Disk unit, confocal scanner, and confocal microscope

Abstract

To provide a disk unit, a confocal scanner, and a confocal microscope with which it is possible to obtain, with fewer component counts than before, a high-quality confocal image having more uniform brightness.SOLUTION: The disk unit 24 of a confocal microscope 1 comprises: a microlens array disk 24a having an inner zone Z11 and an outer zone Z12; and a pin-hole array disk 24b which has an inner zone Z21 and an outer zone Z22 and which rotates together the microlens array disk 24a. Microlenses ML1, ML2 are provided to the inner zone Z11 and the outer zone Z12 of the microlens array disk 24a, respectively, and a reflection mirror RM is provided to the inner zone Z21 of the pin-hole array disk 24b. A plurality of pin holes PH corresponding to the microlens ML2 are provided to the outer zone Z22.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a disk unit, a confocal scanner, and a confocal microscope. [Background technology]

[0002] In recent years, attention has been focused on a technology that uses a disk-scanning confocal microscope to generate two-dimensional or three-dimensional images of samples such as biological tissues, organs, and cells. This technology obtains confocal images of a sample by rotating a disk unit to change the irradiation position of illumination light (excitation light) on the sample (scanning the sample with illumination light). This technology has the advantage of obtaining images with excellent resolution and contrast, since it only obtains information on the focal plane.

[0003] Patent Document 1 below discloses a confocal microscope in which a reflecting mirror is provided between a microlens array disk and a pinhole array disk that constitute a disk unit (see FIG. 6). In this confocal microscope, illumination light that has passed through the microlens array disk is reflected by the reflecting mirror and passes through the microlens array disk again, and the illumination light with uniform intensity is irradiated onto an irradiation surface provided on the microlens array disk to obtain a confocal image. In this way, the confocal microscope of Patent Document 1 below uses the microlens array disk that is part of the confocal optical system as well as the microlens array disk that is part of the homogenizer, thereby obtaining a confocal image of uniform brightness and high quality. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 7180707 Summary of the Invention [Problem to be solved by the invention]

[0005] Incidentally, in the confocal microscope disclosed in the above-mentioned Patent Document 1, as described above, the microlens array disk of the disk unit is used as a microlens array disk that forms part of the confocal optical system and a microlens array disk that forms part of the homogenizer. Therefore, it is not possible to separately design the microlens array disk that forms part of the confocal optical system and the microlens array disk that forms part of the homogenizer. If it were possible to separately design an optimal microlens array disk that forms part of the confocal optical system and an optimal microlens array disk that forms part of the homogenizer, it would be possible to obtain a confocal image with more uniform brightness and high image quality.

[0006] Furthermore, in the confocal microscope disclosed in the above-mentioned Patent Document 1, a reflecting mirror needs to be provided at a position midway between the microlens array disk and the pinhole array disk that make up the disk unit, which requires a mechanism to adjust the position and reflection angle of the reflecting mirror, resulting in an increase in the number of parts and an increase in costs.

[0007] The present invention has been made in consideration of the above circumstances, and aims to provide a disk unit, a confocal scanner, and a confocal microscope that can obtain high-quality confocal images with more uniform brightness using fewer parts than conventional methods. [Means for solving the problem]

[0008] In order to solve the above problem, a disk unit (24) according to a first aspect of the present invention comprises a first disk (24a) having a first region (Z11) and a second region (Z12) divided radially, and a second disk (24b) having a first region (Z21) and a second region (Z22) divided radially corresponding to the first disk, the second disk having one surface facing the other surface of the first disk and rotating together with the first disk, wherein a plurality of microlenses (ML1, ML2) are provided in the first and second regions of the first disk, a reflection mirror (RM) is provided in either the first or second region of the second disk to reflect light that has passed through the microlenses provided in either the first or second region of the first disk towards the microlenses, and the other of the first and second regions of the second disk has a plurality of pinholes (PH) corresponding to the microlenses provided in the other of the first and second regions of the first disk.

[0009] In addition, a disk unit according to a second aspect of the present invention is a disk unit according to the first aspect of the present invention, wherein the microlenses (ML1) provided in the first area of ​​the first disk and the microlenses (ML2) provided in the second area of ​​the first disk are of different types.

[0010] Furthermore, a disc unit according to a third aspect of the present invention is a disc unit according to the first or second aspect of the present invention, wherein the microlenses (ML2) provided in the second area of ​​the first disc are arranged in a spiral shape.

[0011] Furthermore, a disk unit according to a fourth aspect of the present invention is a disk unit according to any one of the first to third aspects of the present invention, wherein the focal length of the microlens provided in either the first area or the second area of ​​the first disk is twice the focal length of the microlens provided in the other of the first area or the second area of ​​the first disk.

[0012] Furthermore, a disk unit according to a fifth aspect of the present invention is a disk unit according to any one of the first to fourth aspects of the present invention, wherein the planar shape of the microlenses provided in at least one of the first and second areas of the first disk is circular or rectangular.

[0013] Furthermore, a disk unit according to a sixth aspect of the present invention is a disk unit according to any one of the first to fifth aspects of the present invention, further comprising a connecting shaft (24c) that connects the first disk and the second disk, and a drive unit (24d) that drives the connecting shaft to rotate.

[0014] Furthermore, a confocal scanner according to a first aspect of the present invention comprises a disk unit (24) according to any one of the first to sixth aspects of the present invention, a light guiding unit (22, 23, 25, 26) which forms a Koehler illumination system together with the microlenses in a first illumination area (R11) set in either the first area or the second area of ​​the first disk and guides a plurality of split light beams (L3) split by the microlenses in the first illumination area to a second illumination area (R12) set in the other of the first area or the second area of ​​the first disk, and a beam splitter (27) which is arranged between one surface of the first disk and the other surface of the second disk, transmits light which has passed through the microlenses in the second illumination area, and reflects light incident from the second disk side toward the radially outer side of the first disk and the second disk.

[0015] Furthermore, a confocal scanner according to a second aspect of the present invention is the confocal scanner according to the first aspect of the present invention, wherein the light guiding unit comprises a polarizing beam splitter (22) that transmits light of a first polarization state and reflects light of a second polarization state, a quarter-wave plate (23) that is arranged between the polarizing beam splitter and the first disk and converts the light of the first polarization state that has passed through the beam splitter to a third polarization state and converts the split light of the third polarization state to the second polarization state, a split light guiding unit (26) that guides the split light reflected by the polarizing beam splitter to the second illumination region, and a Fourier lens (25) that is arranged in the optical path of the split light and forms part of the Koehler illumination system.

[0016] A confocal microscope (1) according to one aspect of the present invention comprises a confocal scanner according to the first or second aspect of the present invention that emits illumination light (L4) for scanning a sample (SP), a light source unit (10) that outputs light (L1) for generating the illumination light, and an imaging device (40) that captures a confocal image of the sample. [Effects of the Invention]

[0017] According to the present invention, it is possible to obtain a high-quality confocal image with more uniform brightness using fewer parts than conventional methods. [Brief explanation of the drawings]

[0018] [Figure 1] 1 is a diagram showing the configuration of the main parts of a confocal microscope according to an embodiment of the present invention; [Figure 2] FIG. 2 is a plan view showing the configuration of a microlens array disk and a pinhole array disk of a disk unit according to an embodiment of the present invention. [Figure 3] FIG. 2 is a development view showing a linear optical path from a light source to a second irradiation surface in one embodiment of the present invention. [Figure 4] FIG. 10 is a plan view showing a first modified example of the microlens array disk and pinhole array disk provided in the disk unit. [Figure 5]FIG. 10 is a plan view showing a second modified example of the microlens array disc provided in the disc unit. [Figure 6] FIG. 10 is a plan view showing a third modified example of a microlens array disc provided in the disc unit. [Figure 7] FIG. 10 is a plan view showing a fourth modified example of a microlens array disc provided in the disc unit. [Figure 8] FIG. 10 is a plan view showing a fifth modified example of a microlens array disc provided in the disc unit. DETAILED DESCRIPTION OF THE INVENTION

[0019] Hereinafter, a disk unit, a confocal scanner, and a confocal microscope according to embodiments of the present invention will be described in detail with reference to the drawings. First, an overview of the embodiments of the present invention will be described, followed by a detailed description of each embodiment of the present invention.

[0020] 〔overview〕 The present invention provides a disk unit, a confocal scanner, and a confocal microscope that can obtain high-quality confocal images with more uniform brightness using fewer parts than conventional devices. The present invention can be applied not only to confocal laser microscope systems, but also to products such as drug discovery support devices that use confocal laser microscopes.

[0021] In the above products, for example, a laser light source, which can be considered a point light source, is expanded using a collimating lens or the like to create a two-dimensional surface light source, and then directed at a sample such as a cell via the optical system (objective lens, etc.) of the confocal laser microscope, exciting the sample. Fluorescent substances are fused to the cells in advance, and when exposed to excitation light, the cells emit fluorescence. This fluorescence is captured as an image by the microscope optical system, allowing the cells to be observed and their behavior to be analyzed. Such confocal microscopes are used in fields ranging from basic biological research to applied development in drug discovery.

[0022] When capturing cell images, a confocal system using a pinhole array disk is used in the optical system to obtain high-quality images without blurring. Furthermore, to increase the efficiency of illumination light utilization, a microlens array disk is provided, with microlenses corresponding one-to-one to the pinholes on the pinhole array. A confocal scanner using such a microlens array disk and pinhole array disk is a basic tool used when capturing images of live cells. Furthermore, it is preferable to use a homogenizer that homogenizes the intensity of the illumination light (excitation light) across the entire surface so that the brightness of the image is uniform across the entire surface.

[0023] Both the conventional confocal microscope disclosed in Patent Document 1 and the confocal microscope according to the embodiment of the present invention incorporate two technologies: a confocal scanner technology that realizes a confocal microscopy method, and a homogenizer technology that homogenizes illumination light. The confocal scanner technology is the same in both the conventional confocal microscope and the confocal microscope according to the embodiment of the present invention. Therefore, the following describes the homogenizer technology that differs between the two confocal microscopes.

[0024] The above-mentioned Patent Document 1 discloses a confocal microscope that obtains a high-quality confocal image with uniform brightness by using a microlens array disk that is part of a confocal optical system as a microlens array disk that is part of a homogenizer. This confocal microscope has a reflecting mirror between the microlens array disk and the pinhole array disk that constitute the disk unit. Illumination light that passes through the microlens array disk is reflected by the reflecting mirror and passes through the microlens array disk again, and the illumination light with uniform intensity is irradiated onto an irradiation surface provided on the microlens array disk to obtain a confocal image.

[0025] As described above, in the confocal microscope disclosed in Patent Document 1, the microlens array disk that forms part of the disk unit is used as a microlens array disk that forms part of the confocal optical system and a microlens array disk that forms part of the homogenizer. Therefore, the microlens array disk that forms part of the confocal optical system and the microlens array disk that forms part of the homogenizer cannot be designed separately.

[0026] For this reason, if a microlens array disk is designed to optimize the optical characteristics of the confocal optical system, the optical characteristics of the homogenizer may not be optimal. Conversely, if a microlens array disk is designed to optimize the optical characteristics of the homogenizer, the optical characteristics of the confocal optical system may not be optimal. In such cases, if an optimal microlens array disk that forms part of the confocal optical system and an optimal microlens array disk that forms part of the homogenizer could be individually designed, it is thought that a confocal image with more uniform brightness and high quality could be obtained.

[0027] Furthermore, in the confocal microscope disclosed in Patent Document 1, a reflecting mirror needs to be provided at a position midway between the microlens array disk and the pinhole array disk that make up the disk unit, which requires a mechanism to adjust the position and reflection angle of the reflecting mirror, resulting in an increase in the number of parts and costs.

[0028] A disk unit according to an embodiment of the present invention includes a first disk having a first region and a second region divided radially, and a second disk having a first region and a second region divided radially corresponding to the first disk, with one surface facing the other surface of the first disk and rotating together with the first disk.

[0029] A plurality of microlenses are provided in the first and second regions of the first disc. A reflection mirror is provided in either the first or second region of the second disc, which reflects light transmitted through the microlenses provided in either the first or second region of the first disc toward the microlenses. The other of the first or second region of the second disc is provided with a plurality of pinholes corresponding to the microlenses provided in the other of the first or second region of the first disc.

[0030] According to the disc unit of this embodiment of the present invention, light that passes through a microlens provided in either the first area or the second area (e.g., the first area) of the first disc is reflected by a reflective mirror provided in either the first area or the second area (e.g., the first area) of the second disc. The light reflected by the reflective mirror passes again through a microlens provided in either the first area or the second area (e.g., the first area) of the first disc. This forms part of a homogenizer. In this embodiment, a reflective mirror is provided in either the first area or the second area of ​​the second disc, and the reflective mirror that was conventionally required is no longer necessary, making it possible to achieve a smaller number of parts than conventional devices.

[0031] Furthermore, in a disc unit according to an embodiment of the present invention, a microlens is provided in the other of the first area and the second area (for example, the second area) of the first disc. Also, a plurality of pinholes corresponding to the microlenses provided in the other of the first area and the second area (for example, the second area) of the second disc are provided. This forms part of a confocal optical system.

[0032] Here, the microlenses provided in either the first region or the second region of the first disk (for example, the first region) and the microlenses provided in the other of the first region or the second region of the first disk (for example, the second region) can be designed separately. Therefore, a microlens array disk optimal for a homogenizer and a microlens array disk optimal for a confocal optical system can be designed separately. This makes it possible to obtain a confocal image with more uniform brightness and high image quality.

[0033] [Embodiment] <Configuration of a confocal microscope> Fig. 1 is a diagram showing the main components of a confocal microscope according to one embodiment of the present invention. As shown in Fig. 1, the confocal microscope 1 of this embodiment includes a light source unit 10, a confocal scanner 20, a microscope 30, and a camera 40 (image capture device). In this confocal microscope 1, the confocal scanner 20 generates illumination light (excitation light) L4 for scanning a sample SP from light L1 output from the light source unit 10, and the camera 40 obtains a confocal image of the sample SP illuminated with the illumination light L4.

[0034] The light source unit 10 outputs light L1 required to illuminate the sample SP toward the confocal scanner 20. In this embodiment, the light L1 output from the light source unit 10 is assumed to be P-polarized light. The light L1 output from the light source unit 10 may be coherent light (laser light) or incoherent light. In this embodiment, for ease of understanding, it is assumed that the light output from the light source unit 10 is laser light. The light source unit 10 outputs light L1 in a wavelength range of, for example, 400 to 800 [nm]. The wavelength range of the light L1 output from the light source unit 10 is not limited to the above wavelength range (400 to 800 [nm]) and can be any wavelength range depending on the optical characteristics of the sample SP.

[0035] The confocal scanner 20 generates illumination light L4 for scanning the sample SP from light L1 output from the light source unit 10, and guides reflected light, fluorescence, etc. obtained by irradiating the sample SP with the illumination light L4 (hereinafter, when these are collectively referred to, simply as "return light L5") to the camera 40. The confocal scanner 20 includes a collimator lens 21, a polarizing beam splitter 22 (light guide), a quarter-wave plate 23 (light guide), a disk unit 24, a Fourier lens 25 (light guide), a reflecting mirror 26 (light guide, divided light guide), a dichroic mirror 27 (beam splitter), an optical filter 28, and a relay lens 29.

[0036] The collimator lens 21 converts the light L1 output from the light source unit 10 into parallel light L2. Since the light L1 output from the light source unit 10 is P-polarized light, the parallel light L2 is also P-polarized light. In this embodiment, the light L1 output from the light source unit 10 has a certain divergence angle. The collimator lens 21 converts the light L1 having such a certain divergence angle into parallel light L2. Note that if the light L1 output from the light source unit 10 is parallel light, the collimator lens 21 can be omitted.

[0037] The polarizing beam splitter 22 is disposed on the optical path of the collimated light L2, and transmits P-polarized light (light in a first polarization state) and reflects S-polarized light (light in a second polarization state) toward the Fourier lens 25. In this embodiment, the light L1 output from the light source unit 10 is P-polarized light, and the collimated light L2 is also P-polarized light, so the polarizing beam splitter 22 transmits the collimated light L2. On the other hand, as will be described later, the split light L3 input to the polarizing beam splitter 22 is S-polarized light. Therefore, the polarizing beam splitter 22 reflects the input split light L3.

[0038] The quarter-wave plate 23 is disposed between the polarizing beam splitter 22 and the disk unit 24. The quarter-wave plate 23 is an optical element that shifts the phase of input light by a quarter wavelength and outputs the light. The quarter-wave plate 23 converts the P-polarized parallel light L2 output from the polarizing beam splitter 22 into circularly polarized light (third polarization state light) and outputs the light. The quarter-wave plate 23 also converts the circularly polarized split light L3 output from the disk unit 24 into S-polarized light and outputs the light.

[0039] The disk unit 24 generates illumination light L4 for scanning the sample SP from the circularly polarized parallel light L2 output from the quarter-wave plate 23. The disk unit 24 includes a microlens array disk 24a (first disk), a pinhole array disk 24b (second disk), a rotating shaft 24c (connecting shaft), and a motor 24d (driving unit).

[0040] 2A and 2B are plan views showing the configurations of a microlens array disk and a pinhole array disk of a disk unit according to an embodiment of the present invention, where Fig. 2A is a plan view of a microlens array disk 24a provided in the disk unit 24, and Fig. 2B is a plan view of a pinhole array disk 24b provided in the disk unit 24.

[0041] 2(a), the microlens array disc 24a is a circular disc having an inner zone Z11 (first region) and an outer zone Z12 (second region) that are divided in the radial direction. The microlens array disc 24a is rotated in the circumferential direction around the axis O shown in FIG.

[0042] The microlens array disc 24a has a plurality of microlenses ML1 provided in the inner zone Z11 and a plurality of microlenses ML2 provided in the outer zone Z12. The microlenses ML1 provided in the inner zone Z11 and the microlenses ML2 provided in the outer zone Z12 are different types. For example, the microlenses ML1 and the microlenses ML2 may be different in size, planar shape, or optical characteristics. The microlenses ML1 and ML2 illustrated in FIG. 2(a) have circular shapes in a plan view. As will be described in detail later, the focal length of the microlenses ML1 provided in the inner zone Z11 is set to be twice the focal length of the microlenses ML2 provided in the outer zone Z12.

[0043] The microlenses ML1 are arranged in a predetermined pattern (for example, a regular-pitch spiral arrangement) in the inner zone Z11. The microlenses ML2 are arranged in a predetermined pattern (for example, a regular-pitch spiral arrangement) in the outer zone Z12. It is desirable that the microlenses ML2 are arranged in a regular-pitch spiral arrangement, but the microlenses ML1 do not necessarily have to be arranged in a regular-pitch spiral arrangement.

[0044] A first illumination region R11 is defined in the inner zone Z11 of the microlens array disk 24a and is irradiated with circularly polarized collimated light L2 output from the quarter-wave plate 23. The shape of the first illumination region R11 in a plan view may be any shape, for example, a circle. A second illumination region R12 is defined in the outer zone Z12 of the microlens array disk 24a and is irradiated with S-polarized split light L3 reflected by the reflecting mirror 26. The shape of the second illumination region R12 in a plan view is a circle. This is because the shape of the microlenses ML1 formed in the inner zone Z11 of the microlens array disk 24a in a plan view is circular.

[0045] As shown in Fig. 2(b), the pinhole array disk 24b is a circular disk having an inner zone Z21 (first region) and an outer zone Z22 (second region) that are divided in the radial direction corresponding to the microlens array disk 24a. The microlens array disk 24a and the pinhole array disk 24b are each connected to a rotation shaft 24c and are arranged opposite each other with a certain gap between them. The pinhole array disk 24b rotates together with the microlens array disk 24a in the circumferential direction around the axis O shown in Fig. 1.

[0046] A reflecting mirror RM is provided in the inner zone Z21 of the pinhole array disk 24b. This reflecting mirror RM reflects the divided light L3 that has passed through the microlens ML1 provided in the inner zone Z11 of the microlens array disk 24a toward the microlens ML1. The reflecting mirror RM is realized, for example, by forming a dielectric multilayer film on a glass substrate that is the base material of the pinhole array disk 24b. A plurality of pinholes PH corresponding to the microlenses ML2 provided in the outer zone Z12 of the microlens array disk 24a are provided in the outer zone Z22. Like the microlenses ML2, the pinholes PH are arranged in a predetermined pattern (for example, a regular-pitch spiral arrangement) in the outer zone Z22.

[0047] 2(b), a region R21 in the inner zone Z21 is irradiated with the divided light L3 that has passed through the microlens ML1 in the first illumination region R11 set in the inner zone Z11 of the microlens array disc 24a. A region R22 in the outer zone Z22 is irradiated with the light that has passed through the microlens ML2 in the second illumination region R12 set in the outer zone Z12 of the microlens array disc 24a.

[0048] The microlens ML1 provided in the inner zone Z11 of the microlens array disk 24a and the reflecting mirror RM provided in the inner zone Z21 of the pinhole array disk 24b form part of a homogenizer. The microlens ML2 provided in the outer zone Z12 of the microlens array disk 24a and the pinhole PH provided in the outer zone Z22 of the pinhole array disk 24b form part of a confocal optical system.

[0049] The radial widths of the inner zone Z11 and the outer zone Z12 of the microlens array disk 24a may be the same or different. Similarly, the radial widths of the inner zone Z21 and the outer zone Z22 of the pinhole array disk 24b may be the same or different.

[0050] Here, the distance between the microlens array disk 24a and the pinhole array disk 24b is set to the focal length of the microlens ML2 provided in the outer zone Z12 of the microlens array disk 24a. As described above, the focal length of the microlens ML1 provided in the inner zone Z11 of the microlens array disk 24a is set to twice the focal length of the microlens ML2 provided in the outer zone Z12. Therefore, it can also be said that the distance between the microlens array disk 24a and the pinhole array disk 24b is set to half the focal length of the microlens ML1 provided in the inner zone Z11 of the microlens array disk 24a.

[0051] The rotating shaft 24c is a shaft member to which the microlens array disk 24a and the pinhole array disk 24b are respectively fixed, and connects the microlens array disk 24a and the pinhole array disk 24b. The center of the microlens array disk 24a is fixed to the tip of the rotating shaft 24c. The pinhole array disk 24b is fixed to a midpoint of the rotating shaft 24c. A motor 24d is connected to the base of the rotating shaft 24c.

[0052] Motor 24d is connected to rotation shaft 24c and generates power to rotate rotation shaft 24c about axis O. By rotating rotation shaft 24c, motor 24d drives microlens array disk 24a and pinhole array disk 24b to rotate in the circumferential direction around rotation shaft 24c. In other words, by driving rotation shaft 24c by motor 24d, microlens array disk 24a and pinhole array disk 24b can rotate integrally around rotation shaft 24c.

[0053] In this embodiment, the motor 24d is disposed on the opposite side of the pinhole array disk 24b from the microlens array disk 24a, as shown in Fig. 1. However, the motor 24d may be disposed on the opposite side of the microlens array disk 24a from the pinhole array disk 24b.

[0054] The Fourier lens 25 is disposed between the polarizing beam splitter 22 and the reflecting mirror 26, and is a lens into which the S-polarized split light L3 reflected by the polarizing beam splitter 22 is input. Here, the split light L3 is light obtained by splitting the parallel light L2 into multiple light beams by the microlens array disk 24a. The Fourier lens 25 focuses these multiple light beams into a second illumination region R12 provided in the outer zone Z12 of the microlens array disk 24a and spatially superimposes them. In other words, the Fourier lens 25 is disposed on the optical path of the split light L3, and forms a Koehler illumination system together with the microlens ML1 provided in the inner zone Z11 of the microlens array disk 24a.

[0055] The reflecting mirror 26 is disposed opposite the polarizing beam splitter 22 with the Fourier lens 25 sandwiched therebetween. When viewed from the direction along the axis O, the reflecting mirror 26 is disposed at a position sandwiching the axis O with respect to the polarizing beam splitter 22. The reflecting mirror 26 reflects the S-polarized split light L3 reflected by the polarizing beam splitter 22 toward a second illumination region R12 set in the outer zone Z12 of the microlens array disk 24a.

[0056] 3 is a development view showing a linear optical path from the light source to the second irradiation surface in one embodiment of the present invention. Note that the polarizing beam splitter 22, the quarter-wave plate 23, and the reflecting mirror 26 are not shown in FIG. 3. Also, for the pinhole array disk 24b, only the reflecting mirror RM is shown.

[0057] As described above, the Fourier lens 25 forms a Koehler illumination system together with the microlens ML1 provided in the inner zone Z11 of the microlens array disk 24a. Specifically, the Fourier lens 25 is disposed so that its front focal plane coincides with the rear focal plane of the microlens ML1. As shown in Fig. 3, the rear focal plane of the microlens ML1 is caused by the reflecting mirror RM to coincide with the principal plane of the microlens ML1. Therefore, it can also be said that the Fourier lens 25 is disposed so that its front focal plane coincides with the principal plane of the microlens ML1.

[0058] For example, the distance from the principal point of the microlens ML1 to the back focal plane (focal length) f ML is the distance d1, and the distance from the principal point of the Fourier lens 25 to the front focal plane (focal length) f FL is the distance d2, the distance from the principal point of the microlens ML1 to the principal point of the Fourier lens 25 is d1+d2. In addition, the distance from the principal point of the Fourier lens 25 to the back focal plane (focal length) f FLis the distance d3, the distance from the principal point of the Fourier lens 25 to the second illumination region R12 from the principal point of the microlens ML1 is d1+d2+d3. That is, in the confocal scanner 20 of this embodiment, the optical path length of the divided light L3 from the principal point of the microlens ML1, where the divided light L3 is emitted, to the second illumination region R12 is d1+d2+d3.

[0059] In the Koehler illumination system formed by such a microlens ML1 and Fourier lens 25, the parallel light L2 is split into a plurality of light beams by the microlens ML1, and converted into divided light L3. Each light beam of the divided light L3 converges at the focal point of the individual microlens ML1, then diverges again, and is reflected by the reflecting mirror RM toward the Fourier lens 25. The respective light beams that pass through the Fourier lens 25 become parallel rays again, are reflected by the reflecting mirror 26, and are superimposed and irradiated onto the focal plane of the Fourier lens 25 (i.e., the second illumination region R12).

[0060] Returning to FIG. 1, the dichroic mirror 27 is disposed between the microlens array disk 24a and the pinhole array disk 24b. The dichroic mirror 27 transmits multiple light beams split and converged by the microlenses ML2 in the second illumination region R12. The light beams that have transmitted through the dichroic mirror 27 are focused on pinholes PH provided in the pinhole array disk 24b, pass through the pinholes PH, and are emitted to the outside of the disk unit 24. At this time, the light irradiated onto the second illumination region R12 has a uniform intensity distribution and is parallel light, so the illumination light L4 that passes through the pinholes PH and is emitted to the outside of the disk unit 24 also has a uniform intensity distribution.

[0061] In addition, the dichroic mirror 27 reflects the return light L5 obtained by irradiating the sample SP with the illumination light L4, which passes through the pinhole PH provided in the pinhole array disk 24b, toward the optical filter 28 arranged radially outward from the axis O.

[0062] The optical filter 28 filters the return light L5 reflected by the dichroic mirror 27. A polarizing filter, an absorption filter (emission filter), a dichroic mirror, or the like can be used as this optical filter 28. The relay lens 29 is disposed between the optical filter 28 and the camera 40, and guides the return light L5 emitted from the optical filter 28 to the camera 40.

[0063] The microscope 30 irradiates the sample SP with illumination light generated by the disk unit 24, and also guides return light L5 obtained by irradiating the sample SP with illumination light L4 to the disk unit 24. The microscope 30 is, for example, an infinity-corrected optical system equipped with an objective lens 31. Note that, for convenience, the sample SP is shown inside the microscope 30 in FIG. 1, but the sample SP does not constitute the microscope 30, and the sample SP is replaceable.

[0064] The camera 40 captures a confocal image of the sample SP illuminated with the illumination light L4. The camera 40 is equipped with a solid-state image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor), and is capable of capturing two-dimensional still images or moving images. The confocal image of the sample SP obtained by the camera 40 may be displayed on a display device (not shown), for example.

[0065] <Operation of the Focus Microscope> When the operation of the confocal microscope 1 is started, P-polarized light is output from the light source unit 10, and rotation of the disk unit 24 (around the rotation axis 24c) begins. The light L1 output from the light source unit 10 is input to the confocal scanner 20. It is assumed that the light output from the light source unit 10 is light having an intensity distribution (for example, light having a Gaussian distribution).

[0066] Light L1 input to the confocal scanner 20 first enters a collimating lens 21, which converts it into P-polarized parallel light L2. The P-polarized parallel light L2 passes through a polarizing beam splitter 22 and is then converted into circularly polarized light by a quarter-wave plate 23. The circularly polarized parallel light L2 is irradiated onto a first illumination region R11 set in an inner zone Z11 of the microlens array disk 24a, and is converted into split light L3 by a microlens ML1 in the first illumination region R11.

[0067] The converted divided light L3 travels toward the inner zone Z21 of the pinhole array disk 24b and is reflected by a reflecting mirror RM provided in the inner zone Z21. The divided light L3 reflected by the reflecting mirror RM again passes through the microlens ML1 in the first illumination region R11 set in the inner zone Z11 of the microlens array disk 24a. The divided light L3 that passes through the microlens ML1 enters the quarter-wave plate 23 and is converted into S-polarized light. The divided light L3 converted into S-polarized light is reflected by the polarizing beam splitter 22 and is irradiated onto the second illumination region R12 set in the outer zone Z12 of the microlens array disk 24a via the Fourier lens 25 and the reflecting mirror 26.

[0068] Here, as described above, the microlens ML1 and Fourier lens 25 provided in the inner zone Z11 of the microlens array disk 24a form a Koehler illumination system. Therefore, each light beam of the divided light L3 converges at the focal point of the individual microlens ML1, then diverges again, becomes parallel again at the Fourier lens 25, and is superimposed and irradiated onto the second illumination region R12. As a result, the second illumination region R12 is irradiated with parallel light having a uniform intensity distribution.

[0069] The light irradiated onto the second illumination region R12 is split into multiple light beams by multiple microlenses ML2. Each light beam is converged by the microlens ML2 and passes through a pinhole PH provided in the outer zone Z22 of the pinhole array disk 24b. At this time, the illumination light L4 emitted from the microlens ML1 passes through the dichroic mirror 27 and enters the pinhole array disk 24b. The illumination light L4 emitted from the pinhole PH is emitted to the outside of the disk unit 24.

[0070] The illumination light L4 emitted outside the disk unit 24 is irradiated onto the sample SP via an objective lens 31 provided in the microscope 30. Here, the illumination light L4 emitted outside the disk unit 24 is obtained by dividing light with a uniform intensity distribution. Therefore, the sample SP is irradiated with illumination light with a uniform intensity distribution.

[0071] Return light L5 from the sample SP (return light obtained by irradiating the sample SP with illumination light) passes through an objective lens 31 provided in the microscope 30 and enters the pinhole array disk 24b of the disk unit 24. Then, after passing through a pinhole PH provided in the outer zone Z22 of the pinhole array disk 24b, the light is reflected by the dichroic mirror 27 toward the optical filter 28.

[0072] The return light L5 reflected by the dichroic mirror 27 passes through an optical filter 28 and a relay lens 29 in this order and is incident on the camera 40 to form an image. Here, since the disk unit 24 rotates around the rotation axis 24c, the illumination light L4 irradiating the sample SP is scanned in accordance with the rotation of the disk unit 24. As a result, the return light L5 corresponding to the scanning position of the illumination light L4 is sequentially input to the camera 40. In this way, a confocal image of the sample SP is obtained by the camera 40.

[0073] As described above, the confocal microscope 1 of this embodiment includes a disk unit 24 having a microlens array disk 24a and a pinhole array disk 24b. The microlens array disk 24a has an inner zone Z11 and an outer zone Z12 that are divided in the radial direction. The pinhole array disk 24b has an inner zone Z21 and an outer zone Z22 that are divided in the radial direction corresponding to the microlens array disk 24a, and rotates together with the microlens array disk 24a.

[0074] The inner zone Z11 of the microlens array disk 24a is provided with a plurality of microlenses ML1, and the outer zone Z12 is provided with a plurality of microlenses ML2. The inner zone Z21 of the pinhole array disk 24b is provided with a reflective mirror RM that reflects light that has passed through the microlenses ML1 provided in the inner zone Z11 of the microlens array disk 24a toward the microlenses ML1. The outer zone Z22 of the pinhole array disk 24b is provided with a plurality of pinholes PH that correspond to the microlenses ML2 provided in the outer zone Z12 of the microlens array disk 24a.

[0075] Light that passes through the microlens ML1 provided in the inner zone Z11 of the microlens array disk 24a is reflected by a reflecting mirror RM provided in the inner zone Z21 of the pinhole array disk 24b. The light reflected by the reflecting mirror RM passes again through the microlens ML1 provided in the inner zone Z11 of the microlens array disk 24a. This forms part of a homogenizer. As described above, in this embodiment, the reflecting mirror RM is provided in the inner zone Z21 of the pinhole array disk 24b, eliminating the need for a reflecting mirror that was conventionally required, thereby enabling a reduction in the number of parts compared to conventional systems.

[0076] In this embodiment, a plurality of microlenses ML2 are provided in the outer zone Z12 of the microlens array disc 24a. A plurality of pinholes PH corresponding to the microlenses ML2 provided in the outer zone Z12 of the microlens array disc 24a are provided in the outer zone Z22 of the pinhole array disc 24b. This constitutes part of a confocal optical system.

[0077] Here, the microlenses ML1 provided in the inner zone Z11 of the microlens array disk 24a and the microlenses ML2 provided in the outer zone Z12 can be designed separately. This allows for the design of a microlens array disk that is optimal for the homogenizer and a microlens array disk that is optimal for the confocal optical system, respectively. This allows for the acquisition of a high-quality confocal image with more uniform brightness.

[0078] <Variations> First Modified Example Figure 4 is a plan view showing a first modified example of a microlens array disk and a pinhole array disk provided in a disk unit, where Figure 4(a) is a plan view showing a first modified example of a microlens array disk 24a, and Figure 4(b) is a plan view showing a first modified example of a pinhole array disk 24b.

[0079] The microlens array disc 24a shown in Fig. 4(a) has the functions of the inner zone Z11 and the outer zone Z12 reversed from those of the microlens array disc 24a shown in Fig. 2(a). That is, in the microlens array disc 24a shown in Fig. 4(a), a microlens ML1 is provided in the outer zone Z12, and a microlens ML2 is provided in the inner zone Z11. A first illumination region R11 is set in the outer zone Z12, and a second illumination region R12 is set in the inner zone Z11.

[0080] The pinhole array disk 24b shown in Fig. 4(b) has the functions of the inner zone Z21 and the outer zone Z22 reversed from those of the pinhole array disk 24b shown in Fig. 2(b). That is, in the pinhole array disk 24b shown in Fig. 4(b), the reflective mirror RM is provided in the outer zone Z22, and the pinholes PH are provided in the inner zone Z21.

[0081] 4(a), in the microlens array disc 24a, the first illumination region R11 is set in the outer zone Z12, and the second illumination region R12 is set in the inner zone Z11. Therefore, as shown in FIG. 4(b), the region R21 (the region irradiated with the divided light L3 that has passed through the microlens ML1 in the first illumination region R11) is disposed in the outer zone Z22, and the region R22 (the region irradiated with the light that has passed through the microlens ML2 in the second illumination region R12) is disposed in the inner zone Z21.

[0082] In this modification, a part of the homogenizer is formed by a microlens ML1 provided in the outer zone Z12 of the microlens array disk 24a and a reflecting mirror RM provided in the outer zone Z22 of the pinhole array disk 24b. A part of the confocal optical system is formed by a microlens ML2 provided in the inner zone Z11 of the microlens array disk 24a and a pinhole PH provided in the inner zone Z21 of the pinhole array disk 24b.

[0083] Second Modified Example Fig. 5 is a plan view showing a second modified example of a microlens array disk provided in a disk unit. In this modified example, the pinhole array disk 24b provided in the disk unit is the one shown in Fig. 2(b) (the reflective mirror RM is provided in the inner zone Z21 and the pinholes PH are provided in the outer zone Z22).

[0084] The microlens array disk 24a shown in Fig. 5 is obtained by changing the shape of the microlenses ML1 provided in the inner zone Z11 of the microlens array disk 24a shown in Fig. 2(a). Specifically, the shape of the microlenses ML1 in a plan view is changed from a circular shape to a rectangular shape. The reason for using the microlenses ML1 having a rectangular shape in a plan view is to improve the utilization efficiency of the illumination light.

[0085] The planar shape of the second illumination region R12 set in the outer zone Z12 of the microlens array disk 24a is similar to the planar shape of the microlens ML1. Therefore, if the planar shape of the microlens ML1 is rectangular, the planar shape of the second illumination region R12 can be rectangular, as shown in FIG. 5. Furthermore, light irradiated onto the second illumination region R12 is incident on the solid-state imaging element of the camera 40. Since the imaging surface of the solid-state imaging element of the camera 40 is rectangular, if the planar shape of the second illumination region R12 is rectangular, all of the light irradiated onto the second illumination region R12 can be incident on the solid-state imaging element of the camera 40. This improves the utilization efficiency of the illumination light. Note that the planar shape of the microlens ML1 is preferably similar (having the same aspect ratio) to the shape of the imaging surface of the solid-state imaging element of the camera 40.

[0086] <<Third Modification>> Fig. 6 is a plan view showing a third modified example of the microlens array disk provided in the disk unit. In this modified example, the pinhole array disk 24b provided in the disk unit is the one shown in Fig. 4(b) (the reflective mirror RM is provided in the outer zone Z22 and the pinhole PH is provided in the inner zone Z21).

[0087] The microlens array disc 24a shown in Fig. 6 has the functions of the inner zone Z11 and the outer zone Z12 of the microlens array disc 24a shown in Fig. 5 reversed. That is, in the microlens array disc 24a shown in Fig. 6, microlenses ML1 having a rectangular shape in a plan view are provided in the outer zone Z12, and microlenses ML2 are provided in the inner zone Z11. A first illumination region R11 is set in the outer zone Z12, and a second illumination region R12 is set in the inner zone Z11. In this modification, as in the second modification, the utilization efficiency of illumination light can be improved.

[0088] Fourth Variation 7 is a plan view showing a fourth modified example of the microlens array disk provided in the disk unit. In this modified example, the pinhole array disk 24b provided in the disk unit is the one shown in FIG. 2(b) (the reflective mirror RM is provided in the inner zone Z21 and the pinholes PH are provided in the outer zone Z22).

[0089] The microlens array disc 24a shown in Fig. 7 is obtained by changing the shape of the microlenses ML2 provided in the outer zone Z12 of the microlens array disc 24a shown in Fig. 5. Specifically, the planar shape of the microlenses ML2 is changed from circular to rectangular. That is, in the microlens array disc 24a shown in Fig. 7, the microlenses ML1 provided in the inner zone Z11 and the microlenses ML2 provided in the outer zone Z12 have rectangular shapes in planar view.

[0090] The reason for using the microlenses ML1 and ML2, which have a rectangular shape in a plan view, is to further improve the utilization efficiency of the illumination light. In other words, when the shape of the microlens ML2 in a plan view is rectangular, the aperture ratio can be increased compared to when the shape is circular in a plan view, thereby improving the utilization efficiency of the illumination light. By making the shapes of both the microlenses ML1 and ML2 rectangular in a plan view, the utilization efficiency of the illumination light can be improved in both the homogenizer and the confocal optical system, and therefore a brighter confocal image of the sample SP can be captured.

[0091] Fifth Variation Fig. 8 is a plan view showing a fifth modified example of the microlens array disk provided in the disk unit. In this modified example, the pinhole array disk 24b provided in the disk unit is the one shown in Fig. 4(b) (the reflective mirror RM is provided in the outer zone Z22 and the pinhole PH is provided in the inner zone Z21).

[0092] The microlens array disc 24a shown in Fig. 8 is obtained by changing the shape of the microlenses ML2 provided in the inner zone Z11 of the microlens array disc 24a shown in Fig. 6. Specifically, the planar shape of the microlenses ML2 is changed from circular to rectangular. That is, in the microlens array disc 24a shown in Fig. 8, the microlenses ML1 provided in the outer zone Z12 and the microlenses ML2 provided in the inner zone Z11 have rectangular shapes in planar view.

[0093] The microlens array disk 24a shown in Fig. 8 has the functions of the inner zone Z11 and the outer zone Z12 of the microlens array disk 24a shown in Fig. 7 reversed. That is, in the microlens array disk 24a shown in Fig. 8, a microlens ML1 having a rectangular shape in a planar view is provided in the outer zone Z12, and a microlens ML2 having a rectangular shape in a planar view is provided in the inner zone Z11. A first illumination region R11 is set in the outer zone Z12, and a second illumination region R12 is set in the inner zone Z11. In this modification, as in the fourth modification, the utilization efficiency of illumination light can be improved in both the homogenizer and the confocal optical system, and therefore a brighter confocal image of the sample SP can be captured.

[0094] The disk unit, confocal scanner, and confocal microscope according to the embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments and can be freely modified within the scope of the present invention. For example, in the above-described embodiments, an example was described in which the light L1 emitted from the light source unit 10 is P-polarized light. However, the light L1 emitted from the light source unit 10 may also be S-polarized light. In such a case, the polarizing beam splitter 22 may be one that transmits S-polarized light and reflects P-polarized light. [Explanation of symbols]

[0095] 1. Confocal Microscopy 10 Light source section 22 Polarizing beam splitter 23 1 / 4 wave plate 24 disk units 24a Microlens array disk 24b Pinhole array disk 24c rotation axis 24d motor 25 Fourier lens 26 Reflective mirror 27 Dichroic mirror 40 Camera L1 light L3 split light L4 illumination light ML1, ML2 Micro Lenses PH Pinhole R11 1st lighting area R12 2nd lighting area RM Reflective Mirror SP sample Z11, Z21 Inner Zone Z12, Z22 Outer Zone

Claims

1. a first disk having a first region and a second region that are radially separated; a second disk having a first region and a second region divided in a radial direction corresponding to the first disk, the second disk being disposed with one surface thereof facing the other surface of the first disk and rotating together with the first disk; Equipped with a plurality of microlenses are provided in the first area and the second area of ​​the first disc; a reflecting mirror is provided in either the first area or the second area of ​​the second disk, which reflects light transmitted through the microlens provided in either the first area or the second area of ​​the first disk toward the microlens; the other of the first area and the second area of ​​the second disc is provided with a plurality of pinholes corresponding to the microlenses provided in the other of the first area and the second area of ​​the first disc; Disk unit.

2. 2. The disk unit according to claim 1, wherein the microlenses provided in the first area of ​​the first disk and the microlenses provided in the second area of ​​the first disk are of different types.

3. 2. The disk unit according to claim 1, wherein the microlenses provided in the second area of ​​the first disk are arranged in a spiral pattern.

4. 2. The disk unit of claim 1, wherein the focal length of the microlens provided in either the first area or the second area of ​​the first disk is twice the focal length of the microlens provided in the other of the first area or the second area of ​​the first disk.

5. 2. The disk unit according to claim 1, wherein the microlenses provided in at least one of the first area and the second area of ​​the first disk have a circular or rectangular shape in plan view.

6. a connecting shaft connecting the first disc and the second disc; a drive unit that rotates the connecting shaft; The disk unit of claim 1 , comprising:

7. A disk unit according to any one of claims 1 to 6; a light guide unit that forms a Koehler illumination system together with the microlenses in a first illumination area set in one of the first area and the second area of ​​the first disk, and guides a plurality of split lights split by the microlenses in the first illumination area to a second illumination area set in the other of the first area and the second area of ​​the first disk; a beam splitter disposed between one surface of the first disk and the other surface of the second disk, which transmits light passing through the microlens in the second illumination area and reflects light incident from the second disk toward the radially outer side of the first disk and the second disk; A confocal scanner comprising:

8. The light guiding section is a polarizing beam splitter that transmits light of a first polarization state and reflects light of a second polarization state; a quarter-wave plate disposed between the polarizing beam splitter and the first disk, for converting the light having a first polarization state transmitted through the beam splitter into a third polarization state and converting the split light having the third polarization state into the second polarization state; a split light guide section that guides the split light reflected by the polarizing beam splitter to the second illumination area; a Fourier lens disposed in an optical path of the split light and forming a part of the Koehler illumination system; 8. The confocal scanner of claim 7, comprising:

9. a confocal scanner according to claim 7, which emits illumination light for scanning a sample; a light source unit that outputs light for generating the illumination light; an imaging device for capturing a confocal image of the sample; A confocal microscope equipped with

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