Cutting blade

Abstract

To provide a cutting blade which can suppress damage to an end face contact area even if directly stacking and accommodating cutting blades.SOLUTION: A cutting blade 1 is fixed to a mount having a boss part and a blade support part including an annular end face contacting the cutting blade 1, and has an annular base 2 in which an open hole 21 is formed, and a cutting edge 3 formed on an outer periphery of the base 2. The cutting blade is fixed to the mount in such a manner that a nut 150 is fastened to the boss part in the state where the boss part is inserted in the open hole 21 and the end face and the base 2 are brought in contact with each other. The base 2 has: a mount contact surface 23 with an end face contact area 231 contacting the end face; and a not contact surface 24 which contacts a nut 150 on a side opposite to the mount contact surface 23. A recess 4 is formed in a first area 243 which faces the end face contact area 231 in the nut contact surface 24, and any other cutting blade 1 does not contact the end face contact area 231 when stacking the cutting blades 1.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to cutting blades that are stored in a stack. [Background technology]

[0002] BACKGROUND ART A cutting blade for cutting a workpiece such as a semiconductor wafer includes an annular base and a cutting edge formed on the outer periphery of the base (see, for example, Patent Document 1).

[0003] The cutting blade shown in Patent Document 1 is supported by contacting the annular end face of the mount with the base, so if foreign matter or scratches are present in the end face contact area that contacts the end face of the base, the cutting blade will be supported by the mount at an angle, causing the cutting blade to swing sideways during cutting and widening the cutting groove. Furthermore, the sideways swinging causes the cutting blade to intermittently hit the workpiece, increasing surface chipping and backside chipping and causing quality defects.

[0004] For this reason, when a plurality of cutting blades are stacked on top of each other and stored (for example, see Patent Document 2), it is common to store the cutting blades with cushioning material placed between them. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2011-062778 [Patent Document 2] Japanese Patent Application Publication No. 2019-042909 Summary of the Invention [Problem to be solved by the invention]

[0006] However, it is troublesome to place the buffer material between the cutting blades when storing the cutting blades and to remove the buffer material when using the cutting blades.

[0007] In recent years, blade replacement systems have been developed that automatically replace cutting blades, but adding the operation of removing the cushioning material makes the system more complex and larger, making it uneconomical.

[0008] An object of the present invention is to provide a cutting blade that can prevent scratches on the end face contact area even when the cutting blades are stored directly stacked on top of each other. [Means for solving the problem]

[0009] In order to solve the above-mentioned problems and achieve the object, the cutting blade of the present invention is a cutting blade fixed to a mount having a boss portion into which the cutting blade is inserted and a blade support portion including an annular end surface formed on the outer periphery of the boss portion and contacting the cutting blade, the cutting blade having an annular base with a through hole formed in the center and a cutting edge formed on the outer periphery of the base, and is fixed to the mount by inserting the boss portion into the through hole and tightening a nut on the boss portion with the end surface in contact with the base, the base having a mount contact surface having an end surface contact area in contact with the end surface and a nut on the side opposite to the mount contact surface. The cutting blade has a nut contact surface that contacts the end face contact area, and the nut contact surface has a recess formed in a region facing the end face contact area, and the mount contact surface has the end face contact area and an outer peripheral region outer than the end face contact area formed on the same plane, and a step is formed between the end face contact area and an inner peripheral region inner than the end face contact area to make the inner peripheral region thinner than the end face contact area, and when a rod is passed through the through holes of the multiple cutting blades and the multiple cutting blades are overlapped so that the nut contact surface and the mount contact surface face each other and are coaxial with each other, the end face contact area and the nut contact surface of the overlapping cutting blade directly They are characterized by being spaced apart and facing each other.

[0010] The cutting blade of the present invention is a cutting blade fixed to a mount having a boss portion into which the cutting blade is inserted and a blade support portion including an annular end surface formed on the outer periphery of the boss portion and contacting the cutting blade, the cutting blade having an annular base with a through hole formed in the center and a cutting edge formed on the outer periphery of the base, and is fixed to the mount by inserting the through hole into the boss portion and fastening a nut to the boss portion in a state where the end surface and the base are in contact, the base has a mount contact surface having an end surface contact area that contacts the end surface and a nut contact surface on the opposite side to the mount contact surface that contacts the nut, and the cutting blade The mount contact surface is formed such that the end face contact area is recessed, and the nut contact surface has a first area facing the end face contact area of ​​the nut contact area that overlaps with the nut and an outer peripheral area outer than the nut contact area that are formed on the same plane, and a step is formed between the first area and a second area inner than the first area of ​​the nut contact area to make the second area thinner than the first area, and when a rod is passed through the through holes of the multiple cutting blades and the multiple cutting blades are overlapped so that they are coaxial with each other with the nut contact surface and the mount contact surface facing each other, the end face contact area and the nut contact surface of the overlapping cutting blade become directly They are characterized by being spaced apart and facing each other. [Effects of the Invention]

[0011] The present invention has the effect of preventing damage to the end face contact area even when the cutting blades are housed so as to be directly stacked on top of each other. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. 1 is an exploded perspective view of a cutting unit of a cutting device including a cutting blade according to a first embodiment. [Figure 2] FIG. 2 is a cross-sectional view of the cutting blade according to the first embodiment. [Figure 3] FIG. 3 is a perspective view showing a state in which a plurality of cutting blades shown in FIG. 2 are stacked and housed in a blade case. [Figure 4] FIG. 4 is a cross-sectional view showing a state in which a plurality of cutting blades shown in FIG. 2 are stacked. [Figure 5] FIG. 5 is a cross-sectional view of a main part of a cutting blade according to a modified example of the first embodiment. [Figure 6] FIG. 6 is a cross-sectional view of a cutting blade according to the second embodiment. [Figure 7] FIG. 7 is a cross-sectional view showing a state in which a plurality of cutting blades shown in FIG. 6 are stacked. [Figure 8] FIG. 8 is a cross-sectional view of a cutting blade according to the third embodiment. [Figure 9] FIG. 9 is a cross-sectional view showing a state in which a plurality of cutting blades shown in FIG. 8 are stacked. [Figure 10] FIG. 10 is a cross-sectional view of a cutting blade according to the fourth embodiment. [Figure 11] FIG. 11 is a cross-sectional view showing a state in which a plurality of cutting blades shown in FIG. 10 are stacked. [Figure 12] FIG. 12 is a cross-sectional view of a cutting blade according to the fifth embodiment. [Figure 13] FIG. 13 is a cross-sectional view showing a state in which a plurality of cutting blades shown in FIG. 12 are stacked. [Figure 14] FIG. 14 is a cross-sectional view of a cutting blade according to the sixth embodiment. [Figure 15] FIG. 15 is a cross-sectional view showing a state in which a plurality of cutting blades shown in FIG. 14 are stacked. [Figure 16] FIG. 16 is a cross-sectional view of a cutting blade according to the seventh embodiment. [Figure 17] FIG. 17 is a cross-sectional view showing a state in which a plurality of cutting blades shown in FIG. 16 are stacked. [Figure 18] FIG. 18 is a cross-sectional view of a cutting blade according to the eighth embodiment. [Figure 19] FIG. 19 is a cross-sectional view showing a state in which a plurality of cutting blades shown in FIG. 18 are stacked. [Figure 20] FIG. 20 is a cross-sectional view of a cutting blade according to the ninth embodiment. [Figure 21]FIG. 21 is a cross-sectional view showing a state in which a plurality of cutting blades shown in FIG. 20 are stacked. DETAILED DESCRIPTION OF THE INVENTION

[0013] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by a person skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the configuration can be made within the scope of the gist of the present invention.

[0014] [Embodiment 1] A cutting blade 1 according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is an exploded perspective view of a cutting unit of a cutting device constituted by the cutting blade according to the first embodiment. Fig. 2 is a cross-sectional view of the cutting blade according to the first embodiment. Fig. 3 is a perspective view showing a state in which a plurality of cutting blades shown in Fig. 2 are stacked and housed in a blade case. Fig. 4 is a cross-sectional view showing a state in which a plurality of cutting blades shown in Fig. 2 are stacked.

[0015] The cutting blade 1 according to the first embodiment is attached to the tip of a spindle 101 of a cutting unit 100 shown in Fig. 1 of a cutting device that cuts a workpiece (not shown), thereby constituting the cutting unit 100. In the first embodiment, the workpiece is a wafer such as a disk-shaped semiconductor wafer or optical device wafer made of a base material such as silicon, sapphire, or gallium, a so-called TAIKO (registered trademark) wafer that is thinned at the center and has a thick portion formed at the periphery, a rectangular package substrate having a plurality of devices sealed with resin, a ceramic substrate, a ferrite substrate, or a substrate containing at least one of nickel and iron, in addition to the wafer.

[0016] 1, the cutting unit 100 to which the cutting blade 1 is attached has a spindle housing 110, a spindle 101 rotatably mounted on the spindle housing 110 and rotated about its axis by a spindle motor (not shown), and a mount 120 fixed to the tip of the spindle 101. The cutting unit 20 also includes a fixing screw 140 that passes through a washer 130 and a through-hole 121 provided in the center of the mount 120 and threads into a threaded hole 102 provided on the tip surface of the spindle 101 to fix the mount 120 to the tip of the spindle 101, and a nut 150 that sandwiches and fixes the cutting blade 1 attached to the mount 120 between the mount 120 and the fixing screw 140.

[0017] The mount 120 is fixed to the tip of the spindle 101. The mount 120 has a cylindrical boss portion 122 into which the cutting blade 1 is inserted, and a blade support portion 123 formed on the outer periphery of one end of the boss portion 122 closer to the spindle housing 110. The boss portion 122 extends linearly, and its outer diameter is formed to be approximately equal to the inner diameter of a through hole 21 (described later) of the cutting blade 1 over its entire length. Note that "the outer diameter of the boss portion 122 is approximately equal to the inner diameter of the through hole 21 of the cutting blade 1" means that the outer diameter and the inner diameter are equal to the extent that the outer peripheral surface of the boss portion 122 and the inner peripheral surface of the through hole 21 can come into contact with each other at least at multiple locations.

[0018] The blade support portion 123 is formed in an annular shape with a diameter larger than the outer diameter of the boss portion 122, protruding radially from one end of the boss portion 122 closer to the spindle housing 110. The blade support portion 123 is provided on the outer edge and includes an annular end surface 124 that comes into contact with the cutting blade 1 and supports the cutting blade 1. The boss portion 122 and the blade support portion 123 are arranged coaxially. Furthermore, the mount 120 has a male thread 125 formed on the outer periphery of the other end of the boss portion 122.

[0019] The cutting blade 1 is an extremely thin cutting wheel having a substantially ring shape. In the first embodiment, the cutting blade 1 is a so-called hub blade, and as shown in FIGS. 1 and 2, it has an annular base 2 with a through-hole 21 formed in the center, and an annular cutting blade 3 formed on the outer periphery of the base 2 and used to cut a workpiece. The through-hole 21 in the base 2 is a hole through which a boss portion 122 passes inside, allowing the cutting blade 1 to be attached to a mount 120. The cutting blade 3 has an outer diameter larger than that of the base 2, and is made of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bonding material such as metal or resin, and is formed to a predetermined thickness.

[0020] The cutting blade 1 having the above-described configuration is supported by the end face 124 with the boss portion 122 inserted into the through-hole 21 and the end face 124 in contact with the base 2, and is clamped between the blade support portion 123 of the mount 120 and the nut 150 by fastening the nut 150 to the male thread 125 formed on the boss portion 122, and is fixed to the mount 120. As shown in FIG. 1 , the nut 150 has four pin-fitting holes 151 formed on the end face at equal intervals in the circumferential direction. When the cutting blade 1 is fixed to the mount 120, the cutting blade 1, spindle 101, mount 120, and nut 150 are positioned so as to be coaxial with one another.

[0021] In the first embodiment, the base 2 of the cutting blade 1 includes an annular base 22 made of a solid metal material. The annular base 22 is formed in a circular ring shape with a through-hole 21 formed in the center. One surface of the annular base 22 of the base 2 is a mount contact surface 23 that contacts the end face of the mount 120, and the other surface on the back (opposite) side of the one surface is a nut contact surface 24 that contacts the nut 150. In other words, the base 2 has the mount contact surface 23 and the nut contact surface 24 on the opposite side of the mount contact surface 23.

[0022] The annular base 22 of the base 2 has an end face contact region 231 on the mount contact surface 23 that contacts the end face 124 of the mount 120. In the first embodiment, the end face contact region 231 is formed in an annular shape and is formed flat along a direction perpendicular to the axis 11 of the base 2 and the annular base 22, i.e., the cutting blade 1. In the first embodiment, the mount contact surface 23 has the end face contact region 231 provided at the center in the radial direction, and the end face contact region 231 and an outer peripheral region 232 on the outer periphery of the end face contact region 231 are formed flat and flush along a direction perpendicular to the axis 11. In the mount contact surface 23, a step 234 is formed between the end face contact region 231 and an inner peripheral region 233 on the inner periphery of the end face contact region 231, making the inner peripheral region 233 thinner than the end face contact region 231, and the inner peripheral region 233 is formed flat along a direction perpendicular to the axis 11.

[0023] In the first embodiment, the annular base 22 of the base 2 has the cutting edge 3 formed on the outer edge of the outer peripheral region 232 of the mount contact surface 23. Thus, in the first embodiment, the cutting blade 1 has the cutting edge 3 formed on the outer edge of the outer peripheral region 232 of the mount contact surface 23. In the first embodiment, the cutting blade 1 has the cutting edge 3 formed on the outer edge of the outer peripheral region 232 of the mount contact surface 23 of the annular base 22 of the base 2 by electroplating.

[0024] In the first embodiment, the annular base 22 of the base 2 has a nut contact area 241 formed in an annular shape on the nut contact surface 24. The nut contact area 241 is an area that overlaps with the nut 150 along the axis 11 of the nut contact surface 24 when the cutting blade 1 is fixed to the mount 120 by the nut 150. In the first embodiment, the nut contact area 241 of the nut contact surface 24 is provided from the center in the radial direction to the through hole 21.

[0025] In the first embodiment, the nut contact region 241 has a first region 243 that is flat in a direction perpendicular to the axis 11 and has a step 245 formed between it and an outer peripheral region 242 that is thinner than the outer peripheral region 242 and is located outer than the nut contact region 241, and a second region 244 that is flat in a direction perpendicular to the axis 11 and is flush with the first region 243. In the first embodiment, the entire nut contact surface 24 (i.e., the first region 243 and the second region 244) is formed flat in a direction perpendicular to the axis 11.

[0026] The first region 243 is a region facing the end face contact region 231 and overlaps with the end face contact region 231 along the axis 11. A step 245 is formed between the first region 243 and the outer peripheral region 242, thereby forming a recess 4 on the nut contact surface 24 that is more recessed than the outer peripheral region 242. For this reason, on the nut contact surface 24 of the cutting blade 1, the recess 4 that is more recessed than the outer peripheral region 242 is formed in the first region 243 facing the end face contact region 231. The second region 244 is a region that overlaps with the inner peripheral region 233 of the mount contact surface 23 along the axis 11 (i.e., the region facing the inner peripheral region 233).

[0027] The cutting blades 1 configured as described above are stacked one on top of the other without any buffer member provided between them, with a cylindrical rod 202 having a disk member 201 attached to its lower end passed through the through hole 21, and the mount contact surface 23 of the cutting blade 1 on the disk member 201 side directly overlapping the nut contact surface 24 of the cutting blade 1, as shown in Fig. 3. The cutting blades 1 are stacked one on top of the other with the rod 202 passed through the through hole 21, and are housed in a cylindrical body 203 shown in Fig. 3, and are then housed in the blade case 200. In this way, the blade case 200 includes the rod 202, the cylindrical body 203, etc.

[0028] 4, when a plurality of cutting blades 1 are stacked on top of each other, recesses 4 are formed in the nut contact surface 24, so that the end face contact region 231 faces the first region 243 of the other overlapping cutting blade 1 at a distance, and the first region 243 of the other overlapping cutting blade 1 does not come into contact with the end face contact region 231. Therefore, even when a plurality of the above-mentioned cutting blades 1 are stacked and housed in the blade case 200, it is possible to prevent foreign matter from adhering to the end face contact region 231 and damaging the end face contact region 231.

[0029] As described above, in the cutting blade 1 according to the first embodiment, when the cutting blades 1 are directly stacked on top of each other, the recess 4 is formed in the first region 243 of the nut contact surface 24 of the other cutting blade 1 that faces the end face contact region 231 of the cutting blade 1, so that the end face contact region 231 of the cutting blade 1 does not come into contact with the other cutting blade 1. For this reason, even when the cutting blades 1 are directly stacked and stored, the adhesion of foreign matter to the end face contact region 231 can be suppressed, and the end face contact region 231 can be suppressed from being damaged.

[0030] As a result, when the cutting blade 1 of embodiment 1 is attached to the spindle 101 via the mount 120, it can suppress the imbalance in the rotation of the spindle 101, suppress vibration during cutting processing, and suppress surface chipping and back surface chipping of the workpiece, thereby suppressing a decrease in processing quality.

[0031] [Modification] A cutting blade 1-1 according to a modified example of the first embodiment of the present invention will be described with reference to the drawings. Fig. 5 is a cross-sectional view of the main part of the cutting blade according to the modified example of the first embodiment. In Fig. 5, the same parts as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

[0032] As shown in Figure 5, in the cutting blade 1-1 according to a modified example of embodiment 1, the step 245 formed between the first region 243 and the outer peripheral region 242 of the nut contact area 241 of the nut contact surface 24 is inclined with respect to both the axis 11 and a direction perpendicular to the axis 11 so that the thickness of the annular base 22 of the base 2 gradually decreases from the outer peripheral region 242 toward the nut contact area 241, as shown in Figure 5.

[0033] In the cutting blade 1-1 according to a modified example of embodiment 1, a step 245 is formed between the first region 243 of the nut contact area 241 and the outer peripheral region 242, making the first region 243 thinner than the outer peripheral region 242, thereby forming a recess 4 in the first region 243 that is recessed more than the outer peripheral region 242.

[0034] In the cutting blade 1-1 according to the modified example of embodiment 1, when the cutting blades 1-1 are directly stacked on top of each other, a recess 4 is formed in the first region 243 of the nut contact surface 24 of the other cutting blade 1-1 that faces the end face contact region 231 of the cutting blade 1-1, so that the end face contact region 231 of the cutting blade 1-1 does not come into contact with the other cutting blade 1.

[0035] As a result, as in embodiment 1, even when the cutting blades 1-1 are stored directly stacked on top of each other, the effect is achieved in that foreign matter can be prevented from adhering to the end face contact area 231 and damage to the end face contact area 231 can be prevented.

[0036] Furthermore, in the cutting blade 1-1 according to the modified example of embodiment 1, the step 245 is inclined with respect to both the axis 11 and the direction perpendicular to the axis 11, which improves the mechanical strength of the annular base 22 of the base 2 and reduces the likelihood of chipping of the annular base 22 of the base 2.

[0037] [Embodiment 2] A cutting blade 1-2 according to a second embodiment of the present invention will be described with reference to the drawings. Fig. 6 is a cross-sectional view of the cutting blade according to the second embodiment. Fig. 7 is a cross-sectional view showing a state in which a plurality of cutting blades shown in Fig. 6 are stacked. In Figs. 6 and 7, the same parts as those in the first embodiment are designated by the same reference numerals, and their description will be omitted.

[0038] As shown in Figure 6, in the cutting blade 1-2 of embodiment 2, the first region 243 of the nut contact surface 24 is formed on the same plane as the outer peripheral region 242, and a step 246 is formed between the first region 243 and the second region 244, making the thickness of the second region 244 thinner than that of the first region 243.

[0039] 6, the cutting blade 1-2 according to the second embodiment has a step 235 formed between the end face contact region 231 of the mount contact surface 23 and the outer peripheral region 232, making the thickness thinner than the outer peripheral region 232. In the cutting blade 1 according to the second embodiment, the end face contact region 231 of the mount contact surface 23 is formed on the same plane as the inner peripheral region 233.

[0040] In the cutting blade 1-2 of embodiment 2, a step 235 is formed between the end face contact region 231 and the outer peripheral region 232, so that the end face contact region 231 is recessed more than the outer peripheral region 232 on the mount contact surface 23.

[0041] For this reason, when a plurality of cutting blades 1-2 according to the second embodiment are stacked on top of each other, as shown in Fig. 7, the end face contact region 231 of the cutting blade 1-2 is spaced from the first region 243 of the nut contact surface 24 of the other cutting blade 1-2 with which it is stacked, and the first region 243 of the nut contact surface 24 of the other cutting blade 1-2 does not come into contact with the end face contact region 231. For this reason, even when a plurality of cutting blades 1-2 according to the second embodiment described above are stacked and housed in the blade case 200, it is possible to prevent foreign matter from adhering to the end face contact region 231 and the end face contact region 231 from being damaged.

[0042] In the cutting blade 1-2 according to the second embodiment, when the cutting blades 1-2 are directly stacked on top of each other, the end face contact region 231 of the cutting blade 1-2 is recessed, so that the end face contact region 231 is spaced from the first region 243 of the nut contact surface 24 of the other cutting blade 1-2 and does not come into contact with the other cutting blade 1-2. As a result, similar to the first embodiment, even when the cutting blades 1-2 are directly stacked and stored, the end face contact region 231 of the cutting blade 1-2 can be prevented from being contaminated with foreign matter and can be prevented from being damaged.

[0043] [Embodiment 3] A cutting blade 1-3 according to a third embodiment of the present invention will be described with reference to the drawings. Fig. 8 is a cross-sectional view of the cutting blade according to the third embodiment. Fig. 9 is a cross-sectional view showing a state in which a plurality of cutting blades shown in Fig. 8 are stacked. In Figs. 8 and 9, the same parts as those in the first embodiment are designated by the same reference numerals, and their description will be omitted.

[0044] 8, in the cutting blade 1-3 according to the third embodiment, the base 2 includes an annular base 22 and an annular sealing member 5. As shown in FIG. 8, in the cutting blade 1-3 according to the third embodiment, the first region 243 of the annular base 22 is formed on the same plane as the outer circumferential region 242, and a step 246 is formed between the first region 243 and the second region 244, making the second region 244 thinner than the first region 243.

[0045] 8, the cutting blade 1-3 according to the third embodiment has a sealing member 5 attached to the outer peripheral region 242 of the nut contact surface 24. The sealing member 5 is formed in a circular shape with an outer diameter equal to the outer diameter of the annular base 22 on the nut contact surface 24 side, an inner diameter equal to or greater than the outer diameter of the first region 243, and a constant thickness. The sealing member 5 is made of paper or resin, and in the third embodiment, since it is attached to the spindle 101 of the cutting device while still attached to the annular base 22, it is desirable that the sealing member 5 be made of a material that is resistant to melting and dust generation, such as resin, so as not to affect the workpiece.

[0046] In the cutting blade 1-3 of embodiment 3, a sealing member 5 is attached to the outer peripheral region 242 of the nut contact surface 24, so that a recess 4 is formed in the first region 243 of the nut contact surface 24 that is recessed more than the sealing member 5 attached to the outer peripheral region 242.

[0047] For this reason, when a plurality of cutting blades 1-3 according to the third embodiment are stacked on top of each other, as shown in Fig. 9, the end face contact region 231 of the cutting blade 1-3 is spaced from the first region 243 of the nut contact surface 24 of the other cutting blade 1-3, and the end face contact region 231 of the other cutting blade 1-3 does not come into contact with the first region 243 of the nut contact surface 24. For this reason, even when a plurality of cutting blades 1-3 according to the third embodiment described above are stacked and housed in the blade case 200, it is possible to prevent foreign matter from adhering to the end face contact region 231 and the end face contact region 231 from being damaged.

[0048] In the cutting blade 1-3 of embodiment 3, when the cutting blades 1-3 are directly stacked on top of each other, the end face contact area 231 does not come into contact with other cutting blades 1-3, so similar to embodiment 1, etc., it is possible to prevent foreign matter from adhering to the end face contact area 231 and to prevent the end face contact area 231 from being damaged.

[0049] [Embodiment 4] Cutting blades 1-4 according to a fourth embodiment of the present invention will be described with reference to the drawings. Fig. 10 is a cross-sectional view of the cutting blade according to the fourth embodiment. Fig. 11 is a cross-sectional view showing a state in which a plurality of cutting blades shown in Fig. 10 are stacked. In Figs. 10 and 11, the same parts as those in the first embodiment are designated by the same reference numerals, and their description will be omitted.

[0050] 10, in the cutting blade 1-4 according to the fourth embodiment, the base 2 is provided with an annular seal member 6 in addition to the annular base 22. As shown in FIG. 10, in the cutting blade 1 according to the fourth embodiment, the first region 243 of the nut contact surface 24 of the annular base 22 is formed in the same plane as the outer circumferential region 242, and a step 246 is formed between the first region 243 and the second region 244, making the thickness of the second region 244 thinner than that of the first region 243.

[0051] 11, the cutting blade 1-4 according to the fourth embodiment has a seal member 6 attached to the inner edge of the outer peripheral region 232 of the mount contact surface 23. The seal member 6 is formed in a circular ring shape with an outer diameter equal to the outer diameter of the annular base 22 on the nut contact surface 24 side and an inner diameter equal to or greater than the outer diameter of the first region 243, and has a constant thickness. The seal member 6 is made of paper or resin, and in the fourth embodiment, since it is attached to the spindle 101 of the cutting device while still attached to the annular base 22, it is desirable that the seal member 6 be made of a material that is resistant to melting and dust generation, such as resin, so as not to affect the workpiece.

[0052] In the cutting blade 1-4 of embodiment 4, a sealing member 6 is attached to the inner edge of the outer peripheral region 232 of the mount contact surface 23, so that the end face contact region 231 on the mount contact surface 23 is formed to be recessed more than the sealing member 6 attached to the inner edge of the outer peripheral region 232.

[0053] For this reason, when a plurality of cutting blades 1-4 according to the fourth embodiment are stacked on top of each other, as shown in Fig. 11, the end face contact region 231 of the cutting blade 1-4 is spaced from the first region 243 of the nut contact surface 24 of the other cutting blade 1-4, and the end face contact region 231 of the other cutting blade 1-4 does not come into contact with the first region 243 of the nut contact surface 24. For this reason, even when a plurality of cutting blades 1-4 according to the fourth embodiment described above are stacked and housed in the blade case 200, it is possible to prevent foreign matter from adhering to the end face contact region 231 and the end face contact region 231 from being damaged.

[0054] In the cutting blade 1-4 of embodiment 4, when the cutting blades 1-4 are directly stacked on top of each other, the end face contact area 231 does not come into contact with other cutting blades 1-4, so similar to embodiment 1, etc., it has the effect of preventing foreign matter from adhering to the end face contact area 231 and preventing the end face contact area 231 from being damaged.

[0055] [Embodiment 5] Cutting blades 1-5 according to a fifth embodiment of the present invention will be described with reference to the drawings. Fig. 12 is a cross-sectional view of the cutting blade according to the fifth embodiment. Fig. 13 is a cross-sectional view showing a state in which a plurality of cutting blades shown in Fig. 12 are stacked. In Figs. 12 and 13, the same parts as those in the first embodiment are designated by the same reference numerals, and their description will be omitted.

[0056] 12, in the cutting blade 1-5 according to the fifth embodiment, the first region 243 of the nut contact surface 24 of the annular base 22 is formed on the same plane as the outer peripheral region 242. In addition, in the cutting blade 1-5 according to the fifth embodiment, as shown in FIG. 12, a step 247 is formed between the first region 243 and the second region 244 of the nut contact surface 24 of the annular base 22, where the thickness of the second region 244 is thicker than that of the first region 243.

[0057] In addition, in the cutting blade 1-5 according to the fifth embodiment, the height 247-1 of the step 247 is greater than the depth 234-1 of the step 234. In the cutting blade 1-5 according to the fifth embodiment, the height 247-1 of the step 247 is greater than the depth 234-1 of the step 234, and therefore, a recess 4 that is recessed more in the first region 243 than in the second region 244 is formed on the nut contact surface 24.

[0058] For this reason, when a plurality of cutting blades 1-5 according to the fifth embodiment are stacked on top of each other, as shown in Fig. 13, the end face contact region 231 of the cutting blade 1-5 is spaced from the first region 243 of the nut contact surface 24 of the other cutting blade 1-5, and the end face contact region 231 of the other cutting blade 1-5 does not come into contact with the first region 243 of the nut contact surface 24. For this reason, even when a plurality of cutting blades 1-5 according to the fifth embodiment described above are stacked and housed in the blade case 200, it is possible to prevent foreign matter from adhering to the end face contact region 231 and the end face contact region 231 from being damaged.

[0059] In the cutting blade 1-5 of embodiment 5, when the cutting blades 1-5 are directly stacked on top of each other, the end face contact area 231 does not come into contact with other cutting blades 1-5, so similar to embodiment 1, etc., it has the effect of preventing foreign matter from adhering to the end face contact area 231 and preventing the end face contact area 231 from being damaged.

[0060] [Embodiment 6] Cutting blades 1-6 according to a sixth embodiment of the present invention will be described with reference to the drawings. Fig. 14 is a cross-sectional view of the cutting blade according to the sixth embodiment. Fig. 15 is a cross-sectional view showing a state in which a plurality of cutting blades shown in Fig. 14 are stacked. In Figs. 14 and 15, the same parts as those in the first embodiment are designated by the same reference numerals, and their description will be omitted.

[0061] As shown in Figure 14, in the cutting blade 1-6 of embodiment 6, the first region 243 of the nut contact surface 24 of the annular base 22 is formed in the same plane as the outer peripheral region 242, and a step 246 is formed between the first region 243 and the second region 244, making the thickness of the second region 244 thinner than that of the first region 243.

[0062] As shown in Figure 14, the cutting blade 1-6 of embodiment 6 has a step 236 formed between the end face contact region 231 and the inner peripheral region 233 of the mount contact surface 23 of the annular base 22, whereby the thickness of the inner peripheral region 233 is thicker than that of the end face contact region 231.

[0063] In addition, in the cutting blade 1-6 according to the sixth embodiment, the height 236-1 of the step 236 is greater than the depth 246-1 of the step 247. In the cutting blade 1-6 according to the sixth embodiment, the height 236-1 of the step 236 is greater than the depth 246-1 of the step 247, and therefore the end face contact region 231 is recessed relative to the inner peripheral region 233 on the mount contact surface 23.

[0064] For this reason, when a plurality of cutting blades 1-6 according to the sixth embodiment are stacked on top of one another, as shown in Fig. 15, the end face contact region 231 of the cutting blade 1-6 is spaced from the first region 243 of the nut contact surface 24 of the other cutting blade 1-6 with which it is stacked, and the first region 243 of the nut contact surface 24 of the other cutting blade 1-6 does not come into contact with the end face contact region 231. For this reason, even when a plurality of cutting blades 1-6 according to the sixth embodiment described above are stacked and housed in the blade case 200, it is possible to prevent foreign matter from adhering to the end face contact region 231 and the end face contact region 231 from being damaged.

[0065] In the cutting blade 1-6 of embodiment 6, when the cutting blades 1-6 are directly stacked on top of each other, the end face contact area 231 does not come into contact with other cutting blades 1-6, so similar to embodiment 1, etc., it has the effect of preventing foreign matter from adhering to the end face contact area 231 and preventing the end face contact area 231 from being damaged.

[0066] [Embodiment 7] A cutting blade 1-7 according to a seventh embodiment of the present invention will be described with reference to the drawings. Fig. 16 is a cross-sectional view of the cutting blade according to the seventh embodiment. Fig. 17 is a cross-sectional view showing a state in which a plurality of cutting blades shown in Fig. 16 are stacked. In Figs. 16 and 17, the same parts as those in the first embodiment are designated by the same reference numerals, and their description will be omitted.

[0067] As shown in Figure 16, in the cutting blade 1-7 of embodiment 7, the first region 243 of the nut contact surface 24 of the annular base 22 is formed in the same plane as the outer peripheral region 242, and a step 246 is formed between the first region 243 and the second region 244, making the thickness of the second region 244 thinner than that of the first region 243.

[0068] 16, the cutting blade 1-7 according to the seventh embodiment also forms a cutting edge 3 in an area of ​​the outer peripheral region 232 of the mount contact surface 23 that overlaps with the outer peripheral region 242 of the nut contact surface 24. In the cutting blade 1-7 according to the seventh embodiment, the cutting edge 3 is also formed in an area of ​​the outer peripheral region 232 of the mount contact surface 23 that overlaps with the outer peripheral region 242 of the nut contact surface 24, so that the end face contact region 231 is formed recessed more than the cutting edge 3 on the mount contact surface 23.

[0069] For this reason, when a plurality of cutting blades 1-7 according to the seventh embodiment are stacked on top of each other, as shown in Fig. 17, the end face contact region 231 of the cutting blade 1-7 is spaced from the first region 243 of the nut contact surface 24 of the other cutting blade 1-7 with which it is stacked, and the first region 243 of the nut contact surface 24 of the other cutting blade 1-7 does not come into contact with the end face contact region 231. For this reason, even when a plurality of cutting blades 1-7 according to the seventh embodiment described above are stacked and housed in the blade case 200, it is possible to prevent foreign matter from adhering to the end face contact region 231 and the end face contact region 231 from being damaged.

[0070] In the cutting blade 1-7 of embodiment 7, when the cutting blades 1-7 are directly stacked on top of each other, the end face contact area 231 does not come into contact with other cutting blades 1-7, so similar to embodiment 1, etc., it has the effect of preventing foreign matter from adhering to the end face contact area 231 and preventing the end face contact area 231 from being damaged.

[0071] [Embodiment 8] A cutting blade 1-8 according to an eighth embodiment of the present invention will be described with reference to the drawings. Fig. 18 is a cross-sectional view of the cutting blade according to the eighth embodiment. Fig. 19 is a cross-sectional view showing a state in which a plurality of the cutting blades shown in Fig. 18 are stacked. In Figs. 18 and 19, the same parts as those in the first embodiment are designated by the same reference numerals, and their description will be omitted.

[0072] 18, in a cutting blade 1-8 according to the eighth embodiment, the base 2 includes an annular base 22 and an annular plating layer 7. As shown in FIG. 18, in the cutting blade 1-8 according to the eighth embodiment, the first region 243 of the nut contact surface 24 of the annular base 22 is formed in the same plane as the outer circumferential region 242, and a step 246 is formed between the first region 243 and the second region 244, making the second region 244 thinner than the first region 243.

[0073] 18, the cutting blade 1-8 according to the eighth embodiment has a plating layer 7 formed on the outer peripheral region 242 of the nut contact surface 24. The plating layer 7 is formed in an annular shape with an outer diameter equal to the outer diameter of the annular base 22 on the nut contact surface 24 side and an inner diameter equal to or greater than the outer diameter of the first region 243, and has a constant thickness. The plating layer 7 is made of a bond material without containing abrasive grains that form the cutting blade 3, and is formed on the outer peripheral region 242 of the nut contact surface 24 by electrodeposition in the same manner as the cutting blade 3.

[0074] In the cutting blade 1-8 of embodiment 8, a plating layer 7 is formed on the outer peripheral region 242 of the nut contact surface 24, and therefore a recess 4 is formed in the first region 243 of the nut contact surface 24 that is recessed more than the plating layer 7 formed on the outer peripheral region 242.

[0075] For this reason, when a plurality of cutting blades 1-8 according to the eighth embodiment are stacked on top of each other, as shown in Fig. 19, the end face contact region 231 of the cutting blade 1-8 is spaced from the first region 243 of the nut contact surface 24 of the other cutting blade 1-8, and the end face contact region 231 of the other cutting blade is not in contact with the first region 243 of the nut contact surface 24 of the other cutting blade 1-8. For this reason, even when a plurality of cutting blades 1-8 according to the third embodiment described above are stacked and housed in the blade case 200, it is possible to prevent foreign matter from adhering to the end face contact region 231 and the end face contact region 231 from being damaged.

[0076] In the cutting blade 1-8 of embodiment 8, when the cutting blades 1-8 are directly stacked on top of each other, the end face contact area 231 does not come into contact with other cutting blades 1-8, so similar to embodiment 1, etc., it has the effect of preventing foreign matter from adhering to the end face contact area 231 and preventing the end face contact area 231 from being damaged.

[0077] [Embodiment 9] A cutting blade 1-9 according to a ninth embodiment of the present invention will be described with reference to the drawings. Fig. 20 is a cross-sectional view of the cutting blade according to the ninth embodiment. Fig. 21 is a cross-sectional view showing a state in which a plurality of cutting blades shown in Fig. 20 are stacked. In Figs. 20 and 21, the same parts as those in the first embodiment are designated by the same reference numerals, and their description will be omitted.

[0078] 20, in the cutting blade 1-9 according to the ninth embodiment, the base 2 includes an annular base 22 and an annular plating layer 8. As shown in FIG. 20, in the cutting blade 1-9 according to the ninth embodiment, the first region 243 of the nut contact surface 24 of the annular base 22 is formed in the same plane as the outer peripheral region 242, and a step 246 is formed between the first region 243 and the second region 244, making the second region 244 thinner than the first region 243.

[0079] 20, the cutting blade 1-9 according to the ninth embodiment has a plating layer 8 formed on the inner edge of the outer peripheral region 232 of the mount contact surface 23. The plating layer 8 is formed in an annular shape with an outer diameter equal to the outer diameter of the nut contact surface 24 side of the annular base 22 and an inner diameter equal to or greater than the outer diameter of the end face contact region 231, and has a uniform thickness. The plating layer 8 is made of a bond material without containing the abrasive grains that form the cutting blade 3, and is formed by electrodeposition on the inner edge of the outer peripheral region 232 of the mount contact surface 23 in the same manner as the cutting blade 3.

[0080] In the cutting blade 1-9 of embodiment 9, a plating layer 8 is formed on the inner edge of the outer peripheral region 232 of the mount contact surface 23, so that the end face contact region 231 on the mount contact surface 23 is formed recessed relative to the plating layer 8 formed on the inner edge of the outer peripheral region 232.

[0081] For this reason, when a plurality of cutting blades 1-9 according to the ninth embodiment are stacked on top of one another, as shown in Fig. 21, the end face contact region 231 of the cutting blade 1-9 is spaced from the first region 243 of the nut contact surface 24 of the other cutting blade 1-9, and the end face contact region 231 of the other cutting blade 1-9 does not come into contact with the first region 243 of the nut contact surface 24. For this reason, even when a plurality of cutting blades 1-9 according to the ninth embodiment described above are stacked and housed in the blade case 200, it is possible to prevent foreign matter from adhering to the end face contact region 231 and the end face contact region 231 from being damaged.

[0082] In the cutting blade 1-9 of embodiment 9, when cutting blades 1-9 are directly stacked on top of each other, other cutting blades 1-9 do not come into contact with the end face contact area 231, so similar to embodiment 1, etc., it has the effect of preventing foreign matter from adhering to the end face contact area 231 and preventing the end face contact area 231 from being damaged.

[0083] The present invention is not limited to the above-described embodiment, and can be implemented in various modifications without departing from the gist of the present invention. [Explanation of symbols]

[0084] 1,1-1,1-2,1-3,1-4,1-5,1-6,1-7,1-8,1-9 Cutting blade 2 bases 3 cutting blade 4 recess 21 Through hole 23 Mount contact surface 24 Nut contact surface 120 Mount 122 Boss Section 123 Blade support 124 End face 150 nuts 231 Edge contact area 243 1st area (area)

Claims

1. A cutting blade fixed to a mount having a boss portion into which the cutting blade is inserted and a blade support portion formed on the outer periphery of the boss portion and including an annular end surface that comes into contact with the cutting blade, The cutting blade is an annular base having a through hole formed in the center; a cutting blade formed on the outer periphery of the base, the boss portion is inserted into the through hole, and the end face is brought into contact with the base, and a nut is fastened to the boss portion, thereby fixing the mount; The base is a mount contact surface having an end surface contact area that contacts the end surface; a nut contact surface that contacts the nut on the opposite side to the mount contact surface; The cutting blade is The nut contact surface has a recess formed in a region facing the end face contact region, The mount contact surface is formed such that the end face contact area and an outer peripheral area outer than the end face contact area are flush with each other, and a step is formed between the end face contact area and an inner peripheral area inner than the end face contact area, making the inner peripheral area thinner than the end face contact area; A cutting blade characterized in that when a rod is passed through the through holes of multiple cutting blades and the multiple cutting blades are stacked on top of each other so that the nut contact surface and the mount contact surface are opposite to each other and are coaxial with each other, the end face contact area and the nut contact surface of the other overlapping cutting blade directly face each other with a gap between them.

2. A cutting blade fixed to a mount having a boss portion into which the cutting blade is inserted and a blade support portion formed on the outer periphery of the boss portion and including an annular end surface that comes into contact with the cutting blade, The cutting blade is an annular base having a through hole formed in the center; a cutting blade formed on the outer periphery of the base, a through-hole is inserted into the boss portion, and the end face is brought into contact with the base, and a nut is fastened to the boss portion, thereby fixing the mount; The base is a mount contact surface having an end surface contact area that contacts the end surface; a nut contact surface that contacts the nut on the opposite side to the mount contact surface; The cutting blade is the mount contact surface is formed such that the end face contact area is recessed; The nut contact surface has a first region facing the end face contact region of the nut contact region that overlaps with the nut and an outer peripheral region that is outer than the nut contact region, which are formed on the same plane, and a step is formed between the first region and a second region that is inner than the first region of the nut contact region, making the thickness of the second region thinner than the first region, A cutting blade characterized in that when a rod is passed through the through holes of multiple cutting blades and the multiple cutting blades are stacked on top of each other so that the nut contact surface and the mount contact surface are opposite to each other and are coaxial with each other, the end face contact area and the nut contact surface of the other overlapping cutting blade directly face each other with a gap between them.

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