Method for constructing a double-sided or single-sided processing machine, and double-sided or single-sided processing machine

Abstract

To provide a double- or single-sided processing machine with which configuring for the processing of workpieces is possible with little time and material outlay.SOLUTION: In a double- or single-sided processing machine, a first working disk 14 and a counterbearing element 16 can be driven rotationally relative to each other, and a preferably annular working gap s for double-sided or single-sided processing of wafers is formed between the first working disk 14 and the counterbearing element 16, A method for configuring the double- or single-sided processing machine comprises the steps of: actuating, by a control apparatus 34, actuating means for step-by-step or continuously deforming the first working disk 14 between a concave shape and a convex shape; determining from measurement values of width of the working gap s a measurement value average in each case; and determining a minimum value of the measurement average values and on the basis of the determined minimum value, specifying a target value of the means for deforming the first working disk 14 as a starting value for the processing of the flat workpiece in the double- or single-sided processing machine.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a method for constructing a double-sided or single-sided processing machine with a preferably annular first working disc and a preferably annular counter-bearing element, the first working disc and the counter-bearing element being rotatably drivable relative to one another, and wherein a preferably annular working gap is formed between the first working disc and the counter-bearing element for double-sided or single-sided processing of flat workpieces, preferably wafers.

[0002] The present invention also relates to a double-sided or single-sided processing machine comprising a preferably annular first working disc and a preferably annular counter-bearing element, the first working disc and the counter-bearing element being rotatably drivable relative to one another, and wherein a preferably annular working gap for double-sided or single-sided processing of flat workpieces, preferably wafers, is formed between the first working disc and the counter-bearing element. [Background technology]

[0003] For example, in a double-sided polishing machine, flat workpieces, such as wafers, are polished between preferably annular working disks. A preferably annular working gap is disposed between the working disks, in which the flat workpiece, e.g., wafer, is held during processing. For this purpose, what is commonly known as a rotor disk is disposed in the working gap, which has a recess in which the workpiece is suspended. For processing, the working disks are rotated relative to one another by a rotary drive, and the rotor disk also rotates within the working gap due to the external teeth of the rotor disk engaging with corresponding teeth on the pin ring. As a result, the workpiece is transported through the working gap along a cycloidal trajectory during processing. Furthermore, an abrasive, known as a slurry, is introduced into the working gap during double-sided polishing to ensure polishing. Furthermore, in a double-sided polishing machine, the working disk has abrasive cloths, known as polishing pads, at regular intervals on the surface of the working disk that defines the working gap.

[0004] The goal of machining is to achieve a completely machined workpiece with a plane-parallel shape as close as possible. The shape of the working gap is crucial for this. A double-sided machining machine with a means for generating a global deformation on one of the working discs is known from German Patent No. 102006037490B4. Specifically, the upper working disc can be deformed between a globally concave and a globally convex shape. In the case of such a global deformation, the concave or convex shape of the working disc first occurs across the entire diameter of the working disc, as viewed in the radial direction. The ring surface of the preferably annular working disc that defines the working gap remains flat, but the opposing ring portions of the ring surface deform relative to each other to generate a globally concave or convex shape.

[0005] German Patent Application No. 102016102223A1 also discloses a double-sided processing machine with a means for generating a local deformation of one of the working discs, specifically between a local convex shape and a local concave shape. In the case of such a local deformation, a convex or concave shape is generated in the radial direction, for example, between the inner and outer edges of the annular working disc. Therefore, unlike a global deformation, in the case of a local deformation, the ring section itself is deformed concavely or convexly.

[0006] The two aforementioned embodiments can be combined in a double-sided machining center. In this way, a wide range of working gap shapes can be generated, thus ensuring that the working gap is always set in a way that is favorable for the quality of the workpiece, whether it is for machining workpieces with planes that are as parallel as possible, or parallel or not, for example, if the abrasive cloth is partially worn or if the temperature of the components that define the working gap changes.

[0007] The shape of the working gap has a decisive influence on the shape and uniformity of the machined workpiece. Optimal machining results can only be achieved within a narrow parameter window. Due to manufacturing tolerances and, for example, various shapes of abrasive cloths, the location of this parameter window is not specific to a particular double-sided machine, but also varies between different double-sided machines of the same type if the material of certain components of the machine, such as the abrasive disc, is modified, or if the cooling circuit typically provided for the working disc to allow tempering during machining is changed. The appropriate machining parameters for the optimal working gap must be determined manually, using complex methods. The usual method is iterative, involving repeated experimental machining, measuring the machined workpiece, and adjusting the parameters until the appropriate working gap shape is achieved. An alternative method is the statistical design of experiments (DoE) process. Both methods share the commonality that a significant number of data points (experiments) are required to determine the desired working point accurately enough, whether by algebraic or statistical methods. In addition to the significant time and material costs involved in this approach, many workpieces are produced for machining trials that are out of specification and therefore produce rejects. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] German Patent No. 102006037490B4 [Patent Document 2] German Patent Application No. 102016102223A1 Summary of the Invention [Problem to be solved by the invention]

[0009] Starting from the prior art described above, the object of the present invention is therefore to provide a method and a double-sided or single-sided processing machine of the type mentioned at the outset, which allows the configuration of processing of workpieces with little time and material costs. [Means for solving the problem]

[0010] The present invention solves this problem with the aid of independent claims 1 and 9. Advantageous embodiments can be found in the dependent claims, the description and the drawings.

[0011] For a method of the first mentioned type, the present invention a) a control device actuating a means for deforming the first working disc stepwise or continuously between a concave shape and a convex shape; b) measuring the width of the working gap at at least two radially spaced positions of the first working disc stepwise or continuously during the stepwise or continuous deformation of the first working disc and providing the measured values to the control device; c) the control device determines from preferably weighted measurements of the width of the working gap at at least two radially spaced positions an average of the measurements in each case; d) the control device determines the minimum value of the average of the preferably weighted measured values and, based on the determined minimum value, specifies a target value for the means for deforming the first working disk as a starting value for processing a flat workpiece in a double-sided or single-sided processing machine.

[0012] For a device of the first mentioned type, the invention provides: a control device is provided, which is designed to operate a means for deforming the first working disc stepwise or continuously between a concave shape and a convex shape; a measuring device is provided, which is designed to measure the width of the working gap in steps or continuously at at least two radially spaced positions of the first working disc during the stepwise or continuous deformation of the first working disc and to provide the measurement values to the control device; the control device is designed to determine in each case an average of the measured values from preferably weighted measurements of the width of the working gap at at least two radially spaced positions, The problem is solved in that the control device is designed to determine the minimum value of the average of the preferably weighted measured values and, based on the determined minimum value, to specify a target value for the means for deforming the first working disk as a starting value for machining flat workpieces in a double-sided or single-sided machining center.

[0013] The double-sided or single-sided processing machine according to the present invention can be, in particular, a double-sided or single-sided polishing machine. However, the double-sided or single-sided processing machine can also be a double-sided or single-sided lapping machine or a double-sided or single-sided grinding machine. The double-sided or single-sided processing machine has a preferably annular first working disk and a preferably annular counter-bearing element. In a single-sided processing machine, the counter-bearing element can be designed, for example, as a simple weight or pressure cylinder. The counter-bearing element can be, for example, a preferably annular second working disk. The first working disk and the counter-bearing element can be rotatably driven relative to each other, and a preferably annular working gap for processing flat workpieces, such as wafers, is formed between the first working disk and the counter-bearing element. In the case of a double-sided or single-sided polishing machine, at least the first working disk, preferably the counter-bearing element, or respectively the second working disk, can have an abrasive lining (abrasive pad) on one or more of its surfaces defining the working gap. Furthermore, during processing, an abrasive, in particular an abrasive liquid (slurry), can be introduced into the working gap in a manner known per se. The working disk may also be provided with tempering channels through which a tempering liquid, for example cooling water, is introduced to temper the working disk during operation.

[0014] Double-sided or single-sided machining centers are particularly useful for plane-parallel machining of flat workpieces. For machining, the workpiece can be accommodated in a swimming manner in a recess of a rotor disk arranged in the working gap in a manner known per se. The first working disk and the counter-bearing element are driven to rotate relative to each other during operation, for example, by a corresponding drive shaft and at least one drive motor. It is also possible for only one of the first working disk and the counter-bearing element to be driven to rotate. However, both the first working disk and the counter-bearing element can also be driven to rotate, usually in opposite directions. For example, in the case of a double-sided machining center, the rotor disk can also be rotated within the working gap by an appropriate kinematic system during the relative rotation between the first working disk and the counter-bearing element, causing the workpiece arranged in the recess of the rotor disk to follow a cycloidal orbit within the working gap. For example, the rotor disk can have teeth on its outer edge that engage with corresponding teeth on the pin ring. Such machines form what is known as a planetary motion system.

[0015] The first working disc and / or the counter-bearing element may each be held by a support disc. Like the first working disc and the counter-bearing element, the support disc may also be annular or have at least an annular support portion.

[0016] According to the present invention, a control device is provided that operates a means for gradually or continuously deforming a first working disk between a concave and a convex shape. During the gradually or continuously deforming of the first working disk between the convex and the concave shapes, the thickness or, respectively, width of the working gap is measured stepwise or continuously at at least two radially spaced positions by a measuring device. For example, when the first working disk is deformed stepwise, the width of the working gap is measured at at least two positions in each deformation step. The width of the working gap is determined by the distance between the surface of the first working disk and the surface of the counter-bearing element that define the working gap. If the first working disk or the counter-bearing element has a working lining, such as an abrasive cloth, the distance, and thus the width of the working gap, can be determined between the working linings accordingly. The width of the working gap can be measured by a measuring device, such as a distance sensor. For example, an optical measuring device or an eddy current measuring device is conceivable.

[0017] Thus, after the transformation of the first working disk between the concave and convex shapes is complete, there are at least two series of measurements of the width of the working gap, i.e. at at least two radially spaced measurement positions. Of course, it is also possible according to the invention to measure and evaluate the width of the working gap at more than two radially spaced measurement positions, for example at three radially spaced measurement positions.

[0018] The control device also determines an average value in each case from the measured values of the width of the working gap at at least two radially spaced measurement positions recorded for each deformation of the first working disk. Thus, an average value is formed in each case for a given degree of deformation of the first working disk from the measured values at at least two radially spaced positions of the first working disk. The average value can be, for example, a weighted average value, in which the measured values at at least two radially spaced positions are included with a weighting factor. Such weighting is desirable, for example, in the case of radial measurement points that are asymmetrically arranged with respect to one another. In this way, a series of average values corresponding to a series of measured values of the width of the working gap is obtained.

[0019] The control device then determines the minimum value of this series of average values. The series of measured values and the series of average values can be determined, for example, by curve fitting along the individual measurement points when the first working disk is deformed in stages. Thus, the series of average values can also be determined by curve fitting. Based on this, the control device can mathematically establish the minimum value of the series of average values in a simple manner.

[0020] Based on the determined minimum value, the control device specifies a target value for the means for deforming the first working disk. This target value serves as a starting value for processing flat workpieces in the double-sided or single-sided processing machine. The target value, or, respectively, one or more target values, can be specified, after which the target value, or, respectively, one or more target values are displayed to the operator on the operating interface, who can then activate the means for deforming the first working disk in accordance with the target value, or, respectively, one or more target values. However, it is also possible for the control device to automatically activate the means for deforming the first working disk based on the target value determined from the minimum average of the measured values. In this case, the double-sided or single-sided processing machine can be configured according to the present invention in a fully automatic manner by the control device. The control device can also be a control and adjustment device.

[0021] In either case, the double- or single-sided machine is partially automatically configured by the control device as a setup. Thus, the double- or single-sided machine can be configured without repeatedly machining and subsequently measuring the workpiece. The time required for configuration is significantly shorter than in the prior art, specifically shorter than the single machining process required for iterative determination of the configuration parameters, which also requires multiple machining processes to be performed and evaluated. In the best case scenario, the present invention completely avoids the production of defective workpieces.

[0022] For example, the pressure, or force, exerted by the means for deforming the first working disk can be considered as a target value for the control value of the means for deforming the first working disk. The result of the inventive configuration process is a global and / or local deformation of the working gap shape, specifically the width of the working gap, as well as the first working disk and, if applicable, the counter-bearing element, resulting in a satisfactory processing result at the start of the process. Of course, it may be possible to further process the target value specified by the control device, for example, by adding the target value to a processing-specific offset value or a machine-specific offset value. By performing the inventive configuration process multiple times, wear of components of the double- or single-sided processing machine, such as the working lining, for example, the abrasive cloth, can also be monitored. Thus, deterioration of the working lining leads to a change in the width of the working gap. Further wear of the working lining, or, respectively, its necessary replacement, can be inferred from the corresponding monitoring.

[0023] According to one embodiment, the invention can provide that the control device identifies measured values of the width of the working gap at at least two radially spaced positions that form an average minimum of the measured values, and the control device assigns as a target value an actuation value of the means for deforming the first working disk that corresponds to the identified measured values of the width of the working gap at at least two radially spaced positions. In this embodiment, the control device identifies at least two measured values at at least two radially spaced positions that form an average minimum of the measured values based on a predetermined average minimum of the measured values. Then, a value corresponding to these identified measured values of the width of the working gap for actuating the means for deforming the first working disk is assigned by the control device as a target value. In this way, the target value can be assigned in a particularly simple manner.

[0024] The means for deforming the first working disc can generate a global deformation of the first working disc. Additionally or alternatively, the means for deforming the first working disc can generate a local deformation of the first working disc. Means for global and / or local deformation of the counter bearing element can also be provided.

[0025] As explained above, local concave or convex deformations, as known, for example, from German Patent Application No. 102016102223A1, must be distinguished from global concave or convex deformations, as known, for example, from German Patent Application No. 102006037490B4. In the case of local deformations, the convex or, respectively, concave shape or deformation exists in the radial direction between the inner and outer edges of, for example, an annular working disk or, respectively, the annular working surface of the working disk that defines the working gap. If the first working disk is not annular, the convex or, respectively, concave deformation exists in the radial direction between the center and outer edge of the working disk. In the case of global deformations, the concave or convex shape, as explained above, occurs across the entire diameter of the working disk in the radial direction. However, in the case of exclusively global deformations, the working surface is flat in both cases in the radial direction between the inner and outer edges of an annular working disk or, respectively, the center and outer edge of a non-annular working disk.

[0026] According to the invention, the means for deforming the first working disc and / or the counter-bearing element can be both means for generating a global deformation and means for generating a local deformation. When both types of deformation are combined, the working gap can be adjusted to the respective requirements in a particularly flexible and precise manner.

[0027] According to another configuration, the invention can provide that in a first method step, steps a) to d) are performed using a means for generating a global deformation of the first working disc, and in a second subsequent method step, steps a) to d) are again performed using a means for generating a local deformation of the first working disc or of the counter-bearing element, and during the second method step, the means for generating a global deformation is activated with a setpoint value specified after performing the first method step.

[0028] Furthermore, the invention can provide that in a first method step, steps a) to d) are performed using means for generating a local deformation of the first working disc, and in a second subsequent method step, steps a) to d) are again performed using means for generating a global deformation of the first working disc or of the counter-bearing element, and during the second method step, the means for generating the local deformation is activated with a specified target value after performing the first method step.

[0029] In these embodiments, the method according to the invention comprising steps a) to d) is carried out twice in succession, i.e., first, a target for globally or locally deforming the first working disk between a concave and a convex shape is established, and a target for activating the means for generating the global or local deformation is established. The means for generating the other of the global or local deformations is held constant during this first part of the method. Then, during a second part of the method, the means for generating the first global or local deformation between a concave and a convex shape of the counter-bearing element in the form of the first working disk, or preferably the second working disk, is held constant at the operating target value previously established in the first part of the method, and this target value is established and specified as the operating value of the means for generating the other of the global or local deformations.

[0030] In this way, the means for generating the global deformation and the means for generating the local deformation can be sequentially set to the target values that are optimal for the processing result. The setting to the target values and the maintenance during the respective parts of the method are then carried out automatically by the control device. Of course, the two steps described above can also be carried out sequentially, possibly multiple times.

[0031] According to another embodiment, prior to method step a), the control device activates one or more times a means for generating a relative axial movement between the first working disk and the counter-bearing element, so that the first working disk and the counter-bearing element are pressed against each other at their surfaces defining the working gap. The means for generating a relative axial movement can specifically constitute an axial drive for the first working disk and / or the counter-bearing element. By pressing the first working disk and the counter-bearing element together at their surfaces defining the working gap, the working linings of the first working disk and / or the counter-bearing element can be compressed and any residual liquid contained therein can be expelled. As a result, identical starting conditions, including the working linings, e.g., abrasive cloths, are ensured prior to the start of the construction process according to the invention.

[0032] According to another embodiment, the means for deforming the first working disk can be designed to generate a global deformation of the first working disk. The invention also provides that the first working disk is fixed to a first support disk, a support ring is provided on which the first support disk is suspended, and means controllable by a control device are arranged between the support ring and a ring portion of the first support disk lying radially outward from the support ring, by means of which a radial force can be applied to the first support disk around the circumference of the support ring by a force generating device. Such an embodiment for generating a global deformation is known, for example, from German Patent No. 102006037490B4. This embodiment can be used in the present invention as described therein.

[0033] In principle, the means for generating the global deformation of the first working disk and / or the local deformation of the first working disk or the counter-bearing element can be hydraulic, pneumatic, and / or mechanical. In each case, suitable actuators for manipulating the shape of the first working disk and / or the counter-bearing element are provided. The first working disk can be, for example, an upper working disk, and the counter-bearing element can be a lower counter-bearing element, for example, a lower working disk.

[0034] As already explained, the means for deforming the first working disc can be designed to generate a local deformation of the first working disc. Means for deforming the counter-bearing element can also be provided, which means are designed to generate a local deformation of the counter-bearing element.

[0035] The present invention further provides that the first working disk is fixed to the first support disk and / or the counter-bearing element is fixed to the second support disk, and the means for generating a local deformation of the first working disk and / or the counter-bearing element include an annular pressure volume designed between the first support disk and the first working disk and / or the second support disk and the counter-bearing element, the pressure volume being connected to a fluid supply operable by a control device so that pressure builds up in the pressure volume and generates a predetermined local deformation of the first working disk and / or the counter-bearing element. The present invention further provides that the first working disk is fixed to the first support disk only in the region of its outer edge and its inner edge, and / or the counter-bearing element is fixed to the second support disk only in the region of its outer edge and its inner edge. These embodiments for generating local deformations are known, for example, from German Patent Application No. 102016102223A1. The present invention can use these embodiments as described in that document.

[0036] As already explained, the invention can provide that the counter-bearing element is formed by a preferably annular second working disc, the first and second working discs are arranged coaxially with one another and can be driven in rotation relative to one another, and a working gap is formed between the working discs for double-sided or single-sided machining of flat workpieces.

[0037] The method according to the invention can be carried out using a double-sided or single-sided processing machine according to the invention, and therefore the double-sided or single-sided processing machine according to the invention, in particular its control and measuring devices, can be designed to carry out the method according to the invention.

[0038] Exemplary embodiments of the invention are explained in more detail below using diagrammatically illustrated drawings. [Brief explanation of the drawings]

[0039] [Figure 1] 1 shows a partial representation of a double-sided processing machine according to the invention according to a first exemplary embodiment; [Figure 2] 2 shows two operating states of the double-sided processing machine shown in FIG. 1. [Figure 3] 2 shows a partially depicted cross-sectional view of a double-sided processing machine according to another exemplary embodiment of the present invention; [Figure 4] 4 shows the double-sided processing machine of FIG. 3 in another operating state. [Figure 5] 4 shows the double-sided processing machine of FIG. 3 in another operating state. [Figure 6] A diagram for explaining the configuration process of the double-sided processing machine shown in Figure 1 is shown. [Figure 7] A diagram for explaining the configuration process of the double-sided processing machine shown in Figure 3 is shown. DETAILED DESCRIPTION OF THE INVENTION

[0040] The double-sided processing machine shown in FIG. 1 can be, for example, a double-sided grinding machine and has an upper support disk 10 and a lower support disk 12, each connected to the shaft of a rotary drive (not shown). A first working disk 14 is connected to the upper support disk 10, and a second working disk 16 is connected to the lower support disk 12. The working disks 14, 16, like the support disks 10, 12, are each annularly designed and form a working gap s between them. Each of the working disks 14, 16 can have a working lining, e.g., an abrasive cloth, on its surface that defines the working gap s. The support disks 10, 12 can also be equipped with a suitable tempering channel system for tempering, e.g., cooling, by passing a tempering liquid, e.g., cooling water, through the working disks during operation.

[0041] The upper support disk 10 has an upwardly extending ring portion 18 approximately in the center of the radial extension of its working surface. A support ring 20 is arranged inside the ring portion 18, which is connected to the upper shaft 24 of the rotary drive device via arms 22 arranged in a star shape. By means (not shown in FIG. 1), the support disk 10 is suspended on the support ring in such a way that rotation of the shaft 24 also causes rotation of the working disk 14.

[0042] A ring slot 26 is formed between the support ring 20 and the ring portion 18. The ring slot is sealed and connected to a channel 28 which communicates with a pressure intensifier 30, to which a variable pressure is supplied by a proportional valve 32. The illustration is only schematic and is intended to show that by means of the pressure intensifier 30 and the proportional valve 32, a predetermined pressure can be generated and maintained in the ring slot 26. The proportional valve 32 is actuated by a control device 34 which receives measurements of the width of the working gap s measured by two sensors 42, or respectively 44, embedded in the first working disk 14 at two radially spaced measuring positions.

[0043] The left diagram of Figure 2 shows how the upper working disk 14 assumes a convex shape by generating the appropriate pressure in the ring slot. It is understood that this diagram is greatly exaggerated. The convex shape is a gap width difference in the μ range relative to the lower working disk 16. The right diagram of Figure 2 shows how the upper support disk 10, and thus the upper working disk 14, assumes a concave shape due to the described deformation.

[0044] To configure a double-sided processing machine, the control device 34 controls the proportional valve 32 as part of the means for generating the overall deformation of the first working disk 14 to gradually or continuously deform the first working disk 14 between the overall convex shape shown in the left diagram of Fig. 2 and the overall concave shape shown in the right diagram of Fig. 2. During the gradually or continuously deforming of the first working disk 14, the width of the working gap s, or the distance between the surfaces of the working disks 14, 16 that define the working gap, respectively, is measured by sensors 42, 44 as measuring devices 42, 44 at two radially spaced positions of the first working disk 14, and the measured values are provided to the control device 34. From the measurements of the width of the working gap at at least two radially spaced positions, the control device 34 determines the average of the measured values in each case. The control device also determines the minimum average value of the measured values and, based on the determined minimum value, specifies the target value of the means for deforming the first working disk 14, in this case specifically the first target value of the proportional valve 32, as the starting value for machining a flat workpiece in the double-sided machining center.

[0045] 3 to 5 show a double-sided processing machine according to another exemplary embodiment. In the exemplary embodiment according to FIGS. 3 to 5, means for generating a local deformation of the lower second working disk 16 are provided. This exemplary embodiment can be combined with the exemplary embodiment according to FIGS. 1 to 2 so that the double-sided processing machine has both the means for generating a global deformation of the first working disk 14 shown in FIGS. 1 and 2 and the means for generating a local deformation of the second working disk 16 shown in FIGS. 3 to 5. The configuration process described below for the double-sided processing machine according to FIGS. 3 to 5 can be performed independently of the configuration process described above with reference to FIGS. 1 and 2, or can be performed as appropriate in a second part of the method after the configuration process described above with reference to FIGS. 1 and 2 has been completed as part of the first part of the method. In the latter case, the control device 34 activates the means for generating a global deformation according to FIGS. 1 and 2 to a target value determined as described above and keeps that target value constant during the configuration process related to FIGS. 3 to 5, as described below.

[0046] In Figures 3 to 5, some of the same reference numerals are used as in Figures 1 and 2. In this respect, these are in principle functionally identical components and can therefore be combined as described in connection with the exemplary embodiment according to Figures 1 and 2.

[0047] As explained in connection with the exemplary embodiment according to Figures 1 and 2, the double-sided processing machine according to the invention shown in Figures 3 and 5 also comprises an annular upper support disk 10 and an equally annular lower support disk 12. A first annular upper working disk 14 is then fixed to the upper support disk 10, and a second annular lower working disk 16 is likewise fixed to the lower support disk 12. A likewise annular working gap s is then formed between the annular working disks 14, 16, in which a flat workpiece, for example a wafer, is double-sided processed during operation. The double-sided processing machine can be, for example, a polishing machine, a lapping machine or a grinding machine, as shown in Figures 1 and 2.

[0048] The upper support disk 10 and, therefore, the upper working disk 14, and / or the lower support disk 12 and, therefore, the lower working disk 16, can be driven to rotate relative to one another by suitable drives, for example, including an upper drive shaft and / or a lower drive shaft and at least one drive motor. Such drives are known per se and are not shown in detail for clarity reasons. In a manner known per se, the workpiece to be machined can be held in the working gap s while floating on the rotor disk. A suitable movement system, for example, a planetary movement system, ensures that the rotor disk also rotates within the working gap s during the relative rotation of the support disks 10, 12, or, respectively, the working disks 14, 16. The upper working disk 14 or the upper support disk 10, and possibly the lower working disk 16 or the lower support disk 12, can be designed with tempering channels through which a tempering fluid, e.g., cooling water, can flow during operation. This is also known per se and is not shown in more detail.

[0049] 3 to 5 further comprises measuring devices, designated by the reference numerals 46, 48, and 50 in FIG. 3, for measuring the width of the working gap s at a plurality of, in this case three, radially spaced positions. Similar to the measuring devices 42, 44 in the exemplary embodiment according to FIGS. 1 and 2, the measuring devices according to the exemplary embodiment of FIGS. 3 to 5 also measure in particular the distance between the surfaces of the working disks 14, 16 that delimit the working gap s. As can be seen, the distance measuring device designated by the reference numeral 46 measures the distance between the upper working disk 14 and the lower working disk 16 in the region of the radially outer edge of the working gap s. The distance measuring device designated by the reference numeral 50 measures the distance between the upper working disk 14 and the lower working disk 16 in the region of the radially inner edge of the working gap s. The distance measuring device designated by the reference numeral 48 measures the distance between the upper working disk 14 and the lower working disk 16 in the center of the working gap s.

[0050] In this case, the lower working disk 16 is fixed to the lower support disk 12 only in the regions of its outer edge and inner edge, as shown by reference numerals 52 and 54 in FIG. 3, and is, for example, screwed along an arc in any case. In contrast, the lower working disk 16 is not fastened to the lower support disk 12 between these fastening positions 52 and 54. Instead, an annular pressure volume portion 56 is arranged between the lower support disk 12 and the lower working disk 16 between these fastening positions 52 and 54. The pressure volume portion 56 is connected via a dynamic pressure line 58 to a pressure fluid reservoir (not shown in detail), for example a liquid reservoir, specifically a water reservoir. A pump and a control valve can be arranged in the dynamic pressure line 58, and the pump and the control valve can be operated by the control device 34 as means for generating local deformation of the lower working disk 16. In this way, the desired pressure acting on the lower working disk 16 can be built up in the pressure volume portion 56 by the fluid introduced into the pressure volume portion 56. The pressure present in the pressure volume portion 56 can be measured by a pressure measuring device (not shown in more detail). The measurement data of the pressure measuring device can also be applied to the control device 34 so that the control device 34 can set a predetermined pressure in the pressure volume portion 56.

[0051] By being able to move freely between the fastening positions 52 and 54, by setting a sufficiently high pressure in the pressure volume portion 56, the lower working disk 16 can be made locally convex, as shown by the dotted line with reference numeral 60 in FIG. 4. Assuming the pressure p0 in the pressure volume portion 56 in the operating state of FIG. 3 where the lower working disk 16 has a planar shape, the convex deformation of the lower working disk 16 shown by 60 in FIG. 4 can be achieved by setting a pressure p1 > p0. On the other hand, the local concave deformation of the lower working disk 16 can be achieved by setting a pressure p2 < p0 in the pressure volume portion 56, as shown by the dotted line with reference numeral 62 in FIG. 5.

[0052] In this case, it can be seen that the lower working disc 16, viewed from the radial direction, can have a locally convex shape (FIG. 4) or, respectively, a locally concave shape (FIG. 5) between its inner edge in the area of the fastening position 52 and its outer edge in the area of the fastening position 54.

[0053] As described above in connection with FIGS. 1 and 2 , in the exemplary embodiment according to FIGS. 3 to 5 , an automatic configuration process is also performed by the control device 34. For this purpose, the control device 34 first activates a means for gradually or continuously deforming the first working disk 14 between a local concave shape and a local convex shape, as indicated by reference numerals 60 and 62 in FIGS. 4 and 5 . During the gradually or continuously deforming the first working disk 14, the width of the working gap at three radially spaced positions of the first working disk 14 is measured gradually or continuously, and the measured values are provided to the control device 34. Based on this, the control device 34 determines an average of the measured values at each of the three radially spaced positions. For example, the measured values at three different radial positions can be weighted so that the measured values are included in the determination of the average value with a corresponding weighting factor. Furthermore, the control device 34 determines the minimum value of the average of the measured values and, based on the determined minimum value, specifies a target value for the means for deforming the second working disk 16 as a starting value for machining flat workpieces in a double-sided machining center. Specifically, for this purpose, the control device 34 controls the pressure in the pressure volume 56 via the dynamic pressure line 58 in accordance with the determined target value.

[0054] As mentioned, the method described with reference to Figures 3 to 5 can be carried out in particular in the second part of the method after the first part of the method described with reference to Figures 1 and 2. In this way, the control device 34 can specify and set a completely automatic configuration of the double-sided processing machine, including the global and local working gap shapes that are optimal for processing in each case. However, it is also conceivable to carry out the method described with reference to Figures 3 to 5 without using the method described with reference to Figures 1 and 2, in which case the lower working disc 16 in Figures 3 to 5 can be the first working disc 16.

[0055] In the diagram shown in Figure 6, the construction process according to Figures 1 and 2 is explained in more detail. In particular, the width (distance) of the working gap is shown therein over time during which the first working disc 14 is transformed between a generally concave shape and a generally convex shape. Curve d outside indicates the corresponding measurement value of the measuring device 44 measuring the width of the working gap at the radially outer position, and curve d inside indicates the corresponding measurement value of the measuring device 42 measuring at a radially inner position. evaluated is the associated series of average values determined by the controller 34. Next, the series of average values d evaluated The minimum value of can be the ideal value. In the example shown, this value is the value of the group d inside and d outside The minimum value may be outside the crossover point depending on various parameters such as the dressing formula or, respectively, the wear of the abrasive lining.

[0056] Figure 7 shows a diagram corresponding to the construction process according to Figures 3 to 5. In this case, the curve d outside 3, i.e. at the radially outer measurement position, during the local deformation of the second working disc 16 between a local concave shape and a local convex shape. inside represents a series of measurements at the radially inner measurement location 50. Curve d middle Curve d shows the measurement in the central region 48 of FIG. evaluated denotes the average of a series of measurements. The minimum value can then be seen as the optimum value for the start of the machining process. [Explanation of symbols]

[0057] s Working gap d inside curve d outside curve d middle curve devaluated curve 10 Upper Support Disk 12 Lower Support Disk 14 First working disk 16 Second working disk 18 Ring part 20 Support ring 22 Arm 24 Upper Shaft 26 Ring Slot 28 channels 30 Pressure booster 32 Proportional valve 34 Control device 42 sensors 44 sensors 46 Distance measuring device 48 Distance Measuring Device 50 Distance measuring device 52 Fastening position 54 Fastening position 56 Pressure volume section 58 Dynamic pressure line 60 Convex Deformation 62 Concave Deformation

Claims

1. 1. A method for constructing a double or single sided processing machine with a preferably annular first working disc (14) and a preferably annular counter bearing element (16), comprising: the first working disc (14) and the opposing bearing element (16) are rotatably drivable relative to each other; Between the first working disc (14) and the counter-bearing element (16) one or more preferably annular working gaps are formed for double-sided or single-sided machining of flat workpieces, preferably wafers, in the method, a) a control device (34) actuating means for deforming the first working disc (14) stepwise or continuously between a concave shape and a convex shape; b) measuring stepwise or continuously the width of the working gap at at least two radially spaced positions of the first working disc (14) during the stepwise or continuous deformation of the first working disc (14) and providing the measurements to the control device (34); c) the control device (34) determining from the measurements of the width of the working gap at the at least two radially spaced locations an average of the measurements at each of the at least two radially spaced locations; d) the control device (34) determines the minimum value of the averages of the measured values and, based on the determined minimum value, specifies a target value for the means for deforming the first working disc (14) as a starting value for machining the flat workpiece in the double-sided or single-sided machining device; A method comprising:

2. the control device (34) identifies the measurement of the width of the working gap that forms the minimum of an average of the measurements at the at least two radially spaced locations; 2. The method according to claim 1, wherein the control device (34) specifies operating values of the means for deforming the first working disc (14) that correspond to the identified measurements of the width of the working gap at the at least two radially spaced positions.

3. 2. The method according to claim 1, characterized in that the means for deforming the first working disc (14) produces a global and / or local deformation of the first working disc (14).

4. 2. A method according to claim 1, further comprising providing means for globally and / or locally deforming the counter-bearing element (16).

5. in a first part of the method, steps a) to d) are carried out using means for generating a global deformation of the first working disc (14), and in a second subsequent part of the method, steps a) to d) are again carried out using means for generating a local deformation of the first working disc (14) or of the counter-bearing element (16), 5. The method according to claim 3, wherein during the second subsequent part of the method, the means for generating the global deformation operate with the target value specified after carrying out the first part of the method.

6. in a first part of the method, steps a) to d) are carried out using means for generating a local deformation of the first working disc (14), and in a second subsequent part of the method, steps a) to d) are again carried out using means for generating a global deformation of the first working disc (14) or of the counter-bearing element (16), 5. The method according to claim 3, wherein during the second subsequent part of the method, the means for generating the local deformation are operated with the target value specified after carrying out the first part of the method.

7. 5. The method according to claim 1, wherein the control device (34) activates, prior to method step a), one or more times means for generating a relative axial movement between the first working disc (14) and the counter-bearing element (16) so that the first working disc (14) and the counter-bearing element (16) are pressed against each other at surfaces of the first working disc (14) and the counter-bearing element (16) that define the one or more working gaps.

8. A double-sided or single-sided processing machine comprising a first working disc (14), preferably annular, and a counter-bearing element (16), preferably annular, the first working disc (14) and the opposing bearing element (16) are rotatably drivable relative to each other; In a double-sided or single-sided processing machine, one or more preferably annular working gaps are formed between the first working disc (14) and the counter-bearing element (16) for double-sided or single-sided processing of flat workpieces, preferably wafers, a control device (34) is provided, designed to activate means for deforming said first working disc (14) stepwise or continuously between a concave and a convex shape; measuring devices (42, 44, 46, 48, 50) are provided which are designed to measure the width of the working gap in steps or continuously at least two radially spaced positions of the first working disc (14) during the stepwise or continuous deformation of the first working disc (14) and to provide the measured values to the control device (34); the control device (34) is designed to determine from the measurements of the width of the working gap at the at least two radially spaced positions an average of the measurements at each of the at least two radially spaced positions; - double-sided or single-sided processing machine, characterized in that the control device (34) is designed to determine a minimum value of the average of the measured values and, based on the determined minimum value, to specify a target value for the means for deforming the first working disc (14) as a starting value for processing the flat workpiece in the double-sided or single-sided processing machine.

9. the control device (34) is designed to determine, at the at least two radially spaced positions, the measurement of the width of the working gap that forms the minimum of the averages of the measurements; 9. The double-sided or single-sided processing machine according to claim 8, characterized in that the control device (34) is designed to specify as the target value an operating value of the means for deforming the first working disc (14) that corresponds to the identified measured values of the width of the working gap at the at least two radially spaced positions.

10. 9. A double-sided or single-sided processing machine according to claim 8, characterized in that the means for deforming the first working disc (14) are designed to generate a global and / or local deformation of the first working disc (14).

11. The first working disc (14) is fixed to the first supporting disc (10); a support ring (20) is provided, on which the first support disk (10) is suspended; 11. A double-sided or single-sided processing machine according to claim 10, characterized in that means controllable by the control device (34) are arranged between the support ring (20) and a ring portion (18) of the first support disc (10) lying radially outward from the support ring (20), and by means of said means a radial force can be applied to the first support disc (10) around the circumference of the support ring (20) by a force generating device.

12. 9. A double-sided or single-sided processing machine according to claim 8, characterized in that means for globally and / or locally deforming the counter-bearing elements (16) are also provided.

13. 11. The double-sided or single-sided processing machine according to claim 10, characterized in that the means for generating a global and / or local deformation of the first working disc (14) and / or the means for generating a global and / or local deformation of the counter-bearing element (16) are hydraulic and / or pneumatic and / or mechanical means.

14. the first working disc (14) is fixed to the first support disc (10) and / or the counter bearing element (16) is fixed to the second support disc (12); 11. The double-sided or single-sided processing machine according to claim 10, characterized in that the means for generating the local deformation of the first working disc (14) and / or the counter-bearing element (16) comprise an annular pressure volume (56) designed between the first support disc (10) and the first working disc (14) and / or between the second support disc (12) and the counter-bearing element (16), the pressure volume (56) being connected to a fluid supply actuatable by the control device (34) so that pressure builds up in the pressure volume (56) and generates a predetermined local deformation of the first working disc (14) and / or the counter-bearing element (16).

15. 11. The double-sided or single-sided processing machine according to claim 10, characterized in that the first working disc (14) is fixed to the first supporting disc (10) only in the regions of the outer and inner edges of the first working disc (14) and / or the counter-bearing element (16) is fixed to the second supporting disc (12) only in the regions of the outer and inner edges of the counter-bearing element (16).

16. said opposing bearing element (16) being formed by a second working disc (16), preferably annular; The first and second working discs (14, 16) are arranged coaxially with each other and can be rotated relative to each other; 9. The double-sided or single-sided processing machine according to claim 8, characterized in that the one or more working gaps for double-sided or single-sided processing of the flat workpiece are formed between the working discs (14, 16).

17. A double-sided or single-sided processing machine according to any one of claims 8 to 16, characterized in that it is designed to be implemented using the method according to claim 1.

18. 18. The double-sided or single-sided processing machine according to claim 17, characterized in that the control device (34) is designed to perform, in a first part of the method, the method steps a) to d) using means for generating a global deformation of the first working disc (14), and to perform, in a second subsequent part of the method, the method steps a) to d) again using means for generating local deformations of the first working disc (14) or of the counter-bearing element (16), and to operate, during the second subsequent part of the method, the means for generating the global deformation according to the setpoint value specified after performing the first part of the method.

19. 18. The double-sided or single-sided processing machine according to claim 17, characterized in that the control device (34) is designed to perform, in a first part of the method, the method steps a) to d) using means for generating local deformations of the first working disc (14), and to perform, in a second subsequent part of the method, the method steps a) to d) again using means for generating global deformations of the first working disc (14) or of the counter-bearing element (16), and to operate, during the second subsequent part of the method, the means for generating local deformations according to the setpoint values specified after performing the first part of the method.

20. 19. The double-sided or single-sided processing machine according to claim 18, characterized in that the control device (34) is designed, prior to method step a), to activate one or more times means for generating an axial relative movement between the first working disc (14) and the counter-bearing element (16) in order to press the first working disc (14) and the counter-bearing element (16) against each other at surfaces of the first working disc (14) and the counter-bearing element (16) that define the one or more working gaps.

21. 9. The method according to any one of claims 1 to 4, characterized in that it is carried out using a double-sided or single-sided processing machine according to claim 8.

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