Gas Supply System

Abstract

To materialize a gas supply system capable of supplying inactive gas to a container during an interval when the container is transported by a transportation vehicle.SOLUTION: A gas supply system comprises a gas supply vehicle 2 supplying inactive gas to a transportation vehicle 1. The transportation vehicle 1 comprises: a supplied unit 14 receiving supply of inactive gas from the gas supply vehicle 2; and a first supply device S1 supplying the inactive gas supplied to the supplied unit 14 to a container 8. The gas supply vehicle 2 can travel on a travel route R and comprises: a holding unit 23 holding a gas tank 7 filled with inactive gas; a supply unit 24 configured to be connectable to and separatable from the supplied unit 14; and a second supply device S2 supplying inactive gas from the gas tank 7 held by the holding unit 23 to the supply unit 24.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a gas supply system that includes a transport vehicle that travels along a specified travel path to transport a container, and that supplies an inert gas into the container. [Background technology]

[0002] For example, in semiconductor manufacturing plants, semiconductor wafers and glass substrates are housed in dedicated containers and transported by transport vehicles. An inert gas is injected into the container as a purge gas to prevent oxidation of the semiconductor wafers and to prevent dust from adhering to the semiconductor wafers. Such a technique is disclosed, for example, in Japanese Patent Laid-Open Publication No. 2016-021429 (Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-021429 Summary of the Invention [Problem to be solved by the invention]

[0004] In this type of field, as disclosed in Patent Document 1, a purge stocker is often used to store containers and supply inert gas to the stored containers. However, in order to supply inert gas to a container, a transport vehicle must transport the target container to the purge stocker. Furthermore, the supply of inert gas can only be performed while the container is stored in the purge stocker.

[0005] In view of the above circumstances, it is desirable to realize a gas supply system that can supply inert gas to a container while it is being transported by a transport vehicle. [Means for solving the problem]

[0006] Prescribed driving route of A gas supply system for supplying an inert gas into a container, the gas supply system comprising: a transport vehicle that travels to transport a container; a gas supply vehicle for supplying the inert gas to the transport vehicle; the transport vehicle includes a support unit that supports the container and a traveling unit that has a plurality of wheels; the transport vehicle includes a supply destination portion that receives a supply of the inert gas from the gas supply vehicle, and a first supply device that supplies the inert gas supplied to the supply destination portion to the container, The gas supply vehicle is Same as the above transport vehicle configured to be able to travel along the travel route, The gas supply vehicle includes a support unit that supports a gas tank and a running unit that has a plurality of wheels, The gas supply vehicle comprises a holding section that detachably holds a gas tank filled with the inert gas, a supply section that is configured to be connectable and detachable to the supply destination section, and a second supply device that supplies the inert gas from the gas tank held in the holding section to the supply section.

[0007] According to this configuration, by connecting the supply unit to the supply destination unit, inert gas can be supplied from the gas tank held by the gas supply vehicle to the container being transported by the transport vehicle. In this case, since the gas supply vehicle can travel the same route as the transport vehicle, inert gas can be supplied to the container regardless of whether the transport vehicle is moving or stopped. Furthermore, according to this configuration, the gas supply vehicle holds the gas tank detachably, making it easy to replace the gas tank. Therefore, while the gas supply vehicle is configured to travel the same route as the transport vehicle, it is easy to ensure a large amount of inert gas can be supplied by the gas supply vehicle. As described above, according to this configuration, a gas supply system can be realized that can supply inert gas to containers being transported by the transport vehicle.

[0008] Other gas supply systems include A gas supply system for supplying an inert gas into a container, the gas supply system comprising: a transport vehicle that travels along a specified travel path to transport a container; a gas supply vehicle for supplying the inert gas to the transport vehicle; the transport vehicle includes a supply destination portion that receives a supply of the inert gas from the gas supply vehicle, and a first supply device that supplies the inert gas supplied to the supply destination portion to the container, the gas supply vehicle is configured to be able to travel along the travel route, The gas supply vehicle includes a holding unit that detachably holds a gas tank filled with the inert gas, a supply unit that is configured to be connectable to and detachable from the supply destination unit, and a second supply device that supplies the inert gas from the gas tank held in the holding unit to the supply unit, As the holding portion changes from a non-holding state in which it does not hold the gas tank to a holding state in which it holds the gas tank, the second supply device is connected to the gas tank held by the holding portion.

[0009] Other gas supply systems include A gas supply system for supplying an inert gas into a container, the gas supply system comprising: a transport vehicle that travels along a specified travel path to transport a container; a gas supply vehicle for supplying the inert gas to the transport vehicle; the transport vehicle includes a supply destination portion that receives a supply of the inert gas from the gas supply vehicle, and a first supply device that supplies the inert gas supplied to the supply destination portion to the container, the gas supply vehicle is configured to be able to travel along the travel route, The gas supply vehicle includes a holding unit that detachably holds a gas tank filled with the inert gas, a supply unit that is configured to be connectable to and detachable from the supply destination unit, and a second supply device that supplies the inert gas from the gas tank held in the holding unit to the supply unit, The direction along the travel route is defined as a travel direction, one side of the travel direction is defined as a travel direction first side, and the other side of the travel direction is defined as a travel direction second side, the supply unit is disposed so as to protrude from a body of the gas supply vehicle toward the first side in the traveling direction, the supplied portion is disposed so as to protrude from the body of the transport vehicle toward the second side in the traveling direction, an electromagnet is provided in at least one of the supplying part and the supplied part; The connection and disconnection between the supplying part and the supplied part is controlled by whether or not the electromagnet is energized.

[0010] Other gas supply systems include A gas supply system for supplying an inert gas into a container, the gas supply system comprising: a transport vehicle that travels along a specified travel path to transport a container; a gas supply vehicle for supplying the inert gas to the transport vehicle; the transport vehicle includes a supply destination portion that receives a supply of the inert gas from the gas supply vehicle, and a first supply device that supplies the inert gas supplied to the supply destination portion to the container, the gas supply vehicle is configured to be able to travel along the travel route, The gas supply vehicle includes a holding unit that detachably holds a gas tank filled with the inert gas, a supply unit that is configured to be connectable to and detachable from the supply destination unit, and a second supply device that supplies the inert gas from the gas tank held in the holding unit to the supply unit, a gas tank storage facility for storing the gas tank; The gas supply vehicle is equipped with a transfer device that transfers the gas tank between the body of the gas supply vehicle and the gas tank storage facility.

[0011] Further features and advantages of the techniques according to the present disclosure will become more apparent from the following description of exemplary and non-limiting embodiments, which proceeds with reference to the drawings. [Brief explanation of the drawings]

[0012] [Figure 1] Plan view of the transportation facility using the gas supply system [Figure 2] A side view showing a transport vehicle and a gas supply vehicle. [Figure 3] Control Block Diagram [Figure 4] An explanatory diagram showing connection and separation between a supplying part and a supplied part. [Figure 5] Diagram showing gas tank replacement at a gas tank storage facility DETAILED DESCRIPTION OF THE INVENTION

[0013] The gas supply system is a system that includes a transport vehicle that travels along a specified travel path to transport a container and supplies an inert gas to the inside of the container. Hereinafter, an embodiment of the gas supply system will be described, taking as an example a case where the gas supply system is used in a transport facility.

[0014] As shown in Figures 1 and 2, the conveying equipment 100 includes a specified travel route R, a conveying vehicle 1 that travels along the travel route R to convey a container 8, and a plurality of transfer target locations 9 arranged along the travel route R.

[0015] The travel route R is set at a position spaced above the floor. In this example, the travel route R is configured using a rail Ra installed near the ceiling. The transport vehicle 1 is configured as a so-called ceiling transport vehicle and travels along the rail Ra. The transfer target location 9 is located below the travel route R. The transport vehicle 1 is configured to transfer the container 8 between the transfer target location 9 by raising and lowering the container 8.

[0016] In this embodiment, the transport facility 100 includes a plurality of transport vehicles 1. Each of the plurality of transport vehicles 1 is configured to receive a transport command from a host control device Ct (see FIG. 3) that manages the facility in an integrated manner, and to execute a task in accordance with the transport command. For example, the transport command includes information on the origin and destination of the container 8. Upon receiving the transport command, the transport vehicle 1 transports the container 8 from the origin to the destination. The origin and destination include the transfer target location 9.

[0017] There are various types of containers 8 that can be handled by the transport facility 100. In this example, the transport facility 100 is used in a semiconductor manufacturing factory. Therefore, the containers 8 are configured to accommodate objects such as semiconductor wafers and glass substrates. The transport vehicle 1 transports the containers 8 that accommodate these objects along the travel route R between each process.

[0018] In this embodiment, the transfer target location 9 includes a processing device 90 that performs processing on the container 8, and a mounting table 91 that is arranged adjacent to the processing device 90. In this specification, "processing on the container 8" means processing on the objects (semiconductor wafers or glass substrates) contained in the container 8. The transport vehicle 1 receives the container 8 that has been processed by the processing device 90 from the mounting table 91, or delivers the container 8 that has not been processed by the processing device 90 to the mounting table 91. The processing device 90 performs various processes, such as thin film formation, photolithography, and etching.

[0019] As shown in Fig. 2, the transport vehicle 1 includes a vehicle body 16. The vehicle body 16 includes a support section 10 and a traveling section 11. The transport vehicle 1 further includes a lifting section 12 and a container holding section 13. The lifting section 12 and the container holding section 13 are supported by the vehicle body 16 (here, the support section 10).

[0020] The support unit 10 is configured to support the container 8. In this embodiment, the support unit 10 supports the container 8 by holding the container 8 with the container holding unit 13. In this embodiment, the support unit 10 is also configured to accommodate the container 8. That is, the support unit 10 functions as a storage unit for storing the container 8. When transporting the container 8, the transport vehicle 1 travels along the travel route R with the container 8 stored in the support unit 10. In this embodiment, the support portion 10 is disposed below the rail Ra.

[0021] The traveling unit 11 is configured to travel along a travel route R. The traveling unit 11 travels along a rail Ra. In this embodiment, the traveling unit 11 is disposed above the rail Ra and is connected to a support unit 10 disposed below the rail Ra. Although detailed illustration is omitted, the traveling unit 11 includes a plurality of wheels and a drive source (for example, an electric motor) that drives at least some of the plurality of wheels.

[0022] The lifting section 12 is configured to raise and lower the container holding section 13 between the vehicle body 16 (here, the support section 10; the same applies below) and a transfer target location 9 (see Figure 1) located below the vehicle body 16. This enables the transport vehicle 1 to transfer containers 8 between the transfer target location 9 and a loading platform 91. Although a detailed explanation will be omitted, the lifting section 12 is equipped with a lifting belt connected to the container holding section 13 and a lifting drive section configured to be able to wind and unwind the lifting belt.

[0023] The container holding unit 13 is configured to hold the container 8. The container holding unit 13 is configured to be raised and lowered between the vehicle body 16 and the transfer target location 9 by the lifting unit 12.

[0024] In this embodiment, the container 8 includes a container body 80 and a held portion 81 that protrudes upward from the top surface of the container body 80. The container holding portion 13 is configured to hold the held portion 81 of the container 8. In this example, the held portion 81 of the container 8 is formed in a flange shape. The container holding portion 13 holds the container 8 by sandwiching the flange-shaped held portion 81 from both sides in the horizontal direction.

[0025] In this embodiment, the container holding unit 13 includes a holding main body 13a and a pair of holding claws 13b protruding downward from the holding main body 13a. In this example, the pair of holding claws 13b move toward or away from each other. The pair of holding claws 13b hold the container 8 by moving toward each other, and release the hold by moving away from each other. The holding main body 13a is connected to the lifting belt of the lifting unit 12. The holding main body 13a rises when the lifting belt is wound up. The holding main body 13a descends when the lifting belt is unwound.

[0026] In this embodiment, the transport vehicle 1 is provided with a drop prevention unit 15 that prevents the container 8 from falling from the vehicle body 16. The drop prevention unit 15 prevents the container 8 housed in the support unit 10 while being held by the container holding unit 13 from falling.

[0027] The fall restriction unit 15 is connected to the support unit 10 and is configured to be freely retractable relative to the support unit 10. When the fall restriction unit 15 protrudes from the support unit 10, it is positioned facing the container 8 housed in the support unit 10 from below. As a result, even if the container 8 becomes detached from the container holding unit 13 inside the support unit 10, the fall of the container 8 can be prevented by the fall restriction unit 15 in the protruding state. Furthermore, when the fall restriction unit 15 is retracted, it is out of the path of elevation of the container holding unit 13 and the container 8 by the lifting unit 12. As a result, the fall restriction unit 15 does not interfere with the elevation of the container holding unit 13 and the container 8 by the lifting unit 12.

[0028] In semiconductor manufacturing plants, it is common to supply an inert gas, such as nitrogen gas, into a container to prevent oxidation of the objects (such as semiconductor wafers or glass substrates) stored in the container and to prevent dust from adhering to the objects. Conventionally, supplying an inert gas into a container has often been performed while the container is stored in a dedicated purge stocker. The gas supply system according to the present disclosure enables supplying an inert gas into a container without using such a purge stocker. This will be described in detail below.

[0029] Hereinafter, the direction along the travel route R will be referred to as the "travel direction X." One side of the travel direction X will be referred to as the "travel direction first side X1," and the other side of the travel direction X will be referred to as the "travel direction second side X2." In this embodiment, the first side X1 in the traveling direction is the front side in the traveling direction X. The second side X2 in the traveling direction is the rear side in the traveling direction X.

[0030] As shown in FIG. 2, the gas supply system includes a gas supply vehicle 2 that supplies inert gas to a transport vehicle 1. The gas supply vehicle 2 is configured to be able to travel along a travel route R. By using the gas supply vehicle 2, the gas supply system supplies inert gas to a container 8 held by a transport vehicle 1 that is present on the travel route R. In this example, the gas supply vehicle 2 is configured as a so-called overhead traveling vehicle that travels along a rail Ra installed near the ceiling.

[0031] The transport vehicle 1 is equipped with a supply portion 14 that receives a supply of inert gas from the gas supply vehicle 2, and a first supply device S1 that supplies the inert gas supplied to the supply portion 14 to the container 8.

[0032] In this embodiment, the supplied portion 14 is arranged so as to protrude from the vehicle body 16 of the transport vehicle 1 toward the second side X2 in the traveling direction. Here, the supplied portion 14 is arranged so as to protrude from the support portion 10 toward the second side X2 in the traveling direction. As described above, in this example, the second side X2 in the traveling direction is the rear side in the traveling direction X. Therefore, the supplied portion 14 is arranged so as to protrude rearward from the rear of the vehicle body 16 of the transport vehicle 1. The supplied portion 14 is configured to be connectable to the supply portion 24 of the gas supply vehicle 2. Note that the supplied portion 14 may also be arranged so as to protrude toward the second side X2 in the traveling direction from a portion of the vehicle body 16 other than the support portion 10 (for example, the traveling portion 11).

[0033] In this embodiment, the first supply device S1 includes a supply pipe Ts through which the inert gas supplied from the gas supply vehicle 2 flows, and a first nozzle S1a connected to the container 8 held in the container holding unit 13. Although detailed illustration is omitted, in this example, the first supply device S1 includes a solenoid valve that can freely open and close the flow path of the inert gas in the supply pipe Ts. The opening and closing operation of the solenoid valve is controlled by a transport vehicle control device C1 mounted on the transport vehicle 1.

[0034] The supply pipe Ts connects the supplied portion 14 and the first nozzle S1a. In other words, one end of the supply pipe Ts is connected to the supplied portion 14, and the other end of the supply pipe Ts is connected to the first nozzle S1a. In this embodiment, the supply pipe Ts is arranged so as to pass through the inside of the vehicle body 16 (here, the support portion 10). In this example, the supply pipe Ts is arranged so as to pass through the inside of the support portion 10 and to run along the drop-regulating portion 15. The first nozzle S1a provided at the tip of the supply pipe Ts is arranged so as to protrude upward from the drop-regulating portion 15.

[0035] In this embodiment, when the transport vehicle 1 receives a supply of inert gas from the gas supply vehicle 2, the drop restriction unit 15 is in a protruding state and the container 8 is placed on the drop restriction unit 15. Then, the first nozzle S1a protruding upward from the drop restriction unit 15 is inserted into the insertion port 80h provided at the bottom of the container body 80. This enables the transport vehicle 1 to receive a supply of inert gas from the gas supply vehicle 2.

[0036] The gas supply vehicle 2 comprises a holding section 23 that detachably holds a gas tank 7 filled with inert gas, a supply section 24 that is configured to be connectable to and detachable from the supply destination section 14 of the transport vehicle 1, and a second supply device S2 that supplies inert gas from the gas tank 7 held in the holding section 23 to the supply section 24. The gas supply vehicle 2 also comprises a vehicle body 26. The vehicle body 26 comprises a support section 20 and a running section 21. The transport vehicle 1 further comprises a lifting section 22. The lifting section 22 and the holding section 23 are supported by the vehicle body 26 (here, the support section 20; the same applies below).

[0037] The support part 20 is configured to support the gas tank 7. In this embodiment, the support part 20 supports the gas tank 7 by holding the gas tank 7 with the holding part 23. In this embodiment, the support part 20 is configured to accommodate the gas tank 7. In other words, the support part 20 functions as a housing part for accommodating the gas tank 7. When transporting the gas tank 7, the gas supply vehicle 2 travels along the travel route R with the gas tank 7 housed in the support part 20. In this embodiment, the support part 20 is disposed below the rail Ra.

[0038] The traveling unit 21 is configured to travel along a travel route R. The traveling unit 21 travels along a rail Ra. In this embodiment, the traveling unit 21 is disposed above the rail Ra and is connected to a support unit 20 disposed below the rail Ra. Although detailed illustration is omitted, the traveling unit 21 includes a plurality of wheels and a drive source (for example, an electric motor) that drives at least some of the plurality of wheels.

[0039] The lifting unit 22 is configured to lift and lower the holding unit 23. Although detailed description will be omitted, the lifting unit 22 includes a lifting belt connected to the holding unit 23, and a lifting drive unit configured to be able to wind and unwind the lifting belt.

[0040] The holding unit 23 is configured to hold the gas tank 7. The holding unit 23 is configured to be raised and lowered by the lifting unit 22.

[0041] In this embodiment, the gas tank 7 includes a tank body 70 that stores an inert gas (for example, an inert gas in a compressed state), and a held portion 71 that protrudes upward from the top surface of the tank body 70. The holding portion 23 is configured to hold the held portion 71 of the gas tank 7. In this example, the held portion 71 of the gas tank 7 is formed in a flange shape. The holding portion 23 holds the gas tank 7 by sandwiching the flange-shaped held portion 71 from both sides in the horizontal direction.

[0042] In this embodiment, the holding portion 23 includes a holding body portion 23a and a pair of holding claws 23b protruding downward from the holding body portion 23a. In this example, the pair of holding claws 23b move toward or away from each other. The pair of holding claws 23b hold the gas tank 7 by moving toward each other, and release the hold by moving away from each other. The holding body portion 23a is connected to the lifting belt of the lifting portion 22. The holding body portion 23a rises when the lifting belt is wound up. The holding body portion 23a descends when the lifting belt is unwound.

[0043] In this embodiment, the second supply device S2 includes a gas pipe Tg through which the inert gas flows from the gas tank 7, and a second nozzle S2a connected to the gas tank 7 held in the holding portion 23. Although detailed illustration is omitted, in this example, the second supply device S2 includes a solenoid valve that can block the flow path of the inert gas in the gas pipe Tg. The opening and closing operation of the solenoid valve is controlled by a supply vehicle control device C2 mounted on the gas supply vehicle 2.

[0044] The gas pipe Tg connects the supply unit 24 and the second nozzle S2a. In other words, one end of the gas pipe Tg is connected to the supply unit 24, and the other end of the gas pipe Tg is connected to the second nozzle S2a.

[0045] In this embodiment, the gas pipe Tg is arranged to pass through the inside of the vehicle body 26 (here, the support part 20). Also, a flow rate control part 25 that controls the flow rate of the inert gas flowing through the gas pipe Tg is provided inside the vehicle body 26. The flow rate control part 25 is configured using a so-called mass flow controller.

[0046] In this embodiment, the gas pipe Tg is arranged to pass through the inside of the holding main body portion 23a in addition to the support portion 20. The gas pipe Tg is connected to the second nozzle S2a inside the holding main body portion 23a.

[0047] In this embodiment, as the holding portion 23 changes from a non-holding state in which it does not hold the gas tank 7 to a holding state in which it holds the gas tank 7, the second supply device S2 is connected to the gas tank 7 held by the holding portion 23.

[0048] In this embodiment, the second nozzle S2a is provided so as to protrude downward from the holding body portion 23a. The second nozzle S2a is inserted into an insertion port 70h provided at the top of the tank body 70 as the holding portion 23 changes from a non-holding state in which the gas tank 7 is not held to a holding state in which the gas tank 7 is held. This connects the second supply device S2 to the gas tank 7 held by the holding portion 23.

[0049] In this embodiment, the gas supply vehicle 2 is configured to receive a gas tank 7 that is located below the vehicle body 26 (see also FIG. 5). When the gas supply vehicle 2 receives the gas tank 7, the holding unit 23 is lowered from the vehicle body 26 by the lifting unit 22. As the holding unit 23 descends, it approaches the gas tank 7 to be received from above. When the holding unit 23 descends to a position where it can hold the gas tank 7, the second nozzle S2a protruding downward from the holding main body portion 23a is inserted into the insertion port 70h of the tank main body 70. Then, the gas supply vehicle 2 holds the held portion 71 of the gas tank 7 with the pair of holding claws 23b, and raises the holding unit 23 up to the vehicle body 26 by the lifting unit 22. This places the gas supply vehicle 2 in the state shown in FIG. 2.

[0050] In this embodiment, the second supply device S2 includes a biasing member S2b that biases the second nozzle S2a downward. The biasing member S2b is configured using an elastic member such as a spring. Because the biasing member S2b biases the second nozzle S2a downward, the second nozzle S2a can be properly inserted into the insertion port 70h of the tank body 70. In this example, the biasing member S2b is provided inside the holding body portion 23a.

[0051] In this embodiment, the supply unit 24 is arranged so as to protrude from the vehicle body 26 of the gas supply vehicle 2 toward the first side X1 in the traveling direction. Here, the supply unit 24 is arranged so as to protrude from the support part 20 toward the first side X1 in the traveling direction. As described above, in this example, the first side X1 in the traveling direction is the front side in the traveling direction X. Therefore, the supply unit 24 is arranged so as to protrude forward from the front part of the vehicle body 26 of the gas supply vehicle 2. The supply unit 24 is configured to be connectable to the supplied part 14 of the transport vehicle 1. Note that the supply unit 24 may also be arranged so as to protrude toward the first side X1 in the traveling direction from a part of the vehicle body 26 other than the support part 20 (for example, the traveling part 21).

[0052] In this embodiment, an electromagnet 24a is provided in at least one of the supplying unit 24 and the supplied unit 14. Connection and separation between the supplying unit 24 and the supplied unit 14 is controlled depending on whether or not current is applied to the electromagnet 24a. In this example, the electromagnet 24a is provided only in the supplying unit 24. The supplied unit 14 is configured so that the electromagnet 24a can be attracted to it. The supplied unit 14 is configured using, for example, a permanent magnet or iron material. Note that, conversely to the above, the electromagnet may be provided in the supplied unit 14.

[0053] In this embodiment, the gas pipe Tg is flexible. That is, in this embodiment, the second supply device S2 is equipped with a flexible gas pipe Tg. The gas pipe Tg is wound around a rotating body M and is configured to be unwound or retracted depending on the distance between the gas supply vehicle 2 and the transport vehicle 1. In this example, the rotating body M is configured using a drive source such as an electric motor, and the gas pipe Tg is unwound or retracted using the driving force generated by the drive source. The rotating body M is provided inside the vehicle body 26. It is also possible to provide the rotating body M with a mechanism that retracts the gas pipe Tg using a biasing force such as a spring, so that when the distance between the gas supply vehicle 2 and the transport vehicle 1 becomes long, the gas pipe Tg is unwound from the rotating body M against the biasing force, and when the distance between the gas supply vehicle 2 and the transport vehicle 1 becomes short, the gas pipe Tg is retracted around the rotating body M by the biasing force.

[0054] In this embodiment, the gas pipe Tg is arranged to extend from the vehicle body 26 of the gas supply vehicle 2 toward the first side X1 in the traveling direction, and has a supply unit 24 attached to its end. In detail, the gas pipe Tg is configured to be able to extend from the vehicle body 26 of the gas supply vehicle 2 toward the first side X1 in the traveling direction. The gas supply vehicle 2 extends the gas pipe Tg from the vehicle body 26 toward the first side X1 in the traveling direction by unwinding the flexible gas pipe Tg using the rotating body M. With this configuration, the transport vehicle 1 and the gas supply vehicle 2 can travel while maintaining a predetermined distance between them with the supplied portion 14 and the supply portion 24 connected.

[0055] The gas supply vehicle 2 is equipped with a remaining amount measuring device I that measures the remaining amount of inert gas in the gas tank 7. In this embodiment, the remaining amount measuring device I measures the remaining amount of inert gas in the gas tank 7 based on the pressure of the inert gas supplied by the gas tank 7. In this example, the flow rate control device 25 measures the pressure of the inert gas. In other words, the flow rate control device 25 also functions as the remaining amount measuring device I.

[0056] Next, the control configuration of the gas supply system will be described.

[0057] As shown in FIG. 3, the gas supply system includes a transport vehicle control device C1 that controls the transport vehicle 1 and a supply vehicle control device C2 that controls the gas supply vehicle 2. In this embodiment, the gas supply system further includes a host control device Ct. The host control device Ct is a control device that manages the transport facility 100. The host control device Ct, the transport vehicle control device C1, and the supply vehicle control device C2 each include, for example, a processor such as a microcomputer, peripheral circuits such as a memory, etc. Each function is realized by cooperation between this hardware and a program executed on a processor such as a computer.

[0058] The transport vehicle control device C1 is mounted on the transport vehicle 1. The transport vehicle control device C1 is configured to control the traveling unit 11, the lifting unit 12, the container holding unit 13, and the first supply device S1. The transport vehicle control device C1 controls, for example, the drive units of each unit. When controlling the first supply device S1, the transport vehicle control device C1 controls, for example, the opening and closing of an electromagnetic valve provided in the supply pipe Ts.

[0059] The supply vehicle control device C2 is mounted on the gas supply vehicle 2. The supply vehicle control device C2 is configured to control the traveling section 21, the lifting section 22, the holding section 23, the supply section 24, the second supply device S2, and the flow rate control section 25 (remaining amount measuring device I). The supply vehicle control device C2 controls, for example, the drive sections of each section. When controlling the second supply device S2, the supply vehicle control device C2 controls, for example, the opening and closing of an electromagnetic valve provided in the gas pipe Tg and the operation of the rotating body M. When controlling the supply section 24, the supply vehicle control device C2 controls the energization state of an electromagnet provided in the supply section 24. This controls the connection and disconnection of the supply section 24 to the supplied section 14.

[0060] The host controller Ct is configured to issue the above-mentioned transport command to the transport vehicle 1. Upon receiving the transport command, the transport vehicle 1 transports the container 8 from the designated transport source to the designated transport destination.

[0061] In this embodiment, the host control device Ct is configured to specify the target transport vehicle 1 to which the inert gas is to be supplied and issue a gas supply command to the gas supply vehicle 2. Upon receiving the gas supply command, the gas supply vehicle 2 travels to a position adjacent to the target transport vehicle 1 and supplies the inert gas to the container 8 held by the target transport vehicle 1.

[0062] In this embodiment, the host controller Ct measures the elapsed time since each transport vehicle 1 in the transport facility 100 started transporting a container 8 filled with inert gas. Because the container 8 is not completely sealed, inert gas leaks from the inside of the container 8 over time, reducing the amount of inert gas remaining in the container 8. When the elapsed time since the transport vehicle 1 started transporting the container 8 filled with inert gas reaches a preset time, the host controller Ct designates the transport vehicle 1 carrying the container 8 as a target transport vehicle 1 and issues a gas supply command to the gas supply vehicle 2 to supply inert gas to the target transport vehicle 1. This allows the gas supply vehicle 2 to head toward the transport vehicle 1 carrying a container 8 with a low remaining amount of inert gas and supply the inert gas to the container 8. The preset time is set appropriately based on the performance of the container 8, the type of inert gas, and other factors.

[0063] FIG. 4 shows the state from when the gas supply vehicle 2 supplies the inert gas to the transport vehicle 1 until the supply of the inert gas is completed.

[0064] As shown in FIG. 4(a), the gas supply vehicle 2 heads toward the target transport vehicle 1 specified by the gas supply command. The gas supply vehicle 2 travels to a position adjacent to the target transport vehicle 1 on the second side X2 in the traveling direction, and connects the supply destination portion 14 of the target transport vehicle 1 with the supply portion 24 of the gas supply vehicle 2. In this embodiment, the connection of the supply portion 24 to the supply destination portion 14 is achieved by energizing the electromagnet 24a. When the electromagnet 24a is energized, the connection between the supply destination portion 14 and the supply portion 24 is maintained.

[0065] In this embodiment, when the target transport vehicle 1 receives a supply of inert gas from the gas supply vehicle 2, its traveling speed V1 is set to zero. That is, while the target transport vehicle 1 is stopped on the travel route R, the gas supply vehicle 2 approaches the target transport vehicle 1 from the second side X2 in the traveling direction and connects the supply unit 24 to the supply destination portion 14. After the supply destination portion 14 and the supply unit 24 are connected, the gas supply vehicle 2 starts supplying the inert gas to the target transport vehicle 1 (more specifically, to the container 8 held by the target transport vehicle 1).

[0066] 4(b), when the gas supply vehicle 2 is supplying inert gas to the target transport vehicle 1, the traveling speed V1 of the target transport vehicle 1 and the traveling speed V2 of the gas supply vehicle 2 may be set to a value greater than zero. In other words, the target transport vehicle 1 and the gas supply vehicle 2 may both travel along the traveling route R.

[0067] In this embodiment, the gas supply vehicle 2 is configured to perform follow-up traveling, following the target transport vehicle 1 so as to maintain a constant distance from the target transport vehicle 1. In this case, the gas pipe Tg to which the supply unit 24 is connected extends from the gas supply vehicle 2 to the first side X1 in the traveling direction. The extension amount of the gas pipe Tg is adjusted by the rotating body M according to the distance between the gas supply vehicle 2 and the target transport vehicle 1.

[0068] The above-mentioned following traveling can be realized by the gas supply vehicle 2 and the target transport vehicle 1 communicating with each other and traveling at the same traveling speed (V1, V2). This communication may be performed via a higher-level control device Ct. Furthermore, the above-mentioned following traveling may be achieved, for example, by the gas supply vehicle 2 being equipped with a detection unit that detects the distance between the gas supply vehicle 2 and the target transport vehicle 1, and by controlling the traveling speed V2 so that the detection result by the detection unit is constant, i.e., so that the distance between the vehicles is constant.

[0069] As shown in FIG. 4(c), when the supply of inert gas to the target transport vehicle 1 is completed, the gas supply vehicle 2 separates the supply unit 24 from the supply recipient unit 14. In this embodiment, the gas supply vehicle 2 de-energizes the electromagnet 24a, thereby releasing the attraction of the supply unit 24 to the supply recipient unit 14. The target transport vehicle 1 maintains or increases its traveling speed V1 and continues transporting the container 8. The gas supply vehicle 2 reduces its own traveling speed V2 to at least the traveling speed V1 of the target transport vehicle 1. This gradually increases the distance between the target transport vehicle 1 and the gas supply vehicle 2. At this time, the gas pipe Tg extending from the gas supply vehicle 2 hangs down from the gas supply vehicle 2, as shown in FIG. 4(c).

[0070] As shown in Figure 4(d), after the gas supply vehicle 2 separates the supply unit 24 from the supply destination unit 14, the gas pipe Tg is wound up by the rotating body M. As a result, the gas pipe Tg that was hanging down from the gas supply vehicle 2 is housed inside the gas supply vehicle 2. The supply unit 24 attached to the tip of the gas pipe Tg returns to its original position, i.e., the front of the vehicle body 26.

[0071] As described above, the holding unit 23 of the gas supply vehicle 2 is configured to detachably hold the gas tank 7. In this embodiment, when the gas tank 7 held by the gas supply vehicle 2 becomes low in quantity due to the supply of inert gas to the transport vehicle 1, or when the gas tank 7 becomes empty, the gas supply vehicle 2 replaces the gas tank 7 with a new gas tank 7 filled with inert gas.

[0072] As shown in Fig. 5, in this embodiment, the gas supply system includes a gas tank storage 3 that stores a gas tank 7. The gas tank storage 3 is provided at a specific location on the travel route R (see also Fig. 1).

[0073] The gas supply truck 2 moves to the gas tank storage 3 based on the measurement results from the remaining gas level meter I, and in the gas tank storage 3, replaces the used gas tank 7 with a gas tank 7 filled with inert gas. When the measurement result from the remaining gas level meter I falls below a predetermined specified value or becomes zero, the gas supply truck 2 heads to the gas tank storage 3 and replaces the gas tank 7 in the gas tank storage 3.

[0074] In this embodiment, the gas supply vehicle 2 is equipped with a transfer device that transfers the gas tank 7 between the vehicle body 26 and the gas tank storage 3. In this example, the transfer device includes a lifting unit 22 and a holding unit 23, and the gas supply vehicle 2 transfers the gas tank 7 in the up-and-down direction. In other words, the gas supply vehicle 2 is configured to transfer the gas tank 7 between the gas tank storage 3 by holding the gas tank 7 with the holding unit 23 and raising and lowering the holding unit 23 with the lifting unit 22.

[0075] In this embodiment, the gas tank storage 3 includes a plurality of support stands 30. Each of the plurality of support stands 30 is configured to support a gas tank 7. Each support stand 30 supports a used gas tank 7 received from the gas supply vehicle 2 or a gas tank 7 filled with inert gas.

[0076] For example, the multiple support stands 30 are configured to circulate inside the gas tank storage 3 along a circulation path 30R. When replacing a used gas tank 7, the gas supply vehicle 2 delivers the used gas tank 7 to an unsupported support stand 30. The support stand 30 that received the used gas tank 7 and the support stand 30 that supports the gas tank 7 filled with inert gas move along the circulation path 30R, swapping their positions. The gas supply vehicle 2 then receives a new gas tank 7 filled with inert gas from the support stand 30 after swapping positions. In the illustrated example, the circulation path 30R along which the multiple support stands 30 move is formed around a horizontal axis. However, this configuration is not limited to this, and the circulation path 30R may also be formed around a vertical axis. Furthermore, the multiple support stands 30 may be fixed at predetermined positions in the gas tank storage 3. In this case, the gas tank 7 may be placed on each support stand 30 by a transport means such as a conveyor or a robot arm.

[0077] In this embodiment, the gas tank storage 3 is equipped with a gas filling device 31 that fills the gas tank 7 with an inert gas. The gas filling device 31 is configured to fill the used gas tank 7 received from the gas supply vehicle 2 with an inert gas.

[0078] In this embodiment, the gas filling device 31 is disposed adjacent to the circulation path 30R along which the multiple support stands 30 move. The gas filling device 31 fills the used gas tank 7 that has circulated along the circulation path 30R with an inert gas. The gas tank 7 filled with the inert gas by the gas filling device 31 moves again along the circulation path 30R.

[0079] In this embodiment, the gas supply vehicle 2 can itself deliver the used gas tank 7 to the gas tank storage 3 and receive the gas tank 7 filled with inert gas from the gas tank storage 3. This makes it easy to automatically realize a supply cycle of inert gas to the container 8 held by the transport vehicle 1. Furthermore, since the gas tank storage 3 is equipped with a gas filling device 31 that fills the used gas tank 7 with inert gas, it is easy to secure the gas tank 7 filled with inert gas in the gas tank storage 3.

[0080] According to the gas supply system described above, it is possible to supply inert gas to the container 8 while it is being transported by the transport vehicle 1.

[0081] Other Embodiments Next, other embodiments of the gas supply system will be described.

[0082] (1) In the above embodiment, an example has been described in which the second supply device S2 is connected to the gas tank 7 held by the holding unit 23 as the holding unit 23 changes from a non-holding state in which it does not hold the gas tank 7 to a holding state in which it holds the gas tank 7. However, without being limited to this example, the second supply device S2 may be connected to the gas tank 7 held by the holding unit 23 at the timing when inert gas is supplied to the container 8 held by the transport vehicle 1. That is, in this case, the holding of the gas tank 7 by the holding unit 23 is completed before the second supply device S2 is connected to the gas tank 7.

[0083] (2) In the above embodiment, an example has been described in which an electromagnet 24a is provided in at least one of the supplying unit 24 and the supplied unit 14, and the connection and disconnection between the supplying unit 24 and the supplied unit 14 is controlled depending on whether or not current is applied to the electromagnet 24a. However, without being limited to such an example, for example, the supplying unit 24 and the supplied unit 14 may have corresponding convex and concave portions and may be configured to be able to engage and disengage with each other.

[0084] (3) In the above embodiment, an example was described in which the gas pipe Tg is arranged to extend from the body 26 of the gas supply vehicle 2 toward the first side X1 in the traveling direction, and the supply unit 24 is attached to the end of the gas pipe Tg. However, without being limited to this example, the gas pipe Tg may remain inside the body 26 of the gas supply vehicle 2, and the supply unit 24 may be fixed to the end of the body 26 on the first side X1 in the traveling direction. In this case, it is difficult to ensure a distance between the gas supply vehicle 2 and the transport vehicle 1. Therefore, it is preferable that the gas supply vehicle 2 and the transport vehicle 1 are connected to each other by a coupling mechanism so that the transport vehicles 1 and 2 travel with a distance between them being approximately zero. This allows the transport vehicle 1 and the gas supply vehicle 2 to travel appropriately along the travel route R while maintaining a connection between the supply unit 24 and the supplied unit 14. In the above case, the supply unit 24 and the supplied unit 14 may be provided to a coupling mechanism that connects the gas supply vehicle 2 and the transport vehicle 1. Furthermore, in a configuration in which the transport vehicle 1 and the gas supply vehicle 2 are connected by a connecting mechanism, the gas supply vehicle 2 may be towed by the transport vehicle 1 without being self-propelled.

[0085] (4) In the above embodiment, an example has been described in which, when the target transport vehicle 1 is stopped on the travel route R, the gas supply vehicle 2 approaches the target transport vehicle 1 from the second side X2 in the travel direction and connects the supply unit 24 to the supply recipient portion 14. However, without being limited to this example, the gas supply vehicle 2 may approach the target transport vehicle 1 while it is traveling from the second side X2 in the travel direction and connect the supply unit 24 to the supply recipient portion 14. In this case, it is preferable that the target transport vehicle 1 travels slowly.

[0086] (5) In the above embodiment, an example has been described in which the first traveling direction side X1 is the front side in the traveling direction X and the second traveling direction side X2 is the rear side in the traveling direction X. However, without being limited to such an example, the front-to-rear relationship may be reversed. That is, the first traveling direction side X1 may be the rear side in the traveling direction X and the second traveling direction side X2 may be the front side in the traveling direction X. Therefore, when the gas supply vehicle 2 supplies inert gas to the transport vehicle 1, the gas supply vehicle 2 may be disposed adjacent to the front side of the transport vehicle 1.

[0087] (6) In the above embodiment, an example has been described in which the transfer device provided in the gas supply vehicle 2 includes the lifting section 22 and the holding section 23, and the gas supply vehicle 2 transfers the gas tank 7 in the vertical direction. However, without being limited to such an example, the transfer device may include a horizontal movement mechanism (e.g., a fork section or a conveyor section) that moves the gas tank 7 in the horizontal direction, and the gas supply vehicle 2 may be configured to transfer the gas tank 7 in the horizontal direction.

[0088] (7) In the above embodiment, an example was described in which the gas supply vehicle 2 is equipped with a transfer device that transfers the gas tank 7 between the vehicle body 26 and the gas tank storage 3, and replaces the gas tank 7 itself. However, without being limited to this example, the gas supply vehicle 2 does not have to be equipped with such a transfer device. In this case, the replacement of the gas tank 7 may be performed manually.

[0089] (8) In the above embodiment, an example has been described in which the remaining amount of inert gas in the gas tank 7 is measured based on the pressure of the inert gas supplied by the gas tank 7. However, without being limited to such an example, the remaining amount of inert gas in the gas tank 7 may be configured to measure the remaining amount of inert gas in the gas tank 7 based on the weight of the gas tank 7.

[0090] (9) In the above embodiment, an example was described in which the transport vehicle 1 transports the container 8 and the gas supply vehicle 2 supplies the inert gas. However, without being limited to such an example, the transport vehicle 1 may also function as the gas supply vehicle 2. Alternatively, the gas supply vehicle 2 may also function as the transport vehicle 1. In other words, it (the cart) may function as the transport vehicle 1 when it holds the container 8, and may function as the gas supply vehicle 2 when it holds the gas tank 7.

[0091] (10) In the above embodiment, an example has been described in which the gas supply system includes the gas tank storage 3. However, the gas tank storage 3 is not an essential component, and the gas supply system does not necessarily have to include such a gas tank storage 3.

[0092] (11) In the above embodiment, an example has been described in which the gas supply vehicle 2 is configured as a so-called overhead traveling vehicle that travels along rails Ra provided near the ceiling. However, the present invention is not limited to such an example, and the gas supply vehicle 2 may be configured to travel along the travel route R on which the transport vehicle 1 travels. For example, if the transport vehicle 1 is configured to travel along the travel route R set along the floor surface, the gas supply vehicle 2 is also configured to travel along the travel route R set along the floor surface. In other words, the transport vehicle 1 may be configured as a floor transport vehicle, and the gas supply vehicle 2 may be configured as a floor traveling vehicle.

[0093] (12) The configurations disclosed in the above-described embodiments may be combined with configurations disclosed in other embodiments as long as no contradictions arise. Regarding other configurations, the embodiments disclosed in this specification are merely examples in all respects. Therefore, various modifications may be made as appropriate within the scope of the present disclosure.

[0094] [Summary of the above embodiment] The above-described gas supply system will now be described.

[0095] A gas supply system for supplying an inert gas into a container, the gas supply system comprising: a transport vehicle that travels along a specified travel path to transport a container; a gas supply vehicle for supplying the inert gas to the transport vehicle; the transport vehicle includes a supply destination portion that receives a supply of the inert gas from the gas supply vehicle, and a first supply device that supplies the inert gas supplied to the supply destination portion to the container, the gas supply vehicle is configured to be able to travel along the travel route, The gas supply vehicle comprises a holding section that detachably holds a gas tank filled with the inert gas, a supply section that is configured to be connectable and detachable to the supply destination section, and a second supply device that supplies the inert gas from the gas tank held in the holding section to the supply section.

[0096] According to this configuration, by connecting the supply unit to the supply destination unit, inert gas can be supplied from the gas tank held by the gas supply vehicle to the container being transported by the transport vehicle. In this case, since the gas supply vehicle can travel the same route as the transport vehicle, inert gas can be supplied to the container regardless of whether the transport vehicle is moving or stopped. Furthermore, according to this configuration, the gas supply vehicle holds the gas tank detachably, making it easy to replace the gas tank. Therefore, while the gas supply vehicle is configured to travel the same route as the transport vehicle, it is easy to ensure a large amount of inert gas can be supplied by the gas supply vehicle. As described above, according to this configuration, a gas supply system can be realized that can supply inert gas to containers being transported by the transport vehicle.

[0097] It is preferable that the second supply device is connected to the gas tank held in the holding portion as the holding portion changes from a non-holding state in which the gas tank is not held to a holding state in which the gas tank is held.

[0098] According to this configuration, the second supply device can be connected to the gas tank while the gas tank is held by the holding part, thereby ensuring reliable connection of the gas tank.

[0099] The direction along the travel route is defined as a travel direction, one side of the travel direction is defined as a travel direction first side, and the other side of the travel direction is defined as a travel direction second side, the supply unit is disposed so as to protrude from a body of the gas supply vehicle toward the first side in the traveling direction, the supplied portion is disposed so as to protrude from the body of the transport vehicle toward the second side in the traveling direction, an electromagnet is provided in at least one of the supplying part and the supplied part; Preferably, connection and disconnection between the supplying portion and the supplied portion is controlled by whether or not current is applied to the electromagnet.

[0100] According to this configuration, the supply unit and the supply destination unit can be easily connected when the transport vehicle and the gas supply vehicle are traveling side by side in the traveling direction. Furthermore, according to this configuration, the connection and separation between the supply unit and the supply destination unit is controlled by the electromagnet, so that the connection and separation can be easily performed.

[0101] the gas supply vehicle is configured to perform a following travel in which the gas supply vehicle follows the target transport vehicle so as to maintain a constant distance from the target transport vehicle, the second supply device includes a flexible gas pipe; Preferably, the gas pipe is arranged to extend from the body of the gas supply vehicle toward the first side in the traveling direction, and the supply unit is attached to an end of the gas pipe.

[0102] According to this configuration, even while the target transport vehicle is traveling, the gas supply vehicle can be positioned at a certain distance from the target transport vehicle, and the inert gas can be continuously supplied to the container held by the target transport vehicle. In addition, since the gas pipe connecting the gas supply vehicle and the target transport vehicle is flexible, the gas supply can be continued appropriately even if the distance between the gas supply vehicle and the target transport vehicle changes to some extent while traveling.

[0103] Preferably, the gas pipe is wound around a rotating body and configured to be unwound or wound according to the distance between the gas supply vehicle and the transport vehicle.

[0104] According to this configuration, even if the distance between the gas supply vehicle and the transport vehicle changes while the inert gas is being supplied, the gas pipe can be unwound or reeled out, thereby allowing the supply of inert gas to continue while adapting to the change in the distance between the vehicles. Furthermore, when the inert gas is not being supplied and the supply section of the gas supply vehicle and the supply section of the transport vehicle are separated, the gas pipe can be sufficiently reeled in to prevent the gas pipe from hanging down from the gas supply vehicle.

[0105] a gas tank storage facility for storing the gas tank; The gas supply vehicle preferably includes a transfer device that transfers the gas tank between the body of the gas supply vehicle and the gas tank storage facility.

[0106] According to this configuration, the gas tank held by the gas supply vehicle can be replaced automatically without manual intervention.

[0107] the gas supply vehicle is equipped with a remaining amount measuring device that measures the remaining amount of the inert gas in the gas tank, It is preferable that the gas supply vehicle moves to the gas tank storage facility based on the measurement results from the remaining gas measuring device, and replaces the used gas tank with the gas tank filled with the inert gas in the gas tank storage facility.

[0108] According to this configuration, the gas supply vehicle itself can deliver the used gas tank to the gas tank storage and receive the gas tank filled with inert gas from the gas tank storage, which makes it easy to automatically realize the cycle of supplying inert gas to the container held by the transport vehicle.

[0109] The gas tank storage facility includes a gas filling device that fills the gas tank with the inert gas, The gas filling device preferably fills the used gas tank received from the gas supply vehicle with the inert gas.

[0110] According to this configuration, it is easy to secure gas tanks filled with inert gas in the gas tank storage facility. [Industrial Applicability]

[0111] The technology disclosed herein can be used in a gas supply system that includes a transport vehicle that travels along a specified travel path to transport a container and supplies an inert gas into the container. [Explanation of symbols]

[0112] 1: Transport vehicle 16: Body 14:Supplied part 2: Gas supply vehicle 26: Body 23: Holding part 24: Supply section 24a: Electromagnet 3: Gas tank storage 31: Gas filling device 7: Gas tank 8: Container S1: 1st supply device S2: 2nd supply device Tg: Gas pipe I: Fuel gauge M: Rotating body R: Travel route X: Traveling direction X1: First side of travel direction X2: Second side of travel direction

Claims

1. A gas supply system for supplying an inert gas into a container, the gas supply system comprising: a transport vehicle that transports a container by traveling along a specified travel route; a gas supply vehicle for supplying the inert gas to the transport vehicle; the transport vehicle includes a support unit that supports the container and a traveling unit that has a plurality of wheels; the transport vehicle includes a supply destination portion that receives a supply of the inert gas from the gas supply vehicle, and a first supply device that supplies the inert gas supplied to the supply destination portion to the container, the gas supply vehicle is configured to be able to travel along the same travel route as the transport vehicle; The gas supply vehicle includes a support unit that supports a gas tank and a running unit that has a plurality of wheels, The gas supply vehicle is a gas supply system comprising: a holding section that detachably holds a gas tank filled with the inert gas; a supply section that is configured to be connectable and detachable to the supply destination section; and a second supply device that supplies the inert gas from the gas tank held in the holding section to the supply section.

2. A gas supply system for supplying an inert gas into a container, the gas supply system comprising: a transport vehicle that travels along a specified travel path to transport a container; a gas supply vehicle for supplying the inert gas to the transport vehicle; the transport vehicle includes a supply destination portion that receives a supply of the inert gas from the gas supply vehicle, and a first supply device that supplies the inert gas supplied to the supply destination portion to the container, the gas supply vehicle is configured to be able to travel along the travel route, The gas supply vehicle includes a holding unit that detachably holds a gas tank filled with the inert gas, a supply unit that is configured to be connectable to and detachable from the supply destination unit, and a second supply device that supplies the inert gas from the gas tank held in the holding unit to the supply unit, A gas supply system in which the second supply device is connected to the gas tank held in the holding unit as the holding unit changes from a non-holding state in which the gas tank is not held to a holding state in which the gas tank is held.

3. A gas supply system for supplying an inert gas into a container, the gas supply system comprising: a transport vehicle that travels along a specified travel path to transport a container; a gas supply vehicle for supplying the inert gas to the transport vehicle; the transport vehicle includes a supply destination portion that receives a supply of the inert gas from the gas supply vehicle, and a first supply device that supplies the inert gas supplied to the supply destination portion to the container, the gas supply vehicle is configured to be able to travel along the travel route, The gas supply vehicle includes a holding unit that detachably holds a gas tank filled with the inert gas, a supply unit that is configured to be connectable to and detachable from the supply destination unit, and a second supply device that supplies the inert gas from the gas tank held in the holding unit to the supply unit, A direction along the travel route is defined as a travel direction, one side of the travel direction is defined as a travel direction first side, and the other side of the travel direction is defined as a travel direction second side, the supply unit is disposed so as to protrude from a vehicle body of the gas supply vehicle toward the first side in the traveling direction, the supplied portion is disposed so as to protrude from the body of the transport vehicle toward the second side in the traveling direction, an electromagnet is provided in at least one of the supplying part and the supplied part; A gas supply system in which connection and disconnection between the supply part and the supplied part are controlled by whether or not the electromagnet is energized.

4. the gas supply vehicle is configured to perform a following travel in which the gas supply vehicle follows the target transport vehicle so as to maintain a constant distance from the target transport vehicle, the second supply device includes a flexible gas pipe; 4. The gas supply system according to claim 3, wherein the gas pipe is arranged to extend from the body of the gas supply vehicle toward the first side in the traveling direction, and the supply unit is attached to an end of the gas pipe.

5. 5. The gas supply system according to claim 4, wherein the gas pipe is wound around a rotating body and is configured to be unwound or wound depending on the distance between the gas supply vehicle and the transport vehicle.

6. A gas supply system for supplying an inert gas into a container, the gas supply system comprising: a transport vehicle that travels along a specified travel path to transport a container; a gas supply vehicle for supplying the inert gas to the transport vehicle; the transport vehicle includes a supply destination portion that receives a supply of the inert gas from the gas supply vehicle, and a first supply device that supplies the inert gas supplied to the supply destination portion to the container, the gas supply vehicle is configured to be able to travel along the travel route, The gas supply vehicle includes a holding unit that detachably holds a gas tank filled with the inert gas, a supply unit that is configured to be connectable to and detachable from the supply destination unit, and a second supply device that supplies the inert gas from the gas tank held in the holding unit to the supply unit, a gas tank storage facility for storing the gas tank; The gas supply vehicle is equipped with a transfer device that transfers the gas tank between the body of the gas supply vehicle and the gas tank storage facility.

7. the gas supply vehicle is equipped with a remaining amount measuring device that measures the remaining amount of the inert gas in the gas tank, The gas supply system described in claim 6, wherein the gas supply vehicle moves to the gas tank storage facility based on the measurement results by the gas level measuring device, and replaces the used gas tank with the gas tank filled with the inert gas in the gas tank storage facility.

8. The gas tank storage facility includes a gas filling device that fills the gas tank with the inert gas, 7. The gas supply system according to claim 6, wherein the gas filling device fills the inert gas into the used gas tank received from the gas supply vehicle.

Images