Robust Fluid Coupling

Abstract

The target material supply device includes first and second fluid flow components (1122, 1126) that, when joined, define an axial flow path between a source of target material fluid and a nozzle supply device, and a coupling device configured to seal the junction between the first and second fluid flow components. The coupling device includes a gasket (1105) having an annular shape that defines an inner opening that, when installed and sealed, becomes part of the axial flow path. When the gasket is installed between the first and second fluid flow components to seal the junction formed by the installation of the first and second fluid flow components, pressure exerted on the gasket from the target material fluid traversing the gasket inner opening along the axial flow path enhances the sealing function of the seal at the junction. Optionally, a functional insert, such as a flow restrictor (1160), can be installed in the gasket.

Description

[Technical Field]

[0001] (CROSS-REFERENCE TO RELATED APPLICATIONS)

[0001] This application claims priority to U.S. patent application Ser. No. 63 / 054,410, entitled "ROBUST FLUID COUPLING APPARATUS," filed July 21, 2020, U.S. patent application Ser. No. 63 / 167,254, entitled "ROBUST FLUID COUPLING APPARATUS," filed March 29, 2021, and U.S. patent application Ser. No. 63 / 216,820, entitled "ROBUST FLUID COUPLING APPARATUS," filed June 30, 2020. These applications are incorporated herein by reference in their entireties.

[0002] The disclosed subject matter relates to an apparatus, including a gasket, for fluidly coupling two fluid flow components. [Background technology]

[0003] Extreme ultraviolet ("EUV") light, such as electromagnetic radiation having wavelengths of 100 nm or less (sometimes referred to as soft x-rays), including light with wavelengths of 20 nanometers (nm) or less, between 5 and 20 nm, or between 13 and 14 nm, is used in photolithography processes to create extremely small features in substrates, such as silicon wafers, by initiating polymerization in resist layers. Methods for generating EUV light include, but are not limited to, changing the physical state of a source material to a plasma state. Source materials include compounds or elements with emission lines in the EUV range, such as xenon, lithium, or tin. In one such method, often referred to as laser-produced plasma ("LPP"), the required plasma is generated by irradiating a source material, for example, in the form of droplets, streams, or clusters of the source material, with an amplified light beam, sometimes referred to as a drive laser. In this process, the plasma is typically generated in a sealed vessel, such as a vacuum chamber, and monitored using various types of metrology instruments. A source material such as xenon, lithium, or tin that emits in the EUV range when in a plasma state is commonly referred to as a target material because it is targeted and irradiated by the driving laser. Summary of the Invention

[0004] In some general aspects, a target material supply apparatus includes first and second fluid flow components that, when joined, define an axial flow path, the axial flow path being between a source of target material fluid and a nozzle supply apparatus and configured to direct the target material fluid toward the nozzle supply apparatus, and a coupling device configured to seal the junction between the first and second fluid flow components. The coupling device includes a gasket having an annular shape that defines an inner opening that, when installed and sealed, becomes part of the axial flow path. When the gasket is installed between the first and second fluid flow components to seal the junction formed by attaching the first and second fluid flow components, pressure exerted on the gasket from the target material fluid traversing the gasket inner opening along the axial flow path enhances the sealing function of the seal at the junction.

[0005]

[0005] Embodiments may include one or more of the following features. For example, the gasket may be configured to be removable from a bond without damaging the bond. At least one surface of the gasket extending in a radial plane may be configured to engage a protrusion of the adjacent fluid flow component after an outer radial connecting surface of the gasket engages an inner radial connecting surface of the adjacent fluid flow component.

[0006] The first fluid flow component is an adapter, the second fluid flow component is a target material fluid reservoir, and the adapter can be positioned between the target material fluid reservoir and the nozzle delivery device. The adapter can be made of molybdenum rhenium, and the gasket can be made of polyimide.

[0007] The target material supply device may further include a functional insert disposed within the inner opening of the gasket, the functional insert including an inner opening that is part of the axial flow path, the functional insert inner opening having a diameter smaller than the diameter of the inner opening of the gasket. The functional insert may be made of a material compatible with the target material fluid. The functional insert may be a flow restrictor made of tantalum, tungsten, molybdenum, a tantalum alloy, a tungsten alloy, a molybdenum alloy, polyimide, or a high-melting-point metal. The functional insert may be made of boron carbide or a metal coated with a tin-phobic material. The target material fluid may be molten tin. The diameter of the inner opening of the gasket may be at least as large as the inner opening of the adapter that defines the axial flow path, and may be small enough to axially support the functional insert therein. The functional insert may be a flow restriction, and the diameter of the inner opening of the flow restriction may be small enough to allow a restricted flow of the target material fluid when subjected to a target material fluid flow pressure above a threshold, and may be smaller than the diameter of the axial flow path and larger than a minimum diameter of the flow path of the nozzle supply. The functional insert may be a flow restriction, the first fluid flow component may be an adapter, and the second fluid flow component may be a target material fluid reservoir, and the adapter may be positioned between the target material fluid reservoir and the nozzle supply.

[0008] In another general aspect, a coupling device is configured to seal a joint between two fluid flow components that, when joined, define an axial flow path through which a fluid can traverse. The coupling device includes a gasket having an annular shape defining an inner opening with a diameter along a radial plane perpendicular to the axial flow path, the diameter of the gasket inner opening being large enough to allow fluid to pass through the gasket, the gasket inner opening extending the axial flow path, and a support component on which the gasket is disposed. The support component has an annular shape defining an inner opening with a diameter along the radial plane, the diameter of the support component inner opening being larger than the outer diameter of the gasket. When the gasket is placed between the two fluid flow components to seal the joint formed by attaching the two fluid flow components, pressure exerted on the gasket by fluid traversing the gasket inner opening along the axial flow path improves the sealing function of the seal at the joint.

[0009]

[0009] Embodiments may include one or more of the following features. For example, the gasket may extend an axial flow path between two fluid flow components. The gasket may have a cross-sectional shape in which an axial length closest to the axial flow path is greater than an axial length farthest from the axial flow path.

[0010]

[0010] The support component may be part of one or more of the fluid flow components or a separate support ring. The support component may be made of a material that is harder than the material of the gasket.

[0011]

[0011] The cross-sectional shape of the gasket may be T-shaped. The gasket may be made of polyimide. The gasket may be axially symmetric.

[0012]

[0012] When the joint between the fluid flow components is tightened, a joint seal may first be formed between the inner radial connecting surface of at least one of the fluid flow components and the outer radial connecting surface of the gasket before a joint seal is formed along the axial direction between the fluid flow component and the gasket.

[0013]

[0013] The two fluid flow components can both be tubes defining an inner diameter that defines an axial flow path. Alternatively, a first of the fluid flow components can be a tube defining an inner diameter that defines the axial flow path, and a second of the fluid flow components can be a fluid stop device configured to prevent fluid from passing therethrough. The first fluid flow component can be an adapter, and the second fluid flow component can be a target material fluid reservoir, and the adapter can be positioned between the target material fluid reservoir and the nozzle delivery apparatus. The adapter can be made of molybdenum rhenium, and the gasket can be made of polyimide.

[0014]

[0014] The coupling device may further include a functional insert disposed within the inner opening of the gasket, the functional insert including an inner opening that is part of the axial flow path, the functional insert inner opening having a diameter smaller than that of the inner opening of the gasket. The functional insert may be made of a material compatible with the target material fluid. The functional insert may be made of tantalum, tungsten, molybdenum, a tantalum alloy, a tungsten alloy, a molybdenum alloy, a refractory metal, or polyimide. The functional insert may be made of boron carbide or a metal coated with a tin-phobic material. The diameter of the inner opening of the gasket may be at least as large as the inner opening of the adapter that defines the axial flow path, and may be small enough to axially support the functional insert therein. The functional insert may be a flow restriction, and the diameter of the inner opening of the flow restriction may be small enough to allow a restricted flow of the target material fluid when subjected to a target material fluid flow pressure above a threshold, and may be smaller than the diameter of the axial flow path and larger than a minimum diameter of the flow path of the nozzle supply. The functional insert may be a flow restriction, the first fluid flow component may be an adapter, and the second fluid flow component may be a target material fluid reservoir, and the adapter may be positioned between the target material fluid reservoir and the nozzle supply.

[0015] In another general aspect, a target material supply apparatus includes first and second fluid flow components that, when joined, define an axial flow path, the axial flow path being between a source of target material fluid and a nozzle supply apparatus and configured to direct the target material fluid toward the nozzle supply apparatus, and a coupling apparatus configured to seal the joint between the first and second fluid flow components. The coupling apparatus may include a gasket made of a material other than a metal or metal alloy that is compatible with and inert to the target material fluid.

[0016]

[0016] Embodiments can include one or more of the following features. For example, the target material fluid can include molten tin and the gasket can be made of polyimide. The gasket can be made of a material that maintains sealing properties at temperatures greater than 200°C and fluid flow pressures greater than 3000 PSI. The gasket can be made of a material that maintains sealing properties at fluid flow pressures greater than 10,000 PSI. The gasket can be positioned between first and second fluid flow components such that the seal formed by the gasket improves as the fluid flow pressure increases.

[0017] The target material supply apparatus may further include a support component having a gasket disposed therein, the support component configured to provide a hard stop along the axial flow path. The support component may have a thermal expansion coefficient that matches the thermal expansion coefficients of the materials of the first and second fluid flow components. The target material supply apparatus may further include a support component having a gasket disposed therein, the support component configured to prevent the gasket from being extruded away from the axial flow path and losing its seal, the support component may be made of a material stronger than the material of the gasket. The target material supply apparatus may further include a support component having a gasket disposed therein, the support component may be made of a nickel-cobalt-iron alloy or an alloy of one or more of nickel, cobalt, iron, titanium, aluminum, magnesium, copper, molybdenum, and tungsten. The target material supply apparatus may further include a support component having a gasket disposed therein, the support component may be made of a material having a stiffness 2 to 100 times greater than the stiffness of the material of the gasket.

[0018] The first fluid flow component may be an adapter, the second fluid flow component may be a target material fluid reservoir, and the adapter may be positioned between the target material fluid reservoir and the nozzle delivery device. The adapter may be made of molybdenum rhenium, and the gasket may be made of polyimide.

[0019]

[0019] The target material supply apparatus may further include a functional insert disposed within the inner opening of the gasket, the functional insert including an inner opening that is part of the axial flow path, the functional insert inner opening having a diameter smaller than the diameter of the inner opening of the gasket. The functional insert may be made of a material compatible with the target material fluid. The functional insert may be made of tantalum, tungsten, molybdenum, a tantalum alloy, a tungsten alloy, a molybdenum alloy, a refractory metal, or polyimide. The functional insert may be made of boron carbide or a metal coated with a tin-phobic material. The diameter of the inner opening of the gasket may be at least as large as the inner opening of the adapter that defines the axial flow path, and may be small enough to axially support the functional insert therein. The functional insert may be a flow restriction, and the diameter of the inner opening of the flow restriction may be small enough to allow a limited flow of the target material fluid when subjected to a target material fluid flow pressure above a threshold, and may be smaller than the diameter of the axial flow path and larger than a minimum diameter of the flow path of the nozzle supply. The first fluid flow component may be an adapter, and the second fluid flow component may be a target material fluid reservoir, and the adapter may be positioned between the target material fluid reservoir and the nozzle supply.

[0020] In another general aspect, a coupling device is configured to seal a junction between a reservoir holding a target material fluid and an adapter configured to fluidly connect the reservoir to a nozzle feeder. The coupling device extends an axial flow path from the reservoir to the nozzle feeder through which the target material fluid can traverse. The coupling device includes a gasket having an annular shape defining an inner opening with a diameter along a radial plane perpendicular to the axial flow path, the gasket inner opening diameter being large enough to allow fluid to pass through the gasket, the gasket inner opening extending the axial flow path, and a functional insert located within the gasket inner opening. The functional insert includes an inner opening that is part of the axial flow path. The functional insert inner opening has a diameter smaller than the diameter of the gasket inner opening. When the gasket is located between the reservoir and the adapter to seal the junction formed by attaching the reservoir and the adapter, pressure exerted on the gasket from fluid traversing the gasket inner opening along the axial flow path improves the sealing function of the seal at the junction.

[0021]

[0021] Implementations can include one or more of the following features: For example, the coupling device can further include a support component in which the gasket is disposed, the support component having an annular shape defining an inner opening having a diameter along a radial surface, the inner opening of the support component being larger than an outer diameter of the gasket.

[0022] In another general aspect, an isolation coupling device is configured to seal a junction between first and second fluid flow components. The isolation coupling device extends an axial flow path from a reservoir to a nozzle supply device through which a target material fluid can traverse. The isolation coupling device includes an isolation gasket having an annular shape defining an inner opening with a diameter along a radial plane perpendicular to the axial flow path, the isolation gasket inner opening diameter being large enough to allow fluid to pass through the isolation gasket. The gasket inner opening extends the axial flow path. The isolation gasket is made of a material that is both phobic and compatible with the target material fluid. When the isolation gasket is positioned between the first and second fluid flow components to seal the junction formed by attaching the first and second fluid flow components, pressure applied to the isolation gasket from fluid traversing the gasket inner opening along the axial flow path enhances the sealing function of the seal at the junction. [Brief explanation of the drawings]

[0023] [Figure 1]

[0023] FIG. 1 is a block diagram of a coupling device configured to seal a junction between first and second fluid flow components that define an axial flow path that a fluid can traverse. [Figure 2A]

[0024] 2 is a schematic cross-sectional view of the embodiment of the coupling device of FIG. 1 positioned between a first fluid flow component and a second fluid flow component forming a junction. [Figure 2B]

[0025] 2B is a close-up cross-sectional view of the interface in the coupling device of FIG. 2A. [Figure 3A]

[0026] 2B is a perspective view of an embodiment of a gasket in the coupling device of FIG. 2A. [Figure 3B]

[0027] FIG. 3B is a cross-sectional side view of the gasket of FIG. 3A. [Figure 3C]

[0028] FIG. 3B is a top view of the gasket of FIG. 3A. [Figure 4A]

[0029] 2B is a perspective view of an embodiment of a support component of the coupling device of FIG. 2A. [Figure 4B]

[0030] FIG. 4B is a cross-sectional side view of the support component of FIG. 4A. [Figure 4C]

[0031] FIG. 4B is a top view of the support component of FIG. 4A. [Figure 5A]

[0032] FIG. 2B is a close-up cross-sectional view of the interface in the coupling device of FIG. 2A , where the bond is initially formed and the pressure-activated interface engages after the coupling device is placed between the first and second fluid flow components and the force applied to the opposing first and second fluid flow components exceeds a low value LV. [Figure 5B]

[0033] FIG. 2B is a close-up cross-sectional view of the interfaces in the coupling device of FIG. 2A , showing the bond initially formed, the coupling device placed between the first and second fluid flow components, the pressure-activated interfaces engaging, and further, the axial interfaces engaging in the region between the outer planar surface of the gasket and the glands of the first and second fluid flow components after the force applied to the opposing first and second fluid flow components exceeds intermediate value IV. [Figure 5C]

[0034] FIG. 2B is a close-up cross-sectional view of the interfaces in the coupling device of FIG. 2A , showing the bond initially being formed, the coupling device being placed between the first and second fluid flow components, the pressure activated interfaces engaging, the axial interfaces engaging, and the stop interfaces engaging after the force applied to the opposing first and second fluid flow components exceeds an upper limit UV. [Figure 6A]

[0035] 2 is a cross-sectional side view of the embodiment of the coupling device of FIG. 1 configured to seal the junction between the first and second fluid flow components. [Figure 6B]

[0036] 6B is a perspective view of a gasket in the coupling device of FIG. 6A. [Figure 7A]

[0037] 2 is a cross-sectional side view of the embodiment of the coupling device of FIG. 1 configured to seal the junction between the first and second fluid flow components. [Figure 7B]

[0038] 7B is a perspective view of a gasket in the coupling device of FIG. 7A. [Figure 8]

[0039] 1 is a schematic diagram of a target material supply apparatus, an embodiment of a coupling device configured to seal a joint between first and second fluid flow components that define an axial flow path between a source of target material flow and a nozzle supply apparatus. [Figure 9]

[0040] 9 is a schematic diagram of the target material supply system of FIG. 8, in which the nozzle supply system supplies a target stream (created from the target material stream) to the EUV light source. [Figure 10]

[0041] 2 is a block diagram of an embodiment of the coupling device of FIG. 1 including an insert (which may be a flow restrictor and / or a separation insert) located within the gasket. [Figure 11A]

[0042] 11 is a cross-sectional side view of the embodiment of the flow restricting coupling device of FIG. 10 positioned in a nozzle feeder between a nozzle assembly and a target material fluid reservoir. [Figure 11B]

[0043] FIG. 11B is a detailed cross-sectional side view of the flow-restricting coupling device of FIG. 11A. [Figure 12A]

[0044] FIG. 11C is a side cross-sectional view of the flow restricting coupling device of FIGS. 11A and 11B during normal operation. [Figure 12B]

[0045] 11C is a side cross-sectional view of the flow-restricting coupling of FIGS. 11A and 11B during flow-restricting operation. FIG. [Figure 13]

[0046] 12C is a side cross-sectional view of an embodiment of a flow restrictor and gasket of the flow restricting coupling of FIGS. 10-12B. FIG. [Figure 14] 10-12C are side cross-sectional views of embodiments of flow restrictors and gaskets of the flow restricting couplings of FIGS. 10-12B. [Figure 15] 10-12C are side cross-sectional views of embodiments of flow restrictors and gaskets of the flow restricting couplings of FIGS. 10-12B. [Figure 16]

[0047] 11 is a detailed cross-sectional side view of an embodiment of the coupling device of FIG. 10 in which the functional insert is a separation insert. [Figure 17]

[0048] 11 is a detailed cross-sectional side view of an embodiment of the coupling device of FIG. 10 in which the functional insert is a separate insert and the gasket is a single element. DETAILED DESCRIPTION OF THE INVENTION

[0024]

[0049] Referring to FIG. 1 , the coupling device 100 is configured to seal a joint 120 between first and second fluid flow components 122, 126. The joint 120 is formed by applying a force 124 along an axial direction 131 parallel to the Z-axis of an X, Y, Z Cartesian coordinate system to attach the first and second fluid flow components 122, 126. The joint 120 can be a detachable connection, i.e., comprised of components that can be separated from one another. Any suitable mechanical device or devices can be used to apply the force 124. In some embodiments, the mechanical device is detachable or separable, meaning that it forms a non-permanent joint 120. Thus, the force 124 applied by the mechanical device can be removed without damaging the joint 120. For example, the force 124 can be applied using a threaded fastener, a pin, a retaining ring, or a clamp. The first and second fluid flow components 122, 126 define an axial flow path 130 through which a fluid 132 can traverse. The axial flow path 130 extends along the axial direction 131. The coupling device 100 is robust, and its functionality improves as the pressure of the fluid 132 across the axial flow path 130 increases. The coupling device 100 is a passive device, meaning that the coupling device 100 does not require additional energy to operate as a sealing mechanism. In this manner, the coupling device 100 provides a passive, pressure-activated seal.

[0025]

[0050] The coupling device 100 includes a gasket 105 and a support component 110. The gasket 105 has an annular shape with a center of the shape aligned with an axial direction 131. Specifically, the cross section of the gasket in a radial plane (XY plane) is annular. This annular shape of the gasket 105 defines an inner opening 106, and the diameter ID 105 of the inner opening 106 is along a radial plane (XY plane) perpendicular to the axial direction 131. The diameter ID 105 of the inner opening 106 is large enough to allow a fluid 132 to pass through the gasket 105 (i.e., through the inner opening 106 of the gasket 105). The inner opening 106 extends an axial flow path 130 of one or both of the first and second fluid flow components 122, 126.

[0026]

[0051] The gasket 105 is disposed on a support component 110. The support component 110 has an annular shape that matches or complements the shape of the gasket 105. The support component 110 defines an inner opening 111 having a diameter ID 110 along a radial plane (XY plane), which is greater than an outer diameter OD 105 of the gasket 105. When the gasket 105 is placed between first and second fluid flow components 122, 126 and a bond 120 is formed by applying a force 124 to attach the first and second fluid flow components 122, 126, a force Pf applied to the gasket 105 by a fluid 132 traversing the inner opening 106 improves the sealing function of the seal at the bond 120. Specifically, this means that as the pressure Pf increases, the seal at the bond 120 becomes better able to prevent the fluid 132 from passing through the bond. Thus, as the pressure Pf increases, leakage of the fluid 132 through the junction 120 decreases. The pressure Pf exerted on the gasket 105 by the flow of the fluid 132 through the junction 120 is different from the pressure exerted on the gasket 105 by the forces 124 exerted on the first and second fluid flow components 122, 126. In other words, the pressure Pf exerted on the gasket 105 results from the force of the fluid 132 through the junction 120, not the forces 124 exerted on the first and second fluid flow components.

[0027]

[0052] The gasket 105 is defect and process robust, meaning that its material can conform and deform well to accommodate material variations in the joint 120 and seal well against such variations (similar to a rubber part). However, the gasket 105 material has more suitable properties than rubber parts traditionally used in rubber O-rings. For example, the gasket 105 material is stronger than a typical rubber O-ring. The gasket 105 material is thermally stable, meaning that its sealing properties do not change significantly with temperature changes occurring in the joint 120. Such temperature changes occur, in part, due to the temperature at which the fluid 132 is maintained (to keep the fluid 132 in a non-solid form). The design and materials of the gasket 105 are such that tightening the joint 120 is a robust process that produces a more consistent joint 120 within torque and rotation specifications. The gasket 105 can withstand large elastic strains and accommodate mounting expansion of several micrometers that may occur when the pressure Pf increases or an external load such as force 124 is applied.

[0028]

[0053] The gasket 105 is made of a material that is compatible with and non-reactive with the material of the fluid 132 that will be in contact with the gasket 105. Furthermore, the material of the gasket 105 can withstand the temperatures at which the fluid 132 must be maintained. For example, if the fluid 132 contains liquid tin, the gasket 105 must be made of a material that can withstand an operating temperature of at least 200°C, since tin melts at 232°C and is maintained at 260°C to ensure it remains liquid. The material of the gasket 105 must also be able to withstand the pressure Pf exerted on the gasket 105 by the fluid 132. To this end, the material of the gasket 105 must be able to withstand a pressure Pf of approximately 3,000 pounds per square inch (PSI) or greater. Furthermore, the gasket 105 can be made of a material that maintains its sealing properties at fluid flow pressures Pf exceeding 10,000 PSI. That is, the gasket 105 will not crack or split, causing leakage, even when the fluid flow pressure Pf exceeds 10,000 PSI. The gasket 105 must be sufficiently compliant, deformable, and flexible to compress when an increased force 124 is applied to join the first and second fluid flow components 122, 126. The gasket 105 can be removed from the joint 120 without damaging the other components (e.g., the first and second fluid flow components 122, 126) that make up the joint 120. That is, the gasket 105 is configured to be separable from the joint 120. For example, in some embodiments, the gasket 105 is made of a polyimide-based plastic such as Vespel™.

[0029]

[0054] 1, the support component 110 may be a separate, dedicated piece from the first and second fluid flow components 122, 126. In other embodiments, discussed below with reference to Figures 6A and 7A, the support component 110 may be part of or integral with one or more of the fluid flow components.

[0030]

[0055] The support component 110 surrounds the gasket 105 and can provide one or more of the following functions: First, the support component 110 provides radial support, meaning that it acts as a stop along the radial direction (in the XY plane) for the gasket 105. When pressure Pf is applied to the gasket 105, the gasket 105 may deform and begin to extrude away from the inner opening 106. The support component 110 prevents the gasket 105 from extruding away from the inner opening 106, thus reducing the failure rate of the gasket 105. Second, the support component 110 provides an axial stop, increasing the force 124 applied to the first and second fluid flow components 122, 126 and limiting axial compression on the gasket 105 caused by tightening the joint 120. At some point during compression, the first and second fluid flow components 122, 126 are prevented from moving towards each other due to the hard stop provided by the support component 110.

[0031]

[0056] Because the support component 110 provides these support functions, it is made of a material that is stiffer than the material of the gasket 105. In particular, the support component 110 may be made of a material that has a stiffness that is 5 to 100 times greater than the stiffness of the material of the gasket 105. In other words, the material of the support component 110 is significantly less elastic than the material of the gasket 105. Therefore, when the same amount of stress is applied, the gasket 105 deforms 5 to 100 times more than the support component 110. Furthermore, because the support component 110 is close to the first and second fluid components 122, 126, it may have a thermal expansion coefficient that is compatible with the thermal expansion coefficients of the materials used in the first and second fluid flow components 122, 126. For example, the thermal expansion coefficient mismatch between the support component 110 and the first and second fluid flow components 122, 126 may be equal to the difference in thermal expansion coefficients divided by the total axial length of the portion of the support component 110 positioned between the first and second fluid components 122, 126.

[0032]

[0057] The support component 110 can be sized to align the gasket 105 with the first and second fluid flow components 122, 126 around the complex geometry of the gasket 105 to ensure a proper seal at the joint 120. The support component 110 also includes features to retain the gasket 105 and accessories (such as the second annular ring portion 213 in FIG. 2B ) to facilitate assembly in any orientation.

[0033]

[0058] If the gasket 105 is made of a polyimide-based plastic, the support component 110 can be made of an alloy of one or more of nickel, cobalt, iron, titanium, aluminum, magnesium, copper, molybdenum, and tungsten, hi some embodiments, the support component 110 is made of a nickel-cobalt-iron alloy such as Kovar.

[0034]

[0059] The first and second fluid flow components 122, 126 include internal passages 122p, 126p, respectively, through which the fluid 132 passes. These internal passages 122p, 126p define the axial flow path 130. One or more of the internal passages are through passages that allow the fluid 132 to pass between the fluid flow components 122, 126 and another device other than the coupling apparatus 100. As shown in FIG. 1 , the first fluid flow passage 122p is a through passage because it passes entirely through the first fluid flow component 122 from the inner opening 106 of the gasket 105. Furthermore, in the embodiment of FIG. 1 , the second fluid flow passage 126p is a dead-end; that is, it is open at one end (the inner opening 106 of the gasket 105) but does not penetrate to the other side of the second fluid flow component 126. As such, the second fluid flow component 126 is considered a fluid stop device because it prevents the passage of the fluid 132.

[0035]

[0060] In some embodiments, both the first and second fluid flow components 122, 126 have internal passages 122p, 126p, respectively, that are through-passages. An example of such a mechanism will now be discussed with reference to Figures 2A and 2B.

[0036]

[0061] 2A and 2B, an embodiment 200 of the coupling device 100 is shown. The coupling device 200 is disposed between a first fluid flow component 222 and a second fluid flow component 226 that form a junction 220. Both the first fluid flow component 222 and the second fluid flow component 226 include passages 222p, 226p that are through openings. The first fluid flow component 222 is T-shaped, and the passage 222p is a T-shaped passage.

[0037]

[0062] The first fluid flow component 222 includes a first annular protrusion or restraint 223 that extends axially toward the second fluid flow component 226 when the joint 220 is formed, and the second fluid flow component 226 includes a second annular protrusion or restraint 227 that extends axially toward the first fluid flow component 222 when the joint 220 is formed. The restraints 223, 227 define inner radial connecting surfaces 223s, 227s, respectively, that face the axial flow passage 230.

[0038]

[0063] 3A-3C, the coupling device 200 includes a gasket 205 having an inner opening 206 that is fluidly coupled to the passages 222p, 226p when installed in the junction 220. The diameter ID 205 of the inner opening 206 is large enough to allow the fluid 132 to pass through the gasket 205 when installed in the junction 220. The gasket 205 has a shape with a varying axial length La, where La is the length of the gasket 205 along the axial direction 231 of fluid flow in the coupling device 200. Specifically, the axial length La closest to the axial flow passage 230 (and inner opening 206) (when the gasket 205 is installed in the junction 220) is greater than the axial length La furthest from the axial flow passage 230. The gasket 205 has a T-shaped cross-section along the XZ plane.

[0039]

[0064] In some embodiments, for ease of assembly and tolerability to errors, gasket 205 is axially symmetric, meaning symmetric about an axial plane (in the XY plane) that passes through the center of gasket 205. In some embodiments, gasket 205 may also be axially symmetric, i.e., rotationally symmetric about axial direction 231, as shown, for example, in Figures 3A-3C. In other embodiments, gasket 205 may not be axially symmetric, and thus may have a cross-sectional shape other than circular (e.g., polygonal, elliptical, oval, oval, etc.).

[0040]

[0065] Gasket 205 has a pair of opposing inner annular planar surfaces 207a, 207b and a pair of opposing outer planar surfaces 208a, 208b, each of which is connected by a cylindrical intermediate surface 209a, 209b (each of which may be considered an outer radial connecting surface).

[0041]

[0066] 4A-4C, coupling device 200 includes a support component 210 having an inner opening 211 defined by a first annular ring portion 212. Inner opening 211 is large enough to accommodate gasket 205 when coupling device 200 is placed in joint 220. Specifically, inner opening 211 has a diameter ID 210 (along the radial XY plane) that is larger than the outer diameter OD 205 of gasket 205. Support component 210 also includes a second annular ring portion 213 that is disposed about a cylindrical surface 229 of second fluid flow component 226 (as shown in FIG. 2B).

[0042]

[0067] When coupling device 200 is inserted into joint 220, several interfaces are formed at various surfaces and along different directions. Furthermore, these interfaces can engage at different times depending on how much force 124 is applied. Any suitable, removable or separable mechanical device can be used to apply force 124 to first and second fluid components 222, 226, and can be removed to remove first and second fluid components 222, 226. By way of example, force 124 can be applied using one or more clamps or one or more threaded fasteners.

[0043]

[0068] 5A , when the bond 220 is first formed, after the coupling device 200 is installed between the first and second fluid flow components 222, 226, the pressure-activated interfaces 215, 216 engage when the force 124 applied to the opposing first and second fluid flow components 222, 226 exceeds a low value LV. These pressure-activated interfaces 215, 216 engage through the interaction of the cylindrical intermediate surfaces 209 a, 209 b with the inner radial connecting surfaces 223 s, 227 s of the adjacent retaining portions 223, 227. At this point, the opposing outer planar surfaces 208 a, 208 b of the gasket 205 are disposed or positioned between the retaining portions 223, 227, with the outer planar surface 208 a facing the retaining portion 222 and the outer planar surface 208 b facing the retaining portion 227. Nevertheless, since the force 124 has not yet exceeded the intermediate value IV, a gap remains between the outer flat surface 208a and the retaining portion 223, and between the outer flat surface 208b and the retaining portion 227, respectively.

[0044]

[0069] 5B, as force 124 increases and exceeds intermediate value IV, the axial distance between surface 208a and retainer 223 and the axial distance between surface 208b and retainer 227 decrease. Eventually, when outer planar surface 208a begins to contact retainer 223 and outer planar surface 208b begins to contact retainer 227, axial interfaces 224, 228 engage in the regions between outer planar surfaces 208a, 208b and retainer portions 223, 227.

[0045]

[0070] As force 124 continues to increase beyond upper value UV, the axial distance between flat surface 212a of first annular ring portion 212 and axial wall 222a of first fluid flow component 222 decreases, eventually engaging stop interface 233, as shown in FIG. 5C . Additionally, at or before this point, the axial distance between second flat surface 212b of first annular ring portion 212 and axial wall 226b of second fluid flow component 226 may engage. The net result is that these interactions between first annular ring portion 212 and first and second fluid flow components 222, 226 act as stops that prevent further or excessive compression of gasket 205 at interfaces 215, 216, 224, and 228. In this regard, the gasket 205 is recessed at the opposing outer planar surfaces 208 a, 208 b between the restraints 223, 227 by the maximum amount allowed by the support component 210, and in particular by the mating stop interface 233. The amount of recession allowed for the gasket 205 at the opposing outer planar surfaces 208 a, 208 b is determined by the axial length of the annular ring portion 212 of the support component 210. In some embodiments, the gasket 205 may be allowed to compress at the opposing outer planar surfaces 208 a, 208 b by an amount of up to 25%. The maximum amount of compression of the gasket 205 at the opposing outer planar surfaces 208 a, 208 b may be determined with the goal of avoiding a strain limit imposed on the gasket 205.

[0046]

[0071] Thus, when the joint 220 between the first and second fluid flow components 222, 226 is tightened, a joint seal is first formed between the inner radial connecting surfaces 223s, 227s of the retainers 223, 228 facing the axial flow passage 230 of at least one of the fluid flow components (222 or 226) and the outer radial connecting surfaces (surfaces 209a and / or 209b) of the gasket 205, as shown in Figure 5A. Thereafter, a joint seal is formed along the axial direction between the fluid flow components 222, 226 and the gasket 205, as shown in Figure 5B.

[0047]

[0072] Referring to FIG. 6A, another embodiment 600 of coupling device 100 is configured to seal a junction 620 between first and second fluid flow components 622, 626 that defines an axial flow passage 630 extending along an axial direction 631 parallel to the Z-axis of an X, Y, Z Cartesian coordinate system. The coupling device 600 includes a gasket 605 (also shown in FIG. 6B) that defines an inner opening 606 that extends the axial flow passage 630 defined by the first and second fluid flow components 622, 626. The coupling device 600 includes a support component 610 that, in this embodiment, is both an extension of and part of the first fluid flow component 622. This distinguishes it from the embodiment shown in FIGS. 2A and 2B, in which the support component 210 is separate from both the first and second fluid flow components 222, 226. Similar to coupling devices 100 or 200, the coupling device 600 provides a passive pressure-activated seal. Specifically, gasket 605 is made of a material such as polyimide that improves the sealing ability of the seal at junction 620 when pressure Pf is applied to gasket 605 from a fluid (such as fluid 132) traversing inner opening 606. In other words, as pressure Pf increases, the seal at junction 620 becomes better able to prevent fluid from passing through junction 620.

[0048]

[0073] 6A, the first and second fluid flow components 622, 626 are joined using clamping devices 634, 636 configured to engage one another. The clamping devices 634, 636 clamp the interface of the interface 635, such that the clamping of the interface 635 applies a force 624 to the first and second fluid flow components 622, 626, thereby clamping the interface 620.

[0049]

[0074] As discussed above, during operation with fluid flow through axial flow passage 630 and inner opening 606, the radial stop provided by support component 610 prevents gasket 605 from being pushed out of inner opening 606 and losing its sealing ability.

[0050]

[0075] 7A, another embodiment 700 of the coupling device 100 is configured to seal a junction 720 between first and second fluid flow components 722, 726 that define an axial flow passage 730 extending along an axial direction 731 parallel to the Z-axis of an X, Y, Z Cartesian coordinate system. The coupling device 700 includes a gasket 705 (also shown in FIG. 7B) that defines an inner opening 706 that is fluidly coupled to and extends the axial flow passage 730 defined by the first and second fluid flow components 722, 726. The coupling device 700 includes a support component 710 that, in this embodiment, is an extension of and part of the first fluid flow component 722 and the second fluid flow component 726. 2A and 2B, in which support component 210 is separate from both first and second fluid flow components 222, 226, and from the embodiment shown in FIG. 6A, in which support component 710 is an extension of and part of only first fluid flow component 622. Similar to coupling devices 100, 200, and 600, coupling device 700 provides a passive pressure-activated seal. Specifically, gasket 705 is made of a material such as polyimide, which improves the sealing ability of the seal at junction 720 when pressure Pf (FIG. 1) is applied to gasket 705 from a fluid (such as fluid 132) traversing inner opening 706. Stated another way, as pressure Pf increases, the seal at junction 720 becomes better able to prevent fluid from passing through junction 720.

[0051]

[0076] 7A, the first and second fluid flow components 722, 726 are joined using clamping devices 734, 736 configured to engage one another. The clamping devices 734, 736 clamp the interface of the bond 735, such that the clamping of the bond 735 applies a force 724 to the first and second fluid flow components 722, 726, thereby clamping the bond 720.

[0052]

[0077] As discussed above, during operation with fluid flow through axial flow passage 730 and inner opening 706, the radial stop provided by support component 710 prevents gasket 705 from being pushed out of inner opening 706 and losing its sealing ability.

[0053]

[0078] 8 , coupling apparatus 800 is configured to seal a junction 820 between first and second fluid flow components 822, 826 that are part of a target material supply apparatus 840. When coupled, first and second fluid flow components 822, 826 define an axial flow passage 830. Axial flow passage 830 is a fluid flow passage between a source 842 of target material fluid 832 and a nozzle supply apparatus 844. Axial flow passage 830 is configured to route target material fluid 832 toward nozzle supply apparatus 844. Coupling apparatus 800 includes a gasket 805 made of a material other than a metal or metal alloy. Gasket 805 is compatible with and inert to target material fluid 832.

[0054]

[0079] The gasket 805 can have an annular shape that, when installed and sealed within the junction 820, defines an inner opening 806 that is part of and extends the axial flow path 830. Furthermore, when the gasket 805 is installed between the first and second fluid flow components 822, 826, thereby sealing the junction 820 formed by attaching the first and second fluid flow components 822, 826, a force Pf exerted on the gasket 805 from the target material fluid 832 traversing the gasket inner opening 806 along the axial flow path 830 improves the sealing function of the seal at the junction 820.

[0055]

[0080] The target material supply apparatus 840 may include a fluid flow system 846 positioned between the target material fluid source 842 and the first fluid flow component 822 to transport the target material fluid 832 from the source 842 to the first fluid flow component 822. The fluid flow system 846 may include one or more fluid flow components. Additionally, the target material supply apparatus 840 may include a fluid flow system 848 positioned between the second fluid flow component 826 and the nozzle feeder 844 to transport the target material fluid 832 from the second fluid flow component 826 to the nozzle feeder 844. The fluid flow system 848 may include one or more fluid flow components.

[0056]

[0081] The target material fluid source 842 may include one or more reservoir systems, a priming system configured to prepare the target material fluid 832 from a solid substance, one or more fluid regulating devices, and a fluid control system for controlling aspects of the source 842 to generate and deliver the target material fluid 832.

[0057]

[0082] Nozzle supply apparatus 844 is configured to receive target material fluid 832 from second fluid flow component 826 via optional fluid flow component set 848, and is further configured to supply target material fluid 832 in the form of target stream 850 to external system 852. Target material supply apparatus 840 can also be configured to supply target material fluid 832 to nozzle supply apparatus 844 during continuous operation of nozzle supply apparatus 844 (i.e., while nozzle supply apparatus 844 is supplying target material fluid 832 to external system 852).

[0058]

[0083] 9, the external system 852 is an EUV light source 952, and the nozzle feeder 844 emits a target stream 850 of target material fluid 832 such that targets 932p are delivered to a plasma formation location 954 within a vacuum chamber 956. Each target 850 is delivered to the plasma formation location 954 by delivering molten target material fluid 832 through a nozzle assembly 845 of the nozzle feeder 844, pushing the target 850 along a trajectory toward the plasma formation location 954. In some embodiments, the target 850 can be guided to the plasma formation location 954 by a force.

[0059]

[0084] The plasma formation location 954 can receive at least one light beam 958 generated by a light source 959 and transmitted via a light path 955 to a vacuum chamber 956. Interaction of the light beam 958 with the target material of the target 932p generates a plasma that emits EUV light 953, which is collected 951 and transmitted to a lithography exposure tool 957. In this example, the target material fluid 832 can be any material that, when in a plasma state, emits EUV light 953. For example, the target material fluid 832 can include water, tin, lithium, xenon, and / or any material that has an emission line in the EUV range when converted to a plasma state. For example, the target material can be elemental tin, which can be used as pure tin (Sn), as a tin compound such as SnBr4, SnBr2, SnH4, or as a tin alloy such as a tin-gallium alloy, a tin-indium alloy, a tin-indium-gallium alloy, or a combination of these alloys.

[0060]

[0085] Lithography exposure tool 957 uses this EUV light 953 to create a pattern on the wafer using any number of process steps, which may be one or more combinations of process steps, such as etching, deposition, and lithography processes using different masks to create a pattern of openings (trenches, channels, holes, etc.) in the material of the wafer or in materials deposited on the wafer.

[0061]

[0086] Use of the coupling apparatus 800 in the target material supply apparatus 840 results in increased power output and performance from the EUV light source 952, including reduced failures in the target material supply apparatus 840 and reduced downtime for operating the EUV light source 952. Such improvements are a result of the nozzle supply apparatus 844 providing a continuous and adjustable flow of targets 850. In particular, because the coupling apparatus 800 is more robust than conventional devices for sealing the junction 820, the pressure applied to the target material fluid 832 within the target material supply apparatus 840 can be adjusted and increased, as the coupling apparatus 800 is less likely to fail at high fluid pressures Pf.

[0062]

[0087] Referring to FIG. 10 , an embodiment 1000 of a coupling device 100 is configured to provide additional functionality (e.g., flow restriction and / or separability) to a joint 1020. To this end, the coupling device 1000 includes an embodiment 1005 of a gasket 105 configured to receive and seat a functional insert 1060 that may function, for example, as a flow restrictor or a breakaway insert. The joint 1020 is formed by attaching first and second fluid flow components 1022, 1026 with a force 1024 applied along an axial direction 1031 parallel to the Z-axis of an X, Y, Z Cartesian coordinate system. Like the joint 120, the joint 1020 can also be releasably connected, i.e., comprised of components that can be separated from one another. Like the force 124, any suitable mechanical device or devices can be used to apply the force 1024. Similarly, the force 1024 applied by the mechanical device can be removed without damaging the joint 1020. For example, the force 1024 can be applied using a threaded fastener, a pin, a retaining ring, or a clamp.

[0063]

[0088] The first and second fluid flow components 1022, 1026 define an axial flow path 1030 through which a fluid 1032 can traverse. The axial flow path 1030 extends along an axial direction 1031. The coupling device 1000 is robust, and the functionality of the coupling device 1000 increases as the pressure of the fluid 1032 traversing the axial flow path 1030 increases. The coupling device 1000 is a passive device, meaning that the coupling device 1000 does not require additional energy to operate as a sealing mechanism. In this manner, the coupling device 1000 provides a passive, pressure-activated seal.

[0064]

[0089] The coupling device 1000 includes a gasket 1005, a functional insert 1060, and a support component 1010. The annular shape of the gasket 1005 (similar to gasket 105) defines an inner opening 1006, the diameters of which (diameters ID1005_1 and ID1005_2, discussed below) lie along a radial plane (XY plane) perpendicular to the axial direction 1031. The inner opening 1006 extends an axial flow path 1030 of one or both of the first and second fluid flow components 1022, 1026.

[0065]

[0090] The gasket 1005 is disposed on a support component 1010 that is similar in design to the support component 110. As discussed above, the support component 1010 has an annular shape that matches or complements the shape of the gasket 1005. When the gasket 1005 is placed between first and second fluid flow components 1022, 1026 and a junction 1020 is formed by applying a force 1024 to attach the first and second fluid flow components 1022, 1026, the force Pf exerted on the gasket 1005 by the fluid 1032 traversing the inner opening 1006 improves the sealing function of the seal at the junction 1020. Specifically, this means that as the pressure Pf increases, the seal at the junction 1020 becomes better able to prevent the fluid 1032 from passing through the junction. Thus, as the pressure Pf increases, leakage of the fluid 1032 through the junction 1020 decreases. The pressure Pf exerted on the gasket 1005 by the flow of the fluid 1032 through the junction 1020 is different from the pressure exerted on the gasket 1005 by the forces 1024 exerted on the first and second fluid flow components 1022, 1026. In other words, the pressure Pf exerted on the gasket 1005 results from the force of the fluid 1032 through the junction 1020, not the forces 1024 exerted on the first and second fluid flow components.

[0066]

[0091] Like gasket 105, gasket 1005 is defect and process robust. This means that the gasket 1005 material can conform and deform well to accommodate material variations in joint 1020 and seal well against such variations (similar to a rubber part). However, the gasket 1005 material has more suitable properties than rubber parts traditionally used in rubber O-rings. For example, the gasket 1005 material is stronger than a typical rubber O-ring. The gasket 1005 material is thermally stable, which means that its sealing properties do not change significantly with temperature changes occurring in joint 1020. Such temperature changes occur, in part, due to the temperature at which fluid 1032 is maintained (to keep fluid 1032 in a non-solid form). The design and materials of gasket 1005 are such that tightening joint 1020 is a robust process that produces a more consistent joint 1020 within torque and rotation specifications. The gasket 1005 can withstand large elastic strains and accommodate mounting expansion of several micrometers that may occur when pressure Pf is increased or an external load such as force 1024 is applied.

[0067]

[0092] The gasket 1005 is made of a material that is compatible with and non-reactive with the material of the fluid 1032 that will be in contact with the gasket 1005. Furthermore, the material of the gasket 1005 can withstand the temperatures at which the fluid 1032 must be maintained. For example, if the fluid 1032 contains liquid tin, the gasket 1005 must be made of a material that can withstand an operating temperature of at least 200°C, since tin melts at 232°C and is maintained at 260°C to ensure it remains liquid. The material of the gasket 1005 must also be able to withstand the pressure Pf exerted on the gasket 1005 by the fluid 1032. To this end, the material of the gasket 1005 must be able to withstand a pressure Pf of approximately 3,000 pounds per square inch (PSI) or greater. Furthermore, the gasket 1005 can be made of a material that maintains its sealing properties at fluid flow pressures Pf exceeding 10,000 PSI. That is, the gasket 1005 will not crack or split, causing leakage, even when the fluid flow pressure Pf exceeds 10,000 PSI. The gasket 1005 must be sufficiently compliant, deformable, and flexible to compress when the force 1024 applied to join the first and second fluid flow components 1022, 1026 is increased.

[0068]

[0093] Gasket 1005 is removable from junction 1020 without damaging other components (such as first and second fluid flow components 1022, 1026) that make up junction 1020. That is, gasket 1005 is configured to be separable from junction 1020. For example, in some embodiments, gasket 1005 is made of a polyimide-based plastic such as Vespel™.

[0069]

[0094] The support component 1010 surrounds the gasket 1005 and can provide one or more of the functions discussed above. Because the support component 1010 provides these support functions, it is made of a material that is stiffer than the material of the gasket 1005. In particular, the support component 1010 can be made of a material that has a stiffness that is 5 to 100 times greater than the stiffness of the material of the gasket 1005. In other words, the material of the support component 1010 is significantly less elastic than the material of the gasket 1005. Therefore, when the same amount of stress is applied, the gasket 1005 will deform 5 to 100 times more than the support component 1010. Furthermore, because the support component 1010 is close to the first and second fluid flow components 1022, 1026, it can have a thermal expansion coefficient that is compatible with the thermal expansion coefficients of the materials used in the first and second fluid flow components 1022, 1026. For example, the mismatch in thermal expansion coefficients between the support component 1010 and the first and second fluid flow components 1022, 1026 may be equal to the difference in thermal expansion coefficients divided by the total axial length of the portion of the support component 1010 positioned between the first and second fluid flow components 1022, 1026.

[0070]

[0095] If the gasket 1005 is made of a polyimide-based plastic, the support component 1010 can be made of an alloy of one or more of nickel, cobalt, iron, titanium, aluminum, magnesium, copper, molybdenum, and tungsten, hi some embodiments, the support component 1010 is made of a nickel-cobalt-iron alloy such as Kovar.

[0071]

[0096] The first and second fluid flow components 1022, 1026 include internal passages 1022p, 1026p, respectively, through which a fluid 1032 passes. These internal passages 1022p, 1026p define an axial flow path 1030.

[0072]

[0097] In some embodiments, the functional insert 1060 is a flow restrictor and can be made of a bulk material that defines the inner opening 1062. Because the flow restrictor 1060 is in direct contact with the target material fluid 1032, the bulk material is compatible with the material of the target material fluid 1032. For example, if the target material fluid 1032 contains tin or a tin alloy, the bulk material of the flow restrictor 1060 can be made of tantalum or a tantalum alloy and machined using conventional machining techniques, such as a lathe or carbide tooling. In other possible embodiments, the bulk material of the flow restrictor 1060 can be made of tungsten, rhenium, molybdenum, chromium, or alloys of these metals. In embodiments in which the target material fluid 1132 contains tin or a tin compound, the flow restrictor 1060 can be made of boron carbide, various metals with tin-phobic coatings, other refractory metals, polyimide, or other suitable materials. In yet another possible embodiment, the bulk material of the flow restriction 1060 is made of ceramic, glass, or silicone.

[0073]

[0098] In another embodiment, the flow restriction 1060 is made from a substrate coated with a material that is compatible with the material of the target material fluid 1032 .

[0074]

[0099] In other embodiments, the functional insert 1060 is a separation insert (as described with reference to FIG. 16 ) and can be made of a material that is compatible with (i.e., does not react with) and phobic to (actively repels) the material of the target material fluid 1032. In such embodiments where the target material fluid 1032 includes tin or a tin compound, the separation insert 1060 can be made of glass, ceramic, boron carbide, a metal with a tin-phobic coating, a high melting point metal such as tantalum, or a polyimide.

[0075]

[0100] In some embodiments, the functional insert 1060 functions as both a flow restrictor and a separation insert. For example, the functional insert 1060 of FIGS. 11A-15 functions as both a flow restrictor and a separation insert because the internal opening 1062 is small enough to provide both flow restrictor functionality and separation capabilities. The functional insert 1060 has separation capabilities if it facilitates separation of the first and second fluid flow components 1022, 1026. Thus, due to the design of the functional insert 1060, the first and second fluid flow components 1022, 1026 can be separated from one another (e.g., to repair a portion of the flow path) without damaging the fluid flow components 1022, 1026. In other embodiments, the functional insert 1060 can function solely as a separation insert, with the internal opening 1062 small enough to provide separation capabilities but not so small as to provide significant flow restrictor functionality. Such designs are described below with reference to FIG. 16.

[0076]

[0101] In the coupling device 1000, the inner opening 1006 of the gasket 1005 is stepped or layered such that it has two distinct inner diameters ID1005_1 and ID1005_2. The smaller diameter ID1005_1 of the inner opening 1006 of the gasket 1005 must be large enough to extend the axial flow path 1030, and the larger diameter ID1005_2 of the inner opening 1006 of the gasket 1005 must be large enough to accommodate the functional insert 1060. Thus, the smaller diameter ID1005_1 of the inner opening 1006 is large enough to allow the fluid 1032 to pass through the gasket 1005 (i.e., through the inner opening 1006 of the gasket 1005). The inner opening 1062 of the functional insert 1060 has a diameter (in the XY plane) that is smaller than both diameters ID1005_1 and ID1005_2 of the inner opening 1006 of the gasket 1005. Furthermore, the smaller diameter ID1005_1 of the inner opening 1006 of the gasket 1005 is at least as large as the diameter of the restrictive inner opening 1062, is at least as large as the diameter of the internal passageway 1022p of the first fluid flow component 1022, and is small enough to axially support the functional insert 1060 at the XY interface 1064 between the gasket 1005 and the flow restrictor 1060.

[0077]

[0102] 11A and 11B, an embodiment 1100 of the coupling device 1000 is shown in which the functional insert 1060 is primarily a flow restrictor 1160, but also provides a separation function. The flow restrictor coupling 1100 is positioned in the nozzle supply device 844 (FIGS. 8 and 9) between a nozzle assembly 1145 (one embodiment of the nozzle assembly 845) and a target material fluid reservoir 1126 (corresponding to the second fluid flow component 1026) that holds the target material fluid 1132. The coupling device 1100 includes a gasket 1105, a flow restrictor 1160, and a support component 1110. The annular shape of the gasket 1105 matches the shape of the flow restrictor 1160, which functions as an insert within the gasket 1105. The gasket 1105 (similar to the gasket 105) defines an inner opening 1106, the diameters of which (such as diameters ID1005_1 and ID1005_2 discussed below) are along a radial plane (XY plane) perpendicular to the axial direction 1131 (defined by the direction of flow of the target material fluid 1132).

[0078]

[0103] An adapter 1122 (one example of a first fluid flow component 1022) is positioned to connect the nozzle assembly 1145 to a target material fluid reservoir 1126. The adapter 1122 includes an internal passage 1122p, and the fluid reservoir 1126 includes an internal passage 1126p, which allow the passage of target material fluid 1132. An internal opening 1106 in the gasket 1105 extends an axial flow path 1130 in one or both of the adapter 1122 and the fluid reservoir 1126. That is, the axial flow path 1130 extends between the adapter 1122 and the fluid reservoir 1126 through the opening 1106 in the gasket 1105.

[0079]

[0104] Nozzle assembly 1145 includes a capillary tube 1147 that receives molten target material fluid 1132, thereby forming a target stream 1150. Each target 1150 can flow along a trajectory within a vacuum chamber (such as vacuum chamber 956) to a plasma formation location 1154. In some embodiments, the targets 1150 can be guided to the plasma formation location 1154 by a force. The plasma formation location 1154 can receive at least one light beam 1158 generated by a light source (such as light source 959). As described above with reference to FIG. 9 , interaction of the light beam 1158 with the target material of the target 1150 generates a plasma that emits EUV light.

[0080]

[0105] Also, as mentioned above, the target material fluid 1132 can include water, tin, lithium, xenon, and / or any material that has an emission line in the EUV range when converted to a plasma state. For example, the target material can be elemental tin, which can be used as pure tin (Sn), as a tin compound such as SnBr4, SnBr2, SnH4, or as a tin alloy such as a tin-gallium alloy, a tin-indium alloy, a tin-indium-gallium alloy, or a combination of these alloys.

[0081]

[0106] The adapter 1122 can be made of a material that is compatible with the material of the target material fluid 1132. Thus, in embodiments in which the target material fluid 1132 includes tin, a tin alloy, or a tin compound, the adapter 1122 can be made of molybdenum or a molybdenum compound, such as molybdenum rhenium.

[0082]

[0107] Similar to the gasket 1005, the inner opening 1106 of the gasket 1105 is stepped or layered such that it has two distinct inner diameters ID1105_1 and ID1105_2. The smaller diameter ID1105_1 of the inner opening 1106 of the gasket 1105 must be large enough to extend the axial flow path 1130, and the larger diameter ID1105_2 of the inner opening 1106 of the gasket 1105 must be large enough to accommodate the flow restrictor 1160 insert therein. Thus, the smaller diameter ID1105_1 of the inner opening 1106 is large enough to allow the fluid 1132 to pass through the gasket 1105 (i.e., through the inner opening 1106 of the gasket 1105). The gasket 1105 includes a pair of opposing flat outer surfaces 1108 a, 1108 b (similar to surfaces 208 a, 208 b of gasket 205). Additionally, the adapter 1122 and the wall of the target material fluid reservoir 1126 each include annular protrusions 1123 and 1127 (similar to the annular protrusions 223, 227 of the first and second fluid flow components 222, 226 described above). The gasket 1105 thus seals against the adapter 1122 and the wall of the target material fluid reservoir 1126 using the pressure-activated features detailed above.

[0083]

[0108] The diameter (in the XY plane) of the inner opening 1162 of the flow restriction 1160 is smaller than both diameters ID1105_1 and ID1105_2 of the inner opening 1106 of the gasket 1105. Furthermore, the smaller diameter ID1105_1 of the inner opening 1106 of the gasket 1105 is at least as large as the diameter of the restrictor inner opening 1162, is at least as large as the diameter of the internal passageway 1122p of the adapter 1122, and is small enough to axially support the flow restriction 1160 at the XY interface 1164 between the gasket 1105 and the flow restriction 1160.

[0084]

[0109] The diameter of the restrictive inner opening 1162 must be large enough to allow a volumetric or mass flow rate of the target material fluid 1132 to pass through, but small enough to limit the flow pressure of the target material fluid 1132 from the target material fluid reservoir 1126 to the nozzle assembly 1145 (through the adapter 1122) if flow pressure restriction is required. In particular, the diameter of the restrictive inner opening 1162 must be at least one-tenth the diameter of the internal passage 1122p of the adapter 1122 (the element downstream of the flow restriction 1160). The capillary 1147 may taper from a larger radial length (approximately 300 μm or approximately 500 μm) facing the flow restriction 1160 to a smaller radial length (approximately 3 μm) where the target 1150 is released as a flow to the plasma formation location 1154. The diameter of the limiting inner opening 1162 must be smaller than the larger radial length of the capillary 1147, but larger than the smaller radial length of the capillary 1147. Furthermore, in some embodiments in which the target material fluid 1132 includes tin or a tin compound, the diameter of the limiting inner opening 1162 can be on the order of tens of microns, or can be about 70 μm.

[0085]

[0110] The flow restriction 1160 is annular in shape, similar to the gasket 1105. Also, as described above, the flow restriction 1160 is made of a material that is compatible with the target material fluid 1132. Thus, in embodiments in which the target material fluid 1132 includes tin or a tin compound, the flow restriction 1160 may be made of tantalum, boron carbide, various metals with tin-phobic coatings, other high-melting point metals, polyimide, or other suitable materials.

[0086]

[0111] When solid tin is formed in the coupling device 1000, the flow restriction 1160 can advantageously be made of a tin-phobic material to allow for easy separation from the solid tin. Whenever solid tin is formed in the axial flow path 1130 of the coupling device 1000, the diameter of the restriction inner opening 1162 is selected to allow for easy separation of the adapter 1122 and the target material fluid reservoir 1126. In particular, to separate the adapter 1122 from the target material fluid reservoir 1126, the entire fluid line in the coupling device 1100 is cooled to a point where the target material fluid 1132 freezes. Because the flow restriction 1160 is made of a target material-phobic material, when the target material fluid 1132 freezes, it does not stick to the flow restriction 1160. Additionally, the inner opening 1162 is so small that it provides a frangible pinch location if frozen target material fluid 1132 remains within the inner opening 1162. This allows the adapter 1122 and target material fluid reservoir 1126 to be separated in the coupling device 1100 without having to backflow or push the target material fluid 1132 out of the coupling device 1100 before cooling the fluid lines.

[0087]

[0112] 12A , during normal operation, the flow restriction 1160 is seated in the gasket 1105 and held in its axial position by the pressure of the flow of the target material fluid 1132 along the direction from the fluid reservoir 1126 to the adapter 1122. This pressure acts on the flow restriction 1160, gently pushing it against the interface 1164. The flow restriction 1160 is also held in its radial position by the inner wall of the gasket 1105 (the wall with the larger diameter ID 1105_2). Because there is no active sealing mechanism between the flow restriction 1160 and the gasket 1105 and it is merely gently pushed against the interface 1164, the target material fluid 1132 passes freely not only through the restrictive inner opening 1162 (path numbered 1166) but also through the gap between the flow restriction 1160 and the gasket 1105, as indicated by the arrow numbered 1168. At this point, the flow is not significantly restricted. A seal is formed between the annular projection 1127 and the flat outer surface 1108b of the gasket 1105, preventing the target material fluid 1132 from passing between the gasket 1105 and the wall of the fluid reservoir 1126. A seal is also formed between the annular projection 1123 and the flat outer surface 1108a of the gasket 1105, preventing the target material fluid 1132 from passing between the gasket 1105 and the wall of the adapter 1122.

[0088]

[0113] 12B , the flow restriction 1160 operates in a flow-limiting manner if a rupture occurs downstream of the flow restriction 1160 (closer to the adapter 1122). A rupture can occur if one or more components downstream of the flow restriction 1160 fail. For example, if a component within the nozzle assembly 1145 cracks, breaking the hermetic seal, the flow restriction 1160 will experience significant force from the pressure of the target material fluid 1132 upstream of the flow restriction 1160 as the target material fluid 1132 downstream of the flow restriction 1160 surges toward the location of the rupture / failure / crack. This pressure creates an additional (hermetic) seal between the flow restriction 1160 and the gasket 1105, particularly at the interface 1164. This hermetic seal is formed, at least in part, because the gasket 1105 is made of a flexible, deformable material that is sufficiently compliant to compress when the target material fluid 1132 pressure increases and exerts a force from the flow restriction 1160. The hermetic seal is strong enough to prevent the target material fluid 1132 from flowing along path 1168 between the flow restriction 1160 and the gasket 1105. The target material fluid 1132 is therefore forced to flow only along path 1166 through the restricted inner opening 1162. Because the inner opening 1162 has a very small diameter, the target material fluid 1132 exits the flow restriction 1160 with significantly reduced pressure on its way to the adapter 1122 and capillary tube 1147. This protects the capillary tube 1147 from the large, undesirable forces that it would experience from the target material fluid 1132 if the flow restriction 1160 were not present. Furthermore, at this point, a separate leak sensor is triggered from the flow of target material fluid 1132 through the ruptured component.

[0089]

[0114] 13-15, alternative embodiments 1360, 1460, and 1560 of flow restrictor 1060 and alternative embodiments 1305, 1405, and 1505 of gasket 1005 are shown. In FIGS. 13 and 14, flow restrictor 1360 / 1460 and gasket 1305 / 1405 meet at a right-angled annular L-shaped edge. In FIG. 15, flow restrictor 1560 and gasket 1505 meet at an obtuse annular edge. These various alternative embodiments operate functionally similarly to flow restrictor 1160 and gasket 1105 shown and discussed above.

[0090]

[0115] In the coupling device 1660 of Figure 16, the separation insert 1660 is installed within the gasket 1605 and support component 1610 and is positioned to couple the first and second fluid flow components 1622, 1626. The target material fluid 1632 flows through the internal passages 1622p, 1626p of the first and second fluid flow components 1622, 1626, respectively, with the axial flow path 1630 extending between these internal passages 1622p, 1626p and the inner opening 1622 of the functional insert 1660. The gasket 1605 is similar to the gasket 1105, and the support component 1610 is similar to the support component 1110. The functional insert 1660 provides a separation function but does not appreciably restrict the flow of the target material fluid 1632.

[0091]

[0116] In this embodiment, the inner opening 1662 is designed to be large enough so that the flow of the target material fluid 1632 between the passages 1622p, 1626p is not significantly restricted. Nevertheless, the inner opening 1662 must be small enough to facilitate separation between the first and second fluid flow components 1622, 1626. For example, the diameter of the inner opening 1662 can be on the order of approximately 1 mm. In other embodiments, the diameter of the inner opening 1662 can be in the range of 0.5 to 1.5 mm. In particular, to separate the first fluid flow component 1622 from the second fluid flow component 1626, the entire fluid line in the coupling device 1600 is cooled to a point where the target material fluid 1632 freezes. In this embodiment, the insert 1660 is made of a target material-phobic material, so that when the fluid line is cooled, the target material fluid 1632 freezes but does not substantially stick to the insert 1660. Furthermore, because the inner opening 1662 is relatively small (compared to the size of the passages 1622p, 1626p), if any frozen target material fluid 1632 remains within the inner opening 1662, it provides a pinch or breakage location for the frozen target material fluid 1632. Such a pinch location is likely to break the frozen target material fluid 1632 without damaging the first and second fluid flow components 1622, 1626. This allows the first and second fluid flow components 1622 and the second fluid flow component 1626 to be separated in the coupling device 1600 without having to reverse or push the target material fluid 1632 back out of the coupling device 1600 before cooling the fluid lines.

[0092]

[0117] 17, the gasket 1605 and insert 1660 of FIG. 16 can be fabricated as a single structure 1705 that is compatible with and phobic to the target material fluid 1632. The single structure 1705 is a gasket having an inner opening 1762 that is similar in size to the inner opening 1662 of the insert 1660. Furthermore, because the gasket 1705 is fabricated from a material that is phobic to the target material fluid 1632, when the fluid line is cooled and the target material fluid 1632 freezes, the target material fluid 1632 does not substantially stick to the insert gasket 1705.

[0093]

[0118] The embodiments can be further described using the following clauses. 1. First and second fluid flow components that, when joined, define an axial flow path, the axial flow path being between a source of target material fluid and a nozzle feeder, the first and second fluid flow components being configured to direct the target material fluid towards the nozzle feeder; a coupling device configured to seal a junction between the first and second fluid flow components, the coupling device including a gasket having an annular shape that defines an inner opening that becomes part of the axial flow path when installed and sealed; When the gasket is disposed between the first and second fluid flow components to seal the joint formed by attaching the first and second fluid flow components, pressure exerted on the gasket from the target material fluid traversing the gasket inner opening along the axial flow path enhances the sealing function of the seal at the joint. Target material supply device. 2. The target material supply apparatus of clause 1, wherein the gasket is configured to be removable from the joint without damaging the joint. 3. A target material supply device as described in clause 1, wherein at least one surface of the gasket extending within the radial plane is configured to engage with a protrusion of the adjacent fluid flow component after the outer radial connecting surface of the gasket engages with the inner radial connecting surface of the adjacent fluid flow component. 4. A target material supply device as described in clause 1, wherein the first fluid flow component is an adapter and the second fluid flow component is a target material fluid reservoir, and the adapter is positioned between the target material fluid reservoir and the nozzle supply device. 5. The target material supply device of clause 4, wherein the adapter is made of molybdenum rhenium and the gasket is made of polyimide. 6. The target material supply device of clause 1, further comprising a functional insert disposed within the inner opening of the gasket, the functional insert including an inner opening that is part of the axial flow path, the functional insert inner opening having a diameter smaller than the diameter of the inner opening of the gasket. 7. The target material supply apparatus of clause 6, wherein the functional insert is made of a material compatible with the target material fluid. 8. The target material supply apparatus of clause 7, wherein the functional insert is a flow restrictor made of tantalum, tungsten, molybdenum, an alloy of tantalum, an alloy of tungsten, an alloy of molybdenum, polyimide, or a refractory metal. 9. The target material supply apparatus of clause 7, wherein the functional insert is made of boron carbide or metal coated with a tin phobic material. 10. The target material supply apparatus of clause 7, wherein the target material fluid is molten tin. 11. The target material supply apparatus of clause 6, wherein the diameter of the inner opening of the gasket is at least as large as the inner opening of the adapter that defines the axial flow path and is small enough to axially support the functional insert therein. 12. A target material supply device as described in clause 6, wherein the functional insert is a flow restriction, and the diameter of the inner opening of the flow restriction is sufficiently small to allow a restricted flow of the target material fluid when subjected to a flow pressure of the target material fluid that exceeds a threshold, and is smaller than the diameter of the axial flow path and larger than the smallest diameter of the flow path of the nozzle supply device. 13. A target material supply device as described in clause 6, wherein the functional insert is a flow restrictor, the first fluid flow component is an adapter, and the second fluid flow component is a target material fluid reservoir, and the adapter is positioned between the target material fluid reservoir and the nozzle supply device. 14. A coupling device configured to seal a joint between two fluid flow components that, when joined, define an axial flow path through which a fluid can traverse, comprising: a gasket having an annular shape defining an inner opening having a diameter along a radial plane perpendicular to the axial flow path, the diameter of the gasket inner opening being large enough to allow fluid to pass through the gasket, the gasket inner opening extending the axial flow path; a support component in which the gasket is disposed, the support component having an annular shape defining an inner opening having a diameter along a radial surface, the diameter of the inner opening of the support component being greater than an outer diameter of the gasket; A coupling device in which, when a gasket is placed between two fluid flow components to seal a joint formed by attaching the two fluid flow components, pressure exerted on the gasket from a fluid traversing an inner opening of the gasket along an axial flow path enhances the sealing function of the seal at the joint. 15. The coupling device of clause 14, wherein the gasket extends an axial flow path between two fluid flow components. 16. A coupling device as described in clause 14, wherein the gasket has a cross-sectional shape in which the axial length closest to the axial flow passage is greater than the axial length farthest from the axial flow passage. 17. A coupling device as described in clause 14, wherein the support component is part of one or more of the fluid flow component or a separate support ring. 18. A coupling device as described in clause 14, wherein the support component is made of a material harder than the material of the gasket. 19. A coupling device as described in clause 14, wherein the cross-sectional shape of the gasket is T-shaped. 20. The coupling device of clause 14, wherein the gasket is made of polyimide. 21. The coupling device of clause 14, wherein when the joint between the fluid flow components is tightened, a joint seal is first formed between an inner radial connecting surface of at least one of the fluid flow components and an outer radial connecting surface of the gasket before a joint seal is formed axially between the fluid flow component and the gasket. 22. A coupling device as described in clause 14, wherein the gasket is axially symmetric. 23. Two fluid flow components are both tubes defining an inner diameter that defines an axial flow path; or 15. The coupling apparatus of clause 14, wherein a first one of the fluid flow components is a tube defining an inner diameter that defines an axial flow path, and a second one of the fluid flow components is a fluid stopping device configured to prevent fluid from passing therethrough. 24. A coupling device as described in clause 14, wherein the first fluid flow component is an adapter and the second fluid flow component is a target material fluid reservoir, the adapter being positioned between the target material fluid reservoir and the nozzle supply device. 25. The coupling device of clause 24, wherein the adapter is made of molybdenum rhenium and the gasket is made of polyimide. 26. The coupling device of clause 14, further comprising a functional insert positioned within the inner opening of the gasket, the functional insert including an inner opening that is part of the axial flow path, the functional insert inner opening having a diameter smaller than the diameter of the inner opening of the gasket. 27. A coupling device as described in clause 26, wherein the functional insert is made of a material compatible with the target material fluid. 28. The coupling device of clause 27, wherein the functional insert is made of tantalum, tungsten, molybdenum, an alloy of tantalum, an alloy of tungsten, an alloy of molybdenum, a refractory metal, or polyimide. 29. A coupling device according to clause 27, wherein the functional insert is made of boron carbide or metal coated with a tin-phobic material. 30. A coupling device as described in clause 26, wherein the diameter of the inner opening of the gasket is at least as large as the inner opening of the adapter that defines the axial flow path and is small enough to axially support the internal functional insert. 31. The coupling device of clause 26, wherein the functional insert is a flow restriction, and the diameter of the inner opening of the flow restriction is sufficiently small to allow a restricted flow of the target material fluid when subjected to a flow pressure of the target material fluid above a threshold, and is smaller than the diameter of the axial flow path and larger than the smallest diameter of the flow path of the nozzle delivery device. 32. A coupling device as described in clause 26, wherein the functional insert is a flow restrictor, the first fluid flow component is an adapter, and the second fluid flow component is a target material fluid reservoir, the adapter being positioned between the target material fluid reservoir and the nozzle supply device. 33. First and second fluid flow components that, when joined, define an axial flow path, the axial flow path being between a source of target material fluid and a nozzle feeder, the first and second fluid flow components being configured to direct the target material fluid towards the nozzle feeder; a coupling device configured to seal a junction between the first and second fluid flow components, the coupling device including a gasket made of a material other than a metal or metal alloy, the gasket being compatible with and inert to the target material fluid; A target material supply device comprising: 34. The target material supply apparatus of clause 33, wherein the target material fluid comprises molten tin and the gasket is made of polyimide. 35. The target material supply apparatus of clause 33, wherein the gasket is made of a material that maintains sealing properties at temperatures above 200°C and fluid flow pressures above 3000 PSI. 36. The target material supply apparatus of clause 33, wherein the gasket is made of a material that maintains sealing properties at fluid flow pressures greater than 10,000 PSI. 37. The target material supply apparatus of clause 33, wherein a gasket is disposed between the first and second fluid flow components such that an increase in fluid flow pressure improves the seal formed by the gasket. 38. The target material supply apparatus of clause 33, further comprising a support component having a gasket disposed therein, the support component configured to provide a hard stop along the direction of the axial flow path. 39. A target material supply apparatus as described in clause 38, wherein the support component has a coefficient of thermal expansion that matches the coefficient of thermal expansion of the materials of the first and second fluid flow components. 40. The target material supply apparatus of clause 33, further comprising a support component within which the gasket is disposed, the support component configured to prevent the gasket from being extruded away from the axial flow path and thereby failing to maintain a seal, the support component being made of a material stronger than the material of the gasket. 41. The target material supply apparatus of clause 33, further comprising a support component having a gasket disposed therein, the support component being made of a nickel-cobalt-iron alloy or an alloy of one or more of nickel, cobalt, iron, titanium, aluminum, magnesium, copper, molybdenum, and tungsten. 42. The target material supply apparatus of clause 33, further comprising a support component within which the gasket is disposed, the support component being made of a material having a stiffness that is 2 to 100 times greater than the stiffness of the material of the gasket. 43. A target material supply device as described in clause 33, wherein the first fluid flow component is an adapter and the second fluid flow component is a target material fluid reservoir, the adapter being positioned between the target material fluid reservoir and the nozzle supply device. 44. The target material supply device of clause 43, wherein the adapter is made of molybdenum rhenium and the gasket is made of polyimide. 45. The target material supply apparatus of clause 33, further comprising a functional insert positioned within the inner opening of the gasket, the functional insert including an inner opening that is part of the axial flow path, the functional insert inner opening having a diameter smaller than the diameter of the inner opening of the gasket. 46. ​​A target material supply apparatus as described in clause 45, wherein the functional insert is made of a material compatible with the target material fluid. 47. The target material supply apparatus of clause 46, wherein the functional insert is made of tantalum, tungsten, molybdenum, an alloy of tantalum, an alloy of tungsten, an alloy of molybdenum, a refractory metal, or polyimide. 48. A target material supply device as described in clause 46, wherein the functional insert is made of boron carbide or metal coated with a tin-phobic material. 49. A target material supply apparatus as described in clause 45, wherein the diameter of the inner opening of the gasket is at least as large as the inner opening of the adapter that defines the axial flow path and is small enough to axially support the functional insert therein. 50. A target material supply device as described in clause 45, wherein the functional insert is a flow restriction, and the diameter of the inner opening of the flow restriction is sufficiently small to allow a restricted flow of the target material fluid when subjected to a flow pressure of the target material fluid that exceeds a threshold, and is smaller than the diameter of the axial flow path and larger than the minimum diameter of the flow path of the nozzle supply device. 51. A target material supply device as described in clause 45, wherein the first fluid flow component is an adapter and the second fluid flow component is a target material fluid reservoir, the adapter being positioned between the target material fluid reservoir and the nozzle supply device. 52. A coupling device configured to seal a junction between a reservoir for holding a target material fluid and an adapter configured to fluidly connect the reservoir to a nozzle feeder, comprising: the coupling device extends an axial flow path from the reservoir to the nozzle delivery device through which the target material fluid can traverse; The coupling device a gasket having an annular shape defining an inner opening having a diameter along a radial plane perpendicular to the axial flow path, the gasket inner opening diameter being large enough to allow fluid to pass through the gasket, the gasket inner opening extending the axial flow path; a functional insert disposed within the inner opening of the gasket, the functional insert including an inner opening that is a portion of the axial flow path, the functional insert inner opening having a diameter smaller than a diameter of the inner opening of the gasket; A coupling device in which, when a gasket is placed between a reservoir and an adapter to seal the joint formed by attaching the reservoir and adapter, pressure exerted on the gasket from fluid traversing the gasket's inner opening along an axial flow path improves the sealing function of the seal at the joint. 53. The coupling device of clause 52, further comprising a support component in which the gasket is disposed, the support component having an annular shape defining an inner opening having a diameter along a radial surface, the inner opening of the support component being larger than the outer diameter of the gasket. 54. A separation coupling device configured to seal a junction between first and second fluid flow components, comprising: the separation coupling device extends an axial flow path from the reservoir to the nozzle supply device through which the target material fluid can traverse; the separation coupling device comprises a separation gasket having an annular shape defining an inner opening having a diameter along a radial plane perpendicular to the axial flow path, the separation gasket inner opening diameter being large enough to allow fluid to pass through the separation gasket, the gasket inner opening extending the axial flow path, the separation gasket being made of a material that is both aphobic and compatible with the target material fluid; A separation and coupling device, wherein when a separation gasket is placed between first and second fluid flow components to seal a joint formed by attaching the first and second fluid flow components, pressure exerted on the separation gasket from fluid traversing the gasket inner opening along an axial flow path enhances the sealing function of the seal at the joint.

Claims

1. first and second fluid flow components that, when joined, define an axial flow path, the axial flow path being between a source of target material fluid and a nozzle feeder, the first and second fluid flow components being configured to direct the target material fluid towards the nozzle feeder; a coupling device configured to seal a junction between the first and second fluid flow components, the coupling device including a gasket having an annular shape that defines an inner opening that becomes part of the axial flow path when installed and sealed; when the gasket is disposed between the first and second fluid flow components to seal the joint formed by attaching the first and second fluid flow components, pressure applied to the gasket from a target material fluid traversing the gasket inner opening along the axial flow path enhances the sealing function of the seal at the joint; The gasket is made of polyimide-based plastic, the first fluid flow component is an adapter made of molybdenum or a molybdenum compound; the second fluid flow component is a target material fluid reservoir; the adapter is positioned between the target material fluid reservoir and the nozzle delivery device; Target material supply device.

2. 2. The target material supply apparatus of claim 1, wherein at least one surface of the gasket extending in a radial plane is configured to engage a protrusion of an adjacent fluid flow component after an outer radial connecting surface of the gasket engages an inner radial connecting surface of the adjacent fluid flow component.

3. a functional insert disposed within the inner opening of the gasket; the functional insert includes an inner opening that is a part of the axial flow path; The target material supply apparatus of claim 1 , wherein the functional insert inner opening has a diameter smaller than a diameter of the inner opening of the gasket.

4. 4. The target material supply apparatus of claim 3, wherein the functional insert is a flow restrictor made of tantalum, tungsten, molybdenum, a tantalum alloy, a tungsten alloy, a molybdenum alloy, polyimide, or a high melting point metal.

5. 4. The target material supply apparatus of claim 3, wherein the functional insert is made of a metal coated with boron carbide or a tin phobic material.

6. the functional insertion portion is a flow restriction portion, 4. The target material supply apparatus of claim 3, wherein the diameter of the inner opening of the flow restriction is sufficiently small to allow a restricted flow of target material fluid when subjected to a flow pressure of the target material fluid above a threshold, is smaller than a diameter of the axial flow passage, and is larger than a minimum diameter of a flow passage of the nozzle supply apparatus.

7. 1. A coupling device configured to seal a joint between first and second fluid flow components that, when joined, define an axial flow path traversable by a fluid, the coupling device comprising: a gasket having an annular shape defining an inner opening having a diameter along a radial plane perpendicular to the axial flow path, the diameter of the gasket inner opening being large enough to allow fluid to pass through the gasket, the gasket inner opening extending through the axial flow path; a support component on which the gasket is disposed, the support component having an annular shape defining an inner opening having a diameter along the radial surface, the diameter of the inner opening of the support component being greater than an outer diameter of the gasket; when the gasket is disposed between the first and second fluid flow components to seal the joint formed by attaching the first and second fluid flow components, pressure exerted on the gasket from fluid passing through the gasket inner opening along the axial flow path enhances the sealing function of the seal at the joint; The gasket is made of polyimide-based plastic, the first fluid flow component is an adapter made of molybdenum or a molybdenum compound; the second fluid flow component is a target material fluid reservoir; The adapter is positioned between the target material fluid reservoir and a nozzle supply device.

8. The coupling device of claim 7 , wherein the gasket has a cross-sectional shape in which an axial length closest to the axial flow passage is greater than an axial length farthest from the axial flow passage.

9. The coupling device of claim 7 , wherein the cross-sectional shape of the gasket is T-shaped.

10. 8. The coupling device of claim 7, wherein when the joint between the fluid flow components is tightened, the joint seal is first formed between an inner radial connecting surface of at least one of the fluid flow components and an outer radial connecting surface of the gasket before the joint seal is formed along the axial direction between the fluid flow component and the gasket.

11. a functional insert disposed within the inner opening of the gasket; the functional insert includes an inner opening that is a part of the axial flow path; The coupling device of claim 7 , wherein the functional insert inner opening has a diameter smaller than the diameter of the inner opening of the gasket.

12. 12. The coupling device of claim 11, wherein the functional insert is made of a metal coated with boron carbide or a tin phobic material.

13. the functional insertion portion is a flow restriction portion, 12. The coupling device of claim 11, wherein the diameter of the inner opening of the flow restriction is small enough to allow a restricted flow of target material fluid when a flow pressure of the target material fluid exceeds a threshold, is smaller than the diameter of the axial flow path, and is larger than a minimum diameter of a flow path of the nozzle supply device.

14. first and second fluid flow components that, when joined, define an axial flow path, the axial flow path being between a source of target material fluid and a nozzle feeder, the first and second fluid flow components being configured to direct the target material fluid towards the nozzle feeder; a coupling device configured to seal the junction between the first and second fluid flow components, the coupling device including a gasket made of a material other than a metal or metal alloy, the gasket being compatible with and inert to the target material fluid; a support component within which the gasket is disposed; the support component is made of a nickel-cobalt-iron alloy or an alloy of one or more of nickel, cobalt, iron, titanium, aluminum, magnesium, copper, molybdenum and tungsten; Target material supply device.

15. 15. The target material supply apparatus of claim 14, wherein the gasket is disposed between the first and second fluid flow components such that the seal formed by the gasket improves as the fluid flow pressure increases.

16. The target material supply apparatus of claim 14 , wherein the support component is configured to provide a hard stop along the direction of the axial flow path.

17. 15. The target material supply apparatus of claim 14, wherein the support component is made of a material having a stiffness that is 5 to 100 times greater than the stiffness of the material of the gasket.

18. a functional insert disposed within the inner opening of the gasket; the functional insert includes an inner opening that is a part of the axial flow path; The target material supply apparatus of claim 14 , wherein the functional insert inner opening has a diameter smaller than a diameter of the inner opening of the gasket.

19. 20. The target material supply apparatus of claim 18, wherein the functional insert is made of a metal coated with boron carbide or a tin phobic material.

20. the functional insertion portion is a flow restriction portion, 20. The target material supply apparatus of claim 18, wherein the diameter of the inner opening of the flow restriction is small enough to allow a restricted flow of target material fluid when subjected to a flow pressure of the target material fluid above a threshold, is smaller than a diameter of the axial flow passage, and is larger than a minimum diameter of a flow passage of the nozzle supply apparatus.

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