Coated and cutting tools
The coated tool with alternating Ta-containing and Mo-containing laminate structures addresses the limitations of tool life by enhancing adhesion and resistance to stress and wear, resulting in improved durability and extended tool life.
Patent Information
- Application Number
- JP2024512901
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2022-03-31
- Filing Date
- 2023-03-31
- Publication Date
- 2025-12-03
- Estimated Expiration
- 2043-03-31
AI Technical Summary
Existing coated tools used in cutting processes such as turning or milling have limitations in extending tool life due to issues like peeling, cracking, and reduced wear resistance.
A coated tool with a substrate coated in a layer comprising alternating Ta-containing and Mo-containing laminate structures, each with varying composition ratios, and an intermediate layer for improved adhesion, reduces residual stress and enhances thermal shock resistance, oxidation resistance, and high-temperature hardness.
The laminate structure design extends the tool life by reducing peeling and cracking, maintaining hardness and lubricity at high temperatures, and improving overall durability.
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Abstract
Description
[Technical Field]
[0001] The present disclosure relates to coated tools and cutting tools. [Background technology]
[0002] BACKGROUND ART As a tool used in cutting processes such as turning or milling, a coated tool is known in which the surface of a substrate made of cemented carbide, cermet, ceramics, or the like is coated with a coating layer to improve wear resistance and the like. [Prior art documents] [Patent documents]
[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2002-3284 Summary of the Invention
[0004] A coated tool according to one embodiment of the present disclosure includes a substrate and a coating layer disposed on the substrate. The coating layer includes a plurality of Ta-containing laminate structures and a plurality of Mo-containing laminate structures. Each of the plurality of Ta-containing laminate structures includes a first compound layer containing Ta at a first composition ratio and a second compound layer containing Ta at a second composition ratio different from the first composition ratio. Each of the plurality of Mo-containing laminate structures includes a third compound layer containing Mo at a third composition ratio and a fourth compound layer containing Mo at a fourth composition ratio different from the third composition ratio. [Brief explanation of the drawings]
[0005] [Figure 1] FIG. 1 is a perspective view showing an example of a coated tool according to an embodiment. [Figure 2] FIG. 2 is a side cross-sectional view showing an example of a coated tool according to an embodiment. [Figure 3] FIG. 3 is a cross-sectional view showing an example of a coating layer according to an embodiment. [Figure 4]FIG. 4 is a cross-sectional view showing an example of a Ta-containing laminate structure and a Mo-containing laminate structure that constitute a coating layer according to an embodiment. [Figure 5] FIG. 5 is a cross-sectional view showing an example of a first compound layer and a second compound layer constituting a Ta-containing laminated structure. [Figure 6] FIG. 6 is a cross-sectional view showing an example of the third compound layer and the fourth compound layer constituting the Mo-containing laminated structure. [Figure 7] FIG. 7 is a diagram schematically illustrating an example of a film forming apparatus for forming a coating layer on a substrate. [Figure 8] FIG. 8 is a front view showing an example of a cutting tool according to an embodiment. [Figure 9] FIG. 9 is a table showing the manufacturing conditions for the coating layer formed on the substrate. [Figure 10] FIG. 10 is a table showing the configuration of the coating layer formed on the substrate. [Figure 11A] FIG. 11A is a photograph showing the distribution of Ta in the cross section of the Ta-containing multilayer structure of Samples Nos. 4 to 15 and 19 to 21. As shown in FIG. [Figure 11B] FIG. 11B is a graph showing the distribution of Ta in the cross section of the Ta-containing multilayer structures of Samples Nos. 4 to 15 and 19 to 21. [Figure 12A] FIG. 12A is a photograph showing the distribution of Mo in the cross section of the Mo-containing laminated structures of Samples Nos. 1 to 3, 7 to 12, 16 to 18, 22, and 23. FIG. [Figure 12B] FIG. 12B is a graph showing the distribution of Mo in the cross section of the Mo-containing laminated structures of Samples Nos. 1 to 3, 7 to 12, 16 to 18, 22, and 23. [Figure 13] FIG. 13 is a table showing the results of cutting tests on coated tools of samples No. 1 to No. 27. DETAILED DESCRIPTION OF THE INVENTION
[0006] Hereinafter, modes for carrying out the coated tool and cutting tool according to the present disclosure (hereinafter referred to as "embodiments") will be described in detail with reference to the drawings. The coated tool and cutting tool according to the present disclosure are not limited to these embodiments. The embodiments can be appropriately combined within the scope of not causing any contradiction in the processing content. In the following embodiments, the same components are designated by the same reference numerals, and redundant explanations will be omitted.
[0007] In the following embodiments, expressions such as "constant," "orthogonal," "perpendicular," or "parallel" may be used, but these expressions do not necessarily mean "constant," "orthogonal," "perpendicular," or "parallel" in a strict sense. In other words, the above expressions allow for deviations due to, for example, manufacturing precision or installation precision.
[0008] BACKGROUND ART As a tool used in cutting processes such as turning or milling, a coated tool is known in which the surface of a substrate made of cemented carbide, cermet, ceramics, or the like is coated with a coating layer to improve wear resistance and the like.
[0009] The above-mentioned prior art has room for further improvement in terms of extending the tool life.
[0010] Therefore, there is a need to develop a technology that can overcome the above-mentioned problems and extend the tool life.
[0011] <Coated tools> Fig. 1 is a perspective view showing an example of a coated tool according to an embodiment. Fig. 2 is a side cross-sectional view showing an example of a coated tool 1 according to an embodiment. As shown in Fig. 1, the coated tool 1 according to an embodiment has a tip body 2.
[0012] (Chip body 2) The chip body 2 has, for example, a hexahedral shape in which the upper and lower surfaces (surfaces intersecting with the Z axis shown in FIG. 1) are parallelogram-shaped.
[0013] One corner of the insert body 2 functions as a cutting edge portion. The cutting edge portion has a first surface (for example, an upper surface) and a second surface (for example, a side surface) connected to the first surface. In the embodiment, the first surface functions as a "rake surface" that scoops up chips generated by cutting, and the second surface functions as a "flank surface." A cutting edge is located on at least a portion of the ridge where the first and second surfaces intersect, and the coated tool 1 cuts the workpiece by applying this cutting edge to the workpiece.
[0014] A through-hole 5 that passes through the tip body 2 from top to bottom is located in the center of the tip body 2. A screw 75 is inserted into the through-hole 5 to attach the coated tool 1 to a holder 70 (described later) (see FIG. 8).
[0015] As shown in FIG. 2, the chip body 2 has a base 10 and a coating layer 20.
[0016] (Base 10) The substrate 10 is formed of, for example, a cemented carbide. The cemented carbide contains W (tungsten), specifically WC (tungsten carbide). The cemented carbide may also contain Ni (nickel) or Co (cobalt). Specifically, the substrate 10 is made of a WC-based cemented carbide containing WC particles as the hard phase component and Co as the main component of the binder phase.
[0017] The substrate 10 may be formed of a cermet. The cermet contains, for example, Ti (titanium), specifically, TiC (titanium carbide) or TiN (titanium nitride). The cermet may also contain Ni or Co.
[0018] The substrate 10 may be formed of a cubic boron nitride sintered body containing cubic boron nitride (cBN) particles. The substrate 10 is not limited to cubic boron nitride (cBN) particles, but may also contain particles of hexagonal boron nitride (hBN), rhombohedral boron nitride (rBN), wurtzite boron nitride (wBN), or the like.
[0019] The substrate 10 may be formed of ceramics. The ceramics may contain, for example, aluminum oxide (Al2O3), such as κ-Al2O3 and α-Al2O3. The ceramics may contain other elements in addition to aluminum oxide. For example, the ceramics may contain, in addition to aluminum oxide, at least one of magnesium (Mg), calcium (Ca), strontium (Sr), silicon (Si), and elements from Group 3 of the periodic table.
[0020] (Coating layer 20) The coating layer 20 is applied to the substrate 10 for the purpose of improving the abrasion resistance, heat resistance, etc. of the substrate 10. In the example of FIG. 2, the coating layer 20 covers the entire substrate 10. The coating layer 20 needs to be located at least on the substrate 10. When the coating layer 20 is located on the first surface (here, the top surface) of the substrate 10, the abrasion resistance and heat resistance of the first surface are high. When the coating layer 20 is located on the second surface (here, the side surface) of the substrate 10, the abrasion resistance and heat resistance of the second surface are high.
[0021] Here, the specific configuration of the coating layer 20 will be described with reference to Figs. 3, 4, 5, and 6. Fig. 3 is a cross-sectional view showing an example of the coating layer 20 according to the embodiment. Fig. 4 is a cross-sectional view showing an example of a Ta-containing laminate structure and a Mo-containing laminate structure constituting the coating layer 20 according to the embodiment. Fig. 5 is a cross-sectional view showing an example of a first compound layer and a second compound layer constituting the Ta-containing laminate structure. Fig. 6 is a cross-sectional view showing an example of a third compound layer and a fourth compound layer constituting the Mo-containing laminate structure.
[0022] 3, the coating layer 20 includes a plurality of Ta-containing laminated structures 22 and a plurality of Mo-containing laminated structures 23 located on the intermediate layer 21. Each of the plurality of Ta-containing laminated structures 22 is a laminated structure containing at least Ta. Each of the plurality of Mo-containing laminated structures 23 is a laminated structure containing at least Mo.
[0023] As shown in FIG. 3, a plurality of Ta-containing stacked structures 22 and a plurality of Mo-containing stacked structures 23 may be stacked alternately in the coating layer 20.
[0024] In this case, the residual stress between the Ta-containing laminate structure 22 and the Mo-containing laminate structure 23 can be reduced. This can reduce peeling or cracking between the Ta-containing laminate structure 22 and the Mo-containing laminate structure 23. Furthermore, the effects of the Ta-containing laminate structure 22 and the Mo-containing laminate structure 23, which will be described later, can be improved. As a result, the life of the coated tool 1 can be extended.
[0025] The average thickness of each of the plurality of Ta-containing stacked structures 22 and the plurality of Mo-containing stacked structures 23 may be 300 nm or more and 500 nm or less.
[0026] In this case, the residual stress between the Ta-containing laminate structure 22 and the Mo-containing laminate structure 23 can be reduced. This can reduce peeling or cracking between the Ta-containing laminate structure 22 and the Mo-containing laminate structure 23. Furthermore, the effects of the Ta-containing laminate structure 22 and the Mo-containing laminate structure 23, which will be described later, can be improved. As a result, the life of the coated tool 1 can be extended.
[0027] (Middle class 21) An intermediate layer 21 may be located between the base 10 and the coating layer 20. Specifically, the intermediate layer 21 has one surface (here, the lower surface) in contact with the upper surface of the base 10, and the other surface (here, the upper surface) in contact with the lower surface of the coating layer 20 (for example, the Ta-containing stacked structure 22).
[0028] The intermediate layer 21 has higher adhesion to the substrate 10 than the coating layer 20. Examples of metal elements having such properties include Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si, Y, and Ti. The intermediate layer 21 contains at least one of the above metal elements. For example, the intermediate layer 21 may contain Ti. Si is a metalloid element, and in this specification, metalloid elements are also included in the category of metal elements.
[0029] When intermediate layer 21 contains Ti, the Ti content in intermediate layer 21 may be 1.5 atomic % or more. For example, the Ti content in intermediate layer 21 may be 2 atomic % or more.
[0030] Intermediate layer 21 may contain components other than the above metal elements (Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si, Y, and Ti). However, from the viewpoint of adhesion to substrate 10, intermediate layer 21 may contain the above metal elements in a total amount of at least 95 atomic % or more. Intermediate layer 21 may contain the above metal elements in a total amount of 98 atomic % or more. The proportion of the metal components in intermediate layer 21 can be determined, for example, by analysis using an EDS (energy dispersive X-ray spectroscope) attached to a STEM (scanning transmission electron microscope).
[0031] In this way, by providing the intermediate layer 21, which has higher wettability with the substrate 10 than the coating layer 20, between the substrate 10 and the coating layer 20, it is possible to improve the adhesion between the substrate 10 and the coating layer 20. Since the intermediate layer 21 also has high adhesion with the coating layer 20, peeling of the coating layer 20 from the intermediate layer 21 is unlikely to occur.
[0032] The thickness of the intermediate layer 21 may be, for example, not less than 0.1 nm and less than 20 nm.
[0033] (Ta-containing laminated structure 22) 4, each of the multiple Ta-containing stacked structures 22 includes a first compound layer 22a and a second compound layer 22b. The first compound layer 22a contains Ta at a first composition ratio. The second compound layer 22b contains Ta at a second composition ratio different from the first composition ratio. Note that one of the first composition ratio and the second composition ratio may be zero.
[0034] In this way, each of the plurality of Ta-containing laminate structures 22 includes the first compound layer 22a containing Ta at a first composition ratio and the second compound layer 22b containing Ta at a second composition ratio different from the first composition ratio, thereby improving the thermal shock resistance, oxidation resistance, and high-temperature hardness of the coating layer 20. As a result, the life of the coated tool 1 can be extended.
[0035] Each of the first compound layer 22a and the second compound layer 22b may contain Al, Ti, and Ta. In this case, the content Al(1) of Al contained in the first compound layer 22a, the content Ti(1) of Ti contained in the first compound layer 22a, the content Ta(1) of Ta contained in the first compound layer 22a, the content Al(2) of Al contained in the second compound layer 22b, the content Ti(2) of Ti contained in the second compound layer 22b, and the content Ta(2) of Ta contained in the second compound layer 22b are expressed as Al(1) <Al(2)、Ti(1)<Ti(2)、およびTa(1)> There may be a relationship of Ta(2), which may be 0.
[0036] Al(1), Ti(1), Ta(1), Al(2), Ti(2), and Ta(2) are Al(1) <Al(2)、Ti(1)<Ti(2)、およびTa(1)> When the relationship Ta(2) is satisfied, the residual stress between the first compound layer 22a and the second compound layer 22b can be reduced while maintaining the hardness and adhesion of the first compound layer 22a and the second compound layer 22b. This reduces peeling or cracking between the first compound layer 22a and the second compound layer 22b and improves the strength of the coating layer 20. As a result, the life of the coated tool 1 can be extended.
[0037] Each of the first compound layer 22a and the second compound layer 22b is a compound represented by the formula: (Al a Ti b Ta c )N···(1) (wherein a, b, and c satisfy the relationships 0.35≦a≦0.65, 0.3≦b≦0.5, 0.02≦c≦0.2, and a+b+c=1) The Ta-containing compound may be represented by the formula:
[0038] When a satisfies the relationship 0.35≦a≦0.65, the hardness and wear resistance of the coating layer 20 can be maintained. When b and c satisfy the relationships 0.3≦b≦0.5 and 0.02≦c≦0.2, the oxidation resistance of the coating layer 20 can be maintained and the strength of the coating layer 20 at high temperatures can be improved. As a result, the life of the coated tool 1 can be extended.
[0039] 5, the c of the Ta-containing compound contained in the first compound layer 22a may vary continuously in the thickness direction of the first compound layer 22a. The c of the Ta-containing compound contained in the second compound layer 22b may vary continuously in the thickness direction of the second compound layer 22b. For example, as shown in FIG. 5, the c of the Ta-containing compound contained in the first compound layer 22a may be maximum near the center of the distance in the thickness direction of the first compound layer 22a. The c of the Ta-containing compound contained in the second compound layer 22b may be minimum near the center of the distance in the thickness direction of the second compound layer 22b.
[0040] In this case, the residual stress between the first compound layer 22 a and the second compound layer 22 b can be further reduced, thereby reducing peeling or cracking between the first compound layer 22 a and the second compound layer 22 b, and as a result, the life of the coated tool 1 can be extended.
[0041] (Mo-containing laminated structure 23) 4, each of the multiple Mo-containing stacked structures 23 includes a third compound layer 23a and a fourth compound layer 23b. The third compound layer 23a contains Mo at a third composition ratio. The fourth compound layer 23b contains Mo at a fourth composition ratio different from the third composition ratio. One of the third composition ratio and the fourth composition ratio may be zero.
[0042] In this way, each of the plurality of Mo-containing laminate structures 23 includes the third compound layer 23a containing Mo at a third composition ratio and the fourth compound layer 23b containing Mo at a fourth composition ratio different from the third composition ratio, thereby improving the toughness and strength of the coating layer 20. Furthermore, the lubricity of the coating layer 20 can be maintained even at high temperatures. As a result, the life of the coated tool 1 can be extended.
[0043] Each of the third compound layer 23a and the fourth compound layer 23b may contain Al, Cr, and Mo. In this case, the content Al(3) of Al contained in the third compound layer 23a, the content Cr(3) of Cr contained in the third compound layer 23a, the content Mo(3) of Mo contained in the third compound layer 23a, the content Al(4) of Al contained in the fourth compound layer 23b, the content Cr(4) of Cr contained in the fourth compound layer 23b, and the content Mo(4) of Mo contained in the fourth compound layer 23b are the same as Al(3).<Al(4)、Cr(3)> Cr(4) and Mo(3)>Mo(4). Mo(4) can be 0.
[0044] Al(3), Cr(3), Mo(3), Al(4), Cr(4), and Mo(4) are Al(3)<Al(4)、Cr(3)> When the relationship between Cr(4) and Mo(3) > Mo(4) is satisfied, the residual stress between the third compound layer 23a and the fourth compound layer 23b can be reduced. This reduces peeling or cracking between the third compound layer 23a and the fourth compound layer 23b. Furthermore, the lubricity of the coating layer 20 can be maintained even at high temperatures, and the thermal shock resistance, strength, oxidation resistance, and hardness at high temperatures of the coating layer 20 can be further improved. As a result, the life of the coated tool 1 can be extended.
[0045] Each of the third compound layer 23a and the fourth compound layer 23b is a compound represented by the formula: (Al d Cr e Si f Mo g )N···(2) (wherein d, e, f, and g satisfy the relationships 0.35≦d≦0.65, 0.2≦e≦0.45, 0.03≦f≦0.15, 0.02≦g≦0.2, and d+e+f+g=1) The Mo-containing compound may be represented by the formula:
[0046] When d satisfies the relationship 0.35≦d≦0.65, the hardness and wear resistance of the coating layer 20 can be maintained. When e, f, and g satisfy the relationships 0.2≦e≦0.45, 0.03≦f≦0.15, and 0.02≦g≦0.2, the lubricity of the coating layer 20 at high temperatures can be maintained and the thermal shock resistance, strength, and oxidation resistance of the coating layer 20 can be improved. As a result, the life of the coated tool 1 can be extended.
[0047] As shown in Fig. 6, g of the Mo-containing compound contained in the third compound layer 23a may vary continuously in the thickness direction of the third compound layer 23a. g of the Mo-containing compound contained in the fourth compound layer 23b may vary continuously in the thickness direction of the fourth compound layer 23b. For example, as shown in Fig. 6, g of the Mo-containing compound contained in the third compound layer 23a may be maximum near the center of the distance in the thickness direction of the third compound layer 23a. g of the Mo-containing compound contained in the fourth compound layer 23b may be minimum near the center of the distance in the thickness direction of the fourth compound layer 23b.
[0048] In this case, the residual stress between the third compound layer 23 a and the fourth compound layer 23 b can be further reduced, thereby reducing peeling or cracking between the third compound layer 23 a and the fourth compound layer 23 b, and as a result, the life of the coated tool 1 can be extended.
[0049] The first compound layer 22a, the second compound layer 22b, the third compound layer 23a, and the fourth compound layer 23b may have an average thickness of 3 nm or more and 15 nm or less.
[0050] In this case, the Ta-containing laminate structure 22 including the first compound layer 22a and the second compound layer 22b is a laminate structure of multiple layers having a nanoscale thickness. The Mo-containing laminate structure 23 including the third compound layer 23a and the fourth compound layer 23b is a laminate structure of multiple layers having a nanoscale thickness. This improves the strength of the coating layer 20 against external forces. It also improves the oxidation resistance and high-temperature hardness of the coating layer 20. As a result, the life of the coated tool 1 can be extended.
[0051] <Method of manufacturing coated tools> Next, an example of a method for manufacturing the coated tool 1 according to the embodiment will be described with reference to Fig. 7. Fig. 7 is a diagram schematically showing an example of a film-forming apparatus for forming a coating layer on a substrate. Note that the method for manufacturing the coated tool 1 is not limited to the method described below.
[0052] First, a substrate 10 having the shape of the coated tool 1 is prepared using a conventionally known method. Next, a coating layer 20 is formed on the surface of the substrate 10. The coating layer 20 can be formed by, for example, a physical vapor deposition (PVD) method such as an ion plating method or a sputtering method. As an example, when the coating layer 20 is formed by the ion plating method, an arc ion plating film formation apparatus (hereinafter referred to as an AIP apparatus) 1000 as shown in FIG. 7 can be used.
[0053] 7, an AIP apparatus 1000 introduces a gas such as N2 or Ar into a vacuum chamber 101 through a gas inlet 102, and generates a gas plasma by applying a high voltage between a cathode electrode 103 and an anode electrode 104 disposed in the AIP apparatus 1000. This plasma evaporates and ionizes the desired metal or ceramic from a target 105, generating high-energy metal or ceramic ions. This ionized metal or ceramic is then deposited on the surface of a substrate 10 as a sample, thereby forming a coating layer 20 on the surface of the substrate 10.
[0054] As shown in Fig. 7, a plurality of substrates 10 may be set in a tower 107 and placed on a sample support stage 106. A plurality of sample support stages 106 (two sets in the figure) may be placed on a table (not shown). As shown in Fig. 7, a heater 108 for heating the substrates 10, a gas outlet 109 for discharging gas out of the system, and a bias power supply 110 for applying a bias voltage to the substrates 10 are provided.
[0055] Examples of the target 105 include metal targets each containing independently metal tantalum (Ta), metal molybdenum (Mo), and one or more metals selected from the group 5 or 6 elements of the periodic table, Si, Y, and Ce; alloy targets made by combining these; and mixture targets made of powders or sintered bodies of carbides, nitrides, or borides of these metals.
[0056] Using the target 105, a metal source is evaporated by arc discharge or glow discharge, and the metal of the metal source is ionized while reacting with nitrogen (N2) gas as a nitrogen source, methane (CH4) / acetylene (C2H2) gas as a carbon source, or oxygen (O2) gas, thereby depositing a coating layer 20 on the surface of the substrate 10.
[0057] At this time, the sample support stage 106 is controlled so that the distance from the position of the target 105 to the position of the substrate 10 is 160 mm or more, preferably 260 mm or more. A large number of highly linear magnetic field lines are generated from the center of the surface of the target 105 toward the substrate 10, and the magnetic flux density near the substrate 10 is set to 0.2 to 0.8 mT (millitesla).
[0058] Nitrogen gas may be introduced into the AIP device 1000 as a reactive gas, and the atmospheric pressure may be set to 2 to 10 Pa. The temperature of the substrate 10 is maintained at 300 to 500°C. A bias voltage of -50 to -200 V is applied to the substrate 10, and an arc discharge of 80 to 200 A is generated between the target 105 (cathode electrode 103) and the anode electrode 104. Metal is vapor-deposited onto the substrate 10 while the substrate 10 is rotated and revolved.
[0059] The magnetic flux density near the substrate 10 can be controlled, for example, by placing an electromagnetic coil or permanent magnet, which is a magnetic field generating source, around the target 105, by placing a permanent magnet inside the AIP device 1000, for example, in the center, or by adjusting the position of an adjacent target 105.
[0060] The magnetic force is calculated by measuring the magnetic flux density at the position of the substrate 10 using a magnetic flux density meter. The magnetic flux density is expressed in units of mT (millitesla). Here, the distance from the position of the target 105 to the position of the substrate 10 represents the distance measured at the position where the substrate 10 is closest to the target 105 and the distance where the substrate 10 is farthest from the target 105.
[0061] During film formation, when the rotation speed of the sample is defined as the period in which the substrate 10 approaches the target 105 most closely at each position on the substrate 10 as shown in Fig. 7, adjusting the rotation speed can adjust the period of the difference in composition between heavy metals and light metals in the thickness direction of the coating layer 20. Specifically, the rotation speed of the substrate 10 and the sample support 106 may be adjusted so that the period is 2 to 20 rpm (revolutions per minute).
[0062] During film formation, the tower 107 may rotate while the sample support stages 106 on which the substrates 10 are placed rotate, and the table may be rotated so that the sample support stages 106 revolve. By adjusting the timing of such revolutions, the thickness of each compound layer constituting the Ta-containing laminate structure 22 and the Mo-containing laminate structure 23 can be controlled.
[0063] By applying a pulsed bias voltage, it is possible to adjust the time or distance that metal ions travel from the target 105 to the substrate 10. This makes it possible to differentiate the composition of heavy metal components and light metal components during film formation.
[0064] For example, when the base 10 is positioned so that it is close to and facing the target 105, heavy metal components from the target 105 fly toward the base 10 in a straight line, and more heavy metals than light metals are deposited on the base 10. On the other hand, when the base 10 is positioned so that it is far from and not facing the target 105, the light metal components wrap around and deposit on the base 10, and it is thought that the amount of deposition of heavy metal components will decrease. In this case, by increasing the distance from the position of the target 105 to the position of the base 10 and maintaining a certain level of magnetic flux density near the base 10, it is thought that the wraparound of the light metal components will be promoted and the composition difference between the heavy metal components and the light metal components will increase.
[0065] <Cutting tools> Next, the configuration of a cutting tool including the above-described coated tool 1 will be described with reference to Fig. 8. Fig. 8 is a front view showing an example of a cutting tool according to an embodiment.
[0066] As shown in FIG. 8, a cutting tool 100 according to the embodiment includes a coated tool 1 and a holder 70 for fixing the coated tool 1.
[0067] The holder 70 is a rod-shaped member extending from a first end (the upper end in FIG. 8) to a second end (the lower end in FIG. 8). The holder 70 is made of, for example, steel or cast iron. Of these materials, steel, which has particularly high toughness, may be used.
[0068] The holder 70 has a pocket 73 at the end on the first end side. The pocket 73 is a portion where the coated tool 1 is attached, and has a seating surface that intersects with the rotation direction of the workpiece and a constraint side surface that is inclined relative to the seating surface. The seating surface is provided with a screw hole into which a screw 75, which will be described later, is threaded.
[0069] The coated tool 1 is positioned in a pocket 73 of the holder 70 and attached to the holder 70 by a screw 75. That is, the screw 75 is inserted into the through hole 5 of the coated tool 1, and the tip of the screw 75 is inserted into a threaded hole formed in the seating surface of the pocket 73 to screw the threaded portions together. In this way, the coated tool 1 is attached to the holder 70 so that the cutting edge portion 3 protrudes outward from the holder 70.
[0070] In the embodiment, a cutting tool used for so-called turning is exemplified. Examples of turning include internal diameter machining, external diameter machining, and grooving. The cutting tool is not limited to that used for turning. For example, the coated tool 1 may be used as a cutting tool used for milling. Examples of cutting tools used for milling include milling cutters such as flat milling cutters, face milling cutters, side milling cutters, and groove milling cutters, and end mills such as single-flute end mills, multi-flute end mills, tapered-flute end mills, and ball end mills. [Example]
[0071] Examples of the present disclosure will be described in detail below with reference to FIGS. 9 to 13. The present disclosure is not limited to the following examples. FIG. 9 is a table showing manufacturing conditions for a coating layer formed on a substrate. FIG. 10 is a table showing the configuration of a coating layer formed on a substrate. FIG. 11A is a photograph showing the distribution of Ta in the cross section of the Ta-containing laminated structures of Samples 4 to 15 and 19 to 21. FIG. 11B is a graph showing the distribution of Ta in the cross section of the Ta-containing laminated structures of Samples 4 to 15 and 19 to 21. FIG. 12A is a photograph showing the distribution of Mo in the cross section of the Mo-containing laminated structures of Samples 1 to 3, 7 to 12, 16 to 18, 22, and 23. FIG. 12B is a graph showing the distribution of Mo in the cross section of the Mo-containing laminated structures of Samples 1 to 3, 7 to 12, 16 to 18, 22, and 23. FIG. 13 is a table showing the results of cutting tests on the coated tools of Samples 1 to 27.
[0072] The photographs shown in Figure 11A are photographs obtained using an energy dispersive spectrometer (EDS) of the cross sections of the Ta-containing laminated structures of Samples Nos. 4 to 15 and 19 to 21. The photographs shown in Figure 12A are photographs obtained using EDS of the cross sections of the Mo-containing laminated structures of Samples Nos. 1 to 3, 7 to 12, 16 to 18, 22, and 23. The horizontal direction in Figures 11A and 12A is the direction perpendicular to the surface of the substrate. The vertical direction in Figures 11A and 12A is the direction along the surface of the substrate.
[0073] In the graph shown in Fig. 11B, the horizontal axis represents the distance (nm) in the direction perpendicular to the surface of the substrate, and the vertical axis represents the value of c of the Ta-containing compound contained in the Ta-containing layered structure. In the graph shown in Fig. 12B, the horizontal axis represents the distance (nm) in the direction perpendicular to the surface of the substrate, and the vertical axis represents the value of g of the Mo-containing compound contained in the Mo-containing layered structure.
[0074] Coated tools Nos. 1 to 27 were fabricated by forming a coating layer on a substrate made of a WC-based cemented carbide using an AIP apparatus as shown in FIG. 7 under the manufacturing conditions shown in FIG. 9. That is, the coating layer was formed on the surface of the substrate under the conditions of arc current (mA), target composition, distance between the target and the substrate (mm), magnetic flux density (mT) near the substrate, and rotation speed (rpm) of the sample holder as shown in FIG. 9. The distance between the target and the substrate (mm) varied within the range of values shown in FIG. 9 depending on the rotation of the sample holder. Correspondingly, the magnetic flux density (mT) near the substrate also varied within the range of values shown in FIG. 9.
[0075] For the coated tools of Samples No. 1 to No. 23, a plurality of Ta-containing laminate structures and a plurality of Mo-containing laminate structures were formed on the surface of a substrate. Here, the plurality of Ta-containing laminate structures and the plurality of Mo-containing laminate structures were alternately laminated. For the coated tool of Sample No. 24, a single Ta-containing laminate structure and a single Mo-containing laminate structure were formed on the surface of a substrate. For the coated tool of Sample No. 25, only a plurality of Mo-containing laminate structures were formed on the surface of a substrate. For the coated tool of Sample No. 26, only a plurality of Ta-containing laminate structures were formed on the surface of a substrate. For the coated tool of Sample No. 27, a plurality of Ta-containing monolayer structures and a plurality of Mo-containing monolayer structures were formed on the surface of a substrate instead of a plurality of Ta-containing laminate structures and a plurality of Mo-containing laminate structures.
[0076] Here, a set of a Ta-containing laminate structure and a Mo-containing laminate structure, only a Ta-containing laminate structure, only a Mo-containing laminate structure, or a set of a Ta-containing single-layer structure and a Mo-containing single-layer structure was formed on the surface of the substrate for the number of lamination times (times) shown in Fig. 9. That is, the number of Ta-containing laminate structures, the number of Mo-containing laminate structures, the number of Ta-containing single-layer structures, and the number of Mo-containing single-layer structures was each the same as the number of lamination times (times) shown in Fig. 9. Each of the Ta-containing laminate structures, the Mo-containing laminate structures, the Ta-containing single-layer structures, and the Mo-containing single-layer structures was formed on the surface of the substrate for the lamination time (minutes) shown in Fig. 9.
[0077] The coated tools of Samples No. 1 to No. 23 correspond to examples of the present disclosure, and the coated tools of Samples No. 24 to No. 27 correspond to comparative examples of the present disclosure.
[0078] As shown in Figure 10, for the coated tools of Samples 1 to 24, the Ta-containing laminate structure was composed of a first compound layer and a second compound layer, and the Mo-containing laminate structure was composed of a third compound layer and a fourth compound layer. For the coated tool of Sample 25, the Mo-containing laminate structure was composed of a third compound layer and a fourth compound layer. For the coated tool of Sample 26, the Ta-containing laminate structure was composed of a first compound layer and a second compound layer. For the coated tool of Sample 27, the coating layer did not include either a Ta-containing or Mo-containing laminate structure, but instead included a Ta-containing single-layer structure and a Mo-containing single-layer structure having the same composition as the respective targets shown in Figure 9.
[0079] Each of the first compound layer and the second compound layer is made of (Al a Ti b Ta c )N, where a, b, and c were the values shown in FIG. 10. The values of a, b, and c shown in FIG. 10 were average values for the Ta-containing compounds contained in the multiple first compound layers or multiple second compound layers included in the Ta-containing layered structure. The average composition of the Ta-containing layered structure composed of the first compound layer and the second compound layer matched the composition of the target for manufacturing the Ta-containing layered structure shown in FIG. 9.
[0080] Each of the third compound layer and the fourth compound layer is made of (Al d Cr e Si f Mo g ) where d, e, f, and g were the values shown in FIG. 10. The values of d, e, f, and g shown in FIG. 10 were average values for the Mo-containing compounds contained in the multiple third compound layers or multiple fourth compound layers included in the Mo-containing layered structure. The average composition of the Mo-containing layered structure composed of the third compound layers and the fourth compound matched the composition of the target for manufacturing the Mo-containing layered structure shown in FIG. 9.
[0081] For the coated tools of Samples No. 1 to No. 24, the thicknesses (nm) of the Ta-containing laminate structure and the Mo-containing laminate structure were as shown in Figure 10. For the coated tool of Sample No. 25, the thickness of the Mo-containing laminate structure was 4000 nm as shown in Figure 10. For the coated tool of Sample No. 26, the thickness of the Ta-containing laminate structure was 4000 nm as shown in Figure 10. For the coated tool of Sample No. 27, the thicknesses of the Ta-containing single-layer structure and the Mo-containing single-layer structure were 400 nm as shown in Figure 10.
[0082] For the coated tools of samples No. 1 to No. 24, the average thicknesses of the first compound layer, the second compound layer, the third compound layer, and the fourth compound layer were the average compound layer thickness (nm) values shown in Figure 10. For the coated tool of sample No. 25, the average thicknesses of the third compound layer and the fourth compound layer were 8 nm, as shown in Figure 10. For the coated tool of sample No. 26, the average thicknesses of the first compound layer and the second compound layer were 8 nm, as shown in Figure 10. For the coated tool of sample No. 27, the coating layer did not include any of the first compound layer, the second compound layer, the third compound layer, and the fourth compound layer.
[0083] 11A and 11B, it was confirmed that for the coated tools of Samples 4 to 15 and 19 to 21, the Ta-containing laminate structures included a plurality of first compound layers composed of Ta-containing compounds with a relatively high value of c and a plurality of second compound layers composed of Ta-containing compounds with a relatively low value of c. In other words, it was confirmed that the Ta-containing laminate structures were formed by alternately stacking a plurality of first compound layers and a plurality of second compound layers.
[0084] It was confirmed that the value of c of the Ta-containing compound contained in the first compound layer continuously changes with the distance from the surface of the substrate in the thickness direction of the first compound layer, i.e., the direction perpendicular to the surface of the substrate.It was confirmed that the value of c of the Ta-containing compound contained in the second compound layer continuously changes with the distance from the surface of the substrate in the thickness direction of the second compound layer, i.e., the direction perpendicular to the surface of the substrate.
[0085] 12A and 12B, it was confirmed that the Mo-containing laminate structures of the coated tools of Samples 1 to 3, 7 to 12, 16 to 18, 22, and 23 contained a plurality of third compound layers composed of Mo-containing compounds having a relatively high g value and a plurality of fourth compound layers composed of Mo-containing compounds having a relatively low g value. In other words, it was confirmed that the Mo-containing laminate structures were formed by alternately stacking a plurality of third compound layers and a plurality of fourth compound layers.
[0086] It was confirmed that the g value of the Mo-containing compound contained in the third compound layer continuously changes with the distance from the surface of the substrate in the thickness direction of the third compound layer, i.e., the direction perpendicular to the surface of the substrate.It was confirmed that the g value of the Mo-containing compound contained in the fourth compound layer continuously changes with the distance from the surface of the substrate in the thickness direction of the fourth compound layer, i.e., the direction perpendicular to the surface of the substrate.
[0087] <Cutting test> Cutting tests were carried out on the coated tools of Samples No. 1 to No. 27. The test conditions for the cutting tests were as follows: A cemented carbide material for milling (model number: PNMU1205ANER-GM) was used as the substrate, and the cutting tests were carried out under the following conditions. (1) Cutting method: Shoulder cutting using square timber measuring 170mm x 260mm x 110mm (2) Work material: SCМ440 (3) Cutting speed Vc: low speed (160 m / min) and high speed (300 m / min) (4) Feed rate per tooth fz: 0.12 mm / t (5) Axial cutting depth ap: 2 mm (6) Radial cutting depth ae: 63 mm (7) Processing method: dry and wet (8) Evaluation method: Milling was performed on the workpiece under the above conditions, and the time when the Vb wear width on the tool flank reached 0.1 mm was determined to be the end of the coated tool's life.
[0088] FIG. 13 is a table showing the results of cutting tests on coated tools of samples No. 1 to No. 27.
[0089] 13, the lifespan of the coated tools of Samples 1 to 23 was longer than that of Samples 24 to 27 in both dry and wet machining, and in both low-speed and high-speed machining. Therefore, it was confirmed that the lifespan of the coated tools can be extended when the coating layer includes at least a plurality of Ta-containing laminate structures and a plurality of Mo-containing laminate structures, each of the plurality of Ta-containing laminate structures including a first compound layer containing Ta at a first composition ratio and a second compound layer containing Ta at a second composition ratio different from the first composition ratio, and each of the plurality of Mo-containing laminate structures including a third compound layer containing Mo at a third composition ratio and a fourth compound layer containing Mo at a fourth composition ratio different from the third composition ratio, and the plurality of Ta-containing laminate structures and the plurality of Mo-containing laminate structures are alternately stacked in the coating layer.
[0090] As shown in Fig. 13, among the coated tools of Samples No. 1 to No. 23, the lives of Samples No. 1 to No. 18 were longer than the lives of Samples No. 19 to No. 23 in both dry and wet machining, and in both low-speed and high-speed machining. Thus, the first compound layer and the second compound layer each contained Al, Ti, and Ta, and as shown in Fig. 10, the relationships of a in the first compound layer, b in the first compound layer, c in the first compound layer, a in the second compound layer, b in the second compound layer, and c in the second compound layer were such that a in the first compound layer < a in the second compound layer, b in the first compound layer < b in the second compound layer, and c in the first compound layer > c in the second compound layer, and the third compound layer and It was confirmed that the life of the coated tool can be further extended when each of the fourth compound layers contains Al, Cr, and Mo, and the relationships among d of the third compound layer, e of the third compound layer, g of the third compound layer, d of the fourth compound layer, e of the fourth compound layer, and g of the fourth compound layer are such that d of the third compound layer < d of the fourth compound layer, e of the third compound layer > e of the fourth compound layer, and g of the third compound layer > g of the fourth compound layer.
[0091] As shown in Figure 13, among the coated tools of Samples No. 1 to No. 18, the lifespans of Samples No. 3 and No. 7 to No. 12 were equal to or longer than the lifespans of Samples No. 1, No. 2, No. 4 to No. 6, and No. 13 to No. 18 in both dry and wet cutting, and in both low-speed and high-speed cutting. Thus, each of the first compound layer and the second compound layer was found to be formed by the formula (Al a Ti b Ta c )N···(1) (wherein a, b, and c satisfy the relationships 0.35≦a≦0.65, 0.3≦b≦0.5, 0.02≦c≦0.2, and a+b+c=1) and each of the third compound layer and the fourth compound layer comprises a Ta-containing compound represented by the formula (Al d Cr eSi f Mo g )N···(2) (wherein d, e, f, and g satisfy the relationships 0.35≦d≦0.65, 0.2≦e≦0.45, 0.03≦f≦0.15, 0.02≦g≦0.2, and d+e+f+g=1), it was confirmed that the life of the coated tool can be further extended.
[0092] As described above, the coated tool according to the embodiment (for example, the coated tool 1) includes a substrate (for example, the substrate 10) and a coating layer (for example, the coating layer 20) located on the substrate. The coating layer includes a plurality of Ta-containing stacked structures (for example, the Ta-containing stacked structures 22) and a plurality of Mo-containing stacked structures (for example, the Mo-containing stacked structures 23). Each of the plurality of Ta-containing stacked structures includes a first compound layer (for example, the first compound layer 22a) containing Ta at a first composition ratio and a second compound layer (for example, the second compound layer 22b) containing Ta at a second composition ratio different from the first composition ratio. Each of the plurality of Mo-containing stacked structures includes a third compound layer (for example, the third compound layer 23a) containing Mo at a third composition ratio and a fourth compound layer (for example, the fourth compound layer 23b) containing Mo at a fourth composition ratio different from the third composition ratio.
[0093] Therefore, the coated tool according to the embodiment can extend the life of the tool.
[0094] 1 is merely an example and does not limit the shape of the coated tool according to the present disclosure. A coated tool according to the present disclosure may have, for example, a rod-shaped body having a rotation axis and extending from a first end to a second end, a cutting edge located at the first end of the body, and a groove extending spirally from the cutting edge toward the second end of the body.
[0095] Supplementary Note (1): A coated tool comprising: a substrate; and a coating layer located on the substrate, wherein the coating layer includes a plurality of Ta-containing laminate structures and a plurality of Mo-containing laminate structures, wherein each of the plurality of Ta-containing laminate structures includes a first compound layer containing Ta at a first composition ratio and a second compound layer containing Ta at a second composition ratio different from the first composition ratio, and each of the plurality of Mo-containing laminate structures includes a third compound layer containing Mo at a third composition ratio and a fourth compound layer containing Mo at a fourth composition ratio different from the third composition ratio. Appendix (2): The coated tool according to Appendix (1), wherein the plurality of Ta-containing laminate structures and the plurality of Mo-containing laminate structures are laminated alternately within the coating layer. Supplementary note (3): Each of the first compound layer and the second compound layer contains Al, Ti, and Ta, and the content of Al contained in the first compound layer Al(1), the content of Ti contained in the first compound layer Ti(1), the content of Ta contained in the first compound layer Ta(1), the content of Al contained in the second compound layer Al(2), the content of Ti contained in the second compound layer Ti(2), and the content of Ta contained in the second compound layer Ta(2) are Al(1) <Al(2)、Ti(1)<Ti(2)、およびTa(1)> The coated tool according to appendix (1) or (2), having a relationship of Ta(2). Supplementary Note (4): Each of the first compound layer and the second compound layer is represented by the formula (Al a Ti b Ta c )N···(1) (wherein a, b, and c satisfy the relationships 0.35≦a≦0.65, 0.3≦b≦0.5, 0.02≦c≦0.2, and a+b+c=1), wherein c for the Ta-containing compound contained in the first compound layer changes continuously in a thickness direction of the first compound layer, and c for the Ta-containing compound contained in the second compound layer changes continuously in a thickness direction of the second compound layer. Supplementary note (5): Each of the third compound layer and the fourth compound layer contains Al, Cr, and Mo, and the content of Al contained in the third compound layer Al(3), the content of Cr contained in the third compound layer Cr(3), the content of Mo contained in the third compound layer Mo(3), the content of Al contained in the fourth compound layer Al(4), the content of Cr contained in the fourth compound layer Cr(4), and the content of Mo contained in the fourth compound layer Mo(4) are Al(3)<Al(4)、Cr(3)> The coated tool according to any one of appendices (1) to (4), wherein Cr(4) and Mo(3)>Mo(4) are satisfied. Supplementary Note (6): Each of the third compound layer and the fourth compound layer is represented by the formula (Al d Cr e Si f Mo g )N···(2) (wherein d, e, f, and g satisfy the relationships 0.35≦d≦0.65, 0.2≦e≦0.45, 0.03≦f≦0.15, 0.02≦g≦0.2, and d+e+f+g=1), wherein g for the Mo-containing compound contained in the third compound layer varies continuously in a thickness direction of the third compound layer, and g for the Mo-containing compound contained in the fourth compound layer varies continuously in a thickness direction of the fourth compound layer. Appendix (7): The coated tool according to any one of Appendixes (1) to (6), wherein the average thickness of each of the plurality of Ta-containing laminate structures and the plurality of Mo-containing laminate structures is 300 nm or more and 500 nm or less, and the average thickness of each of the first compound layer, the second compound layer, the third compound layer, and the fourth compound layer is 3 nm or more and 15 nm or less. Supplementary Note (8): A cutting tool comprising a rod-shaped holder having a pocket at an end thereof, and the coated tool according to any one of Supplementary Notes (1) to (7) positioned in the pocket.
[0096] Further advantages and / or modifications may readily occur to those skilled in the art. Therefore, the invention in its broader aspects is not limited to the specific details and representative embodiments shown and described above. Accordingly, various modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents. [Explanation of symbols]
[0097] 1 Coated tools 2 Chip body 3 Cutting edge 5 through holes 10 Base 20 Covering layer 21 Middle Class 22 Ta-containing laminated structure 22a First compound layer 22b Second compound layer 23 Mo-containing laminated structure 23a Third compound layer 23b Fourth compound layer 70 Holder 73 Pocket 75 screws 100 cutting tools 101 Vacuum Chamber 102 Gas inlet 103 Cathode electrode 104 Anode electrode 105 Target 106 Sample support 107 Tower 108 Heater 109 Gas outlet 110 Bias power supply 1000 AIP devices
Claims
1. a substrate; a coating layer overlying the substrate; Equipped with The coating layer is a plurality of Ta-containing stacked structures; A plurality of Mo-containing stacked structures; Including, Each of the plurality of Ta-containing stacked structures is a first compound layer containing Ta at a first composition ratio; a second compound layer containing Ta at a second composition ratio different from the first composition ratio; and Including, Each of the plurality of Mo-containing stacked structures comprises: a third compound layer containing Mo in a third composition ratio; a fourth compound layer containing Mo at a fourth composition ratio different from the third composition ratio; and Including, Each of the first compound layer and the second compound layer is a compound represented by the formula (Ala Ti b Ta c )N...(1) (wherein a, b, and c satisfy the relationships 0.32≦a≦0.70, 0.24≦b≦0.56, 0≦c≦0.28, and a+b+c=1) and a Ta-containing compound represented by Each of the third compound layer and the fourth compound layer is a compound represented by the formula (Al d Cre Si f Mo g )N...(2) (wherein d, e, f, and g satisfy the relationships 0.29≦d≦0.73, 0.16≦e≦0.52, 0.05≦f≦0.10, 0≦g≦0.25, and d+e+f+g=1) The Mo-containing compound is represented by an average thickness of each of the plurality of Ta-containing stacked structures and the plurality of Mo-containing stacked structures is 200 nm or more and 600 nm or less; an average thickness of the first compound layer, the second compound layer, the third compound layer, and the fourth compound layer is 2 nm or more and 20 nm or less; Coated tools.
2. the plurality of Ta-containing laminated structures and the plurality of Mo-containing laminated structures are alternately laminated in the coating layer; The coated tool according to claim 1 .
3. each of the first compound layer and the second compound layer contains Al, Ti, and Ta; the content of Al contained in the first compound layer, Al(1); the content of Ti contained in the first compound layer, Ti(1); the content Ta(1) of Ta contained in the first compound layer, the content of Al contained in the second compound layer, Al(2); The content of Ti contained in the second compound layer, Ti(2), and The content of Ta contained in the second compound layer, Ta(2), is Al(1)<Al(2), Ti(1)<Ti(2), and Ta(1)>Ta(2). The coated tool according to claim 1 .
4. Each of the first compound layer and the second compound layer is a compound represented by the formula (Al) a Three b That c )N・・・(1) (wherein a, b, and c satisfy the relationships 0.35≦a≦0.65, 0.3≦b≦0.5, 0.02≦c≦0.2, and a+b+c=1) and a Ta-containing compound represented by c for the Ta-containing compound contained in the first compound layer varies continuously in a thickness direction of the first compound layer, c of the Ta-containing compound contained in the second compound layer changes continuously in the thickness direction of the second compound layer. The coated tool according to claim 1 .
5. each of the third compound layer and the fourth compound layer contains Al, Cr, and Mo; the content Al(3) of Al contained in the third compound layer; the content Cr(3) of Cr contained in the third compound layer; the content of Mo contained in the third compound layer, Mo(3); the content of Al contained in the fourth compound layer, Al(4); The content Cr(4) of Cr contained in the fourth compound layer, and The content of Mo contained in the fourth compound layer, Mo(4), is The relationships are Al(3)<Al(4), Cr(3)>Cr(4), and Mo(3)>Mo(4). The coated tool according to claim 1 .
6. Each of the third compound layer and the fourth compound layer is a compound represented by the formula (Al d Cr e Si f Mo g )N・・・(2) (wherein d, e, f, and g satisfy the relationships 0.35≦d≦0.65, 0.2≦e≦0.45, 0.03≦f≦0.15, 0.02≦g≦0.2, and d+e+f+g=1) The Mo-containing compound is represented by g of the Mo-containing compound contained in the third compound layer varies continuously in a thickness direction of the third compound layer, g of the Mo-containing compound contained in the fourth compound layer changes continuously in the thickness direction of the fourth compound layer. The coated tool according to claim 1 .
7. an average thickness of each of the plurality of Ta-containing stacked structures and the plurality of Mo-containing stacked structures is 300 nm or more and 500 nm or less; an average thickness of the first compound layer, the second compound layer, the third compound layer, and the fourth compound layer is 3 nm or more and 15 nm or less; The coated tool according to claim 1 .
8. a rod-shaped holder having a pocket at an end; The coated tool according to any one of claims 1 to 7, which is located in the pocket. A cutting tool comprising:
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