Clamping device and substrate holding device

Abstract

To provide a clamp device capable of suppressing the generation of particles accompanying the operation of a clamp mechanism, and a substrate holding device having the clamp device.SOLUTION: A clamp device includes a pin, a base having a pair of stands each having a pair of first openings facing in the axial direction of the pin and through which the pin is inserted, a lever including an operation portion, a clamp portion, and a support portion provided between the clamp portion and the operation portion and having a second opening through which the pin is inserted, an urging portion that includes a first locking portion locked to the base, a second locking portion locked to the operation portion, and a coil portion that is provided between the first locking portion and the second locking portion, and through which the pin is inserted, and presses the clamp portion against a substrate by elastic force of the coil portion acting around the axis of the pin, and one or more first bearings having a first inner ring through which the pin is inserted, and a first outer ring opposed to the inner peripheral surface of the coil portion with a space therebetween.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a clamping device used to hold a substrate and to a substrate holding device having a clamping device. [Background technology]

[0002] In recent years, carrier circulation type inline sputtering equipment has become widely used. This type of inline sputtering equipment is known to have a horizontal (horizontal) transfer system in which the substrate is transferred in a horizontally lying position, and a vertical (vertical) transfer system in which the substrate is transferred in an upright position. Compared to the horizontal transfer system, the vertical transfer system has the advantage of minimizing the increase in the installation area of the equipment due to the increase in the size of the substrate.

[0003] A vertical transfer device uses a carrier that transfers substrates in a substantially vertical position. The carrier requires a substrate holding structure that can stably hold the substrate in position. For example, Patent Document 1 describes a structure that holds substrates with multiple clamps provided around the periphery of the opening of the carrier. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] WO2008 / 133139 publication Summary of the Invention [Problem to be solved by the invention]

[0005] However, with the configuration of Patent Document 1, particles (metal dust) generated by the mechanical clamping mechanism around the substrate may adhere to the substrate, resulting in poor film formation.

[0006] In view of the above circumstances, an object of the present invention is to provide a clamping device that can suppress the generation of particles that accompany the operation of the clamping mechanism, and a substrate holding device that has the clamping device. [Means for solving the problem]

[0007] A clamping device according to one aspect of the present invention comprises: Pin, a base having a pair of stands each having a pair of first openings that face each other in the axial direction of the pin and through which the pin is inserted; a lever having an operating portion, a clamping portion, and a support portion provided between the clamping portion and the operating portion and having a second opening through which the pin is inserted; a biasing section having a first locking section that is locked to the base, a second locking section that is locked to the operation section, and a coil section that is provided between the first locking section and the second locking section and through which the pin is inserted, the biasing section pressing the clamp section against the board by the elastic force of the coil section that acts around the axis of the pin; one or more first bearings each having a first inner ring through which the pin is inserted and a first outer ring facing an inner circumferential surface of the coil portion with a space therebetween; It is equipped with:

[0008] The first outer ring of the first bearing faces the inner circumferential surface of the coil portion with a gap therebetween. Therefore, even if the coil portion is torsionally deformed and reduced in diameter when the clamp is released, the inner circumferential surface of the coil portion is unlikely to come into contact with the first outer ring of the first bearing. Therefore, particles that may be generated when the inner circumferential surface of the coil portion comes into contact with the first outer ring of the first bearing are unlikely to be generated. Furthermore, even if the inner circumferential surface of the coil portion comes into contact with the first outer ring of the first bearing, the first outer ring of the first bearing rotates in the circumferential direction along with the circumferential twist caused by the deformation of the coil portion. In this way, the circumferential twist of the coil portion and the circumferential rotation of the first outer ring of the first bearing occur substantially simultaneously and with substantially the same displacement amount, so particles that may be generated due to relative displacement between the inner circumferential surface of the coil portion and the first outer ring of the first bearing that come into contact with each other are unlikely to be generated.

[0009] the coil portion has a plurality of winding portions wound in a twisting direction when receiving an operating force applied to the operating portion, A pitch, which is the distance between the plurality of winding portions in the axial direction, may be set to a size such that adjacent winding portions do not come into contact with each other over the rotation range of the operating unit.

[0010] Because the multiple winding portions are arranged at intervals from one another, even if the pitch between adjacent winding portions becomes shorter (closer) due to the expansion of the axial length of the coil portion caused by torsional deformation of the coil portion being converted into an axial compressive force generated between a pair of stands, adjacent winding portions are unlikely to come into contact with each other. In other words, when the coil portion torsionally deforms, there is sufficient play in the pitch between adjacent winding portions, so the axial movement of the winding portions is absorbed by the play in the pitch. This reduces the generation of particles (metal dust) that would otherwise be generated by contact between adjacent winding portions. Furthermore, because adjacent winding portions do not come into contact with each other, the biasing portion is unlikely to buckle into a "L" shape around the center. Therefore, when the coil portion torsionally deforms, the coil portion maintains a spaced parallel state with respect to the pin, and the inner circumferential surface of the coil portion is unlikely to come into contact with the first outer ring of the first bearing. This reduces the generation of particles that could be generated by contact between the inner circumferential surface of the coil portion and the first outer ring of the first bearing.

[0011] A natural length in the axial direction of the biasing portion may be shorter than a distance in the axial direction between the pair of inner surfaces of the pair of stands.

[0012] The natural length (free length), which is the axial length of the spring portion in an unloaded state before a preload is applied, is shorter than the axial distance between the pair of inner surfaces of the pair of stands. Therefore, even when the coil portion is assembled into the pin with a preload applied, sufficient space can be secured between the coil portion and the pin and between adjacent winding portions.

[0013] The clamping device a first collar through which the pin is inserted, having an outer circumferential surface facing the inner circumferential surface of the coil portion with a space therebetween, and contacting the first bearing in the axial direction to position the first bearing; may further comprise:

[0014] The first collar positions the first bearing, so that the first bearing can be maintained facing the inner circumferential surface of the coil portion with a space therebetween.

[0015] The first collar may be in contact with the first inner ring of the first bearing in the axial direction and out of contact with the first outer ring.

[0016] Because the first collar is not in contact with the first outer ring of the first bearing, the first collar does not interfere with the rotation of the first outer ring, allowing the first outer ring to rotate freely. In addition, particles that can be generated by the first collar coming into contact with the first outer ring are less likely to be generated.

[0017] The clamping device a first washer through which the pin is inserted and which contacts the first bearing and the support portion of the lever in the axial direction to position the first bearing relative to the lever; may further comprise:

[0018] The first washer positions the first bearing, so that the first bearing can be maintained facing the inner circumferential surface of the coil portion with a space therebetween.

[0019] The first washer may be in contact with the first inner ring of the first bearing in the axial direction and out of contact with the first outer ring.

[0020] Because the first washer does not come into contact with the first outer ring of the first bearing, the first washer does not interfere with the rotation of the first outer ring, allowing the first outer ring to rotate freely. In addition, particles that can be generated by the first washer coming into contact with the first outer ring are less likely to be generated.

[0021] The clamping device a pair of second bearings each having a second inner ring through which the pin is inserted and a second outer ring facing the inner circumferential surfaces of the pair of first openings of the pair of stands of the base; may further comprise:

[0022] Furthermore, because the body of the pin is inserted into the first bearing, it does not come into direct contact with the inner surface of the first opening of the stand, which reduces the generation of particles that could otherwise be generated when the body of the pin comes into contact with the inner surface of the first opening of the stand when the pin rotates inside the first opening of the stand.

[0023] The clamping device a pair of second collars through which the pin is inserted and which contact the first bearing and the second bearing in the axial direction to position the first bearing relative to the base; may further comprise:

[0024] Furthermore, because the body of the pin is inserted through the second collar, it does not come into direct contact with the inner surface of the first opening of the stand, which reduces the generation of particles that could otherwise be generated when the body of the pin comes into contact with the inner surface of the first opening of the stand when the pin rotates within the first opening of the stand.

[0025] The second collar may be in axial contact with the first inner ring of the first bearing and out of contact with the first outer ring, and may be in axial contact with the second inner ring of the second bearing and out of contact with the second outer ring.

[0026] Because the second collar is not in contact with the first outer ring of the first bearing, the second collar does not interfere with the rotation of the first outer ring, allowing the first outer ring to rotate freely. In addition, particles that can be generated by the first washer coming into contact with the first outer ring are less likely to be generated.

[0027] The clamping device a pair of restricting portions that contact the second inner rings of the pair of second bearings and do not contact the second outer rings, and restrict the pins from falling out of the pair of first openings; may further comprise:

[0028] Because the restricting portion does not come into contact with the second outer ring, the restricting portion does not interfere with the rotation of the second outer ring, allowing the second outer ring to rotate freely. In addition, particles that can be generated by the restricting portion coming into contact with the second outer ring are less likely to be generated.

[0029] A substrate holding device according to one aspect of the present invention includes: a first frame; a second frame that partially faces the first frame; a clamping device that holds a substrate between the first frame and the second frame; Equipped with The clamping device is Pin, a base fixed to the first frame and including a pair of stands each having a pair of first openings that face each other in the axial direction of the pin and through which the pin is inserted; a lever having an operating portion, a clamping portion, and a support portion provided between the clamping portion and the operating portion and having a second opening through which the pin is inserted; a biasing section having a first locking section that is locked to the base, a second locking section that is locked to the operation section, and a coil section that is provided between the first locking section and the second locking section and through which the pin is inserted, the biasing section pressing the clamp section against the board by the elastic force of the coil section that acts around the axis of the pin; one or more first bearings each having a first inner ring through which the pin is inserted and a first outer ring facing an inner circumferential surface of the coil portion with a space therebetween; It has. [Effects of the Invention]

[0030] According to the present invention, it is possible to suppress the generation of particles that accompany the operation of the clamping mechanism.

[0031] The effects described here are not necessarily limited to those described herein, and may be any of the effects described in this disclosure. [Brief explanation of the drawings]

[0032] [Figure 1] 1 is a perspective view showing a clamp device (excluding a cover) according to a first embodiment of the present invention. [Figure 2] FIG. 2 is a perspective view showing the clamp device (including the cover). [Figure 3] 3 is a cross-sectional view showing the clamp device (including the cover) of FIG. 2 cut along an XY plane passing through the axis of a pin, showing the upper side in the Z direction. [Figure 4] 2 is a cross-sectional view showing the clamp device (excluding the cover) of FIG. 1 cut along an XY plane passing through the axis of a pin, showing the lower side in the Z direction (part of the biasing portion is not shown). [Figure 5] FIG. 10 is a plan view showing a double torsion spring that is a biasing portion. [Figure 6] Specific examples of dimensional values of the clamping device are shown below. [Figure 7] FIG. 2 is a schematic perspective view showing a substrate holding device. [Figure 8] FIG. 2 is a side view showing a clamp device included in the substrate holding device. [Figure 9] 10 is a cross-sectional view showing the upper side in the Z direction of a clamping device (excluding a cover) according to a second embodiment of the present invention, cut along an XY plane passing through the axis of a pin. FIG. [Figure 10] FIG. 10 is a cross-sectional view showing the upper side in the Z direction of a clamping device (excluding the cover) according to a comparative example, cut along an XY plane passing through the axis of a pin. [Figure 11] FIG. 10 is a plan view showing a double torsion spring that is a biasing portion. [Figure 12] Specific examples of dimensional values of the clamping device are shown below. DETAILED DESCRIPTION OF THE INVENTION

[0033] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0034] I. First Embodiment

[0035] 1. Clamping device structure

[0036] FIG. 1 is a perspective view showing a clamping device (excluding a cover) according to a first embodiment of the present invention. FIG. 2 is a perspective view showing the clamping device (including a cover). FIG. 3 is a cross-sectional view showing the upper side in the Z direction of the clamping device (including a cover) of FIG. 2, cut along an XY plane passing through the axis of a pin. FIG. 4 is a cross-sectional view showing the lower side in the Z direction of the clamping device (excluding a cover) of FIG. 1, cut along an XY plane passing through the axis of a pin (a part of the biasing portion is not shown).

[0037] The clamp device 1 includes a pin 100, a base 200, a lever 300, a biasing portion 400, four first bearings 500A, 500B, 500C, and 500D, two first collars 600A and 600B, two first washers 700A and 700B, a pair of second bearings 800A and 800B, and a pair of second collars 900A and 900B. The clamp device 1 may further include a cover 1000.

[0038] Hereinafter, when there is no need to distinguish between the four first bearings 500A, 500B, 500C, and 500D, the two first collars 600A and 600B, the two first washers 700A and 700B, the pair of second bearings 800A and 800B, and the pair of second collars 900A and 900B, they will be simply referred to as the first bearings 500A, 500B, 500C, and 500D, the two first collars 600, the first washers 700, the second bearings 800, and the second collars 900, respectively.

[0039] The base 200 has a base plate 205 and a pair of stands 201 and 202 that stand upright from the base plate 205 and face each other.

[0040] In this specification, the direction in which the pair of stands 201, 202 rise from the base plate 205 is referred to as the Z direction, the direction in which the pair of stands 201, 202 face each other and the axial direction of the pin 100 is referred to as the Y direction, and the direction perpendicular to the Z direction and the Y direction is referred to as the X direction. A plane parallel to the surface 206 of the base plate 205 is referred to as the XY plane.

[0041] The base plate 205 has two through holes 207 and 208 that penetrate in the Z direction. Bolts 209 and 210 are inserted into the through holes 207 and 208, respectively, thereby fixing the clamp device 1 to a first frame (described later) of the substrate holding device.

[0042] The pair of stands 201, 202 each have first openings 203, 204 that face each other in the Y direction. The pair of first openings 203, 204 are circular. The inner diameters of the pair of first openings 203, 204 are slightly larger than the diameter of the main body 101 of the pin 100. The pin 100 is inserted into the pair of first openings 203, 204.

[0043] Pin 100 has a long, cylindrical main body 101, a head 102 provided at one axial end of main body 101, and a step 107 (FIG. 4) between main body 101 and head 102. Step 107, which serves as a restricting portion, has a diameter larger than that of main body 101, and restricts pin 100 from falling out of one of first openings 203 of base 200 by engaging with second inner ring 801A of second bearing 800A.

[0044] Lever 300 has an operating portion 301 at one end in the X direction, a clamp portion 302 at the other end in the X direction, and a support portion 304 provided between clamp portion 302 and operating portion 301 and having a second opening 303. The diameter of second opening 303 is slightly larger than the diameter of main body 101 of pin 100. Main body 101 of pin 100 is inserted into second opening 303, and support portion 304 is positioned approximately in the center of the pair of stands 201, 202.

[0045] FIG. 5 is a plan view showing a double torsion spring that is the biasing portion.

[0046] The biasing portion 400 is a double torsion spring and has a pair of oppositely wound coil portions 401 and 402, arms 403 and 404 as a first locking portion, and a center portion 407 as a second locking portion.

[0047] The coil portions 401, 402 each have a plurality of winding portions 405, 406 adjacent to each other in the Y direction. The plurality of winding portions 405, 406 are wound in a direction in which the coil portion twists when an operating force is applied to the operating portion 301, and are arranged at a pitch (the distance in the Y direction between the plurality of winding portions 405, 406). The main body portion 101 of the pin 100 is inserted into the coil portions 401, 402. The inner diameter of the coil portions 401, 402 is larger than the outer diameter of a first bearing 500 (described below).

[0048] Arms 403 and 404 extend from coil portions 401 and 402, respectively, and constitute both ends of urging portion 400. Arms 403 and 404 are engaged with surface 206 of base plate 205, and face inner surfaces 211 and 212 of the pair of stands 201 and 202, respectively. The length of urging portion 400 in the Y direction, i.e., the length in the Y direction from arm 403 to arm 404, is slightly shorter than the distance in the Y direction between the pair of inner surfaces 211 and 212 of the pair of stands 201 and 202. Arms 403 and 404 may or may not contact the inner surfaces 211 and 212 of the pair of stands 201 and 202, respectively.

[0049] Central portion 407 connects coil portions 401, 402 in a U-shape. Central portion 407 is engaged with underside 305 of operating portion 301 of lever 300. When biasing portion 400 is attached to pin 100 with a preload applied at a predetermined torsion angle in the winding direction of winding portions 405, 406, arms 403, 404 are pressed against surface 206 of base plate 205, and central portion 407 is pressed against underside 305 of operating portion 301. As a result, central portion 407 of biasing portion 400 biases operating portion 301 of lever 300 upward in the Z direction relative to base plate 205 of base 200, causing clamp portion 302 to generate a predetermined pressing force (holding force) against the substrate.

[0050] When the operating portion 301 of the lever 300 is pressed downward in the Z direction against the biasing force of the biasing portion 400, the lever 300 rotates relative to the base 200 around the support portion 304 so that the clamping portion 302 moves upward in the Z direction, thereby displacing the clamping portion 302 and the operating portion 301 relative to the base 200 and releasing the pressing force of the clamping portion 302 on the substrate.

[0051] As described above, the winding portions 405, 406 are arranged at a pitch (interval) from each other. Specifically, this pitch is set to a predetermined size so that adjacent winding portions 405, 406 do not contact each other across the rotation range of the operation unit 301. In other words, when the operation unit 301 is pressed and the coil portions 401, 402 are twisted in the winding direction, the axial lengths of the coil portions 401, 402 extend. After the tips of the coil portions 401, 402 contact the pair of stands 201, 202, the extension of the axial lengths of the coil portions 401, 402 is converted into a compressive force on the coil portions 401, 402 between the pair of stands 201, 202. Therefore, in this embodiment, the pitch of the winding portions 405, 406 is set so that adjacent winding portions do not contact each other due to the compressive action occurring in the coil portions 401, 402. The pitch is not particularly limited and can be set arbitrarily depending on the dimensions of each component of the clamp device 1.

[0052] To prevent the windings of coil portions 201, 202 from contacting each other throughout the rotation range of operation portion 301, the natural length (free length), which is the axial length of the biasing portion in an unloaded state before a preload is applied, may be set shorter than the axial distance between the pair of inner surfaces of the pair of stands. This ensures sufficient space between the coil portion and the pin and between adjacent windings even when the coil portion is fitted to the pin with a preload applied.

[0053] The pin 100 is not set bare in the stands 201 and 202 of the base 200. Instead, the pin 100 is inserted through a first bearing 500, a first collar 600, a first washer 700, a second bearing 800, and a second collar 900, each of which has an annular shape. The pin 100 is set in the stands 201 and 202 with the first bearing 500, the first collar 600, the first washer 700, the second bearing 800, and the second collar 900 attached. In addition, the coil portions 401 and 402 of the biasing portion 400 are positioned so as to face the first bearing 500 and the first collar 600 attached to the pin 100. These components will be described below.

[0054] The first bearing 500 is a greaseless radial bearing. The first bearing 500 has a first inner ring 501, a first outer ring 502, and a rotating body (typically a ball) between the first inner ring 501 and the first outer ring 502. The inner diameter of the first inner ring 501 is slightly larger than the diameter of the main body 101 of the pin 100, and the main body 101 of the pin 100 is inserted into the first inner ring 501. The inner diameter of the coil portions 401 and 402 is larger than the outer diameter of the first bearing 500. Specifically, the difference between the inner diameters of the coil portions 401 and 402 and the outer diameter of the first bearing 500 is larger than the amount of diameter contraction of the coil portions 401 and 402 when the lever 300 is operated and the coil portions 401 and 402 are torsionally deformed in the winding direction. The first outer rings 502A and 502B of the first bearings 500A and 500B face the inner circumferential surface of one coil portion 401 with a space therebetween. The first outer rings 502C and 502D of the first bearings 500C and 500D face the inner circumferential surface of the other coil portion 402 with a space therebetween.

[0055] The inner diameter of the first collar 600 is slightly larger than the diameter of the main body 101 of the pin 100. The outer diameter of the first collar 600 is smaller than the outer diameter of the first bearing 500. The pin 100 is inserted into the first collar 600 to position the first bearing 500. The boundaries between the outer circumferential surface of the first collar 600 and both side surfaces in the Y direction are tapered.

[0056] Specifically, the first collar 600A is installed between the two first bearings 500A and 500B and contacts the first inner rings 501A and 501B of the first bearings 500A and 500B in the Y direction to position the first bearings 500A and 500B. The outer peripheral surface of the first collar 600A faces the inner peripheral surface of the coil portion 401 with a gap therebetween. The first collar 600A does not contact the first outer rings 502A and 502B.

[0057] The first collar 600B is installed between the two first bearings 500C, 500D and contacts the first inner rings 501C, 501D of the first bearings 500C, 500D in the Y direction to position the first bearings 500C, 500D. The outer peripheral surface of the first collar 600B faces the inner peripheral surface of the coil portion 401 with a gap therebetween. The first collar 600B does not contact the first outer rings 502C, 502D.

[0058] The inner diameter of the first washer 700 is slightly larger than the diameter of the main body 101 of the pin 100. The outer diameter of the first washer 700 is smaller than the outer diameter of the first bearing 500. The pin 100 is inserted through the first washer 700, and the first bearing 500 is positioned relative to the lever 300.

[0059] Specifically, the first washer 700A contacts the first inner ring 501B of the first bearing 500B and the support portion 304 of the lever 300 in the Y direction, thereby positioning the first bearing 500B relative to the lever 300. The first washer 700A is not in contact with the first outer ring 502B and the inner circumferential surface of the coil portion 401.

[0060] The first washer 700B contacts the first inner ring 501B of the first bearing 500C and the support portion 304 of the lever 300 in the Y direction, thereby positioning the first bearing 500C relative to the lever 300. The first washer 700B is not in contact with the first outer ring 502C and the inner circumferential surface of the coil portion 402.

[0061] The second bearing 800 is a greaseless radial bearing. The second bearing 800 has a second inner ring 801, a second outer ring 802, and a rotating body (typically a ball) between the second inner ring 801 and the second outer ring 802. The inner diameter of the second inner ring 801 is slightly larger than the diameter of the main body 101 of the pin 100, and the main body 101 of the pin 100 is inserted into the second inner ring 801. The second outer ring 802A of the second bearing 800A faces the inner circumferential surface of the first opening 203 of one stand 201. The second outer ring 802B of the second bearing 800B faces the inner circumferential surface of the first opening 204 of the other stand 202.

[0062] The inner diameter of the second collar 900 is slightly larger than the diameter of the main body 101 of the pin 100. The outer diameter of the second collar 900 is smaller than the outer diameters of the first bearing 500 and the second bearing 800. The pin 100 is inserted into the second collar 900, which positions the first bearing 500 and the second bearing 800. The boundaries between the outer circumferential surface of the second collar 900 and both side surfaces in the Y direction are tapered.

[0063] Specifically, the second collar 900A is installed between the first bearing 500A and the second bearing 800A, and is in contact with the first inner ring 501A of the first bearing 500A and the second inner ring 801A of the second bearing 800A in the Y direction, thereby positioning the first bearing 500A and the second bearing 800A. The outer peripheral surface of the second collar 900A is not in contact with the inner peripheral surface of the coil portion 401 and the inner peripheral surface of the first opening 203 of the stand 201. The second collar 900A is not in contact with the first outer ring 502A of the first bearing 500A and the second outer ring 802A of the second bearing 800A.

[0064] The second collar 900B is installed between the first bearing 500D and the second bearing 800B and contacts the first inner ring 501D of the first bearing 500D and the second inner ring 801B of the second bearing 800B in the Y direction to position the first bearing 500D and the second bearing 800B. The outer peripheral surface of the second collar 900B does not contact the inner peripheral surface of the coil portion 402 or the inner peripheral surface of the first opening 204 of the stand 202. The second collar 900B does not contact the first outer ring 502D of the first bearing 500D and the second outer ring 802B of the second bearing 800B.

[0065] Step 107 between head 102, which is one end of pin 100, and main body 101 functions as a restricting portion to prevent pin 100 from falling out of first opening 203 of stand 201 of base 200. Step 107 contacts second inner ring 801A of second bearing 800A and is not in contact with second outer ring 802A.

[0066] A stopper 104, a second washer 105, and a third washer 106 are inserted into the other end 103 of the pin 100 as a restricting portion. The stopper 104, the second washer 105, and the third washer 106 are arranged in this order from the other end 103 of the pin 100 toward the stand 202. The stopper 104 and the second washer 105 restrain the other end 103 of the pin 100 and restrict the pin 100 from falling out of the first opening 204 of the stand 202 of the base 200. The third washer 106 contacts the second inner ring 801B of the second bearing 800B and is not in contact with the second outer ring 802B.

[0067] 2.Specific examples of dimension values

[0068] FIG. 6 shows specific examples of dimensional values of the clamping device.

[0069] Below, an error of about ±0.1 mm is allowed for all dimensional values.

[0070] The pin 100 has a main body 101 with a diameter of 6 mm, a stepped portion 107 with a diameter of 6.8 mm, and a head 102 with a diameter of 9 mm.

[0071] The distance in the Y direction between the pair of inner surfaces 211, 212 of the pair of stands 201, 202 of the base 200 is 42 mm. The inner diameters of the first openings 203, 204 of the stands 201, 202 of the base 200 are 6.5 mm.

[0072] The length of urging portion 400 in the Y direction, i.e., the length in the Y direction from arm 403 to arm 404, is 40 mm. The pitch (spacing) of multiple winding portions 405, 406 is 1.4 mm. The spring constant is 0.5668 kgf·mm / deg. The torsion angle is 58.0 deg. The inner diameter of coil portions 401, 402 when uncompressed is 12.07 mm, and the inner diameter when compressed is 12.0 mm. In other words, the length of urging portion 400 in the Y direction, i.e., the length in the Y direction from arm 403 to arm 404 (40 mm) is slightly shorter than the distance in the Y direction between the pair of inner surfaces 211, 212 of the pair of stands 201, 202 (42 mm).

[0073] The outer diameter of the first collar 600 is 9 mm. The width of the first collar 600 in the Y direction is 5.8 mm. The inner diameter of the first collar 600 is 6 mm. The outer diameter of the side surface (flat surface excluding the taper) of the first collar 600 is 7.5 mm. The taper angle of the first collar 600 is 45°.

[0074] The outer diameter of the first bearing 500 is 12 mm. The width of the first bearing 500 in the Y direction is 4 mm. In other words, the outer diameter of the first collar 600 (9 mm) is smaller than the outer diameter of the first bearing 500 (12 mm).

[0075] The outer diameter of the second bearing 800 is 10 mm. The width of the second bearing 800 in the Y direction is 3 mm.

[0076] The width of the first washer 700 in the Y direction is 1 mm.

[0077] The width of the second collar 900 in the Y direction is 4.5 mm.

[0078] The width of lever 300 in the Y direction is 8 mm.

[0079] The distance (gap) in the Y direction between the inner surfaces 211, 212 of the stands 201, 202 and the coil portions 401, 402 is 2.1 mm. The gap between the second bearing 800 and the second collar 900 is 0.1 mm. The gap between the inner surfaces 211, 212 of the stands 201, 202 and the first bearing 500 is 2.1 mm. The gap between the first washer 700 and the support portion 304 of the lever 300 is 0.1 mm.

[0080] 3.Substrate holding device

[0081] Fig. 7 is a schematic perspective view showing a substrate holding device, and Fig. 8 is a side view showing a clamp device included in the substrate holding device.

[0082] The substrate holding device 10 holds the substrate 20 in a substantially vertical position in a carrier circulation in-line sputtering device of a vertical (vertical) transport type that transports the substrate 20 in an upright position. The substrate 20 is, for example, a mother glass of a liquid crystal display. The size of the substrate 20 is, for example, 2500 mm × 2200 mm (8.5th generation: G8.5) or 3000 mm × 3400 mm (10.5th generation, G10.5).

[0083] The substrate holding device 10 has a first frame 11, a second frame 12, and a plurality of clamping devices 1. The G8.5 size substrate holding device 10 has, for example, 20 clamping devices 1 arranged at predetermined intervals. The G10.5 size substrate holding device 10 has, for example, 24 clamping devices 1 arranged at predetermined intervals.

[0084] The first frame 11 and the second frame 12 are rectangular and annular (frame-shaped). The outer diameter of the first frame 11 is larger than the outer diameter of the second frame 12. Parts of the first frame 11 and the second frame 12 face each other in the Z direction. Specifically, the inner region of the first frame 11 and at least the outer region of the second frame 12 face each other in an annular manner in the Z direction. The substrate holding device 10 holds the substrate 20 by sandwiching the substrate 20 between the first frame 11 and the second frame 12 in the Z direction. Because the first frame 11 and the second frame 12 are formed in a rectangular and annular shape, film formation processing can be performed on both sides of the substrate 20.

[0085] The base 200 of the clamp device 1 is fixed to the inner region of the first frame 11 by bolts 209 and 210. The axial direction (Y direction) of the pin 100 of the clamp device 1 is parallel to the main surfaces (XY plane) of the first frame 11 and the second frame 12.

[0086] When the operating part 301 of the clamping device 1 is pressed downward in the Z direction, the lever 300 rotates around the support part 304 as the center of rotation so that the clamping part 302 moves upward in the Z direction, and the clamping part 302 is opened. With the clamping part 302 in the opened state, the substrate 20 is sandwiched between the first frame 11 and the second frame 12 in the Z direction.

[0087] When the downward pressing force in the Z direction on the operating unit 301 of the clamp device 1 is released, the lever 300 of the clamp device 1 receives the biasing force of the biasing unit 400 and rotates around the support unit 304 relative to the first frame 11 to which the base 200 is fixed, causing the clamp unit 302 and the operating unit 301 to be displaced relative to the first frame 11 to which the base 200 is fixed. The clamp unit 302 moves downward in the Z direction and comes into contact with the second frame 12. The biasing unit 400 biases the lever 300 against the first frame 11 to which the base 200 is fixed so as to hold the substrate 20 between the first frame 11 and the second frame 12.

[0088] 4. Clamping device movement

[0089] The movement of clamp device 1 when lever 300 rotates will be described in more detail. When operating portion 301 of lever 300 is operated in the −Z direction to rotate in the winding direction of coil portions 401 and 402, coil portions 401 and 402 of biasing portion 400 are twisted in the winding direction, reducing their winding diameter and increasing the number of turns accordingly, causing deformation such that their lengths in the Y direction increase. At this time, because coil portions 201 and 202 are sandwiched between one stand 201 and support portion 304 of lever 300, and between the other stand 202 and support portion 304 of lever 300, after coil portions 201 and 202 abut against stands 201 and 202 and support portion 304, a compressive force is applied to coil portions 401 and 402 by the amount of the increase in their lengths in the Y direction. As described above, the winding portions 405, 406 are formed at a predetermined pitch (interval) from each other, and the length in the Y direction of the initial state of the biasing portion 400, i.e., the length in the Y direction from the arm 403 to the arm 404, is slightly shorter than the distance in the Y direction between the pair of inner surfaces 211, 212 of the pair of stands 201, 202. This is to reduce the amount of reduction in the pitch (interval) of the winding portions 405, 406 when the coil portions 401, 402 are torsionally deformed by pressing the operation portion 301. Therefore, although the pitch between adjacent winding portions 405, 406 becomes shorter (the distance becomes closer), the adjacent winding portions 405, 406 are less likely to come into contact with each other. In other words, even if the coil portions 401, 402 are subjected to torsional deformation when the clamp is released, there is sufficient play in the pitch between the adjacent winding portions 405, 406, so that the movement of the winding portions 405, 406 in the Y direction is absorbed by the play in the pitch. Therefore, particles (metal dust) caused by contact between the adjacent winding portions 405, 406 are unlikely to be generated.

[0090] Furthermore, because adjacent winding portions 405, 406 do not come into contact with each other, biasing portion 400 is less likely to buckle into a V-shape around central portion 407. As described above, first outer ring 502 of first bearing 500 faces the inner circumferential surfaces of coil portions 401, 402 with a space therebetween. Specifically, the difference between the inner diameters of coil portions 401, 402 and the outer diameter of first bearing 500 is greater than the amount of diameter contraction of coil portions 401, 402 when lever 300 is operated to rotate coil portions 401, 402 in their winding directions. Therefore, even if coil portions 401, 402 are torsionally deformed and contract in diameter when clamping is released, coil portions 401, 402 maintain a parallel state with a space between them and pin 100, and the inner circumferential surfaces of coil portions 401, 402 are less likely to come into contact with first outer ring 502 of first bearing 500. Therefore, particles that may be generated when the inner circumferential surfaces of the coil portions 401 and 402 come into contact with the first outer ring 502 of the first bearing 500 are unlikely to be generated.

[0091] Furthermore, even if the inner circumferential surfaces of the coil portions 401, 402 come into contact with the first outer ring 502 of the first bearing 500, the first outer ring 502 of the first bearing 500 rotates in the circumferential direction along with the circumferential twisting that accompanies the deformation of the coil portions 401, 402. In this way, the circumferential twisting of the coil portions 401, 402 and the circumferential rotation of the first outer ring 502 of the first bearing 500 occur substantially simultaneously and with substantially the same amount of displacement, so particles that can be generated by relative displacement between the inner circumferential surfaces of the coil portions 401, 402 and the first outer ring 502 of the first bearing 500, which are in contact with each other, are unlikely to be generated.

[0092] Furthermore, the first collar 600, the first washer 700, and the second collar 900 contact the first inner ring 501 and the second inner ring 801 of the first bearing 500 and the second bearing 800, but do not contact the first outer ring 502 and the second outer ring 802. Therefore, the first collar 600, the first washer 700, and the second collar 900 do not interfere with the rotation of the first outer ring 502 and the second outer ring 802, and the first outer ring 502 and the second outer ring 802 can easily rotate freely. Furthermore, particles that may be generated when the first collar 600, the first washer 700, and the second collar 900 contact the first outer ring 502 and the second outer ring 802 are less likely to be generated.

[0093] Furthermore, the outer diameters of the first collar 600, the first washer 700, and the second collar 900 are smaller than the outer diameters of the first bearing 500 and the second bearing 800. Therefore, even if the coil portions 401, 402 are torsionally deformed and reduced in diameter when the clamping is released, the inner circumferential surfaces of the coil portions 401, 402 are unlikely to come into contact with the outer circumferential surfaces of the first collar 600, the first washer 700, and the second collar 900. Therefore, particles that may be generated when the inner circumferential surfaces of the coil portions 401, 402 come into contact with the outer circumferential surfaces of the first collar 600, the first washer 700, and the second collar 900 are unlikely to be generated.

[0094] Furthermore, because the main body 101 of the pin 100 is inserted through the second bearing 800 and the second collar 900, it does not come into direct contact with the inner surfaces of the first openings 203 and 204 of the stands 201 and 202. Therefore, when the pin 100 rotates within the first openings 203 and 204 of the stands 201 and 202, particles that may be generated when the main body 101 of the pin 100 comes into contact with the inner surfaces of the first openings 203 and 204 of the stands 201 and 202 are less likely to be generated.

[0095] Furthermore, the stepped portion 107 of the pin 100 and the third washer 106 serving as a restricting portion are in contact with the second inner ring 801 of the second bearing 800, but are not in contact with the second outer ring 802. Therefore, the stepped portion 107 of the pin 100 and the third washer 106 do not interfere with the rotation of the second outer ring 802, and the second outer ring 802 can easily rotate freely. Furthermore, particles that can be generated by the stepped portion 107 of the pin 100 and the third washer 106 coming into contact with the second outer ring 802 are less likely to be generated.

[0096] II. Second Embodiment

[0097] Hereinafter, the same components as those already described will be denoted by the same reference numerals, and the description thereof will be omitted.

[0098] 1. Clamping device structure

[0099] FIG. 9 is a cross-sectional view showing the upper side in the Z direction of a clamping device (excluding the cover) according to the second embodiment of the present invention, cut along an XY plane passing through the axis of a pin.

[0100] The clamp device 2 includes a pin 100, a base 200, a lever 300, a biasing portion 400, four first bearings 500A, 500B, 500C, and 500D, two first collars 600A and 600B, and a pair of second bearings 800A and 800B. The structures of the base 200, the lever 300, the biasing portion 400, the first bearings 500, and the second bearings 800 are similar to those of the first embodiment. However, the clamp device 2 does not include the first washer 700 and the second collar 900 of the first embodiment.

[0101] The pin 100 has a long, cylindrical main body 101 and a head 102 provided at one axial end of the main body 101. The clamp device 2 does not have the stepped portion 107 of the first embodiment. The head 102, which serves as a restricting portion, has a diameter larger than that of the main body 101 and restricts the pin 100 from falling out of one of the first openings 203 of the base 200.

[0102] Unlike the first embodiment, the first collar 600 does not have a tapered shape. The outer diameter of the first collar 600 is smaller than the outer diameter of the first bearing 500. Specific dimensional values are: the outer diameter of the first bearing 500 is 12 mm, and the outer diameter of the first collar 600 is 11.5 mm. The width of the first collar 600 in the Y direction is 7.8 mm. Specific dimensional values for the other components are the same as those for the first embodiment.

[0103] The first collar 600A is installed between the two first bearings 500A, 500B, and contacts the first inner rings 501A, 501B and first outer rings 502A, 502B of the first bearings 500A, 500B in the Y direction to position the first bearings 500A, 500B. The outer peripheral surface of the first collar 600A faces the inner peripheral surface of the coil portion 401 with a gap therebetween.

[0104] The first collar 600B is installed between the two first bearings 500C, 500D and contacts the first inner rings 501C, 501D and first outer rings 502C, 502D of the first bearings 500C, 500D in the Y direction to position the first bearings 500C, 500D. The outer peripheral surface of the first collar 600B faces the inner peripheral surface of the coil portion 401 with a gap therebetween.

[0105] The first inner rings 501B, 501C and first outer rings 502B, 502C of the first bearings 500B, 500C come into contact with the support portion 304 of the lever 300 in the Y direction. The first inner rings 501A, 501D and first outer rings 502A, 502D of the first bearings 500A, 500D come into contact with the inner surfaces 211, 212 of the pair of stands 201, 202 in the Y direction. The first bearing 500 is not in contact with the inner circumferential surfaces of the coil portions 401, 402.

[0106] The head 102, which is one end of the pin 100, serves as a restricting portion and prevents the pin 100 from falling out of the first opening 203 of the stand 201 of the base 200. The head 102 comes into contact with the second inner ring 801A and the second outer ring 802A of the second bearing 800A.

[0107] A stopper 104 and a second washer 105 are inserted into the other end 103 of the pin 100 as a restricting portion. The third washer 106 of the first embodiment is not provided. The stopper 104 and the second washer 105 are arranged in this order from the other end 103 of the pin 100 toward the stand 202. The stopper 104 and the second washer 105 restrain the other end 103 of the pin 100 and restrict the pin 100 from falling out of the first opening 204 of the stand 202 of the base 200. The second washer 105 comes into contact with the second inner ring 801B and the second outer ring 802B of the second bearing 800B.

[0108] In this embodiment, unlike the first embodiment, the first collar 600 contacts the first inner ring 501 and the first outer ring 502 of the first bearing 500 in the Y direction. The first inner ring 501 and the first outer ring 502 of the first bearing 500 contact the support portion 304 of the lever 300 in the Y direction. The head 102 of the pin 100 contacts the second inner ring 801A and the second outer ring 802A of the second bearing 800A. The second washer 105 contacts the second inner ring 801B and the second outer ring 802B of the second bearing 800B. Therefore, particles (metal dust) may be generated at these contact points. Since the other configurations are similar to those of the first embodiment, particles (metal dust) are less likely to be generated, as in the first embodiment.

[0109] III. Comparative example

[0110] 1. Clamping device structure

[0111] FIG. 10 is a cross-sectional view showing the upper side in the Z direction of a clamping device (excluding the cover) according to the comparative example, cut along an XY plane passing through the axis of the pin.

[0112] The clamp device 2 includes a pin 100, a base 200, a lever 300, a biasing portion 400, and four first collars 600A, 600B, 600C, and 600D. On the other hand, the clamp device 2 does not include the first bearing 500, the first washer 700, the second bearing 800, and the second collar 900 of the first embodiment.

[0113] The pin 100 has a long, cylindrical main body 101 and a head 102 provided at one axial end of the main body 101. The clamp device 2 does not have the stepped portion 107 of the first embodiment. The head 102, which serves as a restricting portion, has a diameter larger than that of the main body 101 and restricts the pin 100 from falling out of one of the first openings 203 of the base 200.

[0114] The first collar 600 faces the inner circumferential surfaces of the coil portion 401 and the coil portion 402 with a space therebetween.

[0115] The first collar 600A contacts the support portion 304 of the lever 300 and the first collar 600B in the Y direction. The first collar 600B contacts the first collar 600A and the inner surface 211 of the stand 201 in the Y direction. The first collar 600C contacts the support portion 304 of the lever 300 and the first collar 600D in the Y direction. The first collar 600D contacts the first collar 600C and the inner surface 212 of the stand 202 in the Y direction.

[0116] The head 102, which is one end of the pin 100, functions as a restricting portion and restricts the pin 100 from falling out of the first opening 203 of the stand 201 of the base 200. The head 102 comes into contact with the stand 201.

[0117] A stopper 104 and a second washer 105 are inserted into the other end 103 of the pin 100 as a restricting portion. The third washer 106 of the first embodiment is not provided. The stopper 104 and the second washer 105 are arranged in this order from the other end 103 of the pin 100 toward the stand 202. The stopper 104 and the second washer 105 restrain the other end 103 of the pin 100 and restrict the pin 100 from falling out of the first opening 204 of the stand 202 of the base 200. The second washer 105 comes into contact with the stand 202.

[0118] FIG. 11 is a plan view showing a double torsion spring that is the biasing portion.

[0119] The biasing portion 400 is a double torsion spring and includes a pair of counter-wound coil portions 401 and 402, arms 403 and 404, and a central portion 407.

[0120] Each of the coil portions 401 and 402 has a plurality of winding portions 405 and 406 adjacent to each other in the Y direction. The plurality of winding portions 405 and 406 are arranged at a pitch (interval) from each other. This pitch width is narrower than the pitch width in the first embodiment. Unlike the first embodiment, in the comparative example, when the lever 300 rotates around the support portion 304 relative to the base 200, causing the clamp portion 302 and the operating portion 301 to displace relative to the base 200, the adjacent plurality of winding portions 405 and 406 come into contact with each other.

[0121] 2.Specific examples of dimension values

[0122] FIG. 12 shows specific examples of dimensional values of the clamping device.

[0123] The pin 100 has a body 101 with a diameter of 6 mm and a head 102 with a diameter of 9 mm.

[0124] The distance in the Y direction between the pair of inner surfaces 211, 212 of the pair of stands 201, 202 of the base 200 is 40 mm (narrower than 42 mm in the first and second embodiments). The inner diameter of the first openings 203, 204 of the stands 201, 202 of the base 200 is 6.1 mm.

[0125] The length of the urging portion 400 in the Y direction, i.e., the length in the Y direction from arm 403 to arm 404, is 50.2 mm or less (longer than 40 mm in the first and second embodiments). The pitch (spacing) of the multiple winding portions 405, 406 is 0.7 mm (narrower than 1.4 mm in the first and second embodiments). The spring constant is 0.5895 kgf·mm / deg (higher than 0.5668 kgf·mm / deg in the first and second embodiments, i.e., higher rigidity). The twist angle is 55.0 deg (smaller than 58.0 deg in the first and second embodiments). The inner diameter of the coil portions 401, 402 when uncompressed is 11.56 mm (narrower than 12.07 mm in the first and second embodiments), and the inner diameter when compressed is 11.5 mm (narrower than 12.0 mm in the first and second embodiments). The wire diameter of the urging portion 400 is 1.8 mm.

[0126] The outer diameter of the first collar 600 is 11.5 mm. The width of the first collar 600 in the Y direction is 7.8 mm.

[0127] The width of lever 300 in the Y direction is 8 mm.

[0128] The gap between the inner surfaces 211 and 212 of the stands 201 and 202 and the first collar 600 is 0.4 mm.

[0129] 3. Comparative test

[0130] The weights of the pin 100, first collar 600, and urging portion 400 of each of the clamping device 1 of the first embodiment and the clamping device 3 of the comparative example were measured separately, without being assembled to the clamping device 1 or 3. Using a testing machine, the lever 300 of each of the clamping device 1 of the first embodiment and the clamping device 3 of the comparative example was opened and closed 100,000 times. After the opening and closing operations, the pin 100, first collar 600, and urging portion 400 were removed from each of the clamping device 1 of the first embodiment and the clamping device 3 of the comparative example, and their weights were measured. The weights of the pin 100, first collar 600, and urging portion 400 before and after the opening and closing operations were subtracted to determine the wear amount of each component. The sum of the wear amounts of the pin 100, first collar 600, and urging portion 400 was determined as the total wear amount of the clamping devices 1 and 3.

[0131] In the clamp device 1 of the first embodiment, the amount of wear of the pin 100 was 0 mg, the amount of wear of the first collar 600 was 0.3 mg, the amount of wear of the biasing portion 400 was 0.2 mg, and the total amount of wear of the clamp device 1 was 0.5 mg.

[0132] In the clamp device 3 of the comparative example, the amount of wear of the pin 100 was 0.5 mg, the amount of wear of the first collar 600 was 0.2 mg, the amount of wear of the biasing portion 400 was 3.8 mg, and the total amount of wear of the clamp device 3 was 4.5 mg.

[0133] The total amount of wear (0.5 mg) of the clamp device 1 of the first embodiment was 4.0 mg less than the total amount of wear (4.5 mg) of the clamp device 3 of the comparative example, and was reduced to 1 / 9.

[0134] In this embodiment, the biasing portion 400 is a double torsion spring having two coil portions, but as a modified example, it may be a single torsion spring having one coil portion.

[0135] Although the embodiments and modified examples of the present technology have been described above, the present technology is not limited to the above-described embodiments, and it goes without saying that various modifications can be made within the scope of the gist of the present technology. [Explanation of symbols]

[0136] 1, 2, 3 Clamping device 10 Substrate holding device 100 pins 1000 Covers 101 Main body 102 head 103 other end 104 Stopper 105 Second washer 106 Third Washer 107 Step 11 First Frame 12 Second Frame 20 Substrate 200 base Stands 201 and 202 203, 204 First opening 205 base plate 206 Surface 207, 208 Through holes 209, 210 volts 211, 212 Interior 300 levers 301 Operation section 302 Clamp part 303 Second Opening 304 Support part 305 Bottom surface 400 energizing part 401, 402 Coil section 403, 404 Arms 405 Winding section 407 Central part 500, 500A, 500B, 500C, 500D First Bearing 501, 501A, 501B, 501C, 501D First inner ring 502, 502A, 502B, 502C, 502D First outer ring 600, 600A, 600B, 600C, 600D First Color 700, 700A, 700B First Washer 800, 800A, 800B Second Bearing 801, 801A, 801B Second inner ring 802, 802A, 802B Second outer ring 900, 900A, 900B Second Color

Claims

1. Pin, a base having a pair of stands each having a pair of first openings that face each other in the axial direction of the pin and through which the pin is inserted; a lever including an operating portion, a clamping portion, and a support portion provided between the clamping portion and the operating portion and having a second opening through which the pin is inserted; a biasing section having a first locking section that is locked to the base, a second locking section that is locked to the operation section, and a coil section that is provided between the first locking section and the second locking section and through which the pin is inserted, the biasing section pressing the clamp section against the board by the elastic force of the coil section that acts around the axis of the pin; one or more first bearings each having a first inner ring through which the pin is inserted and a first outer ring facing an inner circumferential surface of the coil portion with a space therebetween; A clamping device comprising:

2. 2. The clamping device of claim 1, the coil portion has a plurality of winding portions wound in a twisting direction when receiving an operating force applied to the operating portion, The pitch, which is the distance between the plurality of winding portions in the axial direction, is set to a size such that the plurality of winding portions adjacent to each other do not come into contact with each other over the rotation range of the operating unit. Clamping device.

3. 3. The clamping device according to claim 1 or 2, The natural length of the biasing portion in the axial direction is shorter than the distance in the axial direction between the pair of inner surfaces of the pair of stands. Clamping device.

4. 4. The clamping device according to claim 1, a first collar through which the pin is inserted, having an outer circumferential surface facing the inner circumferential surface of the coil portion with a space therebetween, and contacting the first bearing in the axial direction to position the first bearing; The clamping device further comprises:

5. 5. The clamping device according to claim 4, The first collar is in contact with the first inner ring of the first bearing in the axial direction and is not in contact with the first outer ring. Clamping device.

6. 6. The clamping device according to claim 1, a first washer through which the pin is inserted and which contacts the first bearing and the support portion of the lever in the axial direction to position the first bearing relative to the lever; The clamping device further comprises:

7. 7. The clamping device of claim 6, The first washer is in contact with the first inner ring of the first bearing in the axial direction and is not in contact with the first outer ring. Clamping device.

8. 8. The clamping device according to claim 1, a pair of second bearings each having a second inner ring through which the pin is inserted and a second outer ring facing the inner circumferential surfaces of the pair of first openings of the pair of stands of the base; The clamping device further comprises:

9. 9. The clamping device of claim 8, a pair of second collars through which the pin is inserted and which contact the first bearing and the second bearing in the axial direction to position the first bearing relative to the base; The clamping device further comprises:

10. 10. The clamping device of claim 9, The second collar is in contact with the first inner ring of the first bearing in the axial direction and is not in contact with the first outer ring, and is in contact with the second inner ring of the second bearing in the axial direction and is not in contact with the second outer ring. Clamping device.

11. 9. The clamping device of claim 8, a pair of restricting portions that contact the second inner rings of the pair of second bearings and do not contact the second outer rings, and restrict the pins from falling out of the pair of first openings; The clamping device further comprises:

12. a first frame; a second frame partially facing the first frame; a clamping device that holds a substrate between the first frame and the second frame; Equipped with The clamping device is Pin, a base fixed to the first frame and including a pair of stands each having a pair of first openings that face each other in the axial direction of the pin and through which the pin is inserted; a lever including an operating portion, a clamping portion, and a support portion provided between the clamping portion and the operating portion and having a second opening through which the pin is inserted; a biasing section having a first locking section that is locked to the base, a second locking section that is locked to the lever, and a coil section that is provided between the first locking section and the second locking section and through which the pin is inserted, the biasing section pressing the clamp section against the board by the elastic force of the coil section that acts around the axis of the pin; one or more first bearings each having a first inner ring through which the pin is inserted and a first outer ring facing an inner circumferential surface of the coil portion with a space therebetween; have Substrate holding device.

Images