Workpiece carrier device, workpiece coating method, and workpiece

Abstract

The present invention relates to a workpiece carrier device (1) for holding and moving a workpiece (15), the workpiece carrier device (1) comprising: a workpiece carrier (2) for accommodating the workpiece (15) mounted on a main frame (4) for rotation about an axis (3); a drive unit rotatable about the axis (3) relative to the workpiece carrier (2); and a plurality of workpiece holders (5) arranged on the workpiece carrier (2) in a ring shape around the drive axis and mounted on the workpiece carrier (2) for rotation about holder axes (6) spaced apart from the drive axis. The holder axes (6) extend relative to the axis (3) so that the workpiece holders (5) form a conical crown configuration (7). Furthermore, the present invention relates to a coating method using the workpiece carrier device (1) according to the present invention, and to a workpiece or substrate (15) (e.g., pin, injection pen, ball, ball pin, piston, nozzle needle, etc.) coated by the coating method.

Description

[Technical Field]

[0001] The present disclosure relates to a workpiece carrier device for moving workpieces (substrates), the workpiece carrier device having a workpiece carrier for accommodating the workpiece mounted on a main frame for rotation about an axis, a drive unit similarly rotatable about an axis relative to the workpiece carrier device, and a plurality of workpiece holders arranged in a ring shape around the drive axis on the workpiece carrier and mounted on the workpiece carrier for rotation about holder axes spaced from the drive axis. The present disclosure relates to a method for coating a workpiece in such a workpiece carrier device, and the workpiece. [Background technology]

[0002] Workpiece carrier devices of this type are used in particular for processing workpieces in vacuum systems, and in particular for coating workpieces in vacuum systems. They are used to move workpieces on workpiece carrier units through a coating chamber to ensure uniform coating of all exposed surfaces of the workpiece in the coating chamber. The workpiece carrier units are particularly suitable for moving cylindrical or pin-shaped workpieces (e.g., drills, nozzle needles, etc.) through the coating chamber. In this case, the workpieces are arranged in a crown or ring shape around a rotation axis and move around the rotation axis through the coating chamber. To achieve uniform coating of all surfaces, especially cylindrical surfaces, the workpieces are arranged for this purpose in a rotatable holder that rotates around its own axis, i.e., the holder axis. During coating, the workpieces therefore move around the rotation axis and around their longitudinal axis, which is substantially coaxial with the holder axis. In this way, all surfaces are uniformly coated.

[0003] A workpiece carrier device of this kind is shown, for example, in EP 1 917 380 B1. In this configuration, the holder axis runs parallel to the drive axis. Similar workpiece carrier devices are known from EP 1 153 155 A1, US 2014 / 0008857 A1 and DE 10 803 278 A1.

[0004] However, a difficulty with known workpiece carrier devices in which the holder axis extends parallel to the drive axis is that it is difficult to apply a coating to workpieces that have pronounced tips or peaks in these areas because these peaks do not move or remain in one place during rotation around the holder axis. This can result in insufficient coating in these areas. Furthermore, with known workpiece carrier devices, the number of stacked workpiece sets (workpiece crowns) is limited when the workpieces are long. Furthermore, when the workpieces are relatively long, the number of workpiece carriers that can be placed in the coating chamber is limited, resulting in a relatively small number of workpieces that can be processed or coated in one batch.

[0005] DE202004009256U1 discloses a conical crown configuration of the workpiece where the workpiece rotates in steps about its holder axis, which can make uniform coating in critical areas difficult.

[0006] It is therefore an object of the present invention to provide an improved workpiece carrier device which at least partially reduces these drawbacks. Summary of the Invention

[0007] According to a first aspect, the present invention provides a workpiece carrier device for moving workpieces, the workpiece carrier device comprising: a workpiece carrier for accommodating a workpiece, the workpiece carrier being mounted on a main frame so as to rotate about an axis; a drive unit which is similarly rotatable about an axis relative to the workpiece carrier; and a plurality of workpiece holders arranged on the workpiece carrier in a ring shape around the drive axis and mounted on the workpiece carrier so as to rotate about holder axes spaced from the drive axis, the holder axes extending relative to the axis so that the workpiece holders form a conical crown configuration; and the drive unit comprising a crank disk having a plurality of circumferentially arranged link slots, into each of which extends the drive unit of the workpiece holder, through which the workpiece holder rotates during operation.

[0008] Further aspects and features of the present invention arise from the dependent claims, the accompanying drawings and the following description of preferred embodiments of the invention.

[0009] Embodiments of the present invention will now be described, by way of example only, with reference to the accompanying drawings, in which: [Brief explanation of the drawings]

[0010] [Figure 1] 1 shows a schematic axial section of a workpiece carrier device according to the invention corresponding to a first embodiment; [Figure 2] 1 shows a cross-sectional view of a workpiece carrier device according to the invention corresponding to a first embodiment; [Figure 2a] 1 shows a schematic view of the top end of a workpiece in a workpiece holder. [Figure 3] 1 shows a side view of a workpiece carrier device according to the invention having a plurality of workpiece holders; [Figure 4] 1 shows a cross-sectional view of a workpiece holder. [Figure 5] 3 shows an exploded view of the workpiece carrier device shown in FIG. 2; [Figure 6] 3 shows an enlarged cross-sectional view of region A shown in FIG. 2. [Figure 7]3 shows an enlarged view of region B shown in FIG. 2. [Figure 8] 1 shows a schematic flow chart of a method according to the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0011] 1 shows an embodiment according to the present invention. A general description of this embodiment will be provided first, followed by a detailed description.

[0012] The present disclosure also relates to a workpiece carrier device having a workpiece carrier including a rotating frame attached to a main frame so as to rotate about a drive axis, a drive unit similarly rotatable about the drive axis relative to the rotating frame, and a plurality of workpiece holders attached to the rotating frame so as to rotate about holder axes spaced apart from the drive axis.

[0013] Coating properties are improved in a workpiece carrier device that includes a workpiece carrier, where the holder axis extends relative to an axis such that the workpiece holder and a workpiece disposed therein form a conical crown or ring configuration.

[0014] An elongated, compact, or pin-shaped workpiece or substrate (e.g., a pin, injection pin, ball, ball pin, piston, or nozzle needle) is placed in a workpiece holder and has a pronounced (e.g., flat, roof-shaped, or domed) top area, protruding obliquely relative to its axis and pointing outward from the coating chamber. By automatically rotating the workpiece holder around its rotation axis or holder axis, the absolute top moves along a ring centered on the holder axis at the top area of ​​the workpiece passing through the coating chamber, thereby eliminating the pronounced top and achieving a more uniform coating of the top area. If the top area is dome-shaped, the relative top is located laterally below the absolute top, at the point where the holder axis and / or rotation axis, which extend obliquely relative to the drive axis, penetrate the end of the respective workpiece. When coating with one or more layers, the rotation of the piston or pin cylinder by permanent rotation ensures a uniform coating of the top area. On the other hand, in conventional workpiece carrier devices in which the holder axis extends parallel to the rotation axis of the workpiece carrier, the top or top region is always at the same highest position (as a point or region) and therefore, in some situations, is coated unevenly or only insufficiently.Even if the holder axis extends obliquely but uniform rotation about the holder axis is not realized, the coating is not uniform in some situations, especially in the top region.

[0015] Furthermore, the conical crown configuration of the holder shaft allows multiple workpiece carriers to be arranged more compactly relative to one another. In fact, when multiple workpiece carriers are stacked, the workpiece carriers can be stacked inside one another so that the crown configuration of each workpiece carrier forms a truncated edge that matches the workpiece of the next workpiece carrier. In this way, the workpiece carriers can be arranged compactly relative to one another or one after the other, largely regardless of the length of the workpieces to be placed therein, and a large number of workpieces can be placed in the smallest space and coated in a relatively compact coating chamber.

[0016] Here, the angle between the shaft and the holder axis is between 5° and 45°, between 15° and 35°, in particular 25°, resulting in a cone angle of between 10° and 90°, between 30° and 70°, or even 50°. An angle of 50° has proven particularly suitable, as it represents a good compromise between the tilt of the holder axis required to improve the coating result and the possible tilt of the holder axis that allows rotation of the workpiece holder around the holder axis.

[0017] The drive of the tool holder, which is used to rotate about its holder axis, is carried out via a crank disk having a plurality of link slots arranged circumferentially, each engaging a drive portion of the workpiece holder extending inside the link slot. During operation of the workpiece carrier device, one or more workpiece holders rotate relative to a drive element that causes the crank disk to perform an eccentric oscillating movement relative to the workpiece carrier, thereby driving the drive portion of the workpiece holder through the link slot to automatically rotate the workpiece holder. Here, the crank disk performs an oscillating movement within the workpiece holder in a plane perpendicular to the axis, thereby simultaneously moving all drive portions of the workpiece holder in each link slot.

[0018] Here, the link slot is designed as an elongated elliptical hole oriented radially relative to the axis, and during operation the drive part of the workpiece holder slides and rolls along the inner edge of the elliptical hole.

[0019] The drive is effected via a drive cam, which is rotatable relative to the crank disc and engages in a drive opening in the crank disc, so that during operation it moves perpendicular to the axis and, via the link slot, causes a rotational movement of the workpiece holder. In this case, the drive cam exhibits a circular motion, the outer edge of which defines a circle that is larger than the circular drive opening in the crank disc. The oscillation or cranking movement of the crank disc during operation of the circular drive cam corresponds exactly to the amount of difference between the cam radius and the opening radius of the drive opening.

[0020] In one embodiment in which the drive cam is rotatably mounted eccentrically to the axis and exerts its driving action via a drive roller which, during operation, moves in a circular motion at the end of the drive opening in the crank disc, the oscillating motion is transmitted to the crank disc with particularly low friction.

[0021] In some embodiments, each workpiece holder has a crank-like design and comprises a crank part extending between two coaxially extending ends, one of which is rotatably mounted as a bearing end at the bearing point of the workpiece carrier, and the other is rotatably arranged as a receiving end in the bearing opening of the workpiece carrier. Here, the crank part interacts with link slots or elliptical holes and reciprocates in these link slots during operation, i.e., when the crank disk is driven, thereby forming a drive part that performs rotational movement around the holder axis. However, due to the double bearing, the workpiece holder is stably rotatably mounted relative to the workpiece carrier.

[0022] In one embodiment, the bearing points are then arranged in the bottom disk of the workpiece carrier, for example in the form of conical or circular recesses whose ends are supported in predetermined positions in the workpiece carrier.

[0023] In one embodiment, the receiving end itself is rotatably arranged in the opening of the workpiece carrier, while in another embodiment, the bearing end is provided with a workpiece support sleeve through which the bearing end is received. In this way, it is possible to provide a material pair suitable for the sliding bearing required between the bearing end and the workpiece carrier. For example, the workpiece support sleeve can form a sliding pair with the bearing opening of the workpiece carrier, thereby reducing the sliding resistance in this bearing area.

[0024] As described above, the workpiece carrier device makes it possible to arrange a large number of workpieces in a particularly space-saving manner, where multiple workpiece carriers are arranged relative to each other so that the conical crown configuration of the workpiece holders of the workpiece carriers embraces the bottom disk of the further workpiece carrier, so that a large portion of the further workpiece holders is arranged within the workpiece crown formed by the workpieces arranged in the workpiece holders.

[0025] The invention also relates to a coating arrangement having a workpiece arrangement according to one of the present claims, which allows batch coating of multiple workpieces and improves the coating properties, especially in the top region of each individual workpiece.

[0026] Referring to FIG. 1, this figure shows a schematic diagram of one embodiment of a workpiece carrier device 1 according to the present invention. The workpiece carrier device 1 comprises one or more workpiece carriers 2 with a drive unit 1a, which are mounted on a main frame 4 rotatably about an axis 3. In this case, a plurality of workpiece holders 5 arranged in a ring shape around the axis 3 are provided along a holder axis 6 arranged concentrically away from the drive axis / axis 3. In this case, the holder axis 6 is inclined with respect to the axis 3 so that the workpiece holders 5 form a conical crown configuration. The arrangement shown in FIG. 1 shows an upwardly extending conical crown configuration 7. The angle α of the holder axis 6 with respect to the axis 3 is approximately 5° to 45°. Here, the workpiece carrier device 1 is arranged in a coating chamber of a coating arrangement 17. This is where a vacuum coating process can be performed.

[0027] The drive 1a comprises a crank disk 8, the circumference of which is provided with a link slot, designed as an elliptical hole 9. The link slot 9 is passed through by the workpiece carrier 5 and engages with the crank-shaped drive 10 of the workpiece carrier 5. The center of the crank disk 8 is provided with a circular drive opening 11, which engages with a drive cam 12, which moves eccentrically about its axis. The drive cam 12 is mounted so as to be rotationally fixed on a camshaft 13, which rotates during operation, i.e., when the workpiece carrier rotates about its axis 3 relative to the workpiece carrier. In this case, it is designed to be rotationally fixed to the main frame, or it can be automatically rotated about its axis relative to the main frame. If necessary, the direction and speed of rotation of the camshaft 13 can be adjusted here. The drive cam comprises a rotatable drive roller 14 which, by rolling in the drive opening 11, transmits an oscillating movement to the crank disc 8, which in turn causes a corresponding movement in the link slot 9, which in this case engages with the drive 10 or the crank of the workpiece holder 5, causing them to perform a corresponding rotational movement about the holder axis. At the same time, the holder axis performs a circular movement about axis 3, so that the workpiece placed in the workpiece holder moves about axis 3 in a rotational manner about the holder axis, and in so doing follows a path through the coating chamber of the coating arrangement 17.

[0028] 2 shows a cross-sectional view of the tool carrier 2 described in relation to FIG. 1, the drive part 10 with the rolling bearings 19, the drive cam 12 with the drive rollers 14, and details of the intermediate support plate arrangement 28 guiding the crank disc 8. The drive cam 12, which is connected to a camshaft 13, is rotatably mounted on each workpiece carrier 2 via the rolling bearings 19.

[0029] FIG. 2a shows the top or tip region (here, sealing head 151) of the workpiece or substrate 15 (here, nozzle needle), whose coating is particularly important. During coating, all workpieces 15 rotate about axis 3, each rotating around a holder axis 6 that passes through the workpiece 15. Due to the tilt of the holder axis 6 with respect to axis 3 at an angle α, there is a top zone 152 arranged along a ring extending concentrically with the holder axis 6, such that when rotating around the holder axis 6 along this top zone 152 (ring), the relative tops rise and fall periodically from the top along a circle or around the holder axis 6. The absolute top 153 or pole with respect to the holder axis 6 is laterally lower than the highest top. Due to the tilted arrangement by angle α, during coating, the entire top zone 152, including the absolute top 153, is coated very uniformly, which is particularly important for the sealing function of the sealing head 151.

[0030] The same applies to embodiments in which, instead of a spherical sealing head 151 at the end of the workpiece, a sealing cone is formed, the tip of which may be spherically rounded, and such an embodiment also ensures a particularly uniform coating of the cone side and tip area.

[0031] Thanks to the tilt angle α and the rotation about the axis 3 and the respective holder axis 6, it is possible to uniformly coat such nozzle needles or injection pins 15. In particular, the pole or top or apex zone 151 and the circumferential or equatorial zone of such a sphere are uniformly wetted by the coating material. In contrast, if the holder axis runs vertically, only the equatorial zone is coated in an acceptable manner.

[0032] Typically, the coating material of the coating 154 for the workpiece or substrate 15, such as an ejection pin or nozzle needle (e.g., pin, ejection pin, ball, ball pin, piston, nozzle needle, etc.), typically comprises CrN / CrC as a functional layer or in a multilayer coating with a layer thickness of 0.1 μm to 10 μm, and a second diamond-like carbon layer applied as a cover layer with a thickness of 0.1 to 10 μm. In this connection, amorphous carbon layers aC:H / aC:H:Me / aC:H:X (hydrogen-containing amorphous carbon layers) or ta-C (tetrahedral hydrogen-free amorphous carbon layers) are realized. aC:H:Me [metal doped tungsten, copper, or other] aC:H:X [doped with silicon, oxygen, nitrogen, or other]

[0033] In general, all PVD layers as well as gas and plasma nitriding applications can be used up to 450°C with this device.

[0034] 3 shows a workpiece carrier device in which several workpiece carriers 2 are nested one inside the other, with the conical crown arrangements 7 of the lower workpiece holders embracing the workpiece holders 5 arranged above them, where the workpiece holders are arranged to rotate by drive feet 18.

[0035] Figure 4 shows the design of the workpiece holder. It comprises a crank part used as the drive part 10, which is arranged in a crank-like bend between a bearing end 20 and a receiving end 21. At the receiving end 21, a workpiece support sleeve 22 is installed, into whose receiving opening the workpiece can be inserted. Figures 2, 2a and 3 show a pin-shaped workpiece 24, such as a nozzle needle or injection pin.

[0036] Figure 6 (detail A of Figure 3) shows an embodiment of the drive cam 12, which is arranged via a radial bearing 19 between a bearing disk 26 and a cover disk 27 so as to be rotatable relative to the workpiece carrier 2. A drive roller 32 is arranged on an eccentric area 30 via a pin 31 and performs a circular movement in a drive opening 11 of the crank disk 8, resulting in a corresponding crank movement about the axis 3 about which the workpiece holder 5 rotates. Here, the workpiece carrier 2 rotates relative to the drive cam 12, which is fixed or pivotable relative to the workpiece holder 5 via a camshaft 13.

[0037] Figure 7 (detail B of Figure 2) shows the action of the crank disc 8 on the workpiece holder 5. The swinging movement of the crank disc 8 relative to the tool holder 5 correspondingly moves the link slot 9, which engages with the drive part 10 of the workpiece holder 5 and consequently causes it to follow the swinging movement and move in rotation about the holder axis 6. In this case, the bearing end 20 is attached to the bottom disc 25 of the workpiece carrier 2, and the receiving end 21 is attached to the bearing disc via the workpiece support part 22, which is further covered by the cover disc 27.

[0038] To stabilize the crank disc 8 in its plane of movement (perpendicular to the axis 3), a support plate arrangement 28 is provided which defines guide slots 29 in which guide openings 30 of the crank disc are located. The diameters of the guide openings 29 and of the support plate arrangement 28 are adapted to the swinging of the crank disc 8, to ensure that the support plate arrangement 28 always includes the edges of the guide openings 29. The support plate arrangement 28 is fixed by means of screws 32 which pass through the workpiece carrier 2 and the guide openings 29.

[0039] This relative movement can be controlled by a shaft 13 which passes in rotationally fixed relation to the drive cam 12. The drive cam can, for example, be adjusted so that it is rotationally fixed relative to the main frame. However, it can also be rotated in the opposite direction to the rotational movement of the workpiece carrier 2, thereby increasing the rotational speed of the workpiece holder.

[0040] The flow chart of the method of coating a workpiece or substrate 15, for example formed as a jet needle, according to the present invention shown in FIG. 8 includes the following steps A to E.

[0041] A. Providing a workpiece carrier device 1 B. Placing the substrate 15 in the workpiece holder 22 C. Moving and rotating the workpiece holder 22 or substrate 15 in the coating arrangement 17 D. Coating the substrate 15 E. Removing the coated substrate 15 Further details and variations of the invention within the scope of the claims will be apparent to those skilled in the art. [Explanation of symbols]

[0042] 1 Workpiece carrier device 1a Drive unit 2 Workpiece carrier 3-axis 4. Mainframe 5 Workpiece holder 6 Holder shaft 7 Conical Crown Configuration 8 crank disc 9 Link slots / oval holes 10 Drive unit, crank unit 11 Driven Opening 12 Drive cam 13 Camshaft 14 Drive roller 15 Workpieces, substrates (e.g., pins, injection pins, balls, ball pins, pistons, nozzle needles, etc.) 17 Coating equipment 18 Driving foot 19 Rolling bearings 20 Bearing end 21 Receiving end 22 Workpiece support part (sleeve) 25 Bottom Disc 26 bearing disc 27 Cover Disc 28 Support plate configuration 29 Guide opening 30 slots 31 Eccentric region 32 screws 151 Tip, sealing head 152 Top Zone 153 Absolute Top 154 Coating

Claims

1. A workpiece carrier device (1) for holding and moving a workpiece (15), comprising: a workpiece carrier (2) for receiving a workpiece (15), the workpiece carrier (2) being mounted on a main frame (4) for rotation about an axis (3); a drive which is likewise rotatable about said axis (3) relative to said workpiece carrier (2); a plurality of workpiece holders (5) arranged in a ring shape around the axis (3) on the workpiece carrier (2) and attached to the workpiece carrier (2) so as to rotate around a holder axis (6) spaced apart from the axis (3); Equipped with the holder axis (6) extends relative to the axis (3) such that the workpiece (15) placed in the workpiece holder (5) and / or the workpiece holder (5) form a conical crown configuration (7); the drive part (1a) comprises a crank disc (8) having a number of circumferentially arranged link slots (9) into each of which extends a drive part (10) of the workpiece holder (5), through which the workpiece holder (5) is brought into a rotational movement during operation; The link slots (9) are designed as elongated elliptical holes (9) oriented radially relative to the axis (3), Each of the workpiece holders (5) is designed in the shape of a crank and has a crank part (10) extending between two coaxially extending ends, one of which is rotatably attached to a bearing point of the workpiece carrier (2) as a bearing end (20) and the other of which is rotatably arranged in a bearing opening of the workpiece carrier (2) as a receiving end (21); The crank part (10) forms a drive part (10) that interacts with the link slot (9) and that, when the crank disc (8) is driven, performs a reciprocating motion in the link slot (9) and thereby a rotational motion about the holder axis (6).

2. 2. The workpiece carrier device (1) according to claim 1, wherein the angle between the axis (3) and the holder axis (6) is between 5° and 45°, between 15° and 35° or 25°.

3. 3. The workpiece carrier device (1) according to claim 1 or 2, wherein a drive cam (12) rotatable relative to the crank disc (8) engages in a circular motion with a drive opening (11) of the crank disc (8) and, in operation, moves the crank disc (8) perpendicular to the axis (3), thereby causing a rotational movement of the workpiece holder (5) via the link slot (9).

4. 4. The workpiece carrier device (1) according to claim 3, wherein the drive cam (12) is rotatably mounted eccentrically with respect to the shaft (3) and exerts a driving effect via a drive roller (14) which rolls at the end of the drive opening (11) during operation.

5. 2. Workpiece carrier device (1) according to claim 1, wherein the bearing points are arranged on a bottom disk (25) of the workpiece carrier (2).

6. A workpiece carrier device (1) as described in claim 1 or 5, wherein a workpiece support sleeve (22) is installed at the accommodating end (21).

7. 7. The workpiece carrier device (1) according to claim 1, wherein a plurality of workpiece carriers (2) are arranged relative to one another such that the conical crown configuration (7) of the workpiece holder (5) of one workpiece carrier (2) embraces the bottom disk (25) of a further workpiece holder (5), whereby the further workpiece holder (5) is located predominantly within a workpiece crown formed by the workpieces (15) arranged on the workpiece holder (5).

8. A coating arrangement (17) comprising a workpiece carrier device (1) according to any one of claims 1 to 7.

9. A method for coating a substrate (15), comprising the steps of: providing a workpiece carrier device (1) according to any one of claims 1 to 7 and placing a substrate (15) on the workpiece holder (5); moving and rotating said workpiece holder (5) in a coating configuration (17); depositing a coating (154) on said substrate (15); removing the coated substrate (15); A method comprising:

10. 10. A method for producing a substrate (15) having a coating (154) applied by the method of claim 9, the substrate (15) having a tip region (151) that is flat, roof-shaped or dome-shaped, spherical and / or conical.

11. 11. The method of manufacturing a substrate (15) according to claim 10, wherein the coating (154) comprises at least a first layer comprising a metal nitride and / or a metal carbide.

12. A method for producing a substrate (15) as described in claim 11, wherein the coating has at least a second layer.

13. A method for producing a substrate (15) as described in claim 12, wherein the second layer is an amorphous carbon layer comprising ta-C and / or a-C:H and / or a-C:H:Me and / or a-C:H:X and / or a-C:H:Me:X materials.

14. A method for producing a substrate (15) as described in claim 13, wherein Me is or includes tungsten or copper.

15. A method for producing a substrate (15) according to claim 14, wherein X is or comprises silicon, nitrogen or oxygen, a:C:H:Me denotes an amorphous carbon layer material doped with Me, a:C:H:X denotes an amorphous carbon layer material doped with X, and a:C:H:Me:X denotes an amorphous carbon layer material doped with Me and X.

16. The method of manufacturing a substrate (15) according to claim 11, wherein the coating (154) comprises a first layer and a second layer.

17. A method for manufacturing a substrate (15) as described in claim 16, wherein the first layer comprises CrN and / or CrC.

18. A method for producing a substrate (15) as described in claim 16, wherein the second layer comprises ta-C and / or a-C:H and / or a-C:H:Me and / or a-C:H:X and / or a-C:H:Me:X.

19. The method of manufacturing a substrate (15) according to claim 11, wherein the coating (154) comprises a first layer and a second layer.

20. A method for manufacturing a substrate (15) as described in claim 19, wherein the first layer comprises TiN and / or TiN.

21. A method for producing a substrate (15) as described in claim 19, wherein the second layer comprises ta-C and / or a-C:H and / or a-C:H:Me and / or a-C:H:X and / or a-C:H:Me:X.

22. 22. The method for manufacturing a substrate (15) according to any one of claims 11 to 21, wherein the coating (154) is designed as a multi-layer coating system comprising two or more layers, the coating comprising a first layer and a second layer.

23. A method for manufacturing a substrate (15) as described in claim 22, wherein the second layer is deposited as an outer layer.

24. A method for manufacturing a substrate (15) as described in claim 22, wherein the first layer is deposited between the substrate and the second layer.

25. A method for manufacturing a substrate (15) according to any one of claims 10 to 18, which is designed as one of a pin, an ejection pin, a ball, a ball pin, a piston, a nozzle needle.

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