Discharge state inspection method, discharge state inspection device, and droplet inspection system

Abstract

Problem: To provide a technology that makes it possible to simultaneously inspect droplet discharge amount and flight state.　Solution: A discharge state inspection method, a discharge state inspection device, and a droplet inspection system involve an emission step for emitting droplets from a discharge device (10) toward a weighing scale (30), an event data acquisition step for acquiring event data for the droplets emitted from the discharge device (10) by means of an event sensor (20), a weighing step for acquiring weight value data for the droplets emitted at the emission step from the weighing scale (30), and an inspection step for inspecting the discharge amount of the discharge device (10) on the basis of the event data and the weight value data. At the inspection step, the discharge device (10) is also inspected for flight abnormalities on the basis of the event data.

Description

[Technical Field]

[0001] The present invention relates to a method for inspecting a discharge state, a device for inspecting a discharge state, and a droplet inspection system. [Background technology]

[0002] Conventionally, there has been known a discharge device (or dispenser) that applies a liquid material such as a chemical solution or a liquid crystal by dropping. In this type of discharge device, the liquid material hardens or denatures, and the viscosity of the liquid material changes with temperature change. of The discharge amount may vary due to changes in the temperature, etc. For this reason, the discharge amount of the liquid material is periodically measured using a weight meter such as an electronic balance, and the discharge parameters are adjusted to correct the discharge amount (see, for example, paragraph

[0033] of Patent Document 1).

[0003] On the other hand, Patent Document 2 proposes a method for adjusting the amount of liquid crystal dispensed by continuously feeding back the amount of liquid crystal dispensed to a liquid crystal dispenser based on images of the dispensed liquid crystal taken with a high-speed camera, in order to omit the measurement process using a weighing scale. However, even with a high-speed camera, it is difficult to capture a droplet accurately because only a few images can be taken per droplet (see paragraph 3 of Patent Document 3).

[0004] Furthermore, as the speed of high-speed cameras increases, the volume of image data also increases, which poses a problem as the time required for image processing increases.

[0004] Therefore, Patent Document 3 proposes using an event sensor, instead of a high-speed camera, which has pixels that photoelectrically convert optical signals and output pixel signals, and outputs temporal brightness changes in the optical signals as event signals based on the pixel signals. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2009-190012 [Patent Document 2] Japanese Patent Application Laid-Open No. 2006-195402 [Patent Document 3] Japanese Patent Publication No. 2022-54057 Summary of the Invention [Problem to be solved by the invention]

[0006] When a discharge device is used for a long period of time, droplet flight abnormalities may occur due to the influence of liquid material adhering to the nozzle. If measurements are performed using a weighing scale when flight abnormalities have occurred, the droplets may not land on the weighing scale, making it impossible to accurately measure the discharge amount. Specifically, the weight per droplet may be calculated inaccurately due to the presence of droplets that do not land on the weighing scale, making it impossible to make appropriate corrections.

[0007] Furthermore, changes in the droplet flight direction or flight speed can cause misalignment of the droplet's landing position on the workpiece or the formation of satellites (unintended scattering).When measuring the discharge amount and measuring the flight direction and flight speed using separate measuring devices, there is an issue of wasted liquid material each time a measurement is performed with each device.

[0008] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a method for inspecting a discharge state, an apparatus for inspecting a discharge state, and a droplet inspection system that are capable of inspecting the amount of droplet discharged and the flight state simultaneously. [Means for solving the problem]

[0009] [1] The ejection state inspection method of the present invention includes an ejection step of ejecting droplets from an ejection device toward a weight meter, an event data acquisition step of acquiring event data of the droplets ejected from the ejection device using an event sensor, a weighing step of acquiring weight value data of the droplets ejected in the ejection step from the weight meter, and an inspection step of inspecting the ejection amount of the ejection device based on the event data and the weight value data, and is characterized in that in the inspection step, flight abnormalities of the ejection device are inspected based on the event data. [2] In the ejection state inspection method of [1] above, the inspection process may be characterized in that the number of droplets having flight abnormalities is calculated based on the event data, and the ejection amount per droplet of the ejection device is inspected based on the calculated number of droplets. [3] In the ejection state inspection method according to [2] above, the inspection step may be characterized in that droplets having an abnormal flight speed are detected and inspected based on the event data. [4] In the ejection state inspection method of [2] or [3] above, the inspection step may be characterized in that the number of droplets that do not land on the weighing scale is detected based on the flight direction of the droplets detected from the event data, and the ejection amount of the ejection device is inspected based on the number of droplets excluding the number of droplets that do not land on the weighing scale. [5] In the ejection state inspection method of [2] to [4] above, in the inspection process, the calculated number of droplets may be multiplied by a target ejection amount to calculate a reference weight, and the weight value data may be compared with the reference weight, and if the difference exceeds a set threshold, it may be determined to be abnormal. [6] In the ejection state inspection method according to any one of [1] to [5] above, the inspection step may be characterized by carrying out the following steps: (A) labeling the detected droplets based on the event data; (B) detecting droplets having an abnormal flight speed based on the event data; (C) detecting the number of droplets that do not land on the weighing scale based on the flight direction of the droplets detected from the event data; (D) calculating the number of droplets having different labels among the droplets detected in (B) and (C); and (E) a step of determining that there is a flight abnormality when the ratio of the number of droplets calculated in (D) to the number of droplets ejected in the ejection step is equal to or greater than a certain number. [7] The ejection state inspection method of [6] above may further include a step of inspecting the ejection amount per droplet of the ejection device based on the number of droplets obtained by subtracting the number of droplets calculated in (D) from the number of droplets ejected in the ejection step. [8] In any of the above-mentioned ejection state inspection methods [1] to [7], in the ejection step, the weight of one droplet ejected from the ejection device may be less than the measurement resolution of the weighing scale, and the ejection of the droplet from the ejection device may be repeated at least until the weight exceeds the measurement resolution of the weighing scale. [9] In any of the ejection state inspection methods [1] to [8] above, the ejection step may be characterized in that the ejection of the droplets from the ejection device is repeated until the ejection resolution exceeds at least 10 times the measurement resolution.

[0010]

[10] The ejection state inspection device of the present invention includes: a storage device storing an ejection state inspection program for inspecting the ejection amount of an ejection device that ejects droplets; and a processing device that executes the ejection state inspection program. of The ejection state inspection device includes: a means for acquiring, from an event sensor, event data of droplets ejected from the ejection device arranged opposite a weight meter; a means for acquiring, from the weight meter, weight value data of the droplets ejected from the ejection device; and a droplet inspection means for inspecting the ejection amount of the ejection device based on the weight value data and the event data, wherein the droplet inspection means inspects flight abnormalities of the ejection device based on the event data.

[11] The ejection state inspection system of the present invention comprises an ejection device having an ejection port that ejects liquid material in droplet form; a weight meter that measures the weight of the liquid material ejected from the ejection device and outputs weight value data; an event sensor that outputs event data according to the amount of change in the amount of light received from the light receiving range between the ejection port and the weight meter; and an ejection state inspection device that inspects the ejection amount of the ejection device based on the weight value data output by the weight meter, and is characterized in that the ejection state inspection device inspects flight abnormalities of the ejection device based on the event data.

[12] In the discharge state inspection system according to

[11] above, the event sensor is configured to include a first event sensor and a second event sensor, the first event sensor is arranged in an X direction perpendicular to a Z direction toward the discharge device and the weighing scale, and 2 The event sensor may be arranged in a Y direction that is perpendicular to the Z direction toward the discharge device and the weighing scale and perpendicular to the X direction. [Effects of the Invention]

[0011] According to the present invention, the droplet ejection amount and flight state can be inspected simultaneously, which makes it possible to reduce the amount of liquid material discarded in order to inspect the ejection state. [Brief explanation of the drawings]

[0012] [Figure 1] 1 is a diagram illustrating a droplet inspection system according to an embodiment. [Figure 2] FIG. 10 is a diagram illustrating a detection range of the EVS camera according to the embodiment. [Figure 3] FIG. 1 is a diagram illustrating a coating device according to an embodiment. [Figure 4] 1 is a cross-sectional side view of a main part of a discharge state inspection device according to an embodiment. [Figure 5] FIG. 10 is a cross-sectional side view of a main part of a discharge state inspection device according to a modified example. [Figure 6] 10 is a flowchart illustrating an inspection process according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0013] Hereinafter, an embodiment of the present invention will be described. As shown in FIG. 1, the droplet inspection system 1 of the embodiment includes a discharge device 10, an EVS camera 20, a weight scale 30, and a discharge state inspection device 40.

[0014] The discharge device 10 discharges the liquid material in droplet form from a discharge port. The discharge device 10 may be an air type that discharges by the action of compressed gas, a jet type that discharges by the action of a rod that reciprocates within a liquid chamber, or a plunger type that discharges by the action of a plunger that slides within a measuring section.

[0015] The EVS camera 20 is an event-based camera equipped with an event sensor that photoelectrically converts an optical signal and outputs a temporal change in brightness of the optical signal as an event signal (event data). The event sensor is an asynchronous sensor that outputs event data only when an event occurs, and is sometimes called an EVS (event-based vision sensor). Cameras equipped with synchronous image sensors, such as CD cameras, output frame data, which is image data for one frame (screen), at the frequency of a vertical synchronization signal, whereas event sensors (or EVS) detect changes in the brightness of each pixel and output only the changed data in combination with coordinate and time information, enabling high-speed, low-latency data output and, as the data volume is small, enabling high-speed image processing.

[0016] The EVS camera 20 of the embodiment includes a storage device (not shown) that stores event data of the temporal brightness change of the droplets D ejected from the discharging device 10, and outputs the stored event data to the discharge state inspection device 40. The EVS camera 20 outputs event data that links coordinates xi and yi that represent the position of the pixel where the event occurred, and the brightness change mi as an event, with the time ti at which the event occurred. The EVS camera 20 has a built-in clock, and the count value of the clock is recorded as the time ti of the event.

[0017] The EVS camera 20 of the embodiment is disposed in a direction (X direction or Y direction) perpendicular to the Z direction toward the discharge device 10 and the weighing scale 30. The EVS camera 20 of the embodiment is equipped with an illumination device 21 having a plurality of light sources arranged in a ring for illuminating the droplet D. The EVS camera 20 is disposed between the discharge device 10 at the weighing position and the weighing scale 30. When the droplet D passes within the angle of view of the EVS camera 20, a change in brightness accompanying the movement of the droplet D is detected as an event and stored in a storage device. The EVS camera 20 may be configured with two event-based cameras that capture the droplet D from two orthogonal directions (see FIG. 5 described below).

[0018] The weighing scale 30 is a device, such as an electronic balance, that measures the weight of the droplets D ejected from the ejection device 10 and outputs the weight value data to the ejection state inspection device 40. The weighing scale 30 includes a measuring dish 31 that collects the droplets D from the ejection device 10.

[0019] The discharge state inspection device 40 is a computer or programmable logic controller (PLC) equipped with a processing device 41, a storage device 42 that stores a discharge state inspection program P, and a communication device 43, and inspects the discharge state of the discharge device 10 by executing the discharge state inspection program P. The discharge state inspection device 40 is electrically connected to an input device and an output device (not shown). The input device may be, for example, a keyboard or a mouse, and the output device may be, for example, a display. The discharge state inspection device 40 is also configured to be able to communicate with an external information terminal via the communication device 43.

[0020] The ejection state inspection program P includes an event acquisition means for acquiring event data of droplets D ejected from the ejection device 10 arranged opposite the weight meter 30 from the EVS camera 20, a metering ejection command means for causing the ejection device 10 to eject droplets D for measurement a predetermined number of times, a weight acquisition means for acquiring weight value data of the droplets D ejected from the ejection device 10 from the weight meter 30, and a droplet inspection means for inspecting the ejected droplets based on the event data.

[0021] When the processing device 41 executes the event acquisition means, the EVS camera 20 starts recording event data. When the processing device 41 executes the metered discharge command means, it sends a discharge command to the discharge device 10 to eject droplets D a specified number of times. The discharge command may be configured to send a command the same number of times as the specified number, or may be configured to execute the specified number of discharges by sending a single discharge command. In this case, it is preferable to repeat the discharge of droplets D until the amount reaches 10 to 1000 times the measurement resolution of the weighing scale 30.

[0022] The droplet inspection means can calculate the number of droplets, the flight speed and flight direction of the droplets based on the event data, and can calculate the appropriate droplet D stored in advance in the storage device 42. m The droplet inspection means inspects the discharge state of the discharge device 10 by comparing the weight value data measured for the same droplet and the event data. The droplet inspection means also inspects the average discharge amount per droplet or the appropriate droplet D m The reference weight is calculated by multiplying the discharge amount by the above-mentioned specified number of times. When the droplet inspection means determines that there is an abnormality in the discharge state of the discharge device 10, it displays a message describing the details of the abnormality on an output device (not shown) or an external information terminal (not shown). Here, the droplet inspection means may be configured to automatically generate control information for correcting abnormalities in the discharge amount and / or the flight state of the droplets of the discharge device 10 based on the details of the determined abnormality, and output the control information to the discharge device 10.

[0023] FIG. 2 is a diagram illustrating the detection range 22 of the EVS camera 20. When inspecting the discharge state of the discharge device 10, the discharge device 10 is placed vertically above the weighing scale 30 at a predetermined distance, and the EVS camera 20 is installed between the discharge device 10 and the weighing scale 30. As shown in FIG. 2, the EVS camera 20 is preferably placed so that the detection range 22 is located above the midpoint of the line connecting the discharge outlet of the nozzle 11 of the discharge device 10 at the weighing position and the weighing pan 31 of the weighing scale 30. This is because droplets D that have experienced flight abnormalities travel a longer flight distance and move away from the vertical line passing through the center of the discharge outlet, and therefore, if the detection range 22 is set lower, event data may not be acquired.

[0024] The droplet inspection means of the discharge state inspection program P estimates the landing position of droplet D from the flight direction of droplet D passing through the detection range 22. In Fig. 2, by estimating the landing positions of droplets D1 to D4 from the event data of droplets D1 to D4 in the detection range 22, it is determined that D1 and D2 are within the range of the measuring dish 31, and that D3 and D4 are outside the range of the measuring dish 31. If it is determined that droplet D has landed outside the range of the measuring dish 31, the number of droplets that have landed outside the range is subtracted from the number of droplets ejected for measurement (command value).

[0025] The ejection state inspection device 40 also generates an event image based on the event data output from the EVS camera 20 and detects droplets to be tracked from the event image. The ejection state inspection device 40 performs a labeling process to attach labels such as D1, D2, D3, etc. to the detected droplets. By attaching labels to the detected droplets, even if abnormalities are found in both the flight speed and flight direction, multiple abnormal droplets with the same label are not counted multiple times, allowing the droplet counting process to be performed appropriately.

[0026] The discharge state inspection device 40 also has the function of generating a display droplet image for an operator to monitor the droplets and displaying it on an output device (not shown) such as a display. The display droplet image is generated by a known method, for example, based on a positive image based on a positive event and a negative image based on a negative event (see Patent Document 3). Unlike frame-format image data (frame data) that is output at a frame cycle in synchronization with a vertical synchronization signal, event data is output each time an event occurs, and therefore needs to be converted into frame data in order to generate the display droplet image.

[0027] The present invention will be described in detail below with reference to examples, but the technical concept of the present invention is not limited to these examples.

[0028] <Example> (Coating device 101) 3, the coating device 101 of the embodiment is mainly composed of a discharge device 110 that discharges the liquid material, a relative drive device 130 that relatively moves the discharge device 110 and a work table 140 on which the work W is placed, a conveying device 120, a dump table 150, a coating control device 160, and a droplet inspection device 201. For ease of explanation, in FIG. 3, a cover 180 is drawn with a dotted line and part of it is not shown.

[0029] The discharge device 110 is a jet type discharge device that applies inertial force to the liquid material by rapidly bringing a discharge member (valve body) close to or colliding with the bottom surface (valve seat) of a liquid chamber, causing the liquid material to fly and be discharged from a discharge port. The discharge device 110 is equipped with a nozzle 111 for discharging the liquid material, and its operation is controlled by a coating control device 160. The liquid material discharged from the nozzle 111 is applied to the workpiece W in droplets.

[0030] The relative drive device 130 is composed of an X drive device 131 that moves the discharge device 110 and the work table 140 relatively in the X direction, a Y drive device 132 that moves the discharge device 110 and the work table 140 relatively in the Y direction, and a Z drive device 133 that moves the discharge device 110 and the work table 140 relatively in the Z direction.

[0031] In this embodiment, the Y-drive device 132 is provided on the upper surface of the base 170 to extend in the Y direction, and the X-drive device 131 is provided on the Y-drive device 132 to extend in the X direction. The Z-drive device 133 is provided on the X-drive device 131, and the discharge device 110 is provided on the Z-drive device 133. The work table 140 is installed on the upper surface of the base 170 so as to be parallel to the Y-drive device 132 and located below the X-drive device 131. This allows the discharge device 110 and the workpiece W on the work table 140 to move relatively in the X, Y, and Z directions. The relative drive device 130 is controlled by the coating control device 160 to move the tip of the nozzle 111 of the discharge device 110 to any position on the workpiece W at any speed. The relative drive device 130 can be, for example, a device combining an electric motor such as a servo motor or a stepping motor with a ball screw, a device using a linear motor, or a device that transmits power via a belt or chain.

[0032] The conveying device 120 is composed of a rail 121, a transmission element (not shown), and a conveying drive device 122. The rail 121 is composed of two members extending parallel to the Y direction. The rail 121 is installed so that the distance between the two members is the same as the distance between one side of the workpiece W. The rail 121 is provided with a transmission element that functions to convey the workpiece W along the extension direction of the rail 121. The transmission element may be a belt or a chain. The transmission element is driven by a conveying drive device 122. The conveying drive device 122 may be an electric motor such as a servo motor or a stepping motor. The workpiece W is conveyed along the rail 121 in a conveying direction 123 by the action of the transmission element driven by the conveying drive device 122. The conveying device 120 is connected to a coating control device 160, which controls the conveying speed, start and stop of conveying, etc.

[0033] The work table 140 is made of a rectangular parallelepiped member and can be raised and lowered by an elevator (not shown). The work table 140 is installed so as to be sandwiched between the rails 121 of the transport device 120. The width of the work table 140 in the X direction is slightly smaller than the distance between the rails 121 of the transport device 120 so as not to come into contact with the rails 121 of the transport device 120. When transporting the work W, the work table 140 lowers to a position where it does not come into contact with the work W. When performing a coating operation on the work W, the work table 140 rises so as to sandwich and fix the work W between itself and a pressure plate (not shown) provided on the rails 121. To more securely fix the work W, for example, a suction fixing mechanism may be provided, which opens multiple holes from the inside of the work table 140 to the top surface and sucks air through the holes to fix the work W.

[0034] The waste shot table 150 is installed near the work table 140 on the top surface of the base 170, within the range where the relative drive device 130 can move. The waste shot table 150 has a waste shot area on its surface where the liquid material can be applied. The waste shot table 150 is used to apply the liquid material to the waste shot area and remove dried liquid material from the nozzle tip before starting the application work. It is also possible to apply the liquid material to the waste shot area under the same conditions as the workpiece W, and adjust the liquid material to be applied to the workpiece W so that it has the desired shape and dimensions. Alternatively, the waste shot table may be constructed by separately preparing a plate-shaped body for waste shots and fixing the plate-shaped body for waste shots using the suction fixing mechanism described above.

[0035] The coating control device 160 is an information processing device (computer) including a processing device, a storage device that stores the coating program and the above-mentioned discharge state inspection program P, and a communication device. The coating control device 160 controls the operations of the discharge device 110, the conveying device 120, and the relative drive device 130 by executing the coating program. The coating control device 160 also functions as the above-mentioned discharge state inspection device that inspects the discharge state of the discharge device 110 by executing the discharge state inspection program P. The coating control device 160 is electrically connected to an input device and an output device (not shown). In this embodiment, the input device and the output device are configured as a single touch panel (not shown). The coating control device 160 may be configured by multiple physically separate control devices. For example, the coating control device 160 may be configured by a first control device including a storage device that stores the coating program, a processing device, and a communication device, and a second control device including a storage device that stores the discharge state inspection program P, a processing device, and a communication device.

[0036] The coating apparatus 101 of the embodiment may be provided with an imaging device and a length measuring device (not shown). The imaging device may be, for example, a CCD camera, and is used to capture images of components and identification marks on the workpiece W, and the applied liquid material. The length measuring device may be, for example, a laser displacement meter, and is used to measure the distance to the surface of the workpiece W, the surface of components on the workpiece W, or the surface of the liquid material applied to the workpiece W.

[0037] The imaging device and the length measuring device are provided on the Z drive device 133 together with the dispensing device 110, and can move relative to the workpiece W on the work table 140. Here, the imaging device and the length measuring device may be provided integrally by a mounting plate. The imaging device and the measuring device are connected to the coating control device 160, which can control their operation and store and process the measurement results. Image data captured by the imaging device and distance data measured by the length measuring device are used to check the state of the applied liquid material and to position the nozzle of the dispensing device 110 relative to the workpiece W, etc.

[0038] The coating apparatus 101 of the embodiment can be connected to a teaching terminal (not shown) to teach the position of the relative drive device 130, the operation of the discharge device 110, and the like to the coating control device 160. The coating control device 160 can store and play back a coating program that sequentially arranges multiple related teaching contents into a single program. In other words, the coating control device 160 can operate the discharge device 110 and the relative drive device 130 in accordance with the teaching contents. The teaching terminal can be, for example, a dedicated terminal equipped with a simple display device and multiple switches, or a personal computer with dedicated software installed. The teaching terminal can start and stop the operation of the coating apparatus 101 based on the coating program stored in the coating control device 160. Instead of the teaching terminal, teaching can also be performed using the above-mentioned coating control device 160 and a touch panel.

[0039] The top of the stand 170 on which the discharge device 110, work table 140, relative drive device 130, etc. are mounted is covered with a cover 180. Providing the cover 180 prevents dust from entering the coating device 101 and prevents inadvertent contact between the operator and moving parts such as the relative drive device 130. The cover 180 may be provided with an openable / closable door to allow the operator to easily access the inside of the coating device 101. Furthermore, the aforementioned touch panel may be provided on the outer surface of the cover 180 so that it can be operated from outside the cover 180. Furthermore, an opening may be provided in the cover 180 for carrying the workpiece W into and out of the cover 180.

[0040] (Droplet Inspection Device 201) The droplet inspection device 201 includes a housing 210, an EVS camera 220, and a weigh scale 230. The EVS camera 220 has pixels that photoelectrically convert optical signals and output pixel signals, and is equipped with an event sensor (not shown) that outputs temporal brightness changes in the optical signals as event data to the coating control device 160 based on the pixel signals, a storage device (not shown) that stores the event data, and an annular lighting device 221. The weighing scale 230 is an electronic balance having a weighing pan 231, and outputs measured weight value data to the coating control device 160.

[0041] FIG. 4 is a cross-sectional side view of the main part of the droplet inspection device 201. The rectangular parallelepiped housing 210 has a space surrounded by a top plate 211, four side plates 212, and a bottom plate 213. An EVS camera 220 equipped with a ring-shaped lighting device 221 and a lens 222 is attached to the bottom surface of the top plate 211, and a weighing scale 230 is placed on the bottom plate 213. A circular through-hole 214 is provided in the top plate 211 directly above the measuring pan 231. The through-hole 214 is large enough to allow the discharge device 110 to enter, but it need only be large enough to allow at least the nozzle provided at the tip of the discharge device 110 to enter.

[0042] When the inspection process for checking the discharge state is carried out, the relative drive device 130 is driven to move the discharge device 110 vertically above the weighing pan 231 of the weighing scale 230. After that, the Z drive device 133 is operated to move the discharge device 110 downward, and the through-hole of the droplet inspection device 201 is 21 4 Discharge device 1 10 enters its interior.

[0043] By the EVS camera 220 detecting the discharge device 110, it is possible to obtain the relationship between the coordinates (inspection coordinates) calculated from the detection event of the EVS camera 220 and the coordinates (application coordinates) of the relative drive device 130 corresponding to these coordinates. After the EVS camera 220 detects the tip position of the discharge device 110, the discharge device 110 is moved upward, and the coordinates of the relative drive device 130 when the tip of the nozzle 111 reaches the detection limit position at the upper end of the EVS camera 220 are stored in a storage device as reference coordinates (measurement position). However, the inspection process can be performed with the discharge device 110 at the reference coordinates or a position lowered from the reference coordinates, or at a position raised from the reference coordinates (i.e., any position vertically above the measuring pan 231 can be the measurement position). In either case, since a correspondence is established between the coordinates (inspection coordinates) of the EVS camera 220 and the coordinates (application coordinates) of the relative drive device 130, it is possible to determine whether or not the droplets will land on the measuring dish 231 from the droplet ejection direction detected by the EVS camera 220.

[0044] FIG. 5 is a cross-sectional side view of a main part of a droplet inspection device 201A according to a modified example. The droplet inspection device 201A includes a first EVS camera 220A that captures images in a first direction (X direction) and a second EVS camera 220B that captures images in a second direction (Y direction) perpendicular to the first direction. The first EVS camera 220A includes an annular lighting device 221A and a lens 222A. Similarly, the second EVS camera 220B includes an annular lighting device 221B and a lens 222B. By acquiring event data of droplets D passing through the imaging range in the X and Z directions (XZ plane) using the first EVS camera 220A and acquiring event data of droplets D passing through the imaging range in the Y and Z directions (YZ plane) using the second EVS camera 220B, it is possible to detect deviations in flight direction in the X and Y directions. Furthermore, in the case of a single EVS camera, it is necessary to correct the deviation in the depth direction in the detection data (i.e., the front is detected as larger and the back is detected as smaller), but in a modified example using two EVS cameras 220A, 220B, it is possible to detect the flight state of the droplets more accurately.

[0045] (Inspection process) The inspection process is performed at a predetermined correction period or at an arbitrary timing in response to a user command. The inspection period is set, for example, based on time information input by the user, the number of processed works W, etc.

[0046] The inspection process will be explained using the flowchart in FIG. When the inspection process starts, the coating control device 160 drives the relative drive device 130 to move the discharging device 110 to a weighing position above the weighing scale 230 (S101). Next, the coating control device 160 executes the event acquisition means described above to start sensing by the EVS camera 220 (S102). This makes it possible to store event data of brightness changes accompanying the movement of the droplets D discharged from the discharging device 110 in the storage device of the EVS camera 220.

[0047] The coating control device 160 executes the metering and dispensing command means to execute an ejection step in which the liquid material to be measured is continuously ejected in droplets from the ejection device 110 toward the measuring dish 231 of the weighing scale 230 (S103). In this ejection step, since the weight of one droplet ejected from the ejection device 110 is less than the measurement resolution of the weighing scale 230, ejection of droplets D from the ejection device 110 is repeated until the weight exceeds at least 10 times the measurement resolution of the weighing scale 230.

[0048] After the injection process is completed, the coating control device 160 acquires a series of event data from the EVS camera 220 and weight value data from the weighing scale 230, and stores the data in the storage device (S104). Here, the event data may be configured to be sequentially transmitted from the EVS camera 220 to the coating control device 160 during the injection process. The coating control device 160 executes the droplet inspection means to generate an event image based on the event data, and detects droplets to be tracked from the event image and attaches labels to them (S105).

[0049] The coating control device 160 executes the droplet inspection means to count the number of droplets that are at least abnormal in flight state based on the event data, and inspects the discharge state of the discharge device 110 (S106). When detecting the number of abnormal droplets, the speed of each droplet D is also calculated based on the event data, and any droplets with an abnormal speed are judged to be a speed abnormality. The coating control device 160 performs a test in advance to measure the speed of droplets D with the same discharge amount under appropriate discharge conditions. m Event data and droplet D m The velocity of droplet D is stored in the memory device. m The speed (reference speed) of each droplet D is compared with the measured speed, and if the difference is equal to or less than a threshold (for example, ±5% of the reference speed), it is judged to be normal, and if it exceeds the threshold, it is judged to be abnormal, and the judgment result is stored in a storage device. Here, the number of droplets judged to be abnormal may be subtracted from the number of droplets ejected in the ejection process, and the number of droplets obtained by this subtraction may be used to perform a droplet weight inspection (S108) described below.

[0050] The coating control device 160 executes the droplet inspection means to detect and inspect the flight direction of each droplet D based on the event data (S107). Specifically, the flight direction of the droplet D is calculated from the coordinate data of the droplet D at multiple points in time, and is determined to be normal if the measuring dish 231 is present on an extension of the calculated flight direction, and is determined to be abnormal if the measuring dish 231 is not present on an extension of the flight direction, and the determination result is stored in a storage device. Alternatively, the coating control device 160 may be configured to determine that the flight direction is normal if the difference between the vertical direction and the calculated flight direction is equal to or less than a threshold (for example, ±5%), and to determine that the flight direction is abnormal if it exceeds the threshold, and store the determination result in a storage device.

[0051] The coating control device 160 executes the droplet inspection means to inspect the weight of the droplet D based on the weight value data (S108). The coating control device 160 calculates the discharge amount per droplet by using the number obtained by subtracting the number of droplets that did not land on the measuring dish 231 calculated in S107 from the total number of droplets detected in S106. Here, the discharge amount per droplet may be calculated by dividing the discharge amount by the number obtained by subtracting the number of droplets determined to have an abnormal speed in S106 and the number of droplets determined not to land on the measuring dish 231 in S107 from the number of discharges specified by the measured discharge command means. At this time, if droplets with the same label are determined to be abnormal in S106 and S107, duplicate counting is prevented.

[0052] The calculated discharge amount per droplet is compared with the target discharge amount per time to be discharged by execution of the metered discharge command means (the amount to be discharged in one time), and if the difference is less than a threshold (for example, ±5%) it is determined to be normal, and if it exceeds the threshold it is determined to be abnormal, and the determination result is stored in the storage device. Alternatively, the number obtained by multiplying the amount to be discharged in one time (the target discharge amount) by the number of droplets that have landed on the measuring dish 231 may be used as the reference weight, and the weight value data may be compared with the reference weight, and if the difference is less than a threshold (for example, ±5%) it is determined to be normal, and if it exceeds the threshold it is determined to be abnormal.

[0053] If no abnormality is detected in any of the droplet number inspection in S106, the flight direction inspection in S107, and the droplet weight inspection in S108, a message informing that no abnormality was detected is displayed on an output device (not shown), and the end time and the fact that the inspection was completed normally are stored in a storage device (S109, 110). If an abnormality is detected in any of the droplet number inspection in S106, the flight direction inspection in S107, and the droplet weight inspection in S108, a message informing that the inspection was completed abnormally is displayed on an output device (not shown), and the end time and the fact that the inspection was completed abnormally are stored in a storage device (S109, 111). In S109, a reference number for the number of abnormal droplets may be set for each of the droplet number inspection in S106, the flight direction inspection in S107, and the droplet weight inspection in S108, and an abnormality may be determined to have occurred only if the reference number is exceeded. For example, the presence or absence of an abnormality in the number of droplets may be determined by whether the total number of ejections determined by the ejection command issued during the ejection process is equal to or less than a reference number (e.g., 2% or 3%) multiplied by a certain percentage.

[0054] According to the coating device 101 of the embodiment described above, the flight state of the droplets can be confirmed by detecting the plurality of droplets D discharged toward the weight meter 230 with the EVS camera 220, and at the same time, the droplets used to confirm the flight state can be weighed with the weight meter 230 and used to correct the discharge amount. Therefore, the liquid material ejected to correct the discharge amount is not wasted, and the time required to adjust the discharge amount and the time required to confirm the flight state can be shortened, which contributes to improved productivity. In addition, the event data acquired by the EVS camera 220 is compared with the frame data. Since the amount of data to be handled is small, image processing of the droplets D can be performed at high speed. That is, even in a jet type ejection device that ejects droplets at tens or hundreds of shots per second, the droplets can be tracked by the EVS camera 220. but Therefore, it is possible to accurately calculate the amount of liquid ejected per ejection, excluding droplets that do not come into contact with the measuring dish 231.

[0055] While the preferred embodiments of the present invention have been described above, the technical scope of the present invention is not limited to the above-described embodiments. Various modifications and improvements can be made without departing from the technical spirit of the present invention, and such modifications and improvements are also included within the technical scope of the present invention.

[0056] For example, in the droplet number inspection (S106), the total number of droplets ejected in the ejection process is not counted, but only the number of droplets determined to have an abnormal flight speed is counted, and the presence or absence of an abnormality may be determined based on whether the number is equal to or less than a reference number (for example, 2% or 3%) obtained by multiplying the number of shots for which an ejection command was issued in the ejection process by a certain percentage. Specifically, if the number of shots for which an ejection command was issued in the ejection process is 1000, and the number of droplets determined to have an abnormal flight speed is 20 (reference number 2%) or 30 (reference number 3 %), it is determined that an abnormality exists. As another variation, for example, a process may be added in which the number of droplets to be ejected per unit time (target number of droplets) is set, and the presence or absence of an abnormality is determined based on whether the difference between the total number of droplets counted by the droplet inspection means and the target number of droplets is less than a value obtained by multiplying the target number of droplets by a certain percentage (for example, 2% or 3%). [Explanation of symbols]

[0057] 1. Droplet Inspection System 10 Discharge device 11 nozzles 20 EVS cameras 21 Lighting equipment 30 Weight scale 31 Weighing pan 40 Discharge status inspection device 101 Coating equipment 110 Discharge device 111 Nozzle 201 Droplet Inspection Device 220 EVS camera 221 Lighting equipment 230 Weight scale 231 Measuring pan D droplet double work

Claims

1. an ejection step of ejecting droplets from the ejection device toward a weighing scale; an event data acquisition step of acquiring event data of droplets ejected from the ejection device by an event sensor; a weighing step of acquiring weight value data of the droplets ejected in the ejecting step from the weighing scale; an inspection step of inspecting the discharge amount of the discharge device based on the event data and the weight value data, The ejection state inspection method is characterized in that, in the inspection step, the ejection device is inspected for flight abnormalities based on the event data.

2. The ejection state inspection method according to claim 1, characterized in that in the inspection process, the number of droplets with flight abnormalities is calculated based on the event data, and the ejection amount per droplet of the ejection device is inspected based on the calculated number of droplets.

3. 3. The ejection state inspection method according to claim 2, wherein in the inspection step, droplets having an abnormal flight speed are detected and inspected based on the event data.

4. The ejection state inspection method according to claim 2, characterized in that in the inspection process, the number of droplets that do not land on the weighing meter is detected based on the flight direction of the droplets detected from the event data, and the ejection amount of the ejection device is inspected based on the number of droplets excluding the number of droplets that do not land on the weighing meter.

5. The ejection state inspection method according to claim 2, characterized in that in the inspection process, a reference weight is calculated by multiplying the number of droplets that have landed on the weighing pan of the weighing scale by the target ejection amount, and the weight value data is compared with the reference weight, and if the difference exceeds a set threshold, it is determined to be an abnormality.

6. 2. The method for inspecting a discharge state according to claim 1, wherein the inspection step includes the following steps: (A) labeling the detected droplets based on the event data; (B) detecting droplets having an abnormal flight speed based on the event data; (C) detecting the number of droplets that do not land on the weighing scale based on the flight direction of the droplets detected from the event data; (D) calculating the number of droplets having different labels among the droplets detected in (B) and (C); and (E) a step of determining that there is a flight abnormality when the ratio of the number of droplets calculated in (D) to the number of droplets ejected in the ejection step is equal to or greater than a certain number.

7. The ejection state inspection method according to claim 6, further comprising a step of inspecting the ejection amount per droplet of the ejection device based on the number of droplets obtained by subtracting the number of droplets calculated in (D) from the number of droplets ejected in the ejection step.

8. 8. A method for inspecting an ejection state according to claim 1, wherein in the ejection process, a droplet ejected from the ejection device has a weight that is less than the measurement resolution of the weighing meter, and the ejection of the droplet from the ejection device is repeated at least until the weight exceeds the measurement resolution of the weighing meter.

9. 9. The method for inspecting a discharge state according to claim 8, wherein in the ejection step, the discharge of the droplets from the discharge device is repeated until the measurement resolution exceeds at least 10 times the measurement resolution.

10. A discharge state inspection device comprising: a storage device storing a discharge state inspection program for inspecting a discharge amount of a discharge device that discharges droplets; and a processing device that executes the discharge state inspection program, The ejection state inspection program a means for acquiring event data of droplets ejected from the ejection device from an event sensor, the event data being disposed opposite the weight scale; a means for acquiring weight value data of the droplets ejected from the ejection device from the weight scale; a droplet inspection means for inspecting the discharge amount of the discharge device based on the weight value data and the event data, The ejection state inspection device is characterized in that the droplet inspection means inspects the ejection device for flight abnormalities based on the event data.

11. a discharge device having a discharge port for discharging a liquid material in droplet form; a weight meter that measures the weight of the liquid material discharged from the discharge device and outputs weight value data; an event sensor that outputs event data in response to a change in the amount of light received from a light receiving range between the discharge port and the weighing scale; a discharge state inspection device that inspects the discharge amount of the discharge device based on the weight value data output by the weight meter, A droplet inspection system, wherein the ejection state inspection device inspects the ejection device for flight abnormalities based on the event data.

12. the event sensor comprises a first event sensor and a second event sensor; the first event sensor is disposed in an X direction perpendicular to a Z direction toward the dispensing device and the weighing scale; The droplet inspection system according to claim 11, wherein the second event sensor is arranged in a Y direction perpendicular to the Z direction toward the ejection device and the weight scale and perpendicular to the X direction.

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