Semiconductor Devices

Abstract

To provide a semiconductor device capable of improving heat dissipation.SOLUTION: A semiconductor device (1) includes: an insulation layer (7); a wiring layer (20) disposed on the insulation layer (7); a semiconductor chip (21) disposed on the wiring layer (20) and having an electrode (28) in an opposite side to the wiring layer (20); a sealing insulation layer (8) sealing the wiring layer (20) and the semiconductor chip (21) on the insulation layer (7); an opening (33) passing through the sealing insulation layer (8) on the electrode (28) of the semiconductor chip (21); and an external terminal (15) electrically connected to the electrode (28) within the opening (33).SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a semiconductor device. [Background technology]

[0002] Patent Document 1 discloses a power module semiconductor device as an example of an electronic component. This power module semiconductor device includes a ceramic substrate. A semiconductor device and terminal electrodes are arranged on the ceramic substrate.

[0003] The terminal electrodes extend from the inner region to the outer region of the ceramic substrate across the side surfaces of the ceramic substrate, and are electrically connected to the semiconductor device via bonding wires.

[0004] A columnar electrode is provided on the semiconductor device. The ceramic substrate, the semiconductor device, the columnar electrode, and a portion of the terminal electrode are sealed with a resin layer. The resin layer is formed over the entire outer surface of the ceramic substrate. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2013-172044 Summary of the Invention [Problem to be solved by the invention]

[0006] In conventional power module semiconductor devices, the entire outer surface of the ceramic substrate is covered with a resin layer, which tends to trap heat generated by the semiconductor device. Therefore, terminal electrodes are extended outside the resin layer to dissipate the heat. The terminal electrodes must be connected to the semiconductor device via connecting members such as bonding wires. This type of design hinders the miniaturization of electronic components.

[0007] Therefore, one embodiment provides a semiconductor device that can improve heat dissipation. [Means for solving the problem]

[0008] One embodiment provides an electronic component including a substrate having a first main surface on one side and a second main surface on the other side, a chip having a first chip main surface on one side and a second chip main surface on the other side, and a plurality of electrodes formed on the first chip main surface and / or the second chip main surface, and disposed on the first main surface of the substrate, an encapsulating insulating layer that encapsulates the chip on the first main surface of the substrate so as to expose the second main surface of the substrate and has an encapsulating main surface facing the first main surface of the substrate, and a plurality of external terminals formed through the encapsulating insulating layer so as to be exposed from the encapsulating main surface of the encapsulating insulating layer, and electrically connected to the plurality of electrodes of the chip, respectively.

[0009] In this electronic component, the second main surface of the substrate is exposed from the sealing insulating layer, so heat generated in the chip can be dissipated to the outside from the second main surface of the substrate without having to draw external terminals from the side surfaces of the substrate.

[0010] Furthermore, since there is no need to pull out external terminals from the side of the board, there is no need to use connecting members such as bonding wires. This allows for a reduction in the number of components, thereby achieving a smaller size. This makes it possible to provide an electronic component that achieves both miniaturization and improved heat dissipation.

[0011] One embodiment provides a semiconductor device including a semiconductor substrate having a first main surface on one side and a second main surface on the other side, a main surface insulating layer formed on the first main surface of the semiconductor substrate, a semiconductor chip having a plurality of electrodes and disposed on the main surface insulating layer, a sealing insulating layer that seals the semiconductor chip on the first main surface of the semiconductor substrate so as to expose the second main surface of the semiconductor substrate and has a sealing main surface facing the first main surface of the semiconductor substrate, and a plurality of external terminals formed through the sealing insulating layer so as to be exposed from the sealing main surface of the sealing insulating layer and electrically connected to the plurality of electrodes of the semiconductor chip, respectively.

[0012] In this semiconductor device, the second main surface of the semiconductor substrate is exposed from the sealing insulating layer, so heat generated in the semiconductor chip can be dissipated to the outside from the second main surface of the semiconductor substrate without having to draw external terminals from the side surfaces of the semiconductor substrate.

[0013] Furthermore, since there is no need to draw external terminals from the side of the semiconductor substrate, there is no need to use connecting members such as bonding wires. This allows for a reduction in the number of parts, thereby achieving a smaller size. As a result, a semiconductor device can be provided that achieves both miniaturization and improved heat dissipation.

[0014] In particular, in this semiconductor device, a main surface insulating layer is formed on the first main surface of the semiconductor substrate, which improves the dielectric strength of the semiconductor chip against the applied voltage while benefiting from the heat dissipation effect of the semiconductor substrate.

[0015] One embodiment provides a semiconductor device including: a semiconductor substrate having a first main surface on one side and a second main surface on the other side; a main surface insulating layer covering the first main surface; a first chip arranged on the main surface insulating layer, the first chip having a first back surface on the main surface insulating layer side and a first front surface opposite the first back surface, and including at least one first electrode arranged on the first front surface side; a second chip arranged on the main surface insulating layer at a distance from the first chip, the second chip having a second back surface on the main surface insulating layer side and a second front surface opposite the second back surface, and including a second electrode arranged on the second back surface side; connection wiring electrically connecting the first electrode on the first front surface side of the first chip and the second electrode on the second back surface side of the second chip on the semiconductor substrate; and a sealing insulating layer sealing the first chip, the second chip, and the connection wiring on the semiconductor substrate.

[0016] According to this semiconductor device, heat generated in the first chip and the second chip can be absorbed by the semiconductor substrate and dissipated to the outside. In particular, according to this semiconductor device, the first chip and the second chip are arranged on the first main surface with the main surface insulating layer sandwiched therebetween. Therefore, while enjoying the benefit of the heat dissipation effect of the semiconductor substrate, the main surface insulating layer can improve the dielectric strength of the first chip and the second chip against the applied voltage.

[0017] The above and other objects, features and advantages will become more apparent from the following description of the embodiments with reference to the accompanying drawings. [Brief explanation of the drawings]

[0018] [Figure 1] FIG. 1 is a perspective view of an electronic component according to a first embodiment of the present invention. [Figure 2] FIG. 2 is a plan view for explaining the internal structure of the electronic component of FIG. [Figure 3] FIG. 3 is a cross-sectional view taken along line III-III in FIG. [Figure 4] FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. [Figure 5A] FIG. 5A is a cross-sectional view illustrating an example of a method for manufacturing the electronic component of FIG. [Figure 5B] FIG. 5B is a cross-sectional view showing a step subsequent to FIG. 5A. [Figure 5C] FIG. 5C is a cross-sectional view showing a step subsequent to FIG. 5B. [Figure 5D] FIG. 5D is a cross-sectional view showing a step subsequent to FIG. 5C. [Figure 5E] FIG. 5E is a cross-sectional view showing a step subsequent to FIG. 5D. [Figure 5F] FIG. 5F is a cross-sectional view showing a step subsequent to FIG. 5E. [Figure 5G] FIG. 5G is a cross-sectional view showing a step subsequent to FIG. 5F. [Figure 5H] FIG. 5H is a cross-sectional view showing a step subsequent to FIG. 5G. [Figure 5I] FIG. 5I is a cross-sectional view showing a step subsequent to FIG. 5H. [Figure 5J] FIG. 5J is a cross-sectional view showing a step subsequent to FIG. 5I. [Figure 5K] FIG. 5K is a cross-sectional view showing a step subsequent to FIG. 5J. [Figure 6] FIG. 6 is a cross-sectional view of a portion corresponding to FIG. 3, and is a diagram for explaining the structure of an electronic component according to a second embodiment of the present invention. [Figure 7] FIG. 7 is a cross-sectional view of a portion corresponding to FIG. 4, and is a diagram for explaining the structure of the electronic component of FIG. [Figure 8] FIG. 8 is a cross-sectional view of a portion corresponding to FIG. 3, and is a diagram for explaining the structure of an electronic component according to a third embodiment of the present invention. [Figure 9] FIG. 9 is a cross-sectional view of a portion corresponding to FIG. 4, and is a diagram for explaining the structure of the electronic component of FIG. [Figure 10A] FIG. 10A is a cross-sectional view illustrating an example of a method for manufacturing the electronic component of FIG. [Figure 10B] FIG. 10B is a cross-sectional view showing a step subsequent to FIG. 10A. [Figure 10C]FIG. 10C is a cross-sectional view showing a step subsequent to FIG. 10B. [Figure 10D] FIG. 10D is a cross-sectional view showing a step subsequent to FIG. 10C. [Figure 10E] FIG. 10E is a cross-sectional view showing a step subsequent to FIG. 10D. [Figure 11] FIG. 11 is a cross-sectional view of a portion corresponding to FIG. 3, and is a diagram for explaining the structure of an electronic component according to a fourth embodiment of the present invention. [Figure 12A] FIG. 12A is a cross-sectional view illustrating an example of a method for manufacturing the electronic component of FIG. [Figure 12B] FIG. 12B is a cross-sectional view showing a step subsequent to FIG. 12A. [Figure 12C] FIG. 12C is a cross-sectional view showing a step subsequent to FIG. 12B. [Figure 13] FIG. 13 is a cross-sectional view of a portion corresponding to FIG. 3, and is a diagram for explaining the structure of an electronic component according to a fifth embodiment of the present invention. [Figure 14] FIG. 14 is a diagram illustrating the structure of an electronic component according to a sixth embodiment of the present invention. [Figure 15] FIG. 15 is a plan view illustrating the internal structure of an electronic component according to a seventh embodiment of the present invention. [Figure 16] FIG. 16 is a cross-sectional view taken along line XVI-XVI in FIG. [Figure 17] FIG. 17 is a circuit diagram for explaining the electrical structure of the electronic component shown in FIG. [Figure 18] FIG. 18 is a cross-sectional view of a portion corresponding to FIG. 3, and is a diagram for explaining the structure of an electronic component according to an eighth embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0019] FIG. 1 is a perspective view of an electronic component 1 according to a first embodiment of the present invention.

[0020] The electronic component 1 is a semiconductor device including a metal insulator semiconductor field effect transistor (MISFET) as an example of a semiconductor switching element. The electronic component 1 may include a MISFET that controls switching of a large current. In this form, the MISFET has a so-called vertical structure in which a gate electrode, a source electrode, and a source sense electrode are provided on one side of the chip, and a drain electrode is provided on the other side of the chip.

[0021] 1, electronic component 1 includes a rectangular parallelepiped component body 2. Component body 2 includes a mounting surface 3 on one side, a non-mounting surface 4 on the other side, and a side surface 5 connecting mounting surface 3 and non-mounting surface 4. Mounting surface 3 is the surface that faces an object to be connected when electronic component 1 is mounted on an object to be connected, such as a mounting board.

[0022] The mounting surface 3 and the non-mounting surface 4 are formed in a quadrangular shape (rectangular in this embodiment) when viewed from a plane normal to the mounting surface 3 and the non-mounting surface 4 (hereinafter simply referred to as "plan view"). The side surface 5 of the component body 2 may be a ground surface. The side surface 5 may have grinding marks.

[0023] The component body 2 has a layered structure including a substrate 6, a main surface insulating layer 7, and a sealing insulating layer 8. The substrate 6 is formed in a rectangular parallelepiped shape. The substrate 6 includes a first substrate main surface 9 on one side, a second substrate main surface 10 on the other side, and a substrate side surface 11 connecting the first substrate main surface 9 and the second substrate main surface 10. The substrate 6 is an element-free substrate that does not have any circuit elements on either the first substrate main surface 9 or the second substrate main surface 10, and efficiently dissipates heat generated in the MISFET to the outside.

[0024] The first substrate main surface 9 and the second substrate main surface 10 are formed in a quadrangular shape (rectangular in this embodiment) in a plan view. The second substrate main surface 10 of the substrate 6 forms the non-mounting surface 4 of the component body 2. The substrate side surface 11 of the substrate 6 forms part of the side surface 5 of the component body 2.

[0025] The substrate 6 is preferably formed from a material having a thermal conductivity of 100 W / mK or more. The substrate 6 may include a substrate formed from a material used in the manufacture of semiconductor elements, semiconductor devices, etc. In other words, the substrate 6 may include a semiconductor substrate.

[0026] A semiconductor substrate is superior to other materials in terms of thermal conductivity, availability, processability, cost, etc. When a semiconductor substrate is used as the substrate 6, its thickness is preferably 50 μm or more and 1000 μm or less, taking into consideration the stress on the MISFET and heat dissipation.

[0027] The substrate 6 may be a semiconductor substrate to which impurities are added or a semiconductor substrate to which impurities are not added. The semiconductor substrate may be a single crystal substrate or a polycrystalline substrate.

[0028] The semiconductor substrate may include a silicon substrate, a silicon carbide substrate, a sapphire substrate, or a compound semiconductor substrate. The compound semiconductor substrate may include a nitride semiconductor substrate and an oxide semiconductor substrate. In this embodiment, an example in which the substrate 6 is a silicon substrate as an example of a semiconductor substrate will be described.

[0029] The main surface insulating layer 7 covers the entire first substrate main surface 9 of the substrate 6. The main surface insulating layer 7 is provided to provide insulation between the MISFET and the substrate 6. In this embodiment, the main surface insulating layer 7 has a single-layer structure. When a heat sink or the like is attached to the substrate 6, the main surface insulating layer 7 also provides insulation between the MISFET and the heat sink or the like. The main surface insulating layer 7 forms part of the side surface 5 of the component body 2. It is preferable that the main surface insulating layer 7 has a breakdown field strength of at least 1 MV / cm or more.

[0030] The main surface insulating layer 7 may contain at least one of silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, and aluminum oxynitride.

[0031] The main surface insulating layer 7 is preferably formed by a semiconductor manufacturing process such as CVD (Chemical Vapor Deposition) or PVD (Physical Vapor Deposition), etc. These methods can improve the film quality of the main surface insulating layer 7.

[0032] This allows the formation of a main-surface insulating layer 7 that has a relatively small thickness but a sufficiently high breakdown field strength. Furthermore, reducing the thickness of the main-surface insulating layer 7 can prevent a decrease in thermal conductivity. Therefore, by connecting a heat sink or the like to the second substrate main surface 10 side, a further heat dissipation effect can be obtained.

[0033] The thickness of the main surface insulating layer 7 may be 0.1 μm or more and 100 μm or less. In view of thermal conductivity and manufacturing efficiency, the thickness of the main surface insulating layer 7 is preferably 0.1 μm or more and 10 μm or less. The main surface insulating layer 7 is preferably formed from an insulating material with relatively high thermal conductivity.

[0034] For example, the thermal conductivity of silicon nitride is higher than that of silicon oxide. Therefore, it is preferable to use silicon nitride as the insulating material for the main surface insulating layer 7. In addition to silicon nitride, insulating materials having a thermal conductivity higher than that of silicon oxide are also suitable as insulating materials for the main surface insulating layer 7.

[0035] The sealing insulating layer 8 is formed in a rectangular parallelepiped shape. The sealing insulating layer 8 protects the MISFET, for example, from moisture and the like. The sealing insulating layer 8 includes a first sealing main surface 12 on one side, a second sealing main surface 13 on the other side, and a sealing side surface 14 connecting the first sealing main surface 12 and the second sealing main surface 13. The first sealing main surface 12 and the second sealing main surface 13 are formed in a quadrangular shape (rectangular in this embodiment) in a plan view.

[0036] A first sealing main surface 12 of the sealing insulating layer 8 forms the mounting surface 3 of the component body 2. A second sealing main surface 13 of the sealing insulating layer 8 is connected to the main surface insulating layer 7. A sealing side surface 14 of the sealing insulating layer 8 forms part of the side surface 5 of the component body 2. The sealing side surface 14 of the sealing insulating layer 8 and the substrate side surface 11 of the substrate 6 are formed to be substantially flush with each other.

[0037] The sealing insulating layer 8 may contain at least one of silicon oxide, silicon nitride, polyimide resin, and epoxy resin. The sealing insulating layer 8 may contain a positive or negative photoresist. In this embodiment, the sealing insulating layer 8 is made of a sealing resin layer containing an epoxy resin.

[0038] The thickness of the sealing insulating layer 8 is greater than the thickness of the main surface insulating layer 7. The thickness of the sealing insulating layer 8 may be 10 μm or more and 8000 μm or less (approximately 300 μm in this embodiment).

[0039] The electronic component 1 includes a gate external terminal 15, a source external terminal 16, a source sense external terminal 17, and a drain external terminal 18. The gate external terminal 15, the source external terminal 16, and the source sense external terminal 17 are each formed as a chip-side external terminal. The drain external terminal 18 is formed as a wiring layer-side external terminal.

[0040] The gate external terminal 15, the source external terminal 16, the source sense external terminal 17, and the drain external terminal 18 are electrically connected to a gate terminal electrode layer 28, a source terminal electrode layer 29, a source sense terminal electrode layer 30, and a drain terminal electrode layer 31 of the MISFET 24, which will be described later (see also Figure 5, etc.).

[0041] The gate external terminal 15, the source external terminal 16, and the source sense external terminal 17 are formed in a region on one end side of the component body 2 in a plan view. The drain external terminal 18 is formed in a region on the other end side of the component body 2 in a plan view.

[0042] The gate external terminal 15, the source external terminal 16, the source sense external terminal 17, and the drain external terminal 18 all penetrate the sealing insulating layer 8 and are exposed from the first sealing main surface 12 of the sealing insulating layer 8. In other words, the gate external terminal 15, the source external terminal 16, the source sense external terminal 17, and the drain external terminal 18 are all exposed from the mounting surface 3 of the component body 2.

[0043] The gate external terminal 15, the source external terminal 16, the source sense external terminal 17, and the drain external terminal 18 are all formed within a region surrounded by the periphery of the substrate 6. In other words, the gate external terminal 15, the source external terminal 16, the source sense external terminal 17, and the drain external terminal 18 are arranged in a region above the first substrate main surface 9 of the substrate 6 without crossing the substrate side surface 11 of the substrate 6.

[0044] The gate external terminal 15, the source external terminal 16, the source sense external terminal 17, and the drain external terminal 18 are each formed in a rectangular shape in a plan view. The gate external terminal 15, the source external terminal 16, the source sense external terminal 17, and the drain external terminal 18 may each be formed in any shape other than a rectangular shape in a plan view. The gate external terminal 15, the source external terminal 16, the source sense external terminal 17, and the drain external terminal 18 may each be formed in a circular shape in a plan view.

[0045] In this way, electronic component 1 has a structure in which multiple external terminals are exposed from mounting surface 3 of component body 2, and none of the external terminals are exposed from non-mounting surface 4 or side surface 5 of component body 2.

[0046] Fig. 2 is a plan view for explaining the internal structure of the electronic component 1 of Fig. 1. Fig. 3 is a cross-sectional view taken along line III-III in Fig. 2. Fig. 4 is a cross-sectional view taken along line IV-IV in Fig. 2.

[0047] 2 to 4, the electronic component 1 includes a wiring layer 20 and a MISFET chip 21. The wiring layer 20 is formed on the main surface insulating layer 7. Specifically, the wiring layer 20 directly covers the main surface insulating layer 7 and is electrically insulated from the substrate 6 by the main surface insulating layer 7. The wiring layer 20 is formed in a quadrangular shape in a plan view. More specifically, the wiring layer 20 is formed in a rectangular shape extending along the longitudinal direction of the substrate 6. The wiring layer 20 may be a copper wiring layer containing copper as a main component.

[0048] The wiring layer 20 may include a copper seed layer and a copper plating layer stacked in this order from the main surface insulating layer 7 side. The wiring layer 20 may include a barrier layer containing titanium. In this case, the copper seed layer may be formed on the barrier layer.

[0049] The wiring layer 20 includes a first connection region 22 and a second connection region 23. The first connection region 22 and the second connection region 23 are regions to which different members are connected. The first connection region 22 is formed in a region on one end side of the substrate 6 in a plan view. The second connection region 23 is formed in a region on the other end side of the substrate 6 with respect to the first connection region 22 in a plan view.

[0050] The wiring layer 20 may take any form as long as it includes the first connection region 22 and the second connection region 23. For example, the wiring layer 20 may include an island-shaped first connection region 22, an island-shaped second connection region 23, and a line-shaped connection region connecting the first connection region 22 and the second connection region 23.

[0051] In this case, the first connection region 22 and the second connection region 23 may be formed in any shape such as a square or a circle in a plan view. Furthermore, the connection region may be selectively routed in the region between the first connection region 22 and the second connection region 23.

[0052] The MISFET chip 21 includes a rectangular parallelepiped chip body 24. The chip body 24 includes a first chip main surface 25 on one side, a second chip main surface 26 on the other side, and a chip side surface 27 connecting the first chip main surface 25 and the second chip main surface 26. The first chip main surface 25 of the MISFET chip 21 is an element formation surface on which circuit elements (MISFETs in this embodiment) are formed.

[0053] The MISFET chip 21 may be a Si-MISFET chip having a chip body 24 containing Si. The withstand voltage of the Si-MISFET chip may be 30 V or more and 4500 V or less. The withstand voltage of the MISFET chip is defined by the maximum voltage VDS that can be applied between the drain and source.

[0054] The MISFET chip 21 may be a MISFET chip having a chip body 24 containing a compound semiconductor. The chip body 24 may contain a nitride semiconductor or an oxide semiconductor as the compound semiconductor.

[0055] The nitride semiconductor may include gallium nitride (GaN). The oxide semiconductor may include gallium oxide (Ga2O3). The breakdown voltage of the MISFET chip including the compound semiconductor may be 600V or more and 10000V or less.

[0056] The MISFET chip 21 may be a SiC-MISFET chip having a chip body 24 containing SiC. The withstand voltage of the SiC-MISFET chip may be 600V or more and 15000V or less.

[0057] In particular, MISFET chips containing compound semiconductors and SiC-MISFET chips can reach high temperatures due to heat generated by large currents. The electronic component 1 has a structure that is useful for these high-power chips.

[0058] The MISFET chip 21 includes a gate terminal electrode layer 28, a source terminal electrode layer 29, a source sense terminal electrode layer 30, and a drain terminal electrode layer 31. The gate terminal electrode layer 28, the source terminal electrode layer 29, and the source sense terminal electrode layer 30 are selectively formed on a first chip main surface 25 of the chip body 24. The drain terminal electrode layer 31 is connected to a second chip main surface 26 of the chip body 24.

[0059] The MISFET chip 21 is bonded to the first connection region 22 of the wiring layer 20 in an orientation in which the second chip main surface 26 of the chip body 24 faces the first substrate main surface 9 of the substrate 6. The drain terminal electrode layer 31 is bonded to the first connection region 22 of the wiring layer 20 via a conductive bonding material 32. In other words, the wiring layer 20 forms a drain wiring layer. The MISFET chip 21 is electrically insulated from the substrate 6 by the main surface insulating layer 7.

[0060] The conductive bonding material 32 may include a low-melting-point metal or a metal paste. The low-melting-point metal may include solder, etc. The metal paste may include copper paste, silver paste, gold paste, etc.

[0061] There are no particular limitations on the arrangement, shape, size, etc. of the gate terminal electrode layer 28, the source terminal electrode layer 29, the source sense terminal electrode layer 30, and the drain terminal electrode layer 31. The arrangement, shape, size, etc. of the gate terminal electrode layer 28, the source terminal electrode layer 29, the source sense terminal electrode layer 30, and the drain terminal electrode layer 31 can take various forms based on the specifications of the MISFET chip 21.

[0062] For example, the gate terminal electrode layer 28, the source terminal electrode layer 29 and / or the source sense terminal electrode layer 30 may include an island-shaped pad portion and a linear line portion selectively routed from the pad portion onto the first chip main surface 25 of the chip body 24.

[0063] The MISFET chip 21 may include a multilayer wiring structure formed on the first chip main surface 25 of the chip body 24. The multilayer wiring structure may have a structure in which wiring layers and insulating layers are alternately stacked. The gate terminal electrode layer 28, the source terminal electrode layer 29 and / or the source sense terminal electrode layer 30 may be formed as the uppermost wiring layer in the multilayer wiring structure.

[0064] 3 and 4, the sealing and insulating layer 8 seals the MISFET chip 21 on the first substrate main surface 9 of the substrate 6 (more specifically, on the main surface insulating layer 7). More specifically, the sealing and insulating layer 8 directly covers the portion of the wiring layer 20 on the main surface insulating layer 7 that is exposed from the MISFET chip 21, and directly covers the MISFET chip 21. A gate pad opening 33, a source pad opening 34, a source sense pad opening 35, and a drain pad opening 36 are formed in the sealing and insulating layer 8.

[0065] The gate pad opening 33 selectively exposes the gate terminal electrode layer 28 of the MISFET chip 21. The source pad opening 34 selectively exposes the source terminal electrode layer 29 of the MISFET chip 21.

[0066] The source sense pad opening 35 selectively exposes the source sense terminal electrode layer 30 of the MISFET chip 21. The drain pad opening 36 selectively exposes the second connection region 23 of the wiring layer 20.

[0067] The gate external terminal 15 is embedded in the gate pad opening 33. The gate external terminal 15 is connected to the gate terminal electrode layer 28 within the gate pad opening 33. The gate external terminal 15 includes a gate columnar electrode layer 40 that is erected along the normal direction of the first chip main surface 25 of the chip body 24.

[0068] The gate columnar electrode layer 40 includes a gate connection portion 41 that is connected to an external device. The gate connection portion 41 is exposed from the first sealing main surface 12 of the sealing insulating layer 8. The gate connection portion 41 has a connection surface that is flush with the first sealing main surface 12 of the sealing insulating layer 8.

[0069] The gate pillar-shaped electrode layer 40 may be a copper electrode layer containing copper as a main component. The gate pillar-shaped electrode layer 40 may include a copper seed layer and a copper plating layer formed on the copper seed layer. The gate pillar-shaped electrode layer 40 may further include a barrier layer containing titanium. In this case, the copper seed layer may be formed on the barrier layer.

[0070] The source external terminal 16 is embedded in the source pad opening 34. The source external terminal 16 is connected to the source terminal electrode layer 29 within the source pad opening 34. The source external terminal 16 includes a source columnar electrode layer 42 that is erected along the normal direction of the first chip main surface 25 of the chip body 24.

[0071] The source columnar electrode layer 42 includes a source connection portion 43 that is connected to an external device. The source connection portion 43 is exposed from the first sealing main surface 12 of the sealing insulating layer 8. The source connection portion 43 has a connection surface that is flush with the first sealing main surface 12 of the sealing insulating layer 8. The source columnar electrode layer 42 may have a configuration similar to that of the gate columnar electrode layer 40.

[0072] The source sense external terminal 17 is embedded in the source sense pad opening 35. The source sense external terminal 17 is connected to the source sense terminal electrode layer 30 within the source sense pad opening 35. The source sense external terminal 17 includes a source sense columnar electrode layer 44 having a columnar shape standing along the normal direction of the first chip main surface 25 of the chip body 24.

[0073] The source sense columnar electrode layer 44 includes a source sense connection portion 45 that is connected to an external device. The source sense columnar electrode layer 44 is exposed from the first sealing main surface 12 of the sealing insulating layer 8. The source sense connection portion 45 has a connection surface that is flush with the first sealing main surface 12 of the sealing insulating layer 8. The source sense columnar electrode layer 44 may have a configuration similar to that of the gate columnar electrode layer 40.

[0074] The drain external terminal 18 is buried in the drain pad opening 36. The drain external terminal 18 is connected to the second connection region 23 of the wiring layer 20 in the drain pad opening 36.

[0075] The drain external terminal 18 is electrically connected to the drain terminal electrode layer 31 of the MISFET chip 21 via the wiring layer 20. The drain external terminal 18 includes a columnar drain columnar electrode layer 46 standing along the normal direction of the first substrate main surface 9 of the substrate 6.

[0076] The drain columnar electrode layer 46 includes a drain connection portion 47 that is connected to an external device. The drain columnar electrode layer 46 is exposed from the first sealing main surface 12 of the sealing insulating layer 8. The drain connection portion 47 has a connection surface that is flush with the first sealing main surface 12 of the sealing insulating layer 8. The drain columnar electrode layer 46 may have a configuration similar to that of the gate columnar electrode layer 40.

[0077] As described above, in electronic component 1, substrate 6 is made of a semiconductor substrate having a relatively high thermal conductivity. Substrate side surface 11 of substrate 6 is exposed from sealing insulating layer 8. Moreover, in electronic component 1, substrate side surface 11 of substrate 6 is also exposed from sealing insulating layer 8.

[0078] Therefore, even if external terminals are not drawn out from the substrate side surface 11 of the substrate 6, the heat generated in the MISFET chip 21 can be efficiently dissipated to the outside from the second substrate main surface 10 and the substrate side surface 11 of the substrate 6. This makes it possible to appropriately suppress the temperature rise inside the sealing insulating layer 8.

[0079] Furthermore, there is no need to draw out the gate external terminal 15, source external terminal 16, source sense external terminal 17, and drain external terminal 18 from the substrate side surface 11 of the substrate 6. Therefore, there is no need to use connecting members such as bonding wires to connect these external terminals to the MISFET chip 21. As a result, shrinkage can be achieved by reducing the number of components. Therefore, it is possible to provide an electronic component 1 that can achieve both miniaturization and improved heat dissipation.

[0080] In particular, in the electronic component 1, the gate external terminal 15, the source external terminal 16, the source sense external terminal 17, and the drain external terminal 18 are all formed entirely within a region surrounded by the periphery of the substrate 6.

[0081] Furthermore, the gate external terminal 15, the source external terminal 16, and the source sense external terminal 17 are contained within a rectangular area surrounded by the periphery of the MISFET chip 21 in plan view.

[0082] This eliminates the need to arrange the MISFET chip 21, the gate external terminal 15, the source external terminal 16, and the source sense external terminal 17 adjacent to each other along the first substrate main surface 9 of the substrate 6. Therefore, from the viewpoint of the layout of the multiple external terminals, it is possible to appropriately reduce the size of the electronic component 1.

[0083] Furthermore, when the substrate 6 is made of a semiconductor substrate, the electronic component 1 can be manufactured using a semiconductor device manufacturing process. That is, a miniaturized MISFET chip 21 can be arranged on the miniaturized substrate 6. Therefore, when the substrate 6 is made of a semiconductor substrate, the electronic component 1 can be miniaturized from the viewpoint of the semiconductor device manufacturing process as well.

[0084] Furthermore, in the electronic component 1, a main surface insulating layer 7 is formed on the first substrate main surface 9 of the substrate 6. This makes it possible to improve the dielectric strength of the MISFET chip 21 against the applied voltage while enjoying the benefits of the heat dissipation effect of the semiconductor substrate. In particular, when the main surface insulating layer 7 is made of silicon nitride, it is possible to appropriately improve the heat dissipation properties and the dielectric strength.

[0085] In the electronic component 1, a wiring layer 20 is formed on the first substrate main surface 9 of the substrate 6. The wiring layer 20 has a planar area larger than the planar area of the MISFET chip 21.

[0086] This allows the heat generated in the MISFET chip 21 to be efficiently transferred to the main surface insulating layer 7 and the substrate 6 via the wiring layer 20. Therefore, the temperature rise inside the sealing insulating layer 8 can be efficiently suppressed.

[0087] In small electronic components, the resistance value is thought to increase due to a reduction in the area of the current path. In this regard, in the electronic component 1, the gate external terminal 15 includes a gate pillar electrode layer 40. The source external terminal 16 includes a source pillar electrode layer 42. The source sense external terminal 17 includes a source sense pillar electrode layer 44. The drain external terminal 18 includes a drain pillar electrode layer 46.

[0088] This ensures a current path with a relatively large area compared to connection members such as bonding wires, thereby suppressing an increase in resistance. In particular, when the gate pillar electrode layer 40, the source pillar electrode layer 42, the source sense pillar electrode layer 44, and the drain pillar electrode layer 46 all contain copper, an increase in resistance can be effectively suppressed.

[0089] Furthermore, in the electronic component 1 , the gate external terminal 15 , the source external terminal 16 , the source sense external terminal 17 and the drain external terminal 18 are all exposed from the mounting surface 3 of the component body 2 .

[0090] As a result, when the electronic component 1 is mounted on a connection object such as a mounting board, the heat generated in the MISFET chip 21 can be transferred to the connection object via these multiple external terminals, which can also contribute to improving heat dissipation.

[0091] Figures 5A to 5K are cross-sectional views illustrating an example of a method for manufacturing the electronic component 1 of Figure 1. In the manufacturing process of the electronic component 1, a plurality of electronic components 1 are manufactured simultaneously, but for ease of explanation, Figures 5A to 5K only show regions where two electronic components 1 are formed.

[0092] 5A, a plate-shaped base substrate 51 is prepared as the base of the substrate 6. The material of the base substrate 51 is selected according to the material of the substrate 6. In this embodiment, the base substrate 51 is made of a silicon wafer.

[0093] The base substrate 51 includes a first substrate main surface 52 on one side and a second substrate main surface 53 on the other side. The first substrate main surface 52 of the base substrate 51 corresponds to the first substrate main surface 9 of the substrate 6. The second substrate main surface 53 of the base substrate 51 corresponds to the second substrate main surface 10 of the substrate 6.

[0094] A plurality of component forming regions 54 and boundary regions 55 that separate the plurality of component forming regions 54 are set on the base substrate 51. The component forming regions 54 are regions where the electronic components 1 are formed. The boundary regions 55 are dicing lines.

[0095] 5B, main surface insulating layer 7 is formed on first substrate main surface 52 of base substrate 51. Here, main surface insulating layer 7 made of silicon nitride is formed. Main surface insulating layer 7 is formed to a thickness according to the dielectric strength voltage to be achieved.

[0096] The thickness of the main surface insulating layer 7 may be 0.1 μm or more and 100 μm or less (preferably 0.1 μm or more and 10 μm or less). The main surface insulating layer 7 may be formed by a CVD method or a PVD method.

[0097] Instead of or in addition to silicon nitride, the main surface insulating layer 7 may be formed to contain silicon oxide. In this case, the main surface insulating layer 7 may be formed by a CVD method. The main surface insulating layer 7 may be formed by oxidizing the surface of the base substrate 51 by an oxidation treatment method. The oxidation treatment method may be a thermal oxidation treatment method or a wet oxidation treatment method.

[0098] 5C, the wiring layer 20 is formed in each component formation region 54. In this step, a titanium-containing barrier layer (not shown) and a copper seed layer (not shown) are first formed on the main surface insulating layer 7. The barrier layer and the copper seed layer may each be formed by sputtering.

[0099] Next, a copper plating layer (not shown) is formed on the copper seed layer. The copper plating layer may be formed by electrolytic copper plating. Next, the laminated film including the barrier layer, the copper seed layer, and the copper plating layer is selectively removed by etching using a resist mask (not shown). As a result, the wiring layer 20 is formed in each component formation region 54.

[0100] 5D, the MISFET chip 21 is bonded to each wiring layer 20. The MISFET chip 21 is bonded to the first connection region 22 of each wiring layer 20 via a conductive bonding material 32.

[0101] The conductive bonding material 32 may be solder. The configuration of the MISFET chip 21 and the connection of the MISFET chip 21 to each wiring layer 20 are as described with reference to FIGS.

[0102] 5E, a resist mask 56 having a predetermined pattern is formed on the main surface insulating layer 7. The resist mask 56 has a plurality of openings 57. The plurality of openings 57 expose regions in the resist mask 56 where the gate columnar electrode layer 40, the source columnar electrode layer 42, the source sense columnar electrode layer 44, and the drain columnar electrode layer 46 are to be formed.

[0103] 5F , the gate pillar-shaped electrode layer 40, the source pillar-shaped electrode layer 42, the source sense pillar-shaped electrode layer 44, and the drain pillar-shaped electrode layer 46 are formed in the plurality of openings 57. The gate pillar-shaped electrode layer 40, the source pillar-shaped electrode layer 42, the source sense pillar-shaped electrode layer 44, and the drain pillar-shaped electrode layer 46 may be formed by electrolytic copper plating through the plurality of openings 57 in the resist mask 56.

[0104] 5G, the resist mask 56 is removed, leaving the gate columnar electrode layer 40, the source columnar electrode layer 42, the source sense columnar electrode layer 44, and the drain columnar electrode layer 46 in an upright state.

[0105] The gate pillar electrode layer 40, the source pillar electrode layer 42, the source sense pillar electrode layer 44, and the drain pillar electrode layer 46 may be formed by utilizing a firing process instead of the electrolytic copper plating method through the resist mask 56.

[0106] In the firing process, first, a conductive paste that will serve as the base for the columnar electrode layers is applied onto the main surface insulating layer 7. The conductive paste may be a copper paste. Next, unnecessary portions of the conductive paste are removed in patterns corresponding to the gate columnar electrode layer 40, the source columnar electrode layer 42, the source sense columnar electrode layer 44, and the drain columnar electrode layer 46.

[0107] The conductive paste is then fired, thereby forming the gate pillar electrode layer 40, the source pillar electrode layer 42, the source sense pillar electrode layer 44, and the drain pillar electrode layer 46.

[0108] 5H, sealing resin 58, which will be the base of sealing insulating layer 8, is applied onto main surface insulating layer 7. Sealing resin 58 may contain epoxy resin or polyimide resin.

[0109] The sealing resin 58 encapsulates the wiring layer 20, the MISFET chip 21, the gate pillar electrode layer 40, the source pillar electrode layer 42, the source sense pillar electrode layer 44, and the drain pillar electrode layer 46 on the main surface insulating layer 7 all at once.

[0110] The sealing insulating layer 8 may be made of silicon oxide or silicon nitride, which may be deposited on the main surface insulating layer 7 by a CVD method.

[0111] 5I, the outer surface of the sealing resin 58 is partially removed from the second chip main surface 26 side of the MISFET chip 21. The outer surface of the sealing resin 58 is removed until the gate columnar electrode layer 40, the source columnar electrode layer 42, the source sense columnar electrode layer 44, and the drain columnar electrode layer 46 are exposed. The sealing resin 58 removal step may be performed by a grinding method.

[0112] As a result, referring to FIG. 5J, the sealing insulating layer 8 is formed, from which the gate columnar electrode layer 40, the source columnar electrode layer 42, the source sense columnar electrode layer 44, and the drain columnar electrode layer 46 are exposed.

[0113] 5K, base substrate 51 is cut along boundary region 55. Base substrate 51 may be cut by grinding with a dicing blade. As a result, a plurality of electronic components 1 are cut out from one piece of base substrate 51.

[0114] The base substrate 51 may be cut by etching. The etching may be plasma etching. In this case, the component body 2 is formed having a side surface 5 that does not have grinding marks. Through the steps including those described above, the electronic component 1 is manufactured.

[0115] Fig. 6 is a cross-sectional view of a portion corresponding to Fig. 3, and is a diagram for explaining the structure of an electronic component 61 according to a second embodiment of the present invention. Fig. 7 is a cross-sectional view of a portion corresponding to Fig. 4, and is a diagram for explaining the structure of electronic component 61 in Fig. 6. In the following, structures corresponding to those described for electronic component 1 will be assigned the same reference numerals, and descriptions thereof will be omitted.

[0116] In this embodiment, the gate external terminal 15 includes a gate conductive junction layer 62 formed on the gate columnar electrode layer 40. The gate conductive junction layer 62 is electrically connected to the gate connection portion 41. The gate conductive junction layer 62 is formed on the gate connection portion 41.

[0117] The gate conductive bonding layer 62 may have a covering portion that covers the first sealing main surface 12 of the sealing insulating layer 8. The gate conductive bonding layer 62 is entirely exposed from the gate pad opening 33. The gate conductive bonding layer 62 may contain a low-melting point metal. The low-melting point metal may contain solder. The gate conductive bonding layer 62 may have a convexly curved outer surface.

[0118] The source external terminal 16 includes a source conductive junction layer 63 formed on the source columnar electrode layer 42. The source conductive junction layer 63 is electrically connected to the source connection portion 43. The source conductive junction layer 63 is formed on the source connection portion 43.

[0119] The source conductive bonding layer 63 may have a covering portion that covers the first sealing main surface 12 of the sealing insulating layer 8. The source conductive bonding layer 63 is entirely exposed from the source pad opening 34. The source conductive bonding layer 63 may contain a low melting point metal. The low melting point metal may contain solder. The source conductive bonding layer 63 may have a convexly curved outer surface.

[0120] The source sense external terminal 17 includes a source sense conductive junction layer 64 formed on the source sense columnar electrode layer 44. The source sense conductive junction layer 64 is electrically connected to the source sense connection portion 45. The source sense conductive junction layer 64 is formed on the source sense connection portion 45.

[0121] The source sense conductive junction layer 64 may have a covering portion that covers the first sealing main surface 12 of the sealing insulating layer 8. The source sense conductive junction layer 64 is entirely exposed from the source sense pad opening 35.

[0122] The source sense conductive bonding layer 64 may include a low melting point metal. The low melting point metal may include solder. The source sense conductive bonding layer 64 may have a convexly curved outer surface.

[0123] The drain external terminal 18 includes a drain conductive junction layer 65 formed on the drain columnar electrode layer 46. The drain conductive junction layer 65 is electrically connected to the drain connection portion 47. The drain conductive junction layer 65 is formed on the drain connection portion 47.

[0124] The drain conductive bonding layer 65 may have a covering portion that covers the first sealing main surface 12 of the sealing insulating layer 8. The drain conductive bonding layer 65 is entirely exposed from the drain pad opening 36. The drain conductive bonding layer 65 may contain a low-melting point metal. The low-melting point metal may contain solder. The drain conductive bonding layer 65 may have a convexly curved outer surface.

[0125] The electronic component 61 can be manufactured by the method for manufacturing the electronic component 1, further performing the steps of forming a gate conductive junction layer 62, a source conductive junction layer 63, a source sense conductive junction layer 64, and a drain conductive junction layer 65.

[0126] The step of forming the conductive bonding layer may be performed after the step of grinding the sealing resin 58 (see FIG. 5J) and before the step of cutting the base substrate 51 (see FIG. 5K). The conductive bonding layer may be formed by electrolytic solder plating.

[0127] As described above, electronic component 61 can also achieve the same effects as those described for electronic component 1.

[0128] Fig. 8 is a cross-sectional view of a portion corresponding to Fig. 3 and is a diagram for explaining the structure of electronic component 71 according to a third embodiment of the present invention. Fig. 9 is a cross-sectional view of a portion corresponding to Fig. 4 and is a diagram for explaining the structure of electronic component 71 in Fig. 8. In the following, structures corresponding to those described for electronic component 1 will be assigned the same reference numerals and will not be described again.

[0129] The gate external terminal 15 includes a gate electrode film 72 and a gate conductive junction layer 73 instead of the gate pillar-shaped electrode layer 40. The gate electrode film 72 is an underlying layer that forms an underlying layer of the gate conductive junction layer 73, and is also referred to as a UBM (under bump metal) layer. The gate electrode film 72 is formed in a film shape along the inner wall of the gate pad opening 33. The gate electrode film 72 defines a recessed space within the gate pad opening 33.

[0130] The gate electrode film 72 has a covering portion 74 that covers the first sealing main surface 12 of the sealing insulating layer 8 in an area outside the gate pad opening 33. The gate electrode film 72 may include at least one of a copper film, a gold film, a titanium film, and a nickel film.

[0131] The gate conductive bonding layer 73 is formed on the gate electrode film 72. The gate conductive bonding layer 73 fills the gate pad opening 33. The gate conductive bonding layer 73 protrudes above the first sealing main surface 12 of the sealing insulating layer 8.

[0132] The gate conductive bonding layer 73 covers a covering portion 74 of the gate electrode film 72 in an area outside the gate pad opening 33. The gate conductive bonding layer 62 may contain a low-melting point metal. The low-melting point metal may contain solder. The gate conductive bonding layer 62 may have a convexly curved outer surface.

[0133] The source external terminal 16 includes a source electrode film 75 and a source conductive junction layer 76 instead of the source columnar electrode layer 42. The source electrode film 75 is an underlying layer that forms the underlying base of the source conductive junction layer 76 and is also referred to as a UBM layer. The source electrode film 75 is formed in a film shape along the inner wall of the source pad opening 34. The source electrode film 75 defines a recessed space within the source pad opening 34.

[0134] The source electrode film 75 has a covering portion 77 that covers the first sealing main surface 12 of the sealing insulating layer 8 in an area outside the source pad opening 34. The source electrode film 75 may include at least one of a copper film, a gold film, a titanium film, and a nickel film.

[0135] The source conductive junction layer 76 is formed on the source electrode film 75. The source conductive junction layer 76 fills the source pad opening 34 and protrudes above the first sealing main surface 12 of the sealing insulating layer 8.

[0136] The source conductive bonding layer 76 covers the covering portion 77 of the source electrode film 75 in the region outside the source pad opening 34. The source conductive bonding layer 76 may contain a low-melting point metal. The low-melting point metal may contain solder. The source conductive bonding layer 76 may have a convexly curved outer surface.

[0137] The source sense external terminal 17 includes a source sense electrode film 78 and a source sense conductive junction layer 79 instead of the source sense columnar electrode layer 44. The source sense electrode film 78 is an underlying layer that forms the underlying layer of the source sense conductive junction layer 79, and is also referred to as a UBM layer.

[0138] The source sense electrode film 78 is formed in a film shape along the inner wall of the source sense pad opening 35. The source sense electrode film 78 defines a recessed space within the source sense pad opening 35.

[0139] The source sense electrode film 78 has a covering portion 80 that covers the first sealing main surface 12 of the sealing insulating layer 8 in an area outside the source sense pad opening 35. The source sense electrode film 78 may include at least one of a copper film, a gold film, a titanium film, and a nickel film.

[0140] The source sense conductive junction layer 79 is formed on the source sense electrode film 78. The source sense conductive junction layer 79 fills the source sense pad opening 35 and protrudes above the first sealing main surface 12 of the sealing insulating layer 8.

[0141] The source sense conductive bonding layer 79 covers a covering portion 80 of the source sense electrode film 78 in an area outside the source sense pad opening 35. The source sense electrode film 78 may contain a low-melting-point metal. The low-melting-point metal may contain solder. The source sense electrode film 78 may have a convexly curved outer surface.

[0142] The drain external terminal 18 includes, instead of the drain columnar electrode layer 46 (see FIG. 3), a drain electrode film 81 and a drain conductive junction layer 82. The drain electrode film 81 is an underlying layer that forms the underlying base of the drain conductive junction layer 82, and is also referred to as a UBM layer.

[0143] The drain electrode film 81 is formed in a film shape along the inner wall of the drain pad opening 36. The drain electrode film 81 defines a recessed space within the drain pad opening 36.

[0144] The drain electrode film 81 has a covering portion 83 that covers the first sealing main surface 12 of the sealing insulating layer 8 in an area outside the drain pad opening 36. The drain electrode film 81 may include at least one of a copper film, a gold film, a titanium film, and a nickel film.

[0145] The drain conductive junction layer 82 is formed on the drain electrode film 81. The drain conductive junction layer 82 fills the drain pad opening 36 and protrudes above the first sealing main surface 12 of the sealing insulating layer 8.

[0146] The drain conductive contact layer 82 covers the covering portion 83 of the drain electrode film 81 in the region outside the drain pad opening 36. The drain conductive contact layer 82 may contain a low-melting point metal. The low-melting point metal may contain solder. The drain conductive contact layer 82 may have a convexly curved outer surface.

[0147] 10A to 10E are cross-sectional views illustrating an example of a method for manufacturing electronic component 71 of Fig. 8. Here, specific descriptions of steps common to the manufacturing process of electronic component 1 according to the first embodiment described above will be omitted.

[0148] First, referring to FIG. 10A, a base substrate 51 after the bonding step of the MISFET chip 21 is prepared (also refer to FIG. 5D).

[0149] 10B, a sealing resin 84, which serves as a base for the sealing insulating layer 8, is applied onto the main surface insulating layer 7. The sealing resin 84 encapsulates the wiring layer 20 and the MISFET chip 21 on the main surface insulating layer 7.

[0150] 10C, a gate pad opening 33, a source pad opening 34, a source sense pad opening 35, and a drain pad opening 36 are formed in the sealing resin 84. When the sealing resin 84 is made of photoresist, each opening may be formed by exposure and development.

[0151] The sealing resin 84 may be made of an insulating material such as silicon oxide or silicon nitride. The silicon oxide or silicon nitride may be deposited on the main surface insulating layer 7 by a CVD method. When the sealing resin 84 is made of an insulating material, each opening may be formed by an etching method.

[0152] 10D, there are formed a gate electrode film 72, a source electrode film 75, a source sense electrode film 78, and a drain electrode film 81. In this step, first, a conductive material layer is formed by sputtering and / or electrolytic plating.

[0153] Next, the conductive material layer is selectively removed by etching through a resist mask (not shown), thereby forming the gate electrode film 72, the source electrode film 75, the source sense electrode film 78, and the drain electrode film 81.

[0154] 10E, the gate conductive junction layer 62, the source conductive junction layer 76, the source sense conductive junction layer 79, and the drain conductive junction layer 82 are formed. Each conductive junction layer may be formed by electrolytic solder plating.

[0155] Thereafter, base substrate 51 is cut along boundary region 55 (also see FIG. 5K). As a result, a plurality of electronic components 71 are cut out from one piece of base substrate 51. Through the above steps, electronic components 71 are manufactured.

[0156] As described above, electronic component 71 can also achieve the same effects as those described for electronic component 1.

[0157] 11 is a cross-sectional view of a portion corresponding to FIG. 3, illustrating the structure of an electronic component 91 according to a fourth embodiment of the present invention. In the following, structures corresponding to those described for the electronic component 1 are denoted by the same reference numerals, and descriptions thereof will be omitted.

[0158] The electronic component 91 includes a heat dissipation structure 92 that dissipates heat generated in the MISFET chip 21 to the outside. The heat dissipation structure 92 is provided on the second substrate main surface 10 of the substrate 6.

[0159] In this embodiment, the heat dissipation structure 92 includes a fin structure 93 formed on the second substrate main surface 10 of the substrate 6. The fin structure 93 includes one or more trenches 94 that are dug in the second substrate main surface 10 of the substrate 6 from the second substrate main surface 10 toward the first substrate main surface 9 of the substrate 6. The depth of each trench may be 1 μm or more and 500 μm or less.

[0160] When the fin structure 93 includes one trench 94, the trench 94 may be formed in a lattice, zigzag, comb-like, or spiral shape in plan view. When the fin structure 93 includes multiple trenches 94, the multiple trenches 94 may be formed in a stripe or dot shape in plan view. One or multiple trenches 94 may be formed in a combination of these various shapes in plan view.

[0161] 12A to 12C are cross-sectional views illustrating an example of a method for manufacturing the electronic component 91 of Fig. 11. Here, specific descriptions of steps common to the manufacturing process of the electronic component 1 according to the first embodiment described above will be omitted.

[0162] The step of forming the fin structure 93 can be performed at any timing prior to the aforementioned step of cutting the base substrate 51 (see FIG. 5K). Below, an example will be described in which the step of forming the fin structure 93 is performed after the step of preparing the base substrate 51 (see FIG. 5A) and prior to the step of forming the main surface insulating layer 7 (see FIG. 5B).

[0163] 12A, after base substrate 51 is prepared, a resist mask 95 having a predetermined pattern is formed on second substrate main surface 53 of base substrate 51. Resist mask 95 has openings 96 that selectively expose regions where trenches 94 are to be formed.

[0164] 12B, unnecessary portions of base substrate 51 are removed by etching via resist mask 95. As a result, fin structure 93 including one or more trenches 94 is formed on second substrate main surface 53 of base substrate 51.

[0165] 12C, resist mask 95 is removed. Thereafter, the steps of FIGS. 5B to 5K are performed in order to manufacture electronic component 91.

[0166] As described above, electronic component 91 can also achieve the same effects as those described for electronic component 1.

[0167] Furthermore, according to the electronic component 91, a heat dissipation structure 92 including a fin structure 93 is formed on the second substrate main surface 10 of the substrate 6. The fin structure 93 can increase the surface area of the substrate 6. This allows the heat transferred from the MISFET chip 21 to the substrate 6 to be efficiently dissipated to the outside.

[0168] Furthermore, with electronic component 91, fin structure 93 can be formed using a portion of substrate 6. This eliminates the need to attach a heat dissipation device, such as a metal heat sink, to second main substrate surface 10 of substrate 6. This prevents component body 2 from becoming thicker in the normal direction to mounting surface 3 and non-mounting surface 4. This allows electronic component 91 to be miniaturized while improving heat dissipation performance.

[0169] The heat dissipation structure 92 may include a metal film as a heat dissipation member in addition to the fin structure 93. The metal film may be formed along the second substrate main surface 10 of the substrate 6 and the inner wall of the trench 94.

[0170] The metal film may cover the entire second substrate main surface 10 and fill the entire interior of the trench 94. The metal film may include a copper film, a gold film, a silver film, a nickel film, a titanium film, an aluminum film, or the like.

[0171] The metal film may be formed by sputtering and / or plating. The step of forming the metal film may be performed at any timing after the step of removing the resist mask 95 (see also FIG. 12C). The heat dissipation structure 92 having such a structure can further improve the heat dissipation performance of the substrate 6.

[0172] The electronic component 91 may be applied to the structure of the second embodiment, the structure of the third embodiment, or a configuration in which the structure of the second embodiment and the structure of the third embodiment are combined.

[0173] 13 is a cross-sectional view of a portion corresponding to FIG. 3, illustrating the structure of an electronic component 101 according to a fifth embodiment of the present invention. In the following, structures corresponding to those described for the electronic component 1 are denoted by the same reference numerals, and descriptions thereof will be omitted.

[0174] The electronic component 101 includes a heat dissipation structure 102 that dissipates heat generated in the MISFET chip 21 to the outside. The heat dissipation structure 102 is provided on the second substrate main surface 10 of the substrate 6. In this embodiment, the heat dissipation structure 102 includes a heat dissipation member 103 that covers the second substrate main surface 10 of the substrate 6.

[0175] The heat dissipation member 103 may be a heat dissipation plate connected to the second substrate main surface 10 of the substrate 6. The heat dissipation plate may be a metal plate. The metal plate may include a copper plate, a gold plate, a nickel plate, a titanium plate, an aluminum plate, or the like.

[0176] Instead of a heat sink, the heat dissipation member 103 may be a metal film formed by sputtering and / or plating. The metal film may include a copper film, a gold film, a silver film, a nickel film, a titanium film, an aluminum film, etc. The step of forming the heat dissipation member 103 may be performed prior to the step of cutting the base substrate 51 described above (also see FIG. 5K).

[0177] As described above, electronic component 101 can also achieve the same effects as those described for electronic component 1.

[0178] Furthermore, according to the electronic component 101, a heat dissipation structure 102 including a heat dissipation member 103 is formed on the second substrate main surface 10 of the substrate 6. This allows the heat transferred from the MISFET chip 21 to the substrate 6 to be efficiently dissipated to the outside.

[0179] In particular, heat dissipation member 103 including a metal film can prevent component body 2 from becoming thicker along the normal direction of mounting surface 3 and non-mounting surface 4. This allows electronic component 101 to be miniaturized while improving heat dissipation.

[0180] The structure of the second embodiment, the structure of the third embodiment, or the structure of the fourth embodiment, or a combination of any two or three of the structures of the second to fourth embodiments, may be applied to electronic component 101.

[0181] 14 is a diagram illustrating the structure of an electronic component 111 according to a sixth embodiment of the present invention. In the following, structures corresponding to those described for the electronic component 1 are given the same reference numerals and descriptions thereof will be omitted.

[0182] The electronic component 111 is a semiconductor device including a diode as an example of a semiconductor rectifying element. Various diodes can be used as the diode, such as a pn junction diode, a fast recovery diode, a Zener diode, and a Schottky barrier diode. In this embodiment, a Schottky barrier diode is used as the diode.

[0183] The electronic component 111 includes a diode chip 112 instead of the MISFET chip 21. The diode chip 112 includes a rectangular parallelepiped chip body 113. The chip body 113 includes a first chip main surface 114 on one side, a second chip main surface 115 on the other side, and a chip side surface 116 connecting the first chip main surface 114 and the second chip main surface 115.

[0184] The diode chip 112 may be a Si-diode chip having a chip body 113 containing Si. The withstand voltage of the Si-diode chip may be 30 V or more and 6500 V or less. The withstand voltage of the Si-diode chip is defined by the maximum reverse voltage VR that can be applied between the anode and cathode.

[0185] The diode chip 112 may be a diode chip having a chip body 113 containing a compound semiconductor. The chip body 113 may contain a nitride semiconductor or an oxide semiconductor as the compound semiconductor.

[0186] The nitride semiconductor may include gallium nitride (GaN). The oxide semiconductor may include gallium oxide (Ga2O3). The breakdown voltage of the diode chip including the compound semiconductor may be 600V or more and 10000V or less.

[0187] The diode chip 112 may be a SiC-diode chip having a chip body 113 containing SiC. The withstand voltage of the SiC-diode chip may be 600V or more and 15000V or less.

[0188] In particular, diode chips including compound semiconductors and SiC-diode chips can reach high temperatures due to heat generated by large currents. The electronic component 111 has a structure that is useful for these high-power diode chips.

[0189] The diode chip 112 includes a cathode terminal electrode layer 117 and an anode terminal electrode layer 118. The cathode terminal electrode layer 117 is formed on a first chip main surface 114 of the chip body 113. The anode terminal electrode layer 118 is formed on a second chip main surface 115 of the chip body 113.

[0190] The diode chip 112 is disposed on the first substrate main surface 9 of the substrate 6 with the second chip main surface 115 of the chip body 113 facing the first substrate main surface 9 of the substrate 6. The anode terminal electrode layer 118 is bonded to the first connection region 22 of the wiring layer 20 via a conductive bonding material 119. In other words, the wiring layer 20 forms an anode wiring layer.

[0191] The conductive bonding material 119 may include a low-melting-point metal or a metal paste. The low-melting-point metal may include solder. The metal paste may include copper paste, silver paste, gold paste, etc.

[0192] The arrangement, shape, size, etc. of the cathode terminal electrode layer 117 and the anode terminal electrode layer 118 are not limited to a specific form. Various forms can be adopted for the arrangement, shape, size, etc. of the cathode terminal electrode layer 117 and the anode terminal electrode layer 118 based on the specifications of the diode chip 112.

[0193] The cathode terminal electrode layer 117 may include an island-shaped pad portion formed on the first chip main surface 114, and a linear line portion selectively routed from the pad portion onto the first chip main surface 114.

[0194] The anode terminal electrode layer 118 may include an island-shaped pad portion formed on the first chip main surface 114 and a linear line portion selectively routed from the pad portion onto the second chip main surface 115.

[0195] The diode chip 112 may include a multilayer wiring structure formed on the first chip main surface 114 and / or the second chip main surface 115 of the chip body 113. The multilayer wiring structure may have a structure in which wiring layers and insulating layers are alternately stacked.

[0196] When a multilayer wiring structure is formed on the first chip main surface 114, the cathode terminal electrode layer 117 may be formed as the uppermost wiring layer in the multilayer wiring structure. When a multilayer wiring structure is formed on the second chip main surface 115, the anode terminal electrode layer 118 may be formed as the uppermost wiring layer in the multilayer wiring structure.

[0197] The diode chip 112 may include a plurality (two or more) of cathode terminal electrode layers 117. The diode chip 112 may include a plurality (two or more) of anode terminal electrode layers 118.

[0198] The sealing insulating layer 8 has a cathode pad opening 120 and an anode pad opening 121. The cathode pad opening 120 selectively exposes the cathode terminal electrode layer 117 of the diode chip 112. The anode pad opening 121 selectively exposes the second connection region 23 of the wiring layer 20.

[0199] The electronic component 111 includes a cathode external terminal 122 and an anode external terminal 123. The cathode external terminal 122 is formed as a chip-side external terminal, and the anode external terminal 123 is formed as a wiring layer-side external terminal.

[0200] The cathode external terminal 122 is embedded in the cathode pad opening 120. The cathode external terminal 122 is connected to the cathode terminal electrode layer 117 within the cathode pad opening 120.

[0201] The cathode external terminal 122 includes a cathode columnar electrode layer 124 that is erected along the normal direction of the first chip main surface 114 of the chip body 113. The cathode columnar electrode layer 124 includes a cathode connection portion 125 that is connected to an external device.

[0202] The cathode connection portion 125 is exposed from the first sealing main surface 12 of the sealing insulation layer 8. The cathode connection portion 125 has a connection surface that is flush with the first sealing main surface 12 of the sealing insulation layer 8. The cathode columnar electrode layer 124 may contain copper.

[0203] The anode external terminal 123 is embedded in the anode pad opening 121. The anode external terminal 123 is connected to the second connection region 23 of the wiring layer 20 within the anode pad opening 121. The anode external terminal 123 is electrically connected to the anode terminal electrode layer 118 of the diode chip 112 via the wiring layer 20.

[0204] The anode external terminal 123 includes a columnar anode electrode layer 126 standing in the normal direction to the first substrate main surface 9 of the substrate 6. The anode electrode layer 126 includes an anode connecting portion 127 that is connected to an external device.

[0205] The anode connection portion 127 is exposed from the first sealing main surface 12 of the sealing insulating layer 8. The anode connection portion 127 has a connection surface that is flush with the first sealing main surface 12 of the sealing insulating layer 8. The anode columnar electrode layer 126 may contain copper.

[0206] The electronic component 111 can be manufactured through steps that are substantially the same as the manufacturing method for the aforementioned electronic component 1. As described above, the electronic component 111 that includes the diode chip 112 instead of the MISFET chip 21 can also achieve the same effects as those described for the electronic component 1.

[0207] The diode chip 112 may be disposed on the first substrate main surface 9 of the substrate 6 with the first chip main surface 114 of the chip body 113 facing the first substrate main surface 9 of the substrate 6. In other words, a structure in which the connection forms of the anode and cathode are reversed may be employed. In this case, the cathode terminal electrode layer 117 is bonded to the first connection region 22 of the wiring layer 20 via a conductive bonding material 119. In other words, the wiring layer 20 forms a cathode wiring layer.

[0208] The electronic component 111 may be applied with the structure of the second embodiment, the structure of the third embodiment, the structure of the fourth embodiment, or the structure of the fifth embodiment, or a configuration in which any two, three, or four of the structures of the second to fifth embodiments are combined.

[0209] Fig. 15 is a plan view illustrating the internal structure of an electronic component 131 according to a seventh embodiment of the present invention. Fig. 16 is a cross-sectional view taken along line XVI-XVI in Fig. 15. In the following, structures corresponding to those described for electronic component 1 are given the same reference numerals, and descriptions thereof will be omitted.

[0210] 15 and 16, electronic component 131 is a semiconductor power module including a plurality of chips. Electronic component 131 includes, in addition to MISFET chip 21, diode chip 112 and IC chip 132 (control chip). The MISFET chip 21, diode chip 112 and IC chip 132 may be arranged at any position relative to first substrate main surface 9 of substrate 6, and are not limited to any particular position.

[0211] The electronic component 131 includes a first wiring layer 133 for the MISFET chip 21, a second wiring layer 134 for the diode chip 112, and a third wiring layer 135 for the IC chip 132. The first wiring layer 133, the second wiring layer 134, and the third wiring layer 135 have the same structure as the wiring layer 20 described above.

[0212] The MISFET chip 21 and the external drain terminal 18 are connected to the first wiring layer 133. The MISFET chip 21 and the external drain terminal 18 are connected to the first wiring layer 133 in the same manner as in the electronic component 1 described above.

[0213] The diode chip 112 is connected to the second wiring layer 134. The connection of the diode chip 112 to the second wiring layer 134 is similar to that of the electronic component 111 described above. However, in this embodiment, the cathode external terminal 122 and the anode external terminal 123 are not provided.

[0214] An input external terminal 136 and the IC chip 132 are connected to the third wiring layer 135. The input external terminal 136 is formed as a wiring layer side external terminal. The input external terminal 136 is a terminal for supplying power to the IC chip 132. The input external terminal 136 is electrically connected to the IC chip 132 via the third wiring layer 135.

[0215] The configuration of the input external terminal 136 is substantially the same as the configuration of the drain external terminal 18. The connection mode of the input external terminal 136 to the third wiring layer 135 is the same as the connection mode of the drain external terminal 18 to the first wiring layer 133.

[0216] In this embodiment, the IC chip 132 is a gate driver IC for driving and controlling the gate of the MISFET chip 21. The IC chip 132 includes a rectangular parallelepiped chip body 141. The chip body 141 includes a first chip main surface 142 on one side, a second chip main surface 143 on the other side, and a chip side surface 144 connecting the first chip main surface 142 and the second chip main surface 143.

[0217] The IC chip 132 includes an output terminal electrode layer 145 and an input terminal electrode layer 146. The output terminal electrode layer 145 is formed on a first chip main surface 142 of the chip body 141. The input terminal electrode layer 146 is formed on a second chip main surface 143 of the chip body 141.

[0218] The input terminal electrode layer 146 is bonded to the third wiring layer 135 via a conductive bonding material 147. As a result, the IC chip 132 is electrically connected to the input external terminal 136 via the third wiring layer 135.

[0219] The conductive bonding material 147 may include a low-melting-point metal or a metal paste. The low-melting-point metal may include solder. The metal paste may include copper paste, silver paste, gold paste, etc.

[0220] The arrangement, shape, size, etc. of the output terminal electrode layer 145 and the input terminal electrode layer 146 are not limited to a specific form. The arrangement, shape, size, etc. of the output terminal electrode layer 145 and the input terminal electrode layer 146 can be various forms based on the specifications of the IC chip 132.

[0221] A plurality of output terminal electrode layers 145 may be formed on the first chip main surface 142 of the chip body 141. One or more output terminal electrode layers 145 may include island-shaped pad portions and linear line portions selectively routed from the pad portions onto the first chip main surface 142.

[0222] The IC chip 132 may include a multilayer wiring structure formed on the first chip main surface 142 and / or the second chip main surface 143 of the chip body 141. The multilayer wiring structure may have a structure in which wiring layers and insulating layers are alternately stacked.

[0223] When a multilayer wiring structure is formed on the first chip main surface 142, the output terminal electrode layer 145 may be formed as the uppermost wiring layer in the multilayer wiring structure. When a multilayer wiring structure is formed on the second chip main surface 143, the input terminal electrode layer 146 may be formed as the uppermost wiring layer in the multilayer wiring structure.

[0224] 16, electronic component 131 includes intermediate insulating layer 148. Intermediate insulating layer 148 is formed on main surface insulating layer 7. In this embodiment, the periphery of intermediate insulating layer 148 is formed in an inner region of substrate 6 with a gap therebetween relative to the periphery of substrate 6. A step portion is formed in the region between the periphery of intermediate insulating layer 148 and the periphery of substrate 6.

[0225] The intermediate insulating layer 148 may cover the entire first substrate main surface 9 of the substrate 6. In this case, the intermediate insulating layer 148 may be formed to be substantially flush with the substrate side surface 11 of the substrate 6. The intermediate insulating layer 148 may have a side surface that is flush with the sealing side surface 14 of the sealing insulating layer 8 and the substrate side surface 11 of the substrate 6.

[0226] The intermediate insulating layer 148 encapsulates the MISFET chip 21, the diode chip 112, and the IC chip 132. The intermediate insulating layer 148 may contain at least one of silicon oxide, silicon nitride, epoxy resin, and polyimide resin. In this embodiment, the intermediate insulating layer 148 is made of an intermediate encapsulating resin layer containing polyimide resin.

[0227] The intermediate insulating layer 148 has formed therein a gate contact hole 149, a source contact hole 150, a source sense contact hole 151, a drain contact hole 152, and a cathode contact hole 153. The intermediate insulating layer 148 also has formed therein an output contact hole 154, a first wiring contact hole 155, a second wiring contact hole 156, and an input contact hole 157.

[0228] The gate contact hole 149 selectively exposes the gate terminal electrode layer 28 of the MISFET chip 21. The source contact hole 150 selectively exposes the source terminal electrode layer 29 of the MISFET chip 21.

[0229] The source sense contact hole 151 selectively exposes the source sense terminal electrode layer 30 of the MISFET chip 21. The drain contact hole 152 selectively exposes the first wiring layer 133.

[0230] The cathode contact hole 153 selectively exposes the cathode terminal electrode layer 117 of the diode chip 112. The output contact hole 154 selectively exposes the output terminal electrode layer 145 of the IC chip 132.

[0231] The first wiring contact hole 155 selectively exposes a region of the first wiring layer 133 that is different from the drain contact hole 152. The second wiring contact hole 156 selectively exposes the second wiring layer 134. The input contact hole 157 selectively exposes the third wiring layer 135.

[0232] The electronic component 131 includes a first connection wiring layer 161, a second connection wiring layer 162, and a third connection wiring layer 163. The first connection wiring layer 161, the second connection wiring layer 162, and the third connection wiring layer 163 are each formed on the intermediate insulating layer 148.

[0233] The first connection wiring layer 161 is selectively routed on the intermediate insulating layer 148. The first connection wiring layer 161 is selectively routed in the region between the source terminal electrode layer 29 and the second wiring layer 134. The first connection wiring layer 161 includes a first connection portion 164 and a second connection portion 165.

[0234] The first connection portion 164 is connected to the source terminal electrode layer 29 of the MISFET chip 21. More specifically, the first connection portion 164 extends from above the intermediate insulating layer 148 into the source contact hole 150. The first connection portion 164 is connected to the source terminal electrode layer 29 within the source contact hole 150.

[0235] The second connection portion 165 is connected to the second wiring layer 134. More specifically, the second connection portion 165 extends from above the intermediate insulating layer 148 into the second wiring contact hole 156. The second connection portion 165 of the first connection wiring layer 161 is connected to the second wiring layer 134 within the second wiring contact hole 156.

[0236] The second connection wiring layer 162 is selectively routed on the intermediate insulating layer 148. The second connection wiring layer 162 is selectively routed in the region between the cathode terminal electrode layer 117 and the first wiring layer 133. The second connection wiring layer 162 includes a first connection portion 166 and a second connection portion 167.

[0237] The first connection portion 166 is electrically connected to the cathode terminal electrode layer 117 of the diode chip 112. More specifically, the first connection portion 166 extends from above the intermediate insulating layer 148 into the cathode contact hole 153. The first connection portion 166 is connected to the cathode terminal electrode layer 117 within the cathode contact hole 153.

[0238] The second connection portion 167 is electrically connected to the first wiring layer 133. More specifically, the second connection portion 167 extends from above the intermediate insulating layer 148 into the first wiring contact hole 155. The second connection portion 167 is connected to the first wiring layer 133 within the first wiring contact hole 155.

[0239] The third connection wiring layer 163 is selectively routed on the intermediate insulating layer 148. The third connection wiring layer 163 is selectively routed in the region between the gate terminal electrode layer 28 and the output terminal electrode layer 145. The third connection wiring layer 163 includes a first connection portion 168 and a second connection portion 169.

[0240] The first connection portion 168 is electrically connected to the gate terminal electrode layer 28 of the MISFET chip 21. More specifically, the first connection portion 168 extends from above the intermediate insulating layer 148 into the gate contact hole 149. The first connection portion 168 is connected to the gate terminal electrode layer 28 inside the gate contact hole 149.

[0241] The second connection portion 169 is electrically connected to the output terminal electrode layer 145 of the IC chip 132. More specifically, the second connection portion 169 extends from above the intermediate insulating layer 148 into the output contact hole 154. The second connection portion 169 of the third connection wiring layer 163 is connected to the output terminal electrode layer 145 within the output contact hole 154.

[0242] In this embodiment, the sealing insulating layer 8 seals the intermediate insulating layer 148 on the first substrate main surface 9 of the substrate 6. As a result, the MISFET chip 21, the diode chip 112, and the IC chip 132 are collectively sealed by the intermediate insulating layer 148 and the sealing insulating layer 8.

[0243] The sealing insulating layer 8 is formed with a gate pad opening 33, a source pad opening 34, a source sense pad opening 35, a drain pad opening 36, and an input terminal pad opening 170. The drain pad opening 36 communicates with the drain contact hole 152. The input terminal pad opening 170 communicates with the input contact hole 157.

[0244] The gate external terminal 15 is embedded in the gate pad opening 33. The gate external terminal 15 is electrically connected to the gate terminal electrode layer 28 of the MISFET chip 21 via the first connection portion 168 of the third connection wiring layer 163.

[0245] The source external terminal 16 is embedded in the source pad opening 34. The source external terminal 16 is electrically connected to the source terminal electrode layer 29 of the MISFET chip 21 via the first connection portion 164 of the first connection wiring layer 161.

[0246] The source sense external terminal 17 is buried in the source sense pad opening 35. The drain external terminal 18 is buried in the drain pad opening 36. The input external terminal 136 is buried in the input terminal pad opening 170.

[0247] FIG. 17 is a circuit diagram for explaining the electrical structure of the electronic component 131 shown in FIG.

[0248] 17, the diode chip 112 is connected to the MISFET chip 21. The diode chip 112 is connected to the MISFET chip 21 as a freewheeling diode. The IC chip 132 is connected to the gate of the MISFET chip 21.

[0249] As described above, electronic component 131 can also achieve the same effects as those described for electronic component 1.

[0250] Furthermore, the electronic component 131 integrates the MISFET chip 21, the diode chip 112, and the IC chip 132 into a single package. As a result, by mounting the electronic component 131 on a connection object such as a mounting board, the MISFET chip 21, the diode chip 112, and the IC chip 132 can be mounted on the mounting board in a single step.

[0251] Furthermore, according to the electronic component 131, the intermediate insulating layer 148 is interposed in the region between the first substrate main surface 9 of the substrate 6 and the sealing insulating layer 8. The intermediate insulating layer 148 covers the MISFET chip 21, the diode chip 112, and the IC chip 132.

[0252] A first connection wiring layer 161, a second connection wiring layer 162, and a third connection wiring layer 163 are formed on this intermediate insulating layer 148. In other words, the intermediate insulating layer 148 allows the first connection wiring layer 161, the second connection wiring layer 162, and the third connection wiring layer 163 to be fabricated in a manner in which they are stacked relative to the MISFET chip 21, the diode chip 112, and the IC chip 132 along the normal direction of the first substrate main surface 9 of the substrate 6.

[0253] This eliminates the need to extend the wiring connecting the MISFET chip 21, the diode chip 112, and the IC chip 132 significantly laterally along the first substrate main surface 9 of the substrate 6. This allows the MISFET chip 21, the diode chip 112, and the IC chip 132 to be disposed close to one another.

[0254] Therefore, with the electronic component 131, the area occupied by the circuit network including the MISFET chip 21, the diode chip 112, and the IC chip 132 on the connection object such as a mounting board can be reduced compared to when they are individually mounted on the connection object such as a mounting board.

[0255] The electronic component 131 may have a structure in which a cathode external terminal 122 and an anode external terminal 123 are formed. The electronic component 131 may have a structure in which an output external terminal (not shown) is connected to the output terminal electrode layer 145 of the IC chip 132. The output external terminal may have a structure similar to that of the gate external terminal 15, etc.

[0256] The electronic component 131 may have a structure in which the first connection wiring layer 161, the second connection wiring layer 162, and the third connection wiring layer 163 are not formed. In this case, the intermediate insulating layer 148 can be omitted.

[0257] In the electronic component 131, a second diode chip 112 may be provided instead of the MISFET chip 21. In the electronic component 131, a plurality of (two or more) diode chips 112 may be provided. In the electronic component 131, the MISFET chip 21 may be omitted.

[0258] In the electronic component 131, a second MISFET chip 21 may be provided instead of the diode chip 112. In the electronic component 131, a plurality of (two or more) MISFET chips 21 may be provided. In the electronic component 131, the diode chip 112 may be omitted.

[0259] In the electronic component 131, any IC chip other than a gate driver IC may be employed as the IC chip 132. In the electronic component 131, the IC chip 132 may be omitted.

[0260] In electronic component 131, a passive element chip may be provided instead of or in addition to IC chip 132. The passive element chip may include at least one of a capacitor, a resistor, and an inductor.

[0261] The passive element chip may be connected to any destination. The passive element chip may be electrically connected to the gate, source, or drain of the MISFET chip 21. The passive element chip may be electrically connected to the cathode or anode of the diode chip 112.

[0262] The structure of the second embodiment, the structure of the third embodiment, the structure of the fourth embodiment, the structure of the fifth embodiment, or the structure of the sixth embodiment, or a combination of any two, three, four, or five of these structures, may be applied to the electronic component 131.

[0263] 18 is a cross-sectional view of a portion corresponding to FIG. 3, illustrating the structure of an electronic component 181 according to an eighth embodiment of the present invention. In the following, structures corresponding to those described for the electronic component 1 are given the same reference numerals, and descriptions thereof will be omitted.

[0264] In the electronic component 181, the MISFET chip 21 is directly bonded to the wiring layer 20 without the conductive bonding material 32. More specifically, the drain terminal electrode layer 31 of the MISFET chip 21 is directly bonded to the first connection region 22 of the wiring layer 20.

[0265] The wiring layer 20 is formed using a firing process. In the firing process of the wiring layer 20, first, a conductive paste that will be the base of the wiring layer 20 is applied onto the main surface insulating layer 7. The conductive paste may be a copper paste.

[0266] Next, the MISFET chip 21 is placed on the conductive paste so that the drain terminal electrode layer 31 is connected to the conductive paste. After that, the conductive paste is fired. As a result, the drain terminal electrode layer 31 is bonded to the wiring layer 20.

[0267] As described above, electronic component 181 can also achieve the same effects as those described for electronic component 1.

[0268] The form in which the MISFET chip 21 is directly bonded to the wiring layer 20 without the conductive bonding material 32 can also be applied to the structure of the second embodiment, the structure of the third embodiment, the structure of the fourth embodiment, the structure of the fifth embodiment, the structure of the sixth embodiment and the structure of the seventh embodiment.

[0269] For example, in the sixth embodiment, the diode chip 112 may be directly bonded to the wiring layer 20 without the conductive bonding material 119, similar to the MISFET chip 21. In the seventh embodiment, the diode chip 112 and the IC chip 132 may be directly bonded to the third wiring layer 135 without the conductive bonding material 147, similar to the MISFET chip 21.

[0270] Although the embodiment of the present invention has been described above, the present invention can also be embodied in other forms.

[0271] In each of the above-described embodiments, a MISFET chip 21 may be employed that does not include the source sense terminal electrode layer 30. In this case, the structure formed due to the source sense terminal electrode layer 30, such as the source sense external terminal 17, can be omitted.

[0272] In each of the above-described embodiments, the MISFET chip 21 may be configured without the source sense terminal electrode layer 30 having a larger inductance than the source terminal electrode layer 29.

[0273] In each of the above-described embodiments, the substrate 6 may include a metal substrate instead of a semiconductor substrate. The metal substrate may include a copper substrate, a gold substrate, or an aluminum substrate. Of course, the metal substrate may be formed of a metal material other than these metal materials.

[0274] In each of the above-described embodiments, the substrate 6 may include an insulating substrate instead of a semiconductor substrate. The insulating substrate may include a glass substrate, a ceramic substrate, or a resin substrate. Of course, the insulating substrate may be formed of an insulating material other than these insulating materials.

[0275] In each of the above-described embodiments, the main surface insulating layer 7 may be omitted. In each of the above-described embodiments, if the substrate 6 is an insulator, the main surface insulating layer 7 may be omitted.

[0276] In the above-described embodiments, the MISFET chip 21 is a so-called vertical device. However, the MISFET chip 21 may be a horizontal device. That is, the MISFET chip 21 may have a structure in which the gate terminal electrode layer 28, the source terminal electrode layer 29, the source sense terminal electrode layer 30, and the drain terminal electrode layer 31 are formed on the first chip main surface 25 of the chip body 24. In this case, the drain external terminal 18 is formed on the first chip main surface 25 of the chip body 24.

[0277] In the above-described embodiments, the diode chip 112 is a so-called vertical device. However, the diode chip 112 may be a horizontal device. That is, the diode chip 112 may have a structure in which the cathode terminal electrode layer 117 and the anode terminal electrode layer 118 are formed on the first chip main surface 114 of the chip body 113. In this case, the anode external terminal 123 is formed on the first chip main surface 114 of the chip body 113.

[0278] In each of the above-described embodiments, an IGBT chip including an IGBT (Insulated Gate Bipolar Transistor) as an example of a semiconductor switching element may be adopted instead of the MISFET chip 21. In this case, the "source" of the MISFET is replaced with the "emitter" of the IGBT. Also, the "drain" of the MISFET is replaced with the "collector" of the IGBT.

[0279] Examples of features extracted from this specification and the accompanying drawings are presented below, including configurations that contribute to improved heat dissipation and miniaturization.

[0280] [A1] An electronic component comprising: a substrate having a first main surface on one side and a second main surface on the other side; a chip having a first chip main surface on one side and a second chip main surface on the other side, and a plurality of electrodes formed on the first chip main surface and / or the second chip main surface, and disposed on the first main surface of the substrate; a sealing insulating layer that seals the chip on the first main surface of the substrate so as to expose the second main surface of the substrate, and has a sealing main surface facing the first main surface of the substrate; and a plurality of external terminals formed through the sealing insulating layer so as to be exposed from the sealing main surface of the sealing insulating layer, and electrically connected to the plurality of electrodes of the chip, respectively.

[0281] [A2] The electronic component according to A1, wherein the sealing main surface of the sealing insulating layer forms a mounting surface, and all of the external terminals electrically connected to the electrodes of the chip, respectively, are exposed from the mounting surface.

[0282] [A3] The electronic component according to A1 or A2, wherein the substrate includes a side surface connecting the first main surface and the second main surface, and the sealing insulating layer exposes the side surface of the substrate.

[0283] [A4] The electronic component according to A3, wherein the sealing insulating layer includes a sealing side surface formed flush with the side surface of the substrate.

[0284] [A5] An electronic component described in any one of A1 to A4, wherein the chip includes circuit elements formed on the first chip main surface side, and is arranged on the first main surface with the second chip main surface facing the first main surface of the substrate, and the plurality of external terminals include chip-side external terminals that penetrate the sealing insulation layer and are electrically connected to the plurality of electrodes of the chip, respectively.

[0285] [A6] The electronic component according to any one of A1 to A5, wherein the substrate includes a silicon substrate, a silicon carbide substrate, a sapphire substrate, or a nitride semiconductor substrate.

[0286] [A7] An electronic component described in any one of A1 to A6, further including a wiring layer formed on the first main surface of the substrate, and the chip including a wiring-side electrode formed on the second chip main surface and electrically connected to the wiring layer.

[0287] [A8] The electronic component according to A7, wherein the plurality of external terminals include a wiring layer-side external terminal that penetrates the sealing insulating layer and is connected to the wiring layer.

[0288] [A9] The electronic component according to any one of A1 to A8, further including a main surface insulating layer formed on the first main surface of the substrate and interposed in a region between the first main surface of the substrate and the chip.

[0289] [A10] The electronic component according to A9, wherein the main surface insulating layer contains at least one of silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, and aluminum oxynitride.

[0290] [A11] The electronic component according to any one of A1 to A10, further including a heat dissipation structure provided on the second main surface of the substrate, for dissipating heat generated by the chip to the outside.

[0291] [A12] The electronic component according to A11, wherein the heat dissipation structure includes a fin structure formed on the second main surface of the substrate.

[0292] [A13] The electronic component according to A11 or A12, wherein the heat dissipation structure includes a heat dissipation member covering the second main surface of the substrate.

[0293] [A14] The electronic component according to any one of A1 to A13, wherein the plurality of external terminals each include a columnar electrode layer standing in a columnar shape along a normal direction of the first main surface of the substrate.

[0294] [A15] The electronic component according to A14, wherein the columnar electrode layer includes a connection portion for external connection, and the connection portion of the columnar electrode layer is formed flush with the sealing main surface of the sealing insulation layer.

[0295] [A16] The electronic component according to A14 or A15, wherein each of the plurality of external terminals includes a conductive junction layer formed on the columnar electrode layer.

[0296] [A17] The electronic component according to A16, wherein the entire conductive adhesive layer is exposed from the main sealing surface of the sealing insulating layer.

[0297] [A18] An electronic component according to any one of A1 to A13, wherein a plurality of openings are formed in the sealing main surface of the sealing insulation layer, and the plurality of external terminals each include an electrode film formed in a film-like shape along the inner wall of the opening.

[0298] [A19] The electronic component according to A18, wherein each of the plurality of external terminals includes a conductive bonding layer formed on the electrode film.

[0299] [A20] The electronic component described in A19, wherein the electrode film includes a covering portion that covers the sealing main surface of the sealing insulation layer outside the opening, and the conductive bonding layer fills the opening and covers the covering portion of the electrode film outside the opening.

[0300] [A21] An electronic component according to any one of A1 to A20, further including a second chip arranged on the first main surface of the substrate, wherein the sealing insulating layer seals the chip and the second chip on the first main surface of the substrate.

[0301] [A22] The electronic component according to A21, wherein the second chip is electrically connected to the chip.

[0302] [A23] An electronic component according to A21 or A22, further including: an intermediate insulating layer interposed in the region between the first main surface of the substrate and the sealing insulating layer and covering the chip and the second chip; and a connection wiring layer interposed in the region between the intermediate insulating layer and the sealing insulating layer and routed over the intermediate insulating layer so as to be electrically connected to the chip and the second chip.

[0303] [A24] An electronic component according to any one of A21 to A23, wherein the chip includes a MISFET having a source, a drain, and a gate, and the second chip includes a diode having a cathode electrically connected to the drain of the chip and an anode electrically connected to the source of the chip.

[0304] [A25] The electronic component according to any one of A21 to A23, wherein the chip includes a MISFET having a source, a drain, and a gate, and the second chip includes a control chip that drives and controls the gate of the MISFET.

[0305] [A26] The electronic component according to A24 or A25, wherein the MISFET is a vertical or horizontal device formed on silicon, silicon carbide, or nitride semiconductor, and has a breakdown voltage of 600 V or more.

[0306] [A27] An electronic component according to any one of A21 to A23, wherein the chip includes an IGBT having an emitter, a collector, and a gate, and the second chip includes a diode having a cathode electrically connected to the collector of the chip and an anode electrically connected to the emitter of the chip.

[0307] [A28] The electronic component according to A27, wherein the IGBT is a vertical or horizontal device formed on silicon, silicon carbide, or nitride semiconductor, and has a breakdown voltage of 600 V or more.

[0308] [A29] A semiconductor device comprising: a semiconductor substrate having a first main surface on one side and a second main surface on the other side; a main surface insulating layer formed on the first main surface of the semiconductor substrate; a semiconductor chip having a plurality of electrodes and disposed on the main surface insulating layer; a sealing insulating layer that seals the semiconductor chip on the first main surface of the semiconductor substrate so as to expose the second main surface of the semiconductor substrate and has a sealing main surface facing the first main surface of the semiconductor substrate; and a plurality of external terminals formed through the sealing insulating layer so as to be exposed from the sealing main surface of the sealing insulating layer, and electrically connected to the plurality of electrodes of the semiconductor chip, respectively.

[0309] [A30] The semiconductor device described in A29, wherein the sealing main surface of the sealing insulation layer forms a mounting surface, and all of the plurality of external terminals electrically connected to the plurality of electrodes of the semiconductor chip are exposed from the mounting surface.

[0310] [A31] The semiconductor device according to A29 or A30, wherein the semiconductor substrate includes a side surface connecting the first main surface and the second main surface, and the sealing insulating layer exposes the side surface of the semiconductor substrate.

[0311] [A32] The semiconductor device according to A31, wherein the sealing insulating layer includes a sealing side surface formed flush with the side surface of the semiconductor substrate.

[0312] [A33] The semiconductor device according to any one of A29 to A32, wherein the semiconductor chip is a device having vertical or horizontal transistors formed in silicon, silicon carbide, or nitride semiconductor, and has a breakdown voltage of 600 V or more.

[0313] [A34] The semiconductor device according to any one of A29 to A33, wherein the semiconductor substrate includes at least one of a silicon substrate, a silicon carbide substrate, a sapphire substrate, and a nitride semiconductor substrate.

[0314] [A35] The semiconductor device according to any one of A29 to A34, wherein the main surface insulating layer contains at least one of silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, and aluminum oxynitride, and has a thickness of 0.1 μm or more and 100 μm or less.

[0315] [B1] An electronic component comprising: a semiconductor substrate having a first main surface on one side and a second main surface on the other side; a main surface insulating layer covering the entire first main surface of the semiconductor substrate; a chip having a first chip main surface on one side and a second chip main surface on the other side, and at least one electrode formed on either or both of the first chip main surface and the second chip main surface, and disposed on the main surface insulating layer; a sealing insulating layer exposing the second main surface of the semiconductor substrate and sealing the chip on the main surface insulating layer so as to directly cover the main surface insulating layer, and having a sealing main surface extending along the first main surface of the semiconductor substrate; and at least one external terminal exposed from the sealing main surface of the sealing insulating layer and formed through the sealing insulating layer so as to be electrically connected to at least one of the electrodes.

[0316] [B2] The electronic component according to B1, further comprising a wiring layer disposed on the main surface insulating layer and electrically insulated from the semiconductor substrate by the main surface insulating layer, the semiconductor substrate being an element-free substrate having no circuit elements, the chip being electrically insulated from the semiconductor substrate by the main surface insulating layer, and the sealing insulating layer directly covering the portion of the wiring layer exposed from the chip, electrically insulating the chip from the semiconductor substrate.

[0317] [B3] The electronic component according to B2, wherein the chip includes a wiring-side electrode as the electrode formed on the main surface side of the second chip, and the wiring-side electrode is arranged on the wiring layer so as to be electrically connected to the wiring layer.

[0318] [B4] The electronic component according to B3, wherein at least one of the external terminals includes a wiring layer-side external terminal that penetrates the sealing insulating layer and is connected to the wiring layer so as to be electrically connected to the wiring-side electrode via the wiring layer.

[0319] [B5] The electronic component according to B3 or B4, further comprising a conductive bonding material interposed between the wiring-side electrode and the wiring layer, electrically and mechanically connecting the wiring-side electrode and the wiring layer.

[0320] [B6] The electronic component described in any one of B1 to B5, wherein the chip includes a circuit element formed on the first chip main surface and a circuit-side electrode as the electrode formed on the first chip main surface so as to be electrically connected to the circuit element, the chip is disposed on the main surface insulating layer with the second chip main surface facing the first main surface of the semiconductor substrate, and at least one of the external terminals includes a chip-side external terminal that penetrates the sealing insulating layer and is directly connected to the circuit-side electrode.

[0321] [B7] The electronic component according to B6, wherein the circuit element has a vertical element structure or a horizontal element structure.

[0322] [B8] The electronic component according to any one of B1 to B7, wherein the semiconductor substrate includes silicon, silicon carbide, sapphire, or a nitride semiconductor.

[0323] [B9] The electronic component according to any one of B1 to B8, wherein the chip is a semiconductor chip.

[0324] [B10] The electronic component according to any one of B1 to B9, wherein the chip has a chip body containing silicon, silicon carbide, or a nitride semiconductor.

[0325] [B11] An electronic component according to any one of B1 to B10, wherein the chip includes a plurality of the electrodes, the main sealing surface of the sealing insulation layer forms a mounting surface, and all of the plurality of external terminals are exposed from the mounting surface of the sealing insulation layer and formed to penetrate the sealing insulation layer so as to be electrically connected to the plurality of electrodes.

[0326] [B12] The electronic component according to any one of B1 to B11, wherein the sealing and insulating layer exposes a side surface of the semiconductor substrate.

[0327] [B13] The electronic component according to any one of B1 to B12, wherein the sealing insulating layer includes a sealing side surface formed flush with a side surface of the semiconductor substrate.

[0328] [B14] The electronic component according to any one of B1 to B13, wherein the main surface insulating layer is made of a single layer.

[0329] [B15] The electronic component according to any one of B1 to B14, wherein the main surface insulating layer contains at least one of silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, and aluminum oxynitride.

[0330] [B16] The electronic component according to any one of B1 to B15, wherein the main surface insulating layer has a thickness of 0.1 μm or more and 100 μm or less.

[0331] [B17] The electronic component according to any one of B1 to B16, further including a heat dissipation structure provided on the second main surface of the semiconductor substrate, for dissipating heat generated in the chip to the outside.

[0332] [B18] The electronic component according to B17, wherein the heat dissipation structure includes a fin structure formed on the second main surface side of the semiconductor substrate.

[0333] [B19] The electronic component according to B17 or B18, wherein the heat dissipation structure includes a heat dissipation member that covers the second main surface of the semiconductor substrate.

[0334] [B20] The electronic component according to any one of B1 to B19, wherein at least one of the external terminals includes a columnar electrode layer provided in a columnar shape along a normal direction of the first main surface of the semiconductor substrate.

[0335] [B21] The electronic component according to B20, wherein the columnar electrode layer includes a connection portion for external connection, and the connection portion of the columnar electrode layer is formed flush with the sealing main surface of the sealing insulation layer.

[0336] [B22] The electronic component according to B20 or B21, wherein at least one of the external terminals includes a conductive junction layer formed on the columnar electrode layer.

[0337] [B23] The electronic component according to B22, wherein the conductive adhesive layer is entirely exposed from the main sealing surface of the sealing insulating layer.

[0338] [B24] An electronic component according to any one of B1 to B19, wherein a plurality of openings are formed in the sealing main surface of the sealing insulating layer, and at least one of the external terminals includes an electrode film formed in a film-like shape along the inner wall of the opening.

[0339] [B25] The electronic component according to B24, wherein at least one of the external terminals includes a conductive bonding layer formed on the electrode film.

[0340] [B26] The electronic component according to B25, wherein the electrode film includes a covering portion that covers the sealing main surface of the sealing insulation layer outside the opening, and the conductive bonding layer fills the opening and covers the covering portion of the electrode film outside the opening.

[0341] [B27] An electronic component comprising: a substrate having a first main surface on one side and a second main surface on the other side; a chip having a first chip main surface on one side and a second chip main surface on the other side, and a plurality of electrodes formed on either or both of the first chip main surface and the second chip main surface, and arranged on the first main surface; a second chip arranged on the first main surface; a sealing insulating layer that seals the chip and the second chip on the first main surface to expose the second main surface and has a sealing main surface extending along the first main surface; a plurality of external terminals that are formed through the sealing insulating layer to be exposed from the sealing main surface and are electrically connected to the plurality of electrodes of the chip, respectively; an intermediate insulating layer that is interposed in a region between the first main surface and the sealing insulating layer and covers the chip and the second chip; and a connection wiring layer that is interposed in a region between the intermediate insulating layer and the sealing insulating layer and is routed on the intermediate insulating layer to be electrically connected to the chip and the second chip.

[0342] [B28] The electronic component according to B27, wherein the second chip is electrically connected to the chip.

[0343] [B29] An electronic component according to B27 or B28, wherein the chip includes a MISFET having a source, a drain, and a gate, and the second chip includes a diode having a cathode electrically connected to the drain of the chip and an anode electrically connected to the source of the chip.

[0344] [B30] The electronic component according to B27 or B28, wherein the chip includes a MISFET having a source, a drain, and a gate, and the second chip includes a control chip that drives and controls the gate of the MISFET.

[0345] [B31] The electronic component according to B29 or B30, wherein the MISFET is a vertical or horizontal device formed on silicon, silicon carbide or nitride semiconductor, and has a breakdown voltage of 600 V or more.

[0346] [B32] The electronic component according to B27 or B28, wherein the chip includes an IGBT having an emitter, a collector, and a gate, and the second chip includes a diode having a cathode electrically connected to the collector of the chip and an anode electrically connected to the emitter of the chip.

[0347] [B33] The electronic component according to B32, wherein the IGBT is a vertical or horizontal device formed on silicon, silicon carbide, or nitride semiconductor, and has a breakdown voltage of 600 V or more.

[0348] [B34] An electronic component comprising: a silicon substrate having a main surface on which no elements are formed; a silicon nitride film covering the entire main surface of the silicon substrate; a wiring film formed on the silicon nitride film; a chip body made of silicon carbide having a first chip main surface on one side and a second chip main surface on the other side; a silicon carbide chip having a first electrode formed on the first chip main surface and a second electrode formed on the second chip main surface, the silicon carbide chip being disposed on the wiring film with the second electrode facing the wiring film; a conductive bonding material interposed between the wiring film and the second electrode and electrically and mechanically connecting the wiring film and the second electrode; a sealing insulating layer directly covering the silicon nitride film, the wiring film, and the silicon carbide chip, and having a sealing main surface extending along the main surface of the silicon substrate; and a chip-side external terminal electrically connected to the first electrode and erected in a pillar shape on the first electrode within the sealing insulating layer so as to be exposed from the sealing main surface.

[0349] [B35] The electronic component according to B34, further including a wiring-side external terminal that is electrically connected to the second electrode via the wiring film and is provided in a pillar-like shape on the wiring film within the sealing insulation layer so as to be exposed from the sealing main surface.

[0350] [B36] The electronic component according to B34 or B35, wherein the silicon nitride film is composed of a single layer.

[0351] [C1] A semiconductor device including: a semiconductor substrate having a first main surface on one side and a second main surface on the other side; a main surface insulating layer covering the first main surface; a first chip arranged on the main surface insulating layer, the first chip having a first back surface on the main surface insulating layer side and a first front surface opposite the first back surface, and including at least one first electrode arranged on the first front surface side; a second chip arranged on the main surface insulating layer at a distance from the first chip, the second chip having a second back surface on the main surface insulating layer side and a second front surface opposite the second back surface, and including a second electrode arranged on the second back surface side; connection wiring on the semiconductor substrate electrically connecting the first electrode on the first front surface side of the first chip and the second electrode on the second back surface side of the second chip; and a sealing insulating layer that seals the first chip, the second chip, and the connection wiring on the semiconductor substrate.

[0352] [C2] The semiconductor device according to C1, wherein the sealing insulating layer exposes the second main surface of the semiconductor substrate.

[0353] [C3] The semiconductor device according to C1 or C2, wherein the semiconductor substrate has a side surface connecting the first main surface and the second main surface, and the sealing insulating layer exposes the side surface of the semiconductor substrate.

[0354] [C4] The semiconductor device according to C3, wherein the sealing insulating layer has a sealing side surface formed flush with the side surface of the semiconductor substrate.

[0355] [C5] The semiconductor device according to any one of C1 to C4, wherein the sealing insulating layer has a thickness smaller than that of the semiconductor substrate.

[0356] [C6] The semiconductor device according to any one of C1 to C5, wherein the main surface insulating layer has a thickness smaller than both the thickness of the first chip and the thickness of the second chip.

[0357] [C7] The semiconductor device according to any one of C1 to C6, wherein the main surface insulating layer has a thickness of 0.1 μm or more and 100 μm or less.

[0358] [C8] The semiconductor device according to any one of C1 to C7, wherein the semiconductor substrate includes a silicon substrate, a silicon carbide substrate, a sapphire substrate, or a nitride semiconductor substrate.

[0359] [C9] The semiconductor device according to any one of C1 to C8, wherein the main surface insulating layer includes at least one of a silicon oxide layer, a silicon nitride layer, a silicon oxynitride layer, an aluminum oxide layer, an aluminum nitride layer, and an aluminum oxynitride layer.

[0360] [C10] The semiconductor device according to any one of C1 to C9, wherein the first chip includes a first chip body including at least one of silicon, silicon carbide, and a nitride semiconductor.

[0361] [C11] The semiconductor device according to any one of C1 to C10, wherein the second chip includes a second chip body including at least one of silicon, silicon carbide, and a nitride semiconductor.

[0362] [C12] A semiconductor device according to any one of C1 to C11, further including a first wiring arranged on the main surface insulating layer and a second wiring arranged on the main surface insulating layer at a distance from the first wiring, wherein the first chip is arranged on the first wiring and the second chip is arranged on the second wiring.

[0363] [C13] A semiconductor device described in C12, wherein the second electrode of the second chip is electrically connected to the second wiring, and the connection wiring is electrically connected to the second wiring and electrically connected to the second chip via the second wiring.

[0364] [C14] A semiconductor device described in any one of C1 to C13, further including an intermediate insulating layer that selectively covers the first chip and the second chip, the connection wiring being arranged on the intermediate insulating layer, and the sealing insulating layer covering the intermediate insulating layer with the connection wiring sandwiched therebetween.

[0365] [C15] The semiconductor device according to any one of C1 to C14, further comprising: an encapsulating insulating layer having an encapsulating main surface extending along the first main surface; and at least one external terminal arranged in the encapsulating insulating layer so as to be exposed from the encapsulating main surface.

[0366] [C16] The semiconductor device according to C15, wherein the external terminals further include at least one chip-side external terminal electrically connected to at least one of the first electrodes.

[0367] [C17] A semiconductor device described in C16, wherein the first chip has a circuit element formed on the first surface side, at least one of the first electrodes is electrically connected to the circuit element, and at least one of the chip-side external terminals is electrically connected to the circuit element via at least one of the first electrodes.

[0368] [C18] The semiconductor device according to C16 or C17, wherein the first chip includes a plurality of the first electrodes, and a plurality of the chip-side external terminals are electrically connected to a plurality of the first electrodes.

[0369] [C19] The semiconductor device according to any one of C15 to C18, wherein the external terminal further includes a connection wiring side external terminal that penetrates a portion of the sealing insulating layer so as to be exposed from the sealing main surface and is electrically connected to the connection wiring.

[0370] [C20] The semiconductor device according to any one of C15 to C19, wherein the sealing main surface is a mounting surface, the plurality of external terminals are arranged in the sealing insulating layer, and all of the plurality of external terminals are exposed from the mounting surface.

[0371] [C21] The semiconductor device according to any one of C15 to C20, wherein the external terminal includes a columnar electrode extending in a columnar shape along a normal direction to the first main surface.

[0372] [C22] The semiconductor device according to C21, wherein the external terminal includes a conductive junction layer formed on the columnar electrode.

[0373] [C23] The semiconductor device according to C22, wherein the entire conductive bonding layer is exposed from the encapsulation main surface.

[0374] [C24] The semiconductor device according to any one of C21 to C23, wherein the columnar electrodes have electrode surfaces formed flush with the sealing main surface.

[0375] [C25] The semiconductor device according to any one of C15 to C20, wherein the sealing insulating layer has a plurality of openings formed in the sealing main surface, and the external terminals include an electrode film that coats the wall surfaces of the openings in a film-like manner.

[0376] [C26] The semiconductor device according to C25, wherein the external terminal includes a conductive junction layer disposed on the electrode film.

[0377] [C27] The semiconductor device described in C26, wherein the electrode film includes a covering portion extended from the opening onto the sealing main surface, and the conductive bonding layer is embedded in the opening across the electrode film and has a portion outside the opening that covers the sealing main surface across the covering portion.

[0378] [C28] The semiconductor device according to any one of C1 to C27, further including a heat dissipation structure provided on the second main surface side of the semiconductor substrate, for dissipating heat of the semiconductor substrate to the outside.

[0379] [C29] The semiconductor device according to C28, wherein the heat dissipation structure includes a fin structure formed on the second main surface.

[0380] [C30] The semiconductor device according to C28 or C29, wherein the heat dissipation structure includes a heat dissipation member covering the second main surface.

[0381] [C31] The semiconductor device according to any one of C1 to C30, wherein the first chip includes a vertical or horizontal MISFET.

[0382] [C32] The semiconductor device according to any one of C1 to C30, wherein the first chip includes a vertical or horizontal IGBT.

[0383] [C33] The semiconductor device according to C31 or C32, wherein the second chip includes a diode electrically connected to the first chip.

[0384] [C34] The semiconductor device according to C31 or C32, wherein the second chip includes a control chip that controls the first chip.

[0385] [C35] The semiconductor device according to any one of C1 to C34, wherein the first chip has a breakdown voltage of 600V or more.

[0386] [D1] A substrate having a first main surface on one side and a second main surface on the other side, a main surface insulating layer covering the first main surface, a first chip disposed on the main surface insulating layer, the first chip having a first back surface on the main surface insulating layer side and a first front surface opposite to the first back surface, the first chip including at least one first electrode disposed on the first front surface side, and a second chip disposed on the main surface insulating layer at a distance from the first chip, the second chip having a second back surface on the main surface insulating layer side and a second front surface opposite to the second back surface, the first chip including at least one second electrode disposed on the second front surface side. a third chip arranged on the main surface insulating layer at a distance from the first chip and the second chip, the third chip having a third back surface on the main surface insulating layer side and a third front surface opposite the third back surface, and including at least one third electrode arranged on the third front surface side; connection wiring electrically connecting the first electrode of the first chip and the third electrode on the third front surface side of the third chip on the substrate; and a sealing insulating layer sealing the first chip, the second chip, the third chip, and the connection wiring on the substrate.

[0387] [D2] The semiconductor device according to D1, wherein the sealing insulating layer is made of a sealing resin layer.

[0388] [D3] The semiconductor device according to D2, wherein the sealing resin layer contains either or both of a polyimide resin and an epoxy resin.

[0389] [D4] The semiconductor device according to any one of D1 to D3, wherein the substrate dissipates heat generated on the first main surface side to the outside.

[0390] [D5] The semiconductor device according to any one of D1 to D4, wherein the substrate has a thermal conductivity of 100 W / mK or more.

[0391] [D6] The semiconductor device according to any one of D1 to D5, wherein the sealing and insulating layer exposes at least a part of the second main surface of the substrate.

[0392] [D7] The semiconductor device according to any one of D1 to D6, wherein the substrate has a side surface connecting the first main surface and the second main surface, and the sealing insulating layer exposes the side surface of the substrate.

[0393] [D8] The semiconductor device according to D7, wherein the sealing insulating layer has a sealing side surface formed flush with the side surface of the substrate.

[0394] [D9] The semiconductor device according to any one of D1 to D8, wherein the sealing and insulating layer has a thickness smaller than that of the substrate.

[0395] [D10] The semiconductor device according to any one of D1 to D9, wherein the main surface insulating layer has a thickness smaller than the thickness of the first chip, the thickness of the second chip, and the thickness of the third chip.

[0396] [D11] The semiconductor device according to any one of D1 to D10, wherein the main surface insulating layer has a thickness of 0.1 μm or more and 100 μm or less.

[0397] [D12] The semiconductor device according to any one of D1 to D11, wherein the substrate includes a silicon substrate, a silicon carbide substrate, a sapphire substrate, or a nitride semiconductor substrate.

[0398] [D13] The semiconductor device according to any one of D1 to D12, wherein the main surface insulating layer includes at least one of a silicon oxide layer, a silicon nitride layer, a silicon oxynitride layer, an aluminum oxide layer, an aluminum nitride layer, and an aluminum oxynitride layer.

[0399] [D14] The semiconductor device according to any one of D1 to D13, wherein the first chip includes a first chip body containing at least one of silicon, silicon carbide, and a nitride semiconductor.

[0400] [D15] The semiconductor device according to D14, wherein the first chip body is made of silicon carbide.

[0401] [D16] The semiconductor device according to any one of D1 to D15, wherein the second chip includes a second chip body including at least one of silicon, silicon carbide, and a nitride semiconductor.

[0402] [D17] The semiconductor device according to D16, wherein the second chip body is made of silicon carbide.

[0403] [D18] A semiconductor device described in any one of D1 to D17, further including: the first chip including a plurality of the first electrodes; the second chip including a back surface electrode arranged on the second back surface side; the connection wiring that electrically connects one of the plurality of first electrodes of the first chip to the third electrode of the third chip; and a second connection wiring that electrically connects one of the plurality of first electrodes of the first chip on the substrate that is different from the connection target of the connection wiring to the back surface electrode of the second chip.

[0404] [D19] The semiconductor device described in D18 further includes a first wiring arranged on the main surface insulating layer, a second wiring arranged on the main surface insulating layer at a distance from the first wiring, and a third wiring arranged on the main surface insulating layer at a distance from the first wiring, wherein the first chip is arranged on the first wiring, the second chip is arranged on the second wiring, and the third chip is arranged on the third wiring.

[0405] [D20] A semiconductor device described in D19, wherein the back electrode of the second chip is electrically connected to the second wiring, and the second connection wiring is electrically connected to the second wiring and electrically connected to the back electrode of the second chip via the second wiring.

[0406] [D21] A semiconductor device described in any one of D18 to D20, wherein the second connection wiring has a portion located on the first surface of the first chip and a portion located in a region on the substrate side relative to the height position of the first surface of the first chip.

[0407] [D22] A semiconductor device described in any one of D1 to D21, further including an intermediate insulating layer that selectively covers the first chip, the second chip, and the third chip, the connection wiring being arranged on the intermediate insulating layer, and the sealing insulating layer covering the intermediate insulating layer with the connection wiring sandwiched therebetween.

[0408] [D23] The semiconductor device according to D22, wherein the intermediate insulating layer forms a step portion on the main surface insulating layer.

[0409] [D24] The semiconductor device according to any one of D1 to D23, further comprising: the sealing insulation layer having a sealing main surface extending along the first main surface; and at least one external terminal extending in a columnar shape along a normal direction of the first main surface so as to penetrate the sealing insulation layer and be exposed from the sealing main surface.

[0410] [D25] A semiconductor device described in D24, wherein the first chip has a circuit element formed on the first surface side and at least one first electrode electrically connected to the circuit element, and the external terminal includes at least one chip-side external terminal electrically connected to the circuit element via at least one first electrode.

[0411] [D26] The semiconductor device according to D25, wherein the first chip includes a plurality of the first electrodes, and a plurality of the chip-side external terminals are electrically connected to a plurality of the first electrodes.

[0412] [D27] The semiconductor device according to any one of D24 to D26, wherein the external terminals include connection wiring side external terminals electrically connected to the connection wiring.

[0413] [D28] A semiconductor device according to any one of D24 to D27, wherein the external terminal includes a columnar electrode extending in a columnar shape in the normal direction so as to penetrate the sealing insulation layer and be exposed from the sealing main surface, and a conductive junction layer arranged on the columnar electrode.

[0414] [D29] The semiconductor device according to D28, wherein the entire conductive bonding layer is exposed from the encapsulation main surface.

[0415] [D30] The semiconductor device according to D28 or D29, wherein the columnar electrode has an electrode surface formed flush with the sealing main surface.

[0416] [D31] A semiconductor device according to any one of D24 to D27, wherein the sealing insulating layer has a plurality of openings formed on the sealing main surface, and the external terminals include an electrode film that coats the wall surfaces of the openings in a film-like manner, and a conductive bonding layer arranged on the electrode film.

[0417] [D32] The semiconductor device described in D31, wherein the electrode film includes a covering portion extended from the opening onto the sealing main surface, and the conductive bonding layer is embedded in the opening across the electrode film and has a portion outside the opening that covers the sealing main surface across the covering portion.

[0418] [D33] The semiconductor device according to any one of D1 to D32, further including a heat dissipation structure provided on the second main surface side of the substrate, for dissipating heat of the substrate to the outside.

[0419] [D34] The semiconductor device according to D33, wherein the heat dissipation structure includes a fin structure formed on the second main surface.

[0420] [D35] The semiconductor device according to D33 or D34, wherein the heat dissipation structure includes a heat dissipation member covering the second main surface.

[0421] [D36] A semiconductor device described in any one of D1 to D35, wherein the first chip has a plurality of first electrodes including a control electrode formed on the first surface, and a chip back surface electrode formed on the first back surface, and is a switching device that performs switching operation between the first electrodes other than the control electrode and the chip back surface electrode in response to a signal input to the control electrode.

[0422] [D37] A semiconductor device described in D36, wherein the third chip includes a control circuit for the first chip, and the connection wiring electrically connects the control electrode of the first chip and the third electrode of the third chip.

[0423] [D38] The semiconductor device according to D36 or D37, wherein the first chip includes a sense terminal electrode as the first electrode for current detection.

[0424] [D39] The semiconductor device according to any one of D36 to D38, wherein the switching device includes a MISFET or an IGBT.

[0425] [D40] The semiconductor device according to any one of D1 to D39, wherein the second chip includes a diode for the first chip.

[0426] [D41] The semiconductor device according to any one of D1 to D40, wherein the first chip has a breakdown voltage of 600V or more.

[0427] This application corresponds to Patent Application No. 2017-085614 filed with the Japan Patent Office on April 24, 2017, the entire disclosure of which is incorporated herein by reference.

[0428] Although the embodiments of the present invention have been described in detail, these are merely examples used to clarify the technical contents of the present invention, and the present invention should not be construed as being limited to these examples, and the scope of the present invention is limited only by the appended claims. [Explanation of symbols]

[0429] 1. Electronic Components 6 Substrate (semiconductor substrate) 7 Main surface insulating layer 8. Sealing insulation layer 9. First main surface of the substrate 10 Second substrate main surface of substrate 12 First sealing main surface of sealing insulation layer 14 Sealing side of sealing insulation layer 15 Gate external terminal 16 Source external terminal 17 Source sense external terminal 18 Drain external terminal 20 wiring layer 21 MISFET chips 24 MISFET chip body 25 First chip principal surface of MISFET chip 26 Second chip main surface of MISFET chip 28 Gate terminal electrode layer of MISFET chip 29 Source terminal electrode layer of MISFET chip 30 Source sense terminal electrode layer of MISFET chip 31 Drain terminal electrode layer of MISFET chip 33 Gate pad opening 34 Source pad opening 35 Source sense pad opening 36 Drain pad opening 40 Gate pillar electrode layer of gate external terminal 41 Gate connection part of gate external terminal 42 Source column electrode layer of source external terminal 43 Source connection part of the source external terminal 44 Source sense column electrode layer of source sense external terminal 45 Source sense connection part of the source sense external terminal 46 Drain column electrode layer of drain external terminal 47 Drain connection part of drain external terminal 61 Electronic Components 62 Gate conductive junction layer of gate external terminal 63 Source conductive junction layer of source external terminal 64 Source sense conductive junction layer of source sense external terminal 65 Drain conductive junction layer of drain external terminal 71 Electronic Components 72 Gate electrode film of gate external terminal 73 Gate conductive junction layer of gate external terminal 74 Covering part of gate external terminal 75 Source electrode film of source external terminal 76 Source conductive junction layer of source external terminal 77 Covering part of source external terminal 78 Source sense electrode film of source sense external terminal 79 Source sense conductive junction layer of source sense external terminal 80 Covering part of source sense external terminal 81 Drain electrode film of drain external terminal 82 Drain conductive junction layer of drain external terminal 83 Covering part of drain external terminal 91 Electronic Components 92 Heat dissipation structure 93 Fin structure 101 Electronic Components 102 Heat dissipation structure 103 Heat dissipation material 111 Electronic Components 112 Diode Chip 113 Diode chip body 114 First chip main surface of diode chip 115 Second chip main surface of diode chip 117 Cathode terminal electrode layer of diode chip 118 Anode terminal electrode layer of diode chip 120 Cathode pad opening 121 Anode pad opening 122 Cathode external terminal 123 Anode external terminal 124 Cathode column electrode layer of cathode external terminal 125 Cathode connection part of cathode external terminal 126 Anode column electrode layer of anode external terminal 127 Anode connection part of anode external terminal 131 Electronic Components 132 IC chips 133 1st wiring layer 134 2nd wiring layer 135 3rd wiring layer 136 External input terminal 141 IC chip body 142 First chip main surface of IC chip 143 Second chip main surface of IC chip 145 IC chip output terminal electrode layer 146 IC chip input terminal electrode layer 148 Intermediate insulating layer 161 First connection wiring layer 162 Second connection wiring layer 163 Third connection wiring layer 181 Electronic Components

Claims

1. an insulating layer having a thickness of 0.1 μm or more and 10 μm or less; a wiring layer disposed on the insulating layer; a semiconductor chip disposed on the wiring layer, the semiconductor chip having a first surface opposite to the wiring layer, a second surface on the wiring layer side, and a first electrode formed on the first surface side; a sealing insulating layer that seals the wiring layer and the semiconductor chip on the insulating layer and has a sealing main surface along the insulating layer; an opening penetrating the sealing insulating layer above the first electrode; an external terminal electrically connected to the first electrode within the opening; a wiring opening penetrating the sealing insulating layer on the wiring layer; a wiring external terminal electrically connected to the wiring layer within the wiring opening, The external terminals are an electrode film that covers a wall surface of the opening and the first electrode within the opening and covers a part of the sealing main surface outside the opening; a conductor embedded in the opening via the electrode film and having one end exposed from the sealing main surface, The external wiring terminal is a wiring electrode film that covers a wall surface of the wiring opening and the wiring layer inside the wiring opening and covers a part of the sealing main surface outside the wiring opening; a wiring conductor embedded in the wiring opening via the wiring electrode film and having one end exposed from the sealing main surface.

2. 2. The semiconductor device according to claim 1, wherein said insulating layer contains at least one of silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, and aluminum oxynitride.

3. 3. The semiconductor device according to claim 1, wherein said insulating layer has a breakdown field strength of at least 1 MV / cm or more.

4. 4. The semiconductor device according to claim 1, wherein the semiconductor chip includes a semiconductor substrate containing silicon, silicon carbide, or a nitride semiconductor.

5. 5. The semiconductor device according to claim 1, wherein the semiconductor chip is a vertical device including a second electrode formed on the second surface side.

6. 5. The semiconductor device according to claim 1, wherein the semiconductor chip is a horizontal device including a second electrode formed on the second surface side.

7. 7. The semiconductor device according to claim 1, wherein the semiconductor chip has a breakdown voltage of 600 V or more.

8. the semiconductor chip includes a circuit element formed on the first surface side, the first electrode is electrically connected to the circuit element; 8. The semiconductor device according to claim 1, wherein the external terminal is electrically connected to the circuit element via the first electrode.

9. The semiconductor device according to claim 8 , wherein the circuit element includes a MISFET.

10. The semiconductor device according to claim 8 , wherein the circuit element includes an IGBT.

11. 11. The semiconductor device according to claim 1, wherein the sealing and insulating layer is thicker than the insulating layer.

12. 12. The semiconductor device according to claim 1, wherein the sealing insulating layer contains one or both of a polyimide resin and an epoxy resin.

13. 13. The semiconductor device according to claim 1, wherein the conductor of the external terminal protrudes above the main sealing surface.

14. 14. The semiconductor device according to claim 1, wherein the conductor of the external terminal has a portion that covers the electrode film outside the opening.

15. 15. The semiconductor device according to claim 1, wherein the conductor of the external terminal includes a conductive bonding layer.

16. the semiconductor chip has a plurality of electrodes including the first electrode on the first surface side; a plurality of the openings penetrate the sealing insulating layer above a plurality of the electrodes; 16. The semiconductor device according to claim 1, wherein a plurality of said external terminals are electrically connected to a plurality of said electrodes within a plurality of said openings.

17. further comprising a substrate having a first major surface on one side and a second major surface on the other side; the insulating layer is formed on the first main surface, 17. The semiconductor device according to claim 1, wherein said sealing insulating layer has a thickness smaller than a thickness of said substrate.

18. The semiconductor device according to claim 17 , wherein the sealing insulating layer includes a sealing side surface formed flush with a side surface of the substrate.

19. the substrate includes a silicon substrate, a silicon carbide substrate, a sapphire substrate, or a nitride semiconductor substrate; 19. The semiconductor device according to claim 17, wherein the insulating layer contains at least one of silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, and aluminum oxynitride.

20. 20. The semiconductor device according to claim 17, wherein the substrate has a thermal conductivity of 100 W / mK or more.

21. 21. The semiconductor device according to claim 17, further comprising a heat dissipation structure provided on the second main surface of the substrate, for dissipating heat generated in the semiconductor chip to the outside.

22. further comprising a second semiconductor chip disposed on the insulating layer and spaced apart from the semiconductor chip; 22. The semiconductor device according to claim 1, wherein the sealing and insulating layer seals the second semiconductor chip on the insulating layer.

23. 23. The semiconductor device according to claim 22, wherein the second semiconductor chip is electrically connected to the semiconductor chip.

24. a second wiring layer formed on the insulating layer at a distance from the wiring layer; the second semiconductor chip having a third electrode on the opposite side to the second wiring layer and a fourth electrode on the second wiring layer side electrically connected to the second wiring layer; an intermediate insulating layer covering a portion of the semiconductor chip and a portion of the second semiconductor chip on the insulating layer; a connection wiring layer routed on the intermediate insulating layer and electrically connected to the first electrode of the semiconductor chip and the fourth electrode of the second semiconductor chip, 24. The semiconductor device according to claim 22, wherein the sealing insulating layer covers the intermediate insulating layer and the connection wiring layer on the insulating layer.

25. 25. The semiconductor device according to claim 22, wherein the second semiconductor chip includes a diode.

26. further including a third semiconductor chip disposed on the insulating layer at a distance from the semiconductor chip and the second semiconductor chip; 26. The semiconductor device according to claim 22, wherein the sealing and insulating layer seals the third semiconductor chip on the insulating layer.

27. 27. The semiconductor device according to claim 26, wherein the third semiconductor chip includes a control circuit that controls the semiconductor chip.

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