Top-open type substrate container holding device

Abstract

To provide a top open type substrate container holding device.SOLUTION: A top open type substrate container holding device includes a holding assembly used to be operated to push a substrate actuator, wherein the substrate actuator is provided outside a substrate. The holding assembly includes a holding body, and a pushing actuator, and the pushing actuator includes: a first guide inclined surface which is used for pushing and displacing the substrate corresponding between a second guide inclined surface on an inner surface of a container and the first guide inclined surface by being brought into contact with the second guide inclined surface; and a pushing part which is connected to the first guide inclined surface, correspondingly pushes the substrate actuator according to the degree of pushing displacement of the first guide inclined surface, thereby makes the substrate actuator displace the substrate, and mutually stacks the substrates and positions the substrates.SELECTED DRAWING: Figure 2B

Description

[Technical Field]

[0001] The present invention provides a holding device, particularly a holding device for a top-open type substrate container, which can stably hold the loaded substrates and prevent damage, as well as adjust the number of loaded substrates. [Background technology]

[0002] In industrial electronics related sheet products, such as circuit boards, wafers, glass, and other sheet semiconductor workpieces, are often housed in containers for protection, mounting, and transportation. Containers for these sheet semiconductor workpieces, including electronics related products and semiconductor processing related materials, require properly designed substrate container protection and retention devices to prevent damage to the semiconductor workpieces mounted inside the container.

[0003] Common causes of damage to substrate workpieces include wear and tear due to vibration and friction, scratches, particle or dust contamination, and substrate collisions and breakage due to substrate shaking, bouncing, or dropping caused by instability in the container or its internal structure. This can result in reduced substrate quality and yield during the loading, handling, and transportation processes, and damage to semiconductor workpiece product substrates. Therefore, the industry has a high demand for a solution to how to stably hold multiple layers of substrates and avoid problems such as vibration, collision, displacement, and friction between substrates.

[0004] Furthermore, the current standards for the design of the mounting space of substrate containers are limited to a specific number of stacked substrates, and their functions and sizes are uniform. Therefore, new molds must be manufactured for the substrate containers according to the number of substrates to be mounted, which not only results in high costs and low utilization rates, but also lacks the function of securely holding the substrates.

[0005] Furthermore, in conventional substrate containers, when large substrates or a large number of substrates are loaded, the overall weight becomes relatively heavy, and the gate covering the substrate container may fall due to the weight being concentrated due to the center of gravity during transportation, which may cause deformation of the gate and adversely affect the airtightness of the container. Therefore, it is an extremely difficult task to provide an invention that can maintain airtightness even when a substrate container is loaded with a relatively heavy weight. Summary of the Invention [Problem to be solved by the invention]

[0006] In view of the above problems, the present invention provides a top-open type substrate container holding device that can stably push out and fix multiple layers of substrates, maintain airtightness, and combine the multifunctionality of a container that can be shared according to the number of substrates loaded, while also providing a solution to the problem of preventing vibration, movement, and friction between substrates. [Means for solving the problem]

[0007] One embodiment of the present invention comprises: a holding device for a top-open type substrate container, the holding device including a substrate actuator provided outside the substrate and a holding assembly provided in the storage space and operable to push the substrate actuator; the holding assembly including a holding body provided inside the container body and a pushing actuator provided on the holding body; the pushing actuator including a first inclined guide surface used to push a second inclined guide surface on the inner surface of the container gate body; and a pushing section connected to the first inclined guide surface for correspondingly pushing the substrate actuator; the first inclined guide surface pushing and displacing the substrate actuator correspondingly between the first inclined guide surface and the second inclined guide surface in response to the contact force of the container gate body; and the pushing section pushing the substrate actuator in response to the degree of pushing displacement of the first inclined guide surface, thereby displacing the substrates until the plurality of substrates are stacked and positioned on top of each other.

[0008] In one embodiment, the holding body includes an inclined guide groove, and the pushing-out actuator includes a guide portion connected to the pushing-out portion, the guide portion being protruded into the inclined guide groove, and the guide portion being displaced in the inclined guide groove in response to the contact force of the container gate body, thereby allowing the pushing-out actuator to move closer to or away from the holding body.

[0009] In one embodiment, the holding assembly further includes an elastic member provided between the holding body and the push-out actuator, and the elastic member is configured to provide an elastic change amount by which the guide portion is displaced along the inclined guide groove in a direction away from the holding body or in a direction toward the holding body along the inclined guide groove in response to the contact force of the container gate body.

[0010] In one embodiment, the substrate actuator includes a connection portion fixedly connected to the outside of the substrate, an elastic deformation portion connected to the connection portion, and a first fixing portion provided on one side of the elastic deformation portion, wherein the elastic deformation portion corresponds to the position of the pushing portion and provides a displacement amount for pushing the substrate according to the degree of pushing displacement of the pushing portion, and the first fixing portion is used to fix a second fixing portion of an adjacent substrate.

[0011] In one embodiment, the bottom of the inner surface of the container body further includes a bottom positioning portion, and the substrate has a substrate positioning member corresponding to the bottom positioning portion, which is used to position the substrate closest to the bottom of the inner surface within the storage space.

[0012] In one embodiment, the bottom of the inner surface of the container body further includes a bottom engaging device, which is used to engage and fix between the substrate closest to the bottom of the inner surface in the storage space and a substrate actuator provided thereon.

[0013] In one embodiment, the upper and lower surfaces of each substrate have stacking fasteners, and adjacent substrates are secured to each other in a layered stack by the stacking fasteners.

[0014] In one embodiment, the mounting bracket further includes at least one resilient abutment, the resilient abutment being provided on the bottom side of the substrate for resiliently abutting and mounting against the semiconductor workpiece on the substrate.

[0015] In one embodiment, the elastic abutment portion includes a fixed end and an elastic abutment arm, the fixed end is removably mounted on the bottom side of the substrate, one end of the elastic abutment arm is connected to the fixed end, and the other end of the elastic abutment arm elastically presses against the edge surface of the semiconductor workpiece.

[0016] In one embodiment, the inner wall of the container body is provided with error proofing to restrict the orientation of the substrate accommodated in the accommodation space.

[0017] An embodiment of the present invention provides a holding device for a top-open type substrate container, the holding device comprising: a top-open type substrate container including a container body and a container gate; the container gate combined with the container body forms a storage space; the storage space being used to store a plurality of substrates; the holding device including: a frame body provided in the storage space for mounting the substrates; a plurality of quick release members respectively provided on the outside of the frame body; and a plurality of displacement portions provided within the storage space for providing a displacement space for the holding assembly; each quick release member including an abutment portion and a shoulder portion, the shoulder portions being connected to both sides of the abutment portion; and a plurality of fasteners further provided on the inner wall of the container body, the abutment portions abutting the inner wall, and each fastener being fastened to the shoulder portion to fix the frame body.

[0018] In one embodiment, when the abutment is compressed away from the inner wall, the shoulder disengages from the fastener, thereby allowing the frame body to be removed.

[0019] In one embodiment, the bottom of the inner surface of the container body further includes a bottom positioning portion, the frame body includes a frame positioning member corresponding to the bottom positioning portion, the bottom positioning portion positions the frame positioning member to form a height distance between the frame body and the bottom of the inner surface of the container body, and the bottom positioning portion and the fastener are arranged at the same horizontal height.

[0020] In one embodiment, the inner wall of the container body is provided with error proofing to restrict the orientation of the frame body housed in the storage space.

[0021] In an embodiment of the present invention, a top-open type substrate container includes a container body and a container gate body, the container gate body being arranged to be combined with the container body, gateThe present invention provides a holding device for a top-open type substrate container, the holding device having a storage space for storing a latch mechanism, the holding device including at least one flattening member provided in the storage space, the flattening member extending entirely and abutting both opposing inner walls of the container body, and being provided parallel to the latch mechanism.

[0022] In one embodiment, the flattening member is a carbon rod, and the total height of the carbon rod is less than the total depth of the receiving space. [Effects of the Invention]

[0023] The top-open type substrate container holding device according to the present invention is provided with a push-out actuator and an inclined guide tank. When the container gate is closed on the container body, a contact force is simultaneously applied to the push-out actuator, causing the push-out actuator to operate and displace along the inclined guide tank. Consequently, the push-out portion of the push-out actuator displaces toward the substrate, pushing it out and securing the substrate to the substrate actuator. This provides the effect of stably securing the substrates being transported. [Brief explanation of the drawings]

[0024] [Figure 1] 1 is an external perspective view showing a top-open type substrate container according to an embodiment of the present invention. [Figure 2A] FIG. 1 is an exploded perspective view schematically showing a top-open type substrate container in an embodiment of the present invention. [Figure 2B] FIG. 10 is another exploded perspective view schematically showing a top-open type substrate container in an embodiment of the present invention. [Figure 3A] 10A and 10B are perspective views illustrating a method of attaching a holding assembly in an embodiment of the present invention. [Figure 3B] FIG. 1 is a side view of a retention assembly according to an embodiment of the present invention. [Figure 3C]FIG. 1 is a perspective view of a container gate and retention assembly according to an embodiment of the present invention. [Figure 4A] FIG. 2 is a perspective view showing a substrate and a substrate actuator in an embodiment of the present invention. [Figure 4B] FIG. 2 is a partially enlarged top view showing a substrate and a substrate actuator in an embodiment of the present invention. [Figure 4C] FIG. 2 is an exploded perspective view schematically illustrating a substrate, a substrate actuator, and a holding assembly in an embodiment of the present invention. [Figure 4D] FIG. 2 is a perspective view showing an elastic deformation portion of a substrate actuator before deformation in an embodiment of the present invention. [Figure 4E] FIG. 2 is a schematic diagram illustrating a holding assembly prior to extrusion in an embodiment of the present invention. [Figure 4F] FIG. 2 is a schematic diagram showing a holding assembly after extrusion in an embodiment of the present invention. [Figure 5A] FIG. 2 is a perspective view showing an enlarged portion of a stacking and fixing portion of substrates in an embodiment of the present invention. [Figure 5B] FIG. 2 is a perspective view showing a partially enlarged portion of a container body in an embodiment of the present invention. [Figure 5C] FIG. 2 is another perspective view showing a partially enlarged portion of the container body in the embodiment of the present invention. [Figure 6A] 10A and 10B are perspective views schematically illustrating a method for assembling an elastic contact portion in the embodiment of the present invention. [Figure 6B] FIG. 4 is a perspective view showing an elastic contact portion in the embodiment of the present invention. [Figure 6C] FIG. 10 is a perspective view showing the elastic contact portion in the embodiment of the present invention from a different viewing angle. [Figure 7A] FIG. 1 is an exploded perspective view schematically showing a top-open type substrate container in an embodiment of the present invention. [Figure 7B] FIG. 2 is an exploded perspective view showing a schematic mounting state of a frame body in the embodiment of the present invention. [Figure 8A] FIG. 2 is a plan view schematically showing a frame body and a quick release member according to an embodiment of the present invention. [Figure 8B] FIG. 2 is a schematic diagram showing an enlarged portion of a frame body in the embodiment of the present invention. [Figure 8C] FIG. 2 is a cross-sectional view schematically showing a frame body in the embodiment of the present invention. [Figure 8D] FIG. 10 is a cross-sectional view schematically showing a modified example of the frame body in the embodiment of the present invention. [Figure 8E] FIG. 10 is a cross-sectional view schematically showing another modified example of the frame body in the embodiment of the present invention. [Figure 9] FIG. 2 is an exploded perspective view schematically showing a container gate body in an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0025] In order to explain the technical contents of the present invention in detail, the following embodiments will be further described in conjunction with the drawings. It should be noted that in the present context, terms such as "first," "second," and "third" are used to distinguish between components, but are not used to limit the components themselves or to indicate a specific order of the components. In addition, in the present context, unless a specific quantity is specified, the article "one" refers to one component or more than one component.

[0026] In order to fully understand the objects, features and advantages of the present invention, the present invention will be described in detail below with reference to the following specific embodiments and accompanying drawings.

[0027] Fig. 1 is an external perspective view showing a top-open type substrate container according to an embodiment of the present invention. Fig. 2A is an exploded perspective view schematically showing a top-open type substrate container according to an embodiment of the present invention. Fig. 2B is another exploded perspective view schematically showing another top-open type substrate container according to an embodiment of the present invention, with the viewing angle of the components adjusted for ease of explanation.

[0028] 1, 2A, and 2B. A top-open type substrate container 10 to which a top-open type substrate container holding device according to an embodiment of the present invention is applied includes a container body 100 and a container gate body 200. The container gate body 200 is adapted to be combined with the container body 100 to form a receiving space 180. The storage space 180 of the container body 100 is used to store a plurality of substrates 700, which may be trays for carrying semiconductor workpieces (e.g., wafers or printed circuit boards (PCBs)). Of course, the container body 100 is also applicable to storing various types of sheet-like substrates and is suitable for storing and carrying sheet products related to industrial electronic components, including, but not limited to, semiconductor workpieces such as circuit boards, wafers, substrates, and glass. In one embodiment of the present invention, a container gate 200 is positioned at the upper opening of the container body 100 to seal the upper opening of the container body 100. The internal space formed by the container gate 200 and the container body 100 serves as the storage space 180, which can store a plurality of stacked sheet-like substrates 700.

[0029] As shown in FIGS. 2A and 2B , substrates 700 can be accommodated within the container body 100 of the top-opening substrate container 10. In this embodiment, the substrate 700 is described using a tray as an example. The substrate 700 is used to mount and hold sheet-like semiconductor workpieces, and each semiconductor workpiece can be mounted individually by one substrate 700, and the number of substrates 700 may be one or more. Multiple substrates 700 can be aligned and stacked with each other, so that the mounted semiconductor workpieces can be held and stored within the top-opening substrate container 10 while maintaining a certain distance from each other. It should be noted that the shape of the substrate 700 shown in the drawings is merely an example, and any device having an arbitrary shape and structure for mounting semiconductor workpieces may be a modified version of the substrate 700.

[0030] As shown in FIGS. 2A and 2B, the holding device is applied to a top-open type substrate container 10. The holding device includes a holding assembly 300 mounted on the container body 100 and a substrate actuator 400. The substrate actuator 400 is mounted outside the substrate 700, and the holding assembly 300 is mounted within the storage space 180. The holding assembly 300 is used to push and operate the substrate actuator 400 to hold the substrate 700. The holding assembly 300 includes a holding body 310 and a pushing actuator 320. The holding body 310 is mounted inside the container body 100, and the pushing actuator 320 is mounted on the holding body 310. The pushing actuator 320 includes a first guide slope 322 and a pushing portion 323. See also FIG. 3C. The first guide slope 322 is used to abut against the second guide slope 211 on the inner surface 210 of the container gate 200. The first inclined guide surface 322 is pushed and displaced between the first inclined guide surface 322 and the second inclined guide surface 211 in response to the contact force of the container gate 200. The pushing portion 323 is connected to the first inclined guide surface 322, and corresponds to the position of the substrate actuator 400. The pushing portion 323 pushes and operates the substrate actuator 400 in response to the degree of pushing and displacement of the first inclined guide surface 322, so that the substrate actuator 400 displaces the substrates 700 until the substrates 700 are positioned and stacked on top of each other. In this embodiment of the present invention, the holding assembly 300 further includes an elastic member 330, which will be described later.

[0031] In one embodiment, there are a plurality of holding assemblies 300 (e.g., eight), each provided around the periphery of the container body 100 and facing one side of the receiving space 180. This allows the edges of the substrates 700 to be stably fixed, preventing the substrates 700 from vibrating, shaking, or colliding with each other. The number of holding assemblies 300 can be adjusted according to needs and is not limited here.

[0032] Please refer to Figures 3A through 3C simultaneously. Figure 3A is a perspective view illustrating a method of attaching a retention assembly 300 according to an embodiment of the present invention. Figure 3B is a side view of retention assembly 300 according to an embodiment of the present invention. Figure 3C is a perspective view of a container gate and retention assembly according to an embodiment of the present invention.

[0033] The holding assembly 300 is provided on an inner mounting portion 120 of the container body 100 facing the inside of the portion where the substrate 700 is stored. The inner mounting portion 120 may be, for example, a recessed groove or an engagement groove, and has an engagement structure that engages with and fixes the holding body 310 of the holding assembly 300. This stably fixes the holding assembly 300, and also makes the holding assembly 300 elastically detachable and adjustable.

[0034] Here, the operation of the holding assembly 300 will be described in detail. The holding body 310 includes an inclined guide groove 311, and the pushing actuator 320 includes a guide portion 321 connected to a pushing portion 323. The guide portion 321 is protruding from the inclined guide groove 311, so that the guide portion 321 can move only along the axis of the inclined guide groove 311. Please also refer to FIG. 4C. The elastic member 330 is provided between the holding body 310 and the pushing actuator 320, and the guide portion 321 is protruding from the inclined guide groove 311, so that the pushing actuator 320 will not fall off even when attached to the holding body 310. During the process of closing the container gate 200 relative to the container body 100, the inner surface 210 of the container gate 200 faces the push-out actuator 320, causing the second inclined guide surface 211 to push the first inclined guide surface 322 of the push-out actuator 320 downward. The first inclined guide surface 322 pushes out and displaces between the first inclined guide surface 322 and the second inclined guide surface 211 in response to the contact force of the container gate 200. At the same time, the pushing-out portion 323 is connected to the first inclined guide surface 322, so the pushing-out portion 323 operates in response to the pushing distance of the first inclined guide surface 322. The first inclined guide surface 322 contacts the second inclined guide surface 211 only at its end points. This not only concentrates the points of action but also reduces the contact area, thereby avoiding the problem of dust generation due to friction.

[0035] Specifically, the push-out portion 323 corresponds to the position of the substrate actuator 400. The push-out portion 323 displaces the guide portion 321 along the axis of the inclined guide tank 311 (as shown by the arrow in FIG. 3B ) depending on the degree of extrusion displacement of the first guide slope 322 until the guide portion 321 is positioned at the closed end 312 of the inclined guide tank 311, thereby moving the push-out actuator 320 away from the holding body 310. The elastic member 330 is arranged to provide an elastic change (elastic stretch) for the guide portion 321 to be displaced along the inclined guide tank 311 in a direction away from the holding body 310 depending on the contact force of the container gate 200. In other words, the guide portion 321 of the push-out actuator 320 undergoes a downward guided displacement process in the inclined guide tank 311 of the holding body 310, whereby the elastic member 330 is gradually stretched, and the push-out actuator 320 moves slightly away from the holding body 310. At this time, the push-out actuator 320 moves toward the substrate actuator 400 that sandwiches the substrate 700.

[0036] Conversely, in the process of opening the container gate 200 relative to the container body 100, the elastic member 330 provides an elastic change in displacement (elastic return) such that the guide portion 321 moves away from the closed end 312 and moves along the inclined guide groove 311 toward the holding body 310 in response to the contact force of the container gate 200. In other words, when the container gate 200 is removed, the elastic member 330 releases the elastic displacement energy, and the guide portion 321 of the push-out actuator 320 undergoes a process of being guided upward in the inclined guide groove 311 of the holding body 310 and displacing, whereby the push-out actuator 320 approaches the holding body 310 and separates from the substrate actuator 400, thereby releasing the state of contact with the substrate actuator 400. At the same time, when the force on the substrate actuator 400 is released, the deformation of the elastic deformation portion 420 is also released, which releases the interference between the first fixing portion 410 and the second fixing portion 720, and the stacked substrates 700 are no longer fixed to each other. The first fixing portion 410 of the substrate actuator 400 attached to the bottommost substrate 700 also no longer interferes with the bottom engaging member 110 at the bottom of the container body 100, making it possible to freely remove the multiple substrates 700 one by one or all at once using a machine stand, a robot arm, or manual means.

[0037] As described above, the elastic locking and releasing mechanism for the substrates 700 allows the top-opening substrate container 10 equipped with the holding device of the present invention to have many advantages, such as simple, intuitive operation, and reduced error. Operators or automated machines can stably and effectively lock and secure the substrates 700 simply by covering the container gate 200, without requiring any additional operating procedures. Furthermore, simply removing the container gate 200 allows the substrates 700 to automatically return to a non-interfering state.

[0038] The elastic member 330 is provided, for example, on the opposite side of the push-out actuator 320 from the holding body 310 , with one end of the elastic member 330 fixed to the holding body 310 and the other end pressed against the push-out actuator 320 .

[0039] The slope normal vector of the first inclined guide surface 322 is parallel to the slope normal vector of the second inclined guide surface 211, i.e., they have the same slope angle. The angle and size of the second inclined guide surface 211 are designed to match those of the first inclined guide surface 322. The slope length of the first inclined guide surface 322 is equal to the displacement stroke length of the inclined guide tank 311. Thus, by providing the second inclined guide surface 211 on the container gate body 200, when the container gate body 200 presses vertically against the extrusion actuator 320, the first inclined guide surface 322 can be displaced synchronously with the extrusion actuator 320 displacing along the inclined guide tank 311, thereby ensuring that the extrusion actuator 320 provides a stable downward force.

[0040] The first guide inclined surface 322 of the push-out actuator 320 and the second guide inclined surface 211 of the container gate body 200 may have other structural forms, and structures in which they can slide together and contact each other with a smaller contact area are also within the scope of protection of the present invention.

[0041] The operational relationship between the holding assembly 300 and the substrate actuator 400 and the detailed structure of the substrate actuator 400 will now be described. Please refer to FIGS. 4A to 4F simultaneously. FIG. 4A is a perspective view showing a substrate and a substrate actuator in an embodiment of the present invention. FIG. 4B is a partially enlarged top view showing a substrate and a substrate actuator in an embodiment of the present invention. FIG. 4C is an exploded perspective view schematically showing a substrate, a substrate actuator, and a holding assembly in an embodiment of the present invention. FIG. 4D is a perspective view showing an elastically deformable portion of a substrate actuator before deformation in an embodiment of the present invention. FIG. 4E is a schematic view showing a holding assembly before extrusion in an embodiment of the present invention. FIG. 4F is a schematic view showing a holding assembly after extrusion in an embodiment of the present invention. In addition, FIGS. 4E and 4F are cross-sectional views taken along line A-A' in FIG. 1.

[0042] The substrate actuator 400 is used as a buffer elastic member for buffering, sandwiching, and fixing between the push-out actuator 320 and the substrate 700. The substrate actuator 400 includes a connecting portion 430, an elastically deforming portion 420, and a first fixing portion 410. The connecting portion 430 is fixedly connected to the outer side (e.g., the edge) of the substrate 700. The connecting portions 430 are located at both ends of the elastically deforming portion 420 and are fixedly connected to the outer side of the substrate 700 in a sandwiching manner. The elastically deforming portion 420 is connected to the connecting portion 430 and is arranged to correspond to the position of the push-out portion 323. The first fixing portion 410 is provided on one side (e.g., the lower side) of the elastically deforming portion 420 and is used to fix the second fixing portion 720 of the adjacent substrate 700.

[0043] When the push-out actuator 320 receives the contact force of the container gate 200 and moves away from the holding body 310 while applying the contact force in the direction of the elastic deformation part 420, the elastic deformation part 420 corresponds to the position of the push-out part 323, and the elastic deformation part 420 elastically deforms the substrate 700 to provide a pushing displacement amount according to the pushing displacement level of the push-out part 323. In other words, the push-out part 323 of the push-out actuator 320 is pressed against the elastic deformation part 420, and the elastic deformation part 420 displaces toward the second fixing part 720 of the adjacent substrate 700 in conjunction with the first fixing part 410, until the container gate 200 completely closes the container body 100, the elastic deformation part 420 receives the maximum contact force and fixes the first fixing part 410 on the second fixing part 720 of the adjacent substrate 700. Since the storage space 180 is used to accommodate multiple substrates 700, the cooperative operation between the holding assembly 300 and the substrate actuator 400 allows each first fixing portion 410 to be fixed to the adjacent substrate 700 layer by layer, thereby achieving the effect of positioning the multiple substrates 700 in a stacked manner.

[0044] According to the above operating principle, the push-out actuator 320 applies force to the elastic deformation portion 420 of the substrate actuator 400, and the first fixing portion 410 and the second fixing portion 720 of the stacked substrates 700 are interlocked and connected to each other, thereby achieving a further positioning effect for each of the substrates 700. When the container gate 200 covers the container body 100, the pushing operation of the push-out actuator 320 is stopped. The uppermost substrate 700 may not have a semiconductor workpiece mounted thereon to reduce the risk of damage to the substrate.

[0045] The elastically deformable elastic deformation portion 420 provides the substrate actuator 400 with excellent deformation elasticity and cushioning effect, so that when the push-out actuator 320 is about to come into contact with the substrate 700, the substrate actuator 400 can fix the substrate 700 appropriately and stably.

[0046] As a result, not only can the substrates 700 connected and fixed by the substrate actuators 400 be stably fixed by the abutment of the push-out actuators 320 of the holding assembly 300, but adjacent substrates 700 can also be abutted and fixed at the same time, thereby achieving the effect of stably locking multiple layered substrates 700. Furthermore, each substrate 700 has a corresponding substrate actuator 400, which allows the respective substrates 700 to be abutted and fixed, thereby achieving the effect of all substrates 700 in the top-open type substrate container 10 being stably sandwiched and fixed to each other, and preventing friction or collision of the substrates 700 due to shaking or vibration of the container body 100.

[0047] The elastic deformation portion 420 can realize the engagement and connection between the first fixing portion 410 and the second fixing portion 720 without requiring an excessive stroke. Furthermore, due to the structural characteristics of the engagement and connection, in addition to the horizontal abutment and fixation, the engagement structure itself can also provide vertical engagement and fixation, thereby increasing the strength of the abutment and fixation.

[0048] Please refer to Figures 5A to 5C. Figure 5A is a perspective view showing a partially enlarged portion of a stacking and fixing portion 710 of a substrate 700 in an embodiment of the present invention. Figure 5B is a perspective view showing a partially enlarged portion of a container body 100 in an embodiment of the present invention. Figure 5C is another perspective view showing a partially enlarged portion of a container body 100 in an embodiment of the present invention.

[0049] The bottom inner surface 190 of the container body 100 further includes a bottom positioning member 130, which is used to engage and fix the substrate 700 closest to the bottom inner surface 190 in the receiving space 180 with the substrate actuator 400 provided thereon. The bottom positioning member 130 is preferably installed at an inner edge corner of the receiving space 180, thereby stably fixing and positioning each corner of the substrate 700. The installation position and number of the bottom positioning members 130 are naturally not limited, and any position or number that can be adapted to the shape of the substrate 700 falls within the technical scope of the present invention. The top and bottom surfaces of each substrate 700 have corresponding stacking fixing portions 710, respectively, and adjacent substrates 700 are stacked and fixed to each other by the stacking fixing portions 710. The stacking fixture 710 of the substrate 700 closest to the bottom inner surface 190 can simultaneously fit over the bottom positioning member 130 to align and fix the bottom positioning member 130 in position.

[0050] The container body 100 further includes a bottom engaging device 110 below the inner mounting portion 120 to which the holding assembly 300 is attached. The bottom engaging device 110 is arranged to contact the first fixing portion 410 of the substrate actuator 400 corresponding to the substrate 700 located at the bottom layer, and stably holds the bottom layer substrate 700. The bottom engaging device 110 has a barbed hook structure, and by engaging with and fixing the first fixing portion 410 corresponding to the bottom layer substrate 700, the fixation between all the substrates 700 and the container body 100 is strengthened.

[0051] An error proofing member 170 is provided on the inner wall of the container body 100. The error proofing member 170 is used to restrict the orientation of the substrate 700 accommodated in the storage space 180. The error proofing member 170 is, for example, a protruding columnar structure that corresponds to the concave structure on the edge of the substrate 700, thereby enabling the substrate 700 to be placed in the container body 100 in the correct orientation.

[0052] The stacking fixture 710 may have a concave-convex structure, thereby achieving alignment and accurate stacking. It should be noted that the stacking fixture 710 is not limited to a concave-convex structure, but may be any other stackable structure for alignment that is readily conceivable in accordance with the present invention. Other types of structures and principles other than applied mechanics may also be used, such as using magnetic forces to stack all of the substrates 700 together, to align the multiple substrates 700 vertically and reduce lateral movement between the substrates 700.

[0053] Please refer to Figures 6A to 6C at the same time. Figure 6A is a perspective view schematically showing a method of assembling the elastic contact portion 500 in the embodiment of the present invention. Figure 6B is a perspective view showing the elastic contact portion 500 in the embodiment of the present invention. Figure 6C is a perspective view showing the elastic contact portion 500 in the embodiment of the present invention from a different viewing angle.

[0054] The holding device further includes a resilient abutment 500 provided on the bottom side of the substrate 700 (e.g., the bottom side of the edge of the substrate 700). The resilient abutment 500 is used to resiliently abut the semiconductor workpiece 800 mounted on the substrate 700, for example, to resiliently press against the edge surface of the semiconductor workpiece 800 mounted on an adjacent substrate 700 in a plane close to the edge of the substrate 700. The resilient abutment 500 resiliently abuts and presses against the semiconductor workpiece 800 mounted on the adjacent substrate 700 below, thereby preventing displacement of the semiconductor workpiece 800. The uppermost substrate 700 may not have a semiconductor workpiece 800 mounted thereon, and the resilient abutment of the resilient abutment 500 can sufficiently secure the semiconductor workpiece 800 mounted on the adjacent substrate 700 below by utilizing its pressing force. As a result, when the substrates 700 are stacked in layers, the elastic abutment portion 500 can provide abutment and fixation of the semiconductor workpieces 800 mounted on the substrates 700, thereby reducing or preventing displacement, vibration, and friction between the substrates 700 or the semiconductor workpieces 800.

[0055] The elastic abutment portion 500 includes a fixed end 510 and an elastic abutment arm 520. The fixed end 510 is detachably mounted adjacent to the bottom side of the edge of the substrate 700, one end of the elastic abutment arm 520 is connected to the fixed end 510, and the other end of the elastic abutment arm 520 elastically presses against the edge surface of the semiconductor workpiece 800. The elastic abutment arm 520 extends from the fixed end 510 toward both ends and elastically abuts against the edge surface of the semiconductor workpiece 800. This allows the horizontal point contact to stably abut the substrate 700 while reducing the friction area.

[0056] The structural design and operation of a holding device according to the present invention, which is capable of adjusting the number of different substrates loaded, will now be described. Please refer to Figures 7A to 8E at the same time. Figure 7A is an exploded perspective view schematically showing a top-open type substrate container according to an embodiment of the present invention. Figure 7B is an exploded perspective view schematically showing the attached state of a frame body according to an embodiment of the present invention. Figure 8A is a plan view schematically showing a frame body and quick release members according to an embodiment of the present invention. Figure 8B is a schematic view showing an enlarged portion of the frame body according to an embodiment of the present invention.

[0057] The holding device according to the present invention is applied to a top-opening substrate container 10. The same structures, functions, and part numbers of the top-opening substrate container 10, substrate actuator 400, and holding assembly 300 used in the present invention will not be described again, and only the differences will be described. In this embodiment, only the holding device with a novel structure according to the present invention will be described, which solves the problem that a top-opening substrate container 10 with a single function and size lacks elasticity due to weight and load capacity limitations. This application solves the problem that when the number of substrates 700 loaded is less than the predetermined number, the substrates 700 cannot be effectively pressed due to the lack of filler between the top of the container body 100 and the container opening, making the container body 100 prone to damage due to shaking, vibration, or jumping. This solves the problem that the container body 100 can usually only load a predetermined number of substrates 700 and cannot load more or less than that number of substrates 700.

[0058] First, the detailed structural design of the holding device will be described. The holding device includes a frame body 600, multiple quick-release members 610, and multiple displacement members 620. The frame body 600 is installed in the storage space 180 and is used to mount the substrate 700. The frame body 600 includes a frame positioning member 631, and the container body 100 includes a support member 140. The support member 140 can be designed to various heights in the storage space 180 and functions as a bottom positioning member for the frame body 600 depending on the installation position of the frame body 600. This allows the frame body 600 to be elevated a certain height from the bottom 190 of the inner surface of the storage space 180. The frame positioning member 631 and the support member 140 are fixed to each other, thereby providing weight support and position restriction functions. The support member 140 may be a protruding structure, and the design of the shape structure is not limited here. It is used to engage with the frame positioning member 631 and thereby restrict the position of the frame body 600. The container body 100 includes a support auxiliary member 160, which can provide weight support and positional constraints when mated with the frame body 600.

[0059] The multiple quick release members 610 are respectively provided on the outer side (e.g., edge) of the frame body 600, and each quick release member 610 includes an abutment portion 611 and an opposite shoulder portion 612. The shoulder portions 612 are connected to both sides of the abutment portion 611. The inner wall of the container body 100 is further provided with multiple fasteners 150, and the abutment portions 611 abut the inner wall, and the fasteners 150 can be fastened to the shoulder portions 612 to fix the frame body 600. The multiple displacement portions 620 provide a displacement space for the holding assembly 300 provided in the storage space 180, so that there is no need to adjust the original structural features or structure of the container body 100 to accommodate the frame body 600.

[0060] An anti-misalignment member 170 is provided on the inner wall of the container body 100, and is used to restrict the orientation of the frame body 600 housed in the storage space 180. The anti-misalignment member 170 is, for example, a protruding columnar structure, which can accommodate the concave structure at the edge of the frame body 600, allowing the frame body 600 to be installed in the container body 100 in the correct orientation.

[0061] Each quick release member 610 is provided on an edge of the frame body 600 and includes a displacement structure. The abutment portion 611 is connected to the frame body 600 and bent downward to form a resilient pressure hook that is hooked at its end. The end of the pressure hook may have a flat surface to increase the pressure area against the container body 100. The shoulder portion 612 is located at the end of the abutment portion 611 and protrudes from both ends of the pressure hook relative to the flat surface, thereby limiting its position within the fastener 150 of the container body 100. When the abutment portion 611 is compressed and separated from the inner wall by a certain distance, the shoulder portion 612 separates from the fastener 150, allowing the frame body 600 to be removed.

[0062] The shoulder portion 612 may have a ring or semi-ring structure, thereby providing an engagement and positioning structure with a deformation-absorbing function and a tool-resistant force for releasing the engagement and fastening, thereby enabling it to be detached from the fastener 150. The abutment portion 611 can be adjusted to have a high hardness depending on its structure or material, thereby preventing the frame body 600 from being easily removed by human error, which can lead to an error in the type and number of substrates 700 to be mounted in the subsequent manufacturing process. It should be noted that this embodiment is not limited to the structure or shape of the quick release member 610 and the fastener 150. Any structure that engages and fastens the frame body 600 within the container body 100 is within the technical scope of the present patent invention.

[0063] The frame body 600 provided in the receiving space 180 may be installed in various ways. For example, the frame body 600 may include a raised mounting surface 650 for mounting the substrate 700, thereby further increasing the height of the mounting surface on which the substrate 700 is mounted. In other words, the height of the frame body 600 from the bottom 190 of the inner surface of the receiving space 180 can be increased, thereby reducing the number of substrates 700 to be mounted and allowing the mounted substrates 700 to be closer to the container gate body 200.

[0064] Furthermore, in one embodiment, the frame body 600 includes a recessed mounting surface 660 used for mounting the substrates 700, which allows the mounting plane of the mounted substrates 700 to be further lowered compared to the height of the original mounting mat. In other words, the height of the frame body 600 from the bottom 190 of the inner surface of the storage space 180 can be lowered, thereby increasing the number of substrates 700 that can be mounted. Thus, the various modified raised mounting surfaces 650 and recessed mounting surfaces 660 of the frame body 600 allow the frame body 600 to be more flexibly adapted to substrates 700 of various types, sizes, and thicknesses, greatly increasing the versatility of the top-open type substrate container 10.

[0065] According to the frame body 600 of the holding device provided in the embodiment of the present invention, when a small number of substrates 700 are loaded, the substrates 700 can be brought closer to the container opening and the overall center of gravity can be raised. This not only improves safety and stability by preventing the substrates 700 from easily shaking within the frame body 600, but also provides the effect of enabling substrates 700 of different types, sizes, and thicknesses to be effectively loaded into one size of container body 100.

[0066] The frame body 600 includes a stacking alignment portion 640 used to hold and fix the substrate 700, and the substrate 700 is used to mount the semiconductor workpiece 800. As described above, the substrate 700 has stacking fixing portions 710 on its upper and lower surfaces, and the stacking alignment portion 640 is designed to match the structural or functional features of the stacking fixing portions 710, thereby fixing the substrate 700 to the frame body 600 and restricting its position. The structural features of the frame body 600 are provided on both the front and back surfaces of the frame body 600, allowing the frame body 600 to be inserted and fixed into the container body 100 on any surface while maintaining its structural function on both sides, thereby greatly improving convenience in use.

[0067] The frame body 600 according to the present invention not only solves the problem of the container body 100 being prone to shaking when only a small number of substrates 700 are being transported when the substrates 700 loaded thereon are raised, but also further elevates the overall center of gravity, thereby enabling the top-opening substrate container 10 to be safely and effectively transported and shipped even when the substrates 700 are very heavy. Furthermore, the frame body 600 according to the present invention also solves the problem of having to manufacture new molds for the top-opening substrate container 10 to accommodate various types and specifications of substrates 700 so that the top-opening substrate container 10 can accommodate designs for substrates 700 of various types, sizes, thicknesses, and densities. The frame body 600 provided by the present invention allows a top-opening substrate container 10 of a single functional size to be used for substrates 700 of different types, sizes, thicknesses, and densities by simply redesigning the frame body 600, thereby achieving significant reductions in production costs and improved utilization efficiency.

[0068] 9 is an exploded perspective view showing a schematic diagram of a container gate to which a holding device according to an embodiment of the present invention is applied. The holding device according to the present invention is adapted to a top-open type substrate container 10. The same structures, functions, and part numbers in the top-open type substrate container 10, substrate actuator 400, and holding assembly 300 used in the present invention will not be described again, and only the differences will be described. In this embodiment, only the holding device having a novel structure according to the present invention will be described, which is capable of maintaining airtightness even under the condition that the container gate 200 of the top-open type substrate container 10 carries a large weight.

[0069] The holding device according to the present invention includes at least one flattening member 240. The container gate 200 includes a gate shell 250 and a gate panel 220. The gate panel 220 is combined with the gate shell 250 to form a storage space 251. The storage space 251 is used to accommodate the latch mechanism 230. The flattening member 240 is disposed within the storage space 251, and the flattening member 240 extends so as to abut the two opposing inner walls of the container gate 200 (i.e., the two opposing inner walls of the gate shell 250). The flattening member 240 is disposed parallel to the latch mechanism 230. The flattening member 240 is a carbon rod, and the height of the carbon rod is shorter than the total depth of the storage space 251. The flattening member 240 may be made of a highly rigid, lightweight, and flexible material.

[0070] The flattening member 240, with its extended length extending to abut two opposing inner walls, provides structural support and distribution of force transmission to the gate shell 250. Consequently, it provides structural reinforcement and a uniform pressure effect to the gate shell 250. The flattening member 240 is provided at the carrying position of the adjacent container gate 200, for example, on the ears 252 at both ends as shown in FIG.

[0071] Thus, by providing the flattening member 240 within the container gate 200 of the holding device, the pressure points of the flattening member 240 are concentrated on the latch mechanism 230 and the locking point of the container body 100 during loading and transportation of the container gate 200, and the large pressure from the ears on both sides can be distributed to the gate shell 250 by the extension length of the flattening member 240. Furthermore, this solves the problem of the load weight limit imposed on the top-open type substrate container 10, and also solves the problem that when the load weight reaches the upper limit, the container gate 200 of the top-open type substrate container 10 is likely to be distorted or deformed during frequent transportation and loading and transportation, which will affect the airtightness and ultimately lead to the container gate 200 being deformed and separated, resulting in detachment or damage.

[0072] Furthermore, because the weight of the flattening member 240 is much lighter than the weight of the latching mechanism 230, it is possible to solve the problem of using multiple latching mechanisms 230 distributed at various locations on the container gate 200 to stably lock the top-opening substrate container 10. This approach can improve gate deformation by distributing the lifting load using the multiple latching mechanisms 230 when the top-opening substrate container 10 is transferred. However, the need for multiple latching mechanisms 230 not only increases the overall weight of the top-opening substrate container 10, but also complicates assembly and increases manufacturing costs. Furthermore, the design of the container gate 200 and the multiple latching mechanisms 230 is difficult to achieve in order to distribute the load. However, the flattening member 240 according to the present invention is much lighter than the latching mechanism 230, so it can solve the problem of the container gate 200 deforming due to the flattening member 240 even when a small number of latching mechanisms 230 are used. Furthermore, the lightweight member can improve the airtightness of the gate.

[0073] In one embodiment of the present invention, multiple latch mechanisms 230 can be installed, which allows for more locking positions and adjustments to various structures. For example, installing two latch mechanisms 230 can effectively balance locking and weight distribution.

[0074] In one embodiment of the present invention, there are multiple flattening members 240, which can provide different positions, structural support, and force distribution for different pressures on the gate shell 250. The multiple flattening members 240, for example, two flattening members 240, are fixed to both sides of the gate shell 250, which can evenly distribute pressure on the edges of the gate shell 250 and strengthen the structural support and pressure distribution of the ears 252 of the gate shell 250.

[0075] In one embodiment of the present invention, the extended length of the flattening member 240 extends from one end of the gate shell 250 to the other and is extruded onto two opposite inner walls of the container gate 200. This distributes the force exerted across the entire length of the gate shell 250 and provides structural support to the entire gate shell 250.

[0076] In one embodiment of the present invention, the flattening member 240 and the latch mechanism 230 are arranged in parallel, providing force distribution and structural support for the locking position near the latch mechanism 230. The parallel arrangement of the flattening member 240 and the latch mechanism 230 allows for uniform distribution of the pressure points of the ears 252 and the locking pressure points of the latch mechanism 230 in the vicinity, while also benefiting the spatial distribution design within the gate shell 250. The flattening member 240 and the latch mechanism 230 are arranged symmetrically, providing symmetrical support structure and pressure distribution, thereby preventing shifting or deformation of the container gate 200.

[0077] In one embodiment of the present invention, the latch mechanism 230 includes a control member 231 and a latch arm 232. The control member 231 controls the latch arm 232 to selectively protrude outside the gate shell 250 to lock the container gate 200 to the container body 100, or controls the latch arm 232 to retract to release the lock between the container gate 200 and the container body 100. The control member 231 is, for example, a cam, and the latch arm 232 connected to the cam is driven to protrude or retract by rotating the cam. The flattening member 240 and the latch arm 232 of the latch mechanism 230 are arranged in parallel, which provides force distribution and structural support near the locking position of the latch arm 232 and the container gate 200, and can uniformly distribute the pressure points of the ears 252 and the locking pressure points of the latch arms 232 in the vicinity, which is also beneficial to the space distribution design within the gate shell 250, thereby reducing the overlapping of the flattening member 240 and the latch arms 232, maintaining the extension length of the flattening member 240, and more effectively achieving structural support and force distribution. It should be noted that the number and positions of the flattening member 240 and the latch mechanism 230 are not limited to those illustrated in this embodiment.

[0078] The flattening member 240 of the holding device provided in this embodiment of the present invention distributes the overall load of the container gate 200, thereby strengthening the flatness of the gate shell 250. This prevents gaps from occurring in the airtight tape between the container gate 200 and the container body 100, while also increasing the strength of the container gate 200 and achieving flatness and airtightness. Furthermore, the flattening member 240 can replace some of the latch mechanisms 230, minimizing the number of latch mechanisms 230. This not only reduces the overall weight of the container gate 200, but also reduces wear and tear on parts, thereby reducing production costs.

[0079] In this way, the holding device of the present invention can not only firmly and stably fix the substrates loaded in a top-open type substrate container to prevent the substrates from shaking or colliding, but also maintain stability when loading different quantities of substrates to avoid harm caused by shaking or an excessively low center of gravity, and can maintain the structural strength and airtightness of the container gate body to keep the substrates inside the container gate body clean and reduce the risk of them falling, and further has the effect of protecting the loaded substrate container.

[0080] Although the present invention has been described with more excellent embodiments, those skilled in the art will recognize that the above embodiments are merely used to explain the present invention and should not be construed as limiting the scope of the present invention. It should be noted that any equivalent modifications or replacements of the above embodiments should be understood to fall within the scope of the present invention. Therefore, the scope of protection of the present invention is as defined in the appended claims, and the appended claims should be accorded the broadest interpretation so as to encompass all amendments, similar designs, processes, etc. [Explanation of symbols]

[0081] 10 Top-open type substrate container 100 container body 110 Bottom engagement tool 120 Inner mounting part 130 Bottom positioning member 140 Support member 150 Fasteners 160 Support auxiliary member 170 Position-shift prevention member 180 storage space 190 Inner surface bottom 200 Container gate body 210 Inner surface 211 Second guide slope 220 Gate Panel 230 Latch mechanism 231 Control members 232 Latch Arm 240 Flattening member 250 Gate shell 251 Storage Space 252 Ears 300 Retaining Assembly 310 Holding body 311 Inclined guide tank 320 Push-out Actuator 321 Guide part 322 First guide slope 323 Extrusion section 330 Elastic Members 400 Substrate Actuator 410 First fixed part 420 Elastic deformation part 430 Connection 500 Elastic contact part 510 Fixed end 520 Elastic contact arm 600 frame body 610 Quick release member 611 Contact part 612 Shoulder part 620 Displacement section 631 Frame positioning member 640 Stacking Alignment Section 650 Raised mounting surface 660 recessed mounting surface 700 boards 710 Stacking Fixture 720 Second fixed part 800 semiconductor workpieces

Claims

1. A top-open type substrate container includes a container body and a container gate body, the container gate body being combined with the container body to form a storage space, the storage space being used to store a plurality of substrates, a holding device for a top-open type substrate container, The holding device a substrate actuator provided outside the substrate; a holding assembly that operates to press the substrate actuator and is provided in the storage space; The retention assembly includes: a holding body provided inside the container body; a push-out actuator provided on the holding body, The push-out actuator is a first inclined guide surface used to push out the second inclined guide surface on the inner surface of the container gate; a push-out portion that connects the substrate actuator to the first guide inclined surface, the first inclined guide surface is pushed out and displaced so as to correspond to the first inclined guide surface and the second inclined guide surface in response to the contact force of the container gate body, A holding device for a top-open type substrate container, characterized in that the pushing section pushes the substrate actuator according to the degree of pushing displacement of the first guide inclined surface, and the substrate actuator displaces the substrates until multiple substrates are stacked on top of each other and positioned.

2. the holding body includes an inclined guide groove, and the pushing actuator includes a guide portion connected to the pushing portion; 2. The holding device according to claim 1, wherein the guide portion is provided in a protruding manner in the inclined guide groove, and the guide portion is displaced in the inclined guide groove in response to the contact force of the container gate body, thereby causing the push-out actuator to approach or move away from the holding body.

3. the holding assembly further includes an elastic member provided between the holding body and the pushing actuator; 3. The holding device according to claim 2, wherein the elastic member is provided to provide an elastic change amount such that the guide portion is displaced along the inclined guide groove in a direction away from the holding body or the guide portion is displaced along the inclined guide groove in a direction toward the holding body in response to the contact force of the container gate body.

4. The substrate actuator includes: a connection portion fixedly connected to the outer side of the substrate; an elastic deformation portion connected to the connection portion; a first fixing portion provided on one side of the elastic deformation portion, the elastic deformation portion corresponds to a position of the pushing portion and provides a displacement amount for pushing out the substrate according to a degree of pushing displacement of the pushing portion; The holding device according to claim 1 , wherein the first fixing portion is used to fix the second fixing portion of the adjacent substrate.

5. The bottom of the inner surface of the container body further includes a bottom positioning portion; the substrate has a substrate positioning member corresponding to the bottom positioning portion; The holding device according to claim 1 , wherein the bottom positioning portion is used to position the substrate closest to the bottom of the inner surface within the storage space.

6. The bottom of the inner surface of the container body further includes a bottom engaging device, 2. The holding device according to claim 1, wherein the bottom engaging device is used to engage and fix the substrate closest to the bottom of the inner surface in the storage space and the substrate actuator provided thereon.

7. 2. The holding device according to claim 1, wherein the upper and lower surfaces of each of the substrates have stacking fixing portions, and adjacent substrates are stacked and fixed to each other in layers by the stacking fixing portions.

8. 2. The holding device of claim 1, further comprising at least one resilient abutment, the resilient abutment being provided on a bottom side of the substrate for resiliently abutting against and mounting a semiconductor workpiece on the substrate.

9. The elastic abutment portion includes a fixed end and an elastic abutment arm, the fixed end is removably provided on the bottom side of the substrate; 9. The holding device according to claim 8, wherein one end of the elastic abutment arm is connected to the fixed end, and the other end of the elastic abutment arm elastically presses against the edge surface of the semiconductor workpiece.

10. 2. The holding device according to claim 1, wherein an anti-misalignment member is provided on an inner wall of the container body to restrict the orientation of the substrate accommodated in the accommodation space.

11. The container gate body is a holding device for a top-open type substrate container having a storage space for storing a latch mechanism, The holding device includes at least one flattening member disposed in the receiving space, 2. The holding device according to claim 1, wherein the flattening member extends entirely to abut on both opposing inner side walls of the container body and is disposed parallel to the latch mechanism.

12. the flattening member is a carbon rod; 12. The holding device according to claim 11, wherein the overall height of the carbon rod is less than the overall depth of the storage space.

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