Reticle pod inner pod with different materials between contact interfaces

Abstract

The reticle pod inner pod includes a cover and a base plate, the cover and base plate contacting each other at a contact surface. The contact surfaces of the cover and base plate each have a different material. The different materials may each be metal. The different materials may differ in hardness. The hardness difference may be 50 Brinell hardness or greater. One of the different materials may be a ductile material having an elongation to break of 25% or greater. The method may include providing a cover and a base plate each having a first material, and providing a second, different material at a contact surface of one of the cover or base plate.

Description

[Technical Field]

[0001] Priority This disclosure claims priority to U.S. Provisional Patent Application No. 63 / 292,402, filed December 21, 2021, which is incorporated herein by reference.

[0002] The present disclosure is directed to reticle pods having dissimilar materials between their interface surfaces. [Background technology]

[0003] The reticle pod can be used to store and transport reticles, for example, reticles for photolithography, such as extreme ultraviolet (EUV) photolithography. The reticle pod can include an outer pod and an inner pod. The inner pod can include a metal, typically a hard alloy material. The inner pod typically includes a base plate and a cover that contact each other when the inner pod is closed, e.g., when a reticle is placed inside. Summary of the Invention

[0004] The present disclosure is directed to reticle pods having dissimilar materials between their interface surfaces.

[0005] The contact surfaces between the cover and base plate of the reticle pod inner pod can use different materials. The different materials can vary in hardness, with one contact surface comprising a relatively soft and / or ductile material and the other contact surface comprising a relatively hard material. The hardness difference between the different materials can be selected to reduce particle generation due to wear and / or galling at the contact surfaces. The reduced particle generation achieved by using dissimilar materials can improve reticle yield and reduce damage or loss during storage, transportation, and photolithography processes using inner pods according to embodiments.

[0006] In one embodiment, the reticle pod includes a base plate and a cover. The base plate and the cover are configured to accommodate a reticle. The base plate includes one or more first contact surfaces on an edge of the base plate configured to face the cover. The cover includes one or more second contact surfaces, each configured to contact at least one of the one or more first contact surfaces. The one or more first contact surfaces are formed from a first material. The one or more second contact surfaces are formed from a second material. The second material is different from the first material.

[0007] In one embodiment, when the one or more first contact surfaces contact the one or more second contact surfaces, a seal is formed at the interface of the one or more first contact surfaces with the one or more second contact surfaces.

[0008] In one embodiment, the first material and the second material differ in hardness by at least 50 Brinell hardness. In one embodiment, one of the first material and the second material is gold, and the other of the first material and the second material is selected from the group consisting of nickel and chromium. In one embodiment, at least one of the first material and the second material is a metal. In one embodiment, one of the first material and the second material is applied as a coating to one of the base plate or the cover. In one embodiment, at least one of the first material or the second material has a ductility value D of 0.62 or greater. In one embodiment, at least one of the first material or the second material is non-oxidizing.

[0009] In one embodiment, a method of manufacturing a reticle pod includes forming a base plate from a first material, where the base plate includes one or more first contact areas. The method further includes forming a cover from the first material, where the cover includes one or more second contact areas, where the one or more second contact areas are configured to face the one or more first contact areas when the base plate and the cover are coupled. The method further includes applying a second material, different from the first material, to one of the cover or the base plate to at least the one or more first contact areas or the one or more second contact areas to form a contact surface.

[0010] In one embodiment, the first material and the second material differ in hardness by at least 50 Brinell hardness. In one embodiment, the first material is selected from the group consisting of nickel and chromium, and the second material is gold. In one embodiment, each of the first material and the second material is a metal. In one embodiment, applying the second material includes coating either the one or more first regions or the one or more second contact regions with the second material. In one embodiment, the second material has a ductility value D of 0.62 or greater. In one embodiment, the second material is non-oxidizing.

[0011] In one embodiment, the method further includes applying a third material, different from the second material, to at least one or more of the first contact areas or one or more of the second contact areas of the other of the cover or base plate to form a second contact surface. In one embodiment, the third material and the second material differ in hardness by at least 50 Brinell hardness. In one embodiment, the third material is selected from the group consisting of nickel and chromium, and the second material is gold. In one embodiment, the third material and the second material are metals. In one embodiment, the third material is non-oxidizing.

[0012] In one embodiment, a method for storing a reticle includes placing the reticle in a reticle pod including a cover and a base plate. The method further includes contacting one or more first contact surfaces on the cover with one or more second contact surfaces on the base plate. The one or more first contact surfaces are formed from a first material, and the one or more second contact surfaces are formed from a second material. The second material is different from the first material. In one embodiment, the first material and the second material differ in hardness by at least 50 on the Brinell hardness scale. In one embodiment, at least one of the first material and the second material has a ductility value D of 0.62 or greater. In one embodiment, at least one of the first material and the second material is non-oxidizing. [Brief explanation of the drawings]

[0013] [Figure 1] FIG. 2 is a diagram of a reticle pod according to one embodiment. [Figure 2] 10 is a cross-sectional view of a contact surface of a reticle pod inner pod according to one embodiment. [Figure 3] 10 is a cross-sectional view of a contact surface of a reticle pod inner pod according to one embodiment. [Figure 4] FIG. 10 is a diagram of a contact surface of a reticle pod inner pod, according to one embodiment. [Figure 5] 10 is a cross-sectional view of a contact surface of a reticle pod inner pod according to one embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0014] The present disclosure is directed to reticle pods having dissimilar materials between their interface surfaces.

[0015] 1 illustrates a reticle pod according to one embodiment. Reticle pod 100 includes an outer pod 102 including a pod dome 104 and a pod door 106. Reticle pod 100 further includes an inner pod 108 including a cover 110 and a base plate 112. Cover 110 includes one or more cover contact surfaces 114. Base plate 112 includes one or more base plate contact surfaces 116. A reticle 118 can be stored within reticle pod 100.

[0016] The outer pod 102 forms the exterior of the reticle pod 100 when the reticle pod 100 is fully assembled. The outer pod 102 is configured to form an interior space that can house the inner pod 108. The outer pod 102 can be formed from a pod dome 104 and a pod door 106. The pod dome 104 and the pod door 106 can be configured to be coupled to each other, for example, using a latch mechanism (not shown). The pod dome 104 and the pod door 106 can be configured to hold the inner pod 108 within the interior space defined by the pod dome 104 and the pod door 106.

[0017] The inner pod 108 is a pod configured to store a reticle 118. The inner pod 108 includes a cover 110 and a base plate 112. When the inner pod 108 is assembled, the cover 110 and the base plate 112 contact each other at a cover contact surface 114 and a base plate contact surface 116, respectively. The inner pod 108 is configured to fit within the interior space of the outer pod 102.

[0018] The cover 110 forms a portion of the inner pod 108. The cover 110 can be formed from any suitable material, such as a metallic material such as aluminum. The cover 110 can have a coating or plating on the base material. The cover 110 includes a cover contact surface 114. The cover contact surface 114 is disposed on an edge of the cover 110 that faces the base plate 112 when the inner pod 108 is assembled. In one embodiment, the cover contact surface 114 is provided as a single continuous surface. In one embodiment, the cover contact surface 114 is formed from the base material of the cover 110. In one embodiment, the cover contact surface 114 is plated and / or coated with a material. In one embodiment, the cover contact surface 114 is a plurality of discontinuous contact surfaces. In one embodiment, the cover contact surface 114 is provided on a plurality of contact strips, such as contact strip 308 shown in FIG. 3 and described below. In one embodiment, cover contact surface 114 is provided on a plurality of contact points, such as contact strips 408 shown in Figure 4 and described below. In one embodiment, cover contact surface 114 is provided on one or more inserts, such as contact insert 508 shown in Figure 5 and described below.

[0019] The base plate 112 forms another portion of the inner pod 108. The base plate 112 can be formed from any suitable material, such as a metallic material such as aluminum. The base plate 112 can have a coating or plating on a base material. The base plate 112 includes a base plate contact surface 116. In one embodiment, the base plate contact surface 116 is formed from the base material of the base plate 112. In one embodiment, the base plate contact surface 116 is plated and / or coated with a material. The base plate contact surface 116 is disposed on an edge of the base plate 112 that faces the base plate 112 when the inner pod 108 is assembled. In one embodiment, the base plate contact surface 116 is provided as a single continuous surface. In one embodiment, the base plate contact surface 116 is a plurality of discontinuous contact surfaces. In one embodiment, the base plate contact surface 116 is provided on a plurality of contact strips, such as contact strip 308 shown in FIG. 3 and described below. In one embodiment, the base plate contact surface 116 is provided on a plurality of contact points, such as contact strips 408 shown in FIG. 4 and described below. In one embodiment, the base plate contact surface 116 is provided on one or more contact inserts, such as contact insert 508 shown in FIG. 5 and described below. In one embodiment, the cover contact surface 114 and the base plate contact surface 116 are configured to form a seal when the reticle pod 100 is assembled. The seal may be sufficient to maintain a pressure differential between the interior of the reticle pod inner pod 108 and the exterior of the inner pod 108 under circumstances such as when a vacuum is pulled on the exterior of the inner pod 108. In one embodiment, the seal is formed by bringing the cover contact surface 114 and the base plate contact surface 116 into as direct contact or as close proximity as possible, given manufacturing tolerances, wear, or other such variations.

[0020] The cover contact surface 114 and the base plate contact surface 116 are formed such that dissimilar materials contact at their interfaces. The dissimilar materials may be any two dissimilar materials. In one embodiment, the dissimilar materials may be selected to include a relatively hard material and a relatively soft material. Non-limiting examples of relatively hard materials include nickel, chromium, diamond-like coating (DLC), chromium carbonitride, and / or other materials of similar hardness. Non-limiting examples of relatively soft materials include gold, platinum, and other materials of similar hardness. In one embodiment, the dissimilar materials are selected to have a hardness difference sufficient to prevent galling, for example, by having a hardness difference of at least 50 Brinell Hardness (HB). In one embodiment, at least one of the dissimilar materials is a ductile material having a physical ductility value D of 0.62 or greater. Non-limiting examples of ductile materials include aluminum, copper, tin, silver, platinum, niobium, lead, and gold. In various embodiments, ductility may be characterized by the elongation at break of a material. In one embodiment, both the cover contact surface 114 and the base plate contact surface 116 comprise a ductile material. In one embodiment, only one of the cover contact surface 114 and the base plate contact surface 116 comprises a ductile material. In one embodiment, one or both of the materials of the cover contact surface 114 and the base plate contact surface 116 are metal. In one embodiment, at least one of the materials of the cover contact surface 114 or the base plate contact surface 116 is a polymer or composite material. A non-limiting example of a polymer material is a filled polyetheretherketone (PEEK) material, which may be contained in a composite material such as a PEEK material. In various embodiments, the materials selected for the dissimilar materials in the cover contact surface 114 and the base plate contact surface 116 may be selected based on the wear characteristics of the materials, such as particle generation, visible wear, etc., over a usage cycle. The wear characteristics may be determined for each material and may be selected individually or used in combination with each other.

[0021] 2 shows a cross-sectional view of a contact surface of a reticle pod inner pod, according to one embodiment. Reticle pod inner pod 200 includes a cover 202 and a base plate 204. Cover 202 includes a cover contact surface 206. Base plate 204 includes a base plate contact surface 210. Cover contact surface 206 and base plate contact surface 208 are configured to contact each other when reticle pod inner pod 200 is assembled.

[0022] Cover 202 forms a portion of reticle pod inner pod 200. Cover contact surface 206 is provided where cover 202 is configured to contact base plate 204 when reticle pod inner pod 200 is assembled. In the embodiment shown in FIG. 2, cover contact surface 206 comprises the base material of cover 202 where cover 202 contacts base plate 204. In embodiments, cover contact surface 206 can instead be coated or plated to provide that material at its interface with base plate contact surface 208, as shown with respect to base plate contact surface 208.

[0023] The base plate 204 forms another portion of the reticle inner pod 200. A base plate contact surface 208 is provided where the base plate 204 contacts the cover 202 when the reticle inner pod 200 is assembled. In the embodiment shown in FIG. 2, the base plate contact surface 208 is coated or plated with a material. The coating on the base plate contact surface 208 is a dissimilar material from the material provided on the cover contact surface 206. In other embodiments, the cover contact surface 206 can be coated or plated with a material in addition to or in place of the coating on the base plate contact surface 208 shown in FIG. 2, so long as the materials on the cover contact surface 206 and the base plate contact surface 208 are dissimilar from one another. The dissimilar materials may differ in ductility, hardness, etc., as discussed above.

[0024] The cover contact surface 206 and the base plate contact surface 208 can be configured to comprise dissimilar materials where the cover contact surface 206 and the base plate contact surface 208 meet one another. In one embodiment, one of the dissimilar materials can be the base material of either the cover or the base plate. In one embodiment, at least one of the dissimilar materials can be a coating or plating applied to the cover 202 or the base plate 204. In one embodiment, both the cover 202 and the base plate 204 can have one of the dissimilar materials applied as a coating or plating, as shown in FIG. 2 for the base plate contact surface 208. In one embodiment, one of the cover contact surface 206 or the base plate contact surface 208 is a coating or plating applied to the cover 202 or the base plate 204, and the other of the cover contact surface 206 or the base plate contact surface 208 is provided as a contact strip, such as contact strip 308 shown in FIG. 3 and described below. In one embodiment, one of the cover contact surface 206 or the base plate contact surface 208 is a coating or plating applied to the cover 202 or the base plate 204, and the other of the cover contact surface 206 or the base plate contact surface 208 is provided as a contact strip, such as contact point 408 shown in FIG. 4 and described below. In one embodiment, one of the cover contact surface 206 or the base plate contact surface 208 is a coating or plating applied to the cover 202 or the base plate 204, and the other of the cover contact surface 206 or the base plate contact surface 208 is provided as a contact strip, such as contact insert 508 shown in FIG. 5 and described below.

[0025] 3 illustrates a cross-sectional view of a contact surface of a reticle pod inner pod, according to one embodiment. Reticle pod inner pod 300 includes a cover 302 and a base plate 304. Cover 302 includes a cover contact surface 306. Base plate 304 includes a plurality of contact strips 308 formed thereon.

[0026] Cover 302 forms a portion of reticle pod inner pod 300. Cover contact surface 306 is provided on cover 302 where cover 302 is configured to contact base plate 304, e.g., at a location corresponding to contact strip 308 when cover 302 and base plate 304 are combined to form reticle pod inner pod 300. In one embodiment, cover contact surface 306 is a base material. In one embodiment, cover contact surface 306 is coated or plated as the material applied to cover contact surface 306.

[0027] Base plate 304 forms another portion of reticle pod inner pod 300. Contact strips 308 are strips of additional material formed on base plate 304. The additional material is a dissimilar material to the material of cover contact surface 306. Contact strips 308 may be applied directly to base plate 304, for example, by depositing contact strips 308. In one embodiment, contact strips 308 may be attached by any suitable attachment method, such as an adhesive or the like.

[0028] Although FIG. 3 shows contact strips 308 as being formed on base plate 304, contact strips 308 could alternatively be formed on cover 302, or base plate 304 could alternatively have a contact surface in the base material of base plate 304 or in a coating applied to base plate 304, or base plate could include contact points such as contact points 408 described below and shown in FIG. 4, or one or more contact inserts such as contact insert 508 described below and shown in FIG. 5.

[0029] 4 illustrates a cross-sectional view of a contact surface of a reticle pod inner pod, according to one embodiment. Reticle pod inner pod 400 includes a cover 402 and a base plate 404. Cover 402 includes a cover contact surface 406. Base plate 404 includes a plurality of contact points 408 formed thereon.

[0030] The cover 402 forms a portion of the reticle pod inner pod 400. A cover contact surface 406 is provided on the cover 402 where the cover 402 is configured to contact the base plate 404, e.g., at a location corresponding to a contact point 408 when the cover 402 and the base plate 404 are combined to form the reticle pod inner pod 400. In one embodiment, the cover contact surface 406 is a base material. In one embodiment, the cover contact surface 406 is coated or plated as the material applied to the cover contact surface 406.

[0031] The base plate 404 forms another portion of the reticle pod inner pod 400. Contact points 408 are provided on the base plate 404. The contact points 408 are configured so that when the base plate 404 and the cover 402 are combined to form the reticle pod inner pod 400, the cover contact surface 406 contacts the base plate 404 at the contact points 408. The contact points 408 may be a series of discontinuities formed on the base plate 404. The contact points 408 may be shaped like small circles, squares, etc. The contact points 408 may be aligned with the base plate 404. The contact points 408 are formed from a material that is different from the material of the cover contact surface 406.

[0032] 4 shows contact points 408 as being formed on base plate 404, contact points 408 may alternatively be formed on cover 402, with base plate 404 having a contact surface comprised of a base material or a plating or coating such as for base plate contact surface 208 shown in FIG. 2 and described above, contact strip 308 shown in FIG. 3 and described above, and / or contact insert 508, described below and shown in FIG. 5. Contact points 408 and the material of cover 402 or base plate 404 contacted by contact points 408 are dissimilar materials.

[0033] 5 shows a diagram of a contact surface of a reticle pod inner pod, according to one embodiment. Reticle pod inner pod 500 includes a cover 502 and a base plate 504. Cover 502 includes a cover contact surface 506. Base plate 504 includes a plurality of contact inserts 508 disposed thereon. Contact inserts 510 can be attached to base plate 504 using channels 510.

[0034] Cover 502 forms a portion of reticle pod inner pod 500. Cover contact surface 506 is provided on cover 502 where cover 502 is configured to contact base plate 504 when reticle pod inner pod 500 is assembled. Cover contact surface 506 may be the base material of cover 502, a coating or plating, or any other suitable contact surface, for example, a contact strip such as contact strip 308 shown in FIG. 3 and described above, or contact point 408 shown in FIG. 4 and described above.

[0035] The base plate 504 forms another portion of the reticle pod inner pod 500. The base plate 504 includes a contact insert 508 disposed thereon. The contact insert 508 is secured to the base plate 504 by mechanical engagement, such as an interconnection mechanism or a press fit, between portions of the contact insert 504 and portions of the base plate. In one embodiment, the channel 510 can receive a portion of the contact insert 508 to hold the contact insert 508 in place. The channel 510 can be a recess or groove formed in a surface of the base plate 504. In one embodiment, the channel 510 can be a through-hole formed in the base plate 504. In one embodiment, the channel 510 is sized such that a retention protrusion 512 formed on the side of the contact insert 508 opposite the surface configured to contact the cover contact surface 506 is press-fit into the channel 510 to hold the contact insert 508 in place on the base plate 504. In one embodiment, the retention protrusions 512 can be secured to the channels 510 using an adhesive. In one embodiment, the retention protrusions 512 include a retention mechanism that engages the base plate 504 to hold the contact inserts 508 in place on the base plate 504. The cover contact surface 506 and the contact inserts 508 are fabricated from materials selected such that the contacting portions of the cover contact surface 506 and the contact inserts 508 are formed from dissimilar materials.

[0036] 5 shows contact inserts 508 and channels 510 in base plate 504, in various embodiments, channels 510 can be formed in cover 502 and contact inserts 508 can be provided in cover 502. In these embodiments, base plate 504 can alternatively have a contact surface that is comprised of the base material of base plate 504 or a coating applied to base plate 504, or base plate 504 can include contact strips such as contact points 308 described above and shown in FIG. 3, or contact points such as contact points 408 described above and shown in FIG. 4.

[0037] Aspects It will be appreciated that any of embodiments 1-8 can be combined with any of embodiments 9-20.

[0038] Aspect 1 a base plate and a cover, the base plate and the cover configured to receive a reticle; the base plate includes one or more first contact surfaces on an edge of the base plate configured to face the cover; the cover includes one or more second contact surfaces, each of the one or more second contact surfaces configured to contact at least one of the one or more first contact surfaces; the one or more first contact surfaces are formed from a first material; the one or more second contact surfaces are formed from a second material, the second material being different from the first material; Reticle pod.

[0039] Aspect 2 A reticle pod according to embodiment 1, wherein when the one or more first contact surfaces contact the one or more second contact surfaces, a seal is formed at the interface of the one or more first contact surfaces with the one or more second contact surfaces.

[0040] Aspect 3 3. The reticle pod according to aspect 1 or 2, wherein the first material and the second material differ in hardness by at least 50 Brinell hardness.

[0041] Aspect 4 The reticle pod according to any one of aspects 1 to 3, wherein one of the first material and the second material is gold, and the other of the first material and the second material is selected from the group consisting of nickel and chromium.

[0042] Aspect 5 The reticle pod according to any one of aspects 1 to 4, wherein each of the first material and the second material is a metal.

[0043] Aspect 6 The reticle pod according to any one of aspects 1 to 5, wherein one of the first material and the second material is applied as a coating to a respective one of the base plate or the cover.

[0044] Aspect 7 The reticle pod according to any one of aspects 1 to 6, wherein at least one of the first material or the second material has a ductility value D of 0.62 or greater.

[0045] Aspect 8 Aspects 8. The reticle pod according to any one of aspects 1 to 7, wherein at least one of the first material or the second material is non-oxidizing.

[0046] Aspect 9 1. A method of manufacturing a reticle pod, comprising: forming a base plate from a first material, the base plate including one or more first contact areas; forming a cover from a first material, the cover including one or more second contact areas configured to face the one or more first contact areas when the base plate and the cover are coupled; applying a second material, different from the first material, to at least one or more first contact areas or one or more second contact areas to one of the cover or the base plate to form a contact surface; A method comprising:

[0047] Aspect 10 The method according to embodiment 9, wherein the first material and the second material differ in hardness by at least 50 Brinell hardness.

[0048] Aspect 11 The method according to embodiment 9 or 10, wherein the first material is selected from the group consisting of nickel and chromium, and the second material is gold.

[0049] Aspect 12 The method according to any one of aspects 9 to 11, wherein each of the first material and the second material is a metal.

[0050] Aspect 13 13. The method according to any one of aspects 9 to 12, wherein applying the second material comprises coating either the one or more first contact areas or the one or more second contact areas with the second material.

[0051] Aspect 14 14. The method according to any one of aspects 9 to 13, wherein the second material has a ductility value D greater than or equal to 0.62.

[0052] Aspect 15 Aspect 15. The method according to any one of aspects 9 to 14, wherein the second material is non-oxidizing.

[0053] Aspect 16 Aspects 9 to 15. The method according to any one of aspects 9 to 15, further comprising applying a third material, different from the second material, to at least one or more first contact areas or one or more second contact areas on the other of the cover or the base plate to form a second contact surface.

[0054] Aspect 17 1. A method for storing a reticle, comprising: placing the reticle in a reticle pod having a cover and a base plate; contacting one or more first contact surfaces provided on the cover with one or more second contact surfaces provided on the base plate; Including, A method wherein one or more first contact surfaces are formed from a first material and one or more second contact surfaces are formed from a second material, the second material being different from the first material.

[0055] Aspect 18 The method according to embodiment 17, wherein the first material and the second material differ in hardness by at least 50 Brinell hardness.

[0056] Aspect 19 19. The method according to embodiment 17 or 18, wherein at least one of the first material and the second material has a ductility value D greater than or equal to 0.62.

[0057] Aspect 20 Aspect 20. The method according to any one of aspects 17 to 19, wherein at least one of the first material and the second material is non-oxidizing.

[0058] The examples disclosed herein are to be considered in all respects as illustrative and not limiting. The scope of the invention is indicated by the appended claims, rather than by the foregoing description, and all changes that come within the meaning and range of equivalents of the claims are intended to be embraced therein.

Claims

1. a base plate and a cover, the base plate and the cover configured to accommodate a reticle; the base plate includes one or more first contact surfaces at an edge of the base plate configured to face the cover; the cover includes one or more second contact surfaces, each of the one or more second contact surfaces configured to contact at least one of the one or more first contact surfaces; the one or more first contact surfaces are formed from a first material; the one or more second contact surfaces are formed from a second material, the second material being different from the first material, and the first and second materials having a hardness difference of at least 50 Brinell hardness (HB). Reticle pod.

2. 2. The reticle pod of claim 1, wherein when the one or more first contact surfaces contact the one or more second contact surfaces, a seal is formed at the interface of the one or more first contact surfaces with the one or more second contact surfaces.

3. 1. A method of manufacturing a reticle pod, comprising: forming a base plate from a first material, the base plate including one or more first contact areas; forming a cover from the first material, the cover including one or more second contact areas configured to face the one or more first contact areas when the base plate and the cover are coupled; applying a second material, different from the first material, to one of the cover or the base plate at least in the one or more first contact areas or the one or more second contact areas to form a contact surface; applying a third material different from the second material to the other of the cover or the base plate at least in the one or more first contact areas or the one or more second contact areas to form a second contact surface, the third material having a hardness difference of at least 50 Brinell hardness (HB) between the second material and the third material; A method comprising:

4. 1. A method for storing a reticle, comprising: placing the reticle in a reticle pod comprising a cover and a base plate; contacting one or more first contact surfaces provided on the cover with one or more second contact surfaces provided on the base plate; Including, the one or more first contact surfaces are formed from a first material, the one or more second contact surfaces are formed from a second material, the second material is different from the first material, and the first and second materials have a hardness difference of at least 50 Brinell hardness (HB); method.

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