Transport System

Abstract

This transport system comprises: a ceiling transport vehicle that transports an article in an area where interfering with a peripheral device is possible; a travel path on which the ceiling transport vehicle travels; and a reset unit that outputs a reset signal enabling restart of the ceiling transport vehicle in response to an abnormal stop of the ceiling transport vehicle. The ceiling transport vehicle includes: a gripping part that grips an article; a lifting and lowering mechanism that lifts and lowers the gripping part; a communication unit that transmits an interlock signal to a peripheral device during transfer of the article; and a controller that controls the operation of the ceiling transport vehicle and resets the interlock signal by a reset signal being inputted thereto. When the gripping part is positioned outside of a starting point, the controller does not reset the interlock signal until the gripping part rises to a position not interfering with the peripheral device, even if the reset signal has been inputted.

Description

[Technical Field]

[0001] The present disclosure relates to a transport system. [Background technology]

[0002] Semiconductor manufacturing plants and the like use conveyance systems that include conveyance devices for automatically conveying workpieces. For example, Patent Document 1 below discloses a transfer device that uses a driving medium to move a movable part. This transfer device includes a detection unit that monitors the current flowing through a current path and generates a signal when it detects that the current has dropped below a predetermined value. The control unit is configured to memorize the occurrence of the signal when the signal is generated, stop the movement of the movable part while the signal is stored, display or notify the user of the occurrence of the signal, and, upon receiving an abnormality reset command from an operator, have the detection unit redetect whether the current is below the predetermined value, cancel the memory of the signal if the current exceeds the predetermined value, and maintain the memory of the signal if the current is below the predetermined value.

[0003] In the patent document 1 listed below, by providing the above-mentioned detection unit and the control unit, when a break in the drive medium is predicted, the movement of the movable part is stopped and a current continues to flow in the current path. When an operator inputs an abnormality reset command, the current flowing in the current path is detected again, and if the current exceeds a predetermined value, the signal is released and the movement of the movable part is restored. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2017-154869 Summary of the Invention [Problem to be solved by the invention]

[0005] For example, when an overhead hoist is used as a transport system in a semiconductor manufacturing factory, the overhead hoist transports objects to peripheral equipment such as processing equipment. In such a case, preventing interference between the overhead hoist and the peripheral equipment is essential to ensure safe operation of the overhead hoist. If consideration is not given to the operational state of the peripheral equipment when an abnormality occurring in the overhead hoist is reset, there is a risk that interference between the overhead hoist and the peripheral equipment may not be sufficiently prevented immediately after the abnormality is resolved. This raises concerns that the safe operation of the overhead hoist may be compromised.

[0006] An object according to one aspect of the present disclosure is to provide a transport system that allows an overhead transport vehicle to travel safely even in the presence of peripheral devices. [Means for solving the problem]

[0007] A conveying system according to one aspect of the present disclosure comprises an overhead transport vehicle that transports items in an area where interference with peripheral equipment may occur, a running path along which the overhead transport vehicle travels, and a reset unit that outputs a reset signal that enables the overhead transport vehicle to be restarted when the overhead transport vehicle stops abnormally; the overhead transport vehicle has a gripping unit that grips items, a lifting mechanism that raises and lowers the gripping unit, a communication unit that sends an interlock signal to peripheral equipment while the item is being transferred, and a controller that controls the operation of the overhead transport vehicle and resets the interlock signal when a reset signal is input; and even when a reset signal is input, when the gripping unit is positioned other than at the origin, the controller does not reset the interlock signal until the gripping unit has risen to a position where it does not interfere with peripheral equipment.

[0008] In a conveying system according to one aspect of the present disclosure, when a reset signal is input to a controller in response to an abnormal stop of the overhead transport vehicle when the gripper is positioned other than at the origin, the controller holds the interlock signal until the gripper rises to a position where it does not interfere with the peripheral devices. As a result, even after the controller receives the reset signal, the operation of the peripheral devices is limited or stopped until the gripper rises to a position where it does not interfere with the peripheral devices. This prevents the peripheral devices from interfering with the overhead transport vehicle while the gripper is returning to the origin, allowing the overhead transport vehicle to travel safely even in the presence of peripheral devices.

[0009] When the gripper is positioned other than at the origin, the controller does not need to reset the interlock signal until the gripper returns to the origin, which can reliably prevent peripheral devices from interfering with the overhead transport vehicle while the gripper is returning to the origin.

[0010] The ceiling transport vehicle may further include a reset button as a reset unit, in which case a reset signal can be easily transmitted.

[0011] The transport system may further include an abnormality detection sensor that detects abnormalities in the overhead transport vehicle. In this case, abnormalities in the overhead transport vehicle can be quickly detected, making it possible to effectively prevent interference between the overhead transport vehicle and peripheral devices.

[0012] The peripheral device may be a processing device that processes an article, or may be an overhead crane. [Effects of the Invention]

[0013] According to one aspect of the present disclosure, it is possible to provide a transport system that allows an overhead transport vehicle to travel safely even in the presence of peripheral devices. [Brief explanation of the drawings]

[0014] [Figure 1] FIG. 1 is a plan view of a transport system according to an embodiment. [Figure 2] FIG. 2 is a front view of a portion of the transport system. [Figure 3] FIG. 3 is a flowchart showing a method for transferring a FOUP between a transport system and a semiconductor processing device. [Figure 4] FIG. 4 is a flowchart illustrating a method for restoring the transport system when an abnormality is detected in the ceiling transport vehicle when the gripper is positioned other than at the origin. [Figure 5] FIG. 5 is a schematic diagram showing the state of the ceiling transport vehicle at each timing. DETAILED DESCRIPTION OF THE INVENTION

[0015] Hereinafter, an embodiment according to one aspect of the present disclosure will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same or equivalent elements are designated by the same reference numerals, and duplicated explanations will be omitted.

[0016] FIG. 1 is a plan view of a transfer system according to this embodiment. FIG. 2 is a front view of a portion of the transfer system. As shown in FIG. 1, the transfer system 1 is installed in, for example, a semiconductor manufacturing plant including a semiconductor processing device 100, which is one of peripheral devices, and is a system for transferring an object such as a FOUP (footprint under uprights) 200. The FOUP 200 is a container (FOUP: Front Opening Unified Pod) for storing semiconductor wafers. The semiconductor processing device 100 is a processing device for the semiconductor wafers (e.g., a cleaning device, an etching device, a film forming device, etc.) and includes an equipment port 110 for loading and unloading the FOUP 200. The equipment port 110 includes, for example, a communication unit (not shown) for communicating with the transfer system 1. The communication unit exchanges interlock signals with, for example, an overhead transport vehicle 40 (described later). In this embodiment, the interlock signal is a signal exchanged according to a procedure defined in E84 of the SEMI standard (Semiconductor Equipment and Materials International standards).

[0017] As shown in FIGS. 1 and 2, the transport system 1 includes a first track 10, a second track 20, a storage shelf 30, and a plurality of overhead transport vehicles 40. In the transport system 1, for example, an overhead transport vehicle 40 moving along the first track 10 or the second track 20 transfers a FOUP 200 to an equipment port 110 of a semiconductor processing equipment 100. Although not shown, the transport system 1 further includes, for example, a host and an MCS (Material Control System) as control devices. Each of the host and the MCS is an electronic control unit configured, for example, with a central processing unit (CPU), a read-only memory (ROM), a random access memory (RAM), etc. The host is a higher-level controller. The host may be a manufacturing execution system (MES). The host outputs signals including various commands such as transport commands and travel commands (hereinafter simply referred to as "commands") to the MCS. When the MCS receives a command from the HOST, it outputs the command to the overhead transport vehicle 40 or the like at a predetermined timing via a controller 47, which will be described later.

[0018] The first track 10 is a member (traveling path) along which the overhead transport vehicle 40 travels, and is suspended from the ceiling. In this embodiment, the transport system 1 comprises multiple systems (bays). The transport system 1 includes multiple intra-bay routes, which are traveling paths within a bay, and inter-bay routes, which are traveling paths connecting different bays. The intra-bay routes are arranged along multiple equipment ports 110. The first track 10 includes intra-bay tracks 11 arranged on the multiple intra-bay routes and inter-bay tracks 12 arranged on the inter-bay routes. The intra-bay tracks 11 are tracks that pass near the storage shelves 30, semiconductor processing equipment 100, etc., and are configured so that the overhead transport vehicle 40 travels one-way in a clockwise direction. Like the intra-bay track 11, the inter-bay track 12 is also configured so that the overhead transport vehicle 40 travels one-way in a clockwise direction. Note that the first track 10 may be configured so that the overhead transport vehicle 40 travels one-way in a counterclockwise direction.

[0019] The second track 20 is a member (traveling path) along which the overhead transport vehicle 40 travels, and is suspended from the ceiling. The second track 20 includes an intrabay track 21 located in a portion of the multiple intrabay routes, and an interbay track 22 located in the interbay route. The intrabay track 21 is a track that passes near the storage shelves 30, semiconductor processing equipment 100, etc., and is set up so that the overhead transport vehicle 40 travels in a one-way clockwise direction. Like the intrabay track 21, the interbay track 22 is also set up so that the overhead transport vehicle 40 travels in a one-way clockwise direction. Note that the second track 20 may also be set up so that the overhead transport vehicle 40 travels in a one-way counterclockwise direction.

[0020] As shown in Fig. 2, the first track 10 and the second track 20 are arranged side by side in the up-down (vertical) direction. The first track 10 is located below the second track 20. In other words, the second track 20 is located above the first track 10. In Fig. 1, the first track 10 is indicated by a dashed line, and the second track 20 is indicated by a solid line.

[0021] 1, in the transport system 1, the equipment ports 110 of each semiconductor processing equipment 100 are arranged outside the intra-bay route along the direction in which the first track 10 and the second track 20 extend. Each equipment port 110 is provided so as to be located to the side and below one of the first track 10 and the second track 20 arranged side by side one above the other.

[0022] The plurality of equipment ports 110 have FOUPs 200 transferred from the ceiling transport vehicle 40 placed thereon, and transfer the FOUPs 200 to the semiconductor processing equipment 100. Furthermore, when the semiconductor wafers contained in the FOUPs 200 are processed in the semiconductor processing equipment 100, the plurality of equipment ports 110 transfer the FOUPs 200 from the semiconductor processing equipment 100, and the FOUPs 200 are placed on the plurality of equipment ports 110.

[0023] The storage shelf 30 is a component that stores the FOUP 200. A plurality of storage shelves 30 support the FOUP 200. The storage shelves 30 are, for example, suspended from the ceiling. The storage shelves 30 may be an OHB (Overhead Buffer). The area above the storage shelves 30 is capable of placing the FOUP 200. This area of ​​the storage shelves 30 is a temporary storage area where the overhead transport vehicle 40 stopped on the first track 10 and the second track 20 can transfer the FOUP 200.

[0024] 2, the multiple storage shelves 30 are provided below and on the other side of the first track 10 and the second track 20, opposite the side on which the multiple equipment ports 110 are provided. In other words, when viewed vertically, the multiple storage shelves 30 are provided on the side opposite the multiple equipment ports 110 across the first track 10 and the second track 20. The storage shelves 30 are provided inside the loop-shaped intra-bay route.

[0025] The overhead transport vehicle 40 is a device that transports the FOUP 200 in an area where it may interfere with peripheral devices such as the storage shelf 30 and the semiconductor processing device 100, and moves along the first track 10 or the second track 20. The overhead transport vehicle 40 includes, for example, a ceiling-suspended crane, an OHT (Overhead Hoist Transfer), etc. The overhead transport vehicle 40 has a gripping unit 41, a lifting mechanism 42, a moving mechanism 43, an abnormality detection sensor 44, a communication unit 45, a reset button 46 (reset unit), and a controller 47.

[0026] The gripping unit 41 is a device that grips and releases the FOUP 200. The gripping unit 41 is capable of gripping the flange portion 210 of the FOUP 200. The gripping unit 41 grips the flange portion 210 of the FOUP 200 when the ceiling transport vehicle 40 retrieves the FOUP 200 from the equipment port 110 or the storage shelf 30. The gripping unit 41 releases the flange portion 210 of the FOUP 200 when the ceiling transport vehicle 40 places the FOUP 200 on the equipment port 110 or the storage shelf 30.

[0027] The lifting mechanism 42 is a device (such as a hoist) that raises and lowers the gripping unit 41 in the vertical direction. The lifting mechanism 42 is capable of raising and lowering the gripping unit 41 in the vertical direction. The lifting mechanism 42 has a hoisting mechanism 42a and a belt 42b. The hoisting mechanism 42a is held by the moving mechanism 43. The hoisting mechanism 42a is a device that vertically hoists and lowers the belt 42b. The hoisting mechanism 42a is capable of vertically hoisting and lowering the belt 42b. The belt 42b hangs down from the hoisting mechanism 42a. The belt 42b holds the gripping unit 41 at its lower end. The lifting mechanism 42 is capable of hoisting and lowering the FOUP 200 gripped by the gripping unit 41 a distance that is at least sufficient to reach the equipment port 110 and the storage shelf 30.

[0028] The moving mechanism 43 is a device that moves the gripper 41 and the lifting mechanism 42 along the side of the overhead transport vehicle 40. That is, the moving mechanism 43 can move the gripper 41 and the lifting mechanism 42 from the overhead transport vehicle 40 in a horizontal direction perpendicular to the traveling direction of the overhead transport vehicle 40. The moving mechanism 43 can move the gripper 41 and the lifting mechanism 42 above the equipment port 110 and the storage shelf 30. When the gripper 41 grips a FOUP 200, the moving mechanism 43 can move the FOUP 200 vertically above the equipment port 110 and the storage shelf 30. In this embodiment, when the belt 42b is fully wound up, the gripper 41 can be considered to be located at the origin. Therefore, even when the gripper 41 and the lifting mechanism 42 are moved laterally by the moving mechanism 43, the gripper 41 is considered to be located at the origin when the belt 42b is fully wound up.

[0029] Each of the multiple overhead transport vehicles 40 stopped at the same position in the traveling direction on each of the first track 10 and the second track 20 can transfer a FOUP 200 to both the equipment port 110 and the storage shelf 30 located to the side and below the first track 10 and the second track 20. In other words, each overhead transport vehicle 40 can transfer a FOUP 200 to the same equipment port 110 and the same storage shelf 30. That is, both the overhead transport vehicle 40 on the first track 10 and the overhead transport vehicle 40 on the second track 20 can transfer (transfer) the FOUP 200 to and from the equipment port 110. Furthermore, both the overhead transport vehicle 40 on the first track 10 and the overhead transport vehicle 40 on the second track 20 can transfer the FOUP 200 to and from the storage shelf 30.

[0030] The ceiling transport vehicle 40, with the gripping section 41 gripping the flange section 210 of the FOUP 200 directly below the first track 10 and the second track 20, operates the movement mechanism 43 to move the FOUP 200 above the equipment port 110 and the storage shelf 30. Next, the ceiling transport vehicle 40 operates the hoisting mechanism 42a to lower the belt 42b, thereby lowering the FOUP 200 and placing it on the equipment port 110 or the storage shelf 30. In this way, the ceiling transport vehicle 40 transfers (places) the FOUP 200 to the equipment port 110 or the storage shelf 30.

[0031] The ceiling transport vehicle 40 also uses the gripping portion 41 to grip the flange portion 210 of the FOUP 200 placed on the equipment port 110 or the storage shelf 30. Next, the ceiling transport vehicle 40 operates the hoisting mechanism 42a to hoist the belt 42b and raise the FOUP 200. Next, the ceiling transport vehicle 40 operates the moving mechanism 43 to move the FOUP 200 to directly below the first track 10 and the second track 20. In this manner, the ceiling transport vehicle 40 transfers (obtains) the FOUP 200 from the equipment port 110 or the storage shelf 30.

[0032] The abnormality detection sensor 44 is a sensor that detects an abnormality in the ceiling transport vehicle 40. The abnormality detection sensor 44 detects, for example, whether the ceiling transport vehicle 40 is operating normally. For example, if the movement of the ceiling transport vehicle 40, the gripping and release of the gripping unit 41, the operation of the lifting mechanism 42, the operation of the moving mechanism 43, etc. are not performed in accordance with commands from the control device, the abnormality detection sensor 44 detects that an abnormality has occurred in the ceiling transport vehicle 40. If a malfunction occurs in the power supply or signal transmission to the ceiling transport vehicle 40, the abnormality detection sensor 44 may also detect that an abnormality has occurred in the ceiling transport vehicle 40. When the abnormality detection sensor 44 detects an abnormality in the ceiling transport vehicle 40, it notifies the controller 47 of a signal (an abnormality detection signal) indicating that the abnormality has been detected.

[0033] The communication unit 45 can communicate with the semiconductor processing apparatus 100 via, for example, wireless communication. The communication unit 45 transmits an interlock signal to the semiconductor processing apparatus 100 while the FOUP 200 is being transferred, for example. The transmission of such an interlock signal restricts the operation of the semiconductor processing apparatus 100 (particularly, the operation of the equipment port 110). This prevents interference (contact, collision, etc.) between the gripper 41, the lifting mechanism 42, etc. of the ceiling transport vehicle 40 and the semiconductor processing apparatus 100 at unintended locations.

[0034] The reset button 46 is a part (reset unit) for transmitting a reset signal that enables the overhead transport vehicle 40 to be restarted, and is provided at a predetermined position on the overhead transport vehicle 40. The reset button 46 is pressed, for example, after the overhead transport vehicle 40 has stopped due to an abnormality and the abnormality occurring in the overhead transport vehicle 40 has been resolved, and when the overhead transport vehicle 40 is to be started. For this reason, the reset button 46 can be said to be a part that is pressed in response to the abnormal stop of the overhead transport vehicle 40, and the reset signal can be said to be a signal that is transmitted in response to the abnormal stop of the overhead transport vehicle 40. The reset button 46 is pressed, for example, by a worker or a work robot that has resolved the abnormality occurring in the overhead transport vehicle 40. Pressing the reset button 46 transmits a reset signal to the communication unit 45 and / or the controller 47. The reset signal restarts (resets) at least some of the commands (e.g., transport commands), signals (e.g., interlock signals), etc. held by the overhead transport vehicle 40. Therefore, in this embodiment, restarting the ceiling transport vehicle 40 with a reset signal does not necessarily restart all of the ceiling transport vehicle 40, and the reset signal includes at least a signal for resetting the interlock signal that was being sent to the semiconductor processing device 100.

[0035] The reset button 46 does not have to be pressed directly by a worker or a work robot. For example, the reset button 46 may be pressed via a remote controller, an application, or the like for the overhead transport vehicle 40. Alternatively, when the control device determines that the abnormality in the overhead transport vehicle 40 has been resolved, a reset signal may be output in response to a command from the control device without pressing the reset button 46. In these cases, the reset button 46 may not be provided on the overhead transport vehicle 40, and instead the reset unit may be provided on a device other than the overhead transport vehicle 40 (such as the remote controller).

[0036] The controller 47 is a device that controls the operation of the overhead transport vehicle 40. The controller 47 is an electronic control unit that is configured with, for example, a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), etc. The controller 47 controls the travel of the overhead transport vehicle 40, the operation of the gripper 41, the operation of the lifting mechanism 42, the operation of the moving mechanism 43, and communication with the semiconductor processing apparatus 100 in response to commands received from the above-mentioned control device.

[0037] When an abnormality occurs in the ceiling transport vehicle 40 (i.e., when an abnormality detection signal is input to the controller 47), the controller 47 emergency stops the operation of the ceiling transport vehicle 40. At this time, the controller 47 emergency stops not only the movement of the ceiling transport vehicle 40 but also the operations of the gripping unit 41, the lifting mechanism 42, and the moving mechanism 43.

[0038] When a reset signal is input to controller 47 due to an abnormality occurring in ceiling transport vehicle 40 while gripper 41 is located at the origin (a position where it does not interfere with the device), controller 47 resets the interlock signal that has been transmitted to semiconductor processing device 100 (stops transmission of the interlock signal). Therefore, when gripper 41 is located at the origin, the transmission of the reset signal releases the operational restriction on semiconductor processing device 100 caused by ceiling transport vehicle 40. This allows semiconductor processing device 100 to perform the next operation.

[0039] On the other hand, when the abnormality of the ceiling transport vehicle 40 is resolved with the gripper 41 positioned other than at the origin and a reset signal is input to the controller 47, the controller 47 does not reset the interlock signal that it had been transmitting to the semiconductor processing apparatus 100. In this case, the ceiling transport vehicle 40 continues to transmit the same interlock signal to the semiconductor processing apparatus 100 as before the abnormality occurred. Therefore, even if a reset signal is transmitted when the gripper 41 is positioned other than at the origin, the operational restriction on the semiconductor processing apparatus 100 caused by the ceiling transport vehicle 40 is not released.

[0040] After a reset signal is input to the controller 47 when the gripper 41 is positioned other than at the origin, a signal (return signal) for returning the gripper 41 to the origin is input to the controller 47. This causes the controller 47 to operate the lifting mechanism 42 and / or the moving mechanism 43 to return the gripper 41 to the origin. After the gripper 41 returns to the origin, the controller 47 can reset the interlock signal. Therefore, after the gripper 41 returns to the origin, the controller 47 resets the interlock signal that it had been transmitting to the semiconductor processing apparatus 100, and the operational restriction of the semiconductor processing apparatus 100 caused by the overhead transport vehicle 40 is released. This prevents unintended interference (contact, collision, etc.) between the gripper 41, lifting mechanism 42, etc. of the overhead transport vehicle 40 and the semiconductor processing apparatus 100, for example, immediately after the overhead transport vehicle 40 returns. The return signal is input, for example, by an operator operating a remote control or the like.

[0041] Next, a method for transferring a FOUP between the transfer system and the semiconductor processing equipment according to this embodiment will be described with reference to Fig. 3. Fig. 3 is a flowchart showing the method for transferring a FOUP between the transfer system and the semiconductor processing equipment.

[0042] 3, first, the ceiling transport vehicle 40 is stopped at a predetermined position (step S1). In step S1, the ceiling transport vehicle 40 holding the FOUP 200 is stopped near (a predetermined position) the semiconductor processing equipment 100. Alternatively, in step S1, the ceiling transport vehicle 40 not holding the FOUP 200 is stopped at a predetermined position of the semiconductor processing equipment 100.

[0043] Next, the gripper 41 is lowered (step S2). In step S2, the moving mechanism 43 is moved to move the gripper 41 to a position other than the origin so as to move the FOUP 200 above the equipment port 110. Next, the winding mechanism 42a is operated to unwind the belt 42b, thereby lowering the gripper 41 gripping the FOUP 200. Alternatively, in step S2, the belt 42b is unwound to lower the gripper 41 not gripping the FOUP 200.

[0044] Next, the FOUP 200 is transferred between the gripper 41 and the semiconductor processing equipment 100 (step S3). In step S3, the gripper 41 releases the FOUP 200, thereby placing the FOUP 200 on the equipment port 110 of the semiconductor processing equipment 100. Alternatively, in step S3, the gripper 41 grips the flange 210 of the FOUP 200 located on the equipment port 110 of the semiconductor processing equipment 100.

[0045] Next, the gripper 41 is raised (step S4). In step S4, the hoisting mechanism 42a is operated to wind up the belt 42b, thereby raising the gripper 41. When the gripper 41 grips the FOUP 200, the moving mechanism 43 is operated to move the FOUP 200 to a position directly below the first track 10 and the second track 20. In this manner, the ceiling transport vehicle 40 transfers the FOUP 200 to or from the equipment port 110. Then, the gripper 41 is returned to the origin.

[0046] Next, the operation of the conveying system 1 when an abnormality in the ceiling transport vehicle 40 is detected between the start of step S1 and the completion of step S4 will be described with reference to Fig. 4. Fig. 4 is a flowchart illustrating a method for restoring the conveying system when an abnormality in the ceiling transport vehicle is detected when the gripping unit is positioned other than at the origin.

[0047] 4, between the start of step S1 and the completion of step S4 (during the transfer of the FOUP 200), an abnormality in the ceiling transport vehicle 40 is detected (step S11). In step S11, the abnormality detection sensor 44 detects an abnormality in the ceiling transport vehicle 40 while the FOUP 200 is being transferred, and notifies the controller 47 of an abnormality detection signal. The controller 47, notified of the abnormality detection signal, brings the ceiling transport vehicle 40 to an emergency stop. At this time, the gripper 41 is positioned other than at the origin.

[0048] Next, the cause of the abnormality is eliminated (step S12). In step S12, the cause of the abnormality in the ceiling transport vehicle 40 is eliminated by a worker, a work robot, or the like. In step S12, if no abnormality has occurred in the ceiling transport vehicle 40 (for example, if the abnormality detection sensor 44 detects an abnormality due to an abnormality in a device other than the ceiling transport vehicle 40), the reason for the transmission of the abnormality detection signal may be eliminated.

[0049] Next, an abnormality reset is executed (step S13). In step S13, a reset signal is transmitted by an operator, a work robot, or the like pressing reset button 46. This causes the reset signal to be input to controller 47 (step S14). At this time, controller 47 does not reset the interlock signal transmitted to semiconductor processing apparatus 100.

[0050] Next, it is determined whether the abnormality of the ceiling transport vehicle 40 has been resolved (step S15). In step S15, the abnormality detection sensor 44 again detects whether there is an abnormality in the ceiling transport vehicle 40. When it is determined that the abnormality of the ceiling transport vehicle 40 has not been resolved (step S15: NO), step S12 is executed again.

[0051] Next, when it is determined that the abnormality in the ceiling transport vehicle 40 has been resolved (step S15: YES), an operation to return the gripper 41 to the origin is executed (step S16). In step S16, for example, an operator operates a remote control or the like to transmit a return signal for returning the gripper 41 to the origin. As a result, the return signal is input to the controller 47 (step S17). In step S17, the controller 47 operates the lifting mechanism 42 and / or the moving mechanism 43 based on the return signal. At this time, the controller 47 continues to prohibit resetting of the interlock signal. As a result, the gripper 41 is returned to the origin while restricting the operation of the semiconductor processing apparatus 100 (step S18).

[0052] Next, after step S18, the prohibition on resetting the interlock signal is lifted (step S19). This releases the operational restriction on the semiconductor processing apparatus 100 caused by the ceiling transport vehicle 40. This completes the recovery of the transport system 1 when an abnormality in the ceiling transport vehicle 40 is detected while the gripper 41 is positioned other than at the origin.

[0053] The effects achieved by the transport system 1 according to the present embodiment described above will be described with reference to Fig. 5. Fig. 5 is a schematic diagram showing the state of the overhead transport vehicle at each timing. In Fig. 5, timing T1 shows the state of the overhead transport vehicle 40 in step S11. Timing T2 shows the state of the overhead transport vehicle 40 in step S14. Timing T3 shows the state of the overhead transport vehicle 40 in step S18. Timing T4 shows the state of the overhead transport vehicle 40 in step S19.

[0054] In this embodiment, when a reset signal is input to the controller 47 due to an abnormality occurring in the ceiling transport vehicle 40 while the gripper 41 is positioned other than at the origin, the controller 47 does not reset the interlock signal until the gripper 41 returns to the origin. That is, from timing T2 to timing T4 shown in FIG. 5 (i.e., from steps S14 to S19), the controller 47 prohibits resetting the interlock signal. Therefore, from timing T2 to timing T4, the communication unit 45 continues to transmit the interlock signal to the semiconductor processing apparatus 100. As a result, after the reset signal is input to the controller 47, the operation of the semiconductor processing apparatus 100 is limited or stopped until the gripper 41 returns to the origin. This prevents the semiconductor processing apparatus 100 from interfering with the ceiling transport vehicle 40 until the gripper 41 returns to the origin. Therefore, by using the transport system 1 according to this embodiment, the ceiling transport vehicle 40 can travel safely even in the presence of peripheral devices such as the semiconductor processing apparatus 100.

[0055] Unlike the present embodiment, in a transport system in which resetting of the interlock signal is not prohibited, the operational restriction on the semiconductor processing apparatus caused by the ceiling transport vehicle is lifted after timing T2 shown in FIG. 5 . That is, the semiconductor processing apparatus can operate after timing T2. Therefore, immediately after timing T2, at timing T3, etc., interference between the gripper and the semiconductor processing apparatus may occur at an unintended location. However, according to the present embodiment, as described above, interference between the semiconductor processing apparatus 100 and the ceiling transport vehicle 40 can be prevented.

[0056] In this embodiment, the ceiling transport vehicle 40 is provided with a reset button 46. Therefore, the ceiling transport vehicle 40 can easily transmit a reset signal.

[0057] In this embodiment, the overhead transport vehicle 40 is equipped with an abnormality detection sensor 44 that detects abnormalities in the overhead transport vehicle 40. Therefore, abnormalities in the overhead transport vehicle 40 can be quickly detected, and interference between the overhead transport vehicle 40 and the semiconductor processing apparatus 100 can be effectively prevented.

[0058] As described above, the transport system according to one aspect of the present disclosure is as described in the following [1] to [6], and has been described in detail based on the above embodiment. [1] An overhead transport vehicle that transports items in an area where there is a possibility of interference with peripheral devices; a travel path along which the overhead transport vehicle travels; a reset unit that outputs a reset signal that enables the ceiling transport vehicle to be restarted when the ceiling transport vehicle abnormally stops, The ceiling transport vehicle is a gripping portion that grips the article; a lifting mechanism for lifting and lowering the gripping portion; a communication unit that transmits an interlock signal to the peripheral device while the article is being transferred; a controller that controls the operation of the ceiling transport vehicle and resets the interlock signal when the reset signal is input, Even if the reset signal is input, when the gripping part is positioned other than at the origin, the controller does not reset the interlock signal until the gripping part rises to a position where it does not interfere with the peripheral device. Conveying system. [2] The conveying system according to [1], wherein when the gripping unit is positioned other than at the origin, the controller does not reset the interlock signal until the gripping unit returns to the origin. [3] The transport system according to [1] or [2], wherein the ceiling transport vehicle has a reset button which is the reset unit. [4] The transport system according to any one of [1] to [3], further comprising an abnormality detection sensor that detects abnormalities in the overhead transport vehicle. [5] The conveyance system according to any one of [1] to [4], wherein the peripheral device is a processing device that processes the item. [6] The conveyance system according to any one of [1] to [5], wherein the peripheral device has an overhead crane.

[0059] However, one aspect of the present disclosure is not limited to the above embodiment and the above [1] to [6]. One aspect of the present disclosure can be further modified without departing from the spirit thereof. For example, in the above embodiment, the conveyance system is installed in a semiconductor processing factory, but the conveyance system may be installed in other facilities. In this case, a processing device that performs some processing on the articles is installed in the other facility as a peripheral device. In other facilities, the interlock signal is not limited to the E84 signal.

[0060] In the above embodiment, the peripheral device is a semiconductor processing device, but is not limited to this. The peripheral device may be, for example, an overhead crane that can move to an area where it may interfere with the overhead transport vehicle, or an overhead crane that is installed in that area. Furthermore, the peripheral device is not limited to one type. There may be multiple types of peripheral devices located in an area where it may interfere with the overhead transport vehicle.

[0061] In the above embodiment, the ceiling transport vehicle is provided with a reset button, but this is not limited thereto, and the transport system may also be provided with a reset unit. For example, a reset unit such as a reset button may be provided outside the ceiling transport vehicle, or the reset unit may be a graphic that is displayed on a mobile device such as a tablet via an application to send a reset signal.

[0062] In the above embodiment, the overhead transport vehicle is equipped with an abnormality detection sensor, but this is not limiting, and the transport system may be equipped with an abnormality inspection system. For example, the transport system may be provided with multiple cameras, detectors, etc. as abnormality detection sensors.

[0063] In the above embodiment, when an abnormality in the overhead transport vehicle is detected while the gripper is positioned other than at the origin, the controller does not reset the interlock signal until the gripper returns to the origin. However, this is not limited to this. Depending on the installation environment of the transport system, when an abnormality in the overhead transport vehicle is detected while the gripper is positioned other than at the origin, the controller may be configured not to prohibit resetting the interlock signal until the gripper returns to the origin. The controller's function of prohibiting resetting the interlock signal may be switched on or off as desired. In this case, the transport system can be installed regardless of the installation environment.

[0064] In the above embodiment, when an abnormality in the ceiling transport vehicle is detected while the gripper is positioned other than at the origin, the controller always prohibits the resetting of the interlock signal until the gripper returns to the origin, but this is not limited to this. For example, depending on the layout of the transport system, the interlock signal may not need to be reset until the gripper rises to a position where it does not interfere with peripheral devices (a position that reaches a desired distance from the origin).

[0065] In the above embodiment, the first track and the second track are arranged side by side in the up-down (vertical) direction, but this is not limited to this. The overhead transport vehicle may have only one track, or three or more tracks arranged side by side. Also, only some of the tracks may be arranged to overlap in the up-down (vertical) direction, or multiple tracks at different heights may not overlap in the up-down (vertical) direction.

[0066] In the above embodiment, the storage shelves are provided on the sides facing the equipment ports across the first and second tracks when viewed vertically, but this is not limited to this. The processing ports and the storage shelves may be located on the same side of the tracks. Furthermore, the storage shelves may be provided inside or outside the loop-shaped intra-bay route. [Explanation of symbols]

[0067] 1...Transport system, 10...First track, 20...Second track, 30...Storage shelf, 40...Ceiling transport vehicle, 41...Gripping unit, 42...Lifting mechanism, 43...Moving mechanism, 44...Abnormality detection sensor, 45...Communication unit, 46...Reset button (reset unit), 47...Controller, 100...Semiconductor processing device, 110...Device port, 200...FOUP (item).

Claims

1. an overhead transport vehicle that transports articles in an area where there is a possibility of interference with peripheral devices; a travel path along which the overhead transport vehicle travels; a reset unit that outputs a reset signal that enables the ceiling transport vehicle to be restarted when the ceiling transport vehicle abnormally stops, The ceiling transport vehicle is a gripping portion that grips the article; a lifting mechanism for lifting and lowering the gripping portion; a communication unit that transmits an interlock signal to the peripheral device while the article is being transferred; a controller that controls the operation of the ceiling transport vehicle and resets the interlock signal when the reset signal is input, Even if the reset signal is input, when the gripping part is positioned other than at the origin, the controller does not reset the interlock signal until the gripping part rises to a position where it does not interfere with the peripheral device. Conveying system.

2. The transport system according to claim 1 , wherein when the gripper is positioned other than at the origin, the controller does not reset the interlock signal until the gripper returns to the origin.

3. The transport system according to claim 1 or 2, wherein the ceiling transport vehicle has a reset button serving as the reset unit.

4. The transport system according to claim 1 or 2, further comprising an abnormality detection sensor that detects an abnormality in the overhead transport vehicle.

5. The transport system according to claim 1 or 2, wherein the peripheral device is a processing device that processes the article.

6. The transport system according to claim 1 or 2, wherein the peripheral device comprises an overhead crane.

Images