Cooling device manufacturing method and cooling device

Abstract

To facilitate the manufacturing of a cooling device with multiple coolers.SOLUTION: A manufacturing method of a cooling device includes a first loading step of placing a member to be cooled to be cooled in a first cooler on the first cooler from among a plurality of coolers each including a cooler body capable of circulating a refrigerant inside, and a connecting member joined to the cooler body, a second loading step of placing a second cooler on the first cooler such that a first connecting member, which is a connecting member of the first cooler, and a second connecting member, which is a connecting member of the second cooler among the plurality of coolers, face each other, and a welding step of joining the first connecting member and the second connecting member by radiating laser light in a direction intersecting the stacking direction.SELECTED DRAWING: Figure 9

Description

[Technical Field]

[0001] The present invention relates to a method for manufacturing a cooling device and a cooling device. [Background technology]

[0002] For example, Patent Document 1 discloses a stacked cooler that cools electronic components from both sides. This stacked cooler has multiple cooling pipes with flow paths for circulating a cooling medium, and a communication section formed by a part of an outer plate that forms the outer casing of the cooling pipes and that connects the multiple cooling pipes. Specifically, in this stacked cooler, the outer plate has openings formed near both longitudinal ends and opening protrusions that protrude from the outer periphery of the openings in the stacking direction. In this stacked cooler, the opening protrusions of the outer plate are fitted between adjacent cooling pipes in the stacking direction to form the communication section. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-10418 Summary of the Invention [Problem to be solved by the invention]

[0004] When manufacturing a cooling device having multiple coolers that cool a cooled member, for example, joining the multiple coolers to form a space in which the cooled member is placed, and then inserting the cooled member into the space, the manufacturing process is likely to become complicated. The present invention aims to facilitate the manufacture of a cooling device comprising multiple coolers. [Means for solving the problem]

[0005] The present invention, which was completed with the above object in mind, includes a first loading step of loading a member to be cooled by a first cooler on a first cooler among a plurality of coolers, each cooler having a cooler body capable of circulating a refrigerant therein and a connecting member joined to the cooler body; a second loading step of loading a second cooler on the first cooler so that a first connecting member, which is the connecting member of the first cooler, faces a second connecting member, which is the connecting member of a second cooler among the plurality of coolers; before The second connecting member and For the opposing part of By irradiating the laser beam in a direction intersecting the lamination direction, , the first connecting member and the second connecting member and a welding process for joining the In the first and second loading steps, the members are loaded so that the cooled member is disposed adjacent to the first and second connecting members in a first direction, and in the welding step, a laser beam is irradiated in a second direction intersecting the first direction to a portion of the opposing portion of the first connecting member and the second connecting member that is closest to the cooled member. A method for manufacturing a cooling device. Here, the first cooler is Long in the first direction The first connecting member is elongated, and the first connecting member is The first direction is The second cooler is provided at each end of the Long in the first direction The second connecting member is elongated, and the second connecting member is The first direction is The first loading step and the second loading step are respectively provided at both ends of the the first direction Between the first connecting members and the second connecting members provided at both ends of 、 The cooled member adjacent to the first connecting member and the second connecting member in the first direction The members are loaded so as to be arranged, and the welding step is performed by welding the first connecting member and the second connecting member together. The opposing portion of A laser beam is directed to a portion of the cooling member closest to the cooling member. , in the first cooler and the second cooler Short side direction The second direction is It may also be irradiated to. Further, the first cooler has a first connecting member at a position closest to the member to be cooled, the first connecting member having a first corner protruding toward the member to be cooled, and the second cooler has a second connecting member at a position closest to the member to be cooled, the second connecting member having a second corner protruding toward the member to be cooled, the second placing step placing the second cooler on the first cooler so that the first corner and the second corner face each other, and the welding step applying a laser beam to the position where the first corner and the second corner face each other. Second Direction It may also be irradiated to. In addition, the second loading step may involve placing the second cooler on the first cooler so that the first corner, which is at an angle of 30° or more and 120° or less, faces the second corner, which is at an angle of 30° or more and 120° or less. Furthermore, the first cooler may have each of the first connecting members having a first straight portion extending linearly from the first corner in a direction away from the cooled member, and the second cooler may have each of the second connecting members having a second straight portion extending linearly from the second corner in a direction away from the cooled member, and in the second loading step, the second cooler may be placed on the first cooler so that the first straight portion and the second straight portion face each other. The first connecting member of the first cooler and the second connecting member of the second cooler are connected to the outer periphery of the first cooler. The second direction and the welding step is performed by welding the first connecting member and the second connecting member together along the outer periphery. Second Direction The bonding may be performed by irradiating the substrate with laser light. From another viewpoint, the present invention is a cooling device in which a plurality of coolers, each having a cooler body capable of circulating a refrigerant therein and a connecting member joined to the cooler body, are stacked, and a first connecting member which is the connecting member of a first cooler among the plurality of coolers is joined to a second connecting member which is the connecting member of a second cooler, and the cooling device cools a member to be cooled that is arranged between the first cooler and the second cooler, the cooled member is disposed adjacent to the first connecting member and the second connecting member in a first direction, The first connecting member and the second connecting member are For the opposing portions of the first connecting member and the second connecting member The laser beam is irradiated in a direction that intersects with the lamination direction to form the bond. 、 A laser beam is irradiated in a second direction intersecting the first direction to a portion of the opposing portion of the first connecting member and the second connecting member that is closest to the member to be cooled. It is a cooling device. Here, the first cooler is Long in the first direction The first connecting member is elongated, and the first connecting member is The first direction is The second cooler is provided at each end of the Long in the first direction The second connecting member is elongated, and the second connecting member is The first direction isand First Direction Between the first connecting member and the second connecting member provided at both ends of 、 The member to be cooled are disposed adjacent to the first connecting member and the second connecting member in the first direction. , the first connecting member and the second connecting member The opposing portion of The part closest to the cooled member in In the first cooler and the second cooler Short side direction The second direction is The metal sheet may have a molten portion formed by irradiating the metal sheet with a laser beam. [Effects of the Invention]

[0006] According to the present invention, the cooling device can be easily manufactured. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a diagram illustrating an example of the appearance of a cooling device according to an embodiment of the present invention. [Figure 2] FIG. 2 is an example of an exploded view of components constituting the cooling device according to the present embodiment. [Figure 3] FIG. 2 is a diagram illustrating an example of a cross section of the cooling device according to the present embodiment. [Figure 4] FIG. 2 is a diagram illustrating an example of a cross section of the cooling device according to the present embodiment. [Figure 5] FIG. 4 is an enlarged view of a joining portion between a first member and a connecting member in a cooler body of the first cooler. [Figure 6] FIG. 10 is an enlarged view of a joining portion between a second member and a connecting member in a cooler body of the first cooler. [Figure 7] FIG. 10 is a diagram for explaining the joining of a first member and a second member in the cooler body of the first cooler. [Figure 8] 1(a) and 1(b) are diagrams showing an example of a procedure for manufacturing a cooling device. [Figure 9] 10A and 10B are diagrams for explaining the joining of connecting members. [Figure 10] 10(a) and 10(b) are diagrams illustrating the joining of connecting members. [Figure 11]10(a) to 10(f) are diagrams for explaining the connecting member and the shape of the connecting member. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. FIG. 1 is a diagram showing an example of the appearance of a cooling device 1 according to this embodiment. FIG. 2 is an example of an exploded view of components constituting the cooling device 1 according to this embodiment. 3 is a diagram showing an example of a cross section of the cooling device 1 according to this embodiment, taken along line III-III in FIG. Fig. 4 is a diagram showing an example of a cross section of the cooling device 1 according to this embodiment. Fig. 4 is a cross section taken along the line IV-IV in Fig. 3. Note that a support member 60, which will be described later, is omitted from Fig. 4. The cooling device 1 according to this embodiment includes a first cooler 10, which is a cooler capable of circulating a refrigerant therethrough, and a second cooler 20. The cooling device 1 also includes a support member 60 that supports the first cooler 10 and the second cooler 20. The cooling device 1 also includes a connection member 80 that is disposed between the first cooler 10 and the support member 60. The cooling device 1 may have a pressing member on the second cooler 20 that presses the first cooler 10 and the second cooler 20 against the support member 60 side.

[0009] 1 and 2, the cooling device 1 is a stacked type cooling device in which a first cooler 10 and a second cooler 20 are stacked. Hereinafter, the direction in which the first cooler 10 and the second cooler 20 are stacked may be referred to as the "vertical direction." The material of the first cooler 10, the second cooler 20, the support member 60, and the connection member 80 can be, for example, aluminum or an aluminum material such as an aluminum alloy. The heat generating element 100 can be exemplified as a card-type power module.

[0010] (1st cooler 10) The first cooler 10 has a cooler body 11 that is a generally elongated member, more specifically, a generally elongated rectangular parallelepiped member, and that has a space S1 formed therein through which a refrigerant can flow. In the following description, the longitudinal direction of the cooler body 11 may be simply referred to as the "longitudinal direction," and the lateral direction of the cooler body 11 may be simply referred to as the "lateral direction." The first cooler 10 also includes a heat sink 12 housed in the cooler body 11. Furthermore, the first cooler 10 includes connecting members 30 provided at both ends of the cooler body 11 in the longitudinal direction.

[0011] The cooler body 11 includes a first member 13 having a concave shape with a bottom, and a second member 14 having a flat plate shape that covers the opening of the first member 13. The first member 13 has an elongated bottom surface 13a, side walls 13b extending from the outer periphery of the bottom surface 13a in a direction perpendicular to the bottom surface 13a, and flanges 13c protruding outward from the tip ends of the side walls 13b in a direction parallel to the bottom surface 13a. Note that the side walls 13b do not have to extend from the outer periphery of the bottom surface 13a in a direction perpendicular to the bottom surface 13a, and may extend in a direction inclined relative to the perpendicular direction.

[0012] Furthermore, in the first member 13, a first communication hole 13d that communicates the space S1 with the outside of the cooler body 11 is formed at one end in the longitudinal direction of the bottom surface 13a, and a second communication hole 13e that communicates the space S1 with the outside of the cooler body 11 is formed at the other end in the longitudinal direction of the bottom surface 13a. The first communication hole 13d and the second communication hole 13e can be, for example, circular in shape.

[0013] The second member 14 has an inner surface 14a facing the space S1 and an outer surface 14b opposite to the inner surface 14a. The second member 14 is a flat plate-like member having an outer peripheral shape identical to that of the flange 13c of the first member 13. The second member 14 has a first communication hole 14d formed at a position opposite the first communication hole 13d of the first member 13, which connects the space S1 to the outside of the cooler main body 11, and a second communication hole 14e formed at a position opposite the second communication hole 13e of the first member 13, which connects the space S1 to the outside of the cooler main body 11. A connecting member 30 is joined to the outer surface 14b of the second member 14. In addition, the connecting members 30 are joined to the second member 14 at positions on the outer surface 14b where the first communication holes 14d and the second communication holes 14e are formed, respectively. Furthermore, the second member 14 has the heating element 100 mounted in the area between the connecting members 30 on the outer surface 14b.

[0014] The first member 13 and the second member 14 of the cooler body 11 are joined by laser welding in a state in which the flange 13c of the first member 13 and the inner surface 14a of the second member 14 are in contact with each other and the first and second communication holes 13d and 13e formed in the first member 13 face each other, respectively, to the first and second communication holes 14d and 14e formed in the second member 14. Laser welding is performed by irradiating a laser beam from the outside of one of the first member 13 and the second member 14. The laser beam is irradiated to the area where the flange 13c of the first member 13 and the second member 14 overlap, and the laser beam is irradiated to the entire circumference of the flange 13c of the first member 13. The first member 13 and the second member 14 may be joined by brazing, for example, instead of laser welding.

[0015] In the cooler main body 11, the first communication hole 13d formed in the first member 13 functions as an inlet for allowing the refrigerant to flow into the space S1, and the second communication hole 13e formed in the first member 13 functions as an outlet for allowing the refrigerant to flow out of the space S1.

[0016] The heat sink 12 has a flat plate-shaped portion 12a and a plurality of (ten in this example) fins 12b protruding from the flat plate-shaped portion 12a in a direction perpendicular to the plate surface of the flat plate-shaped portion 12a. Each fin 12b has a plate shape that extends perpendicular to the plate surface of the flat plate portion 12a and along the longitudinal direction. Specifically, each fin 12b has a plate shape that is parallel to the flow direction of the refrigerant flowing through the space S1. The multiple fins 12b are arranged side by side at equal intervals in the short-side direction with a predetermined gap therebetween. The vertical height of each fin 12b is approximately equal to the vertical height of the side wall 13b of the first member 13. The fins 12b may be corrugated plates having portions inclined with respect to the flow direction of the refrigerant flowing through the space S1. The shape of the fins 12b is not limited to a plate shape, and may be, for example, a plurality of columns whose column direction is perpendicular to the plate surface of the flat plate portion 12a. When the fins 12b are columnar, the cross-sectional shape of the fins 12b when viewed in the protruding direction may be, for example, a circle, an ellipse, or a rectangle.

[0017] The heat sink 12 is attached to the second member 14 by joining the flat plate portion 12a to the inner surface 14a of the second member 14. Examples of a method for joining the flat plate portion 12a of the heat sink 12 and the inner surface 14a of the second member 14 include laser welding and brazing.

[0018] The connecting member 30 is a generally cylindrical member having therein a cylindrical through-hole 31 with the vertical direction as the column direction. The through-hole 31 has the same shape as the first communicating hole 14d and the second communicating hole 14e of the second member 14 when viewed in the vertical direction. The connecting member 30 has an outer shape of a hexagonal pillar with the pillar direction extending in the vertical direction. The connecting member 30 has an outer peripheral surface 32 that is hexagonal when viewed in the vertical direction. The outer peripheral surface 32 of the connecting member 30 has six corners 32a that protrude outward from the connecting member 30 when viewed in the vertical direction, and six straight portions 32b that connect adjacent corners 32a and have a straight line shape when viewed in the vertical direction.

[0019] Furthermore, the connecting member 30 is arranged so that one of the six corners 32a protrudes toward the heating element 100 mounted on the outer surface 14b of the second member 14. Details will be described later, but the angle of the corner 32a protruding toward the heating element 100 as viewed from the top-bottom direction is preferably in the range of 30° to 120°, and more preferably in the range of 60° to 100°. Furthermore, the connecting member 30 is disposed so that all of the straight portions 32b are inclined with respect to the short-side direction. In addition, the outer circumferential surface 32 of the connecting member 30 does not have a surface that extends along the short-side direction.

[0020] The first cooler 10 is arranged so that the cooler body 11 faces the support member 60 (lower side) and the connecting member 30 faces the upper side.

[0021] (2nd cooler 20) The second cooler 20 is a generally elongated member, more specifically, a generally elongated rectangular parallelepiped member, and is equipped with a cooler main body 21 having a space S2 formed therein through which a refrigerant can flow. The second cooler 20 also includes a heat sink 22 housed in the cooler body 21 . Furthermore, the second cooler 20 includes connecting members 40 provided at both ends of the cooler body 21 in the longitudinal direction.

[0022] The cooler body 21 includes a first member 23 having a concave shape with a bottom, and a second member 24 having a flat plate shape that covers the opening of the first member 23. The first member 23 has an elongated bottom surface 23a, side walls 23b extending from the outer periphery of the bottom surface 23a in a direction perpendicular to the bottom surface 23a, and flanges 23c protruding outward from the tip of the side walls 23b in a direction parallel to the bottom surface 23a. Note that the side walls 23b do not have to extend from the outer periphery of the bottom surface 23a in a direction perpendicular to the bottom surface 23a, and may extend in a direction inclined relative to the perpendicular direction. Note that, unlike the first member 13 of the cooler body 11, the bottom surface 23a of the first member 23 does not have a communication hole formed therein that connects the space S2 with the outside of the cooler body 21.

[0023] The second member 24 has an inner surface 24a facing the space S2 and an outer surface 24b opposite to the inner surface 24a. The second member 24 is formed with a first communication hole 24d and a second communication hole 24e that communicate between the space S2 and the outside of the cooler body 21 at a position facing the connecting member 30 of the first cooler 10. A connecting member 40 is joined to the outer surface 24b of the second member 24. In addition, the connecting members 40 are joined to the second member 24 at positions on the outer surface 24b where the first communication holes 24d and the second communication holes 24e are formed, respectively.

[0024] The first member 23 and the second member 24 of the cooler body 21 are joined by laser welding in a state in which the flange 23c of the first member 23 and the inner surface 24a of the second member 24 are arranged so as to be in contact with each other. Laser welding is performed by irradiating laser light from the outside of one of the first member 23 or the second member 24. The region irradiated with the laser light is the overlapping region of the flange 23c of the first member 23 and the second member 24, and the laser light is irradiated around the entire circumference of the flange 23c of the first member 23. The first member 23 and the second member 24 may be joined by brazing, for example, instead of laser welding.

[0025] In the cooler main body 21, the first communication hole 24d formed in the second member 24 functions as an inlet for allowing the refrigerant to flow into the space S2, and the second communication hole 24e formed in the second member 24 functions as an outlet for allowing the refrigerant to flow out of the space S2.

[0026] The heat sink 22 is the same member as the heat sink 12 of the first cooler 10, and has a flat plate-shaped portion 22a and a plurality of fins 22b. The heat sink 22 is attached to the second member 24 by joining the flat plate portion 22a to the inner surface 24a of the second member 24. Examples of a method for joining the flat plate portion 22a of the heat sink 22 and the inner surface 24a of the second member 24 include laser welding and brazing.

[0027] The connecting member 40 is the same member as the connecting member 30 of the first cooler 10. The connecting member 40 is a generally cylindrical member having a cylindrical through-hole 41 therein with the vertical direction as the column direction. The shape of the through-hole 41 when viewed in the vertical direction is the same as the shape of the first communicating hole 24d and the second communicating hole 24e of the second member 24. The connecting member 40 has an outer shape of a hexagonal pillar with the pillar direction extending in the vertical direction. The connecting member 40 has an outer peripheral surface 42 that is hexagonal when viewed in the vertical direction. The outer peripheral surface 42 of the connecting member 40 has six corners 42a that protrude outward from the connecting member 40 when viewed in the vertical direction, and six straight lines 42b that connect adjacent corners 42a and have a straight line shape when viewed in the vertical direction.

[0028] Furthermore, the connecting member 40 is arranged so that one of the six corners 42a protrudes toward the heat generating element 100 that is arranged between the second member 24 and the second member 14 of the first cooler 10. Details will be described later, but the angle of the corner 42a protruding toward the heat generating element 100 as viewed from the top-bottom direction is preferably in the range of 30° to 120°, and more preferably in the range of 60° to 100°. Furthermore, the connecting member 40 is disposed so that all of the straight portions 42b are inclined with respect to the short-side direction. In addition, the outer circumferential surface 42 of the connecting member 40 does not have a surface that extends along the short-side direction.

[0029] The connecting member 40 is disposed so as to face the connecting member 30 of the first cooler 10. Specifically, the connecting member 40 is disposed so that the through holes 41 are continuous with the through holes 31 of the connecting member 30 in the up-down direction. Furthermore, the connecting member 40 is disposed so that the corners 42a and the straight portions 42b on the outer circumferential surface 42 face the corners 32a and the straight portions 32b on the outer circumferential surface 32 of the connecting member 30 in the up-down direction. In this example, each corner 42a of the connecting member 40 has the same angle as each corner 32a of the opposing connecting member 30 when viewed from above and below.

[0030] The connecting member 40 is joined to the connecting member 30 of the first cooler 10 by laser welding. At the opposing portions of the connecting member 30 of the first cooler 10 and the connecting member 40 of the second cooler 20, a molten portion 50 is formed in which the materials constituting the connecting member 30 and the connecting member 40 are melted by irradiation with laser light. The molten portion 50 is formed all around the opposing portions of the connecting member 30 and the connecting member 40 along the outer peripheral surface 32 of the connecting member 30 and the outer peripheral surface 42 of the connecting member 40.

[0031] The second cooler 20 is arranged so that the connecting member 40 is on the support member 60 side (lower side) and the first member 23 of the cooler body 21 is on the upper side.

[0032] (support member 60) The support member 60 has a first space 61 recessed from the top surface at one end in the longitudinal direction, and a second space 62 recessed from the top surface at the other end in the longitudinal direction. An opening 61a on the top surface of the first space 61 has the same shape as the first communication hole 13d of the first member 13. An opening 62a on the top surface of the second space 62 has the same shape as the second communication hole 13e of the first member 13. A groove (not shown) into which an O-ring 65 is fitted is formed around the opening 61a of the support member 60. A groove (not shown) into which an O-ring 66 is fitted is formed around the opening 62a of the support member 60. Furthermore, female threads 61c are formed in the support member 60 at positions adjacent to both sides of the opening 61a in the short direction. Furthermore, female threads 62c are formed in the support member 60 at positions adjacent to both sides of the opening 62a in the short direction.

[0033] A communication hole is formed in the support member 60, connecting the first space 61 with the outside in a direction perpendicular to the up-down direction (the short-side direction in FIGS. 1 and 2), and a first joint 63 is fitted into this communication hole. Further, a communication hole is formed in the support member 60, connecting the second space 62 with the outside in a direction perpendicular to the up-down direction (the short-side direction), and a second joint 64 is fitted into this communication hole.

[0034] A protrusion 67 that protrudes upward is formed in the region between the openings 61a and 61b on the top surface of the support member 60. The height of the protrusion 67 in the vertical direction is the same as the height of the connecting member 80 in the vertical direction. The size of the protrusion 67 in the short direction is smaller than the bottom surface 13a of the first member 13 of the first cooler 10.

[0035] (connecting member 80) The connecting member 80 is an elliptical member whose minor axis corresponds to the longitudinal direction of the cooler body 11 of the first cooler 10 and whose major axis corresponds to the lateral direction of the cooler body 11. A through hole 81 having the same shape as the first communication hole 13d and the second communication hole 13e formed in the first member 13 of the first cooler 10 is formed in the center of the connecting member 80 in the major axis direction. In addition, cylindrical through holes 82, through which bolts 90 are passed, are formed on both sides of the connecting member 80 in the major axis direction.

[0036] In the cooling device 1 configured as described above, two connection members 80 are arranged on the support member 60, a first cooler 10 is arranged on the two connection members 80, and a second cooler 20 is arranged on the first cooler 10. Furthermore, three heat generating elements 100 are arranged between the first cooler 10 and the second cooler 20. In the cooling device 1, the male threads of bolts 90 are passed through the through holes 82 of the connection members 80 from above at both longitudinal ends, and are fastened to the female threads 61c and 62c formed in the support member 60, thereby supporting the first cooler 10, the second cooler 20, and the heat generating elements 100 on the support member 60.

[0037] (Manufacturing method of cooling device 1) The cooling device 1 configured as above is manufactured as follows. FIG. 5 is an enlarged view of the joining portion between the first member 13 and the connecting member 80 in the cooler body 11 of the first cooler 10. As shown in FIG. The first member 13 and the connecting member 80 in the cooler body 11 of the first cooler 10 are joined by laser welding. During laser welding, the connecting member 80 and the first member 13 are overlapped so that the through-hole 81 of the connecting member 80 and the first communicating hole 13d of the first member 13 are aligned. Then, laser light L is irradiated from the laser head 151 of the laser device 150 toward the first member 13 at the overlapping portion, and the laser head 151 is moved along the shape of the first communicating hole 13d to continuously irradiate the periphery of the first communicating hole 13d with the laser light L. The laser source of the laser device 150 is not particularly limited. Examples include a YAG laser, a CO2 laser, a fiber laser, a disk laser, and a semiconductor laser. The irradiation direction of the laser light L may be perpendicular to the bottom surface 13a of the first member 13 at the overlapping portion, or may be inclined relative to the perpendicular direction. Although FIG. 5 shows one end in the longitudinal direction, the first member 13 and the connecting member 80 are similarly joined by laser welding at the other end in the longitudinal direction. Furthermore, in this example, the first member 13 and the connecting member 80 are joined by laser welding, but the joining method is not limited to laser welding, and for example, the first member 13 and the connecting member 80 may be joined by brazing.

[0038] FIG. 6 is an enlarged view of the joining portion between the second member 14 and the connecting member 30 in the cooler body 11 of the first cooler 10. As shown in FIG. The second member 14, to which the heat sink 12 has been previously joined, and the connecting member 30 are joined by laser welding. When laser welding, the second member 14 and the connecting member 30 are overlapped so that the first communicating hole 14d of the second member 14 and the through hole 31 of the connecting member 30 are aligned. Then, laser light L is irradiated from the laser head 151 of the laser device 150 toward the second member 14 at the overlapping portion, and the laser head 151 continuously irradiates the periphery of the first communicating hole 14d. The irradiation direction of the laser light L may be a direction perpendicular to the plate surface of the second member 14 at the overlapping portion, or may be a direction inclined relative to the perpendicular direction. Although FIG. 6 shows one end in the longitudinal direction, the second member 14 and the connecting member 30 are similarly joined by laser welding at the other end in the longitudinal direction. Furthermore, in this example, the second member 14 and the connecting member 30 are joined by laser welding, but the joining method is not limited to laser welding, and for example, the second member 14 and the connecting member 30 may be joined by brazing.

[0039] FIG. 7 is a diagram for explaining the joining of the first member 13 and the second member 14 in the cooler body 11 of the first cooler 10. As shown in FIG. Next, the first member 13 and the second member 14, to which the connecting member 30 has been joined, are joined by laser welding. First, the first member 13 and the second member 14 are overlapped with the flange 13c of the first member 13 so that the outer periphery of the second member 14 is placed on top of the flange 13c of the first member 13. Next, laser light L is irradiated from the laser head 151 of the laser device 150 toward the overlapping portion of the second member 14 and the flange 13c of the first member 13 from the outside of the second member 14, while the laser head 151 is moved along the outer periphery of the second member 14, thereby continuously irradiating the laser light L. In this way, the first member 13 and the second member 14 are joined by laser welding. As a result, the first cooler 10 is obtained, which has the cooler body 11 in which the space S1 through which the refrigerant can flow is formed, and the connecting member 30 joined to the cooler body 11. Furthermore, in this example, the first member 13 and the second member 14 are joined by laser welding, but the joining method is not limited to laser welding, and for example, the first member 13 and the second member 14 may be joined by brazing.

[0040] In a similar manner to that shown in FIG. 6, the second member 24 to which the heat sink 22 has been previously joined and the connecting member 40 are joined by laser welding. Thereafter, the first member 23 and the second member 24 to which the connecting member 40 has been joined are joined by laser welding in the same manner as shown in FIG. As a result of the above, the second cooler 20 is obtained, which has the cooler body 21 in which the space S2 through which the refrigerant can flow is formed, and the connecting member 40 joined to the cooler body 21. Furthermore, in this example, the second member 24 and the connecting member 40 are joined by laser welding, and the first member 23 and the second member 24 are joined by laser welding, but the joining method is not limited to laser welding, and for example, they may be joined by brazing.

[0041] 8(a) and 8(b) are diagrams showing an example of a procedure for manufacturing the cooling device 1. In FIG. 8(a), a heat generating element 100, which is an example of a member to be cooled by the first cooler 10, is placed on the first cooler 10. Specifically, the heat generating element 100 is placed on the first cooler 10 so that the heat generating element 100 is disposed between the connecting members 30 provided at both longitudinal ends of the first cooler 10. In addition, three heat generating elements 100 are placed on the outer surface 14b of the second member 14 of the cooler body 11 of the first cooler 10, between the connecting members 30 joined to the outer surface 14b. At this time, thermally conductive grease 160 is applied to the outer surface 14b of the second member 14 of the first cooler 10 or the surface of the heat generating element 100, and then the three heat generating elements 100 are placed on the outer surface 14b of the second member 14 with the thermally conductive grease 160 interposed therebetween.

[0042] Thereafter, as shown in FIG. 8(b), the second cooler 20 is placed on the first cooler 10 so that the connecting members 30 of the first cooler 10 and the connecting members 40 of the second cooler 20 face each other. Specifically, the second cooler 20 is placed on the first cooler 10 so that the heat generating element 100 is disposed between the connecting members 40 provided at both longitudinal ends of the second cooler 20. Specifically, the second cooler 20 is placed on the first cooler 10 so that the corners 32a of the connecting members 30 face the corners 42a of the connecting members 40 and the linear portions 32b of the connecting members 30 face the linear portions 42b of the connecting members 40. Specifically, the second cooler 20 is placed on the first cooler 10 so that the through holes 31 of the connecting members 30 and the through holes 41 of the connecting members 40 are aligned. At this time, thermally conductive grease 160 is applied to the surface of the heat generating element 100 placed on the first cooler 10, and then the second cooler 20 is placed on the first cooler 10. As a result, the second member 24 of the second cooler 20 is placed on the heat generating element 100 with the thermally conductive grease 160 interposed therebetween.

[0043] 9 and 10(a)-(b) are diagrams for explaining the joining of the connecting member 30 and the connecting member 40. Fig. 9 is an enlarged view of the region where the connecting member 30 and the connecting member 40 face each other, Fig. 10(a) is a view of Fig. 9 as seen from the XA direction, and Fig. 10(b) is an enlarged view of the XB portion in Fig. 10(a). Next, the connecting member 30 of the first cooler 10 and the connecting member 40 of the second cooler 20 are joined by laser welding. Specifically, the connecting member 30 and the connecting member 40 are joined by irradiating them with laser light in a direction intersecting the stacking direction (vertical direction). In addition, the laser head 151 of the laser device 150 irradiates laser light L toward the portion where the connecting member 30 and the connecting member 40 face each other (hereinafter referred to as the facing portion of the connecting member 30 and the connecting member 40), while moving the laser head 151 along the outer circumferential surface 32 of the connecting member 30 and the outer circumferential surface 42 of the connecting member 40, thereby continuously irradiating the laser light L.

[0044] At this time, the laser light L is irradiated in the short direction to at least the portion of the opposing portions of the connecting members 30 and 40 that is closest to the heating element 100. Specifically, the laser light L is irradiated in the short direction to at least the portion of the opposing portions of the connecting members 30 and 40 where the corner 32a on the outer peripheral surface 32 of the connecting member 30 that is closest to the heating element 100 faces the corner 42a on the outer peripheral surface 42 of the connecting member 40 that is closest to the heating element 100. Here, the corner 32a on the outer peripheral surface 32 of the connecting member 30 that is closest to the heating element 100 is an example of a first corner of the first connecting member. Furthermore, the corner 42a on the outer peripheral surface 42 of the connecting member 40 that is closest to the heating element 100 is an example of a second corner of the second connecting member. Of the opposing portions of the connecting member 30 and the connecting member 40, the heating element 100 may prevent the laser light L from traveling toward the portion closest to the heating element 100, making it difficult to irradiate the laser light L from a direction intersecting the short-side direction. By irradiating the laser light L in the short-side direction toward at least the portion closest to the heating element 100 of the opposing portions of the connecting member 30 and the connecting member 40, the laser light L is prevented from being obstructed even in the portion closest to the heating element 100. As a result, the connecting member 30 and the connecting member 40 can be joined with high accuracy.

[0045] In this example, first, laser light L is irradiated in the short direction from the laser head 151 to the portion of the opposing portions of the connecting member 30 and the connecting member 40 located on one end side in the short direction (upper side in Figure 10(a)), while the laser head 151 is moved along the outer surface 32 and the outer surface 42 as shown by arrow A1 in Figure 10(a). Next, the orientation of the laser head 151 relative to the connecting members 30 and 40 is changed, and the laser head 151 is moved along the outer peripheral surfaces 32 and 42 as shown by arrow A2 in Figure 10(a) while irradiating laser light L from the laser head 151 in the short direction to the portion of the opposing portions of the connecting members 30 and 40 that is located on the other end side in the short direction (the lower side in Figure 10(a)). In this manner, the laser light L is irradiated onto the opposing portions of the connecting members 30 and 40 along the entire circumference of the outer circumferential surfaces 32 and 42, thereby joining the connecting members 30 and 40 by laser welding. At the portions of the connecting members 30 and 40 irradiated with the laser light L, the materials constituting the connecting members 30 and 40 melt, forming molten portions 50.

[0046] 10(a) and 10(b), the opposing region between corner 32a of connecting member 30 located closest to heating element 100 and corner 42a of connecting member 40 located closest to heating element 100 is irradiated with laser light L from both one end side and the other end side in the short side direction. As a result, at the opposing region between corner 32a of connecting member 30 located closest to heating element 100 and corner 42a of connecting member 40 located closest to heating element 100, molten portions 50 (molten portions 51, 52) in which the materials constituting connecting member 30 and connecting member 40 are melted are formed from both one end side and the other end side in the short side direction. At this time, it is preferable to irradiate the opposing portions of connecting member 30 and connecting member 40 with laser light L so that the tip of melted portion 51 formed from one end side in the short side direction and the tip of melted portion 52 formed from the other end side in the short side direction overlap. Additionally, although this differs depending on the size, material, etc. of connecting member 30 and connecting member 40, it is preferable to irradiate with laser light L so that the overlap between the tip of melted portion 51 and the tip of melted portion 52 is in the range of 0.5 mm to 1.5 mm, for example.

[0047] The size of the molten portion 50 (molten portion 51, molten portion 52) formed by irradiating the opposing portion of the connecting member 30 and the connecting member 40 with laser light L increases as the output of the irradiated laser light L increases or as the moving speed of the laser head 151 decreases. When irradiating the opposing portion of the connecting member 30 and the connecting member 40 with laser light L, the output of the laser light L from the laser device 150 and the moving speed of the laser head 151 are adjusted so that the molten portion 50 (molten portion 51, molten portion 52) formed at the opposing portion of the connecting member 30 and the connecting member 40 has a desired size.

[0048] Furthermore, when irradiating the opposing portions of the connecting members 30 and 40 with laser light L, it is preferable not to irradiate the laser light L onto the tips (indicated by reference numeral 55 in FIG. 10(b)) of the corners 32a and 42a that are closest to the heating element 100, as shown in FIG. 10(b). By not irradiating the tips 55 of the corners 32a and 42a with laser light L, the material that constitutes the connecting members 30 and 40 at the corners 32a and 42a is prevented from melting and falling due to the irradiation of the laser light L.

[0049] 9 and 10(a)-(b), the laser light L is irradiated in the short-side direction around the entire circumference of the opposing portion between the connecting member 30 and the connecting member 40, but this is not limited to this. Of the opposing portions between the connecting member 30 and the connecting member 40, except for the opposing portion between the corner 32a and the corner 42a located closest to the heating element 100, the laser light L may be irradiated in a direction intersecting the short-side direction. Of the opposing portions between the connecting member 30 and the connecting member 40, except for the opposing portion between the corner 32a and the corner 42a located closest to the heating element 100, the progression of the laser light L is less likely to be obstructed by the heating element 100.

[0050] As described above, the angle of the corner 32a located closest to the heating element 100 in the connecting member 30 and the corner 42a located closest to the heating element 100 in the connecting member 40 when viewed from the top and bottom (hereinafter, these may be simply referred to as the angle of corner 32a and corner 42a) is preferably in the range of 30° or more and 120° or less, and more preferably in the range of 60° or more and 100° or less. 11(a) to 11(f) are diagrams for explaining the shapes of the connecting member 30 and the connecting member 40, and are diagrams showing the shapes of the corner 32a of the connecting member 30 located closest to the heating element 100, and the corner 42a of the connecting member 40 located closest to the heating element 100, viewed in the vertical direction. In Fig. 11(a) to 11(f), the angles of the corner 32a and the corner 42a located closest to the heating element 100 are 150°, 120°, 100°, 90°, 60°, and 30°, respectively.

[0051] 11(a), if the angles of the corners 32a and 42a located closest to the heating element 100 are too large, it is difficult to irradiate the laser light L so that the tip of the fusion zone 51 formed from one end side in the short direction overlaps the tip of the fusion zone 52 formed from the other end side in the short direction. Furthermore, if the angles of the corners 32a and 42a located closest to the heating element 100 are too large, the tips of the corners 32a and 42a are likely to melt when irradiated with the laser light L. In these cases, the joining of the connecting member 30 and the connecting member 40 may be insufficient at the corners 32a and 42a located closest to the heating element 100. On the other hand, as shown in Figure 11(f), if the angles of the corners 32a and 42a located closest to the heating element 100 are too small, the length along the longitudinal direction of the connecting members 30 and 40 will become long, and the cooling device 1 (see Figure 1) will likely become large. By setting the angles of the corners 32a and 42a located closest to the heating element 100 to a range of 30° or more and 120° or less, more preferably a range of 60° or more and 100° or less, the connecting members 30 and 40 can be joined more reliably while preventing the cooling device 1 from becoming larger.

[0052] Here, the above-mentioned connecting member 30 and connecting member 40 respectively have outer peripheral surfaces 32 and 42 whose external shapes when viewed from the top and bottom directions are hexagonal, but the shapes of connecting member 30 and connecting member 40 are not limited to this. As described above, from the viewpoint of irradiating the laser light L in the short direction to the portion of the opposing portions of the connecting member 30 and the connecting member 40 closest to the heating element 100, it is preferable that the outer surface 32 of the connecting member 30 and the outer surface 42 of the connecting member 40 each have a corner 32a and a corner 42a at the portion closest to the heating element 100. Furthermore, from the viewpoint of making it easier to irradiate the laser light L to the portion of the opposing portions of the connecting member 30 and the connecting member 40 that is closer to the heating element 100, it is preferable that the connecting member 30 and the connecting member 40 each have a straight line portion 32b as an example of a first straight line portion and a straight line portion 42b as an example of a second straight line portion that extend linearly from the corner portion 32a and the corner portion 42a in a direction away from the heating element 100.

[0053] Furthermore, outer peripheral surface 32 of connecting member 30 and outer peripheral surface 42 of connecting member 40 may have curved surfaces in areas other than the area closest to heating element 100, but preferably do not have curved surfaces. Since outer peripheral surface 32 of connecting member 30 and outer peripheral surface 42 of connecting member 40 do not have curved surfaces, the movement trajectory of laser head 151 when irradiating laser light L can be made linear, and the joining accuracy between connecting member 30 and connecting member 40 can be improved. Furthermore, it is preferable that the outer peripheral surface 32 of the connecting member 30 and the outer peripheral surface 42 of the connecting member 40 do not have a surface extending along the short side direction. Since the outer peripheral surface 32 of the connecting member 30 and the outer peripheral surface 42 of the connecting member 40 do not have a surface extending along the short side direction, the connecting members 30 and 40 can be joined by irradiating the laser light L in the short side direction from one end side and the other end side in the short side direction. In addition, it is no longer necessary to irradiate the laser light L in a direction intersecting the short side direction in order to join the connecting members 30 and 40, and the orientation of the laser head 151 with respect to the opposing portions of the connecting members 30 and 40 can be changed less frequently.

[0054] Although Figures 9 and 10(a) to (b) show one end in the longitudinal direction, the connecting member 30 of the first cooler 10 and the connecting member 40 of the second cooler 20 are similarly joined by laser welding at the other end in the longitudinal direction. There is no particular limitation on the laser source of the laser device 150 used to join the connecting member 30 and the connecting member 40. Examples include a YAG laser, a CO2 laser, a fiber laser, a disk laser, and a semiconductor laser.

[0055] Thereafter, the first cooler 10 and the second cooler 20, to which the connecting member 30 and the connecting member 40 have been joined, are placed on the support member 60 so that the first cooler 10 faces the support member 60. At this time, the openings 61a and 62a of the support member 60 are aligned with the through-holes 81 in the connection member 80 connected to the first cooler 10.

[0056] Thereafter, at one end in the longitudinal direction, a bolt 90 is passed through the through-hole 82 of the connection member 80 from above, and the male thread of the bolt 90 is tightened into the female thread 61c formed in the support member 60. Furthermore, at the other end in the longitudinal direction, a bolt 90 is passed through the through-hole 82 of the connection member 80 from above, and the male thread of the bolt 90 is tightened into the female thread 62c formed in the support member 60. By the above manufacturing method, the cooling device 1 shown in FIG. 1 is obtained.

[0057] In the manufacturing method of the cooling device 1 described above, the step of placing the heat generating element 100, which is an example of a member to be cooled by the first cooler 10, on the first cooler 10, as shown in Fig. 8(a), is an example of a first loading step. Also, the step of placing the second cooler 20 on the first cooler 10 so that the connecting member 30 of the first cooler 10 and the connecting member 40 of the second cooler 20 face each other, as shown in Fig. 8(b), is an example of a second loading step. Also, the step of joining the connecting member 30 of the first cooler 10 and the connecting member 40 of the second cooler 20 by laser welding, as shown in Figs. 9 and 10(a)-(b), is an example of a welding step.

[0058] In the cooling device 1 configured as described above, the refrigerant that has flowed into the first space 61 from the first joint 63 of the support member 60 passes through the opening 61a, the through-hole 81 of the connecting member 80, and the first communication hole 13d formed at one end in the longitudinal direction of the first member 13 of the cooler body 11 of the first cooler 10, and then flows into the space S1 between the first member 13 and the second member 14 of the cooler body 11 of the first cooler 10. Then, a part of the refrigerant that has flowed into the space S1 advances in the longitudinal direction within the space S1 and flows out of the first cooler 10 through the second communication hole 13e formed at the other end in the longitudinal direction of the first member 13.

[0059] Furthermore, a portion of the refrigerant that has flowed into the space S1 passes through the first communication hole 14d formed at one end in the longitudinal direction of the second member 14 of the cooler body 11 of the first cooler 10, flows out of the first cooler 10, passes through the through hole 31 of the connecting member 30, the through hole 41 of the connecting member 40, and the first communication hole 24d formed at one end in the longitudinal direction of the second member 24 of the cooler body 21 of the second cooler 20, and flows into the space S2 between the first member 23 and the second member 24 of the cooler body 21 of the second cooler 20. Then, the refrigerant that has flowed into the space S2 advances in the longitudinal direction within the space S2, and flows out of the second cooler 20 through the second communication hole 24e formed at the other end in the longitudinal direction of the second member 24.

[0060] The refrigerant that has flowed out of the second cooler 20 passes through the second communication hole 14e of the second member 14 formed at the other longitudinal end of the cooler body 11 of the first cooler 10 and the second communication hole 13e of the first member 13, and then flows out of the first cooler 10. In addition, the refrigerant that has flowed out of the first cooler 10 passes through the through hole 81 of the connecting member 80, enters the second space 62 via the opening 62a formed in the support member 60, and flows out of the second joint 64.

[0061] In this way, the cooling device 1 cools the heat generating element 100 arranged between the first cooler 10 and the second cooler 20 while the refrigerant flows through the space S1 of the first cooler 10 and the space S2 of the second cooler 20.

[0062] As described above, the manufacturing method of the cooling device 1 includes a first loading step of placing a member to be cooled (e.g., heat generating element 100) on a first cooler (e.g., first cooler 10) among a plurality of coolers, each having a cooler body capable of circulating a refrigerant therethrough and a connecting member joined to the cooler body; a second loading step of placing a second cooler on the first cooler so that a first connecting member (e.g., connecting member 30) that is the connecting member of the first cooler faces a second connecting member (e.g., connecting member 40) that is the connecting member of a second cooler (e.g., second cooler 20) among the plurality of coolers; and a welding step of joining the first connecting member and the second connecting member by irradiating them with laser light in a direction intersecting the loading direction.

[0063] Furthermore, the cooling device 1 is a cooling device in which a plurality of coolers, each having a cooler body capable of circulating a refrigerant therethrough and a connecting member joined to the cooler body, are stacked, and a first connecting member (e.g., connecting member 30) that is the connecting member of a first cooler (e.g., first cooler 10) among the plurality of coolers is joined to a second connecting member (e.g., connecting member 40) that is the connecting member of a second cooler (e.g., second cooler 20), and the cooling device cools a member to be cooled (e.g., heat-generating body 100) arranged between the first cooler and the second cooler, and the first connecting member and the second connecting member are joined by irradiating them with laser light in a direction intersecting the stacking direction.

[0064] This allows the cooled member to be placed between the first cooler and the second cooler before joining the first connecting member and the second connecting member, making it easier to manufacture the cooling device compared to, for example, joining the first connecting member and the second connecting member and then inserting the cooled member into the space formed between the first cooler and the second cooler. Furthermore, since the first connecting member of the first cooler and the second connecting member of the second cooler are joined by irradiating them with laser light, leakage of the refrigerant from between the first cooler and the second cooler to the outside can be suppressed without providing an O-ring between the first cooler and the second cooler, thereby reducing the cost of the cooling device and improving its reliability.

[0065] In the cooling device 1 described above, three heat generating elements 100 are arranged between the first cooler 10 and the second cooler 20, but the number is not particularly limited to three. For example, it may be one, or two, four, or more. Depending on the number of heat generating elements 100 arranged between the coolers, it is preferable to change the longitudinal lengths of the first member (e.g., first member 13) and second member (e.g., second member 14) of the cooler body (e.g., cooler body 11) that constitutes the cooler (e.g., first cooler 10).

[0066] Furthermore, in the cooling device 1 described above, the first cooler 10 and the connecting member 80 are joined by laser welding, but they do not necessarily have to be joined. For example, if the first cooler 10 and the connecting member 80 are not joined by laser welding, it is preferable to seal the gap between the first cooler 10 and the connecting member 80 with an O-ring. [Explanation of symbols]

[0067] REFERENCE SIGNS LIST 1...cooling device, 10...first cooler, 20...second cooler, 11, 21...cooler body, 12, 22...heat sink, 13, 23...first member, 14, 24...second member, 30, 40...connecting member, 50...melting portion, 60...support member, 80...connecting member

Claims

1. a first loading step of loading a member to be cooled by a first cooler on a first cooler among a plurality of coolers, each cooler having a cooler body capable of circulating a refrigerant therein and a connecting member joined to the cooler body; a second loading step of loading a second cooler on the first cooler such that a first connecting member that is the connecting member of the first cooler faces a second connecting member that is the connecting member of a second cooler among the plurality of coolers; a welding process of joining the first connecting member and the second connecting member by irradiating opposing portions of the first connecting member and the second connecting member with laser light in a direction intersecting the stacking direction; Equipped with In the first loading step and the second loading step, the members are loaded so that the members to be cooled are disposed adjacent to the first connecting member and the second connecting member in a first direction; The welding step includes irradiating a laser beam in a second direction intersecting the first direction to a portion of the opposing portion of the first connecting member and the second connecting member that is closest to the cooled member. A method for manufacturing a cooling device.

2. the first cooler is elongated in the first direction, the first connecting members are provided at both ends of the first cooler in the first direction, which is a longitudinal direction of the first cooler, the second cooler is elongated in the first direction, the second connecting members are provided at both ends of the second cooler in the first direction, which is a longitudinal direction of the second cooler, In the first loading step and the second loading step, the members are loaded between the first connecting members and the second connecting members provided at both ends in the first direction, so that the members to be cooled are disposed adjacent to the first connecting members and the second connecting members in the first direction; the welding step includes irradiating a laser beam to a portion of the opposing portion of the first connecting member and the second connecting member that is closest to the cooled member in the second direction, which is a short-side direction of the first cooler and the second cooler; A method for manufacturing the cooling device according to claim 1.

3. the first cooler has a first corner portion protruding toward the cooled member at a portion of the first connecting member closest to the cooled member, the second cooler has a second connecting member, at a portion closest to the member to be cooled, having a second corner portion protruding toward the member to be cooled; the second loading step includes placing the second cooler on the first cooler so that the first corner and the second corner face each other; The welding step includes irradiating a laser beam in the second direction onto a portion where the first corner portion and the second corner portion face each other. A method for manufacturing the cooling device according to claim 2.

4. the second loading step includes loading the second cooler on the first cooler such that the first corner, which is at an angle of 30° or more and 120° or less, faces the second corner, which is at an angle of 30° or more and 120° or less; A method for manufacturing the cooling device according to claim 3.

5. In the first cooler, each of the first connecting members has a first linear portion extending linearly from the first corner portion in a direction away from the cooled member, the second cooler has a second linear portion extending linearly from the second corner portion in a direction away from the cooled member, In the second loading step, the second cooler is placed on the first cooler so that the first linear portion and the second linear portion face each other. A method for manufacturing the cooling device according to claim 3 or 4.

6. the first connecting member of the first cooler and the second connecting member of the second cooler do not have a surface on their outer peripheries that extends along the second direction, the welding step joins the first connecting member and the second connecting member by irradiating the first connecting member and the second connecting member with a laser beam in the second direction along the outer periphery; A method for manufacturing a cooling device according to any one of claims 1 to 5.

7. A cooling device comprising a plurality of stacked coolers, each having a cooler body capable of circulating a refrigerant therethrough and a connecting member joined to the cooler body, wherein a first connecting member serving as the connecting member of a first cooler among the plurality of coolers is joined to a second connecting member serving as the connecting member of a second cooler, and wherein the cooling device cools a member to be cooled that is disposed between the first cooler and the second cooler, the cooled member is disposed adjacent to the first connecting member and the second connecting member in a first direction, the first connecting member and the second connecting member are joined by irradiating opposing portions of the first connecting member and the second connecting member with laser light in a direction intersecting the stacking direction, a laser beam is irradiated to a portion of an opposing portion of the first connecting member and the second connecting member that is closest to the member to be cooled in a second direction intersecting with the first direction; Cooling device.

8. the first cooler is elongated in the first direction, the first connecting members are provided at both ends of the first cooler in the first direction, which is a longitudinal direction of the first cooler, the second cooler is elongated in the first direction, the second connecting members are provided at both ends of the second cooler in the first direction, which is a longitudinal direction of the second cooler, the cooled member is disposed between the first connecting member and the second connecting member provided at both ends in the first direction, adjacent to the first connecting member and the second connecting member in the first direction, The cooling device described in claim 7, wherein a molten portion is formed in the portion of the opposing portion between the first connecting member and the second connecting member closest to the cooled member by irradiating laser light in the second direction, which is the short side direction of the first cooler and the second cooler.

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