Substrate processing system

Abstract

To provide a substrate processing system capable of easily setting processing conditions even in a substrate processing device which is not connected to a network.SOLUTION: A substrate processing system 1000 for processing a substrate 100 according to set processing conditions comprises: a substrate processing device 1 including a substrate holding unit 10 for holding the substrate 100, a processing unit 20 for processing the substrate 100 held by the substrate holding unit 10, a processing condition storage unit 41 for storing processing conditions to be performed by the processing unit 20, which include a plurality of setting items and a plurality of set values set in association with the setting items, and a barcode reader 50; a barcode conversion unit 42 for converting the processing conditions stored in the processing condition storage unit 41 into the barcode; and a monitor 30 for displaying the barcode. The processing conditions are transmitted to the substrate processing device 1 via the barcode.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a substrate processing system for processing substrates such as semiconductor wafers.

Background Art

[0002] Devices are known that perform some kind of processing such as processing, cleaning, and inspection on substrates such as semiconductor wafers and package substrates in accordance with processing conditions such as set processing conditions, cleaning conditions, and inspection conditions (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, such processing devices are often not connected by a common network. To copy processing conditions created on one device to another device, a removable auxiliary storage device such as a USB (Universal Serial Bus) flash drive (USB memory) is required, which is inconvenient. Also, in the case of a device not connected to a network, it is difficult to import processing conditions created on another medium into the processing device, and there is the inconvenience that the processing conditions have to be input and set one by one on the processing device body.

[0005] The present invention has been made in view of such problems, and an object thereof is to provide a substrate processing system that can easily set processing conditions even for a substrate processing device not connected to a network.

Means for Solving the Problems

[0006] In order to solve the above-described problems and achieve the object, a substrate processing system according to the present invention is a substrate processing system that processes a substrate according to set processing conditions, the substrate processing system including a substrate holding unit that holds the substrate, a processing unit that performs processing on the substrate held by the substrate holding unit, a plurality of setting items, and a plurality of set values set in association with the setting items. Data including at least one piece of data regarding the conditions of the substrate or performed by the processing unit the conditions of the process a processing condition storage unit that stores the processing conditions, and a barcode reader. which are of the same type as each other and not connected to a common network substrate processing apparatus a plurality of which are provided, communicably connected to one substrate processing apparatus, and a barcode conversion unit that converts the processing conditions stored in the processing condition storage unit into a barcode, and a monitor that displays the barcode. the barcode conversion unit reduces the capacity, converts it into the barcode, and displays it on the monitor The barcode and reads it by the barcode reader of another substrate processing apparatus the processing conditions each piece of data is from one substrate processing apparatus to another substrate processing apparatus characterized by transmitting.

[0007] The barcode conversion unit may delete the common part between the data from each piece of data within the processing conditions, reduce the capacity, and convert it into the barcode. Further, another substrate processing apparatus may restore each original piece of data by adding the common part to the information read from the barcode transmitted from one substrate processing apparatus. Further, The substrate processing system may further include a processing condition setting unit that inputs the set value and sets the processing conditions.

[0008] The processing condition setting unit, the barcode conversion unit, and the monitor may be one included in the substrate processing apparatus.

[0009] The processing condition setting unit, the barcode conversion unit, and the monitor are included in an information device, and the barcode displayed on the monitor of the information device is another read by the barcode reader of the substrate processing apparatus, whereby the processing conditions are another recorded in the processing condition storage unit of the substrate processing apparatus.

Advantages of the Invention

[0010] According to the present invention, even a substrate processing apparatus not connected to a network can easily set processing conditions.

Brief Description of the Drawings

[0011]

Figure 1

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[0012] Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the constituent elements described below include those that can be easily assumed by those skilled in the art and substantially the same ones. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[0013] **[Embodiment 1]** A substrate processing system 1000 according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of the substrate processing system 1000 according to Embodiment 1. FIG. 2 is a block diagram showing an example of processing conditions 200 stored in the processing condition storage unit 41 of FIG. 1. FIG. 3 is a diagram showing an example of the barcode conversion process by the barcode conversion unit 42 of FIG. 1. FIGS. 4 and 5 are diagrams showing examples of display screens 501 and 504 displayed on the monitor 30 of FIG. 1, respectively.

[0014] As shown in FIG. 1, the substrate processing system 1000 according to Embodiment 1 includes a plurality (two in the example of FIG. 1) of substrate processing apparatuses 1. The plurality of substrate processing apparatuses 1 are all of the same type and are not connected to a common network. As shown in FIG. 1, the substrate processing apparatus 1 includes a substrate holding unit 10, a processing unit 20, a monitor 30, a control unit 40, and a barcode reader 50. In the following, the description of the configuration, operation, and processing of the substrate processing apparatus 1 is common to all of the plurality of same-type substrate processing apparatuses 1 included in the substrate processing system 1000.

[0015] In Embodiment 1, the substrate 100 to be processed by the substrate processing apparatus 1 is, for example, a disk-shaped semiconductor wafer or an optical device wafer made of silicon, sapphire, silicon carbide (SiC), gallium arsenide, etc. as a base material. The substrate 100 has devices formed in regions partitioned by a plurality of division planned lines formed in a grid pattern on a flat surface. In this embodiment, the substrate 100 has a tape 101 having an adhesive layer attached to the back surface of the front surface, and an annular frame 102 is attached to the outer edge of the tape 101, but the present invention is not limited thereto. Further, in the present invention, the substrate 100 may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, or a glass plate.

[0016] The substrate holding part 10 includes a disk-shaped frame body in which a recess is formed, and a disk-shaped suction part fitted into the recess. The suction part of the substrate holding part 10 is formed of a porous ceramic or the like having a large number of porous holes, and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the suction part of the substrate holding part 10 is a holding surface 11 on which the substrate 100 is placed and the substrate 100 is sucked and held via the tape 101. The holding surface 11 and the upper surface of the frame body of the substrate holding part 10 are arranged on the same plane and are formed parallel to the XY plane which is a horizontal plane. The substrate holding part 10 is movable in the X-axis direction which is one horizontal direction by an X-axis moving unit (not shown), and is rotatably provided around the Z-axis which is in the vertical direction and orthogonal to the XY plane by a rotation drive source (not shown).

[0017] In the first embodiment, the processing unit 20 is a cutting unit and has a cutting blade 21. The cutting blade 21 is added with a rotational movement around an axis parallel to the Y-axis direction which is another horizontal direction and orthogonal to the X-axis direction, and cuts the substrate 100 held by the substrate holding part 10. The processing unit 20 is movably provided in the Y-axis direction with respect to the substrate 100 held by the substrate holding part 10 by a Y-axis moving unit (not shown), and is movably provided in the Z-axis direction by a Z-axis moving unit (not shown).

[0018] The substrate processing apparatus 1 rotates the cutting blade 21 and relatively moves the cutting blade 21 along the division planned line with respect to the substrate held by the substrate holding part 10 by an X-axis moving unit, a Y-axis moving unit, and a Z-axis moving unit (not shown), thereby cutting the substrate 100 and forming a cutting groove along the division planned line.

[0019] As shown in FIG. 1, the monitor 30 includes an input unit 31 and a display unit 32. The input unit 31 receives inputs of various information regarding the substrate processing apparatus 1 from an operator. The input unit 31 transmits the various information received from the operator to the control unit 40. In the first embodiment, the input unit 31 includes a processing condition setting unit 33. The processing condition setting unit 33 sets the processing conditions (e.g., the processing conditions 200 shown in FIG. 2) to be performed by the processing unit 20 of the substrate processing apparatus 1. Specifically, the processing condition setting unit 33 functions as an input interface such as an input format to register and change the setting items or setting values of the processing conditions in response to receiving from the operator the registration and change inputs of the setting items or setting values of the processing conditions displayed on the display unit 32. The display unit 32 displays screens of various information regarding the substrate processing apparatus 1, such as an input format for receiving an input by the input unit 31, an input format functioning as the processing condition setting unit 33, a barcode (e.g., the barcode 400 shown in FIG. 3) generated by converting the processing conditions, and the processing result of the substrate processing apparatus 1.

[0020] The control unit 40 controls the operations of the respective components of the substrate processing apparatus 1 to cause the substrate processing apparatus 1 to perform processing of the substrate 100 and setting of the processing conditions of the substrate 100. As shown in FIG. 1, the control unit 40 includes a processing condition storage unit 41 and a barcode conversion unit 42. The processing condition storage unit 41 stores the processing conditions 200 to be performed by the processing unit 20 of the substrate processing apparatus 1. The processing conditions 200 include a plurality of setting items and a plurality of setting values set in association with each setting item. In the first embodiment, the processing conditions 200 are divided into a plurality of data (e.g., the data 210 shown in FIG. 3) for each process and stored by the processing condition storage unit 41.

[0021] Specifically, as shown in FIG. 2, the processing conditions 200 are divided into device data 201, processing data 202, conveyance data 203, cleaning data 204, alignment data 205, quality check data 206, etc., and are stored by the processing condition storage unit 41. The device data 201 is the condition of the substrate 100 to be processed. The processing data 202 is the condition of the processing (cutting process in Embodiment 1) performed by the processing unit 20. The conveyance data 203 is the condition of the conveyance of the substrate 100 performed by a conveyance unit (not shown) provided in the substrate processing apparatus 1, which is a type of processing unit according to the present invention. The cleaning data 204 is the condition of the cleaning after the processing of the substrate 100 performed by a cleaning unit (not shown) provided in the substrate processing apparatus 1, which is a type of processing unit according to the present invention. The alignment data 205 is the condition of the alignment for aligning the substrate 100 and the processing unit 20 (cutting blade 21). The quality check data 206 is the condition of the kerf check for automatically checking the quality such as whether the cutting groove is within the division planned line. Note that the processing conditions 200 are not limited to this in the present invention, and may be stored by the processing condition storage unit 41 as one data without being divided for each process.

[0022] Here, the device data 201 includes, for example, a plurality of setting items such as the shape of the workpiece, the size of the workpiece, the workpiece thickness, the tape thickness, the cutting depth, the index, the cutting speed, and the like. The shape of the workpiece is the planar shape of the substrate 100, and its set value is represented by, for example, a circle, a rectangle, or the like. The size of the workpiece is the size of the plane of the substrate 100, and its set value varies according to the shape of the workpiece. For example, if the shape of the workpiece is circular, it is the diameter, and if the shape of the workpiece is rectangular, it is the length and width. The workpiece thickness is the thickness of the substrate 100. The tape thickness is the thickness of the tape 101 attached to the substrate 100. The cutting depth is the depth of the cutting groove formed by cutting the substrate 100, and substantially represents the blade height, which is the height of the lower end of the cutting blade 21 with respect to the substrate 100 during cutting. The index is the interval between adjacent planned division lines of the substrate 100. The cutting speed is the relative speed of the cutting blade 21 with respect to the substrate 100 (so-called machining feed speed) when cutting the substrate 100.

[0023] In addition, the machining data 202 includes, for example, the shape of the substrate holding part 10, the material of the substrate holding part 10, the size of the substrate holding part 10, the shape of the axis on which the cutting blade 21 is used, the material of the axis on which the cutting blade 21 is used, the size of the axis on which the cutting blade 21 is used, the type of the cutting blade 21, the material of the cutting blade 21, the size of the cutting blade 21, the Y index, the spindle rotation speed, etc. in a plurality of setting items. The shape of the substrate holding part 10 is the planar shape of the substrate holding part 10, and its set value is represented by, for example, a circle, a rectangle, or the like. The set value of the material of the substrate holding part 10 is represented by the material name. The size of the substrate holding part 10 is the planar size of the substrate holding part 10, and its set value varies according to the shape of the substrate holding part 10, similar to the size of the workpiece. The shape of the axis on which the cutting blade 21 is used is, for example, the presence or absence of a taper at the tip, and its set value is represented by, for example, the name given to the shape of each axis. The set value of the material of the axis on which the cutting blade 21 is used is represented by the material name. The size of the axis on which the cutting blade 21 is used is the diameter and length of the axis. The type of the cutting blade 21 is the presence or absence of a hub, the presence or absence of teeth, etc., and its set value is, for example, a hub blade, a hubless blade, a saw-type metal saw, etc. The set value of the material of the cutting blade 21 is represented by the material name. The size of the cutting blade 21 is the diameter of the central insertion hole for mounting and the diameter of the outer peripheral end of the cutting part. The Y index is a length parameter indicating the reference position of the cutting blade 21 in the Y-axis direction (axial direction). The spindle rotation speed is the number of rotations (rotation speed) of the cutting blade 21 around its axis.

[0024] In addition, the transfer data 203 includes, for example, a plurality of setting items such as gripping strength, reference slot height, slot interval, rail interval, suction pressure, driving speed, and the like. The gripping strength is the strength with which the gripping unit of the transfer unit grips the substrate 100. The reference slot height is the height of the slot in which the first substrate 100 is accommodated when a cassette (not shown) for accommodating a plurality of substrates 100 is placed on the cassette mounting table of the substrate processing apparatus 1, and is the height of the gripping unit when the first substrate 100 is carried into the substrate processing apparatus 1. The slot interval is the interval between the slots of the cassette. The rail interval is the interval between a pair of rails (not shown) provided in the substrate processing apparatus 1 for temporarily placing the substrate 100 and the like carried into the substrate processing apparatus 1. The suction pressure is the suction pressure with which the substrate 100 is sucked and held by the suction pad of the transfer unit. The driving speed is the driving speed of the transfer unit that grips or sucks and holds the substrate 100.

[0025] In addition, the cleaning data 204 includes, for example, a plurality of setting items such as cleaning time, cleaning water volume, spinner table rotation speed, cleaning mode, and the like. The cleaning time is the time for cleaning the processed substrate 100. The cleaning water volume is the water volume per predetermined time supplied during the cleaning of the substrate 100. The spinner table rotation speed is the rotation speed (rotational speed) of the spinner table that supports the substrate 100 during the cleaning of the substrate 100. The cleaning mode is the mode of the cleaning water supplied when cleaning the substrate 100, and its set value is represented by, for example, a high-pressure cleaning mode in which the cleaning water is pressurized to about 6 to 10 MPa by a high-pressure pump and supplied, or a two-fluid cleaning mode in which the cleaning water is atomized and supplied using a high-speed flow of compressed air.

[0026] In addition, the alignment data 205 includes, for example, the type of microscope of an imaging unit (not shown) provided in the substrate processing apparatus 1, the magnification of the microscope of the imaging unit, the nature of the illumination of the imaging unit, the illuminance of the illumination of the imaging unit, etc. in a plurality of setting items. The type of microscope of the imaging unit has a set value represented by, for example, the name of the type of microscope, etc. The magnification of the microscope of the imaging unit is the magnification of the microscope when taking an image for alignment. The nature of the illumination of the imaging unit has a set value represented by, for example, oblique illumination or direct illumination, etc. The illuminance of the illumination of the imaging unit is the illuminance of the illumination when taking an image for alignment.

[0027] In addition, the quality check data 206 includes, for example, in addition to the type of microscope of the imaging unit, the magnification of the microscope of the imaging unit, the nature of the illumination of the imaging unit, and the illuminance of the illumination of the imaging unit, which are the same as those of the alignment data 205, the allowable values of each item of the kerf check, etc. in a plurality of setting items. Each item of the kerf check is, for example, offset, kerf width, chipping width from the kerf center, maximum chipping width from the kerf end, etc. The offset is the value of the deviation in the width direction of the center line of the kerf center, which is the center line representing the position of the center in the width direction of the cutting groove, with respect to the center line of the division planned line. The kerf width is, respectively, the distance (interval) between both ends of the cutting groove within the region confirmed by the kerf check. The chipping width from the kerf center is the distance between the end of the maximum chipping in the width direction and the center in the width direction of the cutting groove within the region confirmed by the kerf check. The maximum chipping width from the kerf end is the distance between the end of the maximum chipping in the width direction and the end of the cutting groove within the region confirmed by the kerf check.

[0028] The barcode conversion unit 42 converts the processing condition 200 stored in the processing condition storage unit 41 into a barcode 400. In the first embodiment, as shown in FIG. 3, the barcode conversion unit 42 converts each piece of data 210 (any one of the device data 201, the processing data 202, the conveyance data 203, the cleaning data 204, the alignment data 205, and the quality check data 206, etc.) in the processing condition 200 into a binary format in which each setting item and setting value are arranged in a predetermined processing language in a predetermined order. Based on the data 210 converted into the binary format, the common part independent of the type of each data 210 excluding the information regarding the type of the data 210 and the plurality of setting values and the common part for each type of the data 210 are deleted to generate the setting value data 300 with reduced capacity, and the setting value data 300 is converted into the barcode 400. For example, based on the device data 201, the barcode conversion unit 42 generates the setting value data 300 of the device data 201 and converts it into the barcode 401 (see FIG. 4) of the device data 201. Also, based on the cleaning data 204, the barcode conversion unit 42 generates the setting value data 300 of the cleaning data 204 and converts it into the barcode 404 (see FIG. 5) of the cleaning data 204.

[0029] The control unit 40 receives the selection of the device data 201 from the input unit 31, and causes the display unit 32 of the monitor 30 to display the display screen 501 shown in FIG. 4 for setting and confirming the device data 201. As shown in FIG. 4, the display screen 501 displays the device data 201 with a plurality of setting items and setting values in contrast to each other, and each setting value field can be input and set by the operator, and constitutes the processing condition setting unit 33 together with the input button 511. The display screen 501 also displays an end button 512. The display screen 501 also displays the barcode 401 of the device data 201 converted by the barcode conversion unit 42 in accordance with the display of the device data 201.

[0030] When the input button 511 is selected on the display screen 501 with a new set value entered in the set value field, the processing condition setting unit 33 newly sets the new set value in the device data 201 and transmits a notice to that effect to the control unit 40. When the control unit 40 receives the input of setting the new set value to the device data 201 from the processing condition setting unit 33, it updates the device data 201 stored in the processing condition storage unit 41 to the new set value, converts the device data 201 updated to the new set value by the barcode conversion unit 42 into a new barcode 401, and updates the barcode 401 displayed on the display screen 501 to this new barcode 401. When the control unit 40 receives the input of selecting the end button 512 from the processing condition setting unit 33, it causes the display unit 32 of the monitor 30 to display the screen before receiving the selection of each data 210 from the input unit 31.

[0031] The control unit 40 also causes the display unit 32 of the monitor 30 to display the display screen 504 shown in FIG. 5 for setting and confirming the cleaning data 204 by receiving the selection of the cleaning data 204 from the input unit 31. The display screen 504 is obtained by changing the device data 201 to the cleaning data 204 on the display screen 501 and changing the barcode 401 of the device data 201 to the barcode 404 of the cleaning data 204 and then displaying the result. When the control unit 40 receives the selection of other data 210, it also causes the display unit 32 of the monitor 30 to display a display screen that displays the data 210 and the barcode 400 of the data 210, similar to the display screens 501 and 504.

[0032] In Embodiment 1, the control unit 40 includes a computer system. The computer system included in the control unit 40 has an arithmetic processing unit having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The functions of the control unit 40 and the barcode conversion unit 42 are realized by the arithmetic processing unit executing a program stored in the storage device of the computer system included in the substrate processing apparatus 1. The function of the processing condition storage unit 41 is realized by the storage device of the computer system included in the substrate processing apparatus 1.

[0033] The barcode reader 50 reads the barcode 400 of the data 210, acquires the set value data 300 of the data 210 of the source of the barcode 400, and transmits the acquired set value data 300 to the control unit 40. When the control unit 40 acquires the set value data 300 from the barcode reader 50, it can add the common part of each data 210 to the set value data 300 to restore the original data 210, and store the restored data 210 in the processing condition storage unit 41.

[0034] In the substrate processing system 1000, the other substrate processing apparatus 1 can acquire the data 210 of the source of the barcode 400 by the barcode reader 50 reading the barcode 400 displayed on the monitor 30 by one substrate processing apparatus 1. In this way, in the substrate processing system 1000, one substrate processing apparatus 1 can transmit the data 210 of the processing conditions 200 to the other substrate processing apparatus 1 via the barcode 400.

[0035] The substrate processing system 1000 according to Embodiment 1 having the above configuration includes a processing condition storage unit 41 that stores the processing conditions 200 to be performed by the processing unit 20 among a plurality of substrate processing apparatuses 1 constituting the substrate processing system 1000, a barcode conversion unit 42 that converts the data 210 of the processing conditions 200 into a barcode 400, and a barcode reader 50 that acquires the data 210 of the processing conditions 200 by reading the barcode 400. Therefore, the substrate processing system 1000 according to Embodiment 1 can transmit the data 210 of the processing conditions 200 between the substrate processing apparatuses 1 via the barcode 400 even for a substrate processing apparatus 1 not connected to the network, so that the processing conditions 200 can be easily set without having to input and set the processing conditions 200 one by one.

[0036] In addition, in the substrate processing system 1000 according to Embodiment 1, the processing condition storage unit 41 stores the processing conditions 200 separately into a plurality of data 210 for each process, and the barcode conversion unit 42 converts them into barcodes 400 for each data 210. Further, in the substrate processing system 1000 according to Embodiment 1, the barcode conversion unit 42 converts the data 210 into a binary format, deletes the common part of each data 210 based on the data 210 converted into the binary format to generate reduced-capacity set value data 300, and converts the set value data 300 into a barcode 400. Therefore, the substrate processing system 1000 according to Embodiment 1 can reduce the capacity of the data 210 of the processing conditions 200 to be converted into the barcode 400, and can efficiently convert the barcode 400 and transmit the data 210 of the processing conditions 200 between the substrate processing apparatuses 1 via the barcode 400.

[0037] In addition, the input unit 31 of the monitor 30 in the substrate processing system 1000 according to Embodiment 1 further includes a processing condition setting unit 33 that inputs a set value and sets the processing conditions 200. Therefore, the substrate processing system 1000 according to Embodiment 1 can transmit the newly set processing conditions 200 between the substrate processing apparatuses 1 via a new barcode 400 converted by the barcode conversion unit 42 based on the newly set processing conditions 200 by the processing condition setting unit 33.

[0038] 〔Embodiment 2〕 The substrate processing system 1000-2 according to Embodiment 2 of the present invention will be described with reference to the drawings. FIG. 6 is a perspective view showing a configuration example of the substrate processing system 1000-2 according to Embodiment 2. FIGS. 7 and 8 are diagrams showing examples of display screens 521 and 531 displayed on the monitor 30-2 of FIG. 6, respectively. In FIGS. 6 to 8, the same reference numerals are given to the same parts as in Embodiment 1, and the description thereof will be omitted.

[0039] As shown in FIG. 6, the substrate processing system 1000-2 according to Embodiment 2 includes a plurality (two in the example of FIG. 6) of substrate processing apparatuses 1-2 and an information device 2. The plurality of substrate processing apparatuses 1-2 are all of the same type and are not connected to a common network. As shown in FIG. 6, the substrate processing apparatus 1-2 is modified from the substrate processing apparatus 1 of Embodiment 1 to include a communication unit 45 in the control unit 40 instead of the processing condition setting unit 33 and the barcode conversion unit 42. In the following, the description of the configuration, operation, processing, etc. of the substrate processing apparatus 1-2 is common to all of the plurality of substrate processing apparatuses 1-2 of the same type included in the substrate processing system 1000-2.

[0040] The communication unit 45 is connected to the control unit 40-2 of the information device 2 so as to be capable of information communication wirelessly or by wire. The communication unit 45 of the substrate processing apparatus 1-2 transmits the data 210 of the processing condition 200 stored in the processing condition storage unit 41 of the substrate processing apparatus 1-2 to the information device 2 in accordance with a transmission command from the control unit 40 of the substrate processing apparatus 1-2. The function of the communication unit 45 is realized by an input / output interface device of a computer system included in the substrate processing apparatus 1-2.

[0041] As shown in FIG. 6, the information device 2 includes a monitor 30-2 and a control unit 40-2. The monitor 30-2 includes an input unit 31-2 and a display unit 32-2. The input unit 31-2 realizes the same functions as the input unit 31 in Embodiment 1, receives various inputs, transmits the received information to the control unit 40-2, and also transmits it to the control unit 40 via the communication unit 45 to which the information device 2 is communicably connected. In Embodiment 2, the input unit 31-2 includes a processing condition setting unit 33-2. The processing condition setting unit 33-2 realizes the same functions as the processing condition setting unit 33 in Embodiment 1 and sets the processing conditions 200 of the substrate processing apparatus 1-2 to which the information device 2 is communicably connected via the communication unit 45. The display unit 32-2 realizes the same functions as the display unit 32 in Embodiment 1.

[0042] The control unit 40-2 controls the operations of the components of the information device 2 to cause the information device 2 to perform information communication with the substrate processing apparatus 1-2, input reception processing from the input unit 31-2 of the monitor 30-2, display processing on the display unit 32-2 of the monitor 30-2, etc. The control unit 40-2 performs information communication with the control unit 40 of the substrate processing apparatus 1-2 to which the information device 2 is communicably connected via the communication unit 45. In Embodiment 2, the control unit 40-2 includes a barcode conversion unit 42-2. The barcode conversion unit 42-2 realizes the same functions as the barcode conversion unit 42 in Embodiment 1 and converts the data 210 of the processing conditions 200 received by the control unit 40-2 from the substrate processing apparatus 1-2 into a barcode 400.

[0043] The control unit 40-2 receives the selection of the device data 201 from the input unit 31-2, and causes the display screen 521 shown in FIG. 7 for setting and checking the device data 201 to be displayed on the display unit 32-2 of the monitor 30-2. As shown in FIG. 7, the display screen 521 is obtained by omitting the barcode 401 from the display screen 501 of the first embodiment and displaying a barcode button 513 instead. When the control unit 40-2 receives the input of the selection of the barcode button 513 from the processing condition setting unit 33-2, the barcode conversion unit 42-2 converts the device data 201 set in the processing condition setting unit 33-2 into a barcode 401, and displays a display screen 531 shown in FIG. 8 that displays the converted barcode 401.

[0044] The information device 2 includes a mobile phone including a high-function mobile phone (so-called smartphone), a tablet terminal, a notebook or desktop PC (Personal Computer), a PDA (Personal Digital Assistant) which is a personal digital assistant, and wearable devices such as glasses-type and watch-type devices, wireless earphones, wireless headphones, etc. are exemplified. The control unit 40-2 of the information device 2 includes a computer system similar to the control unit 40, and has an arithmetic processing unit having a microprocessor such as a CPU, a storage device having a memory such as a ROM or a RAM, and an input / output interface device. In the second embodiment, the functions of the control unit 40-2 and the functions of the barcode conversion unit 42-2 are realized by the arithmetic processing unit of the computer system included in the control unit 40-2 executing a computer program stored in the storage device of the computer system included in the control unit 40-2.

[0045] In the substrate processing system 1000-2, the other substrate processing apparatus 1-2 can obtain the data 210 of the source of the barcode 400 by reading the barcode 400 displayed on the monitor 30-2 by the information device 2 that is communicably connected to one substrate processing apparatus 1-2 by the barcode reader 50. Thus, in the substrate processing system 1000-2, one substrate processing apparatus 1-2 can transmit the data 210 of the processing conditions 200 to the other substrate processing apparatus 1-2 via the barcode 400.

[0046] The substrate processing system 1000-2 according to Embodiment 2 is the substrate processing system 1000 according to Embodiment 1, in which, instead of the substrate processing apparatus 1 including the processing condition setting unit 33 and the barcode conversion unit 42, the information device 2 communicably connected to the substrate processing apparatus 1-2 includes the processing condition setting unit 33-2 and the barcode conversion unit 42-2. Therefore, the substrate processing system 1000-2 according to Embodiment 2 has the same operational effects as the substrate processing system 1000 according to Embodiment 1.

[0047] [Modification Example 1] The substrate processing systems 1000 and 1000-2 according to Modification Example 1 of the present invention will be described with reference to the drawings. FIG. 9 is a perspective view showing an example of the processing unit 20-3 of the substrate processing systems 1000 and 1000-2 according to Modification Example 1. In the description of Modification Example 1, the same reference numerals are given to the same parts as in Embodiment 1 and Embodiment 2, and the description thereof will be omitted.

[0048] The substrate processing systems 1000 and 1000-2 according to Modification Example 1 are those in which the processing unit 20 of the substrate processing apparatuses 1 and 1-2 is changed to the processing unit 20-3. As shown in FIG. 9, the processing unit 20-3 in Modification Example 1 is a grinding unit and has a grinding wheel 21-3 in which grinding wheels are arranged in a ring shape. The grinding wheel 21-3 is subjected to a rotational operation around an axis parallel to the Z-axis direction, and the substrate 100 held by the substrate holding unit 10 is ground by being pressed along the grinding feed direction parallel to the Z-axis direction.

[0049] In Modification 1, with the change of the processing unit 20 to the processing unit 20-3, the processing conditions 200 stored in the processing condition storage unit 41 are changed. In Modification 1, for example, the setting items included in the device data 201 are changed to grinding thickness, grinding feed rate, etc. instead of tape thickness, cutting depth, index, and cutting speed. The grinding thickness is the thickness by which the substrate 100 is ground, and substantially represents the grinding feed amount of the grinding wheel 21-3 after contacting the substrate 100 during grinding. The grinding feed rate is the relative speed of the grinding wheel 21-3 with respect to the substrate 100 when grinding the substrate 100 (so-called grinding feed rate).

[0050] In addition, in Modification 1, the setting items included in the machining data 202 are changed to the shape of the axis on which the grinding wheel 21-3 is used, the material of the axis on which the grinding wheel 21-3 is used, the size of the axis on which the grinding wheel 21-3 is used, the type of the grinding wheel 21-3, the material of the grinding wheel 21-3, the size of the grinding wheel 21-3, the Y index, and the spindle rotation speed, to the shape of the grinding wheel 21-3, the size of the grinding wheel 21-3, the arrangement of the grinding grains, the material of the grinding grains, the rotation speed of the substrate holding portion 10, the rotation speed of the grinding wheel 21-3, the positional relationship between the rotation axis of the substrate holding portion 10 and the rotation axis of the grinding wheel 21-3, etc. The shape of the grinding wheel 21-3 is the planar shape of the grinding wheel 21-3, and its set value is represented by, for example, a circular shape or the like. The size of the grinding wheel 21-3 is the size of the plane of the grinding wheel 21-3, and its set value varies according to the shape of the grinding wheel 21-3. For example, if the shape of the grinding wheel 21-3 is circular, it is the diameter. The arrangement of the grinding grains is the arrangement form of the grinding grains arranged on the grinding wheel 21-3, and its set value is represented by the number of arrangements, the form of the arrangement, the radial position and the circumferential interval on the grinding wheel 21-3 when arranged in a circular shape, etc. The set value of the material of the grinding grains is represented by the material name. The rotation speed of the substrate holding portion 10 is the rotation speed (rotation speed) around the axis of the substrate holding portion 10 during the grinding process. The rotation speed of the grinding wheel 21-3 is the rotation speed (rotation speed) around the axis of the grinding wheel 21-3 during the grinding process. The set value of the positional relationship between the rotation axis of the substrate holding portion 10 and the rotation axis of the grinding wheel 21-3 is the direction and the distance of the rotation axis of the grinding wheel 21-3 with respect to the rotation axis of the substrate holding portion 10 during the grinding process.

[0051] In addition, in Modification 1, the alignment data 205 is omitted from the processing conditions 200. Also, in Modification 1, the check items included in the quality check data 206 are changed to the allowable value of the thickness variation of the substrate 100 after grinding, the flatness and flatness of the ground surface of the substrate 100, etc., instead of the allowable values of the respective items of the kerf check.

[0052] In the substrate processing systems 1000 and 1000-2 according to Modification Example 1, similar to the substrate processing systems 1000 and 1000-2 according to Embodiments 1 and 2, one substrate processing apparatus 1 or 1-2 can transmit the data 210 of the processing conditions 200 to the other substrate processing apparatus 1 or 1-2 via the barcode 400.

[0053] The substrate processing systems 1000 and 1000-2 according to Modification Example 1 are obtained by changing the processing unit 20 of the substrate processing apparatus 1 or 1-2 to a processing unit 20-3 in the substrate processing systems 1000 and 1000-2 according to Embodiments 1 and 2, and accordingly changing the processing conditions 200 stored in the processing condition storage unit 41. Therefore, the substrate processing systems 1000 and 1000-2 according to Modification Example 1 exhibit the same operational effects as the substrate processing systems 1000 and 1000-2 according to Embodiments 1 and 2.

[0054] 〔Modification Example 2〕 The substrate processing systems 1000 and 1000-2 according to Modification Example 2 of the present invention will be described with reference to the drawings. FIG. 10 is a perspective view showing an example of the processing unit 20-4 of the substrate processing systems 1000 and 1000-2 according to Modification Example 2. In the description of Modification Example 2, the same reference numerals are given to the same parts as in Embodiments 1 and 2 and Modification Example 1, and the description thereof will be omitted.

[0055] The substrate processing systems 1000 and 1000-2 according to Modification Example 2 are obtained by changing the processing unit 20 of the substrate processing apparatus 1 or 1-2 to a processing unit 20-4. As shown in FIG. 10, the processing unit 20-4 in Modification Example 2 is a laser processing unit and includes a laser irradiator 21-4. The laser irradiator 21-4 irradiates a laser beam onto the substrate 100 held by the substrate holding unit 10 to perform laser processing on the substrate 100 held by the substrate holding unit 10.

[0056] In Modification 2, with the change of the processing unit 20 to the processing unit 20-4, the processing conditions 200 stored in the processing condition storage unit 41 are changed. In Modification 2, for example, the setting items included in the device data 201 are changed to the laser irradiation depth, the laser absorption wavelength range, the laser transmission wavelength range, etc. instead of the cutting depth and the cutting speed. The laser irradiation depth is the depth of the focus of the laser beam irradiated on the substrate 100, and its set value is represented by one or more numbers. The laser absorption wavelength range is the wavelength range of the laser beam that has absorbability with respect to the substrate 100 and performs so-called ablation processing, and its set value is represented by a numerical range. The laser transmission wavelength range is the wavelength range of the laser beam that has permeability with respect to the substrate 100 and forms a modified layer inside the substrate 100, and its set value is represented by a numerical range.

[0057] Also, in Modification 2, the setting items included in the processing data 202 are changed to the laser oscillation material of the laser irradiator 21-4, the wavelength, phase, polarization plane, amplitude, power, propagation direction, etc. of the laser beam of the laser irradiator 21-4, the presence or absence of pulses of the laser beam and the pulse interval, the condensing position of the laser beam in the Z-axis direction, the type, position, material, etc. of the optical system for condensing the laser beam instead of the shape of the axis on which the cutting blade 21 is used, the material of the axis on which the cutting blade 21 is used, the size of the axis on which the cutting blade 21 is used, the type of the cutting blade 21, the material of the cutting blade 21, the size of the cutting blade 21, the Y index, and the spindle rotation speed. The set value of the laser oscillation material of the laser irradiator 21-4 is represented by the material name. The set value of the presence or absence of pulses of the laser beam and the pulse interval is represented only by the fact that there are no pulses, or by the fact that there are pulses and the pulse interval when there are pulses.

[0058] In the substrate processing systems 1000, 1000-2 according to Modification 2, similar to the substrate processing systems 1000, 1000-2 according to Embodiments 1 and 2, one substrate processing apparatus 1, 1-2 can transmit the data 210 of the processing conditions 200 to the other substrate processing apparatus 1, 1-2 via the barcode 400.

[0059] The substrate processing systems 1000 and 1000-2 according to Modification 2 are those obtained by changing the processing unit 20 of the substrate processing apparatus 1 and 1-2 in the substrate processing systems 1000 and 1000-2 according to Embodiments 1 and 2 to a processing unit 20-4, and accordingly, changing the processing conditions 200 stored in the processing condition storage unit 41. Therefore, the substrate processing systems 1000 and 1000-2 according to Modification 2 exhibit the same operational effects as the substrate processing systems 1000 and 1000-2 according to Embodiments 1 and 2.

[0060] Note that the present invention is not limited to the above-described embodiments. That is, various modifications can be made and implemented without departing from the gist of the present invention. In the above-described embodiments and modifications, the processing units 20, 20-3, and 20-4 are a cutting processing unit, a grinding processing unit, and a laser processing unit, respectively, and the processing units (not shown) are a transfer unit and a cleaning unit. However, the present invention is not limited to these processing units, and may be a polishing processing unit that polishes the substrate 100, a tape expansion unit that expands the tape 101 attached to the substrate 100, an ultraviolet irradiation unit that irradiates ultraviolet rays onto the tape 101 attached to the substrate 100, or the like. When the processing unit 20 is changed, the processing conditions 200 stored in the processing condition storage unit 41 are changed accordingly.

Description of Reference Numerals

[0061] 1, 1-2 Substrate processing apparatus 2 Information device 10 Substrate holding unit 20, 20-3, 20-4 Processing unit 30, 30-2 Monitor 31, 31-2 Input unit 32, 32-2 Display unit 33, 33-2 Processing condition setting unit 40, 40-2 Control unit 41 Processing condition storage unit 42, 42-2 Barcode conversion unit 50 Barcode reader 100 Substrate 200 Processing conditions 400, 401, 404 barcodes 1000, 1000-2 substrate processing system

Claims

1. A substrate processing system that processes a substrate according to set processing conditions, The substrate processing system includes: A substrate holding unit that holds the substrate; A processing unit that processes the substrate held by the substrate holding unit; A processing condition storage unit that stores at least one piece of processing condition data that is a condition of the substrate or a condition of processing performed by the processing unit, including a plurality of setting items and a plurality of set values associated with the setting items; A barcode reader; A plurality of substrate processing apparatuses of the same type that are not connected to a common network with each other, A barcode conversion unit that is communicably connected to one of the substrate processing apparatuses and converts the processing conditions stored in the processing condition storage unit of the one substrate processing apparatus into a barcode; A monitor that displays the barcode; The barcode conversion unit reduces the capacity, converts it into the barcode, The substrate processing system is characterized in that each piece of data of the processing conditions is transmitted from one substrate processing apparatus to another substrate processing apparatus by reading the barcode displayed on the monitor with the barcode reader of the other substrate processing apparatus. 2]

2. The substrate processing system according to claim 1, wherein the barcode conversion unit deletes the common part between the data from each piece of data in the processing conditions, reduces the capacity, and converts it into the barcode.

3. The substrate processing system according to claim 2, wherein the other substrate processing apparatus restores each original piece of data by adding the common part to the information read from the barcode transmitted from one substrate processing apparatus.

4. The substrate processing system according to claim 1, 2 or 3, further comprising a processing condition setting unit that inputs the set value and sets the processing conditions.

5. The substrate processing system according to claim 4, wherein the processing condition setting unit, the barcode conversion unit, and the monitor are included in one substrate processing apparatus.

6. The processing condition setting unit, the barcode conversion unit, and the monitor are included in an information device, The substrate processing system according to claim 4, wherein the processing conditions are recorded in the processing condition storage unit of the other substrate processing apparatus by reading the barcode displayed on the monitor of the information device with the barcode reader of the other substrate processing apparatus.

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