X-ray fluorescence analyzer

Abstract

To provide a scanning, wavelength-dispersive fluorescent x-ray analysis device with two spectroscopic elements, which enables spectral measurement with sufficient accuracy and high energy resolution.SOLUTION: A fluorescent x-ray analysis device disclosed herein comprises control means (11) configured to control at least a second rotating mechanism (8B), from between the second rotating mechanism (8B) for rotating a second spectroscopic element (6B) and a third rotating mechanism (8C) for rotating a detector (7), such that split florescent x-ray (4D) is directed into the detector (7) while changing the wavelength of the fluorescent x-ray (4D) split by the second spectroscopic element (6B) during measurement.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a scanning wavelength dispersive X-ray fluorescence analyzer. [Background technology]

[0002] Conventionally, there is a scanning wavelength dispersive X-ray fluorescence analyzer equipped with two spectroscopic elements for use in, for example, X-ray emission spectroscopy, which is one of the state analysis methods. In such an X-ray fluorescence analyzer, measurement with high energy resolution is performed by further spectroscopically separating fluorescent X-rays dispersed by the first spectroscopic element using the second spectroscopic element (see Patent Documents 1 and 2, and Non-Patent Documents 1-3). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 10-232209 [Patent Document 2] Japanese Patent Application Laid-Open No. 2005-140719 [Non-patent literature]

[0004] [Non-Patent Document 1] Y. Gohshi et al., “Applied Spectroscopy”, 1982, 36, p. 171-174 [Non-patent document 2] T. Konishi et al., “Review of Scientific Instruments”, 1991, 62, p. 2588-2592 [Non-patent document 3] RD Deslattes, “Review of Scientific Instruments”, 1967, 38, p. 616-620 Summary of the Invention [Problem to be solved by the invention]

[0005] However, with these X-ray fluorescence analyzers, during measurements to acquire a spectrum, three of the four operations—movement and rotation of the first dispersing element, and movement and rotation of the second dispersing element—must be performed, or the X-ray source and sample must be rotated. These operations make it difficult to obtain highly accurate angular reproducibility for the spectral angle of the fluorescent X-rays.

[0006] The present invention has been made in consideration of the above-mentioned problems in the conventional art, and has as its object to provide a scanning wavelength-dispersive X-ray fluorescence analyzer equipped with two spectroscopic elements that is capable of measuring spectra with sufficiently high accuracy and high energy resolution. [Means for solving the problem]

[0007] In order to achieve the above object, the fluorescent X-ray analyzer of the present invention first includes an X-ray source that irradiates a sample with primary X-rays, a first spectroscopic element that disperses fluorescent X-rays generated from the sample, a second spectroscopic element that further disperses the fluorescent X-rays dispersed by the first spectroscopic element, and a detector that measures the intensity of the fluorescent X-rays dispersed by the second spectroscopic element.

[0008] The apparatus of the present invention includes a first rotation mechanism that rotates the first dispersing element around a first axis that passes through the dispersing surface of the first dispersing element and is perpendicular to the optical path of the fluorescent X-rays from the sample; a movement mechanism that linearly moves the second dispersing element and the detector parallel to the optical path of the fluorescent X-rays from the sample; a second rotation mechanism that rotates the second dispersing element around a second axis that passes through the dispersing surface of the second dispersing element and is parallel to the first axis; and a third rotation mechanism that rotates the detector around the second axis.

[0009] Furthermore, the apparatus of the present invention includes a control means for controlling the first rotation mechanism, the movement mechanism, the second rotation mechanism, and the third rotation mechanism before measurement so that fluorescent X-rays within a predetermined wavelength range generated from a sample are incident on the detector, and for controlling at least the second rotation mechanism of the second rotation mechanism and the third rotation mechanism during measurement while changing the wavelength of the fluorescent X-rays dispersed by the second dispersing element so that the dispersed fluorescent X-rays are incident on the detector.

[0010] According to the device of the present invention, during spectrum measurement (scanning), only the second spectroscopic element is rotated, or only the second spectroscopic element is rotated and the detector is rotated, and since there are few parts that are driven during spectrum measurement, spectrum measurement can be performed with sufficiently high accuracy and high energy resolution.

[0011] In the apparatus of the present invention, it is preferable that fluorescent X-rays generated from a sample pass through a Soller slit having foils stacked in the direction in which the first axis extends and are incident as a diverging beam on the first dispersing element, and that the control means, before measurement, arranges the first dispersing element and the second dispersing element in a (+,+) configuration and rotates the first dispersing element so that the angle of incidence of the fluorescent X-rays on the first dispersing element includes θ0±Δθ, and during measurement, rotates the second dispersing element within a range of 4Δθ so that the angle of incidence of the fluorescent X-rays on the second dispersing element is θ0±Δθ, while rotating the detector in conjunction with the second dispersing element within a range of 6Δθ.

[0012] This first additional configuration enables spectral measurement with sufficiently high accuracy and high energy resolution for fluorescent X-rays in the wavelength range contained in the diverging beam incident on the first dispersing element. This measurement is called high-resolution mode narrow-area measurement to distinguish it from other measurements described later.

[0013] In the device of the first additional configuration, when the control means sets the first dispersing element and the second dispersing element to the (+,+) configuration before measurement, the control means may first set the first dispersing element and the second dispersing element to the (+,-) configuration, rotate the first dispersing element so that the angle of incidence of the fluorescent X-rays on the first dispersing element is θ0, rotate the second dispersing element to set the rotation angle of the second dispersing element at which the intensity measured by the detector is maximized as a reference angle, and then turn the second dispersing element 180 degrees from the reference angle and further rotate it by 2θ0 to set the (+,+) configuration.

[0014] According to this second additional configuration, for the device of the first additional configuration, absolute angle calibration can be performed with high accuracy on the rotation angles of the first dispersing element and the second dispersing element without using a standard sample or the like.

[0015] In the apparatus of the present invention, when high-resolution mode wide-area measurement is specified, the control means may use a Soller slit having foils stacked in the direction of extension of the first axis center and allowing fluorescent X-rays generated from the sample to pass through, and may control the first rotation mechanism, the movement mechanism, the second rotation mechanism, and the third rotation mechanism before measurement so that fluorescent X-rays within a predetermined wavelength range generated from the sample are incident on the detector, and during measurement, may control the first rotation mechanism, the movement mechanism, the second rotation mechanism, and the third rotation mechanism while changing the wavelength of the fluorescent X-rays dispersed by the first dispersing element so that the dispersed fluorescent X-rays are incident on the detector.

[0016] According to this third additional configuration, during spectrum measurement, the wavelength of the fluorescent X-rays dispersed by the first dispersing element is changed, and not only the second and third rotation mechanisms but also the first rotation mechanism and movement mechanism are controlled so that the dispersed fluorescent X-rays are incident on the detector, thereby enabling spectrum measurement with higher energy resolution for fluorescent X-rays over a wider wavelength range than the high-resolution mode narrow-area measurement using the device with the first additional configuration. This measurement is called high-resolution mode wide-area measurement.

[0017] The apparatus of the present invention may further include a retraction mechanism that retracts the second dispersive element from the optical path of the fluorescent X-rays, and when a low-resolution mode is designated, the control means may control the first rotation mechanism, the retraction mechanism, the movement mechanism, and the third rotation mechanism before measurement so that fluorescent X-rays within a predetermined wavelength range generated from a sample are incident on the detector without passing through the second dispersive element, and during measurement, may control at least the first rotation mechanism and the movement mechanism among the first rotation mechanism, the movement mechanism, and the third rotation mechanism while changing the wavelength of the fluorescent X-rays dispersed by the first dispersive element so that the dispersed fluorescent X-rays are incident on the detector.

[0018] According to this fourth additional configuration, the second dispersive element can be retracted and only the first dispersive element can be used to obtain a fluorescent X-ray spectrum using a general wavelength dispersive method. This operation mode is called the low-resolution mode. [Brief explanation of the drawings]

[0019] [Figure 1] 1 is a schematic plan view showing an X-ray fluorescence analyzer according to one embodiment of the present invention. [Figure 2] FIG. 2 is a diagram showing details of the measurement operation in the same device. [Figure 3] 10A and 10B are diagrams showing intermediate stages of the calibration operation in the same device. [Figure 4] FIG. 10 is a diagram showing the completion of the calibration operation in the device. DETAILED DESCRIPTION OF THE INVENTION

[0020] An X-ray fluorescence analyzer according to one embodiment of the present invention will now be described with reference to the drawings. As shown in Fig. 1, which is a schematic plan view, this analyzer includes an X-ray source 3, such as an X-ray tube, that irradiates a sample 1 with primary X-rays 2, a first spectroscopic element 6A that disperses fluorescent X-rays 4A emitted from the sample 1, a second spectroscopic element 6B that further disperses fluorescent X-rays 4C dispersed by the first spectroscopic element 6A, and a detector 7 that measures the intensity of fluorescent X-rays 4D dispersed by the second spectroscopic element 6B.

[0021] This device includes a first rotation mechanism 8A that rotates (spins) the first dispersing element 6A around a first axis O1 that passes through the dispersing surface of the first dispersing element 6A and is perpendicular to the optical path of the fluorescent X-rays 4A from the sample 1, a movement mechanism 9 that linearly moves the second dispersing element 6B and the detector 7 parallel to the optical path of the fluorescent X-rays 4A from the sample 1, a second rotation mechanism 8B that rotates (spins) the second dispersing element 6B around a second axis O2 that passes through the dispersing surface of the second dispersing element 6B and is parallel to the first axis O1, and a third rotation mechanism 8C that rotates (revolves) the detector 7 around the second axis O2. The movement mechanism 9 includes a track section 9a and a movement section 9b that moves linearly on the track section 9a. The movement section 9b carries the second dispersing element 6B, the second rotation mechanism 8B, the detector 7, and the third rotation mechanism 8C.

[0022] Furthermore, this apparatus includes a control means 11 that controls the first rotation mechanism 8A, the movement mechanism 9, the second rotation mechanism 8B, and the third rotation mechanism 8C before measurement so that fluorescent X-rays 4A within a predetermined wavelength range generated from the sample 1 pass through the first spectroscopic element 6A and the second spectroscopic element 6B and enter the detector 7, and that controls at least the second rotation mechanism 8B of the second rotation mechanism 8B and the third rotation mechanism 8C during measurement while changing the wavelength of fluorescent X-rays 4D dispersed by the second spectroscopic element 6B so that the dispersed fluorescent X-rays 4D enter the detector 7. In other words, during spectrum measurement, the second spectroscopic element 6B and the detector 7 are basically rotated, but depending on the wavelength range of the fluorescent X-rays 4A to be measured and the size of the detection surface of the detector 7, it may be possible to measure the wavelength range by rotating only the second spectroscopic element 6B without rotating the detector 7.

[0023] As described above, according to the device of the present invention, during spectrum measurement (scanning), only the second spectroscopic element 6B is rotated, or only the second spectroscopic element 6B and the detector 7 are rotated, and since the number of parts that are driven during spectrum measurement is small, spectrum measurement can be performed with sufficiently high accuracy and high energy resolution.

[0024] Furthermore, in this apparatus, fluorescent X-rays 4A generated from the sample 1 pass through a solar slit 5 having foils stacked in the direction in which the first axis O1 extends and are incident on the first dispersing element 6A as a diverging beam 4B (shown as a single straight line in FIG. 1 for simplicity's sake) and are controlled by the control means 11 to arrange the first dispersing element 6A and the second dispersing element 6B in a (+,+) configuration before measurement and rotate the first dispersing element 6A using the first rotation mechanism 8A so that the angle of incidence of the fluorescent X-rays on the first dispersing element 6A encompasses θ0±Δθ; during measurement, the control means 11 rotates the second dispersing element 6B using the second rotation mechanism 8B within a range of 4Δθ so that the angle of incidence of the fluorescent X-rays on the second dispersing element 6B is θ0±Δθ, while simultaneously rotating the detector 7 using the third rotation mechanism 8C within a range of 6Δθ.

[0025] To distinguish this measurement from other measurements described later, we refer to it as the high-resolution mode narrow-area measurement. The (+,+) configuration refers to an arrangement in which the bending direction of the first reflection by the first dispersive element 6A (here, leftward when viewed from above) is taken as +, and the bending direction of the second reflection by the second dispersive crystal 6B is in the same direction. An arrangement in which the bending direction of the second reflection is opposite to the bending direction of the first reflection is referred to as a (+,-) configuration.

[0026] The operation of this device in high-resolution mode narrow-area measurement will now be described in detail. In high-resolution mode narrow-area measurement, a solar slit 5 is used, which has foils stacked in the direction in which the first axis O1 extends (the direction perpendicular to the paper surface in Figures 1 and 2, also referred to as the height direction). This solar slit 5 can limit the divergence in the height direction of the fluorescent X-rays 4A generated from the sample 1 so that it is narrower than the divergence in the horizontal direction, which is perpendicular to the height direction. In other words, the purpose of using this solar slit 5 for the fluorescent X-rays 4A generated from the sample 1 is not to form a parallel beam, but to limit the height direction, that is, to limit the incidence of the fluorescent X-rays 4A at an angle deviating from the horizontal direction on the first dispersing element 6A.

[0027] As a result of this restriction, as shown in Figure 2, due to the aperture height h of the field-limiting slit (represented by the horizontal arrow in Figure 2) and the dimensions and shape of the solar slit 5, fluorescent X-rays 4A emitted from the sample 1 become a diverging beam 4B with an angular range of θ0±α in the horizontal plane, bounded by arrows R1 and R2, and are incident on the entire spectroscopic surface of the first spectroscopic element 6A. This angular range θ0±α (α is approximately 1 degree) is the angular range that can be scanned in a single high-resolution mode narrow-area measurement, that is, the angular range over which a spectrum can be obtained. Note that in expressing angles, the optical path of the fluorescent X-rays 4A and 4B from the sample 1 (shown by the solid line in the center of the two dashed lines in Figure 2) is used as the reference, and the counterclockwise direction is considered positive.

[0028] As shown in FIG. 2, when the predetermined wavelength range to be measured is in the range of θ0±Δθ (Δθ≦α) at ​​the angle of incidence on the first spectroscopic element 6A, the control means 11 in FIG. 1 controls the first rotation mechanism 8A, the movement mechanism 9, the second rotation mechanism 8B, and the third rotation mechanism 8C before measurement so that fluorescent X-rays 4A in that wavelength range pass through the first spectroscopic element 6A and the second spectroscopic element 6B and enter the detector 7.

[0029] This includes the following operations. As shown in Fig. 2, the first dispersing element 6A and the second dispersing element 6B are arranged in a (+, +) configuration, and the first dispersing element 6A is rotated so that the angle of incidence of the fluorescent X-rays on the first dispersing element 6A encompasses θ0±Δθ. Furthermore, the distance between the optical path of the fluorescent X-rays 4A and 4B from the sample 1 (shown in Fig. 2 by a solid line at the center of two dashed lines) and the trajectory of the linear movement of the second axis core O2 by the moving mechanism 9 (shown in Fig. 2 by a dashed line parallel to the optical path) is defined as D. The position of the first axis core O1 is defined as the reference position in the left-right direction, and the rightward direction is defined as positive. The second axis core O2 is moved by the moving unit 9b so that it is at a position D×tan(π / 2−2θ0) when 2θ0<π / 2, and at a position −D×tan(π / 2−2θ0) when 2θ0≧π / 2.

[0030] 1 controls the second rotation mechanism 8B and the third rotation mechanism 8C during measurement while changing the wavelength of the fluorescent X-rays 4D dispersed by the second dispersing element 6B so that the dispersed fluorescent X-rays 4D are incident on the detector 7. More specifically, in FIG. 2, during measurement, the second dispersing element 6B is rotated by 3θ0±2Δθ while the detector 7 is rotated in conjunction by 4θ0±3Δθ, that is, within a range of 6Δθ, so that the angle of incidence of the fluorescent X-rays on the second dispersing element 6B is θ0±Δθ. Here, the initial positions in the rotation direction of the first dispersing element 6A and the second dispersing element 6B are positions where the dispersing plane is parallel to the optical path of the fluorescent X-rays 4A and 4B from the reference sample 1 and faces downward in FIGS. 1 and 2, and the initial position in the rotation direction of the detector 7 is a position where the normal to the center of the detection plane is parallel to the optical path of the fluorescent X-rays 4A and 4B from the reference sample 1 and the detector 7 is located to the left of the second dispersing element 6B in FIGS. 1 and 2.

[0031] According to the high-resolution mode narrow-area measurement in the device of this embodiment, it is possible to perform spectrum measurement with sufficiently high accuracy and high energy resolution for fluorescent X-rays in the wavelength range (the range of θ0±Δθ in terms of incident angle) included in the divergent beam 4B incident on the first dispersive element 6A.

[0032] In the high-resolution mode narrow-area measurement in the apparatus of this embodiment, the control means, before measurement, places the first and second dispersing elements in the (+, +) arrangement, as shown in FIG. 3, first places the first and second dispersing elements 6A and 6B in the (+, -) arrangement, and adjusts the angle of incidence of the fluorescent X-rays on the first dispersing element 6A to θ0, that is, adjusts the pointing angle θ of the first dispersing element 6A to θ0. 1st While rotating the second dispersive element 6B in a state where the first dispersive element 6A is rotated so that the angle of rotation is θ0, the rotation angle (pointing angle) θ of the second dispersive element 6B is set at a value at which the intensity measured by the detector 7, which is arranged so that the detection direction is approximately parallel to the linear movement direction of the moving mechanism 9 (FIG. 1) (i.e., approximately parallel to the optical paths of the fluorescent X-rays 4A and 4B (FIG. 1)), becomes maximum. 2nd =π+θ0+Δθ R (Δθ R is the correction angle) is used as the reference angle. At this time, the first light separating element 6A and the second light separating element 6B are arranged in parallel, and the correction angle Δθ R is obtained.

[0033] Next, as shown in FIG. 4, the second light-splitting element 6B is inverted 180 degrees from the reference angle and further rotated by 2θ0, thereby changing the pointing angle θ of the second light-splitting element 6B. 2nd 3θ0+Δθ R The first and second dispersive elements are arranged in a (+, +) configuration. In this case, the angle between the first dispersive element 6A and the second dispersive element 6B is exactly π-2θ0, and the incident angle to the second dispersive element 6B is exactly π-2θ0. The incident angle to the second dispersive element 6B is exactly π-2θ0. The incident angle to the first dispersive element 6A ... 1st and the pointing angle θ of the second light separating element 6B. 2nd Regardless of the angle, the absolute angle is θ0.

[0034] According to this operation, when performing high-resolution mode narrow-area measurement with the device of this embodiment, absolute angle calibration can be performed with high accuracy on the rotation angles of the first dispersive element 6A and the second dispersive element 6B without using a standard sample or the like.

[0035] In the apparatus of this embodiment, when the control means 11 of FIG. 1 specifies the high-resolution mode wide-area measurement, it uses a Soller slit 5 that has foils stacked in the direction of extension of the first axis O1, similar to that used in the high-resolution mode narrow-area measurement, and that allows fluorescent X-rays 4A generated from the sample 1 to pass through, and controls the first rotation mechanism 8A, the movement mechanism 9, the second rotation mechanism 8B, and the third rotation mechanism 8C before measurement so that fluorescent X-rays 4A within a predetermined wavelength range generated from the sample 1 pass through the first spectroscopic element 6A and the second spectroscopic element 6B and enter the detector 7, and during measurement, it controls the first rotation mechanism 8A, the movement mechanism 9, the second rotation mechanism 8B, and the third rotation mechanism 8C while changing the wavelength of the fluorescent X-rays 4C dispersed by the first spectroscopic element 6A so that the dispersed fluorescent X-rays 4C enter the detector 7 via the second spectroscopic element 6B.

[0036] According to this additional configuration, during spectrum measurement, the wavelength of the fluorescent X-rays 4C dispersed by the first dispersing element 6A is changed, and not only the second rotation mechanism 8B and the third rotation mechanism 8C but also the first rotation mechanism 8A and the movement mechanism 9 are controlled so that the dispersed fluorescent X-rays 4C are incident on the detector 7. This makes it possible to perform spectrum measurement with higher energy resolution for fluorescent X-rays 4A over a wider wavelength range than the above-mentioned high-resolution mode narrow-area measurement. This measurement is called high-resolution mode wide-area measurement.

[0037] As shown in FIG. 1 , the device of this embodiment includes a retraction mechanism 10 that retracts the second dispersive element 6B from the optical path of the fluorescent X-rays 4C. When the low-resolution mode is specified, the control means 11 controls the first rotation mechanism 8A, the retraction mechanism 10, the movement mechanism 9, and the third rotation mechanism 8C before measurement so that, for fluorescent X-rays 4A within a predetermined wavelength range generated from the sample 1, the fluorescent X-rays 4A pass through the first dispersive element 6A and enter the detector 7 without passing through the second dispersive element 6B. During measurement, the control means 11 controls at least the first rotation mechanism 8A and the movement mechanism 9 among the first rotation mechanism 8A, the movement mechanism 9, and the third rotation mechanism 8C while changing the wavelength of the fluorescent X-rays 4C dispersed by the first dispersive element 6A so that the dispersed fluorescent X-rays 4C directly enter the detector 7.

[0038] Basically, during measurement, the first spectroscopic element 6A rotates, the movable part 9b moves linearly, and the detector 7 rotates. However, depending on the wavelength range of the fluorescent X-rays 4A to be measured and the size of the detection surface of the detector 7, it may be possible to measure the wavelength range by simply rotating the first spectroscopic element 6A and moving the movable part 9b linearly, without rotating the detector 7.

[0039] With this additional configuration, the second dispersive element 6B can be retracted and only the first dispersive element 6A can be used to obtain a typical wavelength-dispersive fluorescent X-ray spectrum. This operating mode is called the low-resolution mode. In the low-resolution mode, similar to a typical wavelength-dispersive fluorescent X-ray analyzer, a solar slit 5 is used, which has foils stacked in a direction perpendicular to the direction in which the first axis O1 extends and passes fluorescent X-rays 4A generated from the sample 1 to form a parallel beam. [Explanation of symbols]

[0040] 1. Sample 2 Primary X-ray 3 X-ray source 4A Fluorescent X-rays generated from the sample 4B Fluorescent X-rays generated from a sample as a diverging beam 4C Fluorescent X-rays dispersed by the first spectroscopic element 4D Fluorescent X-rays dispersed by the second dispersing element 5. Solar slit 6A First spectral element 6B Second spectroscopic element 7. Detector 8A First Rotating Mechanism 8B Second rotation mechanism 8C Third Rotating Mechanism 9 Moving mechanism 10 Evacuation mechanism 11 Control measures O1 First axis O2 Second axis

Claims

1. an X-ray source for irradiating a sample with primary X-rays; a first spectroscopic element for separating fluorescent X-rays generated from the sample; a second spectroscopic element that further spectroscopically separates the fluorescent X-rays dispersed by the first spectroscopic element; a detector that measures the intensity of the fluorescent X-rays dispersed by the second spectroscopic element; a first rotation mechanism that rotates the first dispersing element about a first axis that passes through a dispersing surface of the first dispersing element and is perpendicular to an optical path of the fluorescent X-rays between the sample and the first dispersing element; a moving mechanism that linearly moves the second dispersing element and the detector in parallel with an optical path of the fluorescent X-rays between the sample and the first dispersing element; a second rotation mechanism that rotates the second spectroscopic element about a second axis that passes through the spectroscopic surface of the second spectroscopic element and is parallel to the first axis; a third rotation mechanism that rotates the detector about the second axis; and a control means for controlling the first rotation mechanism, the movement mechanism, the second rotation mechanism, and the third rotation mechanism before measurement so that fluorescent X-rays within a predetermined wavelength range generated from a sample are incident on the detector, and for controlling at least the second rotation mechanism of the second rotation mechanism and the third rotation mechanism during measurement while changing the wavelength of the fluorescent X-rays dispersed by the second dispersing element so that the dispersed fluorescent X-rays are incident on the detector, but not controlling the first rotation mechanism or the movement mechanism.

2. 2. The X-ray fluorescence analyzer according to claim 1, fluorescent X-rays generated from a sample pass through a Soller slit having foils stacked in a direction in which the first axis extends, and are incident as a diverging beam on the first spectroscopic element; The control means controls the first and second spectroscopic elements to be in a (+, +) arrangement before measurement, and controls the incident angle of the fluorescent X-rays on the first spectroscopic element to be θ ０ The first spectroscopic element is rotated so as to include ±Δθ, and during measurement, the incident angle of the fluorescent X-rays on the second spectroscopic element is θ ０ The fluorescent X-ray analysis apparatus rotates the second spectroscopic element within a range of 4Δθ so as to be ±Δθ, while simultaneously rotating the detector within a range of 6Δθ.

3. 3. The X-ray fluorescence analyzer according to claim 2, When the control means places the first and second dispersing elements in a (+, +) arrangement before measurement, the control means first places the first and second dispersing elements in a (+, -) arrangement and adjusts the incident angle of the fluorescent X-rays on the first dispersing element to θ ０ In a state where the first dispersive element is rotated so that the intensity measured by the detector is maximized, the second dispersive element is rotated to set the rotation angle of the second dispersive element at which the intensity measured by the detector is maximized as a reference angle, and the second dispersive element is rotated 180 degrees from the reference angle and then rotated by 2θ ０ An X-ray fluorescence analyzer that is configured as (+, +) by rotating the detector by only one rotation.

4. 2. The X-ray fluorescence analyzer according to claim 1, When the control means specifies high-resolution mode wide-area measurement, a Soller slit having foils stacked in a direction in which the first axis extends and through which fluorescent X-rays generated from a sample pass; an X-ray fluorescence analyzer that controls the first rotation mechanism, the movement mechanism, the second rotation mechanism, and the third rotation mechanism before measurement so that fluorescent X-rays within a predetermined wavelength range generated from a sample are incident on the detector; and that controls the first rotation mechanism, the movement mechanism, the second rotation mechanism, and the third rotation mechanism during measurement while changing the wavelength of the fluorescent X-rays dispersed by the first dispersing element so that the dispersed fluorescent X-rays are incident on the detector.

5. 2. The X-ray fluorescence analyzer according to claim 1, a retraction mechanism for retracting the second dispersive element from an optical path of the fluorescent X-rays, When the low resolution mode is designated by the control means, an X-ray fluorescence analyzer that controls the first rotation mechanism, the retraction mechanism, the movement mechanism, and the third rotation mechanism before measurement so that fluorescent X-rays within a predetermined wavelength range generated from a sample are incident on the detector without passing through the second spectroscopic element; and that controls at least the first rotation mechanism and the movement mechanism among the first rotation mechanism, the movement mechanism, and the third rotation mechanism during measurement while changing the wavelength of the fluorescent X-rays dispersed by the first spectroscopic element so that the dispersed fluorescent X-rays are incident on the detector.

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