Sensor Device

Abstract

A plurality of first patterns (202A) include: first patterns (202A) of one group located on the positive direction side in a first direction (X) with respect to a second center line (CY); and first patterns (202A) of another group located on the negative direction side in the first direction (X) with respect to the second center line (CY). A plurality of second patterns (204A) include: second patterns (204A) of one group located on the positive direction side in a second direction (Y) with respect to a first center line (CX); and second patterns (204A) of another group located on the negative direction side in the second direction (Y) with respect to the first center line (CX).

Description

[Technical Field]

[0001] The present invention relates to a sensor device. [Background technology]

[0002] In recent years, various sensor devices such as LiDAR (Light Detection and Ranging) have been developed. The sensor devices include a scanning unit that scans a predetermined scanning range by reflecting a beam emitted from a light source such as a laser with a movable reflector.

[0003] Patent Document 1 describes an example of a sensor device. The scanning range of a scanning unit may deviate from a desired position due to certain factors such as temperature. In the sensor device described in Patent Document 1, reflectors are provided at both ends of the scanning range in the horizontal direction to detect horizontal deviation of the scanning range from the desired position. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2020-16481 Summary of the Invention [Problem to be solved by the invention]

[0005] Depending on the driving state of the scanning unit, the oscillation of the movable reflector may not follow the input signal due to nonlinearity of the driving system of the scanning unit, etc. Therefore, as described in Patent Document 1, for example, if a reflector is provided only in one location on one side of the center of the scanning range, it may be relatively difficult to distinguish the driving state of the scanning unit.

[0006] One example of a problem to be solved by the present invention is to make it easier to distinguish the driving state of the scanning unit. [Means for solving the problem]

[0007] The invention described in claim 1 is A scanning unit; a reflector that reflects at least a part of the beam irradiated onto the scanning range of the scanning unit; Equipped with The sensor device has at least a portion of the reflector positioned at a plurality of locations offset from one another in a predetermined direction on one side of the center of the scanning range in the predetermined direction. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a perspective view of a sensor device according to a first embodiment. [Figure 2] 3 is a view of the reflector according to the first embodiment as seen from the side opposite to the side where the scanning unit is located. FIG. [Figure 3] 10 is a graph showing signals of the oscillation angle around the first rotation axis of a movable reflector in a first drive state and a second drive state when reflectors are placed at two predetermined locations in a scanning range. [Figure 4] 10 is a graph showing signals of the oscillation angle around the first rotation axis of the movable reflector in the first drive state and the third drive state when the reflectors are placed at two predetermined locations in the scanning range. [Figure 5] 10 is a graph showing signals of the oscillation angle around the first rotation axis of the movable reflector in the first drive state and the second drive state when the reflector is placed at one predetermined location in the scanning range. [Figure 6] 10 is a graph showing signals of the oscillation angle around the first rotation axis of the movable reflector in the first drive state and the third drive state when the reflector is placed at one predetermined location in the scanning range. [Figure 7] 10 is a view of a reflector according to a second embodiment as viewed from the side opposite to the side where the scanning unit is located. FIG. [Figure 8] 11 is a view of a reflector according to a third embodiment as viewed from the side opposite to the side where the scanning unit is located. FIG. [Figure 9] FIG. 10 is a view of a reflector according to a fourth embodiment as viewed from the side opposite to the side where the scanning unit is located. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, similar components are designated by similar reference numerals, and the description thereof will be omitted as appropriate.

[0010] In this specification, ordinal numbers such as "first," "second," and "third" are used merely to distinguish between similarly named configurations, unless otherwise specified, and do not imply any particular characteristics (e.g., order or importance) of the configurations.

[0011] (Embodiment 1) FIG. 1 is a perspective view of a sensor device 10A according to the first embodiment.

[0012] In FIG. 1, an arrow indicating the first direction X, the second direction Y, or the third direction Z indicates that the direction from the base end of the arrow to the tip end is the positive direction of the direction indicated by the arrow, and that the direction from the tip end of the arrow to the base end is the negative direction of the direction indicated by the arrow.

[0013] The first direction X is a direction parallel to the horizontal direction. When viewed from the positive direction of the third direction Z, the positive direction of the first direction X is the direction from left to right in the horizontal direction, and the negative direction of the first direction X is the direction from right to left in the horizontal direction. The second direction Y is a direction parallel to the vertical direction. The positive direction of the second direction Y is the direction from bottom to top in the vertical direction, and the negative direction of the second direction Y is the direction from top to bottom in the vertical direction. The third direction Z is a direction parallel to the horizontal direction and orthogonal to the first direction X. The positive direction of the third direction Z is the direction from the side where the scanning unit 100 (described later) is located to the side where the reflector 200A (described later) is located. The negative direction of the third direction Z is the direction from the side where the reflector 200A is located to the side where the scanning unit 100 is located.

[0014] The relationships among the first direction X, the second direction Y, the third direction Z, the horizontal direction, and the vertical direction are not limited to those described in this embodiment. The relationships among the first direction X, the second direction Y, the third direction Z, the horizontal direction, and the vertical direction vary depending on the arrangement of the sensor device 10A. For example, the third direction Z may be parallel to the vertical direction.

[0015] The sensor device 10A includes a scanning unit 100, a reflector 200A, a computer 300, and a housing 400.

[0016] The scanning unit 100 is housed inside a housing 400. In this embodiment, the scanning unit 100 is a two-axis MEMS (Micro Electro Mechanical Systems) mirror. However, the scanning unit 100 may be a scanning unit other than a two-axis MEMS mirror. For example, the scanning unit 100 may be a galvanometer mirror, a polygon mirror, or the like. The scanning unit 100 has a movable reflector 110. The movable reflector 110 reflects a beam emitted from a light source (not shown), such as a laser. In FIG. 1, a dashed arrow extending toward the movable reflector 110 indicates the optical axis of the beam emitted from the light source (not shown) and incident on the movable reflector 110. In FIG. 1, each of two dashed arrows extending from the movable reflector 110 indicates the optical axis of the beam reflected by the movable reflector 110. The two beams indicated by the two dashed arrows are reflected by the movable reflector 110 at different times.

[0017] The scanning unit 100 uses a beam to scan a predetermined scanning range SA projected onto a virtual plane perpendicular to the third direction Z. In the example shown in FIG. 1, the scanning range SA has an approximately fan-shaped shape when viewed from the third direction Z. The movable reflector 110 oscillates around a predetermined first rotation axis 112 at the resonant frequency of the movable reflector 110. This allows the scanning unit 100 to scan the scanning range SA in the horizontal direction. The movable reflector 110 also oscillates around a second rotation axis 114 orthogonal to the first rotation axis 112 at a fundamental frequency lower than the resonant frequency of the movable reflector 110. This allows the scanning unit 100 to scan the scanning range SA in the vertical direction. FIG. 1 shows the scanning range SA projected onto a virtual plane perpendicular to the third direction Z on a transparent substrate such as a window provided in the housing 400. The transparent substrate transmits the beam reflected by the movable reflector 110.

[0018] For the sake of explanation, the scanning range SA shown in Fig. 1 is labeled with a first center line CX and a second center line CY. The first center line CX passes through the center of the scanning range SA in the second direction Y and is parallel to the first direction X. The second center line CY passes through the center of the scanning range SA in the first direction X and is parallel to the second direction Y.

[0019] The beam emitted by the scanning unit 100 toward the scanning range SA is irradiated onto an object (not shown) that exists outside the housing 400. When the beam is reflected or scattered by the object, the reflected light or scattered light of the beam is irradiated onto a light receiving element such as an APD (avalanche photodiode) (not shown) housed inside the housing 400. The computer 300 generates point cloud data using a signal generated from the light receiving element.

[0020] In the example shown in FIG. 1, the computer 300 is housed in a housing 400. The computer 300 is, for example, a microcomputer. The computer 300 shown in FIG. 1 is shown schematically. Therefore, the computer 300 shown in FIG. 1 does not indicate the actual position or size of the computer 300. The computer 300 may also be provided outside the housing 400.

[0021] Fig. 2 is a view of the reflector 200A according to the first embodiment as seen from the side opposite to the side where the scanning unit 100 is located. In Fig. 2, similar to Fig. 1, a first center line CX and a second center line CY are indicated for the sake of explanation.

[0022] In Figure 2, the white circle with a black dot indicating the third direction Z indicates that the direction from the back of the paper to the front is the positive direction of the direction indicated by the white circle with a black dot, and that the direction from the front of the paper to the back is the negative direction of the direction indicated by the white circle with a black dot.

[0023] In the first embodiment, the reflector 200A is provided on a light-transmitting substrate such as a window provided in the housing 400. In this case, the reflector 200A can be provided on the light-transmitting substrate by patterning. Therefore, compared with the case where the reflector 200A is provided in a predetermined space without being provided on a light-transmitting substrate, the installation of the reflector 200A is easier. However, the installation method of the reflector 200A is not limited to this example. For example, the reflector 200A may be provided in a predetermined space without being provided on a light-transmitting substrate.

[0024] Furthermore, the reflector 200A may be a heating element such as an electric heating wire. For example, in consideration of the fact that the sensor device 10A is installed outdoors under harsh weather conditions, the reflector 200A may be a defogger. In this example, the reflector 200A is not only used to distinguish the driving state of the scanning unit 100, but also to prevent condensation and freezing on the window portion of the housing 400.

[0025] The reflector 200A according to the first embodiment is arranged in a substantially rectangular lattice frame shape when viewed from the third direction Z. Specifically, the reflector 200A has a plurality of first patterns 202A and a plurality of second patterns 204A.

[0026] When viewed from the third direction Z, the multiple first patterns 202A are arranged at substantially equal intervals in the first direction X. Each first pattern 202A extends substantially parallel to the second direction Y. The multiple first patterns 202A include a group of first patterns 202A located on the positive side of the second center line CY in the first direction X and another group of first patterns 202A located on the negative side of the second center line CY in the first direction X. Note that "substantially equal intervals" refers not only to a state of strict geometrical equality but also to a state where the patterns deviate from the strict geometrical equal intervals due to factors such as tolerance. Furthermore, "substantially parallel" refers not only to a state of strict geometrical parallelism but also to a state where the patterns deviate from the strict geometrical equal intervals due to factors such as tolerance.

[0027] When viewed from the third direction Z, the multiple second patterns 204A are arranged at substantially equal intervals in the second direction Y. Each second pattern 204A extends substantially parallel to the first direction X. The multiple second patterns 204A include a group of second patterns 204A located on the positive side of the second direction Y with respect to the first center line CX, and another group of second patterns 204A located on the negative side of the second direction Y with respect to the first center line CX.

[0028] The plurality of second patterns 204A are orthogonal to the plurality of first patterns 202A. The pitch of the plurality of second patterns 204A in the second direction Y is shorter than the pitch of the plurality of first patterns 202A in the first direction X. Therefore, the grid formed by the plurality of first patterns 202A and the plurality of second patterns 204A has a substantially rectangular shape having a pair of long sides parallel to the first direction X and a pair of short sides parallel to the second direction Y.

[0029] The shape of the reflector 200A according to the first embodiment is not limited to the shape shown in FIG.

[0030] For example, one of a group of first patterns 202A located on the positive side of the second center line CY in the first direction X and another group of first patterns 202A located on the negative side of the second center line CY in the first direction X may not be provided. The distance in the first direction X between adjacent first patterns 202A in the first direction X may vary depending on the position in the first direction X of the scanning range SA. At least one of the multiple first patterns 202A may be inclined with respect to the second direction Y.

[0031] Furthermore, one of the group of second patterns 204A located on the positive side of the first center line CX in the second direction Y and the other group of second patterns 204A located on the negative side of the first center line CX in the second direction Y may not be provided. The distance in the second direction Y between adjacent second patterns 204A in the second direction Y may vary depending on the position in the second direction Y of the scanning range SA. At least one of the multiple second patterns 204A may be inclined with respect to the first direction X.

[0032] Fig. 3 is a graph showing signals of the oscillation angle θ of the movable reflector 110 about the first rotation axis 112 in the first drive state D1 and the second drive state D2 when the reflector 200A is disposed at two predetermined locations in the scanning range SA. Fig. 4 is a graph showing signals of the oscillation angle θ of the movable reflector 110 about the first rotation axis 112 in the first drive state D1 and the third drive state D3 when the reflector 200A is disposed at two predetermined locations in the scanning range SA. Fig. 5 is a graph showing signals of the oscillation angle θ of the movable reflector 110 about the first rotation axis 112 in the first drive state D1 and the second drive state D2 when the reflector 200A is disposed at one predetermined location in the scanning range SA. Fig. 6 is a graph showing signals of the oscillation angle θ of the movable reflector 110 about the first rotation axis 112 in the first drive state D1 and the third drive state D3 when the reflector 200A is disposed at one predetermined location in the scanning range SA.

[0033] The horizontal axis of the graphs shown in Figures 3 to 6 represents time. The arrows representing time indicate that time passes from the base end on the left side of the arrow to the tip end on the right side of the arrow.

[0034] 3 to 6, the vertical axis represents the oscillation angle θ of movable reflector 110 around first rotation axis 112. The arrow representing oscillation angle θ indicates that the oscillation angle θ increases from the base end on the lower side of the arrow to the tip end on the upper side of the arrow. The oscillation angle θ is 0 on the horizontal axis representing time.

[0035] The waveforms shown by solid lines in Figures 3 to 6 represent signals for the oscillation angle θ in the first driving state D1. The waveforms shown by dashed lines in Figures 3 and 5 represent signals for the oscillation angle θ in the second driving state D2. The waveforms shown by dashed lines in Figures 4 and 6 represent signals for the oscillation angle θ in the third driving state D3.

[0036] When a beam is reflected by the movable reflector 110 when the oscillation angle θ is 0, the beam is irradiated onto any part of the second center line CY. When a beam is reflected by the movable reflector 110 when the oscillation angle θ is positive, the beam is irradiated onto the positive side of the first direction X with respect to the second center line CY. When a beam is reflected by the movable reflector 110 when the oscillation angle θ is negative, the beam is irradiated onto the negative side of the first direction X with respect to the second center line CY.

[0037] 3 to 6, the signal indicating the oscillation angle θ in the first drive state D1 fluctuates periodically. Moreover, the oscillation angle of the movable reflector 110 around the second rotation axis 114 also changes over time. Therefore, over time, the position in the second direction Y at which the beam is irradiated by the scanning unit 100 is displaced from the positive direction to the negative direction of the second direction Y, or from the negative direction to the positive direction of the second direction Y. Therefore, the position in the second direction Y at which the beam is irradiated by the scanning unit 100 varies depending on the period of the signal of the oscillation angle θ.

[0038] 3 and 5, the signal indicating the oscillation angle θ in the second driving state D2 fluctuates periodically. The period and amplitude of the signal indicating the oscillation angle θ in the second driving state D2 are equal to the period and amplitude of the signal indicating the oscillation angle θ in the first driving state D1. The waveform of the signal indicating the oscillation angle θ in the second driving state D2 is different from the waveform of the signal indicating the oscillation angle θ in the first driving state D1. Specifically, the absolute value of the signal indicating the oscillation angle θ in the second driving state D2 is greater than the absolute value of the signal indicating the oscillation angle θ in the first driving state D1, except for 0, the minimum value, and the maximum value of the signal of the oscillation angle θ.

[0039] In the graphs shown in FIGS. 4 and 6, the signal indicating the oscillation angle θ in the third driving state D3 fluctuates periodically. The period of the signal indicating the oscillation angle θ in the third driving state D3 is equal to the period of the signal indicating the oscillation angle θ in the first driving state D1. The amplitude of the signal indicating the oscillation angle θ in the third driving state D3 is smaller than the amplitude of the signal indicating the oscillation angle θ in the first driving state D1. Furthermore, when |θ|<θ2, the absolute value of the signal indicating the third driving state D3 is greater than the absolute value of the signal indicating the first driving state D1. When |θ|=θ2, the signal indicating the third driving state D3 is equal to the signal indicating the first driving state D1. When |θ|>θ2, the absolute value of the signal indicating the third driving state D3 is smaller than the absolute value of the signal indicating the first driving state D1.

[0040] 3, 4, and 5, the first oscillation angle θ1 assigned to the vertical axis indicates that reflector 200A is positioned at a position where it is irradiated with the beam reflected by movable reflector 110 at the time when oscillation angle θ becomes the first oscillation angle θ1. Hereinafter, as necessary, reflector 200A provided at a position where it is irradiated with the beam reflected by movable reflector 110 at the time when oscillation angle θ becomes the first oscillation angle θ1 will be referred to as reflector 200A with first oscillation angle θ1.

[0041] 3, 4, and 5, the first oscillation angle θ1 is equal to the maximum value of the signal indicating the oscillation in the first driving state D1 and the second driving state D2. Therefore, the reflector 200A at the first oscillation angle θ1 is located at the end of the scanning range SA in the positive direction of the first direction X in the first driving state D1 and the second driving state D2.

[0042] 3, 4, and 6, the second oscillation angle θ2 assigned to the vertical axis indicates that reflector 200A is positioned at a position where it is irradiated with the beam reflected by movable reflector 110 at the time when oscillation angle θ becomes the second oscillation angle θ2. Hereinafter, as necessary, a reflector provided at a position where it is irradiated with the beam reflected by movable reflector 110 at the time when oscillation angle θ becomes the second oscillation angle θ2 will be referred to as reflector 200A with second oscillation angle θ2.

[0043] 3, 4, and 6, the second oscillation angle θ2 is greater than 0 and smaller than the first oscillation angle θ1. Therefore, the reflector 200A at the second oscillation angle θ2 is positioned between the second center line CY in the first driving state D1 and the end of the scanning range SA in the positive direction of the first direction X.

[0044] The graph shown in FIG. 3 is compared with the graph shown in FIG.

[0045] In the graph shown in Fig. 5, the time it takes for the beam to be reflected by the reflector 200A at the first oscillation angle θ1 in the second driving state D2 is the same as the time it takes for the beam to be reflected by the reflector 200A at the first oscillation angle θ1 in the first driving state D1. Therefore, if the reflector 200A at the second oscillation angle θ2 is not provided as shown in Fig. 5, it is relatively difficult to distinguish between the first driving state D1 and the second driving state D2.

[0046] 3, the time at which the beam is reflected by the reflector 200A at the second oscillation angle θ2 during the period in which the signal indicating the oscillation angle θ in the second drive state D2 increases from 0 to its maximum value is earlier than the time at which the beam is reflected by the reflector 200A at the second oscillation angle θ2 during the period in which the signal indicating the oscillation angle θ in the first drive state D1 increases from 0 to its maximum value. Also, the time at which the beam is reflected by the reflector 200A at the second oscillation angle θ2 during the period in which the signal indicating the oscillation angle θ in the second drive state D2 decreases from its maximum value to 0 is later than the time at which the beam is reflected by the reflector 200A at the second oscillation angle θ2 during the period in which the signal indicating the oscillation angle θ in the first drive state D1 decreases from its maximum value to 0. Therefore, when not only a reflector 200A with a first oscillation angle θ1 but also a reflector 200A with a second oscillation angle θ2 is provided as shown in Figure 3, it becomes relatively easy to distinguish between the first driving state D1 and the second driving state D2.

[0047] 3 and 5, the time during which the beam is reflected by the reflector 200A at the second oscillation angle θ2 during the period in which the signal indicating the oscillation angle θ in the second drive state D2 increases from 0 to its maximum value will be referred to as the reflection time of the second oscillation angle θ2 during the increasing period of the oscillation angle θ, as necessary. Also, in the descriptions of FIGS. 3 and 5, the time during which the beam is reflected by the reflector 200A at the second oscillation angle θ2 during the period in which the signal indicating the oscillation angle θ in the second drive state D2 decreases from its maximum value to 0 will be referred to as the reflection time of the second oscillation angle θ2 during the decreasing period of the oscillation angle θ.

[0048] From the explanation using Figures 3 and 5, the computer 300 can determine the driving state of the movable reflector 110 by referring to at least one of the reflection time of the second oscillation angle θ2 during the period in which the oscillation angle θ is increasing and the reflection time of the second oscillation angle θ2 during the period in which the oscillation angle θ is decreasing.

[0049] For example, consider a case where the reflection time of the second oscillation angle θ2 during the increase period of the oscillation angle θ in a predetermined driving state is a predetermined time. In this example, if the reflection time of the second oscillation angle θ2 during the increase period of the oscillation angle θ is faster than the predetermined time, the computer 300 can determine that the absolute value of the signal indicating the oscillation angle θ is greater than the absolute value of the signal indicating the oscillation angle θ in the predetermined driving state, excluding 0, the minimum value, and the maximum value of the oscillation angle θ. Also, if the reflection time of the second oscillation angle θ2 during the increase period of the oscillation angle θ is slower than the predetermined time, the computer 300 can determine that the absolute value of the signal indicating the oscillation angle θ is smaller than the absolute value of the signal indicating the oscillation angle θ in the predetermined driving state, excluding 0, the minimum value, and the maximum value of the oscillation angle θ.

[0050] Also, consider a case where the reflection time of the second oscillation angle θ2 during the decrease period of the oscillation angle θ in a predetermined driving state is a predetermined time. In this example, if the reflection time of the second oscillation angle θ2 during the decrease period of the oscillation angle θ is slower than the predetermined time, the computer 300 can determine that the absolute value of the signal indicating the oscillation angle θ is greater than the absolute value of the signal indicating the oscillation angle θ in the predetermined driving state, excluding 0, the minimum value, and the maximum value of the oscillation angle θ. Also, if the reflection time of the second oscillation angle θ2 during the decrease period of the oscillation angle θ is faster than the predetermined time, the computer 300 can determine that the absolute value of the signal indicating the oscillation angle θ is smaller than the absolute value of the signal indicating the oscillation angle θ in the predetermined driving state, excluding 0, the minimum value, and the maximum value of the oscillation angle θ.

[0051] 2, in this embodiment, each first pattern 202A extends along the second direction Y. Therefore, in the range in which each first pattern 202A extends in the second direction Y, the computer 300 can distinguish between the first driving state D1 and the second driving state D2 by the method described with reference to FIGS. 3 and 5. Therefore, compared to a case in which the first pattern 202A is present only in a portion of the scanning range SA in the second direction Y, such as the end of the scanning range SA in the positive or negative direction in the second direction Y, the computer 300 can distinguish between the first driving state D1 and the second driving state D2 by applying the method described with reference to FIGS. 3 and 5 over a wide range in the second direction Y. Therefore, in the embodiment, even if the driving state of the oscillation of the movable reflector 110 around the first rotation axis 112 differs depending on the position in the second direction Y within the scanning range SA, the computer 300 can distinguish the driving state of the oscillation of the movable reflector 110 around the first rotation axis 112 at each of multiple positions that are different from each other in the second direction Y of the scanning range SA.

[0052] The graph shown in FIG. 4 is compared with the graph shown in FIG.

[0053] In the graph shown in Fig. 6, the time it takes for the beam to be reflected by the reflector 200A at the second oscillation angle θ2 in the third driving state D3 is the same as the time it takes for the beam to be reflected by the reflector 200A at the second oscillation angle θ2 in the first driving state D1. Therefore, if the reflector 200A at the first oscillation angle θ1 is not provided as shown in Fig. 6, it is relatively difficult to distinguish between the first driving state D1 and the third driving state D3.

[0054] In contrast, in the graph shown in Fig. 4, during the period in which the signal indicating the oscillation angle θ in the third drive state D3 changes from 0 to the maximum value and then back to 0, the beam is not reflected by the reflector 200A with the first oscillation angle θ1. On the other hand, in the graph shown in Fig. 4, during the period in which the signal indicating the oscillation angle θ in the first drive state D1 changes from 0 to the maximum value and then back to 0, the beam is reflected by the reflector 200A with the first oscillation angle θ1. Therefore, when not only the reflector 200A with the second oscillation angle θ2 but also the reflector 200A with the first oscillation angle θ1 is provided as shown in Fig. 4, it becomes relatively easy to distinguish between the first drive state D1 and the third drive state D3.

[0055] 4 and 6, the computer 300 can determine the drive state of the movable reflector 110 according to the number of times the beam is reflected by the reflector 200A at the first swing angle θ1 during the period when the signal indicating the swing angle θ changes from 0 to the maximum value and then back to 0. For example, consider a case where the beam is reflected once by the reflector 200A during the period when the signal indicating the swing angle θ changes from 0 to the maximum value and then back to 0 in a predetermined drive state. In this example, If the beam is not reflected by reflector 200A during the period in which the signal indicating the oscillation angle θ changes from 0 to its maximum value and back to 0, computer 300 can determine that the amplitude of the signal indicating the oscillation angle θ is smaller than the amplitude of the signal indicating the oscillation angle θ in a predetermined drive state. Also, if the beam is reflected twice by reflector 200A during the period in which the signal indicating the oscillation angle θ changes from 0 to its maximum value and back to 0, computer 300 can determine that the amplitude of the signal indicating the oscillation angle θ is larger than the amplitude of the signal indicating the oscillation angle θ in a predetermined drive state.

[0056] 2, in the embodiment, each first pattern 202A extends along the second direction Y. Therefore, in the same manner as the distinction method described with reference to FIGS. 3 and 5, the computer 300 can distinguish between the first driving state D1 and the third driving state D3 within the range in which each first pattern 202A extends in the second direction Y by the method described with reference to FIGS. 4 and 6.

[0057] 3 and 4, the reflectors 200A are provided at two locations on the positive side of the second center line CY in the first direction X. However, the reflectors 200A may be provided at three or more locations on the positive side of the second center line CY in the first direction X. Furthermore, not only may the reflectors 200A be provided at multiple locations on the positive side of the second center line CY in the first direction X, but the reflectors 200A may also be provided at multiple locations on the negative side of the second center line CY in the first direction X. Furthermore, the reflectors 200A may not be provided at the positive side of the second center line CY in the first direction X, but may be provided at multiple locations on the negative side of the second center line CY in the first direction X.

[0058] 3 to 6 have been described with respect to the distinction between drive states of the oscillation of movable reflector 110 around first rotation axis 112. However, the matters described with respect to FIGS. 3 to 6 can be similarly applied to the distinction between drive states of the oscillation of movable reflector 110 around second rotation axis 114.

[0059] 3 to 6, at least a portion of reflector 200A can be positioned at multiple locations offset from one another in a predetermined direction on one side of the center of scanning range SA in the predetermined direction. For example, in the example shown in Fig. 2, multiple first patterns 202A are provided on one side of second center line CY in the first direction X. In this case, it is easier to distinguish the driving state of the oscillation of movable reflector 110 around first rotation axis 112, compared to when reflector 200A is provided at only one location on one side of second center line CY in the first direction X.

[0060] Furthermore, at least a portion of reflector 200A may extend in a direction different from the predetermined direction. For example, in the example shown in Fig. 2, multiple first patterns 202A extend along second direction Y. In this case, compared to when each first pattern 202A exists only in a portion of second direction Y, such as at the end of scanning range SA in the positive or negative direction of second direction Y, it is possible to distinguish the drive state of the oscillation of movable reflector 110 around first rotation axis 112 by applying a distinction method such as the method described using Figs. 3 and 5 or the method described using Figs. 4 and 6 over a wide range of scanning range SA in second direction Y.

[0061] 3 to 6, at least another portion of reflector 200A may be located at a plurality of locations offset from one another in the predetermined direction on one side of the center of scanning range SA in a direction different from the predetermined direction. For example, in the example shown in FIG. 2, a plurality of second patterns 204A are provided on one side in the second direction Y of first center line CX. In this case, it is easier to distinguish the driving state of the oscillation of movable reflector 110 around second rotation axis 114, compared to when reflector 200A is provided at only one location on one side in the second direction Y of first center line CX.

[0062] 2, multiple second patterns 204A extend along the first direction X. In this case, compared to when each second pattern 204A exists only in a portion of the first direction X, such as at the end of the scanning range SA in the positive or negative direction of the first direction X, a distinction method such as the method described with reference to FIGS. 3 and 5 or the method described with reference to FIGS. 4 and 6 can be applied to a wide range of the scanning range SA in the first direction X, thereby distinguishing the drive state of the oscillation around the second rotation axis 114 of the movable reflector 110.

[0063] (Embodiment 2) 7 is a view of reflector 200B according to embodiment 2 as viewed from the side opposite to the side where scanning unit 100 is located. Reflector 200B according to embodiment 2 is similar to reflector 200A according to embodiment 1 except for the following points.

[0064] The reflector 200B according to the second embodiment is arranged in a striped pattern. Specifically, the reflector 200B has a plurality of first patterns 202B. The plurality of first patterns 202B are arranged substantially parallel to the first direction X at substantially equal intervals. Each of the first patterns 202B extends substantially parallel to the second direction Y.

[0065] The shape of the reflector 200B according to the second embodiment is not limited to the shape shown in Fig. 7. For example, one of the group of first patterns 202B located on the positive side of the second center line CY in the first direction X and the other group of first patterns 202B located on the negative side of the second center line CY in the first direction X may not be provided. The distance in the first direction X between adjacent first patterns 202B in the first direction X may vary depending on the position in the first direction X of the scanning range SA. At least one of the multiple first patterns 202B may be inclined with respect to the second direction Y.

[0066] In the second embodiment, as in the first embodiment, it is easier to distinguish the driving state of the oscillation of movable reflector 110 around first rotation axis 112, compared to when reflector 200B is provided at only one location on one side of second center line CY in first direction X. Also, in the second embodiment, as in the first embodiment, it is easier to distinguish the driving state of the oscillation of movable reflector 110 around first rotation axis 112 over a wide range in second direction Y of scanning range SA, compared to when first pattern 202B is present only in a part of scanning range SA in second direction Y.

[0067] (Embodiment 3) 8 is a view of reflector 200C according to embodiment 3 as viewed from the side opposite to the side where scanning unit 100 is located. Reflector 200C according to embodiment 3 is similar to reflector 200A according to embodiment 1 except for the following points.

[0068] The reflector 200C according to the third embodiment extends in a lattice frame shape that is modified from a rectangular shape. Specifically, the reflector 200C has a plurality of first patterns 202C and a plurality of second patterns 204C.

[0069] When viewed from the third direction Z, the first pattern 202C located on the second center line CY is substantially parallel to the second direction Y. In contrast, the first pattern 202C displaced in the first direction X from the second center line CY becomes more distant from the second center line CY as it moves from the negative direction to the positive direction of the second direction Y.

[0070] When viewed from the third direction Z, the second patterns 204C according to the third embodiment are aligned in the second direction Y and intersect with the first patterns 202C. Each second pattern 204C is curved upwardly convexly.

[0071] In the third embodiment, the above-described layout of the plurality of first patterns 202C allows the plurality of first patterns 202C to be arranged at substantially equal intervals with respect to the oscillation angle around the first rotation axis 112 of the movable reflector 110. Furthermore, the above-described layout of the plurality of second patterns 204C allows the plurality of second patterns 204C to be arranged at substantially equal intervals with respect to the oscillation angle around the second rotation axis 114 of the movable reflector 110.

[0072] The shape of the reflector 200C according to the third embodiment is not limited to the shape shown in Fig. 8. For example, either one of the group of first patterns 202C located on the positive side of the second center line CY in the first direction X and the other group of first patterns 202C located on the negative side of the second center line CY in the first direction X may not be provided. Furthermore, either one of the group of second patterns 204C located on the positive side of the first center line CX in the second direction Y and the other group of second patterns 204C located on the negative side of the first center line CX in the second direction Y may not be provided.

[0073] In the same manner as in the first embodiment, in the third embodiment, it is easier to distinguish the drive state of the oscillation of the movable reflector 110 around the first rotation axis 112, compared to when the reflector 200C is provided at only one location on one side in the first direction X with respect to the second center line CY. Furthermore, it is easier to distinguish the drive state of the oscillation of the movable reflector 110 around the second rotation axis 114, compared to when the reflector 200C is provided at only one location on one side in the second direction Y with respect to the first center line CX.

[0074] Also, in the third embodiment, as in the first embodiment, the driving state of the oscillation of the movable reflector 110 around the first rotation axis 112 can be distinguished over a wider range in the second direction Y of the scanning range SA, compared to when the first pattern 202C exists only in a part of the second direction Y of the scanning range SA. Furthermore, the driving state of the oscillation of the movable reflector 110 around the second rotation axis 114 can be distinguished over a wider range in the first direction X of the scanning range SA, compared to when the second pattern 204C exists only in a part of the first direction X of the scanning range SA.

[0075] (Embodiment 4) 9 is a view of reflector 200D according to embodiment 4 viewed from the side opposite to the side where scanning unit 100 is located. Reflector 200D according to embodiment 4 is similar to reflector 200A according to embodiment 1 except for the following points.

[0076] The reflector 200D according to the fourth embodiment has a plurality of patterns 202D arranged in a square lattice pattern. The plurality of patterns 202D includes a group of patterns 202D located on the positive side of the second center line CY in the first direction X, and another group of patterns 202D located on the negative side of the second center line CY in the first direction X. The group of patterns 202D is spaced apart from one another in both the first direction X and the second direction Y. The other group of patterns 202D is spaced apart from one another in both the first direction X and the second direction Y.

[0077] The shape of the reflector 200D according to the fourth embodiment is not limited to the shape shown in Fig. 9. For example, the plurality of patterns 202D may be arranged in a rectangular lattice pattern or a regular triangular lattice pattern.

[0078] In the fourth embodiment, similarly to the first embodiment, it is possible to more easily distinguish the drive state of the oscillation of the movable reflector 110 around the first rotation axis 112 than when the reflector 200D is provided at only one location on one side in the first direction X with respect to the second center line CY. Furthermore, it is possible to more easily distinguish the drive state of the oscillation of the movable reflector 110 around the second rotation axis 114 than when the reflector 200D is provided at only one location on one side in the second direction Y with respect to the first center line CX.

[0079] Also, in the fourth embodiment, as in the first embodiment, the driving state of the oscillation of the movable reflector 110 around the first rotation axis 112 can be distinguished over a wider range in the second direction Y of the scanning range SA, compared to when the pattern 202D exists only in a part of the second direction Y of the scanning range SA. Furthermore, the driving state of the oscillation of the movable reflector 110 around the second rotation axis 114 can be distinguished over a wider range in the first direction X of the scanning range SA, compared to when the pattern 202D exists only in a part of the first direction X of the scanning range SA.

[0080] Although the embodiments of the present invention have been described above with reference to the drawings, these are merely examples of the present invention, and various other configurations can also be adopted. [Explanation of symbols]

[0081] 10A sensor device 100 Scanning unit 110 Movable reflector 112 First rotation axis 114 Second rotation axis 200A reflector 200B reflector 200C reflector 200D reflector 202A 1st pattern 202B 1st pattern 202C 1st pattern 202D pattern 204A Second Pattern 204C 2nd pattern 300 Computers 400 cabinets CX 1st center line CY 2nd center line D1 First driving state D2 Second drive state D3 Third drive state SA scanning range X 1st direction Y Second direction Z 3rd direction

Claims

1. A scanning unit; a reflector that reflects at least a part of the beam irradiated onto the scanning range of the scanning unit; Equipped with A sensor device, wherein the reflector has a pattern extending in a lattice frame shape, and light passes through an area within the lattice frame of the lattice frame-shaped pattern of the reflector.

2. The sensor device according to claim 1, the pattern extending in a lattice frame shape has first patterns positioned at a plurality of locations while being shifted in a first direction, and second patterns positioned at a plurality of locations while being shifted in a second direction different from the first direction, and the plurality of first patterns and the plurality of second patterns intersect with each other; A sensor device in which the distance shifted in the first direction is different from the distance shifted in the second direction.

3. 3. The sensor device according to claim 1, the pattern extending in a lattice frame shape has first patterns positioned at a plurality of locations while being shifted in a first direction, and second patterns positioned at a plurality of locations while being shifted in a second direction different from the first direction, and the plurality of first patterns and the plurality of second patterns intersect with each other; A sensor device, wherein the pattern extending in the first direction is curved convexly in a direction different from the first direction.

4. The sensor device according to any one of claims 1 to 3, The sensor device further includes a light-transmitting substrate on which the reflector is provided.

5. The sensor device according to any one of claims 1 to 4, The sensor device, wherein the reflector is a heating element.

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