Holding device

Abstract

A technology for increasing the amount of heat generated in a holding device is provided. [Solution] The holding device comprises a plate-shaped portion having a mounting surface, a heater portion arranged to face the mounting surface, and a driver electrode arranged on the plate-shaped portion; the mounting surface, in a planar view of the mounting surface, has a first region, a ring-shaped second region arranged outside the first region, and a ring-shaped third region arranged outside the second region; the heater portion has a plurality of first heating elements located in the first region and arranged side by side along the outer periphery of the first region, a second heating element located in the second region, having a ring shape and arranged so as to surround the plurality of first heating elements, and a plurality of third heating elements located in the third region and arranged side by side along the inner periphery of the third region so as to form a ring shape surrounding the second heating elements; the driver electrode is connected to the first heating elements and the third heating elements, and each of the plurality of units including the driver electrode, the first heating elements, and the third heating elements is connected in parallel to a power source.

Description

[Technical Field]

[0001] The present invention relates to a retaining device. [Background technology]

[0002] BACKGROUND ART Conventionally, a holding device provided with a heater unit for heating an object placed on a placement surface has been known (for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2005-317940 Summary of the Invention [Problem to be solved by the invention]

[0004] However, even with the prior art such as that of Patent Document 1, there is still room for improvement in the technology for increasing the heat generation amount of the heater portion in the holding device.

[0005] An object of the present invention is to provide a technique capable of increasing the amount of heat generated by a heater portion in a holding device. [Means for solving the problem]

[0006] The present invention has been made to solve at least part of the above-mentioned problems, and can be realized in the following aspects.

[0007] (1) According to one aspect of the present invention, there is provided a holding device comprising: a plate-shaped portion having a mounting surface on which an object to be held is placed; a heater portion disposed inside the plate-shaped portion so as to face the mounting surface; and a driver electrode disposed inside the plate-shaped portion, wherein the mounting surface has, in a plan view of the mounting surface, a first region, a ring-shaped second region disposed outside the first region, and a ring-shaped third region disposed outside the second region; and the heater portion includes a plurality of first heat generating portions located in the first region in the plan view, the plurality of first heat generating portions being arranged in a row along the outer periphery of the first region; a second heating portion located in the second region in the plan view, the second heating portion having a ring shape and arranged to surround the plurality of first heating portions; and a plurality of third heating portions located in the third region in the plan view, the plurality of third heating portions arranged side by side along an inner periphery of the third region so as to form a ring shape surrounding the second heating portion, the driver electrode being connected to the first heating portion and the third heating portion, and the holding device having a plurality of units including the driver electrode, the first heating portion, and the third heating portion, each of the plurality of units being connected in parallel to a power source.

[0008] According to this configuration, the heater section includes a plurality of first heat generating portions arranged in a row along the outer periphery of the first region in the first region, and a plurality of third heat generating portions arranged in a row along the inner periphery of the third region in the third region. The holding device includes a plurality of units, each including the first heat generating portion, the third heat generating portion, and a driver electrode connecting the first and third heat generating portions, and the plurality of units are connected in parallel to a power source. The first and third heat generating portions tend to be shorter than the second heat generating portion, which has an annular shape, and therefore tend to have lower electrical resistance. However, by connecting the first and third heat generating portions with a driver electrode, each of the plurality of units connected in parallel to the power source can have a relatively high electrical resistance as a unit connected to the power source. This allows the heat generation amount of the unit to be greater than the sum of the heat generation amount of the first heat generating portion and the third heat generating portion. Therefore, the heat generation amount of the heater section can be increased.

[0009] (2) In the holding device of the above aspect, the second heat generating unit may have a plurality of annular heat generating elements, each of which may be connected in series to a power source. With this configuration, the second heat generating unit has a plurality of annular heat generating elements connected in series to a power source. This makes the electrical resistance of the second heat generating unit relatively large, thereby further increasing the heat generation amount of the heater unit.

[0010] (3) In the holding device of the above aspect, the unit may include an inner connection terminal connected to the first heat generating portion and the driver electrode, the inner connection terminal being located on the opposite side of the first region from the second region in the plan view, and an outer connection terminal connected to the third heat generating portion and the driver electrode, the outer connection terminal being located on the opposite side of the third region from the second region in the plan view. According to this configuration, in the unit, the inner connection terminal connected to the first heat generating portion and the outer connection terminal connected to the third heat generating portion are located relatively far apart. This increases the electrical resistance between the inner connection terminal and the outer connection terminal in the driver electrode, thereby further increasing the electrical resistance of the heater portion. Therefore, the amount of heat generated by the heater portion can be further increased.

[0011] (4) In the holding device of the above embodiment, the area of ​​the first heat generating portion and the area of ​​the third heat generating portion may be the same in the plan view. With this configuration, the area of ​​the first heat generating portion and the area of ​​the third heat generating portion are the same in the plan view of the mounting surface, so that the amount of heat generated by the first heat generating portion and the amount of heat generated by the third heat generating portion can be made approximately the same. This improves temperature controllability on the mounting surface, thereby reducing the in-plane temperature distribution on the mounting surface.

[0012] (5) In the holding device of the above aspect, the unit may have a plurality of the first heat generating portions, and the driver electrode may be connected to each of the plurality of first heat generating portions and the third heat generating portion. With this configuration, in the first region located near the center of the mounting surface where the temperature is relatively likely to rise, more heat generating portions are disposed than in the third region located farther from the center of the mounting surface than in the first region, thereby improving temperature controllability near the center of the mounting surface. In the holding device of the above aspect, by having a unit in which each of the plurality of first heat generating portions and the third heat generating portion are connected by a driver electrode, it is possible to increase the electrical resistance of the heater unit while reducing the in-plane temperature distribution on the mounting surface.

[0013] (6) According to another aspect of the present invention, a holding device is provided. This holding device comprises a plate-shaped portion having a support surface on which an object to be held is placed, a heater portion arranged inside the plate-shaped portion so as to face the support surface, and a driver electrode arranged inside the plate-shaped portion, wherein the support surface has, in a planar view of the support surface, a first region, a ring-shaped second region arranged outside the first region, and a ring-shaped third region arranged outside the second region, and the heater portion has: a first heat generating portion located in the first region in the planar view, the first heat generating portion having a ring shape; a plurality of second heat generating portions located in the second region in the planar view, the plurality of second heat generating portions being arranged in a row along an inner periphery of the second region so as to form a ring shape surrounding the first heat generating portion; and a third heat generating portion located in the third region in the planar view, the third heat generating portion having a ring shape and arranged so as to surround the plurality of second heat generating portions, and the driver electrode is connected to the first heat generating portion and the third heat generating portion, and each of the plurality of second heat generating portions is connected in parallel to a power source. According to this configuration, the heater section includes a first annular heat generating section disposed in the first region and a third annular heat generating section disposed in the third region. The first and third heat generating sections are connected by a driver electrode. This allows the electrical resistance to be relatively large as a unit of connection to a power source, even if the lengths of the first and third heat generating sections are relatively short due to the size relationship between the multiple regions on the mounting surface, thereby increasing the amount of heat generated by the heater section.

[0014] The present invention can be realized in various forms, such as a method for manufacturing a holding device, a system including a holding device, a control method for these devices and systems, a computer program for causing these devices and systems to hold objects, a server device for distributing the computer program, and a non-transitory storage medium on which the computer program is stored. [Brief explanation of the drawings]

[0015] [Figure 1]FIG. 2 is a perspective view of the holding device of the first embodiment. [Figure 2] FIG. 2 is a cross-sectional view of the holding device of the first embodiment. [Figure 3] 3A and 3B are diagrams illustrating a heater portion provided in the holding device of the first embodiment. [Figure 4] 3A and 3B are diagrams illustrating driver electrodes provided in the holding device of the first embodiment. [Figure 5] 4A to 4C are diagrams illustrating the connection relationship of heat generating parts included in the holding device of the first embodiment. [Figure 6] 5A to 5C are diagrams illustrating a manufacturing method of the holding device of the first embodiment. [Figure 7] 10A and 10B are diagrams illustrating the amount of heat generated by a heater included in a holding device of a comparative example. [Figure 8] 5A and 5B are diagrams illustrating the amount of heat generated by a heater included in the holding device of the first embodiment. [Figure 9] 10A and 10B are diagrams illustrating a heater portion provided in a holding device according to a second embodiment. [Figure 10] 10A and 10B are diagrams illustrating a heater portion provided in a holding device according to a third embodiment. [Figure 11] 10A and 10B are diagrams illustrating driver electrodes provided in a holding device according to a third embodiment. [Figure 12] 10A and 10B are diagrams illustrating the connection relationship of heat generating parts included in a holding device according to a fourth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0016] First Embodiment FIG. 1 is a perspective view of a holding device 1 of this embodiment. FIG. 2 is a cross-sectional view of the holding device 1 of this embodiment. The holding device 1 of this embodiment is an electrostatic chuck that attracts and holds a holding object, such as a wafer W, by electrostatic attraction. The electrostatic chuck is used, for example, as a table on which the wafer W (object) is placed in a chamber. The holding device 1 includes a ceramic part 10, a base part 20, and a bonding part 30. In the holding device 1 of this embodiment, as shown in FIG. 1, the ceramic part 10, the bonding part 30, and the base part 20 are stacked in this order. For convenience, in FIGS. 1 and 2, the stacking direction of the ceramic part 10, the bonding part 30, and the base part 20 is shown as the z-axis direction, the x-axis perpendicular to the z-axis is shown as the x-axis, and the y-axis perpendicular to the z-axis and x-axis is shown as the y-axis.

[0017] The ceramic portion 10 is mainly composed of ceramic and has a generally circular disk shape. Here, "main component" refers to the component with the highest content. The ceramic portion 10 of this embodiment is mainly composed of alumina (Al2O3). The ceramic portion 10 includes a plate-shaped portion 11, a heater portion 12, a driver electrode 13, and a chuck electrode 14.

[0018] The plate-shaped portion 11 is a component made of ceramic and has a substantially circular plate shape. The plate-shaped portion 11 of this embodiment is a laminate of multiple alumina plates having a flat plate shape, and has substantially the same shape as the ceramic portion 10. The material forming the plate-shaped portion 11 may be other ceramic materials such as aluminum nitride (AlN) or silicon carbide (SiC). The plate-shaped portion 11 has a mounting surface 11a on which the wafer W is mounted.

[0019] The heater section 12 is disposed inside the plate-shaped section 11 so as to face the mounting surface 11a. When power is supplied from an external power source, the heater section 12 generates heat capable of heating the wafer W mounted on the mounting surface 11a. Details of the heater section 12 will be described later.

[0020] The driver electrode 13 is disposed inside the plate-shaped portion 11. The driver electrode 13 electrically connects two or more heat generating portions of the heater portion 12. The holding device 1 of this embodiment has a plurality of driver electrodes 13. The relationship between the heater portion 12 and the driver electrodes 13 will be described in detail later.

[0021] The chuck electrode 14 is disposed inside the plate-shaped portion 11. The chuck electrode 14 is formed of a conductive material such as tungsten (W), molybdenum (Mo), or platinum (Pt). The chuck electrode 14 is connected to an external power supply via a chuck electrode terminal (not shown). When power is supplied from the external power supply, the chuck electrode 14 generates an electrostatic attraction force capable of attracting and holding the wafer W onto the mounting surface 11a of the plate-shaped portion 11. Note that in this embodiment, the chuck electrode 14 is disposed closer to the mounting surface 11a than the heater portion 12, as shown in FIG. 2 . However, the positional relationship between the heater portion 12 and the chuck electrode 14 inside the plate-shaped portion 11 is not limited thereto. The chuck electrode 14 may be disposed farther from the mounting surface 11a than the heater portion 12. Furthermore, in addition to the heater portion 12 and the chuck electrode 14, a high-frequency electrode or the like may be disposed inside the ceramic portion 10.

[0022] The base portion 20 is a generally disk-shaped component whose main component is, for example, a metal such as aluminum or an aluminum alloy, a metal-based composite such as an Al-SiC composite, or a ceramic such as silicon carbide (SiC). In this embodiment, the base portion 20 is made of aluminum. In this embodiment, the base portion 20 is larger than the ceramic portion 10. For example, if the diameter of the ceramic portion 10 is 300 mm, the diameter of the base portion 20 is 340 mm. Note that the size relationship between the ceramic portion 10 and the base portion 20 is not limited to this. They may be the same size.

[0023] A plurality of coolant flow paths 21 are formed inside the base portion 20. A coolant such as a fluorine-based inert liquid or water flows through the coolant flow paths 21. This cools the base portion 20, and therefore the ceramic portion 10 is cooled via the bonding portion 30.

[0024] The bonding portion 30 bonds the ceramic portion 10 and the base portion 20. The bonding portion 30 is, for example, a bonding sheet containing a silicone-based organic bonding agent, an inorganic bonding agent, or an Al-based metal adhesive. It is desirable for the bonding portion 30 to have high adhesive strength to both the ceramic portion 10 and the base portion 20, as well as high pressure resistance and high thermal conductivity.

[0025] FIG. 3 is a diagram illustrating the heater portion 12 included in the holding device 1 of this embodiment. FIG. 3 shows a plan view of the mounting surface 11a of the plate-shaped portion 11 of the ceramic portion 10, i.e., a view from the positive side in the z-axis direction. Next, features of the holding device 1 of this embodiment will be described. In the holding device 1 of this embodiment, the mounting surface 11a has, in a plan view of the mounting surface 11a, a circular central region R10 including the central axis C1 of the holding device 1, a first region R11 disposed outside the central region R10, a ring-shaped second region R12 disposed outside the first region R11, and a ring-shaped third region R13 disposed outside the second region R12. In Figure 3, the boundary between the central region R10 and the first region R11 is indicated by a two-dot chain line L10, the boundary between the first region R11 and the second region R12 is indicated by a two-dot chain line L11, the boundary between the second region R12 and the third region R13 is indicated by a two-dot chain line L12, and the outer boundary of the third region R13 is indicated by a two-dot chain line L13.

[0026] The heater section 12 of this embodiment has a central heat generating section H10, a plurality of first heat generating sections H11, a second heat generating section H12, and a plurality of third heat generating sections H13. Here, the "heat generating sections" are heat generating elements that have electrical resistance and generate heat when power is supplied.

[0027] The central heat generating portion H10 is a heat generating element located at the center of the circular mounting surface 11a in a plan view of the mounting surface 11a shown in FIG. 3. In this embodiment, the central heat generating portion H10 is composed of a single ring-shaped heat generating element. Here, "ring shape" does not only refer to a complete ring shape, but also includes, for example, an arc shape with a central angle of 180 degrees or more and a spiral shape. Connection terminals T10 are connected to both ends of the central heat generating portion H10.

[0028] The multiple first heat generating portions H11 are located in the first region R11 in a plan view of the mounting surface 11a shown in FIG. 3. The multiple first heat generating portions H11 are arranged in a line along the outer periphery of the first region R11. The holding device 1 of this embodiment has eight first heat generating portions H11. The general shape of each of the eight first heat generating portions H11 is part of a sector with a central angle of approximately 45 degrees. A connection terminal T11 is connected to both ends of each of the eight first heat generating portions H11.

[0029] The second heat generating portion H12 is located in the second region R12 in the plan view of the mounting surface 11a shown in Fig. 3. The second heat generating portion H12 has a ring shape and is arranged to surround the plurality of first heat generating portions H11. The holding device 1 of this embodiment has one second heat generating portion H12. Connection terminals T12 are connected to both ends of the second heat generating portion H12.

[0030] The multiple third heat generating members H13 are located in the third region R13 in a plan view of the mounting surface 11a shown in FIG. 3. The multiple third heat generating members H13 are arranged side by side along the inner periphery of the third region R13 to form a ring shape surrounding the second heat generating member H12. The holding device 1 of this embodiment has eight third heat generating members H13. Each of the eight third heat generating members H13 has a general shape that is part of a sector with a central angle of approximately 45 degrees. A connection terminal T13 is connected to both ends of each of the eight third heat generating members H13.

[0031] 4 is a diagram illustrating the driver electrode 13 included in the holding device 1 of this embodiment. FIG. 4 shows a part of the planar view of the mounting surface 11a of the plate-shaped portion 11 shown in FIG. 3. In the holding device 1 of this embodiment, the driver electrode 13 is disposed inside the plate-shaped portion 11 on the negative side in the z-axis direction with respect to the heater portion 12, as shown in FIG. 2. The driver electrode 13 is connected to the first heat generating portion H11 and the third heat generating portion H13. The holding device 1 of this embodiment has a plurality of units U1 each including such a driver electrode 13, the first heat generating portion H11, and the third heat generating portion H13.

[0032] In this embodiment, the unit U1 has an inner connection terminal connected to the first heat generating portion H11 and the driver electrode 13, and an outer connection terminal connected to the third heat generating portion H13 and the driver electrode 13. Here, the connection state between the first heat generating portion H11, the driver electrode 13, and the third heat generating portion H13 in the unit U1 will be described with reference to FIG. 4. As shown in FIG. 4, two connection terminals T11 are connected to the first heat generating portion H11. Of the two connection terminals T11, the connection terminal T11a, which is located on the opposite side of the first region R11 from the second region R12, is connected to the first heat generating portion H11 and the driver electrode 13. As shown in FIG. 4, two connection terminals T13 are connected to the third heat generating portion H13. Of the two connection terminals T13, the connection terminal T13b, which is located on the opposite side of the third region R13 from the second region R12, is connected to the third heat generating portion H13 and the driver electrode 13. As a result, the distance (length LD1) between the connection terminal T11a and the connection terminal T13b of the driver electrode 13 is longer than, for example, when the connection terminal T11b of the two connection terminals T11 is connected to the driver electrode 13, or when the connection terminal T13a of the two connection terminals T13 is connected to the driver electrode 13. The driver electrode 13 of this embodiment is connected only to the first heat generating portion H11 and the third heat generating portion H13 via the connection terminals T11a and T13b. The connection terminal T11a corresponds to the "inner connection terminal" set forth in the claims. The connection terminal T13b corresponds to the "outer connection terminal" set forth in the claims.

[0033] FIG. 5 is a diagram illustrating the connection relationships of the heat generating parts included in the holding device 1 of this embodiment. FIG. 5 is a diagram schematically illustrating the electrical connection relationships among the central heat generating part H10, the multiple first heat generating parts H11, the second heat generating part H12, the multiple third heat generating parts H13, and the driver electrode 13 included in the holding device 1. In FIG. 5, the relationship between the length LR10 of the central heat generating part H10, the length LR11 of one first heat generating part H11, the length LR12 of one second heat generating part H12, and the length LR13 of one third heat generating part H13 is roughly indicated by rectangular solid lines. Also, in FIG. 5, to make the connection relationships of the heat generating parts in the holding device 1 easier to understand, the length of the central heat generating part H10 and the length of the second heat generating part H12 are shown as being approximately the same, as an example of the relationship between the lengths of the heat generating parts. In the holding device 1, the length LR13 of one third heat generating portion H13 tends to be shorter than the length LR10 of the annular central heat generating portion H10 and the length LR12 of the second heat generating portion H12 (see FIG. 2). Also, the length LR11 of one first heat generating portion H11, which is disposed closer to the central axis C1 of the mounting surface 11a than the third heat generating portion H13, tends to be shorter than the length LR13 of one third heat generating portion H13 (see FIG. 2).

[0034] As shown in Fig. 5, the holding device 1 of this embodiment has a unit U1 in which one first heat generating portion H11 and one third heat generating portion H13 are connected by a driver electrode 13. The length LU1 of the heat generating element in the unit U1 is the sum of the length LR11 of one first heat generating portion H11, the length LR13 of one third heat generating portion H13, and the length LD1 (see Fig. 4) between the inner connection terminal and the outer connection terminal of the driver electrode 13, and is therefore naturally longer than the length LR11 of one first heat generating portion H11 and the length LR13 of one third heat generating portion H13. For example, as shown in Fig. 5, the length of the unit U1 corresponds to the length LR10 of the central heat generating portion H10 and the length LR12 of the second heat generating portion H12. In each of the multiple units U1 included in the holding device 1 of this embodiment, as shown in Fig. 5, the first heat generating portion H11, the driver electrode 13, and the third heat generating portion H13 are connected in series to the power supply PS1, while the central heat generating portion H10, the second heat generating portion H12, and each of the multiple units U1 are connected in parallel to the power supply PS1. Note that in the description of Fig. 5 above, for convenience, it was assumed that the length LR10 of the central heat generating portion H10 and the length LR12 of the second heat generating portion H12 were approximately the same. However, the relationship between the length LR10 of the central heat generating portion H10 and the length LR12 of the second heat generating portion H12 is not limited to this.

[0035] Next, a description will be given of a method for manufacturing the holding device 1. In the method for manufacturing the holding device 1, the ceramic part 10 and the base part 20 are manufactured separately, and the separately manufactured ceramic part 10 and base part 20 are joined by a joining part 30.

[0036] The method for manufacturing the ceramic portion 10 begins with preparing a slurry for the green sheet and a metallization paste. The slurry for the green sheet is prepared by, for example, adding an organic solvent to a mixture containing alumina powder, an acrylic binder, a dispersant, a plasticizer, etc., and mixing the mixture using a ball mill. The metallization paste is prepared by, for example, adding a conductive powder such as tungsten or molybdenum to a mixture of alumina powder, an acrylic binder, and an organic solvent, and kneading the mixture.

[0037] The prepared green sheet slurry is formed into a sheet using a casting device, and the formed product is dried. This results in a green sheet. In the method for manufacturing the ceramic portion 10, multiple green sheets are prepared. On specific green sheets among the multiple green sheets, a portion that will become the heater portion 12 is printed using a metallization paste, for example, using a screen printing device. Thereafter, multiple green sheets, including the specific green sheet on which the metallization paste has been printed, are stacked to manufacture a green sheet laminate. The green sheet laminate is fired in an electric furnace to manufacture the ceramic portion 10. In the method for manufacturing the base portion 20, multiple metal plates, each having a portion that will become the refrigerant flow path 21, are stacked. Note that the methods for manufacturing the ceramic portion 10 and the base portion 20 are not limited to these.

[0038] In the manufacturing method of the holding device 1, a joining sheet that becomes the joining portion 30 is placed on the surface of either the ceramic portion 10 or the base portion 20, which are manufactured separately. For example, the joining sheet is placed on the surface of the base portion 20, and the joining sheet is sandwiched between the ceramic portion 10 and the base portion 20, and the whole is heated, thereby joining the ceramic portion 10 and the base portion 20 by the joining portion 30. In this manner, the holding device 1 is manufactured. However, the manufacturing method of the holding device 1 is not limited to this.

[0039] In the manufacturing method of the holding device 1 described above, the central heat generating portion H10, the plurality of first heat generating portions H11, the second heat generating portion H12, and the plurality of third heat generating portions H13 are each formed by printing metallization paste on a green sheet with a screen printing device. In the method of forming the portions that will become heaters using a screen printing device, a certain directionality may occur in the thickness of the portions that will become heat generating portions due to the direction of printing.

[0040] FIG. 6 is a diagram illustrating a manufacturing method of the holding device 1 of this embodiment. FIG. 6 shows a schematic diagram SD1 illustrating a plan view of a ceramic part, and a graph G illustrating an example of the change in thickness of a heat generating portion formed by a screen printing device. The schematic diagram SD1 shows the x-axis, y-axis, and z-axis representing the directions of the ceramic part. The ceramic part shown in the schematic diagram SD1 has a circular region R0 in which the heat generating portion is located.

[0041] In graph G shown in Figure 6, the vertical axis p1 represents the position on the ceramic component shown in schematic diagram SD1, and the horizontal axis t1 represents the thickness of the heat-generating portion formed on the green sheet by a screen printing device using metallization paste. In screen printing using metallization paste, for example, as shown in Figure 6, the metallization paste is printed on the ceramic component along the direction of the white arrow F1 from the most positive point Pa in the y-axis direction to the most negative point Pb in the y-axis direction. When the metallization paste is printed in this manner, due to the characteristics of screen printing, the thickness of the heat-generating portion gradually decreases from the point Pa where the screen printing begins to the point Pb, as shown in graph G in Figure 6. This directional thickness of the heat-generating portion also leads to a directional distribution of the electrical resistance of the heat-generating portion. Specifically, as shown in Figure 6, assuming that virtual heat generating portions Ha, Hb, Hc, Hd, He, Hf, Hg, and Hh are formed in this order from point Pa to point Pb, and if the thickness of the heat generating portion has a directionality as shown in graph G in Figure 6, the thickness of the metallization paste that becomes the heat generating portion will decrease in the order of heat generating portion Ha, heat generating portion Hb, heat generating portion Hc, heat generating portion Hd, heat generating portion He, heat generating portion Hf, heat generating portion Hg, and heat generating portion Hh, and therefore the electrical resistance will increase in the order of heat generating portion Ha, heat generating portion Hb, heat generating portion Hc, heat generating portion Hd, heat generating portion He, heat generating portion Hf, heat generating portion Hg, and heat generating portion Hh.

[0042] 7 is a diagram illustrating the heat generation amount of a heater unit included in a holding device of a comparative example. The holding device 1s of the comparative example shown in FIG. 7 includes a ceramic unit 90, a base unit 20, and a joint unit (not shown). The ceramic unit 90 includes a plate-like unit 91 having a substantially circular plate shape formed of ceramic, and a heater unit 92. Similar to the holding device 1 of the present embodiment, the heater unit 92 includes a circular central region R90 including the central axis C1s of the holding device 1s, a ring-shaped first region R91 disposed outside the central region R90, a ring-shaped second region R92 disposed outside the first region R91, and a ring-shaped third region R93 disposed outside the second region R92. A ring-shaped central heat generating portion H90 is disposed in the central region R90, a ring-shaped first heat generating portion H91 is disposed in the first region R91, a ring-shaped second heat generating portion H92 is disposed in the second region R92, and a ring-shaped third heat generating portion H93 is disposed in the third region R93. In the holding device 1s of the comparative example, the central heat generating portion H90 and the first heat generating portion H91 are connected in series to a single external power source (not shown), and the second heat generating portion H92 and the third heat generating portion H93 are connected in series to an external power source (not shown) that is different from the external power source to which the central heat generating portion H90 and the first heat generating portion H91 are connected.

[0043] 7 shows the ranges corresponding to the heat generating portions Ha, Hb, Hc, Hd, He, Hf, Hg, and Hh shown in FIG. 6 overlapping with the heater portion 92 of the holding device 1s of the comparative example. In FIG. 7, the amount of heat generated in each of the ranges corresponding to the heat generating portions Ha, Hb, Hc, Hd, He, Hf, Hg, and Hh is indicated by the density of hatched dots, with higher density indicating a higher heat generation amount. In the configuration of the holding device 1s of the comparative example shown in FIG. 7, if there is a directionality in the thickness of the heater portion as described in FIG. 6, for example, the electrical resistance of the portion corresponding to the heat generating portion He in the central region R90 will be greater than the electrical resistance of the portion corresponding to the heat generating portion Hd, and therefore the heat generation amount of the heat generating portion He in the central region R90 will be greater than the heat generation amount of the portion corresponding to the heat generating portion Hd. This tendency is also observed in the first region R91, the second region R92, and the third region R93, where the amount of heat generated on the negative side of the y-axis is relatively large and the amount of heat generated on the positive side of the y-axis is relatively small. Therefore, in the holding device 1s of the comparative example, the negative side of the y-axis is likely to be hotter and the positive side of the y-axis is likely to be colder. Furthermore, on the negative side of the y-axis, where the temperature tends to be higher, the electrical resistance of the heat-generating part increases due to the influence of temperature, so the temperature difference between the negative side of the y-axis and the positive side of the y-axis is likely to be even larger. Thus, in the holding device 1s of the comparative example, if the heater portion is formed by screen printing using a metallized paste, for example, the temperature distribution on the support surface is likely to be large. In other words, the holding device 1s of the comparative example is likely to have poor thermal uniformity on the support surface and poor temperature controllability on the support surface.

[0044] FIG. 8 is a diagram illustrating the heat generation amount of the heater included in the holding device 1 of this embodiment. In the holding device 1 of this embodiment, as shown in FIG. 5, the multiple first heat generation elements H11 arranged in the first region R11 are connected in parallel to the power supply PS1 as part of the unit U1. As a result, the relationship between the heat generation amounts of the multiple first heat generation elements H11 is calculated by dividing the square of the voltage by the electrical resistance, and is therefore inversely proportional to the magnitude of the electrical resistance. Therefore, in the first region R11, the heat generation amount on the negative side of the y-axis is relatively small, and the heat generation amount on the positive side of the y-axis is relatively large. This allows for a relatively small temperature distribution in the region combining the central region R10 and the first region R11. Furthermore, in the holding device 1 of this embodiment, the multiple third heat generation elements H13 arranged in the third region R13 are connected in parallel to the power supply PS1 as part of the unit U1. As a result, the relationship between the heat generation amounts of the multiple third heat generation portions H13 is calculated by dividing the square of the voltage by the electrical resistance, just like the multiple first heat generation portions H11 arranged in the first region R11, and is therefore inversely proportional to the magnitude of the electrical resistance. Therefore, in the third region R13, the heat generation amount on the negative side of the y-axis is relatively small and the heat generation amount on the positive side of the y-axis is relatively large, so that the temperature distribution can be made relatively small in the region combining the second region R12 and the third region R13.

[0045] As shown in FIG. 5 , the holding device 1 of this embodiment includes multiple units U1, each of which includes a first heat generating portion H11 and a third heat generating portion H13, each of which has a relatively short length as a heat generating element, and a driver electrode 13. Because the first heat generating portion H11 and the third heat generating portion H13 are each located in a relatively small area among the multiple regions of the support surface 11a, their lengths tend to be short, making it difficult to increase their electrical resistance as heat generating elements. Therefore, the first heat generating portion H11 and the third heat generating portion H13 each have a relatively small electrical resistance, making it difficult to increase their heat generation, which may affect the temperature distribution of the support surface 11a. Therefore, in the holding device 1 of this embodiment, the first heat generating portion H11 and the third heat generating portion H13 are connected to each other via the driver electrode 13, increasing their electrical resistance as heat generating elements and thereby increasing the heat generation of the unit U1. This improves the controllability of the temperature distribution of the support surface 11a and reduces the in-plane temperature distribution on the support surface 11a.

[0046] According to the holding device 1 of the present embodiment described above, the heater section 12 includes a plurality of first heat generating elements H11 arranged in a row along the outer periphery of the first region R11 in the first region R11, and a plurality of third heat generating elements H13 arranged in a row along the inner periphery of the third region R13 in the third region R13. The holding device 1 includes a plurality of units U1, each including the first heat generating elements H11, the third heat generating elements H13, and a driver electrode 13 connecting the first heat generating elements H11 and the third heat generating elements H13, and the plurality of units U1 are connected in parallel to a power supply PS1. The first heat generating elements H11 and the third heat generating elements H13 tend to be shorter than the ring-shaped second heat generating element H12, and therefore tend to have lower electrical resistance individually. However, by connecting the first heat generating elements H11 and the third heat generating elements H13 via the driver electrode 13, each of the plurality of units U1 connected in parallel to the power supply PS1 can have a relatively high electrical resistance as a unit connected to the power supply PS1. This allows the amount of heat generated by the unit U1 to be greater than the sum of the amount of heat generated by the first heat generating part H11 and the amount of heat generated by the third heat generating part H13, thereby increasing the amount of heat generated by the heater part 12.

[0047] Furthermore, according to the holding device 1 of this embodiment, multiple units U1, each including a driver electrode 13 connecting the first heat generating element H11 and the third heat generating element H13, are connected in parallel to the power supply PS1. This, in combination with the ring-shaped second heat generating element H12 arranged in the second region R12, can reduce the temperature distribution on the mounting surface 11a even when the thicknesses of the heat generating elements H11, H12, and H13 vary. This improves the thermal uniformity of the mounting surface 11a.

[0048] Furthermore, according to the holding device 1 of this embodiment, in the unit U1, the connection terminal T11a connecting the first heat generating part H11 and the driver electrode 13 and the connection terminal T13b connecting the third heat generating part H13 and the driver electrode 13 are disposed at positions relatively far apart. That is, in the driver electrode 13, the electrical resistance between the connection terminal T11a and the connection terminal T13b becomes relatively large. This further increases the electrical resistance of the heater part 12, thereby further increasing the amount of heat generated by the entire holding device 1.

[0049] Furthermore, according to the holding device 1 of this embodiment, the driver electrode 13 is formed to have a sector shape when viewed from above on the mounting surface 11a. This allows the electrical resistance between the connection terminal T11a and the connection terminal T13b of the driver electrode 13 to be relatively large. This further increases the electrical resistance of the unit U1, thereby further increasing the amount of heat generated by the entire holding device 1.

[0050] Furthermore, according to the holding device 1 of this embodiment, each of the multiple driver electrodes 13 is formed to have a fan shape when viewed from above on the mounting surface 11a. This means that there are almost no areas on the mounting surface 11a where the driver electrodes 13 are not arranged when viewed from above, which reduces the likelihood of heat being distributed in the z-axis direction of the holding device 1. This makes it possible to reduce the in-plane temperature distribution on the mounting surface 11a.

[0051] Second Embodiment 9 is a diagram illustrating a heater section provided in the holding device 2 of the second embodiment. The holding device 2 of the second embodiment is different from the holding device 1 of the first embodiment (FIG. 3) in the configuration of the second heat generating section provided in the heater section and in the size relationship of the area of ​​the heat generating section in a plan view.

[0052] The holding device 2 of this embodiment includes a ceramic part 10, a base part 20, and a bonding part 30. The holding device 2 of this embodiment is, for example, an electrostatic chuck that attracts and holds an object such as a wafer W by electrostatic attraction.

[0053] In the holding device 2 of this embodiment, the second heating section H22 located in the second region R12 has multiple annular heating elements H221, H222, as shown in Fig. 9. Of the multiple annular heating elements H221, H222, the annular heating element H221 is located on the first region R11 side of the second region R12, and the annular heating element H222 is located on the third region R13 side of the second region R12. A connection terminal T221 is connected to each end of the annular heating element H221, and a connection terminal T222 is connected to each end of the annular heating element H222. One of the two connection terminals T221 connected to the annular heating element H221 and one of the two connection terminals T222 connected to the annular heating element H222 are connected by a driver electrode (not shown) located inside the plate-shaped portion 11. The other of the two connection terminals T221 connected to the annular heating element H221 and the other of the two connection terminals T222 connected to the annular heating element H222 are connected to an external power supply. That is, each of the multiple annular heating elements H221, H222 is connected in series to the external power supply.

[0054] In the holding device 2 of this embodiment, the area of ​​the first heat generating portion H11 and the area of ​​the third heat generating portion H13 are the same in a plan view of the support surface 11a. Specifically, in a plan view of the support surface 11a as shown in FIG. 9, the total area of ​​the first heat generating portions H11 arranged in the first region R11 is the same as the total area of ​​the third heat generating portions H13 arranged in the third region R13. Here, "the total area of ​​the first heat generating portions H11" refers to the total length of each of the first heat generating portions H11 shown in FIG. 9, and "the total area of ​​the third heat generating portions H13" refers to the total length of each of the third heat generating portions H13 shown in FIG. 9. Furthermore, "the area of ​​the first heat generating portion H11 and the area of ​​the third heat generating portion H13 are the same" includes not only the case where the total length of each of the first heat generating portions H11 and the total length of each of the third heat generating portions H13 are exactly the same, but also the case where they appear to be the same length at first glance. As a result, the amount of heat generated in the first region R11 and the amount of heat generated in the third region R13 are approximately the same, so that the in-plane temperature distribution on the mounting surface 11a can be reduced.

[0055] As described above, the holding device 2 of this embodiment has multiple units U1, each including a first heat generating portion H11, a third heat generating portion H13, and a driver electrode 13 connecting the first heat generating portion H11 and the third heat generating portion H13, and the multiple units U1 are connected in parallel to the power supply PS1. As a result, the electrical resistance of the unit U1 is greater than the sum of the electrical resistances of the first heat generating portion H11 and the third heat generating portion H13, and the heat generation amount of the unit U1 is greater than the sum of the heat generation amount of the first heat generating portion H11 and the third heat generating portion H13. This allows the heat generation amount of the entire holding device 2 to be increased.

[0056] Furthermore, according to the holding device 2 of this embodiment, the second heat generating part H22 has a plurality of annular heat generating elements H221, H222 connected in series to a power source, which increases the electrical resistance of the second heat generating part H22, thereby further increasing the heat generation amount of the entire holding device 2.

[0057] Furthermore, according to the holding device 2 of this embodiment, the area of ​​the first heat generating portion H11 and the area of ​​the third heat generating portion H13 are the same in a plan view of the mounting surface 11a. This allows the heat generation amount of the first heat generating portion H11 and the heat generation amount of the third heat generating portion H13 to be approximately the same. Therefore, the in-plane temperature distribution on the mounting surface 11a can be reduced.

[0058] <Third embodiment> 10 is a diagram illustrating a heater unit provided in the holding device 3 of the third embodiment. The holding device 3 of the third embodiment is different from the holding device 1 of the first embodiment (FIG. 3) in the configuration of the heat generating units arranged in each of the multiple regions of the mounting surface.

[0059] The holding device 3 of the third embodiment includes a ceramic part 40, a base part 20, and a bonding part 30. The holding device 3 of the present embodiment is, for example, an electrostatic chuck that attracts and holds an object such as a wafer W by electrostatic attraction.

[0060] The ceramic portion 40 is primarily made of ceramic and has a generally circular disk shape. The ceramic portion 40 of this embodiment is primarily made of alumina (Al2O3) and includes a plate-shaped portion 11, a heater portion 42, a driver electrode 43, and a chuck electrode 14. The heater portion 42 is disposed inside the plate-shaped portion 11 so as to face the mounting surface 11a. The heater portion 42 of this embodiment includes a plurality of central heat generating portions H40, a first heat generating portion H41, a plurality of second heat generating portions H42, and a third heat generating portion H43. In the holding device 3 of this embodiment, the mounting surface 11a has, in a plan view of the mounting surface 11a of the plate-shaped portion 11, a circular central region R40 including the central axis C3 of the holding device 3, a first region R41 disposed outside the central region R40, a ring-shaped second region R42 disposed outside the first region R41, and a ring-shaped third region R43 disposed outside the second region R42. In Fig. 10, the boundary between the central region R40 and the first region R41 is indicated by a two-dot chain line L40, the boundary between the first region R41 and the second region R42 is indicated by a two-dot chain line L41, the boundary between the second region R42 and the third region R43 is indicated by a two-dot chain line L42, and the outer boundary of the third region R43 is indicated by a two-dot chain line L43.

[0061] The multiple central heat generating portions H40 are heat generating elements located in the central region R40 in a plan view of the mounting surface 11a shown in FIG. 10. The holding device 3 of this embodiment has eight central heat generating portions H40. The general shape of each of the eight central heat generating portions H40 is part of a sector with a central angle of approximately 45 degrees. The multiple central heat generating portions H40 are arranged side by side along the outer periphery of the central region R40, thereby forming a substantially circular shape. A connection terminal T40 is connected to both ends of each of the eight central heat generating portions H40. Each of the multiple central heat generating portions H40 is connected in parallel to an external power source.

[0062] The first heat generating portion H41 is located in the first region R41 in the plan view of the mounting surface 11a shown in Fig. 10. The first heat generating portion H41 has a ring shape and is arranged to surround the multiple central heat generating portions H40. The holding device 3 of this embodiment has one first heat generating portion H41. Connection terminals T41 are connected to both ends of the first heat generating portion H41.

[0063] The multiple second heat generating members H42 are located in the second region R42 in a plan view of the mounting surface 11a shown in FIG. 10. The multiple second heat generating members H42 are arranged in a line along the outer periphery of the second region R42. The holding device 3 of this embodiment has eight second heat generating members H42. The general shape of each of the eight second heat generating members H42 is part of a sector with a central angle of approximately 45 degrees. A connection terminal T42 is connected to both ends of each of the eight second heat generating members H42. Each of the multiple second heat generating members H42 is connected in parallel to an external power supply.

[0064] The third heat generating member H43 is located in the third region R43 in the plan view of the mounting surface 11a shown in Fig. 10. The third heat generating member H43 has a ring shape and is arranged to surround the plurality of second heat generating members H42. The holding device 3 of this embodiment has one third heat generating member H43. Connection terminals T43 are connected to both ends of the third heat generating member H43.

[0065] FIG. 11 is a first diagram illustrating a driver electrode 43 included in the holding device 3 of this embodiment. FIG. 11 shows a portion of the mounting surface 11a of the plate-shaped portion 11 shown in FIG. 10 in a plan view. In the holding device 3 of this embodiment, the driver electrode 43 is disposed inside the plate-shaped portion 11 on the negative side in the z-axis direction relative to the heater portion 42. The driver electrode 43 is connected to the first heat generating portion H41 and the third heat generating portion H43. The holding device 3 of this embodiment has a unit U3 including such a driver electrode 43, the first heat generating portion H41, and the third heat generating portion H43. The driver electrode 43 included in the unit U3 is connected to the connection terminal T41b, of the two connection terminals T41 connected to the first heat generating portion H41, which is disposed on the second region R12 side of the first region R41 in a plan view of the mounting surface 11a. The driver electrode 43 of the unit U3 is connected to the connection terminal T43b, which is one of two connection terminals T43 connected to the third heat generating portion H43 and is located on the opposite side of the third region R43 from the second region R42 in a plan view of the mounting surface 11a. This allows the unit U3 to have a relatively large electrical resistance as a unit connected to a power source, even if the lengths of the first heat generating portion H41 and the third heat generating portion H43 are relatively short due to the size relationship between the multiple regions on the mounting surface 11a. This increases the heat generation amount of the heater 42. This improves the controllability of the temperature distribution on the mounting surface 11a of the holding device 3 and reduces the in-plane temperature distribution on the mounting surface 11a.

[0066] According to the holding device 3 of this embodiment described above, the heater section 42 includes a first heat generating section H41 located in the first region R41 and having a ring shape, and a third heat generating section H43 located in the third region R43 and having a ring shape. In the holding device 3, the first heat generating section H41 and the third heat generating section H43 are connected by the driver electrode 43. As a result, even if the lengths of the first heat generating section H41 and the third heat generating section H43 are relatively short due to the size relationships between the multiple regions R40, R41, R42, and R43 on the mounting surface 11a, the unit U3 can have a relatively large electrical resistance as a unit connected to a power source. This allows the amount of heat generated by the heater section 42 to be increased.

[0067] <Fourth embodiment> 12 is a diagram illustrating the connection relationship of the heat generating parts of the holding device 4 of the fourth embodiment. The holding device 4 of the fourth embodiment is different from the holding device 1 of the first embodiment (FIG. 5) in the number of heat generating parts and the configuration of the units.

[0068] The holding device 4 of this embodiment includes a ceramic portion 10, a base portion 20, and a bonding portion 30. The holding device 4 of this embodiment is, for example, an electrostatic chuck that attracts and holds an object such as a wafer W by electrostatic attraction. In the holding device 4 of this embodiment, the mounting surface 11a has, in a plan view of the mounting surface 11a, a central region R10, a first region R11, a second region R12, and a third region R13, similar to the first embodiment. One ring-shaped central heat generating element H10 is arranged in the central region R10, ten first heat generating elements H11 are arranged in the first region R11, one ring-shaped second heat generating element H12 is arranged in the second region R12, and eight third heat generating elements H13 are arranged in the third region R13.

[0069] The holding device 4 of this embodiment has two types of units U41 and U42, each including a driver electrode 13, a first heat generating element H11, and a third heat generating element H13. As shown in FIG. 12, the unit U41 includes the driver electrode 13, one first heat generating element H11, and one third heat generating element H13, while the unit U42 includes the driver electrode 13, two first heat generating elements H11, and one third heat generating element H13. In the unit U42, the two first heat generating elements H11 are connected in parallel to one third heat generating element H13. Therefore, in one unit U42, one first heat generating element H11, the driver electrode 13, and the third heat generating element H13 are connected in series to the power supply PS4, and another first heat generating element H11, the driver electrode 13, and the third heat generating element H13 are connected in series to the power supply PS4. In the holding device 4 of this embodiment, the plurality of central heat generating portions H10, the plurality of second heat generating portions H12, and the plurality of units U41, U42 are connected in parallel to the power supply PS4.

[0070] As described above, the holding device 4 of this embodiment has units U41 and U42, each including a first heat generating portion H11, a third heat generating portion H13, and a driver electrode 13 connecting the first heat generating portion H11 and the third heat generating portion H13. The multiple units U41 and U42 are connected in parallel to a power supply PS4. As a result, the electrical resistance of the units U41 and U42 as a whole is greater than the sum of the electrical resistance of the first heat generating portion H11 and the electrical resistance of the third heat generating portion H13, and therefore the heat generation amount of each of the units U41 and U42 is greater than the sum of the heat generation amount of the first heat generating portion H11 and the third heat generating portion H13. This allows the heat generation amount of the entire holding device 4 to be increased.

[0071] Furthermore, according to the holding device 4 of this embodiment, in the first region R11 located near the center of the mounting surface 11a where the temperature is relatively likely to rise, more heat generating parts (first heat generating parts H11) are arranged than in the third region R13 located farther from the center of the mounting surface 11a than the first region R11, thereby improving the controllability of the temperature near the center of the mounting surface 11a. The holding device 4 has a unit U42 in which each of the multiple first heat generating parts H11 and the third heat generating part H13 are connected by a driver electrode 13, thereby increasing the electrical resistance of the heater part 12 and reducing the in-plane temperature distribution on the mounting surface 11a.

[0072] <Modification of this embodiment> The present invention is not limited to the above-described embodiment, and can be embodied in various forms without departing from the spirit of the invention. For example, the following modifications are also possible.

[0073] [Variation 1] In the second embodiment, the second heating portion H22 located in the second region R12 has two annular heating elements H221, H222 connected in series to a power source. However, the number of annular heating elements included in the second heating portion H22 is not limited to this. The second heating portion H22 may have three or more annular heating elements. In addition, in the holding devices of the first, second, and fourth embodiments, the central heating portion located in the central region may have multiple annular heating elements. In addition, in the holding device 3 of the third embodiment, at least one of the first heating portion located in the first region and the third heating portion located in the third region may have multiple annular heating elements.

[0074] [Variation 2] In the first embodiment, the unit U1 has an inner connection terminal connected to the first heat generating portion H11 and the driver electrode 13, and an outer connection terminal connected to the third heat generating portion H13 and the driver electrode 13. The combination of connection terminals connected to the driver electrodes in the unit is not limited to this. As with the driver electrode 43 in the third embodiment, the driver electrodes may be connected to one of the two connection terminals connected to the first heat generating portion, which is located on the second region side of the first region in a plan view of the mounting surface, and to one of the two connection terminals connected to the third heat generating portion, which is located on the opposite side of the second region of the third region in a plan view of the mounting surface. Alternatively, the driver electrodes may be connected to one of the two connection terminals connected to the first heat generating portion, which is located on the central region side of the first region in a plan view of the mounting surface, and to one of the two connection terminals connected to the third heat generating portion, which is located on the second region side of the third region in a plan view of the mounting surface.

[0075] [Variation 3] In the first embodiment, the driver electrode 13 is formed to have a fan shape in a plan view of the mounting surface 11a, while in the third embodiment, the driver electrode 43 has a rectangular shape as shown in Fig. 11. The shape of the driver electrode is not limited to these. By forming the driver electrode into a fan shape, it is possible to relatively increase the electrical resistance between the two connection terminals of the driver electrode, and since there is almost no part where the driver electrode is not arranged in a plan view of the mounting surface, it is difficult for heat to be distributed in the z-axis direction of the holding device.

[0076] [Variation 4] In the above-described embodiment, the holding device includes a ceramic portion mainly composed of ceramic, a base portion made of metal, and a joining portion joining the ceramic portion and the base portion. The configuration of the holding device is not limited to this. The entire holding device may be made of ceramic, or may be made of a composite material of ceramic and metal.

[0077] This aspect has been described above based on embodiments and modifications. However, the above-described embodiments are intended to facilitate understanding of this aspect and are not intended to limit this aspect. This aspect may be modified or improved without departing from the spirit and scope of the claims, and equivalents thereof are included in this aspect. Furthermore, if a technical feature is not described as essential in this specification, it may be deleted as appropriate.

[0078] <Application example 1> A holding device, a plate-shaped portion having a placement surface on which an object to be held is placed; a heater portion disposed inside the plate-shaped portion so as to face the placement surface; a driver electrode disposed inside the plate-shaped portion, the placing surface has, in a plan view of the placing surface, a first region, a ring-shaped second region arranged outside the first region, and a ring-shaped third region arranged outside the second region; The heater unit includes: a plurality of first heat generating portions located in the first region in the plan view, the plurality of first heat generating portions being arranged side by side along an outer periphery of the first region; a second heat generating portion located in the second region in the plan view, the second heat generating portion having an annular shape and arranged to surround a plurality of the first heat generating portions; a plurality of third heat generating portions located in the third region in the plan view, the third heat generating portions being arranged side by side along an inner periphery of the third region so as to form a ring shape surrounding the second heat generating portion; the driver electrode is connected to the first heat generating portion and the third heat generating portion; the holding device has a plurality of units each including the driver electrode, the first heat generating portion, and the third heat generating portion; Each of the plurality of units is connected in parallel to a power source. holding device. <Application example 2> The holding device according to Application Example 1, the second heat generating portion has a plurality of annular heat generating elements, Each of the plurality of annular heating elements is connected in series to a power source. holding device. <Application example 3> The holding device according to Application Example 1 or Application Example 2, The unit comprises: an inner connection terminal connected to the first heat generating portion and the driver electrode, the inner connection terminal being arranged on the opposite side of the first region from the second region in the plan view; an outer connection terminal connected to the third heat generating portion and the driver electrode, the outer connection terminal being arranged on the opposite side of the third region from the second region in the plan view, holding device. <Application Example 4> The holding device according to any one of Application Examples 1 to 3, In the plan view, the area of ​​the first heat generating portion and the area of ​​the third heat generating portion are the same. holding device. <Application example 5> The holding device according to any one of Application Examples 1 to 4, The unit has a plurality of the first heat generating portions, the driver electrode is connected to each of the plurality of first heat generating portions and the third heat generating portion, holding device. <Application Example 6> A holding device, a plate-shaped portion having a placement surface on which an object to be held is placed; a heater portion disposed inside the plate-shaped portion so as to face the placement surface; a driver electrode disposed inside the plate-shaped portion, the placing surface has, in a plan view of the placing surface, a first region, a ring-shaped second region arranged outside the first region, and a ring-shaped third region arranged outside the second region; The heater unit includes: a first heat generating portion located in the first region in the plan view and having an annular shape; a plurality of second heat generating portions located in the second region in the plan view, the second heat generating portions being arranged side by side along an inner periphery of the second region so as to form a ring shape surrounding the first heat generating portion; a third heat generating portion located in the third region in the plan view, the third heat generating portion having an annular shape and arranged to surround a plurality of the second heat generating portions; the driver electrode is connected to the first heat generating portion and the third heat generating portion; The plurality of second heat generating portions are connected in parallel to the power source. holding device. [Explanation of symbols]

[0079] 1,2,3,4…holding device 10...Ceramic section 11...Plate-shaped part 11a...Placement surface 12, 42...Heater section 13, 43...Driver electrodes 40...Ceramic section H11, H41...First heating part H12, H22, H42...Second heating element H13, H43...Third heating section H221, H222...Ring heating element PS1,PS4…Power supply R11,R41…1st area R12, R42…Second area R13,R43…3rd area T11, T11a, T11b, T12, T13, T13a, T13b, T221, T222, T40, T41, T41b, T42, T43, T43b...Connection terminals U1, U3, U41, U42... Unit W...wafer

Claims

1. A holding device, a plate-shaped portion having a placement surface on which an object to be held is placed; a heater portion disposed inside the plate-shaped portion so as to face the placement surface; a driver electrode disposed inside the plate-shaped portion, the placing surface has, in a plan view of the placing surface, a first region, a ring-shaped second region arranged outside the first region, and a ring-shaped third region arranged outside the second region, The heater unit includes: a plurality of first heat generating portions located in the first region in the plan view, the plurality of first heat generating portions being arranged side by side along an outer periphery of the first region; a second heat generating portion located in the second region in the plan view, the second heat generating portion having an annular shape and arranged to surround the first heat generating portions; a plurality of third heat generating portions located in the third region in the plan view, the third heat generating portions being arranged side by side along an inner periphery of the third region so as to form a ring shape surrounding the second heat generating portion; the driver electrode is connected to the first heat generating portion and the third heat generating portion; the holding device has a plurality of units each including the driver electrode, the first heat generating portion, and the third heat generating portion, Each of the plurality of units is connected in parallel to a power source. holding device.

2. 2. The holding device of claim 1, the second heat generating portion has a plurality of annular heat generating elements, Each of the plurality of annular heating elements is connected in series to a power source. holding device.

3. 3. The holding device according to claim 1 or 2, The unit comprises: an inner connection terminal connected to the first heat generating portion and the driver electrode, the inner connection terminal being arranged on the opposite side of the first region from the second region in the plan view; an outer connection terminal connected to the third heat generating portion and the driver electrode, the outer connection terminal being arranged on the opposite side of the third region from the second region in the plan view, holding device.

4. 3. The holding device according to claim 1 or 2, In the plan view, the area of ​​the first heat generating portion and the area of ​​the third heat generating portion are the same. holding device.

5. 3. The holding device according to claim 1 or 2, The unit has a plurality of the first heat generating portions, the driver electrode is connected to each of the plurality of first heat generating portions and the third heat generating portion. holding device.

6. A holding device, a plate-shaped portion having a placement surface on which an object to be held is placed; a heater portion disposed inside the plate-shaped portion so as to face the placement surface; a driver electrode disposed inside the plate-shaped portion, the placing surface has, in a plan view of the placing surface, a first region, a ring-shaped second region arranged outside the first region, and a ring-shaped third region arranged outside the second region, The heater unit includes: a first heat generating portion located in the first region in the plan view and having an annular shape; a plurality of second heat generating portions located in the second region in the plan view, the plurality of second heat generating portions being arranged side by side along an inner periphery of the second region so as to form a ring shape surrounding the first heat generating portion; a third heat generating portion located in the third region in the plan view, the third heat generating portion having an annular shape and arranged to surround the plurality of second heat generating portions; the driver electrode is connected to the first heat generating portion and the third heat generating portion; The plurality of second heat generating portions are connected in parallel to the power source. holding device.

Images