Substrate holding device and method for manufacturing film-coated substrate

Abstract

To provide a substrate holding device capable of easily attaching or detaching a plurality of substrates, and a method for manufacturing a substrate having a film.SOLUTION: A substrate holding device 11 includes: a pedestal 12; a first frame 13 provided in the pedestal 12 and holding a first substrate W1; a second frame 14 provided in the pedestal 12 and holding a second substrate W2; and a moving mechanism 15 for moving at least the first frame 13 in the first and second frames 13 and 14. The moving mechanism 15 can displace the first and second frames 13 and 14 to first and second relative positions, respectively; first and second substrates W1 and W2 in a longitudinal posture can be held at the first and second relative positions; a main surface S1 of the first frame 13 and a main surface S1 of the second frame 14 face each other at the first relative position; and the main surface S1 of the first frame 13 and the main surface S1 of the second frame 14 does not face each other at the second relative position.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a substrate holding device and a method for manufacturing a film-coated substrate. [Background technology]

[0002] When forming a functional film on a main surface of a substrate such as a glass substrate, a substrate holding device that holds the substrate in a vertical position is used, as described in Patent Documents 1 and 2. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2004-083997 [Patent Document 2] International Publication No. 2012 / 140801 Summary of the Invention [Problem to be solved by the invention]

[0004] As described above, a substrate holding device that holds substrates in a vertical position includes, for example, a base and a frame body that is attached to the base and holds the substrates. To hold a pair of substrates in a vertical position with their main surfaces facing each other, a substrate holding device is used that includes a pair of frame bodies that are attached to the base in opposing positions. In a substrate holding device that includes a pair of frame bodies in this manner, there may be limitations on the direction in which the substrates can be attached to or detached from the frame bodies. For example, if the pair of substrates need to be attached to or detached from the pair of frame bodies of the substrate holding device in a vertical position on the inner surfaces that face each other, the work of attaching or detaching the substrates may become complicated.

[0005] An object of the present invention is to provide a substrate holding device that can easily perform the work of attaching or detaching a plurality of substrates, and a method for manufacturing a film-coated substrate. [Means for solving the problem]

[0006] A substrate holding device that solves the above problem is a substrate holding device that holds multiple substrates, and includes a base, a first frame body that is mounted on the base and holds a first substrate, a second frame body that is mounted on the base and holds a second substrate, and a moving mechanism that moves at least the first frame body of the first and second frame bodies, wherein the moving mechanism is capable of displacing the first frame body and the second frame body between a first relative position and a second relative position, and at the first relative position and the second relative position, the moving mechanism is capable of holding the first substrate and the second substrate in a vertical orientation, and at the first relative position, the main surfaces of the first frame body and the second frame body are opposed to each other, and at the second relative position, the main surfaces of the first frame body and the second frame body are not opposed to each other.

[0007] According to this configuration, for example, at the first relative position, the first and second substrates can be transported or films can be provided on the first and second substrates. At the second relative position, the main surfaces of the first and second frames, which faced each other at the first relative position, no longer face each other. This allows the first substrate in a vertical orientation to be easily attached to or detached from the main surface of the first frame. Furthermore, the second substrate in a vertical orientation can be easily attached to or detached from the main surface of the second frame.

[0008] In the substrate holding device, the first frame body may have a first frame member and a second frame member, and the movement mechanism may move the first frame member and the second frame member, respectively. With this configuration, the first frame body can be easily moved by dividing it into the first frame member and the second frame member. This makes it easy to transition between both the first relative position and the second relative position.

[0009] In the substrate holding device, the movement mechanism may be at least one of a rotation mechanism that rotates the first frame and a slide mechanism that slides the first frame. With this configuration, the relative positions of the first frame and the second frame can be easily displaced by at least one of the rotation and slide movements of the first frame. This allows for easy transition between the first relative position and the second relative position. Furthermore, when the movement mechanism is a rotation mechanism, the first substrate and the second substrate can be attached or detached from the first frame and the second frame, respectively, from the same direction. This makes it easier to secure a working space for attaching or detaching the first substrate to or from the substrate holding device, for example.

[0010] In the substrate holding device, the first frame body may have a first frame member and a second frame member, and the moving mechanism may include a rotation mechanism that rotates the first frame member and the second frame member. With this configuration, the first frame body can be easily moved by dividing it into the first frame member and the second frame member. Furthermore, the relative positions of the first frame body and the second frame body can be easily displaced by the rotation of the first frame member and the second frame member. This allows for easy transition between both the first relative position and the second relative position.

[0011] In the substrate holding device, the first frame member and the second frame member may be arranged adjacent to each other on the left and right, and the rotation mechanism may rotate the first frame member and the second frame member about an axis extending in the vertical direction. This configuration allows the attachment and detachment of multiple first substrates to and from the first frame body to be performed at a relatively low position. This makes it easier to attach and detach first substrates to and from the first frame body.

[0012] In the substrate holding device, the first frame has a first covering portion covering the outer peripheral edge of the main surface of the first substrate, and the second frame has a second covering portion covering the outer peripheral edge of the main surface of the second substrate, and the first covering portion and the second covering portion cover the main surface opposite to the main surfaces where the first substrate and the second substrate face each other at the first relative position. With this configuration, for example, when providing a film on the main surface opposite to the main surfaces where the first substrate and the second substrate face each other, it is possible to prevent the film material from creeping onto the main surfaces where the first substrate and the second substrate face each other. This allows for increased accuracy when selectively providing a film on the main surfaces where the first substrate and the second substrate face each other.

[0013] In the substrate holding device, at least one of the first substrate and the second substrate may include a substrate having a side dimension of 500 mm or more. In the substrate holding device, the substrate can be attached and detached with the substrate in a vertical position, so that even for relatively large substrates, it is easy to ensure a working space for attaching and detaching the substrate to and from the substrate holding device.

[0014] A method for manufacturing a film-coated substrate is a method for manufacturing a film-coated substrate using a substrate holding device that holds a plurality of substrates, the substrate holding device comprising: a base; a first frame body that is provided on the base and that holds a first substrate; a second frame body that is provided on the base and that holds a second substrate; and a movement mechanism that moves at least the first frame body out of the first frame body and the second frame body, the movement mechanism being capable of displacing the first frame body and the second frame body to a first relative position and a second relative position, and at the first relative position and the second relative position, the first frame body and the second frame body are in a vertical orientation. a substrate holding device capable of holding the first substrate and the second substrate, wherein a main surface of the first frame and a main surface of the second frame face each other at the first relative position, and a main surface of the first frame and a main surface of the second frame do not face each other at the second relative position, and the manufacturing method includes a mounting step of mounting the first substrate and the second substrate to the substrate holding device, a film forming step of providing a film on the first substrate and the second substrate to obtain a film-coated first substrate and a film-coated second substrate, and a film forming step of removing the film-coated first substrate and the film-coated second substrate from the substrate holding device. Sutori The film forming step is performed at the first relative position, and at least one of the attaching step and the removing step is performed at the second relative position.

[0015] In the method for manufacturing a film-coated substrate, the attaching step and the detaching step may be performed at the second relative position. [Effects of the Invention]

[0016] According to the present invention, the work of attaching or detaching a plurality of substrates can be easily performed. [Brief explanation of the drawings]

[0017] [Figure 1] 1 is a schematic plan view illustrating a state in which a substrate holding device is used in an embodiment. [Figure 2] FIG. 2 is a schematic plan view illustrating a state in which the substrate holding device is used. [Figure 3]FIG. 2 is a perspective view showing a substrate holding device in a first relative position. [Figure 4] FIG. 10 is a perspective view showing the substrate holding device in a second relative position. [Figure 5] FIG. 10 is a perspective view illustrating the attachment and detachment of a substrate. [Figure 6] FIG. 10 is a perspective view showing a substrate holding device according to a first modified example. [Figure 7] FIG. 10 is a perspective view showing a substrate holding device according to a second modified example. [Figure 8] FIG. 10 is a perspective view showing a substrate holding device according to a third modified example. [Figure 9] FIG. 10 is a perspective view showing a substrate holding device according to a fourth modified example. DETAILED DESCRIPTION OF THE INVENTION

[0018] Hereinafter, an embodiment of a substrate holding device and a method for manufacturing a film-coated substrate will be described with reference to the drawings. Note that in the drawings, for the sake of convenience, some of the components may be shown exaggerated or simplified. Furthermore, the dimensional ratios of each part may differ from the actual ratios.

[0019] <Outline of the substrate holding device> As shown in Figures 1 to 3, substrate holding device 11 includes a base 12, a first frame 13, and a second frame 14. First frame 13 is provided on base 12 and holds a plurality of first substrates W1. Second frame 14 is provided on base 12 and holds a plurality of second substrates W2. Substrate holding device 11 includes a movement mechanism 15 that moves first frame 13.

[0020] The first substrate W1 has a first main surface W1a and a second main surface W1b opposite the first main surface W1a. The second substrate W2 has a first main surface W2a and a second main surface W2b opposite the first main surface W2a. Examples of the first substrate W1 and the second substrate W2 include glass substrates, resin substrates, and ceramic substrates. An example of the first substrate W1 and the second substrate W2 is a glass substrate that is rectangular in plan view. The first substrate W1 and the second substrate W2 are not limited to a single-layer structure and may have a multi-layer structure including, for example, a main layer made of glass or the like and an outer layer such as a printed layer. At least one of the first substrate W1 and the second substrate W2 may include a substrate having a side dimension of 500 mm or more. Furthermore, at least one of the first substrate W1 and the second substrate W2 may include a substrate having a side dimension of 600 mm or more, 700 mm or more, 800 mm or more, or 900 mm or more.

[0021] As shown in FIGS. 1 and 2, the substrate holding device 11 constitutes a part of the film forming equipment A. The film forming equipment A includes a film forming section A1 that forms a film on the first substrate W1 and the second substrate W2, and a mounting / dismounting section A2 that mounts and dismounts the first substrate W1 and the second substrate W2 on the substrate holding device 11. The substrate holding device 11 is provided with a movable film forming section A1 and a mounting / dismounting section A2. The film forming section A1 is equipped with a film forming device 16. Examples of film forming methods used in the film forming device 16 include physical vapor deposition (PVD) methods such as sputtering, chemical vapor deposition (CVD), and coating methods such as spraying and spin coating. Examples of films include films having predetermined optical properties (dielectric films, etc.), films having predetermined mechanical properties, films having predetermined chemical properties, and films having a predetermined color. The film forming material may be either an inorganic material or an organic material.

[0022] 1 and 2, a sputtering apparatus, which is an example of a film forming apparatus 16, includes a vacuum vessel 17, and a first sputtering source 18a and a second sputtering source 18b disposed within the vacuum vessel 17. The vacuum vessel 17 has an opening / closing section (not shown), through which the substrate holding device 11 is loaded and unloaded. The first sputtering source 18a is disposed to face the second main surface W1b of the first substrate W1. The second sputtering source 18b is disposed to face the second main surface W2b of the second substrate W2.

[0023] The film forming apparatus 16 produces a film-coated first substrate W11 in which a film is provided on the second main surface W1b of the first substrate W1. The film forming apparatus 16 produces a film-coated second substrate W21 in which a film is provided on the second main surface W2b of the second substrate W2.

[0024] <Base 12> 3, the base 12 of the substrate holding device 11 includes a main body 12a, a pair of first support columns 12b standing on the main body 12a, and a first beam 12c connecting the upper ends of the pair of first support columns 12b. The base 12 also includes a pair of second support columns 12d standing on the main body 12a, and a second beam 12e connecting the upper ends of the pair of second support columns 12d.

[0025] The base 12 of the substrate holding device 11 has wheels 12f journaled on the main body 12a. In the film forming equipment A shown in FIGS. 1 and 2, rails (not shown) are laid from the film forming unit A1 to the attachment / detachment unit A2. The wheels 12f of the base 12 can run on the rails of the film forming equipment A. The base 12 may be configured to run manually or electrically.

[0026] <First frame 13> 3 and 4, the first frame body 13 of the substrate holding device 11 has a first frame member 19 and a second frame member 20. The first frame body 13 of this embodiment can hold a first substrate W1 in each of the first frame member 19 and the second frame member 20. The first frame member 19 and the second frame member 20 are arranged adjacent to each other on the left and right. In the drawings, the direction along the X axis is the left-right direction, and the direction along the Z axis is the up-down direction.

[0027] 3 and 5, the first frame member 19 and the second frame member 20 of the first frame 13 each have a first covering portion 21 that covers the outer peripheral edge portion of the second main surface W1b of the first substrate W1. The first covering portion 21 may be configured to partially cover the outer peripheral edge portion of the second main surface W1b of the first substrate W1 in the circumferential direction, or may be configured to cover the entire outer peripheral edge portion of the second main surface W1b of the first substrate W1.

[0028] As shown in FIG. 5, the first frame 13 includes a first locking member 22 that locks the outer peripheral edge of the first main surface W1a of the first substrate W1. The first locking member 22 is movable between a locking position where it locks the first substrate W1 and a release position where it releases the lock on the first substrate W1. The first locking member 22 may be detachably attached to the first frame member 19 and the second frame member 20, or may be rotatably supported by the first frame member 19 and the second frame member 20. The shape of the first locking member 22 is not limited to the shape shown in FIG. 5. The shape of the first locking member 22 may be, for example, a dragonfly shape, a hook shape, a pin shape, or a clip shape. It may also be a plate shape that locks the entire first main surface W1a of the first substrate W1, or a frame shape that locks the outer peripheral edge of the first main surface W1a. The first locking member 22 may be made of, for example, metal, ceramics, resin, rubber, or the like.

[0029] <Second frame 14> As shown in Figures 3 and 4, the second frame 14 of the substrate holding device 11 is fixed to the base 12 by fixing members (not shown). The second frame 14 includes one frame member 23. The frame member 23 of the second frame 14 is capable of holding two second substrates W2. As shown in Figures 3 and 5, the frame member 23 has a second covering portion 24 that covers the outer circumferential edge portion of the second main surface W2b of the second substrate W2. The second covering portion 24 may be configured to partially cover the outer circumferential edge portion of the second main surface W2b of the second substrate W2 in the circumferential direction, or may be configured to cover the entire outer circumferential edge portion of the second main surface W2b of the second substrate W2.

[0030] As shown in FIGS. 3 and 5, the second frame 14 includes a second locking member 25 that locks the outer periphery of the first main surface W2a of the second substrate W2. The second locking member 25 is movable between a locking position where it locks the second substrate W2 and an unlocking position where it releases the lock on the second substrate W2. The second locking member 25 may be detachably attached to the frame member 23 or rotatably supported by the frame member 23. The shape of the second locking member 25 is not limited to the shape shown in FIG. 5. The second locking member 25 may be, for example, a dragonfly shape, a hook shape, a pin shape, or a clip shape. It may also be a plate shape that locks the entire first main surface W2a of the second substrate W2, or a frame shape that locks the outer periphery of the first main surface W2a. The second locking member 25 may be made of, for example, metal, ceramics, resin, rubber, or the like.

[0031] <Movement mechanism 15> 1 to 4, the movement mechanism 15 of the substrate holding device 11 can displace the first frame 13 and the second frame 14 between a first relative position and a second relative position. At the first relative position and the second relative position, the first substrate W1 and the second substrate W2 can be held in a vertical orientation.

[0032] 2 and 3, when the first frame 13 and the second frame 14 are in a first relative position, the main surface S1 of the first frame 13 and the main surface S1 of the second frame 14 face each other. At this first relative position, the first main surface W1a of the first substrate W1 and the first main surface W2a of the second substrate W2 face each other. At the first relative position, the direction along the Y axis in the drawings is the thickness direction of the first substrate W1 and the second substrate W2.

[0033] 1 and 4, when the first frame 13 and the second frame 14 are in the second relative position, the main surface S1 of the first frame 13 and the main surface S1 of the second frame 14 do not face each other. In this second relative position, the first main surface W1a of the first substrate W1 and the first main surface W2a of the second substrate W2 do not face each other.

[0034] The movement mechanism 15 of this embodiment is a rotation mechanism that rotates each of the first frame member 19 and the second frame member 20 of the first frame body 13. The rotation mechanism rotates the first frame member 19 and the second frame member 20 about an axis extending in the vertical direction. More specifically, the first frame member 19 is attached to the first support column 12b located on the left side of FIG. 3 etc. using a hinge member. The second frame member 20 is attached to the first support column 12b located on the right side of FIG. 3 etc. using a hinge member. The first frame member 19 rotates about an axis along the left edge. The second frame member 20 rotates about an axis along the right edge.

[0035] <Method of manufacturing a film-coated substrate> Next, a method for manufacturing a film-coated substrate will be described together with the operation of the substrate holding device 11. The method for manufacturing a film-coated substrate includes an attaching step, a film forming step, and a removing step. In the attaching step in the method for manufacturing a film-coated substrate, the first substrate W1 and the second substrate W2 are attached to the substrate holding device 11.

[0036] 1 and 4, in the attachment step, the first frame 13 and the second frame 14 of the substrate holding device 11 are placed in a second relative position in the attachment / detachment section A2 of the film formation equipment A. The first substrate W1 and the second substrate W2 are attached to the first frame 13 and the second frame 14, respectively, in the second relative positions.

[0037] At this time, in the second relative position, the main surface S1 of the first frame 13 and the main surface S1 of the second frame 14 do not face each other. With the first frame 13 in this second relative position, the first substrate W1 in a vertical orientation can be easily attached to the main surface S1 of the first frame 13. Furthermore, with the second frame 14 in this second relative position, the second substrate W2 in a vertical orientation can be easily attached to the main surface S1 of the second frame 14.

[0038] In the film formation process in the method for manufacturing a film-coated substrate, a film-coated first substrate W11 and a film-coated second substrate W21 are obtained by providing a film on the first substrate W1 and the second substrate W2. The film formation process is performed at a first relative position of the substrate holding device 11 shown in Figures 2 and 3. In the film formation process, a film can be provided on the second main surface W1b of the first substrate W1 and the second main surface W2b of the second substrate W2.

[0039] 5, in a removal step of the method for manufacturing a film-coated substrate, the film-coated first substrate W11 and the film-coated second substrate W21 are removed from the substrate holding device 11. In the removal step, in the attachment / detachment section A2 of the film formation equipment A, the first frame 13 and the second frame 14 of the substrate holding device 11 are set to a second relative position.

[0040] At this time, in the second relative position, the main surface S1 of the first frame 13 and the main surface S1 of the second frame 14 do not face each other. With the first frame 13 in such a second relative position, the film-coated first substrate W11 in a vertical position can be easily removed from the main surface S1 of the first frame 13. Furthermore, with the second frame 14 in such a second relative position, the film-coated second substrate W21 in a vertical position can be easily removed from the main surface S1 of the second frame 14.

[0041] Next, the operation and effects of this embodiment will be described. (1) A substrate holding device 11 that holds multiple substrates includes a base 12, a first frame 13, a second frame 14, and a movement mechanism 15. The movement mechanism 15 of the substrate holding device 11 can displace the first frame 13 and the second frame 14 between a first relative position and a second relative position. At the first relative position and the second relative position, the first substrate W1 and the second substrate W2 can be held in a vertical orientation. At the first relative position, the main surface S1 of the first frame 13 and the main surface S1 of the second frame 14 face each other. At the second relative position, the main surface S1 of the first frame 13 and the main surface S1 of the second frame 14 do not face each other.

[0042] According to this configuration, for example, at the first relative position, the first substrate W1 and the second substrate W2 can be transported or films can be provided on the first substrate W1 and the second substrate W2. At the second relative position, the main surface S1 of the first frame 13 and the main surface S1 of the second frame 14, which faced each other at the first relative position, no longer face each other. This makes it easy to attach or detach the first substrate W1 in a vertical orientation to or from the main surface S1 of the first frame 13. Furthermore, it is easy to attach or detach the second substrate W2 in a vertical orientation to or from the main surface S1 of the second frame 14. This improves the efficiency of attaching or detaching multiple substrates. This, for example, makes it possible to improve the productivity of film-coated substrates.

[0043] (2) The first frame body 13 of the substrate holding device 11 has a first frame member 19 and a second frame member 20. The movement mechanism 15 of the substrate holding device 11 moves the first frame member 19 and the second frame member 20, respectively. In this case, the first frame body 13 can be easily moved by dividing it into the first frame member 19 and the second frame member 20. This makes it easy to transition between both the first relative position and the second relative position.

[0044] (3) The movement mechanism 15 of the substrate holding device 11 is a rotation mechanism that rotates the first frame 13. In this case, the relative position between the first frame 13 and the second frame 14 can be easily displaced by rotating the first frame 13. This allows for easy transition between the first relative position and the second relative position. Furthermore, as shown in FIG. 5, the first substrate W1 and the second substrate W2 can be attached to or detached from the first frame 13 and the second frame 14 in the same direction, i.e., from one side along the Y axis. This makes it easy to secure a working space for attaching and detaching the first substrate W1 and the second substrate W2 to and from the substrate holding device 11, for example.

[0045] (4) The movement mechanism 15 of the substrate holding device 11 is a rotation mechanism that rotates the first frame member 19 and the second frame member 20. In this case, the first frame body 13 can be easily moved by dividing it into the first frame member 19 and the second frame member 20. Furthermore, the relative positions of the first frame body 13 and the second frame body 14 can be easily displaced by the rotation of the first frame member 19 and the second frame member 20. This makes it easy to transition between both the first relative position and the second relative position.

[0046] (5) The first frame member 19 and the second frame member 20 of the substrate holding device 11 are arranged adjacent to each other on the left and right. The rotation mechanism of the substrate holding device 11 rotates the first frame member 19 and the second frame member 20 around an axis extending in the vertical direction. In this case, it is possible to perform the work of attaching or detaching multiple first substrates W1 to or from the first frame 13 at a relatively low position. This makes it easier to attach or detach the first substrates W1 to or from the first frame 13. This makes it possible to further improve the efficiency of the work of attaching or detaching multiple substrates. This, for example, makes it possible to further improve the productivity of film-coated substrates.

[0047] (6) The first frame 13 of the substrate holding device 11 has a first covering portion 21 that covers the outer peripheral edge portion of the second main surface W1b of the first substrate W1, and the second frame 14 has a second covering portion 24 that covers the outer peripheral edge portion of the second main surface W2b of the second substrate W2.

[0048] In this case, for example, when a film is provided on the second main surface W1b of the first substrate W1 and the second main surface W2b of the second substrate W2, it is possible to prevent the film material from creeping onto the first main surface W1a of the first substrate W1 and the first main surface W2a of the second substrate W2. This improves the accuracy when selectively providing a film on the second main surface W1b of the first substrate W1 and the second main surface W2b of the second substrate W2.

[0049] It should be noted that the first substrate W1 and the second substrate W2 must be attached to and detached from the first frame 13 having the first covering portion 21 and the second frame 14 having the second covering portion 24 in a vertical position relative to the inner surfaces of the first frame 13 and the second frame 14 that face each other. This is not limiting, and for example, from the perspective of protecting the second main surface W1b when handling the first substrate W1, there may be cases where the first substrate W1 must be attached to and detached from the inner surface of the first frame 13 while holding the first main surface W1a.

[0050] (7) At least one of the first substrate W1 and the first two substrates may include a substrate having a side dimension of 500 mm or more. In the substrate holding device 11, the substrate can be attached and detached with the substrate in a vertical position, so that even for relatively large substrates, it is easy to ensure sufficient working space for attaching and detaching the substrate to and from the substrate holding device 11. Furthermore, the substrate attachment and detachment can be easily performed. Therefore, it is possible to improve the efficiency of the attachment and detachment of multiple substrates. This, for example, makes it possible to improve the productivity of film-coated substrates.

[0051] (8) The method for manufacturing a film-coated substrate uses a substrate holding device 11 to manufacture a film-coated substrate. The method for manufacturing a film-coated substrate includes an attachment process, a film formation process, and a removal process. The film formation process is performed at a first relative position of the substrate holding device 11, and the attachment process and the removal process are performed at a second relative position of the substrate holding device 11.

[0052] According to this method, the first substrate W1 in a vertical orientation can be easily attached to and detached from the main surface S1 of the first frame 13. Also, the second substrate W2 in a vertical orientation can be easily attached to and detached from the main surface S1 of the second frame 14. This makes it possible to improve the efficiency of the attachment and detachment of multiple substrates. This in turn makes it possible to improve the productivity of film-coated substrates.

[0053] <Example of change> The above embodiment can be modified as follows: The above embodiment and the following modifications can be combined with each other within the scope of technical compatibility.

[0054] In the substrate holding device 11, at least one of the first covering portion 21 of the first frame 13 and the second covering portion 24 of the second frame 14 may be omitted. The first frame body 13 of the substrate holding device 11 in the above embodiment has the first frame member 19 and the second frame member 20, but as shown in Fig. 6, the first frame body 13 may have one frame member 26. Furthermore, although not shown, the first frame body may have three or more frame members.

[0055] The number of first substrates W1 held by the first frame 13 of the substrate holding device 11 may be one or more. The number of second substrates W2 held by the second frame 14 of the substrate holding device 11 may be one or more.

[0056] The substrate holding device 11 may be provided with a moving mechanism 15 that moves the second frame 14 in addition to the moving mechanism 15 that moves the first frame 13. In this case, the second frame 14 may be configured to be divided into a plurality of frame members and moved.

[0057] The dimensions of the multiple first substrates W1 may be the same or different. The dimensions of the multiple second substrates W2 may be the same or different. The planar shape of the first substrate W1 and the second substrate W2 may be a polygonal shape other than a rectangle, or may be a circle or an ellipse.

[0058] The rotation mechanism serving as the movement mechanism 15 of the substrate holding device 11 in the above embodiment is a rotation mechanism that rotates about an axis extending in the vertical direction, but it can also be changed to a rotation mechanism that rotates about an axis extending in a direction other than the vertical direction. For example, as shown in FIG. 7 , the rotation mechanism serving as the movement mechanism 15 of the first frame 13 may be a rotation mechanism that rotates about an axis extending in the horizontal direction. More specifically, the first frame 13 is attached to the first beam portion 12c of the base 12 using a hinge member. The first frame 13 can be displaced from the first relative position to the second relative position by rotating it upward. Although not shown, the base 12 is equipped with a holding mechanism that temporarily holds the second frame 14 at the second relative position.

[0059] Although the first frame member 19 and the second frame member 20 of the substrate holding device 11 in the above embodiment are arranged so as to be adjacent to each other horizontally, this is not limitative. The first frame member 19 and the second frame member 20 may also be arranged so as to be adjacent to each other vertically, for example.

[0060] The rotation mechanism, which is the movement mechanism 15 of the substrate holding device 11, is not limited to a hinge member that rotates around a metal shaft, but may be a hinge member that utilizes the elasticity of rubber, resin, or the like.

[0061] As shown in FIG. 8, the movement mechanism 15 of the substrate holding device 11 may be a slide mechanism that slides the first frame 13 along the horizontal direction. The slide mechanism may be configured, for example, by a rail portion extending along the horizontal direction. More specifically, the substrate holding device 11 includes a base 12 having a pair of upper and lower rail portions. The first frame 13 of the substrate holding device 11 is attached to the rail portion of the base 12 so as to reciprocate left and right on the rail portion. The first frame 13 may have wheels that run on the rail portion of the base 12.

[0062] As shown in FIG. 9, the slide mechanism serving as the movement mechanism 15 of the substrate holding device 11 may be a slide mechanism that slides the first frame 13 in the vertical direction. The slide mechanism may be configured, for example, with a rail portion extending in the vertical direction. More specifically, the substrate holding device 11 includes a base 12 having a pair of left and right rail portions. The first frame 13 of the substrate holding device 11 is attached to the rail portion of the base 12 so as to reciprocate up and down on the rail portion. The first frame 13 may have wheels that run on the rail portion.

[0063] The moving mechanism 15 of the substrate holding device 11 may be a moving mechanism 15 that combines a rotation mechanism and a slide mechanism. The main body 12a of the base 12 in the substrate holding device 11 may have a structure divided into multiple main body members. In this case, the movement mechanism 15 of the substrate holding device 11 may be a mechanism that moves the first frame 13 as an integrated unit with the main body members of the base 12, rather than moving only the first frame 13.

[0064] The substrate holding device 11 can also be used in equipment other than the film formation equipment A. For example, the substrate holding device 11 can be used only for the transport process of the first substrate W1 and the second substrate W2, or can be used for the cleaning process, inspection process, heat treatment process, etc. of the first substrate W1 and the second substrate W2.

[0065] In the method for manufacturing a film-coated substrate, one of the attaching step and the detaching step may be performed at the first relative position. In the method for manufacturing a film-coated substrate, the work of attaching and detaching the first substrate W1 to and from the first frame member 19 may be performed manually or using a robot arm. Also, manual work and work using a robot arm may be combined. The same applies to the work of attaching and detaching the second substrate W2 to and from the second frame member 20. [Explanation of symbols]

[0066] 11...Substrate holding device 12...Foundation 13...First frame 14...Second frame 15...Movement mechanism 19...First frame member 20...Second frame member 21...First covering part 24...Second coating part S1…Main surface W1: First board W1b...Second principal surface W11: First substrate with film W2: Second board W2b: Second principal surface W21: Second substrate with film

Claims

1. A substrate holding device for holding a plurality of substrates, The base and a first frame provided on the base and configured to hold a first substrate; a second frame provided on the base and configured to hold a second substrate; a movement mechanism that moves at least the first frame out of the first frame and the second frame, the moving mechanism is capable of displacing the first frame body and the second frame body between a first relative position and a second relative position, At the first relative position and the second relative position, the first substrate and the second substrate can be held in a vertical orientation, In the first relative position, a main surface of the first frame body and a main surface of the second frame body face each other, In the second relative position, the main surface of the first frame body and the main surface of the second frame body do not face each other, the first frame has a first covering portion that covers an outer peripheral edge portion of the main surface of the first substrate, the second frame has a second covering portion that covers an outer peripheral edge portion of the main surface of the second substrate, A substrate holding device, wherein the first covering portion and the second covering portion cover a main surface opposite to the opposing main surfaces of the first substrate and the second substrate at the first relative position.

2. the first frame body has a first frame member and a second frame member, The substrate holding device according to claim 1 , wherein the movement mechanism moves each of the first frame member and the second frame member.

3. 3. The substrate holding device according to claim 1, wherein the movement mechanism is at least one of a rotation mechanism that rotates the first frame body and a slide mechanism that slides the first frame body.

4. A substrate holding device for holding a plurality of substrates, The base and a first frame provided on the base and configured to hold a first substrate; a second frame provided on the base and configured to hold a second substrate; a movement mechanism that moves at least the first frame out of the first frame and the second frame, the moving mechanism is capable of displacing the first frame body and the second frame body between a first relative position and a second relative position, At the first relative position and the second relative position, the first substrate and the second substrate can be held in a vertical orientation, In the first relative position, a main surface of the first frame body and a main surface of the second frame body face each other, In the second relative position, the main surface of the first frame body and the main surface of the second frame body do not face each other, the first frame body has a first frame member and a second frame member, The moving mechanism includes a rotating mechanism that rotates the first frame member and the second frame member.

5. The first frame member and the second frame member are arranged adjacent to each other on the left and right, The substrate holding device according to claim 4 , wherein the rotation mechanism rotates the first frame member and the second frame member about an axis extending in a vertical direction.

6. The substrate holding device according to claim 1 , wherein at least one of the first substrate and the second substrate includes a substrate having a side dimension of 500 mm or more.

7. A method for manufacturing a film-coated substrate using a substrate holding device that holds a plurality of substrates, comprising: The substrate holding device includes a base and a first frame provided on the base and configured to hold a first substrate; a second frame provided on the base and configured to hold a second substrate; a movement mechanism that moves at least the first frame out of the first frame and the second frame, the moving mechanism is capable of displacing the first frame body and the second frame body between a first relative position and a second relative position, At the first relative position and the second relative position, the first substrate and the second substrate can be held in a vertical orientation, In the first relative position, a main surface of the first frame body and a main surface of the second frame body face each other, In the second relative position, the main surface of the first frame body and the main surface of the second frame body do not face each other, The manufacturing method includes a mounting step of mounting the first substrate and the second substrate to the substrate holding device, a film forming step of providing films on the first substrate and the second substrate to obtain a film-coated first substrate and a film-coated second substrate, and a removal step of removing the film-coated first substrate and the film-coated second substrate from the substrate holding device, the film forming step is performed at the first relative position, At least one of the attaching step and the removing step is performed at the second relative position.

8. The method for manufacturing a film-coated substrate according to claim 7 , wherein the attaching step and the detaching step are performed at the second relative position.

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