Apparatus and method for recirculating a fluid

Abstract

An apparatus for recirculating a fluid in a semiconductor system is provided. The apparatus includes a base portion, an inlet portion coupled to a first end of the base portion, and a nozzle coupled to a second end of the base portion. The nozzle includes a spiral groove extending from a position near the nozzle base portion to a position near a tip of the nozzle portion. The spiral groove extends from an outer surface through the nozzle portion to an inner surface of the nozzle portion. A method for using the apparatus in a semiconductor recirculation system is also disclosed.

Description

[Technical Field]

[0001] This application claims priority under 35 U.S.C. §119(e) to U.S. Provisional Patent Application No. 62 / 774,156, filed November 30, 2018, and U.S. Provisional Patent Application No. 62 / 892,847, filed August 28, 2019, which are incorporated herein by reference in their entireties.

[0002] The present invention relates generally to apparatus for recirculating fluids in the semiconductor industry, and more particularly, but not exclusively, to an apparatus for use with semiconductor CMP slurry feedstocks or similar materials to achieve highly uniform mixing in a short time with minimal or no detrimental effect on the slurry integrity of the dispensed material. [Background technology]

[0003] Currently, mechanical mixers are inserted into 55 gal (200 L) drums to supplement the simple recirculation of solids and liquids (CMP polishing slurry) within the drum to maintain homogeneity. The use of mechanical mixers can be detrimental to the integrity of the slurry by shearing the particles within the mixer. Therefore, what is needed is the elimination of the addition of mechanical mixers. In addition, the elimination of roller or tumbler premixing for the drums, and at least the elimination of the roller / tumbler function to maintain consistent homogeneity for the long periods of time while the material in the drum awaits use. Summary of the Invention [Problem to be solved by the invention]

[0004] Aspects of the present invention provide an apparatus for recirculating fluids in the semiconductor industry, and a method for using the same. [Means for solving the problem]

[0005] In one aspect, provided herein is an apparatus comprising a base portion, an inlet portion coupled to a first end of the base portion, and a nozzle member coupled to a second end of the base portion.

[0006] In another aspect, provided herein is a method for recirculating a fluid, including obtaining an apparatus. The apparatus includes a base portion, an inlet portion, a coupling portion connecting the inlet portion to the base portion at a first end, and a nozzle member coupled to the base portion at a second end. The method may also include coupling the apparatus to a recirculation system. The method may further include passing the semiconductor slurry through the recirculation system into a storage drum.

[0007] In yet another aspect, provided herein is a method of using an apparatus including coupling the apparatus to a semiconductor recycling system. The apparatus includes a base portion, an inlet portion coupled to a first end of the base portion, and a nozzle coupled to a second end of the base portion, the nozzle having a spiral groove. The method also includes discharging a slurry through the base portion of the apparatus and from the nozzle into a storage vessel.

[0008] These and other objects, features and advantages of the present invention will become apparent from the following detailed description of various aspects of the invention taken in conjunction with the accompanying drawings. The present invention provides, for example, the following items. (Item 1) The base part and an inlet portion coupled to a first end of the base portion; a nozzle coupled to a second end of the base portion; and An apparatus comprising: (Item 2) The base portion is A first part; a second portion coupled to the first portion, the first portion being at an angle relative to the second portion; and Item 1. The device according to item 1, comprising: (Item 3) 3. The device according to item 2, wherein the angle of the first portion relative to the second portion is between 90 degrees and 160 degrees. (Item 4) The base portion is a connecting portion coupled to the first portion at a first end and to the second portion at a second end; Item 3. The device of item 2, further comprising: (Item 5) Item 5. The device of item 4, wherein the base portion is angled at the connection. (Item 6) The inlet portion a first inlet portion; a second entrance portion; an inlet connection having a first end and a second end, the first end being received in the first inlet portion and the second end being received in the second inlet portion to couple the first inlet portion to the second inlet portion; and Item 3. The device according to item 2, comprising: (Item 7) 7. The device of claim 6, wherein the first inlet portion tapers from the first end to the second end. (Item 8) 7. The apparatus of claim 6, wherein the inlet connection has an outer diameter that is smaller than the outer diameter of the first inlet portion and the outer diameter of the second inlet portion. (Item 9) The nozzle A nozzle base portion; a nozzle inlet at a first end of the base portion; a nozzle portion extending from an outer surface of the nozzle base portion between the first end and the second end of the nozzle base portion; Item 7. The device according to item 6, comprising: (Item 10) 10. The device of claim 9, wherein the nozzle portion tapers as it extends from the second base portion to a tip. (Item 11) The nozzle portion a spiral groove extending from a position adjacent the nozzle base portion to a position adjacent the tip of the nozzle portion; Item 10. The device according to item 9, comprising: (Item 12) Item 12. The apparatus of item 11, wherein the spiral groove extends from an outer surface through the nozzle portion to an inner surface of the nozzle portion. (Item 13) a coupling portion coupled at a first end to the second inlet portion and at a second end to the first portion of the base portion; Item 12. The device of item 11, further comprising: (Item 14) The coupling portion is a first coupling portion; a second coupling portion; and a connector having a first end and a second end, the first end being received in the first coupling portion and the second end being received in the second coupling portion to couple the first coupling portion to the second coupling portion; Item 14. The device according to item 13, comprising: (Item 15) 1. A method of using an apparatus, comprising: coupling a first apparatus to a semiconductor recycling system, the first apparatus comprising: The first base part, a first inlet portion coupled to a first end of the first base portion; and a first nozzle coupled to the second end of the first base portion, the first nozzle having a spiral groove; and passing the slurry through the first base portion of the first device and out the first nozzle into a storage vessel; A method comprising: (Item 16) the semiconductor recycling system comprises: a storage vessel for holding the slurry; a recirculation loop comprising a fluid line; a pump for pumping the slurry from the storage vessel, through the fluid line and the first nozzle, and back into the storage vessel to mix the slurry; Item 16. The method of item 15, comprising: (Item 17) Item 17. The method of item 16, wherein the first nozzle tapers between the nozzle base and the nozzle tip. (Item 18) Item 16. The method of item 15, wherein the spiral groove extends from an outer surface through the first nozzle to an inner surface. (Item 19) obtaining periodic samples of the slurry from the fluid line of the recirculation loop using a sample valve. Item 19. The method of item 18, further comprising: (Item 20) monitoring the flow pressure of the slurry in the fluid line with a pressure gauge; monitoring the volumetric flow rate using a rotameter; Item 19. The method of item 18, further comprising: (Item 21) Item 17. The method of item 16, wherein the storage container is a dispensing tank, the recirculation system is coupled to the dispensing tank, and the first nozzle is disposed inside the dispensing tank. (Item 22) a second base part; a second inlet portion coupled to a first end of the second base portion; a second nozzle coupled to a second end of the second base portion, the second nozzle having a spiral groove; Equipped with At least one second device 22. The method according to item 21, comprising: (Item 23) Item 23. The method of item 22, wherein the at least one second device is coupled to the recirculation system, the second nozzle is disposed inside the dispensing tank, and the second nozzle is disposed radially spaced apart from the first nozzle. (Item 24) The base part and an inlet portion coupled to a first end of the base portion; a nozzle coupled to a second end of the base portion; and An apparatus comprising: (Item 25) The base portion A first part; a second portion coupled to the first portion, the first portion being at an angle relative to the second portion; and Item 25. The device according to item 24, comprising: (Item 26) Item 26. The device according to item 25, wherein the angle of the first portion relative to the second portion is between 90 degrees and 160 degrees. (Item 27) The base portion is a connecting portion coupled to the first portion at a first end and to the second portion at a second end; 27. The apparatus of any one of items 24 to 26, further comprising: (Item 28) 28. The device according to any one of items 24 to 27, wherein the base portion is angled at the connection portion. (Item 29) The inlet portion a first inlet portion; a second entrance portion; an inlet connection having a first end and a second end, the first end being received in the first inlet portion and the second end being received in the second inlet portion to couple the first inlet portion to the second inlet portion; and 29. The device according to any one of items 24 to 28, comprising: (Item 30) 30. The apparatus of any one of items 24 to 29, wherein the first inlet portion tapers from the first end to the second end. (Item 31) 31. The apparatus of any one of items 24 to 30, wherein the inlet connection has an outer diameter that is smaller than the outer diameter of the first inlet portion and the outer diameter of the second inlet portion. (Item 32) The nozzle A nozzle base portion; a nozzle inlet at a first end of the base portion; a nozzle portion extending from an outer surface of the nozzle base portion between the first end and the second end of the nozzle base portion; 32. The device according to any one of items 24 to 31, comprising: (Item 33) 33. The device of any one of items 24 to 32, wherein the nozzle portion tapers as it extends from the second base portion to a tip. (Item 34) The nozzle portion a spiral groove extending from a position adjacent the nozzle base portion to a position adjacent the tip of the nozzle portion; 34. The device according to any one of items 24 to 33, comprising: (Item 35) 35. The apparatus of any one of items 24 to 34, wherein the spiral groove extends from an outer surface through the nozzle portion to an inner surface of the nozzle portion. (Item 36) a coupling portion coupled at a first end to the second inlet portion and at a second end to the first portion of the base portion; 36. The apparatus of any one of items 24 to 35, further comprising: (Item 37) The coupling portion is a first coupling portion; a second coupling portion; and a connector having a first end and a second end, the first end being received in the first coupling portion and the second end being received in the second coupling portion to couple the first coupling portion to the second coupling portion; 37. The device according to any one of items 24 to 36, comprising: (Item 38) 1. A method of using an apparatus, comprising: coupling a first apparatus to a semiconductor recycling system, the first apparatus comprising: The first base part, a first inlet portion coupled to a first end of the first base portion; and a first nozzle coupled to the second end of the first base portion, the first nozzle having a spiral groove; and passing the slurry through the first base portion of the first device and out the first nozzle into a storage vessel; A method comprising: (Item 39) the semiconductor recycling system comprises: a storage vessel for holding the slurry; a recirculation loop comprising a fluid line; a pump for pumping the slurry from the storage vessel, through the fluid line and the first nozzle, and back into the storage vessel to mix the slurry; Item 39. The method of item 38, comprising: (Item 40) 40. The method of claim 38 or 39, wherein the first nozzle tapers between the nozzle base and the nozzle tip. (Item 41) 41. The method of any one of items 38 to 40, wherein the spiral groove extends from an outer surface through the first nozzle to an inner surface. (Item 42) obtaining periodic samples of the slurry from the fluid line of the recirculation loop using a sample valve. 42. The method of any one of items 38 to 41, further comprising: (Item 43) monitoring the flow pressure of the slurry in the fluid line with a pressure gauge; monitoring the volumetric flow rate using a rotameter; 43. The method of any one of items 38 to 42, further comprising: (Item 44) Item 44. The method of any one of items 38 to 43, wherein the storage container is a dispensing tank, the recirculation system is coupled to the dispensing tank, and the first nozzle is disposed inside the dispensing tank. (Item 45) a second base part; a second inlet portion coupled to a first end of the second base portion; a second nozzle coupled to a second end of the second base portion, the second nozzle having a spiral groove; Equipped with At least one second device 45. The method of any one of items 38 to 44, comprising: (Item 46) 46. The method of any one of items 38 to 45, wherein the at least one second device is coupled to the recirculation system, the second nozzle is disposed inside the dispensing tank, and the second nozzle is disposed radially spaced apart from the first nozzle.

[0009] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the present invention and, together with the detailed description herein, serve to explain the principles of the present invention. The drawings are merely for the purpose of illustrating preferred embodiments and are not to be construed as limiting the present invention. It should be noted that, in accordance with standard industry practice, various features have not been drawn to scale. In fact, the dimensions of various features may be arbitrarily increased or decreased for clarity of discussion. The above and other objects, features, and advantages of the present invention will become apparent from the following detailed description taken in conjunction with the accompanying drawings. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a perspective view of a mixing device according to one embodiment of the present invention. [Figure 2] 2 is a side perspective view of the device of FIG. 1 according to one embodiment of the present invention. [Figure 3] 2 is a top perspective view of the device of FIG. 1 according to one embodiment of the present invention. [Figure 4] 2 is a first side view of the device of FIG. 1 according to one embodiment of the present invention. [Figure 5] 2 is a second side view of the device of FIG. 1 according to one embodiment of the present invention. [Figure 6] 2 is a top view of the device of FIG. 1 according to one embodiment of the present invention. [Figure 7] 2 is a bottom view of the device of FIG. 1 according to one embodiment of the present invention. [Figure 8] 2 is a first end view of the device of FIG. 1 according to one embodiment of the present invention. [Figure 9] 2 is a second end view of the device of FIG. 1 according to one embodiment of the present invention. [Figure 10] 1 taken along line 10-10 of FIG. 8, in accordance with one embodiment of the present invention. [Figure 11] FIG. 11 is a perspective view of the device shown in FIG. 10 according to one embodiment of the present invention. [Figure 12] 2 is an exploded side view of the device of FIG. 1 according to one embodiment of the present invention. [Figure 13] 2 is an exploded top view of the device of FIG. 1 according to one embodiment of the present invention. [Figure 14] 2 is a perspective view of a nozzle of the device of FIG. 1 according to one embodiment of the present invention. [Figure 15] FIG. 15 is a first side view of the nozzle of FIG. 14 according to one embodiment of the present invention. [Figure 16] FIG. 15 is a second side view of the nozzle of FIG. 14 according to one embodiment of the present invention. [Figure 17] FIG. 15 is a first end view of the nozzle of FIG. 14 according to one embodiment of the present invention. [Figure 18] FIG. 15 is a second end view of the nozzle of FIG. 14, according to one embodiment of the present invention. [Figure 19] FIG. 15 is a top view of a nozzle of the device of FIG. 14, according to one embodiment of the present invention. [Figure 20] FIG. 15 is a bottom view of the nozzle of FIG. 14 according to one embodiment of the present invention. [Figure 21] 21 is a cross-sectional view of the nozzle of FIG. 14 taken along line 21-21 of FIG. 19, according to one embodiment of the present invention. [Figure 22] FIG. 22 is a perspective view of the nozzle of FIG. 21 according to one embodiment of the present invention. [Figure 23] 4 showing dimensions of portions of the device of FIG. 1 according to one embodiment of the present invention. [Figure 24] 2 is a schematic diagram of a system including the apparatus of FIG. 1 according to one embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0011] Generally speaking, disclosed herein is an apparatus for recirculating fluids in the semiconductor industry. Additionally, disclosed is a method for using the apparatus for recirculating fluids in the semiconductor industry.

[0012] Referring to the drawings, in which the same reference numerals are used throughout the figures to indicate the same or similar components, and particularly to Figures 1-23, an exemplary embodiment of an apparatus 100 for recirculating fluids, for example, in the semiconductor industry, is shown. The apparatus 100 may include a base portion 110, an inlet portion 130, a coupling portion 150, and a nozzle member 180. The inlet portion 130 may be coupled to a first end 112 of the base portion 110 by the coupling portion 150. The nozzle member 180 may be coupled to a second end 114 of the base portion 110. When the base portion 110, the inlet portion 130, and the coupling portion 150 are attached together, a passageway 170 is formed extending through the apparatus 100. The base portion 110 may include a first portion 116, a second portion 118, and a connector 120 coupling the first portion 116 to the second portion 118. First portion 116 may be longer than second portion 118, for example, as described in more detail below with reference to Figure 23. Connector 120 may be angled, for example, to position first portion 116 at an angle relative to second portion 118.

[0013] The inlet portion 130 may include a first end 132 and a second end 134 connected to a coupling 150. The inlet portion 130 may also include a first portion 136, a second portion 138, and a connecting portion 140 disposed between the first portion 136 and the second portion 138. The connecting portion 140 may have, for example, a diameter smaller than the diameters of the first portion 136 and the second portion 138. The first portion 136 may be secured to a recirculation system, as described in more detail below with reference to FIG. 24 . The first portion 136 may, for example, taper from the first end 132 to the connecting portion 140. The second portion 138 may be received in a portion of the coupling 150. The second portion 138 may, for example, have a uniform diameter along its entire length. Although not shown, in alternative embodiments, second portion 138 may have, for example, a different or varying diameter along the length of second portion 138 .

[0014] The coupling portion 150 may include a first end 152 and a second end 154 coupled to the first portion 116 of the base portion 110. The coupling portion 150 may also include a first portion 156, a second portion 158, and a connecting portion 160 disposed between the first portion 156 and the second portion 158. The connecting portion 160 may have a first outer diameter, the first portion 156 may have a second outer diameter, and the second portion 158 may have a third outer diameter. In one embodiment, the first outer diameter may be smaller than the third outer diameter, and the second outer diameter may be larger than the first and third outer diameters. Furthermore, the first outer diameter of the connecting portion 160 may be approximately the same dimension as the inner diameters of the inner engaging portions of the first portion 156 and the second portion 158. The inner mating coupling portions allow the connecting portion 160 to be inserted into the passages of the first portion 156 and the second portion 158, aligning the passages of the connecting portion 160 with the passages of the first portion 156 and the second portion 158. The first portion 156 couples to the first end 112 of the base portion 110. The second portion 158 engages the first portion 116 of the base portion 110 at the first end 112.

[0015] With continued reference to Figures 1-13 and as best seen in Figures 14-22, the nozzle member 180 may include a first end 182 and a second end 184. The nozzle member 180 may also include a base portion 186, a nozzle portion 188, and an inlet 194. The nozzle portion 188 may, for example, extend from the outer surface of the base portion 186 between the first end 182 and the second end 184 of the nozzle member 180. In the illustrated embodiment, the nozzle portion 188 is disposed near the second end 184 of the base portion 186. The nozzle portion 188 may, for example, taper as it extends from the base portion 186 to a tip 192. The nozzle portion 188 includes a helical channel or groove 190 that extends from a position adjacent the base portion 186 to a position adjacent the tip 192 of the nozzle portion 188. The helical groove 190 extends from the outer surface through the nozzle portion 188 to the inner surface. Nozzle portion 180 may further include an opening 196 extending through the interior of nozzle portion 180. First end 182 of nozzle member 180 may have an outer diameter sized to be received in an inner diameter of second portion 118 at second end 114 of base portion 110. The inner diameter of second portion 118 may include an inner engaging portion that receives first end 182 of nozzle member 180 to align internal passageway 170 of base portion 110 with the inner surface of opening 196.

[0016] As shown in FIGS. 21 and 22 , the inlet 194 communicates with an opening 196 extending through the base portion 186. The opening 196 connects the inlet 194 to the spiral groove 190, allowing fluids to mix as they pass through and exit the nozzle member 180. Additionally, the inlet 194 aligns with and communicates with the passageway 170, allowing, for example, slurry to pass through the inlet portion 130, the coupling portion 150, and the base portion 110 and enter the nozzle member 180. The nozzle portion 188 allows for an upward vortex of the slurry, for example, in a 360-degree or radial pattern. The upward vortex generated by the nozzle portion 188 minimizes or eliminates shear in the slurry caused by mixing or recirculating the slurry. In addition to the vortex generated by the nozzle portion 188, the angle between the first portion 116 and the second portion 118 of the base portion 110 can also minimize or eliminate shear in the slurry caused by mixing or recirculating the slurry.

[0017] Referring now to FIG. 23 , dimensions of the various portions of device 100 are shown. In addition to the description of device 100 above, first portion 136 of inlet portion 130 may further include first tool-engaging portion 210 having first engagement edge 211. Continuing with FIG. 23 , connection portion 120 may have connection midpoint 200. Device 100 may have a first length l1 extending between first engagement edge 211 and connection midpoint 200. First length l1 may be, for example, in the range of about 20 inches to about 40 inches. More specifically, first length l1 may be in the range of about 22 inches to about 38 inches. In some embodiments, the first length may be about 23 inches, about 31 inches, about 32 inches, about 35 inches, or about 37 inches.

[0018] 23 , the first portion 116 of the base portion 110 can have a second length l2. The second length l2 can extend between the first end 112 of the base portion 110 and the second end 215 of the first portion 116. The second length l2 can be, for example, in a range from about 15 inches to about 35 inches. More specifically, the second length l2 can be in a range from about 16 inches to about 35 inches. Even more specifically, the second length l2 can be about 17 inches, about 25 inches, about 26 inches, about 28 inches, or about 31 inches.

[0019] The ratio of the first length l1 to the second length l2 (i.e., l1 / l2) can be, for example, in the range of about 1.1 to about 1.5. More specifically, the ratio of the first length l1 to the second length l2 (i.e., l1 / l2) can be in the range of about 1.2 to about 1.4. Even more specifically, the ratio of the first length l1 to the second length l2 (i.e., l1 / l2) can be about 1.2, about 1.3, or about 1.4.

[0020] 23, connecting portion 120 may form an angle φ between first portion 116 and second portion 118. Angle φ may be, for example, in the range of about 90 degrees to about 160 degrees. More specifically, angle φ may be, for example, in the range of about 120 degrees to about 150 degrees. Even more specifically, angle φ may be about 90 degrees, about 112 degrees, about 135 degrees, or about 157 degrees.

[0021] 23 , the second portion 118 of the base portion 110 can include a second tool engagement portion 205. The second tool engagement portion 205 can include a second engagement edge 206. The device 100 can have a third length l3 that occupies between the second engagement edge 206 and the connection midpoint 200. The third length l3 can be, for example, in the range of about 2 inches to about 4 inches. More specifically, the third length l3 can be about 2 inches, about 2.5 inches, about 3 inches, about 3.5 inches, or about 4 inches.

[0022] The fourth length l4 between the second end 184 of the nozzle portion 180 and the connection midpoint 200 is shown in FIG. 23. The fourth length l4 can be, for example, in the range of about 5 inches to about 7 inches. More specifically, the fourth length l4 can be, for example, about 5 inches, about 5.5 inches, about 6 inches, about 6.5 inches, or about 7 inches.

[0023] It is contemplated that some or all components of device 100 may be fabricated partially or completely from fluoropolymers such as perfluoroalkoxyalkane (PFA), polytetrafluoroethylene (PTFE), fluorinated ethylene propylene (FEP), or alternatives with similar properties. The components of device 100 may, for example, all be fabricated from only one material, each be fabricated from different materials, each be fabricated from a combination of materials, or each be fabricated from either only one material or a combination of materials.

[0024] Although not shown, the mixing system may include more than one apparatus 100. For example, the mixing system may include a first apparatus 100 and a second apparatus 100, each connected to the end of a recirculation line. In yet another embodiment, the mixing system may include any number of apparatuses 100 coupled to the end of a recirculation line. Each apparatus 100 in the mixing system may be at the same or different distances to the remaining apparatuses 100.

[0025] A method of recirculating a fluid is further disclosed, including obtaining an apparatus 100. The apparatus comprises a base portion 110, an inlet portion 130, a coupling 150 connecting the inlet portion 130 to the base portion 110 at a first end 112, and a nozzle member 180 coupled to the base portion 110 at a second end 114. The method may also include coupling the apparatus 100 to a recirculation system, as shown in Figure 24. The method may further include passing the semiconductor slurry through the recirculation system and into a storage drum 300.

[0026] As shown in FIG. 24 , the recirculation system may include a recirculation loop 301 that pumps slurry from a storage drum 300. The recirculation system may further include a pump 320, a sample valve 310, a rotameter 305, and a pressure gauge 315 disposed along the recirculation loop 301. The slurry may be pumped from the storage drum 300 by the pump 320. The slurry may then flow through the recirculation loop 301, through the apparatus 100, and back into the storage drum 300. As the slurry flows through the recirculation loop 301, the integrity of the slurry and the completeness of the mixture may be confirmed by periodically sampling the recirculating slurry via a sample valve 310 disposed within the recirculation loop 301. Additionally, the volumetric flow rate may be monitored by a rotameter 305 disposed within the recirculation loop 301. Additionally, the flow pressure of the recirculation system may be monitored by a pressure gauge 315 also disposed within the recirculation loop 301. Although not shown, it is further contemplated that the apparatus 100 may include multiple second sections 118, each having a nozzle portion 180, to enhance mixing of the slurry.

[0027] The fluid recirculation method uses the apparatus 100 to maintain the integrity of semiconductor slurries. Slurry integrity, as used herein, refers to the physical characteristics of particles in raw or blended slurries. These physical characteristics include particle counts by size (i.e., 200 nm, 500 nm, 1 μm, 5 μm, etc.), as well as particle distribution (the number of particles in each size bucket relative to the total number of particles per unit volume), D50, also known as the average particle size, maximum particle size, the amount and type of weak agglomerates, the amount and type of strong agglomerates, and several others. For most end users (CMP groups), particle size and distribution prove to be the easiest to measure and, therefore, correlate to wafer defects resulting from large or undersized particles, D50 shifts, or maximum particle size. These have been traced to the direct causes of wafer defects and lost revenue.

[0028] Thus, the process using apparatus 100 uses the existing energy (supplied by recirculation pump 320) utilized to recirculate the raw slurry stream to mix the slurry, thereby reducing or substantially eliminating particle shear (which alters the distribution and creates finer particles). As the slurries used are constantly changing to meet market demands (e.g., for the latest iPhones and Galaxy), the number of particles per unit volume has increased from 2-3 million / cc to 5-6 million / cc. These are sometimes known as nanoslurries. That is, the process is designed to maintain the supplier's original size and distribution characteristics.

[0029] In another embodiment, to maintain homogeneity, a recirculation system including apparatus 100 can be mounted on top of a tank, such as a 265 L tank with a conical bottom. The tank can be, for example, a "dispense tank" that supplies slurry to other systems. Apparatus 100 helps maintain the homogeneity of the slurry by continuing to mix the slurry while in the "dispense tank." When using a "dispense tank," the length of first portion 116 of apparatus 100 can vary based on the dimensions of the tank. Additionally, the length of second portion 118 of apparatus 100 can also vary based on the dimensions of the tank. For example, a larger tank can result in longer first and second portions 116, 118.

[0030] In yet another embodiment, a recirculation system having at least one apparatus 100 can be mounted on top of a "dispense tank," which can be, for example, a tank of at least 500 L with a conical bottom unit. The at least one apparatus 100 helps maintain a homogeneous state of the slurry by continuing to mix the slurry while in the "dispense tank." A method using at least one apparatus 100 mounted on top of a "dispense tank" can include blending additional drums of slurry into a larger tank to maintain a desired level in the tank. As additional drums of slurry are added to the larger tank, the at least one apparatus 100 blends the new slurry with the existing slurry to spread any small variations between the drums of slurry throughout the larger volume, significantly reducing the risk of significant changes in material, such as particle size distribution, pH, density, etc. By blending any variations throughout the larger volume, defects can be avoided, or at worst, limited to a minor enough event that the wafers can be salvaged by reprocessing.

[0031] Methods using larger tanks may include inserting two or more apparatuses 100 into the tank to maintain mixing within the larger tank. For example, for a 500 L tank, the recirculation line may be split and coupled to two apparatuses 100 to provide two nozzles 188. The two nozzles 188 may be spaced, for example, 180 degrees apart, to maintain mixing within the larger tank. Additionally, the lengths of the two apparatuses 100 may vary, for example, with one apparatus 100 being longer than the second apparatus 100. With two apparatuses 100 of different lengths, the method may include using both nozzles 188 when the tank is full and then shutting off flow to at least one of the two nozzles 188 when the level of slurry in the tank drops below a certain level. The ability to adjust the number of nozzles 188 through which the slurry flows based on the level of the slurry in the tank allows the user to avoid overmixing the slurry and maintain the integrity of the slurry. It is also contemplated that other larger tanks may include three or more apparatuses 100 to achieve the required mixing. For tanks with three or more devices 100, for example, the nozzles 188 may be radially spaced around the tank to achieve maximum efficiency and desired mixing. In embodiments with three or more nozzles 188, the lengths of some or all of the devices 100 may vary to allow for the nozzles 188 to be closed depending on the level of slurry in the tank.

[0032] The terminology used herein is merely for the purpose of describing particular embodiments and is not intended to be limiting of the invention. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise. It should be further understood that the terms "comprise" (and all forms of "comprise," such as "comprises," "comprising"), "have" (and all forms of "have," such as "has," "having"), "include" (and all forms of "include," such as "includes," "including"), and "contain" (and all forms of "contain," such as "contains," "containing") are open-ended linking verbs. Consequently, a method or apparatus that "comprises," "has," "includes," or "contains" one or more steps or elements has those one or more steps or elements, but is not limited to having only those one or more steps or elements. Similarly, a method step or apparatus element that "comprises," "has," "includes," or "contains" one or more features has those one or more features, but is not limited to having only those one or more features. Furthermore, a device or structure configured in a certain manner is configured in at least that manner, but may also be configured in other manners not mentioned.

[0033] The present invention has been described with reference to preferred embodiments. It is to be understood that the structural and operational embodiments described herein are illustrative of multiple possible configurations for achieving the same general features, characteristics, and general system operation. Modifications and alternatives will occur to others upon reading and understanding the above detailed description. The invention is to be understood to include all such modifications and alternatives.

Claims

1. 1. A system for recirculating a fluid, the system comprising: a storage drum containing the semiconductor slurry; Equipment and Equipped with The device comprises: The base part and an inlet portion coupled to a first end of the base portion, the inlet portion in fluid communication with the storage drum, the inlet portion configured to receive the semiconductor slurry from the storage drum; a nozzle coupled to a second end of the base portion, the nozzle positioned to recirculate the semiconductor slurry into the storage drum; Including, The nozzle is A nozzle base portion; a nozzle inlet at a first end of the base portion; a nozzle portion extending from an outer surface of the nozzle base portion between the first end of the nozzle base portion and the second end of the nozzle base portion; wherein the nozzle portion includes a spiral groove extending from a location near the nozzle base portion to a location near a tip of the nozzle portion, the spiral groove extending from an outer surface through the nozzle portion to an inner surface of the nozzle portion.

2. The base portion is a first portion; and a second portion coupled to the first portion, the first portion being at an angle to the second portion; and The system of claim 1 , comprising:

3. The system of claim 2 , wherein the angle of the first portion relative to the second portion is between 90 degrees and 160 degrees.

4. 3. The system of claim 2, wherein the base portion further comprises a connecting portion, the connecting portion being coupled to the first portion at a first end and to the second portion at a second end.

5. The system of claim 4 , wherein the base portion is angled at the connection.

6. The inlet portion a first inlet portion; a second inlet portion; and an inlet connection having a first end and a second end; Equipped with 3. The system of claim 2, wherein the first end is received in the first inlet portion and the second end is received in the second inlet portion to couple the first inlet portion to the second inlet portion.

7. The system of claim 6 , wherein the first inlet portion tapers from a first end to a second end.

8. The system of claim 6 , wherein the inlet connection has an outer diameter that is smaller than an outer diameter of the first inlet portion and an outer diameter of the second inlet portion.

9. The system of claim 6 , wherein the nozzle portion tapers as it extends from the nozzle base portion to the tip portion.

10. 7. The system of claim 6, further comprising a coupling portion coupled at a first end to the second inlet portion and coupled at a second end to the first portion of the base portion.

11. The coupling portion is a first coupling portion; a second coupling portion; and a connecting portion having a first end and a second end; Equipped with 11. The system of claim 10, wherein the first end is received in the first coupling portion and the second end is received in the second coupling portion to couple the first coupling portion to the second coupling portion.

12. 1. A method of using an apparatus for recirculating a fluid in a storage vessel containing a semiconductor slurry, the method comprising: coupling a first apparatus to a semiconductor recycling system, the first apparatus comprising: a first base portion; a first inlet portion coupled to a first end of the first base portion; and a first nozzle coupled to a second end of the first base portion, the first inlet portion in fluid communication with the storage vessel, the first inlet portion configured to receive the semiconductor slurry from the storage vessel, and the first nozzle including a spiral groove; delivering the semiconductor slurry through the first base portion of the first apparatus and into the storage container from the first nozzle, the first nozzle being positioned within the storage container; Including, The method wherein the spiral groove extends from an outer surface through the first nozzle to an inner surface.

13. The semiconductor recycling system comprises: said storage vessel for holding said semiconductor slurry; a recirculation loop including a fluid line; a pump for pumping the semiconductor slurry from the storage vessel, for delivering the semiconductor slurry through the fluid line and the first nozzle, and for returning the semiconductor slurry to the storage vessel to mix the semiconductor slurry; The method of claim 12, comprising:

14. The method of claim 13 , wherein the first nozzle is tapered between a nozzle base and a nozzle tip.

15. 14. The method of claim 13, wherein the method further comprises obtaining periodic samples of the semiconductor slurry from the fluid line of the recirculation loop using a sample valve.

16. The method comprises: monitoring the flow pressure of the semiconductor slurry in the fluid line using a pressure gauge; Use a rotameter to monitor the volumetric flow rate 14. The method of claim 13, further comprising:

17. 14. The method of claim 13, wherein the storage container is a dispensing tank, the recirculation system is coupled to the dispensing tank, and the first nozzle is disposed within the dispensing tank.

18. The method includes at least one second device; The at least one second device a second base portion; and a second inlet portion coupled to a first end of the second base portion; a second nozzle coupled to a second end of the second base portion, the second nozzle including a spiral groove; 20. The method of claim 17, comprising:

19. 20. The method of claim 18, wherein the at least one second device is coupled to the recirculation system, the second nozzle is disposed within the dispensing tank, and the second nozzle is radially spaced from the first nozzle.

20. 1. A system for recirculating a fluid, the system comprising: a storage drum containing the semiconductor slurry; Equipment and Equipped with The device comprises: The base part and an inlet portion coupled to a first end of the base portion, the inlet portion in fluid communication with the storage drum, the inlet portion configured to receive the semiconductor slurry from the storage drum; a nozzle coupled to a second end of the base portion, the nozzle positioned to recirculate the semiconductor slurry into the storage drum; Including, The nozzle is A nozzle base portion; a nozzle inlet at a first end of the base portion; a nozzle portion extending from an outer surface of the nozzle base portion between the first end of the nozzle base portion and the second end of the nozzle base portion; wherein the nozzle portion includes a spiral groove extending from a location near the nozzle base portion to a location near a tip of the nozzle portion, the spiral groove extending from an outer surface through the nozzle portion to an inner surface of the nozzle portion.

21. The base portion is a first portion; and a second portion coupled to the first portion, the first portion being at an angle to the second portion; and 21. The system of claim 20, comprising:

22. 22. The system of claim 21, wherein the angle of the first portion relative to the second portion is between 90 degrees and 160 degrees.

23. 23. The system of any one of claims 21 to 22, wherein the base portion further comprises a connecting portion, the connecting portion being coupled to the first portion at a first end and to the second portion at a second end.

24. 24. The system of claim 23, wherein the base portion is angled at the connection.

25. 25. The system of any one of claims 21 to 24, further comprising a coupling portion, the coupling portion coupled at a first end to the inlet portion and coupled at a second end to the first portion of the base portion.

26. The coupling portion is a first coupling portion; a second coupling portion; and a connecting portion having a first end and a second end; Equipped with 26. The system of claim 25, wherein the first end is received in the first coupling portion and the second end is received in the second coupling portion to couple the first coupling portion to the second coupling portion.

27. The inlet portion a first inlet portion; a second inlet portion; and an inlet connection having a first end and a second end; Equipped with 27. The system of any one of claims 20 to 26, wherein the first end is received in the first inlet portion and the second end is received in the second inlet portion to couple the first inlet portion to the second inlet portion.

28. 28. The system of claim 27, wherein the first inlet portion tapers from the first end to the second end.

29. A system according to any one of claims 27 to 28, wherein the inlet connection has an outer diameter that is smaller than an outer diameter of the first inlet portion and an outer diameter of the second inlet portion.

30. 30. The system of any one of claims 20 to 29, wherein the nozzle portion tapers as it extends from the nozzle base portion to the tip portion.

31. 1. A method of using an apparatus for recirculating a fluid in a storage vessel containing a semiconductor slurry, the method comprising: coupling a first apparatus to a semiconductor recycling system, the first apparatus comprising: a first base portion; a first inlet portion coupled to a first end of the first base portion; and a first nozzle coupled to a second end of the first base portion, the first inlet portion in fluid communication with the storage vessel, the first inlet portion configured to receive the semiconductor slurry from the storage vessel, and the first nozzle including a spiral groove; delivering the semiconductor slurry through the first base portion of the first apparatus and into the storage container from the first nozzle, the first nozzle being positioned within the storage container; Including, The method wherein the spiral groove extends from an outer surface through the first nozzle to an inner surface.

32. The semiconductor recycling system comprises: said storage vessel for holding said semiconductor slurry; a recirculation loop including a fluid line; a pump for pumping the semiconductor slurry from the storage vessel, for delivering the semiconductor slurry through the fluid line and the first nozzle, and for returning the semiconductor slurry to the storage vessel to mix the semiconductor slurry; 32. The method of claim 31 , comprising:

33. 33. The method of claim 32, wherein the method further comprises obtaining periodic samples of the semiconductor slurry from the fluid line of the recirculation loop using a sample valve.

34. The method comprises: monitoring the flow pressure of the semiconductor slurry in the fluid line using a pressure gauge; Use a rotameter to monitor the volumetric flow rate The method of any one of claims 32 to 33, further comprising:

35. The method of any one of claims 31 to 34, wherein the first nozzle is tapered between a nozzle base and a nozzle tip.

36. 36. The method of any one of claims 31 to 35, wherein the storage container is a dispensing tank, the recirculation system is coupled to the dispensing tank, and the first nozzle is located inside the dispensing tank.

37. The method includes at least one second device; The at least one second device a second base portion; and a second inlet portion coupled to a first end of the second base portion; a second nozzle coupled to a second end of the second base portion, the second nozzle including a spiral groove; 37. The method of claim 36, comprising:

38. 38. The method of claim 37, wherein the at least one second device is coupled to the recirculation system, the second nozzle is disposed within the dispensing tank, and the second nozzle is radially spaced from the first nozzle.

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