Abnormality determination device, abnormality determination method, and abnormality determination system

Abstract

To provide an abnormality determination device capable of more accurately determining an abnormality of a heater.SOLUTION: An abnormality determination device includes an acquisition unit for acquiring a resistance value of an electric heating element which is calculated from a voltage across the electric heating element of the heater and a current flowing through the electric heating element, and acquiring a temperature value of the heater, a first determination unit for performing abnormality determination based on the acquired resistance value, a second determination unit for determining whether the acquired temperature value is in a temperature settled state within a range of the first target value, and a third determination unit for determining whether the acquired resistance value is in a resistance settled state within a range of the second target value. The first determination unit performs abnormality determination when the second determination unit determines the temperature settled state during a first period, and the third determination unit determines the resistance settled state during a second period.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to an abnormality determination device, an abnormality determination method, and an abnormality determination system for determining an abnormality in a heater. [Background technology]

[0002] Patent Document 1 discloses an electric heater that determines whether the heater is abnormal based on the magnitude of the change in the rate of increase in electrical resistance when current is applied. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 8-124653 Summary of the Invention [Problem to be solved by the invention]

[0004] The electrical resistance of the heater wire of an electric heater has temperature characteristics. The electric heater of Patent Document 1 does not have a sensor for detecting the temperature of the heater wire, so it may not be possible to accurately determine the magnitude of the change in the rate of increase in electrical resistance when current is applied.

[0005] The present disclosure provides an abnormality determination device, an abnormality determination method, and an abnormality determination system that can more accurately determine an abnormality in a heater. [Means for solving the problem]

[0006] An abnormality determination device according to an aspect of the present disclosure includes: an acquisition unit that acquires a resistance value of the electric heating element calculated from a voltage across both ends of the electric heating element of the heater and a current flowing through the electric heating element, and also acquires a temperature value of the heater; a first determination unit that performs an abnormality determination to determine whether or not the heater is abnormal based on the acquired resistance value; a second determination unit that determines whether the acquired temperature value is in a temperature stabilization state within a range relative to a first target value; a third determination unit that determines whether the acquired resistance value is in a resistance settling state within a range with respect to a second target value; Equipped with The first judgment unit performs the abnormality judgment when the second judgment unit judges that the temperature stabilization state is in place for a first period and the third judgment unit judges that the resistance stabilization state is in place for a second period.

[0007] An abnormality determination method according to one aspect of the present disclosure includes: a resistance value of the heater calculated from the voltage across the heater and the current flowing through the heater, and a temperature value of the heater; determining whether the acquired temperature value is within a range relative to a first target value and is in a temperature settling state; determining whether the acquired resistance value is in a resistance settling state within a range relative to a second target value; When it is determined that the temperature settling state is in the first period and the resistance settling state is in the second period, an abnormality determination is made to determine whether or not the heater is abnormal.

[0008] An abnormality determination system according to an embodiment of the present disclosure includes: a first acquisition unit that acquires a resistance value of the electric heating element calculated from a voltage across both ends of the electric heating element of the heater and a current flowing through the electric heating element; a first determination unit that performs an abnormality determination to determine whether or not the heater is abnormal based on the acquired resistance value; a first device having a second acquisition unit that acquires a temperature value of the heater; a second determination unit that determines whether the acquired temperature value is in a temperature stabilization state within a range relative to a first target value; a second device having a first communication connection with the first device; a third acquisition unit that acquires the resistance value of the electric heating element; a third determination unit that determines whether the acquired resistance value is in a resistance settling state within a range with respect to a second target value; a third device that is communicatively connected to the first device; Equipped with the first acquisition unit acquires the determination result by the second determination unit and the determination result by the third determination unit; The first judgment unit performs the abnormality judgment when the second judgment unit judges that the temperature stabilization state is in place for a first period and the third judgment unit judges that the resistance stabilization state is in place for a second period. [Effects of the Invention]

[0009] According to the abnormality determination device of the above aspect, it is possible to realize an abnormality determination device that can more accurately determine an abnormality in the heater.

[0010] According to the abnormality determination method of the above aspect, it is possible to more accurately determine whether or not a heater is abnormal.

[0011] According to the abnormality determination system of the above aspect, it is possible to realize an abnormality determination system that can more accurately determine an abnormality in a heater while being compatible with various embodiments. [Brief explanation of the drawings]

[0012] [Figure 1] 1 is a block diagram illustrating an abnormality determination device according to an embodiment of the present disclosure; [Figure 2] 2 is a diagram for explaining a temperature stabilization state of the abnormality determination device of FIG. 1; [Figure 3] 2 is a diagram for explaining a resistance settling state of the abnormality determination device of FIG. 1; [Figure 4] 1. FIG. 4 is a first diagram for explaining the process of setting a second target value in the abnormality determination device of FIG. [Figure 5] 1. FIG. 4 is a second diagram for explaining the process of setting a second target value in the abnormality determination device of FIG. [Figure 6] 3 is a flowchart for explaining the abnormality determination process of the abnormality determination device of FIG. 1; [Figure 7] 4 is a flowchart for explaining a target value setting process of the abnormality determination device of FIG. DETAILED DESCRIPTION OF THE INVENTION

[0013] An example of the present disclosure will be described below with reference to the accompanying drawings. In the following description, terms indicating specific directions or positions (e.g., terms including "upper," "lower," "right," and "left") are used as necessary. However, the use of these terms is intended to facilitate understanding of the present disclosure with reference to the drawings, and the meanings of these terms do not limit the technical scope of the present disclosure. Furthermore, the following description is merely exemplary in nature and is not intended to limit the present disclosure, its applications, or its uses. Furthermore, the drawings are schematic, and the proportions of the dimensions and the like do not necessarily correspond to reality.

[0014] As shown in FIG. 1 , an abnormality determination device 1 according to an embodiment of the present disclosure includes, for example, a CPU 2 for performing calculations, a storage unit 3, and a communication unit 4, and determines whether an abnormality has occurred in an electric heating element 10 of a heater. The storage unit 3 stores information such as programs and data required for determining whether an abnormality has occurred in the electric heating element 10. The communication unit 4 inputs and outputs information to and from an external device connected wirelessly or via a wire. The electric heating element 10 is, for example, the heating wire of an electric resistance heater. A temperature regulator 11 and an SSR (solid-state relay) 12 are connected to the electric heating element 10, and a power supply 13 is connected to the solid-state relay 12. The temperature regulator 11 controls the on / off of the solid-state relay 12. When the solid-state relay 12 is on, current from the power supply 13 is supplied to the electric heating element 10.

[0015] The abnormality determination device 1 includes an acquisition unit 100, a first determination unit 110, a second determination unit 120, a third determination unit 130, and a target value setting unit 140. Each of the acquisition unit 100, the first determination unit 110, the second determination unit 120, the third determination unit 130, and the target value setting unit 140 is a function realized by, for example, the CPU 2 executing a predetermined program.

[0016] The acquisition unit 100 acquires, for example, via the communication unit 4, the resistance value of the heating element 10 calculated from the voltage across the heating element 10 and the current flowing through the heating element 10, and the temperature value of the heater. The resistance value of the heating element 10 is calculated, for example, by the CPU 2 or an external device (not shown) from the current value detected by the current sensor 20 and the voltage value detected by the voltage sensor 30. The temperature value of the heater is detected, for example, by the temperature sensor 40. The temperature sensor 40 is arranged, for example, near the object to be heat-treated that is heated by the heating element 10 (for example, a workpiece placed inside the housing of a heat treatment device that includes a heater).

[0017] In this embodiment, low-pass filtering (e.g., moving average processing) is performed on the acquired resistance value of the electric heating element 10. The low-pass filtering on the resistance value of the electric heating element 10 is performed, for example, by the abnormality determination device 1 or an external device. The number of times of moving average processing performed on the resistance value (hereinafter referred to as the number of times of moving average of the resistance value) is set depending on the type of heater, etc.

[0018] The first determination unit 110 performs an abnormality determination, which is a determination of whether or not the heater is abnormal, based on the resistance value acquired by the acquisition unit 100. The abnormality determination is performed, for example, based on whether or not the acquired resistance value exceeds a preset threshold value. If the acquired resistance value exceeds the threshold value, the first determination unit 110 determines that the heater is abnormal.

[0019] If the heater is determined to be abnormal, for example, a notification is issued indicating that the heater is deteriorated or is suspected to be broken. In this case, multiple thresholds may be set so that heater abnormalities are reported in stages. For example, a first threshold value may be 103% of the resistance reference value (= a second target value, described later), and a second threshold value may be 105% of the resistance reference value. If the acquired resistance value exceeds the first threshold value, a notification is issued indicating that the heater is at a "warning" level of deterioration. If the acquired resistance value exceeds the second threshold value, a notification is issued indicating that the heater is at a "warning" level of deterioration.

[0020] The first determination unit 110 performs an abnormality determination when the second determination unit 120 determines that the heater is in a temperature settling state over a predetermined period and the third determination unit 130 determines that the heater is in a pre-settling state over a predetermined period. In this embodiment, the first determination unit 110 determines that the heater is in a settling state and performs an abnormality determination when the first determination unit 110 determines that the heater is in a temperature settling state over a period (an example of a first period) obtained by multiplying the cycle in which the resistance value is acquired by the moving average number of times of the resistance value and when the first determination unit 110 determines that the heater is in a resistance settling state over a period (an example of a second period) obtained by multiplying the cycle in which the resistance value is acquired by the moving average number of times of the resistance value (in other words, when the settling condition is met). The moving average number of times is set depending on the type of heater, etc.

[0021] FIG. 2 shows an example in which all of the determination results of the second determination unit 120 over a predetermined period indicate a temperature settling state, and FIG. 3 shows an example in which all of the determination results of the third determination unit 130 over a predetermined period indicate a resistance settling state. In FIGS. 2 and 3, the moving average number of times for the resistance value is set to 10. In FIG. 2, C0 indicates the first target value, which is the target temperature value, C1 indicates the upper limit of the range for the first target value, and C2 indicates the lower limit of the range for the first target value. In FIG. 3, R0 indicates the second target value, which is the resistance reference value, R1 indicates the upper limit of the range for the second target value, and R2 indicates the lower limit of the range for the second target value.

[0022] 2, all acquired temperature values ​​over a period T0 between times T1 and T2 are within a range relative to the first target value C0. In FIG. 3, all acquired resistance values ​​over a period T0 are within a range relative to the second target value R0. The first determination unit 110 performs an abnormality determination based on the resistance values ​​acquired after time T2, but if any of the following conditions is met, the first determination unit 110 does not perform an abnormality determination and instead obtains the determination results from the second determination unit 120 and the third determination unit 130 again. -If the judgment result obtained by the second judgment unit 120 during the period T0 includes a judgment that the temperature is not in a temperature settling state, or if the judgment result obtained by the third judgment unit 130 during the period T0 includes a judgment that the temperature is not in an anti-settling state. When the acquired judgment result by the second judgment unit 120 is that the temperature is not in a settling state, or when the acquired judgment result by the third judgment unit 130 is that the resistance is not in a settling state.

[0023] The second determination unit 120 determines whether the acquired temperature value is in a temperature stabilization state within a range relative to the first target value. In this embodiment, the first target value is set in advance depending on, for example, the heater design, the position of the temperature sensor 40, and the object to be measured by the temperature sensor 40. The range relative to the first target value is set, for example, to plus or minus 10 degrees Celsius of the first target value. The upper and lower limits of the range relative to the first target value may or may not be included in the "range relative to the first target value."

[0024] The third determination unit 130 determines whether the acquired resistance value is in a resistance settling state within a range relative to the second target value. In this embodiment, the second target value is set by the target value setting unit 140. The range relative to the second target value is set, for example, to plus or minus 1% of the second target value. The upper and lower limit values ​​of the range relative to the second target value may or may not be included in the "range relative to the second target value."

[0025] The target value setting unit 140 sets the resistance value when setting of the second target value starts as the provisional second target value, and sets the provisional second target value as the second target value when it is determined that all temperature values ​​acquired within a predetermined period are within the range for the first target value and that all resistance values ​​acquired within the predetermined period are within the range for the provisional second target value. For example, as shown in FIG. 5 , when setting of the second target value starts at time T3, the target value setting unit 140 sets the resistance value R10 acquired at time T3 as the provisional second target value. In this embodiment, when it is determined that all temperature values ​​acquired within a period (an example of a third period) obtained by multiplying the cycle in which the resistance value is acquired by the moving average number of times of the resistance value is within the range for the first target value and that all resistance values ​​acquired within a period (an example of a fourth period) obtained by multiplying the cycle in which the resistance value is acquired by the moving average number of times of the resistance value is within the range for the provisional second target value (in other words, when the setting condition for the second target value is satisfied), the provisional second target value is set as the second target value. The margin for the provisional second target value is set, for example, to plus or minus 1% of the provisional second target value, similar to the second target value.

[0026] If it is not determined that all temperature values ​​acquired within a specified period are within the range for the first target value and all resistance values ​​acquired within a specified period are within the range for the provisional second target value, the target value setting unit 140 resets the last acquired resistance value as the provisional second target value.

[0027] For example, as shown in FIGS. 4 and 5, suppose that setting of the second target value starts at time T3, but all temperature values ​​acquired during the first period T01 are not within the range for the first target value, and all resistance values ​​acquired during the first period T01 are not within the range for the set provisional second target value. In this case, the target value setting unit 140 resets the resistance value R20 acquired at the end of the first period T01 as the provisional second target value. In FIGS. 4 and 5, all temperature values ​​acquired during the next period T02 are within the range for the first target value, and all resistance values ​​acquired during the next period T02 are within the range for the reset provisional second target value, the target value setting unit 140 sets the resistance value R20 as the second target value. Because the last acquired resistance value is the average of the resistance values ​​acquired during the period, resetting the resistance value acquired at the end of the period as the provisional second target value can shorten the process of setting the second target value.

[0028] An upper limit may be set on the number of times that the target value setting unit 140 resets the provisional second target value (in other words, the number of times that it determines whether or not the setting condition for the second target value is met). For example, if the target value setting unit 140 has not reached the setting of the second target value a predetermined number of times (for example, five times) in succession, it does not reset the provisional second target value and stops setting the second target value.

[0029] When the acquired temperature value is in the temperature settling state and the acquired resistance value is in the resistance settling state, the target value setting unit 140 resets the second target value based on the average value of the most recent acquired resistance values ​​(for example, the number of moving averages). The resetting of the second target value is performed, for example, every time a predetermined number of resistance values ​​(for example, the number of moving averages of the resistance values) are acquired.

[0030] The abnormality determination process of the abnormality determination device 1 (an example of the abnormality determination method of the present disclosure) will be described with reference to Fig. 6. Here, as an example, a case will be described in which the settling condition is met when it is determined that the temperature settling state is in place over a first period and that the resistance settling state is in place over a second period, and the second target value is reset each time a resistance value is acquired. Note that the process described below is performed, as an example, by a CPU executing a predetermined program.

[0031] 6, when the acquisition unit 100 acquires the resistance value and temperature value of the electric heating element 10 (step S1), the first determination unit 110 determines whether the settling condition is met, in other words, whether it is determined that the temperature has been in a settling state for a first period and that the resistance has been in a settling state for a second period (step S2). If it is not determined that the settling condition is met, the first determination unit 110 does not perform an abnormality determination. Thereafter, the process returns to step S1, and the resistance value and temperature value of the electric heating element 10 are acquired.

[0032] If it is determined that the settling condition is met, the first determination unit 110 performs an abnormality determination based on whether the acquired resistance value is greater than a threshold value (step S3). If it is determined that the acquired resistance value is greater than the threshold value, the first determination unit 110 determines that the heater is abnormal (step S4), and the abnormality determination process ends.

[0033] If it is determined that the acquired resistance value is equal to or less than the threshold value, the target value setting unit 140 resets the second target value (step S5). After that, the process returns to step S1, and the resistance value and temperature value of the electric heating element 10 are acquired.

[0034] The target value setting process of the abnormality determination device 1 will be described with reference to Fig. 7. Here, as an example, a case will be described in which an upper limit is set on the number of times it is determined whether or not the setting condition for the second target value is satisfied. Note that the process described below is performed, as an example, by the CPU executing a predetermined program.

[0035] As shown in FIG. 7, when a predetermined time has elapsed since the start of target value setting (step S11) and the acquisition unit 100 acquires the resistance value and temperature value of the electric heating element 10 (step S12), the target value setting unit 140 determines whether the setting conditions for the second target value are met (step S13).

[0036] If it is determined that the condition for setting the second target value is met, the target value setting unit 140 sets the second target value (step S14), and the target value setting process ends.

[0037] If it is determined that the setting condition for the second target value is not satisfied, the target value setting unit 140 determines whether the number of times that it is determined that the setting condition is not satisfied is a predetermined number of times (for example, five times) or more (step S15). If it is determined that the number of times that it is determined that the setting condition is not satisfied is the predetermined number of times or more, the target value setting unit 140 does not set the second target value, and the target value setting process ends. If it is determined that the number of times that it is determined that the setting condition is not satisfied is less than the predetermined number of times, the process returns to step S12, and the resistance value and temperature value of the electric heating element 10 are acquired.

[0038] The abnormality determination device 1 can achieve the following effects.

[0039] The abnormality determination device 1 includes an acquisition unit 100 that acquires the resistance value and temperature value of the electric heating element 10, a first determination unit 110 that performs abnormality determination, which determines whether or not the heater is abnormal based on the acquired resistance value, a second determination unit 120 that determines whether or not the acquired temperature value is in a temperature settling state within a range relative to a first target value, and a third determination unit 130 that determines whether or not the acquired resistance value is in a resistance settling state within a range relative to a second target value. The first determination unit 110 performs abnormality determination when the second determination unit 120 determines that the temperature is in a temperature settling state over a first period and the third determination unit 130 determines that the resistance is in a resistance settling state over a second period. This configuration makes it possible to realize an abnormality determination device 1 that can more accurately determine whether or not a heater is abnormal.

[0040] The resistance value is subjected to low-pass filtering, which makes it easier to set the resistance value.

[0041] The low-pass filter processing applied to the resistance value is a moving average. This configuration makes it easier to settle the resistance value.

[0042] The second period is a period obtained by multiplying the cycle in which the resistance value is acquired by the number of times of moving average of the resistance value. With this configuration, it is possible to more accurately determine whether the heater is in the resistance settling state.

[0043] The abnormality determination device 1 includes a target value setting unit 140 that sets a second target value. The target value setting unit 140 sets the resistance value when setting of the second target value starts as a tentative second target value, and sets the tentative second target value as the second target value when it is determined that all temperature values ​​acquired within a third period are within a range for the first target value and that all resistance values ​​acquired within a fourth period are within a range for the tentative second target value. This configuration allows the second target value to be set more accurately.

[0044] If it is determined that all temperature values ​​acquired during the third period are within the range for the first target value and all resistance values ​​acquired during the fourth period are not within the range for the tentative second target value, the target value setting unit 140 resets the last acquired resistance value as the tentative second target value. With this configuration, the second target value can be set more accurately.

[0045] When the acquired temperature value is in the temperature settling state and the acquired resistance value is in the resistance settling state, the target value setting unit 140 resets the second target value based on the average value of the most recent acquired resistance values. With this configuration, it is possible to set a more accurate second target value according to changes over time in the heater.

[0046] A moving average is applied to the resistance value, and the fourth period is a period obtained by multiplying the cycle in which the resistance value is acquired by the number of times of moving average of the resistance value. With this configuration, it is possible to more accurately determine whether the heater is in the resistance settling state while facilitating settling of the resistance value.

[0047] The abnormality determination method of the present disclosure can achieve the following effects.

[0048] In the abnormality determination method, the resistance value of the heater's heating element 10 is obtained, calculated from the voltage across the heater's heating element 10 and the current flowing through the heating element 10, and the temperature value of the heater is also obtained. It is determined whether the obtained temperature value is in a temperature settling state within a range relative to a first target value. It is determined whether the obtained resistance value is in a resistance settling state within a range relative to a second target value. If it is determined that the temperature settling state has been established over the first period and that the resistance settling state has been established over the second period, an abnormality determination is made to determine whether the heater is abnormal. This configuration makes it possible to more accurately determine whether a heater is abnormal.

[0049] The abnormality determination device 1 can also be configured as follows.

[0050] The first determination unit 110 may be configured to determine that the heater is in a stable state and perform an abnormality determination when all of the following four conditions are met. All temperature values ​​acquired during the first period are within the range of the first target value (in other words, the heater is in a temperature stabilization state over the first period). All resistance values ​​acquired during the second period are within the range of the second target value (in other words, the heater is in a resistance settling state over the second period). The acquired voltage value is greater than or equal to the threshold. The acquired current value is greater than or equal to the threshold.

[0051] For example, if an operation command is issued to the abnormality determination device 1 when the heater is not operating, or if the heater stops after the operation command is issued to the abnormality determination device 1, the condition that "the acquired voltage value is greater than or equal to the threshold value" is met, and therefore no abnormality determination is made.

[0052] When the first judgment unit 110 obtains a judgment that the temperature is not in a temperature settling state or a judgment that the resistance is not in a resistance settling state, the first judgment unit 110 may stop the abnormality judgment and obtain the judgment results from the second judgment unit 120 and the third judgment unit 130 again.

[0053] It is possible to omit the target value setting unit 140. In this case, the second target value is set in advance by, for example, the user.

[0054] The target value setting unit 140 may be configured to set the tentative second target value as the second target value when all of the following four conditions are met. All temperature values ​​acquired within the third period are within the range of the tentative first target value (in other words, the heater is in a temperature stabilization state over the third period). All resistance values ​​acquired within the fourth period are within the range of the tentative second target value (in other words, the heater is in a resistance settling state over the fourth period). The acquired voltage value is greater than or equal to the threshold. The acquired current value is greater than or equal to the threshold.

[0055] For example, if an operation command for the abnormality determination device 1 is issued while the heater is not operating, or if the heater stops after the operation command for the abnormality determination device 1 is issued, the setting of the second target value is stopped based on the condition that "the acquired voltage value is equal to or greater than the threshold value." Note that, because the voltage may temporarily drop due to overshoot or the like, even if the acquired voltage value falls below the threshold value, the setting of each target value is not immediately stopped, but continues unless all four conditions are not satisfied a predetermined number of times in succession.

[0056] The target value setting unit 140 may be configured to reset the resistance value (for example, shown as R30 in FIG. 5) when it is first determined that the resistance value is not within the range for the tentative second target value as the tentative second target value.

[0057] The first period, the second period, the third period, and the fourth period may be periods of the same length or may be periods of different lengths. Any two or three of the first period, the second period, the third period, and the fourth period may be periods of the same length.

[0058] The first period and the third period may be, for example, periods of any length set by the user.

[0059] The second and fourth periods are not limited to periods obtained by multiplying the cycle in which the resistance value is acquired by the number of moving averages of the resistance value, but may be periods of any length set by the user.

[0060] The resistance value acquired by the acquisition unit 100 may not be subjected to low-pass filtering, or may be subjected to low-pass filtering other than moving average.

[0061] The anomaly determination system may be configured in which the first determination unit 110, the second determination unit 120, and the third determination unit 130 are located in different devices, such as servers. The anomaly determination system includes, for example, a first device in which the first determination unit 110 is located, a second device in which the second determination unit 120 is located, and a third device in which the third determination unit 130 is located. The first device, the second device, and the third device are each provided with an acquisition unit 100, and the first device and the second device are connected for wired or wireless communication, and the first device and the third device are connected for wired or wireless communication. The acquisition unit of the first device acquires the determination results of the second determination unit 120 and the third determination unit 130. This configuration makes it possible to realize an anomaly determination system that can more accurately determine heater anomalies while adapting to various implementations.

[0062] The temperature sensor 40 can be placed at any position where the second determination unit 120 can determine whether the heater is in a temperature stabilization state, in other words, at a position where the temperature of the heating element 10 can be detected directly or indirectly. In other words, the object whose temperature is measured by the temperature sensor 40 may be the heating element 10, the object to be heat treated, or the atmosphere around the heating element 10. For example, a value measured in the following manner can be the "heater temperature value." The temperature of the heating element 10 is directly measured by the temperature sensor 40. The surface temperature of the object to be heat-treated (for example, a semiconductor wafer) heated by the electric heater 10 is measured by a temperature sensor 40 (for example, a thermocouple). The temperature of the atmosphere around the object to be heat-treated, which is heated by the electric heating element 10 arranged in the furnace, is measured by the temperature sensor 40.

[0063] Various embodiments of the present disclosure have been described in detail above with reference to the drawings. Finally, various aspects of the present disclosure will be described. Note that in the following description, reference numerals will also be used as examples.

[0064] The abnormality determination device 1 according to the first aspect of the present disclosure includes: an acquisition unit 100 that acquires the resistance value of the electric heating element 10 of the heater calculated from the voltage across the electric heating element 10 and the current flowing through the electric heating element 10, and also acquires the temperature value of the heater; a first determination unit 110 that performs an abnormality determination to determine whether or not the heater is abnormal based on the acquired resistance value; a second determination unit 120 that determines whether the acquired temperature value is in a temperature stabilization state within a range relative to a first target value; a third determination unit 130 that determines whether the acquired resistance value is in a resistance settling state within a range relative to a second target value; Equipped with The first judgment unit 110 performs the abnormality judgment when the second judgment unit 120 judges that the temperature is in the temperature settling state over a first period and the third judgment unit 130 judges that the resistance is in the resistance settling state over a second period.

[0065] The abnormality determination device 1 according to the second aspect of the present disclosure includes: The resistance value is subjected to low-pass filtering.

[0066] The abnormality determination device 1 according to the third aspect of the present disclosure includes: The low-pass filtering performed on the resistance value is a moving average.

[0067] The abnormality determination device 1 according to the fourth aspect of the present disclosure includes: The second period is a period obtained by multiplying the cycle in which the resistance value is acquired by the number of times of moving average of the resistance value.

[0068] The abnormality determination device 1 according to the fifth aspect of the present disclosure includes: a target value setting unit 140 that sets the second target value; The target value setting unit 140 The resistance value when setting of the second target value starts is set as a provisional second target value, and when it is determined that all the temperature values ​​acquired within a third period are within a range for the first target value and all the resistance values ​​acquired within a fourth period are within a range for the provisional second target value, the provisional second target value is set as the second target value.

[0069] The abnormality determination device 1 according to a sixth aspect of the present disclosure includes: The target value setting unit 140 If it is determined that all of the temperature values ​​acquired within the third period are within the range for the first target value and all of the resistance values ​​acquired within the fourth period are not within the range for the tentative second target value, the last acquired resistance value is reset as the tentative second target value.

[0070] The abnormality determination device 1 according to the seventh aspect of the present disclosure includes: The target value setting unit 140 When the acquired temperature value is in the temperature settling state and the acquired resistance value is in the resistance settling state, the second target value is reset based on the average value of the acquired resistance values ​​taken most recently.

[0071] The abnormality determination device 1 according to the eighth aspect of the present disclosure includes: A moving average is applied to the resistance value; The fourth period is a period obtained by multiplying the cycle in which the resistance value is acquired by the number of moving averages of the resistance value.

[0072] An abnormality determination method according to a ninth aspect of the present disclosure includes: A resistance value of the electric heating element 10 of the heater calculated from a voltage across both ends of the electric heating element 10 and a current flowing through the electric heating element 10 is obtained, and a temperature value of the heater is also obtained. determining whether the acquired temperature value is within a range relative to a first target value and is in a temperature settling state; determining whether the acquired resistance value is in a resistance settling state within a range relative to a second target value; When it is determined that the temperature settling state is in the first period and the resistance settling state is in the second period, an abnormality determination is made to determine whether or not the heater is abnormal.

[0073] An abnormality determination system according to a tenth aspect of the present disclosure includes: a first acquisition unit that acquires a resistance value of the electric heating element 10 calculated from a voltage across both ends of the electric heating element 10 of the heater and a current flowing through the electric heating element 10; a first determination unit 110 that performs an abnormality determination to determine whether or not the heater is abnormal based on the acquired resistance value; a first device having a second acquisition unit that acquires a temperature value of the heater; a second determination unit (120) that determines whether the acquired temperature value is in a temperature stabilization state within a range relative to a first target value; a second device having a first communication connection with the first device; a third acquisition unit that acquires the resistance value of the electric heating element 10; a third determination unit 130 that determines whether the acquired resistance value is in a resistance settling state within a range relative to a second target value; a third device that is communicatively connected to the first device; Equipped with the first acquisition unit acquires the determination result by the second determination unit 120 and the determination result by the third determination unit 130; The first judgment unit 110 performs the abnormality judgment when the second judgment unit 120 judges that the temperature is in the temperature settling state over a first period and the third judgment unit 130 judges that the resistance is in the resistance settling state over a second period.

[0074] Any of the various embodiments or modifications described above can be combined appropriately to achieve the effects of each. In addition, combinations of embodiments, combinations of examples, or combinations of embodiments and examples are possible, and combinations of features from different embodiments or examples are also possible.

[0075] Although the present disclosure has been fully described in connection with the preferred embodiments with reference to the accompanying drawings, various changes and modifications will be apparent to those skilled in the art, and such changes and modifications are to be understood as being included within the scope of the present disclosure as defined by the appended claims unless they depart therefrom. [Industrial Applicability]

[0076] The abnormality determination device of the present disclosure is not limited to electric heaters, but can also be applied to heaters that include an electric heating element that generates heat by resistance heating, such as fuses, conductors, and power transmission lines.

[0077] The abnormality determination method of the present disclosure is not limited to electric heaters, but can also be applied to heaters that include an electric heating element that generates heat by resistance heating, such as fuses, conductors, and power transmission lines.

[0078] The abnormality determination system of the present disclosure is not limited to electric heaters, but can also be applied to heaters that include an electric heating element that generates heat by resistance heating, such as fuses, conductors, and power transmission lines. [Explanation of symbols]

[0079] 1 Abnormality determination device 2 CPU 3 Storage section 4. Communications Department 10 Electric heating element 11 Temperature controller 12 SSR 13 Power supply 20 Current Sensor 30 Voltage Sensor 40 Temperature Sensor 100 Acquisition Department 110 1st Judgment Section 120 Second Judgment Section 130 Third Judgment Section 140 Target value setting unit

Claims

1. an acquisition unit that acquires a resistance value of the electric heating element calculated from a voltage across both ends of the electric heating element of the heater and a current flowing through the electric heating element, and also acquires a temperature value of the heater; a first determination unit that performs an abnormality determination to determine whether or not the heater is abnormal based on the acquired resistance value; a second determination unit that determines whether the acquired temperature value is within a range relative to a first target value and is in a temperature stabilization state; a third determination unit that determines whether the acquired resistance value is in a resistance settling state within a range with respect to a second target value; Equipped with an abnormality determination device, wherein the first determination unit performs the abnormality determination when the second determination unit determines that the temperature stabilization state is in place over a first period and the third determination unit determines that the resistance stabilization state is in place over a second period.

2. 2. The abnormality determination device according to claim 1, wherein the resistance value is subjected to low-pass filtering.

3. 3. The abnormality determination device according to claim 2, wherein the low-pass filtering performed on the resistance value is a moving average.

4. The abnormality determination device according to claim 3 , wherein the second period is a period obtained by multiplying a cycle in which the resistance value is acquired by a moving average number of times of the resistance value.

5. a target value setting unit that sets the second target value, The target value setting unit 5. An abnormality determination device according to claim 1, wherein the resistance value at the time when setting of the second target value is started is set as a provisional second target value, and when it is determined that all of the temperature values ​​acquired within a third period are within a range for the first target value and all of the resistance values ​​acquired within a fourth period are within a range for the provisional second target value, the provisional second target value is set as the second target value.

6. The target value setting unit 6. The abnormality determination device of claim 5, wherein if it is not determined that all of the temperature values ​​acquired within the third period are within a range for the first target value and all of the resistance values ​​acquired within the fourth period are within a range for the provisional second target value, the last acquired resistance value is reset as the provisional second target value.

7. The target value setting unit 7. The abnormality determination device of claim 5, wherein when the acquired temperature value is in the temperature stabilization state and the acquired resistance value is in the resistance stabilization state, the second target value is reset based on an average value of the acquired resistance values ​​taken most recently.

8. A moving average is applied to the resistance value; 8. The abnormality determination device according to claim 5, wherein the fourth period is a period obtained by multiplying a cycle in which the resistance value is acquired by a moving average number of times of the resistance value.

9. a resistance value of the heater calculated from the voltage across the heater and the current flowing through the heater, and a temperature value of the heater; determining whether the acquired temperature value is within a range relative to a first target value and is in a temperature settling state; determining whether the acquired resistance value is in a resistance settling state within a range relative to a second target value; An abnormality determination method, comprising: when it is determined that the temperature settling state is in place over a first period and when it is determined that the resistance settling state is in place over a second period, performing an abnormality determination to determine whether the heater is abnormal.

10. a first acquisition unit that acquires a resistance value of the electric heating element calculated from a voltage across both ends of the electric heating element of the heater and a current flowing through the electric heating element; a first determination unit that performs an abnormality determination to determine whether or not the heater is abnormal based on the acquired resistance value; a first device having a second acquisition unit that acquires a temperature value of the heater; a second determination unit that determines whether the acquired temperature value is in a temperature stabilization state within a range relative to a first target value; a second device in communication connection with the first device; a third acquisition unit that acquires the resistance value of the electric heating element; a third determination unit that determines whether the acquired resistance value is in a resistance settling state within a range with respect to a second target value; a third device that is communicatively connected to the first device; Equipped with the first acquisition unit acquires a determination result by the second determination unit and a determination result by the third determination unit; an abnormality determination system, wherein the first determination unit performs the abnormality determination when the second determination unit determines that the temperature stabilization state is in place over a first period and the third determination unit determines that the resistance stabilization state is in place over a second period.

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