Electronic Test Equipment

Abstract

To provide a tester used for testing microelectronic circuits.SOLUTION: A tester apparatus is described. Various components contribute to the functionality of the tester apparatus, the components including an insertion and removal apparatus, thermal posts, independent gimbaling, the inclusion of a photodetector, a combination of thermal control methods, a detection circuitry in a socket lid, through-posts with stand-offs, and voltage retargeting.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims priority to U.S. Provisional Patent Application No. 62 / 466,462, filed March 3, 2017, and U.S. Provisional Patent Application No. 62 / 526,089, filed June 28, 2017, which applications are incorporated by reference in their entireties into this application.

[0002] 1) Field of the invention

[0002] The present invention relates to testers used to test microelectronic circuits.

[0003] 2) Consideration of related technologies

[0003] Microelectronic circuits are typically fabricated within and on top of semiconductor wafers. Such wafers are then "singulated" or "diced" into individual die. Such die are typically attached to a support plate to provide rigidity to the support plate and to electronically communicate with the integrated circuits or microelectronic circuits of the die. Final packaging may include encapsulation of the die, and the resulting package can then be shipped to a customer.

[0004]

[0004] Dies or packages must be tested before being shipped to customers. Ideally, dies should be tested at an early stage to identify defects that occur during early stage manufacturing. Wafer-level testing is performed by providing contacts to a processor and contactor, and then using the processor to move the wafer so that the contacts on the wafer make contact with the contacts on the contactor. Power and electronic signals are then passed through the contactor to and from the microelectronic circuits formed on the wafer.

[0005] According to various embodiments, a wafer includes a substrate, such as a silicon substrate or a printed circuit board, and one or more devices fabricated within or mounted on the substrate.

[0006] Alternatively, the wafer can be placed in a portable cartridge with an electrical interface and a thermal chuck, through which power and signals can be transferred to and from the wafer, while the temperature of the wafer is thermally controlled by heating or cooling the thermal chuck.

[0007]

[0007] After the wafer is singulated, it may again be necessary to test the individual dies, or the dies may again be required to be tested after they have been attached to a support plate. Summary of the Invention

[0008]

[0008] The invention provides a testing apparatus, the testing apparatus including: a frame; a slot assembly on the frame; a slot assembly connection portion on the slot assembly; a holding structure for installing a cartridge holding a plurality of microelectronic devices; a horizontal transfer device operable to move the cartridge horizontally into the slot assembly from a first position to a second position; a vertical transfer device operable to move the cartridge and the slot assembly relative to each other in a first vertical direction and engage the slot assembly connection portion with the cartridge connection portion on the cartridge; and a tester connected via the first slot assembly connection portion and the cartridge connection portion, for supplying at least power to each microelectronic device and measuring performance of the microelectronic devices, wherein the vertical transfer device is operable to move the cartridge and the slot assembly relative to each other in a second vertical direction, the second vertical direction being opposite to the first vertical direction and disengaging the slot assembly connection portion from the cartridge connection portion, and the horizontal transfer device is operable to move the cartridge horizontally out of the slot assembly from the second position to the first position.

[0009]

[0009] The invention also provides a method for testing electronic devices, the testing method comprising the steps of: holding a cartridge holding a plurality of microelectronic devices at a first position on a frame at least partially outside a slot assembly; moving the cartridge horizontally into the slot assembly from the first position to a second position; moving the cartridge and the slot assembly relative to each other in a first vertical direction to engage a slot assembly connection portion on the slot assembly with a cartridge connection portion on the cartridge; testing the microelectronic devices via the first slot assembly connection portion and the cartridge connection portion, the testing being carried out by supplying at least power to each microelectronic device and measuring performance of the microelectronic devices; moving the cartridge and the slot assembly relative to each other in a second vertical direction, the second vertical direction being opposite to the first vertical direction to disconnect the slot assembly connection portion from the cartridge connection portion; and moving the cartridge horizontally out of the slot assembly from the second position to the first position.

[0010]

[0010] The invention further provides a cartridge comprising: a socket made of insulating material, having an upper side and a lower side, the upper side having a first configuration for releasably holding a first electronic device, the socket having a first socket thermal opening formed therethrough from the lower side to the upper side; a connection portion connected to the socket and connecting the first device to an electrical tester; a chuck made of a thermally conductive material; and a first thermal support attached to the chuck, the first thermal support being inserted into the first socket thermal opening, an end of the first thermal support thermally connected to the first device, such that heat is transferred primarily through, as opposed to through, the insulating material of the socket between the chuck and the first electronic device.

[0011]

[0011] The invention also provides a test piece, the test piece including: a socket made of an insulating material and having an upper side and a lower side, the upper side having a first configuration for releasably holding a first electronic device, the socket having a first socket thermal opening formed therethrough from the lower side to the upper side, and a first thermally conductive post being insertable into the first socket thermal opening from the lower side; first tweezers held in the socket, connecting the first device to a circuit board, and resiliently depressable; and a lid movable relative to the socket, depressing the first tweezers to bring the first electronic device into contact with an end of the first thermal post.

[0012]

[0012] The invention further provides a test specimen including a chuck made of a thermally conductive material and a first thermal support attached to the chuck, the first thermal support being insertable into a first socket thermal opening with an end of the first thermal support thermally connected to a first device, such that heat is transferred primarily through, as opposed to through, the insulating material of the socket between the chuck and the first electronic device.

[0013]

[0013] The invention also provides a method for testing one or more electronic devices, the method comprising the steps of releasably holding a first device in a first configuration on an upper side of a socket made of an insulating material; connecting the first device to an electrical tester via a connection portion connected to the socket; inserting a first thermal pillar attached to a chuck made of a thermally conductive material through the socket from the bottom to the top into a first socket thermal opening formed therein so that an end of the first thermal pillar is thermally connected to the first device; and conducting heat between the chuck and the first electronic device, the heat being conducted primarily through the first thermal pillar as opposed to the insulating material of the socket.

[0014]

[0014] The invention further provides a cartridge comprising: a socket made of insulating material and having an upper side and a lower side, the socket having a first configuration on the upper side for holding a first electronic device and a second configuration on the upper side for holding a second electronic device; a lid; a first push plate rotatably attached to the lid; a second push plate rotatably attached to the lid, the lid being positionable over the socket and movable towards the socket, the rotatably attaching of the first push plate allowing the first electronic device to rotate the first push plate relative to the lid and the rotatably attaching of the second push plate allowing the second electronic device to rotate the second push plate relative to the lid independently of the first push plate; a first set of contacts held in the socket and connected to the first electronic device; a first set of terminals connected to the first contact set; a second set of contacts held in the socket and connected to the second electronic device; and a second set of terminals connected to the second contact set.

[0015]

[0015] The invention also provides a method for testing one or more electronic devices, the method comprising the steps of releasably holding a first electronic device in a first configuration on an upper side of a socket made of an insulating material, and releasably holding a second electronic device in a second configuration on the upper side of the socket, placing a lid over the socket, the lid having a first push plate rotatably attached to the lid and a second push plate rotatably attached to the lid, moving the lid towards the socket, the rotatably attaching the first push plate allowing the first electronic device to rotate the first push plate relative to the lid and the rotatably attaching the second push plate allowing the second electronic device to rotate the second push plate relative to the lid independently of the first push plate, and connecting the first and second electronic devices to an electrical tester via connecting parts connected to the socket.

[0016]

[0016] The invention further provides a cartridge, the cartridge including: an electronic device holder having a structure for removably holding an electronic device having input contacts and a light emitter; input contacts on the electronic device holder that connect to the input contacts on the electronic device, the input contacts supplying input power to the input contacts of the electronic device via the input contacts of the electronic device holder, and the input power causing the light emitter to transmit light; a photodetector attached to the electronic device holder that detects the light and generates output power according to the magnitude of the light; and output contacts connected to the photodetector that measure the output power.

[0017]

[0017] The invention also provides a method for testing one or more electronic devices, the method including the steps of inserting an electronic device having input contacts and a light emitter into an electronic device holder, connecting the input contacts on the electronic device holder to the input contacts on the electronic device, supplying input power to the input contacts on the electronic device via the input contacts on the electronic device holder, causing the light emitter to transmit light via the input power, detecting the light, converting the detected light into output power, measuring the output power via the output contacts, and removing the electronic device from the electronic device holder.

[0018]

[0018] The invention further provides a testing apparatus, the testing apparatus including: a socket having a configuration for removably holding an electronic device having an input terminal and a light emitter; input contacts on the socket connected to the input terminal on the electronic device and supplying input power to the input terminal on the electronic device via the input contacts on the socket, the input power causing the light emitter to transmit light; a temperature compensation device on a first side of the socket, which changes temperature during operation to create a temperature difference between the temperature compensation device and the electronic device and thermal conduction between the temperature compensation device and the electronic device, thereby compensating the temperature of the electronic device; a heat sink on the side of the socket opposite the temperature compensation device, having a surface for absorbing light, and generating heat therein by absorbing the light; and a heat dissipation device thermally connected to the heat sink and removing heat from the heat sink.

[0019]

[0019] The invention also provides a method for testing one or more electronic devices, the method including the steps of inserting an electronic device having input contacts and a light emitter into a socket; connecting the input contacts on the socket to input terminals on the electronic device; supplying input power to the input terminals on the electronic device via the input contacts on the socket, causing the light emitter to transmit light via the input power; changing the temperature of a temperature compensation device on a first side of the socket to create a temperature difference between the temperature compensation device and the electronic device and thermal conduction between the temperature compensation device and the electronic device, thereby compensating for the temperature of the electronic device; absorbing light on a surface of a heat sink on the side of the socket opposite the temperature compensation device, causing the heat sink to generate heat due to the absorption of light; removing heat from the heat sink using a heat dissipation device thermally connected to the heat sink; and removing the electronic device from the socket.

[0020]

[0020] The invention further provides a cartridge, the cartridge made of an insulating material and having an upper side and a lower side and a configuration on the upper side, comprising a socket for holding an electronic device, a contact set held in the socket and connecting to the electronic device, a terminal set connected to the contact set held by the socket, a circuit board, the terminal set connected to the contact set being connected to a contact set on the circuit board, a lid, a detector attached to the lid, the lid being movable and positioned over the socket with the detector in a predetermined position when power is supplied to the electronic device through at least one of the terminal sets held by the socket, the detector detecting the function of the electronic device, and a measurement channel connecting the detector to a connection portion on the circuit board.

[0021]

[0021] The invention also provides a method for testing one or more electronic devices, the method comprising the steps of releasably holding the electronic device in a socket, the socket being made from an insulating material and having an upper side and a lower side and a structure on the upper side for holding the electronic device; connecting a set of contacts held in the socket to the electronic device; connecting a set of terminals connected to the set of contacts to a set of contacts on a circuit board; moving a lid having a detector attached over the socket; connecting the detector to a connection portion on the circuit board via a measurement channel; supplying power to the electronic device via at least one of the contacts held by the socket; detecting functionality of the electronic device when power is supplied to the electronic device via at least one of the contacts held by the socket; and measuring the functionality via the connection portion.

[0022]

[0022] The invention further provides a cartridge comprising: a support plate having a support post opening therethrough; a backing structure on a first side of the support plate and including at least a circuit board having contacts; a conductor having contacts for contacting terminals on an electronic device positioned on a second side of the support plate opposite the first side, a portion held by the support plate, and a terminal connected to the contacts on the circuit board; a spring; a force generating device on the electronic device opposite the support plate, the force generating device and the support plate being movable relative to each other, the force generating device deforming the spring to move the electronic device closer to the support plate; a support post, the support post having a surface in a plane spaced from the plane of the surface of the support plate and including a standoff that prevents the electronic device from moving closer to the support plate; and a force transmission portion extending from the standoff at least partially through the support post opening, and a force transfer portion extending from the force transmission portion, the force transfer portion being held by the backing structure.

[0023]

[0023] The invention also provides a cartridge, the cartridge comprising the steps of: arranging a backing structure including at least a circuit board having contacts on a first side of a support plate; connecting the contacts of a conductor to terminals on an electronic device located on the first side of the support plate opposite a second side thereof, the conductor having a portion held by the support plate and a terminal connected to the contacts on the circuit board; positioning a force generating device on the electronic device opposite the support plate; moving the force generating device and the support plate relative to each other to bring the electronic device closer to the support plate and deforming a spring against the spring force; The method includes the steps of preventing movement of the equipment toward the support plate with a support post having a standoff having a surface in a plane spaced apart from the plane of the surface of the support plate; receiving force from the electronic device at the standoff of the support post; transmitting the force from the standoff at least partially through an opening to a force transmission portion of the support post, the support post extending from the standoff through a support post opening formed at least partially through the support plate; receiving the force at a force transfer portion extending from the force transmission portion of the support post, the force transfer portion being held by a backing structure; and transferring the force to the backing structure.

[0024]

[0024] The invention further provides a tester apparatus, the tester apparatus comprising: a voltage target system; a holder for holding a plurality of electronic devices in at least a first and a second cluster; at least one voltage source connectable to the electronic devices of the first cluster, for simultaneously supplying a first test voltage to the electronic devices of the first cluster, and connectable to the electronic devices of the second cluster, for simultaneously supplying the first test voltage to the electronic devices of the second cluster; and at least one current detector connectable to the devices of the first cluster for measuring a first test current from the devices of the first cluster, wherein the first test current from the devices of the first cluster measured by the current detector is a total current simultaneously supplied to the devices of the first cluster, and connectable to the devices of the second cluster for measuring a first test current from the devices of the second cluster, wherein the first test current from the devices of the second cluster measured by the current detector is a total current simultaneously supplied to the devices of the first cluster. a current detector, which is a total current supplied simultaneously to the devices of the second cluster; a voltage target system, which performs a first comparison by comparing the measured first test current from the devices of the first cluster with a target current; a first voltage regulator, which adjusts the first test voltage to a second test voltage for the first cluster in response to the first comparison, resulting in the first test current from the devices of the first cluster being adjusted closer to the second test current that is closer to the target current; a voltage target system, which performs a second comparison by comparing the measured first test current from the devices of the second cluster with the target current; and a second voltage regulator, which adjusts the first test voltage to a second test voltage for the second cluster in response to the second comparison, resulting in the first test current from the devices of the second cluster being adjusted closer to the second test current that is closer to the target current.

[0025]

[0025] The invention also provides a method for testing a plurality of electronic devices, the method comprising the steps of: holding the plurality of electronic devices in at least first and second clusters; connecting at least one voltage source to the electronic devices of the first cluster to simultaneously supply a first test voltage to the electronic devices of the first cluster, and also connectable to the electronic devices of the second cluster to simultaneously supply the first test voltage to the electronic devices of the second cluster; connecting at least one voltage source to the electronic devices of the second cluster to simultaneously supply the first test voltage to the electronic devices of the second cluster; measuring a first test current from the devices of the second cluster with at least one current detector, the first test current measured by the current detector from the devices of the second cluster being a total current simultaneously supplied to the devices of the second cluster; measuring a first test current from the devices of the second cluster with at least one current detector, the first test current measured by the current detector from the devices of the second cluster being a total current simultaneously supplied to the devices of the second cluster; performing a first comparison with a voltage target system, the comparison being made by comparing the measured first test current from the devices of the first cluster with a target current; The method includes: using a regulator to adjust the first test voltage to a second test voltage for the first cluster in response to the first comparison, resulting in the first test current from the equipment in the second cluster being adjusted to the second test current that is closer to the target current; performing a second comparison using a voltage target system, the comparison being made by comparing the measured first test current from the equipment in the second cluster to the target current; and using a second voltage regulator to adjust the first test voltage to a second test voltage for the second cluster in response to the second comparison, resulting in the first test current from the equipment in the second cluster being adjusted to closer to the second test current that is closer to the target current.

[0026]

[0026] The invention will now be further described, by way of example only, with reference to the accompanying drawings, in which: [Brief explanation of the drawings]

[0027] [Figure 1]1 is a cross-sectional side view of a tester device having a slot assembly according to one embodiment of the present invention. [Figure 2] FIG. 2 is a cross-sectional side view of the tester device of FIG. 1 taken along line 2-2. [Figure 3] FIG. 3 is a cross-sectional side view of the tester device of FIG. 1 taken along line 3-3. [Figure 4] FIG. 4 is a cross-sectional side view of the tester apparatus of FIGS. 2 and 3 taken along line 4-4. [Figure 5A] FIG. 1 is a perspective view of the tester device, showing the insertion and removal of the portable cartridge into and from an oven defined by a frame. [Figure 5B] FIG. 1 is a perspective view of the tester device, showing the insertion and removal of the portable cartridge into and from an oven defined by a frame. [Figure 5C] FIG. 1 is a perspective view of the tester device, showing the insertion and removal of the portable cartridge into and from an oven defined by a frame. [Figure 6] 1 is a timing diagram showing how one cartridge is inserted into the wafer electronics and used for testing, followed by the insertion of another cartridge. [Figure 7] FIG. 10 is a perspective view of the tester device showing the insertion or removal of one slot assembly. [Figure 8A] FIG. 8 is a cross-sectional side view illustrating the use of standoffs in the cartridge configuration described with respect to FIGS. 1-7. [Figure 8B] FIG. 8 is a cross-sectional side view illustrating the use of standoffs in the cartridge configuration described with respect to FIGS. 1-7. [Figure 9A] FIG. 10 is a side view showing a device used to insert and remove a portable cartridge into and from an oven. [Figure 9B] FIG. 10 is a side view showing a device used to insert and remove a portable cartridge into and from an oven. [Figure 10] FIG. 10 is a side view showing a device used to insert and remove a portable cartridge into and from an oven. [Figure 11] FIG. 10 is a perspective view of a cartridge according to another embodiment of the present invention. [Figure 12] FIG. 12 is a side cross-sectional view of a portion of the cartridge of FIG. 11. [Figure 13] FIG. 13 is a side cross-sectional view showing a detail of a portion of FIG. 12. [Figure 14A] FIG. 14 is a cross-sectional side view illustrating the use of standoffs in the configuration of FIGS. 11-13. [Figure 14B] FIG. 14 is a cross-sectional side view illustrating the use of standoffs in the configuration of FIGS. 11-13. [Figure 15] FIG. 1 illustrates components of a tester device used to control voltage to individual electronic devices. [Figure 16] 16 is a flowchart showing the operation of the components of FIG. 15. [Figure 17] 17 is a graph illustrating voltage target changes following the process of FIG. 16. [Figure 18A] 17 is a histogram illustrating the static filter implemented in FIG. 16. [Figure 18B] 17 is a histogram illustrating the static filter implemented in FIG. 16. [Figure 19A] 17 is a histogram illustrating the outlier filter implemented in FIG. 16. [Figure 19B] 17 is a histogram illustrating the outlier filter implemented in FIG. 16. [Figure 20A] 17 is a histogram illustrating the sample size filter implemented in FIG. 16. [Figure 20B] 17 is a histogram illustrating the sample size filter implemented in FIG. 16. DETAILED DESCRIPTION OF THE INVENTION

[0028]

[0046] FIG. 1 of the accompanying drawings shows a tester apparatus 10 according to an embodiment of the present invention, including a tester 12, a frame 14, a power bus 16, first and second slot assemblies 18A and 18B, a tester cable 20, a power cable 22, a cooling liquid supply line 24A, a cooling liquid return line 24B, a control liquid supply line 24C, a control liquid return line 24D, a vacuum line 24E, first and second cartridges 28A and 28B, and first and second wafers 30A and 30B.

[0029]

[0047] The slot assembly 18A includes a slot assembly body 32, a thermal chuck 34, a temperature detector 36, a temperature compensation device in the form of a heating resistor 38, a first slot assembly connection portion 40 and a plurality of second slot assembly connection portions, the second slot assembly connection portions including a control connection portion 44, a power connection portion 46, and a coolant supply connection portion 48A, a coolant return connection portion 48B, a control liquid supply connection portion 48C, a control liquid return connection portion 48D and a vacuum connection portion 48E.

[0030]

[0048] A first slot assembly connection portion 40 is disposed within and attached to the slot assembly body 32. A second connection portion in the form of a control connection portion 44, a power connection portion 46, and connection portions 48A-48E is attached to the left wall of the slot assembly body 32.

[0031]

[0049] Slot assembly 18A is insertable into frame 14 from left to right and removable from frame 14 from right to left. Tester cable 20, power cable 22, and lines 24A to 24E are manually connected to control connection portion 44, power connection portion 46, and connections 48A to 48E, respectively. Before removing slot assembly 18A from frame 14, tester cable 20, power cable 22, and lines 24A to 24E are first manually disconnected from control connection portion 44, power connection portion 46, and connections 48A to 48E, respectively.

[0032]

[0050] The slot assembly 18A includes a motherboard 60 with test electronics, a plurality of channel module boards 62 with test electronics, a flexible connector 64, and a connection board 66. The control connection portion 44 and the power connection portion 46 are connected to the motherboard 60, and the thermal controller 50 is mounted to the motherboard 60. The channel module boards 62 are electrically connected to the motherboard 60. The flexible connector 64 connects the channel module boards 62 to the connection board 66. Control functions are provided via conductors connecting the control connection portion 44 to the motherboard 60. Power is provided to the motherboard 60 via the power connection portion 46. Both power and control are provided to the channel module boards 62 from the motherboard 60 via conductors. The flexible connector 64 provides conductors connecting the channel module boards 62 to the connection board 66. The connection board 66 includes conductors connecting the flexible connector 64 to the first slot assembly connection portion 40. This first slot assembly connection portion 40 is thus connected to the control connection portion 44 and the power connection portion 46 via various conductors so that power and control can be supplied to the first slot assembly connection portion 40 via the control connection portion 44 and the power connection portion 46.

[0033]

[0051] The second slot assembly 18B includes similar components as the first slot assembly 18A, and like reference numerals indicate like components. The second slot assembly 18B is inserted into the frame 14, and the control connection portion 44, the power connection portion 46, and the connection portions 48A-48E of the second slot assembly 18B are manually connected to a set of separate connection components, including the separate tester cable 20, the separate power supply cable 22, and the separate lines 24A-24E, respectively.

[0034]

[0052] Cartridge 28A includes a cartridge body formed by a thin chuck 72 and a backplate 74. A wafer 30A has multiple microelectronic devices formed thereon. Wafer 30A is inserted into the cartridge body between thin chuck 72 and backplate 74. Multiple cartridge contacts 76 contact respective contacts (not shown) on wafer 30A. Cartridge 28A further includes a cartridge connecting portion 78 on backplate 74. Conductors in backplate 74 connect cartridge connecting portion 78 to cartridge contacts 76.

[0035]

[0053] Cartridge 28A has a seal 77 connected between backplate 74 and thin chuck 72. A vacuum is applied to the area defined by seal 77, backplate 74, and thin chuck 72. The vacuum holds cartridge 28A together and ensures proper contact between cartridge contacts 76 and contacts on wafer 30A.

[0036]

[0054] Temperature detector 36 is positioned within thermal chuck 34 and is therefore close enough to wafer 30A to detect the temperature of wafer 30A or within one of 5 degrees Celsius, preferably 2 degrees Celsius, of wafer 30A.

[0037]

[0055] The slot assembly 18A further includes a door 82 connected to the slot assembly body 32 by a hinge 84. When the door 82 is rotated to an open position, the cartridge 28A can be inserted into the slot assembly body 32 through a door opening 86. The cartridge 28A is then lowered onto the thermal chuck 34, which closes the door 82. The thermal chuck 34 is then attached to the slot assembly body 32. The thermal chuck 34 then essentially forms a holder with a test station for the wafer.

[0038]

[0056] Slot assembly 18A further includes a seal 88 positioned between thermal chuck 34 and thin chuck 72. A vacuum is applied to the area defined by seal 88, thermal chuck 34, and thin chuck 72 via vacuum connection 48E and vacuum line 90. This provides a good thermal connection between thermal chuck 34 and thin chuck 72. When heat is generated by heating resistor 38, the heat conducts through thermal chuck 34 and thin chuck 72 to reach wafer 30A. When thermal chuck 34 is at a lower temperature than wafer 30A, heat conducts in the opposite direction.

[0039]

[0057] The cartridge connecting portion 78 is engaged with the first slot assembly connecting portion 40. Power and signals are supplied to the wafer 30A via the first slot assembly connecting portion 40, the cartridge connecting portion 78, and the cartridge contacts 76. The performance of the equipment in the wafer 30A is measured via the cartridge contacts 76, the cartridge connecting portion 78, and the first slot assembly connecting portion 40.

[0040]

[0058] Door 82 of slot assembly 18B is shown in the closed position. A front seal 100 is attached to the top of slot assembly 18A and seals against the underside of slot assembly 18B. A front seal 102 is attached to the top of slot assembly 18B and seals against the underside of frame 14. Door 82 and front seals 100 and 102 of slot assemblies 18A and 18B together provide a continuous, sealed front wall 104.

[0041]

[0059] Slot assembly 18A further includes a thermal controller 50. Temperature detector 36 is connected to thermal controller 50 via temperature feedback line 52. Power is supplied to heating resistor 38 via power connection 46 and power line 54 such that heating resistor 38 is heated. Heating resistor 38, in turn, heats thermal chuck 34 and wafer 30A on thermal chuck 34. Heating resistor 38 is controlled by thermal controller 50 based on the temperature detected by temperature detector 36.

[0042]

[0060] Thermal chuck 34 has thermal fluid passages 224 formed therein. Thermal fluid passages 224 contain a thermal fluid. The thermal fluid is preferably a liquid rather than a gas because liquids are incompressible and heat convects to and from liquids more quickly. Different thermal fluids are used for different applications, with oil being used for the highest temperature applications.

[0043]

[0061] Control fluid supply and return lines 226 and 228 connect opposite ends of the thermal fluid passage 224 to cooling fluid supply and return connections 48C and 48D, respectively. A heating resistor 38 serves as a fixed-position heater that heats the thermal chuck 34, which in turn heats the thermal fluid. Recirculating the thermal fluid through the thermal fluid passage 224 provides a more uniform heat distribution through the thermal chuck 222 to the thermal chuck 34 and ultimately to the wafer 30A. The temperature of the fluid can also be controlled to add heat to the thermal chuck 222 and cool the thermal chuck 34.

[0044]

[0062] The tester apparatus 10 further includes a cooling system 240, a temperature control system 242, and a vacuum pump 244. Two cooling liquid supply lines 24A connected to the first and second slot assemblies 18A and 18B are also connected to the cooling system 240 via a manifold (not shown). Additional manifolds connect the cooling liquid return line 24B to the cooling system 240, the control liquid supply line 24C to the temperature control system 242, the control liquid return line 24D to the temperature control system 242, and the vacuum line 24E to the vacuum pump 244. Each slot assembly 18A or 18B has a respective cooling plate 246 with a respective fluid passage 248. The cooling system 240 circulates fluid through the fluid passages 248 to cool the cooling plate 246. The cooling plate 246, in turn, keeps the channel module board 62 cool. A temperature control system 242 circulates fluid through thermal fluid passages 224 to control the temperature of thermal chuck 34 and to transfer heat to and from wafers 30A and 30B. A vacuum pump 244 supplies air at vacuum pressure to vacuum line 90.

[0045]

[0063] Slot assembly 18A includes a separator seal 108 attached to the upper surface of slot assembly body 32 above slot assembly 18A's inner wall 106. Separator seal 108 seals against the underside of slot assembly 18B. Slot assembly 18B has a separator seal 110 attached to the upper surface of its slot assembly body 32. Separator seal 108 seals against the underside of frame 14. The inner walls 106 of slot assemblies 18A and 18B and separator seals 108 and 110 provide a continuously sealed separator wall 112.

[0046]

[0064] Figure 2 is a view of the tester apparatus 10 of Figure 1 taken along line 2-2. The frame 14 defines a first closed-loop air path 120. Air inlet and outlet openings (not shown) can be opened to convert the first closed-loop air path 120 to an open air path in which room temperature air passes through the frame 14 without recirculation. A closed-loop path is particularly useful in cleanroom environments because cleanroom environments emit less particulate matter into the air.

[0047]

[0065] The tester apparatus 10 further includes temperature compensation equipment in the form of a first fan 122 , a first fan motor 124 and a water cooler 126 .

[0048]

[0066] A first fan 122 and a first fan motor 124 are mounted to the top of the first closed-loop air path 120. A water chiller 126 is mounted to the frame 14 within the top of the first closed-loop air path 120.

[0049]

[0067] Cartridges 28A and 28B are positioned with slot assemblies 18A and 18B within the bottom half of first closed-loop air path 120.

[0050]

[0068] In use, current is supplied to the first fan motor 124. The first fan motor 124 rotates the first fan 122. The first fan 122 recirculates air through the first closed-loop air path 120 in a clockwise direction.

[0051]

[0069] The water cooler 126 then cools the air in the first closed-loop air path 120. The air then flows through the slot assemblies 18A and 18B and over the cartridge 28A or 28B, which is then cooled by the convective air.

[0052]

[0070] Figure 3 is a view of the tester apparatus 10 of Figure 1 taken along line 3-3. The frame 14 defines a second closed-loop air path 150. The tester apparatus 10 further includes temperature compensation equipment in the form of a second fan 152, a second fan motor 154, and a water chiller 156. No electric heaters or dampers are provided as in Figure 2. Air inlet and outlet openings (not shown) can be opened to convert the first closed-loop air path 150 to an open air path in which room temperature air passes through the frame 14 without recirculation.

[0053]

[0071] Closed-loop paths are particularly useful in clean room environments because they emit less particulate matter into the air. A second fan 152 and a second fan motor 154 are positioned in the upper part of the second closed-loop air path 150. A water chiller 156 is located slightly downstream from the second fan 152 within the second closed-loop air path 150. The motherboard 60 and channel module board 62, which form part of the slot assemblies 18A and 18B, are located within the lower half of the second closed-loop air path 150.

[0054]

[0072] In use, current is supplied to the second fan motor 154, causing the second fan 152 to rotate. The second fan 152 then recirculates the air in a clockwise direction through the second closed-loop air path 150. The air is cooled by the water cooler 156. The cooled air is then passed over the motherboard 60 and channel module boards 62, resulting in heat being transferred by convection from the motherboard 60 and channel module boards 62 to the air.

[0055]

[0073] The air recirculating through the first closed-loop air path 120, Figure 2, is separated from the air in the second closed-loop air path 150, Figure 3, by the continuous sealed separation wall 112, shown in Figure 1. The continuous sealed front wall 104, shown in Figure 1, prevents air from escaping the first closed-loop air path 120.

[0056]

[0074] 2 and 3, the same cooling system 240 used in Figure 1 is also used to cool the water chiller 126. As shown in Figure 4, a plenum 160 separates the first closed-loop air path 120 from the second closed-loop air path 150 in all areas except the area provided by the continuous sealed separator wall 112. The frame 14 has a left wall 162 and a right wall 164 that further define the closed-loop air paths 120 and 150.

[0057]

[0075] Figures 5A, 5B, and 5C illustrate how cartridges 30C, 30D, and 30E can be inserted or removed at any time, while all other cartridges are used to test wafer devices and are in various temperature gradients. Figure 6 illustrates this concept in more detail. At time T1, a first cartridge is inserted into frame 14, while a second cartridge is outside frame 14. At T1, heating of the first cartridge begins. Between T1 and T2, the temperature of the first cartridge increases from room temperature, approximately 22°C, to a test temperature at T2, which is 50°C to 150°C above room temperature. At T2, power is applied to the first cartridge, and the devices within it are tested. At T3, a second cartridge is inserted into frame 14, and heating of the second cartridge begins. At T4, testing of the first cartridge ends. Cooling of the first cartridge also begins at T4. At T5, the second cartridge reaches the test temperature, power is applied to the second cartridge, and the wafers in the second cartridge are tested. At T6, the second cartridge reaches a temperature near room temperature and is removed from the frame 14. A third cartridge can then be inserted in place of the first cartridge. At T7, the second cartridge finishes testing and begins to cool. At T8, the second cartridge is cooled to room temperature or near room temperature and is removed from the frame 14.

[0058]

[0076] Various tests can be performed at various temperatures. For example, a cartridge can be inserted and testing can continue at room temperature. Another test can be performed while the temperature is increased. Further testing can continue at the increased temperature. Further testing can be performed while the temperature is decreased. Two of these tests are single tests that continue from one temperature step to the next.

[0059]

[0077] 7, one slot assembly 18A can be removed from or inserted into frame 14. While slot assembly 18A can be inserted or removed, other slot assemblies in frame 14 can be used to test wafer devices, as will be described with reference to FIG.

[0060]

[0078] As shown in FIG. 8A, the backplate 74 includes a circuit board 500, a contactor 502, a plurality of pins 504, a retaining ring 506, fasteners 508, and posts 510.

[0061]

[0079] Circuit board 500 is made primarily of insulating material and has circuitry (not shown) formed therein. Contacts 512 are formed on an underside 514 of circuit board 500. Threaded openings 516 are formed on underside 514.

[0062]

[0080] The contactor 502 has a plurality of pin openings 518, post openings 520, and fastener openings 522 formed therethrough from a top side 524 to a bottom side 526. Each one of the pin openings 518 has a first area 528 and a second area 530. The first and second areas 528 and 530 are both circular when viewed in a plan view. The first area 528 has a larger diameter than the second area 530. The larger diameter of the first area 528 compared to the diameter of the second area 530 causes the first area 528 to be wider than the second area 530 when viewed in the cross-sectional side view of FIG. 8A .

[0063]

[0081] The post opening 520 has a first section 534 and a second section 536. The first section 534 and the second section 536 are both circular when viewed in plan. The diameter of the first section 534 is larger than the diameter of the second section 536. Because the diameter of the first section 534 is larger than the diameter of the second section 536, the first section 534 is wider than the second section 536 when viewed in the cross-sectional side view of FIG. 8A . The first and second sections 534 and 536 have vertical sidewalls. A horizontal landing 538 connects the vertical sidewalls of the first and second sections 534 and 536.

[0064]

[0082] Each pin 504 includes a conductive retaining portion 542, a coil spring 544, and first and second end pieces 546 and 548. The first end piece 546 has a first inner portion 550 and a first tip 552. The second end piece 548 has a second inner portion 554 and a second tip 556. The coil spring 544 and the first and second inner portions 550 and 554 are retained by the retaining portion 542, with the coil spring 544 positioned between the first and second inner portions 550 and 554. The first and second tips 552 and 556 protrude from the upper and lower ends, respectively, of the retaining portion 542.

[0065]

[0083] The upper surface of first tip 552 forms terminal 560. The lower end of second tip 556 forms contact 562. Coil spring 544 and first and second end pieces 546 and 548 are made of a metal and therefore conductive material. Coil spring 544 and first and second end pieces 546 and 548 form a conductor capable of conducting electrical current between terminal 560 and contact 562.

[0066]

[0084] Each pin is inserted through the top surface 524 into a respective pin opening 518. The second tip 556 is slightly smaller than the second section 530 so that it passes through the second section 530 and protrudes from the underside 526. The retaining portion 542 is slightly narrower than the first section 528 but wider than the second section 530 to prevent the pins 504 from slipping out of the underside 526. When the pins 504 are fully inserted into the pin openings 518 and before the contactor 502 is attached to the circuit board 500, the first tip 552 still protrudes above the top surface 524 of the contactor 502.

[0067]

[0085] Post 510 has a standoff 564, a force transmission portion 566, and a force delivery portion 568. Post 510 is made from a single piece of metal or other material selected for its strength compared to the strength and brittleness of the ceramic material of contactor 502.

[0068]

[0086] The post 510 is inserted into the post opening 520 through the upper side 524. The standoff 564 and force transmission portion 566 are slightly narrower than the second section 536. The force delivery portion 568 is slightly narrower than the first section 534 but wider than the second section 536. The lower surface 570 of the force delivery portion 568 abuts the landing 538. This prevents the post 510 from slipping out the lower side 526.

[0069]

[0087] Post 510 has a surface 572 that lies in a plane parallel to and below the surface of underside 526 when post 510 is fully inserted, as shown in Figure 8A. Force-transfer portion 568 has a surface 574 that lies in the same plane as upper surface 524 when post 510 is fully inserted.

[0070]

[0088] Circuit board 500 is positioned on top of contactor 502. Each one of contacts 512 contacts a respective one of terminals 560. Terminals 560 are in a plane above the plane of top side 524, so that bottom side 514 is initially spaced apart from top side 524.

[0071]

[0089] Fastener 508 has a threaded shaft 578 and a head 580. Ring 506 has a ring opening 582. Ring 506 is positioned on the underside 584 of contactor 502. Threaded shaft 578 is inserted from the bottom through ring opening 582 and then through fastener opening 522. Head 580 comes into contact with the underside of ring 506. Head 580 is rotated, and then the threads of threaded shaft 578 are threaded into threaded opening 516. The threading action brings circuit board 500 closer to contactor 502 and ring 506. Underside 514 eventually contacts upper side 524. Contact 512 moves first end piece 546 downward into pin opening 518 until terminal 560 is flush with upper surface 524. The coil spring 544 compresses and therefore deforms slightly, allowing relative movement of the first end piece 546 towards the second end piece 548 .

[0072]

[0090] The underside 514 has an area that rests against a surface 574 that forms part of the post 510. As the post 510 abuts the circuit board 500, the post 510 is in a position to transmit force through the surface 572 to the circuit board 500.

[0073]

[0091] The first wafer 32A has a plurality of electronic devices formed thereon, each having a plurality of terminals 588 on a top surface 590 of the first wafer 32A. When the backplate 74 and the first wafer 32A are brought together, the first wafer 32A aligns with the backplate 74 to ensure that each one of the terminals 588 contacts a respective one of the contacts 562.

[0074]

[0092] A vacuum pressure is created in the region between the upper surface 590 and the underside 526, while the pressure below the lower surface 592 of the thin chuck 72 and at the upper surface 594 of the circuit board 500 remains at atmospheric pressure. The pressure differential creates equal and opposite forces F1 and F2 on the circuit board 500 and the thin chuck 72.

[0075]

[0093] As shown in FIG. 8B , forces F1 and F2 cause the backplate 74 to move relatively toward the wafer 32A and thin chuck 72. The coil springs 544 further compress, allowing the second end pieces 548 to move into the pin openings 518. Each coil spring 544 deforms against its spring force, e.g., F3. However, force F1 still exceeds the sum of all F3 forces added together. The top surface 590 eventually rests on the surface 572 of the standoff 564. As the post 510 abuts the circuit board 500, the standoff 564 prevents the top surface 590 from approaching and contacting the underside 526 of the contactor 502. The first wafer 32A transmits force F4 to the standoff 564. The force transmitting portion 566 transmits force F4 through the second section 536 of the post opening 520. Force delivery portion 568 receives force F 4 from force transmission portion 566 and delivers force F 4 to circuit board 500 via surface 574 .

[0076]

[0094] It can thus be seen that force F4 is not transmitted by contactor 502, thereby preventing stresses that could cause damage to the brittle ceramic material of contactor 502. Instead, force F4 is transmitted directly from the electronics in the form of first wafer 32A through support posts 510 to circuit board 500.

[0077]

[0095] In the embodiment depicted in FIGS. 8A and 8B, the contactor 502 serves as a support plate having post openings 520 therethrough. A circuit board 500 serves as a backing structure on a first side of the support plate and including at least one circuit board having contacts 512. The pins 504 serve as conductors having contacts 562 for contacting terminals 588 on the electronics, which are positioned on a second side of the support plate opposite the first side of the support plate. A retainer 542 serves as part of the conductor held by the support plate. The conductor further has terminals 560 that connect to the contacts 512 on the circuit board 500. A spring in the form of a coil spring 544 is provided. The thin chuck 72 serves as a force generator on the opposite side of the support plate of the electronics in the form of a first wafer 32A. The force generator and the support plate are movable relative to one another to move the electronics closer to the support plate and deform the springs. The support post 510 has a standoff 564 having a surface 572 in a plane spaced apart from the plane of the surface of the support plate to prevent the electronic device from moving close to the support plate, and a force transfer portion 566 extends from the standoff 564 and at least partially through the support post opening 520 and extends from the force transfer portion 566 to a force transfer portion 568, which is held by a backing structure.

[0078]

[0096] 9A shows a portion of tester apparatus 10 used to insert and remove cartridges from each slot assembly, for example, slot assembly 18A. Components of tester apparatus 10 shown in FIG. 9A include frame 300, a portion of first slot assembly 18A, first slot assembly connecting portion 40, retaining structure 302, horizontal transfer device 304, vertical transfer device 306, beam spring 308, and locking mechanism 310.

[0079]

[0097] Frame 300 includes first and second spaced-apart mounts 312 and 314. Horizontal transfer device 304 is a slide mounted between first and second mounts 312 and 314. Retaining structure 302 is mounted for sliding movement along horizontal transfer device 304. Opposite ends of beam spring 308 are attached to first and second mounts 312 and 314, respectively.

[0080]

[0098] The locking mechanism 310 includes a connecting lever 316, a control lever 318, and a pressure lever 320. The control lever 318 is attached to the first mount 312 at a pivot connection 322. The vertical transfer device 306 is a rigid beam. A connection 324 connects the vertical transfer device 306 and the beam spring 308 at their center points. The pressure lever 320 has a first link 326 rotatably connected to the control lever 318 and a second link 328 rotatably connected to an end of the vertical transfer device 306. In the unlocked configuration shown in FIG. 9A , a line 330 connects the pivot connection 322 to the second link 328, with the first link 326 to the left of the line 330.

[0081]

[0099] In use, the first cartridge 28A is placed on the retaining structure 302. The first cartridge 28A then moves from left to right with the retaining structure 302 into the first slot assembly 18A. The placement and movement of the first cartridge 28A can be performed manually or robotically.

[0082]

[0100] The retaining structure 302 slides along the horizontal transfer device 304. A connecting lever 316 connects the end of a control lever 318 to the retaining structure 302. As the retaining structure 302 moves horizontally along the horizontal transfer device 304, the connecting lever 316 rotates the control lever 318 counterclockwise about the pivot connection 322.

[0083]

[0101] The first link 326 rotates counterclockwise with the control lever 318. The pressure lever 320 converts the movement of the first link 326 into downward movement of the second link 328. Initially, the downward movement is minimal, but once the first cartridge 28A is fully inserted into the first slot assembly 18A, the vertical movement becomes more pronounced and the vertical transport device 306 engages the first cartridge 28A with the first slot assembly 18A. The horizontal transport device 304 is thus operable to move the first cartridge 28A horizontally from the first position to the second position within the first slot assembly 18A, and the vertical transport device 306 is operable to move the first cartridge 28A and the first slot assembly 18A relative to each other in a first vertical direction, causing the slot assembly connecting portion 40 to engage the cartridge connecting portion on the first cartridge 28A.

[0084]

[0102] The control lever 318 is shown in FIG. 9A in an unlocked position, with the first link 326 on a first side of a line 330 connecting the pivot connection 322 and the second link 328. The control lever 318 rotates from the unlocked position shown in FIG. 9A through a compressed position, where the beam spring 308 is deformed by the vertical transfer device 306 through connection 324 by bending the beam spring 308 against its spring force, and the first link 326 is aligned with the pivot connection 322 and the second link 328. As shown in FIGS. 9B and 10, the control lever 318 continues to rotate from the compressed position to a locked position. In the locked position, the first link 326 is to the right of the line 330, and therefore on a second side opposite the first side of the line 330. With the first link 326 passing through the wire 330 and the beam spring 308 deforming against its spring force, the first cartridge 28A is locked in place relative to the slot assembly connecting portion 40.

[0085]

[0103] The system can be unlocked by moving the retaining structure 302 from right to left. The control lever 318 rotates clockwise, and the first link 326 moves from right to left past the line 330. The vertical transfer device 306 moves upward, i.e., in a second vertical direction opposite the first vertical direction, to release the first cartridge 28A from the slot assembly connection portion 40. Further movement of the retaining structure 302 along the horizontal transfer device 304 removes the first cartridge 28A from the first slot assembly 18A.

[0086]

[0104] FIG. 11 shows a cartridge 340 according to a further embodiment of the present invention, including a thermal subassembly 342, a board and socket subassembly 344, and a plurality of lids 346.

[0087]

[0105] FIG. 12 shows a portion of the thermal subassembly 342 , a portion of the board and socket subassembly 344 , and one of the lids 346 .

[0088]

[0106] Figure 13 shows Detail A of Figure 12, including a portion of the thermal subassembly 342, a portion of the board and socket subassembly 344, and a portion of the lid 346. Figure 13 also shows a first electronic device 348.

[0089]

[0107] Thermal subassembly 342 includes a low-profile chuck 350, a first thermal fastener 352, and a first thermal post 354. Low-profile chuck 350 has a top surface 356 with an opening 358 formed therein. First thermal fastener 352 and first thermal post 354 are machined from a single piece of metal. Both first thermal fastener 352 and first thermal post 354 have circular cross sections when viewed in a plan view in their respective planes parallel to the axis of first thermal post 354. The cross section of first thermal fastener 352 is larger than the cross section of first thermal post 354.

[0090]

[0108] A first thermal fastener 352 is inserted through the top surface 356 and into the opening 358. A first thermal strut 354 extends upward from the first thermal fastener 352. A majority of the first thermal strut 354 is disposed above the top surface 356. The first thermal fastener 352 has an upper end with a first thermal surface 360. The first thermal fastener 352 is press-fit into the opening 358 to a desired depth, with the first thermal surface 360 ​​a desired distance from the top surface 356.

[0091]

[0109] The first thermal strut 354, the first thermal fastener 352, and the thin chuck 350 are all made of metal and are therefore good thermal conductors. The cross section of the first thermal fastener 352 allows more heat to be conducted from the first thermal fastener 352 to the thin chuck 350 than the cross section of the first thermal strut 354.

[0092]

[0110] Board and socket subassembly 344 includes a circuit board 362, a socket 364, a first set of pins for the electronics 366, and a first set of pins for the detector 368. Pins 366 and 368 are pogo pins that include springs and can compress against the spring force of the springs.

[0093]

[0111] Socket 364 includes a lower portion 370 and an upper portion 372. Each one of pins 366 and 368 is held within socket 364 between lower portion 370 and upper portion 372. Upper portion 372 has a first recessed configuration 376 for holding first electronic device 348. Each one of pins 366 has a respective contact 378 extending above a surface of first recessed configuration 376. Each one of pins 368 has a respective contact 380 extending above an upper surface 382 of upper portion 372.

[0094]

[0112] The contacts 380 of pin 368 all lie in the same plane. The contacts 378 of pin 366 all lie in the same plane. The planes of contacts 380 are parallel to and above the plane of contacts 378. The terminals 392 of pin 368 all lie in the same plane as the terminals 392 of pin 366.

[0095]

[0113] Circuitry (not shown) is formed on the circuit board 362. Contacts 388 are formed in a top surface 390 of the circuit board 362.

[0096]

[0114] Socket 364 is positioned on circuit board 362. Circuit board 362 is thus disposed between thin chuck 350 and socket 364. Each one of pins 366 and 368 initially has a respective terminal 392 extending below a lower surface 394 of lower portion 370. Each one of terminals 392 is in contact with a respective one of contacts 388. Pins 366 and 368 compress against their spring forces until lower surface 394 contacts upper surface 390. Terminals 392 of pins 366 and 368 move into socket 364 until they are flush with lower surface 394. Socket 364 is then permanently attached to circuit board 362.

[0097]

[0115] The socket 364 has a first socket thermal opening 398 formed therethrough from bottom to top. The circuit board 362 has a first circuit board thermal opening 400 formed therethrough from bottom to top. The first socket thermal opening 398 is aligned with the first circuit board thermal opening 400. As shown in FIG. 11 , the thermal subassembly 342 and the board and socket subassembly 344 are initially separated from one another. The board and socket subassembly 344 is then positioned above the thermal subassembly 342. The first circuit board thermal opening 400 is positioned above the upper end of the first thermal post 354. The board and socket subassembly 344 is then further lowered until the first thermal post 354 passes through the first socket thermal opening 398. The lower surface 402 of the circuit board 362 rests on the upper surface 356 of the thin chuck 350. The first thermal strut 354 fits loosely within the first socket thermal opening 398 and the first circuit board thermal opening 400. The first thermal strut 354 extends slightly longer than the combined length of the first socket thermal opening 398 and the first circuit board thermal opening 400, thereby extending above the top surface 356. The first thermal surface 360 ​​is therefore positioned slightly above the top surface of the first recess configuration 376. The contacts 378 are now positioned in a plane above the plane of the first thermal surface 360.

[0098]

[0116] The socket 364 is made of an electrically and thermally insulating material. The pins 366 and 368 provide electrical conductors through the socket 364. The circuit board 362 is also made of an electrically and thermally insulating material. The contacts 388 form part of an electrical circuit within the insulating material of the circuit board 362. The first thermal strut 354 provides a thermal conduction path between the first recess configuration 376 and the first thermal fastener 352 connected to the thin chuck 350. The first thermal strut 354 is electrically and thermally isolated from the electrical conductors within the socket 364 and the circuit board 362. Heat is conducted primarily through the first thermal strut 354, as opposed to the insulating material of the socket 364 and the insulating material of the circuit board 362.

[0099]

[0117] The lid 346 includes a circuit board 406 and a heat sink 408. The cartridge 340 further includes a first photodetector 410, a first adjustable component 412, and a first coil spring 414.

[0100]

[0118] Circuit board 406 is made of an electrically and thermally insulating material. Conductive terminals 416 are formed on a bottom surface 418 of circuit board 406. Terminals 416 form part of a circuit (not shown) formed within circuit board 406.

[0101]

[0119] The first photodetector 410 is mounted on the top surface 420 of the circuit board 406. The first photodetector 410 is connected to terminals 416 via circuitry within the circuit board 406. One of the terminals 416 can, for example, provide power to the first photodetector 410. When light strikes the first photodetector 410, the first photodetector 410 converts the light energy and outputs electrical power. The other terminal 416 can serve as an output contact connected to the first photodetector 410 to measure the output power.

[0102]

[0120] The first adjustable component 412 has a pressure plate 422, a sidewall 424 extending upward from the pressure plate 422, and a lip 426 extending outward from the sidewall 424. A first opening 428 is formed in the circuit board 406. The first adjustable component 412 is inserted into the first opening 428. The pressure plate 422 then extends below the lower surface 418. The lip 426 rests on the upper surface 420. The first opening 428 is slightly larger than the width between the sidewalls 424. The difference in width allows the first adjustable component 412 to rotate only a few degrees about a first axis 432 relative to the circuit board 406. The difference in width also allows the first adjustable component 412 to rotate clockwise and counterclockwise relative to the circuit board 406 about a second axis 434 that intersects the plane of the paper and is orthogonal to the first axis 432. Such orthogonal rotation allows a small amount of gimbal movement of the first adjustable component 412 relative to the circuit board 406.

[0103]

[0121] The heat sink 408 has a first recess 436. The first coil spring 414 is inserted between the side walls 424. The lower end of the first coil spring 414 rests on the upper surface 438 of the push plate 422. The upper end of the first coil spring 414 extends above the lip 426. The heat sink 408 is positioned above the circuit board 406 with the upper end of the first coil spring 414 disposed within the first recess 436. The lower surface 440 of the heat sink 408 is initially spaced apart from the upper surface 420. As the heat sink 408 moves toward the circuit board 406, the first coil spring 414 compresses and deforms against its spring force. The lower surface 440 contacts the upper surface 420. The heat sink 408 is then secured to the circuit board 406 with fasteners (not shown). A small force generated by first coil spring 414 then urges first adjustable component 412 out of lower surface 418 .

[0104]

[0122] The push plate 422 has a first opening 442 therein. The heat sink 408 defines a first cavity 444. A light absorbing coating is formed on the surface of the first cavity 444.

[0105]

[0123] In use, the first electronic device 348 is inserted into the first recess configuration 376. The terminals 446 on the underside of the first electronic device 348 make contact with the contacts 378. The underside 448 of the first electronic device 348 is now spaced apart from the first thermal surface 360.

[0106]

[0124] Lid 346 is placed over board and socket subassembly 344. Lid 346 is then moved toward board and socket subassembly 344. Each one of terminals 416 contacts a respective one of contacts 380. Lower surface 450 of push plate 422 contacts upper surface 452 of first electronic device 348. Lower surface 448 of first electronic device 348 is still spaced apart from first thermal surface 360.

[0107]

[0125] The operator manually pushes on lid 346, thereby moving lid 346 further toward board and socket subassembly 344. Each one of pins 366 and 368 compresses against its spring force, thus resiliently depressing contacts 378 and 380 against the spring force of the springs in pins 366 and 368. Underside 448 of first electronic device 348 contacts first thermal surface 360.

[0108]

[0126] If there is an angular misalignment between the first thermal surface 360 ​​and the underside 448 of the first electronic device 348, the first electronic device 348 is rotated by the first thermal surface 360 ​​until the underside 448 is flush with the first thermal surface 360. Rotating the first adjustable component 412 relative to the lid 346 allows the underside 448 of the first electronic device 348 to rest on the first thermal surface 360. This ensures good thermal contact between the first thermal surface 360 ​​and the underside 448. The first coil spring 414 compresses to adjust the height of the first electronic device 348. Furthermore, the first adjustable component 412 is rotatably attached to the lid 346, such that the first electronic device 348 can rotate the first adjustable component 412 relative to the first thermal surface 360. The lid 346 is then secured to the board and socket subassembly 344.

[0109]

[0127] Socket 364 and lid 346 together form an electronics holder that holds first electronics 348. Cartridge connections (not shown) on circuit board 362 provide power and communication to contacts 388. Pins 366 provide power and communication to first electronics 348 via terminals 446.

[0110]

[0128] First electronic device 348 may include, for example, a laser or other light transmitter. First electronic device 348 may have, for example, a laser transmitter on its top surface 452. When power and communication is supplied to one of contacts 378 serving as an input contact and one of terminals 446 serving as an input terminal, the laser transmitter of first electronic device 348 transmits laser light through first opening 442 and through first coil spring 414 and sidewall 424 into first cavity 444.

[0111]

[0129] Most of the light is absorbed by the light absorbing material on the surface of the first cavity 444 and converted to heat. The heat is conducted through the heat sink 408.

[0112]

[0130] A small percentage of the light reflects off the surface of the first cavity 444 and is detected by the first photodetector 410. The first photodetector 410 is powered through a conductor formed by one of the contacts 388, one of the pins 368, and one of the terminals 416, and through a circuit formed within the circuit board 406. Upon detecting the light, the first photodetector 410 converts the light into electrical power. The amount of power is related to the amount of light detected by the photodetector 410. The first photodetector 410 then provides power to the circuit board 362 through a conductor formed together by the circuit within the circuit board 406, one of the terminals 416, one of the pins 368, and one of the contacts 388, and ultimately to a cartridge connection on the circuit board 362.

[0113]

[0131] Circuit board 406 and pin 368 provide a measurement channel connecting first photodetector 410 to circuit board 362, even if first photodetector 410 is on the opposite side of first electronic device 348 rather than on circuit board 362. In a similar manner, other types of detectors other than photodetectors can be used to detect functions of the electronic device other than light transmitted by the electronic device. For example, current flow at a terminal on the top surface of the electronic device can be detected to create a similar measurement channel via pins located in a circuit board above the electronic device and in a socket that leads to a circuit board below the electronic device. In such a configuration, pins such as pin 368 can serve as detector measurement pins that are held by the socket and form part of the measurement channel.

[0114]

[0132] The temperature of the first electronic device 348 is controlled by conducting heat through the first thermal strut 354. The first electronic device 348 can be heated or cooled, for example, via the first thermal strut 354. The first electronic device 348 can be cooled, for example, by conducting heat from the first electronic device 348 through the first thermal strut 354 and the first thermal fastener 352 to the thin chuck 350. The first electronic device 348 can be heated by conducting heat from the thin chuck 350 through the first thermal fastener 352 and the first thermal strut 354 to the first electronic device 348.

[0115]

[0133] The thin chuck 350 is on a first side of the electronic device 348 opposite the heat sink 408. It can therefore be seen that the temperature of the first electronic device 348 can be controlled independently of heat dissipation by the heat sink 408 by virtue of the laser light transmitted by the first electronic device 348.

[0116]

[0134] 12 , multiple electronic devices can be tested using one socket 364 and one lid 346. The socket 364 includes, for example, a second thermal fastener 352A, a second thermal post 354A, a second thermal surface 360A, a second tweezers 366A for a second electronic device, a second tweezers 368A, a second recess configuration 376A for a second electronic device (not shown), a second socket thermal opening 398A, a second circuit board thermal opening 400A, a second photodetector 410A, a second adjustable component 412A, a second coil spring 414A, a second opening 428A, a second recess 436A, a second opening 442A, and a second cavity 444A. Like reference numbers indicate like components and functions.

[0117]

[0135] The light transmitted by the first and second electronic devices can be independently detected by first and second photodetectors 410 and 410A. Heat resulting from the light of the first and second electronic devices is dissipated through the same heat sink 408. A plurality of fins 454 are connected to and extend from the heat sink 408. Heat is conducted through the fins 454 and then convected from the fins 454 to the surrounding air. The fins 454 are thus thermally connected to the heat sink 408 and serve as heat dissipation devices to remove heat from the heat sink 408.

[0118]

[0136] The temperatures of the first and second electronic devices are controlled together through the same thin chuck 350. When the electronic devices are cooled, for example, heat is conducted through the first and second thermal posts 354 and 354A to the first and second thermal fasteners 352 and 352A, respectively, and then from the first and second thermal fasteners 352 and 352A to the thin chuck 350.

[0119]

[0137] The first and second electronics are independently rotatable into contact with the first and second thermal surfaces 360 and 360A, respectively. The independent rotation of the first and second electronics is permitted and controlled by the independent gimbaling of the first and second adjustable components 412 and 412A relative to the lid 346.

[0120]

[0138] 11 , sixteen sockets 364 are mounted on a circuit board 362. Each socket 364 has a respective lid 346. Each lid 346 has a respective locking feature 460, and each socket 364 has a respective locking feature 462. The lids 346 are moved toward the sockets 364. As previously described, the lids 346 are then pressed against the sockets 364. The locking features 460 and 462 then engage with each other to secure the lids 346 to the sockets 364, maintaining their thermal and electrical integrity.

[0121]

[0139] Thin chuck 350 has a plurality of thermal struts secured to it in groups of 16. Each group of thermal struts is inserted through a respective one of sockets 364. The electronic devices held by all 16 sockets 364 are maintained at their temperature using a single thin chuck 350.

[0122]

[0140] The cartridge connection portion 464 is formed on the underside of the circuit board 362. The cartridge connection portion 464 is connected to the contacts 388 shown in FIG. 13 via a circuit (not shown). The cartridge connection portion 464 is used to connect the cartridge 340 to an electrical tester, as previously described. The thin chuck 350 is thermally connected to the thermal chuck, as previously described. The thermal chuck serves as a temperature compensation device that controls heat transferred to and from the thin chuck 350.

[0123]

[0141] Following testing of the electronics, the cartridge 340 is removed from the system, the lid 346 is removed, and the electronics are removed from the socket 364 .

[0124]

[0142] The thermal strut 354 also serves as a force-transmitting strut in a manner similar to the embodiment described in FIGS. 8A and 8B . The lid 346 serves as a force-generating device. A portion of the force generated by the lid 346 is balanced by the force generated by the springs in the pins 366 and 368. The remaining force not balanced by the pins 366 and 368 is absorbed by the standoffs of the strut 354 having the surface 360, thereby supporting the electronic device 348 and preventing it from moving closer to the base of the recess configuration 376. A central portion of the strut 354 serves as a force-transmitting portion extending from the standoffs through the opening 398. The circuit board 362 and the thin chuck 350 together form a backing structure. The lower portion of the strut 354 generally delivers force to the backing structure. Specifically, the force is transmitted through the thermal fasteners 352 to the thin chuck 350, which forms part of the backing structure. The press fit between the thermal fasteners 352 and the thin chuck 350 is strong enough to remain intact, and as a result, the force does not move the thermal fasteners 352 relative to the thin chuck 350 .

[0125]

[0143] FIG. 14A shows the embodiment of FIGS. 11, 12 and 13, showing further details thereof, including fasteners 600 and posts 602. FIG.

[0126]

[0144] A post opening 604 and a fastener opening 606 are formed through socket 364. Post opening 520 has a first section 608 and a second section 610. Second section 610 is wider than first section 608. First section 608 can be formed through upper section 372, and second section 610 can be formed through lower section 370, for example. A landing 612 connects first section 608 to second section 610.

[0127]

[0145] Post 602 includes standoff 614, force transfer portion 616, and force transfer portion 618. Post 602 is inserted into post opening 604 from the bottom until surface 620 of force transfer portion 618 abuts landing 612. Threaded shaft 622 of fastener 600 is inserted through fastener opening 606 from the top. Head 624 is rotated, and then the threads on threaded shaft 622 thread into the threads of threaded opening 626 of low-profile chuck 350. Low-profile chuck 350 is made of metal, which provides an excellent fastener for fastener 600. As fastener 600 is rotated further, head 624 moves closer to circuit board 362. The spring in pin 366 compresses slightly, and the underside 630 of post 602 contacts circuit board 362.

[0128]

[0146] 14B, when the operator presses the lid 346 against the socket 364, the pusher plate 422 generates a force F1 equal to and opposite to the reaction force F2 generated by the thin chuck 350. The spring in the pin 366 compresses against its own spring force F3. The pusher plate 422 and first electronic device 348 continue to move toward the socket 364 until the bottom surface 448 of the electronic device 348 contacts the surface 632 of the standoff 614. The surface 632 prevents the electronic device 348 from moving further toward the socket 364.

[0129]

[0147] The standoff 614 receives a force F4 from the electronics 348. The force transfer portion 566 transfers the force through the first section 608 of the post opening 604. The force delivery portion 618 receives the force from the force transfer portion 566 and transfers the force to the circuit board 362. The circuit board 362 transfers the force to the thin chuck 350.

[0130]

[0148] Therefore, it can be seen that the material of the socket 364 is not subjected to the force F4, thereby eliminating damage to the socket 364.

[0131]

[0149] The socket 364 provides a support plate with a support post opening 604 therethrough. The circuit board 362 provides a backing structure on a first side of the support plate and has a contact 388. The pin 366 forms a conductor with a contact 378 that contacts a terminal 446 on an electronic device 348 positioned on the opposite side of the first side of the support plate. The conductor has a portion that is retained by the support plate and a terminal 392 that is connected to the contact 388 on the circuit board 362. A spring is provided within the pin 366. The push plate 422 forms a force generator on the side of the support plate opposite the electronic device 348. The force generator and the support plate are movable relative to one another to move the electronic device 348 closer to the support plate and to deform the spring. The support post 602 has a standoff 614 with a surface 632 that is spaced apart from the plane of the surface of the support plate, preventing the electronic device 348 from moving closer to the support plate. A force transfer portion 616 extends from the standoff 614 at least partially through the post opening 604. A force delivery portion 618 extends from the force transfer portion 616. The force delivery portion 618 is retained by a backing structure.

[0132]

[0150] 15 shows additional components of the test fixture 10 that are used to precisely control the voltage supplied to the electronics 634 under test. The electronics 634 may be distributed across the surface of a wafer 636, for example, or may be individual devices held in a socket layout.

[0133]

[0151] Many semiconductor devices require a constant current source for a constant voltage power supply. An example of this is burn-in testing (or aging) of vertical cavity surface emitting laser (VCSEL) wafers. The following problems arise: A VCSEL wafer has a very large number of devices in a very small area. For example, consider a VCSEL wafer with 50,000 devices in a 7.6 cm circle. The cost of 50,000 constant current power supplies makes cost-effective burn-in testing too expensive a system. · Routing 50,000 power lines within a 7.6 cm circle is extremely difficult, if not impossible.

[0134]

[0152] For further explanation, assume the following. · Because VCSELs are diodes, very little power is shorted to ground. "Opens" can occur much more frequently and are caused by VSCELS being "open" or by poor contact with the wafer. The internal resistance of the VCSEL is large (approximately 100 ohms per 10mA VCSEL) and very consistent across the wafer (within 1%). ·It is very possible to build a very accurate (within 1%) voltage source. ·The current of a voltage source can be measured quite accurately. Most VCSEL wafers have a common cathode which limits the ability to place VCSELs in series. For the purposes of explanation, the following is assumed: The VCSEL burn-in test requires approximately 2.5 volts and 10 mA. Assume a system with 1024 power channels with up to 5 volts and 200mA per channel. Assume the system can provide constant current or constant voltage per channel. Assume the goal is to burn-in test a quarter wafer (12,500 VCSELs) in a single step.

[0135]

[0153] The following is a list of existing burn-in test circuit options: (1) Individual constant current sources. This provides an accurate and measurable current to every VCSEL, but it presents the following problems: Only about 2% of the wafer can be burn-in tested per step (1024 channels vs. 50,000 devices). The "cost" per VCSEL is 1 channel. Even if additional channels could be added, the cost remains 1 channel per VCSEL. · Even if the system could be scaled to 12,500 channels (the minimum number of channels required for burn-in testing on a quarter of a wafer), it would be impossible or expensive to route 12,500 power channels within a 7.6 cm wafer area. (2) Serial wiring: This requires arranging approximately 13 VCSELs in series and driving them with a constant current source, but this raises the following problems: · VCSEL wafers cannot be wired in series because they all have a common cathode. This requires a current source of 10mA and 30V or more. It is very difficult to protect such a high voltage from overcurrent. (3) Parallel wiring with a current source. Approximately 13 VCSELs are driven in parallel with a constant current source. This requires a 2.5V, 130mA current source. This system has the following problems: For every VCSEL that has an "open" or bad probe contact, the extra current is distributed among the remaining VCSELs in the group. Thus, each VCSEL gets approximately 8% extra current (130mA / 12 VCSELs) for every bad VCSEL in the group. If the voltage does not shift significantly due to an open VCSEL, the faulty device may escape detection because it is not known that the other 12 VCSELs received the incorrect burn-in test current. (4) Parallel wiring with a voltage source. Such a system drives 13 VCSELs in parallel with a constant voltage source. The voltage source is selected so that all 13 VCSELs have the voltage required to receive a current of 10 mA. This system has the following problems: If a VCSEL is open, the total current in the group will be slightly less. For every open VCSEL, the group current will be 10mA lower (e.g. 140mA per group vs. 150mA). The remaining VCSELs in the group will still get 10mA. The current stability per VCSEL within a group is very good. In the worst case scenario, it is the voltage supply accuracy (<1%) and good VCSEL internal resistance consistency (<1% across the wafer). Thus, the current through each VCSEL is consistent within 2% across the wafer with parallel voltage supplies. If the VCSEL shorts out (very unlikely), the power channel overcurrent protection will terminate that power channel, leaving the other channels still operational.

[0136]

[0154] Therefore, existing solutions can be summarized as follows: Circuit 1 is an ideal circuit, but is ruled out due to cost and technical issues. Circuit 2 is not possible with common cathode VCSEL wafers. Circuit 3 has very poor results with the most common failure mode being an "open" device. Circuit 4 gives very good results in almost all cases and is very cost effective.

[0137]

[0155] Circuit 4 (parallel wiring with voltage source) has the following problems: The voltage supply for the VCSEL must be selected appropriately so that it receives the appropriate current. The appropriate voltage is a function of several factors. · VCSEL construction. The design of the VCSEL determines the voltage at the desired current. The VCSEL assembly process varies from wafer to wafer. Due to process variations, the voltage at a given current can vary from wafer to wafer. Variations in the VCSEL assembly process across the wafer. The voltage at a given current can be different for devices near the wafer edge than for devices in the center of the wafer. The voltage at a specific current varies with temperature. Not only the heat applied for the burn-in test, but also internal heating of the device itself can change the voltage at a given current. As a VCSEL ages, its voltage / current relationship shifts, so even if the voltage is correct at the beginning of a burn-in test cycle, the appropriate voltage may be lower at the end.

[0138]

[0156] 15 shows only a first group (Group 1) of electronic devices 634, which are clusters (Clusters 1-4) located in an area near the periphery of wafer 636. It should be understood that there are 16 groups of clusters (Groups 1-4), each group having 64 clusters, and each cluster having 12 electronic devices 634.

[0139]

[0157] The electronic devices 634 of a first cluster (Cluster 1) are connected in parallel to one another via conductors that form part of the wafer 636 or by external devices that form part of the tester apparatus 10. Additional clusters of electronic devices (not shown) (Clusters 2 through 4) are located in additional areas of the first group (Group 1). Each cluster has a respective set of 12 electronic devices connected in parallel to one another. The electronic devices that form one cluster are not electrically connected to the electronic devices that form part of any other cluster.

[0140]

[0158] The tester apparatus 10 includes a cluster selection switch 638 , a current detector 640 , a static filter 642 , an outlier filter 644 , a sample size filter 646 , a voltage target system 648 , a voltage source 650 , and first and second voltage regulators 652 and 654 .

[0141]

[0159] Each cluster provides a separate current output to a cluster selection switch 638. The cluster selection switch 638 is adjustable to selectively connect one current detector 640 to each of the current outputs 660. Current from each current output 660 passes through the current detector 640 to ground 662.

[0142]

[0160] The cluster selection switches 638 generally operate to connect each one of the current outputs 660 to the current detector 640. The current detector 640 thus detects the current from each one of the clusters.

[0143]

[0161] The current detector 640 provides an output to a static filter 642. The static filter 642 is adapted to remove current readings for each cluster that are above or below set limits. The static filter 642 typically processes data for all clusters simultaneously to remove data for clusters that have current readings above or below set limits.

[0144]

[0162] The static filter 642 passes the data to an outlier filter 644, which removes current readings for each cluster that are far from or below the median for the group of clusters. The outlier filter 644 passes the data to a sample size filter 646, which stops calculating current reading averages for clusters that include a cluster if the number of channels (devices) for that cluster is too small.

[0145]

[0163] Voltage source 650 is connected to the input voltage terminals of a first group of electronic devices 634 via a voltage regulator 652. Voltage source 650 is further connected to the input terminals of a second group of electronic devices via a voltage regulator 654. Similarly, voltage source 650 is connected to multiple groups of additional groups of electronic devices via additional voltage regulators (not shown).

[0146]

[0164] A voltage target system 648 receives data from the sample size filter 646 and adjusts the voltage regulators 652 and 654 based on the data.

[0147]

[0165] FIG. 16 illustrates a method for testing multiple electronic devices 634 using the components of the tester apparatus 10 of FIG.

[0148]

[0166] At step 700, multiple electronic devices are held in clusters as described above. At 702, a voltage source 650 is connected to the electronic devices 634 of a first cluster. As described above, the voltage source 650 is connected to the electronic devices 634 to simultaneously supply voltage to the multiple electronic devices 634 of the first cluster. At 704, the voltage source 650 is connected to the electronic devices of a second cluster via a voltage regulator 652 to simultaneously supply voltage to the multiple electronic devices associated with the second cluster. Similarly, at 706, the voltage source 650 is connected to the electronic devices of a third cluster via a voltage regulator 652 to simultaneously supply voltage to the multiple electronic devices associated with the third cluster. The voltage source 650 can similarly be connected to additional clusters of electronic devices via voltage regulators 652 to simultaneously supply voltage to the electronic devices associated with each cluster.

[0149]

[0167] Referring to Figure 17, the slope of the curve is calculated by first determining voltage guesses "A" and "B." Steps 708 through 724 in Figure 16 correspond to calculating the slope.

[0150]

[0168] At 708, the first initial voltage guess "V A ” is performed, and the resulting first initial current “I A 15 simultaneously estimates a first initial voltage for the electronic devices 634 of the first cluster. The second, third and subsequent clusters undergo a similar process as the first cluster. For example, the voltage source 650 simultaneously estimates a first initial voltage for the electronic devices of the second cluster.

[0151]

[0169] The cluster selection switch 638 of FIG. 15 sequentially switches through the current outputs 660 from each cluster in the first group. When the cluster selection switch 638 is connected to the current output 660 of the first cluster, the current detector 640 measures a first initial current from the electronic devices 634 of the first cluster. The first initial current from the electronic devices 634 of the first cluster measured by the current detector 640 is the total current of the multiple electronic devices 634 simultaneously supplied with the voltage of the first cluster. When the cluster selection switch 638 switches to the current output 660 of the second cluster, the second cluster is processed in the same manner as the first cluster, as indicated by the dashed line between steps 704 and 710 of FIG. 16. Similarly, by continuing to switch the cluster selection switch 638 to subsequent current outputs 660, the current detector 640 measures the first initial current of the electronic devices associated with each respective cluster.

[0152]

[0170] The current detector 640 provides the current measurements to the static filter 642 of Figure 15. As can be clearly seen in Figure 16, a multi-stage filter 710 is implemented, including a static filter 712, an outlier filter 714, and a sample size filter 716. As shown in Figure 16, the static filter 642 of Figure 15 implements a static filter at 712.

[0153]

[0171] FIG. 18 shows details of the static filter. Individual currents from the first and second groups are displayed. The static filter removes current measurements above or below a set limit, e.g., below 2 and above 6. The static filter can, for example, remove the first initial current readings for each cluster in each group that are above and below a set limit. Any given cluster may have an "open" VCSEL and therefore not return the correct total current for all VCSELs. The current limit is used to determine whether any given reading is likely to be accurate.

[0154]

[0172] Following the static filter, the data is processed at 714 in FIG. 16 to perform an outlier filter using outlier filter 644 in FIG. 15. FIG. 19 shows the outlier filter in more detail. The outlier filter removes data that is extremely above and below the median of the data, e.g., + / - 20%. The outlier filter removes, for example, the first initial current measurements of each cluster that are extremely above and below the group median. Additional filters can use statistical methods to determine whether the first current reading of a given channel is anomalous.

[0155]

[0173] Following the outlier filter, the data is processed at 714 in FIG. 16 to perform a sample size filter using sample size filter 646 in FIG. 15. The sample size filter is shown in FIG. 20. The sample size filter stops calculating the average of the first current reading of a group if there are too few clusters remaining, e.g., <10. If there are too few clusters remaining in either group for a proper calculation, the average calculation of the surrounding groups can be used. Two sample groups are included to show the progress of the filter. After the outlier filter, the second group has too few clusters remaining to allow a reliable calculation for voltage. In that case, the average of the other group is used.

[0156]

[0174] At 720 in FIG. 16, the second voltage estimate “V B ” is created and applied, and the resulting second initial current “I B The second initial voltage guess is applied in the same manner as the first initial voltage guess in 708. The second initial voltage current is measured for each one of the clusters.

[0157]

[0175] A multi-stage filter is performed on the data including the second initial current from the cluster at 722. The multi-stage filter performed at 722 is the same as the multi-stage filter performed at 710.

[0158]

[0176] 17 shows the positions of the first and second initial currents after passing through the multi-stage filters at 710 and 722. The current measurements are plotted on the Y-axis and time is plotted on the X-axis. The slope of the current is given by the following equation: Gradient = (V B -V A ) / (I B -I A )

[0159]

[0177] The slope is thus calculated by dividing the difference between the second and first initial voltages for the first group of electronic devices by the difference between the second and first initial currents for the first group of electronic devices.

[0160]

[0178] The above-described steps 708, 712, and 724 are performed by the voltage target system 648 of Figure 15. The voltage target system 648 controls the voltage regulators 652 to supply voltage to the electronics of each cluster. The voltage target system 648 then stores the calculated slope in memory.

[0161]

[0179] Following the calculation of the slopes and storage of the slopes at 724 of Figure 17, the voltage targeting system 648 can use the slopes to set and re-target the test voltages applied to each cluster of electronics 634. Setting and re-targeting the test voltages is shown in steps 726 through 736 of Figure 16.

[0162]

[0180] 726, the first test voltage (V G ) and the resulting first test current (I G ) is measured. From the above and FIG. 15 , it should be understood that voltage target system 648 configures voltage regulator 652 to simultaneously apply a first test voltage to multiple electronic devices 634 in the first cluster. It should further be understood that the first test current from electronic devices 634 in the first cluster, as measured by current detector 640, is the total current of electronic devices 634 simultaneously applied to the first cluster.

[0163]

[0181] The second and third clusters of the first group are processed similarly, with each additional cluster thus having a respective first test voltage applied to the devices in the cluster and a first test current measured from the devices.

[0164]

[0182] Following measurement of the first test current from the cluster, the first test current data is again subjected to multi-stage filter 730. Multi-stage filter 730 is run on the first test current in a manner similar to multi-stage filter 710 run on the first initial current from the first group of clusters and multi-stage filter 722 run on the second initial current from the cluster.

[0165]

[0183] At 732, a first comparison is made between the first test current and the target current. Specifically, the measured first test current is subtracted from the target current. The difference is recorded as the amount of current error that needs to be corrected. FIG. 17 shows the first initial guess (“G”), the target current (I T ) and current error (I T -I G ) shows the first initial current as a result of

[0166]

[0184] A target change is performed in 734 of Figure 16. A second test voltage is calculated, and the first test voltage is adjusted to the second test voltage. As shown in Figure 17, the second test voltage is calculated according to a formula. V G +(I T -I G ) * gradient

[0167]

[0185] The first comparison at 732 thus forms the basis for voltage adjustment at 734 .

[0168]

[0186] 16 indicates that the process beginning at 726 can be repeated by using the target shift voltage as the first test voltage, then measuring the test current and calculating the target shift voltage.

[0169]

[0187] The dashed lines from 702 and 706 in FIG. 16 indicate that the second and third groups of clusters undergo similar processing as the first group of clusters. In the given example, voltage source 650 supplies voltage to the second group of electronic devices via voltage regulator 654. The voltages applied to the first and second groups of electronic devices can be independently controlled in the manner described above. In a similar manner, separate voltage regulators supply voltage to the separate groups of electronic devices. While only a single current detector 640 is shown, it should be understood that multiple current detectors can be included in the system to detect current from one or more clusters in one or more groups.

[0170]

[0188] As mentioned above, there are clear economic advantages to parallel wiring with a voltage source. Additionally, the voltage retargeting process, as mentioned above, ensures that the correct voltage is applied to the connected equipment using parallel wiring of the voltage source, so that the equipment receives the correct current according to specification.

[0171]

[0189] The clusters can be selected to match wafer processing (or other) factors that may affect the voltage / current relationship. It is not uncommon for devices near the wafer edge to have different characteristics than devices near the center of the wafer. Clusters can be selected so that peripheral devices are analyzed with other peripheral devices and central devices are analyzed with other central devices.

[0172]

[0190] The retargeting process is highly convergent and insensitive to small errors. For example, suppose the initial voltage / current calculations were poor and the resulting slope was off by 20%. · For the first retargeting step, assume that the calculated voltage was 50% wrong (i.e. the current was 50% wrong). The first target change attempts to correct a 50% current error with a gradient that has a 20% error. The net correction is then 10% (50% * 20%) is wrong. The next target change step then corrects this 10% error, again miscalculating by 20%. This correction is 2% (10% * 20%) is simply wrong. Thus, after only two retargeting steps with a starting error of 50% and a slope error of 20%, the resulting current is now within 2%. This shows that this retargeting algorithm converges quickly. More typically, the gradient is calculated to within about 5% and the initial current to within 20%. It then takes only one step to get within 1% of the exact current.

[0173]

[0191] While certain exemplary embodiments have been described and illustrated in the accompanying drawings, it is to be understood that such embodiments are merely illustrative and not limiting of the invention, as modifications will occur to those skilled in the art, and that the invention is not limited to the specific constructions and arrangements shown and described. [Explanation of symbols]

[0174] 10 Test equipment 12 Testing equipment 14 frames 18A slot assembly 28A Cartridge 40 slot assembly connection part 72 Zipper 302 Retention structure 304 Horizontal transfer device 306 Vertical transfer device 346 Lid 354 Thermal Strut 364 sockets 366A, 368A Tweezers

Claims

1. A cartridge, a socket made of an insulating material and having an upper side and a lower side, the socket having a first configuration on the upper side for holding a first electronic device and a second configuration on the upper side for holding a second electronic device; The lid and a first push plate rotatably attached to the lid; a second press plate rotatably attached to the lid, the lid being positionable across the socket and movable toward the socket, the first press plate being rotatably attached so that the first electronic device can rotate the first press plate relative to the lid, and the second press plate being rotatably attached so that the second electronic device can rotate the second press plate relative to the lid independently of the first press plate; a first set of contacts held in the socket and connected to the first electronic device; a first set of terminals connected to the first set of contacts; a second set of contacts held in the socket and connected to the second electronic device; a second set of terminals connected to the second set of contacts.

2. 2. The cartridge of claim 1, wherein the first push plate is rotatable relative to the lid about first and second orthogonal axes, and the second push plate is rotatable relative to the lid about first and second orthogonal axes.

3. a first thermal surface in the first configuration, wherein a bottom surface of the first electronic device can rest on the first thermal surface by rotating the first pressure plate relative to the lid; 10. The cartridge of claim 1, further comprising: a second thermal surface in the second configuration, wherein rotation of the second push plate relative to the lid allows a bottom surface of the second electronic device to rest on the second thermal surface.

4. 4. The cartridge of claim 3, wherein the first set of contacts is resiliently depressible to bring the first electronics into contact with the first thermal surface, and the second set of contacts is resiliently depressible to bring the second electronics into contact with the second thermal surface.

5. a first spring connected between the lid and the first push plate, the first push plate being linearly movable relative to the lid by the first electronic device to deform the first spring; 10. The cartridge of claim 1, further comprising: a second spring connected between the lid and the second push plate, the second push plate being linearly movable relative to the lid by the second electronic device to deform the second spring.

6. 6. The cartridge of claim 5, wherein the first push plate has a first push plate lip, the lid has a first lid shelf projection, the first push plate lip resting on the first lid shelf projection to prevent the first spring from moving the first push plate out of the lid, the second push plate has a second push plate lip, the lid has a second lid shelf projection, the second push plate lip resting on the second lid shelf projection to prevent the second spring from moving the second push plate out of the lid.

7. a fixing structure on the lid; 10. The cartridge of claim 1, further comprising a locking structure on the socket, the locking structures engaging each other to lock the lid to the socket after the lid is moved toward the socket.

8. the socket has a third configuration on the upper side for holding a third device; a third pressure plate rotatably mounted on the lid, the rotatable mounting of the third pressure plate allowing the third device to be rotated relative to the lid independently of the second pressure plate; a third set of terminals held by the socket and connecting to the third device; The cartridge of claim 1 , further comprising: a third set of contacts connected to the third set of terminals.

9. 1. A method for testing one or more electronic devices, comprising: releasably holding a first electronic device in a first configuration on an upper side of a socket made of insulating material; releasably retaining a second electronic device on an upper side of the socket in a second configuration; placing a lid over the socket, the lid having a first push plate rotatably mounted to the lid and a second push plate rotatably mounted to the lid; moving the lid toward the socket, wherein the first push plate is rotatably mounted so that the first electronic device can rotate the first push plate relative to the lid, and the second push plate is rotatably mounted so that the second electronic device can rotate the second push plate relative to the lid independently of the first push plate; connecting the first and second electronic devices to an electrical tester via connections connected to the sockets.

Images