the positive pressure state and performs the mounting operation. When the suction nozzle 45 rises thereafter, the valve device 53 is automatically operated, and the suction nozzle 45 shifts from the positive pressure state to the atmosphere open state. The next step S10 is omitted because the ejector 62 has already stopped in step S7, and the execution of the operation flow proceeds to step S12.

[0062] In step S12, the mounting control unit 9 determines whether or not the mounting operations of all the suction nozzles 45 have been completed. If not, the execution of the operation flow returns to step S8 while paying attention to the next suction nozzle 45. Then, the repetition loop from step S8 to step S12 is repeated the number of times corresponding to the number of suction nozzles 45. When the mounting operations of all the suction nozzles 45 are completed by repetition (time t11), the suction mounting cycle ends. In the first case, the parallel operations of the first negative pressure supply unit 61 and the ejector 62 are performed, but as a result, the operation of the ejector 62 is not necessary.

[0063] Next, a second case where any one of the plurality of suction nozzles 45 fails to adsorb the component properly and a negative pressure air leak occurs will be described by using FIGS. 4 and 6 in combination. In the second case, after the suction operation by the repetition loop from step S2 to step S5, a negative pressure air leak has occurred from at least one suction nozzle 45. Then, when the negative pressure supply control unit 72 makes a comparison in step S6, the detected pressure value becomes closer to the atmospheric pressure value than the predetermined value (downward trend state). Therefore, the execution of the operation flow proceeds to step S8 without passing through step S7.

[0064] As a result, as shown in FIG. 6, the ejector 62 also operates after time t5. Therefore, compared with the first case, the parallel operation time of the first negative pressure supply unit 61 and the ejector 62 is ensured to be longer, the decrease in the pressure value of the negative pressure air (increase in absolute pressure) is suppressed, and in many cases, the pressure value recovers to the normal state. That is, in the second case, a remarkable effect is produced by the parallel operation of the first negative pressure supply unit 61 and the ejector 62.

[0065] Also, each time the mounting operation is performed by the loop from step S8 to step S12, step S10 is executed. In step S10, the negative pressure supply control unit 72 determines whether it is the stop timing of the ejector 62. Then, in step S11 when it is the stop timing, the negative pressure supply control unit 72 stops the ejector 62 (time t9 in FIG. 6).

[0066] In FIG. 6, the stop timing of the ejector 62 (end time t9 of the operation time) is set to coincide with the end time t9 of the required time period. Thereby, the time period of positive pressure consumption in the ejector 62 extends until time t10. Also, the end time t11 of the negative pressure effect is delayed by approximately the response delay time DT from the end time t9 and generally coincides with the end time t11 of the mounting time period TW3. Therefore, throughout the mounting time period TW3, the negative pressure effect by the ejector 62 occurs. As a result, also in the second case, the decrease in the negative pressure in the suction nozzle 45 is suppressed, the possibility of dropping the component is eliminated, and the mounting operation is stabilized. Note that the stop timing of the ejector 62 (end time t9 of the operation time) can be changed.

[0067] Next, a third case with a large leakage of negative-pressure air will be described. In the third case, during the suction operation by the repetitive loop from step S2 to step S5, a large amount of negative-pressure air leaks from at least one suction nozzle 45. Then, when the negative-pressure supply control unit 72 makes a comparison in step S4, the detected pressure value will be on the atmospheric pressure value side rather than the threshold pressure value (negative-pressure drop state). The negative-pressure supply control unit 72 notifies the mounting control unit 9 that it has entered the negative-pressure drop state. The mounting control unit 9 that has received the notification of the negative-pressure drop state terminates the suction operation and shifts to the mounting operation. In other words, the execution of the operation flow proceeds directly from step S4 to step S8.

[0068] As a result, the suction operations of some of the suction nozzles 45 are omitted, and immediately the mounting head 43 moves to the substrate K, and a smaller number of suction nozzles 45 than normal perform the mounting operation. Therefore, before the pressure value exceeds the limit value and approaches the atmospheric pressure value, the mounting operation can be completed in a short time, and the component can be prevented from falling.

[0069] In the component mounting machine 1 of the first embodiment, the first negative-pressure supply unit 61 operates throughout the time period from when at least the suction nozzle 45 starts the suction operation until the mounting operation starts, and maintains a negative pressure inside the suction nozzle 45. Here, when the suction nozzle 45 cannot suck the component, or even if it can suck the component but the posture of the component or the state of the suction surface is not good, negative-pressure air leaks and a negative-pressure drop occurs inside the suction nozzle 45. Also, since it is configured with a plurality of suction nozzles, when a negative-pressure drop occurs in a certain suction nozzle 45, the negative-pressure drop spreads to other communicating suction nozzles 45. When such a negative-pressure drop occurs, the negative-pressure detection unit 71 detects the negative-pressure drop, and the negative-pressure supply control unit 72 operates the ejector 62. Therefore, by the parallel operation of the first negative-pressure supply unit 61 and the ejector 62, the negative-pressure drop inside the suction nozzle 45 can be suppressed.

[0070] In addition, since the negative pressure inside the suction nozzle 45 can be maintained well to enhance the component holding force, the moving speed of the suction nozzle 45 can be increased more than before. Moreover, due to the enhanced component holding force, the suction nozzle 45 can adsorb, convey, and mount heavier components than before.

[0071] 5. Modified Form (Modification of the Operation of the Ejector 62) In the first embodiment, considering the response delay time DT of the ejector 62, the negative pressure supply control unit 72 operated the ejector 62 in advance regardless of necessity. However, the operation of the ejector 62 is not ultimately necessary in the frequently occurring first case and wastes positive pressure air. Therefore, in the modified form, without changing the overall configuration of the component mounting machine 1 (see FIG. 1) and the configuration of the air supply system 5 (see FIG. 2), the operation of the ejector 62 under the control from the negative pressure supply control unit 72 is modified to eliminate the waste of positive pressure air.

[0072] In the modified form, mainly through the joint control of the negative pressure supply control unit 72 and the mounting control unit 9, the operation flow of the suction operation shown in FIG. 7 is advanced. Specifically described, at the start of the suction and mounting cycle, the ejector 62 does not operate. Then, in step S21, the mounting control unit 9 moves the suction nozzle 45 above the supply position 32 of the component supply device 3. In the next step S22, the mounting control unit 9 lowers the suction nozzle 45 toward the supply position 32. As a result, the valve device 53 is automatically operated, and the suction nozzle 45 shifts from the atmosphere-open state to the negative pressure state and performs the suction operation.

[0073] In the next step S23, the negative pressure supply control unit 72 compares the pressure value detected by the negative pressure detection unit 71 with the threshold pressure value. In the above-mentioned third case, in other words, when the pressure value is on the atmospheric pressure value side rather than the threshold pressure value (negative pressure drop state), the execution of the operation flow proceeds directly from step S23 to step S8 in FIG. 4. In this case, it is preferable to operate the ejector 62. On the other hand, in the above-mentioned first and second cases, the pressure value is on the vacuum value side rather than the threshold pressure value, and the execution of the operation flow proceeds to step S24.

[0074] In step S24, the negative pressure supply control unit 72 compares the pressure value detected by the negative pressure detection unit 71 with a predetermined value. Note that the predetermined value used in the modified form may be different from the predetermined value in the first embodiment. That is, the predetermined value in the first embodiment corresponds to the pressure value at which the ejector 62 becomes unnecessary, while the predetermined value in the modified form corresponds to the pressure value at which the ejector 62 is required, so it is preferably set higher than in the first embodiment. In the first case, there is almost no leakage of negative pressure air, and the detected pressure value is on the vacuum value side relative to the predetermined value. Therefore, the execution of the operation flow proceeds to step S27. On the other hand, in the second case, the detected pressure value is on the atmospheric pressure value side relative to the predetermined value (decreasing tendency state), and the execution of the operation flow proceeds to step S25.

[0075] In step S25, the negative pressure supply control unit 72 operates the ejector 62. In the next step S26, the mounting control unit 9 waits until the response delay time DT elapses without proceeding with the suction operation of the next suction nozzle 45. Note that the waiting time in step S26 may be reduced or omitted by providing the ejector 62 at a position close to the suction nozzle 45 to reduce the response delay time DT. By the parallel operation of the first negative pressure supply unit 61 and the ejector 62, the pressure value of the negative pressure air recovers to the normal state. After the end of step S26, the execution of the operation flow proceeds to step S27.

[0076] In step S27, the mounting control unit 9 determines whether or not the suction operations of all the suction nozzles 45 have been completed. If not, the execution of the operation flow returns to step S21 while paying attention to the next suction nozzle 45. Then, the loop from step S21 to step S27 is repeated the number of times corresponding to the number of suction nozzles 45. When the suction operations of all the suction nozzles 45 are completed by repetition, the execution of the operation flow proceeds from step S27 to step S8 in FIG. 4, and the mounting operation is started.

[0077] In the deformed state, in the first case, the ejector 62 does not operate, and in the second and third cases, the ejector 62 operates. Therefore, the ejector 62 can be operated only when necessary to eliminate the waste of positive-pressure air.

[0078] 6. Second Embodiment Next, the air supply system 5A of the second embodiment will be described with reference to FIG. 8. In the second embodiment, the component mounter 1 has a dual-head type structure including two mounting heads (435, 436). Corresponding to the two mounting heads (435, 436), the air supply system 5A includes two sets of negative-pressure air passages (515, 516), two sets of positive-pressure air passages (525, 526), a first negative-pressure supply unit 61, two sets of ejectors (625, 626) corresponding to a second negative-pressure supply unit, two negative-pressure detection units (715, 716), a negative-pressure supply control unit 72, a positive-pressure supply unit 81, and the like. In FIG. 8, the configuration of the air supply system 5A inside each of the two mounting heads (435, 436) is the same as that in FIG. 2.

[0079] One end side of the first negative-pressure air passage 515 branches into two systems at the branch position 6D and is communicated in parallel with the first negative-pressure supply unit 61 and the ejector 625. The other end side of the negative-pressure air passage 515 is communicated with the mounting head 435, branches into the same number of systems as the number of suction nozzles 45, and is respectively communicated with the valve device 53.

[0080] Similar to the first negative-pressure air passage 515, one end side of the second negative-pressure air passage 516 branches into two systems at the branch position 6D and is communicated in parallel with the first negative-pressure supply unit 61 and the ejector 626. The other end side of the negative-pressure air passage 516 is communicated with the mounting head 436, branches into the same number of systems as the number of suction nozzles 45, and is respectively communicated with the valve device 53. As shown in the drawing, the negative-pressure air passage 515 and the negative-pressure air passage 516 merge in front of the first negative-pressure supply unit 61. That is, the first negative-pressure supply unit 61 is commonly provided for the two mounting heads (435, 436). On the other hand, the ejectors (625, 626) are individually provided for the two mounting heads (435, 436).

[0081] One end of the first positive pressure air flow path 525 communicates with the positive pressure supply unit 81 via the positive pressure valve 85. The other end of the positive pressure air flow path 525 communicates with the mounting head 435 and branches into the same number of lines as the number of suction nozzles 45, and each communicates with the valve device 53.

[0082] Similar to the first positive pressure air flow path 525, one end of the second positive pressure air flow path 526 communicates with the positive pressure supply unit 81 via the positive pressure valve 85. The other end of the positive pressure air flow path 526 communicates with the mounting head 436 and branches into the same number of lines as the number of suction nozzles 45, and each communicates with the valve device 53. As shown in the figure, the positive pressure air flow path 525 and the positive pressure air flow path 526 merge in front of the positive pressure supply unit 81. That is, the positive pressure supply unit 81 is provided in common for the two mounting heads (435, 436).

[0083] The positive pressure supply unit 81 has the discharge side of the regulator valve 84 branched and communicates with the on-off valves 63 of the two ejectors (625, 626). The positive pressure supply unit 81 contributes to the generation of negative pressure air and serves as part of the two second negative pressure supply units. Further, the positive pressure supply unit 81 has the discharge side of the regulator valve 84 branched and communicates with the two positive pressure valves 85, and supplies positive pressure air to the suction nozzles 45 of the two mounting heads (435, 436) via the positive pressure air flow paths (525, 526).

[0084] The first negative pressure detection unit 715 is provided in communication with the negative pressure air flow path 515 in the mounting head 435. The second negative pressure detection unit 716 is provided in communication with the negative pressure air flow path 516 in the mounting head 436. That is, the negative pressure detection units (715, 716) are provided individually for the two mounting heads (435, 436). The negative pressure supply control unit 72 (omitted in Fig. 8) controls the operation of the ejector 625 based on the pressure value detected by the negative pressure detection unit 715. Further, the negative pressure supply control unit 72 controls the operation of the ejector 626 based on the pressure value detected by the negative pressure detection unit 716.

[0085] As shown in FIG. 8, air can flow bidirectionally between the negative pressure air flow path 515 and the negative pressure air flow path 516. However, due to restrictions on the passage cross-sectional area and the like, the pressure values detected by two separately arranged negative pressure detection units (715, 716) can be different. In other words, the pressure values can be different between the suction nozzle 45 of the mounting head 435 and the suction nozzle 45 of the mounting head 436. For this reason, the negative pressure supply control unit 72 performs individual control for each mounting head (435, 436). In the second embodiment, although the number of mounting heads (435, 436) is different from that of the first embodiment, the same operations as those of the first embodiment can be performed, and the same effects as those of the first embodiment occur.

[0086] 7. Third Embodiment Next, the air supply system 5B of the third embodiment will be described with reference to FIG. 9. In the third embodiment, the component mounter 1 has a dual-head type structure, similar to the second embodiment. Corresponding to the two mounting heads (435, 436), the air supply system 5A includes two sets of negative pressure air flow paths (515, 516), two sets of positive pressure air flow paths (525, 526), a first negative pressure supply unit 61, a second negative pressure supply unit 67, two negative pressure detection units (715, 716), a negative pressure supply control unit 72, and a positive pressure supply unit 87, etc. In FIG. 9, the configuration of the air supply system 5B inside each of the two mounting heads (435, 436) is the same as that in FIG. 2.

[0087] One end side of the first negative pressure air flow path 515 branches into two systems at the branch position 6D and is connected in parallel to the first negative pressure supply unit 61 and the second negative pressure supply unit 67. The other end side of the negative pressure air flow path 515 is connected to the mounting head 435, branches into the same number of systems as the number of suction nozzles 45, and is respectively connected to the valve device 53.

[0088] Similar to the first negative-pressure air flow path 515, one end side of the second negative-pressure air flow path 516 branches into two systems at the branch position 6D and is communicated with the first negative-pressure supply unit 61 and the second negative-pressure supply unit 67 in parallel. The other end side of the negative-pressure air flow path 516 is communicated with the mounting head 436, branches into the same number of systems as the number of suction nozzles 45, and is respectively communicated with the valve device 53. As shown in the figure, the negative-pressure air flow path 515 and the negative-pressure air flow path 516 merge before the first negative-pressure supply unit 61. Further, the negative-pressure air flow path 515 and the negative-pressure air flow path 516 merge before the second negative-pressure supply unit 67.

[0089] The second negative-pressure supply unit 67 is provided in common for the two mounting heads (435, 436). The second negative-pressure supply unit 67 is configured, for example, using an air pump (vacuum pump) provided on the base 10. The second negative-pressure supply unit 67 configured using an air pump has a response delay time DT similar to that of the ejector 62.

[0090] One end side of the first positive-pressure air flow path 525 is communicated with the positive-pressure supply unit 87 via the positive-pressure valve 85. The other end side of the positive-pressure air flow path 525 is communicated with the mounting head 435, branches into the same number of systems as the number of suction nozzles 45, and is respectively communicated with the valve device 53.

[0091] Similar to the first positive-pressure air flow path 525, one end side of the second positive-pressure air flow path 526 is communicated with the positive-pressure supply unit 87 via the positive-pressure valve 85. The other end side of the positive-pressure air flow path 526 is communicated with the mounting head 436, branches into the same number of systems as the number of suction nozzles 45, and is respectively communicated with the valve device 53. As shown in the figure, the positive-pressure air flow path 525 and the positive-pressure air flow path 526 merge before the positive-pressure supply unit 87.

[0092] The positive-pressure supply unit 87 is provided in common for the two mounting heads (435, 436). The positive-pressure supply unit 87 is arranged on the base 10. The positive-pressure supply unit 87 has, for example, a compressor and a pressure accumulation tank in which positive-pressure air is accumulated by the compressor.

[0093] The first negative pressure detection unit 715 is provided in communication with the negative pressure air flow path 515 in the mounting head 435. The second negative pressure detection unit 716 is provided in communication with the negative pressure air flow path 516 in the mounting head 436. That is, the negative pressure detection units (715, 716) are provided individually for the two mounting heads (435, 436). The negative pressure supply control unit 72 controls the operation of the second negative pressure supply unit 67 based on the pressure value on the inferior side (the side closer to the atmospheric pressure value) among the two pressure values detected by the two negative pressure detection units 715.

[0094] As shown in FIG. 9, air can flow bidirectionally between the negative pressure air flow path 515 and the negative pressure air flow path 516. However, due to restrictions on the passage cross-sectional area and the like, the pressure values detected by the two negative pressure detection units (715, 716) can be different. For this reason, when a tendency of a decrease in negative pressure is detected in at least one of the two pressure values, the negative pressure supply control unit 72 operates the second negative pressure supply unit 67 to supply negative pressure air to the two-system negative pressure air flow paths (515, 516) and suppress the decrease in negative pressure. In the third embodiment, the number of mounting heads (435, 436) and the structures of the second negative pressure supply unit 67 and the positive pressure supply unit 87 are different from those in the first embodiment, but the same operations as in the first embodiment can be performed, and the same effects as in the first embodiment occur.

[0095] 8. Applications and Modifications of the Embodiment In addition, the modified forms of the first embodiment can be applied to the second embodiment and the third embodiment. Further, at least one of the first negative pressure supply unit 61, the ejectors (62, 625, 626), the second negative pressure supply unit 67, and the positive pressure supply unit 81 may be arranged inside the mounting head (43, 435, 436) or the rotary tool 44. Furthermore, the air supply systems (5, 5A, 5B) can be changed in terms of the communication system configuration, and the types, structures, numbers, and arrangements of valves can also be changed. The first to third embodiments can have various other applications and modifications.

Explanation of Reference Numerals

[0096] 1: Component mounting machine 10: Base 2: Substrate transfer device 3: Component supply device 4: Component transfer device 43, 435, 436: Mounting head 44: Rotary tool 45: Suction nozzle 5, 5A, 5B: Air supply system 51, 515, 516: Negative pressure air flow path 52, 525, 526: Positive pressure air flow path 53: Valve device 54: Nozzle side air flow path 55: Atmosphere air flow path 61: First negative pressure supply section 62, 625, 626: Ejector 63: On-off valve 64: Check valve 67: Second negative pressure supply section 71, 715, 716: Negative pressure detection section 72: Negative pressure supply control section 81, 87: Positive pressure supply section 9: Mounting control section DT: Response delay time

Claims

1. An adsorption nozzle that performs an adsorption operation of supplying negative pressure air to adsorb a component and also performs a mounting operation of blocking the negative pressure air to mount the component on a substrate, A first negative pressure supply unit capable of supplying the negative pressure air to the adsorption nozzle throughout a time period from when the adsorption nozzle starts the adsorption operation until it starts the mounting operation, A second negative pressure supply unit capable of supplying the negative pressure air to the adsorption nozzle, A negative pressure detection unit that directly or indirectly detects a pressure value of the negative pressure air supplied to the adsorption nozzle, A negative pressure supply control unit that operates the second negative pressure supply unit when the detected pressure value of the negative pressure air is closer to the atmospheric pressure value than a predetermined value set between the atmospheric pressure value and the vacuum value, Comprising, The negative pressure supply control unit, Before or at the start of the adsorption operation of the adsorption nozzle, operates the second negative pressure supply unit in advance, At the end or after the end of the adsorption operation, when the pressure value of the negative pressure air is the same as the predetermined value or closer to the vacuum value than the predetermined value, stops the second negative pressure supply unit, and when the pressure value of the negative pressure air is closer to the atmospheric pressure value than the predetermined value, continues the operation of the second negative pressure supply unit until the mounting operation of the adsorption nozzle, Component mounting machine.

2. An adsorption nozzle that performs an adsorption operation of supplying negative pressure air to adsorb a component and also performs a mounting operation of blocking the negative pressure air to mount the component on a substrate, A first negative pressure supply unit capable of supplying the negative pressure air to the adsorption nozzle throughout a time period from when the adsorption nozzle starts the adsorption operation until it starts the mounting operation, A second negative pressure supply unit capable of supplying the negative pressure air to the adsorption nozzle, A negative pressure detection unit that directly or indirectly detects a pressure value of the negative pressure air supplied to the adsorption nozzle, A negative pressure supply control unit that operates the second negative pressure supply unit when the detected pressure value of the negative pressure air is closer to the atmospheric pressure value than a predetermined value set between the atmospheric pressure value and the vacuum value, A mounting head having a plurality of the adsorption nozzles, A mounting control unit that controls the plurality of the adsorption nozzles and the mounting head, and comprising, When the negative pressure detection unit detects a negative pressure drop state in which the pressure value of the negative pressure air approaches the atmospheric pressure value exceeding a threshold pressure value set between the atmospheric pressure value and the predetermined value during the plurality of adsorption nozzles performing the adsorption operation in order, the mounting control unit interrupts the adsorption operation and shifts to the mounting operation, The negative pressure supply control unit When, during the suction operation of the suction nozzle, the pressure value of the negative pressure air approaches the atmospheric pressure value exceeding the predetermined value, the second negative pressure supply unit is operated, and further, the operation of the second negative pressure supply unit is continued until the mounting operation of the suction nozzle. Component mounting machine

3. A suction nozzle that performs a suction operation of sucking a component by supplying negative pressure air and a mounting operation of mounting the component on a substrate by blocking the negative pressure air, A first negative pressure supply unit capable of supplying the negative pressure air to the suction nozzle throughout a time period from when the suction nozzle starts the suction operation to when the mounting operation starts, A second negative pressure supply unit capable of supplying the negative pressure air to the suction nozzle, A negative pressure detection unit that directly or indirectly detects the pressure value of the negative pressure air supplied to the suction nozzle, A negative pressure supply control unit that operates the second negative pressure supply unit when the detected pressure value of the negative pressure air is closer to the atmospheric pressure value than a predetermined value set between the atmospheric pressure value and the vacuum value, A plurality of mounting heads each having a plurality of the suction nozzles, The first negative pressure supply unit is provided in common for the plurality of mounting heads, The second negative pressure supply unit and the negative pressure detection unit are provided individually for the plurality of mounting heads, Component mounting machine

4. A suction nozzle that performs a suction operation of sucking a component by supplying negative pressure air and a mounting operation of mounting the component on a substrate by blocking the negative pressure air, A first negative pressure supply unit capable of supplying the negative pressure air to the suction nozzle throughout a time period from when the suction nozzle starts the suction operation to when the mounting operation starts, A second negative pressure supply unit capable of supplying the negative pressure air to the suction nozzle, A negative pressure detection unit that directly or indirectly detects the pressure value of the negative pressure air supplied to the suction nozzle, Comprising a negative pressure supply control unit that operates the second negative pressure supply unit when the detected pressure value of the negative pressure air is closer to the atmospheric pressure value than a predetermined value set between the atmospheric pressure value and the vacuum value, The negative pressure supply control unit performs control in consideration of a response delay time required from when the second negative pressure supply unit starts operating until the negative pressure air is supplied to the suction nozzle, Component mounting machine

5. A suction nozzle that performs a suction operation of sucking a component by supplying negative pressure air and a mounting operation of mounting the component on a substrate by blocking the negative pressure air, A first negative pressure supply unit capable of supplying the negative pressure air to the suction nozzle throughout a time period from when the suction nozzle starts the suction operation until the mounting operation starts; A second negative pressure supply unit capable of supplying the negative pressure air to the suction nozzle; A negative pressure detection unit that directly or indirectly detects a pressure value of the negative pressure air supplied to the suction nozzle; A negative pressure supply control unit that operates the second negative pressure supply unit when the detected pressure value of the negative pressure air is closer to an atmospheric pressure value than a predetermined value set between the atmospheric pressure value and a vacuum value; and The first negative pressure supply unit continuously operates during the operation of the component mounting machine, Component mounting machine.

6. The component mounting machine according to claim 1 or 2, wherein the predetermined value is set based on a condition that does not drop the component when the suction nozzle moves in a state of sucking the component.

7. The component mounting machine according to any one of claims 1 to 6, wherein the first negative pressure supply unit includes a negative pressure source disposed inside the machine or a negative pressure air supply path that supplies the negative pressure air from a negative pressure source disposed outside the machine into the machine.

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