Purge equipment, load ports

The dual-nozzle purge device with independent adjustment addresses the inefficiencies of existing systems by ensuring airtight contact with both grommet and lip-type containers, enhancing work efficiency and adaptability.

JP7736983B2Active Publication Date: 2025-09-10SINFONIA TECHNOLOGY CO LTD
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Patent Information

Application Number
JP2021075763
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2021-04-28
Publication Date
2025-09-10
Estimated Expiration
2041-04-28

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Abstract

To provide a purge device capable of supporting a transport container having a different material for an abutted portion provided on the bottom surface, and capable of supporting a transport container having a different height dimension of the abutted portion, and a load port with such a purge device.SOLUTION: In a purge device P that injects or discharges gas into or from a transfer container 3 on a mounting table 5 using a nozzle unit P1, and the nozzle unit P1 includes a first nozzle P3 arranged around a gas flow passage P2 and having an upper end set to a first contact portion P31 capable of coming into contact with a contact portion 37 provided around the opening 36, a second nozzle P4 arranged around the first nozzle P3 and having an upper end set as a second contact portion P41 capable of coming into contact with the contact portion 37, and a drive unit P6 that moves the first nozzle P3 and the second nozzle P4 independently of each other such that they can move up and down.SELECTED DRAWING: Figure 7
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Citation Information

Patent Citations

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  • Tip structure of nozzle, purge device, and load port

    JP2016178206A

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