Protective sheet and protective sheet application device

Abstract

To prevent sticking of a wrong protective sheet to a workpiece.SOLUTION: In a protective sheet 1 attached to a workpiece, an information display area 5 showing information 6 about the protective sheet 1 is set on the surface of the adhesive layer, which is the adhered surface of the protective sheet 1 to be adhered to the workpiece. The protective sheet 1 is attached to the annular frame and the workpiece positioned at the opening of the annular frame, and the information display area 5 is arranged to be positioned between the annular frame and the workpiece.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a protective sheet and a protective sheet application device. [Background technology]

[0002] In the manufacturing process of semiconductors and various electronic components, a protective sheet is attached to a plate-shaped workpiece, such as a wafer on which a device is formed, in the process of grinding or dividing the workpiece to protect the workpiece and ensure efficient transportation. A protective sheet attached to a workpiece protects the device and allows the workpiece to be transported without falling apart even after being divided into chips. An attachment device for attaching such a protective sheet to a workpiece is used (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6335633 Summary of the Invention [Problem to be solved by the invention]

[0004] Protective sheets are used according to the size, base material, thickness and adhesive strength of the adhesive layer, and material. For example, if the base material is different, chips formed by attaching the protective sheet and dividing it into pieces may have larger chips, or the thickness of the ground workpiece may vary, so it is necessary to use a specific type of protective sheet.

[0005] In addition, there is a set expiration date for when the protective sheet can still perform its intended function, so it is necessary to use the protective sheet before that date. However, this information is not displayed on the protective sheet itself, but is instead displayed on the protective sheet's packaging bag or the inside circumference of the cylindrical core, so there is a risk that due to insufficient checking, the wrong type of protective sheet will be placed in the protective sheet application device and applied to the workpiece.

[0006] The present invention has been made in consideration of such problems, and its purpose is to provide a protective sheet and a protective sheet application device that can prevent the wrong protective sheet from being applied to a workpiece. [Means for solving the problem]

[0007] In order to solve the above-mentioned problems and achieve the object, the protective sheet of the present invention is a protective sheet that is attached to a workpiece, and an information display area that displays information about the protective sheet is set on the surface of the protective sheet that is attached to the workpiece, or on the surface opposite to the surface that is attached. At the same time, a plurality of workpieces are attached to the protective sheet at predetermined intervals, and the information display areas are set at intervals corresponding to the respective workpieces. It is characterized by:

[0008] In the protection sheet, the information may include the type, material, size, expiration date, manufacturing date, or individual identification information of the protection sheet.

[0009] In the protection sheet, the information display area may be repeatedly set in the longitudinal direction of the protection sheet.

[0011] In the protective sheet, the protective sheet may be attached to the annular frame and the workpiece positioned in the opening of the annular frame, and the information display area may be positioned between the annular frame and the workpiece.

[0012] In the protective sheet, the information display area may be set near the area to be attached to the workpiece.

[0013] The protective sheet application device of the present invention is a protective sheet application device that applies the protective sheet to a workpiece, and comprises: a holding unit that holds the protective sheet; an application unit that applies the protective sheet sent out from the holding unit to the workpiece; a reading unit that reads information about the protective sheet from the information display area of ​​the protective sheet; and a control unit, wherein the control unit includes: a protective sheet registration unit that can register information about a plurality of protective sheets; a protective sheet selection unit that records information about the protective sheet selected by an operator from the information about the protective sheets registered in the protective sheet registration unit; and a judgment unit that judges whether the information about the protective sheet recorded by the protective sheet selection unit matches the information about the protective sheet read by the reading unit. [Effects of the Invention]

[0014] The present invention has the effect of preventing the wrong protective sheet from being attached to the workpiece. [Brief explanation of the drawings]

[0015] [Figure 1] FIG. 1 is a perspective view of a sheet roll made of the protective sheet according to embodiment 1. FIG. [Figure 2] FIG. 2 is a cross-sectional view of the protection sheet shown in FIG. [Figure 3] FIG. 3 is a plan view showing the protective sheet shown in FIG. 1 attached to a workpiece. [Figure 4] FIG. 4 is a diagram showing an example of the schematic configuration of a protective sheet application device according to the first embodiment. [Figure 5] FIG. 5 is a side view showing the configuration of the main part of the protective sheet application device shown in FIG. [Figure 6] FIG. 6 is a diagram showing data registered by the protective sheet registration unit of the protective sheet application device shown in FIG. [Figure 7] FIG. 7 is a cross-sectional view of a protection sheet according to Variation 1 of Embodiment 1. FIG. [Figure 8] FIG. 8 is a cross-sectional view of a protection sheet according to Variation 2 of Embodiment 1. As shown in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0016] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by a person skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the configuration can be made within the scope of the gist of the present invention.

[0017] [Embodiment 1] (protective sheet) A protective sheet according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view of a sheet roll comprising the protective sheet according to the first embodiment. Fig. 2 is a cross-sectional view of the protective sheet shown in Fig. 1. Fig. 3 is a plan view of the protective sheet shown in Fig. 1 attached to a workpiece.

[0018] 1 and 2 according to the first embodiment is attached to a workpiece 200 shown in Fig. 3. In the first embodiment, the workpiece 200 to which the protective sheet 1 according to the first embodiment is attached is a wafer such as a disk-shaped semiconductor wafer or optical device wafer, with a substrate made of silicon, sapphire, gallium arsenide, or the like. As shown in Fig. 3, the workpiece 200 has devices 203 formed in each of areas defined by a plurality of planned division lines 202 on a surface 201 of the substrate.

[0019] The device 203 is, for example, an integrated circuit such as an IC (Integrated Circuit) or an LSI (Large Scale Integration), an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor), or various types of memory (semiconductor memory device). In the first embodiment, the workpiece 200 has a protective sheet 1 attached to the back surface of the substrate, and an annular frame 204, the inner diameter of which is larger than the outer diameter of the workpiece 200, attached to the outer edge of the protective sheet 1, and is supported within an opening 205 inside the annular frame 204. In this way, the protective sheet 1 is attached to the annular frame 204 and the workpiece 200 positioned in the opening 205 of the annular frame 204.

[0020] A protective sheet 1 according to embodiment 1 is wound around the outer periphery of a cylindrical core 11 shown in Fig. 1 to form a sheet roll 10. In embodiment 1, as shown in Fig. 2, the protective sheet 1 is a so-called adhesive tape comprising a base layer 2 made of synthetic resin and having no adhesive strength, and an adhesive layer 3 laminated on the base layer 2 and having adhesive strength, and is formed as a long sheet-like member. In embodiment 1, the adhesive layer 3 is made of a permeable material.

[0021] As shown in Fig. 2, the protective sheet 1 is wound around the outer periphery of the core 11 at least once with the adhesive layer 3 attached to the release sheet 4, and is wound into a roll. At least one layer of the protective sheet 1 is laminated on the outer periphery of the core 11 to form a sheet roll 10. In embodiment 1, the protective sheet 1 is wound around the outer periphery of the core 11 in a roll shape with the release sheet 4 disposed on the inner periphery, thereby forming the sheet roll 10. Note that the surface 31 of the adhesive layer 3 to which the release sheet 4 is attached is the surface to which the protective sheet 1 is attached to the workpiece 200 and the annular frame 204.

[0022] 1 and 2, the protective sheet 1 is provided with information display areas 5 that display information 6 related to the protective sheet 1. The information display areas 5 are repeatedly set in the longitudinal direction of the protective sheet 1. That is, a plurality of information display areas 5 are set at intervals (equally spaced in the first embodiment) in the longitudinal direction of the protective sheet 1.

[0023] The information display area 5 is provided with information 6 relating to the protective sheet 1. The information 6 includes at least one of the type of protective sheet 1, the material of the protective sheet 1, the size of the protective sheet 1, the expiration date of the protective sheet 1, the manufacturing date of the protective sheet 1, and individual identification information.

[0024] The material of the protective sheet 1 indicates at least one of the material of the base layer 2 and the material of the adhesive layer 3. The size of the protective sheet 1 indicates at least one of the width of the protective sheet 1, the thickness of the base layer 2, and the thickness of the adhesive layer 3. The fixed identification information is information for distinguishing the protective sheet 1 from other protective sheets 1, even if they are of the same type.

[0025] In the first embodiment, the information display area 5 is set on the surface 21 of the base material layer 2 on which the adhesive layer 3 is laminated, as shown in Fig. 2. The information 6 attached to the information display area 5 is formed in a color that is the opposite hue to the base material layer 2 or a color that contrasts clearly with the base material layer 2. For example, the information 6 attached to the information display area 5 is formed in black, for example, when the base material layer 2 is milky white, or in white, for example, when the base material layer 2 is dark colored.

[0026] The information 6 provided with the information display area 5 is formed in the information display area 5 set on the surface 21 of the base layer 2 by, for example, inkjet printing or the like. In the first embodiment, the information 6 is composed of, for example, at least one of letters, numbers, and symbols. However, in the present invention, the information 6 may be a barcode or a two-dimensional code. The information 6 can be seen through the adhesive layer 3 because the adhesive layer 3 is transparent.

[0027] The protective sheet 1 having the above-described configuration is attached to the back surface of the workpiece 200, cut into a circle whose outer diameter is larger than that of the workpiece 200 and larger than the inner diameter of the annular frame 204, and the annular frame 204 is attached to the outer edge thereof as shown in FIG. 3 . As shown in FIG. 3 , the protective sheet 1 has an information display area 5 disposed between the outer edge of the workpiece 200 and the inner edge of the annular frame 204. That is, in the first embodiment, the information display area 5 is set at a position that is located between the outer edge of the workpiece 200 and the inner edge of the annular frame 204 when the protective sheet 1 is attached to the workpiece 200 and the annular frame 204. The distance between two of the multiple information display areas 5 corresponds to the length of the protective sheet 1 attached to one workpiece 200.

[0028] In this way, the protective sheet 1 is attached to a plurality of workpieces 200 at predetermined intervals (equal in embodiment 1) corresponding to the length of the protective sheet 1 to be attached to one workpiece 200. The protective sheet 1 is also arranged so that the information display areas 5 are set at intervals (equal in embodiment 1) corresponding to the length of the protective sheet 1 to be attached to one workpiece 200 corresponding to each workpiece 200, and are positioned between the annular frame 204 and the workpiece 200, and are set near the area to be attached to the workpiece 200. In the example shown in FIG. 3, the information 6 includes the product type 61 of the protective sheet 1, thicknesses 62 of the base layer 2 and adhesive layer 3 (corresponding to the size, and shown in FIG. 3 as the thickness of the base layer 2 / the thickness of the adhesive layer 3), and expiration date 63.

[0029] (protective sheet attachment device) A protective sheet application device according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 4 is a diagram showing an example of the general configuration of the protective sheet application device according to the first embodiment. Fig. 5 is a side view showing the configuration of the main parts of the protective sheet application device shown in Fig. 4. Fig. 6 is a diagram showing data registered by a protective sheet registration unit of the protective sheet application device shown in Fig. 4.

[0030] 4 and 5 is an apparatus for applying the protective sheet 1 having the above-described configuration to the workpiece 200. In the first embodiment, the protective sheet application device 40 applies the protective sheet 1 to the back surface of the workpiece 200, but in the present invention, the protective sheet 1 may be applied to the front surface 201 of the workpiece 200. In the first embodiment, the protective sheet application device 40 applies the protective sheet 1 to the workpiece 200 as well as to an annular frame 204 having an inner diameter larger than the outer diameter of the workpiece 200, but in the present invention, the protective sheet 1 does not have to be applied to the annular frame 204.

[0031] The protective sheet application device 40 is an apparatus that feeds the protective sheet 1 from the sheet roll 10 described above, applies the protective sheet 1 to the back surface of the workpiece 200 and to the annular frame 204, and cuts the protective sheet 1 between the inner edge and the outer edge of the annular frame 204. As shown in Figures 4 and 5, the protective sheet application device 40 includes an apparatus main body 41, a holding table 42, a sheet roll holding unit 43 that serves as a holding unit, a plurality of conveying rollers 44, a peeling roller 45, a release sheet winding unit 46 (shown only in Figure 5), an application roller 47 that serves as an application unit, a sheet cutting unit 48, a sheet winding unit 49, a reading unit 50 that serves as a reading unit, and a control unit 60 that serves as a control unit.

[0032] The holding table 42 holds the workpiece 200. The holding table 42 is installed on the device main body 41 so as to be movable horizontally between a position below the protective sheet 1 and a position retracted from below the protective sheet 1. The holding table 42 has a holding surface 421 parallel to the horizontal direction on which the workpiece 200 and the annular frame 204 are placed.

[0033] The holding surface 421 is configured to place the front surface 201 of the workpiece 200 and the annular frame 204 on it, and to position the workpiece 200 and the annular frame 204 coaxially. The holding surface 421 also positions the back surface of the workpiece 200 and the upper surface of the annular frame 204 on the same plane. The holding table 42 suction-holds the workpiece 200 and the annular frame placed on the holding surface 421 by being sucked by a suction source (not shown).

[0034] The sheet roll holding unit 43 has a cylindrical appearance and is inserted into the core 11 to hold the sheet roll 10, i.e., the protective sheet 1. The sheet roll holding unit 43 is supported so as to be rotatable about its axis. The sheet roll holding unit 43 fixes the inner peripheral surface of the core 11 of the sheet roll 10 to its outer peripheral surface, and by rotating about its axis, feeds the protective sheet 1 onto the holding surface 421 of the holding table 42 in order from the end.

[0035] In the first embodiment, two conveying rollers 44 are provided and are arranged on one end of the holding table 42. The conveying rollers 44 sandwich the protective sheet 1 between them to convey the protective sheet 1 from the sheet roll holding unit 43 to the sheet winding unit 49, and also apply tension to the protective sheet 1 to prevent slack in the protective sheet 1. The conveying rollers 44 are formed in a cylindrical shape with an axis parallel to the axis of the sheet roll holding unit 43, and are provided so as to be rotatable about the axis. The conveying rollers 44 apply tension to the protective sheet 1 by pressing against the protective sheet 1 with their outer peripheral surfaces.

[0036] The peeling roller 45 is disposed between the sheet roll holding unit 43 and the other end of the holding table 42, and peels the release sheet 4 attached to the adhesive layer 212 of the protective sheet 1 from the protective sheet 1. The peeling roller 45 is formed in a cylindrical shape with an axis parallel to the axes of the sheet roll holding unit 43 and the conveying roller 44, and is provided so as to be rotatable about its axis. The outer peripheral surface of the conveying roller 44 presses against the base layer 2 of the protective sheet 1 fed from the sheet roll holding unit 43, thereby peeling the release sheet 4 from the protective sheet 1.

[0037] The release sheet take-up unit 46 takes up the release sheet 4 that has been peeled off by the peeling roller 45 from the protective sheet 1 that has been fed out from the sheet roll holding unit 43. In the first embodiment, the release sheet take-up unit 46 is located below the sheet roll holding unit 43. The release sheet take-up unit 46 is formed in a cylindrical shape with its axis parallel to the axes of the sheet roll holding unit 43, the conveying roller 44, and the peeling roller 45, and is rotated about its axis by a driving device such as a motor (not shown), thereby taking up the release sheet 4 that has been peeled off from the protective sheet 1 onto its outer peripheral surface.

[0038] The bonding roller 47 presses the protective sheet 1, which has been fed from the sheet roll holding unit 43 onto the holding surface 421 of the holding table 42, against the back surface of the workpiece 200, which is held by suction on the holding surface 421 of the holding table 42, to bond the sheet to the workpiece 200. The bonding roller 47 is disposed above the holding surface 421 of the holding table 42. The bonding roller 47 is formed in a cylindrical shape with its axis parallel to the axes of the sheet roll holding unit 43, the conveying roller 44, the peeling roller 45, and the release sheet take-up unit 46, and is supported so as to be rotatable about its axis.

[0039] The bonding roller 47 is provided so as to be able to move up and down in a direction perpendicular to the holding surface 421 of the holding table 42 by a bonding roller moving mechanism (not shown), and is provided so as to be able to move between one end and the other end of the holding table 42 along the holding surface 421 in a direction perpendicular to the axis. The bonding roller 47 is moved between one end and the other end of the holding table 42 along the holding surface 421 in a lowered state by the bonding roller moving mechanism, thereby bonding the protective sheet 1 to the rear surface of the workpiece 200 held on the holding table 42 and to the annular frame 204.

[0040] The sheet cutting unit 48 cuts the protective sheet 1 between the inner edge and the outer edge of the annular frame 204 after the adhering roller 47 has adhered the protective sheet 1 to the workpiece 200 and the annular frame 204. The sheet cutting unit 48 is disposed above the holding surface 421 of the holding table 42.

[0041] In the first embodiment, the sheet cutting unit 48 includes a cutter blade 481 and a cutter blade moving mechanism 482. The cutter blade 481 has a cutting edge at its lower end that is longer than the thickness of the protective sheet 1 fed onto the holding surface 421 of the holding table 42. The cutting edge of the cutter blade 481 faces the protective sheet 1 fed onto the holding surface 421 of the holding table 42 and the space between the inner edge and outer edge of the annular frame 204.

[0042] The cutter blade moving mechanism 482 raises and lowers the cutter blade 481 in a direction perpendicular to the holding surface 421 of the holding table 42, and moves the cutter blade 481 along the outer edge of the workpiece 200 between the inner edge and the outer edge of the annular frame 204. The cutter blade moving mechanism 482 includes: a mounting base 483 that is disposed on the center of the holding surface 421 of the holding table 42 and raised and lowered by an elevating mechanism (not shown); a rotating shaft 484 that is disposed on the center of the holding surface 421 of the holding table 42 and rotated about its axis by a driving device such as a motor (not shown); and an arm 485 that extends from the rotating shaft 484 toward the outer edge in parallel with the holding surface 421 of the holding table 42 and supports the cutter blade 481 at its tip.

[0043] The sheet cutting unit 48 lowers the mounting base 483, i.e., the cutter blade 481, using the lifting mechanism of the cutter blade moving mechanism 482, and causes the cutting edge of the cutter blade 481 to cut into the workpiece 200 and the protective sheet 1 attached to the annular frame 204 between the inner edge and outer edge of the annular frame 204. The sheet cutting unit 48 rotates the arm 485, i.e., the cutter blade 481, using a drive device such as a motor, and cuts the protective sheet 1 between the inner edge and outer edge of the annular frame 204 with the cutter blade 481.

[0044] The sheet winding unit 49 winds up the unnecessary portion of the protective sheet 1 after the portions attached to the workpiece 200 and the annular frame 204 have been cut off by the sheet cutting section 48. The unnecessary portion of the protective sheet is the portion on the outer periphery of the annular frame 204 that is cut off by the cutter blade 481 between the inner and outer edges of the annular frame 204.

[0045] In the first embodiment, the sheet winding unit 49 is disposed on one end of the holding table 42 and on the two conveying rollers 44. The sheet winding unit 49 is formed in a cylindrical shape with its axis parallel to the axes of the sheet roll holding section 43, the conveying roller 44, the peeling roller 45, the release sheet winding unit 46, and the bonding roller 47, and is rotated about its axis by a driving device such as a motor (not shown) to wind up the protective sheet 1 onto its outer circumferential surface. The sheet winding unit 49 unwinds the protective sheet 1 from the sheet roll 10 supported by the sheet roll holding section 43 by winding up the protective sheet 1 onto its outer circumferential surface.

[0046] The reading unit 50 reads information 6 related to the protective sheet 1 from the information display area 5 of the protective sheet 1 fed out from the sheet roll holding unit 43. In the first embodiment, the reading unit 50 is disposed at the tip of the arm 485 and includes an imaging element that captures the information 6 in the information display area 5 of the protective sheet 1 fed out from the sheet roll holding unit 43. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. The reading unit 50 captures the information 6 in the information display area 5 of the protective sheet 1 fed out from the sheet roll holding unit 43 and outputs the captured image to the control unit 60, thereby reading the information 6 related to the protective sheet 1 from the information display area 5 of the protective sheet 1.

[0047] The control unit 60 controls each of the above-mentioned components of the protective sheet application device 40, causing the protective sheet application device 40 to perform the application operation of applying the protective sheet 1 to the workpiece 200. The control unit 60 is a computer having an arithmetic processing device with a microprocessor such as a CPU (central processing unit), a storage device with memory such as ROM (read only memory) or RAM (random access memory), and an input / output interface device. The arithmetic processing device of the control unit 60 performs arithmetic processing in accordance with a computer program stored in the storage device, and outputs control signals for controlling the protective sheet application device 40 to each of the above-mentioned units of the protective sheet application device 40 via the input / output interface device.

[0048] In addition, the control unit 60 is connected to a display unit 71 that displays the status of the application operation and images, an input unit 72 that the operator uses to input information, etc. into the control unit 60 of the protective sheet application device 40, and an alarm unit 73 that emits at least one of sound and light to alert the operator.

[0049] The control unit 60 also includes a protection sheet registration unit 601, a protection sheet selection unit 602, and a determination unit 603. The protection sheet registration unit 601 is capable of registering information 6 for multiple protection sheets 1. In the first embodiment, the protection sheet registration unit 601 is capable of registering data 64 shown in FIG. 6. The data 64 that the protection sheet registration unit 601 can register associates each type of protection sheet 1 with information 6 (hereinafter, indicated by reference numeral 641) that is added to the information display area 5 of each type of protection sheet 1. Note that the information 641 of the data 64 that the protection sheet registration unit 601 can register, shown in FIG. 6, does not include the expiration date, manufacturing date, or individual identification information.

[0050] The protection sheet selection unit 602 records information 641 of the protection sheet 1 selected by the operator from the information 641 of the protection sheet 1 registered in the protection sheet registration unit 601. The protection sheet selection unit 602 reads and records information 641 corresponding to the type of one protection sheet 1 selected by the operator using the input unit 72 or the like from the data 64 registered by the protection sheet registration unit 601. The determination unit 603 determines whether the information 641 of the protection sheet 1 recorded by the protection sheet selection unit 602 matches the information 641 of the protection sheet 1 read by the reading unit 50.

[0051] The function of the protection sheet registration unit 601 is realized by the above-mentioned storage device. The function of the protection sheet selection unit 602 is realized by the above-mentioned arithmetic processing unit performing arithmetic processing in accordance with a computer program stored in the storage device, and the storage device recording information 6 read from data 64. The determination unit 603 is realized by the arithmetic processing unit performing arithmetic processing in accordance with a computer program stored in the storage device.

[0052] Next, we will explain an example of the application operation of the protective sheet application device 40. First, an operator or the like places the surface 201 of the workpiece 200 and the annular frame 204 on the holding surface 421 of the holding table 42, and positions the holding table 42 below the protective sheet 1 fed from the sheet roll holding unit 43. The operator or the like registers the processing conditions in the control unit 100.

[0053] At this time, the operator or the like operates the input unit 72 to select one type of protective sheet 1 from the data 64 registered by the protective sheet registration unit 601. When the control unit 60 of the protective sheet application device 40 receives the selection of the type of protective sheet 1 from the operator or the like, the protective sheet selection unit 602 reads and records information 641 corresponding to the type of one protective sheet 1 selected by the operator from the data 64.

[0054] The protective sheet application device 40 starts the application operation when the control unit 100 receives an instruction to start the application operation from an operator, etc. When the application operation starts, the reading unit 50 of the protective sheet application device 40 captures an image of the information 6 attached to the information display area 5 of the protective sheet 1 delivered from the sheet roll holding unit 43, and outputs the captured image to the control unit 60.

[0055] In the protective sheet application device 40, the determination unit 603 of the control unit 60 acquires the information 6 attached to the information display area 5 of the protective sheet 1 from the image captured by the reading unit 50, and determines whether the information 6 attached to the information display area 5 of the protective sheet 1 matches the information 641 recorded in the protective sheet selection unit 602. When the determination unit 603 of the control unit 60 determines that the information 6 attached to the information display area 5 of the protective sheet 1 matches the information 641 recorded in the protective sheet selection unit 602, the protective sheet application device 40 continues the application operation. When the determination unit 603 of the control unit 60 determines that the information 6 attached to the information display area 5 of the protective sheet 1 does not match the information 641 recorded in the protective sheet selection unit 602, the protective sheet application device 40 stops the application operation and activates the notification unit 73 to notify the operator.

[0056] Furthermore, after the determination unit 603 of the control unit 60 determines that the information 6 attached to the information display area 5 of the protective sheet 1 matches the information 641 recorded in the protective sheet selection unit 602, if the information 6 attached to the information display area 5 of the protective sheet 1 includes an expiration date, the protective sheet application device 40 determines whether the current time has passed the expiration date. If the determination unit 603 of the control unit 60 determines that the current time has not passed the expiration date, the protective sheet application device 40 continues the application operation. If the determination unit 603 of the control unit 60 determines that the current time has passed the expiration date, the protective sheet application device 40 stops the application operation and activates the alarm unit 73 to alert the operator.

[0057] In the application operation, the control unit 100 of the protective sheet application device 40 lowers the application roller 47 and moves it along the holding surface 421 to apply the protective sheet 1 to the back surface of the workpiece 200 and the annular frame 204. The protective sheet application device 40 raises the application roller 47 and causes the cutter blade movement mechanism 482 to rotate the cutter blade 481 around the axis of the rotation shaft 484 while lowering the cutter blade 481. The protective sheet application device 40 cuts the protective sheet 1 by moving the cutting edge 83 of the cutter blade 481 along the outer edge of the workpiece 200 while cutting into the protective sheet 1 between the inner and outer edges of the annular frame 204.

[0058] In the application operation, the control unit 100 of the protective sheet application device 40 cuts the protective sheet 1, then raises the sheet cutting section 48, and then winds up the amount of protective sheet 1 to be applied to one workpiece 200 using the sheet winding unit 49, moves the protective sheet 1 by the distance of one workpiece 200, and then releases the suction hold of the holding surface 421 of the holding table 42, thereby completing the application operation of the protective sheet 1.

[0059] In the protective sheet 1 and protective sheet application device 40 according to the first embodiment described above, the information 6 is displayed on the protective sheet 1 itself, so that the type of protective sheet 1 and the like can be visually confirmed even after the protective sheet 1 is placed in the protective sheet application device 40. As a result, the protective sheet 1 and protective sheet application device 40 according to the first embodiment have the effect of preventing the wrong protective sheet 1 from being applied to the workpiece 200.

[0060] Furthermore, since the protective sheet 1 according to embodiment 1 displays the information 6 even after application, the information 6 on the protective sheet 1 can be checked at any stage of the process, thereby enabling errors in the protective sheet 1 to be checked at any stage, and manufacturing information to be acquired and managed.

[0061] [Modification] A protective sheet according to a modification of the first embodiment of the present invention will be described with reference to the drawings. Figure 7 is a cross-sectional view of a protective sheet according to a first modification of the first embodiment. Figure 8 is a cross-sectional view of a protective sheet according to a second modification of the first embodiment. In Figures 7 and 8, the same parts as those in the first embodiment are designated by the same reference numerals, and their description will be omitted.

[0062] The protective sheet 1-1 according to variant 1 of embodiment 1 is the same as embodiment 1, except that an information display area 5 is provided on the surface 31 of the adhesive layer 3 that is attached to the workpiece 200, as shown in FIG.

[0063] 8, protective sheet 1-2 according to modified example 2 of embodiment 1 is the same as embodiment 1, except that an information display area 5 is provided on back surface 22 behind the aforementioned front surface 21 of base layer 2. Note that back surface 22 of base layer 2 is the surface opposite to front surface 201 of adhesive layer 3, which is the surface to which protective sheet 1 is attached.

[0064] In the protective sheets 1-1, 1-2 according to variants 1 and 2 of embodiment 1, information 6 is displayed on the protective sheets 1-1, 1-2 themselves, so that the type of protective sheets 1-1, 1-2, etc. can be visually confirmed even after they are installed in the protective sheet application device 40, and similar to embodiment 1, it is possible to prevent the wrong protective sheets 1-1, 1-2 from being applied to the workpiece 200.

[0065] The present invention is not limited to the above-described embodiment, and can be implemented in various modifications without departing from the gist of the present invention.

[0066] For example, in the present invention, protective sheets 1, 1-1, and 1-2 may be composed only of base material layer 2 made of a thermoplastic resin such as polyethylene, polypropylene, or polystyrene, and may not include adhesive layer 3. Furthermore, in the present invention, protective sheets 1, 1-1, and 1-2 may be formed into a rectangular shape whose planar shape is larger than opening 205 of annular frame 204. [Explanation of symbols]

[0067] 1,1-1,1-2 Protective sheet 5 Information display area 6. Information 22 Back side (opposite side) 31 Surface (applied surface) 40 Protective sheet attachment device 43 Sheet roll holding part (holding part) 47 Adhesive roller (adhesive part) 50 Reading unit (reading part) 60 Control unit (control section) 61 varieties 62 Thickness (size) 63 Expiration date 200 Workpiece 601 Protective Sheet Registration Department 602 Protective sheet selection section 603 Judgment section 641 Information

Claims

1. A protective sheet to be attached to a workpiece, an information display area showing information about the protective sheet is set on the surface of the protective sheet that is to be attached to the workpiece or on the surface opposite to the surface that is to be attached; The protective sheet has a plurality of workpieces attached at predetermined intervals, and the information display areas are set at intervals corresponding to the respective workpieces.

2. The protection sheet according to claim 1 , wherein the information includes the type, material, size, expiration date, manufacturing date, or individual identification information of the protection sheet.

3. 3. The protection sheet according to claim 1, wherein the information display area is repeatedly set in the longitudinal direction of the protection sheet.

4. 4. The protective sheet according to claim 1, wherein the protective sheet is attached to an annular frame and a workpiece positioned in the opening of the annular frame, and the information display area is positioned between the annular frame and the workpiece.

5. 5. The protective sheet according to claim 1, wherein the information display area is set in the vicinity of an area where the protective sheet is to be attached to a workpiece.

6. A protective sheet application device that applies the protective sheet according to any one of claims 1 to 5 to a workpiece, a holding portion that holds the protective sheet; an attachment unit that attaches the protective sheet fed from the holding unit to a workpiece; a reading unit that reads information about the protection sheet from the information display area of ​​the protection sheet; a control unit, The control unit a protection sheet registration unit capable of registering information on a plurality of protection sheets; a protection sheet selection unit that records information about the protection sheet selected by an operator from the information about the protection sheets registered in the protection sheet registration unit; a determination unit that determines whether the information on the protection sheet recorded by the protection sheet selection unit matches the information on the protection sheet read by the reading unit; A protective sheet application device comprising:

Images