Sheet Feeding Device and Sheet Feeding Method

Abstract

To provide a sheet supply device capable of supplying an adhesive sheet including an air release cut in which releasing refuse is not generated, and a sheet supply method.SOLUTION: A sheet supply device EA comprises: feeding-out means 10 for feeding out an original roll RS in which an adhesive sheet base material AB is temporarily adhered to a release sheet RL; cutting means 20 including contour cut forming means 23 for forming a contour cut CU1 in a closed loop shape in the adhesive sheet base material AB in the original roll RS fed out by the feeding-out means 10 and forming an adhesive sheet AS inside of the contour cut CU1, and air release cut forming means 24 for forming an air release cut CU2 where air is released from a gap with an adherend WK inside of the contour cut CU1; and release means 30 for releasing the adhesive sheet AS from the release sheet RL and supplying the adhesive sheet AS. The air release cut forming means 24 forms the linear air release cut CU2 including no closed loop part.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a sheet feeding device and a sheet feeding method.

Background Art

[0002] A sheet feeding device for supplying an adhesive sheet is known (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the sheet feeding device 11 (sheet feeding device) described in Patent Document 1, a semiconductor wafer processing adhesive sheet S (adhesive sheet) having a through hole H is supplied as an air vent cut for venting air from between the wafer W (adherend). Therefore, the scraps of the adhesive sheet generated when the through hole H is formed cause inconveniences such as entering between the adhesive sheet and the adherend.

[0005] An object of the present invention is to provide a sheet feeding device and a sheet feeding method capable of supplying an adhesive sheet provided with an air vent cut in which scraps do not occur.

Means for Solving the Problems

[0006] The present invention employs the configuration described in the claims.

Effects of the Invention

[0007] According to the present invention, since a linear air vent cut having no closed loop portion is formed, it is possible to supply an adhesive sheet provided with an air vent cut in which scraps do not occur.

Brief Description of the Drawings

[0008]

Figure 1

Embodiments for Carrying Out the Invention

[0009] Hereinafter, an embodiment of the present invention will be described with reference to FIG. 1. In this embodiment, the X-axis, Y-axis, and Z-axis are orthogonal to each other. The X-axis and Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. Further, in this embodiment, based on the case when viewed from the front direction of FIG. 1(A) parallel to the Y-axis, when indicating directions, "up" is the arrow direction of the Z-axis, "down" is the opposite direction, "left" is the arrow direction of the X-axis, "right" is the opposite direction, "front" is the front direction in FIG. 1(A) parallel to the Y-axis, and "rear" is the opposite direction.

[0010] The sheet feeding device EA includes a feeding means 10 that performs a feeding process of feeding out a raw material roll RS in which an adhesive sheet base material AB is temporarily attached to a release sheet RL, a first cutting blade 23 as a contour cutting means for forming a closed-loop contour cut CU1 in the adhesive sheet base material AB in the raw material roll RS fed out by the feeding means 10 and forming an adhesive sheet AS inside the contour cut CU1, and a second cutting blade 24 as an air vent cutting means for forming an air vent cut CU2 for venting air between the inside of the contour cut CU1 and an adherend, which is a ring frame RF as a frame member. The sheet feeding device EA also includes a cutting means 20 that performs a cutting process, a peeling plate 30 as a peeling means that peels the adhesive sheet AS from the release sheet RL and supplies the adhesive sheet AS, a pressing roller 40 as a pressing means that presses and adheres the adhesive sheet AS to the adherend WK and the ring frame RF, and a support means 50 that supports the adherend WK and the ring frame RF, which constitute a sheet pasting device EA1. In the case of this embodiment, the adhesive sheet AS is formed in a shape having a size that covers the opening RF1 of the ring frame RF.

[0011] The feeding means 10 includes a support roller 11 that supports the base fabric RS, a guide roller 12 that guides the base fabric RS, a peeling roller 13 as a peeling member that folds back the unnecessary sheet US formed outside the contour cut CU1 and peels the unnecessary sheet US from the peeling sheet RL, a recovery roller 14 as a recovery means that is supported on the output shaft of a drive device (not shown) and constantly applies a predetermined tension to the unnecessary sheet US existing between the peeling roller 13 while the automatic operation of the sheet attaching device EA1 is being performed to recover the unnecessary sheet US, a drive roller 15 that is supported on the output shaft (not shown) of a rotation motor 15A as a drive device and sandwiches the peeling sheet RL with a pinch roller 15B, and a recovery roller 16 as a recovery means that is supported on the output shaft of a drive device (not shown) and constantly applies a predetermined tension to the peeling sheet RL existing between the pinch roller 15B while the automatic operation of the sheet attaching device EA1 is being performed to recover the peeling sheet RL.

[0012] The cutting means 20 includes a die-cutting roller 22 supported on the output shaft 21A of a rotation motor 21 as a drive device, a first cutting blade 23 supported on the circumferential surface of the die-cutting roller 22 as shown in the developed view of the die-cutting roller 22 with AA in FIG. 1(A), a second cutting blade 24 supported on the circumferential surface of the die-cutting roller 22 inside the first cutting blade 23, and a platen roller 25 that rotates synchronously with the die-cutting roller 22. The second cutting blade 24 is configured to form a linear air vent cut CU2 that does not have a closed loop portion. In the case of this embodiment, the second cutting blade 24 is formed so that the air vent cut CU2 extends in the feeding direction of the base fabric RS, and in an area of the adhesive sheet AS that is pasted so as to cover the opening RF1 of the ring frame RF as an adherend and is located outside the inner edge of the opening RF1 and inside the outer edge of the adhesive sheet AS, the air vent cut CU2 is formed in the adhesive sheet area AS1.

[0013] The support means 50 includes a linear motor 51 as a driving device, and a table 52 supported by a slider 51A of the linear motor 51 and having an adherend support surface 52A and a frame support surface 52B that can be respectively suction-held by a decompression means (holding means) such as a decompression pump or a vacuum ejector (not shown).

[0014] The operation of the above sheet sticking device EA1 will be described. First, with respect to the sheet sticking device EA1 in which each member is arranged at the initial position shown by the solid line in Fig. 1(A), after a user (hereinafter simply referred to as "user") of the sheet sticking device EA1 sets the original fabric RS as shown in the figure, a signal for starting automatic operation is input via an operation means such as an operation panel or a personal computer (not shown). Then, the feeding means 10 and the cutting means 20 drive the rotation motors 15A and 21, feed out the original fabric RS while forming the contour cut CU1 and the air vent cut CU2 in the adhesive sheet base material AB, and as shown in Fig. 1(A), when the leading end portion in the feeding direction of the leading adhesive sheet AS is peeled off by a predetermined length at the peeling edge 31 of the peeling plate 30, the driving of the rotation motors 15A and 21 is stopped.

[0015] Next, when the user or conveying means (not shown) such as a multi-joint robot or a belt conveyor places the adherend WK and the ring frame RF at predetermined positions on the adherend support surface 52A and the frame support surface 52B as shown in Fig. 1(A), the support means 50 drives a decompression means (not shown) to start adsorbing and holding the adherend WK and the ring frame RF on the adherend support surface 52A and the frame support surface 52B. Thereafter, when the support means 50 drives the linear motor 51 to move the table 52 to the left and the table 52 reaches a predetermined position, the feeding means 10 and the cutting means 20 drive the rotation motors 15A and 21 to feed the original web RS while forming the contour cut CU1 and the air vent cut CU2 in the adhesive sheet base material AB in accordance with the moving speed of the table 52. As a result, as shown by the two-dot chain line in Fig. 1(A), the leading adhesive sheet AS is peeled off from the release sheet RL at the release edge 31 of the release plate 30, and the adhesive sheet AS peeled off from the release sheet RL is pressed and attached to the ring frame RF and the adherend WK by the pressing roller 40. Here, as shown in Fig. 1(B), since the air vent cut CU2 formed in the adhesive sheet region AS1 is linear and does not have a closed loop portion, air bubbles that have entered between the ring frame RF and the adhesive sheet AS can escape to the outside without generating waste cut out from the adhesive sheet base material AB.

[0016] Next, when the entire leading adhesive sheet AS is attached to the ring frame RF and the adherend WK to form an integral object UP, and the leading end portion in the feeding direction of the next adhesive sheet AS following the leading adhesive sheet AS is peeled off by a predetermined length at the release edge 31 of the release plate 30, the feeding means 10 and the cutting means 20 stop driving the rotation motors 15A and 21. Then, when the table 52 supporting the integral object UP exits below the pressing roller 40, the support means 50 stops driving the linear motor 51, then stops driving the decompression means (not shown), and releases the adsorption and holding of the adherend WK and the ring frame RF on the adherend support surface 52A and the frame support surface 52B. Next, when the user or the conveying means (not shown) conveys the integral object UP to the next process, the support means 50 drives the linear motor 51 to return the table 52 to the initial position, and the same operations as above are repeated thereafter.

[0017] According to the embodiment as described above, since the linear air vent cut CU2 without a closed loop portion is formed, the adhesive sheet AS provided with the air vent cut CU2 where no air leakage occurs can be supplied.

[0018] As described above, the best configuration, method, etc. for carrying out the present invention are disclosed in the above description, but the present invention is not limited thereto. That is, although the present invention is mainly illustrated and described with respect to specific embodiments, without departing from the scope of the technical idea and object of the present invention, those skilled in the art can make various modifications to the above-described embodiments in terms of shape, material, quantity, and other detailed configurations. In addition, the descriptions limiting the shape, material, etc. disclosed above are exemplified for easy understanding of the present invention and do not limit the present invention. Therefore, the descriptions using the names of members with some or all of the limitations on those shapes, materials, etc. removed are included in the present invention.

[0019] For example, the feeding means 10 may support and guide the base material RS, the release sheet RL, and the unnecessary sheet US with a plate-like member, a shaft member, etc. instead of each roller such as the support roller 11 and the guide roller 12, or may support the base material RS in a fan-folded manner without winding it, or may fan-fold the release sheet RL and the unnecessary sheet US without winding them, or may employ a recovery means for recovering the release sheet RL and the unnecessary sheet US by cutting them into pieces with a shredder or the like or accumulating them randomly, or may not employ a recovery means.

[0020] The cutting means 20 may, for example, have a configuration in which the contour cutting means and the air vent cutting means are independent of each other, such as separating the first cutting blade 23 and the second cutting blade 24 and supporting them on separate die-cutting rollers. Or, the air vent cutting CU2 may be formed while forming the contour cutting CU1, or the air vent cutting CU2 may be formed after forming the contour cutting CU1, or the contour cutting CU1 may be formed after forming the air vent cutting CU2. Also, a driving device may be adopted as the cutting member approaching and separating means for approaching and separating the die-cutting roller 22 from the adhesive sheet base material AB. The air vent cutting means may be formed so that the air vent cutting CU2 extends in a direction intersecting the feeding direction of the raw sheet RS. Or, the air vent cutting CU2 may be formed in a linear shape, a curved line shape such as an arc shape, a U shape, an S shape, or a bent line shape such as a V shape or a W shape. Or, the air vent cutting CU2 may be formed so as to extend inside the inner edge of the ring frame RF, or may be formed so as to intersect the outer edge of the adhesive sheet AS. Or, the air vent cutting CU2 may be formed entirely or partially in the adhesive sheet area where the adherend WK is to be attached.

[0021] The pressing means may attach the adhesive sheet AS to the adherend WK and the ring frame RF, or may attach the adhesive sheet AS only to the adherend WK, or may attach the adhesive sheet AS only to the ring frame RF. Or, the adhesive sheet AS may be attached so as to completely cover the opening RF1 of the ring frame RF, or the adhesive sheet AS may be attached so as not to cover a part of the opening RF1 of the ring frame RF. Or, the adhesive sheet AS may be held by a holding member supported on the output shaft of a linear motion motor as a driving device and capable of being adsorbed and held by a decompression means (holding means) such as a decompression pump or a vacuum ejector (not shown), and the adhesive sheet AS held by the holding member may be pressed and attached to the adherend WK or the ring frame RF. Or, a driving device may be adopted as the pressing member approaching and separating means for approaching and separating the pressing roller 40 from the adherend WK. It may be provided in the sheet feeding device EA or the sheet attaching device EA1, or may not be provided. If not provided, the adhesive sheet AS may be pressed and attached to the adherend WK or the ring frame RF by another device.

[0022] The supporting means 50 may support the adherend WK and the ring frame RF, or may support only the adherend WK, or may support only the ring frame RF. With or without moving the table 52, the feeding means 10 and the pressing roller 40 may be moved. It may or may not be provided in the sheet feeding device EA or the sheet pasting device EA1.

[0023] The adhesive sheet AS may be formed to cover the entire opening RF1 of the ring frame RF, or may be formed to cover a part of the opening RF1 of the ring frame RF. The frame member may have a shape other than circular (the outer periphery is not continuous), such as circular, elliptical, polygonal, or other shapes, in addition to the ring frame RF.

[0024] Subsequently, the materials, types, shapes, etc. of the adhesive sheet AS, the adherend WK, and the frame member are not particularly limited. For example, the adhesive sheet AS, the adherend WK, and the frame member may be circular, elliptical, polygonal such as triangular or quadrilateral, or other shapes. The adhesive sheet AS may be of an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When a heat-sensitive adhesive sheet AS is adopted, it may be adhered by an appropriate method such as providing heating means on the heating side such as an appropriate coil heater or heat pipe for heating the adhesive sheet AS. Further, the adhesive sheet AS may be, for example, a single-layer one having only an adhesive layer, one having an intermediate layer between a base material and an adhesive layer, one having three or more layers such as having a cover layer on the upper surface of the base material, or even a so-called double-sided adhesive sheet capable of peeling the base material from the adhesive layer. The double-sided adhesive sheet may have a single-layer or multi-layer intermediate layer, or may be a single-layer or multi-layer one without an intermediate layer. Further, as the adherend WK, for example, it may be a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, pottery, a wooden board, or resin, or it may be a composite formed of two or more of them, and any form of member or article can also be targeted. Incidentally, the adhesive sheet AS, in terms of a functional or application reading, may be, for example, any sheet, film, tape, etc. such as an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a resin sheet for forming a recording layer.

[0025] The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps, and furthermore, they are not limited at all to the mere components and steps of a single embodiment shown in the above-described embodiment. For example, the feeding means may be any means as long as it feeds a web in which an adhesive sheet base material is temporarily adhered to a release sheet, and it is not limited at all as long as it is within the technical scope in light of the common general knowledge in the art at the time of filing (the same applies to other means and steps).

[0026] The drive equipment in the above-described embodiment can employ electric equipment such as a rotary motor, a linear motor, a linear motor, a single-axis robot, and an articulated robot having two or more joints of three axes or more, actuators such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder, etc., and can also employ a combination of them directly or indirectly. In the above embodiment, when a rotating member such as a roller is employed, a driving device for rotationally driving the rotating member may be provided, or the surface of the rotating member or the rotating member itself may be constituted by a deformable member such as rubber or resin, or the surface of the rotating member or the rotating member itself may be constituted by a non-deformable member. Instead of a roller, other members such as a shaft or blade that rotates or does not rotate may be employed. When a pressing means such as a pressing roller or pressing head or a pressing member that presses a pressed object is employed, in addition to or in combination with those exemplified above, in addition to a roller, round bar, blade material, brush-shaped member, a means using blowing of a gas such as air or gas may be employed. The pressing member may be constituted by a deformable member such as rubber, resin, or sponge, or may be constituted by a non-deformable member such as metal or resin. When a peeling means such as a peeling plate or peeling roller or a peeling member that peels a peeled object is employed, in addition to or in combination with those exemplified above, members such as a plate-shaped member, round bar, or roller may be employed. The peeling member may be constituted by a deformable member such as rubber or resin, or may be constituted by a non-deformable member. When a supporting (holding) means or a supporting (holding) member that supports (holds) a supported member (held member) is employed, a configuration that supports (holds) the supported member by a gripping means such as a mechanical chuck or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), pressure-sensitive adhesive (pressure-sensitive adhesive sheet, pressure-sensitive adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving device, etc. may be adopted. When a cutting means or a cut forming means that cuts a cut member or forms a cut or cutting line in the cut member is employed, in addition to or in combination with those exemplified above, a cutter blade, laser cutter, ion beam, thermal power, heat, water pressure, heating wire, a means that cuts by spraying a gas or liquid, etc. may be adopted, or a combination of appropriate driving devices may be moved to cut the cut member.

Explanation of Signs

[0027] EA…Sheet feeding device 10…Pay-out means 20…Cutting means 23…First cutting blade (outline cut forming means) 24…Second cutting edge (air vent cut forming means) 30…Release plate (peeling means) AB…Adhesive sheet base material AS…Adhesive sheet AS1…Adhesive sheet area CU1…Contour cut CU2…Air vent cut RF…Ring frame (adherend, frame member) RF1…Opening RL…Release sheet RS…Web

Claims

1. A feeding means for feeding a web in which an adhesive sheet base material is temporarily attached to a release sheet; A contour cutting means for forming a closed-loop contour cut in the adhesive sheet base material of the web fed by the feeding means, forming an adhesive sheet inside the contour cut, and an air vent cut forming means for forming an air vent cut for evacuating air from between the inside of the contour cut and an adherend; a cutting means having; A peeling means for peeling the adhesive sheet from the release sheet and supplying the adhesive sheet; The air vent cut forming means forms a linear air vent cut having no closed loop portion. A sheet feeding device characterized by that.

2. The air vent cut forming means forms the air vent cut so as to extend in the web feeding direction. The sheet feeding device according to claim 1, characterized by that.

3. The air vent cut forming means is a region located outside the inner edge of the opening in the adhesive sheet attached so as to cover the opening of the frame member as the adherend, and is located inside the outer edge of the adhesive sheet. The sheet feeding device according to claim 1 or claim 2, characterized in that an air vent cut is formed in the adhesive sheet region.

4. A feeding step of feeding a web in which an adhesive sheet base material is temporarily attached to a release sheet; A cutting step of forming a closed-loop contour cut in the adhesive sheet base material of the web fed in the feeding step, forming an adhesive sheet inside the contour cut, and forming an air vent cut for evacuating air from between the inside of the contour cut and an adherend; and A peeling step of peeling the adhesive sheet from the release sheet and supplying the adhesive sheet is performed, In the cutting step, a linear air vent cut having no closed loop portion is formed. A sheet feeding method characterized by that.

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