Probe arrays and probe structures

Abstract

To provide a probe array and probe structures in which, while the probe structures in the probe array are in contact with an object under test, it is easy to keep contact forces in equilibrium, it is easy to adjust distances between the probe structures in the probe array, and it is easy to control temperatures during testing.SOLUTION: A probe array 4 includes a first probe structure 41A and a second probe structure 41B. The first probe structure includes a first body 411A having a first end 413A and a second end 415A. The second probe structure includes a second body 411B having a first end 413B and a second end 415B. The first end of the first body and the first end of the second body have the same sectional area on a first section. The second end of the first body and the second end of the second body have the same sectional area on a second section. The first body and the second body have different shapes.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] FIELD OF THE DISCLOSURE The present disclosure relates to probe arrays and probe structures, and more particularly to probe arrays with probe structures capable of detecting different signal types. [Background technology]

[0002] In the prior art, various integrated circuit (IC) chips need to undergo electrical testing to achieve specific test objectives during the manufacturing process, so that different probe structures have been developed, including thick probe structures for high current testing, thin probe structures for high frequency testing, etc. However, few existing probe structures can achieve multiple testing objectives simultaneously.

[0003] When probe structures with different dimensions are arranged in the same probe array to achieve different test purposes, the openings of the guide plate configured to support the probe structures in the probe array cannot have equal dimensions, which causes problems such as (1) difficulty in balancing the contact forces while the probe structures in the probe array are in contact with the DUT, resulting in unstable testing, (2) difficulty in adjusting the distance between the probe structures in the probe array, and (3) difficulty in controlling the temperature during testing while the probe structures in the probe array are in contact with the DUT.

[0004] The above description of the prior art is for background purposes only and is not intended to be admitted as disclosing the subject matter of the present disclosure. The above description of the prior art is intended to constitute prior art to the present disclosure or to form part of the present disclosure. Summary of the Invention

[0005] One embodiment of the present disclosure provides a probe array including a first probe structure and a second probe structure. The first probe structure includes a first body. The first body has a first end and a second end. The second probe structure includes a second body. The second body has a first end and a second end. The first end of the first body and the first end of the second body have the same cross-sectional area in a first cross section. The second end of the first body and the second end of the second body have the same cross-sectional area in a second cross section. The first body and the second body have different shapes.

[0006] In some embodiments, the first end of the first body and the first end of the second body are located on the same side.

[0007] In some embodiments, the first cross section and the second cross section are parallel.

[0008] In some embodiments, the first end of the first body and the first end of the second body have the same shape.

[0009] In some embodiments, the second end of the first body and the second end of the second body have the same shape.

[0010] In some embodiments, at least one first hollowed-out portion, at least one first recess, or a combination of at least one first hollowed-out portion and at least one first recess is formed in the first body and extends from a first end of the first probe structure to a second end of the first probe structure.

[0011] In some embodiments, at least one second cutout, at least one second recess, or a combination of at least one second cutout and at least one second recess is formed in the second body and extends from a first end of the second probe structure to a second end of the second probe structure.

[0012] In some embodiments, the probe array further includes a guide plate having a first hole and a second hole, the first hole receiving a first end of the first probe structure, and the second hole receiving a first end of the second probe structure.

[0013] In some embodiments, the first hole and the second hole are the same size and shape.

[0014] Another embodiment of the present disclosure provides a probe structure including a body having a first end and a second end. At least one cutout, at least one recess, or a combination of at least one cutout and at least one recess is formed in the body and extends from the first end to the second end. A cross-sectional area of ​​the first end in a first cross section is the same as a cross-sectional area of ​​the second end in a second cross section. The first cross section and the second cross section are parallel.

[0015] In some embodiments, the first end and the second end have the same shape.

[0016] In some embodiments, at least one recess, or a combination of at least one cutout and at least one recess, is formed in the body, and the at least one recess has a curved or trapezoidal shape.

[0017] In some embodiments, the body has a constant thickness from the first end to the second end.

[0018] The foregoing has broadly outlined the technical features and advantages of the present disclosure in order to facilitate understanding of the following detailed description. Other advantages and technical features of the present disclosure are described below, which define the scope of the claims of the present disclosure. Those skilled in the art will appreciate that they may readily achieve the same objectives of the present disclosure by modifying or designing other structures or processes in accordance with the concepts and specific embodiments disclosed below. Furthermore, those skilled in the art will appreciate that equivalent constructions to those described above do not depart from the spirit and scope of the appended claims of the present disclosure. [Brief explanation of the drawings]

[0019] Those skilled in the art can understand the present disclosure by referring to the embodiments, claims, and drawings of the present disclosure, in which like reference numerals are used to refer to like elements.

[0020] [Figure 1A] FIG. 1 is a front view of a probe structure according to some embodiments of the present disclosure. [Figure 1B] FIG. 1 is a front view of a probe structure according to some embodiments of the present disclosure. [Figure 1C] FIG. 1 is a front view of a probe structure according to some embodiments of the present disclosure. [Figure 2A] FIG. 1 is a front view of a probe structure according to some embodiments of the present disclosure. [Figure 2B] FIG. 1 is a front view of a probe structure according to some embodiments of the present disclosure. [Figure 2C] FIG. 1 is a front view of a probe structure according to some embodiments of the present disclosure. [Figure 3A] FIG. 1 is a front view of a probe structure according to some embodiments of the present disclosure. [Figure 3B] FIG. 1 is a side view of a probe structure according to some embodiments of the present disclosure. [Figure 3C] FIG. 1 is a side view of a probe structure according to some embodiments of the present disclosure. [Figure 4]FIG. 1 is a schematic diagram of a probe array according to some embodiments of the present disclosure. [Figure 5] FIG. 1 is a schematic diagram of a probe array according to some embodiments of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0021] In the following description of the present disclosure, the accompanying drawings, which are incorporated in and constitute a part of the present specification, illustrate embodiments of the present disclosure, but the present disclosure is not limited to these embodiments. In addition, the following embodiments can be appropriately combined to create other embodiments.

[0022] Terms such as "one embodiment," "embodiment," "exemplary embodiment," "other embodiment," "another embodiment," and the like indicate that embodiments described in this disclosure may include a particular feature, structure, or characteristic, but each embodiment need not necessarily include that particular feature, structure, or characteristic. Furthermore, repeated use of the term "in one embodiment" may, but does not necessarily, refer to the same embodiment.

[0023] In order to fully understand the present disclosure, the following description provides detailed steps and structures. Obviously, specific details known to those skilled in the art are not limited to the implementation of the present disclosure. Also, known structures and steps will not be described in detail so as not to unnecessarily limit the present disclosure. Below, preferred embodiments of the present disclosure will be described in detail. However, in addition to the detailed description, the present disclosure can also be widely implemented in other embodiments. The scope of the present disclosure is not limited to the content of the detailed description, but is defined by the appended claims.

[0024] It should be understood that the following disclosure provides many different embodiments or examples for implementing different features of the provided subject matter. Below, specific examples of components and arrangements are described to simplify the disclosure. It should be understood that these are merely examples and are not intended to be limiting. For example, the size of an element is not limited to the disclosed range or numerical value, but is determined by the process conditions and / or desired characteristics of the device. Furthermore, in the following description, forming a first feature above or on a second feature may include an embodiment in which the first and second features are formed in direct contact with each other, or an embodiment in which an additional feature may be formed between the first and second features such that the first and second features are not in direct contact with each other. The dimensions of various features may be arbitrarily increased or decreased for simplicity and clarity. In the drawings, some layers or features may be omitted for simplicity.

[0025] Additionally, spatially relative terms such as "below," "lower," "bottom," "upper," "top," and the like may be used herein for ease of description to describe the relationship of one element or feature to another element(s) or feature(s) as shown in the drawings. The spatially relative terms are intended to encompass various orientations of the device in use or operation in addition to the orientation shown in the drawings. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0026] In one embodiment of the present disclosure, the probe array includes a first probe structure and a second probe structure. A first end of the first probe structure and a first end of the second probe structure have the same cross-sectional area in a first cross section. A second end of the first probe structure and a second end of the second probe structure have the same cross-sectional area in a second cross section. The body of the first probe structure and the body of the second probe structure differ in shape, for example, by (1) at least one cutout portion, (2) at least one recess, or (3) a combination of at least one cutout portion and at least one recess.

[0027] Therefore, because the different probe structures of the present disclosure have the same ends, different probe structures can be arranged in the same probe array to simultaneously perform high current tests (e.g., using probe structures with large cross-sectional areas) and high frequency tests (e.g., using probe structures with small cross-sectional areas) to meet different test requirements. Furthermore, because the probe structures have the same outer dimensions, contact forces are evenly distributed while the probe structures in the probe array are in contact with the device under test, making it easy to install or change probes, to easily adjust the spacing between the probe structures (e.g., to a predetermined, small, equal spacing), and to easily control the temperature during the test process.

[0028] 1A shows a front view of a probe structure 11 according to some embodiments of the present disclosure. The probe structure 11 includes a body 111. The body 111 has a first end 111A and a second end 111B. At least one cutout 1110 is formed in the body 111 and extends from the first end 111A to the second end 111B.

[0029] In some embodiments, the first end 111A has a cross-sectional area at a first cross section CS11, and the second end 111B has a cross-sectional area at a second cross section CS12. The cross-sectional area of ​​the first end 111A at the first cross section CS11 and the cross-sectional area of ​​the second end 111B at the second cross section CS12 are the same. The first cross section CS11 and the second cross section CS12 are parallel.

[0030] 1B shows a front view of a probe structure 12 according to some embodiments of the present disclosure. The probe structure 12 includes a body 121. The body 121 has a first end 121A and a second end 121B. At least one recess 1212 is formed in the body 121 and extends from the first end 121A to the second end 121B.

[0031] In some embodiments, first end 121A has a cross-sectional area at first cross section CS13, and second end 121B has a cross-sectional area at second cross section CS14. The cross-sectional area of ​​first end 121A at first cross section CS13 and the cross-sectional area of ​​second end 121B at second cross section CS14 are the same. The first cross section CS13 and the second cross section CS14 are parallel.

[0032] 1C shows a front view of a probe structure 13 according to some embodiments of the present disclosure. The probe structure 13 includes a body 131. The body 131 has a first end 131A and a second end 131B. At least one cutout 1310 and at least one recess 1312 are formed in the body 131 and extend from the first end 131A to the second end 131B.

[0033] In some embodiments, first end 131A has a cross-sectional area at first cross section CS15, and second end 131B has a cross-sectional area at second cross section CS16. The cross-sectional area of ​​first end 131A at first cross section CS15 and the cross-sectional area of ​​second end 131B at second cross section CS16 are the same. The first cross section CS15 and the second cross section CS16 are parallel.

[0034] 2A shows a front view of a probe structure 21 according to some embodiments of the present disclosure. The probe structure 21 includes a body 211. The body 211 has a first end 211A and a second end 211B. A plurality of cutouts 2110 are formed in the body 211, each extending from the first end 211A to the second end 211B. In some embodiments, the cutouts 2110 have the same shape (e.g., an elongated shape).

[0035] In some embodiments, first end 211A has a cross-sectional area at first cross section CS21, and second end 211B has a cross-sectional area at second cross section CS22. The cross-sectional area of ​​first end 211A at first cross section CS21 and the cross-sectional area of ​​second end 211B at second cross section CS22 are the same. First cross section CS21 and second cross section CS22 are parallel. In some embodiments, first end 211A and second end 211B have the same shape.

[0036] 2B shows a front view of a probe structure 22 according to some embodiments of the present disclosure. The probe structure 22 includes a body 221. The body 221 has a first end 221A and a second end 221B. A first recess 2212A and a second recess 2212B are formed in the body 221 and extend from the first end 121A to the second end 121B. In some embodiments, the first recess 2212A and the second recess 2212B shown in the front view each appear as a curve, and the two curves are defined symmetrically on the body 221.

[0037] In some embodiments, first end 221A has a cross-sectional area at first cross section CS23, and second end 221B has a cross-sectional area at second cross section CS24. The cross-sectional area of ​​first end 221A at first cross section CS23 and the cross-sectional area of ​​second end 221B at second cross section CS24 are the same. First cross section CS23 and second cross section CS24 are parallel. In some embodiments, first end 221A and second end 221B have the same shape.

[0038] 2C shows a front view of a probe structure 23 according to some embodiments of the present disclosure. The probe structure 23 includes a body 231. The body 231 has a first end 231A and a second end 231B. A plurality of cutouts 2310, a first recess 2312A, and a second recess 2312B, are formed in the body 231 and extend from the first end 231A to the second end 231B, respectively. In some embodiments, the first recess 2312A and the second recess 2312B shown in the front view each appear as a trapezoid, and the two trapezoids are symmetrically defined in the body 231.

[0039] In some embodiments, first end 231A has a cross-sectional area at first cross section CS25, and second end 231B has a cross-sectional area at second cross section CS26. The cross-sectional area of ​​first end 231A at first cross section CS25 and the cross-sectional area of ​​second end 231B at second cross section CS26 are the same. First cross section CS25 and second cross section CS26 are parallel. In some embodiments, first end 231A and second end 231B have the same shape.

[0040] The recesses and hollowed-out shapes described above are not intended to limit the recesses of the present disclosure, and all recessed and hollowed-out shapes that contribute to achieving the same effects as those of the present disclosure are considered to fall within the scope of the present disclosure.

[0041] FIG. 3A shows a front view of a probe structure 31 according to some embodiments of the present disclosure. The probe structure 31 includes a main body 311. The main body 311 has a first end 311A ​​and a second end 311B. When viewed from the front view shown in FIG. 3A, the first end 311A ​​and the second end 311B have the same width W31. The main body 311 has a first surface 311S1 on which a plurality of recesses 3110 are formed so as to penetrate the main body 311. The main body 311 has at least outer surfaces 311S2 and 311S3 adjacent to the first surface 311S1. The main body 311 has a first recess 3112A and a second recess 3112B on the outer surfaces 311S2 and 311S3, respectively. In these embodiments, the cutout 3110, first recess 3112A and second recess 3112B each extend from the first end 311A ​​to the second end 311B.

[0042] In some embodiments, first end 311A ​​has a cross-sectional area at first cross section CS31, and second end 311B has a cross-sectional area at second cross section CS32. The cross-sectional area of ​​first end 311A ​​at first cross section CS31 and the cross-sectional area of ​​second end 311B at second cross section CS32 are the same. First cross section CS31 and second cross section CS32 are parallel. In some embodiments, first end 311A ​​and second end 311B have the same shape.

[0043] 3B shows a side view of the probe structure 31 according to some embodiments of the present disclosure. The side view of FIG. 3B shows that, starting from the outer surface 311S2 corresponding to the location of the first recess 3112A, the body 311 has a constant thickness T31 from the first end 311A ​​to the second end 311B. Thus, the outer surface S311S2 of the body 311 has a constant width from the first end 311A ​​to the second end 311B. In these embodiments, the width W31 of the body 311 is greater than the thickness T31 of the body 311.

[0044] 3C shows another side view of the probe structure 31 according to some embodiments of the present disclosure. The side view of FIG. 3C shows that, starting from the outer surface 311S2 corresponding to the location of the first recess 3112A, the body 311 has a constant thickness T32 from the first end 311A ​​to the second end 311B. Thus, the outer surface S311S2 of the body 311 has a constant width from the first end 311A ​​to the second end 311B. In these embodiments, the width W31 of the body 311 is equal to the thickness T31 of the body 311.

[0045] FIG. 4 shows a schematic diagram of a probe array 4 according to some embodiments of the present disclosure. The probe array 4 includes a plurality of probe structures 41 and a guide plate 43. The guide plate 43 includes a plurality of holes 430 that receive one end of the probe structures 41. In some embodiments, each probe structure 41 includes at least one probe structure 41A and at least one probe structure 41B. Each probe structure 41A includes a first body 411A. Each first body 411A has a first end 413A and a second end 415A. Each probe structure 41B includes a first body 411B. Each first body 411B has a first end 413B and a second end 415B. The first end 413A of the first body 411A and the first end 413B of the first body 411B are located on the same side of the probe array 4.

[0046] In some embodiments, the first end 413A of the first body 411A and the first end 413B of the second body 411B have the same cross-sectional area at the first cross section CS41. In contrast, the second end 415A of the first body 411A and the second end 415B of the second body 411B have the same cross-sectional area at the second cross section CS42. The first cross section CS41 and the second cross section CS42 are parallel.

[0047] In some embodiments, the first body 411A of probe structure 41A and the second body 411B of probe structure 41B have different shapes (e.g., the first body 411A has one shape and the second body 411B has another shape). In some embodiments, the probe structure 41 includes, but is not limited to, probe structures 11, 12, 13, 21, 22, 23, 31 of the previous embodiments, or any combination thereof.

[0048] FIG. 5 shows a schematic diagram of a probe array 5 according to some embodiments of the present disclosure. The probe array 5 includes a plurality of probe structures 51 and a guide plate 53. The guide plate 53 includes a plurality of holes 530 that receive one end of the probe structures 51. In some embodiments, each probe structure 51 includes at least one probe structure 51A and at least one probe structure 51B. Each probe structure 51A includes a first body 511A. Each first body 511A has a first end 513A and a second end 515A. Each probe structure 51B includes a first body 511B. Each first body 511B has a first end 513B and a second end 515B. The first end 513A of the first body 511A and the first end 513B of the first body 511B are located on the same side of the probe array 5.

[0049] In some embodiments, the first end 513A of the first body 511A and the first end 513B of the second body 511B have the same cross-sectional area at the first cross section CS51. In contrast, the second end 515A of the first body 511A and the second end 515B of the second body 511B have the same cross-sectional area at the second cross section CS52. In some embodiments, the cross-sectional area of ​​the first end 513A of the first body 51A at the first cross section CS51 and the cross-sectional area of ​​the second end 515A of the first body 511A at the second cross section CS52 are the same. In contrast, the cross-sectional area of ​​the first end 513B of the second body 511B at the first cross section CS51 and the cross-sectional area of ​​the second end 515B of the second body 511B at the second cross section CS52 are the same. The first cross section CS51 and the second cross section CS52 are parallel.

[0050] In some embodiments, the first end 513A of the first body 511A, the second end 515A of the first body 511A, the first end 513B of the second body 511B, and the second end 515B of the second body 511B have the same shape. The multiple holes 530 of the guide plate 53 have the same size and shape. Therefore, the multiple holes 530 simultaneously receive the first end 513A of the first body 511A and the first end 513B of the second body 511B.

[0051] In some embodiments, the first body 511A of probe structure 51A and the second body 511B of probe structure 51B have different shapes (e.g., the first body 511A has one shape and the second body 511B has another shape). In some embodiments, the probe structure 51 is not limited to the probe array 5 and probe structure 51. It may include, but is not limited to, probe structures 11, 12, 13, 21, 22, 23, 31 of the foregoing embodiments, or any combination thereof.

[0052] In the present disclosure, probe structures of different sizes and shapes are arranged in the same probe array to achieve different test purposes. Furthermore, in the present disclosure, the ends of the probe structures in the probe array have the same shape, while the openings of the guide plates of the probe structures in the probe array have the same dimensions. Therefore, the present disclosure achieves at least the following advantages: (1) while the probe structures in the probe array are in contact with the DUT, the contact force can be easily balanced to ensure test stability; (2) the spacing between the probe structures in the probe array can be easily adjusted; and (3) while the probe structures in the probe array are in contact with the DUT, the temperature can be easily controlled during the test because of consistent contact surfaces.

[0053] Although the present disclosure and its advantages have been described above, it should be understood by those skilled in the art that various modifications, substitutions, and alterations can be made to the present disclosure without departing from the spirit and scope of the present disclosure as defined in the appended claims. For example, the processes described above may be implemented in a different manner or may be replaced by any other process or combination thereof.

[0054] The scope of the present disclosure is not limited to the specific embodiments of the processes, machines, manufacture, compositions of matter, means, methods, and steps described herein. With the present disclosure described herein, one skilled in the art can implement the present disclosure using existing or potential processes, machines, manufacture, compositions of matter, means, methods, and steps that have the same function or can achieve substantially the same effect as those disclosed in the above embodiments. Therefore, these processes, machines, manufacture, compositions of matter, means, methods, and steps fall within the scope of the appended claims of the present disclosure.

Claims

1. a first probe structure including a first body having a first end and a second end; a second probe structure including a second body having a first end and a second end; the first end of the first body and the first end of the second body have the same cross-sectional area in a first cross section, the second end of the first body and the second end of the second body have the same cross-sectional area in a second cross section, and the first body and the second body have different shapes; at least one first recess formed on the first body and extending from the first end of the first probe structure to the second end of the first probe structure; a first cross-sectional area of ​​the first end of the first probe structure that is larger than a second cross-sectional area of ​​the first body having at least one of the first recesses, and a third cross-sectional area of ​​the second end of the first probe structure that is larger than the second cross-sectional area of ​​the first body having at least one of the first recesses.

2. The probe array according to claim 1 , wherein the first end of the first body and the first end of the second body are located on the same side.

3. The probe array of claim 1 , wherein the first cross section and the second cross section are parallel.

4. The probe array according to claim 1 , wherein the first end of the first body and the first end of the second body have the same shape.

5. The probe array according to claim 4 , wherein the second end of the first body and the second end of the second body have the same shape.

6. The probe array according to claim 1 , wherein the second end of the first body and the second end of the second body have the same shape.

7. The probe array of claim 1 , wherein at least one first cutout is formed in the first body and extends from the first end of the first probe structure to the second end of the first probe structure.

8. 8. The probe array of claim 7, wherein at least one second cutout, at least one second recess, or a combination of at least one second cutout and at least one second recess is formed in the second body and extends from the first end of the second probe structure to the second end of the second probe structure.

9. 2. The probe array of claim 1, wherein at least one second cutout, at least one second recess, or a combination of at least one second cutout and at least one second recess is formed in the second body and extends from the first end of the second probe structure to the second end of the second probe structure.

10. a first hole that receives the first end of the first body; The probe array of claim 1 , further comprising a guide plate having a second hole that receives the first end of the second body.

11. The probe array of claim 10 , wherein the first holes and the second holes have the same size and shape.

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