Washing roller axis

Abstract

To provide a cleaning roller shaft core.SOLUTION: The present invention relates to a cleaning roller shaft core including a shaft body and a hollow inside flow passage located in the shaft body, an outer wall of the shaft body having a plurality of distributed through-holes leading to the hollow inside flow passage, and a surface of the outer wall of the shaft body being provided with a plurality of trench-like structures being set in a radial direction and extending in a circle and having a protrusion edge protruding from the surface of the outer wall of the shaft body.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a cleaning roller axis, and particularly to a cleaning roller axis of a foam brush roller for cleaning foreign matters on the surface of a semiconductor wafer or a circuit board, etc.

Background Art

[0002] In order to efficiently and sufficiently remove fine particles and debris generated by polishing the surface of a wafer or a circuit board, currently, the conventional method of cleaning using a large amount of deionized water and chemical solutions, which is known in the industry, has changed to a cleaning method that combines cleaning rollers for brushing to improve efficiency and reduce water consumption. On the premise of not damaging the surface of the object to be cleaned, the contact part between the cleaning roller and the surface of the object to be cleaned must adopt a soft foam material. Also, in order to achieve a sufficient cleaning effect, the cleaning roller needs to have a rigid axis structure to withstand a predetermined pressing force, water pressure, and rotational speed applied to the cleaning roller so that the cleaning roller does not deform.

[0003] However, as the size of the wafer or the like to be cleaned increases or the process speed increases, the pressing force of the cleaning roller, the cleaning water pressure, and the roller rotational speed must also increase. When the rotational speed of the cleaning roller is at least 500 rpm or more, the adhesion strength at the interface between the heterogeneous foam material and the axis structure cannot be tolerated, and relative sliding and torsion are likely to occur, resulting in the cleaning roller being unable to adhere to the surface of the object to be cleaned, affecting the cleaning effect and ultimately damaging the object to be cleaned.

[0004] A cleaning solution, such as deionized water, often enters from one end of the roller axis and reaches the surface of the object to be cleaned by passing through the foam material so as to be uniformly dispersed through the internal flow path of the roller axis and the communication holes distributed on the surface of the roller axis. Therefore, the roller axis structure needs to have a specific flow path design. In order to combine with conventional machine equipment, usually, the overall size of the cleaning roller cannot be significantly changed. If a fixing structure for the foam material is added to the roller axis structure, the design and manufacturing difficulty of the entire roller axis may increase.

Summary of the Invention

Problems to be Solved by the Invention

[0005] Therefore, without affecting the main structure and design of the axis, it is possible to increase the adhesion strength between the foam material and the axis structure interface, and even when high pressing force, water pressure and rotation speed are adopted in the cleaning process, there will be no displacement between the foam material and the axis structure, and a cleaning roller axis that does not cause torsion of the soft foam material is required.

Means for Solving the Problems

[0006] The present invention provides a cleaning roller axis including a shaft body and a hollow internal flow path located inside the shaft body. On the outer wall surface of the shaft body, there are a plurality of through holes that communicate with the hollow internal flow path and are distributed dispersedly. On the outer wall surface of the shaft body, there are a plurality of groove-like structures that are installed in the radial direction and extend in a ring shape and have a protruding edge protruding from the outer wall surface of the shaft body. The included angle between the radial extension direction of these groove-like structures and the uniaxial direction of the shaft body is -80° to 80°, and the developed area ratio (Sdr) of the outer wall surface of the shaft body having these groove-like structures is 300% to 800%, and the arithmetic mean height (Sa) of the protruding edge is 70 μm to 300 μm.

[0007] In the cleaning roller axis of other embodiments, the maximum peak height (Sp) of the protruding edge of these groove-like structures is 500 μm to 900 μm.

[0008] In the cleaning roller axis of other embodiments, these groove-shaped structures on the outer wall surface of the shaft body extend in parallel arrangement or in a staggered arrangement.

[0009] In the cleaning roller axis of other embodiments, when these groove-shaped structures on the outer wall surface of the shaft body extend in a staggered arrangement, the included angle of the stagger is between 10° and 45°.

[0010] In the cleaning roller axis of other embodiments, the cross-sectional shape of these groove-shaped structures in the extending direction on the outer wall surface of the shaft body is triangular, quadrilateral or a partial arc shape.

[0011] In the cleaning roller axis of other embodiments, the opening width of these groove-shaped structures on the outer wall surface of the shaft body is between 0.1 mm and 0.9 mm.

[0012] In the cleaning roller axis of other embodiments, the depth of these groove-shaped structures is between 0.35 mm and 1.2 mm.

[0013] In the cleaning roller axis of other embodiments, these groove-shaped structures are distributed on the entire outer wall surface of the shaft body.

[0014] In the cleaning roller axis of other embodiments, the inner diameter of the hollow inner flow path of the shaft body is between 9 mm and 22 mm.

[0015] In the cleaning roller axis of other embodiments, the hole diameter of these through holes of the shaft body is between 2.5 mm and 6 mm.

[0016] In the cleaning roller axis of other embodiments, the hollow inner flow path of the shaft body has a closed end and an inlet end that are installed opposite to each other.

[0017] Hereinafter, the above description will be described in detail in embodiments to further interpret the technical solution of the present disclosure.

Brief Description of the Drawings

[0018] To make the above and other objects, features, advantages, and embodiments of the present disclosure clearer and easier to understand, the drawings will be described as follows.

Figure 1

Figure 2

Figure 3(a)

Figure 3(b)

Figure 3(c)

Figure 4(a)

Figure 4(b)

Figure 4(c)

Figure 4(d)

Figure 5

Figure 6

Embodiments for Carrying Out the Invention

[0019] It should be noted that, to make it easier to understand the features, content, advantages, and achievable effects of the present invention, the present invention will be described in detail below in the form of embodiments in conjunction with the drawings. However, the drawings used are only for illustration and to assist the specification, and are not drawn according to the actual proportions and exact configurations after the implementation of the present invention. Therefore, the actual implementation scope of the present invention should not be interpreted or limited by the proportions and configuration relationships of the attached drawings.

[0020] Hereinafter, with reference to the related drawings, embodiments of the cleaning roller axis of the present invention will be described. For ease of understanding, the same reference numerals are assigned to the same components in the following embodiments.

[0021] The present invention provides a cleaning roller axis for a foam brush roller for cleaning foreign substances on the surface of a semiconductor wafer or a circuit board, etc., which can increase the adhesion strength between the foam material and the axis structure interface, and even when a high pressing force, water pressure and rotational speed are applied during the cleaning process, no displacement occurs between the foam material and the axis structure or no twisting of the foam material is caused. As shown in FIG. 1, in one embodiment, the present invention includes a shaft body 110 and a hollow internal flow path 120. On the outer wall 130 of the shaft body, there are a plurality of through holes 140 that are dispersedly provided and communicate with the hollow internal flow path 120. On the surface of the outer wall 130 of the shaft body, there are a plurality of groove-like structures 150 that are installed in the radial direction and extend in a circumferential manner and have a protruding edge 151 protruding from the surface of the outer wall 130 of the shaft body. Here, the included angle A2 between the radial extension direction D2 of these groove-like structures 150 and the axial direction D1 of the shaft body 110 is -80° to 80°, and the developed area ratio (Sdr) of the surface of the outer wall 130 having the groove-like structures 150 is 300% to 800%, and the arithmetic mean height (Sa) of the protruding edge 151 is 70 μm to 300 μm. A cleaning roller axis 100 is provided. In one embodiment, the shaft body 110 has four rows of through holes 140 along the axial direction D1, and the through holes 140 are evenly distributed in the radial direction and the hole diameter r is 2.5 mm to 6 mm. In one embodiment (see FIG. 6), the hollow internal flow path 120 has a closed end 120b and an inlet end 120a that are installed opposite to each other, and the inner diameter R of the hollow internal flow path 120 of the shaft body 110 is 9 mm to 22 mm.

[0022] In the cleaning roller axis of other embodiments, the maximum peak height (Sp) of the protruding edge 151 of these groove-like structures 150 is 500 μm to 900 μm.

[0023] In this specification, "maximum peak height (Sp)", "arithmetic mean height (Sa)", and "developed area ratio (Sdr)" are generally parameters for evaluating surface roughness. The Sp and Sa values are the absolute values of the differences between the maximum peak height and the arithmetic mean height of the rough surface with respect to the average surface of the surface. The "developed area ratio (Sdr)" is the ratio by which the surface area increases due to changes in the surface structure. Here, the developed area ratio (Sdr) represents the ratio by which the total surface area (A1) due to the undulations of the surface structure increases with respect to the projected area (A0) of the measured unit area in the measured unit area, and is obtained by calculation according to formula (1). The developed area ratio is measured by an instrument capable of obtaining the surface morphology, such as a confocal laser scanning microscope, a three-dimensional white light interferometer, or a scanning electron microscope, in accordance with the method specified in ISO25178.

[0024] Sdr(%) = [(A1 / A0) - 1] x 100% Formula (1)

[0025] In the present invention, the Sp and Sa values respectively mean the maximum peak height and the arithmetic mean height with respect to the outer wall surface of the shaft body of the protruding edge formed in the groove-like structure when forming the groove-like structure, and the Sdr value is the surface area increased by the groove-like structure and the protruding edge on the outer wall surface of the shaft body after forming the groove-like structure.

[0026] In the present invention, as a method of forming these groove-like structures 150 on the outer wall 130 of the shaft body 110, for example, engraving by a cutting tool or a laser can be adopted as a structure forming method. When engraving with a cutting tool, by adjusting the feed depth, angle, etc. of the cutting tool, or when engraving with a laser, by adjusting the laser energy, angle, movement speed, focus control, etc., when forming these groove-like structures 150, a protruding edge 151 protruding from the surface of the outer wall 130 can be formed simultaneously.

[0027] When the cleaning roller shaft center 100 of the present invention is combined with a foam material (not shown), the foam material can penetrate into these groove-like structures 150. The outer wall 130 of the shaft body 110 has these groove-like structures 150 and a protruding edge 151 protruding from the surface of the outer wall 130. These microstructures greatly increase the surface area of the shaft body, improve the contact area between the foam material and the cleaning roller shaft center 100, strengthen the effective adhesion force between the foam material and the interface of the cleaning roller shaft center 100, and the soft foam material can avoid the defect of uneven local torsional force caused by increasing factors such as the pressing pressure, water pressure and rotation speed of the roller.

[0028] Since the radial extension direction D2 of these groove-like structures 150 and the axial direction D1 of the shaft body 110 have an included angle of -80° to 80°, during the rotation of the cleaning roller, these groove-like structures 150 can provide a component force for the cleaning roller to fix the foam material. In addition, when the maximum peak height (Sp) of these protruding edges 151 of these groove-like structures 150 is 500 μm to 900 μm and the arithmetic mean height (Sa) is 70 μm to 300 μm, a force acting perpendicular to the surface tangent direction of the outer wall 130 of the shaft body 110 can be provided, and the sliding along the rotation direction of the foam material can be avoided.

[0029] Please refer to FIG. 2. It is the cleaning roller axis 200 in another embodiment of the present invention. The plurality of groove-like structures 250 on the surface of the outer wall 230 of the shaft body 210 of the cleaning roller axis 200 have the same radial extension direction arranged in parallel, or are arranged in a staggered pattern with a plurality of different radial extension directions. As long as the included angles with the axial direction D1 are all between -80° and 80°, the included angles (A2, A3) between the radial extension directions D2, D3 in FIG. 2 and the axial direction D1 are all between -80° and 80°. When these groove-like structures 250 are arranged in a staggered pattern, the included angle between the radial extension directions D2 and D3 of the stagger (please refer to the included angle A4 in FIG. 5) is between 10° and 45°, preferably between 20° and 30°. On the surface of the outer wall 230 of the shaft body, due to the staggered arrangement design of the groove-like structures 250, the cleaning roller axis 200 can further provide a better anchor force when combined with a foam material (not shown), and the shaft body 210 and the foam material can be more tightly combined.

[0030] FIGS. 3(a) to 3(c) are schematic cross-sectional views in the extension direction of the groove-like structure of the cleaning roller axis of the present invention. The protruding edge of the groove-like structure 350 is not shown. The cleaning roller axis of the present invention provides a groove-like structure 350 on the outer wall 330 of the shaft body 310. The bottom shape of the cross-section of the groove-like structure 350 is not particularly limited and may be, for example, triangular, quadrangular, or a part of an arc shape, and may be determined according to the method of forming the groove-like structure 350, such as a structural forming method by a cutting tool or laser engraving. In a preferred embodiment of the present invention, the opening width w1 of the plurality of groove-like structures 350 is between 0.1 mm and 0.9 mm so as to be advantageous for the infiltration and adhesion of a foam material (not shown). Also, the depth h of the plurality of groove-like structures 350 is between 0.35 mm and 1.2 mm. Since the depth h of these groove-like structures 350 is much smaller than the conventional general wall thickness of the shaft body 310, it does not affect the strength of the entire shaft body 310.

[0031] Figs. 4(a) to 4(d) are schematic diagrams for explaining embodiments of the groove structure of the cleaning roller axis of the present invention. Please refer to Figs. 4(a) and 4(b). They show that a plurality of groove structures 450a and 450b on the cleaning roller axes 400a and 400b are uniformly and periodically spaced and arranged parallel or staggeredly on the surface of the outer wall 430 of the shaft body 410. As shown in Figs. 4(c) and 4(d), the plurality of groove structures 450c and 450d of the cleaning roller axes 400c and 400d are arranged parallel or staggeredly and distributed over the entire surface of the outer wall 430 of the shaft body 410. The groove structures 450a to 450d on the outer wall 430 of the shaft body 410 can all provide a good and uniform adhesion interface between the outer wall 430 of the shaft body 410 and the foam material, be tightly bonded to the foam material, and achieve the effect that no relative sliding or torsion occurs.

[0032] When the outer edge of the through hole 440 on the outer wall 430 of the shaft body 410 is connected to the groove structures 450a to 450d, after the cleaning liquid in the hollow inner flow path flows out from the through hole 440, it partially flows into the groove structures 450a to 450d and can flow more quickly from the side to the outer wall surface of the cleaning roller axis due to the rotation of the cleaning roller axis, achieving an overall uniform dispersion effect.

[0033] In another embodiment of the cleaning roller axis of the present invention, the hollow inner flow path has a closed end and an inlet end installed opposite to each other, and the inner diameter of the hollow inner flow path of the shaft body is between 9 mm and 22 mm. Also, the distribution number, arrangement method, and hole diameter size of the through holes in the shaft body of the cleaning roller axis of the present invention can be designed according to the needs of actual applications. In a preferred embodiment of the cleaning roller axis of the present invention, the through holes are distributed at equal intervals in the radial direction and arranged along the axial direction of the shaft body. In a preferred embodiment of the present invention, the shaft body has four rows of through holes that are distributed at equal intervals in the radial direction and have a hole diameter between 2.5 mm and 6 mm along the axial direction.

[0034] The above-described embodiments are merely for explaining the technical idea and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and implement it based thereon. Accordingly, the patent scope of the present invention should not be limited thereby, and all equivalent changes or modifications made in accordance with the spirit disclosed in the present invention should still be included in the patent scope of the present invention.

Explanation of Reference Numerals

[0035] In order to make the above and other objects, features, advantages, and embodiments of the present disclosure clearer and easier to understand, the explanation of the attached reference numerals is as follows. 100, 200, 400a, 400b, 400c, 400d: Washing roller axis 110, 210, 310, 410: Shaft body 120: Hollow internal flow path 120a: Inlet end 120b: Closed end 130, 230, 330, 430: Outer wall 140, 440: Through hole 150, 250, 350, 450a, 450b, 450c, 450d: Grooved structure 151: Protruding edge D1: Axial direction D2, D3: Radial extension direction h: Depth w1: Opening width r: Hole diameter R: Inner diameter A2, A3, A4: Included angle

Claims

1. It includes a shaft body and a hollow internal flow path located within the shaft body. On the outer wall surface of the shaft body, there are a plurality of through holes that communicate with the hollow internal flow path and are dispersedly provided. On the outer wall surface of the shaft body, there are a plurality of groove-like structures that are installed in the radial direction and extend in a circumferential manner, and have a protruding edge that protrudes from the outer wall surface of the shaft body. The included angle between the radial extension direction of the plurality of groove-like structures and the axial direction of the shaft body is between -80° and 80°. And the developed area ratio (Sdr) of the outer wall surface of the shaft body having the plurality of groove-like structures is between 300% and 800%. And the arithmetic mean height (Sa) of the protruding edge is between 70 μm and 300 μm. Cleaning roller shaft center.

2. The maximum peak height (Sp) of the protruding edges of the plurality of groove-like structures is between 500 μm and 900 μm. The cleaning roller shaft center according to Claim 1.

3. The plurality of groove-like structures extend in a parallel arrangement or in a staggered arrangement. The cleaning roller shaft center according to Claim 1.

4. When the plurality of groove-like structures extend in a staggered arrangement, the included angle of the stagger is between 10° and 45°. The cleaning roller shaft center according to Claim 3.

5. The cross-sectional shape in the extension direction of the plurality of groove-like structures is triangular, quadrilateral, or partially arc-shaped. The cleaning roller shaft center according to Claim 1.

6. The opening width of the plurality of groove-like structures is between 0.1 mm and 0.9 mm. The cleaning roller shaft center according to Claim 5.

7. The depth of the plurality of groove-like structures is between 0.35 mm and 1.2 mm. The cleaning roller shaft center according to Claim 1.

8. The plurality of groove-like structures are distributed on the entire outer wall surface of the shaft body. The cleaning roller shaft center according to Claim 1.

9. The inner diameter of the hollow internal flow path is between 9 mm and 22 mm. The cleaning roller shaft center according to Claim 1.

10. The hole diameter of the plurality of through holes of the shaft body is between 2.5 mm and 6 mm. The cleaning roller shaft center according to Claim 1.

11. The hollow internal flow path has a closed end and an inlet end that are oppositely installed. The cleaning roller shaft center according to Claim 1.

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