Reticle loading system and method

Abstract

To provide a reticle loading system and method.SOLUTION: The present invention discloses a reticle loading system and method. The reticle loading system 200 includes: a first port 202 moving a reticle pod 10 between an external environment and a load environment; a second port 204 moving the reticle storage pod 100 between the load environment and a storage environment; first elevating / lowering means A exposing a storage space of the reticle pod in the load environment when the reticle pod arrives at a lower end position and opens; second elevating / lowering means B exposing the storage space of the reticle storage pod in the load environment when the reticle storage pod arrives at a lower end position and opens; and a grip mechanism 1900 in which a base is movable between the exposed storage space of the opened reticle pod and the exposed storage space of the opened reticle storage pod.SELECTED DRAWING: Figure 13

Description

[Technical Field]

[0001] The present invention relates to a reticle storage pod and a reticle holding method, and more particularly to a reticle storage pod including an outer pod and an inner pod, and a reticle holding method in which the outer pod and the inner pod cooperate with each other. The reticle storage pod is applied to a reticle storage system and method. [Background technology]

[0002] Currently, in extreme ultraviolet (EUV) exposure processes, reticles need to be protected in a conventional dual-pod structure reticle pod (EUV pod) consisting of an inner pod (EIP) and an outer pod (EOP). To store reticles, the reticle is placed in the inner pod, which is then housed in the outer pod, and the entire conventional reticle pod is placed in a nitrogen cabinet and filled with nitrogen to store the reticles.

[0003] Furthermore, conventional reticle pods are designed so that the inner pod housing the reticle can avoid particle contamination and damage to the reticle caused by vibration and displacement during long-distance transportation. Furthermore, conventional reticle pods are configured to be appropriately loaded into different process tools for various tests and inspections, which makes the structure of the inner pod more complex and relatively expensive than the outer pod. However, storing the inner pod of a reticle pod with this design purpose in a nitrogen cabinet for a long period of time does not meet the benefits of using the inner pod.

[0004] 1 and 2, a conventional reticle pod 10 has a dual-pod structure and includes an inner pod 11 and an outer pod 12. The inner pod 11 stores a reticle R, and the outer pod 12 houses the inner pod 11. The inner pod 11 includes a base 20 and a lid 30 that fit together to hermetically seal and house the reticle R. The outer pod 12 includes an outer base 40 and an outer lid 50. The outer base 40 has a support means for the inner pod 11, and the outer lid 50 and the outer base 40 are coupled together to define a housing space for the inner pod 11. The inside of the outer cover 50 is typically provided with a suitable hold-down means to hold down the inner pod 11 when the outer cover 50 and the outer base 40 are combined, thereby forming a stable storage space. The outer base 40 typically also includes a latch means for locking the outer cover 50 to the outer base 40. Because transportation of the reticle pods 10 in factories is typically performed by an overhead crane system, the outer cover 50 is provided with a handle 52 at its top end that can be grasped by the crane arm. Therefore, conventional reticle pods 10 are disadvantageous for stacking and storage due to the height of the handle 52, and the height of the handle 52 requires additional storage space.

[0005] Furthermore, because a conventional outer pod typically has a corresponding mating mechanism between the conventional inner pod and the conventional outer pod, the conventional outer pod can only be combined with the corresponding inner pod, but cannot be adaptively combined with inner pods of different mechanical designs. That is, only specific compatible outer pods and inner pods can stably store reticles. Using incompatible outer pods and inner pods cannot achieve the expected stability. Considering the manufacturing cost and storage efficiency of reticle storage pods, the conventional outer pod design cannot meet these requirements.

[0006] Therefore, there is a need in the industry for reticle storage pods and related methods suitable for long-term storage, as well as reticle storage systems and methods for storing specialized reticle storage pods. Also, the development of a single outer pod technology compatible with at least two inner pods of different mechanical designs of the present invention would help reduce storage costs.

[0007] Known reticle pods have a fixing mechanism that uses an external force applied by the inner pod, i.e., a hold-down pin. This mechanism can act on the reticle in the inner pod only when the inner pod is housed in the outer pod. For example, the top end of the hold-down pin is exposed on the top outside of the inner pod. When transporting only the inner pod without using the outer pod, the reticle lacks stability in the inner pod, making it prone to vibration and collision.

[0008] Furthermore, when storing reticles for long periods in a dedicated reticle stocker system, the reticles must be removed from the dual-pod reticle pod and transferred to a dedicated pod, so a compatible reticle loading system and related methods must also be developed before the reticles are stored in the reticle stocker system.

[0009] Furthermore, since reticles are suitable for the high-precision manufacturing process of semiconductor manufacturing equipment and reticles with high manufacturing costs are stored in a stocker for a long period of time, strict environmental conditions must be met. Therefore, it was also necessary to develop a reticle stocker pipeline gas filling system and related method for long-term reticle storage, as well as a reticle stocker management system and related method suitable for scheduling the stocker system. Summary of the Invention [Problem to be solved by the invention]

[0010] In order to store more reticles in the same space, the present invention provides a storage means for increasing the storage efficiency of reticles. Specifically, the present invention provides a dedicated reticle storage pod that is different from known reticle pods. For purposes of distinction, in the description of this disclosure, the term "reticle pod" refers to a conventional reticle pod, and the term "reticle storage pod" refers to a dedicated reticle pod presented by the present invention in accordance with the improved storage means.

[0011] If the reticle storage pod is transported only between the storage shelves of the reticle loading system and the reticle stocker system, a reticle storage pod design for such use does not require complex structures and processing, except for the need for a protective mechanism to prevent the intrusion of external particles, which helps reduce manufacturing costs. [Means for solving the problem]

[0012] An object of the present invention is to provide a reticle storage pod including a base portion on which a plurality of supports are arranged, each of which is used to support a corner of a reticle, a pair of limiting blocks extending upward from each of the supports, the pair of limiting blocks being located on both sides of the corner, and a lid body on which a plurality of elastic hold-down mechanisms are arranged corresponding to each of the plurality of supports, each elastic hold-down mechanism having at least one elastic arm, the elastic arms acting on the corner of the reticle supported by the corresponding support, wherein when the lid body is placed over the base portion to store the reticle, the pair of limiting blocks limit the lateral movement of the elastic arms.

[0013] In a specific embodiment, the support has a pair of inclined surfaces, which are engaged with both lower edges of the corner, respectively.

[0014] In a specific embodiment, the elastic hold-down mechanism includes a main body and a pair of elastic arms extending in different directions from the main body, each having a limiting portion and an inclined surface extending from the limiting portion, and the two inclined surfaces of the pair of elastic arms are respectively engaged with the upper edge portions on both sides of the corner portion.

[0015] In a specific embodiment, the pair of limiting blocks limit two limiting portions of the pair of elastic arms.

[0016] In a specific embodiment, the two inclined surfaces of the pair of elastic arms extend away from the limiting portion and are coupled to each other.

[0017] Another object of the present invention is to provide a reticle storage pod comprising: an inner pod including a lid, a base, and a retention mechanism, the lid and the base combined to define a storage space, the retention mechanism being configured to retain a reticle in the storage space; and an outer pod, the outer pod including an outer lid and an outer base, the outer lid and the outer base combined to house the inner pod within the outer pod, wherein the outer lid has a flat top surface and a peripheral side surface extending downward from the flat top surface, at least a pair of handles are provided on the peripheral side surface, and the pair of handles do not exceed the height of the flat top surface.

[0018] In a specific embodiment, the top surface of the outer base portion is provided with a plurality of positioning pins for supporting the base portion of the inner pod.

[0019] In a specific embodiment, the outer lid is provided with at least one hold-down mechanism that acts on the lid to hold the inner pod.

[0020] In a specific embodiment, the hold-down mechanism is a hold-down post that acts on the lid of the inner pod.

[0021] In a specific embodiment, the holding mechanism includes at least one support provided on the base portion and at least one elastic hold-down mechanism provided on the lid body corresponding to the support, and when the outer lid body and the outer base portion are coupled to accommodate the inner pod, the hold-down pillar is pressed against the elastic hold-down mechanism, causing the elastic hold-down mechanism to hold the reticle.

[0022] In a specific embodiment, the hold-down mechanism is a hold-down convex rib, and when the outer cover body and the outer base portion are coupled to accommodate the inner pod, the hold-down convex rib is pressed against the upper surface of the cover body of the inner pod.

[0023] In a specific embodiment, a groove is formed on the upper surface of the cover body at a location corresponding to the hold-down protruding rib, and when the outer cover body and the outer base portion are combined to accommodate the inner pod, the hold-down protruding rib is pressed into the corresponding groove.

[0024] In a specific embodiment, the hold-down protruding ribs are pressed into the corresponding recessed grooves to stably position and couple the cover onto the base.

[0025] In a specific embodiment, the holding mechanism includes at least one support provided on the base portion and at least one reticle retainer provided on the cover body corresponding to the support and having at least one elastic arm, and when the cover body and the base portion are coupled to accommodate the reticle, the support supports the corners of the reticle, and the elastic arms of the reticle retainer engage with the corresponding corners, thereby causing the holding mechanism to hold the reticle.

[0026] Another object of the present invention is to provide a reticle storage pod including an inner pod suitable for storage in an outer pod having a plurality of hold-down mechanisms on its inner surface, the inner pod including a lid, a base, and a plurality of retention mechanisms, the lid and the base being coupled to define a storage space, the retention mechanisms being configured to hold a reticle so that it is accommodated in the storage space, wherein a plurality of grooves are formed on the upper surface of the lid at locations corresponding to the plurality of hold-down mechanisms, and when the inner pod is stored in the outer pod, the grooves on the lid engage with the hold-down mechanisms, respectively, providing a pressing force to stably position the inner pod, thereby strengthening the retention of the reticle by the retention mechanisms.

[0027] In a specific embodiment, the groove has a bottom surface and a peripheral side surface surrounding the bottom surface, the peripheral side surface has a contour, and the cover exposes the holding mechanism at the bottom surface of the groove.

[0028] In a specific embodiment, the hold-down mechanism is a hold-down convex rib having a contour corresponding to the groove, and when the inner pod is stored in the outer pod, the hold-down convex rib is pressed against the bottom surface of the groove.

[0029] A further object of the present invention is to provide a reticle storage pod comprising an outer pod, the outer pod comprising an outer lid and an outer base portion, the outer lid and the outer base portion being coupled to each other to stably accommodate either a first inner pod or a second inner pod of a different structure within the outer pod, the first inner pod and the second inner pod being used to accommodate reticles, respectively, the outer lid being provided with at least one first hold-down mechanism and at least one second hold-down mechanism, the first hold-down mechanism and the second hold-down mechanism acting on the lid of the first inner pod and the lid of the second inner pod of the different structure, respectively.

[0030] In a specific embodiment, the first hold-down mechanism and the second hold-down mechanism extend at different heights from the underside of the outer lid body, so that the first hold-down mechanism and the second hold-down mechanism respectively engage with corresponding structures on the lid bodies of the first inner pod and the second inner pod, which have different structures.

[0031] In a specific embodiment, the first hold-down feature is a hold-down post, the second hold-down feature is a hold-down convex rib having a horseshoe-shaped profile, and the hold-down post is located inside the horseshoe-shaped profile of the hold-down convex rib.

[0032] In a specific embodiment, an elastic hold-down mechanism is provided at a location on the lid of the first inner pod corresponding to the first hold-down mechanism, and the elastic hold-down mechanism includes a hold-down pin, and when the first inner pod is accommodated in the outer pod, the hold-down column is pressed against the hold-down pin to hold the reticle accommodated in the first inner pod.

[0033] In a specific embodiment, the resilient hold-down mechanism includes a cap that restricts the hold-down pin, and a horseshoe-shaped profile of the hold-down convex rib restricts lateral movement of the cap when the first inner pod is received in the outer pod.

[0034] In a specific embodiment, a groove is provided on the cover of the second inner pod at a location corresponding to the second hold-down mechanism, the groove having a bottom surface and a peripheral side surface surrounding the bottom surface, and the peripheral side surface having a horseshoe-shaped contour corresponding to the hold-down convex rib, so that when the second inner pod is placed in the outer pod, the hold-down convex rib is pressed against the bottom surface of the groove, and the hold-down convex rib restricts lateral movement of the cover.

[0035] Another object of the present invention is to provide a method for holding a reticle in a reticle storage pod, the method comprising the steps of: arranging a plurality of supports on a base portion of the reticle storage pod, each support having a pair of limiting blocks extending upward; arranging a plurality of elastic hold-down mechanisms on a lid body of the reticle storage pod, each of the supports having at least one elastic arm, corresponding to the plurality of supports; and when the lid body and the base portion are coupled to accommodate the reticle, each of the supports supports a corner of the reticle, the elastic arms of each elastic hold-down mechanism act on the corresponding corner, and the pair of limiting blocks limit lateral movement of the elastic arms.

[0036] In a specific embodiment, the pair of limiting blocks are located on both sides of the corner portion, respectively.

[0037] In a specific embodiment, the resilient hold-down mechanism includes a body and a pair of resilient arms, each having a limiting portion and an inclined surface extending from the limiting portion.

[0038] In a specific embodiment, when the cover and the base are coupled to accommodate the reticle, the two inclined surfaces of the pair of elastic arms are engaged with the upper edges of both sides of the corner, respectively.

[0039] In a specific embodiment, the pair of resilient arms extend from different directions of the body.

[0040] In a specific embodiment, the ends of the pair of resilient arms are connected together.

[0041] For a better understanding of the present invention, reference may be made to the following drawings and description. Non-limiting and non-exhaustive embodiments are described with reference to the following drawings. It should be noted that the components in the drawings are not necessarily drawn to actual size, but are instead drawn with the focus on explaining the structure and principles. [Brief explanation of the drawings]

[0042] [Figure 1] 1 is an exploded side view of a conventional reticle storage pod. [Figure 2] FIG. 1 is an exploded view of a conventional inner pod and reticle. [Figure 3] 1 is a block diagram of a reticle stocker system according to the present invention; [Figure 4] 1 is a three-dimensional view of a reticle stocker system according to the present invention; [Figure 5A] 1 is an exploded side view of a reticle storage pod of the present invention; [Figure 5B] 1 is a three-dimensional view of the outer cover of the dedicated outer pod of the present invention; [Figure 5C] 1 is a three-dimensional view of the outer base portion of the dedicated outer pod of the present invention. [Figure 5D] FIG. 1 is an exploded view of a dedicated inner pod of the present invention. [Figure 5E] FIG. 2 is a top view of the lid of the dedicated inner pod of the present invention. [Figure 5F] FIG. 2 is a bottom view of the lid of the dedicated inner pod of the present invention. [Figure 5G] 5B is a cross-sectional view of the lid of the dedicated inner pod of the present invention taken along the dashed line in FIG. 5E. [Figure 5H] FIG. 2 is a top view of the base of the dedicated inner pod of the present invention. [Figure 5I] FIG. 10 is a bottom view of the base of the dedicated inner pod of the present invention. [Figure 5J] 5H is a cross-sectional view of the base portion of the dedicated inner pod of the present invention taken along the dashed line. [Figure 5K] 1 is a three-dimensional view of the base of the dedicated inner pod of the present invention. [Figure 5L] FIG. 2 is a three-dimensional view of a corner of the base portion of the present invention. [Figure 5M] FIG. 10 is a three-dimensional view of another corner of the base portion of the present invention. [Figure 5N] FIG. 10 is a view showing a reticle retainer provided inside the lid of the present invention. [Figure 6A]10A-10C show the reticle retainers and corresponding supports of the specialized inner pod of the present invention that confine the corners of the reticle. [Figure 6B] FIG. 10 is a partially enlarged view showing the support of the present invention limiting lateral movement of the reticle retainer. [Figure 7A] 1 is a three-dimensional view of a dedicated inner pod of the present invention. [Figure 7B] 7B is a cross-sectional view of the dedicated inner pod of the present invention taken along the dashed line of FIG. 7A. [Figure 8A] 1 is a bottom view of the outer lid of the dedicated outer pod of the present invention. FIG. [Figure 8B] FIG. 10 is an enlarged view of the hold-down mechanism acting on the lid of the dedicated inner pod. [Figure 9A] FIG. 5B is a cross-sectional view of the reticle storage pod of FIG. 5A when coupled; [Figure 9B] FIG. 9B is a partial enlarged view of the area indicated by the dashed line in FIG. 9A. [Figure 10A] 1 is a three-dimensional view of a conventional reticle-transport inner pod. [Figure 10B] 1A and 1B show hold-down mechanisms acting on corresponding mechanisms in the lid of a conventional reticle-transport inner pod. [Figure 10C] FIG. 10 is an enlarged view of the hold-down mechanism and corresponding mechanism on the inner pod of the reticle pod. [Figure 11A] 1 is a cross-sectional view of a dedicated outer pod of a reticle storage pod of the present invention containing a dedicated inner pod. [Figure 11B] 1 is a cross-sectional view of a dedicated outer pod of a reticle storage pod of the present invention containing a non-dedicated inner pod. [Figure 12] 10 is a diagram showing how the lid of the dedicated inner pod of the present invention and the lid of the inner pod of the reticle pod overlap with each other. FIG. [Figure 13] 1 is a three-dimensional external view of a reticle loading system according to the present invention. [Figure 14] 1 is a schematic diagram of a reticle loading system of the present invention. [Figure 15] 1 is a flow chart of the loading of the reticle storage method of the present invention; [Figure 16] 1 is an unloading flowchart of the reticle storage method of the present invention. [Figure 17] 1 is a specific flowchart of reticle transfer according to the present invention. [Figure 18] 1 illustrates a reticle loading system according to an exemplary embodiment of the present invention. [Figure 19A] 1A-1C illustrate reticle clamping mechanisms used in reticle loading systems, according to specific embodiments. [Figure 19B] FIG. 2 is a front view of the reticle clamping mechanism. [Figure 19C] FIG. 2 is a top view of a reticle clamping mechanism. [Figure 20] FIG. 10 is a diagram showing the cooperation of the reticle clamping mechanism and the lifting table. [Figure 21] FIG. 10 is a flowchart illustrating an abnormality process for the reticle loading system. [Figure 22] FIG. 10 is a flowchart illustrating another abnormality process for the reticle loading system. [Figure 23] FIG. 10 is a flowchart showing an abnormality process for the reticle clamping mechanism. [Figure 24] 1 is a block diagram of a reticle loading system and a reticle stocker system of the present invention; [Figure 25] 1 is a top view of the reticle stocker system of the present invention (showing a specific layout inside the reticle stocker system); [Figure 26A] 1 is a three-dimensional view of a storage shelf according to a specific embodiment of the present invention; [Figure 26B] FIG. 10 shows the bottom layout of the storage shelf. [Figure 27A] FIG. 10 is a diagram showing a storage shelf with a reticle storage pod. [Figure 27B] FIG. 10 is a bottom view of the storage shelf with reticle storage pods. [Figure 27C] FIG. 10 is a view of the storage shelf with the reticle storage pods from another perspective. [Figure 28A]1 is a top view of a storage shelf and robot arm according to a specific embodiment (with the robot arm positioned below the reticle storage pod and the locating grooves in the bottom of the reticle storage pod on the storage shelf shown in dashed lines). [Figure 28B] FIG. 10 is a side view of the robot arm moving under the storage shelf and lifting the reticle storage pod. [Figure 28C] FIG. 10 is a side view of the robot arm removing a reticle storage pod from a storage shelf. [Figure 29] FIG. 10 is a diagram showing the upstream air supply pipeline and flow control means of the storage shelf. [Figure 30] 10A-10C show upstream air supply lines connecting to storage shelves according to two specific embodiments. [Figure 31] FIG. 10 is a flowchart showing an abnormality process for the robot arm of the reticle stocker system. [Figure 32] 10 is a schematic diagram of a reticle loading apparatus and a reticle stocker system according to another embodiment of the present invention. [Figure 33] 33 is a reticle loading flowchart according to the embodiment of FIG. 32. [Figure 34] 33 is a reticle unloading flowchart according to the embodiment of FIG. 32. [Figure 35] FIG. 33 is a specific reticle transfer flow diagram according to the embodiment of FIG. 32. [Figure 36] FIG. 10 is a schematic diagram of the inner pod transfer flow. [Figure 37] 10 is a schematic diagram of a reticle loading apparatus and a reticle stocker system according to another embodiment of the present invention. [Figure 38A] 10A and 10B are diagrams showing a storage chamber according to a specific embodiment. [Figure 38B] FIG. 10 is a diagram showing the arrangement of an upward-facing placement surface inside the storage chamber. [Figure 38C] FIG. 10 shows a single pod in a storage compartment. [Figure 38D] FIG. 10 shows the storage chamber's rest surface mechanism supporting the bottom of the single pod. [Figure 39A]FIG. 38 is a reticle load flow diagram according to FIG. 37. [Figure 39B] FIG. 38 is a reticle unloading flow diagram according to FIG. 37. [Figure 40] FIG. 38 is a specific reticle transfer flow diagram according to the embodiment of FIG. 37. [Figure 41A] FIG. 10 is a flow diagram illustrating an embodiment of interaction between the robot arm of the stocker system and the storage compartment, and shows how a pod is placed in the storage compartment. [Figure 41B] FIG. 10 is a flow diagram illustrating an embodiment of interaction between the robot arm of the stocker system and the storage compartment, showing the removal of a pod from the storage compartment. [Figure 42A] FIG. 10 is a flow diagram illustrating another embodiment of interaction between the robot arm of the stocker system and the storage compartment, for placing a pod in the storage compartment. [Figure 42B] FIG. 10 is a flow diagram illustrating another embodiment of interaction between the robot arm of the stocker system and the storage chamber, for retrieving a pod from the storage chamber. [Figure 43] 1 is a schematic diagram of a reticle stocker line gas filling system according to an embodiment of the present invention; [Figure 44] 10 is a schematic diagram of a reticle loading apparatus and a reticle stocker system according to another embodiment of the present invention. [Figure 45A] FIG. 45 is a reticle load flow diagram according to the embodiment of FIG. 44. [Figure 45B] FIG. 45 is a reticle unloading flow diagram according to the embodiment of FIG. 44. [Figure 46A] FIG. 45 is another reticle load flow diagram according to the embodiment of FIG. 44. [Figure 46B] FIG. 45 is another reticle unloading flow diagram according to the embodiment of FIG. 44. DETAILED DESCRIPTION OF THE INVENTION

[0043] The following more fully describes the present invention with reference to the drawings, illustrating specific embodiments. However, the claimed subject matter may be specifically embodied in a variety of different forms, and therefore the construction of the claimed subject matter of the coverage or application is not limited to the specific embodiments disclosed herein. The specific embodiments are merely exemplary. Likewise, the present invention is intended to provide a reasonably broad scope for the subject matter of the application or coverage claims.

[0044] As used herein, the phrase "in one embodiment" does not necessarily refer to the same specific embodiment, and the phrase "in some other / specific embodiments" as used herein does not necessarily refer to different specific embodiments. Claimed subject matter is intended to include all or any combination of the specific embodiments.

[0045] The term "dedicated" in the following description of the embodiments relates to technical means proposed according to the storage problem that the present invention aims to solve, such as a dedicated pod, a dedicated outer pod, or a dedicated inner pod. The term "non-dedicated" does not refer to technical means related to the storage purpose, but may refer to an existing or other new reticle inner or outer pod. The non-dedicated pod described herein can be understood as an existing reticle pod, such as the conventional dual pod shown in FIG. 1, but this does not mean that the non-dedicated pod can only be an existing reticle pod. More specifically, the non-dedicated pod in this specification should be understood as a reticle pod that is not used for storage purposes, such as a reticle pod suitable for general transportation purposes in a factory. This point will be explained first.

[0046] FIG. 3 is a block diagram of a reticle stocker system according to the present invention. The present invention provides a reticle storage means for storing reticles in a reticle pod 10. The reticle storage system includes a reticle loading system 200 and a reticle stocker system 600. The reticle loading system 200 is used to transfer reticles between the reticle pod 10 and the reticle storage pod 100, or to place an inner pod containing reticles into the reticle pod 10 or the reticle storage pod 100. It should be understood that the reticle pod 10 described herein may refer to a conventional reticle pod or a reticle pod that cooperates with a factory overhead crane system. The reticle storage pod 100 is different from a conventional reticle pod and is a storage means proposed by the present invention and dedicated to the reticle stocker system 600 of the present invention.

[0047] Reticle loading system 200 includes a first port 202 connected to a factory environment and a second port 204 connected to reticle stocker system 600. First port 202 allows reticle pods 10 to be transferred between the factory environment and a load environment provided by reticle loading system 200, and second port 204 allows reticle storage pods 100 to be transferred between the load environment and a storage environment of reticle stocker system 600. First port 202 and second port 204 may include valve means for independently isolating the factory environment, the load environment, and the storage environment. First port 202 may be further configured to cooperate with an overhead crane system.

[0048] The reticle stocker system 600 includes one or more reticle storage shelves (not shown) capable of storing multiple reticle storage pods 100, a reticle stocker control system 300 for placing and picking up the reticle storage pods 100, a reticle stocker gas filling pipeline system 400 for the gas environment of each reticle storage shelf, and a reticle stocker management system 500 for handling all processes, which will be described in more detail below.

[0049] 4 shows a specific external configuration of reticle storage system 600 of the present invention, in which reticle loading system 200 is adjacent to one side of reticle storage system 600, although the present invention is not limited thereto. First port 202 of reticle loading system 200 faces essentially upward to facilitate vertical loading or picking up of reticle pods 10 in cooperation with an overhead crane system. A second port (not shown) is located on the side of reticle loading system 200 and faces reticle storage system 600 to horizontally load or pick up reticle storage pods 100.

[0050] The reticle loading system 200 is configured to have an identification means for the reticle pods 10 and the reticle storage pods 100, which is used to identify, for example, an RFID or two-dimensional code on the inner pod and / or the outer pod, and the information in the RFID or two-dimensional code can be associated with an identification number of the pod or the reticle. The identification means may further include detecting whether a pellicle in the pod is damaged through a window in the pod and reading the two-dimensional code.

[0051] The first port 202 and the second port 204 correspond to different lifting means in the reticle loading system 200, i.e., the reticle pod 10 and the reticle storage pod 100 are held by the respective lifting means after entering the loading environment. The loading environment further includes a reticle clamping means for transferring reticles between the reticle pod 10 and the reticle storage pod 100. Details related to the lifting means and the clamping means will be described in the following paragraphs.

[0052] When reticle loading system 200 is unavailable (e.g., undergoing maintenance), reticle stocker system 600 can send reticle storage pod 100 with the required reticles to second port 204. Reticle stocker system 600 provides a manually operated door through which personnel can remove reticle storage pod 100 and safely remove the reticles under the protection of reticle storage pod 100. A fan-filter unit (FFU) can be located on top of reticle stocker system 600 to draw in outside air for use by reticle stocker system 600. A corresponding exhaust unit is also required.

[0053] 5A is an exploded side view of the reticle storage pod of the present invention. The reticle storage pod of the present invention includes a dedicated inner pod and a dedicated outer pod. In a preferred embodiment of the present invention, reticle storage pod 100 has a dual-pod structure and is used for the storage shelf of reticle stocker system 600 of the present invention. Although it is used exclusively for storage, reticle storage pod 100 of the present invention has a sealing means for protecting reticles, similar to conventional reticle pod 10, i.e., the contact surfaces of the pod have an excellent sealing and particle-blocking design.

[0054] The reticle storage pod 100 for the reticle stocker system 600 of the present invention includes a dedicated outer pod 102 and a dedicated inner pod 101. The dedicated outer pod 102 houses the dedicated inner pod 101 and stores reticles R inside the dedicated inner pod 101. The dedicated outer pod 102 is made up of an outer lid body 150 and an outer base portion 160 (also called a door), and the dedicated inner pod 101 is made up of a lid body 110 and a base portion 130.

[0055] Compared to the conventional reticle pod 10 of FIG. 1, the outer cover 150 of the reticle storage pod 100 of the present invention of FIG. 5A does not need to be adapted to an overhead crane system, and therefore does not include features such as the handle 52 of the conventional reticle pod 10, resulting in a lower overall height of the reticle storage pod 100. Also, compared to the conventional reticle pod 10 of FIG. 1, the positioning pin 161 provided on the inside of the outer base 160 of the present invention of FIG. 5A is relatively short, so the height of the outer cover 150 and outer base 160 of the present invention is smaller than the height of the outer cover 50 and outer base 40 of the conventional reticle pod 10 of FIG. 1. To minimize the overall height of the reticle storage pod 100 of the present invention, the pair of handles 151 provided on both sides of the outer cover 150 are not higher than the top surface of the outer cover 150. The shorter positioning pin 161 also allows the height of the space accommodating the dedicated inner pod 101 to be lower. Therefore, the overall height of the reticle storage pod 100 of the present invention is significantly less than the height of conventional reticle pods 10, allowing the reticle stocker system 600 of the present invention to accommodate more reticle storage pods 100 and reticles.

[0056] 5B is a three-dimensional view of the outer cover 150 of the dedicated outer pod of the present invention, omitting the structural design for fitting to an overhead crane system. The outer cover 150 has a flat top surface 152 and a peripheral side surface extending downward from the flat top surface 152. A handle 151 extends from the peripheral side surface and is not substantially higher than the flat top surface 152 or is only slightly higher than the flat top surface 152.

[0057] FIG. 5C is a three-dimensional view of the outer base portion 160 of the dedicated outer pod of the present invention, on the bottom of which are arranged a plurality of gas valves 162 and positioning grooves 163, the gas valves 162 being combined with specific connection ports for supplying specific gases to the dedicated outer pod 102 or for exhausting gases from the dedicated outer pod 102, and the positioning grooves 163 being used to position the dedicated outer pod 102 at a specific position in the device.

[0058] 5D is an exploded view of the dedicated inner pod 101 of the present invention, which includes a cover 110, a base 130, and a holding mechanism. The cover 110 and the base 130 combine to define a storage space, and the holding mechanism supports and restricts the reticle R to be accommodated in the storage space. The top of the cover 110 is essentially flat and is provided with a filter membrane cover 112, on which a plurality of grooves 114 of specific shapes and arrangements are formed. In this embodiment, four grooves 114 of specific shapes and arrangements are taken as an example.

[0059] 5E to 5J, compared with the structure of inner pod 11 of reticle pod 10 of FIG. 1, the holding mechanism of dedicated inner pod 101 of reticle storage pod 100 of the present invention contacts the chamfered portion of reticle R. As shown in FIGS. 5F and 5H, the holding mechanism includes elastic hold-down mechanisms (i.e., reticle retainers 120) provided at the four corners of the inside of lid 110 and four supports 134 provided on the upper side of base 130, and the number and positions of elastic hold-down mechanisms and supports 134 are designed according to the position of groove 114 on the top of lid 110. Therefore, the positions of reticle retainers 120 and supports 134 correspond to each other. When the lid 110 and the base 130 are coupled to accommodate the reticle R, the four supports 134 and the corresponding reticle retainers 120 contact and restrict the four corners of the reticle R. A plurality of gas passages are provided in the center of the lid 110, and a filter membrane cover 112 is provided on the upper side to cover these gas passages. Specifically, as shown in FIG. 5G, the filter membrane cover 112 is attached to a central recess in the top surface of the lid 110 so that the filter membrane cover 112 does not protrude from the top surface of the lid 110. A pair of handles 111 extending outward from each side of the lid 110 can interact with a specific mechanism during the lid opening operation of the reticle loading system 200, and the relevant details will be described in the following paragraphs.

[0060] Furthermore, the position of the groove 114 on the top of the cover 110 corresponds to the position of the reticle retainer 120. Therefore, when the dedicated inner pod 101 is housed in the dedicated outer pod 102, the groove 114 of the cover 110 can engage with the hold-down mechanism provided on the inside of the outer cover 150, causing the cover 110 to obtain a pressing force, thereby reinforcing the coupling of the dedicated inner pod 101 and the retention of the reticle R, and the related details will be described in the following paragraphs.

[0061] Compared with the inner pod 11 of the reticle pod 10 of FIG. 1, the dedicated inner pod 101 of the reticle storage pod 100 of the present invention stores reticles R more stably. When the outer cover 150 of the dedicated outer pod 102 applies an external force to the top surface of the cover 110 of the dedicated inner pod 101, the elastic hold-down mechanism (i.e., reticle retainer 120) on the inner surface of the cover 110 is urged to stably press the four corners of the reticle R. More specifically, to secure the reticles during long-distance transportation, the outer cover 50 of the outer pod 12 applies an external force to the elastic hold-down mechanism on the cover 30 of the inner pod 11 in the reticle pod 10 of FIG. 1, causing the elastic hold-down mechanism to act on the top surface of the reticle. In other words, the outer cover 50 of FIG. 1 does not act on the cover 30.

[0062] Compared with the base 20 of the inner pod 11 of the reticle pod 10 of FIG. 1 , the base 130 of the dedicated inner pod 101 of the reticle storage pod 100 of the present invention omits the complex structures of the base 20. These omitted complex structures may include reflective laser engraving on the bottom surface of the base 20, some window frames, and stepped structures. The base 130 of the present invention does not require additional processing, thereby significantly reducing costs, and the bottom surface of the base 130 is flat except for the positioning groove 132 and the window W. The base 130 is equipped with a window W for detecting the two-dimensional code and pellicle on the reticle R. The bottom and sides of the base 130 are continuous flat surfaces, and this step-free design is convenient for purging and cleaning.

[0063] 1, improving the efficiency of air exchange within the pod and increasing the rate of reduction in relative humidity (RH%), which is advantageous for long-term storage of reticles. As shown in FIG. 6A, a circumferential groove 133 is formed in the base 130, and four supports 134 are provided within the circumferential groove 133 at positions corresponding to the four corners of the reticle R. After the lid 110 and the base 130 are airtightly joined, the configuration of the circumferential groove 133 helps to capture particles that enter the pod.

[0064] FIG. 5K is a three-dimensional view of the base portion 130 of the dedicated inner pod of the present invention, and FIGS. 5L and 5M are enlarged views of the support 134 arranged in the circumferential groove according to the dashed frame in FIG. 5K.

[0065] FIG. 5N is a diagram showing a reticle retainer 120 provided inside the lid 110 of the present invention. The elastic hold-down mechanism of the lid 110 of the present invention can be implemented by the reticle retainer 120 shown in FIG. 5N. The reticle retainer 120 includes a main body 121 and a pair of elastic arms 122 extending in different directions from both sides of the main body 121. One end of each elastic arm 122 is connected to the main body 121, and the other end is connected to a limiting portion 123. One end of the limiting portion 123 is connected to the elastic arm 122, and the other end is connected to an inclined surface 124. The two inclined surfaces 124 extend at an angle upward from the limiting portion 123, and the ends of the two inclined surfaces 124 that are away from the limiting portion 123 are connected to each other. Specifically, the ends of the two inclined surfaces 124 are both connected to a pressing portion 125, but the present invention is not limited to this. For example, the pressing portion 125 may be omitted.

[0066] The body 121 of the reticle retainer 120 has screw holes, so that the reticle retainer 120 can be fixed to the inside of the cover 110 by known fastening means. Two inclined surfaces 124 connecting the pair of elastic arms 122 are used to contact the upper edges of both sides of the corners of the reticle, respectively. In this embodiment, the limiting portion 123 has a structure that basically extends horizontally, and by fitting it to the support 134 shown in Figures 5L and 5M, it limits the lateral movement of the pair of elastic arms 122, thereby achieving the effect of limiting the vibration of the corners of the reticle.

[0067] Figure 6A shows a reticle retainer 120 and corresponding supports 134 of a specialized inner pod of the present invention that restrain and support the corners of a reticle. Figure 6B shows a partial enlarged view of supports 134 of the present invention that restrain lateral movement of reticle retainer 120.

[0068] The four supports 134 of the base 130 of the present invention are respectively provided in circumferential grooves 133 at the four corners of the base 130 and are used to support the corresponding corners of the reticle R. The supports 134 have two support portions protruding upward from the circumferential grooves 133. Each support portion has an inclined surface 135 that faces the reticle R and slopes downward toward the reticle R. As shown in FIG. 6A, the pair of inclined surfaces 135 are essentially perpendicular to each other and contact and engage with the lower edges of the corresponding corners of the reticle R. A limiting block 136 extends upward from the top end of each support portion of the support 134. The limiting block 136 is located at the top end of the inclined surface 135 and does not interfere with the reticle R. When the reticle R is placed on the supports 134, the two limiting blocks 136 of each support 134 are located on both sides of the corners of the reticle R. 6A and 6B, when the cover 110 and the base 130 are coupled together, the two limiting blocks 136 of each support 134 are positioned outside the limiting portions 123 of the reticle retainer 120, restricting lateral movement of the limiting portions 123 connected to the pair of elastic arms 122. Therefore, when the cover 110 and the base 130 are coupled together, the two limiting portions 123 of the reticle retainer 120 are restricted between the two support portions of each support 134, restricting lateral movement of the pair of limiting portions 123 and reducing shaking of the reticle retainer 120. In other possible embodiments, the limiting blocks 136 may be positioned inside the limiting portions 123. Preferably, as shown in FIG. 6B, a buffer space is provided between the limiting portions 123 and the limiting blocks 136 to prevent particles from being generated due to friction between the hardware.

[0069] FIG. 7A is a three-dimensional view of a dedicated inner pod according to the present invention, and FIG. 7B is a cross-sectional view of the dedicated inner pod according to the present invention taken along the dashed line in FIG. 7A. Compared to the inner pod 11 structure of the reticle pod 10 of FIG. 1, the dedicated inner pod 101 of the present invention has a lid 110 and a base 130 that are not joined in a specific direction. The top surface of the lid 110 is a large, flat surface without a step structure. This significantly reduces grooves, corners, and other structures throughout the lid 110. Laser markings, windows, counterweight blocks, and stepped structures are also significantly reduced or eliminated from the bottom surface of the base 130. This reduces the number of processing steps required for the lid 110 and base 130 of the dedicated inner pod 101, facilitating manufacturing and improving yield. Furthermore, the base 130 is formed with a pellicle groove 131 that deepens, improving the efficiency of air exchange between the interior and exterior of the storage space of the dedicated inner pod 101 and helping to control the relative humidity (RH%) of the storage space.

[0070] The holding mechanism of the dedicated inner pod 101 of the present invention includes a chamfered reticle edge that fits into a pair of elastic arms 122 of the reticle retainer 120, and a pair of limiting portions 123 that limit the reticle retainer 120 with a pair of limiting blocks 136 of the support 134, thereby holding the reticle. The support 134 and the reticle retainer 120 contact the reticle through an inclined surface 135, preventing marks from being left on the upper and lower surfaces of the reticle, maintaining the horizontal state of the reticle, and helping to guide the reticle. The contact surface between the lid 110 and the base 130 can form a sealed contact using known means. In this embodiment, the contact surface of the base 130 is lower than the highest surface of the base 130, and the contact surface and the highest surface of the base 130 are separated by a circumferential groove 133, which helps prevent particles from entering the pellicle area.

[0071] Figure 8A is a bottom view of the outer lid 150 of the dedicated outer pod 102 of the present invention, showing the four hold-down mechanisms. Figure 8B shows details of the hold-down mechanisms and how they act on the dedicated inner pod lid 110, which is not shown because the outer lid 150 is omitted. Figure 9A is a cross-sectional view of the reticle storage pod 100 of Figure 5A when assembled. Figure 9B is a partial enlarged view of the area indicated by the dashed lines in Figure 9A.

[0072] When a dedicated inner pod 101 having these hold-down mechanisms is housed inside a dedicated outer pod 102 of the present invention, the outer cover 150 applies a pressing force to the dedicated inner pod 101 housed inside the dedicated outer pod 102. Referring to FIGS. 5B and 5C , the dedicated outer pod 102 of the present invention includes an outer cover 150 and an outer base 160. The hold-down mechanisms further provided by the present invention can be used to house inner pods with different structures, i.e., the inner pod 11 of FIG. 2 or the dedicated inner pod 101 of FIG. 5D. In this embodiment, the different structures of the inner pods are represented by the dedicated inner pod 101 of the present invention and the inner pod 11 of the reticle pod 10, both of which have different arrangements on the top surfaces of the covers 110 and 30, but the present invention is not limited to these two inner pods.

[0073] The positions of the hold-down mechanisms provided on the inner downward-facing surface of the outer lid 150 roughly correspond to the positions for holding the four corners of a reticle of the dedicated inner pods 101, 11 of different structures. Each hold-down mechanism includes a first hold-down mechanism and a second hold-down mechanism, and the first hold-down mechanism is configured to apply a holding force only to the lid 30 of the inner pod 11 of the reticle pod 10, but not to the lid 110 of the dedicated inner pod 101 of the present invention. In contrast, the second hold-down mechanism is configured to apply a holding force only to the lid 110 of the dedicated inner pod 101 of the present invention, but not to the lid 30 of the inner pod 11 of the reticle pod 10. Furthermore, the present invention does not limit the first hold-down mechanism and the second hold-down mechanism to separate elements or an integrally formed single element.

[0074] 8A , the hold-down mechanism of the present invention is disposed on the downward-facing surface of outer cover 150 and substantially corresponds to the corner of a reticle. In this embodiment, the first hold-down mechanism is a horseshoe-shaped hold-down rib 153, and the second hold-down mechanism is a hold-down post 154, both of which may be made of an elastic material. Specifically, horseshoe-shaped hold-down rib 153 has a serpentine U-shaped extension structure, and hold-down post 154 is located inside horseshoe-shaped hold-down rib 153, or hold-down post 154 is surrounded by horseshoe-shaped hold-down rib 153. In this embodiment, hold-down post 154 has a Y-shaped structure, but the present invention is not limited thereto.

[0075] 8B, the first hold-down mechanism has horseshoe-shaped hold-down ribs 153 of a predetermined size and shape that can be fitted into grooves 114 of lid 110. When dedicated outer pod 102 of reticle storage pod 100 of the present invention houses dedicated inner pod 101, horseshoe-shaped hold-down ribs 153 arranged on the inner surface of outer lid 150 of dedicated outer pod 102 are fitted into corresponding grooves 114 of lid 110, and the undersides of horseshoe-shaped hold-down ribs 153 contact the bottom of grooves 114. The weight of outer lid 150 acts on lid 110 via horseshoe-shaped hold-down ribs 153, but hold-down posts 154 cannot contact the bottom of grooves 114 due to their size. 9A and 9B , when the outer cover 150 is coupled to the outer base 160 to accommodate the dedicated inner pod 101, the vertical dimension of the horseshoe-shaped hold-down rib 153 is greater than the vertical dimension of the hold-down post 154. Therefore, the lower end of the horseshoe-shaped hold-down rib 153 fits into the groove 114 and abuts against the bottom of the groove 114, and the hold-down post 154 is suspended from the groove 114. In other words, when the dedicated outer pod 102 accommodates the dedicated inner pod 101, the hold-down post 154 does not act on the cover 110. In addition, the side walls of the groove 114 limit the lateral movement of the horseshoe-shaped hold-down rib 153, preventing the dedicated inner pod 101 from swaying sideways within the dedicated outer pod 102.

[0076] Fig. 10A is a three-dimensional view of the inner pod 11 for transporting reticles. Fig. 10B is a view showing the hold-down mechanism acting on a corresponding mechanism on the lid 30 of the inner pod 11 of the reticle pod 10, with the outer lid 150 omitted and not shown. Fig. 10C is an enlarged view of the hold-down mechanism and the corresponding mechanism on the inner pod 11 of the reticle pod 10.

[0077] A resilient hold-down mechanism is provided on the lid 30 of the inner pod 11 at a position that roughly corresponds to the corner of the reticle. The resilient hold-down mechanism includes a hold-down pin 32 and a cap 34 that secures the hold-down pin 32. Specifically, the top end of the hold-down pin 32 is exposed at the top of the lid 30, and the bottom end of the hold-down pin 32 extends downward inside the lid 30 and is exposed in the storage space of the inner pod 11. When the inner pod 11 stores a reticle and a pressing force is applied to the top end of the hold-down pin 32, the hold-down pin 32 is forced downward, and the bottom end of the hold-down pin 32 abuts against the top surface of the reticle, thereby holding the reticle.

[0078] When the dedicated outer pod 102 of the reticle storage pod 100 of the present invention accommodates the inner pod 11 shown in FIG. 10A , the hold-down mechanism provided on the inner surface of the outer cover 150 of the dedicated outer pod 102 can act on the elastic hold-down mechanism of the inner pod 11. Specifically, as shown in FIG. 10B , the horseshoe-shaped hold-down rib 153 and the hold-down posts 154 have different vertical dimensions, allowing the bottom ends of the hold-down posts 154 of the hold-down mechanism to abut against the exposed top ends of the hold-down pins 32. This allows the weight of the outer cover 150 to be pressed against the exposed top surfaces of the hold-down pins 32 via the hold-down posts 154, and the horseshoe-shaped hold-down rib 153 surrounds the periphery of the cap 34 and does not act on the cover 30. As shown in FIG. 10C , the inner wall of the horseshoe-shaped hold-down rib 153 restricts the lateral movement of the cap 34, thereby preventing the inner pod 11 from swaying sideways within the dedicated outer pod 102.

[0079] The purpose of the Y-shaped structure of the hold-down columns 154 in this embodiment is to create structural interference between the hold-down columns 154 and the cap 34, preventing the hold-down columns 154 from excessively pressing down on the hold-down pins 32 and subjecting the reticle to inappropriate force. Preferably, there is an appropriate buffer space between the horseshoe-shaped hold-down rib 153 and the cap 34, which can prevent particles from being generated due to friction between the hardware.

[0080] 11A is a cross-sectional view of a dedicated outer pod 102 of a reticle storage pod of the present invention, which accommodates a dedicated inner pod 101. FIG. 11B is a cross-sectional view of a dedicated outer pod 102 of a reticle storage pod of the present invention, which accommodates a non-dedicated inner pod 11. That is, the dedicated outer pod 102 provided by the present invention includes a hold-down mechanism consisting of two structures, so that it can accommodate not only the dedicated inner pod 101 proposed for storage purposes, but also the conventional inner pod 11 widely used in this technical field. Such a hold-down mechanism can provide a uniform and stable storage effect for the inner pods 11, 101 of these two different configurations and purposes.

[0081] 12 is a diagram showing the overlapping of the cover 110 of the dedicated inner pod 101 and the cover 30 of the non-dedicated inner pod 11. The volume of the groove 114 is larger than the volume of the cap 34 of the elastic hold-down mechanism, and the height of the top of the hold-down pin 32 of the elastic hold-down mechanism is higher than the bottom of the groove 114. When the dedicated inner pod 101 or the non-dedicated inner pod 11 is accommodated in the dedicated outer pod 102, the horseshoe-shaped hold-down rib 153 presses against the bottom of the groove 114, or the bottom of the hold-down column 154 of the outer cover 150 presses against the top of the hold-down pin 32, as shown in FIG. In other words, in order to fit dedicated inner pods and non-dedicated inner pods, the vertical dimensions of the first hold-down mechanism (horseshoe-shaped hold-down rib 153) and the second hold-down mechanism (hold-down column 154) provided on the inside of the outer cover body 150 of the present invention basically have a height difference similar to the vertical step H.

[0082] Fig. 13 is a three-dimensional external view of reticle loading system 200 of the present invention. Fig. 14 is a schematic diagram of the layout of reticle loading system 200 of the present invention.

[0083] The reticle loading system 200 of the present invention supports the E84 standard and includes a first port 202 that enables the loading or unloading of reticle pods 10, and a second port 204 that is connected to a connecting passage of reticle stocker system 600 of FIG. 4 and enables the loading or unloading of reticle storage pods 100. Specifically, a factory overhead crane system can cooperate with first port 202 to load or remove reticle pods 10 from reticle loading system 200. Second port 204 can cooperate with a robot arm within reticle stocker system 600 to transfer reticle storage pods 100 between the reticle stocker system 600 environment and the reticle loading system 200 environment. In this embodiment, second port 204 is located on the backside of reticle loading system 200 and is therefore not visible in FIG. 13 .

[0084] The reticle loading system 200 is configured to include identification and inspection means for the reticle pod 10 and reticle storage pod 100, such as RFID reading means, two-dimensional code reading means, and reticle pellicle inspection means for the pod or reticle.

[0085] The first port 202 and the second port 204 correspond to the first lifting means and the second lifting means, respectively. In this embodiment, the first lifting means A mainly controls the lifting platform to place the reticle pod 10 thereon, and the second lifting means B mainly controls another lifting platform to place the reticle storage pod 100 thereon. The first lifting means A can move the lifting platform to different vertical heights A0, A1, and A2, respectively, from high to low. Similarly, the second lifting means B can move the lifting platform to different vertical heights B0, B1, and B2, respectively, from high to low. 14, the reticle pods 10 and reticle storage pods 100 located at heights A0 and B0 are both in a non-open state, the reticle pods 10 and reticle storage pods 100 located at heights A1 and B1 are both in an open state (not shown), and the reticle pods 10 and reticle storage pods 100 located at heights A2 and B2 are both open, with one of them exposing a reticle. More specifically, when the reticle pods 10 and reticle storage pods 100 are located at heights A1 and B1, the outer and inner lids are separated from the outer and inner bases by the opening means. More specifically, when the reticle pod 10 and the reticle storage pod 100 are positioned at heights A2 and B2, only the outer base and inner base of each are left on the lifting platform, and the inner and outer lids are blocked, so they do not descend to heights A2 and B2, and at this time the reticle can be positioned in the reticle transfer environment 206.

[0086] The conditions of reticle transfer environment 206 can be different from heights A0, A1, B0, and B1 to ensure low reticle transfer risk. Reticle transfer environment 206 includes a reticle clamping mechanism configured to pick up or place a reticle from a base and transfer a reticle between the base of reticle pod 10 and the base of reticle storage pod 100.

[0087] Additionally, the robot arm within reticle stocker system 600 can pick up reticle storage pods 100 within reticle loading system 200 via second port 204. If reticle loading system 200 malfunctions and becomes inoperable but still has reticle storage pods 100 within it, the robot arm of reticle stocker system 600 can temporarily remove reticle storage pods 100, thereby preventing the dedicated pods of reticle stocker system 600 from being contaminated by repairs to reticle loading system 200.

[0088] To ensure that the environment within the reticle loading system 200 also has a certain level of cleanliness, a fan-filter unit (FFU) for intake, filtering, and exhaust is provided above the stocker, as shown in FIG.

[0089] 15 and 16 are flowcharts of reticle loading and unloading according to the embodiment of FIG.

[0090] Step 1500A: Load a reticle pod 10 including an inner pod containing a reticle and an outer pod containing the inner pod via a first port 202. The reticle is either unused or has been used and needs to be stored. The inner pod and outer pod may correspond to the inner pod 11 and outer pod 12 in FIG. 1, respectively.

[0091] Step 1500B: Load reticle storage pods 100, including empty dedicated inner pods and dedicated outer pods containing the dedicated inner pods, from reticle stocker system 600. Reticle stocker system 600 stores a plurality of reticle storage pods 100. In this step, empty dedicated pods are loaded. The dedicated inner pods and dedicated outer pods may correspond to dedicated inner pod 101 and dedicated outer pod 102 in FIG. 5A.

[0092] Step 1502: The reticle loading system 200 detects the reticle pod 10 and the reticle storage pod 100, respectively, performs the lid opening operation of the inner pod and the outer pod of the reticle pod 10, performs the lid opening operation of the dedicated outer pod and the dedicated inner pod of the reticle storage pod 100, and lowers the outer base portion of the reticle pod 10 and the outer base portion of the reticle storage pod 100 to the reticle transfer environment 206. Specifically, this step can cover the heights A0-A2 and B0-B2 of the first lifting means A and the second lifting means B in FIG.

[0093] Step 1504: Pick up the reticle from the base of the reticle pod 10 and transfer the reticle to the base of the reticle storage pod 100. The transfer in this step is performed by a reticle clamping mechanism, and the reticle is moved within a high-cleanliness reticle transfer environment 206 to reduce the risk of reticle contamination.

[0094] Step 1506: The reticle pod 10 and the reticle storage pod 100 are returned to the closed state. At this time, the reticle pod 10 is empty, and the reticle storage pod 100 contains reticles waiting to be stored.

[0095] Step 1508: The reticle storage pod 100 containing the reticles is transported to a storage shelf designated by the reticle stocker system 600. Preferably, the designation of the storage shelf is based on the shortest travel path of the robot arm between the storage shelf and the second port 204 in FIG.

[0096] Step 1510: Execute the gas filling means to fill the reticle storage pod 100 with a non-reactive gas to complete the storage of the reticles. Specifically, the storage shelf is provided with dedicated pipelines and connectors connected to the reticle storage pod 100, and can fill the dedicated outer pod of the reticle stocker system 600 with nitrogen gas. In other words, the dedicated inner pod for storage is stored under a specific gas atmosphere.

[0097] Step 1600A: A reticle pod 10 including an empty inner pod and an outer pod containing the inner pod is loaded from the first port 202. The inner pod and the outer pod may correspond to the inner pod 11 and the outer pod 12 in FIG.

[0098] Step 1600B: Reticle storage pods 100, including a dedicated inner pod containing a reticle and a dedicated outer pod containing the inner pod, are loaded from reticle stocker system 600 to reticle loading system 200. The dedicated inner pod and dedicated outer pod may correspond to dedicated inner pod 101 and dedicated outer pod 102 in Figure 5A. The reticles in this step are stored in reticle stocker system 600 in advance and are retrieved for various applications.

[0099] Step 1602: The reticle loading system 200 detects the reticle pod 10 and the reticle storage pod 100, respectively, opens the inner pod and outer pod of the reticle pod 10, opens the inner pod and outer pod of the reticle storage pod 100, and lowers the outer base portions of the reticle pod 10 and the reticle storage pod 100 into the reticle transfer environment 206.

[0100] Step 1604: Pick up a reticle from the base of the reticle storage pod 100 and place the reticle into the base of the reticle pod 10. Similarly, the reticle loading system 200 uses a reticle clamping mechanism to transfer the reticle from the base of the reticle storage pod 100 to the base of the reticle pod 10, and the reticle is moved in the reticle transfer environment 206.

[0101] Step 1606: The reticle pod 10 and the reticle storage pod 100 are returned to the closed state. At this time, a reticle is placed in the reticle pod 10, and the reticle storage pod 100 is an empty pod.

[0102] Step 1608: The reticle pod 10 containing the reticles is transported out of the reticle loading system 200 via the first port 202. Specifically, the first port 202 can cooperate with an overhead crane system to remove the reticle pod 10. The empty reticle storage pod 100 is returned to an appropriate area of ​​the reticle stocker system 600 and waits for the next use.

[0103] 17 is a specific flowchart of the reticle transfer method of the present invention. The following will be explained in conjunction with FIG. 14, where the left half is performed by the first lifting means A, the right half is performed by the second lifting means B, and the rest is performed by both.

[0104] Step 1700A: A reticle pod 10 including an inner pod and an outer pod containing the inner pod is loaded from the first port 202 onto the first lifting means A of the reticle loading system 200. Specifically, the lifting platform of the first lifting means A stops at a height A0 so as to receive and place the reticle pod 10.

[0105] Step 1700B: The reticle stocker system 600 loads the reticle storage pod 100, including a dedicated inner pod and a dedicated outer pod containing the inner pod, onto the second lifting means B of the reticle loading system 200 via the connecting passage. Specifically, the lifting platform of the second lifting means B stops at height B0 so as to receive and place the reticle storage pod 100.

[0106] Step 1702A: The outer pod cover of the reticle pod 10 is grasped, and the platform of the first lifting means A is lowered from height A0 to height A1, during which the outer pod cover and the outer pod base are separated. When the platform is positioned at height A1, the outer pod cover is removed, and only the outer pod base and the inner pod remain on the platform.

[0107] Step 1702B: The lid of the outer pod of the reticle storage pod 100 is grasped, and the platform of the second lifting means B is lowered from height B0 to height B1, during which the lid of the outer pod and the outer pod base are separated. When the platform is positioned at height B1, the lid of the outer pod is removed, and only the base of the outer pod and the inner pod remain on the platform.

[0108] Step 1704A: The lid of the inner pod of the reticle pod 10 is grasped, and the lifting platform of the first lifting means A is lowered from height A1 to height A2, during which the lid and base of the inner pod are separated. When the lifting platform is positioned at height A2, the lid of the inner pod is removed, and only the base of the outer pod and the base of the inner pod remain on the lifting platform. While the lifting platform is lowering from height A0 to height A2, the reticle loading system 200 can timely read the two-dimensional code of the inner pod, the two-dimensional code of the reticle, and / or detect the pellicle status.

[0109] Step 1704B: The lid of the inner pod of the reticle storage pod 100 is grasped, and the lifting platform of the second lifting device B is lowered from height B1 to height B2, during which the lid and base of the inner pod are separated. When the lifting platform is positioned at height B2, the lid of the inner pod is removed, and only the base of the outer pod and the base of the inner pod remain on the lifting platform. While the lifting platform is lowering from height B0 to height B2, the reticle loading system 200 can timely read the two-dimensional code of the inner pod, the two-dimensional code of the reticle, and / or detect the pellicle status.

[0110] Step 1706: The reticle is transferred between the base of the inner pod of the reticle pod 10 and the base of the inner pod of the reticle storage pod 100 by the reticle clamping mechanism of the reticle loading system 200. For specific embodiments of the reticle clamping mechanism, see Figures 19A to 19C and the description thereof.

[0111] Step 1708A: In the process of raising the lifting platform of the first lifting means A from height A2 to height A1, the cover of the inner pod of the reticle pod 10 is coupled to the base of the inner pod.

[0112] Step 1708B: In the process of raising the lifting platform of the second lifting means B from height B2 to height B1, the cover of the inner pod of the reticle storage pod 100 is coupled to the base of the inner pod.

[0113] Step 1710A: In the process of raising the lifting platform of the first lifting means A from height A1 to height A0, the cover of the outer pod of the reticle pod 10 is coupled to the base of the outer pod.

[0114] Step 1710B: In the process of raising the lifting platform of the second lifting means B from height B1 to height B0, the cover of the outer pod of the reticle storage pod 100 is coupled to the base of the outer pod.

[0115] Step 1712A: The reticle pod 10 is transported out via the first port 202. The lifting platform of the first lifting means A is higher than height A0, exposing the reticle pod 10 to the first port 202 of the reticle loading system 200, and waiting for the subsequent operation of the overhead crane system.

[0116] Step 1712B: Load the reticle storage pod 100 into the reticle stocker system 600 via the connecting passage of the reticle stocker system 600. The robot arm of the reticle stocker system 600 can enter the reticle loading system 200 and pick up the reticle storage pod 100 from the second lifting means B.

[0117] In the above-described embodiment, the first lifting means A and the second lifting means B can perform dedicated customized operations on the reticle pod 10 and the reticle storage pod 100, respectively, as follows, for example, the first lifting means A can be configured to lock and unlock the outer pod of the reticle storage pod 100.

[0118] 18 shows a reticle loading system according to a specific embodiment of the present invention, which includes a first lifting device A and a second lifting device B as shown in FIG. 14. The first lifting device A has an outer pod lid support surface 1800A, which essentially contacts only the lid of the outer pod of the reticle pod 10. That is, the outer pod lid support surface 1800A has a hollow in the center for allowing the base of the outer pod to drop. The base of the outer pod of the reticle pod 10 is placed on a lifting platform 1802A. Therefore, when the outer pod of the reticle pod 10 is unlocked, the lifting platform 1802A can be lowered to separate the lid and base of the outer pod, and the base of the outer pod can be lowered together with the inner pod, thereby achieving the purpose of opening the pod. The pod is closed in the same manner, and the outer pod lid of the reticle pod 10 is coupled to the base portion while the platform 1802A is raised to a height where it is almost flush with the outer pod lid support surface 1800A.

[0119] The second lifting means B may have a similar configuration for manipulating the reticle storage pod 100. Fig. 18 only shows the outer pod of the reticle pod 10 in an open state, and the inner pod of the reticle pod 10 can also be opened by the intervention of other mechanisms. The reticle storage pod 100 can also be opened and closed by the same mechanism. Furthermore, the reticle loading system 200 can be provided with an appropriate identification device or sensing unit, which can timely identify the relevant information on the reticle pod 10 and reticle storage pod 100, such as RFID and two-dimensional codes, when the pods are opened.

[0120] 19A, 19B, and 19C illustrate a reticle clamping mechanism 1900 used in a reticle loading system according to a specific embodiment. The reticle clamping mechanism 1900 is disposed within the reticle transfer environment 206 shown in FIG. 14 and includes a rail 1902 and a clamping assembly 1904. The rail 1902 is fixed inside the reticle loading system 200 and, as shown in FIG. 20, the clamping assembly 1904 is controlled so that it can move horizontally on the rail 1902. The clamping assembly 1904 includes a pair of clamping arms 1906 and a pair of contact plates 1908. The pair of contact plates 1908 can be driven to approach each other and are coupled to the periphery of the reticle R via an engagement portion 1910 to clamp the reticle R. Because the reticle clamping mechanism 1900 does not have the ability to move vertically, the reticle R can be separated from the base by lowering the elevator platform.

[0121] FIG. 20 is a side view showing the cooperation of the reticle clamping mechanism 1900 and the elevator platform 2000. As shown in the right diagram of FIG. 20, the outer base portion 40 of the outer pod 12, the base portion 20 of the inner pod 11, and the elevator platform 2000 carrying a reticle (not shown) are lowered below the reticle clamping mechanism 1900. Next, the clamping assembly 1904 moves horizontally to above the reticle R placed on the elevator platform 2000. As shown in the left diagram of FIG. 20, the elevator platform 2000 rises to a height at which the reticle can be clamped. After the clamping assembly 1904 clamps the reticle, the elevator platform 2000 lowers. The clamping assembly 1904g moves horizontally onto another elevator platform (not shown). Similarly, the other elevator platform rises to a height at which the base portion of the inner pod can carry the reticle. The clamping assembly 1904 releases the reticle to complete the transfer. While the reticle clamping mechanism 1900 is not operating, the clamping assembly 1904 can be moved between the two lifting means to prevent interference between their operations. The dashed lines in Figure 20 indicate that the clamping assembly 1904 is kept at the same height during its movement.

[0122] FIG. 21 shows the flow of processing an abnormality in the reticle loading system, more specifically, the flow of processing an abnormality in loading the reticle pod 10 by the elevator platform of the first elevator means A or the second elevator means B in FIG.

[0123] If the reticle loading system 200 stops operation due to a loading abnormality of the reticle pod 10, the reticle loading system 200 displays the abnormal state and can detect whether the initialization key is enabled. If the initialization key is enabled, the entire reticle loading system 200 is initialized. The elevator platform returns the reticle pod 10 to height A0.

[0124] If reticle storage pod 100 is stopped due to a loading abnormality, reticle loading system 200 can display the abnormality and detect whether the initialization key is activated. If the initialization key is activated, the entire reticle loading system 200 is initialized. The elevator platform returns reticle storage pod 100 to height B0.

[0125] If the lifting platforms of the first lifting device A and the second lifting device B, located at heights A2 and B2, stop operating due to a transfer abnormality, the reticle loading system 200 displays the abnormality and can detect whether the initialization key is enabled. If the initialization key is enabled, the entire reticle loading system 200 is initialized. The reticle clamping mechanism 1900 places the reticle into the inner pod of the reticle pod 10 or the inner pod of the reticle storage pod 100. The lifting platforms of the first lifting device A and the second lifting device B are returned to heights A0 and B0, respectively.

[0126] 22 illustrates another abnormality processing flow for reticle loading system 200, which further includes checking the pellicle status. Reticle loading system 200 can detect whether the eject key is enabled and perform various operations, such as returning the reticle to reticle pod 10 or reticle storage pod 100, or returning reticle storage pod 100 to a designated storage shelf.

[0127] 23 shows the abnormality processing flow of the reticle clamping mechanism. Depending on whether the reticle is from the inner pod of the reticle pod 10 or the inner pod of the reticle storage pod 100, the reticle clamping mechanism 1900 can return the reticle to the inner pod of the reticle pod 10 or the inner pod of the reticle storage pod 100, and then return the reticle pod 10 or the reticle storage pod 100 to the position specified in the initialization flow.

[0128] 24 is a block diagram of the reticle loading system and reticle stocker system of the present invention. Reticle stocker system 600 includes one or more storage cabinets 602. Storage cabinet 602 includes multiple vertically stacked storage shelves 604. Storage cabinet 602 is roughly divided into an upper area and a lower area. Each storage shelf 604 of storage cabinet 602 can accommodate a reticle storage pod 100. Reticle storage pod 100 consists of a dedicated outer pod and a dedicated inner pod, where the dedicated outer pod is suitable for receiving and securing the dedicated inner pod, and the dedicated inner pod is suitable for receiving and securing a reticle. The dedicated inner pod and dedicated outer pod can correspond to dedicated inner pod 101 and dedicated outer pod 102 shown in FIG. 5A.

[0129] Some of the storage shelves 604 in the storage 602 may be configured as a buffer zone (606). The buffer zone 606 is used to store cleaned or used reticle storage pods 100. The cleaned reticle storage pods 100 are empty pods that are provided to the reticle loading system 200 and wait to receive reticles waiting for storage. The used reticle storage pods 100 are empty pods that are returned from the reticle loading system 200 and are exposed to a low-cleanliness environment during the reticle transfer process, which poses a risk of contamination.

[0130] The reticle stocker system 600 includes a management unit 608 configured to primarily manage information about reticles stored in the storage unit 602 and monitor the ambient temperature and humidity within the storage unit 602. For example, an oxygen detection unit detects the oxygen concentration in the storage unit environment. Preferably, the environment within the storage unit 602 meets Class 10 cleanliness standards, and the filling gas meets Class 1 cleanliness standards. The reticle stocker system 600 also includes a control unit 610 for controlling the robot arm 609 to transport reticle storage pods to storage shelves 604 in a designated general storage area or buffer area 606. The reticle stocker system 600 also includes a flow control unit 612 used to control various flow rates within the storage unit 602, particularly connected to the non-reactive gas of each storage shelf 604. For example, a mass flow controller controls the flow rate of one or more nitrogen gas main lines. The flow control means 612 further includes a Fan-Filter Unit (FFU) located at the top of the reticle stocker system 600 and a ventilation module located at the bottom of the reticle stocker system 600 .

[0131] Reticle stocker system 600 further includes a cleaning device 614 proximate buffer area 606 for providing clean reticle storage pods 100 to storage 602 and receiving used reticle storage pods 100 from storage 602 .

[0132] 25 is a top view of reticle storage system 600 of the present invention, showing a specific layout inside the reticle storage system. Storage cabinets 602 are arranged mainly along the inner wall surfaces of reticle storage system 600, and a robot arm 609 is located in the center of reticle storage system 600 and can access each storage shelf 604 of these storage cabinets 602.

[0133] Figure 26A is a three-dimensional view of a storage shelf 604 according to a specific embodiment of the present invention, and Figure 26B is a diagram showing the bottom layout of the storage shelf 604.

[0134] Each storage shelf 604 is a flat shelf having a front end 2600 and a rear end 2602. The shelf has an upward-facing support surface and a downward-facing bottom surface. A notch is formed in the front end 2600 of the shelf, providing space for the robot arm 609 to move and allowing the robot arm 609 to smoothly place or pick up reticle storage pods 100 on or from the storage shelf 604. A nitrogen gas filling line 2604 is disposed at the rear end 2602 of the shelf, the upstream end of which is connected to a nitrogen gas source and the downstream end of which is connected to a pair of nozzles 2606 on the flat shelf.

[0135] The mounting surface of each storage shelf 604 is provided with three kinematic coupling pins 2608 for supporting the bottom of the reticle storage pod 100, two of which are located near the front end 2600 and on both sides of the notch, and one kinematic coupling pin 2608 is located at the rear end 2602 of the shelf body. The storage shelf 604 mainly supports and positions the reticle storage pod 100 through these three kinematic coupling pins 2608. Specifically, these three kinematic coupling pins 2608 correspond to the positioning groove 163 of the outer base part shown in FIG. 5C or the positioning groove 132 of the base part 130 shown in FIG. 5I, depending on whether the storage shelf 604 supports an outer pod or an inner pod of the dedicated pods.

[0136] The storage shelf 604 has a stopper 2610 on its mounting surface for holding the reticle storage pod 100. Preferably, the stopper 2610 displays identification information for the robot arm 609. The information can also be displayed on the front end 2600 of the storage shelf 604. As shown in the figure, side walls are formed on both sides of the shelf body to hold the reticle storage pod 100. The sides of the shelf body of the storage shelf 604 are fixed to the vertical branches of a wall or frame by a pair of connecting arms 2612, thereby forming a vertical stack of multiple storage shelves 604. The kinematic coupling pin 2608, stopper 2610, and side walls can be made of PEEK plastic to reduce particles generated by friction.

[0137] Figure 27A shows storage shelf 604 with reticle storage pods 100. Figure 27B shows a view from the bottom of storage shelf 604 with reticle storage pods 604. Figure 27C shows another view of storage shelf 604 with reticle storage pods 100.

[0138] 5A, the reticle storage pod 100 includes a dedicated inner pod 101 and a dedicated outer pod 102, and the dedicated outer pod 102 has an outer lid 150 and an outer base 160. A latch mechanism 2700 for locking or unlocking the outer lid 150 and the outer base 160 is disposed at the bottom of the outer base 160. When the reticle storage pod 100 is loaded onto the elevator platform of the reticle loading system 200 shown in FIG. 14, an operating mechanism provided on the second elevator B cooperates with the latch mechanism 2700 of the outer base 160 to lock or unlock the dedicated outer pod 102.

[0139] When a reticle storage pod 100 is placed on a designated storage shelf 604, the kinematic coupling pins 2608 of the storage shelf 604 engage with the corresponding positioning grooves 163 on the bottom of the reticle storage pod 100 to position the reticle storage pod 100 on the storage shelf 604. Specifically, the kinematic coupling pins 2608 of the storage shelf 604 are located at the outer ends of the corresponding positioning grooves 163, i.e., the ends away from the latch mechanisms 2700, and the inner ends of each positioning groove 163 closer to the latch mechanisms 2700 are exposed through the cutouts, allowing the positioning pins 2804 of the robot arm 609 to engage with the proximal ends of the corresponding positioning grooves 163 when the robot arm 609 approaches the bottom of the reticle storage pod 100.

[0140] Figure 28A is a top view of a storage shelf 604 and a robot arm 609 according to a specific embodiment. The robot arm 609 is positioned below a reticle storage pod 100, with the locating groove 163 in the bottom of the reticle storage pod 100 on the storage shelf 604 shown in dashed lines. Figure 28B is a side view of the robot arm 609 as it moves below the storage shelf 604 and lifts the reticle storage pod 100. Figure 28C is a side view of the robot arm 609 as it removes the reticle storage pod 100 from the storage shelf 604.

[0141] The robot arm 609 has a front end 2800 and a rear end 2802. The front end 2800 is basically an arrow-shaped flat plate with three positioning pins 2804 on its upward-facing support surface. These three positioning pins 2804 correspond to the inner ends of the positioning grooves 163 on the bottom of the reticle storage pod 100, and the kinematic coupling pins 2608 on the storage shelf 604 correspond to and engage with the outer ends of the positioning grooves 163. In other words, the positioning grooves 163 on the bottom of the reticle storage pod 100 of the present invention extend from at least the flat shelf of the storage shelf 604 to the notch, but the present invention is not limited thereto. The rear end 2802 is connected to a transmission mechanism, so that the robot arm 609 can move at least in the horizontal and vertical directions.

[0142] As shown in Figures 28A and 28B, when the robot arm 609 approaches the reticle storage pod 100, the front end 2800 of the robot arm 609 first extends under the cutout of the target storage shelf 604, and the positioning pin 2804 of the robot arm 609 aligns with the corresponding positioning groove 163 on the bottom of the reticle storage pod 100.

[0143] The robot arm 609 rises to engage the locating pin 2804 with the locating groove 163 on the bottom of the reticle storage pod 100. As shown in FIG. 28C, the robot arm 609 continues to rise, lifting the reticle storage pod 100 off the storage shelf 604 to at least the height of the front edge 2600 of the storage shelf, allowing the robot arm 609 to retract from the storage shelf 604.

[0144] When determining the minimum space required for the operation of the robot arm 609 to access each reticle storage pod 100, the height between the upper and lower storage shelves 604 is minimized to maximize storage efficiency.

[0145] 29 shows an upstream air supply line 2900 and a flow control means of the storage shelf. The downstream of the air supply line 2900 is connected to the gas filling line 2604 shown in FIG. 26A. Therefore, nitrogen gas can be supplied into the pod via the nozzle 2606 of the storage shelf 604 and the corresponding two gas valves 162 of the reticle storage pod 100 shown in FIG. 5C. The other two unconnected gas valves 162 of the reticle storage pod 100 exhaust gas from within the pod, thereby creating a convection gas flow in the reticle storage space of the reticle storage pod 100 on the storage shelf 604. The flow control means upstream of each air supply line 2900 may include a ball valve 2901, a flow display 2902, a restrictor valve 2903, a filter 2904, a thermo-hygrometer 2905, a mechanical pressure gauge 2906, an electronic pressure gauge 2907, a pressure regulating valve 2908, and a main line 2909 having a pressure gauge 2910 and an air valve 2911, although the invention is not limited thereto.

[0146] FIG. 30 illustrates an upstream air supply line connecting to a storage shelf 604 according to two specific embodiments. In a configuration with a flow controller 3000, one or more sensors on the storage shelf 604 transmit a detection signal to the flow controller 3000 based on the presence or absence of a reticle storage pod 100 on the storage shelf 604, allowing the flow controller 3000 to control the gas flow rate into the storage shelf 604 accordingly. For example, when a dedicated pod is present on the storage shelf 604, nitrogen gas is supplied, and when no dedicated pod is present on the storage shelf 604, the nitrogen gas supply is turned off. A needle valve 3002 configuration allows the gas flow rate supplied to the storage shelf 604 to be manually adjusted or maintained in a continuous gas supply state. Regardless of the gas used, a filter 3001 ensures low impurities in the gas.

[0147] FIG. 31 shows an abnormality handling flow for the robot arm 609 of the reticle stocker system 600, which includes inspecting the pellicle condition and, depending on the pellicle condition, optionally returning the reticle pod (non-dedicated pod) or reticle storage pod (dedicated pod) to a designated position by selectively performing a specific operation.

[0148] FIG. 32 is a schematic diagram of a reticle loading apparatus 200′ and a reticle stocker system 600′ according to another embodiment of the present invention. Each storage shelf 604 of the storage 602 in this embodiment supplies only the dedicated outer pods 102 of the reticle storage pods 100 shown in FIG. 5A , and does not provide the dedicated inner pods 101 of the reticle storage pods 100. However, the dedicated outer pods 102 can accommodate the inner pods obtained from the reticle loading system 200′, i.e., the inner pods 11 of the non-dedicated reticle pods 10 shown in FIG. 1 . Therefore, the purpose of the reticle loading system 200′ in this embodiment is to transfer the inner pods containing reticles. The remaining configuration is substantially the same as that of the embodiment shown in FIG. 24 , and therefore, a description thereof will be omitted. Details of the reticle loading system 200′ and the reticle stocker system 600′ will be described later.

[0149] The reticle stocker system 600' of this embodiment does not provide dedicated inner pods because the dedicated outer pod 102 of the reticle storage pod 100 of the present invention has a hold-down mechanism as shown in FIG. 8A and is compatible with non-dedicated inner pods. As shown in FIGS. 8A and 11B, when the dedicated outer pod 102 of the storage facility 602 accommodates a non-dedicated inner pod 11, the horseshoe-shaped hold-down rib 153 of the dedicated outer pod 102 surrounds and restricts the cap 34, and the hold-down posts 154 abut against the hold-down pins 32 on the cover 30 of the inner pod 11, thereby enabling the non-dedicated inner pod 11 and reticles to be accommodated. This has the advantage of reducing the risk of particle contamination because the reticles are not exposed to the environment outside the pod during the transfer process.

[0150] FIG. 33 is a reticle loading flowchart according to the embodiment of FIG. 32, in which the left half is performed by the first lifting / lowering means A and the right half is performed by the second lifting / lowering means B.

[0151] Step 3300A: A reticle pod 10 including an inner pod 11 and an outer pod 12 containing reticles is loaded into the reticle loading system 200′ by an overhead crane system or manually from the first port 202. The loaded reticle pod 10 is received at height A0 by the lifting platform of the first lifting means A.

[0152] Step 3300B: A dedicated outer pod 102 of the dedicated pods is loaded from the reticle stocker system 600' to the reticle loading system 200' via the second port 204. The loaded dedicated outer pod 102 is an empty pod that does not contain an inner pod. Specifically, the robot arm 609 of the reticle stocker system 600' places the dedicated outer pod 102 on the lifting platform of the second lifting means B, i.e., at a position at height B0.

[0153] Step 3302: Detect the reticle pod 10 and the dedicated outer pod 102 (e.g., information displayed on or within the pod body and the status of the reticle pellicle). The lifting platforms of the first lifting device A and the second lifting device B are lowered to heights A2 and B2, respectively. During the lowering process, the non-dedicated outer pod 12 and the dedicated outer pod 102 are opened by similar mechanisms. The lifting platforms of the first lifting device A at heights A2 and B2 carry only the outer base 40 and the inner pod 11, while the lifting platform of the second lifting device B carries only the outer base 160 of the dedicated pod, and both are in the reticle transfer environment 206. In this embodiment, there is no need to open the inner pod 11, so the reticle transfer environment 206 only needs to meet the cleanliness requirements of the inner pod to be transferred. Furthermore, in this embodiment, since it is not necessary to open the inner pod 11 to transfer the reticle, the first lifting means A and the second lifting means B can omit the target-related operations at heights A1 and B1, as compared to the embodiment of FIG.

[0154] Step 3304: The clamping mechanism of the reticle loading system 200′ picks up the inner pod 11 and transfers it to the outer base portion 160 of the dedicated pod. The clamping mechanism may be similar to the configuration in FIG. 19A, but is suitable for the inner pod 11. The operation of the clamping mechanism is similar to that described in FIG. 20.

[0155] Step 3306: After the transfer of the inner pod 11 is completed, while the lifting platforms of the first lifting means A and the second lifting means B are rising to heights A0 and B0, the non-dedicated outer pod 12 is closed and the dedicated outer pod 102 is closed to accommodate the inner pod 11.

[0156] Step 3308: The dedicated outer pod 102 containing the inner pod 11 is stored in the designated storage shelf 604 of the repository 602. The reticle stocker system 600′ can designate the target storage shelf 604 according to the shortest path that the robot arm 609 can travel.

[0157] Step 3310: The storage shelf 604 fills the nitrogen gas into the dedicated outer pod 102. Similarly, the dedicated outer pod 102 and storage shelf 604 of this embodiment may be configured as in the embodiment of Figures 27A and 27B to achieve gas filling.

[0158] FIG. 34 is a reticle unloading flowchart according to the embodiment of FIG. 32, the left half of which is performed by the first lifting / lowering means A, and the right half of which is performed by the second lifting / lowering means B.

[0159] Step 3400A: An empty outer pod 12 of a non-dedicated reticle pod 10 is loaded from the first port 202. The loaded outer pod 12 has no inner pod inside and is placed by the lifting platform of the first lifting means A at a height A0.

[0160] Step 3400B: A dedicated outer pod 102 is loaded from the reticle stocker system 600′ via the second port 204, and the loaded dedicated outer pod 102 accommodates an inner pod 11 with a reticle. The loaded dedicated outer pod 102 and inner pod 11 are placed by the lifting platform of the second means B at a height B0.

[0161] Step 3402: Similarly, the first lifting means A and the second lifting means B detect the outer pod 12, the dedicated outer pod 102, and the inner pod 11, which are non-dedicated pods. The outer pod 12 and the dedicated outer pod 102 are opened, respectively, and the outer base portion 40 of the outer pod 12 and the outer base portion 160 of the dedicated outer pod 102 are lowered to heights A2 and B2, respectively, to position the inner pod 11 in the reticle transfer environment 206.

[0162] Step 3404: Pick up the inner pod 11 and transfer the inner pod 11 onto the outer base part 40 of the outer pod 12. The transfer is performed in the reticle transfer environment 206 or other environment with cleanliness suitable for transferring the inner pod.

[0163] Step 3406: During the process in which the lifting platforms of the first lifting means A and the second lifting means B rise from heights A2 and B2 to heights A0 and B0, the non-dedicated outer pod 12 is closed to accommodate the inner pod 11, and the dedicated outer pod 102 is closed. At this time, the closed dedicated outer pod 102 is an empty pod, and the non-dedicated inner pod 11 and the outer pod 12 together form the reticle pod 10.

[0164] Step 3408: The first elevator A transfers the reticle pod 10 out of the reticle loading system 200' via the first port 202 for transport to various processing environments.

[0165] FIG. 35 is a flowchart of the inner pod 11 transfer process according to the embodiment of FIG. 32, with the left half performed by the first lifting means A and the right half performed by the second lifting means B.

[0166] Steps 3500A and 3500B: The first lifting means A receives the outer pod 12 of the non-dedicated reticle pod 10 loaded at height A0, and the second lifting means B receives the dedicated outer pod 102 of the reticle storage pod 100 loaded at height B0. Either the non-dedicated outer pod 12 or the dedicated outer pod 102 accommodates an inner pod 11 containing a reticle, and the inner pod 11 is compatible in structure with the non-dedicated outer pod 12 and the dedicated outer pod 102.

[0167] Steps 3502A and 3502B: The first lifting means A and the second lifting means B operate to unlock the non-dedicated outer pod 12 and the dedicated outer pod 102, respectively. After unlocking, the first lifting means A and the second lifting means B grasp the outer lid bodies of the non-dedicated outer pod 12 and the dedicated outer pod 102, respectively, and lower the lifting platform from heights A0 and B0 to heights A2 and B2, so that the non-dedicated outer pod 12 and the dedicated outer pod 102 are opened during the lowering process.

[0168] Steps 3504A and 3504B: The first lifting means A and the second lifting means B respectively operate to identify information such as a two-dimensional code or reticle pellicle status displayed on the non-dedicated outer pod 12, the dedicated outer pod 102, the contained inner pod 11, and / or the reticle during the descent. If the identification result does not match the expected target, the reticle loading system 200' can execute the relevant abnormality processing flow.

[0169] Step 3506: The inner pod 11 is transferred between the non-dedicated outer base part 40 and the dedicated outer base part 160 using a reticle clamping mechanism 1900 similar to that shown in Figure 19A. For example, the clamping arm 1906 and contact plate 1908 of the reticle clamping mechanism 1900 shown in Figure 19A are modified to fit the dimensions and structure of the inner pod 11 to achieve the transfer of the inner pod 11.

[0170] Steps 3508A and 3508B: While the first lifting means A and the second lifting means B operate to raise the lifting platform from heights A2 and B2 to heights A0 and B0, respectively, the non-dedicated outer pod 12 and the dedicated outer pod 102 are closed and locked, respectively.

[0171] Steps 3510A and 3510B: A reticle pod 10 with an empty non-dedicated outer pod 12 or inner pod 11 can be exported from the reticle loading system 200' via the first port 202, and an empty dedicated outer pod 102 or a dedicated outer pod 102 containing a non-dedicated inner pod 11 can be returned to the reticle stocker system 600' via the second port 204.

[0172] 36 is a schematic diagram of the transfer flow of the inner pod 11. During this time, the operations of the first lifting / lowering means A and the second lifting / lowering means B are performed in the reticle transfer environment 206 or another environment that satisfies the cleanliness requirements.

[0173] As shown in the figure, the lifting platform descends evenly beneath the inner pod clamping mechanism 1900'. The clamping mechanism 1900' moves horizontally above the inner pod 11. When the inner pod clamping mechanism 1900' does not move up or down, the lifting platform of the first lifting means A is raised to a height at which the inner pod 11 can be picked up. After the inner pod 11 is picked up, the lifting platform is lowered to complete the separation. The inner pod 11 is moved horizontally onto the lifting platform of the second lifting means B. The lifting platform of the second lifting means B rises to receive the inner pod 11, and the reticle clamping mechanism 1900' is released, thereby realizing the transfer of the inner pod 11.

[0174] FIG. 37 is a schematic diagram of a reticle loading apparatus 200 and a reticle stocker system 600″ according to another embodiment of the present invention, where the reticle stocker system 600″ is substantially the same as the configuration of the previously described embodiment, with the main difference being that the storage 602 is provided with multiple storage compartments 604′. Each storage compartment 604′ can store a dedicated dual pod, such as the reticle storage pod 100 shown in FIG. 5A. Alternatively, each storage compartment 604′ can store a single pod 3700, which primarily consists of a lid and a base, and is used to store reticles obtained from the reticle pod 10.

[0175] Figure 38A shows a specific embodiment of a storage chamber 604'. Figure 38B shows the arrangement of the upward-facing mounting surfaces inside the storage chamber 604'. Figure 38C shows a single pod 3700 in the storage chamber 604'. Figure 38D shows the mounting surface mechanism of the storage chamber 604' that supports the bottom of the single pod.

[0176] These storage chambers 604' can be fixed to the support of the storage cabinet 602 by similar means to establish a vertical stacking configuration. Each storage chamber 604' is essentially a pod body with an opening, providing storage space for a single pod 3700. The opening allows a robot arm 609 to access the single pod 3700. Two connectors 3800 are provided on the rear of the storage chamber 604', the upstream of which is connected to a nitrogen gas source, thereby allowing nitrogen gas to be filled into the storage chamber 604'. Three kinematic coupling pins 3802 and two auxiliary guide pins 3804 are provided on the inner, upward-facing mounting surface of the storage chamber 604' for positioning and fixing the single pod 3700. In another embodiment, a gate can be provided at the opening of the storage chamber 604' to prevent the single pod 3700 from falling and maintain the nitrogen atmosphere within the storage chamber 604'.

[0177] Fig. 39A is a reticle loading flow diagram according to Fig. 37. Fig. 39B is a reticle unloading flow diagram according to Fig. 37.

[0178] Step 3900A: A dual pod such as the reticle pod 10 including an inner pod that accommodates a reticle and an outer pod that accommodates the inner pod is loaded onto the elevator platform of the first elevator means A of the reticle loading system 200 from the first port 202.

[0179] Step 3900B: One empty single pod 3700 is loaded onto the lifting platform of the second lifting means B from the reticle stocker system 600″ via the second port 204.

[0180] In step 3902, the reticle contained in the inner pod of the reticle pod 10 is removed and transferred to an empty single pod. Similar to the embodiment of FIG. 24, as the platform of the first lifting device A descends from height A0 to height A2, the outer pod and inner pod open, exposing the reticle. As the platform of the second lifting device B descends from height B0 to height B22, the single pod 3700 opens, exposing the inner base. Next, the reticle clamping mechanism transfers the reticle from the inner pod base of the reticle pod 10 to the base of the single pod 3700. Finally, as the platform of the second lifting device B ascends from height B2 to height B0, the reticle is placed into the single pod 3700.

[0181] Step 3904: The single pod 3700 containing the reticle is transported from the reticle loading system 200 to the reticle stocker system 600″ and moved to the designated storage room 604′ in the repository 602. Preferably, the designated storage room 604′ is determined by the shortest travel path of the robot arm 609.

[0182] Step 3906: The robot arm 609 opens the gate of the storage chamber 604', places the single pod 3700 into the storage chamber 604', and then closes the gate and fills the storage chamber 604' with nitrogen gas, completing the reticle storage. In an embodiment without a gate, the robot arm 609 does not need to open the gate. The gate can be replaced by continuous nitrogen gas filling.

[0183] Step 3908A: An empty dual pod (such as reticle pod 10) or an empty single pod 3700 is loaded onto the lifting platform of the first lifting means A of the reticle loading system 200.

[0184] Step 3908 B: The robot arm 609 takes out the single pod 3700 with the designated reticle from the designated storage room 604 ′ and loads it onto the lifting platform of the second lifting means B of the reticle loading system 200 .

[0185] Step 3910: The first elevator A and the second elevator B respectively lower the inner pod base of the reticle pod 10 and the reticle in the single pod 3700 into the reticle transfer environment 206, and transfer the reticle in the single pod to the reticle pod 10.

[0186] Step 3912: The reticle pod 10 containing the reticle is removed by the overhead crane system via the first port 204 and transported to the target station.

[0187] 40 is a specific reticle transfer flow diagram according to the embodiment of FIG. 37, with the left half showing steps performed by the first lifting means A and the right half showing steps performed by the second lifting means B. Step 4000A: A dual pod (such as reticle pod 10) is loaded onto the lifting platform of the first lifting means A from the first port 202. Step 4000B: The single pod 3700 is loaded from the reticle stocker system 600" onto the lifting platform of the second lifting means B. Step 4002A: The lid of the outer pod is grasped, the outer pod is unlocked, and the lifting platform of the first lifting means A is lowered from height A0 to height A1. Step 4002B: The lid of the single pod 3700 is grasped at height B0 or ​​height B1, and the lifting platform with the base part of the single pod 3700 placed on it is lowered from height B0 to height B1. Step 4004A: The lifting platform with the base part of the inner pod placed on it is lowered from height A1 to height A2. Step 4004B: The lifting platform with the base part of the single pod 3700 placed on it is lowered from height B1 to height B2. Step 4006 Step 4008A: The reticle clamping mechanism transfers reticles between the base of the inner pod and the base of the single pod 3700. Step 4008A: In the process of raising the lifting platform from height A2 to height A1, the inner pod is closed. Step 4008B: In the process of raising the lifting platform from height B2 to height B1, the single pod 3700 is closed. Step 4010A: In the process of raising the lifting platform from height A1 to height A0, the outer pod is closed and locked. Step 4010B: The lifting platform is raised from height B1 to height B0. Step 4012A: The dual pod is removed by the overhead crane system. Step 4012B: The single pod 3700 is returned to the reticle stocker system 600.

[0188] Regardless of whether the reticles are ultimately stored in a single pod or dual pods, the storage environment is important for the storage of the reticles. A storage chamber with a gate is beneficial for maintaining the condition of the storage environment. The operation options for the gate are also limited by the internal layout of the stocker system. An example of an operation mechanism for the gate of a storage chamber of the stocker system of the present invention is shown below.

[0189] FIG. 41A shows the interaction flow between the robot arms 4100, 4102 of the stocker system and the storage chamber 4104 (putting a pod P into the storage chamber 4104). FIG. 41B shows the interaction flow between the robot arms 4100, 4102 of the stocker system and the storage chamber 4104 (removing a pod P from the storage chamber 4104). The storage chamber 4104 shown can include a gate, and the front end 4102 of the robot arm can be configured to interact with the gate of the storage chamber 4104. For example, the front end 4102 of the robot arm can have a specific mechanism that extends into a notch at the bottom of the gate and flips open the gate to expose the space of the storage chamber 4104, but the present invention is not limited thereto. More specifically, the robot arm can be composed of at least two parts: a gripping mechanism 4100 and an interaction mechanism 4102 for the gate, and the two mechanisms can operate independently. As shown in Figure 41A, one part of the robot arm first opens the gate, and then another part places the pod P. After the placement part is completed, the gate is returned to the closed state. The flow in Figure 41B is the opposite.

[0190] FIG. 42A shows another embodiment of interaction between the robot arm of the stocker system and a storage chamber, and is a flow diagram for placing a pod into the storage chamber. FIG. 42B shows another embodiment of interaction between the robot arm of the stocker system and a storage chamber, and is a flow diagram for removing a pod from the storage chamber. The robot arm in this embodiment includes two independent parts: a gripper 4200 and a pusher 4202. The gripper 4200 is used to place or clamp a pod P and access the space in the storage chamber 4204. The storage chamber 4204 has a pivotable gate 4206. The pusher 4202 extends forward relative to the gripper 4200 and pushes a plate 4208 on the gate 4206, which opens the gate 4206 in a lever-like manner. The gripper can then feed the pod P into the storage chamber 4204. After completion, the pusher 4208 retracts, returning the gate 4206 to its closed state.

[0191] 43 is a schematic diagram of a reticle stocker conduit gas filling system according to an embodiment of the present invention. At least one main conduit 4300 is connected upstream to a nitrogen gas source 4302 and downstream to multiple branch conduits 4304. Each branch conduit 4304 is connected to a corresponding storage chamber 604′ in the storage cabinet 602. At least one flow controller 4306 is connected to the main conduit 4300. When a reticle pod is placed in a specified storage chamber 604′ in the storage cabinet 602, the flow controller 4306 determines whether to open or close a specific air valve to fill the specified storage chamber 604′ with nitrogen gas. For example, the flow controller 4306 can be configured to monitor the gas flow rate of the main conduit 4306 and control the opening and closing of an adjustment valve 4308 on each branch conduit 4304. The adjustment valve 4308 is used to adjust the gas flow rate of each branch conduit 4304. As shown in the figure, the upstream side of the main line 4300 may include a particle filter 4310, a pressure gauge 4312, a pressure sensor 4314, a regulator 4316, and a ball valve 4318, although the present invention is not limited thereto.

[0192] FIG. 44 is a schematic diagram of a reticle loading device and a reticle stocker system according to another embodiment of the present invention. Compared with the previous embodiments, it can be seen that the reticle loading system 200″ of this embodiment realizes reticle transfer using only a single lifting means A. Similarly, the reticle pod 10 opens as it descends from height A0 to height A1, ultimately exposing the inner pod 11. The inner pod 11 at height A1 can be picked up through interaction with the robot arm 609, thereby shortening the reticle transfer path and reducing the risk of reticle shaking.

[0193] FIG. 45A is a reticle loading flow diagram according to the embodiment of FIG. 44. FIG. 45B is a reticle unloading flow diagram according to the embodiment of FIG. 44. Step 4500: A dual pod (such as the reticle pod 10) including an inner pod 11 containing a reticle and an outer pod containing the inner pod 11 is loaded onto the elevator platform. Step 4502: The inner pod 11 of the dual pod is exposed to height A1, which is a reticle transfer environment. Step 4504: The inner pod 11 is transported to a designated storage chamber 604′ in the archive 602. Step 4506: The gate of the designated storage chamber 604′ is opened to allow the inner pod 11 to enter. After closing the gate, nitrogen gas is filled into the storage chamber 604′ to complete storage. Step 4508: An outer pod (such as the outer pod 12 of FIG. 1) of the dual pod, including a lid and a base, is loaded onto the elevator platform. Step 4510: In the process of lowering the lifting platform, the outer pod opens and the base is placed at height A1. Step 4512: The inner pod 11 containing the reticle is removed from the specified storage room 604' in the storage cabinet 602, and the inner pod is unloaded and placed on the base located at height A1. Step 4514: In the process of raising the lifting platform, the dual pod is closed and locked. Step 4516: The dual pod is removed.

[0194] 46A is another reticle loading flow diagram according to the embodiment of FIG. 44. FIG. 46B is another reticle unloading flow diagram according to the embodiment of FIG. 44. Step 4600: A dual pod including an inner pod 11 and an outer pod containing the inner pod is loaded onto the elevator platform from a port. Step 4602: The lid of the outer pod is grasped, and the elevator platform carrying the inner pod 11 and the outer pod base is lowered from height A0 to height A1, and the outer pod is opened. Step 4604: While the elevator platform is lowering from height A0 to height A1, the two-dimensional code on the inner pod 11 is read by the identification means to detect the pellicle state. Step 4606: The robot arm of the stocker system 600″ picks up the inner pod 11 placed on the outer pod base, and only the outer pod of the dual pod is left in the reticle loading system 200″. Step 4608: While the lifting platform is rising from height A1 to height A0, the outer pod of the dual pod is closed and locked. Step 4610: The outer pod of the dual pod is removed from the port. Step 4612: The outer pod of the dual pod is loaded from the port onto the lifting platform to receive the inner pod 11 in the reticle stocker system 600". Step 4614: The lid of the outer pod is grasped, and the outer pod opens as the lifting platform with the outer pod base placed on it is lowered from height A0 to height A1. Step 4616: The robot arm of the reticle stocker system 600" places the specified inner pod 11 on the outer pod base of the lifting platform. Step 4618: While the lifting platform is rising from height A1 to height A0, the two-dimensional code on the inner pod 11 is read by the identification means to detect the pellicle status. Step 4620: The dual pod is closed and locked during the process of raising the platform from height A1 to height A0. Step 4622: The dual pod is removed from the port. [Explanation of symbols]

[0195] 100 Reticle Storage Pods 101 dedicated inner pod 102 Dedicated outer pod 10 Reticle Pod 11 Inner Pod 110 Lid 111 Handle 112 Filter membrane cover 114 Groove 12 outer pods 120 Reticle Retainer 121 Main Unit 122 Elastic Arm 123 Restricted Section 124 Slope 125 Pressing part 130 Base 131 Pellicle groove 132 Positioning groove 134 Support 135 Slope 136 Restricted Blocks 1500~1510 steps 150 outer lid 151 Handle 152 Flat top surface 153 Horseshoe-shaped hold-down rib 154 Hold-down column 1600~1608 steps 160 outer base 161 Locating pin 162 Gas valve 163 Positioning groove 1700~1712 steps 1800A Outer pod lid support surface 1802A Lift Platform 1900 Reticle clamping mechanism 1900' Reticle clamping mechanism 1902 Rail 1904 Clamping assembly 1906 Clamping arm 1908 Contact plate 1910 Engagement part 2000 lift platform 200 Reticle Loading System 200' Reticle Loading System 200" Reticle Loading System 202 Port 1 204 Second Port 206 Reticle Transfer Environment 20 Base 2600 front end 2602 Rear end 2604 Gas-filled pipeline 2606 Nozzle 2608 Kinematic Coupling Pin 2610 Stopper 2612 Connecting Arm 2700 Latch mechanism 2800 front end 2802 Rear end 2804 Locating pin 2900 Air supply line 2901 Ball valve 2902 Flow Display 2903 Restrictor valve 2904 Filter 2905 Thermohygrometer 2906 Mechanical pressure gauge 2907 Electronic pressure gauge 2908 Pressure Regulating Valve 2909 Main pipeline 2910 Pressure Gauge 2911 Air Valve 3000 Flow Controller 3001 Filter 3002 Needle valve 300 Flow Controller 30 Lid 32 Hold Down Pin 3300~3310 steps 3400~3408 steps 34 Cap 3500~3510 steps 3700 Single Pod 3900~3912 steps 3800 Connector 3802 Kinematic Coupling Pin 3804 Guide pin 4000~4012 steps 400 Reticle Stocker Gas Filling Pipeline System 40 outer base 4100 Robot arm gripping mechanism 4102 Front end of robot arm (interaction mechanism) 4104 Storage Room 4200 Grip 4202 Push part 4204 Storage Room Gate 4206 4208 board 4300 Main pipeline 4302 Nitrogen gas source 4304 Branch pipeline 4306 Flow Controller 4308 Control valve 4310 Particle Filter 4312 Pressure gauge 4314 Pressure Sensor 4316 Regulator 4318 Ball Valve 4500~4516 steps 4600~4622 steps 500 Reticle Stocker Management System 50 outer lid 52 Handle 600 Reticle Stocker System 600' Reticle Stocker System 600" Reticle Stocker System 602 Storage 604 Storage Shelves 604' Storage Room 606 Buffer Area 608 Management measures 609 Robot Arm 610 Control means 612 Flow control means 614 Cleaning equipment A. First lifting means A0~A2 height B. Second lifting means B0~B2 height H Vertical step P Pod R reticle W window

Claims

1. a first port configured to allow transfer of the reticle pod between an external environment and a load environment; a second port configured to allow reticle storage pods to be transferred between the loading environment and the storage environment; a first lifting means configured to cooperate with the first port to place the reticle pod thereon, the first lifting means being movable within the load environment so that the reticle pod can be raised and lowered between an upper end position and a lower end position, wherein a storage space for the reticle pod is exposed to the load environment when the reticle pod reaches the lower end position and opens; a second lifting means configured to cooperate with the second port to receive the reticle storage pod, the second lifting means being movable within the load environment so that the reticle storage pod can be raised and lowered between an upper end position and a lower end position, wherein a storage space of the reticle storage pod is exposed to the load environment when the reticle storage pod reaches the lower end position and opens; A reticle loading system comprising: a clamping mechanism operable within the loading environment such that both the reticle pod and the reticle storage pod are positioned at a height corresponding to the lowest reachable position, and a reticle or a base on which the reticle is placed can be transferred between the exposed storage space of the opened reticle pod and the exposed storage space of the opened reticle storage pod.

2. 2. The reticle loading system of claim 1, wherein the reticle pod at the uppermost position and the reticle storage pod at the uppermost position are both in a closed state in which the storage space of the reticle pod and the storage space of the reticle storage pod are not exposed.

3. 2. The reticle loading system of claim 1, wherein the reticle pod at the lowermost position and the reticle storage pod at the lowermost position are both in an open state with the outer and inner lids of the reticle pod removed and the outer and inner lids of the reticle storage pod removed.

4. 4. The reticle loading system of claim 3, wherein the outer and inner lids of the removed reticle pod remain in a position between the upper end position and the lower end position, and the outer and inner lids of the removed reticle storage pod remain in a position between the upper end position and the lower end position.

5. 2. The reticle loading system of claim 1, wherein the clamping mechanism includes a rail and a clamping assembly configured to clamp both sides of the reticle or the base and move laterally along the rail between the lower end positions.

6. 2. The reticle loading system of claim 1, further comprising an identification means configured to cooperate with the first lifting means or the second lifting means and to read information associated with any one of the reticle pod, the reticle storage pod, the pellicle, and the reticle.

7. 10. The reticle loading system of claim 1, further comprising gas control means configured to control intake, filtration, and exhaust to maintain cleanliness within said loading environment.

8. providing a first port for transferring a reticle pod from an external environment to a loading environment, the reticle pod containing a reticle therein; providing a second port for transferring reticle storage pods from a storage environment to the loading environment; disposing a first lifting means in the loading environment to cooperate with the first port to move the reticle pod from an upper end position to a lower end position, the reticle pod being in an open state when the reticle pod reaches the lower end position to expose a storage space of the reticle pod in which the reticle is housed; disposing a second lifting means within the loading environment to cooperate with the second port to transport the reticle storage pod from an uppermost position to a lowermost position, the reticle storage pod being in an open position to expose a storage space of the reticle storage pod when the reticle storage pod reaches the lowermost position; a step of transferring the exposed reticle from the reticle pod in the open state to the exposed storage space of the reticle storage pod in the open state by a clamping mechanism operable within the loading environment and positioned at a height corresponding to the lowermost position reachable by both the reticle pod and the reticle storage pod.

9. 9. The reticle loading method of claim 8, further comprising the step of disposing a lid opening means for removing the outer lid and inner lid of the reticle pod before the outer base portion and inner base portion of the reticle pod reach the lower end position.

10. 9. The reticle loading method of claim 8, further comprising the step of disposing a lid opening means for removing the outer lid and inner lid of the reticle storage pod before the outer base and inner base of the reticle storage pod reach the lower end position.

11. 9. The reticle loading method according to claim 8, further comprising the steps of: after the reticle is transferred, lifting the reticle pod to the upper end position by the first lifting means; and transferring the reticle pod from the loading environment to the external environment via the first port.

12. 9. The reticle loading method of claim 8, further comprising the steps of: after the reticle has been transferred, lifting the reticle storage pod to the upper end position by the second lifting means; and transferring the reticle storage pod from the loading environment to the storage environment via the second port.

13. 9. The reticle loading method of claim 8, further comprising the step of disposing an identification means for reading information related to any one of the reticle pod, the reticle storage pod, the pellicle, and the reticle between the upper end position and the lower end position of the first lifting means or between the upper end position and the lower end position of the second lifting means.

14. 9. The reticle loading method of claim 8, further comprising the step of: disposing a gas control means in said load environment to maintain cleanliness within said load environment.

15. providing a first port for transferring the reticle pod from an external environment to a loading environment; providing a second port for transferring a reticle storage pod from a storage environment to the loading environment, the reticle storage pod containing a reticle therein; disposing a first lifting means in the loading environment to cooperate with the first port to transport the reticle pod from an upper end position to a lower end position, the reticle pod being in an open position to expose a storage space for the reticle pod when the reticle pod reaches the lower end position; disposing a second lifting means within the loading environment to cooperate with the second port to move the reticle storage pod from an uppermost position to a lowermost position, such that when the reticle storage pod reaches the lowermost position, the reticle storage pod is in an open position to expose a storage space of the reticle storage pod in which the reticle is housed; a step of transferring the exposed reticle from the reticle storage pod in the open state to the exposed storage space of the reticle pod in the open state by a clamping mechanism operable within the load environment and positioned at a height corresponding to the lowermost position reachable by both the reticle pod and the reticle storage pod.

16. 16. The reticle unloading method of claim 15, further comprising the step of disposing a cover opening means for removing the outer cover and inner cover of the reticle pod before the outer base portion and inner base portion of the reticle pod reach the lower end position.

17. 16. The reticle unloading method of claim 15, further comprising the step of disposing a lid opening means for removing the outer lid and inner lid of the reticle storage pod before the outer base and inner base of the reticle storage pod reach the lower end position.

18. 16. The reticle unloading method of claim 15, further comprising the steps of: after the reticle is transferred, lifting the reticle pod to the upper end position by the first lifting means; and transferring the reticle pod from the load environment to the external environment via the first port.

19. 16. The reticle unloading method of claim 15, further comprising the steps of: after the reticle has been transferred, lifting the reticle storage pod to the upper end position by the second lifting means; and transferring the reticle storage pod from the loading environment to the storage environment via the second port.

20. 16. The reticle unloading method of claim 15, further comprising the step of disposing an identification means for reading information related to any one of the reticle pod, the reticle storage pod, the pellicle, and the reticle between the upper end position and the lower end position of the first lifting means or between the upper end position and the lower end position of the second lifting means.

21. 16. The reticle unloading method of claim 15, further comprising the step of: disposing a gas control means in said load environment to maintain cleanliness within said load environment.

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