Gate-all-around transistor and method of forming same

Abstract

The techniques herein provide devices and methods for forming optimized gate-all-around transistors. One method may include forming a plurality of nanosheets, each of which includes a plurality of alternating first and second layers, and etching the plurality of nanosheets to laterally recess the second layer relative to the first layer. The method may further include forming a spacer material along exposed portions of each of the plurality of nanosheets, etching the spacer material to remove the spacer material from the first layer of each of the plurality of nanosheets, and performing a sidewall process on the plurality of nanosheets after the spacer material is removed from the first layer of each of the plurality of nanosheets to form an inner spacer on the recessed second layer.

Description

[Technical Field]

[0001] Related Applications

[0001] This application claims priority to U.S. non-provisional patent application No. 17 / 967,099, entitled "GATE-ALL-AROUND TRANSISTORS AND METHODS OF FORMING," filed October 17, 2022, which in turn claims priority to U.S. provisional patent application No. 63 / 285,276, entitled "GATE-ALL-AROUND TRANSISTORS AND METHODS OF FORMING," filed December 2, 2021, the entire contents of which are incorporated herein by reference.

[0002]

[0002] The present embodiments relate to patterning semiconductor devices, and more particularly to devices and techniques for forming optimized gate-all-around transistors. [Background technology]

[0003]

[0003] As integrated circuit (IC) technology progresses toward smaller technology nodes, multi-gate devices have been used to improve gate control by increasing gate-channel contact, lowering off-state current, and reducing short-channel effects (SCEs). Multi-gate devices generally refer to devices with gate structures or portions thereof located on multiple sides of a channel region. FinFETs and gate-all-around (GAA) transistors, both of which are classified as non-planar transistors, are examples of multi-gate devices that enable high-performance, low-leakage applications. GAA transistors typically have gate structures that extend partially or completely around the channel region, providing access to the channel region on two or more sides. The channel region of a GAA transistor can be formed from a nanowire, nanosheet, or other nanostructure.

[0004]

[0004] Successfully integrating various multi-gate devices, including nanowire and / or nanosheet transistors, in a single integrated circuit is challenging. For example, differences in lateral etch rates, due to factors such as polysilicon crystallization orientation, can lead to rough, sloped, and / or uneven sidewall surfaces, resulting in distorted vertical profiles. As processing progresses, conformal spacers formed on the uneven sidewall surfaces inherit profile distortions, resulting in inconsistent gate length patterning.

[0005] Therefore, there is a need for improved techniques for controlling gate length variations during processing. Summary of the Invention

[0006] This Summary is provided to introduce in a simplified form selected concepts that are further described below in the Detailed Description. This Summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to aid in determining the scope of the claimed subject matter.

[0007] In one aspect, a method can include forming a plurality of nanosheets, each nanosheet including a plurality of alternating first and second layers, and etching the plurality of nanosheets to laterally recess the second layer relative to the first layer. The method can further include forming a spacer material along exposed portions of each of the plurality of nanosheets, etching the spacer material to remove the spacer material from the first layer of each of the plurality of nanosheets, and performing a sidewall process on the plurality of nanosheets after the spacer material has been removed from the first layer of each of the plurality of nanosheets, thereby forming an inner spacer on the recessed second layer.

[0008] In another aspect, a system can include a processor and a memory storing instructions executable by the processor to form a plurality of nanosheets, each nanosheet including a plurality of alternating first and second layers, etching the plurality of nanosheets to laterally recess the second layer relative to the first layer, and forming an inner spacer on the recessed second layer by forming a spacer material along exposed portions of each of the plurality of nanosheets, etching the spacer material to remove the spacer material from the first layer of each of the plurality of nanosheets, and performing a sidewall process on the plurality of nanosheets after the spacer material has been removed from the first layer of each of the plurality of nanosheets.

[0009]

[0009] In yet another aspect, the device may include a plurality of dummy gates on a plurality of nanosheets, each of the plurality of nanosheets including alternating first and second layers, the plurality of nanosheets extending vertically from a substrate base, and a first thickness in the horizontal direction of the second layer that is less than a second thickness in the horizontal direction of the first layer, and an inner spacer formed only along the second layer.

[0010]

[0010] The accompanying drawings illustrate exemplary techniques of the present disclosure, including practical applications of the principles of the present disclosure, as follows: [Brief explanation of the drawings]

[0011] [Figure 1]

[0011] FIG. 1 illustrates a perspective view of a substrate of an exemplary device according to an embodiment of the present disclosure. [Figure 2]

[0012] FIG. 1 shows a perspective view of a pair of nanosheet structures formed from a substrate of a device according to an embodiment of the present disclosure. [Figure 3]

[0013] 1 illustrates a perspective view of a source trench isolation (STI) layer of a device according to an embodiment of the present disclosure. [Figure 4]

[0014] 1 shows a perspective view of multiple dummy gates formed on a pair of nanosheet structures of a device according to an embodiment of the present disclosure. [Figure 5]

[0015] 1 shows a perspective view of spacers formed on a pair of nanosheet structures and on a plurality of dummy gate structures according to an embodiment of the present disclosure. [Figure 6]

[0016] FIG. 1 shows a perspective view of a device after removing a spacer from above a pair of nanosheet structures according to an embodiment of the present disclosure. [Figure 7A]

[0017] FIG. 1 shows a perspective view of a device after removing a portion of a pair of nanosheet structures according to an embodiment of the present disclosure. [Figure 7B]

[0018] FIG. 1 shows a cross-sectional side view of a device after removing a portion of a pair of nanosheet structures according to an embodiment of the present disclosure. [Figure 8]

[0019] 1 shows a cross-sectional side view of a device during a measurement process according to an embodiment of the present disclosure. [Figure 9A]

[0020] FIG. 1 shows a perspective view of a device after partial removal of a second layer of a pair of nanosheet structures according to an embodiment of the present disclosure. [Figure 9B]

[0021] FIG. 1 shows a cross-sectional side view of a device after partial removal of a second layer of a pair of nanosheet structures according to an embodiment of the present disclosure. [Figure 10]

[0022] FIG. 1 shows a cross-sectional side view of a device including a spacer material formed on a pair of nanosheet structures according to an embodiment of the present disclosure. [Figure 11A]

[0023] FIG. 1 shows a perspective view of a device after removing the spacer material from above the first layer of a pair of nanosheet structures, according to an embodiment of the present disclosure. [Figure 11B]

[0024] FIG. 1 shows a cross-sectional side view of a device after removing the spacer material from above the first layer of a pair of nanosheet structures, according to an embodiment of the present disclosure. [Figure 11C]

[0025] FIG. 1 shows a cross-sectional side view of a device during injection of a pair of nanosheets, according to an embodiment of the present disclosure. [Figure 12A]

[0026] 1 illustrates a perspective view of a device after forming source / drain (S / D) epitaxial layers between dummy gate structures according to an embodiment of the present disclosure. [Figure 12B]

[0027] 1 illustrates a cross-sectional side view of a device after forming S / D epitaxial layers between multiple dummy gate structures according to an embodiment of the present disclosure. [Figure 13]

[0028] 1 shows a schematic diagram of an exemplary system according to an embodiment of the present disclosure. [Figure 14A]

[0029] 1 illustrates a process flow of a method for forming a device according to an embodiment of the present disclosure. [Figure 14B] 1 illustrates a process flow of a method for forming a device according to an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0012]

[0030] The drawings are not necessarily to scale. The drawings are merely representational and are not intended to portray specific parameters of the present disclosure. The drawings are for illustrating exemplary embodiments of the present disclosure and therefore should not be considered limiting in scope. In the drawings, like numbering represents like elements.

[0013]

[0031] Additionally, certain elements in some of the figures may be omitted or not drawn to scale for clarity of illustration. The cross-sectional views may be in the form of "slices" or "near-sighted" cross-sections, and certain background lines that would be visible in a "true" cross-section have been omitted for clarity of illustration. Additionally, some reference numbers may be omitted in certain figures for clarity of illustration.

[0014]

[0032] The methods, systems, and devices according to the present disclosure will now be described in more detail with reference to the accompanying drawings, in which various embodiments are shown. The present methods, systems, and devices may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Instead, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the methods to those skilled in the art.

[0015]

[0033] Embodiments described herein advantageously reduce dummy gate CD variations and improve nanosheet gate length uniformity by laterally etching a first layer type relative to a second layer type of a set of nanosheets in a gate-all-around (GAA) transistor. An inner spacer can then be formed on the first layer type prior to source / drain (S / D) epi formation. In some embodiments, sidewall processing can be performed on the inner spacer prior to S / D epi formation. In doing so, an optimized gate-all-around (GAA) transistor can be formed.

[0016]

[0034] FIG. 1 shows a perspective view of a semiconductor device (hereinafter "device") 100 at an early stage of processing according to one or more embodiments described herein. The device 100 can be a GaAs device structure, a vertical GaAs device structure, a horizontal GaAs device structure, or a nanosheet field effect transistor (FinFET) device structure. As shown, the device 100 can include a nanosheet stack 102 including a substrate base 104 and a plurality of alternating first layers 106 and second layers 108 formed on the substrate base 104. In various embodiments, the alternating plurality of first layers 106 and second layers 108 can include 2-10 first layers 106 and 2-10 second layers 108. The composition of the first layers 106 can differ from the composition of the second layers 108, for example, to achieve etch selectivity and / or different oxidation rates during subsequent processing. In some embodiments, the alternating first layers 106 and second layers 108 may include different materials, different constituent atomic percentages, different constituent weight percentages, and / or other different properties to achieve a desired etch selectivity.

[0017]

[0035] In this embodiment, the first layer 106 may include silicon (Si), and the second layer 108 may include silicon germanium (SiGe), which has a different etching selectivity than silicon. Without limitation, each first layer 106 may have a thickness of about 1 nm to about 10 nm, and each second layer 108 may have a thickness of about 1 nm to about 10 nm, and the two thicknesses may be the same or different. Without limitation, the alternating first layers 106 and second layers 108 may be epitaxially grown layer by layer in the depicted interleaved and interleaved configuration until the desired number of semiconductor layers is reached.

[0018]

[0036] As shown in FIG. 2 , the nanosheet stack 102 can be processed (e.g., etched) to form a plurality of structures, or nanosheets 110, extending vertically from the substrate base 104. Each of the nanosheets 110 can include a top surface 112 and a pair of opposing sidewall surfaces 114. Adjacent nanosheets 110 can be separated by trenches 109. The nanosheets 110 can be patterned by any suitable method. For example, the nanosheets 110 can be patterned using one or more photolithography processes, including double-patterning or multi-patterning processes. Generally, double-patterning or multi-patterning processes combine photolithography and self-alignment processes to create patterns with smaller pitches than would otherwise be obtainable using, for example, a single direct photolithography process. The embodiments herein are not limited in this context.

[0019]

[0037] As shown in Figure 3, a dielectric material partially fills trench 109 (Figure 2) to form a source trench isolation (STI) layer 116 between adjacent nanosheets 110. The STI layer 116 may include at least one of silicon oxide, silicon nitride, and carbon. The STI layer 116 may be deposited by any deposition method, such as flowable CVD (FCVD), PECVD (plasma enhanced chemical vapor deposition), PVD, ALD, and MOCVD.

[0020]

[0038] Next, as shown in FIG. 4 , a plurality of dummy gate structures 120 may be formed on the nanosheet 110. The plurality of dummy gate structures 120 may be formed on the STI layer 116. In some embodiments, the dummy gate structure 120 is a sacrificial gate including a gate material layer 121 and a hard mask 123, where the gate material layer 121 may be formed on an etch stop layer 126. In some embodiments, the gate material layer 121 may be amorphous silicon (a-Si) or polysilicon. The hard mask 123 may be conformally deposited on the gate material layer 121. As shown, the plurality of dummy gate structures 120 may have a longitudinal direction perpendicular to a longitudinal direction of the nanosheet 110.

[0021]

[0039] Next, as shown in FIG. 5, a plurality of gate spacers 122 may be formed on the device 100, including along the sidewalls 124 of each of the dummy gates 120 and on the alternating first and second layers 106 and 108 of the nanosheet 110. The gate spacers 122 may then be removed (e.g., etched) to expose a portion of the nanosheet 110, i.e., the alternating first and second layers 106 and 108, as shown in FIG. 6. As shown, the gate spacers 122 may remain along the bottom layer 108-A of the second layer 108 of the nanosheet 110. The gate spacers 122 may be formed of a dielectric material, such as, but not limited to, silicon nitride, silicon oxide, silicon carbonitride, silicon oxynitride, or silicon oxycarbonitride, and may have a single-layer structure or a multi-layer structure including multiple dielectric layers.

[0022]

[0040] As shown in FIGS. 7A-7B , the exposed portions of the nanosheet 110 may then be removed. In some embodiments, the alternating plurality of first layers 106 and second layers 108 may be etched in trenches 134 selective to a plane defined by the outer surfaces 128 of the gate spacers 122 formed along the sidewalls 124 of the dummy gate structures 120. The alternating plurality of first layers 106 and second layers 108 may also be etched selectively to the top surfaces 130 of the silicon portions 132 of the nanosheets 110. As better shown in FIG. 7B , a first distance “D1” between two adjacent nanosheets 110 along a lower portion 138 of the nanosheets 110 may be smaller than a second distance “D2” along an upper portion 140 of the etched nanosheets 110. Unless cured, this non-uniformity between the sidewalls of the nanosheets 110 leads to distortion of the vertical profile.

[0023]

[0041] To address this shortcoming, a measurement process 144 may be performed on the device 100, as shown in FIG. 8. The measurement process 144 may include taking multiple distance measurements (e.g., GL1, GL2, GL3) between the first sidewall 146 and the second sidewall 148 of the nanosheet 110, e.g., between the upper portion 140 and the lower portion 138 thereof. More specifically, the distance measurements GL1, GL2, GL3 may be taken along the exposed sidewall of the second layer 108. Due to variations in the etching process, GL3 > GL2 > GL1. It will be appreciated that a greater or lesser number of measurements may be taken between various points along the first sidewall 146 and the second sidewall 148.

[0024]

[0042] In various embodiments, the measurement process 144 can include any number of different metrology techniques, including, but not limited to, cross-sectional scanning electron microscopy (SEM), transmission electron microscopy (TEM), critical dimension scanning electron microscopy (CD-SEM), etc. In other embodiments, optical critical dimension (OCD) metrology, atomic force metrology (AFM), or critical dimension atomic force metrology (CD-AFM) can be used to measure the gate length between the nanosheets 110. In some embodiments, the measurement process 144 can be performed in a metrology chamber.

[0025]

[0043] Data collected from the measurement process 144 can be used to determine a desired amount of lateral recession for the second layer 108 and / or the first layer 106 to form a more uniform trench profile between the nanosheets 110. More specifically, it may be desirable for the first and second distances D1, D2 ( FIG. 7B ) to be equal or nearly equal. To achieve this, measurement data such as GL1, GL2, and GL3 is fed forward to an etching device, and an etching process / recipe is generated and executed based on the measurement data. In some embodiments, the etching process / recipe can be selected to target a particular material composition (e.g., SiGe) of the second layer 108. The etching process can include one or several etching steps. For example, one or more etching steps can have a high etch selectivity tailored to the second layer 108, such that substantially no (or minimal) etching loss occurs on the first layer 106. According to some embodiments of the present disclosure, one or more etching steps may include an anisotropic etching process using a variety of different gases.

[0026]

[0044] As shown in FIGS. 9A-9B , the etching process 150 can remove the second layer 108 relative to the first layer 106 of the nanosheet 110 and relative to the gate spacer 122. While not shown, in some embodiments, the etching process 150 can be preceded by an initial etching step to remove portions of both the first layer 106 and the second layer 108. For example, the first and second layers 106, 108 can be treated to form parallel sidewalls within each trench 134. In some embodiments, the etching process 150 is a lateral SiGe etch performed by a selective rapid plasma etching (SRP) device with on-board metrology (OBM) and optimized to indent the second layer 108 to a desired lateral depth / distance according to the etching process described above. Various etching parameters may be adjusted to achieve selective etching of the second layer 108, such as etchant composition, etching temperature, etching solution concentration, etching time, etching pressure, source power, RF bias voltage, RF bias power, etchant flow rate, other suitable etching parameters, or combinations thereof. In some embodiments, the etching may be an isotropic dry etching process (e.g., a surface gas / radical reaction process) selective to the second layer 108 with a fluorine-containing gas (e.g., HF, F, NF, CF, SF, CHF, CHF, and / or CF). In some embodiments, the ratio of fluorine-containing gas to oxygen-containing gas (e.g., O), etching temperature, and / or RF power may be adjusted to selectively etch SiGe in the second layer 108.

[0027]

[0045] As best shown in FIG. 9B , as a result of lateral etching of the nanosheet 110, the first horizontal thickness “T1” of the second layer 108 is less than the second horizontal thickness “T2” of the first layer 106. In some embodiments, T1 of each of the second layers 108 can be equal or approximately equal. In other embodiments, the thickness of the bottom layer 108-A of the second layer 108 can be greater than the thickness of the top layer 108-C of the second layer 108. Furthermore, in some embodiments, T2 of each of the first layers 106 can be equal or approximately equal. In other embodiments, the thickness of the bottom layer 106-A of the first layer 106 can be greater than the thickness of the top layer 106-C of the first layer 106.

[0028]

[0046] Following the etching process 150, the first sidewall 146 and the second sidewall 148 of the nanosheet 110 can be parallel or substantially parallel to one another. More specifically, the plane defined by the outer surface 152 ( FIG. 9B ) of the second layer 108 of the first sidewall 146 can be substantially equal to the plane defined by the outer surface 154 of the second layer 108 of the second sidewall 148. Similarly, the plane defined by the outer surface 156 of the first layer 106 of the first sidewall 146 can be substantially equal to the plane defined by the outer surface 158 of the first layer 106 of the second sidewall 148.

[0029]

[0047] As shown in FIG. 10 , spacer material 160 may then be formed along nanosheet 110. In some embodiments, spacer material 160 may be a dielectric formed along various exposed surfaces of device 100, such as dummy gate structure 120 and the surfaces of the alternating first and second layers 106, 108 exposed within trench 134. In some embodiments, spacer material 160 may comprise a material different from that in first layer 106 and gate spacers 122 ( FIG. 9B ) to achieve desired etch selectivity during a subsequent etching process. In some embodiments, spacer material 160 comprises a dielectric material such as silicon, oxygen, carbon, nitrogen, other suitable material, or combinations thereof (e.g., silicon oxide, silicon nitride, silicon oxynitride, silicon carbide, or silicon oxycarbonitride). In some embodiments, spacer material 160 comprises a low-k dielectric material. Exemplary low-k dielectric materials include fluoride-doped silica glass, carbon-doped silicon oxide, Black Diamond® (Applied Materials, Santa Clara, Calif.), polyimide, other low-k dielectric constant materials, or combinations thereof. Without limitation, the spacer material 160 can be formed via flowable chemical vapor deposition (FCVD) or atomic layer deposition (ALD).

[0030]

[0048] 11A-11B, the spacer material 160 may then be removed (e.g., etched) selectively relative to the first layer 106. More specifically, an SRP etch 161 may be performed to remove the spacer material 160 from the outer surfaces 156, 158 of the first layer 106. However, the spacer material 160 remains along the second layer 108 of each of the nanosheets 110, forming inner spacers 162 between each of the first layers 106. As a result of the SRP etch 161, the outer surfaces 156, 158 of the first layer 106 are exposed in the trenches 134. In some embodiments, the plane defined by the outer surfaces 166 of the inner spacers 162 is approximately equal to the plane defined by the outer surfaces 156, 158 of the first layer 106.

[0031]

[0049] As shown in FIG. 11C , after the spacer material 160 is removed from the first layer 106 of the nanosheet 110, a sidewall treatment 168 can be performed on the inner spacers 162. In some embodiments, the sidewall treatment 168 is a plasma treatment that bombards the nanosheet 110 (e.g., decoupled plasma treatment (DPX) or plasma doping (PLAD)). In various embodiments, the sidewall treatment 168 is performed diagonally or vertically into the first and second sidewalls 146 and 148 of the nanosheet 110, as shown. Without limitation, the sidewall treatment 168 can be a plasma treatment including helium, argon, nitrogen, oxygen, and / or hydrogen. The plasma dose can be constant or variable. The sidewall treatment 168 can result in hardening or densifying the inner spacers 162 to make them more resistant to subsequent device processing, such as etching. If the sidewall treatment 168 includes oxygen, the K value of the inner spacers 162 may be reduced.

[0032]

[0050] Next, as shown in FIGS. 12A-12B , an S / D epitaxial region / layer 170 may be formed by selectively growing a semiconductor material in the trenches 134 between each of the dummy gates 120 and between each of the nanosheets 110. In some embodiments, the epitaxy process may use chemical vapor deposition (CVD) techniques (e.g., vapor phase epitaxy and / or ultra-high vacuum CVD), molecular beam epitaxy, other suitable epitaxial growth processes, or a combination thereof, to form the S / D layer 170. The epitaxy process may use gas and / or liquid precursors that interact with the composition of the substrate base 104 (not shown) and the first layer 106 of nanosheets 110. As best shown in FIG. 12B , the S / D epitaxial layer 170 may be in direct contact with the outer surfaces 156, 158 of the first layer 106 and may be in direct contact with the inner spacer 162. As further shown, the S / D epitaxial layer 170 can be formed directly on the silicon portion 132 of the nanosheet 110. In some embodiments, the formation of the S / D epitaxial layer 170 can be performed using a cluster tool having SRP, DPX, PLAD, and epitaxial deposition capabilities. The same cluster tool can be used to perform the selective etch-back shown in Figures 11A-11B as well as the sidewall treatment 168 shown in Figure 11C. However, embodiments are not limited in this context.

[0033]

[0051] In some embodiments, the S / D layers 170 can be doped with n-type and / or p-type dopants. Without limitation, for n-type transistors, the S / D layers 170 can comprise silicon and be doped with carbon, phosphorus, arsenic, other n-type dopants, or combinations thereof (e.g., to form Si:C epitaxial source / drain features, Si:P epitaxial source / drain features, or Si:C:P epitaxial source / drain features). For p-type transistors, the S / D layers 170 can comprise silicon germanium or germanium and be doped with boron, other p-type dopants, or combinations thereof (e.g., to form Si:Ge:B epitaxial source / drain features). Furthermore, the doping can be in situ (i.e., doped during deposition by adding impurities to the source material of the epitaxy process) or ex situ (e.g., doped by an ion implantation process after the deposition process). In some embodiments, an annealing process (eg, rapid thermal annealing (RTA) and / or laser annealing) is performed to activate the dopants in the S / D layer 170 .

[0034]

[0052] FIG. 13 shows a schematic diagram of an exemplary system / apparatus 200 according to an embodiment of the present disclosure. Operation of the system 200 will be described with reference to the device 100. In some embodiments, the system 200 may be a cluster tool operable to perform the processes necessary to form the device 100 described herein. Without limitation, the system 200 may include at least one central transfer station / chamber 202 and one or more robots 204 within the transfer station / chamber 202. The robot 204 is operable to move a robot blade and wafers between each of a plurality of processing chambers 210A-210D coupled to or positioned adjacent to the transfer station / chamber 202. In some embodiments, the system 200 may include any of a variety of suitable chambers, including, but not limited to, an etch chamber 210A, a first deposition chamber 210B, a second deposition chamber 210C, and a metrology chamber 210D. The specific arrangement of processing chambers and components may vary depending on the cluster tool and should not be considered limiting of the scope of the present disclosure.

[0035]

[0053] In some embodiments, the etching chamber 210A can be used to remove exposed portions of the nanosheet 110. As described herein, the alternating plurality of first and second layers 106, 108 can be etched in the trenches 134. The etching chamber 210A can further be used to etch the plurality of nanosheets 110 to laterally recess the second layer 108 relative to the first layer 106. In some embodiments, the etching can include removing the second layer 108 relative to the first layer 106 of the nanosheet 110 and relative to the gate spacer 122. In some embodiments, the etching process can be a lateral SiGe etch performed by an SRP device in the etching chamber 210A.

[0036]

[0054] The etching chamber 210A may further be used to etch the spacer material 160 selectively relative to the first layer 106. More specifically, an SRP etch 161 may be performed to remove the spacer material 160 from the outer surfaces 156, 158 of the first layer 106. The spacer material 160 may remain along the second layer 108 of each of the nanosheets 110, forming inner spacers 162 between each of the first layers 106. As a result of the SRP etch 161, the outer surfaces 156, 158 of the first layer 106 are exposed in the trenches 134.

[0037]

[0055] In some embodiments, the first deposition chamber 210B may be used to form spacer material 160 along the nanosheet 110. In some embodiments, the spacer material 160 may be a dielectric formed along various exposed surfaces of the device 100, such as the dummy gate structure 120, the outer surfaces 128 of the gate spacers 122, and the surfaces of the alternating plurality of first layers 106 and second layers 108 exposed in the trenches 134. The first deposition chamber 210B of some embodiments includes one or more of an atomic layer deposition chamber, a plasma-enhanced atomic layer deposition chamber, a chemical vapor deposition chamber, a plasma-enhanced chemical vapor deposition chamber, or a physical deposition chamber.

[0038]

[0056] In some embodiments, the second deposition chamber 210C may be used to form the S / D epitaxial regions / layers 170 in the trenches 134 between each of the plurality of dummy gates 120 and between each of the nanosheets 110. In some embodiments, the epitaxy process may use chemical vapor deposition, molecular beam epitaxy, or other suitable epitaxial process to form the S / D layers 170. In an alternative embodiment, there is only a single deposition chamber in the system 200.

[0039]

[0057] In some embodiments, the metrology chamber 210D can be used in conjunction with one or more metrology tools during the measurement process 144. As described herein, the one or more metrology tools can perform multiple distance measurements between the first sidewall 146 and the second sidewall 148 of the nanosheet 110, e.g., between its upper portion 140 and lower portion 138. The measurement results are then fed forward to aid in various etching processes.

[0040]

[0058] A system controller 220 is in communication with the robot 204, the transfer station / chamber 202, and the plurality of processing chambers 210A-210D. The system controller 220 may be any suitable component capable of controlling the processing chambers 210A-210D and the robot 204, as well as the processes occurring within the processing chambers 210A-210D. For example, the system controller 220 may be a computer including a central processing unit 222, a memory 224, appropriate circuitry / logic / instructions, and storage.

[0041]

[0059] The processes or instructions may generally be stored in the memory 224 of the system controller 220 as software routines that, when executed by the processor 222, cause the processing chambers 210A-210D to perform the processes of the present disclosure. Alternatively, the software routines may be stored and / or executed by a second processor (not shown) located remotely from the hardware controlled by the processor 222. Alternatively, some or all of one or more of the methods of the present disclosure may be performed in hardware. Thus, the processes may be implemented in software and executed using a computer system, for example, in hardware as an application-specific integrated circuit or other type of hardware implementation, or as a combination of software and hardware. When executed by the processor 222, the software routines transform a general-purpose computer into a special-purpose computer (controller) that controls chamber operation to perform the processes.

[0042]

[0060] 14A-14B, a process 300 according to an embodiment of the present disclosure is shown. In block 301, the process 300 can include forming a plurality of dummy gates on a plurality of nanosheets. The plurality of nanosheets are formed from a substrate, and each of the plurality of nanosheets includes a plurality of alternating first and second layers. In some embodiments, the first layer includes silicon and the second layer includes silicon germanium.

[0043]

[0061] In block 302, process 300 can include forming spacers on the plurality of nanosheets and along a sidewall of each of the plurality of dummy gates. In some embodiments, the spacers can be gate spacers formed on the device, including along the sidewall of each of the dummy gates and over the plurality of alternating first and second layers of the nanosheets. The spacers can then be removed in block 303 to expose the plurality of alternating first and second layers. More specifically, the spacers can be removed over the nanosheets to expose a portion of each of the nanosheets.

[0044]

[0062] At block 304, process 300 may include performing a metrology measurement process on one or more exposed portions of each of the nanosheets. In some embodiments, the metrology measurement process may include any number of different metrology techniques, including but not limited to SEM, TEM, CD-SEM, etc. In other embodiments, OCD measurement, AFM, or CD-AFM may be used to measure the gate length between the exposed portions of the nanosheets. In some embodiments, the metrology measurement process may be performed in a metrology chamber.

[0045]

[0063] At block 305, process 300 may include determining, based on the metrology measurement process, a desired amount of lateral recession for the second layer and / or the first layer to form a uniform trench profile between adjacent nanosheets. In some embodiments, various measurement data is fed forward to an etching device, and an etching process / recipe is generated and executed based on the measurement data. In some embodiments, the etching process / recipe may be selected to target a particular material composition of the second layer (e.g., SiGe). The etching process may include one or more etching steps. For example, the one or more etching steps may have a high etch selectivity tailored to the second layer such that substantially no (or minimal) etching loss occurs on the first layer 106.

[0046]

[0064] At block 306, process 300 may include etching the nanosheets based on a desired amount of lateral recession relative to the second layer and / or the first layer to laterally recess the second layer relative to the first layer. In some embodiments, the etching process may be a lateral SiGe etch performed by an SRP device + OBM and optimized to indent the second layer to a desired horizontal depth / distance. In some embodiments, one or more layers of the second layer may be more recessed than another one or more layers of the second layer. In some embodiments, the distance between two adjacent nanosheets of the plurality of nanosheets is constant between a lower portion and an upper portion of the plurality of nanosheets.

[0047]

[0065] In block 307, it is determined whether the etched lateral recess matches the desired lateral depression amount. If not, the process returns to block 304. If so, the process proceeds to block 308, where an inner spacer is then formed on the recessed second layer. More specifically, in block 308, process 300 can include forming a spacer material along the exposed portion of each of the plurality of nanosheets. In some embodiments, the spacer material can be formed using either FCV deposition or ALD deposition.

[0048]

[0066] At block 309, the process may include etching the spacer material to remove it from only the first layer of each of the plurality of nanosheets. The spacer material may remain along the second layer of each of the plurality of nanosheets to form an inner spacer. In some embodiments, an additional metrology measurement process may be performed to confirm a uniform distance between the spacer material formed on adjacent nanosheets. If necessary, the process may return to block 308 to deposit additional spacer material.

[0049]

[0067] In block 310, the process 300 can include performing a sidewall treatment on the nanosheets after the spacer material has been removed from only the first layer of the plurality of nanosheets. In some embodiments, the plasma treatment can be a separation plasma treatment or a PLAD ion implantation.

[0050]

[0068] In block 311, process 300 may include forming an S / D epitaxial layer between each of the plurality of dummy gates. In some embodiments, the S / D epitaxial layer may be in direct contact with the outer surface of the first layer of nanosheets 110 and in direct contact with the inner spacer. In some embodiments, formation of the S / D epitaxial layer may be performed using a cluster tool with SRP, DPX, PLAD, and epitaxial deposition capabilities.

[0051]

[0069] Although not described in detail herein, processing of device 100 may continue by, for example, forming an etch stop layer (CESL) and an inter-level dielectric (ILD) layer over device 100, followed by removing dummy gate structure 120 from device 100 to form a gate trench.

[0052]

[0070] In various embodiments, a design tool may be provided and configured to create a dataset used to pattern a semiconductor layer of a device, e.g., as described herein. For example, the dataset may be generated to generate a photomask used during a lithography process to pattern a layer for a structure described herein. Such a design tool may include a collection of one or more modules and may be configured as hardware, software, or a combination thereof. Thus, for example, a tool may be a collection of one or more software modules, hardware modules, software / hardware modules, or any combination or permutation thereof. As another example, a tool may be a computing device or other apparatus that executes software, or may be implemented in hardware.

[0053]

[0071] As used herein, the substrate base 104 may be silicon, such as a silicon wafer. Alternatively or additionally, the substrate base 104 may include another elemental semiconductor (such as germanium), a compound semiconductor (such as silicon carbide, gallium arsenide, gallium phosphide, indium phosphide, indium arsenide, and / or indium antimonide), an alloy semiconductor (such as silicon germanium (SiGe), GaAsP, AlInAs, AlGaAs, GaInAs, GaInP, and / or GaInAsP), or a combination thereof. Alternatively, the substrate base 104 may be a semiconductor-on-insulator substrate, such as a silicon-on-insulator (SOI) substrate, a silicon-germanium-on-insulator (SGOI) substrate, or a germanium-on-insulator (GOI) substrate. Semiconductor-on-insulator substrates may be fabricated using separation by oxygen implantation (SIMOX), wafer bonding, and / or other suitable methods. The substrate base 104 may include various doped regions depending on the design requirements of the device 100. For example, the substrate base 104 may include p-type doped regions configured for n-type GAA transistors and n-type doped regions configured for p-type GAA transistors. The p-type doped regions are doped with p-type dopants, such as boron, indium, other p-type dopants, or combinations thereof. The n-type doped regions are doped with n-type dopants, such as phosphorus, arsenic, other n-type dopants, or combinations thereof. In some implementations, the substrate base 104 includes doped regions formed with combinations of p-type and n-type dopants. Various doped regions may be formed on and / or within the substrate base 104, for example, to provide p-well structures, n-well structures, dual-well structures, raised structures, or combinations thereof. Ion implantation processes, diffusion processes, and / or other suitable doping processes may be performed to form the various doped regions.

[0054]

[0072] For convenience and clarity, terms such as "top," "bottom," "upper," "lower," "vertical," "horizontal," "lateral," and "longitudinal" are used herein to describe the relative locations and orientations of various components and the parts that make them up, as seen in the figures. Terminology shall include the words specifically mentioned, derivatives thereof, and words of similar importance.

[0055]

[0073] As used herein, elements or operations described in the singular, preceded by the word "a" or "an," are to be understood to include a plurality of elements or operations unless expressly stated to exclude a plurality of elements or operations. Furthermore, references to "one embodiment" of the present disclosure are not intended to be limiting. Additional embodiments may incorporate the described features.

[0056]

[0074] Furthermore, the terms "substantial" or "substantially," as well as "approximate" or "approximately," may be used interchangeably in some embodiments and may be described using any relative measure accepted by one of ordinary skill in the art. For example, these terms may serve as a comparison to a reference parameter to indicate a deviation (that is capable of providing the intended function). Without limitation, the deviation from the reference parameter may be, for example, less than 1%, less than 3%, less than 5%, less than 10%, less than 15%, less than 20%, etc.

[0057]

[0075] Furthermore, those skilled in the art will understand that when an element, such as a layer, region, or substrate, is referred to as being formed, deposited, or positioned "on, over, or atop" another element, the element may be directly on the other element, or intervening elements may be present. In contrast, when an element is referred to as being "directly on, directly over, or directly atop" another element, there are no intervening elements present.

[0058]

[0076] The present disclosure is not limited in scope by the specific embodiments described herein. Indeed, various other embodiments of the present disclosure and modifications of the present disclosure, in addition to the embodiments described herein, will be apparent to those skilled in the art from the foregoing description and the accompanying drawings. Therefore, such other embodiments and modifications are intended to be included within the scope of the present disclosure. Moreover, the present disclosure has been described herein in the context of particular implementations in particular environments for particular purposes. Those skilled in the art will recognize that the utility of the present disclosure is not limited in this respect, and that the present disclosure may be beneficially implemented in any number of environments for any number of purposes. Accordingly, the scope of the claims set forth below should be construed in light of the full scope and spirit of the present disclosure as described herein.

Claims

1. forming a plurality of nanosheets, each nanosheet including a plurality of alternating first and second layers; etching the plurality of nanosheets to laterally recess the second layer relative to the first layer; forming an inner spacer on the recessed second layer; forming a spacer material along an exposed portion of each of the plurality of nanosheets; etching the spacer material to remove it from the first layer of each of the plurality of nanosheets; and performing a sidewall treatment on the plurality of nanosheets after the spacer material is removed from the first layer of each of the plurality of nanosheets. and forming an inner spacer by Including, The method, wherein the sidewall treatment is an isolation plasma treatment or a plasma doping ion implantation.

2. 10. The method of claim 1, wherein forming the spacer material along the exposed portion of each of the plurality of nanosheets comprises one of flowable chemical vapor deposition or atomic layer deposition.

3. Forming a plurality of nanosheets, each nanosheet comprising a plurality of alternating first layers and second layers; etching the plurality of nanosheets to laterally recess the second layer relative to the first layer; forming an inner spacer on the recessed second layer; forming a spacer material along an exposed portion of each of the plurality of nanosheets; etching the spacer material to remove the spacer material from the first layer of each of the plurality of nanosheets while leaving the spacer material along the recessed second layer; and performing a sidewall treatment on the plurality of nanosheets after the spacer material is removed from the first layer of each of the plurality of nanosheets to harden or densify the spacer material along the recessed second layer. and forming an inner spacer by A method comprising:

4. forming a plurality of dummy gates on the plurality of nanosheets, wherein the plurality of nanosheets are formed from a substrate; forming spacers on the plurality of nanosheets and along sidewalls of each of the plurality of dummy gates; removing the spacers on the plurality of nanosheets to expose the portions of each of the plurality of nanosheets; The method of claim 1 further comprising:

5. 5. The method of claim 4, further comprising forming a source / drain epitaxial layer between each of the plurality of dummy gates.

6. The method of claim 1 further comprising performing a measurement process to determine a desired amount of lateral recession for the second layer.

7. 7. The method of claim 6, wherein etching the plurality of nanosheets to laterally recess the second layer relative to the first layer comprises performing lateral etching based on the desired amount of lateral recession determined for the second layer, and wherein a distance between two adjacent nanosheets of the plurality of nanosheets is constant between a lower portion and an upper portion of the two adjacent nanosheets.

8. a processor; Memory and 1. A system comprising: forming a plurality of nanosheets, each nanosheet including a plurality of alternating first and second layers; etching the plurality of nanosheets to laterally recess the second layer relative to the first layer; forming an inner spacer on the recessed second layer; forming a spacer material along an exposed portion of each of the plurality of nanosheets; etching the spacer material to remove it from the first layer of each of the plurality of nanosheets; and performing a sidewall treatment on the plurality of nanosheets after the spacer material is removed from the first layer of each of the plurality of nanosheets. and forming an inner spacer by storing instructions executable by said processor for performing The system, wherein the sidewall treatment is an isolation plasma treatment or a plasma doping ion implantation.

9. 9. The system of claim 8, wherein the instructions executable by the processor for forming the spacer material along the exposed portions of each of the plurality of nanosheets include performing one of flowable chemical vapor deposition or atomic layer deposition.

10. A processor; Memory and 1. A system comprising: forming a plurality of nanosheets, each nanosheet including a plurality of alternating first and second layers; etching the plurality of nanosheets to laterally recess the second layer relative to the first layer; forming an inner spacer on the recessed second layer; forming a spacer material along an exposed portion of each of the plurality of nanosheets; etching the spacer material to remove the spacer material from the first layer of each of the plurality of nanosheets while leaving the spacer material along the recessed second layer; and performing a sidewall treatment on the plurality of nanosheets after the spacer material is removed from the first layer of each of the plurality of nanosheets to harden or densify the spacer material along the recessed second layer. and forming an inner spacer by and storing instructions executable by the processor for performing the steps of:

11. The memory forming a plurality of dummy gates on the plurality of nanosheets, wherein the plurality of nanosheets are formed from a substrate; forming spacers on the plurality of nanosheets and along sidewalls of each of the plurality of dummy gates; removing the spacers on the plurality of nanosheets to expose the portions of each of the plurality of nanosheets; 10. The system of claim 8, further storing instructions executable by the processor for:

12. 12. The system of claim 11, wherein the memory further stores instructions executable by the processor for forming a source / drain epitaxial layer between each of the plurality of dummy gates.

13. 10. The system of claim 8, wherein the memory further stores instructions executable by the processor to perform a measurement process to determine a desired amount of lateral recession for the second layer.

14. 14. The method of claim 13, wherein the processor-executable instructions for etching the plurality of nanosheets to laterally recess the second layer relative to the first layer further comprise performing lateral etching based on the desired amount of lateral recession determined for the second layer, and wherein a distance between two adjacent nanosheets of the plurality of nanosheets is constant between a lower portion and an upper portion of the two adjacent nanosheets.

15. A method for manufacturing a device, comprising: the device comprising: a plurality of dummy gates on the plurality of nanosheets, each of the plurality of nanosheets including alternating first and second layers, the plurality of nanosheets extending in a vertical direction from a substrate base, the second layer having a first thickness in a horizontal direction that is less than a second thickness in the horizontal direction of the first layer, thereby forming a recessed second layer; an inner spacer formed only along the recessed second layer; Equipped with The method comprises: forming the inner spacer on the recessed second layer; forming a spacer material along an exposed portion of each of the plurality of nanosheets; etching the spacer material to remove it from the first layer of each of the plurality of nanosheets; and performing a sidewall treatment on the plurality of nanosheets after the spacer material is removed from the first layer of each of the plurality of nanosheets. forming the inner spacer by Including, The method, wherein the sidewall treatment is an isolation plasma treatment or a plasma doping ion implantation.

16. The method described in claim 15, wherein the device further comprises a source / drain epitaxial layer formed between the plurality of nanosheets.

17. 17. The method of claim 16, wherein the source / drain epitaxial layer is in direct contact with the inner spacer.

18. 16. The method of claim 15, wherein the first layer is silicon and the second layer is silicon germanium.

19. 16. The method of claim 15, wherein the distance between two adjacent nanosheets of the plurality of nanosheets is constant between the lower and upper portions of the two adjacent nanosheets.

20. 16. The method of claim 15, wherein a first plane defined by an outer surface of the inner spacer is coplanar with a second plane defined by an outer surface of the first layer.

21. A method for manufacturing a device, comprising: the device comprising: a plurality of dummy gates on the plurality of nanosheets, each of the plurality of nanosheets including alternating first and second layers, the plurality of nanosheets extending in a vertical direction from a substrate base, the second layer having a first thickness in a horizontal direction that is less than a second thickness in the horizontal direction of the first layer, thereby forming a recessed second layer; an inner spacer formed only along the recessed second layer; Equipped with The method comprises: forming the inner spacer on the recessed second layer; forming a spacer material along an exposed portion of each of the plurality of nanosheets; etching the spacer material to remove the spacer material from the first layer of each of the plurality of nanosheets while leaving the spacer material along the recessed second layer; and performing a sidewall treatment on the plurality of nanosheets after the spacer material is removed from the first layer of each of the plurality of nanosheets to harden or densify the spacer material along the recessed second layer. forming the inner spacer by A method comprising:

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