Determination tool and shape determination method

Abstract

To provide a tool for determination capable of simply determining the shape of a tip of a working tool.SOLUTION: A tool for determination to be used when determining the shape of a tip of a working tool which works an object to be worked retained by a table while relatively moving with respect to the table for retaining the object to be worked includes: a bottom surface which is retained by the table; and a flat inclination surface which is inclined with respect tp the bottom surface, is arranged in such a direction as to intersect with a direction of the relative movement, and allows the tip of the working tool to cut therethrough.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a determination tool used when determining the shape of the tip of a processing tool, and a shape determination method using this determination tool.

Background Art

[0002] In electronic devices typified by mobile phones and personal computers, a device chip having devices such as electronic circuits is an essential component. The device chip is obtained by, for example, partitioning the surface side of a wafer made of a semiconductor material such as silicon into a plurality of regions by a division planned line (street), forming devices in each region, and then dividing the wafer along this division planned line.

[0003] When dividing a plate-shaped workpiece typified by a wafer into small pieces such as device chips, for example, a cutting device equipped with a processing tool called a cutting blade in which abrasive grains are dispersed in a binder is used. By rotating the cutting blade at high speed and cutting into the division planned line while supplying a liquid such as pure water, the workpiece can be cut and divided into a plurality of small pieces (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] By the way, when machining a workpiece with a machining tool such as a cutting blade, the tip of the machining tool wears and becomes rounded as machining progresses. When machining the workpiece with a machining tool having a rounded tip, the roundness of the tip of the machining tool is transferred to the workpiece, and the workpiece cannot be machined into a desired shape. Further, due to a decrease in strength caused by the roundness of the tip and an asymmetry in shape, the machining tool cut into the workpiece may vibrate, resulting in a decrease in machining quality.

[0006] Therefore, by cutting a machining tool into a flat plate-shaped member and observing the shape of the formed machining marks from the side of the plate-shaped member, it is determined as necessary whether the tip of the machining tool is rounded. However, in this method, since it is necessary to rearrange the plate-shaped member with respect to a camera or the like so that the shape of the machining marks can be observed from the side, it is time-consuming and takes a long time to complete the determination.

[0007] The present invention has been made in view of such problems, and an object thereof is to provide a determination tool capable of easily determining the shape of the tip of a machining tool, and a simple shape determination method using this determination tool.

Means for Solving the Problems

[0008] According to one aspect of the present invention, there is provided a determination tool used for determining the shape of the tip of a machining tool that machines a workpiece held on a table while relatively moving with respect to the table for holding the workpiece, the determination tool having a bottom surface held on the table, an inclined surface that is inclined with respect to the bottom surface and is arranged in a direction intersecting the direction of the relative movement, and a flat inclined surface that the tip of the machining tool cuts through. The processing tools are each a cutting blade or a grinding wheel that rotates around a spindle A determination tool is provided.

[0009] Preferably, the angle formed by the bottom surface and the inclined surface is 30° or more and 60° or less. Also, preferably, the determination tool is made of silicon or carbon.

[0010] According to another aspect of the present invention, there is provided a shape determination method used for determining the shape of the tip of a processing tool that processes a workpiece held on a table while relatively moving the workpiece with respect to the table. The method includes holding the bottom surface of a determination tool having a bottom surface and a flat inclined surface inclined with respect to the bottom surface on the table, cutting the tip of the processing tool into the determination tool so that the tip cuts through the inclined surface in a state where the inclined surface intersects the direction of the relative movement, and determining the shape of the tip of the processing tool by checking the shape of the machining mark formed on the inclined surface from the side opposite to the bottom surface of the determination tool when the tip cuts through the inclined surface. and the processing tools are each a cutting blade or a grinding wheel that rotates around a spindle A shape determination method is provided.

[0011] Preferably, the tip is cut into the determination tool so as not to cut out the end on the bottom surface side of the inclined surface. Also preferably, the tip is cut into the determination tool while relatively moving the processing tool and the table in the direction. Also preferably, when the end of the machining mark confirmed from the side opposite to the bottom surface is curved, it is determined that the tip of the processing tool is curved.

Advantages of the Invention

[0012] The determination tool according to one aspect of the present invention has a bottom surface held on a table and a flat inclined surface inclined with respect to the bottom surface and through which the tip of the processing tool cuts. Therefore, by simply cutting the tip into the determination tool so that the tip cuts through the inclined surface to form a machining mark on the inclined surface, the shape of this machining mark can be easily confirmed from the side opposite to the bottom surface of the determination tool.

[0013] That is, according to the determination tool according to one aspect of the present invention and the shape determination method according to another aspect, there is no need to rearrange the determination tool in order to confirm the shape of the machining mark corresponding to the shape of the tip of the processing tool. Therefore, compared with the conventional method, the shape of the tip of the processing tool can be easily determined.

Brief Description of the Drawings

[0014]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

DETAILED DESCRIPTION OF THE INVENTION

[0015] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view schematically showing the structure of a determination tool 1 according to the present embodiment. As shown in FIG. 1, the determination tool 1 has a substantially flat rectangular bottom surface 1a and an upper surface 1b on the side opposite to the bottom surface 1a, and is used, for example, when determining the shape of the tip of a machining tool (grinding wheel tool) in which abrasive grains are dispersed in a binder.

[0016] The portions (ends) corresponding to the four rectangular sides of the bottom surface 1a are connected to the upper surface 1b via the side surfaces 1c, 1d, 1e, and 1f, respectively. The bottom surface 1a and the upper surface 1b are generally parallel to each other, and the side surfaces 1c, 1d, 1e, and 1f are generally perpendicular to the bottom surface 1a and the upper surface 1b.

[0017] The determination tool 1 is provided with a groove 1g extending in a direction generally parallel to the portions corresponding to the two sides of the bottom surface 1a in contact with the side surfaces 1d and 1f. The upper end of the groove 1g opens to the upper surface 1b, and both longitudinal ends of the groove 1g reach both the side surface 1c and the side surface 1e. That is, due to this groove 1g, the upper surface 1b is divided into a first portion on the side of the side surface 1d and a second portion on the side of the side surface 1f.

[0018] The groove 1g has a vertical surface 1h that is generally perpendicular to the bottom surface 1a and the upper surface 1b and generally parallel to the side surface 1d, and an inclined surface 1i that is inclined with respect to the bottom surface 1a and the upper surface 1b. The inclined surface 1i is generally flat so as to form a predetermined angle with respect to the bottom surface 1a (or the upper surface 1b), for example.

[0019] There is no significant limitation on the angle θ1 formed between the bottom surface 1a (or the upper surface 1b) and the inclined surface 1i. However, when the angle θ1 formed between the bottom surface 1a and the inclined surface 1i is 30° or more and 60° or less, the shape of the tip of the processing tool can be sufficiently confirmed from the upper surface 1b side. Also, when the angle θ1 formed between the bottom surface 1a and the inclined surface 1i is 43° or more and 48° or less (typically 45°), the shape of the tip of the processing tool can be more precisely confirmed from the upper surface 1b side.

[0020] There is no particular limitation on the manufacturing method of the determination tool 1. For example, the determination tool 1 can be manufactured by forming the groove 1g in a plate-shaped member by any method such as cutting, laser processing, or etching. There is also no significant limitation on the material of the determination tool 1. The determination tool 1 may be made of a material that can be easily processed using the target processing tool.

[0021] However, if the determination tool 1 is made of a material with many pores such as a porous material, pores may overlap with the machining marks formed on the inclined surface 1i using the machining tool, and it may become impossible to sufficiently confirm the shape of the machining marks. Therefore, it is desirable to configure the determination tool 1 with a dense material having few pores. Examples of such materials include silicon and carbon.

[0022] Next, a shape determination method for determining the shape of the tip of the machining tool using the above-described determination tool 1 will be described. In the shape determination method according to the present embodiment, first, the bottom surface 1a of the determination tool 1 is held by the table of the machining apparatus (holding step). FIG. 2 is a perspective view schematically showing a state in which the determination tool 1 is held by a table (chuck table) 4 of a cutting apparatus (machining apparatus) 2.

[0023] As shown in FIG. 2, the cutting apparatus 2 used in the present embodiment includes a table 4 for holding a plate-shaped workpiece (not shown) typified by a semiconductor wafer. The table 4 includes, for example, a disk-shaped frame body 6 formed using a metal typified by stainless steel. On the upper surface side of the frame body 6, a concave portion 6a having a circular opening at the upper end is formed.

[0024] A holding plate 8 formed in a porous disk shape using ceramics or the like is fixed to the concave portion 6a of the frame body 6. The upper surface 8a of the holding plate 8 is configured to be generally flat and functions as a holding surface for holding the workpiece. The lower surface side of the holding plate 8 is connected to a suction source (not shown) such as an ejector via a flow path and a valve (not shown) provided inside the frame body 6.

[0025] When machining a workpiece with this cutting apparatus 2, for example, a tape (dicing tape) having a diameter larger than that of the workpiece is attached to the lower surface side of the workpiece. Further, an annular frame is fixed to surround the workpiece at the outer peripheral portion of the tape. In order to grip this annular frame, four clamps 10 are arranged around the frame body 6.

[0026] A rotary drive source such as a motor (not shown) is connected to the lower part of the frame body 6. The table 4 and the clamp 10 rotate around an axis (rotation axis) along the vertical direction (Z-axis direction) substantially perpendicular to the upper surface 8a so that the center of the upper surface 8a becomes the center of rotation by the force generated by this rotary drive source. Further, the frame body 6 is supported by a table moving mechanism (not shown), and the table 4 moves along the machining feed direction (X-axis direction) substantially parallel to the upper surface 8a by this table moving mechanism.

[0027] As shown in FIG. 2, the determination tool 1 is held on the table 4 on the bottom surface 1a side in a state of being supported by the annular frame 5 via a tape (dicing tape) 3, similarly to the workpiece. Therefore, before holding the determination tool 1 on the table 4, a tape 3 larger than the determination tool 1 is attached to the bottom surface 1a of the determination tool 1. Further, an annular frame 5 is fixed to the outer peripheral portion of the tape 3 so as to surround the determination tool 1.

[0028] When holding the bottom surface 1a of the determination tool 1 on the table 4, first, the lower surface of the tape 3 attached to the determination tool 1 (the surface opposite to the determination tool 1) is brought into contact with the upper surface 8a of the table 4. Further, the annular frame 5 fixed to the outer peripheral portion of the tape 3 is gripped by the four clamps 10. Then, the valve is opened and the negative pressure of the suction source is applied to the table 4. As a result, the bottom surface 1a of the determination tool 1 is held by the table 4 via the tape 3, and the upper surface 1b of the determination tool 1 is exposed upward.

[0029] After holding the bottom surface 1a of the determination tool 1 on the table 4, the tip of the machining tool used in the cutting device 2 is cut into the determination tool 1 so as to cut through the inclined surface 1i of the determination tool 1 (cutting step). FIG. 3 is a perspective view schematically showing a state in which the tip of the cutting blade (machining tool) 12 used in the cutting device 2 is cut into the determination tool 1. In FIG. 3, for convenience of explanation, the table 4 and the like for holding the determination tool 1 are omitted.

[0030] As shown in FIG. 3, above the determination tool 1 held by the table 4, a cutting unit (processing unit) 14 is arranged. The cutting unit 14 includes a cylindrical spindle housing 16. In the space inside the spindle housing 16, a part of the spindle 18 is accommodated so that the axis (rotation axis) is substantially parallel to the indexing feed direction (Y-axis direction) that is substantially perpendicular to the machining feed direction and the vertical direction.

[0031] A cutting blade 12 in which abrasive grains such as diamond are dispersed in a binder such as resin or metal is attached to one end side of the spindle 18 exposed from the spindle housing 16. A rotational drive source (not shown) such as a motor is connected to the other end side of the spindle 18, and the cutting blade 12 attached to one end side of the spindle 18 rotates together with the spindle 18 by the force generated by this rotational drive source.

[0032] The spindle housing 16 (cutting unit 14) is supported by, for example, a cutting unit moving mechanism (not shown). The cutting unit 14 moves along the indexing feed direction and the vertical direction by this cutting unit moving mechanism.

[0033] For example, after adjusting the vertical position of the cutting unit 14, while rotating the cutting blade 12, the table 4 is moved along the machining feed direction, and the cutting blade 12 is cut into the workpiece, so that the workpiece can be cut. That is, in the cutting device 2 of the present embodiment, while moving the cutting blade 12 with respect to the table 4 for holding the workpiece, the workpiece held by the table 4 is machined.

[0034] When cutting the tip of the cutting blade 12 into the determination tool 1, for example, the orientation around the axis of the table 4 is adjusted so that the inclined surface 1i of the determination tool 1 is arranged in a direction intersecting the machining feed direction (that is, the direction of relative movement). Specifically, the orientation of the table 4 is adjusted so that the longitudinal direction of the groove 1g (inclined surface 1i or vertical surface 1h) intersects the machining feed direction (direction of relative movement).

[0035] There is no restriction on the angle formed by the machining feed direction and the longitudinal direction of the groove 1g. However, the closer this angle is to being perpendicular, the easier it becomes to check the shape of the tip of the cutting blade 12. Typically, if the orientation of the table 4 is adjusted such that the angle formed by the machining feed direction and the longitudinal direction is 85° or more and 95° or less (that is, within the range of 90° ± 5°), the shape of the tip of the cutting blade 12 can be appropriately checked.

[0036] After (or before) adjusting the orientation of the table 4, the vertical position of the cutting unit 14 is adjusted. Specifically, the vertical position of the cutting unit 14 is adjusted such that the height of the tip (lower end) of the cutting blade 12 is lower than the height of the upper end (the end on the side of the upper surface 1b) of the inclined surface 1i of the determination tool 1. Also, the vertical position of the cutting unit 14 is adjusted such that the height of the tip (lower end) of the cutting blade 12 is higher than the height of the lower end (the end on the side of the bottom surface 1a) of the inclined surface 1i of the determination tool 1.

[0037] Then, as shown in FIG. 3, while rotating the cutting blade 12, the table 4 is moved along the machining feed direction to cause the cutting blade 12 to cut into the determination tool 1. FIG. 4 is a side view schematically showing the state in which the tip of the cutting blade 12 is cut into the determination tool 1. Note that in FIG. 4, for the sake of convenience of explanation, only the determination tool 1 and the cutting blade 12 are shown.

[0038] The orientation of the inclined surface 1i and the height of the cutting blade 12 with respect to the inclined surface 1i are adjusted as described above. Therefore, when the cutting blade 12 is cut into the determination tool 1, the tip of the cutting blade 12 cuts through the inclined surface 1i without cutting through the lower end (the end on the side of the bottom surface 1a) of the inclined surface 1i. As a result, a machining mark having a shape corresponding to the shape of the tip of the cutting blade 12 is formed on the inclined surface 1i of the determination tool 1.

[0039] After forming a machining mark on the inclined surface 1i, the shape of the tip of the cutting blade 12 is determined by checking the shape of this machining mark from the upper surface 1b side (the side opposite to the bottom surface 1a) of the determination tool 1 (shape determination step). FIG. 5 is a side view schematically showing a state of checking the shape of the machining mark formed on the inclined surface 1i of the determination tool 1. In FIG. 5, for convenience of explanation, only the main components for checking the shape of the machining mark are shown.

[0040] As shown in FIG. 5, above the determination tool 1 held by the table 4, a camera 20 capable of photographing this determination tool 1 is arranged. The camera 20 includes, for example, a two-dimensional optical sensor such as a CMOS (Complementary Metal Oxide Semiconductor) image sensor or a CCD (Charge Coupled Device) image sensor having sensitivity to visible light, and is fixed to the cutting unit 14. That is, the camera 20 moves along the indexing feed direction and the vertical direction together with the cutting unit 14 by the above-described cutting unit moving mechanism.

[0041] When checking the shape of the machining mark formed on the inclined surface 1i from the upper surface 1b side, for example, the position of the table 4 and the position of the camera 20 are adjusted so that the camera 20 is arranged directly above the machining mark. Then, from above the determination tool 1 (the upper surface 1b side, the side opposite to the bottom surface 1a), the camera 20 photographs the area including the machining mark on the inclined surface 1i. FIG. 6 is an example of an image 7 obtained by photographing the machining mark 1j formed on the inclined surface 1i of the determination tool 1 with the camera 20.

[0042] As described above, the inclined surface 1i of the determination tool 1 is inclined with respect to the bottom surface 1a of the determination tool 1 held by the table 4. Therefore, by photographing the inclined surface 1i of the determination tool 1 with the camera 20 from above the table 4, an image 7 in which the machining mark 1j reflecting the shape of the tip of the cutting blade 12 appears can be obtained. Then, based on the shape of the machining mark 1j shown in the image 7, the shape of the tip of the cutting blade 12 can be determined.

[0043] For example, as shown in FIG. 6, when the end 1k of the machining mark 1j located on the lower end side of the inclined surface 1i (on the vertical surface 1h side in Image 7) is curved, it is determined that the tip of the cutting blade 12 is curved and rounded. That is, it is determined that the corner that should exist at the tip of the cutting blade 12 has been lost due to wear. On the other hand, when the end 1k of the machining mark 1j located on the lower end side of the inclined surface 1i is linear (a shape with a corner), it is determined that a corner remains at the tip of the cutting blade 12.

[0044] The determination of the shape of the tip of the cutting blade 12 is performed, for example, by a control unit (computer) (not shown) that controls the cutting device 2 processing Image 7. The result of the determination is notified to the operator using a notification device (not shown) such as a warning light (light), a speaker (sound), or a display (display). However, the determination of the shape of the tip of the cutting blade 12 may be made based on the operator's subjective judgment. In this case, without acquiring Image 7 with the camera 20, the operator can also visually confirm the shape of the machining mark 1j.

[0045] As described above, since the determination tool 1 according to the present embodiment has the bottom surface 1a held on the table 4 and the flat inclined surface 1i that is inclined with respect to the bottom surface 1a and through which the tip of the cutting blade (processing tool) 2 passes, by simply cutting the tip of the cutting blade 12 into the determination tool 1 so that the tip of the cutting blade 12 passes through the inclined surface 1i to form the machining mark 1j on the inclined surface 1i, the shape of this machining mark 1j can be easily confirmed from the side opposite to the bottom surface 1a (upper surface 1b side) of the determination tool 1.

[0046] That is, according to the determination tool 1 and the shape determination method according to the present embodiment, in order to confirm the shape of the machining mark 1j corresponding to the shape of the tip of the cutting blade 12, it is not necessary to rearrange the determination tool 1. Therefore, compared with the conventional method, the shape of the tip of the cutting blade 12 can be easily determined.

[0047] Note that the present invention is not limited to the description of the above-described embodiments and can be implemented with various modifications. For example, in the above-described embodiment, the shape of the tip of the cutting blade (processing tool) 12 is determined based on the machining marks formed on the inclined surface 1i of the determination tool 1. However, in the same procedure, it is also possible to determine deformations such as bending of the cutting blade 12. In this case, it is preferable to machine the side wall on the vertical surface 1h side of the groove 1g in a stepped shape (a shape having a plurality of steps) so that deformations such as bending of the blade 12 can be easily determined.

[0048] Also, in the above-described embodiment, the cutting blade 12 is cut into the determination tool 1 by relatively moving the cutting blade 12 along the machining feed direction with respect to the table 4. However, the cutting blade 12 can also be cut into the determination tool 1 (the inclined surface 1i is cut out by the tip of the cutting blade 12) by relatively moving the cutting blade 12 along the vertical direction with respect to the table 4.

[0049] Also, in the above-described embodiment, the tape 3 is attached to the bottom surface 1a of the determination tool 1, and the bottom surface 1a of the determination tool 1 is held by the table 4 via this tape 3. However, a resin plate or the like can be attached to the bottom surface 1a of the determination tool 1, and the bottom surface 1a of the determination tool 1 can also be held by the table 4 via this plate or the like.

[0050] Also, in the above-described embodiment, the cutting blade 12 is cut only into the determination tool 1. For example, a dresser board used for dressing the cutting blade 2 is arranged beside the determination tool 1, and the cutting blade 12 is cut into the dresser board and the determination tool 1, so that the shape of the tip of the cutting blade 2 can be determined while dressing the cutting blade 2. Similarly, a workpiece can be arranged beside the determination tool 1, and the shape of the tip of the cutting blade 2 can be determined while detecting defects in the machining of the workpiece typified by chipping.

[0051] Further, for example, in the above-described embodiment, the shape of the tip of the cutting blade 12 is confirmed using the determination tool 1. However, this determination tool 1 can also be used when confirming the shape of the tip of other machining tools. FIG. 7 is a plan view schematically showing a state in which the tip of a grinding wheel (machining tool) 34 used in a grinding apparatus (machining apparatus) 32 is cut into the determination tool 1. This grinding apparatus 32, like the cutting apparatus 2, includes a table (chuck table) (not shown) for holding a plate-shaped workpiece (not shown).

[0052] A rotary drive source (not shown) such as a motor is connected to the lower part of the table. The table rotates around an axis (rotation axis) along the vertical direction or a direction slightly inclined from the vertical direction so that the center of the upper surface of the table becomes the center of rotation by the force generated by this rotary drive source. Further, the table is supported by a table movement mechanism (not shown), and moves along the horizontal direction by this table movement mechanism.

[0053] Above the table, a grinding unit (machining unit) 36 is arranged. The grinding unit 36 includes a cylindrical spindle housing (not shown). A part of the spindle 38 is accommodated in the space inside the spindle housing so that the axis (rotation axis) is substantially parallel to the vertical direction.

[0054] A grinding wheel 40 is attached to the lower end side of the spindle 38 exposed from the spindle housing. The grinding wheel 40 includes a disk-shaped base 42 to which the spindle 38 is attached on the upper surface side, and a plurality of grinding wheels (machining tools) 34 arranged annularly on the lower surface side of the base 42.

[0055] A rotary drive source (not shown) such as a motor is connected to the upper end side of the spindle 38, and the grinding wheel 40 attached to the lower end side of the spindle 38 rotates together with the spindle 38 by the force generated by this rotary drive source. That is, each grinding wheel 34 moves so as to revolve around the axis of the spindle 38.

[0056] The spindle housing (grinding unit 36) is supported, for example, by a grinding unit moving mechanism (not shown). The grinding unit 36 moves along the vertical direction by this grinding unit moving mechanism.

[0057] For example, after moving the table holding the workpiece below the grinding wheel 40, while rotating the grinding wheel 40 and the table 4, the grinding unit 36 is lowered, and the grinding wheel 34 is fed into the workpiece on the table, so that this workpiece can be ground. That is, in this grinding apparatus 32, while moving the grinding wheel 34 relative to the table for holding the workpiece, the workpiece held by the table is processed.

[0058] The shape determination method for determining the shape of the tip of the grinding wheel 34 is the same as the shape determination method for determining the shape of the tip of the cutting blade 12. Specifically, first, the bottom surface 1a of the determination tool 1 is held by the table of the grinding apparatus 32 (holding step). The detailed procedure is the same as that of the above-described embodiment. Note that the determination tool 1 is held by the table via, for example, a tape (not shown), but it is not necessary to fix an annular frame to the outer peripheral portion of the tape.

[0059] After the bottom surface 1a of the determination tool 1 is held by the table, the tip of the grinding wheel 34 is fed into the determination tool 1 so that the tip of the grinding wheel 34 cuts through the inclined surface 1i of the determination tool 1 (feeding step). FIG. 8 is a side view schematically showing a state where the tip of the grinding wheel 34 is fed into the determination tool 1. In FIG. 8, for convenience of explanation, only the determination tool 1 and the grinding wheel 34 are shown.

[0060] When feeding the tip of the grinding wheel 34 into the determination tool 1, for example, the direction around the axis of the table is adjusted so that the inclined surface 1i of the determination tool 1 is arranged in a direction intersecting the moving direction of the grinding wheel 34 (the direction of revolution, the relative moving direction with respect to the table). Specifically, the direction of the table is adjusted so that the longitudinal direction of the groove 1g (the inclined surface 1i or the vertical surface 1h) intersects the moving direction of the grinding wheel 34.

[0061] After adjusting the orientation of Table 4, as shown in FIG. 7, while rotating the grinding wheel 40, lower the grinding unit 36 to cut the grinding wheel 34 into the determination tool 1 on the table. However, at this time, do not rotate the table. By rotating the grinding wheel 40 without rotating the table in this way, the grinding wheel 34 will cut out the inclined surface 1i from a certain direction.

[0062] Also, stop the lowering of the grinding unit 36 in a state where the height of the tip (lower end) of the grinding wheel 34 is higher than the height of the lower end (the end on the bottom surface 1a side) of the inclined surface 1i of the determination tool 1. As a result, the tip of the grinding wheel 34 cuts out the inclined surface 1i without cutting out the lower end of the inclined surface 1i. As a result, on the inclined surface 1i of the determination tool 1, a processed mark having a shape corresponding to the shape of the tip of the grinding wheel 34 is formed.

[0063] After forming the processed mark on the inclined surface 1i, check the shape of this processed mark from the upper surface 1b side (the side opposite to the bottom surface 1a) of the determination tool 1 to determine the shape of the tip of the grinding wheel 34 (shape determination step). Specifically, for example, use a camera (not shown) of the grinding device 32 to photograph the area including the processed mark on the inclined surface 1i. FIG. 9 is an example of an image 9 obtained by photographing the processed mark 1l formed on the inclined surface 1i of the determination tool 1 with a camera.

[0064] As described above, the inclined surface 1i of the determination tool 1 is inclined with respect to the bottom surface 1a of the determination tool 1 held by the table. Therefore, by photographing the inclined surface 1i of the determination tool 1 from above the table 4 with a camera, an image 9 in which the processed mark 1l reflecting the shape of the tip of the grinding wheel 34 appears can be obtained. And based on the shape of the processed mark 1l shown in the image 9, the shape of the tip of the grinding wheel 34 can be determined.

[0065] For example, as shown in FIG. 9, when the end 1m of the machining mark 1l located on the lower end side of the inclined surface 1i (the vertical surface 1h side in Image 9) is curved, it is determined that the tip of the grinding wheel 34 is curved and rounded. That is, it is determined that the angle that should exist at the tip of the grinding wheel 34 has been lost due to wear. On the other hand, when the end 1m of the machining mark 1l located on the lower end side of the inclined surface 1i is linear (an angular shape), it is determined that an angle remains at the tip of the cutting blade 12.

[0066] The determination of the shape of the tip of the cutting blade 12 is performed, for example, by a control unit (computer) (not shown) that controls the grinding device 32 processing Image 9. By using this Image 9 (machining mark 1l), the control unit can also calculate the width of the grinding wheel 34 and the like.

[0067] The results of the determination and the like are notified to the operator using notification devices (not shown) such as warning lights (light), speakers (sound), and displays (display). However, the determination of the shape of the tip of the grinding wheel 34 may be made based on the operator's subjective judgment. In this case, without acquiring Image 9 with a camera, the operator can also visually confirm the shape of the machining mark 1l.

[0068] In the above-described embodiments and modifications, the shape of the tip of the cutting blade (processing tool) 12 and the grinding wheel (processing tool) 34 is confirmed using the determination tool 1 having the groove 1g including the vertical surface 1h and the inclined surface 1i. However, the determination tool according to the present invention does not necessarily have to have the groove 1g as described above.

[0069] FIG. 10 is a perspective view schematically showing the structure of the determination tool 11 according to the first modification. As shown in FIG. 10, the determination tool 11 according to the first modification has a substantially flat rectangular bottom surface 11a and an upper surface 11b on the side opposite to the bottom surface 11a. The portions (ends) corresponding to the four sides of the rectangular shape of the bottom surface 11a are connected to the upper surface 1b via side surfaces 11c, 11e, 11f, and inclined surface 11i, respectively.

[0070] The bottom surface 11a and the top surface 11b are generally parallel to each other, and the side surfaces 11c, 11e, and 11f are generally perpendicular to the bottom surface 11a and the top surface 11b. The inclined surface 11i is formed to be generally flat at a predetermined angle with respect to the bottom surface 11a (or the top surface 11b), similar to the inclined surface 1i of the above-described embodiment.

[0071] The angle θ2 formed between the bottom surface 11a (or the top surface 11b) and the inclined surface 11i is the same as the angle θ1 according to the above-described embodiment. Also, the manufacturing method of the determination tool 11, the material of the determination tool 11, the usage method of the determination tool 11, the shape determination method using the determination tool 11, etc. are also the same as those of the above-described embodiment. Note that this determination tool 11 may be deformed into a triangular prism shape without the top surface 1b.

[0072] FIG. 11 is a perspective view schematically showing the structure of the determination tool 13 according to the second modification. As shown in FIG. 11, the determination tool 13 according to the second modification has a generally flat rectangular bottom surface 13a and a top surface 13b on the side opposite to the bottom surface 13a. The portions (ends) corresponding to the four sides of the rectangular shape of the bottom surface 13a are connected to the top surface 13b via the side surfaces 13c, 13d, 13e, and 13f, respectively.

[0073] The bottom surface 13a and the top surface 13b are generally parallel to each other, and the side surfaces 13c, 13d, 13e, and 13f are generally perpendicular to the bottom surface 13a and the top surface 13b. In this determination tool 13, a groove 13g is provided extending in a direction generally parallel to the portions corresponding to the two sides of the bottom surface 13a that are in contact with the side surfaces 13d and 13f.

[0074] The determination tool 13 is provided with a groove 13g extending in a direction generally parallel to the portions corresponding to two sides of the bottom surface 13a in contact with the side surface 13d and the side surface 13f. The upper end of the groove 13g opens to the upper surface 13b, and both longitudinal ends of the groove 13g reach both the side surface 13c and the side surface 13e. That is, the groove 13g divides the upper surface 13b into a first portion on the side surface 13d side and a second portion on the side surface 13f side.

[0075] The groove 13g has an inclined surface 13h inclined with respect to the bottom surface 13a and the upper surface 13b, and an inclined surface 13i inclined with respect to the bottom surface 13a and the upper surface 13b. The inclined surface 13h and the inclined surface 13i are formed substantially flat so as to form a predetermined angle with respect to the bottom surface 13a (or the upper surface 13b), for example.

[0076] The angle θ3 formed by the bottom surface 13a (or the upper surface 13b) and the inclined surface 13i is the same as the angle θ1 according to the above-described embodiment. Also, the angle formed by the bottom surface 13a (or the upper surface 13b) and the inclined surface 13h is the same as the angle θ1. However, it is not necessary to make the angle formed by the bottom surface 13a (or the upper surface 13b) and the inclined surface 13h the same as the angle θ3.

[0077] Furthermore, the manufacturing method of the determination tool 13, the material of the determination tool 13, the usage method of the determination tool 13, the shape determination method using the determination tool 13, etc. are also the same as those of the above-described embodiment. In the determination tool 13, since machining marks are formed on both the inclined surface 13h and the inclined surface 13i, it is easier to appropriately confirm the shape of the tip of the machining tool. Note that this determination tool 13 may be deformed into a shape without the upper surface 1b.

[0078] In addition, the structures, methods, etc. according to the above-described embodiments and each modification can be appropriately changed and implemented without departing from the scope of the object of the present invention.

Explanation of Reference Numerals

[0079] 1: Determination tool 1a: Bottom surface 1b: Upper surface 1c: Side 1d: Side 1e: Side 1f: Side 1g: Groove 1h: Vertical surface 1i: Inclined surface 1j: Machining mark 1k: End 1l: Machining mark 1m: End 3: Tape 5: Frame 7: Image 9: Image 11: Judgment tool 11a: Bottom surface 11b: Top surface 11c: Side 11e: Side 11f: Side 11i: Inclined surface 13: Judgment tool 13a: Bottom surface 13b: Top surface 13c: Side 13d: Side 13e: Side 13f: Side 13g: Groove 13h: Inclined surface 13i: Inclined surface 2: Cutting device (processing device) 4: Table (chuck table) 6: Frame body 6a: Recess 8: Holding plate 8a: Top surface 10: Clamp 12: Cutting blade (processing tool) 14: Cutting unit (processing unit) 16: Spindle housing 18: Spindle 20: Camera 32: Grinding device (processing device) 34: Grinding wheel (processing tool) 36: Grinding unit (processing unit) 38: Spindle 40: Grinding wheel 42: Base

Claims

1. A determination tool used for determining the shape of the tip of a processing tool that processes a workpiece held on a table while relatively moving with respect to the table for holding the workpiece, a bottom surface held on the table, has a flat inclined surface that is inclined with respect to the bottom surface and is arranged in a direction intersecting the direction of the relative movement, and through which the tip of the processing tool cuts, wherein the processing tool is a determination tool that is a cutting blade or a grinding wheel that rotates around a spindle, respectively.

2. The determination tool according to claim 1, wherein an angle formed between the bottom surface and the inclined surface is 30° or more and 60° or less.

3. The determination tool according to claim 1 or claim 2, which is composed of silicon or carbon.

4. A shape determination method used for determining the shape of the tip of a processing tool that processes a workpiece held on a table while relatively moving with respect to the table for holding the workpiece, holding the bottom surface of a determination tool having a bottom surface and a flat inclined surface inclined with respect to the bottom surface on the table, while the inclined surface intersects the direction of the relative movement, cutting the tip into the determination tool so that the tip of the processing tool cuts through the inclined surface, comprising determining the shape of the tip of the processing tool by checking the shape of the machining mark formed on the inclined surface on the side opposite to the bottom surface of the determination tool when the tip cuts through the inclined surface, wherein the processing tool is a shape determination method that is a cutting blade or a grinding wheel that rotates around a spindle, respectively.

5. The shape determination method according to claim 4, wherein the tip is cut into the determination tool so as not to cut through the end on the bottom surface side of the inclined surface.

6. The shape determination method according to claim 4 or claim 5, wherein the tip is cut into the determination tool while relatively moving the processing tool and the table in the direction.

7. The shape determination method according to any one of claims 4 to 6, wherein when the end of the machining mark confirmed from the side opposite to the bottom surface is curved, it is determined that the tip of the processing tool is curved.

Images