Carbon nanotube web cutting method and cutting device

Abstract

To make it possible to produce cut webs of CNT webs with uniform distribution of carbon nanotubes (CNTs) without fractures.SOLUTION: A cutting method of CNT webs includes, in a state where a first support surface and a second support surface face with one surface of CNT webs having a shape extending in one direction and the first support surface and the second support surface are spaced apart from each other in a length direction of the CNT webs, pressing, by a first pressing surface, the CNT webs against a remaining portion of a first adhesive layer without pressing the CNT webs against a portion on the second surface side of the first adhesive layer, pressing, by a second pressing surface, carbon nanotube webs against a remaining portion of a second adhesive layer without pressing the carbon nanotube webs against a portion on the first surface side of the second adhesive layer, and bonding the CNT web to the first support surface and the second support surface via each of the first adhesive layer and the second adhesive layer.SELECTED DRAWING: Figure 11

Description

[Technical Field]

[0001] The present invention relates to a method and an apparatus for cutting a carbon nanotube web. [Background technology]

[0002] Carbon nanotube arrays made of carbon nanotubes grown on a silicon substrate can be used, for example, to produce carbon nanotube yarn (Non-Patent Document 1). That is, carbon nanotube yarn can be obtained from the carbon nanotube array in the same way as yarn is unwound from a cocoon. In this carbon nanotube yarn, the length direction of the carbon nanotubes is approximately the same as the length direction of the carbon nanotube yarn. Furthermore, the carbon nanotubes are bonded to each other by van der Waals forces.

[0003] It is also possible to obtain a carbon nanotube web by extracting the carbon nanotubes from the carbon nanotube array in a web-like form using a method similar to that described above (Patent Document 1). In the carbon nanotube web, the carbon nanotubes are approximately uniform in length.

[0004] The carbon nanotube web is used, for example, as a carbon nanotube film formed by laminating a plurality of carbon nanotube webs. The carbon nanotube film may be impregnated with a synthetic resin to fix the carbon nanotubes (Patent Document 2). It is also possible to produce twisted yarn from the carbon nanotube web (Patent Document 3).

[0005] A carbon nanotube film can also be obtained by drying a coating film made of a dispersion of carbon nanotubes (Patent Document 4). The carbon nanotube film can be used, for example, as a pellicle film in a pellicle. [Prior art documents] [Non-patent literature]

[0006] [Non-Patent Document 1] K. Jiang, et al., "Spinning continuous carbon nanotube yarns", Nature Vol.419 (2002) [Patent documents]

[0007] [Patent Document 1] Japanese Patent Application Publication No. 2017-122021 [Patent Document 2] Japanese Patent Application Laid-Open No. 2015-101039 [Patent Document 3] Japanese Patent Application Laid-Open No. 2017-19690 [Patent Document 4] International Publication No. 2018 / 008594 Summary of the Invention [Problem to be solved by the invention]

[0008] Carbon nanotube webs drawn from carbon nanotube arrays have problems such as waviness when wound into a roll. For this reason, the carbon nanotube web can be cut into web pieces without being wound after being drawn from the carbon nanotube array. However, carbon nanotube webs drawn from carbon nanotube arrays are extremely thin and difficult to handle. For this reason, the carbon nanotube web is prone to breakage during the process from drawing to cutting, and the density of the carbon nanotubes is prone to variation during this process.

[0009] An object of the present invention is to make it possible to produce a cut web of a carbon nanotube web in which the carbon nanotubes are uniformly distributed without causing breakage. [Means for solving the problem]

[0010] According to one aspect of the present invention, a method for manufacturing a semiconductor device includes providing a first adhesive layer and a second adhesive layer on a first support surface and a second support surface, respectively; With the first support surface and the second support surface facing one side of a carbon nanotube web having a shape extending in one direction and the first support surface and the second support surface arranged spaced apart from each other in the longitudinal direction of the carbon nanotube web, a first pressing surface presses the carbon nanotube web against the remaining part of the first adhesive layer without pressing the part of the first adhesive layer facing the second support surface, and a second pressing surface presses the carbon nanotube web against the remaining part of the second adhesive layer without pressing the part of the second adhesive layer facing the first support surface, thereby adhering the carbon nanotube web to the first support surface and the second support surface via the first adhesive layer and the second adhesive layer, respectively; cutting the carbon nanotube web adhered to the first support surface and the second support surface at first and second positions that sandwich the first adhesive layer and the second adhesive layer in the length direction, along a direction intersecting the length direction; A method for cutting a carbon nanotube web is provided, comprising:

[0011] According to another aspect of the present invention, there is provided a cutting method relating to the above aspect, in which the carbon nanotube web is cut at the first position and the second position while the first pressing surface presses the carbon nanotube web against the remaining portion of the first adhesive layer and the second pressing surface presses the carbon nanotube web against the remaining portion of the second adhesive layer.

[0012] According to yet another aspect of the present invention, there is provided a cutting method relating to any of the above aspects, in which the carbon nanotube web is created by cutting the substrate layer of a carbon nanotube structure comprising a substrate layer that can be cut to produce a cut surface parallel to the thickness direction, a catalyst layer provided on one side of the substrate layer, and a carbon nanotube array consisting of a plurality of carbon nanotubes arranged on the catalyst layer and each extending in the thickness direction of the substrate layer, and then pulling the resulting first and second substrate pieces away from each other, thereby creating a gap between the portion of the carbon nanotube array located on the first substrate piece and the portion of the carbon nanotube array located on the second substrate piece.

[0013] According to yet another aspect of the present invention, there is provided a method for producing a cut web, the method including cutting the carbon nanotube web by the cutting method according to any one of the above aspects.

[0014] According to yet another aspect of the present invention, there is provided a method for manufacturing a carbon nanotube web, the method comprising: cutting the carbon nanotube web to obtain a plurality of cut webs; laminating the plurality of cut webs to obtain a carbon nanotube film; and a method for producing a carbon nanotube film, the method comprising the steps of: obtaining one or more of the plurality of cut webs by the method for producing a cut web according to the aspect above.

[0015] According to yet another aspect of the present invention, there is provided a method for manufacturing a carbon nanotube film according to the above aspect, in which the carbon nanotubes in the carbon nanotube web are oriented in the longitudinal direction, and one or more of the plurality of cut webs are stacked with one or more of the plurality of cut webs so that the orientation directions of the carbon nanotubes intersect.

[0016] According to yet another aspect of the present invention, there is provided a cut web obtained by the method for producing a cut web according to the above aspect.

[0017] According to yet another aspect of the present invention, there is provided a carbon nanotube film obtained by the method for producing a carbon nanotube film according to the above aspect.

[0018] According to yet another aspect of the present invention, there is provided a pellicle membrane comprising the carbon nanotube membrane according to the above aspect.

[0019] According to yet another aspect of the present invention, there is provided a pellicle including the pellicle membrane according to the above aspect.

[0020] According to yet another aspect of the present invention, there is provided a cutting device for cutting a carbon nanotube web extending in a first direction in a second direction intersecting the first direction, the cutting device comprising: a support member having a first support surface and a second support surface each extending in one direction, the first support surface and the second support surface being arranged spaced apart from each other in the width direction thereof; a pressing member having a first pressing surface and a second pressing surface each extending in one direction, the first pressing surface and the second pressing surface being arranged spaced apart from each other in the width direction thereof; an adhesiveness imparting device for applying a first adhesive layer and a second adhesive layer to the first support surface and the second support surface, respectively; a moving device that moves the first support surface and the first pressing surface relatively with the carbon nanotube web and the first adhesive layer sandwiched therebetween, and moves the second support surface and the second pressing surface relatively with the carbon nanotube web and the second adhesive layer sandwiched therebetween, so that the carbon nanotube web is pressed against the remaining part of the first adhesive layer without being pressed against the portion of the first adhesive layer that faces the second support surface, and is pressed against the remaining part of the second adhesive layer without being pressed against the portion of the second adhesive layer that faces the first support surface, while the width direction of the first support surface and the second support surface and the width direction of the first pressing surface and the second pressing surface are aligned with the first direction, thereby adhering the carbon nanotube web to the first support surface and the second support surface via the first adhesive layer and the second adhesive layer, respectively; a cutter that cuts the carbon nanotube web adhered to the first support surface and the second support surface along the second direction at a first position and a second position that sandwich the first adhesive layer and the second adhesive layer in the first direction; A cutting device is provided comprising:

[0021] According to yet another aspect of the present invention, there is provided an auxiliary jig for a cutting device used in the cutting device according to the above aspect, the auxiliary jig including the support member and the pressing member. [Effects of the Invention]

[0022] According to the present invention, it is possible to produce a cut web of a carbon nanotube web in which carbon nanotubes are uniformly distributed without causing breakage. [Brief explanation of the drawings]

[0023] [Figure 1] FIG. 1 is a perspective view schematically showing one embodiment of a carbon nanotube structure. [Figure 2] FIG. 2 is a partially enlarged view of the carbon nanotube structure shown in FIG. [Figure 3] FIG. 10 is a perspective view schematically showing another embodiment of the carbon nanotube structure. [Figure 4] FIG. 2 is a perspective view showing one embodiment of a first step in the method for producing a carbon nanotube web. [Figure 5] FIG. 10 is a perspective view showing another embodiment of the first step in the method for producing a carbon nanotube web. [Figure 6] FIG. 3 is a perspective view showing one embodiment of a second step in the method for producing a carbon nanotube web. [Figure 7] FIG. 2 is a perspective view schematically showing a support member included in the cutting device according to one embodiment of the present invention. [Figure 8] FIG. 2 is a perspective view schematically showing a pressing member provided in the cutting device according to one embodiment of the present invention. [Figure 9] FIG. 2 is a perspective view showing a first step in the method for cutting a carbon nanotube web according to one embodiment of the present invention. [Figure 10] FIG. 3 is a conceptual diagram illustrating a second step in the method for cutting a carbon nanotube web according to one embodiment of the present invention. [Figure 11] FIG. 3 is a perspective view showing a second step in the method for cutting a carbon nanotube web according to one embodiment of the present invention. [Figure 12] FIG. 12 is a top view of the second step shown in FIG. [Figure 13] FIG. 4 is a perspective view showing a third step in the method for cutting a carbon nanotube web according to one embodiment of the present invention. [Figure 14] 1 is a perspective view schematically illustrating a carbon nanotube film according to an embodiment of the present invention. [Figure 15] 1 is a cross-sectional view schematically illustrating a pellicle according to an embodiment of the present invention attached to a photomask. DETAILED DESCRIPTION OF THE INVENTION

[0024] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The embodiments described below are more specific embodiments of any of the above aspects. In the drawings referred to below, elements having the same or similar functions are given the same reference numerals, and duplicated descriptions will be omitted. In addition, the dimensional ratios and shapes in each drawing may differ from the actual objects.

[0025] The carbon nanotube web cut by the cutting method according to the embodiment of the present invention can be manufactured using a carbon nanotube structure. First, the carbon nanotube structure will be described, and then the carbon nanotube web that can be manufactured using the carbon nanotube structure will be described.

[0026] <Carbon nanotube structure> Fig. 1 is a perspective view showing a schematic configuration of a carbon nanotube structure, and Fig. 2 is a partially enlarged view thereof. The carbon nanotube structure shown in Fig. 2 includes a substrate layer 31, a catalyst layer 32, and a carbon nanotube array 120 consisting of a plurality of carbon nanotubes 1200. Note that the catalyst layer 32 is omitted in Fig. 1.

[0027] At least one surface of the substrate layer 31 is flat. In the following description, the surface of the substrate layer 31 on which the catalyst layer 32 is provided is referred to as the "front surface," and the opposite surface is referred to as the "rear surface."

[0028] The base layer 31 can be split so as to produce split surfaces parallel to the thickness direction. In one embodiment, the substrate layer 31 that can be cleaved parallel to its thickness direction is made of a material that can be cleaved to produce a cleavage plane parallel to its thickness direction. The substrate layer 31 that can be cleaved to produce a cleavage plane parallel to its thickness direction is made of, for example, silicon or sapphire. When the substrate layer 31 is made of silicon, the cleavage plane is the (110) or (111) plane of the silicon single crystal.

[0029] In another embodiment, the base material layer 31 is provided with a weakened portion that induces cleavage so as to produce cleaved surfaces parallel to the thickness direction. The base material layer 31 provided with the weakened portion will be described in detail later.

[0030] The catalyst layer 32 is provided on the flat surface of the base layer 31. The catalyst layer 32 is made of a metal such as iron, nickel, or cobalt.

[0031] An underlayer may be interposed between the substrate layer 31 and the catalyst layer 32. The underlayer is made of, for example, aluminum nitride, aluminum oxide, or silicon oxide.

[0032] The carbon nanotube array 120 is an aggregate of numerous carbon nanotubes 1200. These carbon nanotubes 1200 extend on the catalyst layer 32 from the support surface, which is the surface of the catalyst layer 32, approximately perpendicular to this surface. In other words, the carbon nanotubes 1200 extend in the thickness direction of the substrate layer 31. The term "carbon nanotube array" is synonymous with the term "carbon nanotube forest."

[0033] The carbon nanotube 1200 may be a single-wall nanotube, a multi-wall nanotube, or a combination thereof. The carbon nanotube 1200 may also be an armchair tube, a zigzag tube, a chiral tube, or a combination of two or more thereof.

[0034] The length of the carbon nanotube 1200 is, for example, in the range of 0.1 mm to 5 mm. Note that the ratio of the length to the diameter of the carbon nanotube 1200 in Fig. 1 is much smaller than the actual ratio.

[0035] The carbon nanotube array 120 can be manufactured by, for example, chemical vapor deposition (CVD) such as super-growth CVD (water-added CVD), etc. The carbon nanotube array 120 may also be manufactured by other methods.

[0036] Fig. 3 is a perspective view schematically showing another embodiment of the carbon nanotube structure. The carbon nanotube structure shown in Fig. 3 is similar to the carbon nanotube structure described with reference to Figs. 1 and 2, except for the substrate 31. Note that the catalyst layer 32 is omitted in Fig. 3.

[0037] The carbon nanotube structure shown in FIG. 3 is an example of a carbon nanotube structure having a fragile portion G on the back surface of the substrate 31 to generate a cleavage surface parallel to the thickness direction. The fragile portion G is formed as a groove. The fragile portion G is effective in preventing unevenness in the cleavage line, even when a general-purpose material, such as glass, that does not have cleavage properties is used for the substrate layer 31. Therefore, a wide range of general-purpose materials, not limited to cleavable materials, can be used for the substrate layer 31. For example, the substrate layer 31 may be a single crystal, such as silicon or sapphire, or a polycrystalline material, such as glass, ceramics, oxides, or nitrides, or a combination thereof. Chemical or physical planarization may also be performed on the substrate layer 31. Even when an inexpensive general-purpose material, such as alkali-free glass, is used for the substrate layer 31, a carbon nanotube web with uniformly distributed carbon nanotubes can be produced.

[0038] The fragile portion G may be formed by any means that induces cleavage in the base layer 31 to produce cleaved surfaces parallel to the thickness direction of the base layer 31, and may be formed by, for example, a laser light irradiation means or a known notching means such as a laser cutter, a thermal cutter, an air cutter, a compressed water cutter, etc. The fragile portion G shown in Fig. 3 is a groove formed by cutting into the back surface of the base layer 31.

[0039] The weak portion G may be provided along a line segment (hereinafter referred to as "line segment L") connecting two points on the contour of the back surface of the base layer 31. As long as the weak portion G is provided along the line segment L, it may be a weak portion provided over the entire length of the line segment L, or it may be one or more weak portions whose total length is shorter than the entire length of the line segment L. From the viewpoint of effectively suppressing the occurrence of cracks or breaks in the base layer 31 and the occurrence of unevenness at the fracture line due to the provision of the weak portion G, it is preferable to provide one or more weak portions along the line segment L and make the total length of the one or more weak portions G shorter than the length of the line segment L. The total length of the one or more weak portions G may be, for example, within a range of 20% to 80% of the length of the line segment L, or within a range of 30% to 60%.

[0040] <Carbon nanotube web> Using the above carbon nanotube structure, a carbon nanotube web can be produced, for example, by the following method.

[0041] FIG. 4 is a perspective view showing one embodiment of the first step in the method for producing a carbon nanotube web, and FIG. 6 is a perspective view showing one embodiment of the second step in the method for producing a carbon nanotube web.

[0042] In the first step shown in FIG. 4, the carbon nanotube structure shown in FIG. 1 is used. Here, as an example, the base layer 31 is a silicon substrate with the (110) or (111) plane parallel to the thickness direction. First, as shown in FIG. 4, the base layer 31 is cleaved to obtain a first base piece 31a and a second base piece 31b. For example, a pair of ends of the base layer 31 is grasped. These ends are arranged in a direction perpendicular to the cleavage plane and are spaced apart from each other. Then, a force is applied to these ends in a direction away from each other. This causes cleavage of the base layer 31 at a position between these ends. Each of the first base piece 31a and the second base piece 31b obtained in this manner has a cleavage plane S shown in FIG. 6 as a cleavage surface.

[0043] The base layer 31 may be fractured by applying force to the end portion so that the rear surface of the base layer 31 becomes concave. Alternatively, the base layer 31 may be fractured by applying force to the end portion so that the rear surface of the base layer 31 becomes convex.

[0044] The orientation of the cleavage plane to be formed on the base layer 31 before cleaving can be confirmed by, for example, X-ray diffraction. Alternatively, the orientation of the cleavage plane to be formed on a base layer similar to the base layer 31 used in the carbon nanotube structure may be determined in advance.

[0045] FIG. 5 is a perspective view showing another embodiment of the first step in the method for manufacturing a carbon nanotube web, in which the structure shown in FIG. 3 having weakened portions G (grooves) in the base layer 31 is used as the carbon nanotube structure. When the carbon nanotube structure shown in FIG. 3 is used, it is possible to generate a fracture along which the longitudinal direction of the weakened portions G (grooves) provided in the base layer 31 forms the fracture line. In the first step shown in FIG. 5, the base layer 31 is fractured along the longitudinal direction of the weakened portions G to obtain a first base piece 31a and a second base piece 31b, each having a fracture surface. In this case, the cleavage surface S shown in FIG. 6 becomes the fracture surface S.

[0046] After obtaining the first substrate piece 31a and the second substrate piece 31b in the first step shown in Fig. 4 or 5, the distance between the first substrate piece 31a and the second substrate piece 31b is increased as shown in Fig. 6. This causes carbon nanotubes to be drawn out in a web shape from the end face of the first portion 120a of the carbon nanotube array 120 located on the first substrate piece 31a and the end face of the second portion 120b of the carbon nanotube array 120 located on the second substrate piece 31b.

[0047] The catalyst layer (not shown) is divided into a portion located on the first substrate piece 31a and a portion located on the second substrate piece 31b, for example, when the substrate layer 31 is fractured. Alternatively, the catalyst layer (not shown) is divided into a portion located on the first substrate piece 31a and a portion located on the second substrate piece 31b by increasing the distance between the first substrate piece 31a and the second substrate piece 31b.

[0048] Van der Waals forces act on radially adjacent carbon nanotubes 1200. Therefore, for example, if an end face or a part thereof of the carbon nanotube array 120 is grasped and pulled in a direction away from the carbon nanotube array 120, the carbon nanotubes 1200 are pulled out one after another from the carbon nanotube array 120. Thus, a carbon nanotube web 121 can be obtained without using adhesives or the like. This will be explained in more detail below.

[0049] As described above, in the carbon nanotube array 120, the carbon nanotubes are bonded to each other by van der Waals forces. When the first substrate piece 31a and the second substrate piece 31b are pulled away from each other, the carbon nanotubes located near the boundary between the first portion 120a and the second portion 120b attempt to maintain their bond by van der Waals forces. When the distance between the first substrate piece 31a and the second substrate piece 31b is increased, the carbon nanotubes are successively pulled out from the first portion 120a and the second portion 120b. Meanwhile, the carbon nanotubes located between the first portion 120a and the second portion 120b change their orientation so that their respective length directions are approximately parallel to the direction of relative movement of the first substrate piece 31a and the second substrate piece 31b from each other, thereby maintaining their bond by van der Waals forces. As a result, a carbon nanotube web 121 is formed between the first substrate piece 31a and the second substrate piece 31b.

[0050] The carbon nanotube web 121 thus obtained is a free-standing film that can be handled by itself. In this carbon nanotube web 121, the carbon nanotubes are bonded to each other without using adhesives or the like.

[0051] Furthermore, in this carbon nanotube web 121, most of the carbon nanotubes have a shape that extends in the direction in which they are drawn out. That is, the carbon nanotubes contained in this carbon nanotube web 121 have approximately the same length.

[0052] The carbon nanotubes are uniformly distributed in this carbon nanotube web 121. That is, in the above-described method for manufacturing a carbon nanotube web, instead of using a gripping tool to grip a portion of the end face of the carbon nanotube array as in the conventional method, the base layer 31 is cleaved to produce a cleavage plane S (or fractured surface). This makes it possible to suppress variations in density in the carbon nanotube web that would otherwise occur if the gripping tool were unable to grip the carbon nanotubes uniformly.

[0053] Note that even if the catalyst layer 32 and the carbon nanotube array 120 are sequentially formed on each of the two base layers 31, the end faces of the base layers 31 are butted together to bring the carbon nanotube arrays 120 into contact, and then the base layers 31 are separated from each other, the carbon nanotube web 121 is not formed because the bonds due to van der Waals forces are not sufficiently formed.

[0054] A carbon nanotube web cutting technique that can cut the carbon nanotube web obtained by the above-described method without causing breakage or variations in the density of the carbon nanotubes will be described below.

[0055] <Method and apparatus for cutting carbon nanotube web> When using the carbon nanotube web cutting method according to an embodiment of the present invention, the carbon nanotube web 121 drawn out from the carbon nanotube array 120 by the method described above, for example, is cut into web pieces as follows: The web pieces obtained by cutting the carbon nanotube web by the cutting method according to an embodiment of the present invention are hereinafter referred to as "cut webs."

[0056] The cutting method according to an embodiment of the present invention is carried out using a cutting device. Fig. 10 is a conceptual diagram for explaining a second step included in the cutting method according to an embodiment of the present invention, which will be described later, and conceptually shows a cutting device 100 and a carbon nanotube web 121. The cutting device 100 shown in Fig. 10 includes a support member 40, a pressing member 50, and a cutter 60. The cutting device 100 further includes an adhesiveness imparting device and a moving device, but these are omitted in Fig. 10.

[0057] 7 is a perspective view schematically showing a support member 40 provided in the cutting device 100 shown in FIG. 10, and FIG. 8 is a perspective view schematically showing a pressing member 50 provided in the cutting device 100 shown in FIG.

[0058] The support member 40 shown in Fig. 7 is a rectangular frame made up of four side walls 401 to 404, and is open on the top and bottom. In the support member 40 shown in Fig. 7, a first support surface 40a and a second support surface 40b are provided at the center of the top surface of each of the pair of opposing side walls 401 and 403. The support member 40 is not limited to such a frame, and may be any other structure in which the first support surface 40a and the second support surface 40b each extend in one direction and are arranged at a distance from each other in the width direction.

[0059] Therefore, for example, the bottom surface of the support member 40 does not have to be open. Furthermore, the support member 40 does not have to have the side walls 402 and 404 on which the first support surface 40a and the second support surface 40b are not provided. That is, the support member 40 only needs to have the first support surface 40a and the second support surface 40b arranged as described above, and may be a structure including, for example, a connecting member that connects the side walls 401 and 403 instead of the side walls 402 and 404.

[0060] The pressing member 50 shown in Fig. 8 is a rectangular frame body made up of four side walls 501 to 504 and open on the top and bottom. In the pressing member 50 shown in Fig. 8, a first pressing surface 50a and a second pressing surface 50b are provided at the center of the bottom surface of each of the pair of opposing side walls 501 and 503. The pressing member 50 is not limited to such a frame body, and may have any structure as long as the first pressing surface 50a and the second pressing surface 50b each extend in one direction and are arranged spaced apart from each other in the width direction.

[0061] Therefore, for example, the upper surface of the pressing member 50 does not have to be open. Furthermore, the pressing member 50 does not have to have the side walls 502 and 504 on which the first pressing surface 50a and the second pressing surface 50b are not provided. That is, the pressing member 50 only needs to have the first pressing surface 50a and the second pressing surface 50b arranged as described above, and may be a structure including, for example, a connecting member that connects the side walls 501 and 503 instead of the side walls 502 and 504.

[0062] The support member 40 shown in Fig. 7 and the pressing member 50 shown in Fig. 8 have the following relationship: The widths D40a and D40b of the first supporting surface 40a and the second supporting surface 40b of the support member 40 shown in Fig. 7, and the widths D50a and D50b of the first pressing surface 50a and the second pressing surface 50b of the pressing member 50 shown in Fig. 8 satisfy the relationships D40a>D50a and D40b>D50b.

[0063] Fig. 9 is a perspective view showing a first step in a method for cutting a carbon nanotube web according to one embodiment of the present invention. Fig. 10 is a schematic view for explaining a second step in the method for cutting a carbon nanotube web according to one embodiment of the present invention as described above. Fig. 11 is a perspective view showing the second step. Fig. 12 is a top view showing the second step. And Fig. 13 is a perspective view showing a third step in the method for cutting a carbon nanotube web according to one embodiment of the present invention.

[0064] In a method for cutting a carbon nanotube web according to one embodiment of the present invention, first, as a first step, a first adhesive layer 41a and a second adhesive layer 41b are provided on the first support surface 40a and the second support surface 40b of the support member 40 shown in Fig. 7, respectively, as shown in Fig. 9. The first adhesive layer 41a and the second adhesive layer 41b may be any adhesive layer that can integrate the first support surface 40a and the second support surface 40b with the carbon nanotube web 121 via these adhesive layers in the subsequent second step. When the first support surface 40a and the second support surface 40b and the carbon nanotube web 121 are integrated, the carbon nanotube web 121 becomes easier to handle.

[0065] The first adhesive layer 41a and the second adhesive layer 41b may be, for example, a layer made of an adhesive or a double-sided adhesive film. The form of the first adhesive layer 41a and the second adhesive layer 41b can be appropriately selected depending on the use of the resulting cut web, and may be, for example, an adhesive layer or a double-sided adhesive film whose adhesive strength decreases when irradiated with light or heated.

[0066] The first adhesive layer 41a and the second adhesive layer 41b are provided using an adhesiveness imparting device (not shown) provided in the cutting device 100 shown in Fig. 10. The adhesiveness imparting device is not particularly limited, and any known device capable of providing an adhesive layer or a double-sided adhesive film can be used.

[0067] The first adhesive layer 41a and the second adhesive layer 41b have the following relationship with the support member 40. That is, the widths D41a and D41b of the first adhesive layer 41a and the second adhesive layer 41b, respectively, may be the same as the widths D40a and D40b of the first support surface 40a and the second support surface 40b, respectively, of the support member 40, as shown in Fig. 9, or may be smaller than D40a and D40b, respectively. That is, the relationships D41a ≦ D40a and D41b ≦ D40b are satisfied.

[0068] As described above, Fig. 10 is a conceptual diagram for explaining the second step included in the cutting method according to one embodiment of the present invention, and conceptually illustrates a cutting device 100 and a carbon nanotube web 121. The cutting device 100 includes a support member 40, a pressing member 50, a cutter 60, an adhesiveness imparting device (not shown), and a moving device (not shown). The support member 40 shown in Fig. 10 is a cross-sectional view taken along line AA of the support member 40 shown in Fig. 9, and the pressing member 50 shown in Fig. 10 is a cross-sectional view taken along line BB of the pressing member 50 shown in Fig. 8.

[0069] The first adhesive layer 41a and the second adhesive layer 41b have the following relationship with the pressing member 50. That is, the widths D41a and D41b of the first adhesive layer 41a and the second adhesive layer 41b, respectively, are larger than the widths D50a and D50b of the first pressing surface 50a and the second pressing surface 50b, respectively, of the pressing member 50, as shown in Fig. 10. That is, the relationships D41a>D50a and D41b>D50b are satisfied.

[0070] 10, the support member 40 and the carbon nanotube web 121 are arranged so that the first support surface 40a and the second support surface 40b of the support member 40 face one side of the carbon nanotube web 121 extending in a first direction (X direction), and the first support surface 40a and the second support surface 40b are spaced apart from each other in the first direction, which is the longitudinal direction of the carbon nanotube web 121. In this state, as shown in FIG. 10, the first pressing surface 50a of the pressing member 50 presses the carbon nanotube web 121 against the remaining part of the first adhesive layer 41a without pressing the portion of the first adhesive layer 41a on the second support surface 40b side, and the second pressing surface 50b presses the carbon nanotube web 121 against the remaining part of the second adhesive layer 41b without pressing the portion of the second adhesive layer 41b on the first support surface 40a side. As a result, the carbon nanotube web 121 is bonded to the first supporting surface 40a and the second supporting surface 40b of the supporting member 40 via the first adhesive layer 41a and the second adhesive layer 41b, respectively.

[0071] The second step described above is performed using a moving device (not shown) included in the cutting device 100 shown in Fig. 10. As shown in Fig. 10, the moving device is configured to move the carbon nanotube web 121 against the remaining portion of the first adhesive layer 41a without pressing the portion of the first adhesive layer 41a on the second support surface 40b side, while the width direction of the first support surface 40a and the second support surface 40b of the support member 40 and the width direction of the first pressing surface 50a and the second pressing surface 50b of the pressing member 50 are aligned with the first direction (X direction). The carbon nanotube web 121 is pressed against the remaining portion of the second adhesive layer 41b without any adhesive layer, by relatively moving the first support surface 40a and the first pressing surface 50a with the carbon nanotube web 121 and the first adhesive layer 41a sandwiched therebetween, and by relatively moving the second support surface 40b and the second pressing surface 50b with the carbon nanotube web 121 and the second adhesive layer 41b sandwiched therebetween, thereby adhering the carbon nanotube web 121 to the first support surface 40a and the second support surface 40b via the first adhesive layer 41a and the second adhesive layer 41b, respectively.

[0072] FIG. 11 is a perspective view of a structure formed by the second step described above, which is composed of an auxiliary jig 101 including a support member 40 and a pressing member 50, and a carbon nanotube web 121, and FIG. 12 is a top view of the structure.

[0073] 10 and 12, width d1 indicates the width of a portion of the first adhesive layer 41a on the second support surface 40b side, against which the first pressing surface 50a of the pressing member 50 is not pressed. Also, in FIGS. 10 and 12, width d2 indicates the width of a portion of the second adhesive layer 41b on the first support surface 40a side, against which the second pressing surface 50b of the pressing member 50 is not pressed. If widths d1 and d2 against which the pressing member 50 is not pressed did not exist, the carbon nanotube web might be cut from the edge of the first adhesive layer 41a on the second support surface 40b side and the edge of the second adhesive layer 41b on the first support surface 40a side when the pressing member 50 is pressed. However, the presence of widths d1 and d2 can prevent this. From this perspective, it is preferable that both d1 / D41a and d2 / D41b be 0.1 or greater. On the other hand, from the viewpoint of the stability of holding the carbon nanotube web when cutting, it is preferable that both d1 / D41a and d2 / D41b are 0.5 or less.

[0074] In the subsequent third step, the carbon nanotube film 121 is cut to obtain a cut web 1210 shown in Fig. 13. That is, in the third step, the carbon nanotube web 121 bonded to the first support surface 40a and the second support surface 40b is cut along a second direction (Y direction) intersecting with the first direction (X direction), which is the length direction of the carbon nanotube web 121, at a first position (P1 in Fig. 10) and a second position (P2 in Fig. 10) where the first adhesive layer 41a and the second adhesive layer 41b are sandwiched in the first direction (X direction).

[0075] The cutting of the carbon nanotube web 121 in the third step may be performed after removing the pressing member 50 from the structure shown in Figures 11 and 12 formed in the second step, but from the standpoint of preventing breakage of the carbon nanotube web 121, it is preferable to cut the carbon nanotube web 121 while the pressing member 50 is still pressed, i.e., while the structure shown in Figures 11 and 12 is still in place.

[0076] The cutting in the third step is performed using a cutting machine 60 provided in a cutting device 100 shown in Fig. 10. As the cutting means, known cutting means such as a laser light irradiation means, a laser cutter, a cutting blade (shearing) or the like can be used.

[0077] According to the cutting technique of an embodiment of the present invention, it is possible to produce a cut web with uniformly distributed carbon nanotubes from an extremely thin and difficult-to-handle carbon nanotube web 121 drawn from a carbon nanotube array 120 without causing breakage.

[0078] <Carbon nanotube film> The chopped web 1210 may be used alone, or alternatively, the chopped web 1210 may be used in a carbon nanotube film.

[0079] The carbon nanotube film includes a stack of multiple cut webs. For example, the carbon nanotube film includes multiple cut webs, each consisting of multiple carbon nanotubes aligned in the length direction, stacked on top of each other. According to one example, the carbon nanotube film is made solely of carbon nanotubes. One or more of these cut webs, for example, all of these cut webs, are cut webs manufactured by the cut web manufacturing method using the carbon nanotube web cutting method according to the embodiment of the present invention described above. It is preferable that these cut webs are stacked so that the length directions of the carbon nanotubes in each of the adjacent cut webs are different.

[0080] FIG. 14 is a perspective view schematically showing a carbon nanotube film formed by a method for manufacturing a cut web using a method for cutting a carbon nanotube web according to one embodiment of the present invention. 14 includes a first cut web 1210a and a second cut web 1210b, which are overlapped with each other.

[0081] The first cut web 1210a is formed by a plurality of first carbon nanotubes 1200a, each extending in a first direction D1 and aligned in the radial direction.

[0082] The second cut web 1210b is formed by a plurality of second carbon nanotubes 1200b. The second carbon nanotubes 1200b extend in a second direction D2 that intersects with the first direction D1 and are aligned radially. In one example, the first direction D1 and the second direction D2 are perpendicular to each other. The first direction D1 and the second direction D2 may intersect at an angle.

[0083] The above-described carbon nanotube film 12 can be produced, for example, by the following method. First, the carbon nanotube web 121 drawn from the carbon nanotube array 120 by the method described with reference to FIGS. 4 and 6 is used to produce the first cut web 1210a and the second cut web 1210b by the method described with reference to FIGS. 7 to 13. Next, the first cut web 1210a and the second cut web 1210b are overlapped so that the length direction of the first carbon nanotubes 1200a and the length direction of the second carbon nanotubes 1200b intersect. Then, this laminate is pressed. This pressing may be performed on the entire laminate, or on only one or more portions. Alternatively, pressing may not be performed at all. In this manner, the carbon nanotube film 12 is obtained.

[0084] In this carbon nanotube film 12, each of the first cut web 1210a and the second cut web 1210b is obtained by the method described with reference to Figures 7 to 13. Therefore, the first cut web 1210a has no breaks and the first carbon nanotubes 1200a are uniformly distributed, and the second cut web 1210b has no breaks and the second carbon nanotubes 1200b are uniformly distributed.

[0085] Note that the first cut web 1210a may inevitably contain carbon nanotubes that extend in directions other than the first direction D1 and bent carbon nanotubes. Similarly, the second cut web 1210b may inevitably contain carbon nanotubes that extend in directions other than the second direction D2 and bent carbon nanotubes.

[0086] 14, the first cut web 1210a is depicted as a monolayer in which the first carbon nanotubes 1200a are aligned only in the in-plane direction and are not stacked in the thickness direction, but the first carbon nanotubes 1200a may be aligned in the in-plane direction and stacked in the thickness direction. Similarly, the second cut web 1210b is depicted as a monolayer in which the second carbon nanotubes 1200b are aligned only in the in-plane direction and are not stacked in the thickness direction, but the second carbon nanotubes 1200b may be aligned in the in-plane direction and stacked in the thickness direction.

[0087] In Figure 14, the first carbon nanotubes 1200a have the same diameter, but the diameters do not have to be the same. Similarly, in Figure 14, the second carbon nanotubes 1200b have the same diameter, but the diameters do not have to be the same. Also, in Figure 14, the first carbon nanotubes 1200a and the second carbon nanotubes 1200b have the same diameter, but the diameters do not have to be the same.

[0088] 14, the first cut web 1210a and the second cut web 1210b are in contact with each other, but they may be spaced apart from each other. That is, the first carbon nanotubes 1200a and the second carbon nanotubes 1200b may be in contact with each other or spaced apart from each other.

[0089] The carbon nanotube film 12 may include three or more cut webs. In this case, the carbon nanotube film 12 may include two or more first cut webs 1210a and one or more second cut webs 1210b. Alternatively, the carbon nanotube film 12 may include one or more first cut webs 1210a and two or more second cut webs 1210b. Alternatively, the carbon nanotube film 12 may include one or more first cut webs 1210a, one or more second cut webs 1210b, and one or more carbon nanotube webs having a similar structure except for the length direction of the carbon nanotubes.

[0090] <Pellicle> The carbon nanotube film 12 obtained from the cut web 1210 described above can be used, for example, as a pellicle membrane or part thereof in a pellicle.

[0091] FIG. 15 is a schematic cross-sectional view of a pellicle according to one embodiment of the present invention attached to a photomask. 15, the photomask 2 to which the pellicle 1 is attached is a reflective photomask for EUV lithography that uses extreme ultraviolet (EUV light) with a wavelength of 13.5 nm as exposure light. The pellicle 1 may also be attached to other photomasks.

[0092] The photomask 2 includes a substrate 21 , a multilayer reflective film 22 , a capping film 23 , and an absorbing layer 24 .

[0093] The substrate 21 has a flat surface and is made of a material with a low thermal expansion coefficient, such as synthetic quartz.

[0094] The multilayer reflective film 22 is provided on the above-mentioned surface of the substrate 21. The multilayer reflective film 22 includes two or more layers with different refractive indices for EUV light. The multilayer reflective film 22 is designed to exhibit high reflectance for EUV light and low reflectance for other light due to repeated reflection interference.

[0095] Here, the multilayer reflective film 22 includes reflective layers 22a and 22b that have different refractive indices for EUV light and are stacked alternately. For example, one of the reflective layers 22a and 22b is made of silicon and the other is made of molybdenum. Note that in FIG. 15, the multilayer reflective film 22 includes three combinations of the reflective layers 22a and 22b, but typically includes many more combinations, for example, about 40 combinations.

[0096] The capping film 23 is provided on the multilayer reflective film 22. The capping film 23 serves to protect the multilayer reflective film 22 from etching agents and cleaning agents when patterning to obtain the absorption layer 24 or when cleaning the photomask 2. The capping film 23 is made of, for example, ruthenium.

[0097] The absorbing layer 24 is provided on the capping film 23. The absorbing layer 24 is provided with openings in a pattern corresponding to the exposure pattern for the photoresist layer on the semiconductor wafer.

[0098] The absorbing layer 24 is a layer made of a material that exhibits high absorption rate for EUV light, such as tantalum, indium oxide, tellurium oxide, or tin telluride.

[0099] Pellicle 1 is attached to photomask 2. Here, pellicle 1 prevents dust and the like from adhering to the reflective surface of photomask 2. If the photomask is a transmission type, pellicle 1 may be attached to both sides of the photomask.

[0100] The pellicle 1 includes a frame 11 and a carbon nanotube film 12 . Frame 11 is attached to photomask 2 via an adhesive (not shown). Frame 11 serves as a spacer that separates carbon nanotube film 12 from photomask 2. Frame 11 is made of, for example, aluminum.

[0101] In the cutting device 100 according to the embodiment of the present invention, the frame 11 may be used as the support member 40 constituting the auxiliary jig 101 .

[0102] Carbon nanotube film 12 is a pellicle film that exhibits high transmittance to exposure light, in this case EUV light. Carbon nanotube film 12 is supported by frame 11 so as to face photomask 2 with frame 11 sandwiched therebetween. Specifically, the peripheral edge of carbon nanotube film 12 is fixed to frame 11, for example, by an adhesive.

[0103] The thickness of the carbon nanotube film 12 is preferably 500 nm or less. If the carbon nanotube film 12 is made thicker, the transmittance of the exposure light, in this case EUV light, decreases. The thickness of the carbon nanotube film 12 is preferably 10 nm or more. If the carbon nanotube film 12 is made thinner, its mechanical strength decreases and the possibility of dust and the like passing through the carbon nanotube film 12 increases.

[0104] The carbon nanotube film 12 preferably does not allow dust particles having a diameter of more than 30 nm to pass through. That is, the gaps between the carbon nanotubes in the carbon nanotube film 12 preferably do not allow dust particles having a diameter of more than 30 nm to pass through.

[0105] This carbon nanotube film 12 has excellent in-plane uniformity of transmittance, which will be explained below.

[0106] Carbon nanotube films can be obtained, for example, by forming a coating film from a dispersion of carbon nanotubes and then removing the dispersion medium from the coating film. However, this method can cause aggregation of carbon nanotubes during the process of removing the dispersion medium. Therefore, the carbon nanotube film obtained by this method is likely to have areas where carbon nanotubes are densely distributed and areas where carbon nanotubes are sparsely distributed.

[0107] Furthermore, in carbon nanotube films obtained from carbon nanotube dispersions, many of the carbon nanotubes have curved and / or bent shapes. Therefore, the carbon nanotube film obtained by this method contains many intersections of carbon nanotubes. EUV light is absorbed by each of the intersections, and the greater the number of intersections, the greater the amount of EUV light absorbed. Therefore, it is thought that the amount of EUV light absorbed differs between intersections of carbon nanotubes and non-intersections of carbon nanotubes. Furthermore, these intersections are not uniformly distributed, but rather unevenly distributed.

[0108] Therefore, the carbon nanotube film obtained from the dispersion of carbon nanotubes has insufficient in-plane uniformity of transmittance.

[0109] In contrast, in the cut web 1210, as described above, most of the carbon nanotubes 1200 have a shape that extends in the direction in which they were pulled out. That is, the carbon nanotubes 1200 each extend in one direction and are aligned in the radial direction. Furthermore, as described above, the carbon nanotubes 1200 are uniformly distributed in the cut web 1210. Furthermore, in this cut web 1210, there are not many intersections of the carbon nanotubes 1200. Therefore, if the cut webs 1210 are stacked so that the length directions of the carbon nanotubes 1200 they contain intersect, the intersections of the carbon nanotubes 1200 can be uniformly distributed. Therefore, this carbon nanotube film 12 has excellent in-plane uniformity of transmittance.

[0110] Although the carbon nanotube film 12 has been described as being used as a pellicle film or a part thereof, the carbon nanotube film 12 can also be used for other purposes.

[0111] The present invention is not limited to the above-described embodiments, and various modifications can be made in the implementation stage without departing from the spirit of the invention. Furthermore, the embodiments may be implemented in appropriate combinations, in which case the combined effects can be obtained. Furthermore, the above-described embodiments include various inventions, and various inventions can be extracted by combining selected elements from the disclosed elements. For example, if the problem can be solved and the desired effect can be obtained even if some elements are deleted from all elements shown in the embodiments, the configuration from which these elements are deleted can be extracted as an invention. [Explanation of symbols]

[0112] 1...pellicle, 2...photomask, 11...frame, 12...carbon nanotube film, 21...substrate, 22...multilayer reflective film, 22a...reflective layer, 22b...reflective layer, 23...capping film, 24...absorption layer, 31...base material layer, 31a...first base material piece, 31b...second base material piece, 32...catalyst layer, 40...support member, 40a...first support surface, 40b...second support surface, 41a...first adhesive layer, 41b...second adhesive layer, 50...pressing member, 50a...first pressing surface, 50b...second pressing surface, 60...cutting machine, 100...cutting device, 101...auxiliary jig for cutting device, 120...carbon nanotube array, 120a...first part, 120b...second part, 121...carbon nanotube web, 4 01-404...side walls, 501-504...side walls, 1200...carbon nanotube, 1200a...first carbon nanotube, 1200b...second carbon nanotube, 1210...cut web, 1210a...first cut web, 1210b...second cut web, D1...first direction, D2...second direction, S...cleavage plane, G...weakened portion, X...first direction, Y...second direction, D40a...width of first support surface, D40b...width of second support surface, D41a...width of first adhesive layer, D41b...width of second adhesive layer, D50a...width of first pressing surface, D50b...width of second pressing surface, d1...width of non-pressed portion, d2...width of non-pressed portion, P1...first position, P2...second position.

Claims

1. providing a first adhesive layer and a second adhesive layer on the first support surface and the second support surface, respectively; With the first support surface and the second support surface facing one side of a carbon nanotube web having a shape extending in one direction and the first support surface and the second support surface arranged spaced apart from each other in the longitudinal direction of the carbon nanotube web, a first pressing surface presses the carbon nanotube web against the remaining part of the first adhesive layer without pressing the carbon nanotube web against the part of the first adhesive layer that is on the second support surface side, and a second pressing surface presses the carbon nanotube web against the remaining part of the second adhesive layer without pressing the carbon nanotube web against the part of the second adhesive layer that is on the first support surface side, thereby adhering the carbon nanotube web to the first support surface and the second support surface via the first adhesive layer and the second adhesive layer, respectively; cutting the carbon nanotube web adhered to the first support surface and the second support surface at first and second positions sandwiching the first adhesive layer and the second adhesive layer in the length direction, along a direction intersecting the length direction; A method for cutting a carbon nanotube web comprising:

2. The cutting method described in claim 1, wherein the carbon nanotube web is cut at the first position and the second position while the first pressing surface presses the carbon nanotube web against the remaining portion of the first adhesive layer and the second pressing surface presses the carbon nanotube web against the remaining portion of the second adhesive layer.

3. The cutting method described in claim 1 or 2, wherein the carbon nanotube web is formed by cutting the substrate layer of a carbon nanotube structure comprising a substrate layer that can be cut to produce a cut surface parallel to the thickness direction, a catalyst layer provided on one side of the substrate layer, and a carbon nanotube array consisting of a plurality of carbon nanotubes arranged on the catalyst layer and each extending in the thickness direction of the substrate layer, and then separating the resulting first and second substrate pieces from each other, thereby creating a gap between the portion of the carbon nanotube array located on the first substrate piece and the portion of the carbon nanotube array located on the second substrate piece.

4. A method for producing a cut web, comprising cutting the carbon nanotube web by the cutting method according to claim 1 .

5. cutting the carbon nanotube web to obtain a plurality of cut webs; stacking the plurality of cut webs to obtain a carbon nanotube film; 5. A method for producing a carbon nanotube film, comprising: obtaining at least one of the plurality of cut webs by the method according to claim 4.

6. 6. The method for producing a carbon nanotube film according to claim 5, wherein the carbon nanotubes in the carbon nanotube web are oriented in the longitudinal direction, and one or more of the plurality of cut webs and one or more of the plurality of cut webs are stacked so that the orientation directions of the carbon nanotubes intersect.

7. A cut web obtained by the method of claim 4.

8. A carbon nanotube film obtained by the method according to claim 5 or 6.

9. A pellicle membrane comprising the carbon nanotube membrane according to claim 8.

10. A pellicle comprising the pellicle membrane according to claim 9.

11. A cutting device for cutting a carbon nanotube web extending in a first direction in a second direction intersecting the first direction, a support member having a first support surface and a second support surface each extending in one direction, the first support surface and the second support surface being arranged spaced apart from each other in the width direction thereof; a pressing member having a first pressing surface and a second pressing surface each extending in one direction, the first pressing surface and the second pressing surface being arranged spaced apart from each other in the width direction thereof; an adhesiveness applying device that applies a first adhesive layer and a second adhesive layer to the first support surface and the second support surface, respectively; a moving device that moves the first support surface and the first pressing surface relatively with the carbon nanotube web and the first adhesive layer sandwiched therebetween, and moves the second support surface and the second pressing surface relatively with the carbon nanotube web and the second adhesive layer sandwiched therebetween, so that the carbon nanotube web is pressed against a remaining portion of the first adhesive layer without being pressed against a portion of the first adhesive layer on the second support surface side, and is pressed against a remaining portion of the second adhesive layer without being pressed against a portion of the second adhesive layer on the first support surface side, with the width directions of the first support surface and the second support surface and the width directions of the first pressing surface and the second pressing surface coinciding with the first direction; and a cutter that cuts the carbon nanotube web adhered to the first support surface and the second support surface along the second direction at a first position and a second position that sandwich the first adhesive layer and the second adhesive layer in the first direction; A cutting device comprising:

12. An auxiliary jig for use with the cutting device according to claim 11, comprising the support member and the pressing member.

Images