Cutting device

Abstract

To provide a cutting device which can adjust its exhaust force to an optimal exhaust force according to conditions in a processing chamber.SOLUTION: A cutting device 1 includes: a holding table 10 which holds a workpiece 200; a cutting unit 20 which cuts the workpiece 200 with a cutting blade 21 while supplying a cutting fluid to the workpiece 200 held by the holding table 10; a processing chamber 50 which encloses the holding table 10 and the cutting unit 20; an exhaust unit 70 which exhausts an atmosphere in the processing chamber 50; a control unit 100 which controls each component; and a blade edge position detection unit 60 which serves as a measurement part which is installed within the processing chamber 50 and measures a state of mist floating in the processing chamber 50. The control unit 100 has an exhaust force adjustment part 101 which adjusts an exhaust force of the exhaust unit 70 according to a measurement result of the blade edge position detection unit 60.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a cutting device. [Background technology]

[0002] 2. Description of the Related Art Cutting machines are used to divide workpieces such as wafers into individual devices (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2017-202546 Summary of the Invention [Problem to be solved by the invention]

[0004] The cutting machine shown in Patent Document 1 and the like uses cutting fluid when processing a workpiece with a cutting blade. In the cutting machine, the cutting fluid and cutting chips float as mist inside the processing chamber, and the mist is exhausted by an exhaust unit.

[0005] However, since the exhaust force of the cutting device is constant, there are cases where the exhaust force is insufficient or excessive.

[0006] SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a cutting device that can adjust the exhaust force to an optimum value depending on the conditions in the machining chamber. [Means for solving the problem]

[0007] In order to solve the above-mentioned problems and achieve the object, the cutting device of the present invention is a cutting device comprising: a holding table for holding a workpiece; a cutting unit for cutting the workpiece held on the holding table with a cutting blade while supplying cutting fluid to the workpiece; a processing chamber surrounding the holding table and the cutting unit; an exhaust unit for exhausting the atmosphere in the processing chamber; and a control unit for controlling each component, wherein the cutting device further comprises a measurement unit installed in the processing chamber and measuring mist floating in the processing chamber, and the control unit has an exhaust force adjustment unit for adjusting the exhaust force of the exhaust unit in accordance with the measurement result of the measurement unit. The measuring unit has a light emitting unit and a light receiving unit that receive light from the light emitting unit, and is a cutting edge position detection unit that detects the tip position of the cutting blade, and when the cutting blade is in a retracted state away from the blade entering portion, the amount of light received by the light receiving unit that receives light from the light emitting unit is obtained, and the exhaust power adjustment unit adjusts the exhaust power of the exhaust unit according to the amount of light received. It is characterized by:

[0010] In the cutting device, the exhaust unit may have a motor and a fan that rotates with the rotation of the motor, and the exhaust force adjustment section may adjust the exhaust force by changing the rotation speed of the motor.

[0011] In the cutting device, the exhaust unit may have a pipe connected to a suction source and a valve installed in the pipe for adjusting the degree of opening of a flow path through which a fluid passes, and the exhaust force adjustment unit may control the degree of opening of the flow path by the valve. [Effects of the Invention]

[0012] The present invention has the effect of being able to adjust the exhaust power to an optimum level depending on the conditions inside the processing chamber. [Brief explanation of the drawings]

[0013] [Figure 1] FIG. 1 is a schematic perspective view showing an example of the configuration of a cutting device according to the first embodiment. [Figure 2] FIG. 2 is a cross-sectional view schematically showing a main part of the cutting device according to the first embodiment. [Figure 3] 3 is a perspective view of a cutting edge position detection unit of the cutting device shown in FIG. 1. FIG. [Figure 4] FIG. 4 is a diagram showing the amount of light received by the light receiving section of the cutting edge position detection unit shown in FIG. [Figure 5]5 is a cross-sectional view schematically showing an exhaust unit of the cutting machine shown in FIG. [Figure 6] FIG. 6 is a diagram showing fan control data used by the exhaust power adjusting unit of the control unit of the cutting machine shown in FIG. 1 to control the fan. [Figure 7] FIG. 7 is a plan view schematically showing an example of a state in which the cutting edge position detection unit of the cutting machine shown in FIG. 1 measures mist floating in the machining chamber. [Figure 8] FIG. 8 is a plan view schematically showing another example of the state in which the cutting edge position detection unit of the cutting machine shown in FIG. 1 measures mist floating in the machining chamber. [Figure 9] FIG. 9 is a plan view schematically showing an example of a state in which the particle counter of the cutting machine according to the second embodiment measures mist floating in the machining chamber. [Figure 10] FIG. 10 is a diagram schematically illustrating the configuration of the particle counter shown in FIG. [Figure 11] FIG. 11 is a diagram showing the number of mist particles in the information output by the processing unit of the particle counter shown in FIG. [Figure 12] FIG. 12 is a diagram showing fan control data used by the exhaust power adjusting unit of the control unit of the cutting machine shown in FIG. 9 to control the fan. [Figure 13] FIG. 13 is a cross-sectional view schematically showing an exhaust unit of a cutting machine according to a modification of the first and second embodiments. [Figure 14] FIG. 14 is a diagram showing an example of fan control data used by the exhaust power adjuster of the control unit of the cutting device according to the modified example of the first and second embodiments to control the fan. [Figure 15] FIG. 15 is a diagram showing another example of fan control data used by the exhaust power adjuster of the control unit of the cutting device according to the modified example of the first and second embodiments to control the fan. DETAILED DESCRIPTION OF THE INVENTION

[0014] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment 1. Furthermore, the components described below include those that can be easily imagined by a person skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the configuration can be made within the scope of the gist of the present invention.

[0015] [Embodiment 1] A cutting device 1 according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a schematic perspective view showing an example of the configuration of the cutting device according to the first embodiment. Fig. 2 is a cross-sectional view showing a schematic view of a main part of the cutting device according to the first embodiment. The cutting device 1 shown in Fig. 1 according to the first embodiment is a processing device that cuts a workpiece 200.

[0016] (Workpiece) A workpiece 200 to be machined by the cutting device 1 according to the first embodiment is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, with a substrate 201 made of silicon, sapphire, gallium, or the like. As shown in Fig. 1, the workpiece 200 has a surface 202 on which a plurality of mutually intersecting division lines 203 are set, and devices 204 are formed in areas partitioned by the division lines 203. The devices 204 are, for example, integrated circuits such as ICs (Integrated Circuits) or LSIs (Large Scale Integrations), image sensors such as CCDs (Charge Coupled Devices) or CMOSs ​​(Complementary Metal Oxide Semiconductors), or memories (semiconductor memory devices).

[0017] 1, the workpiece 200 is in the shape of a disk having a diameter larger than the outer diameter of the workpiece 200, and has an adhesive tape 206 with an annular frame 207 attached to its outer edge attached to a back surface 205 behind a front surface 202, and is supported within an opening in the annular frame 207. The workpiece 200 is cut along planned division lines 203 to be divided into individual devices 204.

[0018] (cutting equipment) The cutting device 1 according to the first embodiment is a processing device that holds a workpiece 200 on a holding table 10 and cuts the workpiece 200. As shown in Fig. 1, the cutting device 1 includes: a holding table 10 that holds the workpiece 200; a cutting unit 20 that cuts the workpiece 200 held on the holding table 10 with a cutting blade 21 while supplying cutting fluid 25 (shown in Fig. 2) to the workpiece 200; an imaging unit 30 that images the workpiece 200 held on the holding table 10; and a control unit 100.

[0019] 1, the cutting device 1 also includes a moving unit 40 that moves the holding table 10 and the cutting unit 20 relative to one another. The moving unit 40 includes at least an X-axis moving unit 41, which is a processing feed unit that processes and feeds the holding table 10 in the X-axis direction parallel to the horizontal direction, a Y-axis moving unit 42, which is an indexing feed unit that indexes and feeds the cutting unit 20 in the Y-axis direction that is parallel to the horizontal direction and perpendicular to the X-axis direction, a Z-axis moving unit 43, which is a cutting feed unit that cuts and feeds the cutting unit 20 in the Z-axis direction that is parallel to the vertical direction and perpendicular to both the X-axis and Y-axis directions, and a rotational moving unit 44 that rotates the holding table 10 around an axis parallel to the Z-axis direction.

[0020] The X-axis movement unit 41 moves the holding table 10 and the rotational movement unit 44 in the X-axis direction, which is the processing feed direction, thereby processing-feeding the holding table 10 and the cutting unit 20 relatively along the X-axis. The Y-axis movement unit 42 is installed on a gate-shaped support frame 3 that stands upright from the apparatus main body 2, and moves a slide plate 45 on which the Z-axis movement unit 43 is installed in the Y-axis direction, which is the indexing feed direction, thereby moving the cutting unit 20 in the Y-axis direction and indexing-feeding the holding table 10 and the cutting unit 20 relatively along the Y-axis. The support frame 3 includes a pair of standing portions 4 that stand upright from the apparatus main body 2 and are spaced apart in the Y-axis direction, and a connecting portion 5 that connects the upper ends of the pair of standing portions 4.

[0021] The Z-axis movement unit 43 is installed on a slide plate 45 and moves a second slide plate 46, to which the cutting unit 20 is attached, in the Z-axis direction, which is the cutting feed direction, thereby moving the cutting unit 20 in the Z-axis direction and relatively feeding the holding table 10 and the cutting unit 20 along the Z-axis direction. The rotation movement unit 44 is installed on the X-axis movement unit 41 and is movable in the X-axis direction by the X-axis movement unit 41. The rotation movement unit 44 supports the holding table 10.

[0022] The X-axis moving unit 41, the Y-axis moving unit 42, and the Z-axis moving unit 43 each include a well-known ball screw rotatably mounted about its axis, a well-known motor for rotating the ball screw about its axis, and a well-known guide rail for supporting the holding table 10 or the cutting unit 20 movably in the X-axis, Y-axis, or Z-axis direction. The rotational moving unit 44 also includes a motor for rotating the holding table 10 about its axis.

[0023] The holding table 10 is disk-shaped and made of a porous material such as porous ceramics, and holds the workpiece 200 by suction on a holding surface 11 that is parallel to the horizontal direction. The holding table 10 is rotated about an axis parallel to the Z-axis direction by a rotational movement unit 44. The holding table 10 is moved in the X-axis direction by an X-axis movement unit 41 together with the rotational movement unit 44 between a processing area below the cutting unit 20 and a carry-in / out area that is spaced from below the cutting unit 20 and where the workpiece 200 is carried in and out.

[0024] The holding table 10 has a holding surface 11 connected to a vacuum suction source (not shown), and when the holding surface 11 is sucked by the vacuum suction source, it sucks and holds the workpiece 200 placed on the holding surface 11. In addition, a clamp (not shown) that clamps an annular frame 207 is provided around the periphery of the holding table 10. In addition, the bottom of the holding table 10 is covered by a table cover 12 attached to the outer circumferential surface of the rotary transfer unit 44.

[0025] As shown in FIG. 2, a bellows member 13 that covers the X-axis movement unit 41 is attached to the table cover 12. A pair of bellows members 13 is provided. One bellows member 13 is attached to the table cover 12 and the end of the device main body 2 on the front side in the X-axis direction in FIG. 1, and the other bellows member 13 is attached to the table cover 12 and the end of the device main body 2 on the rear side in the X-axis direction. Each bellows member 13 is flexible and can expand and contract in the X-axis direction, allowing the table cover 12, i.e., the holding table 10, to move in the X-axis direction. Each bellows member 13 prevents the cutting fluid 25 and the like from adhering to the X-axis movement unit 41 and the like.

[0026] The cutting unit 20 is a processing unit in which a cutting blade 21 is attached to a spindle 23 and cuts a workpiece 200 held on the holding table 10. The cutting unit 20 is provided so as to be movable in the Y-axis direction by a Y-axis movement unit 42 and so as to be movable in the Z-axis direction by a Z-axis movement unit 43 relative to the workpiece 200 held on the holding table 10. As shown in FIG. 1 , the cutting unit 20 is attached to the lower end of a second slide plate 46 that is moved in the Z-axis direction by the Z-axis movement unit 43. The cutting unit 20 can position the cutting blade 21 at any position on the holding surface 11 of the holding table 10 by the Y-axis movement unit 42 and the Z-axis movement unit 43.

[0027] The cutting unit 20 includes a cutting blade 21, a spindle housing 22 attached to a second slide plate 46 and movable in the Y-axis and Z-axis directions by a Y-axis moving unit 42 and a Z-axis moving unit 43, a spindle 23 rotatably mounted on the spindle housing 22 around its axis and having the cutting blade 21 attached to its tip, a spindle motor (not shown) that rotates the spindle 23 around its axis, and a cutting fluid nozzle 24 (shown in Figure 2) that supplies cutting fluid 25 to the cutting blade 21.

[0028] The cutting blade 21 is an extremely thin cutting grindstone having a substantially ring shape. The cutting blade 21 is fixed to the tip of the spindle 23. In the first embodiment, as shown in FIG. 2, the cutting blade 21 is a so-called hub blade including an annular circular base 211 and an annular cutting edge 212 disposed on the outer periphery of the circular base 211 and used to cut the workpiece 200. The cutting edge 212 is made of abrasive grains such as SiC, alumina, diamond, or CBN (Cubic Boron Nitride), and a bond (binding material) such as metal or resin for fixing the abrasive grains, and is formed to a predetermined thickness. In the present invention, the cutting blade 21 may be a so-called washer blade composed only of the cutting edge 212. The axes of the cutting blade 21 and the spindle 23 of the cutting unit 20 are set parallel to the Y-axis direction.

[0029] The imaging unit 30 is fixed to the second slide plate 46 so as to move integrally with the cutting unit 20. In the first embodiment, the imaging unit 30 is disposed in a position where the objective lens facing the workpiece 200 held on the holding table 10 is aligned with the cutting blade 21 in the X-axis direction. The imaging unit 30 includes an imaging element that captures an image of an area to be divided of the workpiece 200 held on the holding table 10 before cutting. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. The imaging unit 30 captures an image of the workpiece 200 held on the holding table 10 to obtain an image for performing alignment between the workpiece 200 and the cutting blade 21, and outputs the obtained image to the control unit 100.

[0030] The cutting device 1 also includes an X-axis position detection unit (not shown) for detecting the position of the holding table 10 in the X-axis direction, a Y-axis position detection unit (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction, and a Z-axis position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction. The X-axis position detection unit and the Y-axis position detection unit can be configured with a linear scale parallel to the X-axis direction or the Y-axis direction, and a reading head. The Z-axis position detection unit detects the position of the cutting unit 20 in the Z-axis direction using motor pulses. The X-axis position detection unit, the Y-axis position detection unit, and the Z-axis position detection unit output the position of the holding table 10 in the X-axis direction and the position of the lower end of the cutting blade of the cutting unit 20 in the Y-axis direction or the Z-axis direction to the control unit 100.

[0031] In the first embodiment, the positions of the holding table 10 and the cutting unit 20 of the cutting device 1 in the X-axis direction, Y-axis direction, and Z-axis direction are determined based on a predetermined reference position (not shown). In the first embodiment, the reference position of the cutting unit 20 in the Z-axis direction is the position where the holding surface 11 of the holding table 10 and the lower end of the cutting edge 212 of the cutting blade 21 are located on the same plane.

[0032] As shown in FIG. 1, the cutting device 1 also includes a processing chamber 50, a cutting edge position detection unit 60, and an exhaust unit .

[0033] The processing chamber 50 is installed on the apparatus main body 2 and surrounds the holding table 10 and the cutting unit 20. The processing chamber 50 is installed on the apparatus main body 2 and surrounds the holding table 10 across the load / unload area and the processing area. As shown in Fig. 2, the processing chamber 50 includes a plurality of side panels 51 that are erected from the apparatus main body 2 and connected to each other, partition panels 53 that divide the interior of the processing chamber 50, and a ceiling panel 52 that is connected to the upper ends of the side panels 51.

[0034] The side plates 51 stand upright from both ends in the X-axis direction of the bellows member 13 of the apparatus main body 2 and both ends in the Y-axis direction of the bellows member 13 of the apparatus main body 2. As shown in Fig. 2, the partition plate 53 divides the inside of the processing chamber 50 into a loading / unloading area and a processing area. In addition, an opening 54 is provided at the lower end of the partition plate 53, through which the holding table 10 passes when moving between the loading / unloading area and the processing area.

[0035] 2, an opening 55 is provided in the ceiling panel 52 spanning the processing area and the loading / unloading area, and a frame member 56 shown in FIG. 1 is attached to the inner edge of the opening 55. The second slide plate 46 and the imaging unit 30 pass through the inside of the frame member 56. One end of the frame member 56, which is on the front side in the Y-axis direction in FIG. 1, is attached to the inner edge of the opening 55 of the ceiling panel 52, and the other end, which is on the back front side in the Y-axis direction in FIG. 1, is attached to the standing portion 4 of the support frame 3 on the back side in FIG. 1, or the like, and the space between the one end and the other end is attached to the inner edge of the opening 55, or the like. The frame member 56 has attached to its inside a flexible bellows member 57 that is expandable and contractible in the Y-axis direction and covers the inside of the frame member 56.

[0036] Bellows member 57 protects the ball screw of Y-axis movement unit 42 from splashes of cutting fluid 25. One end of bellows member 57, which is on the front side in the Y-axis direction in FIG. 1, is fixed to the inner edge of frame member 56, and the other end, which is on the back side in the Y-axis direction in FIG. 1, is attached to second slide plate 46. Note that for clarity in FIG. 1, frame member 56 and bellows member 57 are shown not attached to predetermined positions, but in reality they are attached in positions as shown in FIG. 2.

[0037] 1 of the processing chamber 50 is provided with an opening 58 that allows the cutting unit 20 and the imaging unit 30 to enter and exit the processing chamber 50. The opening 58 is disposed across the processing area and the loading / unloading area. In the first embodiment, the opening 58 is connected to an opening 55 provided in the ceiling panel 52.

[0038] Furthermore, when the cutting unit 20 cuts the workpiece 200 while supplying cutting fluid 25 to the cutting edge 212 of the cutting blade 21, mist consisting of the cutting fluid 25 and the like is generated inside the processing chamber 50. Note that if the amount of mist generated increases too much, it may cause problems such as a decrease in the detection accuracy of the cutting edge position detection unit 60 and cutting chips becoming more likely to adhere to the workpiece 200.

[0039] Next, the cutting edge position detection unit 60 will be described. Fig. 3 is a perspective view of the cutting edge position detection unit of the cutting device shown in Fig. 1. Fig. 4 is a diagram showing the amount of light received by the light receiving section of the cutting edge position detection unit shown in Fig. 3. The cutting edge position detection unit 60 detects the position of the lower end, which is the tip position of the cutting edge of the cutting edge 212 of the cutting blade 21.

[0040] The cutting edge position detection unit 60 is installed in the processing area of ​​the processing chamber 50, and is disposed below the cutting unit 20 and on the end of the device body 2 that is further back in the Y-axis direction in FIG. 1 than the bellows member 13. The cutting edge position detection unit 60 is fixed to the device body 2. As shown in FIG. 3, the cutting edge position detection unit 60 includes a detection mechanism 61 and a cover 68.

[0041] 3, the detection mechanism 61 includes a flat base 62 and a mounting member 63 standing upright from the base 62. The mounting member 63 is formed in a U-shape and includes a horizontal portion 631 on the base 62 and a pair of vertical portions 632 standing upright from both ends of the horizontal portion 631 and spaced apart from each other along the Y-axis direction, and a blade entry portion 633 is formed between the pair of vertical portions 632, into which the cutting edge 212 of the cutting blade 21 and the like enter.

[0042] One of the vertical portions 632 has a light-emitting portion 64 that faces the blade insertion portion 633, and a light-receiving portion 65 that receives light from the light-emitting portion 64. The light-emitting portion 64 is connected to a light source (not shown) via an optical fiber or the like, and irradiates light from the light source toward the light-receiving portion 65. The light-receiving portion 65 is connected to a photoelectric conversion portion (not shown) via an optical fiber, receives light from the light-emitting portion 64, and outputs the received light to the photoelectric conversion portion. The light-source conversion portion outputs information according to the amount of received light to the control unit 100.

[0043] The detection mechanism 61 detects the position of the lower end of the cutting edge of the cutting blade 212 of the cutting blade 21 by outputting information to the control unit 100 according to the amount of light received by the light receiving unit 65, which changes when the cutting edge 212 of the cutting blade 21 enters the blade entry portion 633, i.e., between the light emitting unit 64 and the light receiving unit 65.

[0044] The detection mechanism 61 is provided on the base 62 and includes a cleaning water supply nozzle 66 that supplies temperature-controlled cleaning water to the end faces of the light-emitting part 64 and the light-receiving part 65, and an air supply nozzle 67 that supplies air to the end faces of the light-emitting part 64 and the light-receiving part 65. By spraying cleaning water and air onto the light-emitting part 64 and the light-receiving part 65, it is possible to prevent droplets of cutting fluid 25 from adhering to the light-emitting part 64 and the light-receiving part 65, thereby improving detection accuracy.

[0045] The base 62 is fixed to the device body 2. The cover 68 has the base 62 of the detection mechanism 61 attached to its upper end via a hinge 69. The hinge 69 is attached to the outer edge of the base 62, allowing the cover 68 to rotate freely with respect to the base 62.

[0046] When the cutting edge position detection unit 60 detects the position of the lower end of the cutting edge of the cutting edge 212 of the cutting blade 21, the cover 68 is rotated by the hinge 69, and the detection mechanism 61 is positioned in a state where the mounting member 63 and the nozzles 66, 67 are exposed, as shown in Fig. 3. The cutting edge position detection unit 60 irradiates light from the light source from the light emitting unit 64 toward the light receiving unit 65, receives the light from the light emitting unit 64 by the light receiving unit 65, and outputs information according to the amount of received light to the control unit 100, and detects the position of the lower end of the cutting edge of the cutting edge 212 of the cutting blade 21 when the cutting edge 212 of the cutting blade 21 enters the blade entry portion 633.

[0047] Furthermore, when the cutting edge position detection unit 60 is not detecting the position of the lower end of the cutting edge of the cutting blade 212, such as during cutting of the workpiece 200, the mounting member 63 and nozzles 66, 67 are covered with a cover 68 and the detection mechanism 61 is positioned with the cover 68 covering the base 62. Note that when the cutting edge position detection unit 60 is stored with the mounting member 63 and nozzles 66, 67 covered with the cover 68 and the opening is closed with the cover 68, cleaning water continues to be supplied from the cleaning water supply nozzle 66 to the end faces of the light-emitting element 64 and the light-receiving element 65 during cutting of the workpiece 200, thereby preventing mist containing cutting chips from adhering to the light-emitting element 64 and the light-receiving element 65.

[0048] Furthermore, even when the cutting edge position detection unit 60 does not detect the position of the lower end of the cutting edge of the cutting edge 212 of the cutting blade 21, when the workpiece 200 is not being cut, the cover 68 is rotated by the hinge 69, and the detection mechanism 61 is positioned in a state in which the mounting member 63 and the nozzles 66, 67 are exposed outside the cover 68, as shown in Fig. 3. When the cutting blade 21 is in a retracted state away from the blade entry portion 633, the cutting edge position detection unit 60 irradiates light from the light source from the light emitter 64 toward the light receiver 65, receives the light from the light emitter 64 at the light receiver 65, and outputs information according to the amount of received light to the control unit 100 to measure the state of the mist floating in the processing chamber 50.

[0049] At this time, as shown in FIG. 4, as the amount of mist floating in the machining chamber 50 increases, the amount of light received by the light-receiving unit 65 decreases, and as the amount of mist floating in the machining chamber 50 decreases, the amount of light received by the light-receiving unit 65 increases. The horizontal axis of FIG. 4 represents the elapsed time since measurement of the mist state began, and the vertical axis of FIG. 4 represents the amount of light received by the light-receiving unit 65. The solid line in FIG. 4 represents the change in the amount of light received when the amount of mist is less than the dashed-dotted line, and the dashed-dotted line represents the change in the amount of light received when the amount of mist is greater than the solid line. Thus, in the first embodiment, the cutting edge position detection unit 60 is installed in the machining chamber 50 and serves as a measurement unit that measures the mist floating in the machining chamber 50.

[0050] Next, we will explain the exhaust unit 70. Figure 5 is a cross-sectional view that schematically shows the exhaust unit of the cutting machine shown in Figure 1. The exhaust unit 70 exhausts the atmosphere inside the processing chamber 50 to the outside of the processing chamber 50.

[0051] As shown in FIG. 5 , the exhaust unit 70 has an exhaust port 71, a pipe 72, a suction source 73, a fan 74, and a motor 75. The exhaust port 71 is a hole that penetrates the side plate 51 and opens into the processing region. The exhaust port 71 opens at the end of the side plate 51 on the far side in the Y-axis direction in FIG. 1, on the far side in the X-axis direction in FIG. 1. The pipe 72 is a pipe-like member having one end connected to the outer edge of the exhaust port 71 and the other end connected to a suction source 73. The suction source 73 is connected to the other end of the pipe 72 and sucks the atmosphere in the processing region of the processing chamber 50 through the pipe 72 and the exhaust port 71.

[0052] The fan 74 is installed in the pipe 72 and rotated about its axis by a motor 75. By rotating about its axis by the motor 75, the fan 74 strengthens or weakens the exhaust force of the suction source 73 that exhausts the atmosphere within the processing region of the processing chamber 50. The exhaust unit 70 strengthens the exhaust force by increasing the rotation speed of the fan 74, and weakens the exhaust force by decreasing the rotation speed of the fan 74.

[0053] Next, the control unit 100 will be described. FIG. 6 is a diagram showing fan control data used by the exhaust power adjustment unit of the control unit of the cutting device shown in FIG. 1 to control the fan. The control unit 100 also controls each component of the cutting device 1 to cause the cutting device 1 to perform a machining operation on the workpiece 200. The control unit 100 is a computer having an arithmetic processing device with a microprocessor such as a central processing unit (CPU), a storage device with memory such as a read only memory (ROM) or a random access memory (RAM), and an input / output interface device. The arithmetic processing device of the control unit 100 performs arithmetic processing according to a computer program stored in the storage device and outputs control signals for controlling the cutting device 1 to each component of the cutting device 1 via the input / output interface device.

[0054] The control unit 100 is connected to a display unit configured with a liquid crystal display device or the like that displays the status of the machining operation, images, etc., and an input unit that the operator uses to register machining content information, etc. The input unit is configured with a touch panel provided on the display unit.

[0055] The control unit 100 also has an exhaust force adjustment unit 101 that adjusts the exhaust force of the atmosphere of the exhaust unit 70 in accordance with the measurement results when the workpiece 200 is not being cut, even when the cutting edge position detection unit 60, which is a measurement unit, does not detect the position of the lower end of the cutting edge of the cutting edge 212 of the cutting blade 21. The exhaust force adjustment unit 101 adjusts the exhaust force of the exhaust unit 70 in accordance with the amount of light received by the cutting edge position detection unit 60 in the case where the workpiece 200 is not being cut, even when the cutting edge position detection unit 60 does not detect the position of the lower end of the cutting edge of the cutting edge 212 of the cutting blade 21.

[0056] Specifically, in the first embodiment, the exhaust power adjustment unit 101 adjusts the exhaust power of the exhaust unit 70 by controlling the rotation speed of the fan 74 in accordance with the fan control data 81 shown in Fig. 6. As shown in Fig. 6, the fan control data 81 sets optimal exhaust power and rotation speed of the fan 74 for a weak region where the amount of light received by the light receiving unit 65 is less than a first amount of light, a medium region where the amount of light received is equal to or greater than the first amount of light but less than a second amount of light, and a strong region where the amount of light received is equal to or greater than the second amount of light. Note that the first amount of light received is a value smaller than the second amount of light received.

[0057] As shown in FIG. 6, when the amount of light received by the light receiving unit 65 is in a weak region where the amount is less than the first amount of received light, the fan control data 81 sets the rotation speed of the fan 74 to a high rotation speed, which indicates that an optimal exhaust power is strong. As shown in FIG. 6, when the amount of light received by the light receiving unit 65 is in a medium region where the amount is equal to or greater than the first amount of received light and less than the second amount of received light, the fan control data 81 sets the rotation speed of the fan 74 to a medium rotation speed, which indicates that an optimal exhaust power is medium. As shown in FIG. 6, when the amount of light received by the light receiving unit 65 is in a strong region where the amount is equal to or greater than the second amount of received light, the fan control data 81 sets the rotation speed of the fan 74 to a low rotation speed. Note that the high rotation speed is higher than the medium rotation speed, which is higher than the low rotation speed. The fan control data 81 is stored in a storage device or the like of the control unit 100.

[0058] In the first embodiment, the exhaust power adjustment unit 101 rotates the fan 74 at a high rotation speed when the amount of light received by the light receiving unit 65 is in a weak range less than the first amount of received light. The exhaust power adjustment unit 101 rotates the fan 74 at a medium rotation speed when the amount of light received by the light receiving unit 65 is in a medium range equal to or greater than the first amount of received light and less than the second amount of received light. The exhaust power adjustment unit 101 rotates the fan 74 at a low rotation speed when the amount of light received by the light receiving unit 65 is in a strong range equal to or greater than the second amount of received light.

[0059] (Machining operation) Next, a description will be given of the machining operation of the cutting device 1. Fig. 7 is a plan view schematically showing an example of a state in which the cutting edge position detection unit of the cutting device shown in Fig. 1 measures mist floating in the machining chamber. Fig. 8 is a plan view schematically showing another example of a state in which the cutting edge position detection unit of the cutting device shown in Fig. 1 measures mist floating in the machining chamber.

[0060] When starting the machining operation of the cutting device 1, the operator registers the machining conditions in the control unit 100, which then accepts the machining conditions and places the workpiece 200 before cutting on the holding surface 11 of the holding table 10 positioned in the carry-in / out area. Thereafter, the cutting device 1 starts the machining operation when the control unit 100 accepts an instruction to start the machining operation from the operator. When starting the machining operation, the cutting device 1 suction-holds the workpiece 200 on the holding surface 11 of the holding table 10 and clamps the annular frame 207 with the clamping section.

[0061] In the machining operation, the cutting device 1 moves the holding table 10 toward the machining area using the X-axis moving unit 41, captures an image of the workpiece 200 using the imaging unit 30, and performs alignment based on the image captured by the imaging unit 30. As shown in Fig. 2, the cutting device 1 relatively moves the holding table 10 and the cutting unit 20 along the planned division line 203, and cuts the workpiece 200 by causing the cutting blade 21 to cut into the workpiece 200 until it reaches the adhesive tape 206 while supplying cutting fluid 25 from the cutting fluid nozzle 24.

[0062] In the processing operation, when the cutting device 1 has cut all of the planned dividing lines 203 of the workpiece 200, it moves the holding table 10 toward the carry-in / out area, stops suction holding of the holding surface 11 in the carry-in / out area, and releases the clamp of the clamp unit. The cutting device 1 carries out the cut workpiece 200 positioned in the carry-in / out area together with the annular frame 207, and carries the workpiece 200 before cutting onto the holding surface 11 of the holding table 10. In this way, the cutting device 1 cuts a predetermined number of workpieces 200, and when cutting of the predetermined number of workpieces 200 is completed, the processing operation ends.

[0063] Furthermore, the cutting device 1 stops the supply of cutting fluid 25 from the cutting fluid nozzle 24 at a predetermined timing during the machining operation (for example, every time a predetermined number of planned division lines 203 are cut), and detects the position of the bottom end of the cutting edge 212 of the cutting blade 21. When detecting the position of the bottom end of the cutting edge 212 of the cutting blade 21, the cutting device 1 positions the cutting blade 21 above the cutting edge position detection unit 60, as shown in FIG. 7 , and with the detection mechanism 61 of the cutting edge position detection unit 60 housed in the cover 68, stops the supply of cleaning water from the cleaning water supply nozzle 66, and then supplies pressurized air from the air supply nozzle 67 to the end faces of the light-emitting element 64 and the light-receiving element 65 for a predetermined time, thereby removing water droplets from the end faces of the light-emitting element 64 and the light-receiving element 65.

[0064] Then, the cutting device 1 exposes the detection mechanism 61 of the cutting edge position detection unit 60 outside the cover 68, and while irradiating light from the light source from the light emitting unit 64 to the light receiving unit 65, lowers the cutting blade 21 along the Z-axis direction, causing the cutting edge 212 of the cutting blade 21 to enter the blade entry portion 633, and detects the position of the lower end of the cutting edge of the cutting edge 212 of the cutting blade 21 using the cutting edge position detection unit 60.

[0065] In the first embodiment, the cutting device 1 measures the state of the mist in the processing chamber 50 with the cutting edge position detection unit 60 before and after detecting the position of the lower end of the cutting edge of the cutting blade 212 of the cutting blade 21. When measuring the state of the mist in the processing chamber 50 with the cutting edge position detection unit 60 before detecting the position of the lower end of the cutting edge of the cutting blade 212 of the cutting blade 21, as shown in FIG. 7 , the cutting blade 21 is positioned above the cutting edge position detection unit 60 and retracted away from the blade entry portion 633. Then, the supply of cleaning water from the cleaning water supply nozzle 66 is stopped while the detection mechanism 61 of the cutting edge position detection unit 60 is housed in the cover 68. Then, pressurized air is supplied from the air supply nozzle 67 to the end faces of the light-emitting element 64 and the light-receiving element 65 for a predetermined time to remove water droplets from the end faces of the light-emitting element 64 and the light-receiving element 65. Then, the cover 68 is rotated about the hinge 69 to expose the detection mechanism 61 of the cutting edge position detection unit 60 to the outside of the cover 68.

[0066] Thereafter, the cutting device 1 irradiates light from the light source from the light-emitting unit 64 onto the light-receiving unit 65 for a predetermined period of time and measures the amount of light received by the light-receiving unit 65. In the cutting device 1, the exhaust power adjustment unit 101 of the control unit 100 calculates the average value of the amount of received light measured for the predetermined period of time. In the cutting device 1, the exhaust power adjustment unit 101 of the control unit 100 rotates the fan 74 of the exhaust unit 70 at a rotation speed corresponding to the fan control data 81 in accordance with the calculated average amount of received light. Thereafter, the cutting device 1 detects the position of the lower end of the cutting edge of the cutting edge 212 of the cutting blade 21 using the cutting edge position detection unit 60. Note that the value of the amount of received light is not limited to the average amount of received light, and the slope of the decrease in the amount of received light may also be acquired.

[0067] In the cutting device 1, the exhaust power adjustment section 101 of the control unit 100 rotates the fan 74 at a high rotation speed when the calculated average value of the amount of received light falls within the weak region, rotates the fan 74 at a medium rotation speed when the calculated average value of the amount of received light falls within the medium region, and rotates the fan 74 at a low rotation speed when the calculated average value of the amount of received light falls within the strong region.

[0068] Furthermore, when measuring the state of mist in the processing chamber 50 with the cutting edge position detection unit 60 after detecting the position of the lower end of the cutting edge of the cutting blade 212 of the cutting blade 21, after detecting the position of the lower end of the cutting edge of the cutting blade 212 of the cutting blade 21, the cutting unit 20 is raised, light from the light source of the light emitter 64 is irradiated onto the light receiver 65 for a predetermined period of time, and the amount of light received by the light receiver 65 is measured. In the cutting device 1, the exhaust power adjuster 101 of the control unit 100 adjusts the rotation speed of the fan 74 in the same manner as when making measurements before detecting the position of the lower end of the cutting edge of the cutting blade 212 of the cutting blade 21.

[0069] In addition, in the present invention, the cutting device 1 may measure the state of mist in the processing chamber 50 using the cutting edge position detection unit 60 during a waiting period when the workpiece 200 is not being processed by the cutting blade 21, such as when the workpiece 200 after cutting is removed from the holding surface 11 of the holding table 10 and the workpiece 200 before cutting is being carried onto the holding surface 11 of the holding table 10. In this case, since cutting fluid 25 is normally continuously supplied from cutting fluid nozzle 24 to cutting blade 21, as shown in Fig. 8, cutting device 1 moves cutting unit 20 with Y-axis movement unit 42 to retract cutting blade 21 from above cutting edge position detection unit 60, and in this state, with cutting blade 21 retracted away from blade entry portion 633, while detection mechanism 61 of cutting edge position detection unit 60 remains housed in cover 68, stops the supply of cleaning water from cleaning water supply nozzle 66, and then supplies pressurized air from air supply nozzle 67 to the end faces of light-emitting element 64 and light-receiving element 65 for a predetermined time to remove water droplets from the end faces of light-emitting element 64 and light-receiving element 65. Alternatively, after stopping the supply of cutting fluid 25 to cutting blade 21, cutting edge position detection unit 60 may measure the state of mist in machining chamber 50.

[0070] Thereafter, the cutting device 1 exposes the detection mechanism 61 of the cutting edge position detection unit 60 to the outside of the cover 68, irradiates light from the light source from the light emitting unit 64 to the light receiving unit 65 for a predetermined period of time, and measures the amount of light received by the light receiving unit 65. The cutting device 1 adjusts the rotation speed of the fan 74 in the same way as when the exhaust power adjusting unit 101 of the control unit 100 measures the amount of light before and after detecting the position of the lower end of the cutting edge of the cutting edge 212 of the cutting blade 21.

[0071] In embodiment 1, the cutting device 1 has the cutting edge position detection unit 60 fixed to the device body 2, so the cutting unit 20 is moved in the Y-axis direction by the Y-axis moving unit 42 to retract the cutting blade 21 away from the blade entry section 633. However, in the present invention, when the cutting edge position detection unit 60 is installed on the table cover 12, the cutting edge position detection unit 60 together with the holding table 10 can be moved in the X-axis direction by the X-axis moving unit 41 to retract the cutting blade 21 away from the blade entry section 633.

[0072] As described above, the cutting device 1 according to the first embodiment measures the state of the mist inside the processing chamber 50 using the cutting edge position detection unit 60, which is a measurement unit, and adjusts the exhaust power of the exhaust unit 70 according to the measured state of the mist. As a result, the cutting device 1 according to the first embodiment can adjust the exhaust power to an optimum level depending on the conditions inside the processing chamber 50, thereby achieving the effect of maintaining the conditions inside the processing chamber 50 at an optimum level.

[0073] Furthermore, the cutting device 1 according to the first embodiment uses the cutting edge position detection unit 60 as a measurement unit that measures the state of the mist inside the processing chamber 50, so there is no need to install additional parts to measure the state of the mist.

[0074] [Embodiment 2] A cutting machine 1 according to a second embodiment of the present invention will be described with reference to the drawings. FIG. 9 is a plan view schematically showing an example of a state in which a particle counter of the cutting machine according to the second embodiment measures mist floating in a machining chamber. FIG. 10 is a diagram schematically showing the configuration of the particle counter shown in FIG. 9. FIG. 11 is a diagram showing the number of mist particles in the information output by the processing unit of the particle counter shown in FIG. 10. FIG. 12 is a diagram showing fan control data used by the exhaust power adjustment unit of the control unit of the cutting machine shown in FIG. 9 to control the fan. In FIGS. 9, 10, 11, and 12, the same parts as those of the first embodiment are designated by the same reference numerals, and description thereof will be omitted.

[0075] As shown in Fig. 9, the cutting machine 1 according to the second embodiment is the same as that of the first embodiment except that it includes a particle counter 90 as a measurement unit and the fan control data 82 (shown in Fig. 12) is different. As shown in Fig. 9, the particle counter 90 is installed in the machining area of ​​the machining chamber 50, and is located on the far end of the device body 2 in the Y-axis direction in Fig. 1 relative to the bellows member 13. The particle counter 90 is located closer to the exhaust port 71 than the cutting edge position detection unit 60, and is fixed to the device body 2.

[0076] 10, the particle counter 90 measures the state of the mist in the processing chamber 50, and includes a hollow container housing 91 fixed to the apparatus main body 2, a light irradiating unit 94, a reflected light acquiring unit 95, a processing unit 96, etc. The particle counter 90 operates by receiving power from an AC power source 97.

[0077] The housing 91 is provided with an intake port 911 that draws the atmosphere within the processing chamber 50 into the housing 91, an atmosphere passage 912 that is connected to the intake port 911 and flows the atmosphere inward, and an exhaust port 913 that is connected to the atmosphere passage 912 and exhausts the atmosphere within the atmosphere passage 912 to the outside of the housing 91. The atmosphere passage 912 is housed within the housing 91, and the intake port 911 and the exhaust port 913 pass through the housing 91 to communicate between the inside and the outside of the housing 91. The housing 91 is also provided with a pump 92 that draws the atmosphere through the intake port 911 and creates a flow of atmosphere within the atmosphere passage 912 that exhausts the atmosphere through the exhaust port 913. A filter 93 that removes foreign matter is provided within the atmosphere passage 912.

[0078] The light irradiating unit 94 irradiates light into the atmosphere in the atmosphere passage 912 inside the housing 91. When the light irradiated into the atmosphere in the atmosphere passage 912 passes through the mist in the atmosphere, it emits scattered light (hereinafter referred to as reflected light). The light irradiating unit 94 is configured to include, for example, a semiconductor laser.

[0079] The reflected light acquisition unit 95 acquires reflected light that is generated when light is irradiated onto and reflected by mist in the atmosphere. The reflected light acquisition unit 95 receives the reflected light and outputs information indicating that the reflected light has been received to the processing unit 96. The reflected light acquisition unit 95 is configured to include, for example, a photodiode.

[0080] When the processing unit 96 receives information indicating that reflected light has been received from the reflected light acquisition unit 95, it counts the number of times the information has been received per unit time and outputs the number of times the information has been received per range time to the control unit 100 as information indicating the number of mist droplets. The functions of the processing unit 96 may be realized by dedicated processing circuits (hardware) such as a single circuit, a composite circuit, a programmed processor, or a parallel programmed processor. In the present invention, the processing unit 96 may be configured by a computer having a processing unit with a microprocessor such as a central processing unit (CPU), a storage device with memory such as a read only memory (ROM) or a random access memory (RAM), and an input / output interface device, and the functions of the processing unit 96 may be realized by the processing unit executing a computer program stored in the storage device.

[0081] As shown in FIG. 11 , as the amount of mist floating in the processing chamber 50 increases, the number of mist pieces in the information output by the processing unit 96 to the control unit 100 increases, and as the amount of mist floating in the processing chamber 50 decreases, the number of mist pieces in the information output by the processing unit 96 to the control unit 100 increases. The horizontal axis of FIG. 11 represents the elapsed time since measurement of the mist state began, and the vertical axis of FIG. 11 represents the number of mist pieces in the information output by the processing unit 96 to the control unit 100. The solid line in FIG. 11 indicates the change in the amount of received light when the amount of mist is less than the dashed-dotted line, and the dashed-dotted line indicates the change in the amount of received light when the amount of mist is greater than the solid line. Thus, in the second embodiment, the particle counter 90 is installed in the processing chamber 50 and serves as a measurement unit that measures the mist floating in the processing chamber 50.

[0082] The exhaust power adjustment unit 101 of the control unit 100 of the cutting device 1 according to the second embodiment adjusts the exhaust power of the exhaust unit 70 in accordance with the number of mist particles, which is information input from the processing unit 96 as a value of reflected light. Specifically, in the second embodiment, the exhaust power adjustment unit 101 controls the rotation speed of the fan 74 in accordance with fan control data 82 shown in FIG. 12 to adjust the exhaust power of the exhaust unit 70. As shown in FIG. 12, the fan control data 82 sets optimal exhaust power and rotation speed of the fan 74 for a small region where the number of mist particles is less than a first number, a medium region where the number of mist particles is equal to or greater than a first number but less than a second number, and a large region where the number of mist particles is equal to or greater than a second number. Note that the first number is a smaller value than the second number.

[0083] As shown in Fig. 12, when the number of mist is in a small region where it is less than a first number, the optimal exhaust power is required to be weak, and the rotation speed of the fan 74 is set to a low rotation speed. As shown in Fig. 12, when the number of mist is in a medium region where it is equal to or greater than the first number and less than a second number, the optimal exhaust power is required to be medium, and the rotation speed of the fan 74 is set to a medium rotation speed. As shown in Fig. 12, when the number of mist is in a large region where it is equal to or greater than the second number, the optimal exhaust power is required to be strong, and the rotation speed of the fan 74 is set to a high rotation speed. The fan control data 82 is stored in a storage device or the like of the control unit 100.

[0084] In the second embodiment, the exhaust power adjustment unit 101 rotates the fan 74 at a low rotation speed when the number of mist is in a small region where it is less than a first number. The exhaust power adjustment unit 101 rotates the fan 74 at a medium rotation speed when the number of mist is in a medium region where it is equal to or greater than the first number and less than a second number. The exhaust power adjustment unit 101 rotates the fan 74 at a high rotation speed when the number of mist is in a large region where it is equal to or greater than the second number.

[0085] The cutting device 1 according to the second embodiment cuts the workpiece 200 in the same manner as in the first embodiment. In the second embodiment, the cutting device 1 measures the state of the mist in the processing chamber 50 with the particle counter 90 at least one of the following times: before and after detecting the position of the lower end of the cutting edge of the cutting edge 212 of the cutting blade 21; and during the time between when the cut workpiece 200 is carried out from the holding surface 11 of the holding table 10 and when the uncut workpiece 200 is carried in onto the holding surface 11 of the holding table 10.

[0086] 8, when the cutting device 1 according to the second embodiment measures the state of the mist in the processing chamber 50 with the particle counter 90, the cutting unit 20 is moved by the Y-axis movement unit 42 to retract the cutting blade 21 from above the cutting edge position detection unit 60 and away from the blade entry portion 633. The cutting device 1 according to the second embodiment drives the pump 92 of the particle counter 90 to suck the atmosphere in the processing chamber 50 into the atmosphere passage 912, etc., so that the light irradiation unit 94 of the particle counter 90 irradiates light into the atmosphere for a predetermined time, the reflected light acquisition unit 95 acquires the reflected light, and the processing unit 96 outputs information indicating the number of mist particles per unit time to the control unit 100.

[0087] In the cutting device 1, the exhaust power adjustment unit 101 of the control unit 100 calculates the average value of the number of mist measured for a predetermined period of time. In the cutting device 1, the exhaust power adjustment unit 101 of the control unit 100 rotates the fan 74 of the exhaust unit 70 at rotation speeds according to the fan control data 82, in accordance with the calculated average value of the number of mist.

[0088] In the cutting device 1, the exhaust power adjustment section 101 of the control unit 100 rotates the fan 74 at a low rotation speed when the calculated average value of the number of mist falls within the small region, rotates the fan 74 at a medium rotation speed when the calculated average value of the number of mist falls within the medium region, and rotates the fan 74 at a high rotation speed when the calculated average value of the number of mist falls within the large region.

[0089] The cutting device 1 of embodiment 2 measures the state of mist in the processing chamber 50 using the particle counter 90, which is a measurement unit, and adjusts the exhaust power of the exhaust unit 70 based on the measured state of the mist, thereby achieving the effect of being able to adjust the exhaust power to the optimum level depending on the situation in the processing chamber 50, similar to embodiment 1.

[0090] [Modification] A cutting device 1 according to a modification of the first and second embodiments of the present invention will be described with reference to the drawings. FIG. 13 is a cross-sectional view schematically showing an exhaust unit of a cutting device according to a modification of the first and second embodiments. FIG. 14 is a diagram showing an example of fan control data with which the exhaust power adjustment unit of the control unit of the cutting device according to a modification of the first and second embodiments controls the fan. FIG. 15 is a diagram showing another example of fan control data with which the exhaust power adjustment unit of the control unit of the cutting device according to a modification of the first and second embodiments controls the fan. In FIGS. 13, 14, and 15, the same parts as those in the first and second embodiments are designated by the same reference numerals, and description thereof will be omitted.

[0091] The cutting machine 1 according to the modification is the same as the first and second embodiments except for the configuration of the exhaust unit 70-1 shown in Fig. 13 and the fan control data 81-1 and 82-1 shown in Fig. 14 and Fig. 15. As shown in Fig. 13, the exhaust unit 70-1 of the cutting machine 1 according to the modification further includes a valve 76 that adjusts the degree of opening of the flow path through which the fluid passes in the pipe 72. The valve 76 is a butterfly valve that is installed in the pipe 72 and includes a valve element 77 that adjusts the degree of opening of the flow path in the pipe 72, and a motor that rotates the valve element 77 around an axis 78 that is perpendicular to the flow path in the pipe 72.

[0092] The degree of opening of the valve 76 is a value proportional to the angle of the valve element 77 about its axis 78 from the state in which the flow path is blocked by the valve element 77 shown by the solid line in Fig. 13 to the state in which the valve element 77 is parallel to the flow path shown by the dashed line in Fig. 13, with the degree of opening being 0% and the state in which the valve element 77 is parallel to the flow path shown by the dashed line in Fig. 13 being 100%. The fan 74 of the exhaust unit 70-1 of the cutting device 1 according to the modified example rotates at a predetermined constant rotation speed.

[0093] The valve 76 has an opening degree adjusted to increase or decrease the suction force of the suction source 73 that draws in the atmosphere within the processing region of the processing chamber 50. The exhaust unit 70-1 increases the suction force by increasing the opening degree of the valve 76, and decreases the suction force by decreasing the opening degree of the valve 76.

[0094] The cutting device 1 according to the modified example may use the cutting edge position detection unit 60 for measurement, as in the first embodiment, and in this case, the exhaust power adjustment unit 101 adjusts the exhaust power of the exhaust unit 70-1 by controlling the opening degree of the valve 76 in accordance with the fan control data 81-1 shown in Fig. 14. As shown in Fig. 14, the fan control data 81-1 sets the optimal exhaust power and the opening degree of the valve 76 for the weak, medium, and strong light receiving areas of the light receiving unit 65, respectively.

[0095] As shown in FIG. 14, when the amount of light received by the light receiving unit 65 is in the weak range, the fan control data 81-1 sets the opening degree of the valve 76 to a large opening degree, which indicates that an optimal exhaust power is strong. As shown in FIG. 14, when the amount of light received by the light receiving unit 65 is in the medium range, the fan control data 81-1 sets the opening number of the valve 76 to a normal opening degree, which indicates that an optimal exhaust power is medium. As shown in FIG. 14, when the amount of light received by the light receiving unit 65 is in the strong range, the fan control data 81-1 sets the rotation speed of the fan 74 to a small opening degree, which indicates that an optimal exhaust power is weak. Note that the large opening degree is greater than the normal opening degree, which is greater than the small opening degree. The fan control data 81-1 is stored in a storage device or the like of the control unit 100.

[0096] The cutting device 1 according to the modified example may use a particle counter 90 for measurement, as in the second embodiment, and in this case, the exhaust power adjustment unit 101 adjusts the exhaust power of the exhaust unit 70-1 by controlling the opening degree of the valve 76 in accordance with the fan control data 82-1 shown in Fig. 15. As shown in Fig. 15, the fan control data 82-1 sets the optimal exhaust power and the opening degree of the valve 76 for a region where the amount of light received of the number of mist is small, a region where the number of mist is medium, and a region where the number of mist is large.

[0097] As shown in Fig. 15, when the amount of mist is in the low range, the optimal exhaust power is required to be weak, and the opening degree of the valve 76 is set to a small opening. As shown in Fig. 15, when the amount of mist is in the medium range, the optimal exhaust power is required to be medium, and the opening degree of the valve 76 is set to a normal opening. As shown in Fig. 15, when the amount of mist is in the high range, the optimal exhaust power is required to be strong, and the rotation speed of the fan 74 is set to a large opening. The fan control data 82-1 is stored in a storage device or the like of the control unit 100.

[0098] The cutting device 1 of the modified example measures the state of the mist in the processing chamber 50 using the cutting edge position detection unit 60 or particle counter 90, which is a measurement unit, and adjusts the exhaust power of the exhaust unit 70-1 based on the measured state of the mist, thereby achieving the effect of being able to adjust the exhaust power to the optimum level depending on the situation in the processing chamber 50, similar to embodiments 1 and 2.

[0099] The present invention is not limited to the above-described embodiment, and can be implemented in various modifications without departing from the gist of the present invention. [Explanation of symbols]

[0100] 1 Cutting equipment 10 Holding table 20 Cutting unit 21 Cutting blade 25 Cutting fluid 50 Processing room 60 Cutting edge position detection unit (measurement unit) 64 Light-emitting part 65 Light receiving section 70,70-1 Exhaust unit 72 Piping 73 Suction source 74 fans 75 motor 76 Valve 90 Particle counter (measurement unit) 94 Light irradiation unit 95 Reflected light acquisition section 100 control unit 101 Exhaust power adjustment unit 633 Blade entry point

Claims

1. a holding table for holding the workpiece; a cutting unit that cuts the workpiece held on the holding table with a cutting blade while supplying cutting fluid to the workpiece; a processing chamber surrounding the holding table and the cutting unit; an exhaust unit that exhausts the atmosphere in the processing chamber; A cutting device comprising: a control unit that controls each component; The cutting device is Installed in the processing chamber, Further provided is a measuring unit that measures mist floating in the processing chamber, The control unit Depending on the measurement result of the measurement unit, an exhaust power adjusting section that adjusts the exhaust power of the exhaust unit; The measurement unit a cutting edge position detection unit having a light emitting unit and a light receiving unit that receive light from the light emitting unit, the light emitting unit and the light receiving unit being opposed to each other across a blade entry section into which the cutting blade enters, and detecting the position of the tip of the cutting blade, and acquiring the amount of light received by the light receiving unit that receives light from the light emitting unit when the cutting blade is in a retracted state away from the blade entry section; The exhaust power adjustment unit is The cutting device is characterized in that the exhaust power of the exhaust unit is adjusted in accordance with the amount of received light.

2. The exhaust unit has a motor and a fan that rotates with the rotation of the motor, The exhaust power adjustment unit is 2. The cutting device according to claim 1, wherein the exhaust force is adjusted by changing the rotation speed of the motor.

3. the exhaust unit includes a pipe connected to a suction source, and a valve installed in the pipe for adjusting the degree of opening of a flow path through which a fluid passes; 2. The cutting device according to claim 1, wherein the exhaust force adjusting unit controls the degree of opening of the flow path by the valve.

Images