Analytical device

Abstract

To optimize both the optical conditions for analysis and observation in an analyzer.SOLUTION: An analysis observation device A comprises: a base 41; a stand 42 extending in a first direction perpendicular to the base 41; a placement table 5 having a placement surface 51a for placing a sample SP; an analysis housing 70 in which a reflection type objective lens 74 for condensing light from the sample SP is accommodated; an observation unit 9a held by the analysis housing 70 and having an objective lens 92 for condensing light from the sample SP; a first guide member 101 connected to the stand 42 and extending in a second direction perpendicular to the first direction; and a second guide member 102 connected to the analysis housing 70 and coupled to the first guide member 101 in a state of being relatively slidable along the second direction. The analysis housing 70 and the observation unit 9a are constituted to integrally move in accordance with a slide of the second guide member 102 to the first guide member 101.SELECTED DRAWING: Figure 18A

Description

[Technical Field]

[0001] The technology disclosed herein relates to an analytical device. [Background technology]

[0002] For example, Patent Document 1 discloses an apparatus for performing component analysis using Laser Induced Breakdown Spectroscopy (LIBS). Specifically, the component measuring apparatus disclosed in Patent Document 1 is configured to perform component analysis of an object to be observed by irradiating an object to be analyzed (a sample) with laser light and receiving and analyzing light (plasma light) generated by the object to be analyzed with a detector.

[0003] Furthermore, the component measuring device according to Patent Document 1 is equipped with an observation optical system (observation optical system) arranged on the optical path from the object to be analyzed (sample) to the detector, and is configured to guide light to the detector through this observation optical system. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2020-101441 Summary of the Invention [Problem to be solved by the invention]

[0005] In order to observe an object to be analyzed in detail or to identify its position in detail, it is preferable to be able to acquire an observation image using an appropriate observation optical system. Therefore, it is conceivable to switch between analysis and observation by switching between the analytical objective lens and the observation objective lens using a revolver or the like.

[0006] However, if the system is configured to switch between two types of objective lenses using a revolver or the like, most of the analytical optical system and the observation optical system are shared and integrated, making it difficult to perform both analysis and observation under optimal optical conditions.

[0007] The technology disclosed herein has been made in view of the above points, and its purpose is to optimize the optical conditions for both analysis and observation in an analytical device. [Means for solving the problem]

[0008] A first aspect of the present disclosure relates to an analytical device for analyzing components of an analyte, the analytical device comprising: a base; a stand connected to the base and extending in a first direction perpendicular to the base; a mounting table supported by the base or the stand and having a mounting surface for mounting the analyte; an analytical housing accommodating a first objective lens that focuses light from the analyte placed on the mounting table; an observation unit held by the analytical housing and having a second objective lens that focuses light from the analyte; a first guide member connected to the stand and extending in a second direction perpendicular to the first direction; and a second guide member connected to the analytical housing and coupled to the first guide member in a state where the first guide member can slide relatively along the second direction.

[0009] According to the first aspect of the present disclosure, the analysis device is configured so that the analysis housing and the observation unit move integrally in accordance with the sliding of the second guide member relative to the first guide member.

[0010] According to the first aspect, the analysis device moves the analysis housing and the observation unit together by sliding the first and second guide members relative to each other. Here, the first objective lens housed in the analysis housing and the second objective lens in the observation unit each constitute an independent optical system, so the optical conditions of each optical system can be adjusted individually. This makes it possible to optimize the optical conditions for both analysis and observation.

[0011] Furthermore, according to a second aspect of the present disclosure, the first guide member may be separate from the stand, and the first guide member may be configured to be detachable from the stand together with the second guide member and the analysis housing.

[0012] According to the second aspect, the first guide member can be attached to and detached from the stand together with the second guide member. Because the second guide member is connected to the analyzing casing, the first guide member can be removed from the stand together with the analyzing casing. This improves usability in attaching and detaching the analyzing casing.

[0013] Furthermore, according to a third aspect of the present disclosure, the first direction may extend along the vertical direction, and the first and second guide members may each be configured so that their dimensions in a third direction perpendicular to the first and second directions are shorter than their dimensions in the first direction.

[0014] According to the third aspect, the first and second guide members are configured such that the first direction is the longitudinal direction and the third direction is the lateral direction. This configuration ensures a large space adjacent to the first and second guide members in the third direction. This allows the layout of the observation unit without increasing the size of the slide mechanism in the sliding direction (second direction). As a result, the amount of movement by the slide mechanism can be reduced.

[0015] Furthermore, by aligning the longitudinal direction with the vertical direction, it is possible to suppress bending deformation of the first and second guide members due to gravity acting on them, which stabilizes the support of the analysis housing and observation unit and ultimately makes it possible to support the optical axes of the objective lenses in each of them without shaking.

[0016] Furthermore, according to a fourth aspect of the present disclosure, the analytical device may include a pair of rail portions provided on one of the first and second guide members, arranged to be spaced apart in the first direction, and each formed to extend along the second direction, and a plurality of support members provided on the other of the first and second guide members, each supporting the rail portions in a slidable manner, and the rail portions and the support members may form a sliding mechanism that slides the second guide member along the second direction relative to the first guide member.

[0017] According to the fourth aspect, the first guide member and the second guide member are connected by a rail portion and a support member that are spaced apart along the first direction. This connection makes it possible to suppress rotation of the second guide member relative to the first guide member around a rotation axis perpendicular to the first direction (a rotation axis along the second or third direction). This suppresses swinging of the second guide member relative to the first guide member. This is particularly effective in a configuration in which a relatively large load acts on the second guide member, such as a configuration in which the second guide member supports both the analysis housing and the observation unit.

[0018] Furthermore, according to a fifth aspect of the present disclosure, the slide mechanism may include a feed nut portion provided on the first guide member and a screw shaft provided on the second guide member and inserted into the feed nut portion, the feed nut portion having a first block that is threadedly engaged with the screw shaft and that moves the screw shaft relatively along the second direction as the screw shaft rotates, a second block that is arranged between the first block and the stand in the second direction and is fixed to the first guide member without contacting the screw shaft, and a detection portion that detects the separation between the first block and the second block, wherein one of the first and second blocks attracts the other by magnetic force, and the slide mechanism is configured to release the magnetic attraction when a force acting in a direction separating the first and second blocks from each other becomes greater than a predetermined value.

[0019] According to the fifth aspect, the first block is fixed to the second guide member via the screw shaft, while the second block is fixed to the first guide member, so that when a force is applied in a direction to separate the first block and the second block, the two can be separated.

[0020] Here, for example, consider a case where a foreign object or the like is caught between the front surface of the stand and the rear surface of the analytical housing when the slide mechanism is operated to bring the analytical housing and the stand closer together. In this case, a force acts on the analytical housing in a direction moving it away from the slide (a direction pushing the analytical housing back against the slide). This force is transmitted to the screw shaft via the second guide member.

[0021] According to the fifth aspect, the force transmitted to the screw shaft as described above is transmitted to the first block threaded onto the screw shaft, but is not transmitted to the second block that is out of contact with the screw shaft. Therefore, by utilizing the difference between whether or not force is transmitted from the screw shaft, it is possible to separate the first block from the second block. The detection unit detects this separation, allowing the analyzer to detect the presence of a foreign object or the like.

[0022] Furthermore, in the first place, when the first block and the second block are configured to be able to be separated, as in the fifth aspect, it is desirable to prevent the screw shaft and the first block from rotating together when no pinch is detected, that is, when an attempt is made to slide the first and second guide members relative to each other using the slide mechanism.

[0023] Therefore, by magnetically attracting the first block and the second block as in the fifth aspect, it becomes possible to fix the first block by the second block. In other words, the fifth aspect is effective in achieving both the realization of sliding movement when no pinch detection is being performed and the detection of pinched foreign objects, etc.

[0024] Furthermore, according to a sixth aspect of the present disclosure, the sliding mechanism may define a movable range of the second guide member so as to slide the second guide member between a first state in which the first objective lens is faced to the measurement field of view on the mounting table, and a second state in which the second objective lens is faced to the measurement field of view on the mounting table.

[0025] According to the sixth aspect, the sliding mechanism can slide the second guide member between a first state suitable for analyzing the analyte and a second state suitable for observing the analyte, which is advantageous in terms of achieving both analysis and observation of the analyte.

[0026] Furthermore, according to a seventh aspect of the present disclosure, when the distance between the stand and the center of the first objective lens in the first state is defined as a first distance, and the distance between the stand and the center of the second objective lens in the second state is defined as a second distance, the sliding mechanism may specify the movable range of the second guide member so that the first distance and the second distance are approximately equal.

[0027] Here, the "center of the first objective lens" refers to the part of the first objective lens through which the central axis (optical axis) of the first objective lens passes. The same applies to the "center of the second objective lens."

[0028] According to the seventh aspect, the movable range of the second guide member is defined so that the first distance and the second distance coincide with each other. This definition allows the relative positions of the first objective lens and the object to be analyzed to be approximately coincident with the relative positions of the second objective lens and the object to be observed. As a result, it becomes possible to perform analysis, such as destructive testing using electromagnetic waves, at approximately the same position as the position observed by the second objective lens. This makes it possible to maintain a eucentric relationship between the two states, which is advantageous for simultaneously analyzing and observing the object to be analyzed.

[0029] Furthermore, according to an eighth aspect of the present disclosure, the placement surface may be configured to be rotatable around a predetermined rotation axis, and the distance between the stand and the rotation axis may be equal to the first distance in the first state and equal to the second distance in the second state.

[0030] According to the eighth aspect, when the mounting surface is rotated around the rotation axis, the relative positions of the first objective lens and the object to be analyzed in the first state and the relative positions of the second objective lens and the object to be analyzed in the second state can be changed in the same way. This makes it possible to maintain a eucentric relationship between the two states even when the mounting surface is rotated, which is advantageous for achieving both analysis and observation of the object to be analyzed.

[0031] Furthermore, according to a ninth aspect of the present disclosure, the optical axis of the first objective lens and the optical axis of the second objective lens may extend parallel to each other while being aligned along the second direction, and the sliding mechanism may specify the movable range of the second guide member so that the movable range is greater than or equal to the distance between the optical axes of the first objective lens and the second objective lens in the second direction.

[0032] According to the ninth aspect, the movable range of the second guide member is defined to be equal to or greater than the distance between the two optical axes, which is advantageous in terms of achieving both analysis and observation of the analysis target.

[0033] Furthermore, according to a tenth aspect of the present disclosure, the rail portion may be provided on the second guide member, and the support member may consist of a pair of members provided on the first guide member and spaced apart along the second direction, and in the first state, the optical axis of the first objective lens may be positioned between the pair of members, while in the second state, the optical axis of the second objective lens may be positioned between the pair of members.

[0034] According to the tenth aspect, the portion of the first guide member where the support member is disposed and the portion of the second guide member where the rail portion is disposed overlap each other. This overlapping portion has higher rigidity than other portions. By arranging the optical axes of the first and second objective lenses in such a highly rigid portion, it is possible to suppress the vibration of each optical axis. This is effective in achieving both analysis and observation of the object to be analyzed.

[0035] Furthermore, according to an eleventh aspect of the present disclosure, the analysis housing may house an electromagnetic wave emitting unit that emits electromagnetic waves for analyzing the object to be analyzed, and a detector that generates an intensity distribution spectrum, which is an intensity distribution for each wavelength of the electromagnetic waves generated in the object to be analyzed, and the first objective lens may collect the electromagnetic waves emitted by the electromagnetic wave emitting unit and irradiate the object to be analyzed, and also collect the electromagnetic waves generated in the object to be analyzed and guide them to the detector.

[0036] According to the eleventh aspect, the first objective lens is configured to coaxially irradiate the analyte with electromagnetic waves and collect the electromagnetic waves from the analyte, thereby providing two functions. This contributes to the integration of the analytical optical system and, in turn, to the compactness of the analytical housing. The compactness of the analytical housing is effective in ensuring installation space for the observation housing, and contributes to the compatibility of analysis and observation of the analyte.

[0037] Furthermore, according to a twelfth aspect of the present disclosure, a protective cover that shields the first objective lens may be connected to the first guide member, and the protective cover may move in accordance with the relative sliding movement of the first and second guide members to expose the first objective lens when light is focused by the first objective lens, and to shield the first objective lens when light is focused by the second objective lens.

[0038] Electromagnetic waves emitted from an electromagnetic wave emitting unit, such as laser light for component analysis, pass through the first objective lens. Therefore, when the electromagnetic waves are focused by the first objective lens, that is, when electromagnetic waves coaxial with the focused electromagnetic waves are emitted from the first objective lens, the first objective lens is shielded by a protective cover. This makes it possible to suppress leakage of electromagnetic waves, etc. Furthermore, the eleventh aspect is particularly effective when a reflective objective lens is used as the first objective lens, since it can suppress the intrusion of dust, etc. from the outside.

[0039] Furthermore, according to a thirteenth aspect of the present disclosure, the first objective lens has an optical axis extending perpendicular to the second direction, the analysis housing is divided into a first region arranged on one side of a fourth direction perpendicular to the optical axis and the second direction, a second region arranged on the other side of the fourth direction, and a third region arranged between the first and second regions in the fourth direction, the first region being provided with a protruding portion that protrudes along the second direction and accommodates the second guide member, the second region accommodating the detector, and the third region accommodating a camera that images the object to be analyzed via the first objective lens, and the observation unit may be arranged adjacent to the protruding portion along the fourth direction.

[0040] According to the thirteenth aspect, the analyzing housing has an asymmetric shape in the fourth direction. Here, by accommodating the first and second guide members in a protrusion provided in the first region and arranging the protrusion and the observation unit side by side in the fourth direction, the dimensions of the device in the second direction can be reduced compared to a configuration in which both elements are arranged along the second direction, for example. This reduces the amount of movement between the first and second guide members, which is advantageous for making the device more compact.

[0041] Furthermore, by reducing the dimensions of the device in the second direction, it is possible to move the center of gravity of the entire analysis housing and observation unit closer to the stand in the second direction. This stabilizes the support of the analysis housing and observation unit, and ultimately reduces the shaking of the optical axes of the first and second objective lenses. This is effective in achieving both analysis and observation of the object being analyzed.

[0042] Furthermore, by accommodating the detector in the second region, the dimension of the third region in the second direction can be reduced, and more space can be secured for placing the observation unit near the third region. This is advantageous for bringing the first and second guide members and the observation unit closer together in the fourth direction. Bringing these elements closer together in the fourth direction stabilizes the support of the observation unit by the first and second guide members, and ultimately makes it possible to suppress fluctuations in the optical axis of the second objective lens. This is effective for observing the object to be analyzed.

[0043] Furthermore, according to the thirteenth aspect, the analytical housing and the observation unit are supported in a cantilevered state by the first and second guide members arranged in the first region. This makes it possible to secure a large space around the second region located on the opposite side of the first region in the fourth direction, and this space can be used as a work space (a space for the user to perform manual work) for attaching and detaching the observation unit, etc. This improves the usability of the analytical device.

[0044] Furthermore, according to a fourteenth aspect of the present disclosure, the protrusion and the observation unit may be positioned so as to be farther away from the stand in the second direction than the first objective lens, and the electromagnetic wave emitting portion may be positioned between the first objective lens and the stand in the second direction.

[0045] According to the fourteenth aspect, the stand, the electromagnetic wave emitter, the first objective lens, and the observation unit are arranged in this order from one side in the second direction. By bringing the electromagnetic wave emitter closer to the stand in the second direction, the center of gravity of the analytical housing and the entire contents contained therein is brought closer to the stand. This stabilizes support of the analytical housing by the stand (more specifically, support via the first guide member), and ultimately makes it possible to suppress fluctuations in the optical axis of the first objective lens. This is effective in analyzing the object to be analyzed.

[0046] Furthermore, according to the fourteenth aspect, the stand and the electromagnetic wave emitting unit are spaced apart as the first and second guide members move relative to each other, which allows for more effective heat dissipation from the electromagnetic wave emitting unit than, for example, a configuration in which the electromagnetic wave emitting unit is disposed between the first objective lens and the observation unit in the second direction.

[0047] Furthermore, according to a fifteenth aspect of the present disclosure, the analysis device may include an observation housing that houses the second objective lens and a camera that captures an image of the object to be analyzed by detecting the amount of light received from the object to be analyzed through the second objective lens, and the observation housing may be arranged outside the analysis housing.

[0048] According to the fifteenth aspect, the observation housing is disposed in the external space of the analysis housing, which makes it easy to attach and detach the observation housing, thereby improving the usability of the analysis device.

[0049] Furthermore, according to a sixteenth aspect of the present disclosure, the observation housing may be held in the analysis housing via a housing connector separate from the observation housing, a fixing portion formed integrally with the second guide member may be disposed on the upper or lower surface of the second guide member, and the housing connector may be supported by the second guide member via the fixing portion.

[0050] According to the sixteenth aspect, the observation housing is supported by the second guide member. By configuring the observation housing to be supported directly by the second guide member rather than by the analysis housing, it is possible to stabilize the support of the observation unit by the second guide member and thereby suppress fluctuations in the optical axis of the second objective lens. This is effective in observing the object to be analyzed. [Effects of the Invention]

[0051] As described above, according to the present disclosure, it is possible to optimize both the optical conditions for analysis and observation in an analytical device. [Brief explanation of the drawings]

[0052] [Figure 1] FIG. 1 is a schematic diagram illustrating the overall configuration of an analytical observation device. [Figure 2] FIG. 2 is a perspective view illustrating an optical system assembly. [Figure 3] FIG. 3 is a side view illustrating an optical system assembly. [Figure 4] FIG. 4 is a front view illustrating an optical system assembly. [Figure 5] FIG. 5 is an exploded perspective view illustrating an optical system assembly. [Figure 6] FIG. 6 is a side view showing a schematic configuration of the optical system assembly. [Figure 7] FIG. 7 is a schematic diagram illustrating the configuration of the analytical optical system. [Figure 8] FIG. 8 is a perspective view illustrating the head unit as viewed from the front side. [Figure 9] FIG. 9 is a perspective view illustrating the head unit as viewed from the rear side. [Figure 10] FIG. 10 is a perspective view illustrating the first and second guide members as viewed from the left side. [Figure 11] FIG. 11 is a perspective view illustrating the first and second guide members as viewed from the right side. [Figure 12]FIG. 12 is a perspective view illustrating a state in which the second guide member is slid from the state shown in FIG. [Figure 13] FIG. 13 is a perspective view illustrating the first guide member as viewed from the right side. [Figure 14] FIG. 14 is a perspective view illustrating the second guide member as viewed from the left side. [Figure 15] FIG. 15 is a cross-sectional view illustrating an example of a connecting structure of the first and second guide members. [Figure 16] FIG. 16 is a side view illustrating the first and second guide members as viewed from the left side. [Figure 17A] FIG. 17A is a diagram for explaining the lead screw mechanism in the first mode. [Figure 17B] FIG. 17B is a diagram for explaining the lead screw mechanism in the second mode. [Figure 17C] FIG. 17C is a diagram for explaining the state of the feed screw mechanism during the transition from the first mode to the second mode. [Figure 18A] FIG. 18A is a diagram showing the internal structure of the analyzing housing in the first mode. [Figure 18B] FIG. 18B is a diagram showing the internal structure of the analyzing housing in the second mode. [Figure 19A] FIG. 19A is a perspective view illustrating a connection structure between the second guide member and the analyzing housing. [Figure 19B] FIG. 19B is a perspective view illustrating a connection structure between the second guide member and the analyzing housing. [Figure 20] FIG. 20 is a perspective view illustrating the configuration of the housing connector. [Figure 21] FIG. 21 is a cross-sectional view illustrating the internal structure of the housing connector. [Figure 22] FIG. 22 is a diagram for explaining attachment and detachment of the observation unit. [Figure 23A] FIG. 23A is a diagram for explaining horizontal movement of the head portion. [Figure 23B]FIG. 23B is a diagram for explaining the horizontal movement of the head portion. [Figure 24A] FIG. 24A is a diagram for explaining the operation of the tilt mechanism. [Figure 24B] FIG. 24B is a diagram for explaining the operation of the tilt mechanism. [Figure 25] FIG. 25 is a block diagram illustrating the configuration of the controller main body. [Figure 26] FIG. 26 is a block diagram illustrating the configuration of the control unit. [Figure 27] FIG. 27 is a flowchart illustrating the basic operation of the analytical observation device. [Figure 28] FIG. 28 is a flowchart illustrating a procedure for analyzing a sample using the analytical optical system. [Figure 29] FIG. 29 is a perspective view illustrating an observation assembly of the analytical observation device. [Figure 30] FIG. 30 is a perspective view for explaining the third mounting structure. [Figure 31] FIG. 31 is a plan view showing a comparison between the optical system assembly and the observation assembly of the analytical observation device. [Figure 32] FIG. 32 is a view corresponding to FIG. 4, illustrating a state in which a swing-type observation unit is attached. DETAILED DESCRIPTION OF THE INVENTION

[0053] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. Note that the following description is for illustrative purposes only.

[0054] <Overall configuration of analytical observation device A> Fig. 1 is a schematic diagram illustrating the overall configuration of an analytical observation device A as an analytical device according to an embodiment of the present disclosure. The analytical observation device A illustrated in Fig. 1 performs magnified observation of a sample SP as an observation target and an analysis target, and can also perform component analysis of the sample SP.

[0055] In detail, the analytical observation device A according to this embodiment magnifies and images a sample SP made up of, for example, a specimen such as a minute object, an electronic component, a workpiece, etc., and is thereby able to search for a portion of the sample SP where component analysis is to be performed, and to inspect and measure its appearance, etc. When focusing on its observation function, the analytical observation device A can be called a magnification observation device, or simply a microscope, or a digital microscope.

[0056] The analytical observation device A can also perform techniques called laser induced breakdown spectroscopy (LIBS), laser induced plasma spectroscopy (LIPS), etc., when analyzing the components of the sample SP. When focusing on its analytical function, the analytical observation device A can also be called a component analysis device, simply an analysis device, or a spectroscopic device.

[0057] As shown in FIG. 1, the analytical observation device A according to this embodiment comprises, as main components, an optical system assembly (optical system main body) 1, a controller main body 2, and an operation unit 3.

[0058] Of these, the optical system assembly 1 is capable of capturing and analyzing the sample SP, and outputting electrical signals corresponding to the capturing and analysis results to the outside.

[0059] The controller main body 2 has a control unit 21 for controlling various components that make up the optical system assembly 1, such as the first camera 81. The controller main body 2 can cause the optical system assembly 1 to observe and analyze the sample SP via the control unit 21. The controller main body 2 also has a display unit 22 that can display various information. This display unit 22 can display images captured by the optical system assembly 1, data showing the analysis results of the sample SP, and the like.

[0060] The operation unit 3 has a mouse 31 that accepts operation inputs from the user, a console 32, and a keyboard 33 (the keyboard 33 is only shown in FIG. 25). By operating buttons, adjustment knobs, etc. on the console 32, it is possible to instruct the controller main body 2 to import image data, adjust brightness, focus the first camera 81, etc.

[0061] The operation unit 3 does not need to have all three of the mouse 31, the console 32, and the keyboard 33, and may have any one or two of them. Furthermore, a touch panel input device, a voice input device, or the like may be used in addition to or instead of the mouse 31, the console 32, and the keyboard 33. In the case of a touch panel input device, it can be configured to be able to detect any position on the screen displayed on the display unit 22.

[0062] <Details of Optical Assembly 1> 2 to 4 are respectively a perspective view, a side view, and a front view illustrating the optical system assembly 1. In addition, Fig. 5 is an exploded perspective view of the optical system assembly 1, and Fig. 6 is a side view showing a schematic configuration of the optical system assembly 1.

[0063] As shown in FIGS. 1 to 6, the optical system assembly 1 includes a stage 4 that supports various devices and on which a sample SP is placed, and a head unit 6 that is attached to the stage 4. Here, the head unit 6 is configured by attaching an observation housing 90 that houses an observation optical system 9 to an analysis housing 70 that houses an analysis optical system 7. Here, the analysis optical system 7 is an optical system for analyzing the components of the sample SP. The observation optical system 9 is an optical system for performing magnified observation of the sample SP. The head unit 6 is configured as a group of devices that combine the functions of analyzing the sample SP and magnified observation.

[0064] In the following description, the front-rear direction and left-right direction of the optical system assembly 1 are defined as shown in Figures 1 to 4. That is, the side facing the user is the front side of the optical system assembly 1, and the opposite side is the rear side of the optical system assembly 1. When a user faces the optical system assembly 1, the right side as seen from the user is the right side of the optical system assembly 1, and the left side as seen from the user is the left side of the optical system assembly 1. The definitions of the front-rear direction and left-right direction are intended to facilitate understanding of the description and do not limit the actual state of use. Either direction may be used as the front.

[0065] In the following description, the left-right direction of the optical system assembly 1 is defined as the "X direction," the front-rear direction of the optical system assembly 1 as the "Y direction," the up-down direction of the optical system assembly 1 as the "Z direction," and the direction of rotation around an axis parallel to the Z axis as the "φ direction." The X and Y directions are perpendicular to each other on the same horizontal plane, and the direction along this horizontal plane is defined as the "horizontal direction." The Z axis is the direction of a normal perpendicular to the horizontal plane. These definitions can also be changed as appropriate. The Z direction (up-down direction) is a direction extending along the vertical direction and is an example of the "first direction" in this embodiment. The Y direction (front-rear direction) is an example of the "second direction," and the X direction (left-right direction) is an example of the "third direction."

[0066] As will be described in detail later, the head unit 6 can move along and swing around a central axis Ac shown in Figures 2 to 6. As shown in Figure 6 and other figures, the central axis Ac is configured to extend in the horizontal direction, particularly in the front-to-rear direction.

[0067] (Stage 4) The stage 4 has a base 41 that is placed on a workbench or the like, a stand 42 connected to the base 41, and a mounting table 5 that is supported by the base 41 or the stand 42. The stage 4 is a member that determines the relative positional relationship between the mounting table 5 and the head unit 6, and is configured so that at least the observation optical system 9 and the analysis optical system 7 of the head unit 6 can be attached.

[0068] The base 41 constitutes approximately the lower half of the stage 4, and is formed in the shape of a pedestal whose front-to-rear dimension is longer than its left-to-right dimension, as shown in Fig. 2. The base 41 has a bottom surface that is placed on a workbench or the like. A mounting table 5 is attached to the front portion of the base 41.

[0069] 6 and other figures, a first support portion 41a and a second support portion 41b are provided in a rear portion of the base 41 (particularly, a portion located rearward of the mounting table 5) in a state where they are lined up in order from the front side. The first and second support portions 41a, 41b are both provided so as to protrude upward from the base 41. A circular bearing hole (not shown) is formed in the first and second support portions 41a, 41b and is arranged so as to be concentric with the central axis Ac.

[0070] The stand 42 constitutes the upper half of the stage 4, and is formed in a columnar shape extending vertically perpendicular to the base 41 (particularly the bottom surface of the base 41) as shown in Figures 2, 3, 6, etc. The head unit 6 is attached to the front surface of the upper part of the stand 42 via a separate mounting fixture 43.

[0071] 6 and other figures, a first mounting portion 42a and a second mounting portion 42b are provided on the lower portion of the stand 42, lined up in order from the front. The first and second mounting portions 42a, 42b are configured to correspond to the first and second support portions 41a, 41b described above. Specifically, the first and second support portions 41a, 41b and the first and second mounting portions 42a, 42b are laid out so that the first support portion 41a is sandwiched between the first mounting portion 42a and the second mounting portion 42b, and the second mounting portion 42b is sandwiched between the first support portion 41a and the second support portion 41b.

[0072] Additionally, the first and second mounting portions 42a and 42b are formed with circular bearing holes (not shown) that are concentric and have the same diameter as the bearing holes formed in the first and second support portions 41a and 41b. A shaft member 44 is inserted into these bearing holes via bearings (not shown), such as cross roller bearings. The shaft member 44 is positioned so that its axis is concentric with the aforementioned central axis Ac. By inserting the shaft member 44, the base 41 and the stand 42 are connected so as to be able to swing relative to each other. The shaft member 44, together with the first and second support portions 41a and 41b and the first and second mounting portions 42a and 42b, constitute a tilting mechanism 45 in this embodiment.

[0073] By connecting the base 41 and the stand 42 via the tilting mechanism 45, the stand 42 is supported by the base 41 in a state in which it can swing about the central axis Ac. By swinging the stand 42 about the central axis Ac, it tilts left and right with respect to a predetermined reference axis As (see FIGS. 24A and 24B). This reference axis As can be an axis extending perpendicular to the upper surface (mounting surface 51a) of the mounting table 5 in the non-tilted state shown in FIG. 4 and the like. In particular, the reference axis As according to this embodiment can be set to coincide with the rotation axis of the mounting table 5, as described below. Furthermore, the central axis Ac functions as the central axis (rotation center) of the swing caused by the tilting mechanism 45.

[0074] Specifically, the tilting mechanism 45 according to this embodiment can tilt the stand 42 approximately 90° to the right with respect to the reference axis As, or approximately 60° to the left with respect to the reference axis As. As described above, the head unit 6 is attached to the stand 42, and therefore the head unit 6 can also be tilted left and right with respect to the reference axis As. Tilting the head unit 6 is equivalent to tilting the analysis optical system 7 and the observation optical system 9, and ultimately tilting the analysis optical axis Aa and observation optical axis Ao, which will be described later.

[0075] As shown in FIGS. 24A and 24B (described later), if the angle of the analysis optical axis Aa with respect to the reference axis As is referred to as the "tilt θ," the tilt θ can be adjusted within a range below a predetermined first threshold θmax. To keep the tilt θ below the first threshold θmax, a hardware constraint can be imposed on the tilt mechanism 45. For example, the operating range of the tilt mechanism 45 may be physically limited by providing a brake mechanism (not shown) in the tilt mechanism 45. Specific settings of the first threshold θmax will be described later.

[0076] The mounting fixture 43 has a rail portion 43a that guides the head portion 6 along the longitudinal direction of the stand 42, and a lock lever 43b that locks the relative position of the head portion 6 with respect to the rail portion 43a. Here, the longitudinal direction of the stand 42 coincides with the vertical direction (first direction) in the non-tilted state, and coincides with the direction extending along the analysis optical axis Aa, the observation optical axis Ao, and the reference axis As. In the tilted state, the longitudinal direction of the stand 42 does not coincide with the vertical direction and the direction extending along the reference axis As, but still coincides with the direction extending along the analysis optical axis Aa and the observation optical axis Ao. The longitudinal direction of the stand 42 will also be referred to as the "approximately vertical direction" in the following description.

[0077] The rear surface of the head unit 6 (specifically, the head mounting member 61) is inserted into the rail portion 43a. The rail portion 43a allows the rear surface of the head unit 6 to move substantially vertically. Then, with the head unit 6 set at a desired position, the head unit 6 can be fixed at the desired position by operating the lock lever 43b. The position of the head unit 6 can also be adjusted by operating the first operating dial 46 shown in FIGS. 2 and 3.

[0078] Furthermore, the stage 4 or the head unit 6 has a built-in head driver 47 for moving the head unit 6 in a substantially vertical direction. The head driver 47 includes an actuator (e.g., a stepping motor) (not shown) controlled by the controller main body 2, and a motion conversion mechanism that converts rotation of the output shaft of the stepping motor into linear motion in a substantially vertical direction, and moves the head unit 6 based on drive pulses input from the controller main body 2. By moving the head unit 6 with the head driver 47, the head unit 6, and therefore the analysis optical axis Aa and the observation optical axis Ao, can be moved substantially vertically.

[0079] The mounting table 5 is disposed forward of the center of the base 41 in the front-rear direction, and is attached to the upper surface of the base 41. The mounting table 5 is configured as an electrically operated mounting table, and can move the sample SP placed on its mounting surface 51a in the horizontal direction, raise and lower it in the up-down direction, and rotate it in the φ direction.

[0080] Specifically, as shown in Figures 2 to 4, the mounting table 5 of this embodiment has a mounting table main body 51 having a mounting surface 51a for placing a sample SP, a mounting table support part 52 arranged between the base 41 and the mounting table main body 51 and displacing the mounting table main body 51, and a mounting table drive part 53 shown in Figure 25 described later.

[0081] The mounting table main body 51 is configured as a so-called XY stage. The upper surface of the mounting table main body 51 configures a mounting surface 51a on which the sample SP is placed. This mounting surface 51a is formed to extend substantially horizontally. The sample SP is placed on the mounting surface 51a in an open-to-air state, i.e., without being contained in a vacuum chamber or the like.

[0082] The mounting table support part 52 is a member that connects the base 41 and the mounting table main body 51, and is formed in a generally cylindrical shape that extends in the vertical direction. The mounting table support part 52 can accommodate a mounting table drive part 53.

[0083] The mounting table driving unit 53 includes a plurality of actuators (for example, stepping motors) (not shown) controlled by the controller main body 2, and a motion conversion mechanism that converts the rotation of the output shaft of the stepping motor into linear motion, and moves the mounting table main body 51 based on drive pulses input from the controller main body 2. By the mounting table driving unit 53 moving the mounting table main body 51, the mounting table main body 51, and therefore the sample SP placed on the mounting surface 51a, can be moved in the horizontal and vertical directions.

[0084] Similarly, the mounting table driving unit 53 can rotate the mounting table main body 51 in the φ direction around a predetermined rotation axis based on a driving pulse input from the controller main body 2. By rotating the mounting table main body 51 with the mounting table driving unit 53, the sample SP placed on the mounting surface 51a can also be rotated in the φ direction. Note that the configuration including the mounting table driving unit 53 is not essential. The mounting table main body 51 may also be configured to be rotated manually.

[0085] In particular, the mounting surface 51a according to this embodiment is configured to be rotatable around a reference axis As shown in Fig. 6 and other figures, which serves as the rotation axis. That is, in this embodiment, the reference axis As, which serves as a guide for the magnitude of the tilt θ (a reference for the tilt θ), and the rotation axis of the mounting surface 51a are coaxial. In order to maintain a good eucentric relationship, as will be described later, it is advantageous to configure the rotation axis (reference axis As) to perpendicularly intersect with the central axis Ac.

[0086] Moreover, the stage main body 51 can be manually moved and rotated by operating the second operation dial 54, etc., as shown in Fig. 2. Details of the second operation dial 54 will be omitted.

[0087] Returning to the explanation of the base 41 and the stand 42, the base 41 described above has a first tilt sensor Sw2 built in. This first tilt sensor Sw2 can detect the tilt of a reference axis As perpendicular to the mounting surface 51a with respect to the direction of gravity. Meanwhile, a second tilt sensor Sw3 is attached to the stand 42. This second tilt sensor Sw3 can detect the tilt of the analysis optical system 7 with respect to the direction of gravity (more specifically, the tilt of the analysis optical axis Aa with respect to the direction of gravity). The detection signals of the first tilt sensor Sw2 and the second tilt sensor Sw3 are both input to the control unit 21.

[0088] (Head part 6) The head unit 6 has an analytical optical system 7 housed in an analytical housing 70, an observation optical system 9 housed in an observation housing 90, a head mounting member 61, a housing connector 64, and a slide mechanism (horizontal drive mechanism) 65. Of these, the head mounting member 61 is a member for connecting the analytical housing 70 to the stand 42. The housing connector 64 is a member for connecting the observation housing 90 to the analytical housing 70. The slide mechanism 65 is a mechanism for sliding the analytical housing 70 relative to the stand 42.

[0089] The configurations of the analytical optical system 7 and the analytical housing 70, the observation optical system 9 and the observation housing 90, the head mounting member 61, the housing connector 64, and the slide mechanism 65 will be described in order below.

[0090] -Analysis optical system 7- FIG. 7 is a schematic diagram illustrating the configuration of the analytical optical system 7. The analytical optical system 7 is a collection of components for analyzing a sample SP as an analysis target, and each component is accommodated in an analytical housing 70. The components that make up the analytical optical system 7 include a first objective lens that focuses light from the sample SP. The analytical housing 70 is configured to accommodate at least the first objective lens. In this embodiment, this first objective lens is exemplified by a reflective objective lens 74, which will be described later.

[0091] The analytical optical system 7 can perform analysis using, for example, the LIBS method. A communication cable C1 is connected to this analytical optical system 7 for sending and receiving electrical signals between the analytical optical system 7 and the controller main body 2. This communication cable C1 is not essential, and the analytical optical system 7 and the controller main body 2 may be connected via wireless communication.

[0092] The term "optical system" is used in a broad sense. That is, the analytical optical system 7 is defined as a system that includes not only optical elements such as lenses, but also a light source, an image sensor, etc. The same applies to the observation optical system 9.

[0093] As shown in FIG. 7 , the analytical optical system 7 according to this embodiment includes an electromagnetic wave emitter 71, an output adjustment unit 72, a notch filter 73, a reflective objective lens 74, a dichroic mirror 75, a first parabolic mirror 76A, a first detector 77A, a first beam splitter 78A, a second parabolic mirror 76B, a second detector 77B, a second beam splitter 78B, an LED light source 79, an imaging lens 80, a first camera 81, and an optical element 82. The reflective objective lens 74 is an example of the "first objective lens" in this embodiment. The first detector 77A and the second detector 77B are examples of the "detectors" in this embodiment. Some of the components of the analytical optical system 7 are also shown in FIG. 6 .

[0094] The electromagnetic wave emitting section 71 emits electromagnetic waves for analyzing the sample SP. In particular, the electromagnetic wave emitting section 71 according to this embodiment is configured by a laser light source that emits laser light as electromagnetic waves.

[0095] Although detailed illustration is omitted, the electromagnetic wave emitting unit 71 according to this embodiment has an excitation light source constituted by a laser diode (LD) or the like, a focusing lens that focuses the laser output from the excitation light source and emits it as laser excitation light, a laser medium that generates a fundamental wave based on the laser excitation light, a Q switch that pulses the fundamental wave, a rear mirror and output mirror that amplify the fundamental wave, and a wavelength conversion element that converts the wavelength of the laser light output from the output mirror.

[0096] Here, it is preferable to use, for example, a rod-shaped Nd:YAG as the laser medium in order to obtain high energy per pulse. In this embodiment, the wavelength (so-called fundamental wavelength) of photons emitted from the laser medium by stimulated emission is set to 1064 nm in the infrared region.

[0097] Furthermore, instead of a so-called active Q-switch whose attenuation rate can be controlled externally, a passive Q-switch whose transmittance increases when the intensity of the fundamental wave exceeds a predetermined threshold can be used as the Q-switch. A passive Q-switch is made of a saturable absorber such as Cr:YAG. By using a passive Q-switch, it becomes possible to automatically generate pulses when a predetermined amount of energy or more is accumulated in the laser medium.

[0098] The wavelength conversion element is configured using two nonlinear optical crystals such as LBO (LiBO). By using two crystals, a third harmonic wave can be generated from the fundamental wave. In this embodiment, the wavelength of the third harmonic wave is set to 355 nm in the ultraviolet range.

[0099] That is, the electromagnetic wave emitting unit 71 according to this embodiment can output laser light consisting of ultraviolet light as electromagnetic waves. This allows analysis by the LIBS method to be performed on optically transparent samples SP such as glass. In addition, the proportion of laser light in the ultraviolet range that reaches the human retina is very small. By configuring the laser light so that it does not form an image on the retina, the safety of the device can be improved.

[0100] The output adjustment means 72 is disposed on the optical path connecting the electromagnetic wave emitting unit 71 and the notch filter 73, and is capable of adjusting the output of the electromagnetic wave (laser light). Specifically, the output adjustment means 72 according to this embodiment includes a half-wave plate 72a and a polarizing beam splitter 72b. The half-wave plate 72a is configured to rotate relative to the polarizing beam splitter 72b, and by controlling the angle of rotation, the amount of light passing through the polarizing beam splitter 72b can be adjusted.

[0101] The notch filter 73 is laid out so as to reflect the laser light output from the electromagnetic wave output unit 71 and passed through the output adjustment means 72, and guide this to the sample SP via the reflective objective lens 74, while transmitting light returning from the sample SP in response to this laser light (light emitted as plasma is generated on the surface of the sample SP), and guide this to the first detector 77A, the second detector 77B, and the first camera 81. The notch filter 73 according to this embodiment is configured to reflect only light belonging to the 355 nm wavelength band, and transmit the remaining light.

[0102] The reflective objective lens 74 irradiates the sample SP with the electromagnetic wave (laser light) emitted by the electromagnetic wave emitter 71, and collects and guides the electromagnetic wave (light) generated in the sample SP to the first and second detectors 77A and 77B. Specifically, the reflective objective lens 74 according to this embodiment has an analysis optical axis Aa extending substantially along the vertical direction. The analysis optical axis Aa collects and irradiates the electromagnetic wave emitted from the electromagnetic wave emitter 71 onto the sample SP, and collects light returning from the sample SP in response to the electromagnetic wave (laser light) irradiated onto the sample SP (light emitted as plasma is generated on the surface of the sample SP). The analysis optical axis Aa is arranged parallel to the observation optical axis Ao of the objective lens (second objective lens) 92 of the observation optical system 9. The analysis optical axis Aa extends perpendicular to at least the vertical direction (first direction), the front-rear direction (second direction), and the left-right direction (third direction).

[0103] The reflective objective lens 74 is configured to coaxially connect an optical system related to light reception by the first camera 81, an optical system related to the laser light output from the electromagnetic wave output unit 71 and irradiated onto the sample SP, and an optical system related to the light returning from the sample SP to the first and second detectors 77A and 77B. In other words, the reflective objective lens 74 is shared by three types of optical systems.

[0104] Specifically, the reflective objective lens 74 of this embodiment is a Schwarzschild type objective lens consisting of two mirrors, and incorporates a primary mirror 74a that is circular and has a relatively large diameter, and a secondary mirror 74b that is disk-shaped and has a relatively small diameter.

[0105] The primary mirror 74a allows the laser light to pass through an opening provided in its center, while reflecting light returning from the sample SP (electromagnetic waves emitted from electrons when returning from a plasma state to a gaseous state, etc.) using mirror surfaces provided around the periphery. The latter reflected light is reflected again by the mirror surface of the secondary mirror 74b and passes through the opening of the primary mirror 74a while being coaxial with the laser light.

[0106] The secondary mirror 74b is configured to transmit the laser light while reflecting the light reflected by the primary mirror 74a in a condensed state. The former laser light is irradiated onto the sample SP, while the latter reflected light passes through the opening of the primary mirror 74a as described above and reaches the notch filter 73. The reflected light that reaches the notch filter 73 passes through the notch filter 73 and reaches the dichroic mirror 75.

[0107] When laser light is input to the reflective objective lens 74, the laser light passes through a secondary mirror 74b located in the center of the reflective objective lens 74 and reaches the surface of the sample SP. The laser light locally converts the sample SP into plasma, emitting light that passes through an opening provided around the secondary mirror 74b and reaches the primary mirror 74a. The light that reaches the primary mirror 74a is reflected by its mirror surface to reach the secondary mirror 74b, and is then reflected by the secondary mirror 74b and returns from the reflective objective lens 74 to the notch filter 73.

[0108] The dichroic mirror 75 guides a portion of the light returning from the sample SP to the first detector 77A, while directing the other portion to the second detector 77B, etc. Specifically, the light returning from the sample SP contains various wavelength components in addition to the wavelength of the laser light. Therefore, the dichroic mirror 75 according to this embodiment reflects light in a short wavelength band among the light returning from the sample SP and directs it to the first detector 77A. The dichroic mirror 75 also transmits light in other bands and directs it to the second detector 77B.

[0109] The first parabolic mirror 76A is configured as a so-called parabolic mirror, and is disposed between the dichroic mirror 75 and the first detector 77A. The first parabolic mirror 76A collects the light reflected by the dichroic mirror 75, and causes the collected light to be incident on the first detector 77A.

[0110] The first detector 77A generates an intensity distribution spectrum, which is the intensity distribution for each wavelength of light generated in the sample SP and collected by the reflective objective lens 74 (light returning from the sample SP). This first detector 77A separates the light by reflecting the light at different angles for each wavelength and causes each of the separated light beams to enter an imaging element having multiple pixels. This allows the wavelength of light received by each pixel to differ and the received light intensity for each wavelength to be obtained. For example, a detector based on a Czerny-Turner type detector can be used as the first detector 77A. The entrance slit of the first detector 77A is aligned with the focal position of the first parabolic mirror 76A. The intensity distribution spectrum generated by the first detector 77A is input to the control unit 21 of the controller main body 2.

[0111] The first beam splitter 78A reflects a portion of the light transmitted through the dichroic mirror 75 and directs it to the second detector 77B, while transmitting the other portion and directing it to the second beam splitter 78B.

[0112] The second parabolic mirror 76B is configured as a parabolic mirror like the first parabolic mirror 76A, and is disposed between the first beam splitter 78A and the second detector 77B. The second parabolic mirror 76B collects the light reflected by the first beam splitter 78A and causes the collected light to be incident on the second detector 77B.

[0113] Similar to the first detector 77A, the second detector 77B generates an intensity distribution spectrum, which is the intensity distribution for each wavelength of light generated in the sample SP and collected by the reflective objective lens 74 (light returning from the sample SP). The second detector 77B may be, for example, a detector based on a Czerny-Turner type. The entrance slit of the second detector 77B is aligned with the focal position of the second parabolic mirror 76B. The intensity distribution spectrum generated by the second detector 77B is input to the control unit 21 shown in FIG. 1, etc., similar to the first detector 77A.

[0114] The second beam splitter 78B transmits at least a portion of the light that has passed through the first beam splitter 78A, and causes the light to enter the first camera 81 via the imaging lens 80. The second beam splitter 78B also reflects the illumination light that has been emitted from the LED light source 79 and passed through the optical element 82, and directs this light to the sample SP via the first beam splitter 78A, the dichroic mirror 75, the notch filter 73, and the reflective objective lens 74.

[0115] The illumination light emitted from the LED light source 79 is coaxial with the laser light output from the electromagnetic wave emitting unit 71 and irradiated onto the sample SP, and functions as so-called "coaxial epi-illumination." Although the LED light source 79 is built into the analysis housing 70 in the example shown in FIG. 7, the present disclosure is not limited to such a configuration. For example, a light source may be laid out outside the analysis housing 70, and the light source may be connected to the analysis optical system 7 via an optical fiber cable.

[0116] The first camera 81 captures an image of the sample SP by detecting the amount of light received from the sample SP through the reflective objective lens 74. Specifically, the first camera 81 according to this embodiment photoelectrically converts the light incident through the imaging lens 80 using a plurality of pixels arranged on its light receiving surface, and converts it into an electrical signal corresponding to an optical image of the subject (sample SP).

[0117] The first camera 81 may have a plurality of light receiving elements arranged along the light receiving surface. In this case, each light receiving element corresponds to a pixel, and an electrical signal can be generated based on the amount of light received by each light receiving element. Specifically, the first camera 81 according to this embodiment is configured with an image sensor made of a CMOS (Complementary Metal Oxide Semiconductor), but is not limited to this configuration. The first camera 81 may also be configured with an image sensor made of, for example, a CCD (Charged-Coupled Device).

[0118] The first camera 81 then generates image data corresponding to the optical image of the subject based on the electrical signals generated by detecting the amount of light received by each light receiving element, and inputs the image data to the controller main body 2.

[0119] The light returning from the sample SP is split and incident on the first detector 77A, the second detector 77B, and the first camera 81. Therefore, the amount of light received by the first camera 81 is smaller than that of the second camera 93 described below.

[0120] -Basic principles of analysis using analytical optical systems 7- The control unit 21 performs a component analysis of the sample SP based on the intensity distribution spectra input from the first detector 77A and the second detector 77B. As a specific analysis method, the LIBS method can be used, as described above. The LIBS method is a method for analyzing components contained in the sample SP at the elemental level (so-called elemental analysis method).

[0121] Generally, when high energy is applied to a substance, electrons are separated from the atomic nucleus, and the substance enters a plasma state. The electrons that are separated from the atomic nucleus temporarily enter a high-energy and unstable state, but by losing energy from that state, they are captured by the atomic nucleus again and transition to a low-energy and stable state (in other words, they return from a plasma state to a non-plasma state).

[0122] Here, the energy lost from the electrons is emitted as electromagnetic waves, but the magnitude of the energy of these waves is determined by the energy levels based on the shell structure specific to each element. In other words, the energy of the electromagnetic waves emitted when electrons return from plasma to a non-plasma state has a value specific to each element (or more precisely, the orbit of the electron bound to the atomic nucleus). The magnitude of the energy of the electromagnetic waves is determined by their wavelength. Therefore, by analyzing the wavelength distribution of the electromagnetic waves emitted from the electrons, that is, the wavelength distribution of the light emitted from a substance when it becomes plasma, it is possible to analyze the components contained in that substance at the elemental level. This method is generally called atomic emission spectroscopy (AES).

[0123] The LIBS method is an analytical technique that belongs to the AES method. Specifically, in the LIBS method, energy is imparted to a substance (sample SP) by irradiating the substance with a laser. Here, the area irradiated with the laser is locally converted into plasma, and by analyzing the intensity distribution spectrum of the light emitted as the plasma is converted, it is possible to analyze the components of the substance.

[0124] That is, as described above, the wavelength of each light (electromagnetic wave) has a unique value for each element, so when the intensity distribution spectrum forms a peak at a specific wavelength, the element corresponding to that peak is a component of the sample SP. If the intensity distribution spectrum contains multiple peaks, the component ratio of each element can be calculated by comparing the intensities (amounts of received light) of each peak.

[0125] The LIBS method does not require vacuuming and allows component analysis to be performed in an open-air state. Furthermore, although it is a destructive test of the sample SP, it does not require processing such as dissolving the entire sample SP, and the positional information of the sample SP remains (it is merely a locally destructive test).

[0126] The optical components described so far are housed in the aforementioned analysis housing 70. A through-hole 70a is provided in the bottom surface of the analysis housing 70. The reflective objective lens 74 faces the mounting surface 51a via this through-hole 70a.

[0127] A shielding member 83 shown in Fig. 7 is disposed inside the analyzing housing 70. This shielding member 83 is disposed between the through-hole 70a and the reflective objective lens 74, and can be inserted into the optical path of the laser light based on an electrical signal input from the controller main body 2 (see the dotted line in Fig. 7). The shielding member 83 is configured so as to be impermeable to at least the laser light.

[0128] By inserting the shielding member 83 into the optical path, it is possible to restrict the emission of laser light from the analyzing housing 70. The shielding member 83 may be disposed between the electromagnetic wave emitting part 71 and the output adjusting means 72.

[0129] -Analysis Box 70- At least an electromagnetic wave emitting unit 71, a first detector 77A, and a second detector 77B are housed in the analytical housing 70. The analytical housing 70 according to this embodiment houses all of the optical components that constitute the analytical optical system 7.

[0130] As shown in FIG. 4, the analyzing casing 70 is formed in a box shape in which the left-right dimension is longer than the front-rear dimension in a plan view or a cross-sectional view perpendicular to the up-down direction. The left portion of the front surface 70b of the analyzing casing 70 protrudes forward. Hereinafter, this protruding front surface 70b and its internal space will be referred to as a "protruding portion" and will be denoted by the reference numeral 70c. This protruding portion 70c is located in the center or around the lower half of the front surface 70b in the up-down direction. In other words, the upper half of the front surface 70b according to this embodiment is formed so as not to protrude forward.

[0131] Here, the direction perpendicular to the analysis optical axis Aa and the front-to-back direction (second direction) is referred to as the "fourth direction." In a non-tilted state, the fourth direction coincides with the left-to-right direction (third direction). In a tilted state, the fourth direction is tilted by an angle θ relative to the left-to-right direction. The examples shown in Figures 18A and 18B correspond to the case where θ = 0, i.e., the fourth direction coincides with the left-to-right direction.

[0132] 18A and 18B, the analyzing casing 70 can be divided into three regions along the fourth direction. Specifically, the analyzing casing 70 is divided into a first region R1 disposed on one side of the fourth direction (the left side in the illustrated example), a second region R2 disposed on the other side of the fourth direction (the right side in the illustrated example), and a third region R3 disposed between the first and second regions R1 and R2 in the fourth direction.

[0133] The first region R1 is provided with the aforementioned protrusion 70c. This protrusion 70c is configured to accommodate at least the second guide member 102. The second guide member 102 constitutes a slide mechanism 65 for sliding the head unit 6 in the front-rear direction. In addition, an opening is provided on the rear surface of the portion of the analyzing casing 70 corresponding to the protrusion 70c. The first guide member 101, which constitutes the slide mechanism 65 together with the second guide member 102, is inserted into this opening. The dimension of the third region R3 in the front-rear direction is longer than the dimensions of at least the first and second guide members 101 and 102. In addition, the dimension of the protrusion 70c alone in the front-rear direction is longer than the dimension of the observation casing 90 (the outer diameter of the observation casing 90) in this embodiment.

[0134] As will be described later, a fixing portion 102d that is provided integrally with the second guide member 102 is disposed on the upper or lower surface of the second guide member 102 (see FIG. 15, etc.). The fixing portion 102d according to this embodiment is disposed on the upper surface of the second guide member 102, and is exposed to the outside from the upper surface of the protrusion 70c, as shown in FIG. 8. A housing connector 64 for holding the observation housing 90 to the analyzing housing 70 is fixed to this fixing portion 102d.

[0135] In the second region R2, first and second detectors 77A and 77B are arranged side by side (only the first detector 77A is shown in the figure). As shown in Figures 18A and 18B, the first detector 77A has a rectangular cross section in a cross section perpendicular to the up-down direction.

[0136] Here, the first detector 77A is accommodated in a position where its longitudinal direction is not aligned with the front-rear direction but is tilted in the front-rear direction. Specifically, the first detector 77A is supported in a position where it extends outward in the left-right direction (away from the center in the left-right direction) as it extends forward along the front-rear direction. By accommodating the first detector 77A in this tilted position, it is possible to reduce the dimension of the analyzing casing 70 in the left-right direction compared to, for example, an arrangement where the longitudinal direction of the first detector 77A is aligned with the left-right direction. Furthermore, by accommodating the first detector 77A in this tilted position, it is possible to suppress the protrusion of the analyzing casing 70 in the front-rear direction compared to the protrusion 70c. The second detector 77B is arranged above the first detector 77A in a tilted position similar to the first detector 77A.

[0137] The third region R3 accommodates the notch filter 73, the dichroic mirror 75, the first beam splitter 78A, the second beam splitter 78B, the imaging lens 80, and the first camera 81. A space for arranging the observation unit 9a and the observation housing 90 is provided in front of the third region R3. Specifically, this space is defined in the external space of the analyzing housing 70 by the right side surface of the protrusion 70c and the front surface 70b of the analyzing housing 70 in the third region R3. In this space, the observation unit 9a is positioned adjacent to the protrusion 70c in the left-right direction. The observation unit 9a and the observation housing 90 are held by the outer surface of the analyzing housing 70. The holding structure of the observation housing 90 will be described later.

[0138] In this way, the observation housing 90 and the sliding mechanism 65 are arranged so as to be aligned along a straight line (a straight line extending along the left-right direction and positioned above or below the trajectory of the sliding mechanism 65) that is twisted relative to a straight line (a straight line extending along the front-to-back direction and corresponding to the trajectory of the sliding mechanism 65) that is aligned in the direction of movement of the sliding mechanism 65.

[0139] Furthermore, the protruding portion 70c and the observation unit 9a are disposed so as to be farther away from the stand 42 in the front-to-rear direction than the reflective objective lens 74. In other words, the protruding portion 70c protrudes to the opposite side (front side) of the stand 42 in the front-to-rear direction, and the observation unit 9a is disposed so that the reflective objective lens 74 is located between the observation unit 9a and the stand 42 in the front-to-rear direction.

[0140] The electromagnetic wave emitting unit 71 in the analytical optical system 7 is arranged to extend from the second region R2 to the third region R3 in the left-right direction, and is located on the opposite side of the protrusion 70c and the observation unit 9a in the front-rear direction. That is, the electromagnetic wave emitting unit 71 in this embodiment is arranged between the reflective objective lens 74 and the stand 42 in the front-rear direction.

[0141] By arranging the electromagnetic wave output unit 71 on the rear side, it is possible to reduce the dimensions of the analyzing casing 70 in the vertical and horizontal directions. In this way, the analyzing casing 70 according to this embodiment is configured to reduce the dimensions of the analyzing casing 70 in the vertical and horizontal directions by devising an ingenious layout for the first and second detectors 77A, 77B and the electromagnetic wave output unit 71, thereby increasing the design freedom of the analyzing casing 70 in both directions. As a result, the analyzing casing 70 according to this embodiment is formed so as to taper downward when viewed from the front along the front-to-rear direction.

[0142] Specifically, the analyzing casing 70 according to this embodiment is composed of a box-shaped portion with a substantially constant left-right dimension and a trapezoidal portion whose left-right dimension gradually decreases toward the bottom. The box-shaped portion and the trapezoidal portion are aligned vertically in a non-inclined state, defining an integrated storage space that is connected to each other. The trapezoidal portion functions as a notch that narrows the volume of the analyzing casing 70. Note that the entire analyzing casing 70 may be composed of trapezoidal portions without using a box-shaped portion.

[0143] The reflective objective lens 74 is disposed at the lower end of the trapezoidal portion. The trapezoidal portion is disposed above the central axis Ac, which is the center of the swing caused by the tilting mechanism 45. Therefore, by providing the trapezoidal portion, the tilt range allowed for the analyzing casing 70 can be made wider (tilted to a steeper angle).

[0144] 24A and 24B, the tilt θ of the analysis optical axis Aa with respect to the reference axis As can be adjusted within a range below a predetermined first threshold θmax. The magnitude of this first threshold θmax can be set within a range in which the mounting table 5 and the analyzing casing 70 do not interfere with each other.

[0145] Meanwhile, operation of the tilting mechanism 45 moves the inclined surface 70e, which corresponds to the hypotenuse of the trapezoid, toward and away from the mounting surface 51a. Therefore, the magnitude of the first threshold θmax can be set by adjusting the tilt angle of the inclined surface 70e. Specifically, the tilting mechanism 45 according to this embodiment can tilt the observation optical system 9 and the analytical optical system 7 until the inclined surface 70e of the trapezoidal portion and the mounting surface 51a are at least parallel when the observation optical system 9 and the analytical optical system 7 are viewed from the front along the front-rear direction. The first threshold θmax is preferably set to 30° or more, more preferably 45° or more.

[0146] In the illustrated example, the inclined surface 70e is configured as a side surface that is inclined in the up-down and left-right directions and parallel to the front-rear direction, but is not limited to this configuration. The inclined surface 70e can also be inclined in the front-rear direction.

[0147] 8 and other figures, a handle 70d is provided on the top surface of the analyzing casing 70 according to this embodiment. For convenience, the components constituting the head unit 6 can be divided into a fixed part constituted by the head mounting member 61 and the first guide member 101, and a movable part constituted by the second guide member 102, the analyzing optical system 7, the analyzing casing 70, the observation optical system 9, the observation casing 90, and the casing connector 64. The movable part is a collection of components that slide when the sliding mechanism 65 is operated, and the fixed part is a collection of components that do not slide when the sliding mechanism 65 is operated. In this embodiment, the handle 70d is provided on the movable part (specifically, the analyzing casing 70) rather than the fixed part.

[0148] In this embodiment, the movable part is configured to be heavier than the fixed part. Therefore, by providing the handle 70d on the analysis housing 70 that constitutes the movable part, rather than on a part that constitutes the fixed part, the portability of the head part 6 can be improved. Note that, for example, if the first guide member 101 is relatively heavy and the fixed part is relatively heavy compared to the movable part, it is preferable to provide the handle 70d on a part that constitutes the fixed part, such as the upper end of the head mounting member 61.

[0149] -Head mounting part 61- Fig. 8 is a perspective view illustrating the head unit 6 as seen from the front side, and Fig. 9 is a perspective view illustrating the head unit 6 as seen from the rear side.

[0150] The analyzing casing 70 configured as described above is connected to the stand 42 via a head mounting member 61. Specifically, the head mounting member 61 is configured as a plate-like member that extends in the vertical and horizontal directions, and is disposed between the rear surface (rear face) of the analyzing casing 70 and the front surface of the stand 42. The head mounting member 61 is fixed to the mounting fixture 43 of the stand 42.

[0151] The head mounting member 61 has a plate body 61a, a protective cover 61b, an insertion portion 61d, a cable holding portion 61e, and a first guide member 101 that configures a slide mechanism 65 together with a second guide member .

[0152] Of these, the plate body 61a is configured as a plate-shaped member extending approximately parallel to the rear surface of the head unit 6. As shown in Figs. 6, 23A, and 23B, in a second mode (second state) described later, the plate body 61a is in close contact with or close to the rear surface of the analyzing casing 70. As shown in Figs. 23A and 23B, in a first mode (first state) described later, the plate body 61a is separated from the rear surface of the analyzing casing 70 in the front-rear direction.

[0153] The protective cover 61b is configured as a tongue-shaped member that protrudes forward from the lower end of the plate body 61a. As shown in Fig. 9, the protective cover 61b can shield the reflective objective lens 74, which serves as the first objective lens. The protective cover 61b is connected to the first guide member 101 via the plate body 61a.

[0154] The insertion portion 61d is provided on the rear surface of the plate main body 61a. The insertion portion 61d has a shape that allows it to be inserted into the rail portion 43a of the mounting fixture 43. By operating the lock lever 43b with the insertion portion 61d inserted into the rail portion 43a, the head mounting member 61 is supported on the stand 42. This connects the head unit 6 to the stand 42 via the head mounting member 61.

[0155] The cable holder 61e is composed of an arm-shaped member extending leftward from the upper edge of the plate body 61a and a substantially tubular member extending upward from the arm-shaped member. The latter tubular member can be attached to and hold the communication cable C1 extending from the analyzing casing 70.

[0156] 9, the length from the base end of the communication cable C1 (the connection portion with the analysis housing 70) to the portion of the communication cable C1 held by the cable holding portion 61e is set to be at least longer than the amount of movement of the head unit 6 by the slide mechanism 65. When set in this manner, the communication cable C1 is held in a slack state due to gravity, as shown in FIG. 9. This makes it possible to prevent excessive tension from acting on the communication cable C1 when the head unit 6 is switched between a first mode and a second mode, which will be described later.

[0157] The first guide member 101, together with the second guide member 102 built into the analytical housing 70, constitutes a slide mechanism 65 according to this embodiment. The first guide member 101 is connected to the analytical housing 70 in a state in which it can slide relative to the second guide member 102. Therefore, the first guide member 101 is basically detachable from the stand 42 integrally with the analytical housing 70 and the analytical optical system 7, and ultimately the head unit 6. Details of the first guide member 101 and therefore the slide mechanism 65 will be described later.

[0158] In the second mode and in the non-tilted state, as shown in FIG. 9 and other figures, the protective cover 61b is laid out so as to be aligned with the handle 70d of the analyzing casing 70 in the vertical direction.

[0159] More specifically, the handle 70d according to this embodiment is arranged in a straight line extending along the analysis optical axis Aa of the reflective objective lens 74. Meanwhile, this analysis optical axis Aa is arranged to penetrate the protective cover 61b in the second mode, as shown in FIG.

[0160] Therefore, in the second mode, the analysis optical axis Aa passes through both the handle 70d and the protective cover 61b. In other words, in the second mode, the handle 70d and the protective cover 61b are both positioned on a line extending along the analysis optical axis Aa. Here, the analysis optical axis Aa extends along the vertical direction in the non-tilted state. Therefore, in the first mode and in the non-tilted state, the handle 70d and the protective cover 61b are positioned on a common line extending along the vertical direction.

[0161] By adopting such a layout, when carrying the head unit 6, the user can easily grasp the handle 70d with one hand while supporting the protective cover 61b from below with the other hand, which contributes to improving the usability of the analytical observation device A.

[0162] -Observation Optical System 9- The observation optical system 9 is a collection of components for observing a sample SP as an observation object, and each component is accommodated in an observation housing 90. The components that make up the observation optical system 9 include a second objective lens (objective lens 92 described below) and a second camera 93. The objective lens 92 as the second objective lens focuses light from the sample SP. The second camera 93 captures an image of the sample SP by detecting the amount of light (reflected light) from the sample SP that is received through the objective lens 92. The second camera 93 is an example of a "camera" in this embodiment. The observation housing 90 is configured to accommodate at least the second objective lens and the second camera 93.

[0163] The observation optical system 9 includes an observation unit 9a having an objective lens 92 as a second objective lens. As shown in FIG. 3 and other figures, this observation unit 9a corresponds to a cylindrical lens barrel arranged at the lower end side of the observation housing 90. The observation unit 9a is held by the analysis housing 70. The observation unit 9a can be removed from the observation optical system 9 as a single unit.

[0164] A communication cable C2 for transmitting and receiving electrical signals to and from the controller main body 2, and an optical fiber cable C3 for guiding illumination light from the outside, are connected to the observation optical system 9. Note that the communication cable C2 is not essential, and the observation optical system 9 and the controller main body 2 may be connected via wireless communication.

[0165] 6, the observation optical system 9 includes a group of mirrors 91, an objective lens 92, and a second camera 93. The second camera 93 is an example of the "camera" in this embodiment.

[0166] The mirror group 91 reflects the illumination light guided from the optical fiber cable C3 and guides it to the surface of the sample SP via the objective lens 92. This illumination light is coaxial with the observation optical axis Ao of the objective lens 92, and functions as so-called "coaxial epi-illumination." Note that instead of guiding illumination light from the outside via the optical fiber cable C3, a light source may be built into the observation housing 90. In that case, the optical fiber cable C3 is not necessary.

[0167] The mirror group 91 also transmits the light reflected from the sample SP and guides it to the second camera 93. The mirror group 91 according to this embodiment can be configured using a total reflection mirror and a half mirror, as exemplified in FIG.

[0168] The objective lens 92 has an observation optical axis Ao extending substantially in the vertical direction, and collects illumination light to irradiate the sample SP placed on the mounting table 5, and also collects light (reflected light) from the sample SP. The observation optical axis Ao is arranged so as to be parallel to the analysis optical axis Aa of the reflective objective lens 74 of the analysis optical system 7.

[0169] Although details are omitted, as illustrated schematically in FIG. 6, a ring illuminator 92a can be attached to the objective lens 92 and used as illumination for observation (non-coaxial epi-illumination).

[0170] Furthermore, the objective lens 92 is configured to be detachable from the observation unit 9a, which allows the magnification of the observation optical system 9 to be changed without replacing the entire observation unit 9a.

[0171] The second camera 93 photoelectrically converts light incident from the sample SP through the objective lens 92 using a plurality of pixels arranged on its light receiving surface, and converts it into an electrical signal corresponding to an optical image of the subject (sample SP).

[0172] The second camera 93 may have a plurality of light receiving elements arranged along its light receiving surface. In this case, each light receiving element corresponds to a pixel, and an electrical signal can be generated based on the amount of light received by each light receiving element. The second camera 93 according to this embodiment is configured with a CMOS image sensor, similar to the first camera 81, but a CCD image sensor can also be used.

[0173] The second camera 93 then generates image data corresponding to the optical image of the subject based on the electrical signals generated by detecting the amount of light received by each light receiving element, and inputs the image data to the controller main body 2.

[0174] The light returning from the sample SP is incident on the second camera 93 without being split by a detector or the like. Therefore, the amount of light received by the second camera 93 is greater than the amount of light received by the first camera 81. The second camera 93 can generate a brighter image than the first camera 81.

[0175] -Observation enclosure 90- As shown in Fig. 3 and other figures, the observation housing 90 is formed in a substantially cylindrical shape. The longitudinal direction of the observation housing 90 coincides with the direction in which the above-mentioned observation optical axis Ao extends. As shown in Fig. 3, the dimension of the observation housing 90 in the front-rear direction is shorter than the dimension of the analyzing housing 70 in the front-rear direction. Furthermore, as shown in Fig. 4, the dimension of the observation housing 90 in the left-right direction is shorter than the dimension of the analyzing housing 70 in the left-right direction.

[0176] In this way, the observation housing 90 is configured to be more compact than the analysis housing 70. Furthermore, the analysis housing 70 also houses optical components that are not included in the observation optical system 9, such as the first detector 77A and the second detector 77B. Due to these circumstances, in this embodiment, the total weight of the observation optical system 9 and the observation housing 90 is lighter than the total weight of the analysis optical system 7 and the analysis housing 70.

[0177] 5 and other figures, the observation housing 90 is held to the analyzing housing 70 (in this embodiment, the upper surface of the protrusion 70c) via a housing connector 64 that is separate from the observation housing 90. The housing connector 64 will be described in detail below.

[0178] -Housing connector 64- Fig. 20 is a perspective view illustrating the configuration of the housing connector 64, and Fig. 21 is a cross-sectional view illustrating the internal structure of the housing connector 64. Also, Fig. 22 is a diagram for explaining attachment and detachment of the observation unit 9a.

[0179] The housing connector 64 is a member for connecting the observation housing 90 to the analysis housing 70. The housing connector 64 can be separate from the analysis housing 70 and the observation housing 90, and connects the two housings 70, 90 so that they cannot move relative to each other. Connecting the two housings 70, 90 with the housing connector 64 allows the analysis optical system 7 and the observation optical system 9 to move integrally. Although not shown in the figures, the housing connector 64 can also be configured integrally with the analysis housing 70 or the observation housing 90.

[0180] The housing connector 64 can be attached to the inside or outside of the analytical housing 70, i.e., inside or outside of the analytical housing 70. In particular, the housing connector 64 according to this embodiment is arranged on the upper surface of the second guide member 102 and is fixed to a fixing portion 102d exposed from the upper surface of the protrusion 70c (see FIG. 8).

[0181] The housing connector 64 is supported by the second guide member 102 via the fixing portion 102d. Therefore, gravity acting on the observation housing 90 and its contents acts on the second guide member 102 via the housing connector 64, and ultimately on the slide mechanism 65.

[0182] In detail, as shown in FIG. 20, the housing connector 64 has a fastening portion 64a that is fastened to the upper surface of the fixing portion 102d, an arm portion 64b that extends downward from the fastening portion 64a, and a housing insertion portion 64c that extends to the right from the arm portion 64b and is configured to be able to hold the observation housing 90.

[0183] Of these, fastening portion 64a is formed in a flat plate shape extending horizontally. By placing fastening portion 64a on fixing portion 102d arranged on the upper surface of protrusion 70c and fastening a fastener such as a bolt from above, housing connector 64 can be fixed to fixing portion 102d and, ultimately, to second guide member 102.

[0184] The arm portion 64b is formed in the shape of a long plate with a vertical dimension that is longer than its front-to-rear dimension. By fastening the fastening portion 64a to the fixing portion 102d, the left side surface of the arm portion 64b comes into contact with the right side surface of the protrusion 70c, as shown in Fig. 8, and the observation housing 90 can be stably positioned without wobbling.

[0185] The housing insertion portion 64c is formed in a flat plate shape extending horizontally and having a through-hole 64d formed therein. The inner diameter of the through-hole 64d is approximately the same as the outer diameter of the observation housing 90. As shown in FIG. 21 , the outer surface of the housing insertion portion 64c is provided with a first screw 64e for adjusting the rotation angle of the observation housing 90 around the observation optical axis Ao, a second screw 64f and a third screw 64g for adjusting the positioning of the observation housing 90 in the horizontal direction, and a fourth screw 64h for fixing the observation housing 90 to the housing insertion portion 64c after adjusting the rotation angle and positioning of the observation housing 90. The fourth screw 64h presses against the outer surface of the observation housing 90 along its central axis.

[0186] In addition, a biasing member 64i is built into the housing insertion portion 64c on the opposite side of the fourth screw 64h (opposite side in the central axis direction of the fourth screw 64h) to apply a biasing force to the outer surface of the observation housing 90 that resists the pressure from the fourth screw 64h.

[0187] The first screw 64e, the second screw 64f, the third screw 64g, and the fourth screw 64h are each arranged from the space on the opposite side (right side) of the protruding portion 70c in the left-right direction to the space on the opposite side (front side) of the front surface 70b of the analyzing casing 70 in the front-rear direction. By arranging them in this way, it becomes possible to operate the first screw 64e to the fourth screw 64h without being obstructed by the analyzing casing 70.

[0188] The analytical observation device A according to this embodiment is configured to adjust the rotation angle and positioning of the observation housing 90 by an adjustment mechanism (an adjustment mechanism constituted by a first screw 64e, a second screw 64f, a third screw 64g, a fourth screw 64h, and a biasing member 64i) provided in the housing connector 64. However, adjustment of the rotation angle, etc. of the observation housing 90 can also be performed by using other means.

[0189] For example, instead of the adjustment mechanism provided in the housing coupler 64, an adjustment mechanism that rotates and / or slides the fixed portion 102d relative to the second guide member 102 may be newly provided, and the adjustment mechanism may be used to adjust the rotation angle and positioning of the observation housing 90. Alternatively, an adjustment mechanism configured in this way (adjustment mechanism provided in the fixed portion 102d) may be used in combination with an adjustment mechanism provided in the housing coupler 64. When two adjustment mechanisms are used in combination, each adjustment mechanism may have a different function; for example, one adjustment mechanism may adjust the rotation angle of the observation housing 90, and the other adjustment mechanism may adjust the positioning of the observation housing 90 in the X and Y directions.

[0190] The housing connector 64 according to this embodiment connects the observation housing 90 to the analysis housing 70, thereby making it possible to fix the relative position of the analysis optical axis Aa with respect to the observation optical axis Ao.

[0191] 18A and 18B, the housing connector 64 holds the observation housing 90, so that the observation optical axis Ao and the analysis optical axis Aa are arranged to be aligned along the second direction (the front-to-rear direction in this embodiment), which is the direction of movement by the slide mechanism 65. Particularly in this embodiment, the observation optical axis Ao is arranged forward of the analysis optical axis Aa.

[0192] Furthermore, by the housing connector 64 holding the observation housing 90, the observation optical axis Ao and the analysis optical axis Aa are positioned so that their positions coincide in a third direction (the left-right direction in this embodiment) that is perpendicular to the first and second directions.

[0193] Furthermore, the observation housing 90 can be appropriately attached to the analysis housing 70. When attempting to attach multiple types of observation housings 90, 90' each having different observation units 9a, 9a', the working distance (WD) to be set for one observation housing 90 and the other observation housing 90' may differ. Note that WD here refers to the distance between the sample SP (object to be observed) and the objective lens 92.

[0194] As shown in Figure 22, by preparing multiple types of housing connectors 64, 64' according to the specifications of the observation housings 90, 90' and configuring the housing connectors 64, 64' to be attached to the observation housings 90, 90' together, it becomes possible to achieve a WD suitable for each observation housing 90, 90'.

[0195] For example, an observation housing 90 having an observation unit 9a that should be set to a relatively long WD can be held by a housing connector 64 having an arm portion 64b with a relatively short vertical dimension, thereby separating the observation housing 90 and the sample SP in the vertical direction. This allows a relatively long WD to be set, as shown by WD1 in Fig. 22.

[0196] On the other hand, for an observation housing 90' having an observation unit 9a that should be set to a relatively short WD, the observation housing 90' and the sample SP can be brought closer together in the vertical direction by holding them with a housing connector 64' having an arm portion 64b' that is relatively long in the vertical direction. This allows the setting to a relatively short WD, as shown by WD2 in Figure 22.

[0197] Although not shown in detail, even if the WD to be set is the same for the observation housings 90 and 90', the dimensions of the observation units 9a and 9a' in the vertical direction may differ. In this case, by adjusting the length of the arm portions 64b and 64b', the difference in dimensions between the observation units 9a and 9a' can be compensated for and the WD can be matched.

[0198] For example, an observation housing 90 having an observation unit 9a with a relatively long WD can be configured to be held by a housing connector 64 having an arm portion 64b with a relatively short vertical dimension, while an observation housing 90' having an observation unit 9a' with a relatively short WD can be configured to be held by a housing connector 64' having an arm portion 64b' with a relatively long vertical dimension.

[0199] In addition, by adjusting the dimensions of various parts, such as the thickness of the housing insertion portion 64c, rather than the dimensions of the arm portion 64b, the focal length (WD) between the sample SP and the objective lens 92 can be matched before and after replacing the observation housing 90.

[0200] Furthermore, instead of replacing the entire housing connector 64, 64' with the observation housing 90, 90', it is also possible to replace only the tip observation unit 9a, 9a'. In this configuration, it is preferable that the housing connector 64, 64' hold the outer circumferential surface of the observation unit 9a, 9a' in the observation housing 90, 90'.

[0201] Alternatively, a revolver equipped with multiple types of objective lenses may be placed at the bottom end of the observation housing 90, and the objective lenses 92 may be switched by rotating the revolver. In such a configuration, instead of preparing a housing connector 64 that matches the WD, the WD can be adjusted via the head driver 47 or the mounting table driver 53, as described below.

[0202] Each observation housing 90, 90' is configured to be able to identify at least the type of observation unit 9a, 9a'. For example, each observation unit 9a, 9a' is equipped with a lens sensor Sw1 for detecting the type. A detection signal from the lens sensor Sw1 is input to the controller main body 2.

[0203] The signals input to the controller main body 2 may include not only the detection signal of the lens sensor Sw1 but also, for example, a signal indicating the magnification of the objective lens 92. By attaching the observation unit 9a, the controller main body 2 and the observation unit 9a are electrically connected. Through this connection, the controller main body 2 may obtain the type, magnification, etc. of the observation unit 9a. Instead of attaching the lens sensor Sw1 to the optical system assembly 1, it is also possible to configure the controller main body 2 so that the type, magnification, etc. of the observation unit 9a are manually input to the controller main body 2 via the operation unit 3 or the like.

[0204] Furthermore, the controller main body 2 may drive the head driving unit 47 in accordance with the type of observation unit 9a to move the head part 6 in the Z-axis direction. The controller main body 2 identifies the type of observation unit 9a, for example, by a detection signal from the lens sensor Sw1, thereby acquiring the focal length (WD) of the objective lens 92 fixed by the housing connector 64, and drives the head driving unit 47 in accordance with the acquired focal length (WD) so that the focal length (WD) between the sample SP and the objective lens 92 matches before and after changing the observation housing 90 or the observation unit 9a. Furthermore, instead of driving the head driving unit 47, the mounting surface 51a may be moved in the Z-axis direction via the mounting table driving unit 53.

[0205] -Slide mechanism 65- Fig. 10 is a perspective view illustrating the first and second guide members 101, 102 as viewed from the left side. Fig. 11 is a perspective view illustrating the first and second guide members 101, 102 as viewed from the right side. Fig. 12 is a perspective view illustrating a state in which the second guide member 102 has been slid from the state shown in Fig. 11.

[0206] Fig. 13 is a perspective view illustrating the first guide member 101 as seen from the right side. Fig. 14 is a perspective view illustrating the second guide member 102 as seen from the left side. Fig. 15 is a cross-sectional view illustrating the connection structure of the first and second guide members 101 and 102.

[0207] Fig. 16 is a side view illustrating the first and second guide members 101, 102 as viewed from the left side. Fig. 17A is a diagram for explaining the feed screw mechanism in the first mode, Fig. 17B is a diagram for explaining the feed screw mechanism in the second mode, and Fig. 17C is a diagram for explaining the state of the feed screw mechanism during transition from the first mode to the second mode.

[0208] Moreover, Fig. 18A is a diagram showing the internal structure of the analyzing casing 70 in the first mode. Fig. 18B is a diagram showing the internal structure of the analyzing casing 70 in the second mode. Moreover, Figs. 23A and 23B are diagrams for explaining the horizontal movement of the head unit 6.

[0209] The slide mechanism 65 is configured to move the relative positions of the observation optical system 9 and the analysis optical system 7 in the horizontal direction so that imaging of the sample SP by the observation optical system 9 and irradiation of electromagnetic waves (laser light) when an intensity distribution spectrum is generated by the analysis optical system 7 (in other words, irradiation of electromagnetic waves by the electromagnetic wave emitting section 71 of the analysis optical system 7) can be performed on the same location on the sample SP as the object to be observed.

[0210] The direction of movement of the relative positions by the slide mechanism 65 can be the direction in which the observation optical axis Ao and the analysis optical axis Aa are aligned. As shown in Fig. 23A and other figures, the slide mechanism 65 according to this embodiment moves the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting table 5 in the front-to-rear direction.

[0211] The slide mechanism 65 displaces the analysis housing 70 relative to the stand 42 and the head mounting member 61. Because the analysis housing 70 and the observation housing 90 are connected by a housing connector 64, displacing the analysis housing 70 displaces the observation housing 90, and therefore the observation optical system 9, as a whole.

[0212] Operation of the slide mechanism 65 switches the head unit 6 between a first mode (see FIG. 18A and the upper diagrams of FIGS. 23A and 23B) in which the reflective objective lens 74 of the analytical optical system 7 faces the measurement field of view on the mounting table 5, and a second mode (see FIG. 18B and the lower diagrams of FIGS. 23A and 23B) in which the objective lens 92 of the observation optical system 9 faces the measurement field of view on the mounting table 5. The first mode is an example of the "first state" in this embodiment. The second mode is an example of the "second state" in this embodiment.

[0213] 23A and 23B, operation of the slide mechanism 65 as a horizontal drive mechanism causes the head unit 6 to slide horizontally, and the relative positions of the observation optical system 9 and the analysis optical system 7 to move (horizontally move) with respect to the mounting table 5. This horizontal movement causes the head unit 6 to switch between a first mode in which the reflective objective lens 74 faces the sample SP, and a second mode in which the objective lens 92 faces the sample SP.

[0214] 18A and 18B and 23A and 23B, in the first mode, the head unit 6 is in a relatively advanced state, and in the second mode, the head unit 6 is in a relatively retreated state. The first mode is an operation mode for performing component analysis of the sample SP using the analytical optical system 7, and the second mode is an operation mode for performing magnified observation of the sample SP using the observation optical system 9.

[0215] In particular, the analytical observation device A according to this embodiment is configured so that the location at which the reflective objective lens 74 is pointed in the first mode and the location at which the objective lens 92 is pointed in the second mode are the same. Specifically, the analytical observation device A is configured so that the location at which the analytical optical axis Aa and the sample SP intersect in the first mode and the location at which the observation optical axis Ao and the sample SP intersect in the second mode are the same (see FIG. 23B).

[0216] To achieve this configuration, the amount of movement of the head unit 6 when the slide mechanism 65 is actuated is set to be the same as the distance between the observation optical axis Ao and the analysis optical axis Aa. In addition, the alignment direction of the observation optical axis Ao and the analysis optical axis Aa is set to be parallel to the movement direction of the head unit 6, as shown in Figures 18A and 18B.

[0217] By configuring in this manner, before and after switching between the first mode and the second mode, it becomes possible to perform image generation of the sample SP by the observation optical system 9 and generation of an intensity distribution spectrum by the analysis optical system 7 (specifically, irradiation of electromagnetic waves by the analysis optical system 7 when an intensity distribution spectrum is generated by the analysis optical system 7) from the same direction at the same location on the sample SP.

[0218] The specific configuration of the slide mechanism 65 will be described in detail below.

[0219] The slide mechanism 65 includes at least a first guide member 101 and a second guide member 102. The first guide member 101 is connected to the stand 42 and is a member that extends in the front-rear direction perpendicular to the up-down direction as a first direction. The second guide member 102 is connected to the analyzing casing 70 and is coupled to the first guide member 101 in a state that allows it to slide along the front-rear direction.

[0220] In this embodiment, the analyzing casing 70 and the observation unit 9a are configured to move integrally in accordance with the sliding of the second guide member 102 relative to the first guide member 101.

[0221] Here, the first guide member 101 is separate from the stand 42 and is provided integrally with the head mounting member 61. Therefore, the first guide member 101 is configured to be detachable from the stand 42 together with the second guide member 102 and the analyzing casing 70 connected to the second guide member 102 via the insertion portion 61d of the head mounting member 61.

[0222] 13, 14, and 15, the first guide member 101 and the second guide member 102 are each configured so that their left-right dimensions are shorter than their up-down dimensions. Specifically, the first and second guide members 101 and 102 have first and second plate portions 101a and 102a, respectively, which are generally plate-shaped. The first and second plate portions 101a and 102a are each disposed with their plate thickness direction aligned with the left-right direction and their longitudinal direction (the short-side direction when viewed from the left-right direction) aligned with the up-down direction when viewed from the front.

[0223] The first and second guide members 101, 102 are arranged in a first region R1 defined in the left side portion of the analyzing casing 70, rather than in a third region R3 defined in the center of the analyzing casing 70. The analyzing casing 70 and the observing casing 90 are located to the right of the first and second guide members 101, 102. In other words, the first and second guide members 101, 102 support the analyzing casing 70, the observing casing 90, and the contents contained in each casing in a cantilevered manner.

[0224] The first guide member 101 has the first plate portion 101a, a feed nut portion 101b, and a plurality of support blocks 101c. The support blocks 101c are an example of the "support member" in this embodiment.

[0225] The first plate portion 101a is formed as a plate extending in the front-rear direction and arranged with its thickness aligned in the left-right direction. A feed nut portion 101b is attached to the left side surface of the first plate portion 101a, while multiple support blocks 101c are attached to the right side surface of the first plate portion 101a.

[0226] A feed nut portion 101b provided on the first guide member 101 constitutes a feed screw mechanism together with a screw shaft 102c and an actuator 102b provided on the second guide member 102. The screw shaft 102c is inserted into the feed nut portion 101b, and the feed nut portion 101b has a screw hole corresponding to the thread of the screw shaft 102c.

[0227] The multiple support blocks 101c include an upper support block 101c and a lower support block 101c. The upper support block 101c slidably supports the upper rail portion 102e of the second guide member 102. The lower support block 101c slidably supports the lower rail portion 102e of the second guide member 102.

[0228] Specifically, the support block 101c is made up of a pair of front and rear block-shaped members that are arranged at an interval along the front-rear direction and are configured so that the corresponding rail portions 102e can be inserted therethrough.

[0229] As shown in Figures 18A and 18B, the portion of the first guide member 101 where the support block 101c is arranged overlaps with the second guide member 102 in both the first mode and the second mode (overlapping when viewed in the left-right direction).

[0230] Therefore, the area where the support block 101c is arranged in the slide mechanism 65 has higher rigidity than other areas due to the overlap between the first guide member 101 and the second guide member 102. As will be described later, the observation optical axis Ao and the analysis optical axis Aa are arranged in this area.

[0231] The second guide member 102 includes the second plate portion 102a, the actuator 102b, the second bearing 102h, the screw shaft 102c, a pair of upper and lower rail portions 102e, and a third bearing 102f having a slide restricting portion 102g. The second guide member 102 also includes a fixed portion 102d that is integral with the second plate portion 102a.

[0232] The second plate portion 102a is formed in a plate shape extending in the front-rear direction and arranged with its thickness aligned with the left-right direction. The second plate portion 102a is arranged to the right of the first plate portion 101a. More specifically, the second plate portion 102a is formed in a substantially L-shape that is inverted vertically, as shown in FIG.

[0233] The portion of the second plate portion 102a corresponding to the short side of the L-shape is formed in a plate shape extending in the front-rear and left-right directions and is located above the first plate portion 101a. On the other hand, the portion of the second plate portion 102a corresponding to the long side of the L-shape corresponds to the portion whose plate thickness direction is aligned with the left-right direction as described above and is located to the right of the first plate portion 101a.

[0234] The actuator 102b is attached to the underside of the front end of the second plate portion 102a at a position corresponding to the short side. The actuator 102b may be, for example, a linear motor or a stepping motor that operates based on an electrical signal from the control unit 21.

[0235] By driving the actuator 102b, the analysis housing 70, and therefore the observation optical system 9 and the analysis optical system 7, can be displaced relative to the stand 42 and the head mounting member 61. As shown in Fig. 15, in the left-right direction, the first plate portion 101a is arranged between the actuator 102b and the second plate portion 102a.

[0236] Furthermore, a movement amount sensor (not shown) may be provided around the first and second plate portions 101a, 102a to detect the amount of movement of the observation optical system 9 and the analysis optical system 7. If a movement amount sensor is provided, the control unit 21 can be configured to stop the sliding movement of the head portion 6 as soon as the movement amount sensor detects that the head portion 6 has moved by the relative distance between the analysis optical axis Aa and the observation optical axis Ao. The movement amount sensor can be configured, for example, with a linear scale (linear encoder) or the like.

[0237] Alternatively, the maximum movement amount achievable by the slide mechanism 65 may be set to coincide with the relative distance between the analysis optical axis Aa and the observation optical axis Ao, and the head unit 6 may be moved by this maximum movement amount. In this case, the point where the analysis optical axis Aa intersects with the sample SP and the point where the observation optical axis Ao intersects with the sample SP can be made to coincide before and after the slide movement.

[0238] The screw shaft 102c is formed of a shaft-shaped member with a spiral thread cut into it, with the center axis extending in the front-to-rear direction. The front end of the screw shaft 102c is rotatably supported by a second bearing 102h disposed above the actuator 102b. Meanwhile, the rear end of the screw shaft 102c is rotatably supported by a third bearing 102f. The screw shaft 102c rotates upon receiving power from the actuator 102b.

[0239] In the feed screw mechanism composed of the feed nut portion 101b, the actuator 102b, the screw shaft 102c, the second bearing 102h, and the third bearing 102f, when the actuator 102b is driven, the screw shaft 102c rotates around its central axis. The slide mechanism 65 is configured so that, as the screw shaft 102c rotates, the screw shaft 102c moves relative to the feed nut portion 101b in the front-to-rear direction. Here, the screw shaft 102c is fixed to the second plate portion 102a, while the feed nut portion 101b is fixed to the first plate portion 101a. Therefore, the relative movement between the screw shaft 102c and the feed nut portion 101b realizes sliding movement between the first guide member 101 and the second guide member 102.

[0240] As shown in Fig. 17A, in the first mode, the rear surface of feed nut portion 101b abuts against the front surface of third bearing 102f. On the other hand, as shown in Fig. 17B, in the second mode, screw shaft 102c, second bearing 102h, and third bearing 102f move relatively further rearward with respect to feed nut portion 101b than in the first mode, resulting in the front surface of feed nut portion 101b abutting against the rear surface of second bearing 102h.

[0241] When switching from the second mode to the first mode, for example, as shown by the dashed line 102b' in Figure 16, the screw shaft 102c, the second bearing 102h, and the third bearing 102f move relatively further forward with respect to the feed nut portion 101b than in the second mode, causing the rear surface of the feed nut portion 101b and the front surface of the third bearing 102f to come relatively closer together, and the switching to the first mode is completed when the two come into close proximity or contact with each other.

[0242] Here, when the feed nut portion 101b and the third bearing 102f approach each other in accordance with the operation of the slide mechanism 65, there is a possibility that a foreign object or the like may become caught between the front surface of the head mounting member 61 and the rear surface of the analysis housing 70. In such a case, it is considered to stop the operation of the slide mechanism 65 as quickly as possible. Therefore, the feed nut portion 101b according to this embodiment is configured to detect contact with a foreign object and input a detection signal to the controller main body 2.

[0243] Specifically, as shown in Figures 17A and 17B, the feed nut portion 101b comprises a first block 1011, a second block 1012 and a third block 1013 inserted onto the screw shaft 102c, a biasing member 1014 that exerts a biasing force in a direction separating the second block 1012 and the third block 1013, and a detection portion 1015 fixed to the second block 1012 and housing a Hall element sensor.

[0244] Specifically, the first block 1011, the second block 1012, and the third block 1013 are arranged in this order from the front in the second direction. The first block 1011 is connected to the third block 1013 by a connector (not shown), and the relative positional relationship between the first block 1011 and the third block 1013 is maintained constant regardless of the operating status of the slide mechanism 65. The second block 1012 is arranged between the first block 1011 and the stand 42 and the head mounting member 61 in the second direction, more specifically, between the first block 1011 and the third block 1013 in the second direction, and is urged toward the first block 1011 by the urging member 1014.

[0245] Here, the first block 1011 has a threaded hole that screws onto the threads of the screw shaft 102c, and is connected to the screw shaft 102c through the threaded hole. Meanwhile, the first block 1011 is not in contact with the first guide member 101. This first block 1011 is configured to move relative to the screw shaft 102c in the second direction as the screw shaft 102c rotates. As in this embodiment, when the feed nut portion 101b does not move and the screw shaft 102c slides in the front-rear direction, the first block 1011 does not move front-rear, but moves front-rear as the screw shaft 102c rotates.

[0246] The first block 1011 is not directly connected to the first guide member 101, but is attached to the second guide member 102 via the screw shaft 102c. Therefore, unless the first block 1011 is fixed by some means, the first block 1011 and the screw shaft 102c cannot rotate relative to each other. If there is no means for fixing the first block 1011, the first block 1011 will rotate integrally with the screw shaft 102c and move back and forth integrally with the screw shaft 102c due to the static friction force acting between the first block 1011 and the screw shaft 102c. The first block 1011 and the screw shaft 102c will rotate together.

[0247] Therefore, in this embodiment, the second block 1012, which is arranged next to the first block 1011 in the second direction, attracts the first block 1011 with an attracting magnetic force (magnetic force) that exceeds the static friction force, causing the first block 1011 and the screw shaft 102c to rotate relatively. In this embodiment, the attracting magnet that generates this attracting magnetic force is housed in the second block 1012, but the attracting magnet may also be housed in the first block 1011.

[0248] Furthermore, the first block 1011 according to this embodiment houses a detection magnet that allows the detection unit 1015 to detect that the first block 1011 and the second block 1012 have separated from each other. This detection magnet may be housed in the second block 1012 instead of the first block 1011. If the detection magnet is housed in the second block 1012, the detection unit 1015 will be fixed to the first block 1011 or the third block 1013, rather than the second block 1012.

[0249] Note that instead of or in addition to magnetic attraction, co-rotation of the first block 1011 and the screw shaft 102c may be prevented by forming a notch in the first block 1011 and inserting another rod different from the screw shaft 102c so that it passes through the notch. In this case, the other rod does not need to be firmly fixed to the first block 1011, and may be connected to the first block 1011 with some play.

[0250] The second block 1012 has a through-hole through which the screw shaft 102c can be inserted, but the inner diameter of the through-hole is larger than the outer diameter of the screw shaft 102c (specifically, the outer diameter of the threaded portion of the screw shaft 102c). Therefore, regardless of the operation of the slide mechanism 65, the second block 1012 remains unconnected from the screw shaft 102c and, therefore, the second guide member 102. Also, as shown in FIGS. 17A to 17C, the second block 1012 is in contact with the first plate portion 101a and is fastened to the first plate portion 101a by a fastener (not shown). Therefore, regardless of the operation of the slide mechanism 65, the second block 1012 remains fixed to the first guide member 101.

[0251] The second block 1012 is at least partially made of a metal member or a magnet, and attracts the first block 1011 by an attracting magnetic force (magnetic force) generated by an attracting magnet housed in the second block 1012. The second block 1012 attracts the first block 1011 by a magnetic force that exceeds at least the static friction force, and fixes the first block 1011. The first block 1011 is attached to the first guide member 101 via the second block 1012.

[0252] By fixing the first block 1011 to the second block 1012, the first block 1011 and the screw shaft 102c can rotate relative to each other without co-rotating. When the screw shaft 102c rotates while the first block 1011 is fixed, the threads of the screw shaft 102c slide along the threaded hole of the first block 1011. This sliding causes the screw shaft 102c to slide along the central axis of the threads, i.e., along the second direction. This sliding movement causes the first guide member 101 and the second guide member 102 to slide relatively along the second direction. Note that instead of fixing the first block 1011 by magnetic force, male and female recesses and protrusions may be formed on the first block 1011 and the second block 1012, and these may be coupled to each other to prevent rotation.

[0253] The third block 1013 has a screw hole that screws onto the threads of the screw shaft 102c, and is connected to the screw shaft 102c through the screw hole. On the other hand, the third block 1013 is not in contact with the first guide member 101. The third block 1013 is configured to move relative to the screw shaft 102c in the second direction as the screw shaft 102c rotates. Although the third block 1013 is not attached to the second block 1012, it is connected to the first block 1011, and is therefore fixed to the second block 1012 via the first block 1011.

[0254] Here, consider the case where a foreign object or the like is caught between the front surface of the head mounting member 61 and the rear surface of the analyzing casing 70 when the first and second guide members 101, 102 are moved so as to bring the stand 42 and the analyzing casing 70 closer together, that is, when attempting to transition from the second mode to the first mode in this embodiment (see FIGS. 17B and 17A). In this case, a force acts on the rear surface of the analyzing casing 70 to push the analyzing casing 70 forward (more generally, in a direction to move the analyzing casing 70 away from the stand 42). This force is propagated to the second guide member 102 and, by extension, via the screw shaft 102c to the first block 1011, and acts in a direction to move the first block 1011 away from the stand 42.

[0255] Here, as described above, the second block 1012 is arranged so as not to come into contact with the screw shaft 102c. Therefore, a force propagated due to a foreign object or the like being caught acts on the first block 1011 but does not act on the second block 1012. Therefore, this force acts against the attraction caused by the magnetic force so as to separate the first block 1011 from the second block 1012.

[0256] The first block 1011 according to this embodiment is configured to release the attraction by the magnetic force and allow separation from the second block 1012 when a force acting in a direction separating the first block 1011 from the second block 1012 reaches a predetermined value or greater (see FIG. 17C). Particularly in this embodiment, the first block 1011 and the second block 1012 are configured to be allowed to separate when the force acting to separate the first block 1011 from the second block 1012 exceeds the sum of the magnetic force, the biasing force of the biasing member 1014, and the frictional force acting between the support block 101c and the rail portion 102e.

[0257] When the first block 1011 and the second block 1012 move apart, the detection magnet housed in the first block 1011 and the Hall element sensor of the detection unit 1015 provided in the second block 1012 move relatively in the front-to-rear direction. The Hall element sensor outputs a detection signal based on this relative movement to the controller main body 2. The controller main body 2 generates a control signal based on the input detection signal and inputs the control signal to the actuator 102b to stop the sliding movement.

[0258] In this way, for example, if a foreign object or the like is caught between the front surface of the mounting member 61 and the rear surface of the analysis housing 70, the relative movement of the detection magnet with respect to the detection unit 1015 can be detected, thereby stopping the operation of the slide mechanism 65.

[0259] Additionally, a slide restricting portion 102g is inserted into the third bearing 102f, with its central axis aligned in the front-to-rear direction. This slide restricting portion 102g is configured as an adjustment screw that can advance and retreat relative to the third bearing 102f. The tip of the slide restricting portion 102g penetrates the third bearing 102f and protrudes forward. The tip of the slide restricting portion 102g comes into contact with the feed nut portion 101b, which has retreated relatively toward the third bearing 102f, thereby restricting the relative movement of the feed nut portion 101b.

[0260] The amount of protrusion of the slide restricting portion 102g can be adjusted manually, for example. This allows the position (particularly the position in the front-rear direction) of the reflective objective lens 74 in the first mode to be adjusted. Adjusting the position of the reflective objective lens 74 via the slide restricting portion 102g is effective in maintaining a eucentric relationship between the first mode and the second mode.

[0261] Incidentally, any misalignment that cannot be compensated for by simply adjusting the position using the slide restricting portion 102g can be compensated for by moving the mounting table 5 in the forward and backward directions via the mounting table driving portion 53. Control of the movement of the mounting table 5 will be described later.

[0262] The fixing portion 102d is attached to the upper surface of the front end portion of the second plate portion 102a. The fixing portion 102d is exposed from the analyzing housing 70 and is disposed on the upper surface of the protruding portion 70c.

[0263] The pair of upper and lower rail portions 102e are arranged to be spaced apart in the vertical direction and are each formed to extend in the front-to-rear direction. By connecting each rail portion 102e to a corresponding support block 101c, it becomes possible to slide the second guide member 102 in the front-to-rear direction relative to the first guide member 101. The pair of upper and lower rail portions 102e and the multiple support blocks 101c constitute a main part of the slide mechanism 65 (see also Figures 11 and 12).

[0264] The slide mechanism 65 defines a movable range of the second guide member 102 so that the second guide member 102 slides relatively between the first mode and the second mode. Specifically, the distance between the stand 42 and the center of the reflective objective lens 74 in the first mode (more specifically, the intersection of the analytical optical axis Aa and the reflective objective lens 74) is defined as a first distance, and the distance between the stand 42 and the center of the objective lens 92 in the second mode (more specifically, the intersection of the observation optical axis Ao and the objective lens 92) is defined as a second distance D2. The first distance D1 corresponds to the distance between the stand 42 and the analytical optical axis Aa when viewed in a plane perpendicular to the analytical optical axis Aa in the first mode. The second distance D2 corresponds to the distance between the stand 42 and the observation optical axis Ao when viewed in a plane perpendicular to the observation optical axis Ao in the second mode.

[0265] As shown in Figures 18A and 18B, the slide mechanism 65 of this embodiment defines the movable range of the second guide member 102 so that the first distance D1 and the second distance D2 are approximately equal (so that D1 = D2).

[0266] In this way, by setting the distance from the stand 42 to be constant in the first mode and the second mode, the point where the analysis optical axis Aa and the sample SP intersect in the first mode can be made to coincide with the point where the observation optical axis Ao and the sample SP intersect in the second mode. This makes it possible to approximately coincide the area where the analysis optical system 7 irradiates the sample SP with electromagnetic waves in the first mode (specifically, the area where the electromagnetic wave emitting part 71 irradiates the laser light) with the area where the observation optical system 9 observes the sample SP in the second mode (specifically, the area that the second camera 93 fits into the imaging field of view).

[0267] In this embodiment, the analysis optical axis Aa and the observation optical axis Ao extend parallel to each other while being aligned along the sliding direction (front-rear direction) achieved by the sliding mechanism 65. In this case, the sliding mechanism 65 defines the movable range of the second guide member 102 so that it is equal to or greater than the distance between the reflective objective lens 74 and the objective lens 92 in the front-rear direction.

[0268] Furthermore, the first guide member 101 is configured not to move when switching between the first mode and the second mode, so the relative positional relationship between the analysis optical axis Aa and the first guide member 101 in the first mode and the relative positional relationship between the observation optical axis Ao and the first guide member 101 in the second mode are substantially the same.

[0269] Specifically, as shown by a straight line L1 in Fig. 18A, in the first mode, the observation optical axis Ao is positioned between the pair of front and rear support blocks 101c (more specifically, at the midpoint between the pair of front and rear support blocks 101c). In the second mode, as shown by a straight line L2 in Fig. 18B, the analysis optical axis Aa is positioned between the pair of front and rear support blocks 101c (more specifically, at the midpoint between the pair of front and rear support blocks 101c). Note that the positions of the observation optical axis Ao and the analysis optical axis Aa in the front-to-rear direction correspond to the overlapping portion of the first guide member 101 and the second guide member 102, as indicated by the fact that both the straight lines L1 and L2 pass through the first and second guide members 101 and 102.

[0270] 23B, the protective cover 61b exposes the reflective objective lens 74 located on the analytical optical axis Aa in the first mode, and moves to shield the reflective objective lens 74 in the second mode in response to the operation of the slide mechanism 65 (in the illustrated example, only the analytical optical axis Aa is labeled with a reference symbol). Shielding the reflective objective lens 74 with the protective cover 61b suppresses unnecessary emission of laser light and also prevents dust and other particles from entering through gaps around the secondary mirror 74b. The protective cover 61b may be configured as a separate member from the head mounting member 61 and may be configured to be detachable from the head mounting member 61. Alternatively, the protective cover 61b may be configured to be attached to a member other than the head mounting member 61, such as the base 41 or the stand 42.

[0271] (Details of tilt mechanism 45) 24A and 24B are diagrams for explaining the operation of the tilting mechanism 45. Hereinafter, the tilting mechanism 45, including its relationship with the housing connector 64, will be further explained with reference to FIGS. 24A and 24B.

[0272] The tilting mechanism 45 is a mechanism constituted by the aforementioned shaft member 44 and the like, and is capable of tilting at least the observation optical system 9 out of the analysis optical system 7 and the observation optical system 9 with respect to a reference axis As perpendicular to the mounting surface 51a.

[0273] As described above, in this embodiment, the relative position of the observation optical axis Ao with respect to the analysis optical axis Aa is maintained by integrally connecting the analysis housing 70 and the observation housing 90 with the housing connector 64. Therefore, when the observation optical system 9 having the observation optical axis Ao is tilted, the analysis optical system 7 having the analysis optical axis Aa will tilt integrally with the observation optical system 9, as shown in Figures 24A and 24B.

[0274] In this way, the tilting mechanism 45 according to this embodiment is configured to tilt the analytical optical system 7 and the observation optical system 9 together while maintaining the relative position of the observation optical axis Ao with respect to the analytical optical axis Aa.

[0275] Furthermore, the operation of the slide mechanism 65 as a horizontal drive mechanism and the operation of the tilt mechanism 45 are independent of each other, and a combination of the two operations is permitted. Therefore, the slide mechanism 65 can move the relative positions of the observation optical system 9 and the analytical optical system 7 while maintaining at least the tilted attitude of the observation optical system 9 by the tilt mechanism 45. That is, in the analytical observation device A according to this embodiment, the head unit 6 can slide back and forth as indicated by the double-headed arrow A1 in Figure 24B while the observation optical system 9 remains tilted.

[0276] In particular, in this embodiment, the analytical optical system 7 and the observation optical system 9 are configured to tilt integrally, and therefore the slide mechanism 65 moves the relative positions of the observation optical system 9 and the analytical optical system 7 while maintaining the tilted state of both the observation optical system 9 and the analytical optical system 7 by the tilt mechanism 45.

[0277] Furthermore, the analytical observation device A is configured to be able to perform eucentric observation. That is, in the analytical observation device A, a three-dimensional coordinate system specific to the device is defined, which is formed by three axes parallel to the X direction, the Y direction, and the Z direction. The storage device 21b of the control unit 21 further stores the coordinates of an intersection position, which will be described later, in the three-dimensional coordinate system of the analytical observation device A. The coordinate information of the intersection position may be stored in the storage device 21b in advance when the analytical observation device A is shipped from the factory. Furthermore, the coordinate information of the intersection position stored in the storage device 21b may be updatable by the user of the analytical observation device A.

[0278] The observation optical axis Ao, which is the optical axis of the objective lens 92, intersects with the central axis Ac. When the objective lens 92 oscillates around the central axis Ac, the intersection position of the observation optical axis Ao and the central axis Ac is maintained constant, while the angle (tilt θ) of the observation optical axis Ao with respect to the reference axis As changes. In this way, when the user oscillates the objective lens 92 around the central axis Ac using the tilting mechanism 45, for example, if the observation target portion of the sample SP is at the above-mentioned intersection position, even if the objective lens 92 is tilted, a eucentric relationship is maintained in which the center of the field of view of the second camera 93 does not move from the same observation target portion. Therefore, it is possible to prevent the observation target portion of the sample SP from deviating from the field of view of the second camera 93 (the field of view of the objective lens 92). In this way, the observation optical system 9 according to this embodiment is configured to maintain a eucentric relationship.

[0279] In particular, in this embodiment, the analytical optical system 7 and the observation optical system 9 are configured to tilt integrally, so that the analytical optical axis Aa, which is the optical axis of the reflective objective lens 74, intersects with the central axis Ac, just like the observation optical axis Ao. When the reflective objective lens 74 oscillates around the central axis Ac, the angle (tilt θ) of the analytical optical axis Aa with respect to the reference axis As changes while the intersection position between the analytical optical axis Aa and the central axis Ac is maintained constant. By maintaining the intersection position between the analytical optical axis Aa and the central axis Ac constant, the analytical optical system 7 also maintains a eucentric relationship, just like the observation optical system 9.

[0280] In order to maintain a eucentric relationship between both the analysis optical system 7 and the observation optical system 9, in this embodiment, the reflective objective lens 74 is positioned so that the distance between the reflective objective lens 74 and the mounting table 5 in the first mode and the distance between the objective lens 92 and the mounting table 5 in the second mode are within a specified tolerance.

[0281] The distance (first observation distance) between the reflective objective lens 74 and the sample SP is adjusted to a predetermined distance through adjustment of the distance (second observation distance) between the objective lens 92 and the sample SP by at least one of the head driving unit 47 and the mounting table driving unit 53 as an observation distance adjustment mechanism.

[0282] In the first mode, the tilting mechanism 45 tilts the analytical optical system 7 integrally around the central axis Ac, which serves as the axis of rotation, so that the tilt angle (tilt θ) of the analytical optical axis Aa relative to the mounting table 5 changes while maintaining a eucentric relationship with respect to a predetermined position where the analytical optical axis Aa intersects with the sample SP by maintaining the first observation distance at a predetermined distance.

[0283] On the other hand, in the second mode, the tilting mechanism 45 tilts the observation optical system 9 integrally around the central axis Ac as a rotation axis so that the tilt angle (tilt θ) of the observation optical axis Ao relative to the mounting table 5 changes while maintaining a eucentric relationship with respect to a predetermined position where the observation optical axis Ao intersects with the sample SP by maintaining the second observation distance at a predetermined distance.

[0284] The analytical observation device A is provided with an observation distance measurement unit to measure the first observation distance and the second observation distance. The observation distance measurement unit can measure the distance using, for example, triangulation using laser light. The measurement results by the observation distance measurement unit are input to the controller main body 2. The controller main body 2 drives at least one of the head drive unit 47 and the mounting table drive unit 53 based on the measured first and second observation distances. Here, the observation distance measurement unit can be configured as a functional block of the control unit 21, such as the image processing unit 214 described below. Instead of measuring the distance using triangulation, the observation distance measurement unit can also measure the first observation distance and the second observation distance by determining the in-focus position using autofocus.

[0285] Furthermore, as described above, by setting the distance from the stand 42 to be constant (D1 = D2) in the first mode and the second mode, not only is the eucentric relationship maintained when viewed in each of the first mode and the second mode alone, but the eucentric relationship can also be maintained when switching between modes, such as when switching from the second mode to the first mode or vice versa. For example, when the tilt θ is set to a predetermined angle in the first mode, the point at which the analysis optical axis Aa and the sample SP intersect can be made to coincide with the point at which the observation optical axis Ao and the sample SP intersect when switching from that state to the second mode.

[0286] Furthermore, the distance between the reference axis As, which is the rotation axis of the mounting surface 51a, and the stand 42 is configured to coincide with a first distance D1 in the first mode and a second distance D2 in the second mode. With this configuration, in the non-tilted state, the analysis optical axis Aa coincides with the reference axis As in the first mode, and the observation optical axis Ao coincides with the reference axis As in the second mode. This allows the tilt mechanism 45 to be operated in the first mode, so that the intersection of the analysis optical axis Aa and the sample SP and the intersection of the reference axis As and the sample SP can be maintained in a coincident state. Similarly, the tilt mechanism 45 to be operated in the second mode, so that the intersection of the observation optical axis Ao and the sample SP and the intersection of the reference axis As and the sample SP can be maintained in a coincident state. This allows the eucentric relationship to be maintained regardless of the rotation angle of the mounting surface 51a in both the first mode and the second mode.

[0287] Furthermore, by matching the first distance D1 and the second distance D2 as described above, it is possible to match, for example, the point at which the analysis optical axis Aa and the sample SP intersect when the mounting surface 51a is rotated by a predetermined angle in the first mode with the point at which the observation optical axis Ao and the sample SP intersect when switching from that state to the second mode.

[0288] In this embodiment, the point where the central axis Ac and the reference axis As intersect, the point where the central axis Ac and the observation optical axis Ao intersect in the second mode, and the point where the central axis Ac and the analysis optical axis Aa intersect in the first mode are coincident. In addition, the reference axis As and the rotation axis of the mounting table 5 are coaxial. Therefore, even if the observation optical axis Ao or the analysis optical axis Aa is tilted relative to the reference axis As, or the mounting table 5 is rotated from the tilted state, a constant field of view can be maintained (a eucentric relationship can be maintained).

[0289] (Regarding the connection structure of the slide mechanism 65) Fig. 19A is a perspective view illustrating a connection structure between the second guide member 102 and the analyzing casing 70, and Fig. 19B is a diagram schematically illustrating the connection structure. Fig. 19A corresponds to a diagram illustrating a state in which the front surface 70b of the analyzing casing 70 is removed.

[0290] 11 and 12, the side surface of the second plate portion 102a facing inward in the fourth direction (the right side in the non-inclined state) is provided with a first connection portion 102i for connecting the second guide member 102 to the analyzing casing 70, and a second connection portion 102j for similarly connecting the second guide member 102 to the analyzing casing 70. The first connection portion 102i and the second connection portion 102j are arranged in the center portion of the side surface of the second plate portion 102a (the center portion in the second and third directions). The first connection portion 102i and the second connection portion 102j are aligned in the second direction.

[0291] The first connection part 102i is fastened to a partition (not shown) that divides the storage space for the analytical optical system 7 within the analytical housing 70, and is connected near the boundary between the first region R1 and the third region R3 shown in Figures 18A, 18B, and 19B.

[0292] The second connecting portion 102j is disposed closer to the tip (front) side in the second direction than the first connecting portion 102i, and is fastened to the inner wall of the analyzing casing 70 via a support member 103. As shown in Figures 19A and 19B, the support member 103 has a support main body 103a and a fastening hole 103c provided in the support main body 103a.

[0293] The support pillar body 103a is formed in a hollow columnar shape extending along the fourth direction. The support pillar body 103a extends from the second connection portion 102j of the second plate portion 102a to the inner wall portion 70f of the analyzing casing 70 located on the opposite side (right side) of the second guide member 102 in the fourth direction. In other words, the support pillar body 103a extends along the fourth direction from the first region R1, via the third region R3, to the second region R2.

[0294] The fastening hole 103c is disposed at the tip of the support main body 103a in the fourth direction (the end on the second region R2 side). By inserting a fastener such as a screw into the fastening hole 103c, the support member 103 can be connected to the inner wall portion 70f located in the second region R2 of the analyzing housing 70. This inner wall portion 70f is connected to the second guide member 102 via the support member 103.

[0295] In this way, by connecting the second guide member 102 via the support members 103, the second guide member 102 is connected to the analysis housing 70 at multiple locations spaced apart in its thickness direction (the fourth direction). This makes it possible to suppress bending deformation of the second guide member 102 (particularly bending deformation along the fourth direction) around the connecting portion of the first and second guide members 101, 102 as a fulcrum. This makes it possible to precisely position the slide mechanism 65 relative to the stand 42. This is effective in maintaining a eucentric relationship during operation in the first mode and the second mode, and when switching between modes.

[0296] Furthermore, by extending the support member 103 to the inner wall portion 70f located on the opposite side of the second guide member 102 in the fourth direction, the support member 103 can function as a support that suppresses bending when the first and second guide members 101, 102 are bent inward in the fourth direction. This is also effective in maintaining the eucentric relationship during operation in the first mode and the second mode, and when switching between modes.

[0297] <Details of controller body 2> Fig. 25 is a block diagram illustrating an example of the configuration of the controller main body 2. Fig. 26 is a block diagram illustrating an example of the configuration of the control unit 21. In the example shown in Fig. 25 etc., the controller main body 2 and the optical system assembly 1 are configured as separate entities, but the present disclosure is not limited to such a configuration. At least a part of the controller main body 2 may be provided in the optical system assembly 1.

[0298] As described above, the controller main body 2 according to this embodiment includes a control unit 21 that performs various processes, and a display unit 22 that displays information related to the processes performed by the control unit 21. The control unit 21 includes a processing unit 21a including a CPU, a system LSI, a DSP, etc., a storage unit 21b including a volatile memory, a non-volatile memory, etc., and an input / output bus 21c.

[0299] The control unit 21 is configured to be able to perform both the generation of image data of the sample SP based on the amount of light received from the sample SP and the analysis of substances contained in the sample SP based on the intensity distribution spectrum.

[0300] In detail, as illustrated in FIG. 25, the control unit 21 is electrically connected to at least a mouse 31, a console 32, a keyboard 33, a head driving unit 47, a mounting table driving unit 53, an electromagnetic wave emitting unit 71, an output adjusting means 72, an LED light source 79, a first camera 81, a shielding member 83, a ring light 92a, a second camera 93, an actuator 102b, a lens sensor Sw1, a first tilt sensor Sw2, and a second tilt sensor Sw3.

[0301] The control unit 21 electrically controls the head driving unit 47, the mounting table driving unit 53, the electromagnetic wave emitting unit 71, the output adjusting means 72, the LED light source 79, the first camera 81, the shielding member 83, the ring light 92a, the second camera 93, and the actuator 102b.

[0302] Furthermore, output signals from the first camera 81, the second camera 93, the lens sensor Sw1, the first tilt sensor Sw2, and the second tilt sensor Sw are input to the control unit 21. The control unit 21 performs calculations and the like based on the input output signals, and executes processing based on the calculation results.

[0303] For example, the control unit 21 calculates the tilt θ of the analytical optical system 7 with respect to the reference axis As perpendicular to the mounting surface 51a based on the detection signal of the first tilt sensor Sw2 and the detection signal of the second tilt sensor Sw3. If the tilt exceeds a predetermined threshold, the control unit 21 notifies the user with a warning or the like.

[0304] Furthermore, the control unit 21 can identify at least the type of objective lens 92 among the types of observation optical system 9 corresponding to the observation unit 9a fixed to the analysis optical system 7 by the housing connector 64, and can execute processing related to imaging of the sample SP based on the identification result. Here, the type of objective lens 92 can be identified based on the detection signal of the lens sensor Sw1. The control unit 21 can execute processing related to imaging of the sample SP, such as adjusting the exposure time of the second camera 93 and adjusting the brightness of the illumination light.

[0305] 26, the control unit 21 according to this embodiment includes a mode switching unit 211, a spectrum acquisition unit 212, a spectrum analysis unit 213, and an image processing unit 214. These elements may be realized by a logic circuit or by executing software.

[0306] -Mode switching unit 211- The mode switching unit 211 switches from the first mode to the second mode or from the second mode to the first mode by moving the analysis optical system 7 and the observation optical system 9 forward and backward in the horizontal direction (in this embodiment, the front-to-back direction).

[0307] Specifically, the mode switching unit 211 according to this embodiment reads in advance the distance between the observation optical axis Ao and the analysis optical axis Aa, which is stored in advance in the storage device 21b. Next, the mode switching unit 211 operates the actuator 102b of the slide mechanism 65 to move the analysis optical system 7 and the observation optical system 9 forward and backward.

[0308] Here, the mode switching unit 211 stops the advancement and retreat of the analytical optical system 7 and the observation optical system 9 at the timing when the movement amount of the observation optical system 9 and the analysis optical system 7 reaches the above-mentioned maximum movement amount.

[0309] After switching to the first mode by the mode switching unit 211, the head unit 6 can also be tilted.

[0310] Furthermore, although the mode switching unit 211 moves the slide mechanism 65 so that the relative positional relationship between the objective lens 92 and the mounting surface 51a in the second mode coincides with the relative positional relationship between the reflective objective lens 74 and the mounting surface 51a in the first mode, there is a possibility that a discrepancy may remain between the former relative positional relationship and the latter relative positional relationship due to component tolerances, etc.

[0311] Therefore, the mode switching unit 211 can compensate for the above-mentioned misalignment by adjusting the position of the mounting surface 51a via the mounting table driving unit 53. Here, the magnitude of the misalignment to be compensated for is recorded during the initial setup of the analytical observation device A and is stored in advance in the storage device 21b. Furthermore, the mode switching unit 211 is configured to adjust the position of the mounting surface 51a via the mounting table driving unit 53 after switching between the first mode and the second mode by the slide mechanism 65.

[0312] -Spectrum Acquisition Unit 212- The spectrum acquisition unit 212 acquires an intensity distribution spectrum by emitting laser light from the analytical optical system 7 in the first mode. Specifically, the spectrum acquisition unit 212 according to this embodiment emits laser light (ultraviolet laser light) as electromagnetic waves from the electromagnetic wave emitting unit 71, and irradiates the sample SP with this laser light via the reflective objective lens 74. When the sample SP is irradiated with laser light, the surface of the sample SP is locally converted into plasma, and when the sample returns from the plasma state to a gas or the like, light (electromagnetic waves) having energy corresponding to the width between energy levels is emitted from the electrons. The emitted light returns to the analytical optical system 7 via the reflective objective lens 74 and reaches the first camera 81, the first detector 77A, and the second detector 77B.

[0313] The light returned to the first camera 81 is used to generate image data by capturing the light returning from the sample SP, and the light returned to the first and second detectors 77A and 77B is used to generate an intensity distribution spectrum by separating the amount of received light for each wavelength by the spectrum acquisition unit 212. The intensity distribution spectrum generated by the spectrum acquisition unit 212 is input to the spectrum analysis unit 213.

[0314] The spectrum acquiring unit 212 synchronizes the light reception timing of the first and second detectors 77A and 77B with the emission timing of the laser light. By setting in this way, the spectrum acquiring unit 212 can acquire the intensity distribution spectrum in accordance with the emission timing of the laser light.

[0315] -Spectral Analysis Section 213- The spectrum analysis unit 213 performs a component analysis of the sample SP based on the intensity distribution spectrum generated by the spectrum acquisition unit 212. As already explained, when the LIBS method is used, the surface of the sample SP is locally converted into plasma, and the peak wavelength of the light emitted when the plasma state returns to a gas or the like has a unique value for each element (more precisely, the electron orbital of the electrons bound to the atomic nucleus). Therefore, by identifying the peak position of the intensity distribution spectrum, it is possible to determine that the element corresponding to that peak position is a component contained in the sample SP. Furthermore, by comparing the magnitudes of the peaks (peak heights), it is possible to determine the component ratio of each element, and also to estimate the composition of the sample SP based on the determined component ratio.

[0316] The analysis results from the spectrum analysis unit 213 can be displayed on the display unit 22 or stored in the storage device 21b in a predetermined format.

[0317] -Image processing unit 214- The image processing unit 214 can control the display mode on the display unit 22 based on image data (first image data) generated by the second camera 93 in the observation optical system 9, image data (second image data) generated by the first camera 81 in the analysis optical system 7, and the analysis results by the spectral analysis unit 213, etc.

[0318] In particular, image processing unit 214 according to this embodiment matches the area (for example, the center position of the area) captured by second camera 93 with the area (for example, the center position of the area) captured by first camera 81 before and after switching between the first mode and the second mode. Image processing unit 214 can adjust the display modes of first and second cameras 81, 93, and therefore the first and second image data generated by each camera 81, 93, so as to match the areas.

[0319] Additionally, the image processing unit 214 can also superimpose an indicator indicating the irradiation position of the laser light (more generally, the area irradiated with the electromagnetic wave) on the second image data.

[0320] <Specific example of control flow> Fig. 27 is a flowchart illustrating the basic operation of the analytical observation device A. Fig. 28 is a flowchart illustrating the procedure for analyzing the sample SP by the analytical optical system 7.

[0321] 27, a search for an analysis target is performed by the observation optical system 9 in the second mode. In this step S1, based on an operational input by the user, the control unit 21 searches for a portion (analysis target) to be analyzed by the analysis optical system 7 among the portions of the sample SP while adjusting conditions such as the exposure time of the second camera 93, the illumination light guided by the optical fiber cable C3, and the brightness of the image data (first image data) generated by the second camera 93. At this time, the control unit 21 saves the first image data generated by the second camera 93 as necessary.

[0322] The adjustment of the exposure time of the second camera 93 and the adjustment of the brightness of the illumination light can also be configured to be performed automatically by the control unit 21 based on the detection signal of the lens sensor Sw1, without requiring any operational input by the user.

[0323] During step S1, or before or after step S1, the observation optical system 9, and therefore the entire head unit 6, is tilted by the tilting mechanism 45, for example, based on a manual operation by the user, when searching for an analysis target. The control unit 21 detects the magnitude of the tilt θ at that time. The magnitude of the tilt θ may be displayed on the display unit 22 together with the first image data generated by the second camera 93.

[0324] In the following step S2, the mode switching unit 211 activates the slide mechanism 65 to slide the observation optical system 9 and the analysis optical system 7 together, thereby switching from the second mode to the first mode.

[0325] In the following step S3, the mode switching unit 211 activates the mounting table driving unit 53 to adjust the position of the mounting table 5. This position adjustment is performed in at least one direction among the front-rear direction, the left-right direction, and the up-down direction. By adjusting the position of the mounting table 5, the relative position of the sample SP with respect to the reflective objective lens 74 is adjusted. Note that a similar position adjustment may be performed when switching from the first mode to the second mode.

[0326] Subsequently, in step S4 of Fig. 27, in the first mode, component analysis of the sample SP is performed by the analytical optical system 7. The processing performed in step S4 is as shown in Fig. 28. That is, step S4 of Fig. 27 is made up of steps S41 to S46 of Fig. 28.

[0327] In this embodiment, the reflective objective lens 74 for component analysis has a shallower depth of field during observation than the objective lens 92 for observation. Therefore, in step S41 of FIG. 28, the control unit 21 in the controller main body 2 performs autofocus at various points in the second image data to generate an all-in-focus image. This allows the focus to be adjusted over substantially the entire second image data. At this time, the imaging conditions, such as the exposure time of the first camera 81 and the amount of illumination light emitted from the LED light source 79, are set as close as possible to the imaging conditions in the second mode.

[0328] Furthermore, when the magnification of the objective lens 92 is lower than that of the reflective objective lens 74, the image processing unit 214 described above can use the first image data saved in step S1 as a mapping image and display on the display unit 22 which part of the mapping image is captured as the second image data.

[0329] In the next step S42, the image processing unit 214 overlays a mark indicating the irradiation position of the laser light (laser irradiation point) on the second image data (not shown). This mark indicates the aim of the laser light. By checking the position of the mark, the user can confirm whether the analysis target has been set appropriately. The image processing unit 214 can proceed with the control process based on an operation input (e.g., manual input by the user) indicating the confirmation result.

[0330] Furthermore, in step S42, if the analysis target is not set appropriately, the head unit 6 drives the mounting table driving unit 53 based on, for example, an operation input by the user to adjust the position of the mounting table 5. This makes it possible to correct the relative position of the sample SP with respect to the mark.

[0331] In the following step S43, the control unit 21 stores the second image data immediately before irradiating the laser light in the storage device 21b, and in the following step S44, the control unit 21 causes the analysis optical system 7 to emit the laser light toward the sample SP.

[0332] In step S44, the first and second detectors 77A and 77B receive light emitted as a result of the sample SP being converted into plasma. The timing of receiving the light by the first and second detectors 77A and 77B is set to be synchronized with the timing of emitting the laser light. The spectrum acquisition unit 212 acquires the intensity distribution spectrum in accordance with the timing of emitting the laser light.

[0333] In the following step S45, the spectrum analysis unit 213 analyzes the intensity distribution spectrum to analyze the components and component ratios of elements contained in the sample SP and estimate the material based on the component ratios.

[0334] In the following step S46, the image processing unit 214 displays the analysis results acquired in step S45 on the display unit 22. Thereafter, the control unit 21 returns from the flow shown in Fig. 28 to the flow in Fig. 27, and the control process shown in Fig. 27 is also completed.

[0335] (Characteristic parts related to the slide mechanism 65) As described above, in the analytical observation device A according to this embodiment, as shown in Figures 18A and 18B, the analytical housing 70 and the observation unit 9a are moved integrally by the relative sliding of the first and second guide members 101, 102. Here, the reflective objective lens 74 housed in the analytical housing and the objective lens 92 of the observation unit 9a constitute independent optical systems 7, 9, respectively, and therefore the optical conditions of each optical system 7, 9 can be adjusted individually. This makes it possible to optimize the optical conditions for both analysis and observation.

[0336] Furthermore, the first guide member 101 can be attached to and detached from the stand 42 integrally with the second guide member 102. Because the second guide member 102 is connected to the analyzing casing 70, the first guide member 101 can be removed from the stand 42 together with the analyzing casing 70. This improves usability in attaching and detaching the analyzing casing 70.

[0337] 15 and other figures, the first and second guide members 101, 102 are configured such that the vertical direction is the longitudinal direction and the horizontal direction is the lateral direction. This configuration makes it possible to ensure a wide space adjacent to the first and second guide members 101, 102 in the horizontal direction (see, for example, FIG. 18A). This makes it possible to lay out the observation unit 9a without increasing the dimension in the sliding direction (front-rear direction) of the sliding mechanism 65. As a result, the amount of movement by the sliding mechanism 65 can be reduced.

[0338] Furthermore, by aligning the longitudinal direction along the vertical direction (up-down direction), it is possible to suppress bending deformation of the first and second guide members 101, 102 due to gravity acting on the first and second guide members 101, 102. This stabilizes the support of the analysis housing 70 and the observation unit 9a, and ultimately makes it possible to support the optical axes Aa, Ao of the objective lenses 74, 92 that each have without shaking.

[0339] 13 to 15, the first guide member 101 and the second guide member 102 are connected by a rail portion 102e and a support block 101c that are spaced apart along the vertical direction. Connecting them in this manner makes it possible to suppress rotation of the second guide member 102 relative to the first guide member 101 around a rotation axis perpendicular to the vertical direction (a rotation axis along the front-rear or left-right direction). This suppresses swinging of the second guide member 102 relative to the first guide member 101. This is particularly effective in a configuration in which a relatively large load acts on the second guide member 102, such as a configuration in which the second guide member 102 supports both the analyzing casing 70 and the observation unit 9a.

[0340] 18A and 18B, the slide mechanism 65 can slide the second guide member 102 between a first mode suitable for analyzing the sample SP and a second mode suitable for observing the sample SP, which is advantageous in terms of achieving both analysis and observation of the sample SP.

[0341] 18A and 18B, the movable range of the second guide member 102 is defined so that the first distance D1 and the second distance D2 are both the same. This definition allows the relative position of the reflective objective lens 74 and the sample SP to be approximately the same as the relative position of the objective lens 92 and the sample SP. As a result, it becomes possible to perform analysis, such as destructive testing, using electromagnetic waves at approximately the same position as the position observed by the objective lens 92. This makes it possible to maintain a eucentric relationship between the two modes, which is advantageous for simultaneously analyzing and observing the sample SP.

[0342] Furthermore, by making the distance between the reference axis As, which serves as the rotation axis, and the stand 42 coincide with the first and second distances D1 and D2, it is possible to maintain a eucentric relationship between the two modes even when the mounting table 5 is rotated. This is advantageous in terms of simultaneously analyzing and observing the sample SP.

[0343] Furthermore, as shown in Figures 18A and 18B, by defining the movable range of the second guide member to be equal to or greater than the distance between the two optical axes, it is advantageous for achieving both analysis and observation of the sample SP.

[0344] 18A and 18B, the portion of the first guide member 101 where the support block 101c is disposed and the portion of the second guide member 102 where the rail portion 102e is disposed overlap each other, particularly when viewed in the left-right direction (third direction). This overlapping portion has higher rigidity than other portions. By arranging the optical axes Ao and Aa of the two objective lenses 92 and 74 in such a highly rigid portion, it is possible to suppress the vibration of the optical axes Ao and Aa. This is effective in achieving both analysis and observation of the sample SP.

[0345] 23B, in the first mode in which light is collected by the reflective objective lens 74, the reflective objective lens 74 is shielded by the protective cover 61b, unlike in the second mode in which light is collected by the objective lens 92. This makes it possible to suppress leakage of laser light. This configuration is also effective in that it can suppress the intrusion of dust and the like through gaps in the reflective objective lens 74.

[0346] 18A and 18B, the analyzing casing 70 has an asymmetric shape in the fourth direction. Here, by accommodating the first and second guide members 101, 102 in the protrusion 70c provided in the first region R1 and arranging the protrusion 70c and the observation unit 9a side by side in the fourth direction, the dimensions of the head unit 6 in the front-to-back direction can be reduced compared to a configuration in which both elements are arranged along the front-to-back direction (second direction). This reduces the amount of relative movement between the first and second guide members 101, 102, which is advantageous for making the head unit 6 more compact.

[0347] Furthermore, by reducing the dimension of the head unit 6 in the front-to-rear direction, it is possible to move the center of gravity of the entire analyzing casing 70 and observing unit 9a closer to the stand 42 in the front-to-rear direction. This stabilizes the support of the analyzing casing 70 and observing unit 9a, and ultimately makes it possible to suppress the shaking of the analyzing optical axis Aa and the observing optical axis Ao. This is effective in achieving both analysis and observation of the sample SP.

[0348] Furthermore, by accommodating the detectors 77A and 77B in the second region R2, the dimension in the front-to-rear direction of the third region R3 is reduced, and a larger space can be secured for arranging the observation unit 9a. This is advantageous for bringing the first and second guide members 101 and 102 and the observation unit 9a closer together in the fourth direction. Bringing these elements closer together in the fourth direction stabilizes the support of the observation unit 9a by the first and second guide members 101 and 102, and ultimately makes it possible to suppress shaking of the optical axis Ao of the objective lens 92. This is effective for observing the sample SP.

[0349] Furthermore, the analytical housing 70 and the observation unit 9a are supported in a cantilevered state by the first and second guide members 101, 102 arranged in the first region R1. This makes it possible to secure a large space around the second region R2 on the opposite side in the left-right direction, and this space can be used as a work space (space for the user to perform manual work) for attaching and detaching the observation unit 9a. This improves the usability of the analytical observation device A.

[0350] 18A and 18B, the stand 42, the electromagnetic wave output unit 71, the analysis optical axis Aa, and the observation optical axis Ao are arranged in this order from the rear in the front-rear direction. By bringing the electromagnetic wave output unit 71 closer to the stand 42 in the front-rear direction, the center of gravity of the analyzing casing 70 and all of its contents becomes closer to the stand 42. This stabilizes the support of the analyzing casing 70 by the stand 42 (more specifically, the support via the first guide member 101), and ultimately makes it possible to suppress shaking of the optical axis Aa of the reflective objective lens 74. This is effective in analyzing the sample SP.

[0351] Furthermore, the stand 42 and the electromagnetic wave emitting part 71 are spaced apart as the first and second guide members 101, 102 move relative to each other. Therefore, heat can be dissipated from the electromagnetic wave emitting part 71 more effectively than in a configuration in which the electromagnetic wave emitting part 71 is disposed between the reflective objective lens 74 and the observation unit 9a in the front-rear direction, for example.

[0352] 8 and other figures, the observation housing 90 is disposed in the external space of the analyzing housing 70. This makes it easy to attach and detach the observation housing 90, which in turn improves the usability of the analyzing and observing device A.

[0353] 8 and 15, the observation housing 90 is supported by the second guide member 102 via the fixing portion 102d. By configuring the observation housing 90 to be supported directly by the second guide member 102 rather than by the analyzing housing 70, it is possible to stabilize the support of the observation unit 9a by the second guide member 102 and thereby suppress the shaking of the optical axis Ao of the objective lens 92. This is effective in observing the sample SP.

[0354] (Other features) -Configuration related to observation assembly 1'- Fig. 29 is a perspective view illustrating an observing assembly 1' of the analytical observation device A. Fig. 30 is a perspective view illustrating an inserting section 661 as a third mounting structure, and Fig. 31 is a plan view showing a comparison between the optical system assembly 1 and the observing assembly 1' of the analytical observation device A. Note that the controller main body 2 is omitted from the illustration in Figs. 29 and 31.

[0355] In the above embodiment, an optical system assembly 1 assembled to be used as both an analytical device and an observation device was disclosed. In the analytical observation device A according to the present disclosure, by reusing at least some of the elements of this optical system assembly 1, such as the stage 4 and the observation housing 90, the optical system assembly 1 can be recombined into an observation assembly 1' specialized for observation functions, as shown in Fig. 29. In this case, the analytical observation device A will be used as a magnification observation device.

[0356] In detail, the stand 42 according to the embodiment is provided with a rail portion 43a as a first mounting structure for mounting the analysis housing 70, while the analysis housing 70 is provided with an insertion portion 61d as a second mounting structure that fits into the rail portion 43a.

[0357] An observation housing holder 66 for holding an observation housing 90 can also be attached to the stand 42 according to this embodiment, instead of the analysis housing 70. This observation housing holder 66 includes a base 66a connected to the stand 42 common to the previous embodiment, and a holder 66b connected to the base 66a and holding the observation housing 90.

[0358] As shown in Figure 30, the base portion 66a has an insertion portion 661 as a third mounting structure that fits into the rail portion 43a, an arm portion 662 extending from the insertion portion 661 along the second direction, and a support portion 663 provided at the tip of the arm portion 662.

[0359] The insertion portion 661 is formed in the shape of a rectangular plate that extends along the first and third directions. Like the insertion portion 61d of the analyzing housing 70, the insertion portion 661 can be inserted into the rail portion 43a from above. The dimensions of the insertion portion 661 in the first and third directions and the plate thickness of the insertion portion 661 in the second direction are substantially the same as those of the insertion portion 61d. The insertion portion 661 is fixed to the stand 42 by operating the lock lever 43b while inserted into the rail portion 43a.

[0360] The arm portion 662 is formed to extend forward from the front surface of the insertion portion 661. A support portion 663 is provided on the upper surface of the tip of the arm portion 662. The support portion 663 is formed in a columnar shape extending upward along the first direction so that the WD of the observation unit 9a can be adjusted.

[0361] The holding portion 66b has a first connecting portion 664 that is inserted into the support portion 663 and attached to the outer circumferential surface of the support portion 663, and a second connecting portion 665 that is disposed in front of the first connecting portion 664 and grips the observation housing 90 (shown only in FIG. 29 ). Similar to the housing connector 64, the second connecting portion 665 is configured to be able to adjust the rotation angle and positioning of the observation housing 90. With the base portion 66a fixed to the stand 42, the first connecting portion 664 is attached to the support portion 663 and the second connecting portion 665 grips the observation housing 90, thereby attaching the observation housing 90 to the stand 42 via the observation housing holder 66 and simultaneously realizing the observation assembly 1′.

[0362] In this way, the analytical observation device A can be used in either a first assembly state, which includes an optical system assembly 1 that combines analytical and observation functions, or a second assembly state, which includes an observation assembly 1' that is specialized for observation functions, depending on the user's needs. The stand 42 is common to both the first and second assembly states.

[0363] Here, the relative position between the stand 42 and the observation optical axis Ao can be adjusted by changing the length of the arm portion 662 in the front-to-rear direction and the position of the support portion 663 on the arm portion 662. In particular, in this embodiment, if the distance between the stand 42 and the observation optical axis Ao when the observation assembly 1' is viewed in a plane perpendicular to the observation optical axis Ao is defined as a third distance D3, this third distance D3 is adjusted to match the distance between the stand 42 and the observation optical axis Ao (i.e., the second distance D2) when the optical system assembly 1 (particularly the optical system assembly 1 in the second mode) is viewed in a plane perpendicular to the observation optical axis Ao, as shown in Fig. 31 . The third distance D3 also matches the first distance D1.

[0364] By making such adjustments, it is possible to observe the sample SP in the second assembled state with the same usability as in the analysis and observation in the first assembled state.

[0365] -Configuration related to swing-type observation unit 9b- FIG. 32 is a view corresponding to FIG. 4, illustrating a state in which the swing-type observation unit 9b is attached.

[0366] In the above embodiment, an observation unit 9a equipped with a single objective lens 92 is illustrated as shown in Fig. 6, but the present disclosure is not limited to such an observation unit 9a. A swing-type observation unit 9b (hereinafter also referred to as a "swing-type unit") as shown in Fig. 32 may be attached to the observation housing 90.

[0367] The swing type unit 9b has a first lens portion 911 that houses one objective lens, and a second lens portion 912 that houses another objective lens. The swing type unit 9b is configured to be swingable about a swing axis Ax that is perpendicular to the plane of the paper in Fig. 32, and can be used in either a state where the first lens portion 911 faces the mounting surface 51a or a state where the second lens portion 912 faces the mounting surface 51a.

[0368] Here, the oscillation axis Ax is configured to extend parallel to the central axis Ac and perpendicular to the reference axis As. When the oscillation axis Ax configured in this manner is used, for example, when the first lens unit 911 faces the mounting surface 51a, the second lens unit 912 is located to the side of the first lens unit 911, for example, on the left side, as shown in Fig. 32. In this case, there is a concern that the protrusion 70c provided on the analyzing housing 70 may interfere with the second lens unit 912.

[0369] Therefore, the protrusion 70c according to this embodiment is not provided near the lower end of the analyzing casing 70, but is provided in the central portion in the first direction (the central portion in the up-down direction) of the portion of the analyzing casing 70 that belongs to the first region R1. In this way, by intentionally configuring the lower end of the analyzing casing 70 not to protrude, it becomes possible to perform observation of the sample SP using the swing-type unit 9b without any hindrance. This structure is also effective when using a rotating-type observation unit that can switch objective lenses using a revolver, instead of the swing-type (oscillating-type) observation unit 9b.

[0370] Other Embodiments In the above embodiment, the analysis optical system 7 is configured to tilt integrally with the observation optical system 9, but the present disclosure is not limited to such a configuration. The tilting mechanism 45 is only required to tilt at least the observation optical system 9. When configured to tilt only the observation optical system 9, the laser light as an electromagnetic wave is emitted downward from directly above the sample SP.

[0371] In the above embodiment, the slide mechanism 65 is configured to move the observation optical system 9 and the analysis optical system 7, rather than the mounting table 5, when moving the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting table 5. This configuration can suppress vibration of the mounting table 5 and reduce fluctuations in the position of the observation object that occur as the mounting table 5 moves. However, the present disclosure is not limited to this configuration. Furthermore, it is also possible to move both the observation optical system 9 and the analysis optical system 7 together, and to move the mounting table 5, so that the same location can be observed and analyzed.

[0372] In the above embodiment, the analytical optical system 7 is supported from behind by the stand 42, and the observation optical system 9 is arranged in front of the analytical optical system 7. However, the present disclosure is not limited to such a configuration. The observation optical system 9 may be arranged between the stand 42 and the analytical optical system 7.

[0373] In the above embodiment, the first guide member 101 and the stand 42 are configured as separate bodies, but the present disclosure is not limited to such a configuration. The first guide member 101 and the stand 42 may be configured as an integrated body.

[0374] In the above embodiment, the first guide member 101 and the second guide member 102 are configured so that their longitudinal directions are aligned with the vertical direction and so that they support the analyzing housing 70 and the observing housing 90 in a cantilevered manner from one side in the left-right direction, but the present disclosure is not limited to such a configuration. For example, the longitudinal directions of the first guide member 101 and the second guide member 102 may be aligned with the left-right direction, or they may be configured so that they support the analyzing housing 70 and the observing housing 90 from both sides in the left-right direction.

[0375] In addition, in the above embodiment, the first guide member 101 is provided with the support block 101c as a support member, while the second guide member 102 is provided with the rail portion 102e, but the present disclosure is not limited to such a configuration. For example, the first guide member 101 may be provided with a rail portion, while the second guide member 102 may be provided with a support member.

[0376] Furthermore, in the above embodiment, the observation housing 90 is configured to be supported by the outer surface of the analysis housing 70, but the present disclosure is not limited to such a configuration. The observation housing 90 or the observation unit 9a may be configured to be supported by the inner surface of the analysis housing 70. In this case, the observation housing 90 or the observation unit 9a will be housed in the analysis housing 70, similar to the analysis optical system 7.

[0377] In addition, in the above embodiment, the second guide member 102 and the observation housing 90 may be connected to each other, and the analyzing housing 70 may be held by this observation housing 90. In this case, the analyzing housing 70 is indirectly connected to the second guide member 102 via the observation housing 90.

[0378] In the above embodiment, the observation optical axis Ao and the analysis optical axis Aa are configured to be parallel to each other, but the present disclosure is not limited to such a configuration. The analysis optical system 7 and the observation optical system 9 can also be arranged so that the observation optical axis Ao and the analysis optical axis Aa are skewed relative to each other.

[0379] (Variations of the analysis method) The analytical observation device A according to the embodiment is configured to perform component analysis using the LIBS method by emitting laser light as electromagnetic waves from the electromagnetic wave emitting section 71, but the present disclosure is not limited to such a configuration.

[0380] For example, infrared spectroscopy may be used instead of LIBS by using infrared light as the electromagnetic wave. Specifically, the chemical structure of the molecules contained in the object of observation may be analyzed by irradiating the object with infrared light and measuring the transmitted or reflected light. Raman spectroscopy may be used to examine the properties of the object of observation using monochromatic light as the electromagnetic wave and the Raman scattered light generated by irradiating the object of observation with monochromatic light. Furthermore, ultraviolet-visible-near-infrared spectroscopy may be used by using ultraviolet, visible, and infrared light in the ultraviolet, visible, and infrared regions of approximately 180 to 3000 nm as the electromagnetic wave. Specifically, qualitative and quantitative analysis of target components contained in the object of observation may be performed by irradiating the object of observation with electromagnetic waves and measuring the transmitted or reflected light. Furthermore, spectroscopic analysis in the X-ray region may be performed by using X-rays as the electromagnetic wave. Specifically, fluorescent X-ray analysis may be performed by irradiating the object of observation (sample) with X-rays and analyzing the elements of the object of observation based on the energy and intensity of the fluorescent X-rays generated by the irradiation. Instead of electromagnetic waves, an electron beam may be used, and the surface of the object to be observed may be analyzed based on the energy and intensity of the reflected electrons generated by irradiating the object with the electron beam. The configuration according to the present disclosure is also applicable to such spectroscopy. [Explanation of symbols]

[0381] A. Analysis and observation equipment (analysis equipment) 1 Optical Assembly 1' Observation assembly 2 Controller body 21 Control section 22 Display section 4 Stages 41 Base 42 Stand 5. Mounting table 51a Placement surface 6 Head 61b Protective cover 64 Housing connector 65 Slide mechanism 66 Observation housing holder 7 Analytical optical system 70 Analysis cabinet 70c protrusion 71 Electromagnetic wave emission section 74 Reflective Objective Lens (First Objective Lens) 77A First detector (detector) 77B Second detector (detector) 81 First Camera (Camera) 9 Observation optical system 9a Observation Unit 90 Observation enclosure 92 Objective Lens (Second Objective Lens) 93 Second Camera (Camera) 101 first guide member 101b Feed nut part 1011 Block 1 1012 Block 2 1015 Detector 101c Support block (support member) 102 second guide member 102c screw shaft 102d Fixed part 102e Rail section Aa Analysis optical axis (optical axis of the first objective lens) Ao Observation optical axis (optical axis of the second objective lens) As reference axis (rotation axis) D1 First distance D2 Second distance R1 First Region R2 Second Region R3 The third region SP sample (analyte)

Claims

1. An analytical device for performing component analysis of an object to be analyzed, With the base, a stand connected to the base and extending in a first direction, which is a vertical direction; a mounting table supported by the base or the stand and having a mounting surface on which the object to be analyzed is placed; an analysis housing that houses a first objective lens that collects light from the analysis object placed on the placement stage; an observation unit held by the analysis housing and having a second objective lens that collects light from the object to be analyzed; a first guide member connected to the stand and extending in a second direction perpendicular to the first direction; a second guide member connected to the analyzing housing and coupled to the first guide member in a state in which the second guide member is relatively slidable along the second direction; The analyzing housing and the observation unit are configured to move integrally in response to the sliding of the second guide member relative to the first guide member. An analytical device characterized by:

2. 2. The analytical device according to claim 1, the first guide member is separate from the stand, The first guide member is configured to be detachable from the stand together with the second guide member and the analysis housing. An analytical device characterized by:

3. 3. The analyzer according to claim 1, The first and second guide members are each configured such that a dimension in a third direction perpendicular to the first and second directions is shorter than a dimension in the first direction. An analytical device characterized by:

4. 4. The analyzer according to claim 1, a pair of rail portions provided on one of the first and second guide members, spaced apart in the first direction, and each extending along the second direction; a plurality of support members provided on the other of the first and second guide members, each supporting the rail portion in a slidable manner; The rail portion and the support member constitute a slide mechanism that slides the second guide member along the second direction relative to the first guide member. An analytical device characterized by:

5. 5. The analytical device according to claim 4, The slide mechanism is a feed nut portion provided on the first guide member; a screw shaft provided in the second guide member and inserted into the feed nut portion, The feed nut portion is a first block that is threadedly engaged with the threaded shaft and that moves the threaded shaft relatively along the second direction as the threaded shaft rotates; a second block disposed between the first block and the stand in the second direction and fixed to the first guide member in a state of not contacting the screw shaft; a detection unit that detects a separation between the first block and the second block, one of the first and second blocks attracts the other by magnetic force; The slide mechanism is configured to release the magnetic attraction when a force acting in a direction separating the first and second blocks from each other reaches a predetermined value or greater. An analytical device characterized by:

6. 6. The analyzer according to claim 4 or 5, The slide mechanism is a first state in which the first objective lens faces a measurement field of view on the mounting table; a second state in which the second objective lens is made to face the measurement field of view on the mounting table; The movable range of the second guide member is defined so that the second guide member can slide between An analytical device characterized by:

7. 7. The analytical device according to claim 6, When the distance between the stand and the center of the first objective lens in the first state is defined as a first distance, and the distance between the stand and the center of the second objective lens in the second state is defined as a second distance, The slide mechanism defines a movable range of the second guide member so that the first distance and the second distance are substantially equal to each other. An analytical device characterized by:

8. 8. The analytical device according to claim 7, the mounting surface is configured to be rotatable around a predetermined rotation axis, The distance between the stand and the rotation axis is In the first state, the distance corresponds to the first distance; In the second state, the distance corresponds to the second distance. An analytical device characterized by:

9. The analytical device according to any one of claims 6 to 8, the optical axis of the first objective lens and the optical axis of the second objective lens extend parallel to each other while being aligned along the second direction; The slide mechanism defines a movable range of the second guide member so that the movable range is equal to or greater than a distance between the optical axes of the first objective lens and the second objective lens in the second direction. An analytical device characterized by:

10. The analytical device according to any one of claims 6 to 9, the rail portion is provided on the second guide member, the support member is provided on the first guide member and includes a pair of members spaced apart along the second direction, In the first state, the optical axis of the first objective lens is disposed between the pair of members, while in the second state, the optical axis of the second objective lens is disposed between the pair of members. An analytical device characterized by:

11. The analytical device according to any one of claims 1 to 10, The analysis housing includes: an electromagnetic wave emitting unit that emits electromagnetic waves for analyzing the object to be analyzed; a detector that generates an intensity distribution spectrum, which is an intensity distribution for each wavelength of the electromagnetic waves generated in the object to be analyzed, The first objective lens focuses the electromagnetic waves emitted by the electromagnetic wave emitting unit and irradiates the object to be analyzed, and also focuses the electromagnetic waves generated in the object to be analyzed and guides them to the detector. An analytical device characterized by:

12. The analytical device according to claim 11, a protective cover that shields the first objective lens is connected to the first guide member; The protective cover moves in accordance with the relative sliding movement of the first and second guide members. When light is collected by the first objective lens, the first objective lens is exposed, and When the second objective lens is used for focusing light, the second objective lens is moved so as to block the first objective lens. An analytical device characterized by:

13. 13. The analytical device according to claim 11 or 12, the first objective lens has an optical axis extending perpendicular to the second direction; The analysis housing includes: a first region disposed on one side of the optical axis and a fourth direction perpendicular to the second direction; a second region disposed on the other side in the fourth direction; a third region disposed between the first and second regions in the fourth direction; a protruding portion that protrudes along the second direction and accommodates the second guide member is provided in the first region; the second region accommodates the detector; a camera that captures an image of the object to be analyzed through the first objective lens is accommodated in the third area; The observation unit is disposed adjacent to the protrusion along the fourth direction. An analytical device characterized by:

14. 14. The analytical device according to claim 13, the protrusion and the observation unit are disposed so as to be farther from the stand than the first objective lens in the second direction; The electromagnetic wave emitting unit is disposed between the first objective lens and the stand in the second direction. An analytical device characterized by:

15. 15. The analytical device according to claim 13 or 14, an observation housing that houses the second objective lens and a camera that captures an image of the object to be analyzed by detecting an amount of light received from the object to be analyzed through the second objective lens; The observation housing is disposed outside the analysis housing. An analytical device characterized by:

16. 16. The analytical device according to claim 15, the observation housing is held to the analysis housing via a housing connector separate from the observation housing, a fixing portion integrally provided with the second guide member is disposed on an upper surface or a lower surface of the second guide member; The housing connector is supported by the second guide member via the fixing portion. An analytical device characterized by:

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