Actuator

Abstract

To reduce usage amounts of a buffer material.SOLUTION: An actuator 10 comprises: a mounting member 12 constituted to include a coil 24; a movable element 14 which has a magnet 52 arranged to oppose to the coil 24 and is displaced with respect to the mounting member 12 by distributing electricity to the coil 24; an elastic support body 16; and buffer materials 18. The elastic support body 16 comprises mounting member-side parts 56 to be fixed that are fixed to the mounting member 12, a movable element-side part 58 to be fixed that is fixed to the movable element 14, and a deforming part 60 connecting the mounting member-side parts 56 to be fixed to the movable element-side part 58 to be fixed. The buffer materials 18 are arranged between the mounting member 12 and the deforming part 60, and deforms accompanying deflection-deformation of the deforming part 60.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an actuator. [Background technology]

[0002] The following Patent Document 1 discloses an actuator including a mounting member with a coil and a mover that is supported on the mounting member via an elastic support and displaces when current is applied to the coil. The elastic support described in this document includes a pair of spring members formed of metal plates and a buffer member disposed between the pair of spring members. The deflection of the elastic support allows the mover to be displaced. Furthermore, the provision of the buffer member in the elastic support makes it possible to quickly damp vibrations of the elastic support. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2020 / 184439 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the elastic support body described in Patent Document 1 requires that cushioning materials formed in shapes corresponding to the pair of spring materials be bonded to one spring material and the other spring material, making it difficult to reduce the amount of cushioning material used.

[0005] In consideration of the above, an object of the present invention is to provide an actuator that can reduce the amount of buffer material used. [Means for solving the problem]

[0006] The actuator of the first aspect comprises a mounting member including a coil, a movable element having a magnet arranged opposite the coil and displacing relative to the mounting member when current is passed through the coil, an elastic support having a mounting member-side fixed part fixed to the mounting member, a movable element-side fixed part fixed to the movable element, and a deformation part connecting the mounting member-side fixed part and the movable element-side fixed part, and a cushioning material provided between the mounting member and the deformation part that deforms in accordance with the flexural deformation of the deformation part.

[0007] In the actuator of the first aspect, when current is applied to the coil, the moving element having the magnet is displaced relative to the mounting member. Furthermore, when the moving element is displaced relative to the mounting member, the deforming portion of the elastic support is flexibly deformed. When the deforming portion of the elastic support is flexibly deformed, the buffer material provided between the mounting member and the deforming portion of the elastic support is deformed. This allows for damping of vibrations of the elastic support. Here, in this aspect, the buffer material is provided between the mounting member and the deforming portion of the elastic support. As a result, in this aspect, the amount of buffer material used can be reduced compared to, for example, a configuration in which the elastic support includes a pair of spring members and buffer material formed in a shape corresponding to the pair of spring members is bonded to one spring member and the other spring member.

[0008] The actuator of the second aspect is the actuator of the first aspect, in which the elastic support and the cushioning material are arranged stacked in the thickness direction, and the deforming portion side of the cushioning material has an adhesive surface that is adhered to the deforming portion.

[0009] In the actuator of the second aspect, the adhesive surface of the buffer material is adhered to the deforming portion of the elastic support body, which allows the damping effect of the buffer material to be increased even if the area seen from the thickness direction is reduced.

[0010] The actuator of a third aspect is the actuator of the second aspect, wherein the cushioning material has an adhesive surface on the mounting member side that is bonded to the mounting member.

[0011] In the actuator of the third aspect, the adhesive surface of the buffer material is adhered to the mounting member, which makes it possible to further increase the damping effect of the buffer material even if the area seen from the thickness direction is reduced.

[0012] The actuator of the fourth aspect is the actuator of the second or third aspect, wherein the cushioning material has an excess portion that does not overlap with the deformation portion when viewed in the thickness direction, and further comprises a cover member, the deformation portion is disposed between the cover member and the cushioning material, and the cover member is attached to the excess portion.

[0013] In the actuator of the fourth aspect, the deformation portion is disposed between the cover member and the cushioning material, and the cover member is attached to the excess portion. This allows the excess portion of the cushioning material to be covered by the cover member. Furthermore, by disposing the deformation portion between the cushioning material and the cover member, the damping effect can be enhanced.

[0014] An actuator of a fifth aspect is the actuator of the fourth aspect, wherein the cover member has an adhesive surface that is adhered to the deformation portion and the buffer material.

[0015] In the actuator of the fifth aspect, the adhesive surface of the cover member can be adhered to the deformation portion and the cushioning material.

[0016] The actuator of a sixth aspect is the actuator of any one of the first to fifth aspects, wherein the buffer material is provided in a compressed state between the mounting member and the deformation portion.

[0017] In the actuator of the sixth aspect, the buffer material is provided in a compressed state between the mounting member and the deforming portion of the elastic support, so that even when the deforming portion of the elastic support deforms in the direction away from the mounting member, the buffer material can maintain contact with the deforming portion of the elastic support and with the mounting member.

[0018] An actuator of a seventh aspect is the actuator of any one of the first to sixth aspects, wherein the buffer material is provided on the mounting member-side fixed portion side of the deformation portion.

[0019] In the actuator of the seventh aspect, the buffer material is provided on the mounting member-side fixed portion side of the deforming portion of the elastic support. This reduces the amount of deformation of the deforming portion compared to a configuration in which the buffer material is provided on the moving element-side fixed portion side of the deforming portion, making it possible to suppress the amount of deformation of the buffer material. This makes it possible to suppress deterioration of the buffer material due to repeated deformation.

[0020] An actuator of an eighth aspect is the actuator of the seventh aspect, wherein when a displacement direction in which the mover is displaced is defined as ±Z directions and directions in a plane orthogonal to the ±Z directions that are perpendicular to each other are defined as X and Y directions, the deformation portion comprises an arm extending between the mover-side fixed portion and the attachment member-side fixed portion, the arm comprising a first X-direction outer extension portion extending outward in the X direction from the mover-side fixed portion side, a first folded portion formed closer to the attachment member-side fixed portion than the first X-direction outer extension portion and whose extension direction is folded back from the outer side in the X direction to the inner side in the X direction, and an X-direction outer extension portion extending inward in the X direction from the first folded portion. a second folded portion formed closer to the movable member side fixed portion than the X-direction inner extension portion and whose extension direction is folded back from the inside in the X direction to the outside in the X direction; a second X-direction outer extension portion extending outward in the X direction from the second folded portion; a third folded portion formed closer to the mounting member side fixed portion than the second X-direction outer extension portion and whose extension direction is folded back from the outside in the X direction to the outside in the Y direction; and a Y-direction outer extension portion extending outward in the Y direction from the third folded portion and connected to the mounting member side fixed portion, and the buffer material is provided along the second X-direction outer extension portion, the third folded portion, and the Y-direction outer extension portion.

[0021] In the actuator of the eighth aspect, the arm of the deformation portion of the elastic support includes a first X-direction outward extension portion, a first folded portion, an X-direction inward extension portion, a second folded portion, a second X-direction outward extension portion, a third folded portion, and a Y-direction outward extension portion. This allows the length of the arm of the deformation portion to be longer than in a configuration without the third folded portion and the Y-direction outward extension portion. Increasing the arm length lowers the resonant frequency. This also reduces the load on the elastic support, thereby reducing the load applied to the mover-side fixed portion and the mounting-member-side fixed portion, making metal fatigue less likely to occur. Furthermore, a buffer material is provided along the second X-direction outward extension portion, the third folded portion, and the Y-direction outward extension portion. By providing the third folded portion and the Y-direction outward extension portion in this way, the buffer material can be easily positioned between the arm and the mounting member at a position where the amount of deformation of the arm is small. The amount of deformation of the buffer material can be reduced compared to when the buffer material is provided along the first X-direction outward extension portion, the first folded portion, the X-direction inward extension portion, and the second folded portion. This makes it possible to suppress deterioration of the cushioning material due to repeated deformation.

[0022] The actuator of a ninth aspect is the actuator of the eighth aspect, further comprising two of the cushioning materials, and the elastic support body comprises four of the mounting member side fixed parts and four of the arms, two of the four arms being arranged on one side in the X direction with respect to the mover side fixed part and formed symmetrically in the Y direction, and the other two of the four arms being arranged on the other side in the X direction with respect to the mover side fixed part and formed symmetrically in the Y direction, one of the cushioning materials being provided along the second X-direction outer extension part, the third folded part and the Y-direction outer extension part of the two arms being arranged on the one side in the X direction with respect to the mover side fixed part, and the other of the cushioning material being provided along the second X-direction outer extension part, the third folded part and the Y-direction outer extension part of the two arms being arranged on the other side in the X direction with respect to the mover side fixed part.

[0023] In the actuator of the ninth aspect, two buffer materials are provided for four arms, which reduces the number of buffer materials required compared to a configuration in which four buffer materials are provided for each of the four arms.

[0024] The actuator of the tenth aspect is the actuator of the ninth aspect, wherein the deformation portion is formed in a plate shape, and includes a Y-direction connecting portion that connects in the Y direction the third folded portions of the two arms that are arranged on one side in the X direction of the movable member-side fixed portion, and a Y-direction connecting portion that connects in the Y direction the third folded portions of the two arms that are arranged on the other side in the X direction of the movable member-side fixed portion, and one of the cushioning materials is provided along one of the Y-direction connecting portions, and the other of the cushioning materials is provided along the other Y-direction connecting portion.

[0025] In the actuator of the tenth aspect, by providing a Y-direction connecting portion that connects the third folded portion of the arm in the Y direction, the flatness of the plate-shaped deformation portion can be improved compared to a configuration without a Y-direction connecting portion. Furthermore, because the flatness of the deformation portion is maintained for each component and during the assembly process, individual component differences are less likely to occur, and variations in the spring coefficient (variations in hardness and stiffness) can be suppressed. [Effects of the Invention]

[0026] The actuator according to the present invention has the excellent effect of being able to reduce the amount of buffer material used. [Brief explanation of the drawings]

[0027] [Figure 1] FIG. [Figure 2] FIG. 2 is an exploded perspective view showing the actuator. [Figure 3A] FIG. [Figure 3B] FIG. 3B is a plan view corresponding to FIG. 3A, in which the cover member is not shown. [Figure 4]4 is a cross-sectional view showing a cross section of the actuator taken along line 4-4 shown in FIG. 3A. [Figure 5] FIG. [Figure 6] FIG. 10 is a perspective view showing another type of elastic support member. [Figure 7] FIG. 10 is a plan view showing another type of elastic support member. [Figure 8] FIG. 10 is a plan view showing another type of elastic support member. DETAILED DESCRIPTION OF THE INVENTION

[0028] An actuator 10 according to an embodiment of the present invention will be described with reference to FIGS. 1 to 5. Note that the arrow X direction, arrow Y direction, and arrow Z direction shown in the figures indicate the respective directions of the actuator 10. In the following description, the +Z direction shown in each figure is referred to as the upward direction, and the −Z direction is referred to as the downward direction. However, these are directional concepts based on the actuator and do not limit the mounting posture of the actuator. An axis parallel to the Z direction and passing through the center of gravity of a mover 14 (described later) is referred to as the center of gravity axis AX of the mover 14. The direction approaching the center of gravity axis AX of the mover 14 in the X direction is referred to as the inner X direction, and the direction moving away from it is referred to as the outer X direction. The direction approaching the center of gravity axis AX of the mover 14 in the Y direction is referred to as the inner Y direction, and the direction moving away from it is referred to as the outer Y direction. The +X direction is referred to as one side in the X direction, the −X direction is referred to as the other side in the X direction, the +Y direction is referred to as one side in the Y direction, the −Y direction is referred to as the other side in the Y direction, the +Z direction is referred to as one side in the Z direction, and the −Z direction is referred to as the other side in the Z direction.

[0029] 1 to 4, the actuator 10 of this embodiment is an actuator that is attached to a display unit such as a liquid crystal panel configured as a touch panel, or to various controllers, for example, to vibrate the display unit or the controller. By controlling the supply of electricity to this actuator 10, it is possible to give various tactile sensations to the fingers of a user touching the touch panel, controller, or the like.

[0030] 1 and 2, the actuator 10 includes a mounting member 12 that is attached to an attachment object such as the display unit of a tablet terminal, a mover 14 that is displaceable relative to the mounting member 12, and an elastic support 16 that elastically supports the mover 14 relative to the mounting member 12. The actuator 10 also includes two buffer materials 18 that dampen vibrations of the elastic support 16, and two cover members 20 that are attached to the elastic support 16 and cover one surface of the buffer material 18.

[0031] (Configuration of mounting member 12) As shown in FIG. 2, the mounting member 12 includes a box-shaped frame 22, a coil 24 formed by winding a conductive wire in a circular shape, an adhesive mounting sheet 26, and a pair of terminals 28.

[0032] The frame 22 is formed, for example, using a resin material and is shaped like a box with one side open in the Z direction. The frame 22 has a rectangular bottom wall 30 with the Z direction as its thickness direction, the X direction as its longitudinal direction when viewed from the Z direction, and the Y direction as its short side. As shown in Figures 2 and 4, a circular opening 32 penetrating the bottom wall 30 in the Z direction is formed in the center of the bottom wall 30 in the X and Y directions. The frame 22 also has an annular rib 34 protruding in the Z direction from the edge of the opening 32 in the bottom wall 30.

[0033] The frame 22 also has a pair of first side wall portions 36 that rise from the ends of the bottom wall portion 30 on one side in the X direction and on the other side toward one side in the Z direction, and a pair of second side wall portions 38 that rise from the ends of the bottom wall portion 30 on one side in the Y direction and on the other side toward one side in the Z direction.

[0034] 2, two pedestal portions 40 formed in the shape of rectangular blocks protrude toward one side in the Z direction from the ends on one and the other sides in the Y direction of the end faces on one side in the Z direction of the pair of first side wall portions 36. Furthermore, welding boss portions 42 (welded portions) formed in a cylindrical shape before welding, which will be described later, protrude toward one side in the Z direction from the two pedestal portions 40.

[0035] The frame 22 also includes a central protrusion 44 that protrudes from a central portion in the Y direction of one first side wall 36 toward the other first side wall 36. The frame 22 also includes a central protrusion 44 that protrudes from a central portion in the Y direction of the other first side wall 36 toward the one first side wall 36. In this embodiment, these central protrusions 44 have multiple recesses 44A that are open on one side in the Z direction. Here, the end face on one side in the Z direction of one central protrusion 44 and the Y-direction central portion of the end face on one side in the Z direction of one first side wall 36 form a cushioning material attachment surface 46 to which one cushioning material 18 (described later) is attached. The end face on one side in the Z direction of the other central protrusion 44 and the Y-direction central portion of the end face on one side in the Z direction of the other first side wall 36 form a cushioning material attachment surface 46 to which the other cushioning material 18 (described later) is attached.

[0036] (Configuration of coil 24) 2 and 4, the coil 24 is formed by winding a conductive wire in a circular shape around a coil base 48 that is formed in a circular shape with its axial direction aligned in the Z direction. The coil 24 is supported by the frame 22 together with the coil base 48. When the coil 24 is supported by the frame 22 together with the coil base 48, the coil 24 abuts against the rib 34 of the frame 22. A pair of end portions 24A of the coil 24 are connected to a pair of terminals 28 that are supported by the frame 22, respectively.

[0037] (Configuration of mounting adhesive sheet 26) The mounting adhesive sheet 26 is a member for mounting the actuator 10 to an object to which it is to be mounted. The mounting adhesive sheet 26 is an adhesive sheet with adhesive surfaces on both sides. The mounting adhesive sheet 26 is adhered to the underside of the bottom wall portion 30 of the frame 22. The mounting adhesive sheet 26 has a circular opening 26A formed therein that corresponds to the opening 32 formed in the bottom wall portion 30 of the frame 22.

[0038] (Configuration of mover 14) The mover 14 includes a yoke 50, a magnet 52, and a pole piece 54.

[0039] The yoke 50 is made of a soft magnetic material. The yoke 50 includes a disk-shaped top wall 50A with its thickness aligned in the Z direction, and a peripheral wall 50B extending downward from the outer periphery of the top wall 50A. The yoke 50 also includes a fixed protrusion 50C that protrudes from the center of one surface of the top wall 50A in the Z direction toward that side.

[0040] The magnet 52 is formed in a disk shape with its axial direction aligned with the Z direction. The magnet 52 is fixed to the lower surface side of the top wall 50A of the yoke 50 while being disposed inside the peripheral wall 50B of the yoke 50.

[0041] The pole piece 54 is made of a soft magnetic material and is formed in a disk shape with its axial direction aligned in the Z direction.

[0042] In the mover 14 described above, a magnetic circuit is formed by the yoke 50, the magnet 52, and the pole piece 54. A space is formed between the magnet 52 and the pole piece 54 and the peripheral wall portion 50B of the yoke 50, and the coil 24 is disposed in this space. The lower end of the peripheral wall portion 50B of the yoke 50 is flush with the lower end of the pole piece 54. Note that the pole piece 54 may have a height that causes it to protrude downward beyond the lower end of the peripheral wall portion 50B.

[0043] (Configuration of elastic support 16) 3 and 5, the elastic support 16 is formed using, for example, a metal plate formed into a plate shape (flat shape). In the free state (when no external force is acting), the elastic support 16 is formed in a plate shape that extends in a direction perpendicular to the Z direction.

[0044] A portion of the elastic support 16 is fixed to the mounting member 12, and another portion is fixed to the mover 14. The portion of the elastic support 16 between the portion fixed to the mounting member 12 and the portion fixed to the mover 14 is a deforming portion 60, and this deforming portion 60 is a portion that deforms when the mover 14 is displaced (vibrates). In other words, the elastic support 16 is made up of four mounting member-side fixed portions 56 fixed to the mounting member 12, a mover-side fixed portion 58 fixed to the mover 14, and a deforming portion 60 that connects the mounting member-side fixed portions 56 and the mover-side fixed portions 58.

[0045] The four mounting member-side fixed portions 56 are formed in a rectangular shape corresponding to the four base portions 40 of the frame 22 when viewed from the Z direction. Each of the four mounting member-side fixed portions 56 has a circular fixing hole 56A formed therethrough in the Z direction. The four welding boss portions 42 of the frame 22 are inserted into the fixing holes 56A of the four mounting member-side fixed portions 56, respectively. Furthermore, one end of the welding boss portions 42 of the frame 22 on one side in the Z direction is welded (thermally caulked), thereby fixing the four mounting member-side fixed portions 56 to the four base portions 40 of the frame 22, respectively. Furthermore, when the four mounting member-side fixed portions 56 are fixed to the four base portions 40 of the frame 22, respectively, the four mounting member-side fixed portions 56 are inseparable from the four base portions 40 of the frame 22, respectively. Note that each of the figures shows the state after the welding boss portions 42 have been thermally caulked.

[0046] The mover-side fixed portion 58 is formed in a circular shape with a smaller diameter than the top wall portion 50A of the yoke 50 that constitutes part of the mover 14 when viewed from the Z direction. A circular fixing hole 58A is formed in the center of this mover-side fixed portion 58. The fixing protrusion 50C of the yoke 50 is inserted into the fixing hole 58A of the mover-side fixed portion 58. Furthermore, one end of the fixing protrusion 50C of the yoke 50 on one side in the Z direction is deformed (crimped) with a punch or the like, thereby fixing the mover-side fixed portion 58 to the yoke 50. Note that the deformed state of the fixing protrusion 50C is not shown in the respective figures.

[0047] The deformation portion 60 includes, from a starting point 62 to a terminal end 64, a one-side starting point portion 66A and an other-side starting point portion 66B, and four arms 68A, 68B, 68C, and 68D. In the following description, the four arms 68A, 68B, 68C, and 68D may be referred to as a first arm 68A, a second arm 68B, a third arm 68C, and a fourth arm 68D, respectively.

[0048] Here, the starting end 62 refers to the beginning of the deforming portion 60 when the deforming portion 60 is defined as a portion extending from the mover-side fixed portion 58 side toward the mounting member-side fixed portion 56 side. Specifically, the starting end 62 coincides with the boundary between the mover-side fixed portion 58 and the deforming portion 60. In this embodiment, there are two starting ends 62: a starting end 62 on one side in the Y direction and a starting end 62 on the other side in the Y direction.

[0049] Furthermore, when the deformation portion 60 is defined as a portion extending from the mover-side fixed portion 58 toward the mounting member-side fixed portion 56, the terminus 64 refers to the end of the deformation portion 60. Specifically, it coincides with the boundary between the deformation portion 60 and the mounting member-side fixed portion 56. In this embodiment, there are four termini 64 corresponding to the four mounting member-side fixed portions 56 and the four arms 68A, 68B, 68C, 68D.

[0050] Both the one-side starting point portion 66A and the other-side starting point portion 66B are portions adjacent in the Y direction to the mover-side fixed portion 58. The one-side starting point portion 66A is located on one side of the mover-side fixed portion 58 in the Y direction, and the other-side starting point portion 66B is located on the other side of the mover-side fixed portion 58 in the Y direction.

[0051] The deformation portion 60 branches out from a one-side starting point 66A toward one side and the other side in the X direction, and is connected to a first arm 68A and a second arm 68B, respectively. The deformation portion 60 also branches out from a other-side starting point 66B toward one side and the other side in the X direction, and is connected to a third arm 68C and a fourth arm 68D, respectively. When there is no need to distinguish between the one-side starting point 66A and the other-side starting point 66B, they are simply referred to as starting point 66.

[0052] Here, the deformation portion 60 of this embodiment has a symmetrical shape in both the X direction and the Y direction, and the four arms 68A, 68B, 68C, and 68D have the same shape. More specifically, the first arm 68A and the third arm 68C are disposed on one side of the mover-side fixed portion 58 in the X direction and are formed symmetrically in the Y direction. The second arm 68B and the fourth arm 68D are disposed on the other side of the mover-side fixed portion 58 in the X direction and are formed symmetrically in the Y direction. Furthermore, the first arm 68A and the second arm 68B are formed symmetrically in the X direction. Furthermore, the third arm 68C and the fourth arm 68D are formed symmetrically in the X direction.

[0053] Each arm 68A, 68B, 68C, 68D has, in this order from the starting point 66 toward its respective mounting member side fixed portion 56, a first X-direction outer extension portion 70a, a first folded portion 70b, an X-direction inner extension portion 70c, a second folded portion 70d, a second X-direction outer extension portion 70e, a third folded portion 70f, and a Y-direction outer extension portion 70g.

[0054] The first X-direction outer extending portion 70a is a portion that extends outward in the X-direction from the mover-side fixed portion 58. The extending direction of the first X-direction outer extending portion 70a is parallel to the X direction.

[0055] The first folded portion 70b is formed closer to the mounting member side fixed portion 56 than the first X-direction outer extending portion 70a, and this first folded portion 70b is folded back so that the extension direction of the arms 68A, 68B, 68C, 68D is directed inward in the Y-direction.

[0056] The X-direction inward extending portion 70c is a portion that extends inward in the X-direction from the first folded portion 70b. The extending direction of the X-direction inward extending portion 70c is parallel to the X direction.

[0057] The second folded portion 70d is formed closer to the mover-side fixed portion 58 than the X-direction inward extending portion 70c, and at this second folded portion 70d, the extending direction of the arms 68A, 68B, 68C, 68D is folded back inward in the Y-direction.

[0058] The second X-direction outward extending portion 70e is a portion that extends outward in the X-direction from the second folded portion 70d. The second X-direction outward extending portion 70e has a curved shape such that the inclination angle of its extending direction with respect to the X-direction gradually decreases as it extends outward in the X-direction.

[0059] The third folded portion 70f is formed closer to the mounting member side fixed portion 56 than the second X-direction outer extending portion 70e, and at this third folded portion 70f, the extension direction of the arms 68A, 68B, 68C, 68D is folded back from the outer side in the X direction to the outer side in the Y direction.

[0060] The Y-direction outer extending portion 70g extends outward in the Y-direction from the third folded portion 70f, and the end opposite to the third folded portion 70f is connected to the mounting member side fixed portion 56. The extending direction of the Y-direction outer extending portion 70g is parallel to the Y direction.

[0061] Furthermore, the elastic support body 16 of this embodiment includes a Y-direction connecting portion 72 that connects the third folded portion 70f of the first arm 68A and the third folded portion 70f of the third arm 68C in the Y direction, and also includes a Y-direction connecting portion 72 that connects the third folded portion 70f of the second arm 68B and the third folded portion 70f of the fourth arm 68D in the Y direction. Each Y-direction connecting portion 72 extends in the Y direction at the same position in the X direction as each Y-direction outward extending portion 70g.

[0062] (Configuration of buffer material 18) 2, 3B, and 4, the cushioning material 18 is formed into a plate shape using a viscoelastic material, and is formed into a rectangular shape when viewed from the Z direction with the Z direction as its thickness direction. Specifically, the cushioning material 18 is formed into a rectangular shape when viewed from the Z direction with the Y direction as its longitudinal direction and the X direction as its short side direction. The dimensions of the cushioning material 18 in the Y direction and the X direction are set to correspond to the dimensions of the cushioning material attachment surface 46 of the frame 22 in the Y direction and the X direction.

[0063] The surface (lower surface) on the other side in the Z direction of the cushioning material 18 serves as a first adhesive surface 18A that can be bonded to another member. The surface (upper surface) on one side in the Z direction of the cushioning material 18 serves as a second adhesive surface 18B that can be bonded to another member. Only one of the upper and lower surfaces of the cushioning material 18 may be an adhesive surface, or neither the upper nor lower surfaces of the cushioning material 18 may be adhesive surfaces. Furthermore, the thickness dimension T of the cushioning material 18 as a single component (before it is sandwiched between the cushioning material attachment surface 46 of the frame 22 and the elastic support body 16 and deformed) is set to be larger than the clearance between the cushioning material attachment surface 46 of the frame 22 and the elastic support body 16.

[0064] Then, first adhesive surface 18A of one of cushioning materials 18 is attached to one of cushioning material attaching surfaces 46 of frame 22. As a result, one of cushioning materials 18 is attached to one of cushioning material attaching surfaces 46 of frame 22. Similarly, first adhesive surface 18A of the other of cushioning materials 18 is attached to the other cushioning material attaching surface 46 of frame 22. As a result, the other of cushioning materials 18 is attached to the other cushioning material attaching surface 46 of frame 22. Note that in a configuration in which first adhesive surface 18A is not provided on cushioning material 18, it is preferable to provide a holding portion such as a recess that holds the position of cushioning material 18 in a portion that corresponds to cushioning material attaching surface 46 of frame 22.

[0065] Next, the four welding boss portions 42 of the frame 22 are inserted into the fixing holes 56A of the four mounting member-side fixed portions 56 of the elastic support body 16, respectively, and one end of the welding boss portions 42 on one side in the Z direction is welded. In this way, the elastic support body 16 is attached to the frame 22.

[0066] Here, when the elastic support body 16 is attached to the frame 22, the first cushioning material 18 is disposed along the second X-direction outward extending portion 70e, the third folded portion 70f, and the Y-direction outward extending portion 70g of each of the first arm 68A and the third arm 68C, and along one of the Y-direction connecting portions 72. Furthermore, when the elastic support body 16 is attached to the frame 22, the second adhesive surface 18B of the first cushioning material 18 is attached to the second X-direction outward extending portion 70e, the third folded portion 70f, and the Y-direction outward extending portion 70g of each of the first arm 68A and the third arm 68C, and the surface (lower surface) on the other Z-direction side of one of the Y-direction connecting portions 72. Furthermore, when the elastic support 16 is attached to the frame 22, one of the cushioning materials 18 is crushed (compressed) between the second X-direction outer extension portion 70e, the third folded portion 70f, and the Y-direction outer extension portion 70g of each of the first arm 68A and the third arm 68C, as well as one of the Y-direction connecting portions 72 and one of the cushioning material attachment surfaces 46 of the frame 22.

[0067] Similarly, when the elastic support 16 is attached to the frame 22, the other cushioning material 18 is arranged along the second X-direction outward extending portion 70e, the third folded portion 70f, and the Y-direction outward extending portion 70g of each of the second arm 68B and the fourth arm 68D, and the other Y-direction connecting portion 72. Furthermore, when the elastic support 16 is attached to the frame 22, the second adhesive surface 18B of the other cushioning material 18 is attached to the other Z-direction side surfaces (lower surfaces) of the second X-direction outward extending portion 70e, the third folded portion 70f, and the Y-direction outward extending portion 70g of each of the second arm 68B and the fourth arm 68D, and the other Y-direction connecting portion 72. Furthermore, when the elastic support 16 is attached to the frame 22, the other cushioning material 18 is crushed (compressed) between the second X-direction outer extension portion 70e, the third folded portion 70f, and the Y-direction outer extension portion 70g of each of the second arm 68B and the fourth arm 68D, as well as the other Y-direction connecting portion 72 and the other cushioning material attachment surface 46 of the frame 22.

[0068] Note that each figure does not reflect the state in which the cushioning material 18 is crushed between the second X-direction outer extension portion 70e, the third folded portion 70f, and the Y-direction outer extension portion 70g of each arm 68A, 68B, 68C, and 68D and the other cushioning material attachment surface 46 of the frame 22.

[0069] 3B shows a plan view of the actuator 10 before two cover members 20, which will be described later, are attached. The portion of the cushioning material 18 shown in this figure where the second adhesive surface 18B is visible will be referred to as the excess portion 18C of the cushioning material 18. In other words, the portion of the cushioning material 18 shown in this figure that does not overlap in the Z direction with the second X-direction outward extending portion 70e, the third folded portion 70f, the Y-direction outward extending portion 70g, and the Y-direction connecting portion 72 of each arm 68A, 68B, 68C, 68D will be referred to as the excess portion 18C of the cushioning material 18.

[0070] (Configuration of cover member 20) The cover member 20 is formed in a plate shape using a viscoelastic material, and is formed in a rectangular shape when viewed from the Z direction with the Z direction as its thickness direction. Specifically, the cover member 20 is formed in a rectangular shape when viewed from the Z direction with the Y direction as its longitudinal direction and the X direction as its short side direction. The dimensions of the cover member 20 in the Y direction and the X direction are set to correspond to the dimensions of the cushioning material 18 in the Y direction and the X direction.

[0071] The surface (lower surface) of the cover member 20 on the other side in the Z direction serves as an adhesive surface 20A that can be bonded to another member. The surface (upper surface) of the cover member 20 on one side in the Z direction does not serve as an adhesive surface. As shown in FIGS. 3A and 3B , the adhesive surface 20A of one cover member 20 is attached to the second adhesive surface 18B of the excess portion 18C of one cushioning material 18, and is also attached to the surfaces (upper surfaces) on one side in the Z direction of the second X-direction outward extending portion 70e, the third folded portion 70f, and the Y-direction outward extending portion 70g of each of the first arm 68A and the third arm 68C, and one Y-direction connecting portion 72. The second X-direction outward extending portion 70e, the third folded portion 70f, and one Y-direction connecting portion 72 of each of the first arm 68A and the third arm 68C are disposed between the one cushioning material 18 and the one cover member 20. Similarly, the adhesive surface 20A of the other cover member 20 is attached to the second adhesive surface 18B of the excess portion 18C of the other cushioning material 18, and is also attached to one Z-direction side surface (top surface) of the second X-direction outward extending portion 70e, the third folded portion 70f, and the Y-direction outward extending portion 70g of each of the second arm 68B and the fourth arm 68D, and the other Y-direction connecting portion 72. The second X-direction outward extending portion 70e, the third folded portion 70f, and the Y-direction outward extending portion 70g of each of the second arm 68B and the fourth arm 68D, and the other Y-direction connecting portion 72 are disposed between the other cushioning material 18 and the other cover member 20. Note that the drawings do not show the adhesive surface 20A of the cover member 20 adhered to the second adhesive surface 18B of the excess portion 18C of the cushioning material 18.

[0072] (Actions and Effects of This Embodiment) Next, the operation and effects of this embodiment will be described.

[0073] 1, 2, and 4, in the actuator 10 described above, the mover 14 is supported by the elastic support 16, and when the coil 24 is not energized, the mover 14 is at the origin position shown in FIG. 4. In the actuator 10 of this embodiment, the coil 24 is fixed to the frame 22, and the magnet 52 and the like are provided on the mover 14. Therefore, when the coil 24 is energized, a thrust is generated in the mover 14 as a reaction force to the force generated by the coil 24. Then, when an alternating current is applied to the coil 24, the mover 14 vibrates in the up and down direction along the central axis AX.

[0074] Here, when the mover 14 is displaced relative to the mounting member 12, the deformation portion 60 of the elastic support 16 is flexibly deformed. When the deformation portion 60 of the elastic support 16 is flexibly deformed, the two buffer materials 18 provided between the mounting member 12 and the deformation portion 60 of the elastic support 16 are deformed. This makes it possible to damp vibration of the elastic support 16. Here, in this embodiment, the buffer materials 18 are provided between the mounting member 12 and the deformation portion 60 of the elastic support 16. As a result, in this embodiment, the amount of buffer material 18 used can be reduced compared to, for example, a configuration in which the elastic support 16 is configured to include a pair of spring materials and buffer materials formed in shapes corresponding to the pair of spring materials are adhered to one spring material and the other spring material.

[0075] In this embodiment, the first adhesive surface 18A and the second adhesive surface 18B of the cushioning material 18 are respectively adhered to the cushioning material attachment surface 46 of the frame 22 and the elastic support body 16. This allows the damping effect of the cushioning material 18 to be increased even if the area of ​​the cushioning material 18 as viewed in the thickness direction is reduced.

[0076] In addition, in this embodiment, the buffer material 18 is provided on the side of the deforming portion 60 of the elastic support 16 that faces the mounting-member-side fixed portion 56. That is, the buffer material 18 is provided on the side of the deforming portion 60 of the elastic support 16 that experiences smaller amplitude. Specifically, as shown in FIGS. 3B and 5 , the buffer material 18 is provided only in the portions of each of the arms 68A, 68B, 68C, and 68D that correspond to the second X-direction outward extending portion 70e, the third folded portion 70f, the Y-direction outward extending portion 70g, and the Y-direction connecting portion 72. This reduces the amount of deformation of the buffer material 18 compared to a configuration in which the buffer material 18 is provided closer to the mover-side fixed portion 58 than ... deterioration of the buffer material 18 due to repeated deformation. Furthermore, reducing the deterioration of the buffer material 18 due to repeated deformation reduces the change in the resonant frequency of the vibration system including the elastic support 16.

[0077] 3A and 3B, in this embodiment, the cover member 20 is attached to the second adhesive surface 18B of the excess portion 18C of the cushioning material 18, the second X-direction outward extending portion 70e, the third folded portion 70f, and the Y-direction outward extending portion 70g of each of the arms 68A, 68B, 68C, and 68D, and the surface (top surface) on one side in the Z direction of the Y-direction connecting portion 72. In this configuration, the excess portion 18C of the cushioning material 18 can be covered by the cover member 20. As a result, foreign matter such as dust can be prevented from adhering to the second adhesive surface 18B of the excess portion 18C of the cushioning material 18. In addition, the cover member 20 can provide a damping effect. This enhances the damping effect compared to a configuration in which only the cushioning material 18 is provided.

[0078] Furthermore, in this embodiment, the second X-direction outward extending portion 70e, the third folded portion 70f, the Y-direction outward extending portion 70g, and the Y-direction connecting portion 72 of each of the arms 68A, 68B, 68C, and 68D are configured to be sandwiched between the buffer material 18 and the cover member 20. This makes it possible to obtain not only the effect of the buffer material 18 in damping vibrations of the elastic support body 16, but also the effect of the cover member 20 in damping vibrations of the elastic support body 16. Furthermore, because vibrations can be damped by both the buffer material 18 and the cover member 20, the durability of the buffer material 18 can be improved compared to when only the buffer material 18 is provided.

[0079] Furthermore, in this embodiment, the cushioning material 18 is in a crushed state (compressed state) between the second X-direction outer extending portion 70e, the third folded portion 70f, the Y-direction outer extending portion 70g, and the Y-direction connecting portion 72 of each of the arms 68A, 68B, 68C, and 68D and the cushioning material adhering surface 46 of the frame 22. As a result, even when the second X-direction outer extending portion 70e, the third folded portion 70f, the Y-direction outer extending portion 70g, and the Y-direction connecting portion 72 of each of the arms 68A, 68B, 68C, and 68D deform toward the opposite side from the mounting member 12 (one side in the Z direction), the cushioning material 18 can maintain contact with the elastic support body 16 and the cushioning material 18 with the mounting member 12.

[0080] In this embodiment, each arm 68A, 68B, 68C, and 68D of the deformation portion 60 of the elastic support 16 includes a first X-direction outer extension portion 70a, a first folded portion 70b, an X-direction inner extension portion 70c, a second folded portion 70d, a second X-direction outer extension portion 70e, a third folded portion 70f, and a Y-direction outer extension portion 70g. This allows the length of each arm 68A, 68B, 68C, and 68D of the deformation portion 60 to be longer than in a configuration without the third folded portion 70f and the Y-direction outer extension portion 70g. This reduces the load on each arm 68A, 68B, 68C, and 68D and also reduces the load applied to the mover-side fixed portion 58 and the mounting member-side fixed portion 56, making metal fatigue less likely to occur. This improves the durability of each arm 68A, 68B, 68C, and 68D. Furthermore, compared to a configuration without the third folded portion 70f and the Y-direction outer extending portion 70g, the resonance frequency of the vibration system including the elastic support 16 can be lowered.

[0081] Furthermore, cushioning material is provided along the second X-direction outward extending portion 70e, the third folded portion 70f, and the Y-direction outward extending portion 70g. By providing the third folded portion 70f and the Y-direction outward extending portion 70g in this manner, cushioning material 18 can be easily disposed between each arm 68A, 68B, 68C, 68D and the mounting member 12 at a position where deformation of the arms 68A, 68B, 68C, 68D is small.

[0082] Furthermore, in this embodiment, the first arm 68A and the third arm 68C, which have the third folded portion 70f and the Y-direction outward extending portion 70g, are disposed on one side of the mover-side fixed portion 58 in the X direction and are formed symmetrically in the Y direction. The second arm 68B and the fourth arm 68D, which have the third folded portion 70f and the Y-direction outward extending portion 70g, are disposed on the other side of the mover-side fixed portion 58 in the X direction and are formed symmetrically in the Y direction. The first arm 68A and the second arm 68B are formed symmetrically in the X direction. The third arm 68C and the fourth arm 68D are formed symmetrically in the X direction. This increases the ratio of the lengths of the four arms 68A, 68B, 68C, and 68D to the area occupied by the elastic support 16 when viewed in the Z direction.

[0083] Furthermore, in this embodiment, two cushioning materials 18 are provided for each of the four arms 68A, 68B, 68C, and 68D. This allows for a reduction in the number of cushioning materials 18 compared to a configuration in which four cushioning materials 18 are provided for each of the four arms 68A, 68B, 68C, and 68D.

[0084] Furthermore, in this embodiment, the elastic support 16 includes a Y-direction connecting portion 72 that connects the third folded portion 70f of the first arm 68A to the third folded portion 70f of the third arm 68C in the Y direction, and also includes a Y-direction connecting portion 72 that connects the third folded portion 70f of the second arm 68B to the third folded portion 70f of the fourth arm 68D in the Y direction. This allows the flatness of the deformation portion 60 of the plate-shaped elastic support 16 in a free state to be improved compared to a configuration without the Y-direction connecting portion 72. In particular, the flatness of the deformation portion 60 when the elastic support 16 is press-molded can be improved. Furthermore, because the flatness of the deformation portion 60 is maintained, individual differences between parts are less likely to occur, and variations in the spring coefficient (variations in hardness and stiffness) can be suppressed.

[0085] Furthermore, in this embodiment, when the four mounting member-side fixed portions 56 of the elastic support 16 are fixed to the four base portions 40 of the frame 22, the four mounting member-side fixed portions 56 are unable to be separated from the four base portions 40 of the frame 22. This makes it possible to prevent changes in the contact state between the mounting member-side fixed portions 56 and the base portions 40 at their fixed portions. This makes it possible to prevent a shift in the resonance point of the elastic support 16 due to a change in the contact state between them.

[0086] In the example described above, the elastic support 16 includes a Y-direction connecting portion 72 that connects the third folded portion 70f of the first arm 68A to the third folded portion 70f of the third arm 68C in the Y direction, and a Y-direction connecting portion 72 that connects the third folded portion 70f of the second arm 68B to the third folded portion 70f of the fourth arm 68D in the Y direction. However, the present invention is not limited to this. For example, an elastic support 80 shown in FIGS. 6 and 7 may have a configuration that does not include a Y-direction connecting portion 72. In the elastic support 80 shown in FIGS. 6 and 7, portions corresponding to the elastic support 16 described above are denoted by the same reference numerals as the portions corresponding to the elastic support 16 described above.

[0087] Although the above-described example describes an example in which both surfaces of the elastic support 16 are entirely flat, the present invention is not limited thereto. For example, as in the elastic support 82 shown in FIG. 8 , a configuration may be adopted in which step portions 84 are formed at four locations corresponding to the end points 64 of the deformation portions 60. Furthermore, although not shown, a configuration may be adopted in which step portions are formed at two locations corresponding to the start points of the deformation portions of the elastic support. In the configuration shown in FIG. 8 , the mover-side fixed portion 58 and the deformation portion 60 are offset to one side in the Z direction relative to the four mounting member-side fixed portions 56. As shown in FIG. 8 , the step portions 84 are formed, and the mover-side fixed portion 58 and the deformation portion 60 are offset to one side in the Z direction relative to the mounting member-side fixed portions 56. However, they may also be offset to the other side in the Z direction. By providing the step portions 84, the step portions can serve as base points for the deformation portions 60, thereby reducing stress applied to the mounting member-side fixed portions 56. 8, by shaping the mover-side fixed portion 58 and the deformation portion 60 so that they are offset to one side in the Z direction relative to the mounting member-side fixed portion 56, it is possible to increase the degree of freedom in the thickness dimension of the buffer material and to widen the adjustment range of the damping effect of the buffer material while suppressing an increase in the height of the entire actuator. Note that the same reference numerals are used to denote parts of the elastic support 82 shown in FIG. 8 that correspond to the above-mentioned elastic support 16.

[0088] Furthermore, in the example described above, the four mounting member side fixed portions 56 are fixed to the four base portions 40 of the frame 22 by welding, respectively, but the present invention is not limited to this. For example, the four mounting member side fixed portions 56 may be detachably fixed to the four base portions 40 of the frame 22, respectively, using screws or the like.

[0089] Furthermore, in the example described above, a configuration in which two cushioning materials 18 are provided for four arms 68A, 68B, 68C, and 68D has been described, but the present invention is not limited to this. The numbers of arms 68A, 68B, 68C, and 68D and the number of cushioning materials 18 may be set appropriately taking into consideration the vibration characteristics required of the actuator 10, etc.

[0090] Furthermore, in the above-described example, the buffer material 18 is provided only in the portions of each arm 68A, 68B, 68C, and 68D corresponding to the second X-direction outward extending portion 70e, the third folded portion 70f, the Y-direction outward extending portion 70g, and the Y-direction connecting portion 72. However, the present invention is not limited to this. For example, the buffer material 18 may be provided closer to the movable-side fixed portion 58 than the above-described positions. In this manner, the position where the buffer material 18 is provided may be appropriately determined taking into consideration the durability required of the buffer material 18, etc. Furthermore, for example, the resonant frequency of the vibration system including the elastic support 16 may be adjusted by adjusting the dimension of the buffer material 18 in the X direction, etc. For example, as shown by the two-dot chain line in FIG. 3B , the dimension of the buffer material 18 in the Y direction from the end opposite the movable-side fixed portion 58 may be half the dimension 1 / 2W of the above-described example, or may be two-thirds the dimension 2 / 3W of the above-described example. In this case, as the dimension of the buffer material 18 in the Y direction from the end opposite the movable element side fixed portion 58 is shortened, the resonance frequency of the vibration system including the elastic support 16 can be lowered.

[0091] Furthermore, in the above-described example, an example in which the cover member 20 is provided has been described, but the present invention is not limited to this. Whether or not to provide the cover member 20 can be determined appropriately taking into consideration the type and size of foreign matter that is expected to adhere to the second adhesive surface 18B of the cushioning material 18, the vibration damping effect of the cover member 20 on the elastic support body 16, and the like.

[0092] Furthermore, in the above-described example, the entire surface of one side of the cover member 20 is an adhesive surface, but the present invention is not limited to this. For example, even if the cover member does not have an adhesive surface, it can be attached to the adhesive surface of a cushioning material. In this case, the damping effect can be enhanced by disposing a deformable portion between the cushioning material and the cover member. Furthermore, it is possible to provide an adhesive surface partially on one side of the cover member. For example, the adhesive surface can be provided only on the contact portion with the deformable portion, and this can be set appropriately taking into consideration the damping effect of the vibration of the elastic support body.

[0093] The above-described configuration can also be applied to an actuator configured to include elastic supports in which the arms 68A, 68B, 68C, and 68D have different configurations.

[0094] The above describes one embodiment of the present invention, but the present invention is not limited to the above, and it goes without saying that it can be implemented in various other modified forms within the scope of the gist of the present invention. [Explanation of symbols]

[0095] 10 Actuator 12 Mounting material 14 Mover 16 Elastic support 18 Cushioning material 18B 2nd adhesive surface (adhesive surface) 18C Surplus 20 Cover member 24 coils 52 Magnet 56 Mounting member side fixed part 58 Mover side fixed part 60 Shape Department 68A アーム 68B アーム 68C アーム 68D アーム 70a Lateral extension in the first X direction 70b First Turnaround Section 70c Inner extension in the X direction 70d Second Turnaround Section 70e Second X-direction lateral elongation 70f Third Turnaround Section 70g Y-direction lateral elongation 72 Y direction connection part 80 elastic support

Claims

1. a mounting member including a coil; a mover having a magnet disposed opposite to the coil, the mover being displaced relative to the mounting member when current is applied to the coil; an elastic support having a mounting member-side fixed portion fixed to the mounting member, a mover-side fixed portion fixed to the mover, and a deformable portion connecting the mounting member-side fixed portion and the mover-side fixed portion; a buffer material provided between the mounting member and the deformation portion, the buffer material deforming in accordance with the flexural deformation of the deformation portion; Equipped with the elastic support body and the buffer material are disposed so as to be overlapped with each other in a thickness direction, The cushioning material has an adhesive surface on the side of the deformation portion that is bonded to the deformation portion, the buffer material has an excess portion that does not overlap the deformed portion when viewed in a thickness direction thereof, Further, a cover member is provided, the deformation portion is disposed between the cover member and the cushioning material, The actuator has the cover member attached to the excess portion.

2. 2. The actuator according to claim 1, wherein the buffer material has an adhesive surface on the side of the mounting member that is bonded to the mounting member.

3. 3. The actuator according to claim 1, wherein the cover member has an adhesive surface that is adhered to the deformation portion and the buffer material.

4. 4. The actuator according to claim 1, wherein the buffer material is provided in a compressed state between the mounting member and the deformation portion.

5. 5. The actuator according to claim 1, wherein the buffer material is provided on the mounting member-side fixed portion side of the deformation portion.

6. When the displacement direction of the mover is defined as ±Z direction, and the directions perpendicular to each other in a plane perpendicular to the ±Z direction are defined as X direction and Y direction, the deformation portion includes an arm extending between the mover-side fixed portion and the mounting member-side fixed portion, The arm a first X-direction outer extending portion extending outward in the X-direction from the mover-side fixed portion; a first folded portion formed closer to the mounting member-side fixed portion than the first X-direction outer extending portion, and whose extending direction is folded from the outer side in the X-direction to the inner side in the X-direction; an X-direction inner extending portion extending inward in the X-direction from the first folded portion; a second folded portion formed closer to the mover-side fixed portion than the X-direction inner extending portion, and whose extending direction is folded from the X-direction inner side to the X-direction outer side; a second X-direction outer extending portion extending outward in the X-direction from the second folded portion; a third folded portion formed closer to the mounting member-side fixed portion than the second X-direction outer extending portion, and whose extending direction is folded back from the outer side in the X direction to the outer side in the Y direction; a Y-direction outer extending portion extending outward in the Y-direction from the third folded portion and connected to the mounting member side fixed portion; Equipped with The actuator according to claim 5 , wherein the buffer material is provided along the second X-direction outward extending portion, the third folded portion, and the Y-direction outward extending portion.

7. Two of the buffer materials are provided, the elastic support body includes four of the mounting member-side fixed portions and four of the arms, Two of the four arms are disposed on one side in the X direction with respect to the movable element side fixed portion and are formed symmetrically in the Y direction, the other two of the four arms are disposed on the other side in the X direction with respect to the mover-side fixed portion and are formed symmetrically in the Y direction, one of the buffer materials is provided along the second X-direction outer extending portion, the third folded portion, and the Y-direction outer extending portion of the two arms arranged on one side in the X direction with respect to the mover-side fixed portion, 7. The actuator according to claim 6, wherein the other buffer material is provided along the second X-direction outer extension portion, the third folded portion, and the Y-direction outer extension portion of the two arms arranged on the other side in the X direction with respect to the movable element side fixed portion.

8. The deformation portion is formed in a plate shape, a Y-direction connecting portion that connects in the Y direction the third folded portions of the two arms that are arranged on one side in the X direction with respect to the movable member-side fixed portion, and a Y-direction connecting portion that connects in the Y direction the third folded portions of the two arms that are arranged on the other side in the X direction with respect to the movable member-side fixed portion, one of the buffer materials is provided along one of the Y-direction connecting portions, The actuator according to claim 7 , wherein the other of the buffer materials is provided along the other of the Y-direction connecting portions.

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